Suspension structure and detection module comprising same, and micro‑displacement detection apparatus

Abstract

The present invention provides a suspension structure and a detection module comprising same, and a micro‑displacement detection apparatus. The suspension structure comprises a central area, a fixing frame, and a plurality of suspension beams. The central area is circular and used for fixing an upper end of a probe or supporting a lower end of a reflective mirror assembly. The fixing frame is arranged around the central area, an inner edge of the fixing frame is circular and is coaxial with the central area, and the fixing frame is used for being fixed to other components. The suspension beams are arranged between the central area and the fixing frame, two ends of each suspension beam are connected to an outer edge of the central area and the inner edge of the fixing frame, respectively, and the plurality of suspension beams are evenly distributed in the circumferential direction of the central area. The plurality of suspension beams that are evenly distributed in the circumferential direction are connected to the central area, so that the probe fixed in the central area is subjected to uniform force, the probe can remain vertical when no external force is applied, and a ball tip is not hindered from moving with undulations of the surface of a sample, thereby ensuring the accuracy and stability of sample measurement.

Description

Suspension structure and its included detection module and micro-displacement detection device Technical Field

[0001] This invention relates to a suspension structure and a detection module and micro-displacement detection device containing the same. Background Technology

[0002] Currently, commonly used measurement methods in micro- and nano-scale 3D measurement include scanning probe microscopy, confocal microscopy, white light interferometry, and micro- and nano-coordinate measuring machines. Micro- and nano-coordinate measuring technology can overcome the contradiction between measurement range and measurement accuracy, and at the same time has the ability to detect and sense in three dimensions, enabling true 3D measurement. It is currently a relatively effective means to solve the problem of micro- and nano-scale 3D measurement.

[0003] The probe used in micro / nano coordinate measurement has a probe ball at its lower end, which contacts the sample surface. When the sample moves, the probe ball displaces along with the undulations of the sample surface. A detector can calculate the displacement of the probe ball in contact with the sample surface, thereby obtaining the surface topography data and three-dimensional measurement results of key dimensions. To ensure the accuracy of the measurement results, the probe must remain vertical without external force, while also ensuring that the probe ball can follow the undulations of the sample surface.

[0004] How to ensure that the probe remains vertical when it is not subjected to external force, while also allowing the probe ball to move in accordance with the undulations of the sample surface, is an important problem that current micro-nano coordinate measurement technology needs to solve. Summary of the Invention

[0005] In order to ensure that the probe remains vertical when not subjected to external force, and at the same time not to prevent the probe ball from moving with the undulations of the sample surface, the present invention provides a suspension structure and a detection module and a micro-displacement detection device containing the probe.

[0006] The present invention solves the above-mentioned technical problems through the following technical solutions:

[0007] This invention provides a suspension structure for suspending a probe. The suspension structure includes a central area, a fixed frame, and several suspension beams. The central area is circular and is used to fix the upper end of the probe. The fixed frame is arranged around the central area, and its inner edge is circular and coaxial with the central area. The fixed frame is used to fix other components. The suspension beams are arranged between the central area and the fixed frame, and their two ends are connected to the outer edge of the central area and the inner edge of the fixed frame, respectively. The several suspension beams are evenly distributed along the circumference of the central area.

[0008] In this technical solution, since several suspension beams are evenly distributed around the central area, the probe is subjected to uniform force. The probe remains vertical when it is not subjected to external force, and at the same time, it does not prevent the probe ball from moving with the undulations of the sample surface.

[0009] Preferably, the centerline of the suspension beam is an Archimedean spiral, and the origin of the polar coordinates of the centerline coincides with the center of the central region.

[0010] In this technical solution, the suspension beam extending along the direction of the Archimedes spiral can ensure that the probe is subjected to uniform force and remains vertical when no external force is applied. At the same time, the probe can maintain sufficient rigidity and can follow the undulations of the sample surface to drive the reflector assembly to move.

[0011] Preferably, the radius of the inner edge of the fixed frame is 0.6 mm, and the radius of the outer edge of the central area is 2.6 mm; the polar coordinate equation of the centerline of the suspension beam is... .

[0012] In this technical solution, the suspension structure set according to the above dimensions can keep the probe sufficiently rigid and can move the reflector assembly by following the undulations of the sample surface.

[0013] Ideally, the number of suspension beams should be 3 to 6.

[0014] In this technical solution, the number of suspension beams, ranging from 3 to 6, can ensure the strength of the suspension structure while not hindering the displacement of the measuring ball following the undulations of the sample surface.

[0015] Preferably, the suspension structure is made of beryllium copper or silicon.

[0016] In this technical solution, the suspension structure made of beryllium copper or silicon material can achieve isotropic detection stiffness of the probe when it probes in the lateral and longitudinal directions.

[0017] The present invention also provides a detection module, which includes a suspension structure, a clamping assembly, and a probe. The suspension structure is as described above. The clamping assembly fixes the fixed frame of the suspension structure, so that the suspension structure is placed horizontally. The clamping assembly is also used to fix it to other components. The upper end of the probe is fixed to the lower surface of the central area of ​​the suspension structure, so that the probe is in a suspended state.

[0018] In this technical solution, the entire detection module can be fixed on the mounting platform of the micro-displacement detection device by the clamping component, so that the suspension structure is placed horizontally.

[0019] Preferably, the clamping assembly is arranged around the suspension structure, and the clamping assembly surrounds the central area of ​​the suspension structure and the suspension beam in the middle.

[0020] In this technical solution, the clamping assembly is arranged around the suspension structure, and the clamping assembly surrounds the central area of ​​the suspension structure and the suspension beam in the middle, which can ensure that the suspension structure is subjected to uniform force.

[0021] Preferably, the clamping assembly includes a lower base, an upper pressure plate, and a clamping member. The upper surface of the lower base is provided with a placement surface, and the lower surface of the fixing frame of the suspension structure is placed on the placement surface of the lower base. The upper pressure plate presses on the upper surface of the fixing frame of the suspension structure. The clamping member clamps the upper pressure plate and the lower base, so that the fixing frame of the suspension structure is clamped between the lower base and the upper pressure plate.

[0022] In this technical solution, the suspension structure is fixed and horizontal by clamping the lower base and the upper pressure plate with a clamping device.

[0023] Preferably, the lower base has an upwardly protruding boss, and the placement surface is formed on the upper surface of the boss.

[0024] In this technical solution, the suspension structure is placed on the boss during installation, and the boss plays the role of positioning the suspension structure; at the same time, the setting of the boss also facilitates the design and installation of the clamping parts, enabling the clamping parts to perform the function of clamping the lower base and the upper pressure plate.

[0025] Preferably, the lower base has an outwardly extending flange for fixing to other components.

[0026] In this technical solution, the clamping component is fixed to the mounting platform by a flange, thereby fixing the detection module as a whole on the micro-displacement detection device.

[0027] Preferably, the clamping element includes a clamping body, an upper pressing edge, and a lower fixing edge. The upper pressing edge is formed on the upper edge of the clamping body and presses against the upper surface of the upper pressure plate. The lower fixing edge is formed on the lower edge of the clamping body and is fixed to the lower base.

[0028] In this technical solution, the clamping component of the above structure, by fixing the lower fixed edge to the lower base, enables the upper pressing edge to press against the upper pressure plate, thereby pressing and fixing the suspension structure.

[0029] Preferably, the upper surface of the upper pressure plate forms a downwardly recessed receiving groove, and the upper pressing edge is located inside the receiving groove.

[0030] In this technical solution, the receiving groove is used to position the upper clamping edge, so that the clamping part is relatively fixed relative to the upper pressure plate during installation.

[0031] Preferably, the number of clamping elements is several, and the clamping elements are arranged around the suspension structure.

[0032] In this technical solution, several clamping components are arranged around the suspension structure to ensure that the suspension structure is evenly stressed and that the probe is always kept in the middle position.

[0033] Preferably, the detection module also includes a reflector assembly, the lower end of which is fixed to the upper surface of the central area of ​​the suspension structure.

[0034] In this technical solution, the upper end of the reflector assembly is provided with a reflector body, and the displacement of the probe ball can be calculated by detecting the displacement of the reflector body.

[0035] The present invention also provides a micro-displacement detection device, including a detection module, a connection module, and a mounting platform. The detection module is as described in the above technical solution. The connection module is fixed to the clamping assembly of the detection module, so that the suspension structure is placed horizontally. The connection module is fixed on the mounting platform, and the mounting platform is also used to fix it to the measurement platform.

[0036] In this technical solution, when the above-mentioned detection module is installed on the micro-displacement detection device, the connecting module is fixed to the clamping assembly of the detection module, so that the suspension structure is placed horizontally; the connecting module is fixed on the mounting platform, and the mounting platform is also used to fix it to the measurement platform.

[0037] Preferably, the detection module further includes a reflector assembly, the lower end of which is fixed to the upper surface of the central area of ​​the suspension structure, and the upper end of which forms a reflector body; the micro-displacement detection device further includes at least one detector, which is mounted on the mounting platform and is used to detect the displacement of the reflector body.

[0038] In this technical solution, the detector is used to detect the displacement of the reflector body of the reflector assembly. By detecting the displacement of the reflector body, the displacement of the probe ball is calculated, thereby obtaining the morphology data of the sample surface and the three-dimensional measurement results of key dimensions.

[0039] Based on common knowledge in the field, the above-mentioned preferred conditions can be combined arbitrarily to obtain various preferred embodiments of the present invention.

[0040] The positive and progressive effects of this invention are as follows:

[0041] The aforementioned suspension structure and its included detection module and micro-displacement detection device are used to suspend the probe. The suspension structure is connected to the central area by several suspension beams evenly distributed along the circumference, so that the probe fixed in the central area is subjected to uniform force. The probe can remain vertical when it is not subjected to external force, and at the same time, it does not prevent the probe ball from moving with the undulations of the sample surface, thus ensuring the accuracy and stability of the sample measurement. Attached Figure Description

[0042] Figure 1 is a schematic diagram of the micro-displacement detection device of the present invention.

[0043] Figure 2 is a partial enlarged view of region A of the micro-displacement detection device shown in Figure 1.

[0044] Figure 3 is a schematic diagram of the suspension structure of the present invention.

[0045] Figure 4 is a top view of the suspension structure shown in Figure 3.

[0046] Figure 5 is a schematic diagram of the assembly of the suspension structure, probe, and reflector assembly shown in Figure 3.

[0047] Figure 6 is a schematic diagram of the detection module of the present invention.

[0048] Figure 7 is a cross-sectional schematic diagram of the detection module shown in Figure 6.

[0049] Figure 8 is a schematic diagram of the assembly of the detection module and the connection module shown in Figure 6.

[0050] Explanation of reference numerals in the attached figures

[0051] Detection module 100, suspension structure 1, central area 11, outer edge 111, fixing frame 12, inner edge 121, suspension beam 13, center line 131, probe 2, probe ball 21, reflector assembly 3, reflector body 31, clamping assembly 4, lower base 41, placement surface 411, boss 412, flange 413, mounting hole 414, upper pressure plate 42, receiving groove 421, clamping piece 43, clamping body 431, upper clamping edge 432, lower fixing edge 433, detector 200, connecting module 300, mounting platform 400 Detailed Implementation

[0052] The present invention will be further illustrated by way of embodiments below, but the present invention is not limited to the scope of the embodiments described herein.

[0053] Figures 1 and 2 show a micro-displacement detection device. The detection module 100 of this device includes a probe 2 fixed to the lower surface of a suspension structure 1 and a reflector assembly 3 fixed to the upper surface of the suspension structure 1. The lower end of the probe 2 forms a probe ball 21, which contacts the sample surface and can move in accordance with the surface undulations. The upper end of the reflector assembly 3 forms a reflector body 31. When the probe ball 21 moves, the reflector body 31 of the reflector assembly 3 also moves, and the displacement of the probe ball 21 can be converted into the displacement of the reflector body 31. The detection device also includes several detectors 200, which can detect the displacement of the reflector body 31, thereby calculating the displacement of the probe ball 21 and obtaining the morphological data of the sample surface and the three-dimensional measurement results of key dimensions.

[0054] To ensure that the probe 2 remains vertical without external force, and to allow the probe ball 21 to move with the undulations of the sample surface, the structure of the suspension structure 1 is shown in Figures 3 and 4. The suspension structure 1 includes a central area 11, a fixed frame 12, and several suspension beams 13. The central area 11 is circular; the fixed frame 12 is arranged around the central area 11, with its inner edge 121 being circular and coaxial with the central area 11; the suspension beams 13 are positioned between the central area 11 and the fixed frame 12, with both ends connected to the outer edge 111 of the central area 11 and the inner edge 121 of the fixed frame 12, respectively; the several suspension beams 13 are evenly distributed along the circumference of the central area 11.

[0055] As shown in Figure 5, the probe 2 is fixed on the lower surface of the central area 11. Since several suspension beams 13 are evenly distributed along the circumference of the central area 11, the probe 2 is subjected to uniform force, and the probe 2 remains vertical when not subjected to external force, while also not preventing the probe ball 21 from moving with the undulations of the sample surface.

[0056] The reflector assembly 3 is fixed to the upper surface of the central region 11. When the measuring ball 21 moves, the measuring needle 2 rotates, and the central region 11 of the suspension structure 1 rotates with the measuring needle 2. Since the reflector assembly 3 is fixed to the upper surface of the central region 11, the reflector assembly 3 also rotates with the measuring needle 2, so that the displacement of the measuring ball 21 can be converted into the displacement of the reflector body 31 of the reflector assembly 3.

[0057] To ensure the symmetry of the displacement of the measuring ball 21 and the reflector body 31, the measuring needle 2 and the reflector assembly 3 are both coaxially arranged with the central area 11 of the suspension structure 1.

[0058] As shown in Figures 3 and 4, the centerline 131 of the suspension beam 13 is an Archimedean spiral, and the origin of the polar coordinates of the centerline 131 coincides with the center of the central region 11. The suspension beam 13, extending along the direction of the Archimedean spiral, can ensure that the probe 2 is subjected to uniform force and remains vertical when no external force is applied. At the same time, the probe ball 21 can maintain sufficient sensitivity and can move in accordance with the undulations of the sample surface.

[0059] The radius of the inner edge 121 of the fixed frame 12 is 2.6 mm, and the radius of the outer edge 111 of the central area 11 is 0.6 mm; the polar coordinate equation of the centerline 131 of the suspension beam 13 is... The suspension structure 1 with the above-mentioned dimensions can ensure that the probe ball 21 of the probe 2 has sufficient sensitivity and can move in accordance with the undulations of the sample surface.

[0060] In this embodiment, the centerline 131 of the suspension beam 13 is an Archimedean spiral. In other embodiments, the centerline 131 of the suspension beam 13 can be any other shape that can achieve uniform force distribution on the probe 2.

[0061] In this embodiment, there are three suspension beams 13. The three suspension beams 13 are evenly distributed circumferentially along the central area 11, ensuring that the probe 2 fixed below the central area 11 experiences uniform force. In other embodiments, the number of suspension beams 13 can be 3 to 6. Having 3 to 6 suspension beams 13 ensures the strength of the suspension structure 1 while not hindering the probe ball 21 from moving to follow the undulations of the sample surface.

[0062] In this embodiment, the suspension structure 1 is made of beryllium copper or silicon. The suspension structure 1 made of beryllium copper or silicon can achieve isotropic stiffness during lateral and longitudinal detection.

[0063] The aforementioned suspension structure 1 is mounted on the detection module 100, as shown in Figures 6 and 7. The detection module 100 includes the suspension structure 1, a clamping assembly 4, and a probe 2. The clamping assembly 4 fixes the fixing frame 12 of the suspension structure 1, placing the suspension structure 1 horizontally. The upper end of the probe 2 is fixed to the lower surface of the central area 11 of the suspension structure 1, keeping the probe 2 suspended. The clamping assembly 4 allows the entire detection module 100 to be fixed on the mounting platform 400 of the micro-displacement detection device.

[0064] The probe 2 is fixed to the lower surface of the central region 11, and the probe ball 21 of the probe 2 can move with the undulations of the sample surface; the reflector assembly 3 is fixed to the upper surface of the central region 11. When the probe ball 21 moves, the probe 2 rotates, and the central region 11 of the suspension structure 1 and the reflector assembly 3 will rotate together with the probe 2, so that the displacement of the probe ball 21 can be converted into the displacement of the reflector body 31 of the reflector assembly 3.

[0065] In order to ensure that the suspension structure 1 is subjected to uniform force, the clamping assembly 4 is arranged around the suspension structure 1, and the clamping assembly 4 surrounds the central area 11 and the suspension beam 13 of the suspension structure 1.

[0066] As shown in Figures 6 and 7, the clamping assembly 4 includes a lower base 41, an upper pressure plate 42, and a clamping member 43. The upper surface of the lower base 41 is provided with a placement surface 411, and the lower surface of the fixing frame 12 of the suspension structure 1 is placed on the placement surface 411 of the lower base 41. The upper pressure plate 42 presses against the upper surface of the fixing frame 12 of the suspension structure 1. The clamping member 43 clamps the upper pressure plate 42 and the lower base 41, so that the fixing frame 12 of the suspension structure 1 is clamped between the lower base 41 and the upper pressure plate 42.

[0067] The suspension structure 1 can be fixed and presented in a horizontally unfolded state by clamping the fixed frame 12 of the suspension structure 1 with the lower base 41 and the upper pressure plate 42, and then clamping the upper pressure plate 42 and the lower base 41 with the clamping piece 43.

[0068] The lower base 41 has an upwardly protruding boss 412, and a placement surface 411 is formed on the upper surface of the boss 412. The suspension structure 1 is placed on the boss 412 during installation, and the boss 412 serves to position the suspension structure 1. At the same time, the setting of the boss 412 also facilitates the design and installation of the clamping member 43, enabling the clamping member 43 to perform the function of clamping the lower base 41 and the upper pressure plate 42.

[0069] Among them, the boss 412, the upper pressure plate 42, and the fixed frame 12 of the suspension structure 1 have the same shape, so that the boss 412, the suspension structure 1, and the upper pressure plate 42 are stacked to form a whole, which facilitates the installation of the clamping part 43; at the same time, the central area 11 of the suspension structure 1 and the suspension beam 13 are surrounded in the middle of the upper pressure plate 42 and the boss 412.

[0070] As shown in Figure 6, the lower base 41 has an outwardly extending flange 413, and the clamping assembly 4 is fixed to the mounting platform 400 of the micro-displacement detection device via the flange 413. In this embodiment, the flange 413 has several mounting holes 414. As shown in Figure 8, the lower base 41 is fixed to the connecting module 300 by fixing bolts passing through the mounting holes 414, and the detection module 100 is fixed to the mounting platform 400 by fixing the connecting module 300 to the mounting platform 400.

[0071] As shown in Figures 6 and 7, the clamping member 43 includes a clamping body 431, an upper pressing edge 432, and a lower fixing edge 433. The upper pressing edge 432 is formed on the upper edge of the clamping body 431 and presses against the upper surface of the upper pressure plate 42. The lower fixing edge 433 is formed on the lower edge of the clamping body 431 and is fixed to the lower base 41. With the clamping member 43 of the above structure, the upper pressing edge 432 can press against the upper pressure plate 42 by fixing the lower fixing edge 433 to the lower base 41, thereby clamping and fixing the suspension structure 1.

[0072] The upper surface of the upper pressure plate 42 forms a downwardly recessed receiving groove 421, and the upper clamping edge 432 is located within the receiving groove 421. The receiving groove 421 is used to position the upper clamping edge 432, so that the clamping member 43 is fixed relative to the upper pressure plate 42 during installation.

[0073] In this embodiment, the upper pressure plate 42 and the boss 412 are square in shape; correspondingly, there are four clamping members 43, which are respectively arranged on the four sides of the upper pressure plate 42, so that the suspension structure 1 clamped between the upper pressure plate 42 and the boss 412 can be evenly stressed. In other embodiments, the shape of the upper pressure plate 42 and the boss 412, as well as the number and position of the clamping members 43, can be set according to actual needs. The number of clamping members 43 is preferably several, and the several clamping members 43 are arranged around the suspension structure 1 so that the suspension structure 1 can be evenly stressed, ensuring that the probe 2 can always be kept in the middle position.

[0074] As shown in Figures 1, 2 and 8, when the above-mentioned detection module 100 is installed on the micro-displacement detection device, the connecting module 300 is fixed to the clamping component 4 of the detection module 100, so that the suspension structure 1 is placed horizontally; the connecting module 300 is fixed on the mounting platform 400, and the mounting platform 400 is also used to fix it to the measurement platform.

[0075] The micro-displacement detection device also includes several detectors 200, which are mounted on the mounting platform 400. The detectors 200 are used to detect the displacement of the reflector body 31 of the reflector assembly 3. In this embodiment, the reflector body 31 is a cube; the number of detectors 200 is three, detecting the displacement of the reflector body 31 from the X, Y, and Z directions respectively. In other embodiments, the shape of the reflector body 31, the number of detectors 200, and their orientation can be set according to actual needs.

[0076] This invention is not limited to the embodiments described above. Any changes in shape or structure shall fall within the protection scope of this invention. The protection scope of this invention is defined by the appended claims. Those skilled in the art may make various changes or modifications to these embodiments without departing from the principles and essence of this invention, but all such changes and modifications shall fall within the protection scope of this invention.

Claims

1. A suspension structure for suspending a probe, characterized in that, The suspension structure includes: The central area is circular and is used to fix the upper end of the probe. A fixed frame is provided, which is arranged around the central area. The inner edge of the fixed frame is circular and coaxial with the central area. The fixed frame is used to fix it to other components. A plurality of suspension beams are disposed between the central area and the fixed frame, and the two ends of the suspension beams are respectively connected to the outer edge of the central area and the inner edge of the fixed frame; the plurality of suspension beams are evenly distributed along the circumference of the central area.

2. The suspension structure as described in claim 1, characterized in that: The centerline of the suspension beam is an Archimedean spiral, and the origin of the polar coordinates of the centerline coincides with the center of the central region.

3. The suspension structure as described in claim 2, characterized in that: The radius of the inner edge of the fixed frame is 0.6 mm, and the radius of the outer edge of the central area is 2.6 mm; the polar coordinate equation of the centerline of the suspension beam is... .

4. The suspension structure as described in any one of claims 1 to 3, characterized in that: The number of suspension beams is 3 to 6.

5. The suspension structure as described in any one of claims 1 to 3, characterized in that: The suspension structure is made of beryllium copper or silicon.

6. A detection module, characterized in that, The detection module includes: A suspension structure, said suspension structure as described in any one of claims 1 to 5; A clamping assembly is provided to fix the fixed frame of the suspension structure, so that the suspension structure is placed horizontally; the clamping assembly is also used to fix it to other components. The probe is fixed at its upper end to the lower surface of the central area of ​​the suspension structure, so that the probe is in a suspended state.

7. The detection module as described in claim 6, characterized in that: The clamping assembly is arranged around the suspension structure, and the clamping assembly surrounds the central area of ​​the suspension structure and the suspension beam in the middle.

8. The detection module as described in claim 6, characterized in that, The clamping assembly includes: The lower base has a placement surface on its upper surface, and the lower surface of the fixing frame of the suspension structure is placed on the placement surface of the lower base. An upper pressure plate, which presses against the upper surface of the fixed frame of the suspension structure; A clamping member clamps the upper pressure plate and the lower base, so that the fixed frame of the suspension structure is clamped between the lower base and the upper pressure plate.

9. The detection module as described in claim 8, characterized in that: The lower base has an upwardly protruding boss, and the placement surface is formed on the upper surface of the boss.

10. The detection module as described in claim 8 or 9, characterized in that: The lower base is provided with an outwardly extending flange, which is used to fix it to other components.

11. The detection module as described in claim 8, characterized in that: The clamping element includes; Clamp the main body; An upper clamping edge is formed on the upper edge of the clamping body and presses against the upper surface of the upper pressure plate; The lower fixed edge is formed on the lower edge of the clamping body and is fixed to the lower base.

12. The detection module as described in claim 11, characterized in that: The upper surface of the upper pressure plate forms a downwardly recessed receiving groove, and the upper pressing edge is located within the receiving groove.

13. The detection module as described in claim 8, 11, or 12, characterized in that: The number of clamping elements is several, and the several clamping elements are arranged around the suspension structure.

14. The detection module as described in claim 6, characterized in that: The detection module also includes a reflector assembly, the lower end of which is fixed to the upper surface of the central area of ​​the suspension structure.

15. A micro-displacement detection device, characterized in that, include: The detection module is as described in any one of claims 6 to 14; A connecting module is fixed to the clamping assembly of the detection module, so that the suspension structure is placed horizontally; Mounting platform, the connecting module is fixed on the mounting platform, and the mounting platform is also used to fix to the measuring platform.

16. The micro-displacement detection device as described in claim 15, characterized in that: The detection module further includes a reflector assembly, the lower end of which is fixed to the upper surface of the central area of ​​the suspension structure, and the upper end of which forms a reflector body; the micro-displacement detection device further includes at least one detector, which is mounted on the mounting platform and is used to detect the displacement of the reflector body.

Images