Resin sealing apparatus

Abstract

Provided is a resin sealing apparatus that makes it possible to seal workpieces having different shapes by using a resin on the same line.　A resin sealing apparatus 1 comprises: a first press device 3 that is capable of sealing a first workpiece W1 by using a resin; a second press device 4 that is capable of sealing a second workpiece W2 smaller than the first workpiece W1 by using the resin; a resin feed device 2 that is capable of feeding a resin material to the first workpiece W1 and the second workpiece W2; and a conveyance unit 19 that is capable of moving between the resin feed device 2, and the first press device 3 and the second press device 4. The conveyance unit 19 has a first support part 91 for supporting the first workpiece W1 and a second support part 92 for supporting the second workpiece W2. The first support part 91 is disposed on the second support part 92, and the first support part 91 has formed therein a passage region 93 through which the second workpiece W2 passes.

Description

Resin sealing equipment

[0001] The present invention relates to a resin sealing device.

[0002] The resin sealing apparatus includes a press device and can seal various workpieces with resin. A resin sealing apparatus for sealing large-sized workpieces with resin includes a larger press device than a resin sealing apparatus for sealing small-sized workpieces with resin (see, for example, Patent Document 1).

[0003] Japanese Patent Application Laid-Open No. 2023-176518

[0004] However, when different types of workpieces are to be resin-encapsulated, if a dedicated line is set up for each type of workpiece, the introduction cost increases and the area occupied by the resin-encapsulating device also increases.

[0005] The present invention has been made in view of the above-mentioned problems, and has an object to provide a resin sealing apparatus that can resin-seal workpieces of different shapes on the same line.

[0006] A resin sealing apparatus according to one embodiment of the present invention comprises a first press device capable of resin sealing a first workpiece, a second press device capable of resin sealing a second workpiece smaller than the first workpiece, a resin supply device capable of supplying resin material to the first workpiece and the second workpiece, and a transport unit capable of moving between the resin supply device and the first press device and the second press device, wherein the transport unit has a first support portion that supports the first workpiece and a second support portion that supports the second workpiece, the first support portion being arranged on the second support portion, and a passage area through which the second workpiece passes being formed in the first support portion.

[0007] According to the present invention, it is possible to provide a resin sealing apparatus that can seal workpieces of different shapes with resin on the same line.

[0008] FIG. 1 is a plan view showing an example of a resin sealing apparatus according to an embodiment of the present invention. FIG. 2 is a cross-sectional view showing an example of a transport unit shown in FIG. 1. FIG. 3 is a plan view showing an example of a transport unit shown in FIG. 2. FIG. 4 is a plan view showing an example of a press loader unit shown in FIG. 1. FIG. 5 is a front view showing an example of a state in which a first loader hand shown in FIG. 4 has entered a first press device. FIG. 6 is a front view showing an example of a state in which a second loader hand shown in FIG. 4 has entered a first press device. FIGS. 7A and 7B are perspective views showing a first guided portion guided by a loader guide. FIGS. 8A and 8B are cross-sectional views of the recess cut parallel to the XZ plane.

[0009] A preferred embodiment of the present invention will be described with reference to the accompanying drawings. In each drawing, components with the same reference numerals have the same or similar configurations. For convenience, each drawing includes an orthogonal coordinate system consisting of X, Y, and Z axes to clarify the relationship between the drawings and to aid in understanding the positional relationships of the components. In the following description, the XY plane including the X and Y axes is defined as a horizontal plane, the direction of the Z-axis arrow is defined as a vertically upward direction, and the direction opposite to the Z-axis arrow is defined as a vertically downward direction. Directions parallel to the X, Y, and Z axes are referred to as the X-axis, Y-axis, and Z-axis directions, respectively. When viewed from the front side of the resin sealing device 1, the X-axis direction is, for example, the left-right direction, and the Y-axis direction is, for example, the front-rear direction. The present invention will now be described in detail with reference to the drawings.

[0010] 1 is a plan view showing an example of a resin sealing apparatus 1 according to an embodiment of the present invention. In the example shown, the resin sealing apparatus 1 configured as a compression molding machine includes a resin supply device 2, a first press device 3, a second press device 4, a conveying device 10, etc. The resin sealing apparatus 1 is not limited to a compression molding machine, but may also be a transfer molding machine. The number of press devices is not limited to two, but may be three or more.

[0011] The transport device 10 includes a guide rail 11 extending in the X-axis direction, a transport unit (pallet) 19 that can move back and forth along the guide rail 11, and the like. The resin supply device 2, first press device 3, second press device 4, and the like are arranged in a line along the guide rail 11. The transport unit 19 can move between the resin supply device 2 and the first press device 3 and second press device 4. In the example shown, the transport unit 19 can move along the guide rail 11 so as to pass through positions 11A to 11D on the guide rail 11.

[0012] In the illustrated example, an operator waits with a workpiece at position 11B on the guide rail 11. The resin sealing device 1 is configured so that the operator manually supplies a workpiece that has not been sealed with resin to the transport unit 19 stopped at position 11B, and manually collects the workpiece that has been sealed with resin from the transport unit 19 that has stopped again at position 11B. The device may further include a workpiece supply device that automatically supplies a workpiece that has not been sealed with resin, or a workpiece storage device that automatically collects a workpiece that has been sealed with resin.

[0013] The resin supplying device 2 is capable of supplying resin material to a plurality of types of workpieces, including a first workpiece W1 (shown in FIG. 2) and a second workpiece W2 (shown in FIG. 2). In the illustrated example, the resin supplying device 2 is configured as a dispenser that measures and dispenses predetermined amounts of resin material onto a workpiece placed on a stage 21, while moving the stage 21, which is movable in the X-axis direction and the Y-axis direction. The resin material may be in the form of granules, powder, or liquid.

[0014] The resin supplying device 2 is not limited to a dispenser, but may be a tablet loader that supplies a resin material (resin tablet) in which a pre-measured resin material is formed into a tablet shape, or may be a device that supplies a resin material (resin sheet) formed into a sheet shape.

[0015] The first press device 3 is configured to be able to resin-seal at least the first workpiece W1. In the illustrated example, the first press device 3 is configured to be able to resin-seal not only the first workpiece W1 but also a second workpiece W2 that is smaller than the first workpiece W1. The second press device 4 is configured to be able to resin-seal at least the second workpiece W2.

[0016] In addition to the above-described guide rails 11, transport unit 19, etc., the transport device 10 further includes a pick-and-place mechanism 12 attached to the resin supply device 2, a press loader unit 13 attached to the first press device 3, and a third press loader 14 attached to the second press device 4. Instead of the third press loader 14, a press loader unit similar to the press loader unit 13 may be attached to the second press device 4.

[0017] The pick-and-place mechanism 12 is disposed on the guide rail 11 directly above position 11A facing the resin supply device 2, and can lift multiple types of workpieces including a first workpiece W1 and a second workpiece W2. The pick-and-place mechanism 12 can lift a workpiece to which no resin has been supplied from the transport unit 19 stopped at position 11A and move the workpiece from the transport unit 19 to the stage 21, and can lift a workpiece to which resin material has been supplied by the stage 21 and move the workpiece from the stage 21 to the transport unit 19 stopped at position 11A.

[0018] In the illustrated example, a first press loader 13L and a second press loader 13R are arranged adjacent to each other in the X-axis direction (left-right direction) in the press loader unit 13. The press loader unit 13 is configured to be movable between a first position (shown by a solid line in FIG. 1 ) where the first press loader 13L is arranged directly above a position 11D facing the first press device 3 on the guide rail 11, and a second position (shown by a two-dot chain line in FIG. 1 ) where the second press loader 13R is arranged directly above position 11D.

[0019] The third press loader 14 is disposed on the guide rail 11 directly above a position 11C facing the second press device 4. The third press loader 14 is equipped with a third loader hand 71 that can advance and retreat into the second press device 4. The third loader hand 71 supplies the second workpiece W2 in an unsealed state and a resin material to a third mold 42 attached inside the second press device 4, and retrieves the second workpiece W2 in a resin-sealed state from the third mold 42.

[0020] Fig. 2 is a cross-sectional view showing an example of the transport unit 19 shown in Fig. 1. In the example shown, the transport unit 19 has a first support portion 91 on which the first workpiece W1 can be placed and supported, and a second support portion 92 on which the second workpiece W2 can be placed and supported. The first support portion 91 is arranged so as to overlap the second support portion 92.

[0021] According to the illustrated example, not only can the first workpiece W1 be placed and supported on the first support portion 91, but the second workpiece W2 can also be placed and supported on the second support portion 92 through the passing area 93, allowing the transport unit 19 to transport workpieces of different sizes. Because the first support portion 91 and the second support portion 92 are arranged one above the other, the area occupied by the transport unit 19 is small in plan view. This allows the resin sealing device 1 to be configured compactly.

[0022] A passing area 93 large enough to allow the second workpiece W2 to pass through is formed in the first support portion 91. The passing area 93 may be a through-hole or a notch as long as it passes vertically between the upper surface 91A and the lower surface 91B of the first support portion 91. The second workpiece W2 can move between the upper surface 91A and the lower surface 91B of the first support portion 91 through the passing area 93.

[0023] In the illustrated example, the transport unit 19 includes a lift mechanism 94, and the second support portion 92 is provided with a through-hole 97 through which the tip of the lift mechanism 94 passes. The lift mechanism 94 passes through the passing area 93 and can push up the second workpiece W2 from a position lower than the lower surface 91B of the first support portion 91 to a position higher than the upper surface 91A of the first support portion 91. Conversely, the lift mechanism 94 passes through the passing area 93 and can lower the second workpiece W2 from a position higher than the upper surface 91A of the first support portion 91 to a position lower than the lower surface 91B of the first support portion 91.

[0024] FIG. 3 is a plan view showing an example of the transport unit 19 shown in FIG. 2 . In the illustrated example, the first workpiece W1 is a large panel measuring 620 mm x 620 mm, and the second workpiece W2 is a wafer with a diameter of 300 mm. When viewed vertically as shown in FIG. 3 , in the illustrated example, the second support portion 92 is disposed across the inside and outside of the passage area 93. Therefore, as shown in FIG. 2 , the second support portion 92 can support the second workpiece W2 in an area 92N disposed within the passage area 93. The second support portion 92 can be fixed to or supported by the first support portion 91 in an area 92T disposed outside the passage area 93. In the illustrated example, a contact portion 98 provided on the second support portion 92 abuts against a lower surface 91B of the first support portion 91, thereby fixing or supporting the first support portion 91. The contact portion 98 may be integral with the first support portion 91, or may be fixed to the first support portion 91 by welding, bolts, nuts, or the like.

[0025] In the illustrated example, a first guide 95 that regulates the horizontal position of the first workpiece W1 is provided on the first support portion 91, and a second guide 96 that regulates the horizontal position of the second workpiece W2 is provided on the second support portion 92. When viewed in the vertical direction as shown in Figure 3, in the illustrated example, the passing area 93 is surrounded by the first guide 95, and the second guide 96 is disposed in an area 92N within the passing area 93.

[0026] When the passing area 93 is surrounded by the first guide 95, the first guide 95 can be provided even when the passing area 93 is formed, and therefore the first workpiece W1 can be transported with its position regulated by the first guide 95. When the second guide 96 is disposed in the area 92N within the passing area 93, the second guide 95 can be provided even when the passing area 93 is formed, and therefore the second workpiece W2 can be transported with its position regulated by the second guide 96. Therefore, temporary suspension of the resin sealing device 1 due to misalignment or the like is unlikely to occur.

[0027] 4 is a plan view showing an example of the press loader unit 13 shown in FIG. In the example shown, a first press loader 13L and a second press loader 13R are attached to the press loader unit 13 adjacent to each other in the movement direction of the press loader unit 13. The first press loader 13L has a first loader hand 51 capable of gripping the first workpiece W1. The second press loader 13R has a second loader hand 61 capable of gripping the second workpiece W2. If the first press loader 13L and the second press loader 13R are adjacent to each other, the movement distance of the press loader unit 13 can be minimized when switching between the first loader hand 51 and the second loader hand 61.

[0028] Figure 5 is a front view showing an example of a state in which the first loader hand 51 shown in Figure 4 has entered the first press apparatus 3. As shown in Figure 5, the first press apparatus 3 is configured to be able to mount a first mold 31 corresponding to the first workpiece W1. The first loader hand 51 supplies the first workpiece W1 in an unsealed state and a resin material to the first mold 31 mounted in the first press apparatus 3, and recovers the resin-sealed first workpiece W1 from the first mold 31. The first loader hand 51 is provided with a pair of left and right first guided portions 52L, 52R.

[0029] A pair of left and right loader guides 34L, 34R that guide the first guided portions 52L, 52R are provided on the tie bars 33 of the first press apparatus 3. The loader guides 34L, 34R may also be referred to as guide portions. A distance D1 from the tip of one first guided portion 52L to the tip of the other first guided portion 52R is greater than a distance D3 from one loader guide 34L to the other loader guide 34R.

[0030] At least a portion of one of the first guided portions 52L abuts against one of the loader guides 34L. At least a portion of the other of the first guided portions 52R abuts against the other of the loader guides 34R. As a result, when the first loader hand 51 enters the first press apparatus 3, the position of the first loader hand 51 in the X-axis direction (left-right direction) and Z-axis direction (vertical direction) is regulated by the loader guides 34L, 34R.

[0031] 6 is a front view showing an example of a state in which the second loader hand 61 shown in FIG. 4 has entered the first press apparatus 3. In the example shown, the first press apparatus 3 is configured to be able to mount not only the first mold 31 but also a second mold 32 corresponding to the second workpiece W2. The second loader hand 61 supplies the second workpiece W2 in an unsealed state and a resin material to the second mold 32 mounted in the first press apparatus 3, and retrieves the second workpiece W2 in a resin-sealed state from the second mold 32.

[0032] A pair of second guided portions 62L, 62R are provided on the left and right sides of the second loader hand 61. A distance D2 from the tip of one second guided portion 62L to the tip of the other second guided portion 62R is approximately the same as the distance D1 between the first guided portions 52L, 52R, and is greater than the distance D3 between the loader guides 34L, 34R.

[0033] At least a portion of one second guided portion 62L abuts against one loader guide 34L. At least a portion of the other second guided portion 62R abuts against the other loader guide 34R. As a result, when the second loader hand 61 enters the first press device 3, its position in the X-axis direction (left-right direction) and Z-axis direction (vertical direction) is restricted by the loader guides 34L, 34R shared with the first loader hand 51. Using the loader guides 34L, 34R shared by the first loader hand 51 and the second loader hand 61 in this way simplifies the number of parts and enables workpieces of different shapes to be resin-encapsulated using the same press device.

[0034] 7A to 8B, the first guided portions 52L, 52R of the first loader hand 51 and the second guided portions 62L, 62R of the second loader hand 61 will be described in more detail. The second guided portions 62L, 62R of the second loader hand 61 have substantially the same shape and function as the first guided portions 52L, 52R of the first loader hand 51. One first guided portion 52L has substantially the same shape and function as the other first guided portion 52R. Therefore, the first guided portion 52R will be described in detail as a representative, and redundant description of the first guided portion 52L and the second guided portions 62L, 62R will be omitted.

[0035] 7A and 7B are perspective views showing the first guided portion 52R guided by the loader guide 34R. In the example shown, the loader guide 34R has a recess. By fitting the first guided portion 52R into the recess, the position of the first loader hand 51 in the X-axis direction (left-right direction) and Z-axis direction (vertical direction) is restricted by the loader guides 34L and 34R.

[0036] 8A and 8B are cross-sectional views of the recess taken parallel to the XZ plane. The cross-sectional shape of the recess may be a substantially U-shape as shown in FIG. 8A or a substantially C-shape as shown in FIG. 8B. In the illustrated example, the first guided portion 52R is configured as a cam follower, which is a rolling bearing 54 with a stud bolt 53. If the first guided portion 52R is a cam follower, the first guided portion 52R can be fitted into the recess while rolling the outer ring of the rolling bearing 54, making it easy to fit the first guided portion 52R. To prevent the cam follower from coming off the recess, the lower surface of the recess may be curved convexly downward and the upper surface of the recess may be curved concavely upward, as shown in FIG. 8B.

[0037] The above-described embodiments are intended to facilitate understanding of the present invention and are not intended to limit the present invention. The elements of the embodiments, as well as their arrangement, materials, conditions, shapes, sizes, etc., are not limited to those illustrated and can be modified as appropriate. Furthermore, configurations shown in different embodiments can be partially substituted or combined with each other.

[0038] For example, a resin sealing device 1 may be configured that includes a first press device 3 capable of resin sealing the first workpiece W1 and the second workpiece W2, a resin supply device 2 that can supply resin material to the first workpiece W1 and the second workpiece W2, and a transport unit 19 with a two-tiered upper and lower structure that can move between the resin supply device 2 and the first press device 3, and the second press device 4 may be omitted.

[0039] [Appendix 1] The resin sealing device 1 includes a first press device 3 capable of resin sealing a first workpiece W1, a second press device 4 capable of resin sealing a second workpiece W2 smaller than the first workpiece W1, a resin supply device 2 capable of supplying resin material to the first workpiece W1 and the second workpiece W2, and a transport unit 19 capable of moving between the resin supply device 2 and the first press device 3 and the second press device 4, the transport unit 19 having a first support portion 91 that supports the first workpiece W1 and a second support portion 92 that supports the second workpiece W2, the first support portion 91 being disposed on the second support portion 92, and a passing area 93 through which the second workpiece W2 passes being formed in the first support portion 91.

[0040] According to Supplementary Note 1, not only can the first workpiece W1 be placed and supported on the first support portion 91, but the second workpiece W2 can also be placed and supported on the second support portion 92 through the passing area 93, allowing the transport unit 19 to transport workpieces of different sizes. The passing area 93 may be a through-hole or a notch, as long as it penetrates the upper surface 91A and the lower surface 91B of the first support portion 91 vertically. Because the first support portion 91 and the second support portion 92 are arranged vertically, the area occupied by the transport unit 19 is small in plan view. The resin sealing device 1 can be configured compactly.

[0041] [Supplementary Note 2] In Supplementary Note 1, the second support portion 92 may be provided with a second guide 96 that regulates the position of the second workpiece W2, and the second guide 96 may be disposed within the passing area in a plan view.

[0042] According to Supplementary Note 2, the second guide 96 can be provided even when the passing area 93 is formed. Since the second workpiece W2 can be transported while its position is regulated by the second guide 96, temporary suspension of the resin sealing device 1 due to misalignment or the like is unlikely to occur.

[0043] [Appendix 3] In Appendix 1 or 2, the first support portion 91 may be supported or fixed to the second support portion 92 by the abutment portion 98 provided on the second support portion 92 abutting against the lower surface 91B of the first support portion 91.

[0044] According to Supplementary Note 3, the first support portion 91 can be more reliably supported and fixed to the second support portion 92 .

[0045] [Supplementary Note 4] In any one of Supplementary Notes 1 to 3, a lift mechanism 94 may be further provided that passes through the passage area 93 and pushes up the second workpiece W2 to a position higher than the first support portion 91.

[0046] According to Supplementary Note 4, the pick-and-place mechanism 12 and the third loader hand 71 can transfer the second workpiece W2 at a position higher than the first support portion 91. When transferring the second workpiece W2, it is not necessary to insert the tip of the pick-and-place mechanism 12 or the third loader hand 71 into the passing area 93, which improves the degree of freedom in device design.

[0047] REFERENCE SIGNS LIST 1...resin sealing device, 2...resin supply device, 3...first press device, 4...second press device, 10...conveying device, 11...guide rail, 11A...position facing the resin sealing device, 11B...position facing the operator, 11C...position facing the second press device, 11D...position facing the first press device, 12...pick and place mechanism, 13...press loader unit, 13L...first press loader, 13R...second press loader, 14...third press loader, 19...conveying unit (pallet), 21...stage, 31...first mold, 32...second mold, 33...tie bar, 34L, 34R...loader guide, 42...third mold, 51 ...First loader hand, 52L, 52R...first guided portion, 53...stud bolt, 54...rolling bearing, 61...second loader hand, 62L, 62R...second guided portion, 71...third loader hand, 91...first support portion, 91A...upper surface, 91B...lower surface, 92...second support portion, 92N...inside passing area, 92T...outside passing area, 93...passing area, 94...lift mechanism, 95...first guide, 96...second guide, 97...through hole, 98...abutment portion, D1...distance of first guided portion, D2...distance of second guided portion, D3...distance of loader guide, W1...first workpiece, W2...second workpiece, X...left-right direction, Y...front-back direction, Z...vertical direction (up and down direction).

Claims

1. A resin sealing device comprising: a first press device capable of resin sealing a first workpiece; a second press device capable of resin sealing a second workpiece smaller than the first workpiece; a resin supply device capable of supplying resin material to the first workpiece and the second workpiece; and a transport unit capable of moving between the resin supply device and the first press device and the second press device, wherein the transport unit has a first support part that supports the first workpiece and a second support part that supports the second workpiece, the first support part being disposed above the second support part, and a passage area through which the second workpiece passes is formed in the first support part.

2. The resin sealing device according to claim 1, wherein the second support portion is provided with a second guide that regulates the position of the second workpiece, and the second guide is positioned within the passage area in a plan view.

3. The resin sealing device according to claim 1, wherein the first support part is supported or fixed to the second support part by an abutting portion provided on the second support part abutting against the lower surface of the first support part.

4. The resin sealing device according to claim 1, further comprising a lift mechanism that passes through the passage area and pushes up the second workpiece to a position higher than the first support portion.

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