Processing tool with selectable container interface and port configuration

Abstract

A load port, for a substrate processing apparatus, includes: a frame with a closable opening that communicates with a substrate carrier mated to the load port, the carrier has a carrier door that opens and closes the carrier; and a load port door connected to the frame and arranged to open and close the opening. The load port door having a load port door to carrier door interface that couples the load port door with and opens the carrier door. The load port door to carrier door interface is re-configurable so that the interface switches configurations from a first interface configuration to a second interface configuration, the first and second interface configurations respectively conform with different corresponding carrier door fits, of different carrier doors, so that the load port door commonly fits up and couples with different carrier doors each with carrier door fit arrangements different from each other.

Description

Aty. Docket No. 390P017057-WO(PCT)PROCESSING TOOL WITH SELECTABLE CONTAINER INTERFACE AND PORT CONFIGURATIONCROSS-REFERENCE TO RELATED APPLICATION(S)

[0001] This application is a non-provisional of and claims the benefit of United States provisional patent application number 63 / 682,610 filed on August 13, 2024, the disclosure of which is incorporated herein by reference in its entirety.BACKGROUND1. Field

[0002] The present disclosure generally relates to workpiece handling, and more particularly, to interfacing workpiece containers with processing tools.2. Brief Description of Related Developments

[0003] Generally, workpieces handled in a clean room environment are transported within sealable transport containers. These transport containers are mated with processing tools at load ports, where the processing tools automatically open the transport containers for transfer of workpieces from and to the transport containers.

[0004] These transport containers are provided in different configurations for holding a respective number of workpieces. Generally, each configuration of transport container has a respective load port to which the transport container mates, to the exclusion of other different configurations of transport containers. For example, a first transport container configured to hold X number (where X is a whole number greater than zero) of workpieces has a form factor (e.g., size and shape) matesAty. Docket No. 390P017057-WO(PCT) with a first load port configured for interfacing with the first transport container. A second transport container configured to Y number (where Y is a whole number greater than zero but different from the number X) of workpieces has a form factor different than the first transport container and is configured for mating with a second load port configured to interface with the second transport container, but not the first transport container. Likewise, because of the different form factors, the second transport container is not configured for mating with the first load port, and vice versa. Here, a load port corresponding to each configuration of transport container is needed for processing workpieces held in the differently configured transport containers which increases tool cost and / or tool set up time as the different load ports are either swapped with each other at the same process tool or multiple tools are configured with load ports configured for mating with a respectively configured transport container.

[0005] Accordingly, the present disclosure addresses a number of those issues.BRIEF DESCRIPTION OF THE DRAWINGS

[0006] The foregoing aspects and other features of the disclosed embodiment are explained in the following description, taken in connection with the accompanying drawings, wherein:

[0007] Fig. 1 is an exemplary schematic illustration of a processing apparatus incorporating features of the present disclosure;

[0008] Fig. 2 is an exemplary schematic illustration of an example of the processing apparatus of Fig. 1 in accordance with the present disclosure;

[0009] Fig. 3 is an exemplary schematic perspective illustration of a portion of a load port module of the processing apparatus of Figs. 1 and 2 in accordance with the present disclosure;Aty. Docket No. 390P017057-WO(PCT)

[0010] Fig. 4 is an exemplary schematic perspective illustration of a portion of the load port module of Fig. 3 in accordance with the present disclosure;

[0011] Fig. 5 is an exemplary schematic perspective illustration of a portion of the load port module of Fig. 3 in accordance with the present disclosure;

[0012] Figs. 6A and 6B are respectively exemplary schematic perspective and bottom illustrations of an exemplary transport container employed with the load port module of Fig. 3 in accordance with the present disclosure;

[0013] Figs. 7A-7D are exemplary schematic illustrations of portions of the load port module of Fig. 3 in accordance with the present disclosure;

[0014] Fig. 8 is an exemplary schematic perspective illustration of a portion of the load port module of Fig. 3 in accordance with the present disclosure;

[0015] Fig. 9 is an exemplary schematic illustration of a portion of the load port module of Fig. 3 and an exemplary transport container door interfacing with the load port module in accordance with the present disclosure;

[0016] Fig. 10 is an exemplary schematic illustration of a portion of the load port module of Fig. 3 and an exemplary transport container door interfacing with the load port module in accordance with the present disclosure;

[0017] Figs. 11 A-l 1C are exemplary schematic illustrations of portions of a load port door of the load port module of Fig. 3 in accordance with the present disclosure;

[0018] Fig. 12 is an exemplary flow diagram for a method in accordance with the present disclosure;Aty. Docket No. 390P017057-WO(PCT)

[0019] Figs. 13 A and 13B are exemplary schematic illustrations of portions of the load port module of Fig. 3 in accordance with the present disclosure; and

[0020] Fig. 14 is an exemplary flow diagram for a method in accordance with the present disclosure.DETAILED DESCRIPTION

[0021] The following detailed description is meant to assist the understanding of one skilled in the art, and is not intended in any way to unduly limit claims connected or related to the present disclosure.

[0022] The following detailed description references various figures, where like reference numbers refer to like components and features across various figures, whether specific figures are referenced, or not.

[0023] The word “each” as used herein refers to a single object (i.e., the object) in the case of a single object or each object in the case of multiple objects. The words “a,” “an,” and “the” as used herein are inclusive of “at least one” and “one or more” so as not to limit the noun being referred to as being in its “singular” form.

[0024] Spatial terms such as “left,” “right,” “top,” “bottom,” “upper,” “lower,” “front,” “back,” “vertical,” and “horizontal” as may be used herein are by way of example and illustration only are not meant to limit the description and may be exchanged in position and orientation.

[0025] The terms “substantially” and “about” as may be used herein refer to a feature that may be varied within an acceptable manufacturing tolerance for a given application.Aty. Docket No. 390P017057-WO(PCT)

[0026] Fig. 1 illustrates an exemplary processing apparatus or tool 100 (also referred to herein as a substrate processing apparatus) in accordance with the present disclosure. Although the present disclosure will be described with reference to the drawings, it should be understood that the present disclosure can be embodied in many forms. In addition, any suitable size, shape or type of elements or materials could be used.

[0027] The processing apparatus 100 may be configured for processing any suitable workpieces in any suitable processing environment. For example, the workpieces may be any desired type of planar workpiece such as semiconductor workpieces, flat panels for flat panel displays, imaging plates (e.g., masks or reticles), semiconductor packaging substrates (e.g., high density interconnects), semiconductor wafers or substrates (e.g., 200mm, 300mm, or larger or smaller), or any other planar workpiece. The processing environment may be a vacuum environment, an atmospheric pressure environment (e.g., where the atmospheric pressure environment includes at least a portion of the processing apparatus 100 filled with an inert gas or clean dry air), or a combination of vacuum and atmospheric pressure environments (e.g., where a portion of the processing tool 100 has a vacuum environment and another portions of the processing apparatus 100 has an atmospheric pressure environment). For exemplary purposes only, the processing apparatus 100 includes a workpiece processing section 110 and a load port module or load port 120 coupled to the workpiece processing section 110. The load port module 120, as will be described herein, may be configured to interface with differently configured transport containers 150A, 150B (also referred to herein as substrate carriers) so as to open the transport containers 150A, 150B to the processing environment within the workpiece processing section 110. The transport containers 150A, 150B are arranged to transport any suitable substrate, mask or processing instrument (generally referred to as items SMP - see Fig. 1) therein.

[0028] In accordance with the present disclosure, the load port module 120 is common to more than type of transport container 150A, 150B (only two types of transport containers are shown for illustrative purposes, but there may be more than two types of transport containers), where each type of transport container 150A, 150B has a form factor (size, shape, and / or features) that areAty. Docket No. 390P017057-WO(PCT) different from each other type of transport container 150A, 150B. For example, a single load port module 120 may handle or otherwise mate / couple with multiple different types of transport containers 150A, 150B that have different locations for the transport container door locking mechanism, as will be described herein. The load port module 120 described herein may reduce tool cost as the same load port module 120 interfaces with the different types of transport containers 150A, 150B. The load port module 120 described herein may reduce machine set up time (and increase workpiece processing throughput) as set up may not be required when workpiece production switches from employing one type of transport container 150A, 150B to another type of transport container 150A, BOB.

[0029] The different types of transport containers 150A, 150B may include transport containers configured to hold different numbers / capacities of workpieces. For example, transport container 150A may be configured with a container capacity so as to hold twenty -five (25) workpieces, one above the other. The transport container 150B may be configured with a container capacity so as to hold twelve (12) workpieces, one above the other. These transport containers 150A, 150B may be configured as front opening unified pods or FOUPS, each having (with brief reference to Figs. 6A, 9, and 1 1) a door 151 with locator pin holes 152A, 152B and latch key access holes 153A, 153B that interface with mating features (e.g., pins 600 A, 600B 600C, and latch keys 610A, 610B, 610C, 610D) of a load port door BOD of the load port module 120. One or more of the locator pin holes 152A, 152B and latch key access holes 153 A, 153B of the transport container 150B may be spaced relative to each other with a different spacing than one or more of the locator pin holes 152A, 152B and latch key access holes 153 A, 153B of the transport container 150A. As such, the differently configured (or types) of transport containers 150A, 150B may interface with different ones of the mating features of the load port door 120D as will be described herein to facilitate mating of each of the transport containers 150A, 150B to the same load port module 120. There may be additional transport containers configured to hold other amounts of workpieces that interface with the same load port module 120 as transport containers 150A, 150B, where the load port door 120D includes additional mating features spaced from the other mating features of theAty. Docket No. 390P017057-WO(PCT) load port door 120D (in a manner similar to that described herein) to accommodate the additional transport containers. While the present disclosure is described with respect to FOUP type transport containers, it should be understood that the features described herein may be equally applied to any suitable transport containers having doors (side, bottom, or top opening) that are opened with an automated door opener, the automated door opening having features (similar to those described herein) that interface with mating features of the doors so as to unlock and remove the doors from the respective transport containers.

[0030] Referring to Fig. 2, an example of the processing apparatus 100 is illustrated as a cluster or batch processing apparatus 100C; however, the processing apparatus 100 may be configured as a linearly distributed tool or as a tool for individual workpiece processing. Suitable examples of processing apparatus to which the present disclosure may be employed may be found in, for example, United States patent application number 15 / 215,143 filed on July 20, 2016 and titled “Substrate Processing Apparatus”; United States patent numbers 10,777,438 titled “Processing Apparatus,” and issued on September 15, 2020, 8,960,099 titled “Substrate Processing Apparatus,” and issued on February 24, 2015, 8,371,792 titled “Substrate Processing Apparatus,” and issued on February 12, 2013, 7,988,398 titled “Linear Substrate Transport Apparatus,” and issued on August 2, 2011, 9,105,673 titled “Side Opening Unified Pod,” and issued on August 11, 2015, 9,401,294 titled “Compact Substrate Transport System,” and issued on July 26, 2016; and International patent application number PCT / US13 / 25513 entitled “Substrate Processing Apparatus” and filed on February 11, 2013, the disclosures of which are incorporated herein by reference in their entireties.

[0031] The processing apparatus 100C generally includes a front section 112 (the term front is used here for convenience to identify an exemplary frame of reference, and in other aspects the front of the apparatus may be established on any side of the apparatus). The front section 112 includes the load port module 120 that provides an interface allowing the importation and exportation of workpieces to and from the interior of the processing apparatus 110. The front section 112 generally has a housing 116 and automation components located in the housing 116Aty. Docket No. 390P017057-WO(PCT) handling workpieces between the front section 112 and a rear section 114 of the processing apparatus 100C.

[0032] The rear section 114 is connected to the housing 16 of the front section 116. The rear section 114 may have any suitable controlled environment therein (e g., an atmospheric pressure environment, an inert gas environment, a clean dry air environment, a vacuum environment, etc.), and generally comprises a processing system for processing workpieces. Where the rear section 114 includes a vacuum environment the vacuum therein may be a high vacuum such as, for example, about IxlO'5Torr (e.g., about .001 Pa) or below. For example, the rear section 114 may generally include a central transport chamber 114C with a workpiece transport device therein, and peripheral processing modules 114P for performing any desired manufacturing process on the workpieces within the processing apparatus 100C. Exemplary processes that may be performed in the processing modules include, but are not limited to, cleaning, baking, inspecting, thin film processes that use a vacuum such as plasma etch or other etching processes, chemical vapor deposition (CVD), plasma vapor deposition (PVD), implantation such as ion implantation, metrology, rapid thermal processing (RTP), dry strip atomic layer deposition (ALD), oxidation / diffusion, forming of nitrides, vacuum lithography, epitaxy (EPI), wire bonder and evaporation, other thin film processes that use vacuum pressures, etc.

[0033] Workpieces may be transported within transport containers 150 to and from the processing apparatus 100C. The transport containers 150 are substantially similar to transport containers 150A, 150B described herein. The transport containers 150 may be positioned on or in proximity to the front section interface, such as at the load port module 120. As illustrated in Fig. 2, the processing apparatus 100C may have any suitable number of load port modules 120 where each load port module 120 is configured to mate or otherwise interface with the different types of transport containers 150. For example, the processing apparatus 100C in Fig. 2 is illustrated as having transport container 150A at one of the two load port modules 120 and transport container 150B at the other of the two load port modules 120 (or vice versa); however, both load port modules 120 may be interfaced with a respective transport container 150A or both load portAty. Docket No. 390P017057-WO(PCT) modules 120 may be interfaced with a respective transport container 150B. From the transport containers 150, the workpieces may be brought through the interface, such as a BOLTS (Box Opener / Loader to Tool Standard) interface, into the front section 116 using any suitable automation components in the front section 116. The workpieces may then be transported, via load locks 114L to the rear section 114 for processing in one or more of the processing modules 114P. Processed workpieces may then be returned, in a substantially reverse manner, to the front section 116 and then to the respective transport container 150 for removal from the processing apparatus 100C.

[0034] The front section 112, which may otherwise be referred to as an environmental front-end module or EFEM, may have a shell or casing (also referred to as the EFEM frame) defining a protected environment, or mini-environment where workpieces may be accessed and handled with minimized potential for contamination between the transport containers 150, used to transport the workpieces to and from the processing apparatus 100C, and the load locks 114L providing entry into the rear section 114. As noted above, one or more load port modules 120 are located on one or more sides of the front section 116 providing the interface between the processing apparatus 100C and an area (e.g., clean room) in which the processing apparatus 100C is disposed. Suitable examples of load port modules 120 to which the aspects of the present disclosure may be applied are described in, e.g., United States patent numbers 11,031,265 titled “Load Port Module,” and issued on June 8, 2021, 10,923,375 titled “Load Port Module,” and issued on February 16, 2021, 8,821,099 titled “Load Port Module,” and issued on September 2, 2014, 6,502,869 titled “Pod Door To Port Door Retention System,” and issued on January 7, 2003, and 5,772,386 titled “Loading and Unloading Station for Semiconductor Processing Installations,” and issued on June 30, 1998, the disclosures of which are incorporated herein by reference in their entireties.

[0035] The load port modules 120 may have closable or access ports / openings 130P forming a closable interface, such as the BOLTS interface, between the EFEM interior and the exterior (e.g., clean room). The closable ports 130P are closed and sealed by the load port doors 1300. Each of the load port modules 120 may have a support area 228 for a transport container 150. A secondaryAty. Docket No. 390P017057-WO(PCT) holding area or station 334, where transport containers 150 may be temporarily buffered may be provided. The transport container support area 228 may provide automated movement of the transport container 150 supported thereon to a final of docked position at the load port 120. With the transport container 150 in the docked position, the load port door 130D engages the transport container 150 to open the transport container 150 while also opening the closable port 130P in the load port frame 129 (the load port frame may be coupled to a frame of the EFEM or form a part of the EFEM frame), to provide access to workpieces within the transport container 150 as well as access for transporting workpieces between the transport container 150 and the EFEM interior.

[0036] With reference to Figs. 1, 2, and 3 (Fig. 3 being a perspective view of the load port module 120 of the processing apparatus), the load port module 120 has a frame 129 and a load port door 130D. The frame 129 has a closable port or opening 130P disposed so as to communicate with a substrate carrier / transport container 150A, 150B mated to the load port module 120. The transport container 150A, 150B has a carrier / container door 151 that opens and closes the transport container 150A, 150B. The load port door 130D is connected to the frame 129 and arranged to open and close the closable opening 13 OP. The load port door 130D has a load port door I30D to container door 151 interface LPF that couples the load port door 130D with and opens the container door 151. The load port door 130D to container door 151 interface is re-configurable so that the interface switches configurations from a first interface configuration to a second interface configuration (see Figs. 11A-11C) different than the first interface configuration. The first and second interface configurations respectively conform with different corresponding container door fits (e.g., latch locations, locating pin locations, etc.), of different container doors 151 (such as of the 25 workpiece container and of the 12 workpiece container), so that the load port door 130D commonly fits up and couples with different carrier doors 151 each with carrier door fit arrangements different from each other. In each of the first interface configuration and second interface configuration, the load port door 130D couples singularly with the corresponding different fit of different container doors 151. The load port door I30D to container door 151 interface switches automatically, or manually, between the first and second interfaceAty. Docket No. 390P017057-WO(PCT) configurations. In the first configuration the load port door 130D fits and couples to the carrier door 151 of the twenty-five (25) substrate container 150A, and in the second configuration the load port door 130D fits and couples to the carrier door of the twelve (12) substrate carrier 150B (see, e.g., Figs. 1, 2, and 11 A-l 1C) although, substrate containers holding any suitable number of substrates may be employed.

[0037] The frame 129 may generally define a transport container holding or support area 136 and the closable port 130P through which substrates are transported in and out of the mini-environment inside the front section housing 116. The housing 116 and load port module 120 of the EFEM are connected to form a chamber or space 225 that is substantially closed from the exterior and provides a controlled or mini-environment within the front section 112. For example, the front section 112 may include a controlled air flow system (not shown), such as vents, louvers, laminar flow system, to avoid particulate contamination from entering the mini-environment in the front section 112. The transport container holding area 228 of the load port module 120 may have a primary or first support station 336 and a secondary support station 334. Each station 336, 334 of the holding area 228 may be capable of holding a transport container 150, though the transport container holding area 228 may have more or fewer holding stations, and each holding station may be capable of supporting any desired number of substrate transport containers 150. The transport container 150 shown seated on the holding stations 336, 334 are depicted for example purposes as being FOUP style containers, though the holding stations 336, 334 of the load port holding area 228 may be capable of supporting any desired type of transport container. In Fig. 2, the front section 112 has the load port modules 120 located on the front face 112F of the front section 112 for example purposes. In this location, the load port modules 120 may be positioned to facilitate placement and removal of transport containers 150, onto at least one holding station 336, 334 of the load port module holding area 228, using any suitable automated material handling system (AMHS). The load port module holding area 228 projects forwards from the face 112F of the front section 112, and access for removal / placement, with the AMHS, of the transport containers 150 onto the holding area 228 may be from the top or front. The load port modules 120 may beAty. Docket No. 390P017057-WO(PCT) located on other sides of the front section 112 as desired. The load port modules 120 may be located on two or more sides of the front section 112. As seen in Fig. 3, the load port modules 120 may have an extension zone or region 338 projecting outwards from the base plate of the respective load port module 120.

[0038] Referring now also to Fig. 4, there is shown a perspective view of the frame 129 of the load port module 120. For exemplary purposes, the frame 129 may comprise a base plate 492 and stiffener rails 494. The base plate 492 and rails 494 may be made of steel, such as any commercially available standard structural steel (e g. ASTM A36) rolled or stamped plates or sections of desired thickness to suit the anticipated loads on the frame. The base plate and rails may be made of high-strength steels (e.g. ASTM A242) in order to further reduce the weight of the load port modules, though any desired material may be used. The base plate 492 may be sized as desired relative to the dimensions of the front (mounting) face 112F of the front section 112. For exemplary purposes, the front section 112 in Fig. 2 has two load port modules 120 that are substantially the same, (though the front section 112 may have fewer or more load port modules as desired). The frame 129 of each load port module 120 may extend for example about half the width of the front section. The height of the base plate 492 may extend for example the full height of the front section 112, or some lesser portion thereof to allow proper interface and seal with the front section housing 116. As seen in Fig. 4, the rails 494, which are illustrated as having a general channel cross-section for example purposes, are placed at the lateral edges of the base plate 492. The rails 494 may have any desired standard rolled or stamped section (e.g. T, angle, etc.) and may be located as desired on the base plate 492 to provide the frame 129 with the desired strength and flexural stiffness. If the desired shape / size is not standardly available, the desired shape / size may be readily formed by cutting part of one or more flanges on a standard section. The base plate 492 may have raised flanges 492F (see Fig. 4) at one end and may be shaped (e.g. by stamping or rolling) to form an outward projecting channel 2910 at another end. The rails 494 and raised flanges 492F and channel 2910 may be connected to form a general structural box configuration (which minimizes frame warping) and provides a self-supporting structure. The base plate 492Aty. Docket No. 390P017057-WO(PCT) may be shaped in any other desired manner, and the rails 494, which may be more or fewer in number, may be positioned as desired to provide the desired structural properties. The base plate 492 and rails 494 may be welded together, such as by SMAW, MIG or TIG welding. The base plate 492 and rails 494 may be structurally joined in any suitable manner such as brazing, pressure or chemical bonding or mechanical fastening. The base plate 492 and rails 494 may be integrated during formation of the frame 129, so that the frame 129 is a one-piece member of unitary construction. As a self-supporting structure, the frame 129 around the load port module 120 may be configured to be transported, with all load port module components (described below) mounted to the frame, as a unit with no further brazing or support to maintain structural adequacy.

[0039] As illustrated in Fig. 4, the base plate 492 has opening 2912, formed in portion 2910, and opening 2914 formed in the lower portion of the base plate 492. An opening 2916 is formed in the base plate 492 defining the access port 130P of the load port module 120. Opening 2912 may be centered on the base plate center line, and is sized to suit a graphics display of any suitable user interface 301 (see Fig. 3) such as described in, for example, United States patent number 8,821,099 issued on September 2, 2014, the disclosure of which was previously incorporated herein by reference in its entirety. The opening 2912 may have any suitable location, size and shape for locating and mounting a graphics display to the frame 129, or the load port module 120 may not include a display opening 2912 and corresponding display, or the display may be mounted to the frame 129 in any suitable manner. As seen in Fig. 4, the opening 2914, in the lower portion of the base plate 492, is substantially surrounded by generally box shaped wall 498. The box shaped wall 498, may be made of sheet metal, such as steel, and may be joined to the base plate 492 in any suitable manner including, but not limited to, spot welding, chemical bonding, or mechanical fasteners. The box shaped wall 498 may be located in extension portion 338 (see Fig. 3) of the load port module 120. The box shaped wall 498 may form a casement and support for an operating mechanism of the access port door 130D (see Fig. 2). As described further below, the door operating mechanism extends through opening 2914 for engagement with the door 130D. Locating the door operating mechanism within the extension portion 338, removes or at leastAty. Docket No. 390P017057-WO(PCT) minimizes the space dedicated for the door operating mechanism within the front section housing 116. This in turn may allow reduction of the size of the front section housing 116 compared to conventional apparatus.

[0040] The opening 2914 in the base plate 492 may not be closed or sealed, resulting in free communication between the interior of the front section housing 116 and the space within the box walls 498. The box walls 498 may be covered by flashing or cover 338C (see Fig. 3) that closes the front side of box walls 498. The cover 338C may be sealed to base plate 492 or other structure of the load port module 120, so that when the load port module 120 is connected to front section housing 116, the mini -environment within the front section 112 may extend through opening 2914 into the extension region 338 of the load port module 120, though the frame 129 of the load port module 120 may not have an opening for the door operating mechanism to extend through the frame 129. A portion of the frame 129 may be removably mounted to provide ready access to load port module components.

[0041] Still referring to Fig. 4, the frame 129 has support structure 496 for the transport container holding area 228. The support structure 496 may be formed by rolling, stamping or bending steel (or any other desired metal) plate or sheet into the desired configuration. For exemplary purposes, the support structure 496 is formed to have a flanged channel configuration with a flat upper section 496H, vertical end walls 496E and inwardly projecting flanges 496F. Support structure 496 may be of unitary construction, such as when formed by bending a single piece of sheet metal into the desired configuration. The support structure 496 may be a weldment or assembly of a number of pieces such as, for example, forming the support structure 496 into two similar pieces joined at a center seam line by welding, brazing, bonding or fastening. After formation of the support structure 496, the support structure 496 may be attached to the base plate 492 of the load port frame 129 in any suitable manner including, but not limited to, spot welding, brazing, bonding or mechanical fastening. As shown in Fig. 4, the support structure 496 is located above the box wall 498, and if desired the box wall 498 may be extended and be joined to the support structure 496, thereby providing increased rigidity to the frame 129. The support structure 496 may beAty. Docket No. 390P017057-WO(PCT) extended so that it is tied in structurally, for example by welding (or in any other suitable manner), to the rails 494 bounding the lateral sides of the base plate 492, again for increased rigidity, though the transport container holding area 228 support structure 496 may not be joined to the side rails of box wall 498 of the load port module frame 129.

[0042] Referring also to Fig. 5, a rear perspective view of the load port module 120 (e.g., opposite to the perspective view in Fig. 3) is illustrated. As seen in Figs. 4 and 5 the frame 129 may be provided with controlled or datum surfaces 496D1, 496D2, 594D1-594D4 to provide proper orientation and alignment between interfacing items mounted to or placed on the load port module frame, as well as provide proper orientation and alignment of the load port module 120 itself (and any components mounted thereto) and any other interfacing components of the front or rear sections 112, 114 of the processing apparatus 100, 100C. For example, datum surfaces indicated by lines 2916D1, 2916D2 (see Fig. 4) may be established around the edges of the opening 2916 in base plate 492. The surfaces at the edges of the opening 2916 may be contacted by the load port door 130D (see also Fig. 3) when the port is closed, and it is desired that flatness as well as planarity (relative to both vertical and horizontal axis) of the surfaces be controlled. The transport container holding area 228 support structure 496 may also be provided with datum surface, such as for example surface(s) 496D1, 496D2 that establish the flatness as well as orthogonality of the support structure 496 relative to for example the datum surfaces 2916D1, 2916D2 at the opening 2916. This may help ensure proper and repeatable alignment for interface between any transport container 150 positioned on the holding area 228 and the load port door 130D of the access port 130P. As seen in Fig. 5, datum surfaces / lines 594D1-594D4 may be provided on the rear side of the load port module’s frame 129 to control the flatness and planar orientation of the surfaces 5941 interfacing the load port module 120 to the front section housing 116 (or in some aspects, to a load lock and / or transfer chamber). The interface surfaces 5941 may be provided with a BOLTS type interface (not shown) for securing the load port module 120 and front section housing 116 (or to a load lock 114L and / or transport chamber 114C) to each other. The load port module 120 may have any other desired interface type configured for coupling the load port module 120 to one orAty. Docket No. 390P017057-WO(PCT) more of the front section housing 116, load lock 114L, and transport chamber 114C. Regardless of the type of interface, the system of datum surfaces / lines 594D1-594D4 on the rear side of the load port module’s frame 129 may provide a reference system enabling repeatable alignment of the load port module 120, and components mounted thereto, to the front or rear sections 112, 114 of any apparatus similar to apparatus 100, 100C. This may enable load port modules 120 with frames similar to frame 129 to be interchanged between different apparatus 100, 100C. The datum surfaces on the frame 129 may be provided, if desired after completion of fabrication of the frame 129, by local machining or in any other suitable manner. The datum surfaces may be identified by using a test bench or jig, or using an optical alignment system. Machinable stock or shims may be provided as desired to build up surfaces prior to forming the datum surfaces. Adapters may be employed to interface the load port module 120 to the front section housing 116, load lock 114L, and transport chamber 114C.

[0043] Referring again to Figs. 1-4, the transport container holding area 228, of the load port module 120 may have both the primary support station 336 (also referred to herein for exemplary purposes as an upper support station) and the secondary support station 334 (also referred to herein for exemplary purposes as a lower support station), each support station 336, 334 holds or supports a transport container 150 as shown in Figs. 1 and 2. The lower support station 334 is located generally under the upper support station 336. The lower support station 334 includes opposing support members 434L that conformally engage any suitable mating structure of the transport container 150 so that when placed in the lower support station 334, the transport container 150 is supported from the members 334L. Figs. 6A and 6B are respectively front and bottom perspective views of an exemplary substrate transport container 150, that is substantially similar to transport containers 150A, 150B. The transport container 150 in Figs. 6A and 6B is shown as having FOUP type configuration for exemplary purposes only, but the transport container 150 may have any other suitable configuration for transporting workpieces and interfacing with the load port 120. The transport container 150 generally has a casing T2 and a casing cover or door 151 removably connected to the casing T2. The casing T2 has an upper surface T6 with a fixture T8 projectingAty. Docket No. 390P017057-WO(PCT) therefrom. The fixture T8 may include lateral flanges or outwardly projecting seating surfaces T10 that are offset a distance from the upper surface T6 of the casing T2. The seating surfaces T10 may be part of a handling flange conforming to, for example, SEMI standard E47.1-1001. The seating surfaces T10 may serve for engaging the coupling portion (not shown) of a container transporter of any suitable automated material handling system and thereby supporting the container from the transporter. Referring again to Figs. 3 and 4, the support members 434L of the lower support station 434 on the load port module holding area 228, are shown as having an angle or general L shaped configuration. The support members 434L have inward projecting flanges 434F as shown. The support members 434L may have any other suitable shape or configuration. The support members 434L may be for example metal, plastic, or any other suitable material, and may be connected as shown in Fig. 3 to support structure 496 of the load port frame 129 in any suitable manner. The inwardly pointing flanges 434F are sized to be admitted between seating surface T10 (see Fig. 6A) and upper surface T6 of the transport container 150. The flanges 434F of the opposing support members 434L are sufficiently separated to allow insertion of support fixture T8 of the transport container 150 between the flanges 434F with the outward projecting seating surfaces T10 overhanging (at least partially) the corresponding flanges 434F. Accordingly, when loaded into the lower station 334, the transport container 150 is supported by seating surfaces T10 seated on the flanges 434F.

[0044] The transport container 150 may be manually positioned by an operator on the lower support station 334, by inserting the transport container 150 (in the direction indicated by arrow I in Fig. 3) so that fixture T8 is moved in between flanges 434F. The support members 434L of the lower support station 334 may have any other desired orientation to allow the transport container 150 to be positioned from any other desired direction. Removal of the transport container 150 from the lower support station 334 may be accomplished in a substantially reverse manner, with the operator manually withdrawing the container in the opposite direction from installation. The lower support station 334 provides the load port module 120 with another container stowage location where the operator may place a transport container 150 in the case when the upper supportAty. Docket No. 390P017057-WO(PCT) station 336 is either occupied by another transport container 150 or is in some state (such as testing) preventing placement of the transport container 150 on the upper support station 336. As noted before, the load port module 120 may not have the lower support station 334 in the transport container holding area 228.

[0045] Referring now again to Fig. 3, the upper support station 336 of the transport container holding area 228 on load port module 120, generally includes a base support or shelf 350 and a carriage or shuttle 352 movably mounted on the shelf 350. A shuttle drive system 354 operably connects the shuttle 352 to the shelf 350 and configured to move (e.g., with any suitable motors / actuators) the shuttle 352 on the shelf 350. The drive system 354 moves the shuttle (in the direction indicated by arrow M in Fig. 3) between a first position and a second position. The shuttle 352 is configured to allow placement of a transport container 150 thereon. The first shuttle position may be disposed such that the transport container 150 may be positioned automatically on (or picked off) the shuttle 352 by any suitable automated material handling system or operator. The second position to which shuttle 352 may be moved, is located so that the transport container 150 on the shuttle 352 may be docked to the load port door 130D (see Figs. 1 and 2) as will be described further below. When the shuttle 352 is in this second position, the transport container 150 seated thereon is located in what will be referred to for convenience purposes as the docked location. A controller 110 is communicably connected to sensors on the shuttle 352 and the shuttle drive system 354.

[0046] As seen in Figs. 1 and 2, the transport container 150 is placed on the shuttle 352 with the bottom surface of the transport container 150 seated on the shuttle 352. The shuttle 352 is hence configured to conformally engage the bottom of the transport container 150. Fig. 6B is a bottom view illustrating features of the bottom T3 of the exemplary transport container 150. The bottom T3 of the transport container 150 has features generally conforming to specification in SEMI E47.1. The bottom of the transport container 150 may have any suitable features for seating shuttle 352 on and deterministically locating the transport container 150 relative to the load port module 120. For exemplary purposes, the bottom T3 of the transport container 150 generally includesAty. Docket No. 390P017057-WO(PCT) carrier sensing pads T12, one each of a front end of line (FEOL) and back end of line (BEOL) information pads T14, T16, a container capacity (i.e. number of workpiece holding locations) information pad T18, and a box or cassette information pad T20. The bottom T3 may further include slots T22 for engagement with locating / kinematic coupling pins on the shuttle 352. A first recess T24 (also referred to herein as a locating recess) in the bottom T3 is provided as a first retention or locating feature. The bottom T3 of the transport container 150 also has a second retention feature T26 formed therein. The second retention feature T26 generally comprises a generally circular recess T30, formed into the bottom T3, that has an outer aperture T32 with substantially squared off edges T34 (forming engagement lips T36).

[0047] Figs. 7A-7D, are respectively a schematic perspective, a top plan, front, and side elevation views of the shuttle 352 and part of the support shelf 350 structure on which the shuttle sits (the support shelf 350 structure is visible only in Figs. 7C-7D). The shuttle 352 generally comprises a chassis or frame 755 and a cover 56 positioned over the chassis. The shuttle 352 may also generally have locating features 758 for helping locate the transport container 150 properly onto the shuttle 352, coupling features 760 for positive coupling of the seated transport container 150 to the shuttle 352, and detection system 762 for detecting the presence and accurate placement of the transport container 150 on the shuttle 352. Referring also to Fig. 8, which illustrates a partial cutaway view of the shuttle 352, a chassis 755 of the shuttle 352 may have any suitable shape, and may be made from any suitable material, able to support the static and dynamic loads associated with placement and removal of the transport container 150 on the shuttle 352 as well as movement of the transport container 150 and the shuttle 352 between the first and second positions. The chassis 755 may have a motion system (not shown) such as rollers or slides allowing free movement of the shuttle 352 (in the direction indicated by arrow M in Fig. 3) relative to the support shelf 350 of the load port module 120 frame 129. The support shelf 350, shown partially in Fig. 8, (see also Fig. 3) may be formed by support structure 496 of frame 129 (see Fig. 4). The support shelf 350 may include tracks or rails (not shown), formed on or depending from support structure 496 (for example the top plate 496H or side plates 496E) on which the motion system of the chassisAty. Docket No. 390P017057-WO(PCT)755 rides. Container locating features 758, coupling features 760, detection system 762 and cover756 are mounted to the chassis 755.

[0048] As seen best in Figs. 7A-7B, container locating features 758 on the shuttle 752 may include a projecting engagement member 764. For exemplary purposes, the engagement member 764 may have a general frusto-pyramidal shape, generally conformal to the shape of locating recess T24 (see Fig. 6B) in the bottom T3 of the transport container 150. The engagement member 764, may be anchored to the chassis 755, and project through a suitable opening in the cover 756 sufficiently above the upper surface 756U of the cover 756 to engage the locating recess T24 in the transport container 150 when the transport container 150 is seated on the shuttle 352. The engagement member 764 may have cam surfaces 764C for cooperating with the edges of the locating recess T24 in order to aid proper automatic positioning of the transport container 150 onto the shuttle 352, though the shuttle may not have an engagement member like member 764.

[0049] The shuttle 352 may have locating posts 766. Locating posts 766 may serve both as locating features aiding correct positioning of the transport container 150 on the shuttle 352, as well as to provide a means of positive coupling (i.e. kinematic coupling) the transport container 150 to the shuttle 352. As may be realized from Figs. 7B and 6B, the locating posts 766 are positioned on the shuttle 352 to cooperate with the slots T22 in the transport container 150 bottom T3. Locating posts 766, which may be formed from any suitable material, such as metal or plastic, may be anchored directly to the chassis 755 of the shuttle 352 as shown in Fig. 8. The locating posts 766 may project through (suitable holes in) the cover 756 to engage the slots T22 in the bottom T3 of the transport container 150 (see Fig. 6B). The posts 766 may define a supporting plane SPL (see Figs. 1, 2, 7C, 7D, and 11A) for the transport container 150 on the shuttle 352. The ends or tips 766T of the locating posts 766 may have a generally conical or rounded shape as seen in Figs. 7D and 8. This generally conical or rounded shape provides the desired three contact points between the shuttle 352 and bottom T3 of the transport container 150 for precise and repeatable definition of the support plane SPL for the transport container 150 on the shuttle 352. Locating posts 766 support the weight of the transport container 150, and may have aAty. Docket No. 390P017057-WO(PCT) configuration, such as radial flanges shown in Fig. 8, to distribute the transport container weight to the chassis 755. The conical tops 766T of the locating posts 766 may also operate as earning surfaces against the inclined sides of slots T22 in the transport container bottom T3 mechanically guiding the transport container 150 along the support plane SPL until the desired position (effected by the geometry of the slots T22 and the tops 766T of locating posts 766) of the transport container 150 on the shuttle 352 is established.

[0050] The detection system 762 of the shuttle 352 generally includes a number of switches 768 distributed over the area of the shuttle 352. The switches 768 may be located on the shuttle 352 to cooperate with the carrier sensing pads T12, the FEOL and BEOL info pads T14, T16, the container capacity pad T18, and cassette information pad T20 on the bottom T3 of the transport container 150. Fig. 7B illustrates the positions of the pads T12-T20 on the bottom T3 of the transport container 150 overlaid on the cover 756 and switches 768 of the shuttle 352. The switches 768 are generally of the same type and similar to each other and will be described below with reference to a representative switch. Different kinds of switches may be used in different locations on the shuttle 352, where the different kinds of switches correspond to the different types of information capable of being relayed to the given switch by the different information pads T16- T20 of the transport container 150. The architecture of representative switch 768 is seen best in Fig. 8. The switch 768 may be an electro-optic switch generally comprising a base or sensor portion 7680 and an actuation portion 7681. Actuation portion 7681 is spring loaded and is actuated by contact with a corresponding pad on the bottom T3 of the transport container 150. The sensor portion 7680 detects actuation of the actuation portion 7681 sending a signal to the controller 110 (also referred to herein as a control system). As seen in Fig. 8, sensor portion 7680 may be mounted on a printed circuit board or PCB 774 positioned on the chassis 755 of the shuttle 352. PCB 774 may have traces 768E formed therein for both power and signal transmission. The traces 768E may be terminated to suitable surface contacts (not shown) to which contact terminals of electronic components may be connected as desired (using any suitable means for mounting electronic components onto PCB’s including flush wave soldering). The contact terminals (bothAty. Docket No. 390P017057-WO(PCT) power and signal) of the sensor portion 7680 may be connected to the traces 768E in the PCB 774 in a similar manner. Mounting electronic components, such as the sensor portions of the switches 768 to a PCB with integral traces, may serve to eliminate the individual conductors, as well as their costly and time consuming installation on the chassis, that would otherwise be used to connect the components to the power supply and control system. The traces 768E in the PCB 774 may extend to a terminal connector (not shown) to which, for example, the connectorized end of a flexible wire harness 772 (see also Fig. 7D) may be mated. As may be realized the wire harness may link the traces 768E in the PCB 774, and hence the electronic components such as the sensor portions of the detector switches 768 to the control system 100 (see Fig. 3) and power supply (not shown). The sensor portion 7680 may have for example a suitable light source such as a light emitting diode or LED and a photo detector such as a photo cell. In the unactivated state of the switch 768, the light source may, for example, illuminate the photo cell which causes the sensor portion to send a signal (via traces 768E) to the control system 110 that is interpreted by the control system 110 as being the inactivated state of the switch 768. Upon obstruction of the light source, such as by some portion of the actuation portion 7681 of the switch 768, the signal from the photo cell changes, which in turn is read by the control system 110 as the switch 768 now being in the actuated state. The sensor portion may be configured so the light source is obstructed when the switch 768 is in the inactivated state, and illuminating the photo detector when in the activated state.

[0051] As seen in Fig. 8, the actuation portion 7681 of the switch 768 is integrated into the cover 756 of the shuttle 352. The spring biasing the actuation portion 7681 is, for example, formed by a portion of the cover 756. The cover 756 of the shuttle 352 may be made for example of plastic, or sheet metal or any other suitable material. The cover 756 may be a one-piece member (i.e. of unitary construction). In the case of the cover 756 being plastic, it may be formed for example by injection molding or any other suitable process. As seen in Figs. 7A-7D, the cover 756 may have a general hexahedron shape, with an upper surface 756U and perimeter walls 756W projecting from the upper surface 756U. The shuttle cover 756 may have any other suitable shape. As seenAty. Docket No. 390P017057-WO(PCT) best in Fig. 3, when mounted on the chassis 755, the cover 756 may serve to substantially enclose the chassis 755 within, with only a minor gap being provided between the bottom edge of the cover perimeter walls 756W and shelf 350 to facilitate free relative movement of the shuttle 352 while minimizing entry of dust or other particulates into the shuttle systems. The top surface 756U of the cover 756 has through holes 756H formed therein as shown in Fig. 7A. The holes 756H allow locating posts 766 to extend through the cover 756 as seen best in Fig. 8. The holes 756H may serve to position the cover 756 onto the shuttle chassis 755 as also shown in Fig. 8 (the clearance between the hole edge and corresponding locating post 766 is sufficiently small, so that the locating post 766 provides accurate positioning of the cover 756 relative to chassis 755). The rims of the holes 756H are seated on collars 766C of the locating posts 766, as shown in Fig. 8, thereby supporting the cover 756 from the locating posts 766. The cover 756 may have any other desired mounting system for attaching the cover 756 and chassis 755.

[0052] As seen in Figs. 7A-7B, the upper surface 756U of the cover 756 has a number of resiliently flexible tabs or fingers 770 formed therein. The tabs 770 may be formed by any suitable means such as cutting the top surface 756U of the cover 756. The number of tabs 770 may coincide with the number of switches 768 of detection system 762. For exemplary purposes, there are eight tabs 770 formed into the top surface 756U of the cover 756. The cover 756 may have any suitable number of flexible tabs 770 formed therein. Flexible tabs 770 may be formed in any other desired surface of the cover 756. The tabs 770 may be substantially similar to each other, and may have similar resiliently flexible characteristics. The shape (i.e. length, cross-section) of different tabs may vary to provide the different tabs with different flexibility characteristics.

[0053] The tips 770E of the tabs 770 are located on the cover 756 so that when the cover 756 is mounted to the chassis 755 each tip 770E is positioned substantially over the sensor portion 7680 of the corresponding switch 768 (see Fig. 8). The tabs 770 may be placed so that any suitable portion of the tab 770 (i.e. the tab mid-section) is positioned over the sensor portion 7680 of the corresponding switch 768. The tab orientation on the upper surface 756U of the cover 756 may be otherwise selected as desired to provide the tab 770 with the flexibility of an unrestrainedAty. Docket No. 390P017057-WO(PCT) cantilever. The orientations of tabs 770 shown in Figs. 7A-7B are merely exemplary, and the tabs 770 may have any other suitable orientation.

[0054] As seen best in Fig. 8, the actuation portion 7681 of the switch 768 is mounted or located on the tip 770E of the corresponding tab 770. The actuation portion 7681 may be of unitary construction with the tab 770 (formed for example during the molding process of the cover upper surface) or may be mounted to the tab 770 in any suitable manner including, but not limited to, such as chemical bonding, mechanical bonding, welding, and mechanical fasteners. The actuation portion 7681 projects sufficiently from the upper surface 756U of the cover 756 to come in contact with the corresponding pads T12-T20 of the transport container 150 placed on the locating posts 766, and by this contact generate sufficient deflection of the respective tab 770 to move the interrupter flag portion 768F of the actuation portion 7681 to (e.g. obstruct the light source and) cause activation of the switch 768. When the transport container 150 is removed from the shuttle 352, the flexible tab 770 resiles back to the undeflected position returning the switch 768 to the inactivated state. As may be realized, if the transport container 150 is not properly placed on the shuttle 352, there may be some misalignment between pads T12-T20 of the transport container 150 and at least some of the actuation portions 7681 of the switches 768 so that at least some of the switches 768 do not activate. The signal combination of some switches 768 activated and others not, may be interpreted by the control system 110 as an indication of improper placement of the transport container 150 on the shuttle 352. The control system 110 programming may then prevent motion of the shuttle 352 and command corrective action to correct placement or removal of the transport container 150 from the shuttle 352.

[0055] Shuttle 352 may have a coupling feature 760 (see Figs. 7A, 7B, and 8) for positive coupling of the transport container 150 to the shuttle 352. Locating posts 766 serve as kinematic coupling locating features that engage the transport container 150 and locate the transport container 150 relative to the shuttle 352 during shuttle 352 motion. The shuttle coupling feature 760 includes a container clamping system 761. The clamping system 761 generally includes a clamp key 776 that is both movable up and down and rotatable (e.g., by any suitable actuator(s) / motor(s) 774 ofAty. Docket No. 390P017057-WO(PCT) the clamping system 761 that are drivingly coupled to the clamp key 776) to engage the transport container through container retention feature T26 (see Fig. 6B) and clamp the transport container 150 to the shuttle 352 in a manner substantially similar to that described in, for example, United States patent number 8,821,099 issued on September 2, 2014, the disclosure of which was previously incorporated herein by reference in its entirety.

[0056] Referring now again to Figs. 3 and 7A-7D, shuttle 352 may be moved (in the direction indicated by arrow M in Fig. 3) between the first or loading position and the second or docked position of the shuttle 352 by drive system 354. As seen best in Figs. 7C-7D, the shuttle drive system 354 generally includes an electric motor 753 driving a lead screw 757. The shuttle 352 may have any suitable type of drive system such as a pneumatic or hydraulic drive system. The electric motor 753 may be any suitable type of motor such as an A.C. (alternating current) or D.C. (direct current) motor, a stepper motor, or servo motor. Motor 753 may be fixedly mounted to the support shelf 350 structure. The lead screw 757 is connected to the output shaft of the motor 753. The motor 753 rotates the lead screw 757 both clockwise and counterclockwise. The lead screw 757 is drivingly engaged to the chassis 755 of the shuttle 352. Engagement between the lead screw 757 and chassis 755 may be provided in any suitable manner such as for example a threaded bushing fixed to the chassis 755 and threadably engaged by the lead screw 757. Rotation of the lead screw 757 by motor 753 results in axial motion of the bushing over the lead screw 757, and hence of the chassis 755 and shuttle 352 relative to the support shelf 350 to which the motor 753 is fixed.

[0057] As seen in Fig. 7C the motor 753 is communicably connected to the controller 110 by a suitable circuit 791. The controller 110 may provide both command signals and power (from a suitable power supply) to motor 753 over circuit 791. The motor 753 may include a motor encoder 758E (see Fig. 7D) for sending position indication data to the controller 110. The controller 110 may be capable of processing the motor encoder data to identify the position of the shuttle 352 on the load port module 120. In other aspects, a linear encoder may be mounted between the shuttle 352 and support shelf 350 to identify the shuttle 352 position during movement. As seen in Fig.Aty. Docket No. 390P017057-WO(PCT)7C, circuit 791 may also include a pinch protection circuit 790 configured to detect an obstruction to shuttle motion. The pinch protection circuit 790 may include a current sensor 792, of any suitable type, and of desired sensitivity for measuring current changes to motor 753. The current sensor 792 is configured to monitor the current supplied to motor 753 through circuit 791. Measurement signals from the sensor 792 are transmitted by circuit 790 to the controller 110. The pinch protection circuit 790 may be a closed loop or open loop system. As may be realized, when the shuttle 352 is being advanced by the drive motor 753 and encounters an obstruction, the current supplied to the motor 753 (via circuit 791) increases in general proportion to the level of resistance to shuttle motion provided by the obstruction. The “excess” current is detected by sensor 792 and the information is relayed to the controller 110 via circuit 790. The sensor 792 may be capable of sending raw or unprocessed sensor data to the controller 110. The controller 110 may be programmed (such as with any suitable non transitory algorithm) to process the data from the sensor 792 to identify, from noise, when excess current, of sufficient level and of sufficient duration to indicate an obstruction, is being supplied to the motor 753. Controller 110 may include an auto-reverse program wherein upon identification of the excess current (and hence of the obstruction to shuttle motion) the controller 110 sends a command signal to motor 753 stopping the previously commanded operation and reversing the motor direction. The rotation of the lead screw 757 effecting movement of the shuttle 352 is thus also reversed thereby causing the movement of the shuttle 352 to be reversed away from the obstruction. The shuttle 352 may be reversed a predetermined distance established from encoder 753E information. The current sensor 792 may be programmable to select desired set points for detecting the excess current. In this case, the current sensor 792 may send a suitable signal to the controller 110 upon detection of an excess current having a level and duration exceeding the programmed set points. Upon receiving the signal from the current sensor 792, the controller 110 accesses the auto-reverse program in the controller memory. This provides superior obstruction detection and recovery system at a lower cost than conventional systems that employ a deflectable (i.e. pinch) bar.Aty. Docket No. 390P017057-WO(PCT)

[0058] Referring now again to Fig. 3, the load port module may have transport container advance detection system 390 (depicted schematically in Fig. 3). The container advance detection system 390 is a non-contact system to detect a feature of a transport container 150 mounted to and being advanced by the shuttle 352 and effect stopping the shuttle 352 so that when the transport container 150 is in the docked position the front face of the transport container 150 is in a desired repeatable location regardless of the tolerance variations between different transport containers 150. The load port shuttle advance motion is stopped so that there is a minimum clearance between the transport container 150 and the load port frame 129 without actual contact between them. Since container dimensions will vary, especially between manufactures, in conventional systems the shuttle 352 movement is generally adjusted for “worst case”, allowing an overly large clearance in most instances. The container advance detection system 390 of the load port module 120 overcomes the problems of conventional systems allowing different transport containers 150 to be stopped with the front face at location LI providing minimum clearance. The detection system 390 in this embodiment has a “thru beam” sensor (or other suitable sensor) configuration with an emitter or source of radiating energy and a detector for detecting the radiating energy from the emitter. For example, in this embodiment the detection system 390 may have a light source 392, such as a LED or laser diode on the terminal end of an optical fiber connected to a suitable remote light source. The system 390 may also have a suitable light sensing portion 394 such as a photo cell for sensing the light beam from the source 392. As seen in Fig. 3 the light source 392 and sensor 394 are positioned on opposite sides of the shuttle 352 and at a desired height so that the transport container 150 mounted and transported by the shuttle 352 will break the light beam B emitted by the source 392 and illuminating at least the sensing part of sensor 394. Though not shown in Fig. 3, the light source 392 and sensor 394 may be housed in suitable covers for contact and particulate protection and to prevent inadvertent interruption of the beam by objects other than the container transported by shuttle 352. As seen in Fig. 3, the light source 392 and light sensing portion 394 are positioned at an offset distance in the direction of shuttle travel (indicated by arrow M in Fig. 3) so that the light beam B is spaced any suitable distance d from the location LI of the front face of the transport container 150 when brought to the docked position by the shuttle 352. As may be realized, theAty. Docket No. 390P017057-WO(PCT) front face of the transport container 150 advanced by the shuttle 352, breaks the beam B when at distance d from the docked position location LI . The controller 110 is programmed with distance d. The controller 110 is programmed with any suitable algorithm that uses shuttle movement information, such as may be provided to the controller 110 by motor encoder 753E (see also Fig. 7D), and the distance d to determine when shuttle advance movement is to be stopped so that the front face of the transport container 150 on the shuttle 352 is at location LI. Here, when the front face of the advancing transport container 150 breaks beam B, the light sensing portion 394 sends a suitable signal to the controller 110 informing the controller 110 of the detection of the transport container front face. The controller 110 then may determine when to command the shuttle advance to stop as noted above, and sends the command to the shuttle drive section 354 at the correct time. In this manner, each transport container 150 transported by the shuttle 352 is appropriately positioned in its docked location to have the container front face at location LI regardless of the dimensional variation between transport containers 150.

[0059] With the transport container 150 in the docked position, as shown in Figs. 1 and 2, the door 151 of the transport container 150 may be engaged by the load port door BOD of the load port module 120 access port BOP. The door 151 in the front face of the transport container 150 is schematically illustrated in Fig. 6A (see also Fig. 9). The door 151 may include latch systems T42 that when engaged retain the door 151 in the transport container housing TB. Examples of such latch systems for the container door 151 are disclosed in, for example, United States Patent No. 5,772,386, issued June 30, 1998 and incorporated by reference herein in its entirety. The door latch systems T42 may include a pivotable hub T44, to which latch tabs 962 may be articulately linked. Rotation of the hub T44 causes actuation of the latch tabs 962 to engage and disengage the container housing TB. The latch hub T44 is accessible through latch key access holes 153 A, 153B in the door 151. The door 151 may have locator pin holes 152A, 152B. Referring again to Fig. 3 (see also Fig. 9), the load port door BOD of the load port module 120 has locator pins 600A, 600B, 600C and latch keys 610A, 610B, 610C, 610D in a complementary or matching configuration to the locator pin holes 152A, 152B and latch key access holes 153 A, 153B in theAty. Docket No. 390P017057-WO(PCT) door 151 of the transport container 150. The locator pins 600A-600C and latch keys 640A-610D in the load port door 130D may be similar to locator pins and latch keys in United States patent number 5,772,386 (previously incorporated by referenced herein).

[0060] The latch keys 610A-610D of the load port door I 30D conform to the shape of the key access holes 153 A, 153B in the container door 151 (see Fig. 9, where the latch keys may or may not have rollers 998 to reduce friction between the latch key and the transport container door 151) and key hole in the hub T44 of the latching system T42. When the load port door I30D engages the container door 151, selected (as will be described herein) latch keys 610A-610D on the load port door 130D enter through key access holes 153A, 153B into the key holes formed in the latch hubs T44 of the transport container 150. Rotation of the selected latch keys 610A-610D causes rotation of the hubs T44 and actuation of the latch system T42 to engage / di sengage the latch tabs 962 thereby locking or unlocking the container door 151 from the transport container housing TB.

[0061] Referring also to Figs. 5, 9, and 11 A-l 1C, the latch keys 610A-610D are rotatably mounted in the load port door I 30D structure. The latch keys 153A-153D may include spindle shafts 122S that are pivotally held in the load port door 130D. The far ends of the spindle shafts 122S are shown in Fig. 5. Fig. 5 also shows the drive system 124 for operating the latch keys 153A-153D and at least one of the locator pins 600B, 600C.

[0062] As seen from Fig. 5, the latch keys 610A-610D may be independently driven. The drive system 124 includes servo motors 126A, 126B, 126C, 126D (or any other suitable motor), one for actuating each corresponding latch key 610A-610D. Servo motor 126A is linked by a respective transmission that is schematically illustrated in Fig. 5 as the line connecting the servo motor 126A to the spindle shaft 122S of latch key 610A. Servo motor 126B is linked by respective transmission that is schematically illustrated in Fig. 5 as the line connecting the servo motor 126B to the spindle shaft 122S of the latch key 610B. Servo motor 126C is linked by respective transmission that is schematically illustrated in Fig. 5 as the line connecting the servo motor 126C to the spindle shaft 122S of the latch key 610C. Servo motor 126D is linked by respective transmission that isAty. Docket No. 390P017057-WO(PCT) schematically illustrated in Fig. 5 as the line connecting the servo motor 126D to the spindle shaft 122S of the latch key 610D. As seen in Fig. 5, the servo motors 126A-126D and the respective transmissions linking the servo motors 126A-126D to the respective spindle shafts 122S are independent from each other so that actuation of each latch key 610A-610D is independent of each other latch key 610A-610D. The servo motors 126A-126D may be communicably connected to the controller 110 to receive operating commands ordering motions of the servo motors 126A- 126D, and to send suitable signals to the controller 110 identifying the motion accomplished by the servo motors 126A-126D in response to movement commands. If desired, the controller 110 may synchronize actuation of latch key pairs (e.g., actuation of latch keys 126A, 126B may be paired while the actuation of latch keys 126C, 126D may be paired depending on which transport container 150A, 150D is seated on the shuttle 352) to move through substantially the same range of motion at substantially the same time. Otherwise, the controller 110 may allow each latch key 610A-610D in the respective pair of latch keys to rotate at its optimum speed and await signals from the servo motors 126A-126D of the actuated pair of latch keys that the commanded motion is completed. Unlocking of the container door latch system T42 (by activation of a pair of latch keys of the load port door 130D as described above) releases the container door 151 from the container housing TB. Upon release, the latch keys 153A-153B engaged into the container door 151 serve to support the container door 151 from the load port door 130D (e.g., the container door 151 is coupled to the load port door 130D by the latch keys 153A-153B engaged into the container door 151).

[0063] Still referring to Figs. 5, 9, 11 A-l 1C and also to Figs. 1 and 2, as noted above, the load port module 120 is configured to support transport containers 150A, 150B having different container capacities. As such, at least some of the latch key access holes 153 A, 153B and locator pin holes 152A, 152B for transport containers 150A, 150B may be disposed at spatially different locations relative to the support plane SPL (see Figs. 1, 2, 7C, 7D, and 11 A) with the respective transport container 150A, 150B seated on the shuttle 352 of the load port module 120. For exemplary purposes only, and as noted herein, the transport container 150A is configured to hold 25Aty. Docket No. 390P017057-WO(PCT) workpieces while the transport container 150B is configured to hold 12 workpieces. To accommodate the larger workpiece capacity, the transport container 150A has a greater height than the transport container 150B. As such, the locator pin holes 152A, 152B for container 150A are located respectively at heights H2, Hl (see Fig. 11 A) from the transport container support plane SPL, while the locator pin holes 152A, 152B for container 150B are located respectively at heights H3, Hl from the support plane SPL. Likewise, the latch key access holes 153 A, 153B for the transport container 150A are located at height H5 from the support plane SPL, while the latch key access holes 153 A, 153B for the transport container 150B are located at height H4 from the support plane SPL. The controller 110 is configured to detect which type of transport container 150 is supported on the shuttle 352 of the load port module 120 and automatically select which of the locator pins 600A-600C and latch keys 153A-153D are to be employed for the type of transport container 150.

[0064] With the locator pins 600A-600C and latch keys 153A-153D protruding from the load port door 130D, at least some of the locator pins 600A-600C and latch keys 153A-153D may obstruct positioning the transport container 150 at the docking position as at least some of the locator pins 600A-600C and latch keys 153A-153D will be misaligned with the locator pin holes 152A, 152B and latch key access holes 153A, 153B of the transport container door 151 (e.g., depending on the transport container capacity). Here, the load port module 120 is provided with one or more linear actuators 126L1-126L4, 601A, 601B (see Fig. 5) that move a respective locator pin 600A-600C or latch key 153A-153D between a deployed position (e.g., protruding from the load port door 130D for engaging the door 151) and a retracted position (e.g., recessed within the load port door 130D or substantially flush with the surface of the load port door 130D so as not to contact the door 151).

[0065] Referring to Figs. 5, 6A, and 9-11C, as described herein, each of the latch keys 610A-610D are driven in rotation by a respective servo motor 126A-126D for engaging and disengaging the respective key access holes 153A, 153B. Each of the latch keys 610A-610D may also be linearly driven in direction 1000 (see Fig. 10) so as to retract one or more of the latch keys 610A-610DAty. Docket No. 390P017057-WO(PCT) into the load port door 130D or, in other aspects, flush with the load port door surface 130DS. The load port door includes a recess or opening 999 (see Fig. 9) for each latch key 610A-610D into which the respective latch key 610A-610D is retracted. Each latch key 610A-610D is coupled directly or through a transmission to a respective linear actuator 126L1-126L4 (see Fig. 5) that is configured to move the respective latch key 610A-610D in direction 1000 between the deployed position and the retracted position. The linear actuator 126L1-126L4 may be any suitable linear actuator including, but not limited to, pneumatic and electric actuators. As noted above, the latch keys 610A-610D may be deployed and / or retracted in pairs, where a single linear actuator may be employed for a pair of latch keys 610A-610D or more than one actuator may be employed for a pair of latch keys 610A-610D. For example, latch keys 610A, 610B (e.g., positioned for engaging transport container 150B) may be coupled to a common (i.e., a same) linear actuator through any suitable transmission so that the latch keys 610A-610B are deployed or retracted by the common linear actuator. Similarly, latch keys 610C, 610D (e g., positioned for engaging transport container 150A) may be coupled to a common (i.e., a same) linear actuator through any suitable transmission so that the latch keys 610C-610D are deployed or retracted by the common linear actuator.

[0066] One or more of the locator pins 600A-600C may also be driven linearly in direction 1000 for moving the one or more locator pins 600A-600C between the deployed position and the retracted position. For exemplary purposes only, locator pins 600B, 600C are coupled directly or through any suitable transmission to respective linear actuators 601 A, 60 IB, where the linear actuators 601A-601B are configured to move the respective locator pin 600B, 600C in direction 1000. All of the locator pins 600A-600C may be linearly movable in direction 1000 by a respective linear actuator. Where a locator pin is positioned on the load port door 130D such that the locator pin does not obstruct docking of the different transport containers 150A, 150B, the locator pin may remain in a deployed position and not be movable in direction 1000. Where a locator pin, such as locator pin 600A, is positioned on the load port door 130D such that the locator pin is common to the docking of the different transport containers 150A, 150B (the same locator pin is employed toAty. Docket No. 390P017057-WO(PCT) engage the different transport containers 150A, 150B), the locator pin may remain in a deployed position and not be movable in direction 1000.

[0067] For exemplary purposes, the load port door 130D in Fig. 11B is illustrated in a configuration for engaging the door 151 of the transport container 150B, where the transport container 150B has the container capacity of 12 workpieces. The locator pins 600A, 600B and the latch keys 610A, 610B are in the deployed position, while the locator pin 600C and latch keys 610C, 610D are in the retracted position.

[0068] For exemplary purposes, Fig. 11C illustrates the load port door 130D in a configuration for engaging the door 151 of the transport container 150A, where the transport container 150A has the container capacity of 25 workpieces. The locator pins 600A, 600C and latch keys 610C, 610D are in the deployed position, while the locator pin 600B and latch keys 610A, 610B are in the retracted position.

[0069] Additional locator pins and latch keys may be provided depending on and corresponding to the different types of transport containers having different container capacities.

[0070] As described herein, referring also to Fig. 6B, each transport container 150 includes a container capacity information pad T18. The detection system 762 (see Figs. 7A-7D) of the load port module 120, via the switches 768, detects at least the capacity of the transport container 150 employing the container capacity information pad T18. Based on at least the container capacity information obtained from the detection system 762, the controller 110 actuates one or more of the linear actuators 126L1-126L4, 601A-610B to deploy the corresponding locator pins 600A-600C and latch keys 153A-153D. For example, with the transport container 150A seated on the shuttle 352 of the load port module 120 (Fig. 12, Block 1200), the detection system 762 (from the container capacity information pad T18) detects at least the transport container capacity of the transport container 150A (Fig. 12, Block 1210). As an example, the detection system 762 detects that the transport container 150A is configured to hold a maximum of 25 workpieces (e.g.,Aty. Docket No. 390P017057-WO(PCT) transport container 150A is what is referred to as a 25 workpiece container). Based on this detected capacity information, the controller 110 selects the locator pins 600A, 600C and latch keys 153C, 153D for interfacing with the transport container 150A (Fig. 12, Block 1220). With the appropriate locator pins 600A, 600C and latch keys 153C, 153D selected, the transport container 150A is moved into the docked position on the load port module 120 (Fig. 12, Block 1230). With the transport container 150B seated on the shuttle 352 of the load port module 120, the detection system 762 (from the container capacity information pad T18) detects the transport container 150B is configured to hold a maximum of 12 workpieces (e.g., transport container 150B is what is referred to as a 12 workpiece container). Based on at least the detected capacity information, the controller 110 selects the locator pins 600A, 600B and latch keys 153 A, 153B for interfacing with the transport container 150B. With the appropriate locator pins 600A, 600B and latch keys 153 A, 153B selected, the transport container 150B is moved into the docked position on the load port module 120.

[0071] Referring now to Figs. 13A and 13B, another rear perspective view and side elevation view of the load port module 120 are respectively illustrated. As noted before, the load port door 130D is movably mounted to the load port module 120 frame 129. The load port door BOD may be moved relative to the frame 129 sufficiently to provide sufficient access through closable port 130P (see also Figs. 3 and 4) to facilitate workpiece transport through the closable port BOP. In Fig. 13A, the load port door BOD is shown in, what shall be referred to for convenience, a closed or initial position DI. When placed in the closed position DI, the load port door 30D may contact edges of the frame 129 or rim of the closable port 130P to substantially seal the closable port 130P in its entirety, or the load port door BOD in the closed position DI may not contact the frame 129 or form a seal around the closable port BOP, or the load port door BOD in the closed position DI may only partially obstruct the closable port BOP, and may be offset a distance from the edges of the frame 129 around the closable port BOP. The load port module 120 has a door transport system 1330 configured to move the load port door BOD from the closed position DI to an open position D2 shown substantially in Fig. 13B. The load port door BOD may be moved from theAty. Docket No. 390P017057-WO(PCT) closed position DI, after engagement to the transport container door 151 and release of the transport container door 151 from the container housing TB (see Figs. 6A and 6B). After release from the container housing TB, the transport container door 151 is supported by, and moves in unison with, the load port door 130D. The door transport system 1330 may be an electromechanical drive system, though any suitable drive system, such as pneumatic or hydraulic, may be used. The door transport system 1330 is shown schematically in Figs. 13 A and 13B. The door transport system 1330 may generally include a frame 1330F on which any suitable drive motor DM, such as a stepper motor is mounted. The frame 1330F also movably supports a carriage 1334 on which the load port door 130D is fixedly mounted. Any suitable linear drive transmission 1332 drivingly connects the drive motor DM, in the frame 1330F, to the carriage 1334 so that operation of the drive motor DM causes the carriage 1334 to move relative to frame 1330F along the transport system drive axis (indicated by arrow DA in Fig. 13B). Though movable along drive axis DA, the carriage 1334 is otherwise fixed relative to frame 1330F. The linear drive transmission 1332 for example may comprise a lead screw, driven by the output shaft of the drive motor DM, and engaged to a nut on the carriage 1334. As seen in Fig. 13A, the frame 133OF of the transport system 1330 is mounted by a movable mount 1338 to the frame 129 of the load port module 120. The movable mount 1338, which will be described in greater detail below, allows the door transport system 1330 frame 133OF to pivot (about a pivot axis of the movable mount 1338) relative to the load port module 120 frame 129 (as indicated by arrow P in Fig. 13B). When the frame 1330F is pivoted, the door transport system 1330 along with the carriage 1334 and load port door 1300 are also pivoted about the pivot axis of the movable mount 1338.

[0072] Fig. 13B shows best the position of the door transport system 1330 when the load port door 130D is in the closed position DI. Fig. 13B also shows best the relative tilt between the load port door 1300 and the drive axis DA of the door transport system 1330. The load port door 130D fixed on carriage 1334 has an orientation that defines an angle a with the drive axis DA of the door transport system 1330. When the load port door 130D is in the closed position DI, the front face of the load port door 130D may be substantially aligned with the vertical axis Z (i.e., the rearAty. Docket No. 390P017057-WO(PCT) face 130PR of the closable port 130P) of the load port module’s frame 129 reference system (as described above). Alignment of the load port door BOD in the closed position D 1 with the vertical axis Z ensures proper engagement between the load port door 130D and the transport container door 151 when the transport container 150 is in the docked position as noted herein. In this position, as seen in Fig. 13B, the frame 1330F is inclined so that the drive axis DA forms an angle a with the Z axis. To open the load port door BOD, the frame 1330F may be rotated, in the direction indicated by arrow P, to a position where the drive axis is vertical (in this position the drive axis is identified as DA’), and the carriage 1334 is then moved along the drive axis DA’ to position D2. Closing the load port door BOD is accomplished in a substantially similar but reverse manner to opening the load port door BOD. As seen in Fig. 13B, any suitable actuator 1336, such as an electric solenoid or pneumatic piston may be used to pivot the frame 1330F. As noted before, load port door BOD has a fixed orientation relative to the carriage 1334, and the carriage 1334, though translatable relative to the frame 1330F along axis DA’, maintain a fixed orientation relative to the drive axis throughout the full range of motion of the carriage 1334 on the door transport system 1330. The orientation of the load port door BOD remains fixed relative to the transport drive axis DA’. Rotation of the frame 1330F pivot 1338 causes commensurate rotation of the load port door BOD about the pivot 1338. For example, rotation of the frame 133 OF through angle a from the closed position DI (thereby positioning the transport system drive axis to the vertical position indicated by arrow DA’ in Fig. 13B) will move the load port door BOD sufficiently so that the transport container door 151 (see Fig. 6A), if supported on the load port door BOD, is moved through the closable port BOP (see also Figs. 1 and 2) into the front section 112. The position of the load port door BOD after pivot, but before translation, is schematically depicted in Fig. 13B by line D2A. In this position, the load port door BOD is angled relative to the vertical axis Z at angle a. The port door BOD may be translated down by the carriage 1334 along the drive axis (indicated by arrow DA’) to position D2 after the drive axis is moved to the vertical position.Aty. Docket No. 390P017057-WO(PCT)

[0073] Still referring to Figs. 13A and 13B, the door transport system 1330 is housed substantially inside the front extension section 338 of the load port module 120, both when the frame 1330F is in the inclined position (indicated by position I in Fig. 13B) and when the frame 1330F is rotated to its vertical position. Portions of the carriage supports (referred to herein as projection portions 1334S), to which load port door 130D is mounted, may project beyond the plane of the closable port 13 OP (as defined by base plate 492, see Fig. 4) only as sufficient to allow connection between the load port door 130D and carriage supports 1334. The connection between load port door 130D and carriage supports 1334 is such that the projection portions 1334S of the carriage supports 1334, project from the plane of the closable port 130P about the same distance as the thickness of the load port door 130D. As may be realized from Figs. 13A and 13B, placement of the door transport systems 1330 inside the front extension section 338 of load port module 120 (i.e., in front of the plane of the closable port 130P) commensurately eliminates the demand for space to accommodate the transport systems within the front section 112.

[0074] Movable mount 1338 that mounts the door transport system 1330 to the load port frame 129 is configured to allow sufficient pivoting movement of the door transport system 1330 (in direction indicated by arrow P shown in Fig. 13B) so that the load port door 130D may be moved between its closed and open positions. The movable mount 1338 generally comprises a base section 1338B and a resiliently flexible section 1338F connected to the base section 1338B. The frame 1330F is attached and supported from the resiliently flexible section 1338F of the flexible mount 1338, and the flexibility of the resiliently flexible section 1338F enables the movement of the door transport system 1330 and load port door 130D relative to the load port module 120 frame 129. The movable mount 1338 is representatively illustrated as having a general L shape or structural angle configuration with the base section 1338B at the bottom of the movable mount 1338 and the flexible section 1338F extending generally upwards from the base section 1338B. The movable mount 1338 may be of unitary construction and may be made of any suitable material such as metal, plastic or composite. The base section 1338B is illustrated, for exemplary purposes, as a flat frame; however, the base section 1338B may have any suitable shape with sufficientAty. Docket No. 390P017057-WO(PCT) mounting surfaces, such as flanges, for mounting the movable mount 1338 to the load port module 120 frame 129. The base section 1338B is highly rigid relative to the flexible section 1338F so that substantially all motion of the movable mount 1338 for movement of the door transport system 1330, as described above, is derived from resilient flexure of the flexible section 1338F.

[0075] The flexible section 1338F has a general leaf or semi-leaf spring shape cantilevered from the base section 1338B; however, the flexible section 1338F may comprise any suitable resiliently flexible elements such as torsion springs, or visco-elastic portions capable of generating the desired motion of the door transport system 1330 to move the load port door 130D between closed and open positions. In Figs. 13A and 13B, the flexible section 1338F of movable mount 1338 is depicted as being a single leaf spring member for example purposes only, and the flexible section 1338F may include any desired number of leaf spring members positioned alongside each other in a single plane, or arrayed serially in multiple substantially parallel planes, to deflect in unison and generate the desired movement of the door transport system 1330. The flexible section 1338F is attached in any suitable manner (such as by mechanical fasteners, metallurgical or chemical adhesive bonding) to the door transport system 1330 frame 133OF proximate the bottom 1330B (see Fig. 13 A) of the door transport system 1330 frame 1330F. The movable mount 1338 may be located at any desired location along the length of the door transport system 1330. As may be realized, the flexible section 1338F is oriented so that the leaf spring is in an undeflected configuration when the door is in its closed position (DI shown in Fig. 13B). Operation of actuator 1336 to displace the door transport system 1330 and open the load port door 130D, causes the deflection of the resiliently flexible section 1338F of the movable mount 1338 (such as by resilient bending of the leaf spring in the direction indicated by arrow P) allowing the load port door 130D to be rotated through angle a and to reach the open position D2A. Operation of the actuator 1336 to close the load port door 130D, causes the flexible section 1338F to return to its undeflected position. The flexible section 1338F is sized to sustain a substantially infinite number of door motion cycles. The movable mount 1338, movably supporting the load port door BOD relies on flexibility to facilitate motion, and hence, has no clearance gaps (as would be provided onAty. Docket No. 390P017057-WO(PCT) conventional movable mounts to enable relative sliding movement between movable parts). This may ensure that the motion of the load port door 130D between closed and open positions occurs substantially along the same path and hence the door returns to substantially the same closed position each and every time.

[0076] Referring to Figs. 1-11 and 13A-14, an exemplary method will be described in accordance with the present disclosure. The method includes providing the load port 120 (Fig. 14, Block 1400) for a substrate processing apparatus 100. The load port 120 includes a frame 129 and a load port door 130D. The frame 129 has a closable opening 130P disposed so as to communicate with a substrate carrier / transport container 150A, 150B mated to the load port module 120. The transport container 150A, 150B has a carrier / container door 151 that opens and closes the transport container 150A, 150B. The load port door 130D is connected to the frame 129 and arranged to open and close the closable opening 13 OP. The load port door 130D has a load port door BOD to container door 151 interface LPF that couples the load port door 130D with and opens the container door 151.

[0077] The method also includes re-configuring the load port door BOD to container door 151 interface (Fig. 14, Block 1410) so that the interface switches configurations from a first interface configuration to a second interface configuration (see Figs. 11A-11C) different than the first interface configuration. The first and second interface configurations respectively conform with different corresponding container door fits (e.g., latch locations, locating pin locations, etc.), of different container doors 151 (such as of the twenty-five workpiece container and of the twelve workpiece container), so that the load port door BOD commonly fits up and couples with different carrier doors 151 each with carrier door fit arrangements different from each other.

[0078] The method may include one or more of the following, employed individually or in any suitable combination with each other and / or in any suitable combination with the features described herein: in each of the first interface configuration and second interface configuration, the load port door BOD couples singularly with the corresponding different fit of differentAty. Docket No. 390P017057-WO(PCT) container doors 151; the load port door 130D to container door 151 interface switches automatically, or manually, between the first and second interface configurations; and in the first configuration the load port door 130D fits and couples to the carrier door 151 of the twenty-five (25) substrate container 150A, and in the second configuration the load port door 130D fits and couples to the carrier door of the twelve (12) substrate carrier 150B (see, e.g., Figs. 1, 2, and 11A- 11C).

[0079] The following features of the present disclosure are provided and may be employed individually, in any combination with each other, and / or in any combination with the features described above.

[0080] A load port for a substrate processing apparatus is provided. The load port includes: a frame with a closable opening disposed so as to communicate with a substrate carrier mated to the load port, the carrier has a carrier door that opens and closes the carrier; and a load port door connected to the frame and arranged to open and close the opening, the load port door having a load port door to carrier door interface that couples the load port door with and opens the carrier door. The load port door to carrier door interface is re-configurable so that the interface switches configurations from a first interface configuration to a second interface configuration different than the first interface configuration. The first and second interface configurations respectively conform with different corresponding carrier door fits, of different carrier doors, so that the load port door commonly fits up and couples with different carrier doors each with carrier door fit arrangements different from each other.

[0081] The load port includes one or more of the following, which may be employed individually or in any suitable combination thereof and / or in any suitable combination with the features described herein: in each of the first interface configuration and the second interface configuration, the load port door couples singularly with the corresponding different fit of different carrier doors; the load port door to carrier door interface switches automatically, or manually, between the first and second interface configurations; in the first configuration the load port door fits and couplesAty. Docket No. 390P017057-WO(PCT) to the carrier door of a twenty-five (25) substrate carrier, and in the second configuration the load port door fits and couples to the carrier door of a twelve (12) substrate carrier; the load port is configured to communicate with the substrate carrier configured as a front opening unified pod; and the first interface configuration includes at least one latch key and at least one location pin and the second interface configuration includes another latch key and another location pin that are different than the at least one latch key and the at least one location pin of the first interface configuration.

[0082] A substrate processing apparatus is provided. The substrate processing apparatus includes: a frame; and a load port coupled to the frame, where the frame having a closable opening disposed so as to communicate with a substrate carrier mated to the load port, where the substrate carrier has a carrier door that opens and closes the substrate carrier, the load port having a load port door connected to the frame and arranged to open and close the opening, the load port door having a load port door to carrier door interface that couples the load port door with and opens the carrier door; wherein the load port door to carrier door interface is re-configurable so that the interface switches configurations from a first interface configuration to a second interface configuration that is different than the first interface configuration, the first and second interface configurations respectively conform with different corresponding carrier door fits, of different carrier doors, so that the load port door commonly fits up and couples with different carrier doors each with carrier door fit arrangements different from each other.

[0083] The substrate processing apparatus includes one or more of the following, which may be employed individually or in any suitable combination thereof and / or in any suitable combination with the features described herein: in each of the first interface configuration and the second interface configuration, the load port door couples singularly with the corresponding different fit of different carrier doors; the load port door to carrier door interface switches automatically, or manually, between the first and second interface configurations; in the first configuration the load port door fits and couples to the carrier door of a twenty-five (25) substrate carrier, and in the second configuration the load port door fits and couples to the carrier door of a twelve (12)Aty. Docket No. 390P017057-WO(PCT) substrate carrier; the load port is configured to communicate with the substrate carrier configured as a front opening unified pod; and the first interface configuration includes at least one latch key and at least one location pin and the second interface configuration includes another latch key and another location pin that are different than the at least one latch key and the at least one location pin of the first interface configuration.

[0084] A method is provided. The method includes providing a load port for a substrate processing apparatus. The load port includes a frame and a load port door. The frame has a closable opening disposed so as to communicate with a substrate carrier / transport container mated to the load port module. The transport container has a carrier / container door that opens and closes the transport container. The load port door is connected to the frame and arranged to open and close the closable opening. The load port door has a load port door to container door interface that couples the load port door with and opens the container door. The method also includes re-configuring the load port door to container door interface so that the interface switches configurations from a first interface configuration to a second interface configuration different than the first interface configuration. The first and second interface configurations respectively conform with different corresponding container door fits, of different container doors, so that the load port door commonly fits up and couples with different carrier doors each with carrier door fit arrangements different from each other.

[0085] The method may include one or more of the following, employed individually or in any suitable combination with each other and / or in any suitable combination with the features described herein: in each of the first interface configuration and second interface configuration, the load port door couples singularly with the corresponding different fit of different container doors; the load port door to container door interface switches automatically, or manually, between the first and second interface configurations; in the first configuration the load port door fits and couples to the carrier door of the twenty-five (25) substrate container, and in the second configuration the load port door fits and couples to the carrier door of the twelve (12) substrate carrier; the load port communicates with the substrate carrier configured as a front opening unifiedAty. Docket No. 390P017057-WO(PCT) pod; and the first interface configuration includes at least one latch key and at least one location pin and the second interface configuration includes another latch key and another location pin that are different than the at least one latch key and the at least one location pin of the first interface configuration.

[0086] It should be understood that the foregoing description is only illustrative of the present disclosure. Various alternatives and modifications can be devised by those skilled in the art without departing from the present disclosure. Accordingly, the present disclosure is intended to embrace all such alternatives, modifications and variances that fall within the scope of any claims appended hereto. Further, the mere fact that different features are recited in mutually different dependent or independent claims does not indicate that a combination of these features cannot be advantageously used, such a combination remaining within the scope of the present disclosure.

[0087] What is claimed is:

Claims

1. Aty. Docket No. 390P017057-WO(PCT)CLAIMS1. A load port for a substrate processing apparatus, the load port comprising: a frame with a closable opening disposed so as to communicate with a substrate carrier mated to the load port, the substrate carrier has a carrier door that opens and closes the substrate carrier; and a load port door connected to the frame and arranged to open and close the opening, the load port door having a load port door to carrier door interface that couples the load port door with and opens the carrier door; wherein the load port door to carrier door interface is re-configurable so that the interface switches configurations from a first interface configuration to a second interface configuration that is different than the first interface configuration, the first and second interface configurations respectively conform with different corresponding carrier door fits, of different carrier doors, so that the load port door commonly fits up and couples with different carrier doors each with carrier door fit arrangements different from each other.

2. The load port of claim 1, wherein in each of the first interface configuration and the second interface configuration, the load port door couples singularly with the corresponding different fit of different carrier doors.

3. The load port of claim 1, wherein the load port door to carrier door interface switches automatically between the first and second interface configurations.

4. The load port of claim 1, wherein the load port door to carrier door interface switches manually between the first and second interface configurations.

5. The load port of claim 1, wherein in the first interface configuration the load port door fits and couples to the carrier door of a twenty-five substrate carrier, and in the second interface configuration the load port door fits and couples to the carrier door of a twelve substrate carrier.Aty. Docket No. 390P017057-WO(PCT)6. The load port of claim 1, wherein the load port is configured to communicate with the substrate carrier configured as a front opening unified pod.

7. The load port of claim 1, wherein the first interface configuration includes at least one latch key and at least one location pin and the second interface configuration includes another latch key and another location pin that are different than the at least one latch key and the at least one location pin of the first interface configuration.

8. A substrate processing apparatus comprising: a frame; and a load port coupled to the frame, where the frame having a closable opening disposed so as to communicate with a substrate carrier mated to the load port, where the substrate carrier has a carrier door that opens and closes the substrate carrier, the load port having a load port door connected to the frame and arranged to open and close the opening, the load port door having a load port door to carrier door interface that couples the load port door with and opens the carrier door; wherein the load port door to carrier door interface is re-configurable so that the interface switches configurations from a first interface configuration to a second interface configuration that is different than the first interface configuration, the first and second interface configurations respectively conform with different corresponding carrier door fits, of different carrier doors, so that the load port door commonly fits up and couples with different carrier doors each with carrier door fit arrangements different from each other.

9. The substrate processing apparatus of claim 8, wherein in each of the first interface configuration and the second interface configuration, the load port door couples singularly with the corresponding different fit of different carrier doors.Aty. Docket No. 390P017057-WO(PCT)10. The substrate processing apparatus of claim 8, wherein the load port door to carrier door interface switches automatically between the first and second interface configurations.

11. The substrate processing apparatus of claim 8, wherein the load port door to carrier door interface switches manually between the first and second interface configurations.

12. The substrate processing apparatus of claim 8, wherein in the first interface configuration the load port door fits and couples to the carrier door of a twenty-five substrate carrier, and in the second interface configuration the load port door fits and couples to the carrier door of a twelve substrate carrier.

13. The substrate processing apparatus of claim 8, wherein the load port is configured to communicate with the substrate carrier configured as a front opening unified pod.

14. The substrate processing apparatus of claim 8, wherein the first interface configuration includes at least one latch key and at least one location pin and the second interface configuration includes another latch key and another location pin that are different than the at least one latch key and the at least one location pin of the first interface configuration.

15. A method comprising: providing a load port for a substrate processing apparatus, the load port comprising: a frame with a closable opening disposed so as to communicate with a substrate carrier mated to the load port, the substrate carrier has a carrier door that opens and closes the substrate carrier; and a load port door connected to the frame and arranged to open and close the opening, the load port door having a load port door to carrier door interface that couples the load port door with and opens the carrier door;Aty. Docket No. 390P017057-WO(PCT) re-configuring the load port door to carrier door interface so that the interface switches configurations from a first interface configuration to a second interface configuration that is different than the first interface configuration, the first and second interface configurations respectively conform with different corresponding carrier door fits, of different carrier doors, so that the load port door commonly fits up and couples with different carrier doors each with carrier door fit arrangements different from each other.

16. The method of claim 15, wherein in each of the first interface configuration and the second interface configuration, the load port door couples singularly with the corresponding different fit of different carrier doors.

17. The method of claim 15, wherein the load port door to carrier door interface switches automatically between the first and second interface configurations.

18. The method of claim 15, wherein the load port door to carrier door interface switches manually between the first and second interface configurations.

19. The method of claim 15, wherein in the first interface configuration the load port door fits and couples to the carrier door of a twenty-five substrate carrier, and in the second interface configuration the load port door fits and couples to the carrier door of a twelve substrate carrier.

20. The method of claim 15, wherein the load port communicates with the substrate carrier configured as a front opening unified pod.

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