Fluid regulating device and mass flow controller

Abstract

Provided in the present disclosure are a fluid regulating device and a mass flow controller. The device comprises a plurality of plate-like members with fixed relative positions, the plurality of plate-like members being stacked in the normal direction of the plate-like members. Each plate-like member is provided with a hollow portion, and the hollow portions of the plurality of plate-like members are correspondingly provided in the normal direction of the plate-like members, thereby forming a fluid channel for a fluid to pass through in the normal direction of the plate-like members. By using the characteristics of being flat and thin of single plate-like members, a hollow portion can be easily machined in each single plate-like member, and it is also easy to make a machined hollow portion comprise a larger number of through holes, such that the present solution reduces the manufacturing difficulty, can easily implement small size and large flow rate, can improve the precision, consistency and repeatability in the flow splitting effect of the fluid regulating device, and is applicable to mass flow controllers of various sizes.

Description

Fluid regulating device and mass flow controller TECHNICAL FIELD

[0001] The present application relates to the field of semiconductor manufacturing, and in particular, to a fluid regulating device and a mass flow controller. BACKGROUND

[0002] A mass flow controller (MFC) is an instrument for precisely measuring and controlling the mass flow of fluids (including gases and liquids). They have important applications in the research and production of many fields such as semiconductor microelectronics industry, special material development, chemical industry, petroleum industry, medicine, environmental protection, and vacuum.

[0003] The fluid regulating device can be used at least for splitting a fluid (e.g., a gas or a liquid) (i.e., as a splitting device) or realizing laminar flow on the basis of splitting (i.e., as a laminar flow device). The fluid regulating device, as a key component of a mass flow controller, has an important influence on the parameters of the entire product such as precision, linearity, and repeatability. However, the existing fluid regulating device has problems of large volume, difficult manufacturing, poor precision, consistency, and repeatability when applied to a mass flow controller (MFC) with a large flow (e.g., more than 100 L / min). SUMMARY

[0004] The present application aims to at least solve one of the technical problems in the prior art, and proposes a fluid regulating device and a mass flow controller, which can solve the problems of large volume, difficult manufacturing, poor precision, consistency, and repeatability in the prior art.

[0005] To achieve the purpose of the present application, a fluid regulating device is provided, which includes a plurality of sheet-shaped members with fixed relative positions, the plurality of sheet-shaped members are stacked along the normal direction of the sheet-shaped members, each of the sheet-shaped members is formed with a hollow part, and the hollow parts of the plurality of sheet-shaped members are correspondingly arranged along the normal direction of the sheet-shaped members to form a fluid channel for the fluid to pass along the normal direction of the sheet-shaped members.

[0006] In some embodiments, the fluid regulating device is a splitting device, the hollow part of each of the sheet-shaped members includes at least one through hole, and the sum of the areas of all the through holes of each of the sheet-shaped members and / or the number of the sheet-shaped members are associated with the flow of the fluid passing through the splitting device.

[0007] In some embodiments, the fluid regulating device is a laminar flow device, the hollow part of each of the sheet-shaped members includes at least one through hole, and the shape of the through hole is in the form of a slit.

[0008] In some embodiments, the length of the fluid channel in the normal direction is greater than 60 times the equivalent diameter of each through hole.

[0009] In some embodiments, the hollowed portion of each sheet-shaped piece comprises at least one group of through hole groups, and multiple groups of the through hole groups are distributed along the circumferential direction of the sheet-shaped piece; each group of the through hole groups comprises multiple through holes, and the multiple through holes are distributed along the direction from the center to the edge of the sheet-shaped piece.

[0010] In some embodiments, one of the extension directions of the through hole is a preset extension direction, and the preset extension direction is parallel to the partial edge profile of the sheet-shaped piece corresponding to the through hole group in which the through hole is located.

[0011] In some embodiments, the cross-sectional shape of the sheet-shaped piece perpendicular to the normal direction of the sheet-shaped piece is circular, the cross-sectional shape of the through hole perpendicular to the normal direction of the sheet-shaped piece is circular arc, and the preset extension direction is the circular arc extension direction of the through hole; or,

[0012] The cross-sectional shape of the sheet-shaped piece perpendicular to the normal direction of the sheet-shaped piece is polygonal, the cross-sectional shape of the through hole perpendicular to the normal direction of the sheet-shaped piece is straight line or broken line, and the preset extension direction is the straight line or broken line extension direction of the through hole.

[0013] In some embodiments, the length of the multiple through holes in each group of the through hole groups in the preset extension direction increases along the direction from the center to the edge of the sheet-shaped piece.

[0014] In some embodiments, the fluid regulating device further comprises multiple regulating gaskets, and at least one regulating gasket is stacked on each side of the multiple sheet-shaped pieces in the normal direction;

[0015] Each regulating gasket on the same side is correspondingly formed with an opening penetrating through the regulating gasket along the normal direction, and the opening is in communication with the hollowed portion.

[0016] In some embodiments, the hollowed portion of each sheet-shaped piece comprises at least one group of through hole groups, and multiple groups of the through hole groups are distributed along the circumferential direction of the sheet-shaped piece; each group of the through hole groups comprises multiple through holes;

[0017] The number of the openings of each regulating gasket is the same as the number of the through hole groups of each sheet-shaped piece, each opening corresponds to one of the through hole groups, and each opening is in communication with each through hole in the corresponding through hole group.

[0018] In some embodiments, the fluid regulating device further comprises a connecting rod;

[0019] Each of the sheet-shaped pieces is formed with a first mounting hole, each of the adjusting washers is formed with a second mounting hole, and each of the second mounting holes is arranged corresponding to each of the first mounting holes;

[0020] The connecting rod is arranged in the plurality of first mounting holes and the plurality of second mounting holes, and the connecting rod, the second mounting holes and the first mounting holes are all non-circular in cross-sectional shape perpendicular to the normal direction.

[0021] In some embodiments, the non-circular shape includes a polygon.

[0022] In some embodiments, the second mounting holes and the first mounting holes of the polygon are provided with counterbores at the corners.

[0023] In some embodiments, the fluid adjusting device further comprises two fixing members, the two fixing members are respectively located at two ends of the connecting rod and are fixedly connected with the connecting rod, so as to fix the plurality of sheet-shaped pieces and the plurality of adjusting washers between the two fixing members.

[0024] In some embodiments, the fixing member comprises a connecting column and a fixing plate arranged at one end of the connecting column.

[0025] The two ends of the connecting rod are provided with connecting holes, the connecting column is arranged in the connecting hole and is fixedly matched with the connecting hole, and the fixing plate is stacked on the end surface of the connecting rod.

[0026] The connecting rod is further provided with a drainage channel, one end of the drainage channel is communicated with the connecting hole, and the other end of the drainage channel extends to the peripheral wall of the connecting rod.

[0027] In some embodiments, the thickness of the sheet-shaped piece in the normal direction is greater than or equal to 0.1 mm and less than or equal to 1 mm.

[0028] In some embodiments, the thickness of the adjusting washer in the normal direction is greater than or equal to 0.1 mm and less than or equal to 1 mm.

[0029] As another technical solution, the application further provides a mass flow controller, comprising a measuring main body, two branches are arranged in the measuring main body, one of the branches is provided with a flow sensor, and the other branch is provided with the above-mentioned fluid adjusting device.

[0030] The application has the following beneficial effects:

[0031] The fluid regulating device provided in the application stacks a plurality of sheet-shaped pieces along the normal direction of the sheet-shaped pieces and fixes the relative positions of the sheet-shaped pieces, each of the sheet-shaped pieces is formed with a hollowed part, and the hollowed parts of the plurality of sheet-shaped pieces are correspondingly arranged along the normal direction of the sheet-shaped pieces to form a fluid passage for the fluid to pass along the normal direction of the sheet-shaped pieces. Since the single sheet-shaped piece has the characteristics of being flat and thin, the hollowed part of the single sheet-shaped piece is machined, and then the plurality of sheet-shaped pieces are stacked together, the hollowed parts of the plurality of sheet-shaped pieces can form a long and narrow through hole, which is easier to realize than the machining of the long and narrow through hole of the traditional cylindrical flow divider, and it is also easy to realize that the hollowed part machined on the single sheet-shaped piece contains a larger number of through holes. The larger the fluid passing area of the hollowed part and the larger the number of through holes contained in the hollowed part, the larger the flow rate. Therefore, it is easy to manufacture a fluid regulating device with small volume and large flow rate, greatly reducing the manufacturing difficulty of the fluid regulating device. In addition, the stacked mode of the plurality of sheet-shaped pieces is easier to install and fix, thereby reducing the installation difficulty. In addition, since the thickness of the single sheet-shaped piece is very small, the machining consistency and dimensional accuracy of the single sheet-shaped piece are easier to control, thereby improving the accuracy, consistency and repeatability of the fluid regulating device. On this basis, the stacked mode of the plurality of sheet-shaped pieces can easily change the length of the fluid regulating device by changing the number of sheet-shaped pieces, thereby being applicable to mass flow controllers of different sizes.

[0032] The mass flow controller provided in the application adopts the above-mentioned fluid regulating device provided in the application, utilizes the characteristics of the single sheet-shaped piece being flat and thin, easily machines the hollowed part on the single sheet-shaped piece, and easily realizes that the machined hollowed part contains a larger number of through holes. Therefore, not only is the manufacturing difficulty low, but also it is easy to realize that the fluid regulating device has small volume and large flow rate, can improve the accuracy, consistency and repeatability of the fluid regulating device, and is applicable to mass flow controllers of different sizes. BRIEF DESCRIPTION OF DRAWINGS

[0033] FIG. 1 is a working principle diagram of a traditional mass flow controller;

[0034] FIG. 2 is a curve diagram of the output signal of the flow sensor and the gas flow through the capillary tube;

[0035] FIG. 3 is a perspective view of a fluid regulating device provided in an embodiment of the application;

[0036] FIG. 4 is a front view of a circular sheet-shaped piece adopted in the embodiment of the application;

[0037] FIG. 5 is a front view of a fluid regulating device provided in an embodiment of the application;

[0038] FIG. 6 is a sectional view along line A-A in FIG. 5;

[0039] FIGS. 7 to 10 are front views of four square sheet-shaped pieces adopted in the embodiment of the application;

[0040] Fig. 11 is a front view of an adjusting gasket used in the embodiment of the present application;

[0041] Fig. 12 is a side view of a connecting rod used in the embodiment of the present application;

[0042] Fig. 13 is a sectional view along line B-B of Fig. 12;

[0043] Fig. 14 is a front view of a connecting rod used in the embodiment of the present application;

[0044] Fig. 15 is a perspective view of a fixing member used in the embodiment of the present application;

[0045] Fig. 16 is a partial sectional view of a mass flow controller provided by the embodiment of the present application. DETAILED DESCRIPTION

[0046] To make the skilled in the art better understand the technical solutions of the present application, the fluid regulating device and the mass flow controller provided by the present application are described in detail below in combination with the drawings.

[0047] The fluid regulating device provided by the embodiment of the present application is at least used for splitting a fluid (for example, a gas or a liquid) or realizing laminar flow on the basis of splitting. The fluid regulating device is for example applied to an MFC, is arranged in a corresponding branch of the MFC, and can play a role of splitting or make the fluid realize laminar flow on the basis of splitting. However, the embodiment of the present application is not limited thereto, and the fluid regulating device provided by the embodiment of the present application can also be applied to other devices which need to split or realize laminar flow on the basis of splitting.

[0048] As shown in Fig. 1, the working principle of a conventional MFC is that a fluid enters an inflow channel 101c of a measuring body 101 of the MFC from an inlet 101a of the measuring body 101, and is split into two paths under the splitting action of a fluid regulating device 200 in a branch downstream of the inflow channel 101c, one path of fluid directly passes through the fluid regulating device 200, and the other path of fluid passes through another branch 301 (i.e., a capillary tube of a flow sensor 300), then the two paths of fluid are combined after flowing into an electromagnetic regulating valve 400 from an outflow channel 101d located at the rear end of the fluid regulating device 200, and the fluid is regulated in flow by the electromagnetic regulating valve 400 and then flows out from an outlet 101b of the measuring body 101. The flow sensor 300 is used for measuring the flow of the fluid passing through the branch 301, and the obtained flow signal is sent to an amplifier 302 for amplification. The relationship between the output signal of the flow sensor 300 and the flow (Flow) of the gas flowing through the branch 301 is shown in Fig. 2, when the flow of the fluid passing through the branch 301 is less than or equal to 10 sccm (standard cubic centimeter per minute, equivalent to ml / min), the output signal of the flow sensor 300 is linear with the flow of the fluid passing through the branch 301, and when the flow of the fluid passing through the branch 301 is greater than 10 sccm, the output signal of the flow sensor 300 is not linear with the flow of the fluid passing through the branch 301. nThe output signal is approximately directly proportional to the fluid flow rate through branch 301. However, when the fluid flow rate through branch 301 exceeds 10 sccm, the relationship between the output signal and the fluid flow rate through branch 301 becomes non-linear as the fluid flow rate through branch 301 increases. Therefore, within the full-scale flow range, to ensure the required measurement accuracy, the fluid flow rate through branch 301 must be controlled to be less than or equal to 10 sccm.

[0049] The fluid regulating device 200 has two functions. First, it diverts the flow to maintain a specific flow ratio between the fluid flowing through branch 301 and the fluid flowing directly through the regulating device 200. Based on this flow ratio and the flow rate of the fluid in branch 301 detected by the flow sensor 300, the flow rate of the fluid passing through the regulating device 200 can be calculated. Second, it ensures that the fluid passing through the regulating device 200 is in a laminar flow state to guarantee the measurement accuracy of the MFC.

[0050] The flow splitting principle of the fluid regulating device 200 is as follows: assuming the flow rate specification of the MFC is Q. max When MFC is at full capacity (i.e., the current flow Q = Q), max When in operation, the fluid flow rate through branch 301 (i.e., the capillary tube of the flow sensor) is q. max Then the fluid flow rate Q flowing through the fluid regulating device 200 fmax =Q max -q max Therefore, the fluid flow rate q flowing through branch 301 can be calculated. max The fluid flow rate Q flowing through the fluid regulating device 200 fmax The ratio i, when MFC is in any flow Q (0≤Q≤Q) max When the fluid flow rate through branch 301 is q, and the ratio i is a constant, that is, the ratio i satisfies the following relationship:

[0051] By performing an equation transformation on the above relation, we can obtain:

[0052] From the converted relationship, it can be seen that, under the precondition that q is constant, if the ratio i changes, Q will change accordingly, so that MFCs of different specifications can be obtained. However, for a MFC with a large flow rate (for example, more than 100 L / min), since the fluid regulating device 200 not only needs to have a large enough flow rate of the fluid flowing therethrough to meet the ratio i, but also needs to have the fluid in a laminar flow state to ensure the measurement accuracy of the MFC, a mechanical structure with a very large size is required. The excessively large size of the mechanical structure not only increases the cost, but also increases the difficulty of processing the long and narrow channel in the fluid regulating device 200, that is, increases the difficulty of realizing the laminar flow state of the fluid, and also has the problems of poor precision, consistency and repeatability.

[0053] To solve at least one of the above technical problems, the embodiments of the present application provide a fluid regulating device which can be applied to a mass flow controller with a large flow rate (for example, more than 100 L / min), and has the advantages of but not limited to small size, simple production and manufacturing, high precision, good repeatability and consistency, and the like, so as to effectively improve the overall performance of the mass flow controller.

[0054] Specifically, with reference to FIGS. 3 to 6, the fluid regulating device 500 provided by the embodiments of the present application includes a plurality of sheet-shaped members 1 with fixed relative positions, and the plurality of sheet-shaped members 1 are stacked along the normal direction of the sheet-shaped members 1. A single sheet-shaped member 1 has the characteristics of being flat and thin, and the normal direction of the sheet-shaped member 1 is the direction perpendicular to the plane on which the sheet-shaped member 1 is located, that is, parallel to the X axis in FIG. 3. The plurality of sheet-shaped members 1 with fixed relative positions means that the plurality of sheet-shaped members 1 stacked together are arranged to have no relative motion, for example, cannot rotate relative to each other, and also cannot move relative to each other along the normal direction or other directions.

[0055] Each sheet 1 is formed with a hollowed part 11, as shown in FIG. 6, and the hollowed parts 11 of the plurality of sheets 1 are arranged correspondingly along the normal direction of the sheets 1 to form a fluid passage 12 for the fluid to pass along the normal direction of the sheets 1. The hollowed part 11 includes at least one through hole 111 that penetrates the sheet 1 along the normal direction, that is, all the through holes 111 on each sheet 1 together form the hollowed part 11. In some examples, the hollowed parts 11 of the plurality of sheets 1 can be identical in structure, specifically, the number, shape, size and distribution of the through holes 111 included in the hollowed parts 11 of the plurality of sheets 1 are identical, and each through hole 111 of the plurality of sheets 1 correspondingly forms at least one sub-passage 121 along the normal direction of the sheets 1, and the at least one sub-passage 121 together forms the fluid passage 12. That is, each through hole 111 of each sheet 1 forms a sub-passage 121 with the corresponding through hole 111 of another sheet 1, if there is only one through hole 111 on each sheet 1, the sub-passage 121 formed by the through hole 111 and the through hole 111 of another sheet 1 is the fluid passage 12; if there are multiple through holes 111 on each sheet 1, the through holes 111 and the corresponding through holes 111 of another sheet 1 form multiple sub-paths 121, and the multiple sub-paths 121 together form the fluid passage 12. Conversely, the fluid passage 12 is formed by at least one sub-passage 121, and each sub-passage 121 is formed by the corresponding through holes 111 of the plurality of sheets 1.

[0056] In some embodiments, when the hollowed parts 11 of the plurality of sheets 1 are identical in structure, the shape and size of the fluid passage 12 formed by the hollowed parts 11 of the plurality of sheets 1 are identical in the normal direction of the sheets 1 when the plurality of sheets 1 are stacked together. In this way, the fluid passage 12 can be manufactured by batch processing the same structure of sheets 1, then stacking them along the normal direction and fixing their relative positions, greatly reducing the processing difficulty and cost.

[0057] In other embodiments, the hollowed parts 11 of the plurality of sheets 1 are different in structure, specifically, the shapes can be the same but the sizes are different, in which case the cross-sectional shape of the fluid passage 12 formed by the hollowed parts 11 of the plurality of sheets 1 perpendicular to the normal direction of the sheets 1 is identical in the normal direction, but the area of the cross-section is different in the normal direction of the sheets 1. Alternatively, the hollowed parts 11 of the plurality of sheets 1 can also be different in shape and size, in which case the cross-sectional shape of the fluid passage 12 formed by the hollowed parts 11 of the plurality of sheets 1 perpendicular to the normal direction of the sheets 1 is different in the normal direction, and the area of the cross-section is also different in the normal direction of the sheets 1. Different means at least partially different.

[0058] Since the single sheet 1 has the characteristics of being flat and thin, by machining the single sheet 1 and the hollowed part 11 thereof, and then stacking a plurality of sheets 1 together, the hollowed parts 11 of the plurality of sheets 1 can form the long and narrow through hole (i.e., the fluid passage 12), which is easier to achieve than the machining of the long and narrow through hole of the traditional cylindrical flow divider, and it is also easy to achieve that the hollowed part 11 machined on the single sheet 1 contains a larger number of through holes 111. The greater the fluid passing area of the hollowed part 11 and the more the number of through holes contained, the greater the flow rate, so it is easy to manufacture a fluid regulating device with small volume and large flow rate, greatly reducing the manufacturing difficulty of the fluid regulating device. In addition, the stacking mode of the plurality of sheets 1 is easier to install and fix, thereby reducing the installation difficulty. Furthermore, since the thickness of the single sheet 1 is very small, the machining consistency and dimensional accuracy of the single sheet 1 are easier to control, thereby improving the accuracy, consistency and repeatability of the fluid regulating device. On this basis, the stacking mode of the plurality of sheets 1 can easily change the length of the fluid regulating device 500 by changing the number of sheets 1, thereby being applicable to mass flow controllers of different sizes.

[0059] In some embodiments, in order to facilitate the machining of the single sheet 1, the thickness of the sheet 1 in the normal direction of the sheet 1 is greater than or equal to 0.1 mm and less than or equal to 1 mm, for example, the thickness of the sheet 1 in the normal direction of the sheet 1 is 0.1 mm, 0.2 mm, 0.45 mm, 0.6 mm, 0.85 mm, 0.9 mm or 1 mm, etc.

[0060] In some embodiments, the fluid regulating device 500 provided by the embodiments of the present application can be a flow dividing device for dividing fluid, or a laminar flow device for realizing laminar flow of fluid. It is easy to understand that the laminar flow device also has the function of flow dividing, i.e., it realizes laminar flow of fluid on the basis of having the function of flow dividing. For example, the fluid regulating device 500 can be a laminar flow device, which has two functions when applied to an MFC. One function is to divide the flow, so that the fluid in the branch where the flow sensor of the MFC is located has a certain flow rate ratio with the fluid that directly passes through the fluid regulating device 500. According to this flow rate ratio and the fluid flow rate of the branch detected by the flow sensor, the fluid flow rate passing through the fluid regulating device 500 can be obtained. The other function is to make the fluid passing through the fluid regulating device 500 in a laminar flow state, so as to ensure the measurement accuracy of the MFC. It is easy to understand that when the fluid regulating device 500 is a flow dividing device, it can be applied to equipment that needs to divide fluid, and the equipment does not require the fluid to be in a laminar flow state.

[0061] In the case that the fluid regulating device 500 is a flow splitting device, in some embodiments, the hollow part 11 of each sheet 1 comprises at least one through hole 111, and the ratio of the sum of the areas of all the through holes 111 of each sheet 1 to the area of the sheet 1 and / or the number of the sheets 1 is associated with the flow rate of the fluid flowing through the flow splitting device (i.e. the fluid regulating device 500). Specifically, the area of the sheet 1 is the total area of the cross section of the sheet 1 in the direction perpendicular to the normal direction of the sheet 1, and a part of the cross section is hollow, i.e. the part where the hollow part 11 is located, and the ratio of the area of the part to the total area of the cross section is the ratio of the sum of the areas of all the through holes 111 of each sheet 1 to the area of the sheet 1. Under the condition that the total area is constant, the larger the ratio, the larger the flow rate of the flow splitting device (i.e. the fluid regulating device 500); on the contrary, the smaller the ratio, the smaller the flow rate of the flow splitting device (i.e. the fluid regulating device 500). As shown in FIG. 6, the number of the sheets 1 determines the length L of the fluid channel 12 in the direction perpendicular to the normal direction of the sheet 1, and the length L is associated with the fluid resistance of the fluid flowing through the flow splitting device (i.e. the fluid regulating device 500), the smaller the length L, the smaller the fluid resistance, and the larger the flow rate of the flow splitting device (i.e. the fluid regulating device 500); on the contrary, the larger the length L, the larger the fluid resistance, and the smaller the flow rate of the flow splitting device (i.e. the fluid regulating device 500). Thus, according to the actual demand for the flow rate of the flow splitting device (i.e. the fluid regulating device 500), the ratio of the sum of the areas of all the through holes 111 of each sheet 1 to the area of the sheet 1 and / or the number of the sheets 1 can be set to obtain the desired flow rate of the flow splitting device (i.e. the fluid regulating device 500).

[0062] In the case that the fluid regulating device 500 is a laminar flow device, in some embodiments, the hollow part 11 of each sheet 1 comprises at least one through hole 111, and the shape of the through hole 111 is in the shape of a slit, i.e. the through hole 111 is a narrow and long through hole. By making the shape of the through hole 111 in the shape of a slit, under the condition that the through hole 111 meets certain shape and size conditions, the fluid flowing through can be in a laminar flow state. For example, in the case that the laminar flow device (i.e. the fluid regulating device 500) is applied to an MFC, the laminar flow device can ensure the measurement accuracy of the MFC by making the fluid flowing through in a laminar flow state. It is easy to understand that, by setting the above-mentioned ratio and / or the number of the sheets 1 to obtain the desired ratio i, and by making the shape of the through hole 111 in the shape of a slit to realize the fluid flowing through in a laminar flow state, the MFC with the desired specifications and accuracy can be obtained.

[0063] In some embodiments, as shown in FIG. 5 and FIG. 6, the length L of the fluid passage 12 in the normal direction is greater than 60 times the equivalent diameter of each through hole 111, and the length L and the equivalent diameter of each through hole 111 meeting the condition can make the fluid flowing through each through hole 111 in a laminar flow state. It is easy to understand that the length L of the fluid passage 12 in the normal direction is the total thickness of all sheet-shaped pieces 1 in the normal direction, and the number of sheet-shaped pieces 1 determines the size of the total thickness, and the number of sheet-shaped pieces 1 is also associated with the flow rate of the fluid flowing through the laminar flow device. Therefore, in the case of application to the MFC, by selecting appropriate values of the length L and the equivalent diameter of each through hole 111 under the premise of meeting the above condition, the fluid flowing through the laminar flow device can be in a laminar flow state, so as to ensure the measurement accuracy of the MFC, and at the same time, the desired specific value i can be obtained to obtain the MFC of the desired specification. In some examples, if it is necessary to increase the flow rate of the fluid flowing through the laminar flow device as much as possible, so that the laminar flow device can be applied to the MFC with a large flow rate (for example, more than 100 L / min), then the length L needs to be reduced and / or the equivalent diameter of the through hole 111 needs to be increased under the premise of meeting the above condition.

[0064] It should be noted that the equivalent diameter of each through hole 111 in the form of a slit refers to the diameter of a circular channel with the same hydraulic radius. The hydraulic radius is equal to the ratio of the effective cross-sectional area of each through hole 111 to the wet perimeter length, which is the wall perimeter length of each through hole 111 in contact with the fluid.

[0065] Specifically, as shown in FIG. 5, taking the circular arc shape of the cross-sectional shape of each through hole 111 perpendicular to the normal direction as an example, the hydraulic radius ri is equal to the ratio of the cross-sectional area Ai (i.e., the effective cross-sectional area) of each through hole 111 perpendicular to the normal direction to the wet perimeter length Li (the hole wall perimeter length of each through hole 111 in contact with the fluid), and the equivalent diameter D of each through hole 111 is equal to four times the hydraulic radius ri. The above hydraulic radius ri can be calculated by the relationship ri = Ai / Li to be approximately equal to one half of the radial width δ of each through hole 111, so as to calculate D = 2δ. On this basis, based on the condition of length L > 60D, L > 120δ can be obtained. Therefore, under the condition that the length L is determined, by setting the radial width δ of each through hole 111 to meet the condition that the length L is greater than 120 times the radial width δ, the fluid flowing through each through hole 111 can be in a laminar flow state. For example, if L = 25.4 mm, then δ < 0.21 mm.

[0066] It is easy to understand that in the present embodiment, the equivalent diameter D of each through hole 111 is equal at each position in the normal direction of the sheet member 1, but the present embodiment is not limited to this, and in actual applications, the equivalent diameter D of each through hole 111 can also be different at each position in the normal direction of the sheet member 1, in which case, the maximum value of the equivalent diameter D of each through hole 111 at each position in the normal direction of the sheet member 1 is used for the calculation, because if the position of the maximum value of the equivalent diameter D of each through hole 111 satisfies the laminar flow condition, then the positions of the other equivalent diameters D of the through hole 111 must satisfy the laminar flow condition.

[0067] On this basis, the structures of the through holes 111 of the plurality of sheet members 1 can be the same or different. In the case where the structures of the through holes 111 of the plurality of sheet members 1 are the same and the equivalent diameter D of each through hole 111 is equal at each position in the normal direction of the sheet member 1, the equivalent diameter D of the sub channel 121 formed by the through holes 111 of the plurality of sheet members 1 is equal at each position in the normal direction of the sheet member 1. In the case where the structures of the through holes 111 of the plurality of sheet members 1 are the same and the equivalent diameter D of each through hole 111 is different at each position in the normal direction of the sheet member 1, the equivalent diameter D of the sub channel 121 is different at each position in the normal direction of the sheet member 1, in which case, the maximum value of the equivalent diameter D of the sub channel 121 at each position in the normal direction of the sheet member 1 is used for the calculation. This method is also applicable to the case where the structures of the through holes 111 of the plurality of sheet members 1 are different.

[0068] It should be noted that the structures of the through holes 111 of the plurality of sheet members 1 can be different, and can be different in size while being the same in shape. In this case, the cross-sectional shape of the sub-passage 121 formed by the through holes 111 of the plurality of sheet members 1 is the same everywhere in the normal direction of the sheet member 1, but the equivalent diameter D is different in the normal direction of the sheet member 1. Alternatively, the structures of the through holes 111 of the plurality of sheet members 1 can be different in both shape and size. In this case, the cross-sectional shape of the sub-passage 121 formed by the through holes 111 of the plurality of sheet members 1 is different everywhere in the normal direction of the sheet member 1, and the equivalent diameter D is also different in the normal direction of the sheet member 1. It is easy to understand that even if the structures of the through holes 111 of the plurality of sheet members 1 are different, if the position where the maximum value of the equivalent diameter D of the sub-passage 121 formed by the through holes 111 satisfies the laminar flow condition, then the positions where the other equivalent diameters D of the sub-passage 121 are relatively small must satisfy the laminar flow condition. In addition, the shapes of the through holes 111 of the plurality of sheet members 1 can be different, but all are in the form of a slit to satisfy the laminar flow condition. The through holes 111 in the form of a slit include, for example, a circular arc-shaped through hole, a straight line-shaped through hole, a zigzag-shaped through hole, and the like, and specifically, in the present embodiment, the cross-sectional shape of each through hole 111 in the form of a slit in the normal direction of the above-mentioned normal direction is a predetermined shape, and in the present embodiment, the predetermined shape can be a circular arc shape. However, the present embodiment is not limited to this, and in actual applications, the predetermined shape can be, but is not limited to, a straight line shape, a zigzag shape, and the like. Under the premise of satisfying the laminar flow condition, the through holes 111 of the plurality of sheet members 1 can be one or a combination of a plurality of these through holes.

[0069] In some embodiments, regardless of whether the fluid regulating device 500 is a flow splitting device or a laminar flow device, the requirement of large flow application scenarios can be met by increasing the proportion of the sum of the areas of all the through holes 111 of each sheet 1 in the area of the sheet 1, on the condition that the area of the sheet 1 (i.e. the cross-sectional area perpendicular to the normal direction thereof) is the same. For a laminar flow device applied to an MFC, the requirement of a large flow MFC can be met by increasing the proportion. There are various ways to increase the proportion. In some embodiments, the hollow part 11 of each sheet 1 includes at least one group of through holes, for example, three groups of through holes 11a, 11b and 11c are shown in FIG. 4, and the multiple groups of through holes are distributed along the circumferential direction of the sheet 1 at intervals; each group of through holes includes multiple through holes 111, and the multiple through holes 111 are distributed along the direction from the center of the sheet 1 to the edge at intervals. In this way, the through holes 111 are distributed along the circumferential direction and the radial direction (i.e. the direction from the center of the sheet 1 to the edge) of the sheet 1, thereby facilitating the increase of the proportion. In some examples, the multiple groups of through holes are uniformly distributed along the circumferential direction of the sheet 1, so as to improve the uniformity of the distribution of the through holes 111 along the circumferential direction of the sheet 1. In some examples, the multiple through holes 111 are equally spaced along the direction from the center of the sheet 1 to the edge, so as to improve the uniformity of the distribution of the through holes 111 along the radial direction of the sheet 1.

[0070] Further, in some embodiments, in order to further increase the above-mentioned ratio, one of the extension directions of the through hole 111 is a preset extension direction, which is parallel to the partial edge profile of the sheet-shaped piece 1 corresponding to the through hole group in which the through hole 111 is located. It is easy to understand that the through hole 111 can have multiple different extension directions, and the above-mentioned preset extension direction is one of the extension directions. Since multiple through hole groups are distributed along the circumferential direction of the sheet-shaped piece 1, different through hole groups are distributed in different regions of the circumferential direction of the sheet-shaped piece 1, and the edge profile of the region is the above-mentioned partial edge profile of the sheet-shaped piece 1 corresponding to the through hole group. Taking the sheet-shaped piece 1 shown in FIG. 4 as an example, the sheet-shaped piece 1 is circular, and the edge profile of the circular sheet-shaped piece 1 is divided into multiple circular arc profile segments along the circumferential direction, each circular arc profile segment corresponds to each through hole group, and the shape of the preset extension direction of each through hole 111 is a circular arc, and is parallel to the circular arc profile segment corresponding to the through hole group in which the through hole 111 is located. In this way, the sum of the areas of the through holes 111 distributed in each region in the circumferential direction of the sheet-shaped piece 1 can be increased, thereby further increasing the above-mentioned ratio. It should be noted that the above-mentioned multiple different extension directions of the through hole 111 refer to the multiple different extension directions of the orthogonal projection of the through hole 111 on the plane perpendicular to the normal direction of the sheet-shaped piece 1. Among them, one of the multiple different extension directions is the preset extension direction, which is parallel to the orthogonal projection of the partial edge profile of the sheet-shaped piece 1 corresponding to the through hole group in which the through hole 111 is located on the plane perpendicular to the normal direction of the sheet-shaped piece 1. In the case of being parallel to each other, the shape of each through hole 111 along the preset extension direction is the same as the shape of the corresponding partial edge profile, and the shapes of both can be circular arcs, straight lines, broken lines or other arbitrary shapes. For example, if the shape of each through hole 111 along the preset extension direction and the shape of the corresponding partial edge profile are both circular arcs, then the two circular arcs are concentric (i.e., the centers of the circles coincide). If the shape of each through hole 111 along the preset extension direction and the shape of the corresponding partial edge profile are both straight lines, then the two straight lines are parallel. If the shape of each through hole 111 along the preset extension direction and the shape of the corresponding partial edge profile are both broken lines, then the number of line segments of the two broken lines is the same, and they are parallel one by one. When the shape of each through hole 111 along the preset extension direction and the shape of the corresponding partial edge profile adopt the same other arbitrary shape, the parallel manner of the two is similar to the parallel manner of the two circular arcs, two straight lines, and two broken lines described above, as long as each through hole 111 and the corresponding partial edge profile can be arranged at equal intervals, which will not be listed one by one here.

[0071] Further, in some embodiments, the length of the plurality of through holes 111 in each group of through hole groups in the preset extension direction increases along a direction from the center of the sheet member 1 to the edge. Since the circumferential diameter of the sheet member 1 gradually increases along a direction from the center of the sheet member 1 to the edge, i.e., the area where each group of through hole groups of the sheet member 1 is located is approximately a sector, in this case, if the length of the plurality of through holes 111 in each group of through hole groups in the preset extension direction is the same, the outer ring area in the area where each group of through hole groups of the sheet member 1 is located cannot be fully utilized. To this end, by increasing the length of the plurality of through holes 111 in each group of through hole groups in the preset extension direction along a direction from the center of the sheet member 1 to the edge, the plurality of through holes 111 in each group of through hole groups can almost fill the entire sector area where they are located, further increasing the above-mentioned ratio.

[0072] In some examples, in the case of a fluid regulating device being a laminar flow device, the shape of the through hole 111 is in the form of a slit, and the preset extension direction is the slit extension direction of the through hole 111, which can increase the above-mentioned ratio while ensuring that the gas flow is in a laminar state. In other examples, in the case of a fluid regulating device being a split flow device, the shape of the through hole 111 is not particularly limited and can be in the form of a slit or any other shape. At this time, the preset extension direction can be the length extension direction of the through hole 111, the width extension direction of the through hole 111, or any other extension direction.

[0073] In a specific embodiment, as shown in FIGS. 3-6, the cross-sectional shape of the sheet member 1 perpendicular to its normal direction is circular, the cross-sectional shape of the through hole 111 perpendicular to the normal direction of the sheet member 1 is circular arc, and the preset extension direction is the circular arc extension direction of the through hole 111. In some embodiments, to further reduce the processing difficulty, the center of the circular arc cross-section of the through hole 111 coincides with the geometric center O of the sheet member 1. However, the embodiments of the present application are not limited thereto, and in actual applications, according to actual different needs, the center of the circular arc cross-section of the through hole 111 can also not coincide with the geometric center O of the sheet member 1. Taking the three through hole groups 11a, 11b and 11c shown in FIG. 4 as an example, the three through hole groups 11a, 11b and 11c are uniformly distributed around the geometric center O of the sheet member 1, and the structures of the three through hole groups 11a, 11b and 11c are the same.

[0074] Specifically, as shown in FIG. 5, the plurality of through holes 111 in each group of through hole groups are distributed within a sector region of a central angle a on the circumference of the sheet member 1, and the central angle of the circular arc cross section of the plurality of through holes 111 in each group of through hole groups is substantially equal to a. In the case where the fluid regulating device is a laminar flow device, for any one through hole 111 in each group of through hole groups, referred to as the i-th through hole 111i, i = 1, 2,..., n, n being the number of through holes 111 in each group of through hole groups, the flow rate thereof satisfies the following relationship:

[0075] wherein qi is the flow rate of the i-th through hole 111i; a is the central angle of the circular arc cross section of the through hole 111; Ri is the inner circumferential radius of the i-th through hole 111i; δ is the radial width of each through hole 111; ΔP is the pressure difference on both sides of the laminar flow device along the normal direction of the sheet member 1; μ is the dynamic viscosity of the fluid; L is the length of the fluid passage 12 in the normal direction of the sheet member 1 (i.e., the sum of the thicknesses of the plurality of sheet members 1 in the normal direction thereof); and c is a correction coefficient.

[0076] The sum of the flow rates of the n through holes 111 in each group of through hole groups is q, and the flow rate sum q satisfies the following relationship:

[0077] If the number of groups of through holes of each sheet member 1 is k, then the flow rate of the laminar flow device is Q b , and satisfies the following relationship: Q b = k x q.

[0078] From the above, in some examples, under the premise that other parameters remain unchanged, increasing the number n of through holes 111 in each group of through hole groups can increase the flow rate Q b of the laminar flow device, so that it can be applied to a larger range of MFCs; conversely, decreasing the number n of through holes 111 in each group of through hole groups can decrease the flow rate Q b of the laminar flow device, so that it can be applied to a smaller range of MFCs. In other examples, under the premise that other parameters remain unchanged, increasing the radial width δ of the through holes 111 can increase the flow rate Q b of the laminar flow device, so that it can be applied to a larger range of MFCs; conversely, decreasing the radial width δ of the through holes 111 can decrease the flow rate Q b of the laminar flow device, so that it can be applied to a smaller range of MFCs.

[0079] In another specific embodiment, as shown in FIGS. 7-10, the cross-sectional shape of the sheet 1' perpendicular to the normal direction thereof is polygonal, for example, FIGS. 7-10 show the sheet 1' with a square cross-sectional shape. Also, the cross-sectional shape of the through hole 111' perpendicular to the normal direction of the sheet 1' is linear or polygonal, and the preset extension direction is the linear or polygonal extension direction of the through hole 111'. For example, the cross-sectional shape of the through hole 111' shown in FIGS. 7 and 9 is polygonal, and the cross-sectional shape of the through hole 111' shown in FIGS. 8 and 10 is linear. In addition, FIGS. 7 and 8 show four groups of through hole groups 11a', 11b', 11c' and 11d', and FIGS. 9 and 10 show two groups of through hole groups 11a' and 11b', in both of which the multiple groups of through hole groups are uniformly distributed around the geometric center of the sheet 1', and the structures of the multiple groups of through hole groups are the same.

[0080] On this basis, in the case of a laminar flow device, in some examples, under the premise that other parameters remain unchanged, increasing the number of through holes 111' in each group of through hole groups can increase the fluid flow rate of the laminar flow device, so that it can be applied to a larger range of MFCs; conversely, by reducing the number of through holes 111' in each group of through hole groups, the fluid flow rate of the laminar flow device can be reduced, so that it can be applied to a smaller range of MFCs. In other examples, the width of each through hole 111' in each group of through hole groups (i.e. the width perpendicular to the linear or polygonal extension direction) corresponds to the radial width δ of the through hole 111 in the above-mentioned embodiments, and by increasing or reducing the width of the through hole 111', the fluid flow rate of the laminar flow device can be increased or reduced. The flow rate calculation of the through hole 111' in each group of through hole groups is similar to that of the through hole 111 in the above-mentioned embodiments, and will not be described here.

[0081] The fluid regulating device 500 provided by the embodiments of the present application is easier to install and fix by adopting the stacking mode of multiple sheet-shaped pieces 1. For example, as shown in FIG. 3, FIG. 5, FIG. 6 and FIG. 11, the fluid regulating device 500 further comprises multiple adjusting gaskets 2, and multiple sheet-shaped pieces 1 are stacked with at least one adjusting gasket 2 on each side in the normal direction thereof. For example, FIG. 6 shows that multiple sheet-shaped pieces 1 are stacked with one adjusting gasket 2 on each side in the normal direction thereof. Each adjusting gasket 2 on the same side is correspondingly formed with an opening 21 penetrating through the adjusting gasket 2 along the normal direction of the sheet-shaped piece 1, and the opening 21 is in communication with the hollow part 11. By stacking at least one adjusting gasket 2 on each side of multiple sheet-shaped pieces 1 in the normal direction thereof, not only can multiple sheet-shaped pieces 1 be prevented from deforming by being clamped between adjusting gaskets 2 on both sides, but also the fluid flowing into the fluid channel 12 formed by the hollow parts 11 of multiple sheet-shaped pieces 1 via the openings 21 of the adjusting gaskets 2, the effective cross-sectional area of the opening 21 being associated with the flow rate of the fluid flowing into the fluid channel 12, so that the flow rate of the fluid flowing into the fluid channel 12 can be controlled by controlling the effective cross-sectional area of the opening 21, thereby the MFC range can be adjusted. Specifically, the effective cross-sectional area of the opening 21 refers to the overlapping area of the opening 21 and the hollow part 11 in the cross section perpendicular to the normal direction, the greater the effective cross-sectional area of the opening 21, the greater the flow rate of the fluid flowing into the fluid channel 12; on the contrary, the smaller the effective cross-sectional area of the opening 21, the smaller the flow rate of the fluid flowing into the fluid channel 12.

[0082] In some embodiments, in order to increase the flow rate of the fluid flowing into the fluid channel 12 as much as possible to meet the requirements of the MFC with large flow rate, on the basis of the embodiment that the hollow part 11 of the sheet-shaped piece 1 comprises at least one group of through holes, the number of the openings 21 of each adjusting gasket 2 is the same as the number of the groups of through holes of each sheet-shaped piece 1, each opening 21 corresponds to each group of through holes one by one, and each opening 21 is in communication with each through hole 111 in the corresponding group of through holes. Further, in some embodiments, the orthographic projection of the opening 21 on the cross section perpendicular to the normal direction of the sheet-shaped piece 1 completely covers each through hole 111 in the corresponding group of through holes. In a specific embodiment, as shown in FIG. 5, the number of the openings 21 of each adjusting gasket 2 is three, which are openings 21a, 21b and 21c respectively, and the three openings 21a, 21b and 21c correspond to three groups of through holes 11a, 11b and 11c one by one. And the orthographic projection shape of each opening 21 on the cross section perpendicular to the normal direction of the sheet-shaped piece 1 is adapted to the shape of the area where the through holes 111 in the corresponding group of through holes are distributed, which is all fan-shaped, and each through hole 111 in each group of through holes is in communication with the corresponding opening 21, that is, the area of the adjusting gasket 2 shielding each group of through holes is 0, at this time the flow rate of the fluid flowing into the fluid channel 12 is the largest.

[0083] In some embodiments, in order to more effectively prevent the plurality of sheet pieces 1 from being deformed, the sum of the thicknesses of the at least one adjusting gasket 2 located on the same side of the plurality of sheet pieces 1 in the normal direction is greater than the thickness of a single sheet piece 1. For example, FIG. 6 shows that two adjusting gaskets 2 are respectively stacked on both sides of the plurality of sheet pieces 1 in the normal direction thereof, and in this case, the thickness of each adjusting gasket 2 is greater than the thickness of a single sheet piece 1. Further, in some embodiments, the thickness of the adjusting gasket 2 in the normal direction is greater than or equal to 0.1 mm and less than or equal to 1 mm, and is preferably 0.5 mm.

[0084] The manner in which the adjusting gaskets 2 and the sheet pieces 1 are stacked together and fixed in relative position can be various, and in order to further simplify the installation steps and reduce the installation difficulty, in some preferred embodiments, as shown in FIGS. 6, 12-14, the fluid regulating device 500 further comprises a connecting rod 4, each sheet piece 1 is formed with a first mounting hole 14 (as shown in FIG. 4), each adjusting gasket 2 is formed with a second mounting hole 22 (as shown in FIG. 11), and each second mounting hole 22 is arranged corresponding to each first mounting hole 14. The connecting rod 4 is arranged through the plurality of first mounting holes 14 and the plurality of second mounting holes 22, and the cross-sectional shape of the connecting rod 4, the second mounting hole 22 and the first mounting hole 14 perpendicular to the normal direction of the sheet piece 1 are all non-circular and are adapted to each other. Specifically, each sheet piece 1 is sleeved on the connecting rod 4 through the first mounting hole 14, and each adjusting gasket 2 is sleeved on the connecting rod 4 through the second mounting hole 22, so that the adjusting gaskets 2 and the sheet pieces 1 can be stacked together. Each second mounting hole 22 and each first mounting hole 14 are coaxially arranged, and the axis of each second mounting hole 22 and each first mounting hole 14 can coincide with or be parallel to the axis of the connecting rod 4. Since the cross-sectional shape of the connecting rod 4, the second mounting hole 22 and the first mounting hole 14 perpendicular to the normal direction of the sheet piece 1 are all non-circular, this can make each second mounting hole 22 and each first mounting hole 14 respectively limit the outer peripheral surface of the connecting rod 4 to avoid the adjusting gaskets 2 and the sheet pieces 1 rotating in the circumferential direction of the connecting rod 4, so that the relative angle of the adjusting gaskets 2 and the sheet pieces 1 with the connecting rod 4 can be more conveniently defined, the hollow portions 11 of the sheet pieces 1 are corresponded, and the openings 21 on the adjusting gaskets 2 are corresponded to the hollow portions 11.

[0085] In some embodiments, the above-mentioned non-circular shape includes a polygon such as a triangle, a square, a rectangle, a pentagon, etc., or other non-circular shapes such as an ellipse, a special-shaped, etc. For example, as shown in FIG. 4, the cross-sectional shape of the first mounting hole 14 perpendicular to the normal direction of the sheet 1 is a regular triangle, i.e., the above-mentioned non-circular shape is a regular triangle. For another example, as shown in FIGS. 7-10, the cross-sectional shape of the first mounting hole 14' perpendicular to the normal direction of the sheet 1 is a square, i.e., the above-mentioned non-circular shape is a square. It is easily understood that the cross-sectional shape can be freely set as needed, and is independent of the shape of the sheet 1.

[0086] In some embodiments, as shown in FIGS. 6 and 15, the fluid regulating device 500 further includes two fixing members 3, which are respectively located at the two ends of the connecting rod 4 and are fixedly connected with the connecting rod 4, for fixing the plurality of sheets 1 and the plurality of regulating gaskets 2 between the two fixing members 3. The outer circumferential dimension of the fixing member 3 is greater than the inner circumferential dimension of the second mounting hole 22 of the regulating gasket 2, so that a portion of the fixing member 3 is overlapped on the regulating gasket 2, thereby achieving the fixing of the plurality of sheets 1 and the plurality of regulating gaskets 2 between the two fixing members 3.

[0087] Further, in some embodiments, each fixing member 3 includes a connecting column 31 and a fixing plate 32 arranged at one end of the connecting column 31; as shown in FIG. 13, the two ends of the connecting rod 4 are provided with connecting holes 41, the connecting column 31 is located in the connecting hole 41 and is fixedly matched with the connecting hole 41; the fixing plate 32 is overlapped on the end surface of the connecting rod 4, thereby achieving the fixing of the plurality of sheets 1 and the plurality of regulating gaskets 2 between the two fixing members 3. The fixed matching manner of the connecting column 31 with the connecting hole 41 can be various, such as welding, bonding, interference fit or threaded fit, etc. Since the outer circumferential dimension of the fixing plate 32 is greater than the inner circumferential dimension of the second mounting hole 22 of the regulating gasket 2, not only the fixing of the plurality of sheets 1 and the plurality of regulating gaskets 2 between the two fixing plates 32 is achieved, but also the fixing plate 32 can play a certain blocking role on the fluid, so as to avoid the direct flow of part of the fluid into each second mounting hole 22 and each first mounting hole 14 (or first mounting hole 14').

[0088] In the installation of the plurality of sheet-shaped pieces 1 and the plurality of adjusting washers 2, one of the fixing pieces 3 can be fixedly connected with one end of the connecting rod 4, and then the plurality of sheet-shaped pieces 1 and the plurality of adjusting washers 2 can be sequentially sleeved on the connecting rod 4 (for example, all the sheet-shaped pieces 1 are located between two adjusting washers 2), and the fixing piece 3 can play a limiting role in sleeving the plurality of sheet-shaped pieces 1 and the plurality of adjusting washers 2. In addition, the number of the sheet-shaped pieces 1 can be determined according to the length of the connecting rod 4, the thickness of the sheet-shaped piece 1, the number and thickness of the adjusting washer 2. For example, if the length of the connecting rod 4 is 25.4 mm, the number of the adjusting washer 2 is two, and the thickness of each adjusting washer 2 is 0.5 mm, and the thickness of each sheet-shaped piece 1 is 0.2 mm, then 122 sheet-shaped pieces 1 can be sleeved on the connecting rod 4. After all the sheet-shaped pieces 1 and the adjusting washers 2 are sleeved on the connecting rod 4, the other fixing piece 3 can be fixedly connected with the other end of the connecting rod 4.

[0089] In some embodiments, in order to avoid the fluid flowing from the gap between the fixing plate 32 and the adjacent adjusting washer 2 and the gap between the connecting column 31 and the connecting hole 41 into the connecting hole 41, which may generate pressure on the connecting rod 4 and cause the connecting rod 4 to come out, the connecting rod 4 is further provided with a drainage channel 42, one end of the drainage channel 42 is in communication with the connecting hole 41, and the other end extends to the peripheral wall of the connecting rod 4. In this way, the fluid flowing into the connecting hole 41 can flow out of the drainage channel 42, thereby reducing the pressure on the connecting rod 4 and improving the structural stability and reliability.

[0090] In some embodiments, on the basis of the above-mentioned embodiment in which the non-circular shape is a polygon, the second mounting hole 22 and the first mounting hole 14 of the polygon are provided with a counterbore at the corner, for example, as shown in FIG. 4, the first counterbore 13 is provided at the corner of the first mounting hole 14; as shown in FIG. 11, the second counterbore 23 is provided at the corner of the second mounting hole 22. The counterbore extends outward relative to the corner, so that not only the burrs generated by machining the second mounting hole 22 and the first mounting hole 14 can be removed during the machining of the counterbore, but also the interference between the second mounting hole 22 and the first mounting hole 14 and the connecting rod 4 at the corner when the plurality of sheet-shaped pieces 1 and the plurality of adjusting washers 2 are sleeved on the connecting rod 4 can be avoided, thereby further improving the convenience of installation. The above-mentioned counterbore is, for example, a circular hole, an elliptical hole or an arc-shaped hole, etc.

[0091] It should be noted that in the present embodiment, the connecting rod 4 is one, but the present application is not limited thereto, and in actual application, the connecting rod 4 can also be multiple, in which case the number of the second mounting hole 22 on each adjusting washer 2 and the number of the first mounting hole 14 on each sheet-shaped piece 1 are the same as the number of the connecting rod 4, and are arranged one-to-one.

[0092] As another technical solution, referring to FIG. 16, the embodiment of the present application further provides a mass flow controller (MFC) 400, which comprises a measuring main body 401, and two branches are arranged in the measuring main body 401, one branch 403a is provided with a flow sensor 403, i.e. the branch 403a is used as a capillary of the flow sensor 403, and the other branch is provided with the fluid regulating device 500 provided by the embodiment of the present application. The fluid regulating device 500 can play the roles of both flow splitting and making fluid realize laminar flow.

[0093] In some embodiments, the measuring main body 401 has an inlet 401a, which can be formed by an inlet joint connected to the measuring main body 401 and in communication with an inlet flow channel 401c, and an outlet flow channel 401d arranged at a rear end of the branch where the fluid regulating device 500 is arranged, which can be formed by an outlet joint connected to the measuring main body 401 and in communication with an outlet end of the outlet flow channel 401d. An inlet end of the outlet flow channel 401d is in communication with the branch where the fluid regulating device 500 is arranged.

[0094] On this basis, the mass flow controller further comprises a flow regulating valve 404 (for example, an electromagnetic regulating valve) connected between the outlet end of the outlet flow channel 401d and the outlet 401b. Moreover, the measuring main body 401 is further provided with a first flow splitting port 403b and a second flow splitting port 403c, one end of each of which is in communication with the inlet flow channel 401c and the outlet flow channel 401d respectively, and the other end of each of which is in communication with two ends of the branch 403a respectively.

[0095] Fluid enters the inlet flow channel 401c from the inlet 401a of the measuring main body 401, and is split into two paths under the action of the fluid regulating device 500, one path of fluid directly passes through the fluid regulating device 500, and the other path of fluid flows into the branch 403a (i.e. the capillary of the flow sensor 403) through the first flow splitting port 403b, and then flows into the outlet flow channel 401d through the second flow splitting port 403c, and then flows into the flow regulating valve 404 after being combined with the fluid directly passing through the fluid regulating device 500, and then flows out from the outlet 401b after being regulated by the flow regulating valve 404.

[0096] In some embodiments, the mass flow measuring device further comprises a first pressure sensor, a second pressure sensor and a controller (not shown in the figure), the first pressure sensor and the second pressure sensor are used to detect the pressure at the inlet and outlet of the fluid regulating device 500 (for example, the pressure of the inflow channel 401c and the outflow channel 401d) respectively and send to the controller; the controller is used to control the opening of the flow regulating valve 404 according to the pressure detected by the first pressure sensor and the second pressure sensor, and the set flow value, so that the fluid flow of the fluid channel is equal to the above-mentioned set flow value.

[0097] The mass flow control device provided by the embodiments of the present application can easily process the hollow part on the single sheet by using the above-mentioned fluid regulating device 500 provided by the embodiments of the present application, and it is also easy to realize that the processed hollow part contains a larger number of through holes, so not only the manufacturing difficulty is low, but also it is easy to realize small volume and large flow, and can improve the accuracy, consistency and repeatability of the shunt effect of the fluid regulating device 500, and can also be applied to mass flow controllers of different lengths of fluid channels.

[0098] It can be understood that the above embodiments are only exemplary embodiments adopted for illustrating the principles of the present application, but the present application is not limited thereto. Various modifications and improvements can be made by those skilled in the art without departing from the spirit and essence of the present application, and these modifications and improvements are also regarded as the protection scope of the present application.

Claims

1. A fluid regulating device, characterized in that, It includes multiple sheet-like components with fixed relative positions, the multiple sheet-like components are stacked along the normal direction of the sheet-like components, each sheet-like component has a cutout portion, and the cutout portions of the multiple sheet-like components are correspondingly arranged along the normal direction of the sheet-like components, forming a fluid channel for fluid to pass through along the normal direction of the sheet-like components.

2. The fluid regulating device according to claim 1, characterized in that, The fluid regulating device is a flow-dividing device, and the hollow portion of each of the sheet-like parts includes at least one through hole. The proportion of the sum of the areas of all the through holes of each sheet-like part in the area of ​​the sheet-like part and / or the number of the sheet-like parts are related to the flow rate of the fluid flowing through the flow-dividing device.

3. The fluid regulating device according to claim 1, characterized in that, The fluid regulating device is a laminar flow device, and the hollow portion of each of the sheet-like parts includes at least one through hole, the through hole being slit-shaped.

4. The fluid regulating device according to claim 2 or 3, characterized in that, The length of the fluid channel in the normal direction is greater than 60 times the equivalent diameter of each of the through holes.

5. The fluid regulating device according to claim 2 or 3, characterized in that, Each of the sheet-like components has a cutout portion including at least one set of through holes, and multiple sets of through holes are distributed at intervals along the circumference of the sheet-like component; each set of through holes includes multiple through holes, and the multiple through holes are distributed at intervals along the direction from the center to the edge of the sheet-like component.

6. The fluid regulating device according to claim 5, characterized in that, One of the extension directions of the through hole is a preset extension direction, and the preset extension direction is parallel to a portion of the edge contour of the sheet-like member corresponding to the through hole group in which the through hole is located.

7. The fluid regulating device according to claim 6, characterized in that, The cross-sectional shape of the sheet-like component perpendicular to its normal direction is circular, and the cross-sectional shape of the through hole perpendicular to its normal direction is arc-shaped; the preset extension direction is the arc-shaped extension direction of the through hole; or... The cross-sectional shape of the sheet-like component perpendicular to the normal direction of the sheet-like component is polygonal, the cross-sectional shape of the through hole perpendicular to the normal direction of the sheet-like component is straight or polygonal, and the preset extension direction is the straight or polygonal extension direction of the through hole.

8. The fluid regulating device according to claim 6, characterized in that, The length of multiple through holes in each group of through holes increases in the predetermined extension direction from the center to the edge of the sheet-like member.

9. The fluid regulating device according to any one of claims 1-3, characterized in that, The fluid regulating device further includes a plurality of regulating shims, and at least one of the regulating shims is stacked on both sides of the plurality of sheet-like members in the normal direction; Each of the adjustment pads on the same side has an opening that extends through the adjustment pad along the normal direction, and the opening communicates with the hollow portion.

10. The fluid regulating device according to claim 9, characterized in that, Each of the sheet-like components has a hollowed-out portion including at least one set of through holes, and multiple sets of through holes are distributed at intervals along the circumference of the sheet-like component; each set of through holes includes multiple through holes. The number of openings in each of the adjusting pads is the same as the number of through-hole groups in each of the sheet-like members, and each opening corresponds one-to-one with each of the through-hole groups, and each opening is connected to each through-hole in the corresponding through-hole group.

11. The fluid regulating device according to claim 9, characterized in that, The fluid regulating device also includes a connecting rod; Each of the sheet-like members has a first mounting hole, and each of the adjusting shims has a second mounting hole, with each second mounting hole corresponding to each of the first mounting holes; The connecting rod passes through multiple first mounting holes and multiple second mounting holes, and the cross-sectional shape of the connecting rod, the second mounting hole and the first mounting hole perpendicular to the normal direction are all non-circular and compatible.

12. The fluid regulating device according to claim 11, characterized in that, The non-circular shape includes polygons.

13. The fluid regulating device according to claim 12, characterized in that, Enlarged holes are provided at the corners of the second mounting hole and the first mounting hole of the polygon.

14. The fluid regulating device according to claim 11, characterized in that, The fluid regulating device further includes two fixing members, which are located at both ends of the connecting rod and are fixedly connected to the connecting rod to fix the plurality of sheet-like parts and the plurality of adjusting pads between the two fixing members.

15. The fluid regulating device according to claim 14, characterized in that, The fastener includes a connecting post and a fixing plate disposed at one end of the connecting post; Both ends of the connecting rod are provided with connecting holes, the connecting post is located in the connecting hole and is fixedly engaged with the connecting hole; the fixing plate is stacked on the end face of the connecting rod; The connecting rod is also provided with a drainage channel, one end of which is connected to the connecting hole, and the other end extends to the peripheral wall of the connecting rod.

16. The fluid regulating device according to any one of claims 1-3, characterized in that, The thickness of the sheet-like member in the normal direction is greater than or equal to 0.1 mm and less than or equal to 1 mm.

17. The fluid regulating device according to claim 9, characterized in that, The thickness of the adjusting shim in the normal direction is greater than or equal to 0.1 mm and less than or equal to 1 mm.

18. A mass flow controller, characterized in that, It includes a measuring body, which has two branches, one of which is equipped with a flow sensor, and the other branch is equipped with a fluid regulating device as described in any one of claims 1-17.

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