Charging system, container, and charging method

Abstract

A charging system according to the present invention includes: a plurality of substrate processing systems; a container; a conveyance system; a station; and a control unit. The container has a sensor capable of detecting information related to whether conveyance of a substrate-type sensor to a substrate processing system is possible. The container performs charging from a battery to the substrate-type sensor when it is detected that conveyance of the substrate-type sensor is not possible, and stops charging from the battery to the substrate-type sensor when it is detected that conveyance of the substrate-type sensor is possible. The control unit, when determining that replacement or charging of the battery is to be performed, controls the conveyance system to convey the container to the station, and, when determining that replacement or charging of the battery is not to be performed, controls the conveyance system to convey the container to any of the plurality of substrate processing systems.

Description

Charging system, container, and charging method

[0001] The present disclosure relates to a charging system, a container, and a charging method.

[0002] Patent Document 1 discloses a system that transports a substrate-type sensor (instrumentation substrate) to a processing module of a semiconductor manufacturing device, measures the condition of the processing module, and diagnoses and monitors the status of the processing module. The substrate-type sensor has a power supply that supplies power to each component provided on the substrate. In addition, the sealed container that houses the substrate-type sensor is equipped with a power supply circuit that supplies power to the wafer-type sensor.

[0003] Patent Document 2 also discloses a container equipped with a charging module that charges a substrate-type sensor. This charging module charges the substrate-type sensor by wireless power supply.

[0004] JP 2018-526814 A JP 2022-184764 A

[0005] The present disclosure provides a technique that enables stable operation of a substrate-type sensor by charging at an appropriate timing.

[0006] According to one aspect of the present disclosure, there is provided a charging system including: a plurality of substrate processing systems for processing substrates; a container having a housing for accommodating a substrate-type sensor capable of inspecting the substrate processing systems and a battery capable of charging the substrate-type sensor; a transport system for transporting the container to the substrate processing systems; a station provided on the transport system and capable of replacing or charging the battery; and a control unit, wherein the container has a sensor capable of detecting information regarding whether the substrate-type sensor can be transported to the substrate processing systems; when it detects that the substrate-type sensor cannot be transported, the battery is charged to the substrate-type sensor; and when it detects that the substrate-type sensor can be transported, the battery is stopped from charging the substrate-type sensor; the control unit determines whether to replace or charge the battery; and when it determines that the battery should be replaced or charged, the control unit controls the transport system to transport the container to the station; and when it determines that the battery should not be replaced or charged, the control unit controls the transport system to transport the container to one of the plurality of substrate processing systems.

[0007] According to one aspect, charging can be performed at an appropriate timing, thereby enabling the substrate-type sensor to operate stably.

[0008] Fig. 1 is a plan view showing an example of a system including a plurality of substrate processing systems and a transfer system according to an embodiment; Fig. 2 is a view showing an example of a substrate-type sensor for inspecting a substrate processing system; Fig. 3 is a cross-sectional view schematically showing a container for accommodating the substrate-type sensor; Fig. 4 is a first flowchart showing an example of a charging method according to an embodiment; Fig. 5 is a second flowchart showing another example of a charging method according to an embodiment.

[0009] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. In the drawings, the same components are denoted by the same reference numerals, and redundant explanations may be omitted.

[0010] 1 is a diagram showing an example of a system 1 that transports a container C to a substrate processing system 10 and processes substrates W in the container C. The system 1 according to the embodiment includes a plurality of substrate processing systems 10 that process substrates W, and a transfer system 20 that transports a container C that accommodates a plurality of substrates W to a target substrate processing system 10 among the plurality of substrate processing systems 10. In addition to the container C, the system 1 also functions as a monitoring system that transports a container 40 that accommodates one or more substrate-type sensors 30 using the transfer system 20 and measures and monitors the state of the substrate processing system 10 using the substrate-type sensors 30. The system 1 also functions as a charging system that charges the substrate-type sensors 30 using the container 40 and replaces or charges the container 40 at a station 22 of the transfer system 20.

[0011] Specifically, the multiple substrate processing systems 10 are systems that sequentially unload and transport multiple substrates W from a container C transported by the transport system 20, and perform substrate processing on each substrate W. The substrate processing performed on the substrates W is not particularly limited, and examples thereof include film formation processing, etching processing, cleaning processing, ashing processing, modification processing, bonding processing, peeling processing, grinding, inspection, etc.

[0012] Each substrate processing system 10 includes, for example, a plurality of processing modules 11, a vacuum transfer module 12, a plurality of load lock modules 13, and an atmospheric transfer module .

[0013] The plurality of processing modules 11 each include a processing vessel 111 that can be depressurized to a vacuum atmosphere, and a stage 112 on which a substrate W is placed within the processing vessel 111. Each processing module 11 performs various substrate processing on the substrate W accommodated inside the processing vessel 111. Each processing module 11 may be a plasma processing module that performs plasma processing on the substrate W. Note that, although FIG. 1 illustrates an example configuration in which each substrate processing system 10 has six processing modules 11, the number of processing modules 11 is of course not limited to this.

[0014] The vacuum transfer module 12 has a vacuum transfer vessel 121 in which a vacuum transfer device 122 for transferring a substrate W is installed. In the substrate processing system 10, each processing module 11 and each load lock module 13 are connected with the vacuum transfer vessel 121 at the center. Gate valves that can open and close the processing vessel 111 are provided between the vacuum transfer module 12 and each processing module 11. The vacuum transfer module 12 reduces the pressure inside the vacuum transfer vessel 121 to a vacuum atmosphere, and transfers the substrate W between the processing module 11 and the load lock module 13 or between the processing modules 11 using the vacuum transfer device 122.

[0015] Each of the load lock modules 13 includes a load lock container 131 that can load and unload a substrate W. Each load lock module 13 is connected to a vacuum transfer module via a first gate valve, and is connected to an atmospheric transfer module 14 via a second gate valve. Although Fig. 1 illustrates a configuration in which each substrate processing system 10 has two load lock modules 13, the number of load lock modules 13 is not limited to this.

[0016] Each load lock vessel 131 has an internal pressure variable chamber switchable between a vacuum atmosphere and an atmospheric atmosphere. When transferring a substrate W from the atmospheric transfer module 14 to the vacuum transfer module 12, the load lock module 13 receives the substrate W from the atmospheric transfer module 14 while maintaining the internal pressure variable chamber at atmospheric pressure, and then depressurizes the internal pressure variable chamber to deliver the substrate W to the vacuum transfer module 12. When transferring a substrate W from the vacuum transfer module 12 to the atmospheric transfer module 14, the load lock module 13 receives the substrate W from the vacuum transfer module 12 while maintaining the internal pressure variable chamber at vacuum, and then pressurizes the internal pressure variable chamber to deliver the substrate W to the atmospheric transfer module 14.

[0017] The atmospheric transfer module 14 has an atmospheric transfer container 141 with an atmospheric transfer device 142 installed therein. The atmospheric transfer container 141 is formed in a rectangular shape in a plan view. A plurality of (three) load ports 15 and one aligner module 16 are connected to the atmospheric transfer container 141. This atmospheric transfer module 14 may be, for example, an Equipment Front End Module (EFEM). The atmospheric transfer module 14 may also have an FFU (Fan Filter Unit) that supplies clean air from the top of the atmospheric transfer container 141 and an exhaust device that exhausts air.

[0018] A container C such as a FOUP (Front Opening Unified Pod) capable of accommodating a plurality of substrates W is set in each of the plurality of load ports 15. Although the substrate processing system 10 in Fig. 1 has three load ports 15, the number of load ports 15 is of course not limited to this.

[0019] The atmospheric transfer device 142 transfers the substrate W within the atmospheric transfer container 141. For example, the atmospheric transfer device 142 takes out the substrate W from a container C set in the load port 15 and transfers the substrate W to the aligner module 16. The aligner module 16 detects the circumferential orientation and eccentricity of the substrate W, and adjusts the attitude of the substrate W in cooperation with the atmospheric transfer device 142. Furthermore, the atmospheric transfer device 142 transfers the substrate W after its attitude has been adjusted out of the aligner module 16 and transfers it to the load lock module 13. The atmospheric transfer device 142 also transfers the processed substrate W that has been transferred into the load lock module 13 out of the load lock module 13 and stores the substrate W in the container C of the load port 15.

[0020] The above-described substrate processing system 10 is installed in the work area so that the direction in which the load ports 15 are arranged (the longitudinal direction of the atmospheric transfer module 14) coincides with (is parallel to) the extension direction of the rails 21 of the transfer system 20.

[0021] The transfer system 20 is a device that transfers containers C between the substrate processing systems 10, and may be, for example, an overhead hoist transport (OHT). The transfer system 20 includes rails 21 fixed to the ceiling of the work area and a hoist mechanism (not shown) that runs along the rails 21 while holding the containers C and can move the containers C up and down. For example, the hoist mechanism has the function of holding the containers C in a suspended manner and raising and lowering the containers C using a belt. The transfer system 20 also includes a control unit 29 that controls the operation of the transfer system 20, located at an appropriate position in the work area. Note that the transfer system 20 is not limited to the overhead transfer device, and may be a system that transfers the containers C using a robot that moves autonomously on the floor of the work area.

[0022] The rails 21 are basically installed so as to pass above each load port 15 of each substrate processing system 10. The hoist mechanism that moves along the rails 21 can automatically set a container C on the load port 15 by moving to directly above the load port 15 of the target substrate processing system 10 and lowering the container C. Conversely, the hoist mechanism can remove the container C from the substrate processing system 10 by moving to directly above the container C on the load port 15 and holding and lifting the container C.

[0023] The rail 21 may be endless, allowing multiple hoist mechanisms to loop around it at the work site. The transport system 20 includes, for example, a turnout rail 23 or the like at a midpoint on the endless rail 21, and a rail branching off from the turnout rail 23 includes a station 22 where multiple containers C are kept waiting, containers C are replaced, etc. Note that the station 22 may also be provided directly at a midpoint on the endless rail 21.

[0024] The control unit 29 of the transport system 20 is a computer including a processor, memory, input / output interface, communication interface, etc. (not shown). The processor is one or a combination of a central processing unit (CPU), a graphics processing unit (GPU), an application specific integrated circuit (ASIC), a field-programmable gate array (FPGA), a circuit made up of a plurality of discrete semiconductors, etc., and executes and processes programs stored in memory. The memory includes a main storage device made up of semiconductor memory, etc., and an auxiliary storage device made up of disks, drives, semiconductor memory (flash memory), etc.

[0025] The control unit 29 moves the hoist mechanism to a target position on the rails 21 and controls the lifting, holding, and release of the container C. The control unit 29 also controls the stations to recover, replace, and the like the container C, and manages the state of each substrate W in the container C. The control unit 29 may be installed alongside a management computer that manages the entire work site (each substrate processing system 10 and transport system 20).

[0026] The above-described system 1 uses the substrate-type sensor 30 at appropriate times during operation to inspect each module of each substrate processing system 10, thereby managing the state of each substrate processing system 10. The substrate-type sensor 30 is formed in substantially the same shape as the substrate W to be processed, and is transported by the container 40 in the transport system 20, and is also transported by the transport devices (vacuum transport device 122, atmospheric transport device 142) in the substrate processing system 10. The substrate-type sensor 30 inspects each module to which it is transported within the substrate processing system 10, and accumulates parameters obtained during the inspection.

[0027] 2 is a block diagram showing a schematic configuration of the substrate-type sensor 30. The substrate-type sensor 30 includes, for example, a main body 31, one or more inspection sensor units 32, a control unit 33, a communication module 34, a battery 35, and a charging module 36.

[0028] The main body 31 is formed as a plate having substantially the same shape (circular) as the substrate W to be processed. The main body 31 has one or more inspection sensor units 32, a control unit 33, a communication module 34, a battery 35, a charging module 36, etc. mounted on its surface or inside, and each component is connected to another via wiring formed on its surface or inside. In Fig. 2, the wiring (power lines) connecting the battery 35 to each component are shown by solid lines, and the wiring (communication lines) connecting the control unit 33 to each component are shown by dotted lines.

[0029] The material forming the main body 31 is not particularly limited, and may be, for example, a silicon semiconductor, a compound semiconductor, a carbon semiconductor, or the like, similar to the substrate W to be processed. However, other metal materials, resin materials, or the like may also be used as the material forming the main body 31. Furthermore, the components actually mounted on the main body 31 (the inspection sensor section 32, the control unit 33, the communication module 34, the battery 35, and the charging module 36) are arranged so that the weight of the entire substrate-type sensor 30 is balanced. For example, the battery 35, which is a heavy object, may be arranged in the center of the main body 31, or multiple batteries may be arranged at equal intervals along the circumferential direction of the outer periphery of the main body 31.

[0030] One or more inspection sensor units 32 are mounted on the main body 31, and are detectors (elements, components) that actually inspect the modules in the substrate-type sensor 30. The inspection sensor units 32 are connected to the control unit 33, and inspect the modules (detect parameters) and transmit detected information based on control commands from the control unit 33.

[0031] The parameters detected by the inspection sensor unit 32 during inspection may be designed appropriately depending on the substrate processing in the processing module 11. For example, the inspection sensor unit 32 detects the state of the processing module 11 during substrate processing by using a detector capable of detecting one or more of the gas species, gas concentration, temperature, pressure, plasma state, etc. within the processing module 11. The inspection sensor unit 32 may also have an image sensor system that captures images of the structure within the processing module 11, the degree of particle adhesion, etc. Alternatively, if the substrate processing is a film formation process, the same film formation process may be performed on the substrate-type sensor 30, and then the inspection sensor unit 32 may detect the film thickness, film quality, etc. of the film formed on the surface.

[0032] The control unit 33 is configured as a computer having a processor, memory, input / output interface, etc. The control unit 33 controls the inspection sensor unit 32, communication module 34, charging module 36, etc. by causing the processor to execute a program stored in the memory, thereby acquiring and managing detection information and communicating information with external devices. When accumulating detection information during inspection in memory, the control unit 33 stores the detection time and various parameters detected by the inspection sensor unit 32 in association with each other.

[0033] The communication module 34 communicates information with external devices such as the control unit 29 of the transport system 20 or the battery control unit 45 of the container 40. The substrate-type sensor 30 can transmit the detection information stored in the memory of the control unit 33 to the external device via the communication module 34.

[0034] The battery 35 is connected to each component within the substrate-type sensor 30 and supplies the power necessary for the operation of each component. While Fig. 2 shows an example in which wiring is directly connected from the battery 35 to the inspection sensor unit 32 and the communication module 34, the substrate-type sensor 30 may be configured such that a power signal controlled by the control unit 33 is supplied from the battery 35 to the inspection sensor unit 32 and the communication module 34 via the control unit 33.

[0035] A well-known rechargeable secondary battery (such as a lithium ion battery) can be used as the battery 35 of the substrate-type sensor 30. A plurality of batteries 35 may be provided in the substrate-type sensor 30. The battery 35 is connected to the charging module 36 of the substrate-type sensor 30 and is charged with power supplied from the charging module 36.

[0036] The charging module 36 has a configuration according to a known power supply method (wireless power supply method, wired power supply method), and supplies power received from a battery 43 of the container 40 (described below) to the battery 35. The charging module 36 is provided at an appropriate position on the main body 31 corresponding to the power supply module 44 of the container 40.

[0037] Next, a container 40 for accommodating the substrate-type sensor 30 configured as above will be described with reference to Fig. 3. Fig. 3 is a cross-sectional view that schematically shows the container 40 for accommodating the substrate-type sensor 30.

[0038] The container 40 has substantially the same shape as the FOUP, which is the container C for the substrates W. The container 40 includes a housing 41 having a storage space capable of storing a plurality of substrate-type sensors 30, and a lid 42 attached to one side of the side wall of the housing 41.

[0039] The housing 41 has a plurality of shelves 411 arranged along the vertical direction of the storage space, which can support the substrate-type sensor 30. For example, each shelf 411 protrudes slightly inward from the side wall of the housing 41 so as to support the outer periphery of the substrate-type sensor 30.

[0040] The lid 42 can seal the storage space of the housing 41, but can also open the storage space by an appropriate opening operation. For example, when the container 40 is being transported, the lid 42 closes the storage space of the housing 41. Then, when the container 40 is set on the load port 15 of the substrate processing system 10, the lid 42 is opened by the load port 15. For example, a handle that engages with a door between the atmospheric transfer module 14 and the load port 15 is provided on the exposed surface of the lid 42. When the lid 42 engages with the door on the load port 15, it moves vertically as a unit. This opens the storage space of the container 40 toward the atmospheric transfer module 14.

[0041] The container 40 also has a battery 43 and a power supply module 44 for charging the battery 35 of the substrate-type sensor 30 housed in the housing space. For example, the battery 43 is removably fixed to the bottom wall of the housing 41 by an engagement means (not shown). While the battery 43 is fixed to the housing 41, it is connected to a plurality of power supply lines 431 installed inside the housing 41.

[0042] A well-known rechargeable secondary battery (such as a lithium ion battery) is used as the battery 43. The charge capacity of the battery 43 is sufficiently greater (for example, more than twice as great) than the charge capacity of the battery 35 of the substrate-type sensor 30. The battery 43 can supply power selectively or collectively to the multiple power supply modules 44 connected to the multiple power supply lines 431.

[0043] The power supply module 44 has a structure corresponding to the power supply method of the charging module 36 of the board-type sensor 30, and charges the battery 35 via the charging module 36. For example, when wireless power supply is performed, the power supply module 44 is provided at a predetermined position on the shelf 411, and the charging module 36 of the board-type sensor 30 housed in the housing 41 is disposed opposite this power supply module 44. In this way, when power is supplied from the battery 43 to the power supply module 44, power is supplied wirelessly via the power supply module 44 and the charging module 36, and the battery 35 of the board-type sensor 30 can be charged.

[0044] 3 has a first power supply module 441 installed below the housed substrate-type sensor 30, and a second power supply module 442 installed above the housed substrate-type sensor 30. Accordingly, the substrate-type sensor 30 has charging modules 36 installed on both the bottom and top surfaces of the main body 31. This allows power to be supplied to the battery 35 from both the top and bottom of the substrate-type sensor 30, enabling the battery 35 to be charged efficiently.

[0045] The container 40 includes a battery control unit 45 inside the battery 43. The battery control unit 45 may be provided on the housing 41 side, outside the battery 43. The battery control unit 45 is formed by a computer having a processor, a memory, an input / output interface, a communication interface, etc., and controls charging of the battery 43, monitors the charging state of the battery 43, and notifies the user of the charging state.

[0046] Furthermore, the container 40 is equipped with an open / closed state detection sensor 46 that detects whether the lid 42 is open or closed, and an installation state detection sensor 47 that detects whether the container 40 is installed on the load port 15. The open / closed state detection sensor 46 and the installation state detection sensor 47 are sensors that can detect information related to whether the substrate-type sensor 30 can be transported to the substrate processing system 10. The open / closed state detection sensor 46 and the installation state detection sensor 47 may be contact sensors, or may be optical sensors or the like that are capable of non-contact detection.

[0047] The open / closed state detection sensor 46 and the installation state detection sensor 47 are communicatively connected to the battery control unit 45 and transmit detection information to the battery control unit 45. Based on this detection information, the battery control unit 45 recognizes whether the board-type sensor 30 can or cannot be transported, and controls charging or stopping of charging of the battery 35 depending on whether or not it can be transported. Note that, for ease of explanation, Fig. 3 shows a configuration including both the open / closed state detection sensor 46 and the installation state detection sensor 47, but it is sufficient to include at least one of these sensors.

[0048] For example, the battery control unit 45 determines whether the lid 42 is open or closed based on detection information from the open / closed state detection sensor 46. When the lid 42 is closed, the substrate-type sensor 30 cannot be transported. In this case, the battery control unit 45 recognizes the power supply module 44 in which the charging module 36 of the substrate-type sensor 30 is located, and supplies power from the battery 43 to charge the battery 35 of the substrate-type sensor 30. Note that the battery control unit 45 may automatically stop charging the battery 35 when the charge state of the battery 35 has reached a target value (e.g., 100%). Then, the control unit 33 of the substrate-type sensor 30 executes a standby mode in which the operation of the inspection sensor unit 32 is stopped while power is being supplied to the battery 35.

[0049] On the other hand, when the lid 42 is open, the substrate-type sensor 30 can be transported by the substrate processing system 10. In this case, the battery control unit 45 stops the supply of power from the battery 43 and terminates charging of the battery 35 of the substrate-type sensor 30. Then, with the power supply to the battery 35 stopped, the control unit 33 of the substrate-type sensor 30 executes an active mode that enables operation of the inspection sensor unit 32.

[0050] Alternatively, the battery control unit 45 determines whether or not a container 40 is installed on the load port 15 based on detection information from the installation state detection sensor 47. When a container 40 is not installed on the load port 15, the substrate-type sensor 30 cannot be transported. Therefore, the battery control unit 45 recognizes the power supply module 44 in which the charging module 36 of the substrate-type sensor 30 is installed, and supplies power from the battery 43 to charge the battery 35 of the substrate-type sensor 30. Then, the control unit 33 of the substrate-type sensor 30 executes a standby mode in which the operation of the inspection sensor unit 32 is stopped while power is being supplied to the battery 35.

[0051] On the other hand, when the container 40 is placed on the load port 15, the substrate-type sensor 30 can be transported by the substrate processing system 10. In this case, the battery control unit 45 stops the supply of power from the battery 43 and terminates charging of the battery 35 of the substrate-type sensor 30. Then, with the power supply to the battery 35 stopped, the control unit 33 of the substrate-type sensor 30 executes an active mode that enables operation of the inspection sensor unit 32.

[0052] In other words, the inability to transport the substrate-type sensor 30 includes at least a state in which the container 40 is being transported by the transport system 20. On the other hand, the ability to transport the substrate-type sensor 30 includes a state in which the substrate-type sensor 30 can be transported out of the container 40 that has been transported to the substrate processing system 10 by the transport system 20. The battery control unit 45 switches between charging and stopping charging of the substrate-type sensor 30 based on information regarding whether the substrate-type sensor 30 can be transported, thereby making it possible to continue charging for an appropriate period of time.

[0053] Furthermore, the battery 43 may include a state-of-charge detection sensor 48 capable of detecting the state of charge (so-called battery SOC) of the battery 43. The state-of-charge detection sensor 48 may employ an appropriate sensor (such as an ammeter or a voltmeter) according to a known detection method. The state-of-charge detection sensor 48 is communicably connected to the battery control unit 45 and transmits information about the detected state of charge to the battery control unit 45.

[0054] The battery control unit 45 provides the acquired information on the charge state to the control unit 29 of the transport system 20 as information for replacing or charging the battery 43 of the container 40. In other words, the battery control unit 45 functions as an information output unit that notifies the charge state of the battery 43. The control unit 29 can determine the timing to replace or charge the battery 43 based on the information on the charge state.

[0055] The method of providing information for replacing or charging the battery 43 is not particularly limited, and examples thereof include the following methods (a) to (d).

[0056] (a) A display unit is provided on the container 40, and the charge state of the battery 43 is displayed on the display unit so that the worker can check it, or the container is installed at the work location and image recognition is performed using a camera.

[0057] (b) A communication module is mounted on the container 40 to transmit information on the charge state of the battery 43 to the control unit 29 of the transport system 20 .

[0058] (c) If the power supply from the battery 43 stops while the substrate-type sensor 30 is being charged, the control unit 33 of the substrate-type sensor 30 requests the control unit 29 via the communication module 34 to replace or charge the battery 43 of the container 40.

[0059] (d) When the substrate-type sensor 30 has performed measurements of the substrate processing system 10 a set number of times, the battery 43 is automatically replaced or charged.

[0060] When the control unit 29 of the transport system 20 determines that the battery 43 of the container 40 needs to be replaced or charged, it controls the transport system 20 to transport the container 40 to the station 22. Then, in the station 22, the battery 43 of the container 40 is automatically replaced or charged. For example, the station 22 is equipped with a transport robot that carries in and out the battery 43, and the battery 43 that needs to be replaced is removed by the arm of the transport robot, and a new battery 43 is set inside the container 40.

[0061] The system 1 (charging system) and container 40 according to the embodiment are basically configured as described above, and their operation (charging method) will be described below with reference to the flowcharts of Figures 4 and 5. Figure 4 is a flowchart showing the charging method for charging the battery 35 of the substrate-type sensor 30. Figure 5 is a flowchart showing the charging method for charging or replacing the battery 43 of the container 40.

[0062] When measuring the state of each substrate processing system 10, the control unit 29 of the transfer system 20 controls the transfer system 20 to transfer the container 40 containing the substrate-type sensor 30. The transfer system 20 sets the container 40 on the load port 15 of the target substrate processing system 10 (step S101).

[0063] When the container 40 is set on the load port 15, the substrate processing system 10 opens the door of the load port 15 and the lid 42 of the container 40 (step S102). This allows the substrate-type sensor 30 in the container 40 to be transported into the substrate processing system 10.

[0064] Then, the substrate processing system 10 transfers the substrate-type sensor 30 out of the container 40 using the atmospheric transfer device 142, and transfers the substrate-type sensor 30 to the processing module 11 using the vacuum transfer device 122 via the load lock module 13, and inspects the processing module 11 (step S103). For example, the substrate-type sensor 30 is transferred to all processing modules 11 in the substrate processing system 10 in order to inspect each processing module 11, and parameters obtained during the inspection are stored in the memory of the control unit 33.

[0065] Note that the measurement of the condition by the substrate-type sensor 30 is not limited to inspection of all of the processing modules 11 in the substrate processing system 10 using one substrate-type sensor 30, and it may also be performed to measure some of the processing modules 11. For example, if the container 40 contains multiple substrate-type sensors 30, the multiple substrate-type sensors 30 can be transported to different processing modules 11 for inspection. Furthermore, for example, if a processing module 11 in which an abnormality or the like has occurred is identified, the substrate-type sensor 30 may be transported to only that processing module 11 for inspection.

[0066] After completing the inspection of each processing module 11, the substrate processing system 10 transports the used substrate-type sensor 30 and loads it into the container 40 (step S104). After completing the inspection of each processing module 11, the substrate processing system 10 closes the door of the load port 15 and closes the lid 42 of the container 40.

[0067] Meanwhile, the battery control unit 45 of the container 40 continuously checks the open / closed state of the lid 42 using the open / closed state detection sensor 46. When the lid 42 is in the open state, the battery control unit 45 monitors whether the lid 42 has been closed (step S105). When the lid 42 remains open (step S105: NO), the battery control unit 45 repeats this monitoring. When the lid 42 is closed (step S105: YES), the process proceeds to step S106.

[0068] Based on the closure of the lid 42, the battery control unit 45 controls the power supply module 44 to start charging the substrate-type sensor 30 from the battery 43 (step S106). Furthermore, the control unit 33 switches the substrate-type sensor 30 from active mode to standby mode. This allows the substrate-type sensor 30 to smoothly replenish the power consumed in the substrate processing system 10.

[0069] Then, the control unit 29 controls the transfer system 20 to remove the container 40 from the substrate processing system 10 and transfer the container 40 (step S107).

[0070] The control unit 29 also determines whether or not to terminate the measurement of the substrate-type sensor 30 for the substrate processing system 10 (step S108). If the measurement is to be terminated (step S108: YES), this processing flow is terminated. Note that, upon completion of the measurement, the transfer system 20 may perform control such as returning the container 40 to the station 22. Furthermore, the system 1 may perform control such as transporting the container C containing the substrates W to the substrate processing system 10 using the transfer system 20, and subjecting the substrates W to substrate processing in the substrate processing system 10.

[0071] On the other hand, if the measurement by the substrate-type sensor 30 is to be continued (step S108: NO), the transfer system 20 transfers the container 40 to another substrate processing system 10 and sets the container 40 on the load port 15 (step S109). During the transfer of this container 40, the lid 42 of the container 40 is closed, so that charging of the substrate-type sensor 30 from the battery 43 continues.

[0072] Furthermore, when the cover 42 is in the closed state, the battery control unit 45 monitors whether the cover 42 has been opened using the open / close state detection sensor 46 (step S110). If the cover 42 remains closed (step S110: NO), the battery control unit 45 repeats this monitoring. If the cover 42 has been opened (step S110: YES), the process proceeds to step S111.

[0073] In step S111, the battery control unit 45 stops charging the substrate-type sensor 30 from the battery 43. The control unit 33 also switches the substrate-type sensor 30 from standby mode to active mode, allowing the substrate-type sensor 30 to again inspect each processing module 11 of the substrate processing system 10 with the battery 35 fully charged.

[0074] The charging method returns to step S103 after step S111, and the same processing flow is repeated thereafter, thereby enabling good monitoring of the state of each processing module 11 in each substrate processing system 10. In particular, by charging the substrate-type sensor 30 from the container 40 at an appropriate timing, it is possible to avoid running out of charge in the substrate processing system 10 and to operate (inspect) stably.

[0075] Furthermore, in the charging method, as shown in Fig. 5, the charging state of the battery 43 of the container 40 is monitored, and processing for replacing or charging the battery 43 is interrupted as necessary. Note that the following will typically describe an example of replacing the battery 43. Specifically, the control unit 29 of the transport system 20 controls steps S121 to S125 in Fig. 5.

[0076] The control unit 29 acquires the charge state of the battery 43 of the container 40, for example, when the container 40 charges the substrate-type sensor 30 (step S121). The charge state of the battery 43 can be acquired using the above-described patterns (a) to (c). Alternatively, the control unit 29 may count the number of times that the substrate-type sensor 30 has inspected the substrate processing system 10, as in the above-described pattern (d), without acquiring the charge state of the battery 43.

[0077] When the control unit 29 acquires the charge state of the battery 43, it determines whether or not to replace the battery 43 (step S122). For example, in patterns (a) to (c), the control unit 29 compares the charge state of the battery 43 with a threshold value stored in advance, and determines to replace the battery 43 if the charge state of the battery 43 is less than the threshold value. Also, if the charge state of the battery 43 is equal to or greater than the threshold value, the control unit 29 determines to continue using the battery 43 without replacing or charging it. Furthermore, in pattern (d), the control unit 29 compares a set number of times with the counted number of times, and determines to replace the battery 43 if the counted number of times reaches the set number, and determines to continue using the battery 43 if the counted number of times does not reach the set number.

[0078] If the battery 43 is to be replaced (step S122: YES), the control unit 29 proceeds to step S123. In step S123, the control unit 29 controls the transfer system 20 to transfer the container 40 to the station 22.

[0079] Then, the transport system 20 replaces the battery 43 of the container 40 at the station 22 (step S124). The battery 43 may be replaced by a worker or by a replacement robot.

[0080] On the other hand, if the control unit 29 does not replace the battery 43 (step S122: NO), the process proceeds to step S125. In step S125, the control unit 29 controls the transport system 20 to transport the container 40 to the target substrate processing system 10 where the inspection will be performed. This allows the container 40 to stably charge the substrate-type sensor 30 from the battery 43. When the battery 43 becomes low in charge, the battery 43 can be smoothly replaced or charged to restore the charge state of the battery 43. As a result, the system 1 can stably charge the substrate-type sensor 30 using the container 40, thereby preventing the substrate-type sensor 30 from running out of charge, etc.

[0081] The interrupt process for replacing or charging the battery 43 of the container 40 may be performed, for example, while the container 40 is being transported by the transport system 20, or while the container 40 is set in the substrate processing system 10. However, it is preferable not to perform this interrupt process while the substrate-type sensor 30 is being used in the substrate processing system 10. This allows the container 40 to be moved to the station 22 with the substrate-type sensor 30 securely housed in the container 40. Alternatively, the transport system 20 may be configured to move the container 40 to the station 22 and replace or charge the battery 43 while an inspection is being performed by the substrate-type sensor 30 in the substrate processing system 10.

[0082] The system 1 (charging system), container 40, and charging method of the present disclosure are not limited to the above-described embodiment and may take various modifications. For example, the battery 43 of the container 40 is not limited to being installed inside the housing 41 as shown in FIG. 3 , but may be installed outside the housing 41. This allows the battery 43 to be replaced efficiently at the station 22.

[0083] The above-disclosed embodiments include, for example, the following aspects.

[0084] [Supplementary Note 1] A charging system including: a plurality of substrate processing systems for processing substrates; a container having a housing for accommodating a substrate-type sensor capable of inspecting the substrate processing systems and a battery capable of charging the substrate-type sensor; a transport system for transporting the container to the substrate processing systems; a station provided on the transport system and capable of replacing or charging the battery; and a control unit, wherein the container has a sensor capable of detecting information related to whether the substrate-type sensor can be transported to the substrate processing systems; when it is detected that the substrate-type sensor cannot be transported, the battery is charged to the substrate-type sensor, and when it is detected that the substrate-type sensor can be transported, the control unit stops charging the substrate-type sensor from the battery; the control unit determines whether to replace or charge the battery; when it is determined that the battery should be replaced or charged, the control unit controls the transport system to transport the container to the station; and when it is determined that the battery should not be replaced or charged, the control unit controls the transport system to transport the container to one of the plurality of substrate processing systems.

[0085] [Supplementary Note 2] The charging system according to Supplementary Note 1, further comprising a charge state detection sensor that detects the charge state of the battery, wherein the control unit compares the charge state of the battery detected by the charge state detection sensor with a threshold value, and determines to replace or charge the battery if the charge state of the battery is less than the threshold value, and determines not to replace or charge the battery if the charge state of the battery is equal to or greater than the threshold value.

[0086] [Supplementary Note 3] The charging system according to Supplementary Note 2, wherein the container or the substrate-type sensor has an information output unit that notifies the control unit of the state of charge of the battery detected by the state-of-charge detection sensor.

[0087] [Supplementary Note 4] The charging system described in Supplementary Note 1, wherein the control unit counts the number of times the substrate processing system is inspected using the substrate-type sensor, and determines to replace or charge the battery when the number of times reaches a set number, and determines not to replace or charge the battery when the number of times does not reach the set number.

[0088] [Appendix 5] The charging system described in any one of Appendices 1 to 4, wherein the inability to transport the substrate-type sensor includes at least a state in which the container is being transported by the transport system, and the ability to transport the substrate-type sensor includes a state in which the substrate-type sensor can be transported out of the container that has been transported to the substrate processing system by the transport system.

[0089] [Supplementary Note 6] The charging system described in any one of Supplementary Notes 1 to 5, wherein the sensor has an open / closed state detection sensor that detects the open / closed state of the lid of the container as information related to whether or not the container can be transported, and the container charges the board-type sensor from the battery when the open / closed state detection sensor detects that the lid is closed, and stops charging the board-type sensor from the battery when the open / closed state detection sensor detects that the lid is open.

[0090] [Appendix 7] The sensor has an installation state detection sensor that detects whether the container is installed or not installed in the substrate processing system as information related to whether the container can be transported, and the container charges the substrate-type sensor from the battery when the installation state detection sensor detects that the container is not installed, and stops charging the substrate-type sensor from the battery when the installation state detection sensor detects that the container is installed. A charging system described in any one of Appendices 1 to 6.

[0091] [Appendix 8] The charging system described in any one of Appendices 1 to 4, wherein the substrate-type sensor includes an inspection sensor unit that inspects the substrate processing system, and a control unit that operates the inspection sensor unit to inspect the substrate processing system, and the control unit operates in a standby mode to stop operation of the inspection sensor unit when charging from the battery, and in an active mode to enable operation of the inspection sensor unit when charging from the battery is stopped.

[0092] [Supplementary Note 9] A container having a housing for accommodating a substrate-type sensor capable of inspecting a plurality of substrate processing systems that process substrates, and a battery that can be charged for the substrate-type sensor, and transported to the substrate processing systems by a transport system, the container including: a sensor that can detect information related to whether the substrate-type sensor can be transported to the substrate processing systems; a charge state detection sensor that detects the charge state of the battery; and a control unit, wherein the control unit charges the substrate-type sensor from the battery when it detects that the substrate-type sensor cannot be transported, stops charging the substrate-type sensor from the battery when it detects that the substrate-type sensor can be transported, and notifies a control unit of the transport system of the information detected by the charge state detection sensor.

[0093] [Supplementary Note 10] A charging method for a charging system including a plurality of substrate processing systems for processing substrates; a container having a housing accommodating a substrate-type sensor capable of inspecting the substrate processing systems and a battery capable of charging the substrate-type sensor; a transport system for transporting the container to the substrate processing systems; and a station provided on the transport system and capable of replacing or charging the battery, the charging method comprising: (A) a step of detecting information relating to whether the substrate-type sensor can be transported to the substrate processing systems by a sensor of the container; (B) a step of charging the substrate-type sensor from the battery when it is detected in step (A) that the substrate-type sensor cannot be transported; (C) a step of stopping charging the substrate-type sensor from the battery when it is detected in step (A) that the substrate-type sensor can be transported; (D) a step of determining whether to replace or charge the battery; and (E) a step of controlling the transport system to transport the container to the station when it is determined in step (D) that the battery should be replaced or charged. (F) when it is determined in step (D) that the battery is not to be replaced or charged, controlling the transfer system to transfer the container to one of the plurality of substrate processing systems.

[0094] The charging system, container 40, and charging method according to the presently disclosed embodiments are illustrative in all respects and not restrictive. The embodiments may be modified and improved in various ways without departing from the spirit and scope of the appended claims. The features described in the above embodiments may be configured differently and may be combined within a consistent range.

[0095] This application claims priority from Japanese Patent Application No. 2024-130129, filed on August 6, 2024, with the Japan Patent Office, the entire contents of which are incorporated herein by reference.

[0096] REFERENCE SIGNS LIST 1 System 10 Substrate processing system 20 Transfer system 22 Station 29 Control unit 30 Substrate-type sensor 40 Container 41 Housing 43 Battery 46 Open / closed state detection sensor 47 Installation state detection sensor W Substrate

Claims

1. A charging system including: a plurality of substrate processing systems for processing substrates; a container having a housing for accommodating a substrate-type sensor capable of inspecting the substrate processing systems and a battery capable of charging the substrate-type sensor; a transport system for transporting the container to the substrate processing systems; a station provided on the transport system and capable of replacing or charging the battery; and a control unit, wherein the container has a sensor capable of detecting information related to whether the substrate-type sensor can be transported to the substrate processing systems; when it is detected that the substrate-type sensor cannot be transported, the battery is charged to the substrate-type sensor, and when it is detected that the substrate-type sensor can be transported, the control unit stops charging the substrate-type sensor from the battery; the control unit determines whether to replace or charge the battery; when it is determined that the battery should be replaced or charged, the control unit controls the transport system to transport the container to the station; and when it is determined that the battery should not be replaced or charged, the control unit controls the transport system to transport the container to one of the plurality of substrate processing systems.

2. A charging system as described in claim 1, further comprising a charge state detection sensor that detects the charge state of the battery, wherein the control unit compares the charge state of the battery detected by the charge state detection sensor with a threshold value, and determines to replace or charge the battery if the charge state of the battery is less than the threshold value, and determines not to replace or charge the battery if the charge state of the battery is equal to or greater than the threshold value.

3. The charging system according to claim 2, wherein the container or the substrate-type sensor has an information output unit that notifies the control unit of the state of charge of the battery detected by the state-of-charge detection sensor.

4. The charging system of claim 1, wherein the control unit counts the number of times the substrate processing system is inspected by the substrate-type sensor, and determines to replace or charge the battery when the number of times reaches a set number, and determines not to replace or charge the battery when the number of times does not reach the set number.

5. A charging system as described in any one of claims 1 to 4, wherein the inability to transport the substrate-type sensor includes at least a state in which the container is being transported by the transport system, and the ability to transport the substrate-type sensor includes a state in which the substrate-type sensor can be transported out of the container that has been transported to the substrate processing system by the transport system.

6. A charging system as claimed in any one of claims 1 to 4, wherein the sensor has an open / closed state detection sensor that detects the open / closed state of the lid of the container as information relating to whether or not the container can be transported, and the container charges the board-type sensor from the battery when the open / closed state detection sensor detects that the lid is closed, and stops charging the board-type sensor from the battery when the open / closed state detection sensor detects that the lid is open.

7. A charging system as described in any one of claims 1 to 4, wherein the sensor has an installation state detection sensor that detects whether the container is installed or not installed in the substrate processing system as information related to whether the transport is possible, and the container charges the substrate-type sensor from the battery when the installation state detection sensor detects that the container is not installed, and stops charging the substrate-type sensor from the battery when the installation state detection sensor detects that the container is installed.

8. A charging system as claimed in any one of claims 1 to 4, wherein the substrate-type sensor includes an inspection sensor unit that inspects the substrate processing system, and a control unit that operates the inspection sensor unit to inspect the substrate processing system, and the control unit operates in a standby mode that stops operation of the inspection sensor unit when charging from the battery, and in an active mode that enables operation of the inspection sensor unit when charging from the battery is stopped.

9. A container having a housing for accommodating a substrate-type sensor capable of inspecting a plurality of substrate processing systems that process substrates, and a battery that can be charged for the substrate-type sensor, and transported to the substrate processing system by a transport system, the container including: a sensor capable of detecting information relating to whether the substrate-type sensor can be transported to the substrate processing system; a charge state detection sensor that detects the charge state of the battery; and a control unit, wherein the control unit charges the substrate-type sensor from the battery when it detects that the substrate-type sensor cannot be transported, stops charging the substrate-type sensor from the battery when it detects that the substrate-type sensor can be transported, and notifies the control unit of the transport system of the information detected by the charge state detection sensor.

10. A charging method for a charging system including: a plurality of substrate processing systems for processing substrates; a container having a housing for accommodating a substrate-type sensor capable of inspecting the substrate processing systems and a battery capable of charging the substrate-type sensor; a transport system for transporting the container to the substrate processing systems; and a station provided on the transport system and capable of replacing or charging the battery, the charging method comprising: (A) a step of detecting information relating to whether the substrate-type sensor can be transported to the substrate processing systems by a sensor of the container; (B) a step of charging the substrate-type sensor from the battery when it is detected in step (A) that the substrate-type sensor cannot be transported; (C) a step of stopping charging the substrate-type sensor from the battery when it is detected in step (A) that the substrate-type sensor can be transported; (D) a step of determining whether to replace or charge the battery; and (E) a step of controlling the transport system to transport the container to the station when it is determined in step (D) that the battery should be replaced or charged. (F) when it is determined in step (D) that the battery is not to be replaced or charged, controlling the transfer system to transfer the container to one of the plurality of substrate processing systems.

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