Work support method, work support device, and work support system

The work support system addresses incomplete evaluations in semiconductor maintenance by dividing tasks based on time and position, calculating risk levels, and ranking improvement candidates, thereby enhancing the efficiency and quality of maintenance operations.

WO2026028424A1PCT designated stage Publication Date: 2026-02-05HITACHI HIGH TECH CORP
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Patent Information

Application Number
PCT/JP2024/027691
Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
Filing Date
2024-08-02
Publication Date
2026-02-05

AI Technical Summary

Technical Problem

Existing systems fail to effectively evaluate and improve maintenance work on semiconductor manufacturing equipment by considering factors such as foreign matter generation and leaks during depressurization, and do not account for the impact of work content on performance and quality, leading to incomplete evaluations and potential risks.

Method used

A work support system that divides work processes based on time and position information, calculates work attribute values, determines risk levels and statistical values, and ranks improvement candidates to identify tasks that require attention, thereby promoting comprehensive evaluation and reducing evaluation omissions.

Benefits of technology

The system enhances work improvement by accurately identifying critical tasks for enhancement, reducing measurement gaps, and improving the efficiency and quality of maintenance operations.

✦ Generated by Eureka AI based on patent content.

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Abstract

The purpose of the present invention is to provide technology with which it is possible to perform work evaluations having reduced omissions in work step partitioning or evaluation and to promote the improvement of work. A work support method according to the present invention is a work support method which supports work performed by a worker on a work target object, wherein work-process data is displayed as work processes to be improved and ranked in order of importance, and the following steps are included: a step for partitioning, on the basis of time or position information, actual work data into work-process data including a plurality of processes, and for calculating, for each one of the plurality of processes of the work-process data, on the basis of position information or time change of the process, a work attribute value of at least one work attribute relating to a parameter relating to a given evaluation item; and a step for determining an importance rank for each one of the plurality of processes by using a risk level of the process, said risk level calculated by means of work attributes and work attribute weight values assigned on the basis of position information, and by using a statistic of values indicated in work data pertaining to the process.
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Description

Work support method, work support device, and work support system

[0001] The present invention relates to a work support method, a work support device, and a work support system that evaluate the work of workers who maintain semiconductor manufacturing equipment and present the results to the workers to support them in improving their work efficiency, performance, and quality.

[0002] As a prior art, Patent Document 1 discloses a device or control method for supporting work improvement, which generates an evaluation value for each work based on the work attributes of multiple work data, extracts reference data from the work attributes of the multiple work data based on the evaluation value, compares the reference data with the work attributes of the work data, and displays an improvement method for a specified improvement item. Specifically, Patent Document 1 aims to "provide an assistance device, a control method for the assistance device, and a program that can support work improvement without relying on the presence of a skilled worker," and discloses the following content as an invention related to the assistance device, the control method, and the program: "In a work improvement assistance system, the assistance device is a device for supporting work improvement, and includes an evaluation means for generating an evaluation value for each work based on the work attributes of multiple work data, and a comparison means for extracting reference data from the work attributes of the multiple work data based on the evaluation value, and comparing the work attributes of the work data with the reference data."

[0003] Japanese Patent Application Laid-Open No. 2021-047698

[0004] The above-mentioned prior art evaluates the work of workers using work data obtained during actual work. However, it does not consider effective evaluation indices or work actions to reduce problems such as the generation of foreign matter after work or leaks during depressurization, which are issues in maintenance work on semiconductor manufacturing equipment, including vacuum vessels. Furthermore, the prior art does not consider a configuration that estimates the impact (correlation) of work content on work performance and quality and evaluates work according to an index of the degree (risk) of the occurrence of foreign matter or leaks in each work process, leading to work improvements that reduce risk. Therefore, the present invention aims to provide a technology that can promote work improvement by dividing work processes or evaluating work while reducing evaluation omissions.

[0005] In order to solve the above-mentioned problems, one representative work assistance method of the present invention is a work assistance method for assisting a worker in work on a work object, comprising the steps of: dividing actual work data, which is data obtained during a predetermined period during the work and includes information on at least time, the work object, and the position of the worker in a space where the work is performed, into work process data including a plurality of processes based on the time or position information; calculating, for each of the plurality of processes in the work process data, a work attribute value for at least one work attribute related to a parameter related to a predetermined evaluation item based on the position information or its change over time; determining, for each of the plurality of processes, a ranking of the importance of the process using a weight value of the work attribute assigned based on the position information, a risk level of the plurality of processes calculated using the work attribute, and statistics of values ​​indicated by a plurality of work data related to the plurality of processes; and displaying the work process data as processes of the work to be improved in order of importance.

[0006] According to the present invention, it is possible to promote improvement of work by dividing work processes or evaluating work with reduced omissions in evaluation. Other problems, configurations, and effects will become clear from the following description of the preferred embodiment of the invention.

[0007] FIG. 1 is a schematic diagram of an example of presentation of improvement candidates by the work support system according to this embodiment. FIG. 2 is an explanatory diagram showing a schematic configuration example of the work support system according to this embodiment. FIG. 3 is an explanatory diagram showing an example of the hardware configuration of the work support device according to this embodiment. FIG. 4 is a block diagram showing the functional configuration of the work support device according to this embodiment. FIG. 5 is a flowchart showing an example of processing by the work support device according to this embodiment. FIG. 6 is a schematic diagram of an example of presentation of work attribute information by the work support system according to this embodiment. FIG. 7 is a flowchart showing an example of processing by an importance calculation unit according to this embodiment. FIG. 8 is a flowchart showing an example of processing by a re-evaluation unit according to this embodiment. FIG. 9 is a schematic diagram of an example of information on evaluation index scores according to this embodiment.

[0008] Hereinafter, embodiments will be described with reference to the drawings. In the following description, identical or similar components will be designated by the same reference numerals, and duplicate descriptions will be omitted. In the following description, when it is necessary to distinguish between components of the same type, an identifier (numbers, letters, etc.) will be written in parentheses after the reference numeral that collectively refers to the components.

[0009] A work support system is a system that evaluates (supports) a worker's work by using actual work data obtained by measuring the work when the worker performs the work on a work object. Here, the actual work data is information about the worker performing the work, information about objects including the work object in the space where the work is performed, and information obtained by measuring environmental information, such as information including time information and position information of the work object and the worker in the space where the work is performed.

[0010] In this specification, the work object may be any object, either moving or still. The object may be any object within the space where the worker performs the work, and the work object may be the entire object or a portion of an object. Furthermore, the work object may be one object or multiple objects. Furthermore, in this specification, the worker is not limited to a human being, but may also be a worker performing work on a work object or a robot operated by a worker. Furthermore, when evaluating, the evaluation target is not limited to the entire worker or robot, but may also be a portion of the worker or robot, such as a human hand or face, or a robot arm or hand.

[0011] An overview of such a work support system will be given below, taking as an example a case where a series of work tasks performed by a worker on a work object is measured.

[0012] <Overview> The work support system evaluates the risk level calculated from the work attributes of each work process calculated from the work data of the worker and the magnitude of the weight assigned according to the value of the work attribute, as well as the importance determined from the statistical values ​​of the work data, to determine the rank of improvement candidates, re-evaluate the improvement candidates, and present the improvement candidates in order of importance.

[0013] Here, a work process refers to each task divided based on the worker's work data, such as a series of tasks or specific work movements of a worker on the same work object, divided based on time information included in the work data and information on the positions of the worker and the work object. The work process included in the worker's actual work data may be one work process or multiple work processes. Data indicating a work process is also referred to as work process data. Furthermore, since the work data undergoes various processes, the work data at the time it is acquired by the work support system (for example, acquired from the measuring device 30 described below) can also be referred to as "actual work data." However, when there is no need to distinguish the time of data acquisition, it is simply referred to as "work data."

[0014] Here, task attributes are parameters specific to each task contained in task data, and are parameter values ​​or sets of parameter values ​​obtained by dividing or classifying parameters of evaluation items that quantitatively indicate the position and movement of workers and work objects that make up each task using predetermined criteria or thresholds. Here, task attribute values ​​are values ​​of parameters of evaluation items that quantitatively indicate the task attributes. For example, they could be a set of position information representing a specific area obtained by dividing the position information of the area where a worker works based on task data, or a set of task actions representing specific task actions obtained by classifying the worker's task actions based on task data. Here, task attribute values ​​are specific values ​​included in the set of task attribute values ​​or statistical values ​​calculated from the values ​​included in the set.

[0015] Here, the weight assigned according to the value of the work attribute is a value indicating the degree of influence that each work attribute has on the performance or quality of the work, and is, for example, a statistical value calculated from the value of the work attribute or the work attributes of multiple work processes.

[0016] Here, the risk level is a value that quantifies the degree of influence that each work process has on the performance and quality of that work, and is calculated from the work attributes of each work process and the magnitude of the weight assigned according to the value of the work attribute. To specifically explain the method for calculating the risk level in the work support system, for each work process, the total value or weighted average value of the weight assigned according to the value of the work attribute of the work process is calculated as the risk level of that work attribute for that work process.

[0017] Here, the statistical value of work data is a value that quantifies the variability and non-uniformity of each work process, and is calculated from the magnitude of the difference and variation in the work data and work attributes of each work process. Specifically, the method for calculating the statistical value of work data in the work support system is to calculate the proportion of work attributes that do not match between the work attributes of the work process in question and those of work processes with similar work attributes, or the sum or weighted average of the weights assigned according to the values ​​of the mismatched work attributes, as the statistical value of the work data of the work process in question.

[0018] Here, the importance determined from the risk level and statistical values ​​of the work data is a ranking given to the degree of necessity or possibility of improvement for each work process in order to improve the performance or quality of the work, or a rank among multiple work processes, and is calculated from the risk level of each work process and statistical values ​​of the work data.

[0019] To specifically explain the method for determining the rank of improvement candidates in the work support system, for each work process, a work process for which both the risk level of the work process and the statistical value of the work data are greater than a predetermined threshold is determined as a first improvement candidate, and a work process for which either the risk level of the work process or the statistical value of the work data is greater than a predetermined threshold is determined as a second improvement candidate. In the work support system, the first and second improvement candidate work processes are presented. Here, the predetermined threshold may be a statistical value calculated from the risk levels or work data of multiple work processes.

[0020] Here, the first improvement candidate is a task that is most effective when prioritized among multiple candidates for that task in order to improve the performance and quality of the task. The second improvement candidate is a task that is expected to be most effective when improved next to the first improvement candidate. The task may be a single task, or may include multiple task processes.

[0021] To explain in detail how the work support system reevaluates improvement candidates, the work process before or after the work process of the second improvement candidate is regarded as a new process, the work attributes of this new work process are calculated, and the risk level of this new work process and the importance determined from the statistical values ​​of the work data are evaluated to determine the rank of the improvement candidate.

[0022] For example, a work process on the same work object before or after the work process of the second improvement candidate can be considered as one work process, and the new work attribute can be a work attribute based on the multiple work attributes of that work process and the work process before or after it, or a statistical value of the values ​​of the multiple work attributes.

[0023] The details of the rank determination of improvement candidates in the above-mentioned work support system will be explained using an example in which a series of tasks performed by a worker is measured, the importance of each work process is evaluated based on the risk level and the threshold value of the statistical value of the work data, the rank determination of improvement candidates is made, and the second improvement candidate is reevaluated.

[0024] <Outline of Improvement Candidate Rank Determination and Second Improvement Candidate Reevaluation in the Work Support System> Fig. 1 is a schematic diagram of an example of improvement candidate presentation by the work support system according to this embodiment. Specifically, Fig. 1 is a schematic diagram of an example of an improvement candidate presentation screen 1000 that presents the risk level and work data statistics of each work process, the result of improvement candidate rank determination, and the result of reevaluation of the second improvement candidate by the work support system 100 according to this embodiment. The configuration of the work support system 100 will be described later.

[0025] First, the work support system 100 is a system that supports work performed by a worker on a work object, and divides work data into work process data including multiple processes based on the work data, and calculates the risk levels and work data statistics of the multiple work processes K1 to K7. The multiple work processes K1 to K7 are consecutive work processes in chronological order, specifically, the work process before K2 is K1, the work process after K2 is K3, and so on.

[0026] The work assistance system 100 ranks the importance of each work process based on the risk threshold Rth and the statistical value threshold Sth of the work data, and determines the rank of the improvement candidate. Specifically, the work assistance system 100 determines and presents, as first improvement candidates, work processes K1 and K5, which are included in the Rank 1 area where the risk value is greater than the predetermined threshold Rth and the statistical value of the work data is greater than the predetermined threshold Sth.

[0027] The work support system 100 determines and presents, as second improvement candidates, work process K2, which is included in the Rank 2 region where the risk level value is equal to or less than the predetermined threshold value Rth and the statistical value of the work data is greater than the predetermined threshold value Sth, and work processes K4 and K7, which are included in the Rank 2 region where the risk level value is greater than the predetermined threshold value Rth and the statistical value of the work data is equal to or less than the predetermined threshold value Sth.

[0028] The work support system 100 reevaluates each of the work processes K2, K4, and K7 that are second improvement candidates and presents the reevaluation results. Note that Fig. 1 shows an example in which work process K2', which is the reevaluation result of work process K2, and work process K4', which is the reevaluation result of work process K4, are determined to be first improvement candidates and presented.

[0029] For the work process K2 that is the second improvement candidate, the work support system 100 calculates the work attributes of work process K2', for example, by treating work process K2 and the previous work process K1 or the subsequent work process K3 as a single new work process, calculates the risk level of work process K2', and presents the results of the improvement candidate rank determination as the reevaluation result of work process K2 (displays the work processes to be improved based on the results of determining the importance ranking).

[0030] For example, if the risk level of the work process K2' is greater than the threshold value Rth, the work support system 100 determines and presents the work process K2' as the first improvement candidate. Alternatively, if the risk level of the work process K2' is greater than the average value of the risk levels of the work process K2 and the previous work process K1 or the subsequent work process K3, the work support system 100 may determine and present the work process K2' as the first improvement candidate.

[0031] Here, the task attribute of task K2' is calculated based on, for example, statistical values ​​of the task attribute values ​​of task K2 and the preceding task K1 or the following task K3. Specifically, the task attribute corresponding to the average value of multiple task attribute values ​​is calculated as the task attribute of task K2'. Alternatively, the task attribute of task K2' may be calculated based on a weighted average value of the values ​​of multiple task processes, using the risk levels of the multiple task processes as weights.

[0032] In addition, a work process before or after a work process is one or more work processes that are chronologically consecutive to the work process in question, specifically a work process on the same work object as the work process in question, a work process at the same worker's location, or a work process within a specified period of time.

[0033] Note that Figure 1 shows an example in which the risk level of work process K2' exceeds the threshold value Rth and it is judged to be the first improvement candidate. However, since the work processes are not divided according to the level of risk, there is a possibility that work process K2', which is obtained by modifying work process K2 as described above based on work process K2 and the work processes before and after it, will be judged to be the first improvement candidate.

[0034] Furthermore, the second improvement candidate work process K2, whose statistical value of the work data is greater than the threshold value Sth, may be affecting the work processes and work attributes before or after that work process, and by evaluating the work process K2', which is a modified version of work process K2 as described above, it is possible to reevaluate the work process K2 taking this influence into account.

[0035] The work assistance system 100 calculates an evaluation index score for each of the work processes K4 and K7 that are second improvement candidates, and presents and reevaluates those work processes whose evaluation index scores are equal to or less than a predetermined threshold Eth. Here, the threshold Eth for the evaluation index score may be set to a statistical value of the evaluation index scores of multiple work processes. Note that FIG. 1 shows an example in which work process K4, whose evaluation index score is equal to or less than the predetermined threshold Eth, is presented as the second improvement candidate, and work process K4', which is the reevaluation result of work process K4, is determined to be the first improvement candidate and presented.

[0036] Here, the evaluation index score is a value that quantifies the suitability or comprehensiveness of the measurement and evaluation methods possessed by the work assistance system 100 for each work process when a worker performs work on a work object by the work assistance system 100. The work assistance system 100, for example, evaluates whether one or more measurement devices 30 of the work assistance system 100 measure and evaluate the actual work movements of the worker in each work process without any omissions, based on the discrepancy between the work movements specified for each work process and the work data obtained by measuring and evaluating the actual work, and calculates the evaluation index score.

[0037] To specifically explain how the work assistance system 100 calculates the evaluation index score, the ratio of actually measured work movements to the work movements specified in each work process is calculated as the evaluation index score for each work process. For example, the work assistance system 100 determines whether an imaging device or wearable sensor that measures the specified work movements is installed, or whether the work data obtained by measurement reflects the specified work movements, and then calculates the evaluation index score. Note that the imaging device and wearable sensor will be described later in the description of the configuration of the work assistance system 100.

[0038] Furthermore, if the work assistance system 100 includes an imaging device as a measurement method, the ratio of the time the imaging device captures the worker or the worker's body parts to the time the worker performs each task in each work process may be calculated. Furthermore, if the work assistance system 100 includes multiple measurement methods, complementary measurements may be performed, and the work movements of the combined work data may be considered as a defined work movement, and the work movements may be evaluated based on the discrepancy between the defined work movement and the work data measured by each measurement method. For example, the work assistance system 100 may determine whether it includes a wearable sensor that measures the work movements of specific body parts of the worker measured by an imaging device, and if so, whether the work data from the wearable sensor reflects the defined work movement, and then calculate an evaluation score.

[0039] By calculating the evaluation index score described above, it is possible to indicate the possibility of missing work movements for each work process in the measurement method of the work support system 100, and to reevaluate work processes whose evaluation index scores are below a predetermined threshold Eth, taking into account their impact.

[0040] For an operation K4 whose evaluation index score is equal to or less than a predetermined threshold Eth, the operation support system 100 calculates, for example, the evaluation index score of the previous operation K3 or the subsequent operation K5, and calculates the operation attributes of operation K4' by regarding operation K4 and operation K3 whose evaluation index score is greater than the predetermined threshold Eth as a new operation. The operation support system 100 calculates statistics of the operation data of operation K4' and presents the results of the improvement candidate rank determination as the reevaluation result of operation K4.

[0041] Here, the task attribute of task K4' is calculated based on, for example, statistical values ​​of the task attribute values ​​of task K4 and the preceding task K3 or the following task K5. Specifically, the task attribute corresponding to the average value of the multiple task attribute values ​​is calculated as the task attribute of task K4'. Alternatively, the task attribute of task K4' may be calculated based on a weighted average value of the multiple task values, using the evaluation index score values ​​of the multiple task processes as weights.

[0042] 1 shows an example in which the statistical value of the work data of work process K4' exceeds the threshold value Sth and is determined to be the first improvement candidate, but the statistical value of the work data may be small if there is a possibility that the measurement method of the measurement device 30 of the work support system 100 may miss measuring work movements. For this reason, as described above, based on the evaluation index score (by changing the evaluation index score), the statistical value of the work data of work process K4', which has been modified, may exceed the threshold value Sth and be determined to be the first improvement candidate.

[0043] The above-described work support system 100 determines the rank of improvement candidates based on the risk level of each work process and the statistical values ​​of the work data, and re-evaluates the second improvement candidates, thereby dividing each work process into steps or evaluating the work with reduced measurement omissions, thereby promoting work improvement.

[0044] 2 is an explanatory diagram showing a schematic configuration example of the work support system 100. As shown in the figure, the work support system 100 is configured by a measuring device 30 and a work support device 10, which is an information processing device, being communicably connected via wired or wireless communication means 20.

[0045] The measurement device 30 is a device that measures the work performed by a worker on a work object, and is, for example, a sensor that captures images of the worker performing the work and objects including the work object in the space where the work is performed, a wearable sensor worn by the worker such as a head-mounted display that measures the worker's movements, or a sensor that measures environmental information in the space where the work is performed. Note that, although one measurement device 30 is illustrated in Figure 2, multiple measurement devices 30 may be installed or worn.

[0046] The communication means 20 is, for example, a communication means conforming to various communication standards such as USB (Universal Serial Bus) and RS-232C, a LAN (Local Area Network), a WAN (Wide Area Network), the Internet, a dedicated line, etc. Other devices such as a mobile terminal may be connected to the communication means 20.

[0047] The task support device 10 evaluates the task performed by the worker using task data measured by the measuring device 30 .

[0048] 3 is an explanatory diagram showing an example of the hardware configuration of the work assistance device 10. As shown in the figure, the work assistance device 10 is an information processing device (computer) and includes a processor 11, a main memory device 12, an auxiliary memory device 13, an input device 14, an output device 15, and a communication device 16.

[0049] The processor 11 is a device that performs arithmetic processing, such as a central processing unit (CPU), a micro processing unit (MPU), a graphics processing unit (GPU), or an artificial intelligence (AI) chip. The main memory device 12 is a device that stores programs and data, such as a read-only memory (ROM) (e.g., a static random access memory (SRAM), a non-volatile RAM (NVRAM), a mask read-only memory (MASK ROM), or a programmable ROM (PROM)), or a random access memory (RAM) (e.g., a dynamic random access memory (DRAM)). The auxiliary memory device 13 is a hard disk drive, a flash memory, a solid state drive (SSD), or an optical storage device (e.g., a compact disc (CD), a digital versatile disc (DVD)). The programs and data stored in the auxiliary memory device 13 are loaded into the main memory device 12 as needed.

[0050] The input device 14 is a user interface that receives information from a user, and is, for example, a keyboard, a mouse, a card reader, a touch panel, etc. The output device 15 is a user interface that outputs various types of information (display output, audio output, print output, etc.), and is, for example, a display device (LCD (Liquid Crystal Display), a graphics card, etc.) that visualizes various types of information, an audio output device (speaker), a printer, etc.

[0051] The communication device 16 is a communication interface that communicates with other devices via communication means 20. The configuration of the communication means 20 is not necessarily limited, but may be, for example, a communication means conforming to various communication standards such as USB (Universal Serial Bus) or RS-232C, a LAN (Local Area Network), a WAN (Wide Area Network), the Internet, a dedicated line, etc. The communication interface may be, for example, a NIC (Network Interface Card), a wireless communication module, a USB (Universal Serial Interface) module, a serial communication module, etc. The communication device 16 can also function as an input device that receives information from other devices that are communicatively connected. The communication device 16 can also function as an output device that transmits information to other devices that are communicatively connected.

[0052] The various functions of the work support device 10 are realized by the processor 11 reading and executing a program stored in the main memory device 12, or by the hardware (FPGA, ASIC, AI chip, etc.) that constitutes the work support device 10.

[0053] <Functional Configuration of Work Support Device 10> Figure 4 is a block diagram showing the functional configuration of the work support device 10 according to this embodiment. The work support device 10 includes a task data acquisition unit 1, a process division unit 2, an attribute calculation unit 3, an attribute weight calculation unit 4, an importance calculation unit 5, a re-evaluation unit 6, an improvement candidate presentation unit 7, a task data storage unit 8, and an attribute storage unit 9. In the work support system 100, the work support device 10 performs a function of evaluating the task of a worker using task data measured by a measurement device 30.

[0054] The work data acquisition unit 1 acquires work data (actual work data) that includes information on at least the time, the work object, and the worker's position in the space where the work is being performed, obtained during a specified period of time during the work by using a measuring device 30 or the like to measure the work performed by the worker on the work object.

[0055] The process division unit 2 stores information indicating the work data for each work process into which the actual work data has been divided (work process data including multiple processes) in the work data storage unit 8 based on the work data acquired by the work data acquisition unit 1.

[0056] The attribute calculation unit 3 calculates the value of at least one work attribute related to a parameter related to a predetermined evaluation item based on the position information of the work object or worker or information indicating its change over time in the position information or the time change in the position information of the work object or worker in the work data of each work process divided by the process division unit 2 (calculating the value of at least one work attribute related to a parameter related to a predetermined evaluation item based on the position information or its change over time for each of the multiple processes in the work process data), and stores the calculated work attribute and its value information in the attribute memory unit 9.

[0057] The attribute weight calculation unit 4 stores the weight of the work attribute calculated based on the value of the work attribute calculated by the attribute calculation unit 3 or a statistical value calculated from the work attributes of multiple work processes in the attribute memory unit 9, linking it to the work attribute.

[0058] The importance calculation unit 5 evaluates the importance of the work process using the weight value of the work attribute calculated by the attribute weight calculation unit 4, the risk level of multiple work processes calculated using the work attribute, and statistical values ​​of the values ​​indicated by multiple work data for each work process, determines the rank of improvement candidates, and determines first and second improvement candidates (for each of the multiple processes, the ranking of the importance of the process is determined using the risk level of the multiple processes calculated using the weight value of the work attribute assigned based on the position information and the work attribute, and statistical values ​​of the values ​​indicated by multiple work data for the multiple processes).

[0059] The re-evaluation unit 6 re-evaluates the process that is a candidate for improvement determined by the importance calculation unit 5 .

[0060] The improvement candidate presentation unit 7 presents the order of importance calculated by the importance calculation unit 5, the work processes of the improvement candidates, and the results of the reevaluation by the reevaluation unit 6 (the work process data is displayed in order of the order of importance as the work processes to be improved).

[0061] <Operation Flow of the Work Support Device 10> Details of the work support process of the work support device 10 in this embodiment will be described with reference to Fig. 5. Fig. 5 is a flowchart showing an example of the process of the work support device 10 according to this embodiment.

[0062] It is assumed that information regarding work by a worker on a work object, including time information, information about the worker performing the work, and position information of objects including the work object in the space where the work is performed, has been measured by the measurement device 30. Under this assumption, first, in step S1, the work data acquisition unit 1 acquires work data from the measurement device 30.

[0063] Next, in step S2, the process dividing unit 2 divides the work data into work data for each of a plurality of work processes based on the work data acquired by the work data acquisition unit 1, and stores the work data in the work data storage unit 8. The process dividing unit 2 divides the work data into a plurality of work processes based on the time information of the work data, in accordance with the start time and end time of each work process.

[0064] The work data may be divided based on the position information of the work data, according to the position information of the worker and the work object and the change in the position information over time, and further according to the change in the position information of the worker's body parts over time. Specifically, the work data is divided into multiple work processes according to the work performed by the worker in a specified space, the work performed by the worker on a specified work object, and the start and end times of the work performed by the worker in a specified posture or work motion. The work data may be divided based on a combination of multiple pieces of information, including the time information of the work data, the position information of the work data, the position information of the worker's work object, the change in the position information over time, and the change in the position information of the worker's body parts over time.

[0065] Next, in step S3, the attribute calculation unit 3 calculates a value of at least one work attribute related to a parameter for a specified evaluation item based on the positional information of the work object or the worker or its change over time in the work data for each work process divided by the process division unit 2, and stores the work attribute corresponding to the calculated work attribute value in the attribute memory unit 9, linking it to the work process.

[0066] <Example of Work Attribute Information> FIG. 6 shows an example of a work attribute information presentation screen 2000 presenting information on work attributes stored in the attribute storage unit 9. FIG. 6 is a schematic diagram of an example of work attribute information presentation in the work assistance system according to this embodiment. The work attribute information presentation screen 2000 includes information on work attributes and information on the work attributes of each work process. The information on the work attributes is categorized into the following categories: "Evaluation Item Parameter," "Work Attribute," "Attribute Value," and "Attribute Weight." Furthermore, the work attribute of each work process is indicated by "1 (True)" or "0 (False)" to indicate whether it corresponds to work process K1, work process K2, .... Note that at least one piece of work attribute information is stored in the attribute storage unit 9, and information on parameters of other evaluation items and information on other work data may also be stored. FIG. 6 shows multiple work attributes A1, A2, and A3 and their values ​​A1v, A2v, and A3v when the parameter of the evaluation item is the distance D between the work object and the worker. Here, the value of the distance D between the work object and the worker, which is a parameter related to the evaluation item, is divided by predetermined values ​​L1, L2, and L3. The sets of distance D values ​​are designated as task attributes A1, A2, and A3. Task attribute values ​​A1v, A2v, and A3v may be the values ​​L1, L2, and L3, respectively, or values ​​included in the set of distance D values ​​for each task attribute, or may be statistical values ​​such as the average value of the values ​​included in the set. In FIG. 6 , task attributes are set according to the distance D between the work object and the worker. Task attribute A1 indicates a case where the distance D is equal to or greater than 0 and less than L1, task attribute A2 indicates a case where the distance D is equal to or greater than L1 and less than L2, and task attribute A3 indicates a case where the distance D is equal to or greater than L2 and less than L3. Task attribute A1v may be set to the value of distance D, or may be set to a value equal to or greater than 0 and less than L1. Task attribute A2v and task attribute A3v are also set in the same manner as task attribute A1v.

[0067] 6 shows an example in which the attribute storage unit 9 associates and stores work processes with work attributes corresponding to the values ​​of the work attributes calculated based on the work data of each work process. For each work process, the calculated work attribute value is entered as "1" in the row of the corresponding work attribute, and as "0" in the row of the non-corresponding work attribute, thereby associating and storing the work attributes with each other. This shows that work process K1 calculates the value A1v of the work attribute A1, and work process K2 calculates the value A3v of the work attribute A3.

[0068] The user can change the result of the work attribute value calculated by the attribute calculation unit 3 in step S3 by changing the value in the column for each work process on the work attribute information presentation screen 2000. For example, by changing "0" to "1," the work attribute not calculated by the attribute calculation unit 3 can be associated with the work process and stored in the attribute storage unit 9.

[0069] In FIG. 6 , for example, the attribute calculation unit 3 calculates a task attribute value including distance information between the task object and the worker based on position information of the task object and the worker in the task data for the task process, or a task attribute value that is closest to the calculated distance information, and stores the row of the calculated task attribute value as “1” in the attribute storage unit 9. Note that the attribute calculation unit 3 may calculate multiple task attribute values, or may calculate multiple task attributes for parameters of the same evaluation item. For example, the attribute calculation unit 3 calculates a task attribute value from distance information at multiple times in the task data for the task process, and stores the ratio of the calculated task attribute values ​​in the attribute storage unit 9. Specifically, if 60% of the task attribute values ​​calculated from distance information at multiple times in the task data for task process K1 are A1v and the remaining 40% are A2v, the row of the task attribute A1 in the task process K1 column in FIG. 6 may be set to 0.6, and the row of the task attribute A2 in the column for task process K1 may be set to 0.4.

[0070] Next, in step S4, the attribute weight calculation unit 4 assigns weights to the task attributes according to the task attribute values ​​calculated by the attribute calculation unit 3. For example, the task attribute value or a statistical value of the task attribute values ​​of multiple task processes may be assigned as the task attribute weight. For example, in FIG. 6, task attribute values ​​A1v, A2v, and A3v may be assigned as task attribute weights A1w, A2w, and A3w, respectively.

[0071] Furthermore, a statistical value of the values ​​of task attributes for multiple task processes that satisfy a predetermined condition may be used as a threshold, and task attributes with values ​​greater than the threshold may be weighted according to the magnitude of the task attribute value. For example, an average value of task attribute values ​​related to a parameter of a predetermined evaluation item for multiple task processes performed by an expert, multiple task processes with good performance, or multiple task processes that produce good results in a series of tasks may be used as a threshold, and task attributes related to the parameter of the evaluation item whose values ​​are greater than the threshold may be weighted according to the magnitude of the task attribute value. Note that multiple different weights may be assigned to the same task attribute.

[0072] In addition, by changing the value in the attribute weight column on the work attribute information presentation screen 2000, the user can change the result of the work attribute weight value calculated by the attribute weight calculation unit 4 in step S4 and store it in the attribute memory unit 9.

[0073] <Operation Flow of Importance Calculation Unit 5> Next, in step S5, the importance calculation unit 5 evaluates the importance of each work process based on the calculated risk level and statistical values ​​of the work data, based on the work attributes calculated by the attribute calculation unit 3 and the weights of those work attributes calculated by the attribute weight calculation unit 4, and determines the rank of an improvement candidate. Figure 7 is a flow diagram showing the operation of the importance calculation unit 5 in step S5.

[0074] FIG. 7 is a flowchart showing an example of processing by the importance calculation unit according to this embodiment. First, in step S510, the importance calculation unit 5 calculates the risk level of each work attribute based on the work attributes calculated by the attribute calculation unit 3 and the weights of the work attributes calculated by the attribute weight calculation unit 4. For example, for each work process, the sum or weighted average of the weights assigned according to the values ​​of the work attributes of the work process is calculated as the risk level of the work attribute for that work process. In the example of work attribute information stored in the attribute storage unit 9 in FIG. 6 , the sum or weighted average of the weights of one or more work attributes in the row marked "1" in the column for work process K1 may be calculated as the risk level. Note that multiple risk levels may be calculated according to combinations of work attributes, or a risk level may be calculated for each of multiple weights assigned to the same work attribute. Alternatively, the sum or weighted average of multiple risk levels may be calculated as the risk level.

[0075] Next, in step S520, the importance calculation unit 5 calculates statistical values ​​of the work data for each work process based on the work attributes calculated by the attribute calculation unit 3 and the weights of the work attributes calculated by the attribute weight calculation unit 4. For example, the statistical value of the work data for a work process may be calculated as the proportion of work attributes that do not match between the work attributes of a work process and work processes with similar work attributes, work processes performed by different workers, or work processes performed at different times, or as the sum or weighted average of the weights of the work attributes that do not match. In the example of work attribute information stored in the attribute storage unit 9 in FIG. 6 , for example, the proportion of work attributes A1 and A3 that do not match between work processes K1 and K2 to the number of all work attributes assigned to work process K1, or the sum or weighted average of the attribute weights A1w and A3w of the work attributes A1 and A3, may be calculated as the statistical value of the work data. The statistical value of a plurality of pieces of task data may be calculated according to a combination of task data and task attributes, or the statistical value of the task data may be the sum or weighted average of the statistical values ​​of a plurality of pieces of task data.

[0076] Next, in step S530, the importance calculation unit 5 evaluates the importance of each work process based on the risk level and the statistical value of the work data calculated based on the work attributes calculated by the attribute calculation unit 3 and the weights of the work attributes calculated by the attribute weight calculation unit 4, and determines the rank of the improvement candidate. For example, a work process for which both the risk level and the statistical value of the work data of the work process are greater than predetermined thresholds Rth and Sth is determined as a first improvement candidate, and a work process for which either the risk level or the statistical value of the work data of the work process is greater than the predetermined threshold is determined as a second improvement candidate. Here, the predetermined threshold may be a statistical value calculated from the risk levels or work data of multiple work processes that meet a predetermined standard. For example, the threshold may be the average value of the risk levels and statistical values ​​of the work data of multiple work processes performed by skilled workers, multiple work processes with good work performance, or multiple work processes that produce good results in a series of work. Furthermore, importance may be further ranked based on the risk levels and statistical values ​​of the work data. For example, ranking may be performed based on the risk levels and statistical values ​​of the work data or a weighted average value of the statistical values ​​of the work data of the risk levels of multiple work processes.

[0077] <Processing Flow of Re-evaluation Unit 6> Next, in step S6, the re-evaluation unit 6 re-evaluates the improvement candidates determined by the importance calculation unit 5. Fig. 8 is a flow diagram showing the operation of the re-evaluation unit 6 in step S6.

[0078] 8 is a flowchart showing an example of processing by the re-evaluation unit 6 according to this embodiment. First, in step S610, the re-evaluation unit 6 acquires the improvement candidates determined by the importance calculation unit 5.

[0079] Next, in step S620, the re-evaluation unit 6 re-evaluates the second improvement candidate work process whose statistical value of the work data is greater than the threshold. For example, the re-evaluation unit 6 calculates the work attributes of the second improvement candidate work process and the work processes before and after it, treating the work process as a new work process, and performs the processing of step S5 based on the calculated work attribute values, thereby again determining the improvement candidate rank. Here, the work attributes of the work process considered as a new work process are calculated, for example, based on the statistical values ​​of the work attribute values ​​of the work process and the work processes before and after it. Specifically, the average value of the multiple work attribute values ​​is calculated as the work attribute value of the work process. Alternatively, the risk levels of the multiple work processes may be used as weights, and a work attribute value corresponding to a weighted average value of the values ​​of the multiple work processes may be calculated as the work attribute value of the work process.

[0080] Subsequently, in step S630, the re-evaluation unit 6 calculates the evaluation index score of the second improvement candidate whose risk level is greater than the threshold value.

[0081] Subsequently, in step S640, the re-evaluation unit 6 re-evaluates the second improvement candidate work processes whose evaluation index scores are equal to or less than a predetermined threshold. Here, the threshold for the evaluation index score may be a statistical value of the evaluation index scores of a plurality of work processes.

[0082] The re-evaluation unit 6, for example, calculates the evaluation index scores of work processes before or after the second improvement candidate work process, and calculates the task attributes of the work process that is greater than a predetermined threshold and the work process of the second improvement process, regarding them as a new single work process. The re-evaluation unit 6 performs the processing of step S5 based on the calculated task attribute values ​​and again determines the improvement rank. Here, the task attributes of the work process considered as a new single work process are calculated, for example, based on statistical values ​​of the task attribute values ​​of the work process and its previous or subsequent work processes, and a task attribute corresponding to the average value of the multiple task attribute values ​​is calculated as the task attribute value of the work process. Alternatively, a task attribute value corresponding to a weighted average value of the multiple task attribute values ​​may be calculated as the task attribute value of the work process, using the evaluation index scores of the multiple task processes as weights.

[0083] <Example of Evaluation Index Score> FIG. 9 shows an example of information regarding the evaluation index score calculated by the re-evaluation unit 6 in step S630. FIG. 9 is a schematic diagram of an example of information regarding the evaluation index score according to this embodiment. In the column of information regarding the evaluation index score, FIG. 9 shows work movements M1 to M7 and their weights M1v to M7v for work performed by a worker on a work object, measured by the measurement device 30 of the work support system 100. Furthermore, in the column of judgment results for each work process, FIG. 9 shows the results of judging the work movements M1 to M7 in the work data obtained by measuring and evaluating the actual work in each work process based on the work movements specified for each work process.

[0084] In Figure 9, if the work movements specified for each work process match the work movements in the work data obtained by measuring and evaluating the actual work in each work process, the row for that work movement in the column for that work process is marked with "1," and if they do not match, the row is marked with "0." Rows for unspecified work movements are marked with "N / A." Figure 9 shows that in work process K1, M1, M2, and M6 are matched movements, M3 and M4 are mismatched movements, and M5 and M7 are unspecified movements.

[0085] The re-evaluation unit 6 calculates the ratio of the actually measured work movements to the work movements specified for each work process as the evaluation index score for each work process. In Fig. 9, specifically, the evaluation index score for work process K1 is calculated as 0.6 based on three work movements that match the five specified work movements, and for work process K2 it is calculated as 0.4. Furthermore, a weighted average may be calculated as the evaluation index score based on the weights M1w to M7w of the work movements.

[0086] Returning to Fig. 5, next, in step S7, the improvement candidate presentation unit 7 generates and presents information on improvement candidates, including the work processes of improvement candidates for each of the work processes whose importance has been evaluated by the importance calculation unit 5 and whose improvement candidate rank has been determined, and the work processes of second improvement candidates reevaluated by the reevaluation unit 6.

[0087] As a presentation mode, for example, the improvement candidate presentation screen 1000 shown in FIG. 1 is displayed in step S7 on the display of a terminal (not shown) that can communicate with the output device 15 of the work support device 10 via the communication device 16.

[0088] The improvement candidate presentation screen 1000 presents information on work processes including the first and second improvement candidates, whose importance has been evaluated and rank determined by the importance calculation unit 5, in areas for a first improvement candidate area Rank1 and a second improvement candidate area Rank2 based on a predetermined threshold Rth of risk level and a predetermined threshold Sth of the statistical value of work data. The reevaluation unit 6 also presents the second improvement candidate in the areas based on the reevaluation results.

[0089] 1, the work assistance system 100 presents the results of the improvement candidate rank determination for seven work processes K1 to K7, but it is sufficient to perform the improvement candidate rank determination for at least one or more work processes. Furthermore, multiple thresholds may be set for the risk level threshold Rth and the statistical value threshold Sth of the work data, and for example, multiple thresholds may be set to specify specific areas.

[0090] 6 to the user simultaneously with the improvement candidate presentation screen 1000. When the user changes the value in the work process column or the value in the attribute weight column on the work attribute information presentation screen 2000, steps S3 to S6 are processed for the work process based on the changed work attribute and its weight information, and the result of the work process on the improvement candidate presentation screen 1000 is updated based on the calculated risk level of the work process and the statistical value of the work data.

[0091] Regarding the processing of the above-mentioned work support device 10, an example will be described in which a series of work performed by a worker on a work object has a clean surface and is measured and evaluated.

[0092] <Example> Using the flowchart of Fig. 5 showing the operation of the work support device 10, an example of processing by the work support device 10 in response to a worker's work on a work target having a clean surface will be described.

[0093] The task support device 10 is based on the premise that the measurement device 30 measures information regarding a worker's work on a work object having a clean surface, including time information, position information for the worker performing the work, the work object in the space where the work is performed, and objects or parts of the object including the work object's clean surface, as well as environmental information within the space, including gravity information and wind direction information. Here, the clean surface refers to, for example, the surface or parts of a vacuum device exposed to a vacuum during the semiconductor manufacturing process, if the work object is a semiconductor manufacturing device. Here, gravity information refers to information about the direction of gravity within the space. Here, wind direction information refers to information about the direction of air movement and the amount of air moving within each of the subspaces divided into the space.

[0094] Under this premise, first, in step S1, the work data acquisition unit 1 acquires work data from the measuring device 30. Next, in step S2, the process division unit 2 divides the work data into work data for each of a plurality of work processes based on the work data acquired by the work data acquisition unit 1, and stores the work data in the work data storage unit 8.

[0095] The process division unit 2 divides the work data based on, for example, the gravity information and wind direction information of the work data, and by a combination of the direction of gravity and the direction of air movement in the space where the worker or body part performing the work is located. Specifically, the process division unit 2 divides the work data based on whether or not a clean surface is located in the direction of gravity or the direction of a certain amount of air movement (actual work data is divided into work process data based on the gravity information and wind direction information in the space where the work is being performed).

[0096] The process division unit 2 may divide the work data into a plurality of work processes based on the start and end times of approach and contact between the cleaned surface and the worker's body part, based on the position information of the cleaned surface and the worker's body part and information on the change over time. Furthermore, the work data may be divided based on the start and end times of the occurrence of an action of a predetermined movement direction or movement speed of the body part position, based on the change over time in the position of the worker's body part during contact.

[0097] As described above, by dividing the work data into multiple work processes based on gravity information, wind direction information, and information on the proximity and contact between the cleaned surface and the worker's body parts, the work data can be divided into work processes according to the level of risk of foreign matter adhering to or falling onto the cleaned surface.

[0098] Next, in step S3, the attribute calculation unit 3 calculates a value of at least one work attribute related to a parameter related to a predetermined evaluation item based on the work data of each work process divided by the process division unit 2, and associates the work attribute corresponding to the calculated work attribute value with the work process, and stores them in the attribute storage unit 9. Next, in step S4, the attribute weight calculation unit 4 assigns a weight to the work attribute in accordance with the work attribute value calculated by the attribute calculation unit 3.

[0099] The attribute calculation unit 3 calculates divided task attribute values ​​for the clean surface of the task object based on, for example, position information for the task object and the worker's body parts in the task data, information on the position of the clean surface of the task object and the worker's position, gravity information, and wind direction information. Specifically, for a parameter of an evaluation item related to the distance between the clean surface and the worker's body parts, multiple task attributes may be calculated by dividing the distance information based on the proximity and contact between the clean surface and the body parts. Furthermore, for a parameter of an evaluation item related to the position information of the clean surface, multiple task attributes may be calculated by dividing the position information of the clean surface and the parts that make up the clean surface, or the surrounding space including the clean surface, based on the direction of gravity and the direction of air movement in the space where the task on the clean surface is performed and information on the height at which the clean surface is located.

[0100] Here, the attribute weight calculation unit 4 may assign weights to, for example, task attributes related to approach and contact, task attributes in which the clean surface is located in the direction of gravity and the direction of air movement, and task attributes in which the clean surface is located at a height higher than the height of the clean surface.

[0101] The attribute calculation unit 3 may also calculate divided or classified task attribute values ​​for time-varying position information of the worker's body parts based on, for example, position information on the work object and the worker's body parts in the task data, distance information between the clean surface of the work object and the worker's body parts, the position information on the body parts, and information on the direction of gravity in the space where the work is performed relative to the clean surface. Specifically, for a parameter of an evaluation item related to the movement direction of the body parts, multiple task attributes may be calculated by dividing the movement direction of the body parts based on whether the clean surface is located in the movement direction of the body parts and whether the direction of gravity in the space where the work is performed by the body parts, the direction of air movement, and the movement direction of the body parts coincide. Furthermore, for a parameter of an evaluation item related to the worker's posture based on the position information of the multiple body parts and the time-varying position information of the multiple body parts, multiple task attributes may be calculated by dividing or classifying the worker's posture and work actions based on whether the positions of the multiple body parts approach or contact each other and whether there is a time-varying position between the multiple body parts that are in contact.

[0102] Here, the attribute weight calculation unit 4 may assign weights to, for example, task attributes in which the cleaning surface is located in the direction of movement of a body part, task attributes in which the direction of movement of a body part coincides with the direction of gravity or the direction of air movement, and task attributes in which the positions of multiple body parts are in contact or the positions change over time during contact.

[0103] As described above, by calculating multiple work attributes related to the parameters of evaluation items related to the positional information of the clean surface and the parameters of evaluation items related to the worker's work movements, it is possible to divide the work attributes into multiple categories depending on the level of risk of foreign matter adhering to or falling onto the clean surface.

[0104] Next, based on the work attribute values ​​of each work process calculated by the attribute calculation unit 3 and the attribute weights calculated by the attribute weight calculation unit 4, the processes of steps S5 to S7 are performed.

[0105] As described above, by applying the work support system 100 to the maintenance or inspection work of semiconductor manufacturing equipment, it becomes possible to evaluate the work in accordance with an index of the degree (risk) of the possibility of foreign matter or leaks occurring in each work process and the magnitude of the risk.

[0106] <Actions and Effects> As described in detail above, the work support device 10 of this embodiment acquires work data regarding work by a worker on a work object, including time information, and positional information of the worker performing the work and of objects, including the work object, within the space where the work is performed, divides the work data into work data for a plurality of work processes based on the work data, calculates work attribute values ​​for the work data for each work process, calculates weights for each work attribute, calculates the risk level and work data statistics for each work process based on the work attribute values ​​and work attribute weights, evaluates the importance, ranks the improvement candidates, evaluates the work processes of the first and second improvement candidates, and re-evaluates and presents the work process of the second improvement candidate.

[0107] By re-evaluating the second improvement candidates, work evaluation can be performed with reduced division of work processes and omissions in work evaluation, encouraging work improvement. Furthermore, by evaluating the work performed by workers on work objects with clean surfaces according to the level of risk of foreign matter adhering or falling, the efficiency of work related to the maintenance and inspection of semiconductor manufacturing equipment can be improved in particular.

[0108] It goes without saying that the present invention is not limited to the above-described embodiments and can be modified in various ways without departing from the spirit of the present invention. For example, the above-described embodiments have been described in detail to clearly explain the present invention, and the present invention is not necessarily limited to those having all of the described configurations. Furthermore, it is possible to add, delete, or replace part of the configuration of the above-described embodiments with other configurations.

[0109] Furthermore, the above-described configurations, functional units, processing units, processing means, etc. may be partially or entirely implemented in hardware, for example, by designing them as integrated circuits. The above-described configurations, functions, etc. may also be implemented in software by a processor interpreting and executing a program that implements each function. Information such as the programs, tables, and files that implement each function can be stored in a memory, a recording device such as a hard disk or SSD (Solid State Drive), or a recording medium such as an IC card, SD card, or DVD.

[0110] In addition, in the above-mentioned drawings, the control lines and information lines shown are those that are considered necessary for explanation, and do not necessarily show all the control lines and information lines that are actually implemented. For example, it can be considered that almost all components are actually connected to each other.

[0111] The above-described layout of the various functional units, processing units, and databases of the work assistance device 10 is merely an example. The layout of the various functional units, processing units, and databases can be changed to an optimal layout in terms of the performance, processing efficiency, communication efficiency, etc. of the hardware and software provided in these devices.

[0112] Furthermore, the configuration (schema, etc.) of the database that stores the various types of data described above can be flexibly changed from the viewpoint of efficient use of resources, improved processing efficiency, improved access efficiency, improved search efficiency, and the like.

[0113] The present invention is not limited to the following embodiments: (Aspect 1) A work support method for supporting a worker in work on a work object, comprising the steps of: dividing actual work data, which is data obtained during a predetermined period during the work and includes at least information on time, the work object, and the position of the worker in a space where the work is performed, into work process data including a plurality of processes based on the time or position information; calculating, for each of the plurality of processes in the work process data, a work attribute value for at least one work attribute related to a parameter related to a predetermined evaluation item based on the position information or its change over time; determining, for each of the plurality of processes, a rank of importance of the process using a weight value of the process attribute assigned based on the position information and the work attribute, a risk level of the plurality of processes calculated using the work attribute, and statistics of values ​​indicated by a plurality of work data for the plurality of processes; and displaying the work process data as processes of the work to be improved in order of importance. (Aspect 2) The work support method according to Aspect 1, wherein the process for which the risk level value is greater than a predetermined threshold and the statistical value is greater than the average of the values ​​indicated by the plurality of work data is displayed as the process of the work to be improved. (Aspect 3) The work support method according to Aspect 1 or Aspect 2, wherein, for the process for which the risk level value is less than the predetermined threshold and the statistical value is greater than the average of the values ​​indicated by the plurality of work data, the process and the process before or after it are considered to be a new process, and values ​​of the work attributes are calculated, and the process of the work to be improved is displayed based on the result of determining the order of importance using the risk level and the statistical value for the new process.(Aspect 4) A work support method according to any one of Aspects 1 to 3, wherein, for a process for which the risk level value is greater than the predetermined threshold and the statistical value is smaller than the average value of the values ​​indicated by the plurality of work data, the evaluation index score of the process is changed to calculate the value of the work attribute, and the process of the work to be improved is displayed based on the result of determining the ranking of the importance using the risk level and the statistical value for the new one process. (Aspect 5) A work support method according to any one of Aspects 1 to 4, wherein the actual work data is divided into work process data based on gravity information and wind direction information in the space during the work. (Aspect 6) A work support method according to claim 1 or 2, wherein the sum of the weight values ​​for each of the plurality of processes is calculated. (Aspect 7) A work support method according to any one of Aspects 1 to 6, wherein the work support method calculates values ​​for divided work attributes for the clean surface of the work object based on the position information for the work object and the body parts of the worker, information on the position of the clean surface of the work object and the position of the worker, gravity information, and wind direction information.(Aspect 8) A work support device that supports work performed by a worker on a work object, comprising: a process division unit that divides actual work data, which is data obtained during a predetermined period during the work, and which includes at least information on time, the work object, and the position of the worker in a space where the work is performed, into work process data including a plurality of processes based on the time or position information; an attribute calculation unit that calculates, for each of the plurality of processes in the work process data, a value of the work attribute for at least one work attribute related to a parameter related to a predetermined evaluation item based on the position information or its change over time; an importance calculation unit that determines, for each of the plurality of processes, a ranking of importance of the process using a weight value of the work attribute assigned based on the position information and the work attribute, and a statistical value of values ​​indicated by a plurality of work data related to the plurality of processes; and an improvement candidate presentation unit that displays the work process data as processes of the work to be improved in order of importance.(Aspect 9) A work support system including a measuring device that measures work performed by a worker on a work object, and a work support device that presents work movements of the work that are candidates for improvement, wherein the work support device comprises a memory and a processor, wherein the memory comprises: a process division unit that divides actual work data, which is data obtained during a predetermined period during the work and includes at least information on time, the work object, and the position of the worker in the space where the work is performed, into work process data including a plurality of processes based on the time or position information; an attribute calculation unit that calculates a value of the work attribute for at least one work attribute related to a parameter related to a predetermined evaluation item for each of the plurality of processes in the work process data based on the position information or its change over time; an importance calculation unit that determines the order of importance of each of the plurality of processes using a weight value of the work attribute assigned based on the position information and the work attribute, a risk level of the plurality of processes calculated using the work attribute, and statistics of values ​​indicated by a plurality of work data for the plurality of processes; and an improvement candidate presentation unit that displays the work process data as processes of the work to be improved in order of importance. a work support system including a program that causes the processor to execute the following:

[0114] 1 Work data acquisition unit, 2 Process division unit, 3 Attribute calculation unit, 4 Attribute weight calculation unit, 5 Importance calculation unit, 6 Re-evaluation unit, 7 Improvement candidate presentation unit, 8 Work data storage unit, 9 Attribute storage unit, 10 Work support device, 11 Processor, 12 Main storage unit, 13 Auxiliary storage unit, 14 Input device, 15 Output device, 16 Communication device, 20 Communication means, 30 Measuring device, 100 Work support system, 1000 Improvement candidate presentation screen, 2000 Work attribute information presentation screen

Claims

1. A work support method for supporting a worker in performing work on a work object, comprising the steps of: dividing actual work data, which is data obtained during a predetermined period during the work and includes at least information on the time, the work object, and the position of the worker in the space where the work is performed, into work process data including a plurality of processes based on the time or position information; calculating a value of the work attribute for at least one work attribute related to a parameter related to a predetermined evaluation item for each of the plurality of processes in the work process data based on the position information or its change over time; determining the order of importance of each of the plurality of processes using the weight value of the work attribute assigned based on the position information and the risk level of the plurality of processes calculated using the work attribute, and statistics of values ​​indicated by the plurality of work data for the plurality of processes; and displaying the work process data as processes of the work to be improved in order of order of importance.

2. A work support method according to claim 1, wherein a process for which the risk level value is greater than a predetermined threshold and the statistical value is greater than the average value of the values ​​indicated by the plurality of work data is displayed as the process of the work that should be improved.

3. A work support method as set forth in claim 2, wherein for a process whose risk level is smaller than the predetermined threshold and whose statistical value is larger than the average value of the values ​​indicated by the plurality of work data, the process and the process before or after it are regarded as a new process, the value of the work attribute is calculated, and the process of the work to be improved is displayed based on the result of determining the ranking of the importance using the risk level and statistical value for the new process.

4. A work support method as described in claim 2, wherein for a process where the risk level value is greater than the predetermined threshold and the statistical value is less than the average value of the values ​​indicated by the plurality of work data, the evaluation index score of the process is changed to calculate the value of the work attribute, and the process of the work to be improved is displayed based on the result of determining the ranking of the importance using the risk level and statistical value for the new one process.

5. A work support method according to claim 1 or 2, wherein the actual work data is divided into the work process data based on gravity information and wind direction information in the space during the work.

6. A work support method according to claim 1 or 2, wherein the sum of the weight values ​​for each of the plurality of processes is calculated.

7. A work support method according to claim 1 or 2, wherein a value is calculated for a divided work attribute for the clean surface of the work object based on the position information for the work object and the body part of the worker, based on information on the position of the clean surface of the work object and the position of the worker, gravity information, and wind direction information.

8. A work support device that supports work performed by a worker on a work object, comprising: a process division unit that divides actual work data, which is data obtained during a predetermined period during the work and includes at least information on time, the work object, and the position of the worker in space where the work is performed, into work process data including a plurality of processes based on the time or position information; an attribute calculation unit that calculates a work attribute value for at least one work attribute related to a parameter related to a predetermined evaluation item for each of the plurality of processes in the work process data based on the position information or its change over time; an importance calculation unit that determines the order of importance of each of the plurality of processes using a weight value of the work attribute assigned based on the position information and the work attribute, a risk level of the plurality of processes calculated using the work attribute, and a statistical value of values ​​indicated by a plurality of work data for the plurality of processes; and an improvement candidate presentation unit that displays the work process data as processes of the work to be improved in order of importance.

9. A work support system including a measuring device that measures work performed by a worker on a work object, and a work support device that presents work movements that are candidates for improvement within the work, wherein the work support device has a memory and a processor, wherein the memory comprises: a process division unit that divides actual work data, which is data obtained during a predetermined period during the work and includes at least information on time, the work object, and the position of the worker in the space where the work is performed, into work process data including a plurality of processes based on the time or position information; an attribute calculation unit that calculates a value of the work attribute for at least one work attribute related to a parameter related to a predetermined evaluation item for each of the plurality of processes in the work process data based on the position information or its change over time; an importance calculation unit that determines the order of importance of each of the plurality of processes using the risk levels of the plurality of processes calculated using the work attribute weight value assigned based on the position information and the work attribute and statistics of values ​​indicated by the plurality of work data for the plurality of processes; and an improvement candidate presentation unit that displays the work process data as processes of the work to be improved in order of importance. a work support system including a program that causes the processor to execute the following:

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