Probe purging device

Abstract

Provided in the present application is a probe purging device, comprising: a device base, on which a raised step is formed, a plunger being formed on the lower plane of the raised step; a purging arm, which comprises a vertical air pipe vertically passing through the device base and comprises a horizontal air nozzle that is below the device base and that is parallel to the surface of the device base, the vertical air pipe and the horizontal air nozzle being connected to form an L-shaped structure; a rotational position limiting handle, one end of which is provided with a shaft hole perpendicular to the rotational position limiting handle, a notch being formed in the outer side of the shaft hole, and a recess in the direction angled by 90 degrees to the notch being formed in the radial plane of the shaft hole at the outer side of the shaft hole, wherein above the device base, the vertical air pipe of the purging arm vertically passes through the device base via the shaft hole of the rotational position limiting handle; and a spring, which is vertically provided between the upper side of the device base and the shaft hole of the rotational position limiting handle and surrounds the outside of the vertical air pipe. The rotational position limiting handle controls the horizontal rotation and / or vertical movement of the vertical air pipe, so as to control the horizontal air nozzle to align with a probe, so as to perform purging.

Description

Probe purging device

[0001] This application claims priority to Chinese Patent Application No. 202410980176.1, filed on July 19, 2024, the disclosure of which is incorporated herein in its entirety as part of the present application. TECHNICAL FIELD

[0002] The present patent application relates to the manufacture of surface acoustic wave filters, and in particular to probe testing and probe decontamination. BACKGROUND

[0003] During probe testing, the probe will be contaminated with metal and other impurities after multiple contacts with the surface of the device. Therefore, after a certain number of probe tests, the probe will return to the cleaning position from the device testing position, and then use contact type decontamination methods such as grinding to remove impurities. SUMMARY

[0004] One aspect of the present application proposes a probe purging device, comprising: a device base, a raised step is formed on the device base, a plunger is formed on the lower plane of the raised step; a purging arm, comprising a vertical air pipe vertically passing through the device base and a horizontal air nozzle below the device base and parallel to the surface of the device base, wherein the vertical air pipe and the horizontal air nozzle are connected into an L-shaped structure; a rotation limiting handle, one end of which has an axial hole perpendicular to the rotation limiting handle, a notch is formed on the outside of the axial hole, and a groove is formed on the axial hole radial plane outside the notch in a direction 90 degrees from the notch, wherein the vertical air pipe of the purging arm vertically passes through the device base via the axial hole of the rotation limiting handle above the device base; a spring, vertically arranged between the device base above and the axial hole of the rotation limiting handle and surrounding the outside of the vertical air pipe, wherein the rotation limiting handle controls the horizontal rotation and / or vertical movement of the vertical air pipe to control the alignment of the horizontal air nozzle to the probe for purging.

[0005] One aspect of the present application proposes a probe purging device, wherein one end of the vertical air pipe below the device base is connected to one end of the horizontal air nozzle via a right-angle joint to form an L-shaped structure, the other end of the vertical air pipe is connected to a flow regulating valve, and the other end of the horizontal air nozzle is used for purging the probe.

[0006] One aspect of the present application proposes a probe purging device, wherein the rotation limiting handle is pressed downward to the lower plane of the raised step, and then the rotation limiting handle is horizontally rotated, so that the groove on the rotation limiting handle and the plunger on the lower plane of the raised step are mutually embedded under the upward force of the spring, so that the probe purging device enters a "purging state".

[0007] One aspect of the present application provides a probe purging device, wherein one end of the rotation limiting handle is provided with a set screw, and when the other end of the horizontal air nozzle is aligned with the probe, the rotation limiting handle is fixed to the vertical air pipe by the set screw.

[0008] One aspect of the present application provides a probe purging device, wherein the rotation limiting handle is horizontally rotated to align the notch and the protrusion of the rotation limiting handle, and under the action of the spring, the rotation limiting handle drives the purging arm to slide upward, so that the protrusion is embedded in the notch, and the probe purging device enters the "retracted state".

[0009] One aspect of the present application provides a probe purging device, further comprising a height limiting member for limiting the sliding distance of the purging arm upward, which is located below the device base, and the inner hole is cylindrical and surrounds the vertical air pipe, and can slide up and down in the axial direction of the vertical air pipe.

[0010] One aspect of the present application provides a probe purging device, wherein a bearing is arranged on the device base, which surrounds the vertical air pipe, so that the vertical air pipe can be horizontally rotated and slid up and down.

[0011] One aspect of the present application provides a probe purging device, wherein the planar profile of the device base matches the test host, so that it can be embedded in the host, and can be detachably connected by bolt connection, magnet adsorption and the like, and wherein the probe is fixed to the test host.

[0012] One aspect of the present application provides a probe purging device, before purging the probe, the distance between the horizontal air nozzle and the rotation limiting handle is adjusted along the axial direction of the vertical air pipe, so that the height of the horizontal air nozzle is below the probe.

[0013] One aspect of the present application provides a probe purging device, wherein the flow regulating valve is used to control the flow of the purging gas. BRIEF DESCRIPTION OF DRAWINGS

[0014] FIG. 1 shows the structure of a probe purging device according to an embodiment of the present application.

[0015] FIG. 2 and FIG. 3 show the structure of a device base according to an embodiment of the present application.

[0016] FIG. 4 shows the structure of a purging arm.

[0017] FIG. 5 shows the structure of a rotation limiting handle.

[0018] FIG. 6 is a schematic view of a probe purging device in a purging state according to an embodiment of the present application.

[0019] FIG. 7 is a schematic view of a probe purging device in a retracted state according to an embodiment of the present application. DETAILED DESCRIPTION

[0020] Before undertaking a detailed description of the foregoing, it can be advantageous to set forth definitions of certain words and phrases that have been used throughout this patent document. The term “coupled” and variations thereof, means any direct or indirect communication or interaction between two or more elements, regardless of the type of physical connection or physical contact between them. The terms “transmit,” “receive,” and “communicate,” as well as variations thereof, encompass direct and indirect communication. The terms “include” and “comprise,” as well as variations thereof, mean inclusion without limitation. The term “or” is inclusive, meaning and / or. The phrase “associated with,” as well as variations thereof, means includes, is included in, interconnects with, contains, is contained within, connects or is connected with, couples or is coupled with, communicates or is in communication with, cooperates or is cooperative with, interleafs with, is proximate to, is bound to or with, has, has a property of, has a relationship to or with, or the like. The term “controller” means any device, system or part thereof that controls at least one operation. Such a controller can be implemented in hardware or a combination of hardware and software and / or firmware. The functionality associated with any particular controller can be centralized or distributed, whether locally or remotely. The phrase “at least one of,” when used with respect to a list of items, means that different combinations of one or more of the listed items can be used and only one item from the list can be needed. For example, “at least one of A, B, and C” includes any of the following combinations: A, B, C, A and B, A and C, B and C, A and B and C.

[0021] Definitions for other certain words and phrases are provided throughout this patent document. Those of ordinary skill in the art should understand that in many if not most instances, such definitions apply to prior as well as future uses of such defined words and phrases.

[0022] In this patent document, the application combination of modules and the division level of sub-modules are only for illustration, and the application combination of modules and the division level of sub-modules can have different manners without departing from the scope of the disclosure.

[0023] The existing mode needs to move the probe from the device test position to the cleaning position, and then re-positioning test is performed after cleaning is completed, the movement process is high in precision, long in time used, and low in efficiency.

[0024] The existing mode is a contact cleaning mode, which causes abrasion of the probe.

[0025] The application designs a rotatable nitrogen blowing device for blowing the probe, instead of the precise movement process of the probe, so that precise positioning is not needed, the movement time is reduced, and the efficiency is improved.

[0026] The non-contact nitrogen blowing impurity removal method can reduce the abrasion of the probe and prolong the service life.

[0027] The structure and working principle of the probe blowing device according to the embodiments of the application are described below.

[0028] Fig. 1 shows the structure of the probe blowing device according to the embodiments of the application.

[0029] As shown in Fig. 1, the probe blowing device comprises 1 device base, 2 blowing arm, 3 rotation limiting part (hereinafter referred to as 3 rotation limiting handle), 4 spring, 5 height limiting part, 6 gas switch valve, and 7 hose.

[0030] Figs. 2 and 3 show the structure of the 1 device base according to the embodiments of the application.

[0031] As shown in Figs. 2 and 3, the components of the 1 device base comprise 1-1 plane, 1-2 raised step, 1-3 bearing, and 1-4 plunger. The state and role of each component of the 1 device base are as follows:

[0032] 1) As shown in Fig. 2, the profile of the 1-1 plane is designed to match the test host, so that it can be embedded in the host and detachably connected by means of bolt connection, magnet adsorption, etc.

[0033] 2) As shown in Fig. 2, the 1-2 raised step is designed to make the protrusion match the 3-1 notch of the 3 rotation limiting handle. The 3 rotation limiting handle is horizontally rotated, and when the notch is aligned with the protrusion, the 3 rotation limiting handle drives the 2 blowing arm to slide upward under the action of the 4 spring. The sliding displacement is limited by the 5 height limiting part. At this time, the probe blowing device is in the "retracted state".

[0034] 3) As shown in Fig. 2, the 1-3 bearing is designed to enable the 2-1 vertical air pipe of the 2 blowing arm to be horizontally rotated and slid up and down.

[0035] 4) As shown in Fig. 3, the 1-4 plunger is designed to be on the lower plane of the raised step. As shown in Fig. 3, when the 3 rotation limiting handle is pressed downward to the lower plane of the raised step, the 3 rotation limiting handle is rotated, and the 3-2 groove on the 3 rotation limiting handle and the 1-4 plunger are embedded in each other under the action of the upward force of the spring. At this time, the probe blowing device is in the "blowing state".

[0036] Fig. 4 shows the structure of the 2 blowing arm.

[0037] As shown in Fig. 4, the 2 blowing arm comprises a L-shaped structure composed of 2-1 vertical air pipe, 2-2 horizontal air nozzle, 2-3 right-angle joint, and 2-4 flow regulating valve.

[0038] 2-1 vertical air pipe is a hollow cylindrical pipe, which forms an adjustable connection with 3-3 shaft hole of 3 rotating limiting handle in axial sliding and radial rotation. In the "blowing state", along the axial direction of 2-1 vertical air pipe, the distance between 2-2 horizontal air nozzle and 3 rotating limiting handle is adjusted, so that the height of horizontal air nozzle is below the probe and above the wafer platform; along the radial direction of 2-1 vertical air pipe, 3 rotating limiting handle is adjusted, so that the air outlet end of 2-1 horizontal air nozzle is aligned with the probe. After the adjustment is completed, 3 rotating limiting handle is fixed on 2-1 vertical air pipe by 3-4 set screw.

[0039] 2-4 flow regulating valve controls the flow of blowing gas, so as to control the force of air flow on the probe, which can not only blow away impurities, but also can not damage the probe.

[0040] Fig. 5 shows the structure of 3 rotating limiting handle.

[0041] 3 rotating limiting handle is designed with 3-1 notch, 3-2 groove, 3-3 shaft hole and 3-4 set screw.

[0042] 3 rotating limiting handle is used to adjust the descending height (lower limit position) and horizontal rotation angle of 2-2 horizontal air nozzle in the "blowing state", so as to align with the probe. For example, the adjustment of the descending height is achieved by pressing 3 rotating limiting handle downward to compress the spring, at this time, the vertical air pipe slides downward, causing the air outlet end of the horizontal air nozzle to descend. 3 rotating limiting handle is horizontally rotated until the air outlet end of the horizontal air nozzle reaches the predetermined position to align with the probe, which is the best position for blowing the probe.

[0043] The directions of 3-1 notch and 3-2 groove are distributed at 90° in the radial plane of the shaft hole, so that the horizontal rotation angle of 2 blowing arm in the "blowing state" and "retraction state" is 90°.

[0044] As shown in Fig. 1 and Fig. 2, the inner hole of 5 height limiting piece is cylindrical, which can slide up and down in the axial direction of 2-1 vertical air pipe. In the "retraction state", 5 height limiting piece limits the height (upper limit position) of the upward movement of the blowing arm. Since the hose moves up and down and horizontally, 7 hose is needed to connect the air path when connected.

[0045] The structure, function and working principle of each component of the probe blowing device of the present application are described above with reference to Figs. 1-5.

[0046] The embodiment of the probe blowing device of the present application is described below with reference to Figs. 6 and 7.

[0047] Fig. 6 is a schematic view of the probe blowing device in the blowing state according to the embodiment of the present application. Fig. 7 is a schematic view of the probe blowing device in the retraction state according to the embodiment of the present application.

[0048] The wafer platform carries the wafer to be tested and moves in three axial directions of front-back, left-right and up-down. When the wafer platform is lowered, the blowing arm of the probe blowing device is manually switched to the blowing state by rotating the limiting handle, and the end of the blowing arm is aligned with the probe. The gas switch valve is opened to blow away impurities. The probe testing device (not shown) and the probe are fixed to the test host.

[0049] After the probe blowing is completed, the gas switch valve is closed, and the probe blowing device is in the retracted state by operating the rotating limiting handle. At this time, the wafer platform moves upward to contact the probe, and the wafer is tested by the probe testing device.

[0050] The rotatable nitrogen blowing device for blowing the probe according to the present application does not require precise movement of the probe, does not require precise alignment of the probe, eliminates the time required for probe movement, and improves the impurity removal efficiency. In addition, the rotatable nitrogen blowing device for blowing the probe according to the present application can reduce the wear of the probe and prolong the service life.

[0051] Although the present disclosure has been described with exemplary embodiments, various changes and modifications can be suggested to one skilled in the art. The present disclosure is intended to cover such changes and modifications that fall within the scope of the appended claims.

[0052] None of the description in this application should be read as implying any particular element, step or function is an essential element necessary for the claim scope. The scope of the patent subject matter is defined only by the claims.

Claims

1. A probe purging device, comprising: a device base having a raised step formed thereon, a plunger formed on the lower plane of the raised step; a purging arm comprising a vertical air tube vertically passing through the device base and a horizontal air nozzle below the device base and parallel to the surface of the device base, wherein the vertical air tube and the horizontal air nozzle are connected to form an L-shaped structure; a rotation limiting handle having an axial hole perpendicular to the rotation limiting handle at one end, a notch formed on the outside of the axial hole, and a groove formed on the axial hole radially at a direction 90 degrees to the notch, wherein the vertical air tube of the purging arm vertically passes through the device base via the axial hole of the rotation limiting handle above the device base; a spring vertically arranged between the device base above and the axial hole of the rotation limiting handle and surrounding the outside of the vertical air tube, wherein the rotation limiting handle controls the horizontal rotation and / or vertical movement of the vertical air tube to control the alignment of the horizontal air nozzle to the probe for purging.

2. The probe purging device of claim 1, wherein, The one end of the vertical air tube below the device base is connected to the one end of the horizontal air nozzle via a right angle joint to form an L-shaped structure, and the other end of the vertical air tube is connected to a flow regulating valve, and the other end of the horizontal air nozzle is used to align the probe for purging.

3. The probe purging device of claim 1, wherein, Pressing the rotation limiting handle downward to the lower plane of the raised step and then horizontally rotating the rotation limiting handle, the groove on the rotation limiting handle and the plunger on the lower plane of the raised step are embedded with each other under the upward force of the spring, so that the probe purging device enters the "purging state".

4. The probe purging device of claim 1 or 3, wherein, The one end of the rotation limiting handle also has a set screw, wherein when the other end of the horizontal air nozzle is aligned to the probe, the rotation limiting handle is fixed to the vertical air tube by the set screw.

5. The probe purging device of claim 1, wherein, Horizontally rotating the rotation limiting handle to align the notch of the rotation limiting handle with the protrusion, the rotation limiting handle drives the purging arm to slide upward under the action of the spring, so that the protrusion is embedded in the notch, and the probe purging device enters the "retracted state".

6. The probe purging device according to claim 1 or 5, further comprising a height limiting member for limiting the distance of upward sliding of the purging arm, which is located below the device base, has a cylindrical inner hole, surrounds the vertical air tube, and can slide up and down in the axial direction of the vertical air tube.

7. The probe purging device of claim 1, wherein, A bearing is arranged on the device base to surround the vertical air tube, so that the vertical air tube can be horizontally rotated and slid up and down.

8. The probe purging device of claim 1, wherein, The planar profile of the device base matches the test host to be embedded in the host and can be detachably connected by bolt connection, magnet attraction, etc. Wherein, the probe is fixed to the test host.

9. The probe purging device according to claim 1 or 3, before purging the probe, adjusting the distance between the horizontal air nozzle and the rotation limiting handle along the axial direction of the vertical air tube, so that the height of the horizontal air nozzle is below the probe.

10. The probe purging device of claim 2, wherein, The flow regulating valve is used to control the flow of the purging gas.

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