Control device, plasma processing system, and control method

Abstract

This control device is used with a plasma generation device provided with a plasma head having a pair of electrodes for converting, into plasma, a process gas caused to flow by an applied voltage. This control device is provided with a control unit that, when an error occurs in the plasma generation device, causes one screen of a display unit to display and output error information relating to the error, and causes one screen to display notification information providing a message indicating that the displayed error information will be sent as image data.

Description

CONTROL DEVICE, PLASMA PROCESSING SYSTEM, AND CONTROL METHOD

[0001] Disclosed herein are a controller, a plasma processing system, and a control method.

[0002] Conventionally, a control device for a plasma processing apparatus has been proposed that determines whether a predetermined performance is being maintained when a value of a high-frequency characteristic measured from an output terminal of a matching circuit that obtains impedance matching between a plasma processing chamber and a high-frequency power source is smaller than a predetermined value within a predetermined time, and determines whether the predetermined performance is not being maintained when the value is equal to or greater than the predetermined value (for example, Patent Document 1). This device is said to be able to easily and quickly evaluate whether the desired performance is being maintained when the plasma processing apparatus is disassembled, transported, and reassembled.

[0003] Japanese Patent Application Laid-Open No. 2002-100622

[0004] However, although the above-mentioned plasma generating device can perform performance evaluation, there is a need to restore performance accordingly. Since users are not often knowledgeable about plasma processing devices, troubleshooting should be left to the manufacturer, but users are often unable to adequately communicate information such as the device status to the manufacturer, making it difficult to deal with errors.

[0005] The present disclosure has been made in consideration of such problems, and its main object is to provide a control device, a plasma processing system, and a control method that can more safely and reliably deal with errors that occur in a plasma generation device.

[0006] In this disclosure, the following means are adopted to achieve the above-mentioned main object.

[0007] The control device disclosed herein is a control device used in a plasma generating device equipped with a plasma head having a pair of electrodes that converts a flowing process gas into plasma by an applied voltage, and is equipped with a control unit that, when an error occurs in the plasma generating device, displays error information related to the error on one screen of a display unit, and also displays notification information on the one screen informing the user that the displayed error information will be sent as image data.

[0008] This control device can prompt the user to send a single screen of error information as image data, according to the displayed screen. Furthermore, because this control device displays error information on a single screen, the user can more reliably convert it into image data compared to a control device that displays multiple screens. Therefore, this control device can more reliably transmit information about the error, and as a result, errors that occur in the plasma generator can be dealt with more safely and reliably.

[0009] 1 is a schematic explanatory diagram showing an example of a plasma generating device 11. FIG. 2 is a perspective view and a cross-sectional view of a plasma head 40. FIG. 3 is a flowchart showing an example of a plasma processing routine. FIG. 4 is an explanatory diagram showing an example of an error notification screen 70. FIG. 5 is an explanatory diagram showing an example of an operation status display screen 73. FIG. 6 is an explanatory diagram showing an example of an error information display screen 75. FIG. 7 is an explanatory diagram showing an example of an error information transmission screen 78. FIG. 8 is an explanatory diagram showing an example of an error content display screen 81.

[0010] This embodiment will be described below with reference to the drawings. Fig. 1 is a schematic diagram showing an example of a plasma processing system 10 including a plasma generator 11. Fig. 2 is a perspective view and a cross-sectional view of a plasma head 40. In this embodiment, the left-right direction (X-axis), the front-rear direction (Y-axis), and the up-down direction (Z-axis) are assumed to be as shown in Fig. 1 for convenience. Here, the plasma generator 11 will be described as an atmospheric pressure plasma generator, for example.

[0011] As shown in FIG. 1 , the plasma processing system 10 includes a plasma generator 11 and a control device 20. The plasma processing system 10 may also include a management device 60. The management device 60 is configured as a management server that manages information about the plasma generator 11 and may be managed by an external manager contracted to manufacture and manage the plasma generator 11, separate from the operating location of the plasma generator 11. The management device 60 exchanges information with a mobile terminal 50 held by an operator M via a network 19. The plasma generator 11 is a device that generates plasma under atmospheric pressure. As shown in FIG. 1 , the plasma generator 11 includes an arm robot 12, a control device 20, a power supply device 28, a gas supply device 29, a detection unit 30, and a plasma head 40. The plasma generator 11 supplies power to the plasma head 40 from the power supply device 28 via a power cable and supplies a process gas to be converted into plasma from the gas supply device 29 via a supply pipe. The plasma generating device 11 irradiates the workpiece W with plasma gas from the plasma head 40 to perform surface treatment of the workpiece W.

[0012] The arm robot 12 is configured as a moving unit that moves the plasma head 40 to approach and move away from the workpiece W. The arm robot 12 may be configured as, for example, a vertically articulated five-axis robot or a six-axis robot. The arm robot 12 has a mounting unit 13, an arm 14, a drive motor 15, and a base 16. The mounting unit 13 is a portion to which the plasma head 40 can be attached and detached, and is disposed at the tip of the arm 14. The arm 14 is made up of multiple members pivotally supported by joint shafts and freely rotates around the joint shafts to move the plasma head 40 in three-dimensional space in the front-to-back, left-to-right, and up-to-down directions. The drive motor 15 is disposed on each joint shaft and drives the joint shafts to rotate. The base 16 supports and installs the arm 14. Note that, although the arm robot 12 is used as the moving unit here, an XY robot capable of moving the plasma head 40 in the up-to-down direction may also be used, provided that the plasma head 40 can be freely moved.

[0013] The control device 20 controls each device of the plasma generator 11. The control device 20 includes a control unit 21, a memory unit 22, a communication unit 23, a display unit 24, and an operation unit 25. The control unit 21 is configured as a microprocessor centered on a CPU and controls the entire plasma generator 11. The control unit 21 outputs control signals to the arm robot 12, the power supply unit 28, the gas supply unit 29, the plasma head 40, and the like. The memory unit 22 is a large-capacity storage medium such as a flash memory, and stores programs for controlling the plasma generator 11 and job information including the shape of the workpiece W and the surface treatment position. The memory unit 22 also stores execution condition information including execution conditions for plasma treatment, as well as operation information acquired during operation of the plasma generator 11. The execution condition information includes the pressure and flow rate of the process gas, the voltage and current values ​​of the supplied power, and the like. The operation information includes, for example, information such as the outlet pressure and flow rate of the process gas, the voltage and current applied to the electrodes, the operation time of the device, and the operation time of the electrodes, etc. These values ​​are stored in association with the time at which they were measured. The communication unit 23 is an interface for exchanging information with external devices such as the management device 60. The display unit 24 is a display that displays information to the worker M. The operation unit 25 is used by the worker M to input various information and includes various buttons, levers, etc. The display unit 24 may be a touch panel that also functions as the operation unit 25. In the plasma generation device 11, the arm robot 12, power supply device 28, gas supply device 29, and plasma head 40 are described as being controlled by a single control device 20, but each device may be provided with a control unit, or each control process may be shared among multiple control units.

[0014] The power supply device 28 is a device that supplies power to the external electrode 41 and the internal electrode 42. The power supply device 28 generates high-frequency AC power from, for example, a commercial power source to be supplied to the pair of external electrode 41 and internal electrode 42 of the plasma head 40. The power supply device 28 supplies the generated AC power to the external electrode 41 and internal electrode 42 of the plasma head 40.

[0015] The gas supply device 29 supplies a process gas to the outer electrode 41 and the inner electrode 42 of the plasma head 40. The gas supply device 29 may be configured to supply, by pressure, air or the like containing at least one of an inert gas such as nitrogen and an active gas such as oxygen as the process gas. The gas supply device 29 includes a supply pipe, a supply valve, and a gas supply tank. The supply pipe is a pipe connected between the supply tank of the gas supply device 29 and the plasma head 40. The supply valve is an electromagnetic valve that starts and stops the supply of the process gas. The gas supply device 29 may also include a heater for heating the process gas supplied to the plasma head 40, if necessary.

[0016] The detection unit 30 detects information related to the plasma processing during operation of the plasma generator 11. The detection unit 30 includes, for example, a pressure detection unit 31, a flow rate detection unit 32, a voltage detection unit 33, a current detection unit 34, and a timer unit 35 that detects time and duration. The pressure detection unit 31 is a pressure gauge that detects the outlet pressure of the process gas. The pressure detection unit 31 outputs the detected pressure value to the control device 20. The flow rate detection unit 32 is a flow meter that detects the outlet flow rate of the process gas. The pressure detection unit 31 outputs the detected flow rate value to the control device 20. The voltage detection unit 33 is a voltmeter that detects the voltage applied to the pair of electrodes, the external electrode 41 and the internal electrode 42. The voltage detection unit 33 outputs the detected voltage value to the control device 20. The current detection unit 34 is an ammeter that detects the current applied to the pair of electrodes. The current detection unit 34 outputs the detected pressure value to the control device 20. The timer 35 outputs the time detected by the other detectors, and measures the operating time of each electrode, the operating time of the plasma head 40, and the like.

[0017] The plasma head 40 irradiates a plasma gas onto the workpiece W supported on a work table to modify the surface of the workpiece W. Examples of surface modification include a modification process that changes the surface from hydrophobic to hydrophilic. The plasma head 40 is removably attached to the mounting portion 13 of the arm robot 12. A nozzle 47 that irradiates the plasma gas generated by the plasma head 40 is provided at the bottom of the plasma head 40. The plasma head 40 includes an external electrode 41, an internal electrode 42, a drive portion 43, a support portion 44, and the nozzle 47.

[0018] The external electrode 41 is a member having a nozzle 47 formed therein and through which the process gas flows. The external electrode 41 is electrically grounded via a brush. As shown in FIG. 2 , the external electrode 41 is fixed to a holder 41 a. The holder 41 a is a cylindrical member disposed at the tip end of the main body 48 and through which the process gas flows. The internal electrode 42 is housed inside the holder 41 a connected to the external electrode 41 and converts the process gas into plasma between the holder 41 and the external electrode 41. The internal electrode 42 is fixed to the holder 42 a and electrically connected to a power cable connected to the power supply 28. A voltage is applied to the process gas using power supplied from the power supply 28. The holder 42 a is connected to the power supply 28 and is formed so that its tip is tapered, allowing the internal electrode 42 to be inserted therein. In the plasma head 40, a voltage is applied to the process gas supplied between the external electrode 41 and the internal electrode 42 to convert the process gas into plasma and generate plasma gas. The nozzle 47 is a tip member having a discharge port formed therein for discharging plasma gas. The nozzle 47 is disposed at the lower end of the plasma head 40 so as to face the workpiece W.

[0019] The drive unit 43 is a motor that rotates the main body 48 at the tip side of the plasma head 40. The plasma head 40 irradiates the workpiece W with plasma gas while rotating the main body 48. The main body 48 is provided with an external electrode 41, an internal electrode 42, a nozzle 47, and the like. The support unit 44 is a member that supports the main body 48 of the plasma head 40 so that it can rotate around its axis. The support unit 44 is removably attached to the attachment unit 13. In addition to supporting the main body 48, the support unit 44 also supports a supply pipe connected to the gas supply device 29, a power cable connected to the power supply device 28, and the like. Note that although the plasma head 40 rotates the main body 48, this rotation may not be necessary.

[0020] The worker M carries a mobile terminal 50. The mobile terminal 50 is a communication device such as a smartphone, and is equipped with a camera capable of capturing images. The mobile terminal 50 includes a mobile control unit, a mobile imaging unit, a mobile communication unit, and a touch panel that serves as both a display unit and an operation unit. The mobile control unit has, for example, a CPU, and controls the entire mobile terminal 50. The mobile imaging unit is a camera that can capture images. The mobile communication unit is, for example, a device that wirelessly transmits and receives audio, images, text, etc. The touch panel is a device that serves as both a display unit that displays images and an operation unit that allows the user to input instructions by touching a specific position on the display unit. The mobile terminal 50 is configured to be able to transmit captured images to an external device via email, etc.

[0021] The management device 60 is a management server that manages information about the plasma processing system 10. The management device 60 may be managed by, for example, a provider of the plasma processing system 10, or by a user of the plasma processing system 10. The management device 60 includes a management control unit, a management memory unit, a management communication unit, a display unit, and an operation unit. The management control unit includes, for example, a CPU and controls the entire management device 60. The management memory unit is a storage medium such as a flash memory or a HDD. Information corresponding to, for example, codes displayed and output by the plasma generator 11 is stored in the management memory unit as corresponding information. The management communication unit is an interface that communicates with external devices such as the plasma generator 11. The display unit is a display that displays and outputs images. The operation unit is an input device such as a mouse or a keyboard that accepts instructions input from a user.

[0022] Next, a surface modification process for the workpiece W using the plasma generator 11 configured as described above will be described. FIG. 3 is a flowchart illustrating an example of a plasma processing routine executed by the control unit 21 of the control device 20. This routine is stored in the memory unit 22 and is executed by the control unit 21 after the operator M inputs the plasma processing operation. When this routine is started, the control unit 21 first reads the plasma processing operation condition information from the memory unit 22 and acquires the operation conditions (S100). The operation condition information includes the pressure and flow rate of the process gas, the voltage and current of the power to be supplied, and the like. Next, the control unit 21 controls the power supply device 28 to supply power under the acquired operation conditions and the gas supply device 29 to supply the process gas, thereby executing the plasma processing on the workpiece W (S110). Next, the control unit 21 stores the detection value of the detection unit 30 as operation information in the memory unit 22 (S120) and determines whether an error has occurred in the plasma generator 11 based on the detection value (S130). If one or more of the gas pressure, gas flow rate, voltage, and current are abnormal, the control unit 21 determines that an error has occurred in the plasma generator 11. If no error has occurred in the plasma generator 11, the control unit 21 determines whether the plasma processing has been completed based on, for example, the execution time (S140). If the plasma processing has not been completed, the control unit 21 executes the processing from S110 onward, and if the plasma processing has been completed, the control unit 21 ends this routine.

[0023] On the other hand, if an error occurs in the plasma generator 11 in S130, the control unit 21 causes the display unit 24 to display and output an error notification screen 70 (S150). FIG. 4 is an explanatory diagram showing an example of the error notification screen 70. FIG. 5 is an explanatory diagram showing an example of an operating status display screen 73. FIG. 6 is an explanatory diagram showing an example of an error information display screen 75. As shown in FIG. 4, the error notification screen 70 is a screen that notifies an error state that has occurred in the plasma generator 11. The error notification screen 70 includes a notification information display field 71, a transition instruction input field 72, and a page change key for displaying the previous page or next page. The notification information display field 71 displays information to be notified to the operator M as a message. The notification information display field 71 displays a message outlining the error state and its error code, etc. The control unit 21 selects a message regarding the cause of the error detected in S130 and displays it in the notification information display field 71. The transition instruction input field 72 contains keys that are operated to transition to the next screen. The transition instruction input field 72 includes, for example, a setting key that is operated to display details of the error and a reset key that is operated to reset the device. The worker M checks the contents of this error notification screen 70 and gets an overview of the error that has occurred.

[0024] The operation status display screen 73 is displayed after detailed information about the error state is input by operating the transition instruction input field 72 on the error notification screen 70. As shown in FIG. 5 , the operation status display screen 73 includes an operation information display field 74, a transition instruction input field 72, a page change key, and the like. The operation information display field 74 displays device operation information, such as the nozzle usage time, electrode usage time, gas pressure, and flow rate. Each field has a reset key, allowing each value to be reset. The error information display screen 75 is displayed after detailed information about the error state is input by operating the transition instruction input field 72 on the operation status display screen 73. As shown in FIG. 6 , the error information display screen 75 includes an information display input field 76, an error-related information display field 77, a transition instruction input field 72, a page change key, and the like. The information display input field 76 includes an alert key, an external interface (IF) key, an information key, and the like, which are operated to display information related to the device or an abnormality. The error-related information display field 77 contains information such as the identifier of the error state that has occurred, the error code, the operating time of the device, the startup time, etc. When a specific field is selected in the error-related information display field 77 and the setting key of the transition instruction input field 72 is operated, an error information transmission screen 78 containing information on the corresponding error state is displayed.

[0025] After displaying the error notification screen 70 in S150, the control unit 21 determines whether an instruction to display the error information transmission screen 78 has been input (S160). When specific error status information is selected on the error information display screen 75, the control unit 21 determines that an instruction to display the error information transmission screen 78 has been input. If an instruction to display the error information transmission screen 78 has not been input, the control unit 21 executes the process from S150 onward, displaying, for example, any of the screens shown in Figures 4 to 6. On the other hand, when an instruction to display the error information transmission screen 78 has been input, the control unit 21 reads and acquires the error status information and operation information from the storage unit 22 and converts them into display information (S170). The control unit 21 then displays the error information transmission screen 78 on the display unit 24, the details of which cannot be grasped by the operator M (S180), halts the plasma processing, and ends this routine. The display information is information expressed using at least one of characters, symbols, and images in a format that makes it difficult for the operator M, who is the user of the apparatus, to understand the details. This display information may be expressed using characters, symbols, and images that allow the administrator, who is responsible for reporting the abnormal condition and providing information on how to resolve the abnormal condition, to understand the details. Examples of characters include numbers and alphabets. Examples of symbols include mathematical symbols. Examples of images include icons and pictograms. This display information is created, for example, according to a conversion correspondence table set by the administrator of the management device 60, and the administrator can understand the details by deciphering the information using this conversion correspondence table.

[0026] FIG. 7 is an explanatory diagram showing an example of an error information transmission screen 78. This error information transmission screen 78 is a screen containing information to be transmitted to the administrator of the management device 60. When an error occurs in the plasma generator 11, the error information transmission screen 78 displays error information related to the error on one screen of the display unit 24, as well as notification information on one screen, informing the operator that the displayed error information will be sent as image data. As shown in FIG. 7, the error information transmission screen 78 includes an error-related information display field 79 and a notification information display field 80. The error-related information display field 79 displays information related to the error that the operator M cannot understand. The notification information display field 80 displays an instruction message for the operator M. The notification information display field 80 displays a message informing the operator that the screen will be photographed and sent to the administrator. The error-related information display field 79 includes, for example, the time the error occurred, the usage time of the apparatus and its components (e.g., electrodes and nozzles), and operation information going back a predetermined time from the time the error occurred. This operational information includes, for example, the detected value that caused the error as well as detected values ​​that are not involved in the occurrence of the error. The predetermined time may be a time that allows the device state up until the error occurrence to be understood, such as 10 seconds, 30 seconds, or 1 minute.

[0027] The operator M checks the notification information display field 80 of the error information transmission screen 78, and, for example, takes an image of the error information transmission screen 78 using the mobile terminal 50 and transmits the image to the management device 60. Because the error information transmission screen 78 contains all the information on a single screen, the operator M only needs to take and transmit a single image, allowing the operator M to more accurately take corrective action as instructed. Furthermore, since the operator M cannot understand the content displayed in the error-related information display field 79, the operator M can transmit the error information to the administrator without taking unnecessary action. Upon receiving the image, the administrator of the management device 60 converts the displayed information back to the original information using a conversion correspondence table. FIG. 8 is an explanatory diagram showing an example of an error content display screen 81 displayed on the management device 60. The error content display screen 81 displays detailed information about the error and operational information from immediately before the error occurred. Once the administrator understands the gas pressure, gas flow rate, voltage, and current conditions immediately prior to the error occurrence, the administrator can select a countermeasure and communicate it to the operator M of the plasma processing system 10.

[0028] Here, the correspondence between the components of this embodiment and the components of the present disclosure will be clarified. The control device 20 of this embodiment is an example of a control device, the control unit 21 is an example of a control unit, the external electrode 41 and the internal electrode 42 are an example of a pair of electrodes of the present disclosure, the plasma head 40 is an example of a plasma head, the plasma generation device 11 is an example of a plasma generation device, and the plasma processing system 10 is an example of a plasma processing system. Note that in this embodiment, an example of a control method of the present disclosure is also clarified by explaining the operation of the plasma generation device 11.

[0029] The control device 20 of the present embodiment described above is used in a plasma generator equipped with a plasma head 40 having a pair of electrodes that converts a flowing process gas into plasma by an applied voltage. The control device 20 includes a control unit 21 that, when an error occurs in the plasma generator 11, displays error information related to the error on a single screen of the display unit 24 and also displays notification information on a single screen, informing the user that the displayed error information will be sent as image data. The control device 20 can prompt the user, i.e., the operator M, to send the single screen displaying the error information as image data, according to the displayed screen. Furthermore, since the control device 20 displays error information on a single screen, the user can more reliably convert the error information into image data than when multiple screens are displayed. Therefore, the control device 20 can more reliably transmit information about the error, thereby enabling safer and more reliable handling of errors that occur in the plasma generator.

[0030] The control unit 21 also stores operational information about the plasma generator 11 over time and displays error information including this operational information on one screen of the display unit 24. This control device 20 more reliably transmits information about changes in the plasma generator 11 over time, allowing for safer and more reliable handling of errors that occur in the plasma generator. Furthermore, the control unit 21 displays and outputs error information including at least one of characters, symbols, and images that are incomprehensible to the user. This control device 20 further prevents users with limited specialized knowledge from dealing with errors, allowing for safer handling of errors that occur in the plasma generator 11. Furthermore, the error information includes one or more pieces of information on voltage, current, gas pressure, and gas flow rate. This control device 20 more safely and reliably handles errors that occur in the plasma generator 11 based on factors used in the plasma generator 11. Furthermore, the notification information in the notification information display field 80 includes a message instructing the user to capture a display image using the mobile terminal 50. This control device 20 allows for safer reporting of error information.

[0031] The control device 20 prompts the user to transmit image data captured from the display screen of the display unit 24 to the management device 60. The plasma generator 11 is sometimes used without being connected to a network, making direct data transmission difficult. In this case, error information is communicated between the operator M and the manager in the plasma processing system 10. However, if the operator M is not familiar with the device, it may be difficult to accurately communicate the error information. The plasma generator 11 is configured to display information useful for dealing with errors on the error information transmission screen 78 in advance, and this analog method of capturing and sending the display image allows the user to more reliably communicate the error information to the manager, who can provide solutions.

[0032] The plasma processing system 10 also includes a plasma generator 11 equipped with a plasma head 40 having a pair of electrodes that converts a flowing process gas into plasma by an applied voltage, and the above-described control device 20. Since the plasma processing system 10 includes the above-described control device 20, it can more safely and reliably deal with errors that occur in the plasma generator 11.

[0033] It goes without saying that the control device, plasma processing system, and control method of the present disclosure are in no way limited to the above-described embodiments, and can be embodied in various forms as long as they fall within the technical scope of the present disclosure.

[0034] For example, in the embodiment described above, the control device 20 displays the error-related information display field 79 on the error information transmission screen 78 in a manner that prevents the operator M from understanding the details, but this is not particularly limited, and the error information may be displayed and output in a manner that is understandable to the operator M. Even in such a control device 20, the error content can be transmitted more reliably by the notification information in the notification information display field 80, and as a result, an error that has occurred in the plasma generator 11 can be dealt with more safely and reliably.

[0035] In the above-described embodiment, the control device 20 displays and outputs the operation information of the plasma generator 11 and transmits the captured image, but this is not particularly limited, and the control device 20 may transmit a captured image that does not include the operation information. Note that, in the plasma generator 11, it is preferable that the captured image to be transmitted includes the operation information from the viewpoint of finding a solution to an error.

[0036] In the above-described embodiment, the control device 20 displays the current, voltage, gas pressure, gas flow rate, and other information such as operating time as error information, but is not limited to this, and one or more of these may be omitted, or other information may be added.

[0037] In the above-described embodiment, the control device 20 displays and outputs a message indicating that the error information transmission screen 78 will be captured as a display image on the mobile terminal 50, but this is not limited to this, and the image may be captured by an imaging device other than the mobile terminal 50.

[0038] In the above-described embodiment, the present disclosure has been described as a plasma processing system 10, but is not limited to this and may be a plasma generating device 11, a plasma head 40, a control device 20, a control method for the plasma generating device 11, or a program therefor.

[0039] The present disclosure may be configured as follows: For example, a control method of the present disclosure is a control method executed by a computer and used in a plasma generator equipped with a plasma head having a pair of electrodes that converts a flowing process gas into plasma by an applied voltage, the control method including the steps of: when an error occurs in the plasma generator, displaying error information related to the error on one screen of a display unit, and displaying notification information on the one screen to notify a message that the displayed error information will be sent as image data.

[0040] This control method, like the above-mentioned control device, can more safely and reliably deal with errors that occur in the plasma generator. Note that this control method may employ various aspects of any of the above-mentioned control devices, or may include additional steps that realize the functions of the above-mentioned control devices.

[0041] This specification also discloses the technical idea of ​​changing "the control device according to claim 1 or 2" to "the control device according to any one of claims 1 to 3" in claim 4 as originally filed, the technical idea of ​​changing "the control device according to claim 1 or 2" to "the control device according to any one of claims 1 to 4" in claim 5 as originally filed, and the technical idea of ​​changing "the control device according to claim 1 or 2" to "the control device according to any one of claims 1 to 5" in claim 6 as originally filed.

[0042] The present disclosure is applicable to the technical field of processing the surface of a workpiece.

[0043] REFERENCE SIGNS LIST 10 Plasma processing system, 11 Plasma generator, 12 Arm robot, 13 Mounting unit, 14 Arm, 15 Drive motor, 16 Base unit, 19 Network, 20 Control device, 21 Control unit, 22 Memory unit, 23 Communication unit, 24 Display unit, 25 Operation unit, 28 Power supply unit, 29 Gas supply device, 30 Detection unit, 31 Pressure detection unit, 32 Flow rate detection unit, 33 Voltage detection unit, 34 Current detection unit, 40 Plasma head, 41 External electrode, 41a, 42a Holder, 42 Internal electrode, 43 Drive unit, 44 Support unit, 45 Fixing member, 47 Nozzle, 50 Portable terminal, 60 Management device, 70 Error notification screen, 71 Notification information display field, 72 Transition instruction input field, 73 Operation status display screen, 74 Operation information display field, 75 Error information display screen, 76 Information display input field, 77 error related information display field, 78 error information transmission screen, 79 error related information display field, 80 notification information display field, 81 error content display screen, M worker, W work.

Claims

1. A control device used in a plasma generating device equipped with a plasma head having a pair of electrodes that converts a flowing process gas into plasma by an applied voltage, the control device comprising: a control unit that, when an error occurs in the plasma generating device, displays error information related to the error on one screen of a display unit, and also displays notification information on the one screen, informing the user that the displayed error information will be sent as image data.

2. The control device according to claim 1, wherein the control unit stores operation information of the plasma generating device over time while the plasma generating device is in operation, and displays the error information including the operation information on one screen of the display unit.

3. The control device according to claim 1 or 2, wherein the control unit displays and outputs the error information including at least one of characters, symbols, and images in a form that is incomprehensible to the user.

4. The control device according to claim 1 or 2, wherein the error information includes one or more of information on voltage, current, gas pressure, and gas flow rate.

5. The control device according to claim 1 or 2, wherein the notification information includes a message to capture a display image on a mobile terminal.

6. A plasma processing system comprising: a plasma generating device equipped with a plasma head having a pair of electrodes for generating plasma from a flowing process gas by an applied voltage; and the control device according to claim 1 or 2.

7. A control method executed by a computer and used for a plasma generating device equipped with a plasma head having a pair of electrodes that converts a flowing process gas into plasma by an applied voltage, the control method including the steps of: when an error occurs in the plasma generating device, displaying error information relating to the error on one screen of a display unit, and displaying notification information on the one screen to notify a user that the displayed error information will be sent as image data.

Images