Dark wet-process laboratory for scientific research

Abstract

The present application relates to the technical field of semiconductor cleaning and etching. Disclosed is a dark wet-process laboratory for scientific research. The dark wet-process laboratory comprises a laboratory body, a wet-process machine, a transfer robot, a sample supply and storage apparatus, a liquid-chemical supply and storage apparatus and a control apparatus. The laboratory body is configured to provide a clean space. The transfer robot comprises a moving device, a robotic arm device, at least one end effector and a follower device, wherein the follower device can move with the moving device and provide a temporary-storage space; the robotic arm device is mounted on the moving device; and the at least one end effector is mounted on the robotic arm device and is configured to grab a semiconductor sample and / or a liquid-chemical tank. The design enables 24-hour uninterrupted and unattended operation of experiments, so as to implement a dark laboratory, thus significantly improving the efficiency of scientific research and the utilization rate of apparatuses, improving the reliability of experiment results, reducing experiment costs, and effectively ensuring the safety of experimenters.

Description

Black light wet laboratory for scientific research TECHNICAL FIELD

[0001] The present application relates to the field of semiconductor cleaning and etching technology, in particular to a black light wet laboratory for scientific research. BACKGROUND

[0002] In the manufacturing process of semiconductor micro-nano devices, a wet bench is needed for wafer surface cleaning and acid-base etching. Although the traditional enterprise-level wet bench has high automation, it is only suitable for batch production and cannot meet the flexible scientific research scenarios. To solve the above problems, a scientific research type wet etching full automation system and machine table is disclosed in Chinese Patent No. CN118053795B to meet the needs of university scientific research, improve scientific research efficiency and process stability. However, this design can only achieve single-table automation, and the wet laboratory built in this way still needs to rely on manual operation by personnel, which has the following disadvantages:

[0003] 1. It is difficult to further improve the efficiency of scientific research;

[0004] 2. The scientific research wet bench is difficult to fully utilize;

[0005] 3. The experimental results are unstable and the reliability is insufficient;

[0006] 4. The laboratory management is difficult and the experimental cost is high;

[0007] 5. There are safety hazards for personnel;

[0008] 6. The data collection and analysis efficiency is low.

[0009] Therefore, it is urgent to provide a new design scheme to solve the above problems. SUMMARY

[0010] Therefore, the purpose of the present application is to provide a black light wet laboratory for scientific research to solve the technical problem that the existing scientific research wet laboratory still needs to rely on manual operation by personnel.

[0011] To achieve the above technical purpose, the present application provides a black light wet laboratory for scientific research, which comprises a laboratory body, a wet machine table, a transfer robot, a sample feeding and collecting device, a chemical liquid feeding and collecting device, and a control device.

[0012] The laboratory body is used to provide a clean space;

[0013] The wet machine table is arranged in the clean space and is used to process semiconductor samples;

[0014] The sample feeding and collecting device is arranged in the clean space and is used to provide semiconductor samples to be processed and to store the semiconductor samples after processing;

[0015] The sample supply and collection device is arranged in the clean space and is configured to provide a chemical liquid tank to be replaced and to store the replaced chemical liquid tank;

[0016] The transfer robot is arranged in the clean space and is configured to transfer semiconductor samples and / or chemical liquid tanks between the wet processing machine, the transfer robot, the sample supply and collection device, and the chemical liquid supply and collection device;

[0017] The transfer robot comprises a moving device, a mechanical arm device, at least one end effector, and a following device;

[0018] The following device is capable of moving with the moving device and provides a temporary storage space;

[0019] The mechanical arm device is arranged on the moving device;

[0020] The at least one end effector is arranged on the mechanical arm device and is configured to grasp semiconductor samples and / or chemical liquid tanks;

[0021] The control device is communicatively connected to the wet processing machine, the transfer robot, the sample supply and collection device, and the chemical liquid supply and collection device.

[0022] Further, the following device is detachably connected to the moving device;

[0023] The following device further comprises a following fixing frame;

[0024] The following fixing frame is arranged in the clean space and is configured to fix the following device one by one;

[0025] The transfer robot further comprises a fork device;

[0026] The fork device is arranged on the moving device and is configured to fork the following device located on the following fixing frame.

[0027] Further, the fork device comprises a fork lifting device and a fork plate;

[0028] The following fixing frame is provided with an avoidance cavity below the following device, in which the fork plate is capable of extending;

[0029] The fork lifting device is arranged on the top of the moving device and is connected to the fork plate at a driving end, and is configured to drive the fork plate to move up and down, so as to fork the following device away from the following fixing frame or fork the following device back to the following fixing frame.

[0030] Further, the top of the fork plate is provided with a plurality of first fork positioning structures;

[0031] The bottom of the accompanying device is provided with a plurality of second fork positioning structures which are positioned and matched with the first fork positioning structures.

[0032] Further, the accompanying device is provided with a cavity for forming the temporary storage space.

[0033] The accompanying device is provided with an accompanying opening and closing door mechanism for controlling the opening and closing of the cavity.

[0034] Further, the accompanying fixing frame comprises two support plates which are symmetrically arranged at intervals.

[0035] The two side surfaces of the accompanying device are respectively provided with limiting protrusions which can be one-to-one corresponding and in contact with the top of the support plates.

[0036] Further, the end effector comprises at least two.

[0037] One of the end effectors is used for grabbing semiconductor samples.

[0038] The other end effector is used for grabbing liquid medicine tanks.

[0039] The end effector is detachably connected with the mechanical arm device through a joint assembly.

[0040] The accompanying device is provided with a placement station for placing the end effector.

[0041] Further, a sample loading mechanism is installed below the sample inlet and outlet of the wet processing machine for carrying semiconductor materials to be sent into the sample inlet and outlet or carrying semiconductor materials sent out from the sample inlet and outlet.

[0042] Further, the sample loading mechanism comprises a loading plate and a sample loading driving assembly.

[0043] The loading plate is rotatably installed on the wet processing machine.

[0044] The sample loading driving assembly is installed on the wet processing machine and connected with the loading plate for driving the loading plate to rotate.

[0045] Further, a liquid medicine loading mechanism is installed at the liquid storage cavity position of the wet processing machine for carrying liquid medicine tanks.

[0046] The liquid medicine loading mechanism comprises a loading seat, a liquid medicine loading driving assembly and a liquid taking member.

[0047] The loading seat is used for carrying liquid medicine tanks.

[0048] The liquid medicine loading driving assembly is connected with the loading seat for driving the loading seat to extend or retract from the liquid storage cavity.

[0049] The liquid taking member is detachably mounted on the chemical liquid tank.

[0050] Further, the liquid taking member comprises a liquid taking pipe and a liquid taking cover.

[0051] The liquid taking pipe is capable of extending into the chemical liquid tank through a chemical liquid port of the chemical liquid tank.

[0052] The liquid taking cover is sleeved on the liquid taking pipe and is capable of cooperating with the chemical liquid port to seal the chemical liquid port.

[0053] The carrier seat is vertically mounted with a fixing member for fixing the liquid taking member to be mounted.

[0054] The fixing member is a hollow column structure for the liquid taking pipe to be movably inserted.

[0055] Further, the sample taking device comprises a device main body and a sample shifting device.

[0056] The device main body is internally provided with a sample chamber.

[0057] The sample chamber is provided at the bottom with a first loading and unloading station, a second loading and unloading station, a first temporary storage station and a second temporary storage station.

[0058] The device main body is provided at a position corresponding to the first loading and unloading station with a first loading and unloading window communicating between the sample chamber and the clean space outside.

[0059] The first loading and unloading window is mounted with a first door window capable of being opened and closed.

[0060] The device main body is provided at a position corresponding to the second loading and unloading station with a second loading and unloading window communicating between the sample chamber and the clean space inside.

[0061] The second loading and unloading window is mounted with a second door window capable of being opened and closed.

[0062] The sample shifting device is mounted in the sample chamber for shifting the semiconductor sample between the first loading and unloading station, the second loading and unloading station, the first temporary storage station and the second temporary storage station.

[0063] Further, the device main body is mounted on one side of the first loading and unloading window with a human-computer interaction device in communication connection with the control device and extending out of the clean space.

[0064] Further, the chemical liquid taking device comprises a chemical liquid buffer tank.

[0065] The chemical liquid buffer tank is internally provided with a buffer chamber for storing the chemical liquid tank to be loaded or the chemical liquid tank to be replaced.

[0066] The medicine liquid buffer tank is provided with a buffer opening;

[0067] A buffer door is installed on the buffer opening.

[0068] Further, the clean space floor is divided into an outer annular area, an inner annular area and a center area in the inner annular area from outside to inside;

[0069] The wet process machine is arranged in the outer annular area or the center annular area;

[0070] The sample feeding device and the medicine liquid feeding device are arranged in the outer annular area.

[0071] Further, the mechanical arm device is a collaborative mechanical arm.

[0072] Further, the moving device is an AGV trolley.

[0073] From the above technical solutions, it can be seen that the black light wet laboratory for scientific research designed in the present application can realize 24-hour uninterrupted operation of experiments and unattended operation through the linkage of the transfer robot, sample feeding device, medicine liquid feeding device, control device and wet process machine, and realize a black light laboratory, which has the following beneficial effects:

[0074] 1. The work order can be automatically arranged according to the input of the experiment personnel, and the automatic circulation of the semiconductor sample, the automatic replacement of the medicine liquid tank, the automatic processing of the semiconductor sample, the automatic collection and analysis of the experimental data, etc. can be carried out according to the arrangement, which significantly improves the efficiency of scientific research and the utilization rate of equipment.

[0075] 2. The experiment personnel does not need to contact the medicine liquid, which effectively ensures the safety of the experiment personnel.

[0076] 3. Avoiding the instability of traditional manual operation of the experiment personnel to cause the waste of medicine liquid and sample, and the damage of equipment caused by misoperation, etc., which effectively reduces the experimental cost.

[0077] 4. The experimental process of semiconductor materials is automatically carried out, which improves the stability and accuracy of the test, thereby improving the reliability of the experimental results.

[0078] 5. Automatic unattended operation improves the management level of the laboratory.

[0079] 6. The design has a following device to follow the moving device to move, which can realize the transfer of multiple semiconductor samples or multiple medicine liquid tanks at a time, reduces the frequency of repeated material taking, and further improves the efficiency.

[0080] 7、It has great significance to promote the development of scientific research technology, improve the efficiency of semiconductor technology research and development, and accelerate the research and development progress. BRIEF DESCRIPTION OF DRAWINGS

[0081] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0082] Fig. 1 is a perspective view of a black light wet laboratory for scientific research provided in the present application without a laboratory body;

[0083] Fig. 2 is a perspective view of a transfer robot of a black light wet laboratory for scientific research provided in the present application;

[0084] Fig. 3 is a perspective view of the cooperation of a traveling device and a traveling fixture of a black light wet laboratory for scientific research provided in the present application;

[0085] Fig. 4 is a perspective view of a transfer robot of a black light wet laboratory for scientific research provided in the present application without a traveling device;

[0086] Fig. 5 is a first perspective view of a traveling device of a black light wet laboratory for scientific research provided in the present application;

[0087] Fig. 6 is a perspective view of a wet process machine of a black light wet laboratory for scientific research provided in the present application;

[0088] Fig. 7 is an exploded schematic view of a liquid medicine carrying mechanism of a black light wet laboratory for scientific research provided in the present application with a liquid medicine tank;

[0089] Fig. 8 is a perspective view of a liquid medicine carrying mechanism of a black light wet laboratory for scientific research provided in the present application with a liquid medicine tank;

[0090] Fig. 9 is a perspective view of a sample feeding and collecting device of a black light wet laboratory for scientific research provided in the present application without part of the device body;

[0091] Fig. 10 is a perspective view of a liquid medicine buffer tank of a black light wet laboratory for scientific research provided in the present application;

[0092] In the figure: 1, wet method machine table; 11, sample inlet and outlet; 12, sample loading mechanism; 121, loading plate; 122, sample loading drive assembly; 13, liquid storage cavity; 14, liquid loading mechanism; 141, loading seat; 142, liquid loading drive assembly; 143, liquid taking part; 1431, liquid taking cover; 1432, liquid taking pipe; 1433, liquid taking connector; 144, fixing part; 15, liquid tank; 151, liquid port; 2, transfer robot; 21, moving device; 22, mechanical arm device; 23, end effector; 24, accompanying device; 241, second fork positioning structure; 242, accompanying opening and closing door mechanism; 243, limiting protrusion; 244, placement station; 25, connector assembly; 251, first connector; 252, second connector; 26, accompanying fixing frame; 261, support plate; 27, fork device; 271, fork lifting device; 272, fork disc; 2721, first fork positioning structure; 3, sample feeding and collecting equipment; 31, equipment main body; 311, first feeding and discharging station; 312, second feeding and discharging station; 313, first temporary storage station; 314, second temporary storage station; 32, sample shifting device; 33, flower basket frame; 331, semiconductor material; 34, human-computer interaction device; 4, liquid feeding and collecting equipment; 41, liquid buffer box; 42, buffer door; 5, control equipment; 61, outer annular area; 62, inner annular area; 63, center area. DETAILED DESCRIPTION

[0093] The technical solutions of the embodiments of the present application will be described clearly and completely below with reference to the drawings. Obviously, the described embodiments are only some of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0094] In the description of the embodiments of the present application, it should be noted that the orientations or positional relationships indicated by the terms “center”, “upper”, “lower”, “left”, “right”, “vertical”, “horizontal”, “inner”, “outer” and the like are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the embodiments of the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the embodiments of the present application. In addition, the terms “first”, “second”, “third” are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0095] In the description of the embodiments of the present application, it should be noted that, unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connecting" should be understood in a broad sense, for example, can be fixed connection, or can be replaceable connection, or integral connection, can be mechanical connection, or electrical connection, can be direct connection, or indirect connection through an intermediate medium, or internal communication of two elements. For those skilled in the art, the specific meaning of the above terms in the embodiments of the present application can be understood according to the specific circumstances.

[0096] The embodiments of the present application disclose a black light wet laboratory for scientific research.

[0097] Please refer to FIG. 1 and FIG. 2, one embodiment of the black light wet laboratory for scientific research provided in the embodiments of the present application includes:

[0098] The laboratory body (not shown in the figure), the wet bench 1, the transfer robot 2, the sample feeding device 3, the chemical liquid feeding device 4, and the control device 5.

[0099] The laboratory body is used to provide a clean space, and the laboratory body can be built by, for example, fireproof and explosion-proof plates, and is configured with, for example, fireproof, air purification and other equipment to ensure the cleanliness and safety of the clean space. Those skilled in the art can make appropriate changes and designs based on this without limitation.

[0100] The wet bench 1 is arranged in the clean space and is used to process semiconductor samples. The wet bench 1 in the present application can be arranged as needed, and is of different types. Taking the multiple wet benches 1 as an example, one of the wet benches 1 can be an organic wet bench, two of the wet benches 1 can be oxide cleaning benches, one of the wet benches 1 can be a metal etching bench, one of the wet benches 1 can be a KOH cleaning bench, one of the wet benches 1 can be an HF cleaning bench, one of the wet benches 1 can be a mask cleaning bench, and the like. Those skilled in the art can select as needed without limitation. It should be noted that each bench device is designed based on or follows the scientific research type wet etching full automatic system and bench disclosed in Chinese Patent Publication No. CN118053795B, and details are not described herein.

[0101] The sample feeding device 3 is arranged in the clean space and is used to provide semiconductor samples to be processed and to store the processed semiconductor samples.

[0102] The chemical liquid feeding device 4 is arranged in the clean space and is used to provide chemical liquid tanks 15 to be replaced and to store the replaced chemical liquid tanks 15.

[0103] The transfer robot 2 is installed in a clean space, and is used to transfer semiconductor samples and / or liquid medicine tanks 15 between the wet processing machine 1, the transfer robot 2, the sample delivery device 3, and the liquid medicine delivery device 4.

[0104] The transfer robot 2 comprises a moving device 21, a mechanical arm device 22, at least one end effector 23, and a following device 24.

[0105] The following device 24 can follow the movement of the moving device 21, and provides a temporary storage space; the temporary storage space can be used to temporarily store semiconductor samples to be loaded, semiconductor samples after processing, liquid medicine tanks 15 to be replaced, or replaced liquid medicine tanks 15.

[0106] The mechanical arm device 22 is installed on the moving device 21; the at least one end effector 23 is installed on the mechanical arm device 22, and is used to grasp semiconductor samples and / or liquid medicine tanks 15. The end effector 23 can be an existing mechanical gripper, which can grasp a wafer basket rack 33 or a jig rack loaded with semiconductor samples, and can also be used to grasp a liquid medicine tank 15, grasp a tank cover of the liquid medicine tank 15, and under the action of a rotating mechanism at the end of the mechanical arm, unscrew or tighten the tank cover, without limitation.

[0107] The control device 5 is in communication connection with the wet processing machine 1, the transfer robot 2, the sample delivery device 3, and the liquid medicine delivery device 4.

[0108] The black-light wet laboratory for scientific research designed in the present application can realize 24-hour uninterrupted operation of experiments and unattended operation by setting the transfer robot 2, the sample delivery device 3, the liquid medicine delivery device 4, and the control device 5 in linkage with the wet processing machine 1, and realizes a black-light laboratory, and has the following beneficial effects:

[0109] 1. The work order can be automatically arranged according to the input of the experimental personnel, and the automatic circulation of semiconductor samples, the automatic replacement of liquid medicine tanks 15, the automatic processing of semiconductor samples, the automatic collection and analysis of experimental data, etc. can be carried out according to the arrangement of the work order, which significantly improves the efficiency of scientific research and the utilization rate of equipment.

[0110] 2. The experimental personnel do not need to contact the liquid medicine, which effectively ensures the safety of the experimental personnel.

[0111] 3. The instability of traditional manual operation of experimental personnel is avoided, which can cause waste of liquid medicine and samples, and damage to equipment due to misoperation, and the experimental cost is effectively reduced.

[0112] 4. The experimental process of semiconductor materials 331 is automatically carried out, which improves the stability and accuracy of the test, thereby improving the reliability of the experimental results.

[0113] 5. The laboratory management level is improved by automatic unattended operation.

[0114] 6. The device is designed with a follower device 24 to move with the mobile device 21, which can realize the transfer of multiple semiconductor samples or multiple liquid tanks 15 at one time, reducing the frequency of reciprocating material handling and further improving efficiency.

[0115] 7. It has a significant role in promoting the development of scientific and technological research, improving the efficiency of semiconductor technology research and development, and accelerating the research and development process.

[0116] The above is Embodiment 1 of the scientific research dark-light wet scrubbing laboratory provided in this application. The following is Embodiment 2 of the scientific research dark-light wet scrubbing laboratory provided in this application. Please refer to Figures 1 to 10 for details.

[0117] Based on the solution of Embodiment 1 above:

[0118] Furthermore, to enhance ease of use, different accompanying devices 24 can be selected for use as needed. These accompanying devices 24 are designed to be detachably connected to the mobile device 21.

[0119] Specifically, as shown in Figure 3, this application is designed with a traveling bracket 26; the traveling bracket 26 is installed in a clean space and is used to fix the traveling devices 24 one by one.

[0120] As shown in Figure 4, the transfer robot 2 also includes a forking device 27; the forking device 27 is mounted on the moving device 21 and is used to fork up the accompanying device 24 located on the accompanying mounting frame 26. Multiple accompanying devices 24 are designed, and multiple corresponding accompanying mounting frames 26 are designed, each mounting and fixing one accompanying device 24. When needed, the forking device 27 is used to retrieve the corresponding accompanying device 24, thus connecting the accompanying device 24 to the moving device 21. When not in use, the accompanying device 24 can be returned to the accompanying mounting frame 26.

[0121] Furthermore, as shown in Figure 4, the design of the forklift device 27 includes a forklift lifting device 271 and a fork plate 272.

[0122] The accompanying mounting bracket 26 has a clearance cavity below the accompanying device 24 for the fork 272 to extend into, ensuring that the moving device 21 can move the fork 272 to the area below the corresponding accompanying device 24.

[0123] The fork lifting device 271 is installed on the top of the mobile device 21, and its drive end is connected to the fork plate 272. It is used to drive the fork plate 272 to lift and lower, so as to fork the accompanying device 24 away from the accompanying fixed frame 26 or to fork the accompanying device 24 back into the accompanying fixed frame 26.

[0124] When taking, the mobile device 21 drives into the avoiding cavity, and the fork disc 272 is located directly below the corresponding follower device 24, then the fork lifting device 271 drives the fork disc 272 to move upward to be able to hold the follower device 24, the mobile device 21 moves out of the avoiding cavity to fork the follower device 24 from the follower fixing frame 26, and then the fork lifting device 271 drives the fork disc 272 to descend to the initial position.

[0125] When returning, the fork lifting device 271 drives the fork disc 272 to rise by a certain height, then the mobile device 21 drives into the avoiding cavity, and the fork disc 272 is located above the corresponding follower fixing frame 26, then the fork lifting device 271 drives the fork disc 272 to descend by a certain height to return the follower device 24 to the follower fixing frame 26.

[0126] The mechanical arm device 22 in the application can be installed on the top of the fork lifting device 271, and the fork lifting device 271 can be a lead screw sliding table and the like, which meets the lifting control requirement and is not limited.

[0127] Further, as shown in FIG. 3 and FIG. 5, in order to realize accurate forking and reliable connection between the follower device 24 and the fork disc 272 after forking, the top of the fork disc 272 is provided with a plurality of first forking positioning structures 2721; correspondingly, the bottom of the follower device 24 is provided with a plurality of second forking positioning structures 241 which are positioned and matched with the first forking positioning structures 2721.

[0128] The first forking positioning structure 2721 can be a positioning protrusion, and the number thereof can be four; correspondingly, the second forking positioning structure 241 can be a positioning groove, and the number thereof is consistent with that of the positioning protrusions, and those skilled in the art can make appropriate change design on the basis of this, which is not limited.

[0129] In order to realize accurate positioning and matching, a positioning guide groove with a guide inclined surface can be designed around the positioning groove, so as to guide the positioning protrusion into the positioning groove to realize physical positioning. Of course, a positioning sensor such as a scanner can be additionally arranged at the bottom of the follower device 24, and a sensing structure such as a label code can be arranged on the fork disc 272 which can be sensed by the positioning sensor, so as to realize sensing positioning, and those skilled in the art can make appropriate change design on the basis of this, which is not limited.

[0130] Further, as shown in FIG. 3, the follower device 24 is in a box-like structure, and a containing cavity is arranged in the inside thereof to form a temporary storage space; and a follower opening and closing door mechanism 242 for controlling the opening and closing of the containing cavity is arranged on the follower device 24. The follower opening and closing door mechanism 242 is an electric door mechanism, which is controlled by the control equipment 5 to realize electric opening and closing, for example, a flip type electric door mechanism, which can refer to the existing electric door design or directly use, and specific details are not described herein.

[0131] In order to meet the power supply of the electric door mechanism, the battery is arranged in the accompanying device 24, and correspondingly, the charging device can be arranged on the accompanying fixed frame 26 to charge the battery in the fixed accompanying device 24. The charging mode can be wireless charging or contact charging. Of course, the accompanying opening and closing door mechanism 242 can also be a manual door mechanism, and the end effector 23 is driven by the mechanical arm device 22 to simulate human hand to perform the opening or closing door action.

[0132] Further, as shown in FIG. 3, the design of the accompanying fixed frame 26 can include two support plates 261 arranged symmetrically at intervals; correspondingly, the two side surfaces of the accompanying device 24 are respectively provided with limiting protrusions 243 which can be in one-to-one correspondence with the top of the support plate 261. In the contact charging design, the bottom of the limiting protrusion 243 and the top of the support plate 261 can be provided with charging contacts to achieve charging of the battery inside the accompanying device 24 by contact.

[0133] Further, as shown in FIG. 3, the end effector 23 is designed to be at least two, one of which is used to grab the semiconductor sample, and the other is used to grab the liquid medicine tank 15. Different end effectors 23 are used to perform different actions, so as to more specifically design the corresponding end effector 23, for example, the opening and closing degree of the gripper mechanism of the end effector 23 used to grab the basket frame 33 carrying the semiconductor material 331 can be designed to be small, and the opening and closing degree of the gripper mechanism used to grab the liquid medicine tank 15 can be designed to be large, which is not limited.

[0134] In addition, the end effector 23 can also be a maintenance effector. The mechanical arm device 22 drives the end effector 23 as a maintenance effector to maintain the corresponding equipment, realizes automatic maintenance work, of course, which is not limited to this, can be other execution mechanism, for example, cleaning mechanism, to realize cleaning work, which is not limited.

[0135] As shown in FIG. 2, the end effector 23 can be designed to be detachably connected with the mechanical arm device 22 through the joint assembly 25. The joint assembly 25 is an existing quick connector, which specifically includes a first joint 251 fixed to the end of the mechanical arm device 22 and a second joint 252 fixed to the end effector 23, so as to realize quick connection and disconnection.

[0136] As shown in FIG. 3, in order to carry the end effector 23 in the accompanying device 24, the accompanying device 24 is provided with a placement station 244 for placing the end effector 23. The placement station 244 can be a clamping groove structure for clamping the end effector 23, which is not limited.

[0137] Furthermore, since the processing time of semiconductor material 331 by the wet processing machine 1 varies depending on the processing requirements, although the control device 5 can promptly control the transfer robot 2 to retrieve the processed semiconductor material 331 after the wet processing machine 1 has completed its processing time, if the mobile robot is moving other semiconductor materials 331 or changing the chemical solution tank 15 at this time, the transfer robot 2 needs to stop its current work or the wet processing machine 1 needs to be put into a waiting state. This will affect the efficiency of the transfer robot 2 or the wet processing machine 1. To solve the above problems:

[0138] As shown in Figure 6, this application improves the wet processing machine 1 by installing a sample loading mechanism 12 below the sample inlet / outlet 11. This mechanism carries the semiconductor material 331 to be fed into or discharged from the sample inlet / outlet 11. After the wet processing machine 1 completes the processing of the semiconductor material 331, it can directly push the semiconductor material 331 from the sample inlet / outlet 11 to the sample loading mechanism 12 for retrieval. Then, the sample inlet / outlet 11 can be closed to continue other processes, without having to keep the inlet / outlet open for waiting or in a paused state. When the transfer robot 2 loads materials, it can first transfer the semiconductor material 331 to the sample loading mechanism 12, and then proceed to the next process. When the control device 5 issues a notification that the wet processing machine 1 is available, it returns to retrieve the semiconductor material 331 output from the wet processing machine 1. At the same time, it places the semiconductor material 331 located on the sample loading mechanism 12 into place so that it can be fed into the wet processing machine 1. Since the semiconductor material 331 to be processed is placed on the sample loading mechanism 12 first, more space is freed up in the temporary storage space of the accompanying device 24, which is better for recycling the processed semiconductor samples, thereby further improving the efficiency of equipment use.

[0139] Furthermore, as shown in Figure 6, the sample loading mechanism 12 includes a loading plate 121 and a sample loading drive assembly 122.

[0140] The material carrier plate 121 is rotatably mounted on the wet processing machine 1. The sample loading drive assembly 122 is mounted on the wet processing machine 1 and connected to the material carrier plate 121 to drive the material carrier plate 121 to rotate. The sample loading drive assembly 122 can be an electric push rod, and there can be two of them. One end is hinged to the wet processing machine 1, and the other end is hinged to the bottom of the material carrier plate 121. The material carrier plate 121 is driven to rotate through telescopic movement. When the material carrier plate 121 is needed, the sample loading drive assembly 122 is controlled to extend so that the material carrier plate 121 is flipped to a horizontal state. When it is not needed, the sample loading drive assembly 122 is controlled to retract so that the material carrier plate 121 is flipped to a vertical state.

[0141] Further, as shown in FIG. 6, in order to better achieve the replacement of the chemical liquid tank 15, the present application improves the wet process machine 1, and the wet process machine 1 is provided with a chemical liquid carrying mechanism 14 at the position of the liquid storage cavity 13, which is used for carrying the chemical liquid tank 15.

[0142] The liquid storage cavity 13 is of a non-closed design, as shown in FIG. 7 and FIG. 8, the chemical liquid carrying mechanism 14 includes a carrying seat 141, a chemical liquid carrying driving assembly 142 and a liquid taking member 143.

[0143] The carrying seat 141 is used for carrying the chemical liquid tank 15, and is provided with a positioning and mounting groove for positioning and mounting the chemical liquid tank 15.

[0144] The chemical liquid carrying driving assembly 142 is connected with the carrying seat 141, and is used for driving the carrying seat 141 to extend out of or retract into the liquid storage cavity 13. The chemical liquid carrying driving assembly 142 can be a multi-stage telescopic shaft / chain transmission telescopic mechanism, and details are not described herein.

[0145] The liquid taking member 143 is detachably mounted on the chemical liquid tank 15.

[0146] During replacement, the chemical liquid carrying driving assembly 142 first extends the chemical liquid tank 15 to be replaced out of the liquid storage cavity 13, and then the mechanical arm device 22 drives the end effector 23 to take out the liquid taking member 143, and then clamps the chemical liquid tank 15 to be replaced to the temporary storage space, and then clamps the new chemical liquid tank 15 from the temporary storage space to the carrying seat 141, and then the mechanical arm device 22 drives the end effector 23 to unscrew the tank cover of the new chemical liquid tank 15, and then the liquid taking member 143 is mounted in the new chemical liquid tank 15, and then the chemical liquid carrying driving assembly 142 retracts the replaced chemical liquid tank 15 into the liquid storage cavity 13, and the liquid taking mechanism in the wet process machine 1 can be connected with the liquid taking member 143 to suck the chemical liquid from the new chemical liquid tank 15, or the corresponding joint on the wet process machine 1 is connected with the liquid taking member 143 by the mechanical arm device 22.

[0147] Further, as shown in FIG. 7, the liquid taking member 143 is designed to include a liquid taking pipe 1432 and a liquid taking cover 1431.

[0148] The liquid taking pipe 1432 can extend into the chemical liquid tank 15 through the chemical liquid port 151 of the chemical liquid tank 15; the liquid taking cover 1431 is sleeved on the liquid taking pipe 1432 and can cooperate with the chemical liquid port 151 to block the chemical liquid port 151; wherein the liquid taking pipe 1432 plays a role of taking liquid, and the liquid taking cover 1431 has the same effect as the original tank cover of the chemical liquid tank 15, and plays a role of blocking the chemical liquid port 151 and fixing the liquid taking pipe 1432. In order to facilitate the connection with the liquid taking mechanism in the wet process machine 1, one end of the pipe segment of the liquid taking pipe 1432 outside the liquid taking cover 1431 is connected with a liquid taking connector 1433. The liquid taking connector 1433 is a one-way valve connector, that is, it can only realize the suction of chemical liquid from the chemical liquid tank 15, and external air or liquid cannot enter the chemical liquid tank 15.

[0149] After the liquid taking member 143 is taken out, in order to facilitate placement, the material carrying seat 141 is vertically provided with a fixing member 144 for fixing the liquid taking member 143 to be installed. Taking the above-mentioned liquid taking pipe 1432 and liquid taking cover 1431 as an example, the fixing member 144 is designed as a hollow column structure for the liquid taking pipe 1432 to be inserted. Since there may be some residual chemical liquid in the liquid taking pipe 1432 after being taken out, after the liquid taking pipe 1432 is inserted into the fixing member 144, the residual chemical liquid will remain in the fixing member 144, causing pollution and waste. Therefore, a recycling hole (not shown in the figure) can be formed at the bottom of the fixing member 144, which can be connected to a recycling tank through a recycling pipe (which can be a telescopic recycling pipe) to recycle the residual chemical liquid in the fixing member 144. At the same time, the recycling hole can also be connected to a cleaning device through a cleaning pipe to inject cleaning liquid into the fixing member 144 to clean the liquid taking pipe 1432.

[0150] The number of the chemical liquid carrying mechanism 14 in the present application can be designed as one or more according to needs, and the specific number is not limited.

[0151] Further, as shown in FIG. 9, the sample feeding device 3 includes a device main body 31 and a sample shifting device 32.

[0152] The device main body 31 is provided with a sample chamber; the bottom of the sample chamber is provided with a first feeding and discharging station 311, a second feeding and discharging station 312, a first temporary storage station 313 and a second temporary storage station 314. At least one station groove for placing a flower basket rack 33 is arranged in each of the first feeding and discharging station 311, the second feeding and discharging station 312, the first temporary storage station 313 and the second temporary storage station 314.

[0153] A first loading and unloading window (not shown in the figure) is arranged on the device body 31 at a position corresponding to the first loading and unloading station 311, and is connected to the sample chamber and the clean space outside. An experimentalist can put semiconductor materials 331 that need to be tested into the first loading and unloading station 311 through the first loading and unloading window, or take semiconductor materials 331 that have completed the test from the first loading and unloading station 311 through the first loading and unloading window. A first door window that can be opened and closed is installed on the first loading and unloading window. The first door window is an existing electric door window design, and details are not described.

[0154] A second loading and unloading window (not shown in the figure) is arranged on the device body 31 at a position corresponding to the second loading and unloading station 312, and is connected to the sample chamber and the clean space inside. The transfer robot 2 can pick up a flower basket frame 33 with a semiconductor from the second loading and unloading station 312 through the second loading and unloading window, or place a flower basket frame 33 with processed semiconductor materials 331 in the second loading and unloading station 312. A second door window that can be opened and closed is installed on the second loading and unloading window. The second door window is an existing electric door window design, and details are not described.

[0155] A sample displacement device 32 is installed in the sample chamber, and is used to move semiconductor samples between the first loading and unloading station 311, the second loading and unloading station 312, the first temporary storage station 313, and the second temporary storage station 314. The first temporary storage station 313 can be used to store semiconductor materials 331 that have completed processing, and the second temporary storage station 314 can be used to store semiconductor materials 331 that need to be processed.

[0156] The use process is as follows:

[0157] After the sample displacement device 32 detects that the first loading and unloading station 311 has a flower basket frame 33, the flower basket frame 33 is sequentially moved to the second temporary storage station 314. Then, according to the order information, the corresponding flower basket frame 33 in the second temporary storage station 314 is moved to the second loading and unloading station 312, and waits for the transfer robot 2 to take it away. After the sample displacement device 32 detects that the second loading and unloading station 312 has a flower basket frame 33, the flower basket frame 33 is sequentially moved to the first temporary storage station 313. Then, according to the order information, the corresponding flower basket frame 33 in the first temporary storage station 313 is moved to the first loading and unloading station 311, and waits for the experimentalist to take it away. For the sequence identification of the flower basket frame 33, the two-dimensional code or the number on the flower basket frame 33 can be identified, and details are not limited.

[0158] The sample displacement device 32 in the present application can be designed to include a three-axis movement module, a clamping mechanism, and an identification sensor. The three-axis movement module, the clamping mechanism, and the identification sensor are existing designs. Taking identification of a two-dimensional code as an example, the identification sensor can be a scanner. Taking identification of a number as an example, the identification sensor can be a camera, and details are not limited.

[0159] Further, as shown in FIG. 9, in order to facilitate the experiment personnel to carry out the recording operation, set the experiment parameter requirement, etc., the human-computer interaction device 34 is installed on the device main body 31 at one side of the first up-down material window and is in communication connection with the control device 5 and extends out of the clean space. The control device 5 can be arranged in the clean space and is not limited in particular.

[0160] Further, as shown in FIG. 1 and FIG. 10, the design of the liquid medicine feeding device 4 includes the liquid medicine buffer box 41. The liquid medicine buffer box 41 is internally provided with a buffer chamber for storing the liquid medicine tank 15 to be fed or the replaced liquid medicine tank 15; the liquid medicine buffer box 41 is provided with a buffer opening; and the buffer opening is installed with an openable buffer door 42. The number of the liquid medicine buffer box 41 is preferably designed as multiple, so as to realize the separate storage of the liquid medicine tanks 15 of different liquid medicine types and the separate storage of the replaced empty liquid medicine tanks 15, etc.

[0161] Further, as shown in FIG. 1, the clean space ground is divided from outside to inside into an external annular area 61, an internal annular area 62 and a central area 63 located in the internal annular area 62.

[0162] The wet process machine 1 is arranged in the external annular area 61 or the central annular area, the sample feeding device 3 and the liquid medicine feeding device 4 are arranged in the external annular area 61.

[0163] The above layout design forms a back-shaped layout, realizes the compact arrangement of each device, effectively reduces the occupation of the clean space, shortens the travel of the mobile robot, prolongs the endurance of the mobile robot, and further reduces the experimental cost.

[0164] The charging pile for charging the transfer robot 2 can be arranged on the external annular area 61, and at least two mobile robots can be arranged to improve the experimental efficiency, and when one of them is insufficient in power, the other one can work normally to ensure the stable experiment.

[0165] Further, in order to realize flexible operation, the mechanical arm device 22 is preferably a collaborative mechanical arm which is provided with a visual sensor for identification and positioning.

[0166] Further, the mobile device 21 is an AGV trolley which is configured with a laser radar sensor for realizing automatic path planning.

[0167] The working process of the black light wet laboratory for scientific research designed in the present application is as follows:

[0168] 1. The experiment personnel verifies the identity through the human-computer interaction device 34, then selects the experiment type, sets the experiment parameters / process routes, etc. after the selection is completed, and forms an experiment work order;

[0169] 2. Put the basket 33 with semiconductor material 331 to be processed into the first loading and unloading station 311 through the first loading and unloading window;

[0170] 3. The control device 5 sends a signal to the sample shifting device 32 according to the experimental order, and the sample shifting device 32 moves the basket 33 in the first loading and unloading station 311 to the second temporary storage station 314, and then waits for the execution signal of the experimental order. When it is the turn to execute the experimental order, the control device 5 sends a signal to the sample shifting device 32, the transfer robot 2 and the wet processing machine 1, and then the sample shifting device moves the basket 33 from the second temporary storage station 314 to the second loading and unloading station 312, and waits for the transfer robot 2 to take it away;

[0171] 4. The transfer robot 2 loads the basket 33 in the second loading and unloading station 312 to the corresponding wet processing machine 1 according to the experimental order;

[0172] 5. The corresponding wet processing machine 1 processes the semiconductor material 331 in the basket 33 according to the experimental parameters in the experimental order, pushes the basket 33 to the sample loading mechanism 12 after processing is completed, and sends a signal to the transfer robot 2;

[0173] 6. The transfer robot 2 moves the basket 33 on the sample loading mechanism 12 to the second loading and unloading station 312, and sends a signal to the sample shifting device 32;

[0174] 7. The sample shifting device 32 moves the basket 33 in the second loading and unloading station 312 to the first temporary storage station 313, and then waits for the completed basket 33 in front to be taken away, and then moves the basket 33 from the first temporary storage station 313 to the first loading and unloading station 311, and feeds back a signal to the control device 5. The control device 5 sends a notification to the mobile terminal of the corresponding experimental personnel to remind the experimental personnel to take the completed semiconductor material 331, and synchronously sends the running data in the experimental process to the experimental personnel after the running data is sorted and analyzed.

[0175] The control device 5 can collect the running data of each execution device in real time, (process record, process parameter collection, abnormal event processing), establish a traceable and expandable process library, and optimize scheduling.

[0176] It can also monitor abnormalities in the experimental process in real time and automatically initiate an early warning.

[0177] It can also comprehensively monitor and record the device history, maintenance, repair and inspection.

[0178] The scientific black light wet laboratory provided by the present application is described in detail above. For those skilled in the art, according to the idea of the embodiments of the present application, there will be changes in the specific implementation manner and application range. In summary, the content of the specification should not be understood as a limitation of the present application.

Claims

1. A black light wet lab for research, characterized in that, The laboratory body, the wet processing machine (1), the transfer robot (2), the sample supply and collection device (3), the chemical liquid supply and collection device (4), and the control device (5); The laboratory body is used to provide a clean space; The wet processing machine (1) is arranged in the clean space and is used to process semiconductor samples; The sample supply and collection device (3) is arranged in the clean space and is used to supply semiconductor samples to be processed and to store the processed semiconductor samples; The chemical liquid supply and collection device (4) is arranged in the clean space and is used to supply chemical liquid tanks (15) to be replaced and to store the replaced chemical liquid tanks (15); The transfer robot (2) is installed in the clean space and is used to transfer semiconductor samples and / or chemical liquid tanks (15) among the wet processing machine (1), the transfer robot (2), the sample supply and collection device (3), and the chemical liquid supply and collection device (4); The transfer robot (2) comprises a moving device (21), a mechanical arm device (22), at least one end effector (23), and a following device (24); The following device (24) can move along with the moving device (21) and provides a temporary storage space; The mechanical arm device (22) is installed on the moving device (21); At least one end effector (23) is installed on the mechanical arm device (22) and is used to grasp semiconductor samples and / or chemical liquid tanks (15); The control device (5) is in communication connection with the wet processing machine (1), the transfer robot (2), the sample supply and collection device (3), and the chemical liquid supply and collection device (4).

2. The black light wet lab for scientific research according to claim 1, characterized in that, The following device (24) is detachably connected with the moving device (21); Further comprising a following fixing frame (26); The following fixing frame (26) is installed in the clean space and is used to fix the following device (24) one by one; The transfer robot (2) further comprises a fork device (27); The fork device (27) is installed on the moving device (21) and is used to fork the following device (24) located on the following fixing frame (26).

3. The black light wet lab for scientific research according to claim 2, characterized in that, The fork device (27) comprises a fork lifting device (271) and a fork disc (272); The following fixing frame (26) is provided with an avoiding cavity below the following device (24) and the fork disc (272) extends into the avoiding cavity; The fork lifting device (271) is installed on the top of the moving device (21) and the driving end is connected with the fork disc (272) and is used to drive the fork disc (272) to move up and down, so as to fork the following device (24) away from the following fixing frame (26) or fork the following device (24) back into the following fixing frame (26).

4. The black light wet lab for scientific research according to claim 3, characterized in that, The top of the fork disc (272) is provided with a plurality of first fork positioning structures (2721); The bottom of the following device (24) is provided with a plurality of second fork positioning structures (241) which are in positioning cooperation with the first fork positioning structures (2721).

5. The black light wet lab for scientific research according to claim 2, wherein, The following device (24) is provided with a cavity and is used to form the temporary storage space; The following random device (24) is installed with a random opening and closing door mechanism (242) for controlling the opening and closing of the cavity.

6. The black light wet lab for scientific research according to claim 5, characterized in that, The following random fixing frame (26) comprises two support plates (261) symmetrically arranged at intervals. The following random device (24) is provided with limiting protrusions (243) on both sides, which can correspond to the top of the support plate (261).

7. The black light wet lab for scientific research according to claim 1, wherein, The end effector (23) is at least two; One of the end effectors (23) is used to grab the semiconductor sample; Another end effector (23) is used to grab the liquid medicine tank (15); The end effector (23) is detachably connected with the mechanical arm device (22) through the joint assembly (25); The following random device (24) is provided with a placement station (244) for placing the end effector (23).

8. The black light wet lab for scientific research of claim 1, wherein, The wet processing machine (1) is provided below the sample inlet and outlet (11) with a sample loading mechanism (12) for carrying semiconductor materials (331) to be sent into the sample inlet and outlet (11) or carrying semiconductor materials (331) sent out from the sample inlet and outlet (11).

9. The black light wet lab for scientific research according to claim 8, characterized in that, The sample loading mechanism (12) comprises a loading plate (121) and a sample loading drive assembly (122). The loading plate (121) is rotatably mounted on the wet processing machine (1). The sample loading drive assembly (122) is mounted on the wet processing machine (1) and connected with the loading plate (121) for driving the loading plate (121) to rotate.

10. The black light wet lab for scientific research of claim 1, wherein, The wet processing machine (1) is provided at the position of the liquid storage cavity (13) with a liquid loading mechanism (14) for carrying the liquid medicine tank (15). The liquid loading mechanism (14) comprises a loading seat (141), a liquid loading drive assembly (142) and a liquid taking member (143). The loading seat (141) is used to carry the liquid medicine tank (15). The liquid loading drive assembly (142) is connected with the loading seat (141) for driving the loading seat (141) to extend or retract from the liquid storage cavity (13). The liquid taking member (143) is detachably mounted on the liquid medicine tank (15).

11. The black light wet lab for scientific research according to claim 10, characterized in that, The liquid taking member (143) comprises a liquid taking pipe (1432) and a liquid taking cover (1431). The liquid taking pipe (1432) can extend into the liquid medicine tank (15) through the liquid port (151) of the liquid medicine tank (15). The liquid taking cover (1431) is sleeved on the liquid taking pipe (1432) and can cooperate with the liquid port (151) to block the liquid port (151). The fixing member (144) is a hollow column structure for the liquid taking pipe (1432) to be inserted. The sample loading and collecting device (3) comprises a device main body (31) and a sample shifting device (32).

12. The black light wet lab for scientific research of claim 1, wherein, The device main body (31) is provided with a sample chamber. ​ The sample chamber bottom is provided with a first feeding and discharging station (311), a second feeding and discharging station (312), a first temporary storage station (313) and a second temporary storage station (314); The equipment main body (31) is provided with a first feeding and discharging window corresponding to the first feeding and discharging station (311) and communicating the sample chamber with the outside of the clean space; The first feeding and discharging window is provided with an openable and closable first door window; The equipment main body (31) is provided with a second feeding and discharging window corresponding to the second feeding and discharging station (312) and communicating the sample chamber with the inside of the clean space; The second feeding and discharging window is provided with an openable and closable second door window; The sample shifting device (32) is installed in the sample chamber and used for moving the semiconductor sample between the first feeding and discharging station (311), the second feeding and discharging station (312), the first temporary storage station (313) and the second temporary storage station (314).

13. The black light wet lab for scientific research according to claim 12, characterized in that, The equipment main body (31) is provided with a human-computer interaction device (34) on one side of the first feeding and discharging window and in communication connection with the control equipment (5) and extending out of the clean space.

14. The black light wet lab for scientific research of claim 1, wherein, The liquid medicine feeding device (4) comprises a liquid medicine buffer box (41); The liquid medicine buffer box (41) is provided with a buffer chamber for storing the liquid medicine tank (15) to be fed or the liquid medicine tank (15) to be replaced; The liquid medicine buffer box (41) is provided with a buffer opening; The buffer opening is provided with an openable and closable buffer door (42).

15. The black light wet lab for scientific research of claim 1, wherein, The clean space ground is divided into an outer annular area (61), an inner annular area (62) and a center area (63) in the inner annular area (62) from outside to inside; The wet process machine (1) is arranged in the outer annular area (61) or the center annular area; The sample feeding device (3) and the liquid medicine feeding device (4) are arranged in the outer annular area (61).

16. The black light wet lab for scientific research of claim 1, wherein, The mechanical arm device (22) is a collaborative mechanical arm.

17. The black light wet lab for scientific research of claim 1, wherein, The moving device (21) is an AGV trolley.

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