Thermal actuator for adjusting an angular orientation of a payload

Abstract

An optical device includes a mirror, having a front side for reflecting light and a rear side opposite the front side. A beam has a proximal end for mounting on a base, a distal end mechanically coupled to the rear side of the mirror, and longitudinal side surfaces extending between the proximal end and the distal end. A plurality of heating elements are associated with respective ones of the longitudinal side surfaces of the beam and configured, when heated, to cause the respective ones of the longitudinal side surfaces to expand longitudinally. A controller is coupled to actuate the heating elements so as to adjust an angular orientation of the mirror.

Description

THERMAL ACTUATOR FOR ADJUSTING AN ANGULAR ORIENTATION OF APAYLOADRELATED APPLICATIONS

[0001] The present application claims priority to U.S. Provisional Patent Application No. 63 / 675,319, filed July 25, 2024, whose disclosure is incorporated herein by reference in its entirety.TECHNICAL FIELD

[0002] The present disclosure relates to adjusting an angular orientation of a payload, and, more specifically, but not exclusively, to using a thermal actuator for adjusting an angular orientation of a payload, for example, one or more optical elements in an optical system such as, for example, a Light Detection and Ranging (LIDAR) system.BACKGROUND

[0003] Thermal actuators are devices, typically compact devices, configured to convert electrical and / or thermal energy into linear mechanical motion, or mechanical displacement. The working concept of the thermal actuator relates to expansion of materials constituting the actuator when subject to heat. The thermal actuators are compliant structures, using elastic deformation and mechanical constraints which may induce and optionally amplify the motion generated by the thermal expansion or contraction. The heat may be induced using various technologies, and / or modalities, for example, electricity, radiation, fluids, to name a few.

[0004] Thermal actuators may be used in a plurality of platforms, systems, and / or devices typically in nanotechnology where thermal actuators may induce microscale and nanoscale mechanical displacement. However, thermal actuators may be designed to induce larger mechanical motion which may be applicable for other applications requiring larger mechanical displacement scales.

[0005] Thermal actuators may be used, for example, in optical systems, platforms, and / or devices, for example, LIDAR systems for adjusting positioning, orientation, and / or alignment of optical elements in order to compensate for deviations, misalignment, and / or discrepancies in optical paths of light in the LIDAR systems.SUMMARY

[0006] It is an object of the present disclosure to provide devices and methods for a novel thermal actuator configured for adjusting an angular orientation of payloads, for example, optical elements of LIDAR systems to compensate for misalignment of optical paths. This objective is achieved by the features of the independent claims. Further implementation forms are apparent from thedependent claims, the description, and the figures. It is noted that multiple such implementation forms may be combined together to any single embodiment.

[0007] According to a first aspect of embodiments disclosed herein, there is provided a thermal actuator for adjusting an angular orientation of a payload. The thermal actuator comprises a cantilever longitudinal beam and a plurality of heating elements. The cantilever longitudinal beam having a proximal end, a distal end and a plurality of longitudinal side surfaces extending between the proximal end and the distal end. The proximal end is anchored to a fixed surface, and the distal end is free and mechanically coupled to a payload. The plurality of heating elements are associated with the plurality of longitudinal side surfaces of the beam, for example, embedded in, disposed in and / or on the longitudinal side surfaces. Wherein in response to heat induced by one or more of the plurality of heating elements, one or more respective one or more respective longitudinal side surfaces associated with the one or more heating elements are associated expand longitudinally thus adjusting an angular orientation of the payload.

[0008] According to a second aspect of embodiments disclosed herein, there is provided a method of dynamically adjusting an angular orientation of a payload, comprising using one or more controllers for receiving a requested angular orientation of a payload mechanically coupled to a cantilever beam of a thermal actuator, the thermal actuator comprises the cantilever beam having a proximal end, a distal end, and a plurality of longitudinal side surfaces, a plurality of heating elements associated with the plurality of longitudinal side surfaces of the beam, the proximal end is anchored to a fixed surface and the distal end is free and mechanically coupled to the payload, and operating one or more of the plurality of heating elements for inducing heat to longitudinally expand one or more of the plurality of longitudinal side surfaces associated with the one or more heating element, thus adjusting the angular orientation of the payload to the requested angular orientation.

[0009] According to a third aspect of embodiments disclosed herein, there is provided a thermal actuator for adjusting an angular orientation of a mirror deployed in an optical system. The thermal actuator comprises a cantilever longitudinal beam and a plurality of heating elements. The cantilever longitudinal beam has a proximal end, a distal end and a plurality of longitudinal side surfaces extending between the proximal end and the distal end. The proximal end is anchored to a fixed surface, and the distal end is free and mechanically coupled to a mirror. The plurality of heating elements are associated with the plurality of longitudinal side surfaces of the beam. Wherein in response to heat induced by one or more of the plurality of heating elements one or more respective longitudinal side surfaces associated with the one or more heating element expand longitudinally thus adjusting an angular orientation of the payload.

[0010] According to a fourth aspect of embodiments disclosed herein, there is provided a method of dynamically adjusting an angular orientation of a mirror deployed in an optical system. The mirror is mechanically coupled to a cantilever beam of a thermal actuator. The thermal actuator comprises the cantilever beam having a proximal end, a distal end, and a plurality of longitudinal side surfaces, and a plurality of heating elements associated with the plurality of longitudinal side surfaces of the beam. The proximal end of the thermal actuator is anchored to a fixed surface and the distal end of the thermal actuator is free and mechanically coupled to the mirror. The method comprises using one or more controllers for receiving a requested angular orientation of the mirror and operating one or more of the plurality of heating elements for inducing heat to longitudinally expand one or more respective longitudinal side surfaces associated with the one or more heating elements thus adjusting the angular orientation of the payload to the requested angular orientation.

[0011] According to a fifth aspect of embodiments disclosed herein, there is provided a LIDAR system, comprising one or more light sources configured to emit one or more light beams projected for scanning a field of view of the LIDAR system, one or more light sensors configured to receive light reflected from the field of view of the LIDAR system, a thermal actuator configured to adjust an angular orientation of a mirror deployed in the LIDAR system for reducing misalignment of the one or more light beams with the one or more light sensors. The thermal actuator comprises a cantilever longitudinal beam having a proximal end, a distal end and a plurality of longitudinal side surfaces extending between the proximal end and the distal end. The proximal end is anchored to a fixed surface in the LIDAR system and the distal end is free and mechanically coupled to the mirror, and one or more controllers configured to operate one or more of the plurality of heating elements for inducing heat to longitudinally expand one or more of the plurality of longitudinal side surfaces thus adjusting an angular orientation of the mirror for reducing the misalignment of the one or more light beams with the one or more light sensors.

[0012] In a further implementation form of the first, second, third, fourth, and / or fifth aspects optionally together with one or more of the other implementation forms, at least two of the plurality of heating elements associated with at least two non-opposing longitudinal side surfaces of the plurality of longitudinal side surfaces are operated to induce heat in the at least two longitudinal side surfaces such that the least two non-opposing longitudinal side surfaces expand longitudinally thus adjusting the angular orientation of the payload in multiple axes.

[0013] In a further implementation form of the first, second, third, fourth, and / or fifth aspects optionally together with one or more of the other implementation forms, one or more of the plurality of heating elements is embedded in one or more of the plurality of longitudinal side surfaces.

[0014] In a further implementation form of the first, second, third, fourth, and / or fifth aspects optionally together with one or more of the other implementation forms, one or more of the plurality of heating elements comprise one or more resistors disposed on the plurality of longitudinal side surfaces.

[0015] In a further implementation form of the first, second, third, fourth, and / or fifth aspects optionally together with one or more of the other implementation forms, one or more of the plurality of heating elements are embedded in a flexible PCB wrapped around the beam such that each of the plurality of heating elements is disposed on one of the plurality of longitudinal side surfaces.

[0016] In a further implementation form of the first, second, third, fourth, and / or fifth aspects optionally together with one or more of the other implementation forms, one or more heating elements are disposed along an extended portion of a longitudinal axis of each of the plurality of longitudinal side surfaces.

[0017] In a further implementation form of the first, second, third, fourth, and / or fifth aspects optionally together with one or more of the other implementation forms, one or more temperature sensors are associated with one or more of the plurality of longitudinal side surfaces for measuring temperature of the one or more longitudinal side surfaces.

[0018] In a further implementation form of the first, second, third, fourth, and / or fifth aspects optionally together with one or more of the other implementation forms, one or more of the plurality of heating elements is operated to induce heat based on temperature measured by the one or more temperature sensor.

[0019] In a further implementation form of the first, second, third, fourth, and / or fifth aspects optionally together with one or more of the other implementation forms, one or more of the plurality of heating elements is operated to induce heat based on correlation between a longitudinal expansion of one or more of the plurality of longitudinal side surfaces and a temperature induced in the one or more longitudinal side surfaces.

[0020] In a further implementation form of the first, second, third, fourth, and / or fifth aspects optionally together with one or more of the other implementation forms, the longitudinal beam is shaped to have a tubular structure having a heat insulating interior.

[0021] In a further implementation form of the first, second, third, fourth, and / or fifth aspects optionally together with one or more of the other implementation forms, the tubular structure has a hollow interior.

[0022] In a further implementation form of the first, second, third, fourth, and / or fifth aspects optionally together with one or more of the other implementation forms, the longitudinal beam isshaped to include one or more openings between at least two adjacent longitudinal side surfaces of the plurality of longitudinal side surfaces.

[0023] In a further implementation form of the first, second, third, fourth, and / or fifth aspects optionally together with one or more of the other implementation forms, the longitudinal beam is shaped to have a reduced thickness interconnection between at least two adjacent longitudinal side surfaces of the plurality of longitudinal side surfaces.

[0024] In a further implementation form of the first, second, third, fourth, and / or fifth aspects optionally together with one or more of the other implementation forms, the longitudinal beam is produced of one or more materials having a coefficient of thermal expansion (CTE) higher than 30 parts per million (ppm) per one degree Celsius.

[0025] In a further implementation form of the first, second, third, fourth, and / or fifth aspects optionally together with one or more of the other implementation forms, the longitudinal beam is produced of one or more materials having a thermal conductivity lower than 1.0 x 10'4Watts per meter-Kelvin.

[0026] In a further implementation form of the first, second, third, fourth, and / or fifth aspects optionally together with one or more of the other implementation forms, the longitudinal beam is produced of one or more materials having a service temperature higher than 150 degrees Celsius.

[0027] In a further implementation form of the second, fourth, and / or fifth aspects optionally together with one or more of the other implementation forms, the one or more controllers are configured to operate the least one heating element based on temperature measured by one or more temperature sensors associated with the thermal actuator.

[0028] In a further implementation form of the second, fourth, and / or fifth aspects optionally together with one or more of the other implementation forms, the one or more controllers are configured to operate the least one heating element based on correlation between a longitudinal expansion of one or more of the plurality of longitudinal side surfaces and a temperature induced in the one or more longitudinal side surfaces.

[0029] In a further implementation form of the fifth aspect optionally together with one or more of the other implementation forms, the thermal actuator and the mirror are deployed in a transmit optical path of the LIDAR system and / or in a receive optical path of the LIDAR system. The transmit optical path defines an optical path through which the light emitted by the one or more light sources of the LIDAR system is projected. The receive optical path defines an optical path through which the light is received by the one or more light sensors.

[0030] In a further implementation form of the fifth aspect optionally together with one or more of the other implementation forms, the one or more controllers are configured to operate the oneor more heating elements based on information indicative of intensity of light received by one or more of the light sensors.

[0031] In a further implementation form of the fifth aspect optionally together with one or more of the other implementation forms, the one or more controllers are configured to operate the one or more heating elements based on information indicative of a spatial distribution of light received by one or more of the light sensors.

[0032] Consistent with other disclosed embodiments, non-transitory computer readable storage media may store program instructions, which are executed by at least one processor and perform any of the methods described herein.

[0033] The foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the claims.BRIEF DESCRIPTION OF THE DRAWINGS

[0034] The accompanying drawings, which are incorporated in and constitute a part of this disclosure, illustrate various disclosed embodiments by way of example only. With specific reference now to the drawings in detail, it is stressed that the particulars are shown by way of example and for purposes of illustrative discussion of embodiments disclosed herein. In this regard, the description taken with the drawings makes apparent to those skilled in the art how disclosed embodiments may be practiced.

[0035] The accompanying drawings, which are incorporated in and constitute a part of this disclosure, illustrate various disclosed embodiments.

[0036] In the drawings:

[0037] FIG. 1A and FIG. IB are schematic illustrations of an exemplary thermal actuator configured to adjust angular orientation of a payload, in accordance with embodiments of the present disclosure;

[0038] FIG. 2 depicts schematic illustrations of exemplary embodiments of a thermal actuator configured to adjust angular orientation of a payload which includes opening separating its adjacent side surface, in accordance with embodiments of the present disclosure;

[0039] FIG. 3A, FIG. 3B, and FIG. 3C are schematic illustrations of exemplary heating elements embodiments of a thermal actuator configured to adjust angular orientation of a payload, in accordance with embodiments of the present disclosure;

[0040] FIG. 4 is a flow chart of an exemplary process of operating a thermal actuator to adjust an angular orientation of a payload, in accordance with embodiments of the present disclosure;

[0041] FIG. 5 is a schematic illustration of an exemplary system for operating a thermal actuator to adjust an angular orientation of a payload, in accordance with embodiments of the present disclosure;

[0042] FIG. 6 is a schematic illustration of an exemplary LIDAR system, in accordance with embodiments of the present disclosure;

[0043] FIG. 7 is a schematic illustration of an exemplary thermal actuator deployed in a LIDAR system for adjusting an angular orientation of an optical element of the LIDAR system, in accordance with embodiments of the present disclosure;

[0044] FIG. 8 shows schematic illustrations of exemplary alignment and misalignment states of a light beam projected by a LIDAR system with respect to a sensor of the LIDAR system which are compensated using a thermal actuator deployed in the LIDAR system to adjust an alignment mirror, in accordance with embodiments of the present disclosure; and

[0045] FIG. 9 is a flow chart of an exemplary process of operating a thermal actuator to adjust an angular orientation of a mirror configured to align one or more light beams received by a LIDAR system with respective one or more sensors of the LIDAR system, in accordance with embodiments of the present disclosure;DETAILED DESCRIPTION

[0046] The present disclosure relates to adjusting an angular orientation of a payload, and, more specifically, but not exclusively, to using a thermal actuator for adjusting an angular orientation of a payload, for example, one or more optical elements in an optical system such as, for example, a LIDAR system.

[0047] According to some embodiments of the present disclosure, there are provided devices and methods, systems, devices, and kits for dynamically adjusting an angular orientation of payloads, specifically using an innovative thermal actuator design configured to support two-dimensional (2D) rotation of the payload such that the angular orientation of the payload may be adjusted in two axes.

[0048] The thermal actuator may comprise a cantilever longitudinal beam having a longitudinal dimension substantially larger than its lateral dimensions (width, depth). A proximal end of the longitudinal beam may be anchored to a fixed (stationary) element while the distal end of the longitudinal beam which is free may be mechanically coupled to the payload.

[0049] A plurality of longitudinal side surfaces may extend between the proximal end and the distal end of the beam, typically connected to the proximal end and the distal end. Typically, the cantilever longitudinal beam may be constructed and / or shaped to have an even number oflongitudinal side surfaces, for example, four, six, eight, etc. such that a plurality of pairs of opposing longitudinal side surfaces may be defined.

[0050] The thermal actuator may further include a plurality of heating elements associated respectively with respective ones of the longitudinal side surfaces, for example by being embedded in, disposed in or on the respective longitudinal side surfaces. Each heating element may be configured to induce heat into the longitudinal side surface with which the respective heating element is associated. The heating elements may include, for example, resistive heating elements which, when driven with an electric current, may induce heat to their environment, and specifically to it associated respective longitudinal side surface. In another example, the heating elements may include radiative heating elements, for example, radiation absorption and / or collection surfaces, which when radiated with radiation (e.g., light, microwave, etc.), may induce heat to their environment, and specifically to the respective longitudinal side surface in which it is disposed.

[0051] When one or more heating elements associated with a respective longitudinal side surface of the cantilever beam of the thermal actuator are operated to induce heat, the heat induced to the respective longitudinal side surface may cause the respective longitudinal side surface to expand, specifically expand in the longitudinal axis of the respective longitudinal side surface. The longitudinal expansion of the respective longitudinal side surface may cause a mechanical displacement of the distal end of the cantilever beam since the proximal end is fixedly anchored to the stationary element while the distal end is not. Specifically, the mechanical displacement of the distal end may be in the longitudinal direction of the respective longitudinal side surface which expanded.

[0052] The mechanical displacement of the distal end of the cantilever longitudinal beam of the thermal actuator may cause adjustment of the angular orientation of the payload which is mechanically coupled to the distal end.

[0053] In particular, the thermal actuator may be operated in a differential displacement mode in which the distal end is mechanically displaced as result of a difference in the longitudinal expansion of a pair of opposing longitudinal side surfaces. To this end, the cantilever beam may be configured and / or shaped to have an even number of opposing longitudinal side surfaces such that a plurality of pairs of opposing longitudinal side surface may be defined.

[0054] Operating the heating elements to induce heat in one longitudinal side surface of a single pair may induce a one dimensional (ID) mechanical displacement of the distal end in the longitudinal axis of the respective pair of opposing longitudinal side surface, specifically on the side of the longitudinal side surface which expanded more as result of heat induced to it by the heating element(s) associated with it. Operating the heating elements to induce heat in one longitudinal side surface of each of a plurality of pairs may induce a two dimensional (2D)mechanical displacement of the distal end in the longitudinal axis which is the aggregation of the longitudinal axis of the longitudinal side surfaces of all activated pairs.

[0055] The heating elements may be disposed or positioned along an extended portion of each longitudinal side surface to allow for increased expansion of the respective longitudinal side surface thus enabling an increased range (span) of mechanical displacement of the distal end and thus an increased adjustment range (span) of the angular orientation of the payload.

[0056] Optionally, one or more temperature sensors may be associated with one or more of the longitudinal side surfaces in order to measure temperature of the respective longitudinal side surface. For example, one or more temperature sensors may be embedded in one or more longitudinal side surfaces, disposed on one or more longitudinal side surfaces, deployed in close proximity to one or more longitudinal side surfaces, and / or the like. In such cases, the heating elements may be operated (activated) to induce heat according to temperature information measured by the temperature sensor(s). For example, the heating elements may be operated according to a correlation (determined based on analysis and / or experimentation) between temperature of the longitudinal side surface and its longitudinal expansion.

[0057] The cantilever longitudinal beam of the thermal actuator may be produced of one or more materials have a high Coefficient of Thermal Expansion (CTE) to enable high expansion of the longitudinal side surfaces when subject to heat. Moreover, the material(s) used to produce the cantilever longitudinal beam may be characterized by high service temperature to support operation of the thermal actuator in high temperature environments.

[0058] Optionally, the cantilever longitudinal beam of the thermal actuator may be shaped and / or configured to have a thermal insulating interior to reduce and potentially prevent transfer of heat (crosstalk) between different longitudinal side surfaces, for example, the longitudinal beam may be hollow thus thermally separating between the longitudinal side surfaces. Moreover, the longitudinal beam may be shaped and / or configured to have openings, and / or reduced thickness or volume edges between adjacent longitudinal side surfaces to reduce and potentially prevent heat transfer between the adjacent longitudinal side surfaces.

[0059] The innovative thermal actuator which relies on differential mechanical displacement of opposing side surfaces of its cantilever beam may be advantageous over currently existing thermal actuators.

[0060] First, since the cantilever thermal actuator is constructed to have a plurality of pairs of opposing longitudinal side surfaces which may expand when heated induce a differential mechanical displacement in multiple dimensions, the cantilever thermal actuator may enable adjustment of the angular orientation of the payload in a plurality of axes as opposed to some of the existing thermal actuators which are limited to a single axis actuation.

[0061] Moreover, while supporting multi-dimension angular orientation adjustment of the payload, the structure of the cantilever thermal actuator is significantly simple compared to existing multi-dimension thermal actuators which typically include a plurality of disparate thermal actuators each configured to provide actuation in a respective dimension, for example, single axis breams configured to actuate respective spring-like elements on which the payload is deployed. The simplified structure of the cantilever thermal actuator may significantly increase accuracy of the payload’s angular orientation since only a single element, namely the cantilever longitudinal beam, is thermally manipulated compared to the existing thermal actuators in which a plurality of distinct actuators may have to be operated in order to set the payload’s orientation. Moreover, the simplified structure of the cantilever thermal actuator may significantly reduce unit cost, production cost, and / or assembly cost compared to the much more complex existing thermal actuators. Furthermore, the simplified structure of the cantilever thermal actuator may significantly increase reliability of the cantilever thermal actuator compared to the existing thermal actuators having a significantly more complex structure with a significantly larger number of components which are subject to failure, fatigue, and / or aging.

[0062] Furthermore, producing the cantilever thermal actuator from high CTE material(s) may significantly increase the actuation range (span) of the cantilever longitudinal beam thus significantly expanding the range in which the angular orientation of the payload may be adjusted. In addition, employing measures to reduce and potentially prevent heat transfer between the longitudinal side surfaces, i.e., heat insulating and / or hollow interior, openings between adjacent side surfaces and / or reduced thickness sections between adjacent side surfaces, may significantly reduce thermal crosstalk between the side surfaces. The heat induced in the side surfaces may be therefore controlled and localized to specific side surfaces which are actually actuated while other side surfaces which are not actuated may not be affected by the induced heat. The tight and strict localization of expansion of the side surfaces may significantly increase accuracy of the payload’s angular orientation.

[0063] In addition, using temperature sensors to measure the temperature of the side surface of the cantilever longitudinal beam and controlling accordingly the heating elements to expand the side surfaces in closed feedback loop may significantly increase accuracy of the mechanical displacement induced by the expanding side surfaces which may further increase accuracy of the pay load’s angular orientation.

[0064] According to some embodiments disclosed herein, the thermal actuator may be used for adjusting the angular orientation of one or more payloads in an optical system, for example, a mirror, a prism, a lens, and / or the like to alter, manipulate, and / or adjust an optical path of light travelling through the optical system.

[0065] The optical system may include, for example, a LIDAR system comprising one or more payloads, specifically one or more optical elements such as, for example, a mirror, a light transmission window, a lens, a prism, a beam splitter, a waveplate, and / or the like. For example, one or more thermal actuators may be used to adjust the angular orientation of one or more alignment mirrors deployed in the LIDAR system for altering the optical path of light travelling through and / or in the LIDAR system, for example, aligning one or more light beams projected and / or received by the LIDAR system with corresponding light sensors of the LIDAR system.

[0066] As known in the art, LIDAR systems may scan their environment, i.e., a scene by projecting light to illuminate the scene and analyze light reflected from objects in the scene.

[0067] However, due to one or more conditions, limitations, and / or deviations, one or more optical misalignments may occur in one or more optical paths of the LIDAR system, for example, an outbound optical path (transmit path) through which light is projected (transmitted) to from the LIDAR system to the scene, and / or an inbound optical path (receive path) through which the reflected light is received by the LIDAR system from the scene. The optical misalignment may be traced to one or more root causes, for example heat effects (e.g., high / low temperature, temperature changes and / or fluctuations, etc.) in the LIDAR system, mechanical tolerances, inaccuracies, and / or limitations in positioning, orientation, dimensions, and / or other physical attributes of components of the LIDAR system, and / or more.

[0068] Such optical misalignments may cause the received light, specifically one or more received light beams to be unaligned with respective sensors of the LIDAR system thus reducing performance of the LIDAR system, for example, reduced range, reduced resolution, reduced accuracy, reduced confidence of detection, and / or the like.

[0069] One or more alignment mirrors may be therefore deployed in the LIDAR system in order to compensate for the misalignment in the optical paths of the LIDAR system and align the received light beams with their respective sensors.

[0070] Since the received light beams reflected from a scene scanned by the LIDAR system are reflected from objects in the scene illuminated with light projected from the LIDAR system, the optical route of the light may be adjusted either during transmission of the projected light and / or during reception of the reflected light. The alignment mirror(s) may be therefore deployed on the outbound optical path and / or on the inbound optical path.

[0071] As described herein before, the payload, which in this case comprises the alignment mirror, may be mechanically coupled to the free distal end of the cantilever longitudinal beam of the thermal actuator while the proximal end of the longitudinal beam is anchored to a fixed element of the LIDAR system, for example, a frame, a housing, and / or the like such that the proximal end is stationary, and the thermal actuator is therefore fixed in place.

[0072] Apart from the control loops described herein before for the thermal actuator, for example, correlation between temperature of the longitudinal side surfaces and their expansion, the thermal actuator deployed in the LIDAR system for adjusting the angular orientation of the alignment mirror may be further controlled based on another closed feedback loop, specifically information relating to light received by the sensor(s) of the LIDAR system which may be indicative of the alignment between the received light beam(s) and the sensor(s).

[0073] In particular, the heating elements of the thermal actuator may be operated to heat respective longitudinal side surfaces of the thermal actuator according to one or more parameters of the light received by the sensor(s), for example, intensity, distribution and / or the like which are indicative of alignment of received light beam(s) with the sensor(s). The thermal actuator may be thus operated to adjust the angular orientation of the alignment mirror until reaching optimal light reception and / or distribution of the received light at the sensor(s).

[0074] Using the thermal actuator in LIDAR systems may significantly reduce costs, for example, unit cost, production cost, maintenance cost and / or the like of the LIDAR system compared to LIDAR systems employing other actuator types, for example, mechanical actuators. Moreover, having no moving parts, the thermal actuator may be significantly more reliable, maintainable, and / or robust compared to mechanical actuators which may significantly increase reliability, longevity, and / or robustness of the thermal actuator based LIDAR systems compared to mechanical actuator based LIDAR systems.

[0075] The following detailed description refers to the accompanying drawings. Wherever possible, the same reference numbers are used in the drawings and the following description to refer to the same or similar parts.

[0076] While illustrative embodiments are described herein, it is to be understood that these are not necessarily limited in their application to the details of construction and / or arrangement of the components, systems, or methods, since modifications, adaptations and other implementations are possible. For example, as may be appreciated by one skilled in the art, substitutions, additions, and / or modifications may be made to the components illustrated in the drawings, and the illustrative methods described herein may be modified by substituting, reordering, removing, or adding steps to the disclosed methods.

[0077] Accordingly, the following detailed description is not limited to the disclosed embodiments and examples. Instead, the proper scope is defined by the appended claims.

[0078] Referring now to the drawings, FIG. 1A and FIG. IB are schematic illustrations of an exemplary thermal actuator configured to adjust angular orientation of a payload, in accordance with embodiments of the present disclosure.

[0079] As seen in FIG. 1 A, an exemplary thermal actuator 100 may be configured for dynamically adjusting an angular orientation of a payload 150.

[0080] The payload 150 may comprise practically any element, component, device, and / or part which needs to be dynamically oriented according to a selected orientation. For example, an exemplary payload 150 may include one or more optical elements, for example, a lens, a mirror, a prism, a beam splitter, a waveplate, and / or the like which needs to be dynamically oriented to adjust one or more transmission parameters of light incident on the optical element, for example, direction, distribution, collimation, and / or the like. In another example, the payload 150 may include one or more sensors, for example, an imaging sensor, a proximity sensor, a directional sonic sensor, and / or the like which needs to be dynamically oriented to face a certain target direction. In another example, the payload 150 may include one or more antennas, for example, a Radio Detection and Ranging (RADAR) antenna, a directional communication antenna (e.g., WiFi antenna, etc.), and / or the like which needs to be dynamically oriented to face a certain target direction.

[0081] The thermal actuator 100 may anchored to a fixed (stationary) element 152, for example, a surface, a fixture, a mechanical member, and / or the like and operated to adjust the angular orientation of the payload 150. In particular, the thermal actuator 100 may be operated to rotate the payload in two axes, i.e., a two dimensional (2D) motion, for example, off-plane rotational motion around the axis of the two main axes (X, and Z) of a plane parallel to the payload 150.

[0082] The thermal actuator 100 may comprise a cantilever longitudinal beam 102 having a proximal end 110 anchored to the fixed element 152 and a distal end 112 which is free and mechanically coupled to the payload 150. The cantilever longitudinal beam 102 may include a plurality of longitudinal side surfaces 114 extending between the proximal end 110 and the distal end 112.

[0083] The thermal actuator 100 may further comprise a plurality of heating elements 104 associated with the plurality of longitudinal side surfaces 114 of the beam 102, for example, embedded in, disposed on and / or in the longitudinal side surfaces 114. The thermal actuator 100 may be configured, shaped, and / or designed such that in response to heat induced by a respective heating element 104 of the plurality of heating elements 104 a respective one of the plurality of longitudinal side surfaces 114, with which the respective heating element 104 is associated, expands longitudinally in a direction of their longitudinal axis thus adjusting the angular orientation of the payload 150. In other words as result of expansion of one or more of the longitudinal side surfaces 114 and the fact that the proximal end of the cantilever longitudinal beam 102 is anchored to the fixed element 152, the distal free end 112 of the cantilever longitudinalbeam 102 may be mechanically displaced which may adjust the angular orientation of the attached payload 150.

[0084] Specifically, the longitudinal beam 102 may be shaped as a polygonal beam having an even number of longitudinal side surfaces 114 typically with a symmetric cross section, as seen in FIG. IB, for example, a square longitudinal beam 102A comprising four longitudinal side surfaces 114A, a hexagon longitudinal beam 102B comprising six longitudinal side surfaces 114B, an octagon longitudinal beam 102C comprising eight longitudinal side surfaces 114C, and / or the like.

[0085] Shaping and / or configuring the longitudinal beam 102 to have an even number of longitudinal side surfaces 114 may allow pairing opposing longitudinal side surfaces 114 into pairs. The thermal actuator 100 may be thus operated in differential mode in which a difference in the longitudinal expansion between opposing longitudinal side surfaces 114 of a respective pair may induce a differential mechanical displacement of the distal end 112 in the longitudinal axis parallel and / or coinciding with the longitudinal axis of the respective pair of longitudinal side surfaces 114. The mechanical displacement may be applied to the distal end 112 since the proximal end 110 is fixedly secured to the fixed element 152 and is thus stationary and unable to move.

[0086] For example, as seen in illustration 620 in FIG. IB, each pair of opposing longitudinal side surfaces 114 of an even sided polygon beam 102, for example, longitudinal side surfaces 114 1 and longitudinal side surfaces 114 2 may expand longitudinally with respect to each other along their longitudinal axis 122 when subject to heat. As such, when one or both opposing longitudinal side surfaces 114 1 and 114 2 expand longitudinally, the expansion may induce a differential mechanical displacement 126 with respect to each other in the direction of their longitudinal axis 122 and perpendicular to a normal (line) 124 to the surface of the opposing longitudinal side surfaces 114 1 and 114 2. For example, assuming the longitudinal side surfaces 114 1 is heated while the longitudinal side surfaces 114 2 is not heated, or the longitudinal side surfaces 114 1 is heated to higher temperature then the longitudinal side surfaces 114 2, the longitudinal side surfaces 114 1 may expand more than the longitudinal side surfaces 114 2 thus inducing differential mechanical displacement 126 to the distal end 112 on the side of the longitudinal side surfaces 114 1 compared to the original position of the distal end 112 which is marked by a dashed line.

[0087] The differential mechanical displacement 126 between each pair of opposing longitudinal side surfaces 114 may induce a respective differential mechanical displacement 126 thus adjusting the angular orientation of the attached payload 150 in one axis, specifically the axis perpendicular to the normal 124 between the opposing longitudinal side surfaces 114 of the respective pair thus adjusting the angular orientation of the payload 150 in one dimension (ID).

[0088] However, a plurality of heating elements 104, for example (e.g., two, three, or more) associated with two or more non-opposing longitudinal side surfaces 114 of the cantilever longitudinal beam 102 may be operated to induce heat in the two or more non-opposing longitudinal side surfaces 114 at the same time. As result of the induced heat, the two or more nonopposing longitudinal side surfaces 114 may expand thus causing a differential mechanical displacement 126 between the opposing longitudinal side surfaces 114 of two or more pairs of opposing longitudinal side surfaces 114. The differential mechanical displacement 126 between opposing longitudinal side surfaces 114 of multiple pairs may thus adjust the angular orientation of the payload 150 in more than one axis, i.e., in multiple axes such that the angular orientation of the payload 150 may be adjusted in two dimensions (2D).

[0089] As such, the thermal actuator 100 may be operated to adjust the angular orientation of the payload 150 in 2D, for example, off-plane rotational motion around the axis of the two main axes of a plane parallel to the payload 150, for example, axes X and Z.

[0090] Optionally, one or more temperature sensors 106, for example, a thermistor, a thermocouple, and / or the like configured for measuring temperature may be disposed in one or more of longitudinal side surfaces 114 for measuring the temperature of the one or more longitudinal side surfaces 114. For example, a respective temperature sensor 106 may be embedded in, disposed on, and / or deployed in close proximity to each of the plurality of the longitudinal side surfaces 114 of the cantilever beam 102 for measuring the temperature of all of the longitudinal side surfaces 114. The location of the temperature sensor 106 in each longitudinal side surface 114 may be selected based on one or more criteria, for example, a location determined to be most correlated with and thus indicative of an extent of expansion of the respective longitudinal side surface 114, for example, a location at the end or even edge of the longitudinal side surface 114 near the distal end 112. Moreover, multiple temperature sensors 106 may be optionally associated with one or more longitudinal side surfaces 114 to provide a multipoint temperature mapping of the respective longitudinal side surface 114.

[0091] In order to effectively adjust the angular orientation of the payload 150 in a large angular range, the thermal actuator 100 may be shaped, and / or configured to support an extended span (extent) of the mechanical displacement of its longitudinal side surfaces 114, which is translated to an extended longitudinal mechanical displacement of the distal end 112 which is free since the proximal end 110 is anchored to a fixed surface and thus unable to move.

[0092] For example, the cantilever longitudinal beam 102 of the thermal actuator 100 may be shaped to be significantly long, i.e., the longitudinal length of the longitudinal side surfaces 114 may be significantly large compared to the lateral length of the longitudinal side surfaces 114. As such inducing heat to a respective longitudinal side surface 114 may cause larger expansion of thelongitudinal side surface 114 in the longitudinal axis compared to its expansion in the lateral axis thus supporting an extended span of longitudinal mechanical displacement of the longitudinal side surfaces 114.

[0093] In another example, the thermal actuator 100, specifically the cantilever beam 102 and its longitudinal side surfaces 114 may be produced of one or more materials having a high Coefficient of Thermal Expansion (CTE), for example, higher than 30 parts per million (ppm) per one degree Celsius to support high expansion of the longitudinal side surfaces 114 when subject to heat. Each longitudinal side surface 114 produced of such high CTE materials may therefore expand in an extended expansion range when subject to heat, typically with direct correlation to the temperature developed on the respective longitudinal side surface 114 thus increasing the mechanical displacement.

[0094] In another example, the one or more heating elements 104 may be disposed or positioned along an extended portion of the longitudinal axis of each of the plurality of longitudinal side surfaces 114 to induce heat in the extended portion of the longitudinal axis and thus effectively induce expansion along the longitudinal axis of the cantilever beam 102. The extended portion may include, for example, 60%, 75%, 80%, and / or the like of the longitudinal length of each of the longitudinal side surfaces 114.

[0095] For example, a plurality of relatively small heating elements 104 may be disposed along an extended portion of one or more longitudinal side surfaces 114, typically in small gaps (distances) from each other. In another example, an elongated heating element 104 may be disposed along an extended portion of one or more longitudinal side surfaces 114. In another a combination of small and elongated heating elements 104 may be disposed along an extended portion of one or more longitudinal side surfaces 114, for example, a central elongated heating elements 104 disposed along 40% of the longitudinal length at the center of the longitudinal side surface 114 and a couple of smaller heating elements 104 disposed at the ends of the longitudinal side surface 114 to each cover 15% of the longitudinal length of the longitudinal side surface 114.

[0096] Moreover, for effective and / or accurate adjustment of the angular orientation of the payload 150, the mechanical displacement of the thermal actuator 100 has to be strictly controlled. Specifically, when operating one or more heating elements 104 in attempt to induce mechanical displacement in the longitudinal axis of one or more of the longitudinal side surface(s) 114 with which the respective heating elements 104 are associated, the heat induced by the respective heating elements 104 has to be localized to prevent its transfer and / or leakage to other parts of the beam 102, specifically to other longitudinal side surface(s) 114, for example, adjacent longitudinal side surfaces 114, and / or opposite longitudinal side surfaces 114.

[0097] To this end, the thermal actuator 100 may optionally apply one or more measures, designs, structures, and / or constructions to reduce and potentially prevent heat transfer (crosstalk) between different longitudinal side surfaces 114 of the cantilever longitudinal beam 102, for example, adjacent longitudinal side surfaces 114, and / or opposite longitudinal side surfaces 114.

[0098] According to some embodiments, one or more mechanical provisions and / or structures may be applied in the thermal actuator 100 to reduce and potentially prevent crosstalk, i.e., heat transfer between different longitudinal side surfaces 114. For example, the thermal actuator 100 may have its cantilever longitudinal beam 102 shaped to have a heat insulating interior to prevent transfer of heat between its longitudinal side surfaces 114. In another example, the thermal actuator 100 may have one or more mechanical provisions, for example, an opening, a thinned section, and / or the like between adjacent longitudinal side surfaces 114 to prevent mutual heat transfer between them.

[0099] Reference is now made to FIG. 2, which depicts schematic illustrations of exemplary embodiments of a thermal actuator configured to adjust angular orientation of a payload which includes opening separating its adjacent side surface, in accordance with embodiments of the present disclosure.

[0100] An exemplary thermal actuator 100A such as the thermal actuator 100 may comprise cantilever longitudinal beam 102 A such as the longitudinal beam 102 having a proximal end 110A such as the proximal end 110, a distal end 112A such as the distal end 112 and a plurality of longitudinal side surfaces 114A such as the longitudinal side surfaces 114 extending between the proximal end 110A and the distal end 112A. The thermal actuator 100A may further include a plurality of heating elements such as the heating elements 104 associated with the longitudinal side surfaces 114 A and optionally one or more temperature sensors such as the temperature sensors 106 associated with one or more of the longitudinal side surfaces 114A for measuring their temperature.

[0101] The longitudinal beam 102 A of the thermal actuator 100 A may be shaped to have a tubular structure having a heat insulating interior 202 to prevent transfer of heat between adjacent and / or opposite longitudinal side surfaces 114 of the longitudinal beam 102. Moreover, the tubular structure of the longitudinal beam 102 may have a hollow interior meaning that the longitudinal beam 102 may be shaped to have sidewalls constituting the longitudinal side surfaces 114 and a hollow interior 202 to prevent heat transfer from each sidewall to other sidewalls of the beam 102. For example, the sidewalls of the longitudinal beam 102 may be produced of one or more materials characterized by high CTE to allow high expansion of the longitudinal side surfaces 114 while the interior 202 of the longitudinal beam 102 may hollow or produced of one or more heat insulating materials to prevent heat transfer (crosstalk) between the longitudinal side surfaces 114.

[0102] Furthermore, the sidewalls of the longitudinal beam 102A, i.e., the longitudinal side surfaces 114A, may be shaped to be significantly thin thus reducing the volume of material that is heated to induce expansion of the longitudinal side surfaces 114A. Heating the reduced volume longitudinal side surfaces 114A may significantly increase precision and accuracy of the mechanical expansion of the longitudinal side surfaces 114A induced by heat from the heating elements 104 since a better correlation may be achieved between heat and expansion with less material due to reduced losses in the reduced volume material. Moreover, reduced volume longitudinal side surfaces 114A may significantly reduce the power and / or energy applied to the heating elements 104 for expanding the reduced volume longitudinal side surfaces 114 A.

[0103] An exemplary thermal actuator 100B such as the thermal actuator 100 may comprise a cantilever longitudinal beam 102B such as the longitudinal beam 102 having a proximal end HOB such as the proximal end 110, a distal end 112B such as the distal end 112 and a plurality of longitudinal side surfaces 114B such as the longitudinal side surfaces 114 extending between the proximal end HOB and the distal end 112B. The longitudinal beam 102B may be shaped to have a heat insulating interior such as the heat insulating interior 202, for example, a hollow interior.

[0104] The thermal actuator 100B may further include a plurality of heating elements such as the heating elements 104 associated with the longitudinal side surfaces 114B and optionally one or more temperature sensors such as the temperature sensors 106 associated with one or more of the longitudinal side surfaces 114B for measuring their temperature.

[0105] As seen, the longitudinal beam 102B of the thermal actuator 100B may be shaped, configured, and / or constructed to have one or more mechanical provisions for reducing and potentially preventing heat transfer between adjacent longitudinal side surfaces 114B. For example, the longitudinal beam 102B may be shaped to include one or more openings 204 between two or more adjacent longitudinal side surfaces 114B of the thermal actuator 100B. the openings 204 forming air gaps between the adjacent longitudinal side surfaces 114B may reduce the physical connection between the adjacent longitudinal side surfaces 114B and thus significantly reduce transfer of heat between these adjacent longitudinal side surfaces 114B.

[0106] Additionally, and / or alternatively, the edges connecting at least some of the adjacent longitudinal side surfaces 114B may be thinned to have a reduced thickness (width) thus reduce the cross section of matter at the edge through which heat may travel (leak) from one longitudinal side surface 114B to one or more both its adjacent longitudinal side surfaces 114B. The reduced thickness interconnections (edges) between adjacent longitudinal side surfaces 114B may therefore reduce transfer of heat induced by one or more heating elements 104B in one of the longitudinal side surfaces 114B to one or more other longitudinal side surfaces 114B, specifically adjacent longitudinal side surfaces 114B.

[0107] According to some embodiments, one or more constructions and materials may be selected and / or applied for the thermal actuator 100 to reduce and potentially prevent crosstalk, i.e., heat transfer between different longitudinal side surfaces 114.

[0108] For example, the thermal actuator 100, specifically the cantilever longitudinal beam 102 may be constructed and / or produced from one or more materials, for example, a polymeric material, a metallic materials, a combination thereof, and / or the like, having a low thermal conductivity, for example, a thermal conductivity lower than 1.0 x 10-4 Watts per meter-Kelvin. Producing the longitudinal side surfaces 114 produced using such low thermal conductivity material(s) may therefore significantly localize the heat induced by each heating element 104 to the immediate area of the respective heating element 104, i.e., restrict the heat to the respective longitudinal side surface 114 with which the respective heating element 104 is associated, and prevent transfer of the heat induced by the respective heating element 104 to other longitudinal side surfaces 114.

[0109] Since the thermal actuator 100 may be subject to heat induction which may significantly increase its temperature and may be optionally coupled with a high temperature environment in which the thermal actuator 100 is deployed, the thermal actuator 100 may be produced, and / or constructed of one or more materials capable of withstanding high temperature without significantly changing their physical and / or operational parameters and / or characteristics, for example, solidity, elasticity, heat transfer, shape, and / or the like. The thermal actuator 100, including the longitudinal beam 102 and the heating elements 104, may be therefore produced of one or more materials having a service temperature higher than 150 degrees Celsius, or even higher than 620 degrees Celsius. It should be noted that, as known in the art, the service temperature may be expressed by one or more other terms, measures, and / or parameters, for example, glass transition temperature (TG), and / or the like. The value of such alternative terms and / or measures may be selected to correspond to a service temperature of 620 degrees Celsius.

[0110] The longitudinal beam 102, specifically the longitudinal side surfaces 114 may be therefore produced of one or more materials characterized by one or more of the criteria and / or terms described herein before. For example, the high CTE, low thermal conductivity and high service temperature. For example, the longitudinal beam 102 may shaped to have a hollow interior and thin sidewalls forming the longitudinal side surfaces 114 which are produced of one or more polymeric materials having high CTE, low thermal conductivity, and high service temperature, for example, a polymeric material such as, for example, Polyetherimide (e.g., Ultem, etc.), a metallic material such as, for example, stainless steel, and / or the like.[oni] One or more technologies, configurations, and / or techniques may be applied for disposing the heating elements 104 in the longitudinal side surfaces 114, for example, embedding, attaching,mounting, and / or otherwise mechanically coupling the heating elements 104 to the longitudinal side surfaces 114.

[0112] Reference is now made to FIG. 3 A, FIG. 3B, and FIG. 3C, which are schematic illustrations of exemplary heating elements embodiments of a thermal actuator configured to adjust angular orientation of a payload, in accordance with embodiments of the present disclosure.

[0113] As seen in FIG. 3 A, a first exemplary thermal actuator 100C such as the thermal actuator 100 may comprise a cantilever longitudinal beam 102C such as the longitudinal beam 102 having a proximal end 110C such as the proximal end 110, a distal end 112C such as the distal end 112 and a plurality of longitudinal side surfaces 114C such as the longitudinal side surfaces 114 extending between the proximal end HOC and the distal end 112C. The longitudinal beam 102B may be shaped to have a heat insulating interior 202C such as the heat insulating interior 202, for example, a hollow interior.

[0114] The thermal actuator 100B may include one or more resistors 104C serving as the heating elements 104 which are disposed, for example, soldered, attached, and / or otherwise mechanically coupled to one or more of the longitudinal side surfaces 114C. Each resistor 104C may be connected to an electric circuit configured for driving an electrical current through the respective resistor 104C. As such, when current is driven through the electric circuit, one or more of the resistors 104C may heat up due to the electrical resistance of the respective resistor and may therefore induce heat in the respective longitudinal side surface 114C in which the respective resistor 104C is disposed. The resistors 104C may be disposed over an extended portion of the longitudinal axis of each longitudinal side surface 114C to enable extended expansion span of the respective longitudinal side surface 114C in the longitudinal axis.

[0115] The thermal actuator 100C may optionally include one or more temperature sensors 106C such as the temperature sensors 106 disposed on one or more of the longitudinal side surfaces 114C for measuring the temperature at the respective longitudinal side surfaces 114C.

[0116] As also seen in FIG. 3 A, another exemplary thermal actuator 100D such as the thermal actuator 100 may comprise a cantilever longitudinal beam 102D such as the longitudinal beam 102 having a proximal end HOD such as the proximal end 110, a distal end 112D such as the distal end 112 and a plurality of longitudinal side surfaces 114D such as the longitudinal side surfaces 114 extending between the proximal end 110D and the distal end 112D. The longitudinal beam 102D may be shaped to have a heat insulating interior 202D such as the heat insulating interior 202, for example, a hollow interior.

[0117] The thermal actuator 100D may include one or more embedded heating elements 104D such as the heating elements 104, for example, a metal coil, a conductive wire, and / or the like which are embedded in one or more of the longitudinal side surfaces 114D, for example,integrated, buried, and / or attached. Each embedded heating element 104D may be connected to an electric circuit configured to drive an electrical current through the respective embedded heating element 104D such that when current is driven through the electric circuit, the respective embedded heating element 104D may heat up due to its electrical resistance and thus induce heat in the respective longitudinal side surface 114D in which the respective resistor 104C is embedded. The embedded heating elements 104D may be disposed or positioned over an extended portion of the longitudinal axis of each longitudinal side surface 114D to enable extended expansion span of the respective longitudinal side surface 114D in the longitudinal axis.

[0118] The thermal actuator 100D may optionally include one or more temperature sensors 106D such as the temperature sensors 106 disposed on one or more of the longitudinal side surfaces 114D for measuring the temperature at the respective longitudinal side surfaces 114D.

[0119] As seen in FIG. 3B, another exemplary thermal actuator 100E such as the thermal actuator 100 may comprise a cantilever longitudinal beam (not seen) such as the longitudinal beam 102 having a proximal end 110E such as the proximal end 110, a distal end 112E such as the distal end 112 and a plurality of longitudinal side surfaces (not seen) such as the longitudinal side surfaces 114 extending between the proximal end 110E and the distal end 112E. Optionally, the longitudinal beam of the thermal actuator 100E may be shaped to have a heat insulating interior such as the heat insulating interior 202, for example, a hollow interior.

[0120] The longitudinal beam of the thermal actuator 100E may be wrapped by a flexible PCB 310 (flexi-rigid PCB) comprising one or more heating elements 104E, for example, a resistor, an embedded heating element, a heat stick, and / or the like. In particular, the heating elements 104E disposed in the flexible PCB 310 may be positioned such that when the flexible PCB 310 is wrapped around the longitudinal beam of the thermal actuator 100E the heating elements 104E may be positioned to physically couple to (e.g., contact, touch) each longitudinal side surface of the thermal actuator 100E.

[0121] Moreover, the heating elements 104E disposed in the flexible PCB 310 may be configured and / or positioned to effectively induce heat in one or more of the longitudinal side surfaces of the longitudinal beam of the thermal actuator 100E. For example, the heating elements 104E may be disposed in the flexible PCB 310 such that when the flexible PCB 310 is wrapped around the cantilever longitudinal beam of the thermal actuator 100E, the heating elements 104E may couple to the longitudinal side surface over an extended portion of the longitudinal axis of the longitudinal side surface to enable extended expansion span of the respective longitudinal side surface in the longitudinal axis.

[0122] The thermal actuator 100E may optionally include one or more temperature sensors 106E such as the temperature sensors 106 disposed in and / or on the flexible PCB 310 such that they arecoupled, touch or at least locate in close proximity to one or more of the longitudinal side surfaces of the thermal actuator 100E for measuring the temperature at the respective longitudinal side surfaces.

[0123] As seen in FIG. 3C, another exemplary thermal actuator 100F such as the thermal actuator 100 may comprise a cantilever longitudinal beam 102F such as the longitudinal beam 102 having a proximal end 11 OF such as the proximal end 110, a distal end 112F such as the distal end 112 and a plurality of longitudinal side surfaces 114F such as the longitudinal side surfaces 114 extending between the proximal end 110F and the distal end 112F. Optionally, the longitudinal beam of the thermal actuator 100FE may be shaped to have a heat insulating interior 202F such as the heat insulating interior 202, for example, a hollow interior.

[0124] The thermal actuator 100F may include one or more heating elements 104F such as the heating elements 104, in particular, radiation absorption and / or collection surfaces 104F which are disposed, for example, soldered, attached, integrated, and / or otherwise physically coupled to one or more of the longitudinal side surfaces 114F. One or more radiating elements 320, for example, a light source (e.g., Infrared (IR) light source, laser emitter, etc.), a microwave emitter, and / or the like may be configured to project (transmit) radiation, for example, light (e.g., IR, laser, etc.), microwaves, and / or the like on each of the radiation collection surfaces 104F. Each radiation collection surfaces 104F on which radiation is projected by one or more radiating elements 320 may heat up due to the radiation energy of the radiation and may therefore induce heat in the respective longitudinal side surface 114F in which the respective radiation collection surface 104F is disposed. As described herein before, the radiation collection surface 104F may be disposed over an extended portion of the longitudinal axis of each longitudinal side surface 114F to enable extended expansion span of the respective longitudinal side surface 114FC in the longitudinal axis.

[0125] The thermal actuator 100F may optionally include one or more temperature sensors 106F such as the temperature sensors 106 disposed in and / or on one or more of the longitudinal side surface 114F for measuring the temperature at the respective longitudinal side surfaces 114F.

[0126] Reference is now made to FIG. 4, which is a flow chart of an exemplary process of operating a thermal actuator to adjust an angular orientation of a payload, in accordance with embodiments of the present disclosure. Reference is also made to FIG. 5, which is a schematic illustration of an exemplary system for operating a thermal actuator to adjust an angular orientation of a payload, in accordance with embodiments of the present disclosure.

[0127] An exemplary process 400 may be executed for operating a thermal actuator such as the thermal actuator 100 anchored to a fixed element such as the fixed element 152 surface for adjusting an angular orientation of a payloads such as the payload 150.

[0128] The process 400 for operating the thermal actuator 100 may be executed by a controller 502 facilitated by one or more physical processing devices comprising one or more processing cores circuits configured to operate independently, in parallel and / or collaboratively. Each processing device may comprise one or more electric circuits configured to perform logic and / or arithmetic operations on input data, for example, an Integrated Circuit (IC), a Field Programmable Gate Array (FPGA), an Application-Specific Integrated Circuit (ASIC), a microcontroller, a microprocessor, a Central Processing Unit (CPU), a Graphic Processing Unit (GPU), a Digital Signal Processor (DSP), an Artificial Intelligence (Al) Accelerator and / or one or more other circuits suitable for executing instructions or performing logic operations.

[0129] The instructions executed by the controller 502 may be loaded from a memory 508 comprising one or more volatile memory and / or persistent memory devices, external and / or embedded in the processor, for example, Random Access Memory (RAM), Read-Only Memory (ROM), Flash memory, hard drive (e.g., optical drive, magnetic medium, etc.), and / or any other mechanism or medium capable of storing instructions and / or data.

[0130] Optionally, the controller 502 may operate the thermal actuator 100 according to one or more lookup tables 510 stored in a memory accessible to the controller 502, for example, the memory 508. Additionally, and / or alternatively, the controller 502 may operate the thermal actuator 100 according to temperature feedback information received from one or more temperature sensors such as the temperature sensors 106 deployed and configured to measure temperature of one or more regions and / or surfaces of the thermal actuator 100.

[0131] The controller 502 may communicate and / or control the memory 508, the thermal actuator 100 and / or the temperature sensors 106 via one or more electrical interconnection, channels, and / or signals, as known in the art.

[0132] As shown at 402, the process 400 starts with the controller 502 receiving a requested angular orientation of a payload such as the payload 150 mechanically coupled to thermal actuator such as the thermal actuator 100.

[0133] As described herein before, the payload 150 may be mechanically coupled to a distal end such as the distal end 112 of a cantilever longitudinal beam such as the cantilever longitudinal beam 102 of the thermal actuator 100 while a proximal end such as the proximal end 110 of the beam 102 is anchored to a fixed (stationary) element such as the fixed element 152.

[0134] The requested angular orientation may include, for example, an absolute angular orientation to which the payload 150 needs to orient. In another example, the requested angular orientation may include a difference (delta) angular orientation from the current angular orientation of the payload 150.

[0135] As shown at 404, the controller 502 may select one or more heating elements such as the heating elements 104 associated with one or more longitudinal side surfaces such as the longitudinal side surfaces 114 extending between the proximal end 110 and the distal end 112 of the longitudinal beam 102.

[0136] The controller 502 may select heating elements 104 according to the requested angular orientation. Specifically, the controller 502 may select one or more heating elements 104 which, when operated, may induce heat in the longitudinal side surface(s) 114 that may cause longitudinal expansion of the longitudinal side surface(s) 114 thus causing a mechanical displacement of the free distal end 112 of the longitudinal beam 102 estimated to adjust the angular orientation of the pay load 150 to the requested angular orientation.

[0137] As described herein before, the thermal actuator 100 may be based differential mechanical displacement of one or more pairs of opposing longitudinal side surfaces 114 of the longitudinal beam 102. The controller 502 may therefore select one or more heating elements 104 estimated to cause a differential mechanical opposing longitudinal side surfaces 114 of one or more pairs.

[0138] The requested angular orientation may require a single dimensional (ID) or a two dimensional (2D) mechanical displacement of the distal end 112 to which the payload 150 is coupled. The controller 502 may therefore select heating elements associated with one or more pairs of opposing longitudinal side surfaces 114 since, as described herein before, the differential mechanical displacement between each pair of opposing longitudinal side surfaces 114 may be in an axis of the longitudinal axis of the longitudinal side surfaces 114 of the respective pair.

[0139] For example, assuming the requested angular orientation requires and / or dictates a certain ID mechanical displacement of the distal end 112 in a single axis. In such case, the controller 502 may operate one or more heating elements 104 associated with a single pair of opposing longitudinal side surfaces 114 which may cause one of the longitudinal side surfaces 114 of the respective pair to expand differentially with respect to its opposing longitudinal side surface 114, i.e., the first longitudinal side surface 114 of the respective pair may longitudinally expand differently (more or less) compared to the second longitudinal side surface 114 of the respective pair. The differential expansion may induce the certain ID mechanical displacement in the longitudinal axis of the longitudinal side surfaces 114 of the pair which coincides with the single axis of the ID mechanical displacement dictated by the requested angular orientation of the payload 150.

[0140] In another example, assuming the requested angular orientation requires and / or dictates a certain 2D mechanical displacement of the distal end 112 in two axes (e.g., X, Z). In such case, the controller 502 may operate one or more heating elements 104 associated with a plurality of pairs of opposing longitudinal side surfaces 114 which may cause one of the longitudinal sidesurfaces 114 of each pair to expand differentially with respect to its opposing longitudinal side surface 114, i.e., the first longitudinal side surface 114 of each pair may longitudinally expand differently (more or less) compared to the second longitudinal side surface 114 of the respective pair. The aggregated differential expansions between the opposing longitudinal side surfaces 114 of each pair of the plurality of pairs may induce the certain 2D mechanical displacement in an axis coinciding with the axis of the 2D mechanical displacement dictated by the requested angular orientation of the payload 150.

[0141] As shown at 406, the controller 502 may operate the selected heating element(s) 104 to induce heat in the respective longitudinal side surface(s) 114 with which the selected heating elements 104 are associated in order to cause expansion of the respective longitudinal side surface 114 which may cause adjustment of the distal end 112 and thus adjust the angular orientation of the payload 150 mechanically coupled to the distal end 112.

[0142] For example, assuming the heating elements 104 are resistive elements such as the heating elements 104C, 104D and / or 104E, for example, resistors, embedded heating elements, heat sticks, and / or the like, the controller 502 may activate, and / or control one or more electric circuits configured to drive an electrical current through the selected resistive heating element(s) 104 thus heating the selected resistive heating element(s) 104. In another example, assuming the heating elements 104 are radiation collection surfaces such as the radiation collection surfaces 104F, the controller 502 may activate, and / or control one or more radiating elements such as the radiating elements 320 for projecting radiation collected by the selected radiation collection surfaces 104F thus heating the selected radiation collection surfaces 104F.

[0143] The controller 502 may apply one or more algorithms, methods, and / or techniques, for operating the heating elements 104 to induce heat estimated to cause the longitudinal beam 102 to expand such that the payload 150 is oriented in the requested angular orientation.

[0144] For example, the controller 502 may use one or more lookup tables 510 storing information indicative of correlation between the longitudinal expansion of one or more of the longitudinal side surfaces 114 and the temperature of the respective longitudinal side surface 114. The mechanical expansion to temperature correlation information may be defined, estimated, computed, and / or otherwise determined based on analysis, empiric testing and measurement, and / or the like.

[0145] The controller 502 may fetch the correlation information from the lookup table(s) 510 stored, for example, in the memory 508, and operate the selected heating element(s) 104 according to the correlation between the longitudinal expansion of the respective longitudinal side surface(s) 114 with which the heating element(s) 104 is associated and the temperature of the longitudinal side surface(s) 114.

[0146] Moreover, one or more of the lookup tables 510 may store information indicative of correlation between the longitudinal expansion of one or more of the longitudinal side surfaces 114 and a temperature difference between the respective longitudinal side surface 114 and its opposing longitudinal side surface 114. The controller 502 may therefore operate the selected heating element(s) 104 according to the correlation between the longitudinal expansion of the respective longitudinal side surface(s) 114 with which the heating element(s) 104 is associated and the temperature difference between the respective opposing longitudinal side surfaces 114.

[0147] Optionally, one or more of the lookup tables 510 may store information indicative of correlation between the longitudinal expansion of one or more of the longitudinal side surfaces 114 and a heating energy applied to heat the heating elements 104, for example, electric energy (e.g., current, power, etc.) in case of the resistive heating elements 104, radiation energy (e.g., power) in case of the radiation collection surfaces 104, and / or the like. The mechanical expansion to heating energy correlation information may be defined, estimated, computed, and / or otherwise determined based on analysis, empiric testing and measurement, and / or the like. In such case, the controller 502 may operate the selected heating elements 104 according to correlation between the longitudinal expansion of one or more of the longitudinal side surface(s) 114 with which the selected heating element(s) 104 is associated and the energy applied to heat the selected heating element(s) 104.

[0148] Optionally, as shown at 408, the controller 502 may operate one or more of the heating elements 104 according to temperature feedback information, specifically temperature measured by one or more temperature sensors 106 deployed and configured to measure the temperature of one or more of the longitudinal side surfaces 114.

[0149] In such case, the controller 502 may analyze the temperature feedback information and may adjust accordingly the selection and / or operation of one or more of the heating elements 104 in order to achieve, and / or maintain temperature of one or more of the longitudinal side surfaces 114 in attempt to adjust the angular orientation of the payload 150 to the requested angular orientation.

[0150] For example, assuming that based on the requested angular orientation for the payload 105, the controller 502 determines that the thermal actuator 100 needs to be actuated to a certain mechanical displacement, specifically a certain differential mechanical displacement between one or more pairs of opposing longitudinal side surfaces 114, designated target pairs. Further assuming that based on one or more lookup tables 510 correlating between longitudinal expansion the longitudinal side surfaces 114 and a temperature difference between opposing longitudinal side surfaces 114 of the target pairs, the controller 502 determines that one or more of the respective longitudinal side surfaces 114 need to be heated to one or more certain temperatures. In such case,the controller 502 may operate one or more heating elements 104 associated with the respective longitudinal side surfaces 114 and monitor the temperature measured by one or more of the temperature sensors 106 associated with the respective longitudinal side surfaces 114. The controller 502 may use the temperature measured by the temperature sensor(s) 106 as feedback for a closed control loop and further operate the heating elements 104 to increase and / or reduce the heat induced to the respective longitudinal side surfaces 114 according to the measured temperature.

[0151] Moreover, the process 400 may be an iterative process comprising a plurality of iterations where in each iteration the controller 502 may analyze the temperature feedback information and adjust accordingly the selection and / or operation mode of the heating element(s) 104 in order induce heat for maintaining the temperature of the longitudinal side surface(s) 114 corresponding to their longitudinal expansion of the longitudinal side surface(s) 114 corresponding to the longitudinal expansion of the longitudinal side surface(s) 114 required to adjust the payload 150 to the requested angular orientation.

[0152] The controller 150 may continuously, periodically, and / or occasionally operate one or more of the heating elements 104 of the thermal actuator 100 to maintain the longitudinal expansion of the longitudinal side surface(s) 114 and hence their mechanical displacement and thus maintain the requested angular orientation of the payload 150. For example, the controller 502 may operate one or more of the selected heating elements 104, for example, resistive heating elements 104C, 104D and / or 104E by operating one or more electric circuits to drive a constant current to the resistive heating elements 104C, 104D and / or 104E for maintaining a steady temperature in the respective longitudinal side surfaces 114 in which the resistive heating elements 104C, 104D and / or 104E are disposed. In another example, the controller 502 may operate the electric circuit(s) to periodically drive current pulses to the selected resistive heating element(s) 104 for maintaining the steady temperature in the respective longitudinal side surface(s) 114. In another example, the controller 502 may operate one or more of the selected heating elements 104, for example, radiation collection surfaces 104F by operating one or more radiating elements 320 to transmit radiation collected by the radiation collection surfaces 104F for maintaining a steady temperature of the respective longitudinal side surfaces 114 in which the radiation collection surfaces 104F are disposed.

[0153] The controller 150 may operate one or more of the heating elements 104 according to one or more adjustment profiles and / or patterns to adjust the angular orientation of the payload 150 to a requested target angular orientation. For example, the controller 150 may operate one or more heating elements 104 to induce relatively low heat to respective longitudinal side surfaces 114 in order to induce slow gradual expansion of the longitudinal side surface(s) 114 thus slowlyadjusting the angular orientation of the payload 150 until reaching the requested target angular orientation.

[0154] In another example, the controller 150 may operate one or more heating elements 104 to induce relatively high heat to respective longitudinal side surfaces 114 in order to fast adjust angular orientation of the payload 150 toward the target angular orientation. The rapid adjustment of the angular orientation of the payload 150 may lead to an overshot in which the angular orientation of the payload 150 may cross over the target angular orientation requested for the payload 150. The controller 150 may operate one or more heating elements 104 to stop inducing heat into the respective longitudinal side surface(s) 114 such that they may stop expanding or even retract back such that the angular orientation of the payload 150 is adjusted toward the requested angular orientation. Additionally, and / or alternatively, the controller 150 may operate one or more heating elements 104 to induce heat in one or more opposing longitudinal side surface(s) 114 to induce a counter (“stopping” or “breaking”) mechanical displacement in the opposing longitudinal side surface(s) 114 and thus adjust the angular orientation of the payload 150 toward the requested angular orientation. The controller 150 may repeat this process in a plurality of iterations optionally operating the heating element(s) 104 to gradually reduce the induced heat such that following several gradually decreasing oscillations of the angular orientation of the payload 150 around the requested angular orientation, the angular orientation of the payload 150 may reach the requested target angular orientation.

[0155] According to some embodiments disclosed herein, thermal actuators such as the thermal actuator 100 may be used for adjusting the angular orientation of one or more payloads such as the payload 150 in an optical system, for example, a mirror, a lens, a prism, and / or the like for altering, adjusting, and / or otherwise manipulating an optical path of light in the optical system.

[0156] One exemplary optical system may include a scanning device, for example, a scanner configured to scan objects in order to create a copy, a model, a virtual duplicate, and / or the like of the object. In such cases, the scanner may include one or more thermal actuators 100 configured to adjust the angular orientation of one or more optical elements of the scanner to alter the optical path of light projected and / or received by the scanner for one or more purposes, for example, focus projected light, modify a focal point of the optical element, displace a projection point of the light on a light sensor, and / or the like.

[0157] A second exemplary optical system may include an imaging system, for example, a medical optical system, a scientific optical system configured to identify features and attributes of an imaged object, body, tissue, space, and / or the like, for example, a shape, an outline, a size, a dimension, a distance, a texture, a density, an opacity, and / or the like.

[0158] Another exemplary optical system may include a LIDAR system in which one or more thermal actuators 100 may be deployed to adjust the angular orientation of one or more payloads 150, specifically one or more optical elements, for example, a mirror, a light transmission window, a lens, a prism, a beam splitter, a waveplate, and / or the like for altering and / or adjusting an optical path of one or more light beams projected by the LIDAR system to an FOV of the LIDAR system and / or an optical path of light received from the FOV.

[0159] For example, one or more thermal actuators 100 may be deployed in the LIDAR system for compensating and / or reducing misalignment in optical paths of light travelling in the LIDAR system. In this context, a thermal actuator 100 may be used for adjusting the angular orientation of one or more alignment mirrors deployed in the LIDAR system for compensating and / or reducing misalignment of one or more light beams projected out of the LIDAR system with one or more sensors of the LIDAR system configured to receive light reflected in response to the projected light beam.

[0160] In another example, one or more thermal actuator 100 may be deployed in the LIDAR system for focusing and / or collimating light travelling in the LIDAR system. For example, the thermal actuator 100 may be coupled to a payload 150 comprising a collimating lens deployed on one or more optical paths of the LIDAR system, for example, a transmit path of one or more beams projected from one or more light sources of the LIDAR system. The thermal actuator 100 may be used for adjusting the angular orientation of the collimating lens to overcome positioning and / or alignment deviations in the optical path which may degrade collimation and / or focus of the projected light beams.

[0161] In another example, one or more thermal actuator 100 may be deployed in the LIDAR system for adjusting the angular orientation of one or more transmission windows through which the light travels in the LIDAR system, in such embodiments, the thermal actuator 100 may be coupled to payload 150 comprising a transmission window having one or more optical characteristics, for example, a refraction index, a light incidence angle, and / or the like. The thermal actuator 100 may be used for adjusting the angular orientation of the light transmission window to orient the window in a desired angular orientation with respect to one or more optical paths travelled by light in the LIDAR system.

[0162] Reference is now made to FIG. 6, which is a schematic illustration of an exemplary LIDAR system, in accordance with embodiments of the present disclosure.

[0163] A LIDAR system 600 may be used, for example, in one or more ground autonomous or semi-autonomous vehicles 610, for example, road-vehicles such as, for example, cars, buses, vans, trucks and any other terrestrial vehicle. In another example, the LIDAR system 600 may be used in one or more autonomous / semi-autonomous aerial -vehicles such as, for example, UnmannedAerial Vehicles (UAV), drones, quadcopters, and / or any other airborne vehicle or device. In another example, the LIDAR system 600 may be used in one or more autonomous or semi- autonomous water vessels and / or watercrafts such as, for example, boats, ships, hovercrafts, submarines, and / or the like. Autonomous vehicles equipped with the LIDAR system 600, for example, ground vehicles 610, aerial vehicles, and / or water vessels may scan their environment and use information derived from the scanning for operating the vehicle with reduced and potentially without human intervention.

[0164] The LIDAR system 100 may be configured to detect tangible objects in an environment of the LIDAR system 100, specifically in a scene contained in a Field of View (FOV) 620 of the LIDAR system 100 based on reflected light, and more specifically, based on light reflected from objects in the FOV 620 in response to light projected by the LIDAR system 100. The scene may include some or all objects within the FOV 620, in their relative positions and in their current states. Such objects may include, for example, ground elements (e.g., earth, roads, grass, sidewalks, road surface marking, etc.), sky, man-made objects (e.g., vehicles, buildings, signs, etc.), vegetation, people, animals, light projecting elements (e.g., flashlights, sun, other LIDAR systems, etc.), and / or the like.

[0165] The LIDAR system 100 may employ one or more scanning and detection technologies. For example, the LIDAR system 100 may employ pulsed Time of Flight (ToF) detection where the light signal transmitted (projected) by the LIDAR system 100 may comprise one or more pulses, whose rise and / or fall time may be detected in reception of the projected light after reflected by one or more objects in the FOV 620. In another example, the LIDAR system 100 may employ Continuous Wave (CW) detection, for example, Frequency Modulated Continuous Wave (FMCW), phase-shift continuous wave, and / or the like, in which the distance and optionally one or more additional parameters of the object may be determined based on phase and / or frequency shifts of the received light signal reflected from the objects with respect to the phase and / or frequency of the transmitted light signal.

[0166] The LIDAR system 600 may comprise an illumination unit 602, a scanning unit 604, a sensing unit 606, and a processing unit 608. According to some embodiments, the LIDAR system 600 may be mountable on a vehicle 610.

[0167] Optionally, the LIDAR system 600 may include one or more optical windows 622 for transmitting outgoing light projected by the scanning unit 604 toward the FOV 620 and / or for receiving incoming light reflected from objects in field of view 620. The optical window(s) 622, for example, an opening, a flat window, a lens, a prism, or any other type of optical element may be used for one or more purposes, for example, collimating the projected light, focusing of the reflected light, and / or the like.

[0168] The LIDAR system 600 may employ one or more designs architectures, and / or configurations for the optical path of outbound light emitted by the illumination unit 102 and projected by the scanning unit 604 toward the scene, i.e., transmission path (TX) to the FOV 620 of the LIDAR system 600, and the optical path of inbound light reflected from objects in the scene and directed to the sensing unit 606, i.e., reception path (RX). For example, the LIDAR system 600 may employ bi-static configuration in which the outbound light (TX) exiting the LIDAR system 100, i.e., the light emitted by the illumination unit 602 and projected by the scanning unit 604, toward the scene and the inbound light (RX) reflected from the scene and entering the LIDAR system 600 pass through substantially different optical paths each comprising one or more optical respective components, for example, a window, an aperture, a lens, a mirror, abeam splitter, and / or the like.

[0169] In another example, the LIDAR system 100 may employ monostatic configuration in which the outbound light (TX) and the inbound light (RX) share substantially the same optical path, i.e., light emitted by the illumination unit 102 and projected by the scanning unit 104 and light reflected from the scene and entering the LIDAR system 100, pass through a substantially common optical path sharing most if not all of the optical components on the common optical path.

[0170] The illumination unit 602 may include one or more light sources 612 configured to emit light in one or more light forms, for example, a laser diode, a solid-state laser, a high-power laser, an edge emitting laser, a Vertical-Cavity Surface-Emitting Laser (VCSEL), an External Cavity Diode Laser (ECDL), A distributed Bragg reflector (DBR) laser, a laser array, and / or the like.

[0171] The light source(s) 612 may be configured and / or operated, for example, by the processing unit 608, to emit light according to one or more light emission patterns defined by one or more light emission parameters, for example, lighting mode (e.g., pulsed, CW, quasi-CW, etc.), light format (e.g., angular dispersion, polarization, etc.), spectral range (wavelength), energy / power (e.g., average power, maximum power, power intensity, instantaneous power, etc.), timing (e.g., pulse width (duration), pulse repetition rate, pulse sequence, pulse duty cycle, etc.), and / or the like.

[0172] Optionally, the illumination unit 602 may further comprise one or more optical elements associated with one or more of the light source(s) 612, for example, a lens, an aperture, a window, a light filter, a waveplate, a beam splitter, and / or the like for adjusting the light and / or light beams emitted by the light source(s) 612, or example, collimating, focusing, polarizing, and / or the like.

[0173] The sensing unit 606 may include one or more sensors 616 configured to receive and sample light (photons) from the surroundings of LIDAR system 600, specifically from the scene, i.e., the FOV 620, and generate reflection signals, interchangeably designated trace signals or trace data, indicative of light captured by the sensor(s) 616 which may include light reflected from one or more objects in the FOV 620 illuminated by the light projected from the LIDAR system 600.

[0174] The sensor(s) 616 may include one or more devices, elements, and / or systems capable of measuring properties of electromagnetic waves, specifically light, for example, energy / power, intensity, frequency, phase, timing, duration, and / or the like and generate output signals indicative of the measured properties. The sensor(s) 616 may be configured and / or operated to sample incoming light according to one or more operation modes, for example, continuous sampling, periodic sampling, sampling according to one or more timing schemes, and / or according to sampling instructions.

[0175] The sensor(s) 616 may include light sensors of one or more types and / or technologies and may thus have differing parameters, for example, sensitivity, size, recovery time, and / or the like. The sensor(s) 616 may include a plurality of light sensors of a single type, or sensors of multiple types selected according to their characteristics and operational parameters to comply with one or more detection requirements of the LIDAR system 600, for example, detection over a span of ranges (e.g., maximum range, close range, etc.), accuracy, reliability, dynamic range, temporal response, robustness against varying environmental conditions (e.g., temperature, rain, illumination, etc.), and / or the like.

[0176] The scanning unit 604 may be configured to illuminate the FOV 620 and / or part thereof by projecting the light emitted from the light source(s) 612 toward the scene thus serving as a steering element on the outbound path of the LIDAR system 600, i.e., the transmission path TX, for directing the projected light 624 toward the scene. The scanning unit 604 may be further used on the inbound path of the LIDAR system 600, i.e., the reception path RX, for directing the light (photons) 626 reflected from one or more objects in at least part of the FOV 620 toward the sensing unit 606.

[0177] The scanning unit 604 may apply one or more scanning mechanisms, methods, technologies, and / or implementations for scanning the environment, specifically the FOV 620. For example, the scanning unit 604 may scan the environment by moving and / or pivoting one or more light deflectors 614 configured to deflect the light emitted by the light source(s) 612 in differing directions toward different parts of the FOV 620. The light deflector(s) 614 may include one or more scanning mechanism, module, devices, and / or elements configured to cause the emitted light to deviate from its original path, for example, a mirror, a prism, a controllable lens, a mechanical mirror, a mechanical scanning polygon, an active diffraction (e.g., controllable LCD), a Risley prisms, a non-mechanical-electro-optical beam steering (such as made, for example, by Vescent), a polarization grating (such as offered, for example, by Boulder Non-Linear Systems), an Optical Phase Array (OP A), and / or the like.

[0178] For example, a mechanical light deflector 614 may comprise one or more scanning polygons, interchangeable designated polygon scanner, having a plurality of facets, for example,three, four, five, six, etc. configured as mirrors and / or prisms for deflecting light projected onto the facet of the polygon. In another example, the light deflector 614 may comprise one or more Micro Electro-Mechanical Systems (MEMS) mirrors configured to move by actuation of a plurality of benders connected to the mirror. In another example, a non-mechanical light deflector 614 such as, for example, a non-mechanical-electro-optical beam steering may comprise an OPA which does not require any moving components or internal movements for changing the deflection angles of the light but is rather controlled by steering, through phase array means, a light projection angle of the light emitted by the light source(s) 612 to a desired projection angle. It is noted that any discussion relating to moving or pivoting the light deflector(s) 614 is also applicable, mutatis mutandis, to controlling any type of light deflector 614, mechanical, non-mechanical or other, such that it changes its deflection behavior.

[0179] Optionally, the scanning unit 604 may further include an optical system comprising one or more optical elements associated with the light deflector(s) 614, for example, a lens, a prism, an aperture, a window, a light filter, a waveplate, a beam splitter, and / or the like for adjusting the light emitted by the light source(s) 612 and / or for adjusting the light reflected from the scene, for example, collimate the projected light, focus the reflected light, and / or the like.

[0180] The processing unit 608 may include one or more processors 618, homogenous or heterogeneous, each comprising one or more processing nodes and / or cores optionally arranged for parallel processing as clusters and / or as one or more multi core processor(s). The processor(s) 618 may execute one or more software modules such as, for example, a process, a script, an application, a (device) driver, an agent, a utility, a tool, an Operating System (OS), a plug-in, an add-on, and / or the like each comprising a plurality of program instructions stored in a tangible non-transitory medium (program store) of the LIDAR system 600 and executed by one or more processors such as the processor(s) 618. The tangible medium may include, for example, persistent memory (e.g., ROM, Flash, SSD, NVRAM, etc.) volatile memory (e.g., RAM component, cache, etc.) and / or the like. Optionally, the processor(s) 618 may include, utilize, and / or facilitate one or more hardware elements (modules), for example, a circuit, a component, an IC, an ASIC, a FPGA, a Digital Signals Processor (DSP), a Graphic Processing Unit (GPU), an Artificial Intelligence (Al) accelerator and / or the like.

[0181] The processor(s) 618 may therefore execute one or more functional modules implemented through one or more software modules, one or more of the hardware modules and / or combination thereof. The functional modules executed by the processor(s) 618 may be configured, designed, and deployed for one or more applications, for example, configuration, operation, coordination, and / or the like of one or more of the functional elements of the LIDAR system 600 such as, for example, the illumination unit 602, the scanning unit 604, and / or the sensing unit 606. Theprocessor(s) 618 may communicate with the functional elements of the LIDAR system 600 via one or more channels, interconnects, and / or networks deployed in the LIDAR system 600, for example, a bus (e.g., PCI, PCIe, etc.), a point-to-point interconnection, a switch fabric, a network, a vehicle network, and / or the like.

[0182] For example, the processor(s) 618 may be configured to control the scanning unit 104, specifically rh light deflector(s) 614 to scan the environment of the LIDAR system 600 according to one or more scanning schemes and / or scanning parameters, for example, an extent (e.g., angular extent) of the FOV 620, an extent (e.g., angular extent) of one or more Regions of Interest (ROI) within the FOV 620, a maximal range within the FOV 620, a maximal range within each ROI, a maximal range within each region of non-interest, a resolution (e.g., vertical angular resolution, horizontal angular resolution, etc.) within the FOV 620, a resolution within each ROI, a resolution within each region of non-interest, a scanning mode (e.g., raster, alternating pixels, etc.), a scanning speed, a scanning cycle timing (e.g., cycle time, frame rate), and / or the like.

[0183] In another example, the processor(s) 618 may be configured to coordinate operation of the light source(s) 612 with movement of the light deflector(s) 614 for scanning the FOV 620 and / or part thereof. In another example, the processor(s) 118 may be configured to configure and / or operate the light source(s) 612 to emit light according to one or more light emission patterns. In another example, the processor(s) 618 may be configured to coordinate operation of the sensor(s) 116 with movement of the light deflector(s) 614 to activate one or more selected sensor(s) 616 and / or pixels according to the scanned portion of the FOV 620. In another example, the processor(s) 618 may be configured to receive the reflection signals generated by the sensor(s) 616 which are indicative of light captured by the sensor(s) 616 which may include light reflected from the scene specifically light reflected from one or more objects in the scanned FOV 620 and / or part thereof.

[0184] In another example, the processor(s) 618 may be configured to analyze the trace signals (reflection signals) received from the sensor(s) 616 which are indicative light reflected from the scene including at least part of the light projected (emitted) by the LIDAR system 600. Based on analysis of the trace data, the processing unit 608 may extract depth data relating to the scene, i.e., in the FOV 620 and / or part thereof in order to detect one or more objects, conditions, and / or the like in the scanned FOV 620 and / or part thereof. For example, the processing unit 108 may analyze the trace data to determine a ToF of the light 626 reflected from the FOV 620, based on timing of outputs of reflection signals, specifically with respect to transmission timing of projected light 624, for example, light pulses, corresponding to the respective reflected light 626. In another example, analyzing the trace data may include determining a power of the reflected light, forexample, average power across an entire return pulse, and a photon distribution / signal may be determined over the return pulse period (“pulse shape”).

[0185] Based on analysis of the trace data and the extracted depth data, the processor(s) 618 may derive and / or determine one or more attributes of one or more objects detected in the scene. Such object attributes may include, for example, a distance between the LIDAR system 600 and the respective object from the LIDAR system 600, a reflectivity of the respective object, a spatial location of the respective object, for example, with respect to one or more coordinate systems (e.g., Cartesian (X, Y, Z), Polar (r, 9, (|)), etc.), and / or the like. Based on the trace data coupled with the scanning scheme of the scanning unit 604, the processor(s) 618 may therefore map the reflecting objects in the environment of the LIDAR system 600.

[0186] The processor(s) 618 may combine, join, merge, fuse, and / or otherwise aggregate information, for example, depth data pertaining to different objects, and / or different features of objects detected in the scene in order to map the scene. For example, the processor(s) 618 may be configured to generate and / or reconstruct one or more three dimensional (3D) models (interchangeably designated depth maps) of the environment of the LIDAR system 600, for example, a point cloud model, a polygon mesh, a depth image holding depth information for each pixel of a 2D image and / or array, and / or any other type of 3D model of the scene.

[0187] Optionally, the LIDAR system 600 may include a communication interface (not shown) comprising one or more wired and / or wireless communication channels and / or network links, for example, PCIe, Local Area Network (LAN), Gigabit Multimedia Serial Link (GMSL), vehicle network, InfiniBand, wireless LAN (WLAN), cellular network, and / or the like. Via the communication interface, the LIDAR system 600, specifically the processor(s) 618 may transfer data and / or communicate with one or more external systems, for example, a host system, a remote system, and / or the like.

[0188] Reference is now made to FIG. 7, which is a schematic illustration of an exemplary thermal actuator deployed in a LIDAR system for adjusting an angular orientation of an optical element of the LIDAR system, in accordance with embodiments of the present disclosure.

[0189] An exemplary LIDAR system 700 such as the LIDAR system 600 configured to scan an FOV 720 such as the FOV 620 may comprise an illumination unit 702 such as the illumination unit 602 comprising one or more light sources 712 such as the light source 612, a scanning unit 704 such as the sensing unit 604 comprising one or more light deflectors 714 such as the light deflector 614, a sensing unit 706 such as the sensing unit 606 comprising one or more light sensors 716 such as the light sensor 616, and a processing unit 708 such as the processing unit 608 comprising one or more processors 716 such as the processor(s) 618.

[0190] The transmit optical path (TX) of projected light 724 such as the projected light 624 transmitted by the LIDAR system 700 to the FOV 720 and the receive optical path (RX) of reflected light 726 such as the reflected light 626 reflected back from the FOV 720 to the LIDAR system 700 may share one or more optical elements, for example, optical elements of the scanning unit 704, specifically the light deflector 714.

[0191] The LIDAR system 700 may therefore further include one or more asymmetrical optical components for separating between the projected light 724 and the reflected light 726 travelling via the optical path common to the transmit optical path (TX) and the receive optical path (RX). For example, the LIDAR system 700 may include one or more asymmetrical deflectors 728 configured not to deflect the projected light 724 emitted by the illumination unit 102 and deflect reflected light 726 toward the sensing unit 606. Optionally, the asymmetrical deflector 728 may be configured to prevent reflected light 726 from hitting the illumination unit 702, and to direct all the reflected light 726 toward the sensing unit 106, thereby increasing detection sensitivity. The asymmetrical deflector 728 may comprise one or more optical elements having two sides capable of deflecting a beam of light hitting it from one side in a different direction than it deflects a beam of light hitting it from the second side. The asymmetrical deflector 728 may include, for example, a polarization beam splitter. In another example, the asymmetrical deflector 728 may include an optical isolator configured to allow passage of light in only one direction.

[0192] An exemplary sensor 716 such as the sensor 616, for example, a Silicon Photomultipliers (SiPM), a non-silicon photomultipliers, and / or the like, may include one or more light detectors constructed from a plurality of detecting elements 722, for example, an Avalanche Photodiode (APD), Single Photon Avalanche Diode (SPAD), and / or the like configured for detecting photons reflected back from the FOV 620. Each of the light detection elements 720 is configured to cause an electric current to flow when light (photons) passes through an outer surface of the respective detection element 720.

[0193] The detecting elements 722 of each sensor 716 may be typically arranged in an array according to one or more arrangements over a detection area of the respective sensor 716, for example, a rectangular arrangement, a square arrangement, an alternating rows arrangement, and / or the like. Optionally, the detecting elements 722 of each of one or more sensors 716 may be arranged in a plurality of regions which jointly cover the detection area of the respective sensor 716. Each of the plurality of regions may comprise a plurality of detecting elements 722, for example, SPADs having their outputs connected together to form a common output signal of the respective region.

[0194] Reference is also made to FIG. 8, which shows schematic illustrations of exemplary alignment and misalignment states of a light beam projected by a LIDAR system with respect to asensor of the LIDAR system which are compensated using a thermal actuator deployed in the LIDAR system to adjust an alignment mirror, in accordance with embodiments of the present disclosure.

[0195] An exemplary sensor such as the sensor 716 may comprise a plurality of detecting elements such as the detecting elements 722 arranged in a plurality of regions 820 each having a respective output indicative of light received by the respective region 820. While the sensor 716 may comprise a plurality of regions 820, for brevity only four regions 820 of detecting elements 722 are shown. These regions 820 are designated 720 (Hl), 720 (H2), 720 (VI), and 720 (V2) for clarity of description of the alignment process described herein after. Moreover, while the LIDAR system 700 may be configured to project and receive a plurality of light beams in one or more spectral regions, for brevity, only a single reflected light beam 826 such as the reflected light 726 is shown. In particular, the reflected light beam 826 is associated with the sensor section 856 which comprises the sensor regions 820 (Hl), 820 (H2), 820 (VI), and 820 (V2).

[0196] In order to effectively detect the light beam 826 reflected from the FOV 720, the reflected light beam 826 should be aligned with the sensor 716, specifically with the section 856 in order to increase and maximize the amount of reflected light 826 received by the sensor section 856 and accurately distribute the reflected light beam 826 over the sensor section 856, for example, center the reflected light beam 826 on the sensor section 856 as seen in illustration 800 in FIG. 8.

[0197] However, due to one or more conditions, limitations, and / or deviations, one or more optical misalignments may occur in one or more optical paths of the LIDAR system 700, for example, the transmit optical path (TX) through which the projected light 724 is transmitted to the FOV 720, and / or the receive optical path (RX) through which the reflected light 826 is received from the FOV 720. Such optical misalignments may cause the light beam 826 to be unaligned with the sensor section 856, as seen in illustrations 802, 804 and 806 in FIG. 8, thus reducing performance of the LIDAR system 700, for example, reduced range, reduced resolution, reduced accuracy, reduced confidence of detection, and / or the like.

[0198] The optical misalignment may result, for example, from heat effects caused, for example, by high and / or low temperatures inside the LIDAR system 700, temperature changes inside the LIDAR system 700, and / or the like. Such heat may affect one or more physical attributes and / or parameters, for example, positioning, orientation, dimensions, and / or the like of one or more components of the LIDAR system 700, for example, the light source 712, the sensor 716, the light deflector 714, one or more optical elements, and / or the like which may thus deviate from their nominal operation parameters and induce optical misalignment. In another example, the optical misalignment may be traced to one or more mechanical tolerances, inaccuracies, and / or limitations in the positioning, orientation, dimensions, and / or other physical attributes of one or morecomponents of the LIDAR system 700, for example, the light source 712, the sensor 716, the light deflector 714, one or more optical elements, and / or the like which may thus deviate from their nominal operation parameters and induce optical misalignment.

[0199] One or more thermal actuators 740 such as the thermal actuator 100 may be therefore deployed in the LIDAR 700 may for dynamically adjusting the angular orientation of one or more payloads such as the payload 150, for example, an alignment mirror 750 which may manipulate, alter, change and / or adjust one or more of the optical paths in the LIDAR system 700 in order to compensate for the optical misalignments in the LIDAR system 700 and compensate and / or reduce misalignment of one or more light beams projected by the LIDAR system 700 with one or more corresponding sensors 716.

[0200] The thermal actuator 700 may comprise a cantilever longitudinal beam 742 such as the cantilever longitudinal beam 102 having a proximal end such as the proximal end 110 anchored to a base, i.e., to a fixed (stationary) element 752 such as the fixed element 152, and a distal end such as the distal end 112 to which a payload such as the payload 150 is mechanically coupled, specifically an alignment mirror 750. The beam 742 is mechanically coupled to the rear side of the mirror 750, opposite the reflective front side. The thermal actuator 700 further includes a plurality of heating elements 744 such as the heating elements 104 associated with respective longitudinal side surfaces such as the longitudinal side surface 114, which extend between the proximal and distal ends of the beam.

[0201] The fixed element 752 may include any element, for example, a fixture, a surface, a mechanical provision, a component, and / or the like which is stationary and secured to the chassis and / or body of the LIDAR system 700 such that the fixed element 752 may provide a stable and solid support for the thermal actuator 700. Since the proximal end of the longitudinal beam 742 is fixedly anchored and thus unable to move, when the thermal actuator 700 is operated to adjust the angular orientation of the mirror 750 by inducing heat to expand longitudinally one or more of the longitudinal side surfaces, the longitudinal expansion may occur primarily and typically only in the direction of the free distal end.

[0202] As seen in FIG. 7, the thermal actuator 700 may be deployed and / or positioned on the optical transmit path (TX) of the LIDAR system 700 to adjust the path of the projected light beam 724 emitted by the light source 712 and projected (transmitted) via the light deflector 714 to the FOV 720. Adjusting the path of the projected light beam 724 may obviously affect accordingly the path of the reflected light 726 reflected from the FOV 720 and directed to the sensor 716. This, however, should not be construed as limiting since the thermal actuator 700 may be deployed and / or positioned on the optical receive path (RX) of the LIDAR system 700 to adjust the path of the reflected light 726 reflected from the FOV 720 and directed to the sensor 716. Moreover,multiple thermal actuators such as the thermal actuator 700 may be deployed and / or positioned on either the optical transmit path (TX), the optical receive path (RX), and / or on both the transmit and receive optical paths.

[0203] A thermal actuator 740 deployed on the optical transmit path may be operated to adjust the angular orientation of the mirror 750 in two dimensions thus adjusting the path of the projected light beam 724 in two dimensions as expressed by cross section 734 of the projected light beam 724 showing right / left and up / down adjustment of the projected light beam 724. Similarly, a thermal actuator 740 deployed on the optical receive path may be operated to adjust the angular orientation of the mirror 750 in two dimensions thus adjusting the path of the received light beam 726 in two dimensions as expressed by cross section 736 of the received light beam 726 showing right / left and in-plane / out-of-plane adjustment of the projected light beam 724.

[0204] Reference is now made to FIG. 9, which is a flow chart of an exemplary process of operating a thermal actuator to adjust an angular orientation of a mirror configured to compensate and / or reduce misalignment of one or more light beams received by a LIDAR system with respective one or more sensors of the LIDAR system, in accordance with embodiments of the present disclosure.

[0205] An exemplary process 900 may be executed for compensating and / or reducing misalignment of one or more light beams such as the reflected light 726 received by a LIDAR system such as the LIDAR system 700 comprising one or respective sensors such as the sensor 716 of the LIDAR system 700. In particular, misalignment of the received light beam(s) 726 with the sensor(s) 716 may be compensated using an alignment mirror such as the mirror 750 mechanically coupled to a thermal actuator such as the thermal actuator 740 configured to dynamically adjust an angular orientation of the attached mirror 750.

[0206] For brevity, the process 900 is described for compensating and / or reducing misalignment of a single reflected light beam 726 with a single light sensor 716. This, however, should not be construed as limiting since, as may become apparent to a person skilled in the art, the process 900 may be scaled, expanded, and / or duplicated for compensating and / or reducing misalignment of a plurality of light beams 726, for example, an array of light beams 726 with a plurality of corresponding light sensors 716 of the LIDAR system 700.

[0207] The process 900 may be executed by one or more controllers and / or processors. For example, the process 900 and / or part thereof may be executed by the processor(s) 718 of the processing unit 708 of the LIDAR system 700. In another example, the process 900 and / or part thereof may be executed by one or more host and / or remote processors such as the processor(s) 718 of one or more host and / or remote systems which are in communication with the LIDAR system 700. In another example, execution of the process 900 may be distributed between one ormore processors, and / or systems. For example, operating heating elements such as the heating elements 704 of the thermal actuator 740 may be done by the local processor(s) 718 while computing the requested angular orientation and / or adjustments to the angular orientation may be done by one or more host and / or remote processors communicatively coupled to the local processor(s) 718 such that the and / or remote processors may provide (e.g., transmit) angular orientation instructions to the local processor(s) 718. For brevity, the processor(s) 718 is described to execute the process 900.

[0208] Several steps of the process 900 may be similar to corresponding step of the process 400. The process 900, however, may include one or more steps unique to LIDAR system and / or applications.

[0209] As shown at 902, the process 900 starts with the processor(s) 718 receiving a requested angular orientation of the mirror 750 configured to reduce and / or compensate for misalignment between transmit and receive optical paths of the LIDAR system 700.

[0210] As shown at 904, the processor(s) 718 may select one or more heating elements such as the heating elements 744 associated with one or more longitudinal side surfaces such as the longitudinal side surfaces of a longitudinal beam such as the longitudinal beam 742 of a thermal actuator such as the thermal actuator 740which extend between a fixedly anchored proximal end of the longitudinal beam 742 and a distal end of the longitudinal beam 742. In particular, the processor(s) 718 may select the heating element(s) 744 according to the requested angular orientation of the mirror 750 as described in step 404 of the process 400.

[0211] As shown at 906, the processor(s) 718 may operate the selected heating element(s) 744 to induce heat in the respective longitudinal side surface(s) with which the selected heating element(s) 704 are associated order to cause expansion of the respective longitudinal side surface(s) which may cause adjustment of the distal end of the beam 742 and thus adjust the angular orientation of the mirror 750 mechanically coupled to the distal end thus adjusting the path of the proj ected light beam 724. In particular, the processor(s) 718 may operate the selected heating element(s) 744 as described in step 406 of the process 400, for example, using correlation information stored in one or more lookup tables such the lookup tables 510.

[0212] Optionally, as shown at 908, the processor(s) 718 may operate one or more of the heating elements 744 according to temperature feedback information, as described in step 408 of the process 400. In particular, the processor(s) 718 may operate the heating element(s) 744 based on temperature measured by one or more temperature sensors such as the sensors 106 deployed in the thermal actuator 740 and configured to measure the temperature of one or more of the longitudinal side surfaces 744 of the longitudinal beam 742.

[0213] As described in step 408 of the process 400, in such case, the processor(s) 718 may adjust the selection and / or operation of one or more of the heating elements 744 based on analysis of the temperature feedback information in order to achieve, and / or maintain temperature of one or more of the longitudinal side surfaces in attempt to adjust the angular orientation of the mirror 750 to the requested angular orientation.

[0214] As also described in step 408 of the process 400, the process 900 may be an iterative process executed in a plurality of iterations to maintain a temperature of the longitudinal side surfaces corresponding to the longitudinal expansion of the longitudinal side surfaces which is required to achieve the requested angular orientation of the mirror 750.

[0215] Optionally, as shown at 910, the processor(s) 718 may operate one or more of the heating elements 744 according to feedback information indicative of the light received by the light sensor 716. In particular, the processor(s) 718 may operate the heating element(s) 744 based on information, for example, signal data (trace data) generated by the light sensor 716 which is indicative of one or more parameters of the light received by the light sensor 716, for example, light intensity, light power, light energy, distribution of the received light on the light sensor 716, and / or the like.

[0216] The process 900 may be an iterative process executed in a plurality of iterations to maintain adjust the angular orientation of the thermal actuator 740 according to the parameters of the light received at the light sensor 716 in order to optimally align the received light beam 726 with the light sensor 716.

[0217] For example, the light feedback information may be indicative of the intensity of the light received by the light sensor 716 which may mostly relate to the received light beam 826. Assuming that the processor(s) 718 operates the thermal actuator 700 to adjust the angular orientation of the mirror 750 such that optical path of the LIDAR system 700 is adjusted and the received light beam 726 moves away from the center of the light sensor 716 and is thus misaligned with the sensor 716. In such cases the intensity of the light received by the light sensor 716, i.e., the light energy and / or power, may be reduced. The reduction of light intensity may be detected by analyzing the feedback information intensity of the light received by the light sensor 716. In such case, the processor(s) 718 may adjust the angular orientation of the mirror 750 such that the received light beam 726 may move toward the center of the sensor 716. This process may be repeated in one or more additional iterations according to one or more adjustment patterns of the angular orientation of the mirror 750 (e.g., trial and error) in attempt to identify the angular orientation of the mirror 750 which yields a maximal intensity of the light received by the light sensor 716.

[0218] In another example, the light feedback information may be indicative of the spatial distribution of the received light beam 826 on the light sensor 716, specifically on the sensor section 856 illustrated in FIG. 8.

[0219] Assuming that based on analysis of the light feedback indicative of the spatial distribution of light on the sensor section 856, it is identified and / or determined, for example, that the region 82O(H1) receives light while the region 820(H2) does not receive light or region 82O(H1) receives a significantly larger amount of light, i.e., higher intensity light, compared to the region 820(H2). The difference in reception of light and / or intensity difference between the regions 82O(H1) and 820(H2) may be indicative of a horizontal misalignment between the received light beam 826 and the sensor section 856, as seen in illustration 802. In such case, the processor(s) 718 may adjust the angular orientation of the mirror 750 such that the received light beam 726 may move to the right toward the center of the sensor section 856. This process may be executed in one or more iterations according to one or more adjustment patterns of the angular orientation of the mirror 750 until the intensity of light received by the region 82O(H1) and the region 82O(H1) is substantially similar which is indicative that the received light beam 826 is aligned with the sensor section 856 as seen in illustration 800. Since the adjustment of the orientation angle of the mirror 750 is done only in one direction, namely horizontally, the processor(s) 718 may operate the heating element(s) 744 to apply a ID mechanical displacement of a single pair of opposing longitudinal side surfaces of the beam 742.

[0220] In another example, assuming that based on analysis of the light feedback indicative of the spatial distribution of light on the sensor section 856, it is identified and / or determined, for example, that the region 82O(V1) does not receive light or receives a significantly smaller amount of light, i.e., light with less intensity, compared to the region 820(V2) which receives light or receives high intensity light. The difference in light reception and / or light intensity difference between the regions 82O(V1) and 820(V2) may be indicative of a vertical misalignment between the received light beam 826 and the sensor section 856, as seen in illustration 804. In such case, the processor(s) 718 may adjust the angular orientation of the mirror 750 such that the received light beam 726 may move upward toward the center of the sensor section 856. This process may be executed in one or more iterations according to one or more adjustment patterns of the angular orientation of the mirror 750 until the intensity of light received by the region 82O(V1) and the region 820(V2) is substantially similar which is indicative that the received light beam 826 is aligned with the sensor section 856 as seen in illustration 800. Since the adjustment of the orientation angle of the mirror 750 is done only in one direction, namely vertically, the processor(s) 718 may operate the heating element(s) 744 to apply a ID mechanical displacement of a single pair of opposing longitudinal side surfaces of the beam 742.

[0221] In another example, assuming that based on analysis of the light feedback indicative of the spatial distribution of light on the sensor section 856, it is identified and / or determined, for example, that regions 82O(V1) and 82O(H1) receive light while regions 820(V2) and 820(H2) do not receive light and / or regions 82O(V1) and 82O(H1) receive a significantly higher intensity light, compared to the regions 820(V2) and 820(H2) which receive significantly reduced intensity light. The difference in light reception and / or intensity difference between the regions 82O(V1) and 82O(H1) on one hand and the regions 820(V2) and 820(H2) on the other hand may be indicative of both a horizontal misalignment and a vertical misalignment between the received light beam 826 and the sensor section 856, as seen in illustration 806. In such case, the processor(s) 718 may adjust the angular orientation of the mirror 750 such that the received light beam 726 may move downward and to the right toward the center of the sensor section 856. This process may be executed in one or more iterations according to one or more adjustment patterns of the angular orientation of the mirror 750 until the intensity of light received by the regions 82O(V1) and 820(V2) is substantially similar and also the intensity of light received by the regions 82O(H1) and 820(H2) is substantially similar which is indicative that the received light beam 826 is aligned with the sensor section 856 as seen in illustration 800. Since the adjustment of the orientation angle of the mirror 750 may be sone in two directions, horizontally and vertically, the processor(s) 718 may operate the heating elements 744 to apply a 2D mechanical displacement of two or more pairs of opposing longitudinal side surfaces of the beam 742.

[0222] The foregoing description has been presented for purposes of illustration. It is not exhaustive and is not limited to the precise forms or embodiments disclosed. Modifications and adaptations will be apparent to those skilled in the art from consideration of the specification and practice of the disclosed embodiments.

[0223] Moreover, aspects of the present disclosure may be embodied as a system, method, and / or computer program product. As such, aspects of the disclosed embodiments may be provided in the form of an entirely hardware embodiment, an entirely software embodiment, or a combination thereof.

[0224] Additionally, although aspects of the disclosed embodiments are described as being stored in memory, one skilled in the art will appreciate that these aspects can also be stored on other types of computer readable media, such as secondary storage devices, for example, hard disks or CD ROM, or other forms of RAM or ROM, USB media, DVD, Blu-ray, or other optical drive media.

[0225] Computer programs and computer programs products based on the written description and disclosed methods are within the skill of an experienced developer. The various programs or program modules can be created using any of the techniques known to one skilled in the art or can be designed in connection with existing software. For example, program sections or programmodules can be designed in or by means of .Net Framework, .Net Compact Framework (and related languages, such as Visual Basic, C, etc.), Java, C++, Objective-C, HTML, HTML / AJAX combinations, or HTML with included Java applets.

[0226] Moreover, while illustrative embodiments have been described herein, the scope of any and all embodiments having equivalent elements, modifications, omissions, combinations (e.g., of aspects across various embodiments), adaptations and / or alterations as would be appreciated by those skilled in the art based on the present disclosure.

[0227] It is expected that during the life of a patent maturing from this application many relevant systems, methods and computer programs will be developed and the scope of the terms LIDAR systems, light projection technologies, light sensing technologies, and scanning mechanisms, are intended to include all such new technologies a priori.

[0228] The terms "comprise", "comprising", "include", "including", “having” and their conjugates mean "including but not limited to". These terms encompass the terms "consisting of and "consisting essentially of' which mean that the composition or method may include additional ingredients and / or steps if the additional elements and / or steps do not materially alter the novel characteristics of the claimed composition or method.

[0229] As used herein the term “about” refers to ± 5 %.

[0230] Throughout this disclosure, various embodiments may be presented in a range format. Description in range format is merely for convenience and brevity and should not be construed as an inflexible limitation on the scope of the invention. Accordingly, the description of a range should be construed to include all the possible subranges as well as individual numerical values within that range.

[0231] It is appreciated that certain features of embodiments disclosed herein, which are, for clarity, described in the context of separate embodiments, may also be provided in combination in a single embodiment. Also, features described in combination in the context of a single embodiment may also be provided separately or in suitable sub-combinations in other embodiments described herein.

[0232] Publications, patents, and patent applications referred to in this disclosure are to be incorporated into the specification in their entirety by reference as if each individual publication, patent, or patent application was specifically and individually included in the disclosure. However, indication and / or identification of any such referenced document may not be construed as admission that the referenced document is available as prior art to embodiments disclosed hereon.

[0233] The limitations in the claims are to be interpreted broadly based on the language employed in the claims and not limited to examples described in the present specification or during the prosecution of the application. The examples are to be construed as non-exclusive. Furthermore,the steps of the disclosed methods may be modified in any manner, including by reordering steps, and / or inserting or deleting steps. It is intended, therefore, that the specification and examples be considered as illustrative only, with a true scope and spirit being indicated by the following claims and their full scope of equivalents.

Claims

WHAT IS CLAIMED IS:

1. An optical device, comprising: a mirror, having a front side for reflecting light and a rear side opposite the front side; a beam having a proximal end for mounting on a base, a distal end mechanically coupled to the rear side of the mirror, and longitudinal side surfaces extending between the proximal end and the distal end; a plurality of heating elements associated with respective ones of the longitudinal side surfaces of the beam and configured, when heated, to cause the respective ones of the longitudinal side surfaces to expand longitudinally; and a controller coupled to actuate the heating elements so as to adjust an angular orientation of the mirror.

2. The optical device of claim 1, wherein at least two of the plurality of heating elements are disposed in at least two non-opposing longitudinal side surfaces, wherein the at least two non-opposing longitudinal side surfaces expand longitudinally to adjust the angular orientation of the mirror in multiple axes.

3. The optical device of claim 1 or 2, wherein at least one of the plurality of heating elements is embedded in at least one of the longitudinal side surfaces.

4. The optical device of any one of the previous claims, wherein at least one of the plurality of heating elements comprises at least one resistor disposed on at least one of the longitudinal side surfaces.

5. The optical device of any one of the previous claims, wherein one or more of the heating elements are embedded in a flexible PCB wrapped around the beam such that each of the one or more of heating elements is disposed on one of the longitudinal side surfaces.

6. The optical device of any one of the previous claims, wherein at least one of the heating elements is disposed along an extended portion of a longitudinal axis of at least one of the longitudinal side surfaces.

7. The optical device of any one of the previous claims, and comprising at least one temperature sensor associated with at least one of the longitudinal side surfaces for measuring a temperature of the at least one longitudinal side surface.

8. The optical device of claim 7, wherein the controller is configured to actuate at least one of the plurality of heating elements based on the temperature measured by the at least one temperature sensor.

9. The optical device of claim 8, wherein the controller is configured to actuate based at least one of the plurality of heating elements based on a correlation between a longitudinal expansion of at least one of the longitudinal side surfaces and the temperature of the at least one of the longitudinal side surfaces.

10. The optical device of any one of the previous claims, wherein the beam has a tubular structure with a heat-insulating interior.

11. The optical device of claim 10, wherein the tubular structure has a hollow interior.

12. The optical device of any one of the previous claims, wherein the beam contains at least one opening between at least two adjacent longitudinal side surfaces of the beam.

13. The optical device of any one of the previous claims, wherein the beam comprises an interconnection between at least two adjacent longitudinal side surfaces of the beam, wherein the interconnection has a reduced thickness relative to the longitudinal side surfaces.

14. The optical device of any one of the previous claims, wherein the beam comprises at least one material having a coefficient of thermal expansion (CTE) higher than 30 parts per million (ppm) per one degree Celsius.

15. The optical device of any one of the previous claims, wherein the beam comprises at least one material having a thermal conductivity lower than 1.0 x 10'4Watts per meter-Kelvin.

16. The optical device of any one of the previous claims, wherein the beam comprises at least one material having a service temperature higher than 150 degrees Celsius.

17. A method of dynamically adjusting an angular orientation in an optical system, the method comprising: providing a mirror, having a front side for reflecting light and a rear side, opposite the front side, which is mechanically coupled to a distal end of a beam having a proximal end mounted on a base and longitudinal side surfaces extending between the proximal end and the distal end, and having a plurality of heating elements associated with respective ones of the longitudinal side surfaces; and actuating at least one of the heating elements so as to cause one or more of the longitudinal side surfaces to expand longitudinally and thereby adjust an angular orientation of the mirror.

18. The method of claim 17, wherein actuating the at least one of the plurality of heating elements comprises measuring a temperature of at least one of the longitudinal side surfaces and operating the least one of the heating elements based on the measured temperature.

19. The method of claim 18, wherein operating the least one of the heating elements comprises actuating the least one of the heating elements based on a correlation between a longitudinal expansion of at least one of the longitudinal side surfaces and the temperature of the at least one longitudinal side surface.

20. A LIDAR system, comprising: at least one light source configured to emit at least one light beam projected for scanning a field of view of the LIDAR system; at least one light sensor configured to receive light reflected from the field of view of the LIDAR system; a mirror deployed in at least one optical path selected from among a transmit optical path of the at least one projected light beam and a receive optical path of the reflected light; a thermal actuator comprising: a beam having a proximal end mounted on a base, a distal end mechanically coupled to a rear side of the mirror, and longitudinal side surfaces extending between the proximal end and the distal end; anda plurality of heating elements associated with respective ones of the longitudinal side surfaces of the beam and configured, when heated, to cause the respective ones of the longitudinal side surfaces to expand longitudinally; and a controller coupled to actuate the heating elements so as to adjust an angular orientation of the mirror.

21. The LIDAR system of claim 20, wherein the controller is configured to adjust the angular orientation of the mirror for reducing a misalignment of the at least one light beam with the at least one light sensor.

22. The LIDAR system of claim 20 or 21, wherein the controller is configured to actuate the heating elements based on information indicative of an intensity of light received by the at least one light sensor.

23. The LIDAR system of any one of claims 20 to 22, wherein the controller is configured to actuate the heating elements based on information indicative of a spatial distribution of light received by the at least one light sensor.

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