Integrated pump body and fluid machinery

Abstract

The present utility model belongs to the technical field of vacuum pumps, and specifically relates to an integrated pump body and a composite vacuum pump. With regard to the shortcomings of high production costs and large sizes of composite pump bodies of existing Roots-screw composite vacuum pumps, the present utility model adopts the following technical solution: an integrated pump body, said integrated pump body comprising: a first rotor cavity having an air inlet; all or a radial part of a second rotor cavity; and a connecting channel connecting the first rotor cavity and the second rotor cavity. The axes of the first rotor cavity and the second rotor cavity are parallel, and the first rotor cavity and the second rotor cavity are distributed along the radial direction of the integrated pump body. According to the integrated pump body of the present utility model, the first rotor cavity and the second rotor cavity do not need to be connected by means of an additional pipe or an assembly structure, reducing the number of parts to be processed, and significantly reducing the processing cost. A first rotor and a second rotor can be respectively driven by different motors, and the compression ratio of the vacuum pump is adjustable.

Description

Integrated pump body and fluid machinery TECHNICAL FIELD

[0001] The utility model belongs to vacuum pump technical field, concretely relates to integrated pump body and fluid machinery. BACKGROUND

[0002] With the rapid growth of vacuum processing demand, traditional single vacuum pump cannot satisfy the increasingly complex vacuum needs, needs to combine the vacuum pump of different functions and reform, forms a joint vacuum pump unit. Vacuum pump unit integrates different types of multiple vacuum pumps to satisfy the diversification demand. Roots screw unit integrates roots pump and screw pump, is a kind of common vacuum pump unit.

[0003] Traditional roots screw unit usually stacks a roots vacuum pump on a screw vacuum pump and is connected by short pipe. In processing, roots vacuum pump and screw vacuum pump are produced and assembled respectively, and the machining process of roots pump body and screw pump body usually includes blank-rough machining-aging treatment-finish machining-coating treatment etc. The respective machining mode of roots pump body and screw pump body needs multiple turnovers respectively, and the production cost is higher. Moreover, the mode of separate production and then connection by short pipe usually needs to set support, so that the volume of unit is usually larger.

[0004] On the basis of traditional roots screw unit, screw roots composite vacuum pump appears, and screw roots composite vacuum pump installs roots blade and screw rotor on the same main shaft. This structure improves the integration degree, but the length is larger, and since screw roots rotor is driven by the same motor / motor set, cannot realize respective speed regulation, leads to the constant suction ratio (that is, compression ratio) of roots and screw, limits the application scene (different process requirements have different compression ratio and suction efficiency requirements). Meanwhile, this axial composite structure usually processes roots pump body and screw pump body respectively and then assembles, and the production cost is still higher.

[0005] Therefore, it has positive significance to improve composite pump body structure, reduce the machining cost of pump body and reduce the volume and weight of composite pump. Further, when the composite pump body is applied to vacuum pump or compressor, the adjustable compression ratio is realized. The composite vacuum pump can be roots screw pump or other combination. SUMMARY

[0006] The utility model provides a kind of integrated pump body to the insufficient of the axial distribution of roots pump body and screw pump pump body of existing roots screw composite vacuum pump, production cost is high, volume, reduce processing cost, reduce volume, weight by integrating design all or part of first rotor cavity and second rotor cavity, the utility model provides a kind of fluid machinery using this integrated pump body simultaneously.

[0007] To achieve the above object, the utility model discloses the following technical scheme: integral type pump body, the integral type pump body includes,

[0008] First rotor cavity, with air inlet;

[0009] Second rotor cavity's all or radial partial;

[0010] Connecting channel, the first rotor cavity and the second rotor cavity are communicated;

[0011] Wherein, the axis of the first rotor cavity and the second rotor cavity is parallel.

[0012] The integral type pump body of the utility model, all or radial partial of the first rotor cavity and the second rotor cavity that are integrally formed are communicated, compared with the mode that two kinds of pump bodies of the existing unit are separately processed and then are connected through pipeline or two kinds of pump bodies of the axial composite pump are separately processed and then are assembled together, the processing cost is reduced significantly, the first rotor cavity and the second rotor cavity are communicated through connecting channel, and the first rotor cavity and the second rotor cavity do not need to be connected through additional pipeline or assembly structure, unlike the coaxial distribution of the first rotor cavity and the second rotor cavity of the conventional axial composite pump, the axis of the first rotor cavity and the second rotor cavity is parallel (not coincident), that is, along the non-axial distribution, so that the first rotor and the second rotor can be driven by different motors, and the compression ratio of the vacuum pump can be adjusted (of course, when not needed, the two rotors can also be driven by the same motor through a transmission assembly), all of the first rotor cavity and the second rotor cavity are integrally formed, suitable for composite of Roots screw rod, etc., the first rotor cavity and half cavity are integrally formed, not the first rotor cavity and the entire second rotor cavity are integrally formed, especially suitable for the case that the second rotor cavity is a multi-stage pump cavity. Integral indicates that it is not assembled, that is, directly integrally formed in the processing process.

[0013] As an improvement, the integral type pump body includes all of the second rotor cavity, an outlet is formed on the second rotor cavity, the first rotor cavity is a Roots rotor cavity, and the second rotor cavity is a screw rotor cavity or a Roots screw rotor cavity. The processing technology of the two kinds of pump bodies is basically the same in the existing two kinds of pump bodies, so the processing of the integral type pump body requires higher processing equipment, but only needs to be circulated once, thereby effectively reducing the production cost and improving the production efficiency.

[0014] As an improvement, the first rotor cavity is a Roots rotor cavity, and the second rotor cavity is a multi-stage dry rotor cavity. In the prior art, for Roots and multi-stage dry units, two half cavities of the Roots rotor cavity and the multi-stage dry rotor cavity need to be processed, that is, three components need to be processed. The scheme of the utility model integrates the first rotor cavity and the half cavity of the multi-stage dry rotor cavity, so only two components need to be processed.

[0015] As an improvement, the integrated pump body comprises half of the second rotor cavity in radial direction, the second rotor cavity has multiple radial partitions.

[0016] As an improvement, the connecting channel communicates with the first or second stage of the second rotor cavity; the exhaust channel connecting the chambers of the second rotor cavity is located at the partition between the two adjacent stages or radially outside.

[0017] As an improvement, the first rotor cavity and the second rotor cavity are both horizontally arranged and distributed vertically.

[0018] As an improvement, the first rotor cavity and the second rotor cavity are both horizontally arranged and horizontally juxtaposed.

[0019] As an improvement, the first rotor cavity and the second rotor cavity are both vertically arranged.

[0020] As an improvement, the integrated pump body further comprises a connecting part between the first rotor cavity and the half cavity, the connecting part is connected with the first rotor cavity and the second rotor cavity, and the connecting part is perforated and forms the connecting channel.

[0021] The fluid machine comprises the integrated pump body as described above, and further comprises a first rotor assembly in the first rotor cavity, a second rotor assembly in the second rotor cavity, and one or two power sources for driving the first rotor assembly and the second rotor assembly simultaneously or separately.

[0022] As an improvement of the fluid machine, the integrated pump body comprises the entire second rotor cavity.

[0023] As an improvement of the fluid machine, the fluid machine further comprises an integrated end cover and an integrated oil tank, the first rotor cavity and the second rotor cavity share the same end cover and the same oil tank; and / or

[0024] The length of the first rotor cavity is less than that of the second rotor cavity, and the fluid machine further comprises a lengthened pump body coaxial with the first rotor cavity and detachably connected; and / or,

[0025] The first rotor shaft of the first rotor assembly forms the motor shaft of the first motor, and the second rotor shaft of the first rotor assembly forms the motor shaft of the second motor.

[0026] As an improvement of the fluid machine, the fluid machine further comprises another part of the second rotor cavity, and an exhaust port is formed on the other part of the second rotor cavity.

[0027] As an improvement of the fluid machine, the fluid machine is a vacuum pump or a compressor, and the fluid machine can be horizontal (axis horizontal) or vertical (axis vertical).

[0028] The integrated pump body has the advantages that the first rotor cavity and the second rotor cavity are integrally formed in whole or in part in the radial direction, the machining cost is significantly reduced compared to the prior art in which two pump bodies are separately machined and then connected by a pipeline or assembled together, the first rotor cavity and the second rotor cavity are connected by the connecting channel without the need for additional pipeline connection or assembly structure, the first rotor cavity and the second rotor cavity are distributed in the radial direction, which is different from the coaxial distribution of the first rotor cavity and the second rotor cavity in a conventional composite pump, so that the first rotor and the second rotor can be driven by different motors, and the compression ratio of the vacuum pump is adjustable, the first rotor cavity and the second rotor cavity are integrally formed in whole, which is suitable for composite of Roots screws and the like, and the first rotor cavity and the second rotor cavity are integrally formed in part in the radial direction rather than integrally formed in whole, which is especially suitable for the case that the second rotor cavity is a multi-stage pump cavity, and is also beneficial to the machining of the connecting channel.

[0029] The fluid machine has all the advantages of the integrated pump body. BRIEF DESCRIPTION OF DRAWINGS

[0030] FIGS. 1 and 2 are sectional views of the integrated pump body of the first embodiment of the present application from different angles.

[0031] FIG. 3 is a sectional view of the integrated pump body of the second embodiment of the present application.

[0032] FIGS. 4 and 5 are sectional views of the composite vacuum pump of the third embodiment of the present application from different angles.

[0033] FIGS. 6 and 7 are sectional views of the composite vacuum pump of the fourth embodiment of the present application from different angles.

[0034] FIG. 8 is a sectional view of the composite vacuum pump of the fifth embodiment of the present application.

[0035] In the drawings, 1 is an integrated pump body; 11 is a first rotor cavity; 12 is a second rotor cavity; 13 is a connecting channel; 14 is an air inlet; 15 is an air outlet; 16 is a support portion; and 17 is a half cavity.

[0036] 2 is an extended pump body; and 21 is an annular groove.

[0037] 3 is a first rotor assembly.

[0038] 4 is a first motor.

[0039] 5 is a second rotor assembly; 51 is a Roots section; and 52 is a screw section.

[0040] 6. A second motor;

[0041] 7. An end cap;

[0042] 8. An oil tank. Embodiments of the present application

[0043] The technical solutions of the embodiments of the present application are explained and described below. The following embodiments are only preferred embodiments of the present application, and not all. Based on the embodiments in the embodiments, other embodiments obtained by those skilled in the art without creative labor are within the protection scope of the present application.

[0044] Referring to FIGS. 1-8, the integrated pump body of the embodiments of the present application comprises:

[0045] The first rotor cavity has an air inlet;

[0046] The second rotor cavity is all or radially partially integrated;

[0047] The connecting channel connects the first rotor cavity and the second rotor cavity;

[0048] The axis of the first rotor cavity and the second rotor cavity is parallel, and the first rotor cavity and the second rotor cavity are distributed along the radial direction of the integrated pump body.

[0049] The integrated pump body of the present application is integrally formed to form the first rotor cavity and the second rotor cavity which are all or radially partially connected. Compared with the prior art, the two pump bodies of the existing unit are separately processed and then connected by a pipeline or the two pump bodies of the axial composite pump are separately processed and then assembled together, which significantly reduces the processing cost. The connecting channel connects the first rotor cavity and the second rotor cavity without the need for additional pipeline or assembly structure connection. Unlike the first rotor cavity and the second rotor cavity of the conventional axial composite pump which are coaxially distributed, the axis of the first rotor cavity and the second rotor cavity is parallel, i.e. distributed along the non-axial direction, so that the first rotor and the second rotor can be driven by different motors, and the compression ratio of the vacuum pump can be adjusted (of course, the two rotors can also be driven by the same motor when not needed). The first rotor cavity and the second rotor cavity are integrally formed, which is suitable for composite of Roots screw and the like. The first rotor cavity and half of the cavity are integrally formed instead of the first rotor cavity and the entire second rotor cavity, which is especially suitable for the case where the second rotor cavity is a multi-stage pump cavity. The integrated type means that it is not an assembly type, i.e. it is directly integrally formed during the processing process.

[0050] Embodiment one

[0051] Referring to FIG. 1 and FIG. 2, the integrated pump body 1 of the embodiment one comprises:

[0052] The first rotor cavity 11 has an air inlet 14.

[0053] The second rotor cavity 12 has a radial half cavity 17.

[0054] The connecting channel 13 connects the first rotor cavity 11 and the radial half cavity 17 of the second rotor cavity 12.

[0055] The first rotor cavity 11 and the half cavity 17 are parallel, and the first rotor cavity 11 and the second rotor cavity 12 are distributed along the radial direction of the integrated pump body 1.

[0056] In the embodiment, the integrated pump body 1 comprises the radial half cavity 17 of the second rotor cavity 12 instead of a small half or a large half, which facilitates the processing and assembly of the two half cavities of the second rotor cavity 12.

[0057] In the embodiment, the other half cavity of the second rotor cavity 12 is not shown.

[0058] In the embodiment, the first rotor cavity 11 is a Roots rotor cavity, and the second rotor cavity 12 is a multi-stage dry rotor cavity. In the prior art, for Roots and multi-stage dry units, two half cavities of the Roots rotor cavity and the multi-stage dry rotor cavity need to be processed respectively, that is, three components need to be processed. By integrally forming the first rotor cavity 11 and the half cavity 17 of the multi-stage dry rotor cavity, only two components need to be processed.

[0059] In the embodiment, the connecting channel 13 connects the first stage of the second rotor cavity 12. The hole of the connecting channel 13 is conical, and the hole diameter at one end of the first rotor cavity 11 is larger than that at the other end of the second rotor cavity 12. The number of stages of the multi-stage dry pump is commonly 5 to 7, and in the embodiment, it can be 2 to 10.

[0060] In the embodiment, the exhaust channel connecting each stage of the second rotor cavity 12 is located in the interlayer or the radial outer side between the adjacent two stages of rotors. Each stage of the multi-stage dry pump can be a two-leaf Roots, a three-leaf Roots, a four-leaf Roots, a five-leaf Roots, or other multi-leaf Roots blades. Each stage of the multi-stage dry pump can also be a claw or a curved surface in the shape of a screw rod. Each stage of the multi-stage dry pump can also be a cross-section stretched body based on the above-mentioned shapes with spiral twisting or non-spiral. In the embodiment, the first rotor cavity 11 and the half cavity 17 are both horizontally arranged and distributed vertically, and the air inlet 14 is located at the upper radial center and / or the axial center of the first rotor cavity 11.

[0061] In the embodiment, the connecting channel 13 is located at the radial center of the first rotor cavity 11.

[0062] In the embodiment, the integrated pump body 1 further comprises a connecting part between the first rotor cavity 11 and the half cavity 17, the connecting part is connected with the first rotor cavity 11 and the half cavity 17, and the connecting part is provided with a hole to form the connecting channel 13.

[0063] In other embodiments, the first rotor cavity and the half cavity can also be horizontally arranged and horizontally arranged side by side, and the air inlet is located at the radial center of the first rotor cavity.

[0064] In other embodiments, the first rotor cavity and the half cavity can also be vertically arranged.

[0065] The integrated pump body 1 of the embodiment one has the following beneficial effects: the first rotor cavity 11 and the half cavity 17 of the second rotor cavity 12 are integrally formed, compared with the existing two pump bodies which are separately processed and then connected by a pipeline, the processing cost is significantly reduced; the connecting channel 13 connects the half cavities 17 of the first rotor cavity 11 and the second rotor cavity 12, and does not need to be connected by an additional pipeline; the half cavities 17 of the first rotor cavity 11 and the second rotor cavity 12 are distributed along the radial direction, that is, different from the coaxial distribution of the first rotor cavity 11 and the second rotor cavity 12 of the conventional composite pump, so that the first rotor and the second rotor can be driven by different motors, and the compression ratio of the vacuum pump can be adjusted; the first rotor cavity 11 and the half cavity 17 are integrally formed, rather than the first rotor cavity 11 and the entire second rotor cavity 12, which is especially suitable for the case that the second rotor cavity 12 is a multi-stage pump cavity, and is also beneficial to the processing of the connecting channel 13.

[0066] Embodiment two

[0067] The difference between embodiment two and embodiment one is the arrangement of the connecting channel 13.

[0068] In the embodiment, the connecting channel 13 connects the second stage of the second rotor cavity 12. Since the air inlet 14 is located at the middle part of the axial direction of the integrated pump body 1, when the connecting channel 13 connects the second stage of the second rotor cavity 12, the hole of the connecting channel 13 can be basically radial, without needing to be inclined by a certain angle relative to the axial direction, and the processing of the connecting channel 13 is easier than when it connects the first stage of the second rotor cavity 12. The hole of the connecting channel 13 is conical, and the hole diameter at one end of the first rotor cavity 11 is larger than that at one end of the second rotor cavity 12.

[0069] In some more severe application occasions such as semiconductor processing, there are often crystalline particles, when the first rotor cavity 11 and the second rotor cavity 12 are connected in the first stage, because the first stage is usually close to the bearing, the crystalline particles will enter the bearing in the gaseous state and deposit in the solid state, thereby damaging the bearing. The connecting channel 13 connected to the second stage of the second rotor cavity 12 can better avoid the deposition of crystalline particles in the bearing, and can better balance the smoothness of the air path. If the connecting channel 13 is connected to the third stage of the second rotor cavity 12, although the deposition of crystalline particles in the bearing can also be avoided, the air passage is too long, which leads to a decrease in the limit vacuum degree that can be achieved, and the efficiency is also low.

[0070] The utility model embodiment simultaneously provides a kind of fluid machinery, the fluid machinery includes the integrated pump body 1 of preceding embodiment one or embodiment two, the fluid machinery further include another half cavity of the second rotor cavity 12, and exhaust port 15 is opened on the other half cavity. Half cavity 17 and another half cavity are assembled to form the second rotor cavity 12.

[0071] The fluid machinery of the embodiment can use flexible or rigid drive for motor and rotor.

[0072] The fluid machinery of the embodiment can use water cooling or air cooling.

[0073] The fluid machinery of the embodiment can be vertical or horizontal. When horizontal, first rotor cavity 11 and second rotor cavity 12 can be stacked vertically or arranged horizontally.

[0074] Embodiment three

[0075] Referring to Figures 4 and 5, the fluid machinery of the utility model embodiment three is a Roots screw composite vacuum pump, comprising an integrated pump body 1 formed integrally, the integrated pump body 1 comprising:

[0076] First rotor cavity 11;

[0077] Second rotor cavity 12;

[0078] Connecting channel 13, connecting the first rotor cavity 11 and the second rotor cavity 12;

[0079] Wherein, the first rotor cavity 11 and the second rotor cavity 12 are parallel, and the first rotor cavity 11 and the second rotor cavity 12 are distributed along the radial direction of the integrated pump body 1.

[0080] In the embodiment, the first rotor cavity 11 and the second rotor cavity 12 are arranged vertically, which reduces the horizontal area occupied and only one set of supporting feet is needed. In the existing conventional Roots screw vacuum pump set, the Roots vacuum pump and the screw vacuum pump need to be independently supported (supporting feet are arranged). The size of the first rotor cavity 11 and the second rotor cavity 12 can be set according to the needs.

[0081] In the embodiment, the upper part of the first rotor cavity 11 is provided with an air inlet 14, and the lower part of the second rotor cavity 12 is provided with an exhaust port 15. The air inlet 14 is arranged vertically, and the exhaust port 15 is arranged vertically.

[0082] In the embodiment, the connecting channel 13 is located at one end of the first rotor cavity 11 away from the motor in the axial direction, and the exhaust port 15 is located at one end of the first rotor cavity 11 close to the motor in the axial direction; the connecting channel 13 is located at the radial center of the first rotor cavity 11. The connecting channel 13 is arranged vertically.

[0083] In the embodiment, the first rotor cavity 11 is a Roots rotor cavity, and the second rotor cavity 12 is a screw rotor cavity. In other embodiments, the second rotor cavity can also be a Roots screw composite rotor cavity.

[0084] In the embodiment, the integrated pump body 1 further comprises a supporting part 16 located between the first rotor cavity 11 and the second rotor cavity 12, and the supporting part 16 is integrated with the first rotor cavity 11 and the second rotor cavity 12. Since the connecting channel 13 is located at one end of the first rotor cavity 11 away from the motor in the axial direction, the supporting part 16 is arranged to improve the structural strength.

[0085] In the embodiment, a damping hole is formed in the middle part of the supporting part 16 in the radial direction, which reduces the use of materials and reduces the weight.

[0086] In the embodiment, the first rotor cavity 11 and the second rotor cavity 12 of the integrated pump body 1 are arranged horizontally and vertically, and the fluid machine is a horizontal pump. In other embodiments, when still applied to a horizontal pump, the first rotor cavity and the second rotor cavity can also be arranged horizontally (the axis is horizontal) and horizontally side by side (the height is basically the same). This arrangement is suitable for occasions where the horizontal area is not limited but the height is limited. At this time, the positions and forms of the air inlet, the exhaust port, the connecting channel, the supporting structure, etc. can be adjusted accordingly. In other embodiments, the first rotor cavity and the second rotor cavity of the integrated pump body can also be arranged vertically (the axis is vertical), i.e., applied to a vertical pump. The two rotor cavities can be arranged front to back or left to right. At this time, the connecting channel, the air inlet and the exhaust port are horizontal.

[0087] In the embodiment, the length of the first rotor cavity 11 is less than that of the screw rotor cavity.

[0088] In this embodiment, the two motors are located at the same end.

[0089] In this embodiment, the first rotor cavity 11 is provided with a first rotor assembly 3 (Roots rotor assembly), which is driven by the first motor 4.

[0090] In this embodiment, the second rotor cavity 12 is provided with a second rotor assembly 5 (screw rotor assembly), which is driven by the second motor 6.

[0091] In this embodiment, the radial cross-sectional shape of the first rotor cavity 11 and the screw rotor cavity is referred to the drawings and the prior art. The related structure of the Roots rotor assembly and the screw rotor assembly driven by the motor is referred to the prior art.

[0092] In this embodiment, the integrated pump body 1 can be processed by casting, thereby facilitating the connection channel 13.

[0093] In other embodiments, the integrated pump body can also be three layers or more (i.e., having three or more cavities).

[0094] The beneficial effects of the Roots screw fluid mechanical device of the third embodiment of the utility model are as follows: the integrated pump body 1 is integrally formed, which significantly reduces the processing cost compared with the prior art of separate processing and then connecting through a pipeline; the connection channel 13 connects the first rotor cavity 11 and the second rotor cavity 12, without the need for additional pipeline connection, and without the problem of leakage; the projections of the first rotor cavity 11 and the second rotor cavity 12 along the axial direction of the first rotor cavity 11 are staggered, i.e., different from the coaxial arrangement of the first rotor cavity 11 and the second rotor cavity 12 of the existing composite pump, the Roots rotor and the screw rotor are driven by different motors, and the compression ratio of the vacuum pump is adjustable; the first rotor cavity 11 and the second rotor cavity 12 are arranged in an up-down manner, which occupies less horizontal area compared with the horizontal parallel arrangement or the structure of the existing coaxial distributed vacuum pump, and has a wider application range.

[0095] Embodiment four

[0096] Referring to FIGS. 6 and 7, the main difference between embodiment four and embodiment three is that a lengthened pump body 2 is further provided.

[0097] In this embodiment, the length of the first rotor cavity 11 is less than that of the second rotor cavity 12, and the fluid mechanical device further comprises a lengthened pump body 2 (Roots lengthened pump body 2), which is located at the end of the integrated pump body 1 close to the motor. By providing the lengthened pump body 2, the basic compression ratio can be adjusted to achieve more efficient or more suitable compression.

[0098] In this embodiment, the sum of the lengths of the first rotor cavity 11 and the lengthened pump body 2 can be greater than, equal to, or less than the length of the screw rotor pump body.

[0099] In this embodiment, the positioning structure, sealing structure and threaded connection structure are formed between the integrated pump body 1 and the lengthened pump body 2. The positioning structure ensures the coaxiality of the first rotor cavity 11 and the lengthened pump body 2. The positioning structure can adopt the form of positioning holes and positioning columns.

[0100] In this embodiment, the positioning structure includes a plurality of circumferentially distributed positioning holes and a positioning column matched with the positioning holes, and the threaded connection structure includes a plurality of circumferentially distributed threaded holes provided on the integrated pump body 1, a plurality of circumferentially distributed through holes provided on the lengthened pump body 2, and a plurality of screws passing through the through holes and screwed into the threaded holes. The positioning holes, threaded holes and the like are preferably circumferentially distributed, and can also be symmetrically but not uniformly distributed. To facilitate the installation between the lengthened pump body 2 and the first rotor cavity 11, the positioning column is fixedly connected with the lengthened pump body 2, and the end of the positioning column facing the first rotor cavity 11 is conical.

[0101] In this embodiment, the Roots screw vacuum pump includes a Roots motor and a screw motor, a Roots rotor assembly including a Roots rotor shaft and a Roots rotor, and a screw rotor assembly including a screw rotor shaft and a screw rotor. The Roots rotor shaft forms the motor shaft of the Roots motor, and the screw rotor shaft forms the motor shaft of the screw motor, thereby eliminating the coupling.

[0102] In this embodiment, the lengthened pump body 2 is generally annular, and a ring groove 21 is formed in the circumferential middle portion of the lengthened pump body 2 for facilitating the installation of the screws. The radial side wall of the ring groove 21 is provided with positioning holes, threaded holes and the like. In other embodiments, the lengthened pump body 2 can extend to form seat ears at both circumferential ends, and the seat ears are provided with positioning holes, threaded holes and the like.

[0103] In this embodiment, the first rotor cavity 11 is fixedly connected with the shell of the first motor 4, and the second rotor cavity 12 is fixedly connected with the shell of the second motor 6, thereby achieving static sealing.

[0104] Embodiment Five

[0105] Referring to FIG. 8, the main difference between embodiment five and embodiment three is the end cover 7, the oil tank 8 and the second rotor assembly 5 in the second rotor cavity 12. In embodiment one, two end covers (a first end cover for the first rotor cavity 11 and a second end cover for the second rotor cavity 12) and two oil tanks (a first oil tank for the first rotor cavity 11 and a second oil tank for the second rotor cavity 12) are provided, and a gear set is arranged in the oil tank.

[0106] In this embodiment, the fluid machine further includes an integrated end cover 7 and an integrated oil tank 8, and the first rotor cavity 11 and the second rotor cavity 12 share the same end cover 7 and the same oil tank 8.

[0107] In the prior art, two vacuum pumps such as Roots pumps and screw pumps of a vacuum pump set are connected together through pipelines after being respectively machined and assembled, thus, in addition to Roots pump body and screw pump body needing to be separately machined, Roots pump end cover 7, Roots pump oil tank 8 and screw pump end cover 7 and screw pump oil tank 8 also need to be machined. In the embodiment, only one integrated end cover 7 and one integrated oil tank 8 need to be machined, machining cost is reduced and machining efficiency is improved.

[0108] In the embodiment, the second rotor of the second rotor assembly 5 in the second rotor cavity 12 is a Roots screw rotor, the Roots screw rotor close to one end of the connecting channel 13 is a Roots section 51, and the Roots screw rotor far from the connecting channel 13 is a screw section 52.

[0109] The above is only a specific embodiment of the present application, but the protection scope of the present application is not limited to this, and those skilled in the art should understand that the present application includes but is not limited to the above specific embodiment. Any modification not deviating from the function and structural principle of the present application will be included in the scope of the claims.

Claims

1. An integrated pump body (1) characterized by: The integrated pump body (1) comprises: a first rotor cavity (11) having an air inlet (14); all or a radial part of a second rotor cavity (12); a connecting channel (13) connecting the first rotor cavity (11) and the second rotor cavity (12); wherein the axes of the first rotor cavity (11) and the second rotor cavity (12) are parallel.

2. The one-piece pump body (1) according to claim 1, characterized in that: The integrated pump body (1) comprises all of the second rotor cavity (12), the second rotor cavity (12) is provided with an air outlet, the first rotor cavity (11) is a Roots rotor cavity, and the second rotor cavity (12) is a screw rotor cavity or a Roots-screw rotor cavity.

3. The one-piece pump body (1) according to claim 1, characterized in that: The first rotor cavity (11) is a Roots rotor cavity, the second rotor cavity (12) is a multi-stage dry rotor cavity, and the second rotor cavity (12) has a plurality of radial partitions.

4. The one-piece pump body (1) according to claim 3, characterized in that: The connecting channel (13) connects the first stage or the second stage of the second rotor cavity (12); and the exhaust channel connecting the cavities of the second rotor cavity (12) is located at the partition or the radial outside between the adjacent two stages of rotors.

5. The one-piece pump body (1) according to any one of claims 1 to 4, characterized in that: The first rotor cavity (11) and the second rotor cavity (12) are horizontally arranged and distributed vertically; or, The first rotor cavity (11) and the second rotor cavity (12) are both horizontally arranged and horizontally arranged side by side; or, The first rotor cavity (11) and the second rotor cavity (12) are both vertically arranged.

6. The one-piece pump body (1) according to any one of claims 1 to 4, characterized in that: The integrated pump body (1) further comprises a connecting portion between the first rotor cavity (11) and the second rotor cavity (12), the connecting portion is connected with the first rotor cavity (11) and the second rotor cavity (12), and the connecting portion is provided with a hole to form the connecting channel (13).

7. Fluid machine, characterized in that: The fluid machine comprises the integrated pump body (1) of any one of claims 1 to 6, further comprising a first rotor assembly (3) in the first rotor cavity (11), a second rotor assembly (5) in the second rotor cavity (12), and one or two power sources for simultaneously or separately driving the first rotor assembly (3) and the second rotor assembly (5).

8. The fluid machine of claim 7, wherein: The integrated pump body (1) comprises all of the second rotor cavity (12).

9. The fluid machine of claim 8, wherein: The fluid machine further comprises an integrated end cover (7) and an integrated oil tank (8), the first rotor cavity (11) and the second rotor cavity (12) share the same end cover (7) and the same oil tank (8); and / or The length of the first rotor cavity (11) is less than that of the second rotor cavity (12), and the fluid machine further comprises a lengthened pump body (2) coaxial with the first rotor cavity (11) and detachably connected; and / or, The first rotor shaft of the first rotor assembly (3) forms a motor shaft of a first motor (4), and the second rotor shaft of the first rotor assembly (3) forms a motor shaft of a second motor (6).

10. The fluid machine of claim 7, wherein: The fluid machine further comprises another part of the second rotor cavity (12), and the other part of the second rotor cavity (12) is provided with an exhaust port (15).

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