Vibration actuator and vibration presentation device

Abstract

This vibration actuator has: an electromagnet part that has a core and a coil surrounding the core and that is laminated on a plate surface of a plate-shaped magnetic base part; a magnetic member that has a lower surface facing the coil from above; a spacer that has the lower surface connected thereto outside the coil, and that forms a movable region for the magnetic member by vertically separating the magnetic member and the electromagnet from each other; a spring stop part provided to the outside of the coil at a location above the magnetic base part; and an elastic support part that is connected to the spring stop part at the lower surface of one end thereof and is connected to the spacer at the upper surface of the other end thereof.

Description

Vibration actuator and vibration presentation device

[0001] The present invention relates to a vibration actuator and a vibration presentation device including the same.

[0002] A vibration presentation device that generates and presents vibrations to a user in response to user operations generally includes an actuator (vibration actuator) as a vibration generation source. By driving the vibration actuator and transmitting vibrations to the user, the vibration presentation device can provide stimulation, notify the user of incoming calls, and improve the sense of operation and realism.

[0003] Examples of the vibration presentation device include a portable game terminal, a controller (such as a game pad) for a stationary game console, a portable communication terminal such as a mobile phone or a smartphone, an information terminal device such as a tablet PC (Personal Computer), etc. The vibration presentation device may also include a healthcare device or a beauty device.

[0004] For example, a configuration is known in which a vibration actuator is mounted on an information terminal device having a touch panel, which is a sensing panel, and vibration is applied to the pads of an operator's fingers, etc., that touch the display screen displayed on the touch panel, as a touch operation sensation (the sensation of operating by touch) (Patent Document 1).

[0005] In Patent Document 1, a vibration actuator is attached to the back surface of a touch panel via a vibration transmission unit. In the vibration actuator, a mover is disposed within a housing fixed to the vibration transmission unit so that the mover can move back and forth along a guide shaft disposed perpendicular to the touch panel. The vibration actuator applies vibration to the finger pad that touches the touch panel via the vibration transmission unit, although there is a possibility of generating a collision sound when the mover hits the housing in response to an operation on the touch panel.

[0006] JP 2015-070729 A

[0007] Recently, a technology has been known in which a vibration presentation device is applied to an automobile seat and a conventional vibration actuator is mounted inside the seat of a vehicle such as an automobile. With this technology, for example, when a sensor detects an obstacle approaching the vehicle and a warning is issued, vibrations are generated in the driver's seat, allowing the driver to perceive the warning as a bodily sensation.

[0008] When mounting a vibration actuator inside a seat, rather than a structure such as that of Patent Document 1, which has a guide shaft long enough to guide the reciprocating movement of a movable element, it is desirable to have a vibration actuator that is thinner, can be mounted in a narrow space, and can vibrate with high output.

[0009] An object of the present invention is to provide a vibration actuator and a vibration presentation device that are thin, space-saving, and vibrate appropriately.

[0010] One aspect of the vibration actuator according to the present invention comprises: an electromagnet section having a core and a coil surrounding the core and arranged on the plate surface of a plate-shaped magnetic base section; a magnetic member having a lower surface facing the coil from above; a spacer to which the lower surface is connected outside the coil and which separates the magnetic member and the electromagnet section in the vertical direction to form a movable area of ​​the magnetic member; a spring stop section provided on the magnetic base section outside the coil; and an elastic support section connected to the spring stop section at the lower surface of one end and connected to the spacer at the upper surface of the other end, wherein the magnetic member is displaced and vibrates so as to approach the electromagnet section when current is passed through the coil.

[0011] One aspect of the vibration presentation device of the present invention has a configuration including the vibration actuator having the above configuration and a vibration presentation unit that presents vibrations of the vibration actuator.

[0012] According to the present invention, a thin design is achieved, and vibration is favorable in a space-saving manner.

[0013] 1. An external perspective view of a vibration actuator according to a first embodiment of the present invention. 1 is an exploded perspective view of the vibration actuator according to the first embodiment of the present invention, with the cover and movable body removed, as seen from above. 2 is an exploded perspective view of the state shown in FIG. 2, as seen from below. 3 is an oblique view showing an elastic portion and a fixed body in the vibration actuator according to the first embodiment of the present invention. 4 is a cross-sectional view taken along the arrows A-A in FIG. 1. 5 is an exploded perspective view of the vibration actuator according to the first embodiment of the present invention, as seen from above. 6 is an exploded perspective view of the state shown in FIG. 8A, 8B, and 8C are diagrams provided for explaining the operation of the vibration actuator. 6 is an exploded perspective view of the vibration actuator according to a second embodiment of the present invention, with the cover and movable body removed, as seen from above. 7 is an exploded perspective view of the state shown in FIG. 9, as seen from below. 8 is an exploded perspective view of the vibration actuator according to the second embodiment of the present invention, as seen from above. 9 is an exploded perspective view of the state shown in FIG. 11, as seen from below. 10 is an exploded perspective view of the vibration actuator according to the second embodiment of the present invention, as seen from above. 11 is an exploded perspective view of the state shown in FIG. 11. 11 is a diagram showing an example of a control circuit for driving and controlling each vibration actuator in this embodiment. 12 is a diagram showing an example of a drive signal. 13 is a diagram showing a modified example of the vibration actuator. 13 is an external perspective view of a vibration actuator according to a third embodiment of the present invention. 14 is a side view of the vibration actuator according to the third embodiment of the present invention. 14 is an exploded perspective view of the vibration actuator according to the third embodiment of the present invention, with the cover and movable body removed, as seen from above. FIG. 19 is a perspective view of the state shown in FIG. 18, seen from below. FIG. 21A, FIG. 21B and FIG. 21C are views provided for explaining the operation of the vibration actuator. FIG. 21A is an exploded perspective view of a vibration actuator according to embodiment 3 of the present invention. FIG. 21B is an exploded perspective view showing an elastic portion, a movable body and a fixed body in a vibration actuator according to embodiment 4 of the present invention. FIG. 21C is an exploded perspective view of a vibration actuator according to embodiment 4 of the present invention. FIG. 21D is an exploded perspective view of a vibration actuator according to embodiment 5 of the present invention. FIG. 21E is a longitudinal sectional view of a vibration actuator according to embodiment 5 of the present invention. FIG. 21F is an exploded perspective view of a vibration actuator according to embodiment 6 of the present invention. FIG. 21G is a longitudinal sectional view of a vibration actuator according to embodiment 6 of the present invention. FIG. 21H is an exploded perspective view of a vibration actuator according to embodiment 7 of the present invention. FIG. 21H is a longitudinal sectional view of a vibration actuator according to embodiment 7 of the present invention.34A is a plan view of the vibration actuator seen through the weight portion, and FIG. 34B is a side view of the vibration actuator. FIG. 34B is a plan view of the vibration actuator seen through the weight portion, and FIG. 34C is a side view of the vibration actuator. FIG. 34A is a plan view of the vibration actuator seen through the weight portion, and FIG. 34B is a side view of the vibration actuator. FIG. 34B is a plan view of the vibration actuator seen through the weight portion, and FIG. 34C is a side view of the vibration actuator. FIG. 34A is a plan view of the vibration actuator seen through the weight portion, and FIG. 34B is a side view of the vibration actuator. FIG. 34B is a plan view of the vibration actuator seen through the weight portion, and FIG. 34C is a side view of the vibration actuator. FIG. 34A is a plan view of the vibration actuator seen through the weight portion, and FIG. 34B is a side view of the vibration actuator. FIG. 34C is a plan view of the vibration actuator seen through the weight portion, and FIG. 34C is a side view of the vibration actuator.

[0014] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Note that common components in the drawings are given the same reference numerals, and their description will be omitted as appropriate.

[0015] In the embodiments described below, a Cartesian coordinate system (X, Y, Z) is used. The lengths of the X, Y, and Z directions are described as corresponding to the width (left-right direction, long direction), depth (front-back direction, short direction), and height (up-down direction) of the vibration actuator and the vibration presentation device. However, it goes without saying that these correspondences differ depending on the usage manner of the vibration actuator and the vibration presentation device. With regard to the Z direction, the positive side of the Z direction (upper side) is the direction in which vibration feedback is given to the operator, and the negative side of the Z direction (lower side) is the direction in which the operator presses when operating.

[0016] Furthermore, the terms "upper" and "lower" in "upper side" and "lower side" are used for convenience to make it easier to understand the configuration and behavior of the vibration actuator according to this embodiment. When the vibration actuator 1 is mounted on an electrical device (see FIG. 1), the "upper" and "lower" described here may be reversed, may be left or right, or may be diagonal. Incidentally, in this embodiment, the up-down direction is the vibration direction of the movable body in the vibration actuator 1, with the "upward direction" being one of the vibration directions and the "downward direction" being the other of the vibration directions.

[0017] Furthermore, it goes without saying that the expressions relating to shapes used in the following description are expedient expressions for the purpose of explaining simple outlines, and do not necessarily apply to geometrically accurate definitions of figures. The shapes of the entire device or each component described herein are examples, and the present invention is not limited to the shapes exemplified in this embodiment.

[0018] (Embodiment 1) <Basic configuration of a vibration presentation device 10 as an electrical device having a vibration actuator 1> Fig. 1 is an external perspective view of a vibration actuator according to embodiment 1 of the present invention. In Fig. 1, a seat having a vibration presentation unit (seat portion 11) and a backrest portion 12, which are mounted together with the vibration actuator 1 to constitute the vibration presentation device 10, is shown by imaginary lines.

[0019] The vibration actuator 1 is mounted as an electrical device in a vibration presentation device 10 shown in Fig. 1. The vibration presentation device 10 is a driver's seat mounted in a vehicle, and the seat body serving as a vibration presentation unit has a seat portion 11 and a backrest portion 12. The vibration actuator 1 is disposed in an accommodation space 11a within the seat portion 11.

[0020] The vibration actuator 1 may have a sensor that detects the approach of a person outside the vehicle or another vehicle, and a control unit that supplies drive power to the coil 32 based on the detection results of the sensor. In this way, the vibration actuator 1 applies vibrations to warn the driver (user) in response to the approach of an obstacle such as a person outside the vehicle or another vehicle. Furthermore, when operating the seat, for example, the vibration actuator 1 generates vibrations in response to the operation, and applies a tactile sensation (also called a "tactile sensation" or "force sensation") to the driver, who is the operator, via the seat portion 11.

[0021] <Vibration Presentation Unit (Seat 11)> In the vibration presentation device 10, the seat 11 has a vibration actuator 1 in a housing space 11a. The seat 11 presents vibrations generated by the vibration actuator 1 to a user seated on the seat surface in response to the user's operation of a mechanical switch or the like in the vehicle, allowing the user to experience the corresponding operation. The vibration actuator 1 may be disposed in the backrest 12. A control unit for driving the vibration actuator 1 may also be provided in the seat 11.

[0022] <Vibration Actuator 1> Figure 2 is an exploded perspective view of the vibration actuator with the cover and movable body removed, viewed from above. Figure 3 is a perspective view of the state shown in Figure 2, viewed from below, and Figure 4 is a perspective view showing the elastic portion and fixed body of the vibration actuator. For convenience, the fastening member 64 attached to the movable body 7 in Figure 2 is shown attached to the elastic support portion 5b in Figure 3.

[0023] The vibration actuator 1 is a flat or thin plate vibration actuator, and is disposed so as to face the seat surface of the seat portion 11 in the thickness direction, assuming that the Z direction is the thickness direction.

[0024] As shown in FIGS. 2 to 4, the vibration actuator 1 has a thin plate-like actuator body 2 having a fixed body 4, a movable body 7, and elastic support portions 5 (5a, 5b), and a cover 9.

[0025] The vibration actuator 1 is a thin plate-like vibrating body, and has a housing made up of a plate-like base member 42 of the fixed body 4 and a cover 9. The vibration actuator 1 imparts vibrations generated by itself to a connected object.

[0026] In the vibration actuator 1 , a plate-shaped movable body 7 is disposed inside the actuator so as to be movable in the thickness direction (up and down directions, Z and −Z directions), and is covered by a cover 9 .

[0027] 5 is a cross-sectional view taken along line AA in FIG. 1, FIG. 6 is an exploded perspective view of the vibration actuator as viewed from above, and FIG. 7 is an exploded perspective view of the state of FIG. 6 as viewed from below.

[0028] The actuator body 2 has the electromagnet part 3 fixed to a part (base member 42) that constitutes the housing, and supports the movable body 7 within the housing via elastic support parts 5 (5a, 5b) so that it can vibrate in the vertical direction (Z direction).

[0029] The actuator body 2 has a base member 42 , a spring stop portion 44 , a disk-shaped electromagnet portion 3 , and a movable body 7 .

[0030] <Base member (magnetic base portion) 42> The base member 42 is a flat magnetic body (flat member) and generates a magnetic attraction force together with the electromagnet portion 3 (coil 32, magnetic pole core 34, bobbin 36, and substrate portion 38) configured in a flat disk shape, the spring stop portion 44, and the magnetic yoke 72 of the movable body 7. The base member 42 has an engaged recess 422 and an engaged protrusion 424 formed on its outer edge, which engage with the engaging protrusion 942 and engaging recess 962 of the cover 9.

[0031] The base member 42 has joining holes 421 and 426, and the electromagnet portion 3 and the spring stop portion 44 are attached to the base member 42 via the joining holes 421 and 426. The joining hole 421 is formed in the center of the base member 42, and the joining protrusion 344 of the magnetic pole core 34 is fitted into the joining hole 421. As a result, the base member 42 is in a state where the core body 342 of the magnetic pole core 34 is integrally attached to the center of the upper surface of the base member 42, protruding upward in a convex shape.

[0032] The base member 42 is formed of a magnetic material such as silicon steel plate or SECC (electro-galvanized steel plate: Steel Electrolytic Cold Commercial). This allows the base member 42 to be formed by processing the sheet metal part itself, such as by drilling holes, ensuring surface precision and enabling a thinner, lower-cost design. Furthermore, since the base member 42 can be fully opposed to the magnetic yoke 72 of the movable body 7, the opposing surface across the gap with the movable body 7 can be widened, thereby reducing (minimizing) magnetic resistance.

[0033] <Electromagnet section 3> The electromagnet section 3 has a coil 32 disposed around the outer periphery of a disk-shaped (cylindrical) magnetic pole core 34 via a bobbin 36. The electromagnet section 3 is formed in a disk shape. Wiring on a substrate section 38 is connected to the coil 32. The electromagnet section 3 is disposed on the plate surface of a base member 42.

[0034] The magnetic pole core 34 is made of a magnetic material and is disposed so as to protrude from the base member 42. The magnetic pole core 34 has a disk-shaped core body 342 whose upper surface is a magnetic pole surface 341, and a joint protrusion 344 that protrudes downward from the center of the lower surface of the core body 342.

[0035] The magnetic pole core 34 is arranged inside the cylindrical bobbin body 361 of the bobbin 36, and is housed within the cylindrical bobbin body 361, positioned on a step portion (inner flange portion) 364 formed on the lower opening edge of the cylindrical bobbin body (cylindrical body) 361.

[0036] The magnetic pole core 34 is formed by sintering a metal such as Fe, for example. Since the magnetic pole core 34 is formed by sintering, there is a high degree of freedom in the shape.

[0037] The core body 342 is formed in a flat disk shape and is surrounded by the coil 32.

[0038] The joining protrusion 344 is fitted into and joined to a joining hole 421 formed in the base member 42, forming the base member 42 and the magnetic pole core 34 as an integrated magnetic body. Since the joining hole 421 is formed in the center of the base member 42, the electromagnet part 3 is disposed in the center of the base member 42, and the magnetic pole core 34 protrudes from the center of the base member 42.

[0039] The bobbin 36 is made of an insulating material such as polyester (polybutylene terephthalate (PBT)) and insulates the coil 32 from the magnetic pole core 34. A flange (outer flange portion) 362 that protrudes radially outward is formed on the upper opening edge of the cylindrical bobbin body 361.

[0040] As shown in FIG. 5 , the flange 362 holds the coil 32 sandwiched between it and the base member 42 by fitting the joining protrusion 344 of the magnetic pole core 34 into the joining hole 421 to join the flange 362. The flange 362 engages with the inner peripheral edge of the coil 32 at its cylindrical lower surface. As a result, the electromagnet unit 3 can be attached to the base member 42 by crimping the magnetic pole core 34 to the base member 42, thereby fixing the coil 32 to the base member 42 via the bobbin 36 in a state where it is prevented from slipping out. The stepped portion 364 protrudes radially inward from the cylindrical bobbin body 361 and engages with the core body 342 at its upper surface. The stepped portion 364 is a flat annular plate, and the joining protrusion 344 is inserted through the interior of the stepped portion 364, with the outer peripheral edge of the core body 342 engaging with its upper surface.

[0041] The joining protrusion 344 at the bottom of the core body 342 fits into the joining hole 421 of the base member 42, whereby the outer periphery of the core body 342 is fixed in a state in which the stepped portion 364 of the bobbin 36 is sandwiched between the core body 342 and the base member 42. In addition, the flange 362 of the bobbin 36 is fixed in a state in which the coil 32 is sandwiched between the bobbin 36 and the base member 42.

[0042] An annular main body 382, ​​which is part of the substrate 38, is disposed on the outer periphery of the magnetic pole core 34 between the coil 32 and the base member 42. Furthermore, since the magnetic pole core 34 is disposed within the coil 32, the magnetic circuit is improved, and the electromagnetic conversion efficiency is enhanced.

[0043] The coil 32 is formed in a flat, circular ring shape. The coil 32 is disposed on the base member 42 via the circular main body portion 382 of the substrate portion 38. The axis of the coil 32 coincides with the axis of the magnetic pole core 34. Furthermore, since the circular ring-shaped coil 32 does not have edge portions that are prone to variations, it is highly manufacturable as a coil with stable characteristics.

[0044] The coil 32 may be formed of, for example, UEW (polyurethane enameled copper wire). The coil 32 is connected to the wiring portion of the substrate portion 38 by the coil windings at both ends.

[0045] The substrate 38 supplies power to the coil 32. The substrate 38 is formed in a film shape, for example, a flexible printed circuit (FPC), and is configured by providing a conductive copper foil on a heat-resistant polyimide (P1) film. The substrate 38 has a wiring section to which the placed coil 32 is connected.

[0046] The base plate portion 38 has an annular main body portion 382 having an opening 381 , and an extension portion 384 extending radially outward from a portion of the annular main body portion 382 .

[0047] The annular main body 382 is formed in the shape of an insulating sheet, and insulates the coil 32 from the base member 42. The extension 384 connects the coil 32 to an external device or the like via a wiring portion of the extension 384. The substrate 38 energizes the coil 32 via the external device or the like, and excites the magnetic pole core 34.

[0048] The annular main body portion 382 of the substrate portion 38 is formed in a ring shape corresponding to the shape of the coil 32. The annular main body portion 382 is attached to the base member 42 with the magnetic pole core 34 disposed in the opening 381. The annular main body portion 382 is interposed between the coil 32 and the base member 42 and functions as an insulating film (insulator) that insulates the coil 32 from the base member 42.

[0049] The substrate portion 38 has an insulating function and a conductive function (through the wiring portion) to the coil 32, which makes it possible to avoid insulation breakdown, improve the routing of the wiring that supplies power to the coil 32, and prevent coil disconnection. Furthermore, when connecting using a connector or the like, the connection can be easily made.

[0050] <Spring stop portion 44> The spring stop portion 44 has a mounting hole 445, and fixes the elastic support portion 5 (5 a, 5 b) via the mounting hole 445. The spring stop portion 44 supports the movable body 7 on the fixed body 4 so that the movable body 7 can vibrate freely via the elastic support portion 5 (5 a, 5 b).

[0051] The spring stop portion 44 positions the movable body 7 via the elastic support portion 5 so as to face the magnetic pole surface 341 of the magnetic pole core 34. It is preferable that the spring stop portion 44 is formed, for example, so that the elastic support portion 5 is at the same height as the magnetic pole surface 341.

[0052] The spring stop portions 44 are preferably arranged on the base member 42 radially outward of the core body 342 and at positions point-symmetrical with respect to the center of the core body 342. In this way, the spring stop portions 44 can support the movable body 7 relative to the base member 42 via the attached elastic support portions 5, with the movable body 7 positioned at equal intervals across the entire surface from the center of the movable body 7, allowing it to move freely in the opposing direction (up and down) in a balanced manner.

[0053] The spring stop portion 44 is made of a magnetic material and is arranged to surround the periphery of the electromagnet portion 3, functions as an external magnetic pole, and forms a magnetic circuit together with the electromagnet portion 3, the magnetic yoke 72, and further the base member 42.

[0054] The spring stop portion 44 is configured, for example, so that the elastic support portion 5 is fixed at a predetermined height on the outer circumferential side of the core body 342. The predetermined height of the spring stop portion 44 is a height that ensures a movable range for the deformed portions (springs) of the elastic support portions 5 a, 5 b, and is equal to or greater than the length of the air gap G.

[0055] The spring stop portion 44 is an O-shaped yoke having an opening 441, and has a rectangular frame-shaped (e.g., square) frame-shaped main body 443. The opening 441 is formed in the center of the frame-shaped main body 443, and the coil 32 and the magnetic pole core 34 are disposed inside the opening 441. The spring stop portion 44 is a frame-shaped body that surrounds the coil 32.

[0056] A notch 447 is formed on the lower surface of the frame-shaped main body 443, and the extension portion 384 extending from the opening 441 is inserted into the notch 447. The spring stop portion 44 is made of a sintered material, which increases the degree of freedom in the shape of the spring stop portion 44 itself.

[0057] The spring stop portion 44 has mounting holes 445 on its upper surface at a height for positioning the elastic support portion 5 at a predetermined position. The upper surfaces are the upper surfaces of the four corners, and are arranged symmetrically in the X and Y directions around the core body 342. The upper surfaces are arranged on four coplanar surfaces, each with a mounting hole 445 formed therein. The mounting holes 445 integrally fix the elastic support portion 5, the spring stop portion 44, and the base member 42 via the fastening member 62.

[0058] Here, the mounting holes 445 are provided in the same plane at the four corners of the spring stop portion 44, which are at the same height. This ensures that the top surface is flat enough to serve as a spring fixing surface, and also stabilizes the assembly precision in the overlapping direction of the parts related to the air gap G.

[0059] The fastening member 62 is inserted through the core-side fixed end (one end) 52 of the core-side arm 562 of the elastic support portion 5 , and fixes the core-side fixed end 52 to the spring stop portion 44 .

[0060] The fastening member 62 has its head engaged with the core-side fixed end portion 52 of the elastic support portion 5 (5a, 5b), is inserted through the core-side fixed end portion 52 and the mounting hole 445, and is fastened to the joining hole 426 of the base member 42. As a result, the spring stop portion 44 is fixed together with the elastic support portion 5 in a stacked state to the base member 42. The fastening member 62 is, for example, a rivet.

[0061] <Elastic Supporting Parts 5 (5a, 5b)> The elastic supporting parts 5 (5a, 5b) are plate springs that connect the fixed body 4 and the movable body 7 and elastically support the movable body 7 so that it can move freely. Specifically, the elastic supporting parts 5 are disposed outside the electromagnet part 3 (coil 32), and connect the spring stop part 44 and the movable body 7 via the spacer 76.

[0062] The elastic support portion 5 (5a, 5b) is a pair of elastically deformable leaf springs made of SUS or the like, has a predetermined thickness (thickness in the Z direction), and is arranged so as to be stacked between the spring stop portion 44 and the movable body 7 in the thickness direction (Z direction).

[0063] Each of the elastic support portions 5 (5a, 5b) has a core-side fixed end portion 52, a yoke-side fixed end portion 54, and a deformable arm 56 extending between the core-side fixed end portion 52 and the yoke-side fixed end portion 54.

[0064] The elastic support portions 5a, 5b are each formed in a rectangular shape in a plan view, with the pair of core-side fixed ends 52 and the pair of yoke-side fixed ends 54 located at the vertices of the rectangle. A deforming arm 56 is disposed between the pair of core-side fixed ends 52 and the pair of yoke-side fixed ends 54. The deforming arm 56 extends in the X direction and has linear core-side arms 562 and yoke-side arms 564 that are arranged in parallel. The pair of core-side fixed ends 52 are provided at both ends of the core-side arm 562, and the pair of yoke-side fixed ends 54 are provided at both ends of the yoke-side arm 564.

[0065] The deformable arm 56 is formed by connecting a core-side arm 562 and a yoke-side arm 564 with a serpentine portion having a length sufficient to allow deformation into a serpentine shape.

[0066] Due to the elastic deformation of the deformation arm 56, the core side arm 562 and the yoke side arm 564 can move relative to each other in the Z direction (thickness direction), and the pair of core side fixed ends 52 and the pair of yoke side fixed ends 54 at both ends of each arm are displaced in the Z direction.

[0067] A pair of core-side fixed ends 52 are fixed to the two corners of the spring stop portion 44 via fastening members 62, and a pair of yoke-side fixed ends 54 are fixed to the movable body 7 by fastening members via spacers 76 radially outside the electromagnet portion 3.

[0068] As a result, the elastic support portions 5a, 5b elastically support the movable body 7 with a pair of yoke side fixed ends 54 relative to a pair of core side fixed ends 52 fixed to the fixed body 4, so that the movable body 7 can be supported in a balanced manner and can vibrate stably.

[0069] The thickness of the elastic support portions 5a, 5b ensures a deformation region for the elastic support portions 5a, 5b. As shown in Fig. 5, the elastic support portions 5a, 5b are located in approximately the same layer as the core body 342, whose upper surface is the pole surface 341, in the magnetic pole core 34. This allows the thickness to be thinner, and the overall thickness to be reduced, compared to a configuration in which the elastic support portions are stacked on the layer in which the core body 342 is located.

[0070] In the elastic support portions 5a and 5b, the pair of yoke-side fixed ends 54, the serpentine portion of the deforming arm 56, and the yoke-side arm 564 are disposed on the base member 42 in positions that do not interfere with the electromagnet portion 3, and are deformed and displaced in the Z direction. The deforming arm 56 including the serpentine portion enables stable assembly while ensuring a long spring length.

[0071] The elastic support portions 5a and 5b are arranged at symmetrical positions around the magnetic pole core 34. That is, the elastic support portions 5a and 5b are arranged so as to support the movable body 7 at every position rotated 90 degrees around the axis of the coil 32 outside the coil 32 on the outer periphery of the magnetic pole core 34.

[0072] In this way, the elastic support portions 5a, 5b are spaced apart in the Y direction around the magnetic pole core 34 and elastically support the movable body 7 symmetrically in the X direction, thereby providing well-balanced support and stable drive. In addition, a serpentine portion is provided between the parallel yoke-side arm 564 and core-side arm 562 to ensure sufficient length for elastic deformation, allowing for effective use of space (downsizing).

[0073] For example, when the movable body 7 moves relative to the fixed body 4, the elastic support members 5a and 5b can determine the displacement amount and natural frequency of the movable body 7 by setting the spring constant, and can also adjust the resonance frequency. When the movable body 7 moves, that is, when current is applied to the coil 32, displacement occurs, which creates a mechanical tactile sensation.

[0074] <Movable body 7> The movable body 7 is a plate-like body that moves up and down relative to the fixed body 4 having the electromagnet portion 3. The lower surface (lower surface 722 of the magnetic yoke 72) of the movable body 7 faces the entire surface of the base member 42 together with the electromagnet portion 3. A magnetic attraction force is generated on the lower surface 722 when the coil is energized.

[0075] The movable body 7 has a notch 7a on its outer periphery to avoid the head of a fastening member 62 that fastens the core-side fixed end 52 of each elastic support portion 5a, 5b to the spring stop portion 44. The movable body 7 has a spacer 76, a magnetic yoke 72 arranged overlapping the spacer 76, and a weight portion 74 arranged overlapping the magnetic yoke 72.

[0076] <Magnetic Yoke (Magnetic Member) 72> The magnetic yoke 72 is provided facing the electromagnet portion 3 and is movable toward the electromagnet portion 3. The movement of the magnetic yoke 72 causes the vibration actuator 1 to generate vibrations.

[0077] The magnetic yoke 72 is a thin plate-shaped magnetic body, and is disposed opposite the magnetic pole surface 341 of the core body 342. The magnetic yoke 72 is also disposed opposite the upper surfaces of the base member 42 and the spring stop portion 44, and is attracted to each other by the magnetic attraction force generated between the base member 42 and the spring stop portion 44 and the outer periphery of the magnetic pole core 34.

[0078] The magnetic yoke 72 is formed from a single sheet of soft magnetic material and has a high degree of flatness. The magnetic yoke 72 may be formed from soft magnetic materials such as silicon steel, permalloy, or ferrite. The magnetic yoke 72 may also be formed from electromagnetic stainless steel, sintered material, MIM (metal injection molding) material, laminated steel, or SECC (electro-galvanized steel sheet: Steel Electrolytic Cold Commercial). The magnetic yoke 72 is preferably formed from silicon steel or SECC. The magnetic yoke 72 is preferably formed from a magnetic thin sheet material having a thickness of, for example, 1 mm or less, more preferably 0.7 mm or less, and even more preferably 0.5 mm or less. This allows the vibration actuator itself to be made thinner without narrowing the vibration area.

[0079] The magnetic yoke 72 also functions as a weight on the movable body side.

[0080] In this way, the magnetic yoke 72 is made of a single thin plate material, which reduces the number of parts, reduces costs, and simplifies assembly. Furthermore, because the magnetic yoke 72 is a highly flat plate, it can be disposed opposite the entire surface of the magnetic pole surface 341 of the core body 342 of the magnetic pole core with an equal air gap G therebetween, improving the precision of the air gap G surface and enabling the magnetic attraction force between the electromagnet portion 3 and the magnetic yoke 72 to be effectively exerted.

[0081] The magnetic yoke 72 is joined to the yoke-side fixed ends 54 of the elastic support portions 5 a and 5 b via spacers 76 .

[0082] <Weight Portion 74> The weight portion 74 is formed in a flat plate shape and laminated on the magnetic yoke 72. The weight portion 74 has the same outer shape as the magnetic yoke 72 and is fixed integrally to the magnetic yoke 72.

[0083] The weight portion 74 increases the generated vibration by increasing the weight of the movable body 7. The weight of the weight portion 74 can be adjusted to set the natural frequency of the movable body 7. The weight of the weight portion 74 can be changed by changing its thickness and the area where it is placed relative to the magnetic yoke 72.

[0084] The weight portion 74 has recessed portions 742 formed at the four corners of the upper surface, and joining holes 744 formed in the recessed portions 742 .

[0085] A fastening member 64 such as a rivet is inserted into the joining hole 744, and the fastening member 64 passes through the through hole 724 of the magnetic yoke 72 and is joined to the yoke-side fixed end 54 of the elastic support part 5. The weight part 74 is disposed so that its upper surface faces the top surface of the cover 9 with a predetermined distance therebetween.

[0086] <Spacer 76> The spacer 76 is used to ensure an air gap G, which becomes a movable area of ​​the movable body 7. The spacer 76 is disposed outside the electromagnet portion 3 between the lower surface 722 of the magnetic yoke 72 and the elastic support portions 5a, 5b, and separates the magnetic yoke 72 from the electromagnet portion 3 in the vertical direction. The spacer 76 is, for example, a cylindrical body, and is fixed to the yoke-side fixed end portion 54 at the four corners of the lower surface 722 of the magnetic yoke 72 via rivets, which are fastening members 64, and is interposed between the magnetic yoke 72 and the elastic support portions 5a, 5b.

[0087] The thickness of the spacer 76 separates the magnetic yoke 72 from the magnetic pole surface 341 of the core body 342. This creates a gap between the magnetic yoke 72 and the magnetic pole surface 341, i.e., an air gap G. This allows the magnetic yoke 72 of the movable body 7 to move through the layers when the spacer 76 is positioned in its default position, thereby sufficiently setting the movable range of the movable body in the vibration actuator 1 and providing suitable vibration characteristics. This air gap is also formed in the same manner in each of the embodiments described below. At this time, the core body 342 has a hard stop function that restricts downward movement of the magnetic yoke 72 (movement toward the base member 42) by the magnetic pole surface 341 abutting against the magnetic yoke 72.

[0088] The spacer 76 has a shape that avoids the coil 32 when the magnetic yoke 72 is displaced due to deformation of the elastic support portion 5, and is located in the portion that becomes the magnetic pole surface of the magnetic yoke 72 (the central portion of the lower surface 722 facing the magnetic pole core 34), outside the electromagnet portion 3 including the coil 32.

[0089] Although the spacer 76 is made of a non-magnetic material, it may be made of a magnetic material. The spacer 76 is made of a material such as austenitic stainless steel (SUS).

[0090] Depending on the design of the spacer 76, the degree of freedom of the movable area of ​​the movable body 7 and the elastic support parts such as leaf springs used in the elastic support parts 5 can be increased.

[0091] The spacer 76 can set the air gap G by adjusting its thickness (length in the Z direction), thereby improving the accuracy of the air gap G. The spacer 76 can also function as a weight when moving the movable body 7. For example, using a high specific gravity material for the spacer 76 increases the movable weight, which can increase the generated vibration.

[0092] <Cover 9> The cover 9 covers the actuator body 2 from above. The cover 9 is attached to the base member 42 so as to close the bottom surface of the cover 9, thereby forming a housing that covers the movable body 7 and the electromagnet section 3. The cover 9 is fixed to the magnetic base member 42, and houses the magnetic yoke (magnetic member) 72 in a vibrating manner.

[0093] The cover 9 protects the movable body 7 and the electromagnet unit 3 by preventing external interference. The cover 9 has a rectangular top surface 92 and side wall portions 94, 96 that hang down from the outer edge of the top surface 92. The side wall portions 94, 96 have different shapes and include engaging portions (engaging protrusions 942, engaging recesses 962) that engage with the engaged recesses 422 and engaged protrusions 424 of the base member 42, respectively. Note that the side wall portion 96 may also be referred to as an end wall portion 96 to distinguish it from the side wall portion 94. Because the engaging protrusions 942 and the engaging recesses 962 have different shapes, the cover 9 can be easily fitted into the base member 42 without making a mistake in the orientation during assembly.

[0094] The top surface of the cover 9 functions as a hard stop in the direction in which the movable body 7 is removed. The cover 9 may also be configured to have a damper (buffer material) on the surface facing the weight portion 74, giving the damper a hard stop function. By locating a damper inside the cover 9, it is possible to achieve a sharp tactile sensation with the device alone. Furthermore, the vibration actuator 1 can be mounted in any orientation and position on the product via the cover 9, increasing the degree of freedom in component layout.

[0095] <Magnetic circuit and operation of vibration actuator 1> Figures 8A, 8B, and 8C are diagrams used to explain the operation of the vibration actuator. Note that the cover 9 has been omitted from Figure 8 for convenience. Corresponding to the partial cross-sectional view of Figure 5, Figure 8A shows the vibration actuator in a non-excited state, and Figure 8B shows the vibration actuator generating thrust in an excited state, as well as the magnetic flux flow M. Figure 8C shows the vibration actuator in a non-excited state after excitation.

[0096] In the vibration actuator 1 in the non-excited state shown in Fig. 8A, that is, in the non-energized state where no current is passed through the coil, the movable body 7 is disposed at a default predetermined distance L1 from the base member 42, with a gap G formed between the bottom surface 722 and the magnetic pole surface 341. In this state, for example, as shown in Fig. 8B, a current is passed through the coil 32 to excite the electromagnet section 3. This generates a magnetic field (flow of magnetic flux M) that passes through the movable body 7, with the magnetic pole surface (top surface) 341 of the magnetic pole core 34 as the north pole and the joint surface with the base member 42 as the south pole.

[0097] According to the principle of an electromagnetic solenoid, the movable body 7 attracts the magnetic pole surface 341 of the magnetic pole core 34, the spring stop portion 44, and the surface of the base member 42, forming the magnetic circuit shown in the drawing. Because the magnetic pole core 34, the spring stop portion 44, and the base member 42 are fixed, a thrust is generated in the movable body 7 in the direction of the white arrow, and the movable body 7 moves in a direction approaching the magnetic pole surface 341 of the magnetic pole core 34.

[0098] Next, when the power supply to the coil 32 is de-energized, the magnetic field disappears, the magnetic attraction force of the electromagnet portion 3 disappears, and the electromagnet portion 3 enters a de-energized state. This releases the biasing force of the elastic support portions 5a, 5b, which have deformed toward the base member 42. That is, as shown in FIG. 8C , a spring reaction force is generated as the elastic support portions 5a, 5b, and the reaction force of the elastic support portions 5a, 5b moves the movable body 7 back to its original position. At this time, the reaction force of the elastic support portions 5a, 5b moves the movable body 7 to a position displaced away from the magnetic pole core 34 from the stationary position (indicated by the predetermined distance L1), which is an immovable state, and generates strong vibrations.

[0099] This vibration repeats reciprocating movement in the Z direction while attenuating as the biasing force decays, resulting in free vibration. Alternatively, vibration may be generated by repeatedly energizing and deenergizing the coil 32 to cause the movable body 7 to reciprocate in the Z direction. In this way, in the vibration actuator 1, the movable body 7, which is supported in a suspended state by the elastic support parts 5a and 5b relative to the electromagnet part 3, is mechanically displaced by the magnetic attractive force generated between it and the opposing electromagnet part 3 when current is applied, and then undergoes free vibration.

[0100] This magnetic attraction force causes one of the base member 42, the electromagnet portion 3, and the movable body 7 to move closer to the other, causing a displacement. This movement causes the movable body 7 to vibrate due to the elastic force (biasing force) generated in the elastic support portions 5 a and 5 b, giving the user a tactile sensation.

[0101] In the vibration actuator 1, a flat, annular coil 32 and a core body 342 of a disk-shaped magnetic pole core 34 arranged inside the coil 32 are disposed on a flat, plate-shaped base member 42 within the cover 9.

[0102] In the vibration actuator 1, the electromagnet section 3 having the base member 42, the coil 32, the bobbin 36 and the magnetic pole core 34 supports the flat-plate-shaped movable body 7 via the plate-shaped elastic support sections 5a and 5b so that it can move freely in the approaching and separating directions.

[0103] With this configuration, the opening of the cover 9 is closed by the thin plate-shaped base member 42, and inside it, the coil 32, magnetic pole core 34, and spring stop portion 44 are arranged in the same layer on the base member 42. In addition, the elastic support portions 5a, 5b are arranged in a layer laminated on the spring stop portion 44 so as to be flush with the magnetic pole surface 341 (the upper surface of the electromagnet portion 3), and a layer including the air gap G is laminated on that layer using spacers 76. The magnetic yoke 72 and weight portion 74 of the movable body 7 are movably arranged on the layer of the air gap G, resulting in a vibration actuator 1 that has been made thin. In this way, the assembly accuracy is determined by the overlapping of the parts, making high-precision assembly possible.

[0104] In the vibration actuator 1, the movable body 7 is covered by the cover 9, which prevents interference such as external contact with the inside of the actuator, and the outer surface of the housing, excluding the surface from which the wiring is drawn (extension 384), can be attached to the product. This improves layout flexibility when mounting on a product, and makes it possible to change the vibration direction of the actuator.

[0105] Furthermore, the vibration actuator 1 has a thin plate configuration (a thinner flat plate compared to a configuration in which the coil 32, magnetic pole core 34, and elastic support members 5 (5a, 5b) are stacked), which allows for space-saving installation. The vibration actuator 1 is thin and vibrates optimally in a small space.

[0106] Furthermore, in the vibration actuator 1, the movable range of the elastic support members 5 (5a, 5b) can be secured as a gap G within the movable range by the thickness of the elastic support members 5 (5a, 5b). Furthermore, the thickness of the spacer 76, together with the thickness of the elastic support members 5 (5a, 5b) and the thickness of the magnetic pole core 34, sets the air gap G between the magnetic pole faces that attract the electromagnet unit 3 and the movable body 7. The air gap G ensures the vibration characteristics of the vibration actuator, which is the movable range of the elastic support members 5 (5a, 5b) that moves the magnetic pole core 34 of the electromagnet unit 3 and the magnetic yoke 72 toward or away from each other.

[0107] In this way, favorable vibration characteristics can be achieved without providing separate members for forming the gap G, which is the range of movement for each component, and a simple configuration can be achieved to further reduce the thickness, simplify assembly, and reduce costs. Furthermore, by making each component flat, it is possible to use, for example, an unprocessed steel plate for the magnetic yoke 72, thereby enabling a thinner design and lower costs.

[0108] Furthermore, because the elastic support members 5 (5a, 5b) are leaf springs with a high manufacturing precision in thickness, variations in the gap between the base member 42 and the spacer 76 are suppressed, resulting in a stable gap that ensures a movable range and sets the air gap G. Furthermore, in the vibration actuator 1, the direction of the current flowing circumferentially through the coil 32 may be either rightward or leftward.

[0109] (Embodiment 2) Fig. 9 is an exploded perspective view of a vibration actuator according to embodiment 2 of the present invention with the cover and movable body removed, as viewed from above, and Fig. 10 is a perspective view of the state shown in Fig. 9, as viewed from below. Also, Fig. 11 is an exploded perspective view of the vibration actuator according to embodiment 2 of the present invention, as viewed from above, and Fig. 12 is an exploded perspective view of the state shown in Fig. 11, as viewed from below.

[0110] The vibration actuator 1A according to the second embodiment is formed by partially modifying or adding to the configuration of the vibration actuator 1 according to the first embodiment, and when the components have the same functions as those described above, they are given the same names and reference numerals and their explanations are omitted. Furthermore, components that have substantially the same functions are explained by using the same names and reference numerals with the letter "A" added to the end.

[0111] As shown in a vibration actuator 1A according to a second embodiment shown in FIGS. 9 to 12, in the vibration actuator 1 of the first embodiment, the weight of the weight portion 74 of the movable body 7 may be adjusted and increased.

[0112] The vibration actuator 1A differs only in the configuration of the weight portion 74A in the vibration actuator 1. The vibration actuator 1A is mounted in place of the vibration actuator 1 in a vibration presentation device 10 (see FIG. 1).

[0113] The vibration actuator 1A has a housing configured by attaching a cover 9 to a plate-shaped base member 42 of an actuator main body 2A so as to cover it, and is a thin plate-shaped vibrating body, and has the same functions as the vibration actuator 1.

[0114] The actuator body 2A has a configuration in which a plate-shaped movable body 7A is disposed inside the housing so as to be movable in the thickness direction (vertical direction, Z and -Z directions) relative to a fixed body 4. The actuator body 2A has a base member 42, a spring stop portion 44, a fixed body 4 having a disk-shaped electromagnet portion 3, elastic support portions 5 (5a, 5b), and the movable body 7A.

[0115] The movable body 7A is attached to the elastic support portions 5a and 5b connected to the spring stop portion 44 of the fixed body 4 via a spacer 76.

[0116] The movable body 7A has a weight portion 74A on a magnetic yoke 72, and the weight portion 74A has a weight portion main body 77 and an auxiliary weight portion 78 made of a material with a high specific gravity.

[0117] The weight portion main body 77 is formed in a rectangular frame shape having an opening 771 in the center, and is joined to the magnetic yoke 72 and the elastic support portions 5a and 5b via joining holes 774 provided at the corners.

[0118] The joining hole 774 is formed in the seat groove 772, and when the fastening member 64 is attached to the elastic support parts 5a and 5b by the fastening member 64, the head of the fastening member 64 is positioned at the same height level as or lower than the surface 773. As a result, when the movable body 7A vibrates, even if it moves in a direction away from the base member 42, the fastening member 64 does not protrude in the direction away.

[0119] The weight portion main body 77 is made of SUS, copper, or the like, and together with the auxiliary weight portion 78, increases the weight of the movable body and increases the vibration output.

[0120] The auxiliary weight portion 78 is disposed within the opening 771 of the weight portion main body 77 and is made of a material having a greater specific gravity than the weight portion main body 77 .

[0121] The auxiliary weight portion 78 is made of a high-specific-gravity material, such as phosphor bronze, SUS, or tungsten. Since the weight portion 74A has the auxiliary weight portion 78 made of a high-specific-gravity material, the weight of the movable body 7A can be further increased, thereby increasing the vibration generated. Furthermore, the weight portion main body 77 of the weight portion 74A may also be made of a high-specific-gravity material, or the weight portion 74A may be made of a single high-specific-gravity material, thereby increasing the vibration generated by the movable body.

[0122] In this way, in the weight portion 74A, the movable weight mass can be increased and the vibration output can be increased, that is, a higher output can be achieved, by appropriately changing the ratio between the weight portion main body 77 and the auxiliary weight portion 78. Furthermore, the natural frequency of the movable body can be set by adjusting the weight of these weight portions 74A.

[0123] <Driving principle of vibration actuator 1> The driving principle of the vibration actuator 1 (vibration actuator 1A) will be briefly explained below. The vibration actuators 1 and 1A can also be driven by generating a resonance phenomenon using pulses using the following equations of motion and circuit equations. Note that the operation is not resonant driving, but rather expresses a bodily sensation corresponding to a predetermined operation, and for example, the actuators may be driven by inputting a current pulse (which may be single or multiple) via a control unit (not shown).

[0124] In the vibration actuator 1, the movable body 7 performs reciprocating motion based on the equations (1) and (2).

[0125]

[0126]

[0127] That is, the mass m [kg], displacement x(t) [m], thrust constant K ｆ [N / A], current i(t) [A], spring constant K ｓｐ [N / m], damping coefficient D [N / (m / s)], etc. can be changed as appropriate within the range that satisfies formula (1). In addition, voltage e(t) [V], resistance R [Ω], inductance L [H], back electromotive force constant K ｅ [V / (rad / s)] can be changed as appropriate within a range that satisfies formula (2).

[0128] In this way, the vibration in the vibration actuator 1 is generated by the mass m of the movable body 7 and the spring constant K of the metal spring (leaf spring in this embodiment) serving as the elastic support portion 5 (5a, 5b). ｓｐ The vibration generated by the vibration actuator 1 can be set and changed by the input voltage (pulse).

[0129] Furthermore, in the vibration actuator 1, the base member 42 and the elastic support members 5 (5a, 5b) are joined together, and the elastic support members 5 (5a, 5b) are joined together and the movable body 7 are joined together using adhesive or welding as fastening members. Screws may also be used as fastening members.

[0130] <Drive Circuit for Vibration Actuator 1> FIG. 13 shows an example of a drive circuit for the actuator body.

[0131] 13 is included in, for example, the control unit. The drive circuit connects a current pulse supply unit (switching element) configured with a MOSFET (metal-oxide-semiconductor field-effect transistor) 18 to an actuator (vibration actuator) 1. In addition to the MOSFET, the circuit unit has a port 1 ("Port-1") 15 such as a signal generation unit (Signal generation) that applies a voltage pulse, a gate resistor RG13, and a gate-source resistor RGS14.

[0132] In the control section, port 1 ("Port-1") 15 is connected to the gate of MOSFET 18 via gate resistor RG. MOSFET 18 is a discharge changeover switch or the like, and is connected to a vibration actuator (shown as [Actuator] in FIG. 13) 1, 1A, to which voltage is supplied from power supply section Vin, and to a gate-source resistor RGS14. An input voltage is shown in FIG. 14 as an example of an actuator drive signal input to actuator 1.

[0133] When the input of the actuator drive signal is stopped, the vibration actuators 1 and 1A release the biasing force, and the biasing force moves the movable body 7 in the other direction (the positive Z direction). The vibration actuators 1 and 1A vibrate the movable body 7 by inputting and stopping the actuator drive signal. The vibration actuators 1 and 1A vibrate the movable body 7 without using a magnet.

[0134] In this embodiment, the actuator drive signal corresponds to a drive current pulse (also referred to as a "current pulse") supplied to the coil 32 as a drive current for driving the movable part and the control device. In the vibration actuator 1, when a current pulse is supplied to the coil 32, the magnetic attraction force between the electromagnet part 3 and the movable body 7 causes the movable body 7 to move in one direction toward the electromagnet part 3, resulting in mechanical displacement, and the supply of current is stopped, after which the movable body 7 is allowed to vibrate freely. The vibrations generated thereby are applied to the control device. The elastic support parts 5 (5a, 5b) can control the displacement due to the magnetic attraction force and the free vibration period.

[0135] The actuator drive signal is generated by inputting a signal from a detection unit that detects the operator's operation. The detection unit may be, for example, a pressure sensor that detects the pressure caused by the operator's operation as a pressure signal and converts the pressure signal into an electrical signal for output. The detection unit may also be a capacitance type or a proximity sensor that detects the position of the operator's finger (pressing object) pressing the vibration presentation unit by detecting capacitive coupling between the operator's finger and the detection unit.

[0136] 5, a damper (damping member) 79 made of an elastic material such as silicone gel may be provided between the movable body 7 and the fixed body 4 (specifically, the surface of the electromagnet portion 3) to dampen vibrations. By mounting the damper 79 inside the actuator, it is possible to suppress lingering vibrations in the vibration actuator 1 itself, that is, in the device itself, and improve the impact resistance of the movable body 7. Furthermore, a damping member 791 made of a material similar to the damper (for example, a material with low elasticity and damping properties) may also be provided as a hard stop material between the cover 9 and the movable body 7 (which may correspond to a magnetic member).

[0137] By using the damper as the suppression member 791 as a hard stop material, it is possible to suppress the knocking noise caused by the movable body 7, and by providing low elasticity and damping properties, it is possible to improve the sharpness of the vibration of the movable body 7. In other words, by using the damper as the suppression member 791 and providing it between the cover 9 and the movable body 7, it is possible to make the damper function as a hard stop in the popping-out direction opposite to the suction force.

[0138] <Modification> Figure 15 is a diagram showing a modification of a vibration actuator according to an embodiment of the present invention. The actuator body 2 of the vibration actuator shown in Figure 15 comprises a strain detection section (strain detection sensor) 82 and a capacitance detection section (proximity sensor) 84 as a proximity detection section. When detecting an operating load, the vibration actuator may be configured to have either the strain detection section 82 or the capacitance detection section 84.

[0139] The actuator main body 2 has a strain detection unit 82 with a strain gauge on the elastic support member 5a. The strain detection unit 82 detects the strain of the yoke-side arm 564 of the elastic support member 5a, which is deformed when the movable body 7 serving as the movable member is pressed toward the bottom side of the opening (in the pressing operation direction). The detected strain is output to a control unit or the like, and the coil 32 is energized to attract and move the magnetic yoke 72 so that the amount of movement of the movable member (e.g., the movable body 7) corresponds to the strain. Note that the strain detection unit 82 may also be provided on the elastic support member 5b.

[0140] Specifically, the strain detection unit 82 is used to detect the operator's touch operation, i.e., the amount of depression of the movable part (e.g., the movable body 7). Based on the sensor detection result of the strain detection unit 82, the vibration period of the movable part (e.g., the movable body 7) when a drive current pulse is supplied by port 1 (current pulse supply unit) 15 may be adjusted. In other words, the vibration generated by driving can be adjusted according to the strain detection result.

[0141] The capacitance detection unit 84 is provided on the base member 42 and detects a change in capacitance in the base member 42 due to movement of the movable body 7. The capacitance detection unit 84 may be provided in any manner as long as it detects the relative distance, i.e., proximity, between the movable body 7 (magnetic yoke 72, spacer 76, etc.) and a part of the electromagnet unit 3. This allows the movable body to detect a pressing operation by the operator, and the vibration actuator generates vibrations corresponding to the operation via the control unit and applies them to the operator. In this way, the vibration can be adjusted according to the capacitance detection result, and if the vibration actuator is positioned so that the capacitance changes depending on the operating load, the operating load can also be detected.

[0142] <Other embodiments and variants> Furthermore, the following embodiments and variants are formed by changing or adding parts of the configuration of the vibration actuator 1 described above, and when they have the same functions as the components described above, they are given the same names and symbols and explanations are omitted.

[0143] Each of the following vibration actuators has the same basic configuration as vibration actuator 1. Each vibration actuator basically comprises a base member that is a plate-shaped magnetic body, an electromagnet portion on the base member, an external yoke on the outer periphery of the electromagnet portion, a magnetic yoke arranged opposite the electromagnet, and an elastic body (elastic support portion) that connects the magnetic yoke and base member.

[0144] In the vibration actuator 1 configured as described above, the magnetic function of the external yoke 75 arranged on the outer periphery of the coil 32 and the magnetic pole core 34 may be provided on the movable body side. Note that in the following embodiments, components with names similar to those described above basically have the same functions as the components with the names described above.

[0145] (Embodiment 3) Fig. 16 is an external perspective view of a vibration actuator according to embodiment 3 of the present invention, and Fig. 17 is a side view of the vibration actuator according to embodiment 3 of the present invention. Fig. 18 is an exploded perspective view of the vibration actuator according to embodiment 3 of the present invention with the cover and movable body removed, as viewed from above, and Fig. 19 is a perspective view of the state shown in Fig. 18, as viewed from below. Fig. 20 is an exploded perspective view of the vibration actuator according to embodiment 3 of the present invention.

[0146] The vibration actuator 1B shown in FIGS. 16 to 20 is, like the vibration actuator 1, mounted as an electrical device in the vibration presentation device 10 shown in FIG.

[0147] The vibration actuator 1B is a vibration actuator in the form of a flat plate or a thin plate, and is disposed so as to face the seat surface of the seat portion 11.

[0148] The vibration actuator 1B has a rectangular parallelepiped cover 9B with rounded corners 900 of the top surface 92B (rounded shape). The top surface 92B of the vibration actuator 1B has no corners and is positioned so as to face the seat surface of the seat 11 (see FIG. 1) in the thickness direction (Z direction), so that the user sitting on the seat does not feel a foreign body sensation and can sit comfortably without any discomfort. Details of the cover 9B will be described later.

[0149] The vibration actuator 1B has a cover 9B, as well as a thin plate-like actuator body 2B having a fixed body 4B, a movable body 7B, and elastic support portions 5B (50a, 50b).

[0150] The vibration actuator 1B is a thin plate-shaped vibrating body, and the cover 9B and the plate-shaped base member 42B of the fixed body 4B form a housing. The vibration actuator 1B transmits the generated vibrations to a connected object, for example, a seat that is placed on it.

[0151] The actuator main body 2B has an electromagnet portion 3B fixed to a part of the housing (base member 42B), and supports the movable body 7B within the cover 9B via elastic support portions 5B (50a, 50b) so that the movable body 7B can vibrate in the vertical direction (Z direction).

[0152] <Fixed body 4B> The fixed body 4B has a base member 42B which is a flat magnetic body, and an electromagnet portion 3B fixed to the base member 42B. The base member 42B generates a magnetic attraction force together with the electromagnet portion 3B (coil 32B, magnetic pole core 34B, bobbin 36B, and substrate portion 38B) which is configured in a cylindrical shape, and an external yoke 75.

[0153] The base member 42B has engaging recesses 422 on both side edges that engage with the engaging protrusions 942 of the cover 9B, and has engaging protrusions 424 on the tip and base ends (edges spaced apart in the Y direction) that engage with the engaging recesses 962B of the cover 9B.

[0154] The electromagnet unit 3 is fixed to the base member 42B via a joining hole 421. The joining hole 421 is formed in the center of the base member 42B, and the joining protrusion 344 of the magnetic pole core 34B fits into the joining hole 421. As a result, the base member 42B functions as a magnetic body with the core body 342 of the magnetic pole core 34B integrally provided in the center of its upper surface. The base member 42B is formed by processing the same material as the base member 42, and has the same effects.

[0155] The electromagnet portion 3B has a cylindrical magnetic pole core 34B and a coil 32B disposed around the outer periphery thereof via a bobbin 36B. The electromagnet portion 3B is formed in a cylindrical (disk) shape.

[0156] The magnetic pole core 34B is made of a magnetic material, and has a joint protrusion 344 protruding downward from the center of the lower surface of a disk-shaped core body 342 whose upper surface is a magnetic pole surface. The core body 342 is formed in a flat cylindrical shape and is surrounded by the coil 32.

[0157] The magnetic pole core 34B is disposed inside the cylindrical bobbin body 361 of the bobbin 36B and is disposed within the cylindrical bobbin body 361. The magnetic pole core 34B is housed in a state where it is positioned on a step portion (inner flange portion) 364 formed on the edge of the opening on the lower surface side of the cylindrical bobbin body (cylindrical body) 361. By fitting the joint protrusion 344 into the joint hole 421, the magnetic pole core 34B sandwiches the step portion 364 together with the base member 42B, thereby fixing the bobbin 36B to the base member 42B.

[0158] The magnetic pole core 34B is formed by sintering a metal such as Fe, etc. Since the magnetic pole core 34B is formed by sintering, there is a high degree of freedom in the shape.

[0159] The magnetic pole core 34B is fitted into the joining hole 421, and is disposed in the center of the base member 42B, protruding from the center of the base member 42B.

[0160] The bobbin 36B is made of the same material as the bobbin 36 and has the same function. A flange (outer flange) 362B that protrudes radially outward is formed at the upper opening edge of the cylindrical bobbin body 361, and the flange 362B is provided with a notch 3622 for checking and measuring the height of the magnetic pole core 34B. The magnetic pole core 34B is configured to protrude above the top surface of the bobbin.

[0161] The flange 362B (see FIG. 21A) holds the coil 32B in a sandwiched state between the flange 362B and the base member 42B by fitting and joining the joining protrusion 344 of the magnetic pole core 34 into the joining hole 421. As a result, the electromagnet portion 3B can be attached to the base member 42B by crimping the magnetic pole core 34B to the base member 42B, and the coil 32B can be fixed to the base member 42B together with the bobbin 36B in a state where it is prevented from coming off.

[0162] Specifically, the stepped portion 364 is a flat annular plate, with the joining protrusion 344 passing through it and the outer edge of the core body 342 engaged with its upper surface. The joining protrusion 344 at the bottom of the core body 342 fits into the joining hole 421 of the base member 42B, whereby the outer periphery of the core body 342 clamps and fixes the stepped portion 364 of the bobbin 36B to the base member 42B. In addition, the flange 362B of the bobbin 36B clamps and fixes the coil 32B to the base member 42B.

[0163] The coil 32B is formed in an annular shape. The coil 32B is disposed on the base member 42B via the annular main body portion 382 of the substrate portion 38B. The axis of the coil 32B coincides with the axis of the magnetic pole core 34B. The coil 32B is formed of, for example, UEW, and is connected to the wiring portion of the substrate portion 38B by the coil windings at both ends.

[0164] An annular main body 382, ​​which is part of the substrate 38B, is disposed on the outer periphery of the magnetic pole core 34B between the coil 32B and the base member 42B. Furthermore, since the magnetic pole core 34B is disposed within the coil 32B, the magnetic circuit is improved, and the electromagnetic conversion efficiency is enhanced.

[0165] The substrate portion 38B has the same basic configuration and function as the substrate portion 38, and has an annular main body portion 382 having an opening 381, and an extension portion 384 extending radially outward from a part of the annular main body portion 382.

[0166] The annular main body 382 is formed in an insulating sheet shape and insulates the coil 32B from the base member 42B. The extension 384 connects the coil 32B to an external device or the like via a wiring portion of the extension 384, and energizes the coil 32B via the external device or the like to excite the magnetic pole core 34B.

[0167] The annular main body portion 382 of the substrate portion 38B is formed in a ring shape corresponding to the shape of the coil 32B. The annular main body portion 382 is attached to the base member 42B with the magnetic pole core 34B disposed in the opening 381. The annular main body portion 382 is fixed onto the base member 42B, and the coil 32B is placed on its upper surface. The annular main body portion 382 is interposed between the base members 42B and functions as an insulating film (insulator) that insulates the coil 32B from the base members 42B.

[0168] The substrate portion 38B has an insulating function and a conductive function to the coil 32B (through the wiring portion), which can prevent insulation breakdown, improve the routing of the wiring that supplies power to the coil 32B, and prevent coil breakage. Furthermore, when connecting using a connector or the like, the connection can be easily made.

[0169] The spacer 60 functions as a spring bearing that receives the elastic support portions 5B (50a, 50b) and ensures an air gap G that serves as a movable area for the movable body 7B. The spacer 60 is disposed outside the electromagnet portion 3B, between the base member 42B and the elastic support portions 5B (50a, 50b), and separates the movable body 7B from the electromagnet portion 3B in the vertical direction.

[0170] The spacer 60 positions the elastic support members 5B (50a, 50b) at a distance from the base member 42B to ensure a movable range for the connected elastic support members 5B (50a, 50b). The spacer 60 has a predetermined height (thickness) and is, for example, a cylindrical body. The spacer 60 is disposed between the base member 42B and the elastic support members 5B in the vibration direction (Z direction) and is fixed via a rivet, which is a fastening member 620. The spacer 60 attaches the elastic support members 5B to the base member 42B in the vibration direction at a predetermined distance that is included in the movable range.

[0171] The spacer 60 is disposed on the base member 42B to the side of the electromagnet portion 3B, in the same layer as the electromagnet portion 3B. The thickness of the spacer 60 separates the elastic support portion 5B from the base member 42B and the core body 342, and separates the movable body 7B (more specifically, the magnetic yoke 72B and the external yoke 75) from the upper surface (magnetic pole surface 341) of the core body 342.

[0172] The thickness of the spacer 60 defines the distance between the magnetic yoke 72B and the pole face 341, i.e., the air gap G, which can be set and controlled. This allows the movable range of the movable body 7B in the vibration actuator 1B to be sufficiently set, enabling favorable vibration characteristics to be generated. Note that this air gap is formed in a similar manner in each of the embodiments described below. At this time, the core body 342 also functions as a hard stop that restricts downward movement of the magnetic yoke 72B (movement toward the base member 42B) by the pole face 341 abutting against the magnetic yoke 72B.

[0173] Although the spacer 60 is made of a non-magnetic material, it may be made of a magnetic material. The spacer 60 is made of a material such as austenitic stainless steel (SUS).

[0174] Furthermore, depending on the design of the spacer 60, the degree of freedom of the movable area of ​​the movable body 7B and the elastic support portion such as a leaf spring used in the elastic support portion 5B can be increased.

[0175] The spacer 60 can set the air gap G by adjusting its thickness (length in the Z direction), and the precision of the air gap G can be improved.

[0176] <Elastic support portion 5B> The elastic support portion 5B (50a, 50b) is a plate spring that connects the fixed body 4B and the movable body 7B and elastically supports the movable body 7B so that it can move freely. Specifically, the elastic support portion 5B is arranged outside the electromagnet portion 3B (coil 32B) so as to sandwich the electromagnet portion 3B, and connects the fixed body 4B via the spacer 60 and the movable body 7B via the external yoke 75.

[0177] The elastic support parts 5B (50a, 50b) are a pair of elastically deformable leaf springs made of SUS or the like, similar to the elastic support part 5, and have a predetermined thickness (thickness in the Z direction) that ensures a part of the movable area of ​​the movable body 7B. The elastic support parts 5B are arranged symmetrically on either side of the electromagnet part 3B.

[0178] The elastic support portions 5B (50a, 50b) are fixed to the four corners of the underside of the external yoke 75 and to spacers 60 on the base member 42B arranged at a distance on both sides of the four corners in the Y direction via rivets which are fastening members 620, 640.

[0179] Specifically, the elastic support portion 5B (50a, 50b) is arranged between the spacer 60 and the external yoke 75 in the thickness direction (Z direction), for example, horizontally, and at a predetermined distance from the base member 42B by the spacer 60.

[0180] The elastic support members 5B (50a, 50b) can secure a deformation range for the elastic support members 5B and adjust the resonance frequency by changing the plate thickness and spring length. Furthermore, when the movable body 7B moves relative to the fixed body 4B, the elastic support members 5B can determine the displacement amount and natural frequency of the movable body 7B by setting the spring constant.

[0181] The elastic support members 50a, 50b are configured by arranging a pair of fixed-side fixed ends 520 and a pair of movable-side fixed ends 540 at a distance in the width direction of the base member 42B and connecting them with a deformable arm 56. The fixed-side fixed end 520 has a function similar to that of the core-side fixed end 52 described above, and the movable-side fixed end 540 has a function similar to that of the yoke-side fixed end 54 described above.

[0182] The deformation arm 56 is configured by extending a movable-side arm 5640 horizontally in the orthogonal direction (Y direction) from a linear core-side arm 562 connecting a pair of fixed-side fixed ends 520 spaced apart in the X direction (width direction). A pair of movable-side fixed ends 540 is provided at the end of the movable-side arm 5640.

[0183] Due to the elastic deformation of the deformation arm 56, the fixed-side arm 5620 and the movable-side arm 5640 are relatively movable in the Z direction (thickness direction), and the pair of fixed-side fixed ends 520 and the pair of movable-side fixed ends 540 at both ends of each arm are displaced in the Z direction. The fixed-side arm 5620 has a function similar to that of the core-side arm 562, and the movable-side arm 5640 has a function similar to that of the movable-side arm 5640.

[0184] The pair of fixed-side fixed ends 520 are fixed at a predetermined height relative to the base member 42B via spacers 60 at positions spaced apart from the electromagnet portion 3B.

[0185] The pair of movable-side fixed end portions 540 are fixed to the weight portion 74B (movable body 7B) by fixing members 640 via external yokes 75 at positions closer to the electromagnet portion 3B than the fixed-side fixed end portions 520, for example, near the outer periphery of the electromagnet portion 3B. The elastic support portions 50a, 50b are arranged on the base member 42B at positions that do not interfere with the electromagnet portion 3B.

[0186] As a result, the elastic support portions 50a, 50b elastically support the movable body 7B with a pair of movable side fixed ends 540 relative to a pair of fixed side fixed ends 520 fixed to the fixed body 4B, thereby supporting the movable body 7 in a balanced manner and allowing it to vibrate stably.

[0187] In the elastic support portions 50a and 50b, the pair of movable-side fixed end portions 540, the serpentine portion of the deforming arm 56, and the movable-side arm 5640 are disposed on the base member 42B in positions that do not interfere with the electromagnet portion 3, and are relatively displaceable in the Z direction. The deforming arm 56, which is curved and has a long spring length, supports the movable body 7B in a stable manner so that it can vibrate.

[0188] In this way, the elastic support portions 50a, 50b are spaced apart in the Y direction around the magnetic pole core 34B and elastically support the movable body 7B symmetrically in the X direction, thereby providing well-balanced support and stable drive. In addition, the provision of the parallel movable arm 5640 and fixed arm 5620 ensures sufficient length for elastic deformation, allowing for effective use of space (downsizing).

[0189] The elastic support parts 50a and 50b are made of sheet metal and have a plurality of long arms that connect the movable body 7B and the fixed body 4B directly or via spacers 60, thereby enabling stable assembly.

[0190] <Movable body 7B> The movable body 7B has a weight that is increased compared to the movable body 7 of the vibration actuator 1. The movable body 7B is a plate-like body that moves in the vertical direction relative to the fixed body 4B that has the electromagnet portion 3B.

[0191] The movable body 7B has a weight portion 74B that forms the main body, a magnetic yoke 72B, and an external yoke 75 that is arranged on the outer periphery of the electromagnet portion 3B. The movable body 7B has a notch 7a on its outer periphery to avoid the head of a fastening member 620 that fastens the fixed-side fixed end portion 520 of each of the elastic support portions 50a, 50b to the external yoke 75.

[0192] The weight portion 74B is specifically a rectangular flat plate, and has a recess 745 that opens downward formed in the lower surface of the main body portion 741. The magnetic yoke 72B and the external yoke 75 are attached inside the recess 745.

[0193] The weight portion 74B increases the weight of the movable body 7B, thereby increasing the generated vibration. The weight of the weight portion 74B can be adjusted to set the natural frequency of the movable body 7B. It is preferable to use a high specific gravity material for the weight portion 74B.

[0194] The weight portion 74B has a seat recess 742 formed in a corner of the upper surface, and a joining hole 744 formed in the seat recess 742. A fastening member 640 such as a rivet is inserted into the joining hole 744, and the fastening member 640 passes through a through-hole 754 of the external yoke 75 and is joined to the movable-side fixed end portion 540 of the elastic support portion 5B.

[0195] The weight portion 74B is disposed so that its upper surface faces the top surface portion 92B of the cover 9B at a predetermined distance. A damper portion 790 is provided on the upper surface of the fastening member 640 to suppress residual vibration of the movable body 7B and to suppress the amount of movable displacement of the movable body 7B. The damper portion 790 also absorbs the impact when the movable body 7B collides with the top surface portion 92B to perform a hard stop. The damper portion 790 is made of, for example, silicone gel or the like, and can suppress residual vibration in the vibration actuator 1B alone.

[0196] The magnetic yoke 72B is made of a magnetic material and is disposed in a position facing the electromagnet portion 3B in the Z direction, generating a magnetic attraction force between the magnetic yoke 72B and the electromagnet portion 3B. The movable body 7B moves mainly in conjunction with the movement of the magnetic yoke 72B, causing the vibration actuator 1B to generate vibrations.

[0197] The magnetic yoke 72B is a thin magnetic plate formed from a single sheet metal part, and has a configuration that makes it easy to ensure surface precision, has high flatness, and achieves low cost.

[0198] The magnetic yoke 72B is disposed facing the upper surface of the electromagnet portion 3B, i.e., the entire upper surface of the coil 32B and the magnetic pole core 34B, and when current is applied to the coil, a magnetic attraction force is generated between the magnetic yoke 72B and the electromagnet portion 3B. Furthermore, because the magnetic yoke 72B forms a gap with the electromagnet portion 3B over the entire surface, the magnetic resistance is small and the magnetic efficiency is good.

[0199] The magnetic yoke 72B is a disk corresponding to the shape of the electromagnet portion 3B, and is placed on a rib 753 on the upper edge of the opening 752 of the external yoke 75, covering the opening 752 with its upper surface.

[0200] The magnetic yoke 72B has a central hole 726 that engages with a protrusion 746 on the bottom surface of the recess 745, and by engaging the protrusion 746 with the central hole 726, the magnetic yoke 72B is positioned and fixed in the center of the movable body 7B.

[0201] The magnetic yoke 72B, together with the external yoke 75, are attracted to each other by a magnetic attraction force generated between the outer periphery of the electromagnet portion 3B in the base member 42B and the magnetic pole core 34B.

[0202] The magnetic yoke 72B is preferably made of the same material as the magnetic yoke 72, and is particularly preferably made of silicon steel plate or SECC. The magnetic yoke 72B also functions as a weight on the movable body side.

[0203] The external yoke 75 is a magnetic body arranged to surround the electromagnet portion 3B, and is provided on the movable body 7B side. The external yoke 75, together with the electromagnet portion 3B, the magnetic yoke 72B, and the base member 42B, constitute a magnetic circuit.

[0204] The external yoke 75 has an opening 752 in the center, in which the coil 32B and the magnetic pole core 34B are disposed, and is formed in a rectangular frame shape (e.g., a square shape). Within the opening 752 of the external yoke 75, the gap between the upper surface of the magnetic pole core 34B and the magnetic yoke 72B sets the movable range.

[0205] The external yoke 75 has through holes 754 at corners of the rectangular frame-shaped main body portion, at positions surrounding the opening 752. The external yoke 75 functions as a spring fixing portion, and the fastening member 640 is inserted into the through holes 754 and fixed to the lower surface of the external yoke 75 so that the elastic support portions 5B (50a, 50b) extend outward in the Y direction.

[0206] The external yoke 75 can also be used as a weight, and by using a sintered part to form the shape, the degree of freedom in the shape can be ensured.

[0207] The external yoke 75 is disposed at a position surrounding the electromagnet portion 3B so as to be movable in the vertical direction (Z direction) via the elastic support portion 5B. The external yoke 75 is disposed on the base member 42B so that the spacer 60 and the elastic support portion 5B are stacked in this order, and is movable in the Z direction within the range of the thickness of the spacer 60.

[0208] An annular rib 753 that protrudes inward is provided on the upper surface of the external yoke 75 at the upper edge of the opening 752. The magnetic yoke 72B is disposed on the rib 753 so as to close the opening on the inner side of the rib 753.

[0209] The ribs 753 of the external yoke 75 increase the contact surface with the magnetic yoke 72B, thereby realizing a magnetic circuit with superior magnetic efficiency.

[0210] The fastening member 620 is fastened to the base member 42B by engaging its head with the fixed-side fixed end portion 520 of the elastic support portion 5B (50a, 50b) and inserting the fixed-side fixed end portion 520 through the spacer 60. As a result, the outer yoke 75 is fixed to the base member 42B together with the elastic support portion 5B in a stacked state. The fastening member 620 is, for example, a rivet.

[0211] The cover 9B covers the actuator main body 2B from above, and protects the movable body 7B and electromagnet portion 3B of the actuator main body 2B from external interference. The cover 9B is formed in a box shape that opens downward, and by attaching the cover 9B to the base member 42B so that the bottom surface of the cover 9B is closed, a housing that covers the movable body 7B and the electromagnet portion 3B is formed.

[0212] The cover 9B has side walls 94B and end walls 96B that hang down from the outer periphery of a rectangular top surface 92B. In the cover 9B, all corners 900 formed by the top surface 92B, side walls 94B, and end walls 96B are rounded. The side walls 94B and end walls 96B are each provided with engaging portions (engaging protrusions 942 and engaging recesses 962B) that are different in shape and engage with the engaged recesses 422 and engaged protrusions 424 of the base member 42B, respectively.

[0213] Since the engaging protrusions 942 and the engaging recesses 962B have different shapes, the cover 9B can be easily fitted into the base member 42B during assembly without making a mistake in the orientation.

[0214] The top surface 92B of the cover 9B functions as a hard stop when the movable body 7B moves in the direction away from the base member 42B (the direction of removal). The damper portion 790 is provided on the top surface (weight portion 74B) of the movable body 7B, which faces the back surface of the top surface 92B of the cover 9B, enabling the vibration actuator device itself to achieve a sharp tactile sensation. Furthermore, the vibration actuator 1B can be mounted in any orientation and position on the product via the cover 9B, increasing the flexibility of the layout of other components. Furthermore, when placed on the seat of a gaming chair or the like, the vibration actuator 1B is positioned with the corner portion 900 facing the seat, preventing the user from feeling a foreign body sensation.

[0215] <Magnetic Circuit and Operation of Vibration Actuator 1B> The magnetic circuit and operation of the vibration actuator 1B will be described with reference to FIG.

[0216] Figures 21A, 21B, and 21C are longitudinal cross-sectional views provided for explaining the operation of the vibration actuator. These are partial cross-sectional views parallel to the Y direction and passing through the center in the X direction, with Figure 21A showing the vibration actuator in a non-excited state. Also, Figure 21B shows the vibration actuator generating thrust in an excited state, and the magnetic flux flow M. Figure 21C shows the vibration actuator in a non-excited state after excitation. For convenience, the cover 9B has been omitted from Figures 21A to 21C.

[0217] 21A shows vibration actuator 1B in a non-excited state, that is, in a non-energized state where no current is passed through coil 32B. In this state, movable body 7B of vibration actuator 1B is positioned with a default predetermined distance L2 from base member 42B, forming gap G between magnetic yoke 72B and magnetic pole face 341.

[0218] For example, as in the vibration actuator 1B shown in FIG. 21B, when current is passed through the coil 32B to excite the electromagnet portion 3B, a magnetic field (flow of magnetic flux M) is generated that passes through the movable body 7B, with the magnetic pole surface (top surface) 341 of the magnetic pole core 34B acting as a north pole and the joint surface with the base member 42B acting as a south pole.

[0219] Based on the principle of an electromagnetic solenoid, the magnetic yoke 72B and external yoke 75 of the movable body 7B attract the magnetic pole surface 341 of the magnetic pole core 34B and the surface of the base member 42B (the portion facing the lower end of the external yoke 75), forming the magnetic circuit shown in FIG. 21B. Because the magnetic pole core 34B is fixed to the base member 42B, a thrust force is generated in the movable body 7B in the direction of the white arrow. The magnetic pole core 34B approaches the magnetic yoke 72B within the external yoke 75, and the movable body 7B moves in a direction approaching the magnetic pole surface 341 of the magnetic pole core 34B.

[0220] Next, when the power supply to coil 32B is de-energized, the magnetic field disappears, the magnetic attraction force of electromagnet portion 3B disappears, and the base member 42B is de-energized. The biasing force of elastic support portions 50a, 50b, which have deformed toward the base member 42B, is released. As shown in FIG. 21C , a spring reaction force is generated by elastic support portions 50a, 50b, moving movable body 7B back to its original position. At this time, the reaction force of elastic support portions 50a, 50b causes movable body 7B to move away from the stationary position (indicated by the predetermined distance L2) in a direction away from magnetic pole core 34B, generating strong vibrations. As with the first embodiment, this vibration repeats reciprocating motion in the Z direction while attenuating as the biasing force decays, resulting in free vibrations that vibrate movable body 7B.

[0221] The magnetic attraction force generated between the movable body 7B, which has the magnetic yoke 72B and the external yoke 75, and the electromagnet portion 3B causes the movable body 7B to move closer to the electromagnet portion 3B and be displaced. This movement causes the elastic force (biasing force) generated in the elastic support portions 50a and 50b to vibrate the movable body 7B, providing a tactile sensation to the user. The effects are the same as those of the vibration actuator 1, so a description thereof will be omitted.

[0222] In vibration actuator 1B, an external yoke 75 is provided on the movable body 7B side, and elastic support members 50a, 50b connected to the movable body 7B are fixed to the base member 42B via a spacer 60 at their fixed-side fixed ends 520, laterally of the electromagnet portion 3B covered by the external yoke 75. The spacer 60 has a thickness sufficient to ensure movable clearance for the elastic support members 50a, 50b. This eliminates the need to provide movable clearance above the elastic support members 50a, 50b, and allows the spacer 60 to be provided below the elastic support members 50a, 50b, thereby reducing the dead space and enabling an even thinner actuator.

[0223] Embodiments 4 to 8 Some of the components of the vibration actuator 1B of the third embodiment may be modified.

[0224] Vibration actuators 1C to 1G of embodiments 4 to 8 shown in FIGS. 22 to 31 below are vibration actuators in which some of the components of the vibration actuator 1B of embodiment 3 have been modified.

[0225] Fig. 22 is an exploded perspective view showing an elastic portion, a movable body, and a fixed body in a vibration actuator according to embodiment 4 of the present invention, Fig. 23 is an exploded perspective view of the same vibration actuator, Fig. 24 is an exploded perspective view of a vibration actuator according to embodiment 5 of the present invention, and Fig. 25 is a longitudinal sectional view of the same vibration actuator.

[0226] Fig. 26 is an exploded perspective view of a vibration actuator according to embodiment 6 of the present invention, and Fig. 27 is a longitudinal sectional view of the same vibration actuator. Fig. 28 is an exploded perspective view of a vibration actuator according to embodiment 7 of the present invention, and Fig. 29 is a longitudinal sectional view of the vibration actuator according to embodiment 7 of the present invention. Fig. 30 is an exploded perspective view of a vibration actuator according to embodiment 8 of the present invention, and Fig. 31 is a longitudinal sectional view of the vibration actuator according to embodiment 8 of the present invention.

[0227] For example, as in the vibration actuator 1C shown in FIGS. 22 and 23, the weight portion 74B in the configuration of the vibration actuator 1B may be replaced with a weight portion 74C that is heavier than the weight portion 74B.

[0228] The vibration actuator 1C shown in FIGS. 22 and 23 differs from the vibration actuator 1B only in the configuration of the weight portion 74C of the movable body, and the other configurations are the same.

[0229] In vibration actuator 1C, in a movable body 7C having an external yoke 75, a weight portion 74C has a weight portion main body 77C having an external shape similar to that of weight portion 74B, and auxiliary weight portions 78C (782, 784, 786).

[0230] The weight portion main body 77C and the auxiliary weight portion 78C (782, 784, 786) have the same functions as the weight portion main body 77 and the auxiliary weight portion 78.

[0231] Weight portion main body 77C has housing portions 775, 776, and 777 that are recessed or penetrate the main body portion. Main weight portion 782 and sub-weight portions 784 and 786 of auxiliary weight portion 78C are housed in housing portions 775, 776, and 777, respectively. The shapes of main weight portion 782 and sub-weight portions 784 and 786 are determined according to the predetermined weight that can be accommodated in weight portion main body 77C.

[0232] The auxiliary weight portions 78C (782, 784, 786) are separate from the weight portion main body 77C, and the auxiliary weight portions 78C (782, 784, 786) are made of a material with a higher specific gravity than the weight portion main body 77C.

[0233] The main weight portion 782 and the sub-weight portions 784, 786 are arranged symmetrically (in the X and Y directions) with respect to the weight portion main body 77C about the axis which is the movement direction (Z direction), thereby allowing the movable body 7C to move in the movement direction (Z direction) in a well-balanced manner.

[0234] In this way, as the movable body 7C, in addition to the external yoke 75 and magnetic yoke 72B, the weight is increased by adding an auxiliary weight portion 78C to the weight portion main body 77C as the weight portion 74C, so that it is possible to further increase the vibration output in order to enhance the tactile sensation.

[0235] Also, as in the vibration actuator 1D of FIGS. 24 and 25, a configuration may be adopted in which the external yoke 750 is formed by integrating the external yoke 75 and magnetic yoke 72B in the configuration of vibration actuator 1B.

[0236] In a vibration actuator 1D shown in FIGS. 24 and 25, an external yoke 750 is fixed to a recess 745 in the lower surface of a weight portion 74D in a movable body 7D that is configured in the same way as the weight portion 74B.

[0237] The external yoke 750 is configured such that the upper part of the opening 752 of the external yoke 75 is closed by the magnetic yoke 72B. That is, the external yoke 750 has a yoke main body 7501 having the same configuration and function as the external yoke 75 of the vibration actuator 1B, and a yoke top surface portion 7502 having the same configuration and function as the magnetic yoke 72B.

[0238] Yoke top surface portion 7502 is integrally formed on a rib portion (corresponding to rib 753) surrounding opening 752 (see FIG. 25 ) provided at the center of yoke main body 7501, so as to cover the upper surface of opening 752. Yoke top surface portion 7502 has a recess 7504 that has the same function as opening 752. Recess 7504 is formed in yoke main body 7501 and opens downward. Recess 7504 surrounds and covers electromagnet portion 3B from above, forming a movement region for movable body 7D between the gap between recess 7504 and the outer surface of electromagnet portion 3B and the gap surrounded by the rib portion. Furthermore, external yoke 750 is a magnetic material that completely surrounds electromagnet portion 3B from above, thereby achieving an efficient magnetic circuit.

[0239] In this way, the weight of the movable body can be maintained in vibration actuator 1 D. Furthermore, because external yoke 750 has a shape in which both external yoke 75 and magnetic yoke 72 B are integrally provided and function as one unit, the number of parts can be reduced, and the production period can be shortened.

[0240] Furthermore, in the configuration of vibration actuator 1B, weight portion 74B and external yoke 75 may be integrated into one body, forming a movable body main body 740 as in vibration actuator 1E of FIGS.

[0241] The movable body main body 740 is formed by integrating the weight portion 74B and the external yoke 75 of the movable body 7B in the vibration actuator 1B.

[0242] The movable body main body 740 is a rectangular plate-like body having the same external shape and function as the weight portion 74B, and has a notch 7520 (see FIG. 27) that opens downward in the center of the bottom surface and corresponds to the opening 752 (see FIG. 19). The notch 7520 accommodates the electromagnet portion 3B, and has a magnetic yoke 72E on the bottom surface that is configured similarly to the magnetic yoke 72B. The magnetic yoke 72E is made of a magnetic material and is disposed opposite the upper surfaces of the coil 32B and the magnetic pole core 34B.

[0243] The vibration actuator 1E can achieve the same effects as the vibration actuator 1, and like the vibration actuator 1D, it can ensure the weight of the movable body, reduce the number of parts, and shorten the assembly time for the device.

[0244] For example, as in a vibration actuator 1F shown in FIGS. 28 and 29, in the configuration of the vibration actuator 1B, the weight portion 74B and the magnetic yoke 72B may be integrated into one body.

[0245] In vibration actuator 1F, movable body 7F has weight portion 740F and external yoke 75. Weight portion 740F is made of a magnetic material, and has a recess 745 on its underside that opens downward. External yoke 75 is fitted into recess 745. A bottom surface 7402 of recess 745 functions as a yoke that faces magnetic pole surface 341 of electromagnet portion 3B inside external yoke 75.

[0246] As a result, according to the vibration actuator 1F, the movable body 7F has the external yoke 75, so the weight of the movable body can be ensured, and the number of parts can be reduced, making assembly easier.

[0247] Also, for example, as in a vibration actuator 1G shown in FIGS. 30 and 31, in the configuration of vibration actuator 1B, weight portion 74B, magnetic yoke 72B and external yoke 75 may be configured as an integrated unit.

[0248] In the vibration actuator 1G, the movable body 7G has a movable body main body 700 that is an integrated unit of a weight portion, a magnetic yoke, and an external yoke. The movable body main body 700 is made of a magnetic material with a high specific gravity, and has the functions of the weight portion, the magnetic yoke, and the external yoke.

[0249] The movable body main body 700 movably accommodates the coil 32B and magnetic pole core 34B of the electromagnet unit 3B in a recess 7005 that opens downward on its underside. An external yoke is fitted and attached to the recess 7005. The bottom surface of the recess 7005 is positioned opposite the magnetic pole surface 341 of the electromagnet unit 3B within the recess 7005, generating a magnetic attraction force with the electromagnet unit 3B. This configuration ensures the weight of the movable body main body 700 and minimizes the number of parts in the movable body, making assembly easier.

[0250] <Modifications of the base member 42B> As shown in the base member 42B in Figure 32, in vibration actuators 1B to 1G, the base member 42B and spacer 60 may be provided integrally. In this way, the spacers 60 are provided integrally with the base member 42B in the area on the surface of the base member 42B where the movable body 7B side (magnetic yoke 72B, external yoke 75, weight portion 74B) and the fixed body 4B (base member 42B) side face each other. This allows the attachment positions of the elastic support members 50a, 50b to be set with the dimensional accuracy of the base member 42B alone, thereby ensuring stable attachment.

[0251] <Position of sensor unit> Figure 33 is a perspective view of a fixed body showing an example of the arrangement of a strain detection unit and a capacitance detection unit. Figure 33 shows an example of the arrangement of a strain detection unit 82 and a capacitance detection unit 84 in vibration actuators 1B to 1G.

[0252] The functions of the strain detection unit 82 and the capacitance detection unit 84 are similar to those shown in Fig. 15. The strain detection unit 82 has a strain gauge, is provided on the fixed-side arm 5620, and detects the strain of the fixed-side arm 5620 of the elastic support member 50a (50b), which is deformed when the movable body 7B is pressed toward the bottom side of the opening 752 (in the pressing operation direction).

[0253] The detected strain is output to a control unit or the like, and current is passed through coil 32B to attract and move magnetic yoke 72B so that the amount of movement of movable body 7B corresponds to the strain. This allows strain detection unit 82 to adjust vibration according to the strain detection result, and can detect the operating load when the spring is positioned so that strain is generated in the spring by the operating load.

[0254] 15, the capacitance detection unit 84 is provided on the base member 42B and detects capacitance, detects the movement of the movable body 7B during vibration, and generates corresponding vibrations. In this way, with vibration actuators 1B to 1G, it is possible to adjust vibrations in accordance with the capacitance detection results, and if the vibration actuator is arranged so that the capacitance changes depending on the operating load, it is also possible to detect the operating load.

[0255] <Modifications of the damper section 790> In vibration actuators 1B to 1G, the damper section 790 is disposed at the head of the fastening member 640 such as a rivet, but the damper section 790 may be disposed at any position as long as it can reduce the impact when the movable body moves and comes into contact with the housing.

[0256] 34A and 34B, a configuration may be adopted in which damper portions 792 are arranged below the elastic support portions 50a and 50b, instead of damper portions 790 arranged on the fastening member 640. Furthermore, as shown in the vibration actuator in FIGS. 35A and 35B, a plurality of damper portions 792 may be arranged on the top surface of the weight portion 74B of the movable body 7B.

[0257] 36A and 36B, the damper sections 790 and 792 may be disposed on the upper surface of the movable body 7B (top surface of the weight section 74B) and below the elastic support sections 50a and 50b, respectively. In particular, the damper section 792 may be disposed below the elastic support sections 50a and 50b, i.e., below the movable arm 5640, which is a section that is particularly prone to deformation.

[0258] By mounting the damper sections 790, 792 inside the vibration actuator in this way, residual vibrations in the vibration actuator (device) alone can be suppressed, and the impact resistance of the movable body can be ensured.

[0259] <Variations of Cover 9B> Furthermore, the cover 9B in vibration actuators 1B to 1G may have rounded corners 900 on the top surface 922, as in the cover 902 shown in Fig. 37A. Alternatively, the cover 9B may have a top surface 923 that is convex in the width direction and chamfered corners 900, as in the cover 903 shown in Fig. 37B. Alternatively, the cover 9B may have angled corners 900 at both ends spaced apart in the longitudinal direction, as in the cover 904 shown in Fig. 37C, so that the top surface 924 bulges out in the longitudinal direction and is convex in the center.

[0260] 38A, corners 900 of a rectangular top surface 925 may be chamfered, or top surface 926 may be curved to be convex in the width direction, as in cover 906 shown in Fig. 38B. The four corners 900 of top surface 926 are rounded.

[0261] When vibration actuators 1B to 1G having covers 902 to 906 of any of these shapes are placed inside the seat, they do not give a foreign body sensation to the user sitting on the seat surface, and can provide a comfortable sitting experience without any discomfort.

[0262] Furthermore, the vibration actuators 1B to 1G of the above-described third to eighth embodiments and modified examples are driven and controlled by the control circuit shown in FIG. 13 using the drive signals shown in FIG. 14, in the same way as the vibration actuators 1 and 1A.

[0263] The disclosures of the specifications, drawings and abstracts contained in Japanese Patent Application No. 2024-105640 filed on June 28, 2024 and Japanese Patent Application No. 2025-22741 filed on February 14, 2025 are incorporated herein by reference in their entirety.

[0264] The vibration actuator and vibration presentation device of the present invention are easy to assemble and have the advantage of being able to be placed in a space-saving manner and vibrate appropriately, and are useful for use in, for example, seats that impart vibration to a seated user, PCBs, trackpads, operation panels, etc.

[0265] 1, 1A, 1B, 1C, 1D, 1E, 1F, 1G vibration actuator, 2, 2A actuator body, 3, 3B electromagnet section, 4, 4B fixed body, 5, 5B, 5a, 5b, 50a, 50b elastic support section, 7, 7A, 7B, 7C, 7D, 7F, 7G movable body, 7a, 447 notch, 9, 9B, 902 cover, 10 vibration presentation device, 11 seat section, 11a accommodation space, 12 backrest section, 18 MOSFET, 32, 32B coil, 34, 34B magnetic pole core, 36, 36B bobbin, 38, 38B substrate section, 42, 42B base member (magnetic base section), 44 spring stop section, 52 core side fixed end section, 54 Yoke side fixed end portion, 56 Deformable arm (arm portion), 60, 76 Spacer, 62, 64 Fastening member, 72, 72B, 72E Magnetic yoke, 74, 74A, 74B, 74C, 74D, 740F Weight portion, 75 External yoke, 77, 77C Weight portion main body (weight main body), 78, 78C Auxiliary weight portion, 79 Damper (damping member, suppressing member), 82 Strain detection portion (strain detection sensor), 84 Capacitance detection portion (proximity sensor), 92, 92B Top surface portion, 94, 94B, 96 Side wall portion, 96B End wall portion, 341 Magnetic pole surface, 342 Core main body, 344 Joint convex portion, 361 Cylindrical bobbin main body, 362, 362B Flange, 364 Step portion, 381 Opening, 382 Annular main body portion, 384 Extension portion, 421 Joining hole, 422 Engaged recess portion, 424 Engaged protrusion portion, 426 Joining hole, 441 Opening, 443 Frame-shaped main body, 445 Mounting hole, 520 Fixed side fixed end portion, 540 Movable side fixed end portion, 562 Core side arm, 564 Yoke side arm, 620, 640 Fastening member, 700 Movable body main body, 722 Lower surface, 724 Through hole, 742, 772 Seat groove portion, 744 Joining hole, 752 Opening, 771 Opening, 773 Surface, 774 Joining hole, 790, 792 Damper portion, 791 Suppression member, 900 Corner portion, 942 engaging protrusion, 962, 962B engaging recess, 5620 fixed side arm, 5640 movable side arm, 7501 yoke body, 7502 yoke top surface portion

Claims

1. A vibration actuator comprising: an electromagnet section having a core and a coil surrounding the core and arranged on the plate surface of a plate-shaped magnetic base section; a magnetic member having a lower surface facing the coil from above; a spacer to which the lower surface is connected outside the coil and which separates the magnetic member and the electromagnet section in the vertical direction to form a movable area of ​​the magnetic member; a spring stop section provided on the magnetic base section outside the coil; and an elastic support section connected to the spring stop section at the lower surface of one end and connected to the spacer at the upper surface of the other end, wherein when current is passed through the coil, the magnetic member is displaced and vibrates so as to approach the electromagnet section.

2. The vibration actuator according to claim 1, further comprising a cover fixed to the magnetic base portion and housing the magnetic member so that it can vibrate.

3. A vibration actuator according to claim 1, wherein the electromagnet portion is flat and has a flat, annular core, the magnetic member is a flat member, and the elastic support portion is a leaf spring.

4. The vibration actuator according to claim 1, wherein the core is a disk-shaped magnetic body that protrudes upward within the coil.

5. The vibration actuator according to claim 1, wherein the spring stop portion is made of a magnetic material.

6. The vibration actuator according to claim 1, wherein the magnetic member has a weight.

7. The vibration actuator according to claim 6, wherein the weight has a weight body and an auxiliary weight portion made of a material having a higher specific gravity than the weight body.

8. The vibration actuator according to claim 1, wherein the elastic support portion comprises a plurality of elastically deformable arm portions bridged between the one end and the other end.

9. A vibration actuator according to claim 8, wherein the spring stop portion is a frame-shaped body surrounding the coil, and is joined to one end of each of the plurality of arm portions of the elastic support portion on an upper surface of the frame-shaped body at the same height.

10. A vibration actuator as described in claim 1, wherein the electromagnet portion has a cylindrical body surrounding the core and a bobbin on which the coil is arranged on the outer periphery of the cylindrical body, and the bobbin has an inner flange portion that protrudes radially inward from the cylindrical body and engages with the core at its upper surface, and an outer flange portion that protrudes radially outward from the cylindrical body and engages with the inner peripheral edge of the coil at its lower surface.

11. A vibration actuator as described in claim 10, wherein the core has a core body and a joint protrusion that protrudes from the underside of the core body and fits into a joint hole in the magnetic base portion, the inner flange portion of the bobbin is sandwiched between the core body and the magnetic base portion, and the outer flange portion fixes the coil in a sandwiched state with the magnetic base portion.

12. The vibration actuator according to claim 1, further comprising a damping member between the magnetic member and the electromagnet portion.

13. A vibration actuator according to claim 2, further comprising a suppressing member between said cover and said magnetic member for suppressing displacement of said magnetic member.

14. The vibration actuator according to claim 13, wherein the suppression member is made of a material having low elasticity and damping properties.

15. The vibration actuator according to claim 1, wherein a capacitance detection unit is disposed between the core and the magnetic member.

16. The vibration actuator according to claim 1, wherein the elastic support portion is a leaf spring and has a strain detection portion that detects strain of the spring.

17. A vibration presentation device comprising: a vibration actuator according to any one of claims 1 to 16; and a vibration presentation unit that presents vibrations of the vibration actuator.

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