Passively cooled mirror module

Abstract

The invention relates to a mirror module (10) for arranging in a clean room (12), in particular in an air-evacuated environment (14), wherein the mirror module (10) is designed to deflect electromagnetic waves (16), in particular laser radiation (18), having a mirror body (20) with at least one mirror surface (22) and a heat sink (24) which can be detachably arranged on the mirror body (20), wherein the heat sink (24) has a first heat-conducting surface (26) and the mirror body (20) has a second heat-conducting surface (28), wherein the first heat-conducting surface (26) is directly adjacent to the second heat-conducting surface (28) at least in some portions in order to dissipate thermal energy from the mirror body (20), wherein the mirror module (10) comprises a fastening device (30) which causes the first heat-conducting surface (26) to be detachably pressed against the second heat-conducting surface (28).

Description

[0001] passively cooled mirror module

[0002] Background of the invention

[0003] The invention relates to a mirror module for arrangement in a cleanroom, in particular an air-empty environment, wherein the mirror module is designed to deflect electromagnetic waves, in particular laser radiation.

[0004] Mirrors are used as part of optical systems, for example in the production of microchips using EUV lithography. Laser radiation is used to irradiate a tin droplet, creating an extreme ultraviolet (EUV) plasma, which can be used to image fine and highly precise structures in microchip manufacturing. The mirrors are essential for precisely aligning the laser radiation with the tin droplet to ensure the efficiency and accuracy of the applications.

[0005] The precision and efficiency of mirrors can be significantly affected by various factors. In practice, the absorption of laser radiation by the mirrors leads to heating. This generates thermal stresses that alter the mirror's geometry and consequently its optical properties. Furthermore, especially in EUV lithography, the mirrors are exposed to free radicals that wear down the mirror surface. This impairs precise beam deflection and process quality.

[0006] To reduce the thermal stress on the mirrors, prior art designs employ cooling mechanisms that dissipate the heat generated by the absorption of laser radiation. Typically, actively water-cooled mirrors are used in the focusing unit of the optical system. This cooling mechanism has become established as a reliable cooling option, particularly due to its high cooling capacity. Nevertheless, the mirrors must be replaced regularly due to wear and tear caused by the prevailing environmental conditions.

[0007] To ensure high availability of the entire system, such a replacement must be carried out as quickly as possible. However, replacing an actively cooled mirror requires opening the cooling circuit. This process necessitates the complex draining and purging of the coolant, resulting in significant time and cost expenditure. Consequently, machine downtime is also increased, leading to further costs due to production stoppages.

[0008] The aforementioned disadvantages of existing cooling mechanisms are further exacerbated when the mirror requires maintenance within a cleanroom. In this case, the risk of cleanroom contamination increases when the cooling circuit is opened. This results in additional costs, as the cleanroom conditions must be restored after maintenance through extensive cleaning. This extends the downtime of the entire system.

[0009] Alternative cooling mechanisms, such as those based on the principle of simple solid-state heat conduction, have not become established due to their comparatively lower cooling capacity. Furthermore, conventional solid-state heat conduction requires the use of heat transfer fluids, such as thermal pastes, which are prohibited within cleanrooms. In evacuated environments, the use of such heat transfer fluids is even impossible due to evaporation.

[0010] Object of the invention

[0011] It is an object of the invention to enable improved maintenance of mirrors in optical systems while maintaining high cooling performance, in order to ensure efficient and more reliable deflection and alignment of electromagnetic waves, in particular laser radiation. Description of the invention

[0012] This problem is solved according to the invention by a mirror module having the features of independent claim 1. The dependent claims describe preferred embodiments of the invention.

[0013] According to the invention, a mirror module is proposed.

[0014] The mirror module is suitable for installation in a cleanroom, particularly an evacuated environment. Cleanroom conditions, or the evacuated environment, minimize the absorption and scattering of electromagnetic waves, thereby increasing the precision of the deflection. However, to prevent maintenance costs, this specific environment requires that all components of the mirror module preferably be designed so that they do not release or accumulate particles that could compromise the cleanliness of the environment. In particular, the mirror module is designed for maintenance in such a cleanroom. In other words, the design of the mirror module reduces, and preferably prevents, contamination of the evacuated environment, or the cleanroom, during maintenance, especially when replacing components.

[0015] The mirror module is designed to deflect electromagnetic waves, especially laser radiation. This requires highly precise alignment and surface quality of the mirror surfaces to achieve the desired change in wave direction with minimal distortion and the lowest possible loss.

[0016] The mirror module incorporates a heat sink. The heat sink is detachably mounted to the mirror body and is designed to cool it. Typically, the heat sink is made of a highly thermally conductive material. This minimizes thermal distortions of the mirror body that could impair the precision of the deflection. The heat sink has at least one primary heat-conducting surface, typically designed to absorb thermal energy. The heat sink may have two or more primary heat-conducting surfaces to increase heat absorption.

[0017] The mirror module comprises a mirror body with at least one mirror surface. The mirror surface is the central element for deflecting the electromagnetic waves. The mirror surface can be flat or curved. The mirror body has at least one secondary heat-conducting surface, typically designed to dissipate thermal energy. The mirror body can have two or more secondary heat-conducting surfaces to increase heat dissipation.

[0018] The reflective surface of the mirror body is preferably edgeless. In other words, the reflective surface can extend over the entire side of the mirror body that contains the reflective surface. This allows for the largest possible reflective surface within the available installation space of the mirror body. This enables, firstly, more flexible deflection of the electromagnetic waves and, secondly, a more homogeneous structure of the mirror body. The latter reduces thermal stresses in the mirror body, such as those that are exacerbated by the formation of a reflective edge on the reflective surface.

[0019] Preferably, the dimensions of the first heat-conducting surface are similar to or identical to the dimensions of the second heat-conducting surface. This reliably prevents local temperature spikes.

[0020] The first heat-conducting surface of the heat sink is in direct contact, at least in sections, with the second heat-conducting surface of the mirror. Direct contact, both before and after this contact, refers to the direct interaction of the surface structures of the heat-conducting surfaces. The number of air gaps or cavities between the surface structures is minimized. This allows thermal energy to be transferred from the mirror to the heat sink via heat conduction, particularly solid-state heat conduction. In other words, there is a direct physical connection, at least in sections, between the heat sink and the mirror via the heat-conducting surfaces. This direct contact is crucial for the efficiency of the cooling process and the effective dissipation of thermal energy.The design of the connection preferably ensures the largest possible contact area and minimal thermal resistance to achieve optimal cooling performance. This can be achieved through a special surface treatment of the heat-conducting surfaces.

[0021] The mirror module includes a fastening device that presses the first heat-conducting surface against the second heat-conducting surface. This fastening device preferably ensures a uniform contact force across the entire contact area to prevent air gaps and / or cavities that could impair heat transfer. Furthermore, the pressure can be released by loosening the fastening device. This allows the mirror body to be detached from or removed from the heat sink. Replacing and / or maintaining the mirror body is therefore particularly quick and easy.

[0022] In summary, the invention proposes a mirror module characterized by an innovative approach to heat dissipation via a mirror body detachably mounted on the heat sink. Efficient heat dissipation from the mirror body is ensured by section-by-section direct contact between the heat-conducting surfaces of the heat sink and the mirror body. Active cooling, particularly liquid cooling of the mirror, is therefore unnecessary. This allows for particularly quick and easy disassembly of the mirror body without contamination of the surrounding area by coolant. Furthermore, the direct contact between the heat-conducting surfaces eliminates the need for heat transfer fluids, such as thermal paste. This makes the mirror module particularly suitable for cleanrooms, especially evacuated environments.Preferably, the heat sink comprises one or more cooling channels designed to dissipate thermal energy from the heat sink. In other words, the heat sink can be actively cooled by a coolant. The cooling channels are confined to the heat sink. Therefore, if the mirror body detaches from the heat sink, the integrity of the cooling channel remains unaffected.

[0023] In a preferred embodiment of the mirror module, the at least one first and / or the at least one second heat-conducting surface is designed as a flat surface. This further improves heat transfer between the mirror body and the heat sink. The flat surface design promotes maximum contact area between the heat-conducting surfaces, resulting in more efficient and uniform heat dissipation. The direct contact between the flat surfaces minimizes thermal resistance at the interface between the mirror body and the heat sink, leading to faster and more effective heat dissipation. This is particularly advantageous in applications where the mirror module is exposed to high power or intense laser radiation. Thermal deformation of the mirror surface and / or a loss of mirror surface reflectivity due to insufficient cooling can thus be prevented very effectively.The use of flat surfaces as heat-conducting surfaces thus not only supports the longevity and reliability of the mirror module under operating conditions, but also helps to reduce the maintenance frequency and optimize the overall performance of the system in which the mirror module is used.

[0024] According to another preferred embodiment, the second heat-conducting surface of the mirror body is formed on a side opposite the mirror surface. This arrangement enables efficient heat dissipation from the mirror surface by conducting the thermal energy directly through the mirror body to the heat sink, which is positioned on the opposite side. This specific arrangement of the heat-conducting surfaces promotes more direct and therefore more effective heat conduction, since the heat does not have to be routed around the mirror body, but instead takes a short, direct path from the point of origin (the mirror surface, which is heated by the absorption of electromagnetic waves) to the heat sink. This reduces the risk of overheating of the mirror surface, which is of crucial importance, especially in applications involving high laser power.Efficient heat dissipation reduces the thermal deformation of the mirror, leading to higher precision in the deflection of electromagnetic waves and improving the overall optical performance of the system.

[0025] According to another embodiment of the mirror module, the mounting device includes at least one screw for pressing the heat-conducting surfaces together. A screw enables a precise and reliable mechanical connection between the heat sink and the mirror body, which is advantageous for effective heat dissipation. Using a screw as part of the mounting device allows for repeatable adjustment of the contact force between the heat-conducting surfaces, ensuring consistent thermal coupling. The ability to adjust the contact force simply by tightening or loosening the screw provides a flexible solution for maintaining and adapting the mirror module to installation requirements.

[0026] Preferably, the fastening device comprises at least two, and more preferably several, screws that are evenly spaced on the heat sink and the mirror body. This allows for even more uniform pressure on the heat-conducting surfaces.

[0027] A preferred embodiment of the mirror module is one in which the mounting device is at least partially and permanently attached to the mirror body and / or the heat sink. In other words, the mounting device remains attached to the individual components of the mirror module, particularly completely, after the mirror body has been detached. This simplifies the disassembly and assembly of the mirror module and, in the case of a cleanroom, reduces contamination from falling particles.

[0028] Fasteners prevent this.

[0029] A further preferred embodiment is one in which the fastening device comprises at least one fastening recess formed in the heat sink. The at least one fastening recess can be configured as a blind hole or a through hole. In other words, the

[0030] The fastening device is designed to penetrate or project into the heat sink. Preferably, the fastening device comprises several fasteners, in particular distributed evenly around the circumference and / or the first heat-conducting surface.

[0031] Mounting recesses. These allow for particularly even pressure application. At least one mounting recess is typically designed to accommodate a predetermined fastener. If multiple mounting recesses are provided, they can be configured to accommodate various fasteners, such as screws, wedges, or magnets. This allows for the use of suitable fasteners at different positions on the mirror module, enabling effective selection of the fastener in terms of accessibility and suitability. This promotes a particularly maintenance-friendly, efficient, and reliable mechanical connection between the heat sink and the mirror body, while simultaneously ensuring even pressure application to the heat-conducting surfaces.

[0032] According to a preferred embodiment of the mirror module, at least one mounting recess is formed, particularly exclusively, in the first heat-conducting surface of the heat sink. This configuration allows the mounting elements of the fastening device to be inserted without affecting the mirror surface of the mirror body. This enables the deflection of electromagnetic waves to be carried out with particularly low distortion while creating the largest possible mirror surface. A further preferred embodiment of the mirror module includes at least one magnet in the mounting device. The magnet is typically arranged in the at least one mounting recess and causes magnetic contact with the heat-conducting surfaces. This specific configuration allows the heat-conducting surfaces to be pressed against the mounting device while requiring minimal space.Preferably, the fastening device comprises several magnets evenly distributed across the first heat-conducting surface to ensure uniform contact pressure. Particularly preferably, the magnets are designed as electromagnets. This allows the magnetic contact force to be released for maintenance of the mirror module.

[0033] Furthermore, a further development of the mirror module is preferred in which the fastening device for pressing the heat-conducting surfaces is designed by force transmission on one of the sides of the heat sink opposite the first heat-conducting surface. This force transmission on the opposite side of the heat sink ensures a uniform distribution of the contact force across the heat-conducting surfaces, resulting in extensive contact of the heat-conducting surfaces and optimized thermal coupling between the mirror body and the heat sink. This configuration enables particularly effective dissipation of thermal energy from the mirror body, which is especially beneficial for cooling in evacuated environments and cleanrooms where free convection for cooling is reduced.

[0034] In a preferred embodiment of the mirror module, the mirror body at least partially surrounds the heat sink. Preferably, the mirror body surrounds the heat sink along a circumference of the heat sink that includes the first heat-conducting surface. Typically, the mirror body forms a mounting section that surrounds the heat sink. This arrangement promotes a positionally accurate alignment of the mirror body on the heat sink. Furthermore, by surrounding the heat sink, the contact area between the heat sink and the mirror body can be increased, thereby improving heat transfer. In a preferred further development of the mirror module, the mounting device is formed and / or arranged at least partially, and in particular exclusively, in the enclosed section of the heat sink and / or the mounting section of the mirror body that surrounds the heat sink.This arrangement of the mounting device allows, within given dimensional limits, the formation of a particularly large primary heat-conducting surface without interruptions from the mounting device. This enables particularly efficient and low-resistance heat transfer.

[0035] A further preferred embodiment of the mirror module comprises at least one clamping wedge that can be arranged along an insertion direction perpendicular to a contact direction of the heat-conducting surfaces in and / or on the mirror body and / or the heat sink. Preferably, the clamping wedge comprises several clamping wedges arranged evenly distributed around the circumference of the mirror body and heat sink. Typically, as the movement along the insertion direction progresses, the clamping wedge causes an increasing clamping force between the mirror body and the heat sink. This enables precise control of the contact force between the heat-conducting surfaces. By arranging the clamping wedge perpendicular to the contact direction, the contact force can be provided with particularly minimal engagement of the fastening element with the heat-conducting surfaces of the mirror body or the heat sink.

[0036] According to a preferred embodiment of the mirror module, the clamping wedge is formed on the mirror body and / or the heat sink. The mirror body is preferably positioned along the insertion direction of the clamping wedge, with the heat-conducting surfaces being pressed together as the mirror body is positioned closer to the heat sink. Forming the clamping wedge directly on one of the two components simplifies the assembly and disassembly of the heat sink, as the number of individual parts and assembly steps is reduced. A further preferred embodiment of the mirror module includes a clamping element, in particular a flat spring or a disc spring, arranged between the mirror body and the heat sink. The clamping element can be permanently attached to the heat sink and / or the mirror body.The clamping element is typically designed to be elastically deformable, deforming when the mirror body is positioned on the heat sink. This deformation generates a restoring force that presses the heat-conducting surfaces together when the mirror body is in place. Using a clamping element as part of the mounting system ensures a particularly even contact pressure on the heat-conducting surfaces, further promoting the direct and efficient transfer of thermal energy from the mirror body to the heat sink. Furthermore, the use of a clamping element simplifies the mounting and dismounting of the mirror body.

[0037] A particularly preferred design is a further development of the mirror module in which the mirror body is designed to slide onto the heat sink. In other words, the mirror body is designed to at least partially accommodate the heat sink. This enables a particularly simple and quick connection between the mirror body and the heat sink. The mirror body can be fixed to the heat sink during the sliding process or afterward using suitable fasteners. Sliding the mirror body onto the heat sink ensures a particularly simple and foolproof arrangement. The ability to easily detach the mirror body from the heat sink by simply pulling it off also reduces maintenance and downtime. Overall, the design of the mirror body for sliding onto the heat sink offers significant advantages in terms of handling, ease of maintenance, and the performance of the mirror module.

[0038] Furthermore, a preferred embodiment of the mirror module involves pressing the heat-conducting surfaces against the heat sink by sliding the mirror body onto the heat sink. Typically, the mirror body is clamped and / or clamped to the heat sink during this process, thereby pressing the heat-conducting surfaces together.

[0039] A preferred embodiment of the mirror module involves pressing the heat-conducting surfaces against the heat sink by deforming the mounting device while the mirror body is slid onto the heat sink. In other words, sliding the mirror body onto the heat sink and fixing it in place are separate, sequential steps. This allows for easy adjustment of the mirror body on the heat sink and subsequent fixing in the adjusted position. Furthermore, subsequent fixing enables particularly precise adjustment and regulation of the contact force. Deformation of the mounting device can be achieved by deforming the mirror body, the heat sink, and / or by separate fastening elements. Preferably, the mounting device comprises at least one deformable fastening element, in particular a fastening membrane, which is permanently attached to the mirror body and / or the heat sink.The mounting recess can be deformed by mechanical deflection and / or pressure-controlled deflection. This deformation of the mounting device ensures a consistently uniform contact pressure between the heat-conducting surfaces and optimizes heat transfer.

[0040] A particularly preferred embodiment of the mirror module features a mounting device for pressing the heat-conducting surfaces together, achieved through hydraulic and / or pneumatic deformation. This specific design of the mounting device enables a particularly uniform application and adjustment of the contact force between the heat-conducting surfaces, resulting in optimized heat transfer between the mirror body and the heat sink. Especially when using a mounting membrane, hydraulic and / or pneumatic deformation ensures that the membrane rests flat against the heat sink and / or the mirror body, thus promoting a particularly even contact between the heat-conducting surfaces. By using hydraulic or pneumatic means for deformation, the contact force can be precisely controlled and adapted to various operating conditions.The adjustment can be made automatically and / or manually.

[0041] Further advantages of the invention will become apparent from the description and the drawing. Likewise, the features mentioned above and those described in more detail below can each be used individually or in any combination according to the invention. The embodiments shown and described are not to be understood as an exhaustive list, but rather serve as examples for illustrating the invention.

[0042] Detailed description of the invention and drawing

[0043] Fig. 1 shows a first embodiment of a mirror module for arrangement in an air-empty environment with a mirror body and a heat sink arranged on the mirror body by means of a first embodiment of a fastening device in a perspective view.

[0044] Fig. 2 shows a second embodiment of the mirror module, comprising a second embodiment of the fastening device in a perspective view.

[0045] Fig. 3 shows a third embodiment of the mirror module with a third embodiment of the fastening device in a perspective view.

[0046] Fig. 4 shows the embodiment of the mirror module from Fig. 3 in a sectional view.

[0047] Fig. 5 shows a fourth embodiment of the mirror module with a fourth embodiment of the mounting device in a sectional view. Fig. 6 shows a fifth embodiment of the mirror module with a fifth embodiment of the mounting device in a sectional view.

[0048] Fig. 7 shows a sixth embodiment of the mirror module with a mirror body encompassing the heat sink and a sixth embodiment of the fastening device in a sectional view.

[0049] Fig. 8 showed a seventh embodiment of the mirror module with a mirror body enclosing the heat sink in a perspective view.

[0050] Fig. 9 shows the mirror module from Fig. 8 with a seventh embodiment of the fastening device in a sectional view.

[0051] Fig. 10 shows an eighth embodiment of the mirror module with an eighth embodiment of the fastening device in a sectional view.

[0052] Fig. 11 showed the embodiment of the mirror module from Fig. 10 in a sectional view in the insertion direction.

[0053] Fig. 12 shows a ninth embodiment of the mirror module with a ninth embodiment of the fastening device in a sectional view.

[0054] Fig. 13 shows a tenth embodiment of the mirror module with a tenth embodiment of the fastening device in a sectional view.

[0055] Fig. 1 shows a first embodiment of a mirror module 10 suitable for arrangement in a cleanroom 12, in particular an air-empty environment 14.

[0056] The mirror module 10 is designed to deflect electromagnetic waves 16, in particular laser radiation 18. In a particular embodiment, the mirror module 10 is suitable and configured for use in EUV (extreme ultraviolet) applications, especially EUV lithography. The mirror module 10 is particularly preferably arranged in close proximity to the plasma source (not shown), where it is exposed to the high temperatures and free radicals generated during plasma production.

[0057] According to the invention, the mirror module 10 comprises a mirror body 20 with at least one mirror surface 22. The mirror surface 22 is designed to reflect the electromagnetic waves 16, in particular the laser radiation 18.

[0058] The mirror module 10 also includes a heat sink 24. The heat sink 24 is detachably mounted on the mirror body 20. In other words, the heat sink 24 can be repeatedly removed from and reattached to the mirror body 20 without damaging the contact surfaces. This allows for quick replacement of the mirror body 20, thereby significantly reducing maintenance time.

[0059] As illustrated, the heat sink 24 can be multi-part and provide a support structure for mounting the mirror body 20 in an optical system (not shown). In other words, the heat sink 24 can be permanently mounted or formed in a support device (not shown), for example, a device for generating EUV radiation. The heat sink 24 is preferably, and in particular by a significant margin, larger than the mirror body 20. This increases the thermal mass of the heat sink 24 and thus the storable heat energy, thereby improving the absorption of thermal energy.

[0060] The heat sink 24 has a first heat-conducting surface 26, which is designed to introduce thermal energy into the heat sink 24. In particular, the first heat-conducting surface 26 has a surface finish that promotes thermal energy input. Preferably, the first heat-conducting surface 26 is designed as a flat surface, particularly preferably a polished one.

[0061] The mirror body 20 has a second heat-conducting surface 28, which is designed to dissipate thermal energy from the mirror body 20. In particular, the second heat-conducting surface 28 has a surface finish that promotes thermal energy dissipation. Preferably, the second heat-conducting surface 28 is designed as a flat surface, particularly preferably a polished one. Flat surfaces promote a planar contact between the heat-conducting surfaces 26 and 28, thereby improving heat conduction from the mirror body 20 to the heat sink 24.

[0062] The second heat-conducting surface 28 is preferably designed parallel to the mirror surface 22. This further promotes homogeneous heat conduction in the mirror body 20.

[0063] As shown, the second heat-conducting surface 28 of the mirror body 20 is preferably formed on a side opposite the mirror surface 22. This ensures direct and rapid heat conduction within the mirror body 20 from the mirror surface 22 to the second heat-conducting surface 28. Temperature spikes on the mirror body 20, which could lead to local overheating, can thus be effectively prevented.

[0064] According to the invention, the first heat-conducting surface 26 is in direct contact, at least partially, with the second heat-conducting surface 28. As shown, the first heat-conducting surface 26 is in full contact with the second heat-conducting surface 28, thereby enabling particularly low-resistance transfer of thermal energy from the mirror body 20 to the heat sink 24. In other words, the first heat-conducting surface 26 and the second heat-conducting surface 28 have at least the same dimensions in order to reduce thermal resistance.

[0065] The mirror module 10 also includes a fastening device 30, which enables the first heat-conducting surface 26 of the heat sink 24 to be detachably pressed against the second heat-conducting surface 28 of the mirror body 20. This ensures full-surface and permanent contact between the heat-conducting surfaces 26 and 28, and thus constant heat dissipation from the mirror body 20. A thermally conductive contact medium, such as thermal paste, is therefore unnecessary. This facilitates the use of the mirror module 10 in a cleanroom 12 and especially in an air-deprived environment 14. The heat-conducting surfaces 26 and 28 are pressed against each other perpendicular to the contact direction 32, i.e., normal to the heat-conducting surfaces 26 and 28. This ensures not only full-surface contact but also precise positioning of the heat-conducting surfaces 26 and 28.

[0066] According to the embodiment shown in Fig. 1, the fastening device 30 of the mirror module 10 has at least one screw 34, here two screws 34, which press the heat-conducting surfaces 26, 28 against each other. According to the illustrated embodiment, the screws 34 are arranged in the mirror surface 22, which allows quick access to the screws 34 and thus quick replacement, particularly in confined installation conditions. As shown, the screws 34 can be arranged, in particular, completely or countersunk, in the fastening recesses 36 in order to minimize disturbance of the mirror surface 22 and the reflective properties of the mirror body 20. Preferably, the screws 34 are arranged in an edge region of the mirror surface 22, which further reduces disturbance of the mirror surface 22.

[0067] The fastening device 30 can be removed from the mirror module 10 as shown. By loosening the screws 34, the pressure between the heat-conducting surfaces 26, 28 is released and the mirror body 20 can be removed from the heat sink 24.

[0068] The illustrated embodiment can be combined with other fastening means, in particular the embodiments of the fastening device 30 explained in the other figures and the description, especially to promote uniform pressing of the heat-conducting surfaces 26, 28.

[0069] Fig. 2 shows another embodiment of the mirror module 10. The embodiment of the mirror module 10 shown in Fig. 2 differs essentially in the design of the fastening device 30 from the embodiment described in Fig. 1.

[0070] According to the embodiment shown in Fig. 2, the fastening device 30 has a screw 34 that is partially located outside the fastening recess 36. The screw 34 has a pressure ring 38, which serves to increase the force application area on the mirror body 20 and the heat sink 24. With the illustrated embodiment of the fastening device 30, the heat-conducting surfaces 26, 28 can be pressed against the mirror by positioning the screw 34 at the edge 40 of the mirror surface 22. This ensures accessibility of the screw 34 and also reduces disturbances to the mirror surface 22.

[0071] The illustrated embodiment can be combined with other fastening means, in particular the embodiments of the fastening device 30 explained in the other figures and the description, especially to promote uniform pressing of the heat-conducting surfaces 26, 28.

[0072] Fig. 3 shows a further embodiment of the mirror module 10, the view focusing on a partial area of ​​the heat sink 24 known from Figs. 1 and 2. The mirror body 20 is only indicated for better illustration of the embodiment.

[0073] As shown, the heat sink 24 has a step 42, or a shoulder, which facilitates easier positioning of the mirror body 22 on the heat sink 24. Furthermore, the step 42 creates a third heat-conducting surface 44, which further promotes heat dissipation from the mirror body 20.

[0074] The fastening device 30 according to the illustrated embodiment has several, here five, fastening recesses 36. The fastening recesses 36 are formed in the heat sink 24 and serve to receive fastening elements of the fastening device 30. For example, the fastening recesses 30 can be designed to receive a screw 34 (see Figs. 1, 2, 5).

[0075] The fastening recesses 36 are preferably adapted to the respective fastening element to be received. For example, the fastening recesses 36 may have a thread. The fastening recesses 36 may be designed as through-holes.

[0076] The fastening recesses 36 are arranged as shown, evenly distributed around the circumference of the heat-conducting surface 26. This further promotes the even pressing of the heat-conducting surface 26 against the heat-conducting surface 28 (see Figs. 1, 2, 5, 7, 9-13).

[0077] Furthermore, the mounting recesses 36, as shown, are all formed in the first heat-conducting surface 26 of the heat sink 24. This allows the use of fastening elements that cause minimal interference with the geometry of the mirror body 20. This promotes heat conduction within the mirror body 20.

[0078] The illustrated embodiment can be combined with other fastening means, in particular the embodiments of the fastening device 30 explained in the other figures and the description, especially to promote uniform pressing of the heat-conducting surfaces 26, 28.

[0079] Fig. 4 shows the embodiment of the mirror module 10 from Fig. 3 in a sectional view.

[0080] The mounting recesses 36 of the mounting device 30 are designed as blind holes, as shown. The mounting recesses 36 are designed, as shown, for arranging, in particular receiving, fastening elements in the form of magnets 46. For clarity, only one of the magnets 46 is provided with a reference numeral. The magnets 46 are preferably permanently arranged or attached to the heat sink 24.

[0081] Preferably, the magnets 46 are arranged recessed in the mounting recesses 36 relative to the first heat-conducting surface 26 of the heat sink 24. This prevents direct contact with the second heat-conducting surface 28 (see Figs. 1, 2, 5, 7, 9-13) and thus avoids damage.

[0082] The magnets 46 are preferably designed as electromagnets. This allows the contact force of the heat-conducting surfaces 26, 28 to be eliminated during maintenance and simplifies the replacement of the mirror body 20.

[0083] Typically, the fastening device 30 on the mirror body 20 includes a magnetic fastening partner (not shown) for the magnets 46, which causes the heat-conducting surfaces 26, 28 to be pressed against each other. This enables particularly quick and tool-free assembly and disassembly of the mirror body 20.

[0084] Particularly preferably, the mirror body 20 is at least partially, and preferably completely, magnetic. This makes it particularly easy to provide the fastening device 30.

[0085] As shown, the heat sink 24 can have one or more cooling channels 48. The cooling channels 48 are typically designed for the active cooling of the heat sink 24. In other words, the heat sink 24 is fluidically connected to a cooling circuit (not shown) through which the thermal energy absorbed by the heat sink 24 can be dissipated. This allows the cooling capacity of the heat sink 24 to be further increased without complicating or prolonging maintenance and / or risking contamination of the cleanroom 12 (see Fig. 1). The illustrated embodiment can be combined with other fastening means, in particular the embodiments of the fastening device 30 described in the other figures and the description, especially to promote uniform pressure on the heat-conducting surfaces 26, 28.

[0086] Fig. 5 shows another embodiment of the mirror module 10 in a sectional view.

[0087] As shown, the fastening device 30 can be provided with one or more fastening elements designed as screws 34, which penetrate the heat sink 24 and engage in a fastening recess 36 formed on the second heat-conducting surface 28 of the mirror body 20. In other words, the mirror body 20 is screwed in from a side opposite the mirror surface 22. This allows the mirror surface 22 to be designed to be particularly free of defects.

[0088] The fastening device 30 thus causes the heat-conducting surfaces 26, 28 to be pressed against each other by force transmission to the side of the heat sink 24 opposite the first heat-conducting surface 26.

[0089] Preferably, possible cooling channels 48 of the heat sink 24 are designed in the heat sink 24 in such a way that an overlap with the mounting recesses 36 of the screws 34 is reliably excluded.

[0090] The illustrated embodiment can be combined with other fastening means, in particular the embodiments of the fastening device 30 explained in the other figures and the description, especially to promote uniform pressure on the heat-conducting surfaces 26, 28. Fig. 6 shows a further embodiment of the mirror module 10 in a sectional view, where the mirror body 20 is only indicated for clarity.

[0091] According to the illustrated embodiment, the mounting device 30 has an annular intake recess 50, which is formed on the cooling element 24 in the first heat-conducting surface 26. The annular intake recess 50 is connected to a vacuum pump (not shown) by means of a vacuum line 52. The intake recess 50, the vacuum line 52, and the vacuum pump form a vacuum system.

[0092] After positioning the mirror body 20 on the heat sink 24, a vacuum can be created in the suction recess 50 using the vacuum system, causing the mirror body 20 to be drawn against the heat sink 24. This presses the first heat-conducting surface 26 of the heat sink 24 against the second heat-conducting surface 28 (see Figs. 1, 2, 5, 7, 9-13), thus establishing a thermally conductive contact. During maintenance or replacement of the mirror body 20, the vacuum can be released, allowing for easy replacement of the mirror body 20.

[0093] Alternatively or in addition to the annular intake recess 50, locally limited intake recesses (not shown) can be formed in the first heat-conducting surface 26. This allows the heat-conducting surfaces 26, 28 to be pressed against each other at specific points.

[0094] Preferably, possible cooling channels 48 of the cooling body 24 are designed in the cooling body 24 in such a way that an overlap with the intake recess 50 and the vacuum line 52 is reliably excluded.

[0095] The illustrated embodiment can be combined with other fastening means, in particular the embodiments of the fastening device 30 explained in the other figures and the description, especially to promote uniform pressing of the heat-conducting surfaces 26, 28.

[0096] Fig. 7 shows another embodiment of the mirror module 10 in a sectional view.

[0097] As shown, the mirror body 20 has a mounting section 54 projecting beyond the second heat-conducting surface 28 in the opposite direction to the contact direction 32. The mounting section 54 surrounds the heat sink 24 at least partially around its circumference. This enables a positionally accurate and error-free arrangement of the mirror body 20 on the heat sink 24, thereby reducing maintenance time and susceptibility to errors.

[0098] According to the illustrated embodiment of the mirror module 10, the fastening device 30 is formed and arranged at least partially, here exclusively, in the enclosed section of the heat sink 24 and the fastening section 54 of the mirror body 20 encompassing the heat sink 24.

[0099] The mounting device 30 has a circumferential mounting recess 36 that penetrates the mounting section 54 of the mirror body 20 and extends into the heat sink 24. The mounting recess 36 is wedge-shaped, as shown, and tapers with increasing depth.

[0100] A clamping wedge 56 of the fastening device 30 is arranged in the fastening recess 36 in an insertion direction 58 perpendicular to the contact direction 32. The clamping wedge 56 expands in the opposite direction of insertion 58, so that as the clamping wedge 56 is inserted, the heat-conducting surfaces 26, 28 are pressed against each other in the contact direction 32. By releasing the clamping wedge 56 in the opposite direction of insertion 58, the fastening of the mirror body 20 to the heat sink 24 can be released. Preferably, the fastening device 30 comprises two or more such clamping wedges 56, which are distributed evenly around the circumference of the heat sink 24 for fastening the mirror body 20. This ensures particularly close contact between the heat-conducting surfaces 26, 28.

[0101] In a particular embodiment, the clamping wedge 56 can be formed on the mounting section 54. In other words, part of the mounting device 30 is permanently attached to the mirror body 20 and remains attached to it when the mirror body 20 is replaced. According to this embodiment, the heat-conducting surfaces 26, 28 can be pressed against the mirror body 20 by arranging it in the insertion direction 58, whereby the mirror body 20 becomes wedged against the heat sink 24 as the insertion movement increases. Alternatively or additionally, the clamping wedge 56 can be formed on the heat sink 24 in a similar manner.

[0102] The illustrated embodiment can be combined with other fastening means, in particular the embodiments of the fastening device 30 explained in the other figures and the description, especially to promote uniform pressing of the heat-conducting surfaces 26, 28.

[0103] Fig. 8 shows another embodiment of the mirror module 10 in a sectional view.

[0104] According to the illustrated embodiment, the mirror body 20 essentially encloses a partial section of the heat sink 24.

[0105] The illustrated embodiment can be combined with other fastening means, in particular the embodiments of the fastening device 30 explained in the other figures and the description, especially to promote uniform pressure on the heat-conducting surfaces 26, 28. Fig. 9 shows the embodiment of the mirror module 10 from Fig. 8 in a sectional view.

[0106] As shown, the mirror body 20 encloses a section of the heat sink 24 designed as a cooling mandrel 60, which projects beyond a base body 62 of the heat sink 24 in the opposite direction of insertion 58. The cooling mandrel 60 can have cooling channels 48 to increase the cooling capacity of the heat sink 24.

[0107] According to the illustrated embodiment, the mirror body 20 can be made up of multiple parts. Preferably, the mirror body 20 has a mirror section 64 and a retaining section 66.

[0108] The mirror section 64 is typically made of a material that enables the provision of a highly reflective mirror surface 22. Typically, the mirror section is made of copper, gold, silver, aluminum, rhodium, platinum, or chromium.

[0109] The retaining section 66 is preferably permanently attached to the mirror section 64, in particular by soldering. The retaining section 66 is preferably made of a robust and highly precisely formable material. Typically, the retaining section is made of stainless steel.

[0110] The mirror section 64 together with the retaining section 66 forms a heat sink receptacle 68, which is designed for arranging the cooling mandrel 60.

[0111] According to the illustrated embodiment, the fastening device 30 has a clamping wedge 56 formed on the retaining section 66. In other words, the fastening device 30 is at least partially formed on the mirror body 20. This reduces the number of fastening elements and simplifies assembly and disassembly. The clamping wedge 56 is formed on a side of the retaining section 66 facing the mirror section 64, or on the side of the heat sink receptacle 68 opposite the mirror section 64. This ensures that, when the mirror body 20 is mounted on the cooling mandrel 60, the force is applied by the clamping wedge 56 on the side of the cooling mandrel 60 opposite the first heat-conducting surface 26.

[0112] The clamping wedge 56 tapers the heat sink receptacle 68 opposite to the insertion direction 58 to a dimension smaller than the corresponding dimension of the cooling mandrel 60 along the contact direction 32. This causes the mirror body 20 to clamp onto the cooling mandrel 60, resulting in the heat-conducting surfaces 26, 28 being pressed against each other. In other words, the heat-conducting surfaces 26, 28 are pressed against each other by sliding the mirror body 20 onto the heat sink 24.

[0113] The illustrated embodiment can be combined with other fastening means, in particular the embodiments of the fastening device 30 explained in the other figures and the description, especially to promote uniform pressing of the heat-conducting surfaces 26, 28.

[0114] Fig. 10 shows another embodiment of the mirror module 10 in a sectional view.

[0115] The embodiment according to Fig. 10 differs essentially in the design of the fastening device 30 from the embodiment of the mirror module from Fig. 9.

[0116] As shown, the fastening device 30 has a clamping element 70. The clamping element 70 is typically arranged, and preferably attached, to the side of the cooling mandrel 60 opposite the first heat-conducting surface 26, between the cooling mandrel 60 and the retaining section 66. The clamping element 70 is typically designed as an elastic element, in particular as a spring element. Preferably, the clamping element 70 is attached to the mirror body 20 or to the heat sink 24. This reduces the number of individual parts and thus the maintenance effort.

[0117] By positioning or sliding the mirror body 20 onto the heat sink 24 or the cooling mandrel 60, the clamping element 70 is partially deformed, thereby generating a restoring force in the direction and against the contact direction 32. This restoring force clamps the mirror body 20 to the heat sink 24, causing the heat-conducting surfaces 26 and 28 to press against each other.

[0118] The illustrated embodiment can be combined with other fastening means, in particular the embodiments of the fastening device 30 explained in the other figures and the description, especially to promote uniform pressing of the heat-conducting surfaces 26, 28.

[0119] Fig. 11 showed the embodiment of the mirror module from Fig. 10 in a sectional view in insertion direction 58.

[0120] In the state when pushed onto the cooling mandrel 60, the clamping element 70 causes the heat conducting surfaces 26, 28 to be pressed against each other.

[0121] The illustrated embodiment can be combined with other fastening means, in particular the embodiments of the fastening device 30 explained in the other figures and the description, especially to promote uniform pressing of the heat-conducting surfaces 26, 28.

[0122] Fig. 12 shows another embodiment of the mirror module 10 in a sectional view in the insertion direction 58.

[0123] As shown, the fastening device 30 has a clamping element 70. The clamping element 70 is designed as a pre-stressed wall element of the retaining section 66 of the mirror body 20. In other words, the clamping element 70 is curved into the heat sink receptacle 58. By sliding the mirror body 20 onto the clamping element 70, a restoring force is generated, which causes the heat-conducting surfaces 26, 28 to press against each other.

[0124] As shown, the fastening device 30 can have a pressure reservoir 72. The pressure reservoir 72 is typically designed as a closed cavity and has an adjustable internal pressure 74. This allows the restoring force of the clamping element 70 to be adapted to given installation conditions or a required clamping force.

[0125] The illustrated embodiment can be combined with other fastening means, in particular the embodiments of the fastening device 30 explained in the other figures and the description, especially to promote uniform pressing of the heat-conducting surfaces 26, 28.

[0126] Fig. 13 shows another embodiment of the mirror module 10 in a sectional view in the insertion direction 58.

[0127] As shown, the mounting device 30 has a mounting diaphragm 76. The mounting diaphragm 76 is typically pressure-controlled and can be deflected in a controlled manner depending on the internal pressure 74 in the pressure reservoir 72. This allows the mirror body 20 to be slid onto the cooling mandrel 60 without resistance or friction. After the mirror body 20 is positioned on the cooling body 24, the heat-conducting surfaces 26, 28 can be pressed against it by deflecting the mounting diaphragm 76 as a result of an increase in the internal pressure 74. In other words, the mounting device 30 deforms when the mirror body is slid onto the cooling body 24. This enables particularly uniform pressure on the heat-conducting surfaces 26, 28. Furthermore, the internal pressure 74 can be flexibly adjusted to the required contact pressure of the heat-conducting surfaces 26, 28.

[0128] As shown, the internal pressure 74 in the pressure reservoir 72 can be regulated by a variable control volume 78. The control volume 78 can be directly integrated into the pressure reservoir 72. Alternatively or additionally, the control volume 78 can form a separate cavity that is fluidically connected to the pressure reservoir 72. The control volume 78 typically has at least one movable wall, the movement of which can change the volume within the control volume 78.

[0129] As shown, the mounting device 30 has a control diaphragm 80 which is pivotably attached within the control volume 78 by means of an adjusting screw 82. By turning the adjusting screw 82, the control diaphragm 80 can be deflected, thus reducing the size of the control volume 78. This increases the pressure within the control volume 78, along with the internal pressure 74 of the pressure reservoir 72. The mounting diaphragm 76 is thereby deflected in the contact direction 32 and presses the heat sink 24 with its first heat-conducting surface 26 against the second heat-conducting surface 28 of the mirror body 20. By turning the adjusting screw 82 out, the pressure can be reduced accordingly, and the pressure on the heat sink 24 can be released.

[0130] The pressure reservoir 72 and the control volume 78 are preferably filled with gas, in particular air, or a liquid, in particular water or oil. This allows the pressure increase to be adjusted depending on a change in volume.

[0131] Thus, the fastening device 30, according to the illustrated embodiment, is designed to press the heat-conducting surfaces 26, 28 against the mounting surface by hydraulic and / or pneumatic deformation of the fastening element, here in the form of a fastening membrane 76. The illustrated embodiment can be combined with other fastening elements, in particular the embodiments of the fastening device 30 described in the other figures and the description, especially to promote uniform pressing of the heat-conducting surfaces 26, 28 against the mounting surface.

[0132]

[0133] 10 mirror modules; 48 cooling channels;

[0134] 12 cleanroom; 50 intake openings;

[0135] 14 evacuated environment; 52 vacuum line;

[0136] 16 electromagnetic wave, 25 54 fastening section;

[0137] 18 Laser radiation; 56 Clamping wedge;

[0138] 20 mirror bodies; 58 insertion direction;

[0139] 22 Mirror surface; 60 Cooling mandrel;

[0140] 24 heat sinks; 62 base bodies;

[0141] 26 First heat-conducting surface; 30 64 Mirror section;

[0142] 28 second heat-conducting surface; 66 holding section;

[0143] 30 Mounting device; 68 Heat sink mount;

[0144] 32 Contact direction; 70 Clamping element;

[0145] 34 Screw; 72 Pressure reservoir;

[0146] 36 Mounting recess; 35 74 Internal pressure;

[0147] 38 Pressure ring; 76 Mounting membrane;

[0148] 40 Rand; 78 tax volume;

[0149] 42 steps; 80 control membranes;

[0150] 44 Third heat-conducting surface; 82 Adjusting screw.

[0151] 46 Magnet;

Claims

Patent claims 1. Mirror module (10) for arrangement in a cleanroom (12), in particular an air-emptied environment (14), wherein the mirror module (10) is designed for deflecting electromagnetic waves (16), in particular laser radiation (18), comprising a mirror body (20) with at least one mirror surface (22) and a heat sink (24) detachably arranged on the mirror body (20), wherein the heat sink (24) has a first heat-conducting surface (26) and the mirror body (20) has a second heat-conducting surface (28), wherein the first heat-conducting surface (26) is in direct contact with the second heat-conducting surface (28) at least partially, in order to dissipate thermal energy from the mirror body (20), wherein the mirror module (10) comprises a fastening device (30) which causes the first heat-conducting surface (26) to be detachably pressed against the second heat-conducting surface (28).

2. Mirror module (10) according to claim 1, wherein the first heat conducting surface (26) and / or the second heat conducting surface (28) is designed as a planar surface.

3. Mirror module (10) according to claim 1 or 2, wherein the second heat conducting surface (28) of the mirror body (20) is formed on a side opposite the mirror surface (22).

4. Mirror module (10) according to one of the preceding claims, wherein the fastening device (30) has at least one screw (34) for pressing the heat-conducting surfaces (26, 28) together.

5. Mirror module (10) according to one of the preceding claims, wherein the fastening device (30) is permanently arranged and / or attached to the mirror body (20) and / or to the heat sink (24).

6. Mirror module (10) according to one of the preceding claims, wherein the fastening device (30) comprises at least one fastening recess (36) formed in the heat sink (24).

7. Mirror module (10) according to claim 6, wherein the at least one mounting recess (36) is formed, in particular exclusively, in the first heat conducting surface (26) of the heat sink (24).

8. Mirror module (10) according to claim 7, wherein the fastening device (30) comprises at least one magnet (46), wherein the magnet (46) is arranged in the at least one fastening recess (36) and causes magnetic pressing of the heat conducting surfaces (26, 28).

9. Mirror module (10) according to one of claims 1 to 7, wherein the fastening device (30) for pressing the heat conducting surfaces (26, 28) against one of the heat conducting surfaces (26, 28) is designed by force transmission on one of the sides of the heat sink (24) opposite the first heat conducting surface (26).

10. Mirror module (10) according to one of the preceding claims, wherein the mirror body (20) encompasses the heat sink (24) at least partially, in particular substantially enclosing it.

11. Mirror module (10) according to claim 10, wherein the fastening device (30) is formed and / or arranged at least partially, in particular exclusively, in the encompassed section of the heat sink (24) and / or the fastening section (54) of the mirror body (20) encompassing the heat sink (24).

12. Mirror module (10) according to claim 11, wherein the fastening device (30) comprises at least one clamping wedge (56), wherein the clamping wedge (56) can be arranged perpendicular to a contact direction (32) of the heat conducting surfaces (26, 28) in and / or on the mirror body (20) and / or the heat sink (24).

13. Mirror module (10) according to claim 12, wherein the clamping wedge (56) is formed on the mirror body (20) and / or on the heat sink (24).

14. Mirror module (10) according to one of claims 10 to 13, wherein the fastening device (30) has a clamping element (70) arranged and / or fastened between the mirror body (20) and the heat sink (24).

15. Mirror module (10) according to one of claims 10 to 14, wherein the mirror body (20) is designed to be slid onto the heat sink (24) along an insertion direction (58).

16. Mirror module (10) according to claim 15, wherein the heat conducting surfaces (26, 28) are pressed against by sliding the mirror body (20) onto the heat sink (24).

17. Mirror module (10) according to claim 15, wherein the heat conducting surfaces (26, 28) are pressed against by deformation of the fastening device (30) in the state of the mirror body (20) being pushed onto the cooling body (24).

18. Mirror module (10) according to claim 16, wherein the fastening device (30) is designed to press the heat-conducting surfaces (26, 28) by hydraulic and / or pneumatic deformation.

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