PVD vacuum coating apparatus for photovoltaic cells

Abstract

The present invention relates to a PVD vacuum coating apparatus for photovoltaic cells, comprising a vacuum chamber and a conveying mechanism. The vacuum chamber comprises a plurality of chambers, the plurality of chambers being formed by means of providing reinforcing plates in the vacuum chamber as partitions, and the plurality of chambers being distributed in a front-rear direction; the reinforcing plates are provided with perforated holes, and the perforated holes are used for a carrier to pass through; the upper side of the vacuum chamber is provided with a support plate, the support plate is provided with through holes at positions corresponding to the chambers, and the support plate is connected to the reinforcing plates; the upper surface of the support plate is provided with a plurality of bosses, the bosses are located between two adjacent through holes, and a molecular pump placement area and a cathode placement area are respectively formed on the front and rear sides of the bosses on the support plate. The conveying mechanism is used for driving a carrier to move in the front-rear direction of the vacuum chamber, and the conveying mechanism comprises a plurality of first driving assemblies and a plurality of second driving assemblies, the first driving assemblies and the second driving assemblies being respectively arranged on the left and right sides of the vacuum chamber. The apparatus provided by the present invention ensures the overall airtightness of the vacuum chamber, facilitates processing, and saves costs.

Description

Photovoltaic cell PVD vacuum coating equipment TECHNICAL FIELD

[0001] The present application relates to a kind of photovoltaic cell PVD vacuum coating equipment. BACKGROUND

[0002] Vacuum coating vacuum cavity is the core component of vacuum coating equipment, various vacuum coating processes must be carried out in vacuum cavity.In the vacuum coating vacuum cavity, different functional components are installed, and the vacuum coating equipment can realize different coating processes.

[0003] At present, the internal memory of vacuum cavity is small, and cannot process a large number of silicon wafers, the production efficiency is low, and the use cost is high;The overall air tightness is poor, and cannot meet the current high-quality coating process production demand. SUMMARY

[0004] The purpose of the present application is to provide a kind of photovoltaic cell PVD vacuum coating equipment.

[0005] To achieve the above purpose, a technical solution adopted by the present application is:

[0006] A kind of photovoltaic cell PVD vacuum coating equipment, comprising:

[0007] Vacuum cavity, the vacuum cavity includes a plurality of chambers, a plurality of the chamber is formed by setting reinforcing plate in the vacuum cavity, a plurality of the chamber is distributed along the front and back direction, the reinforcing plate is provided with perforation, and the perforation is used for the carrier to pass through;The upper side of the vacuum cavity is provided with support plate, the support plate is provided with through hole corresponding to the chamber part, and the support plate is connected with the reinforcing plate;The upper surface of the support plate is provided with a plurality of bosses, the boss is located between adjacent two through holes, and the front and back sides of the boss on the support plate are formed molecular pump placement area and cathode placement area respectively;

[0008] Conveying mechanism, the conveying mechanism is used to drive the carrier to move along the front and back direction of the vacuum cavity, the conveying mechanism includes a plurality of first drive components, a plurality of second drive components, the first drive component and the second drive component are respectively arranged on the left and right sides of the vacuum cavity, the first drive component and the second drive component are one-to-one corresponding, the first drive component and the second drive component all include driving piece, a plurality of transmission shafts and a plurality of transmission units, one end of the transmission shaft is matched with the carrier in the vacuum cavity, the other end of the transmission shaft is located outside the vacuum cavity, the other end of adjacent two transmission shafts on the same side of the vacuum cavity is connected through transmission unit, the driving piece is connected with the transmission shaft, and the transmission unit and the driving piece are located outside the vacuum cavity.

[0009] According to some embodiments of the present application, the device further comprises a molecular pump assembly and a cathode assembly, the molecular pump assembly comprises a molecular pump and a molecular pump mounting portion, the molecular pump assembly is arranged in the molecular pump placement area, the molecular pump mounting portion is connected with the support plate, and the molecular pump mounting portion is provided with a first sealing ring on the side facing the support plate; the cathode assembly is arranged in the cathode placement area, the cathode assembly comprises a cathode target material and a cathode target material mounting portion, the cathode target material mounting portion is connected with the support plate, and the cathode target material mounting portion is provided with a second sealing ring on the side facing the support plate.

[0010] According to some embodiments of the present application, the first sealing ring and the second sealing ring are both square.

[0011] According to some embodiments of the present application, the first sealing ring is provided with a plurality of first sealing rings, the plurality of first sealing rings are located in the same plane, and the plurality of first sealing rings are sequentially distributed outwardly with the center of the molecular pump mounting portion as the center; the second sealing ring is provided with a plurality of second sealing rings, the plurality of second sealing rings are located in the same plane, and the plurality of second sealing rings are sequentially distributed outwardly with the center of the cathode target material mounting portion as the center.

[0012] According to some embodiments of the present application, the first sealing ring is provided with two first sealing rings, the two first sealing rings are located in the same plane, the circumference of one of the first sealing rings is greater than the circumference of the other first sealing ring, the one first sealing ring is arranged around the outer periphery of the other first sealing ring, and a gap is maintained between the two first sealing rings; the second sealing ring is provided with two second sealing rings, the two second sealing rings are located in the same plane, the circumference of one of the second sealing rings is greater than the circumference of the other second sealing ring, the one second sealing ring is arranged around the outer periphery of the other second sealing ring, and a gap is maintained between the two second sealing rings.

[0013] According to some embodiments of the present application, the transmission unit comprises a transmission gear and a transmission belt, one transmission gear is arranged on the transmission shaft connected with the driving piece on the front end or the rear end of the left side of the vacuum cavity, two transmission gears are arranged on the other transmission shafts, and the transmission belt is wound around the transmission gears on the adjacent two transmission shafts.

[0014] The second driving assembly is provided with a transmission gear on the transmission shaft at the front end or the rear end of the right side of the vacuum cavity, the transmission shaft is connected with another driving member, the other transmission shaft is provided with two transmission gears, the transmission gears on the adjacent two transmission shafts are provided with the transmission belt; one end of the transmission shaft away from the transmission gear is provided with a roller, the roller is located in the vacuum cavity, and the roller is matched with the carrier.

[0015] According to some embodiments of the present application, the transmission shaft is externally provided with a shaft seal, and the shaft seal is located outside the vacuum cavity.

[0016] According to some embodiments of the present application, the device further comprises a tensioning assembly for tensioning the transmission belt, the tensioning assembly comprises a fixed table, a sliding block and a tensioning wheel, the tensioning assembly is arranged outside the vacuum cavity, the fixed table is arranged on the left side or the right side of the vacuum cavity, a sliding groove is formed in the fixed table, the sliding block is movably arranged in the sliding groove, and the roller shaft of the tensioning wheel is connected with the sliding block.

[0017] According to some embodiments of the present application, the tensioning assembly further comprises a screw rod and a nut, a threaded hole is formed in the bottom of the fixed table and is threadedly connected with the screw rod, the screw rod extends in the vertical direction, the screw rod penetrates through the fixed table and is connected with the sliding block, the nut is arranged on the screw rod and located outside the fixed table, and the nut abuts against the outer side of the fixed table.

[0018] According to some embodiments of the present application, the upper end of the screw rod penetrates through the fixed table and is connected with the sliding block, and the lower end of the screw rod extends downward away from the fixed table.

[0019] According to some embodiments of the present application, a plurality of the tensioning assemblies are arranged on the left side and / or the right side of the vacuum cavity, the plurality of the tensioning assemblies arranged on the left side of the vacuum cavity are distributed in the front-rear direction, and the plurality of the tensioning assemblies arranged on the right side of the vacuum cavity are distributed in the front-rear direction.

[0020] According to some embodiments of the present application, the boss is in the shape of a cuboid, the reinforcing plate is in the shape of a cuboid, and the perforations on the reinforcing plate are in the shape of a square.

[0021] According to some embodiments of the present application, the device further comprises a support, the support is located outside the vacuum cavity, the support is connected with the outer side wall of the vacuum cavity, and the support is used for mounting the driving member.

[0022] According to some embodiments of the present application, the support includes a support plate and a plurality of support columns, one end of the support columns is connected to the outer sidewall of the vacuum chamber, the other end of the support columns is connected to the support plate, the support plate is connected to the driving member, the support columns are perpendicular to the outer sidewall of the vacuum chamber and the support plate, and the plurality of support columns are arranged in parallel.

[0023] According to some embodiments of the present application, the device further includes a carrier, the carrier includes two side frames arranged opposite to each other in the front-rear direction, two support members arranged opposite to each other in the left-right direction, and a carrying unit, the two support members are located between the two side frames, the opposite sides of the carrying unit are detachably connected to the two side frames respectively, the other opposite sides of the carrying unit are detachably connected to the two support members respectively, the carrying unit includes a plurality of sub-units, the sub-units are surrounded by the four peripheries and are through in the up-down direction, the sub-units include a carrying body and an annular protruding part arranged on the inner circumferential surface of the carrying body, the annular protruding part includes a body part and a protruding part arranged on the body part, the body part has an upper surface, an inner circumferential surface and a lower surface, the inner circumferential surface of the body part connects the upper surface and the lower surface, the protruding part has an upper surface and a vertical surface connected to each other, the vertical surface of the protruding part is spaced apart from the inner circumferential surface of the body part, and the gap is located at the spacing position for the end of the silicon wafer; a gap is maintained between two adjacent carrying units in the front-rear direction, and the two adjacent carrying units in the front-rear direction are connected by a connecting rod, and the connecting rod is connected to the support member.

[0024] According to some embodiments of the present application, a plurality of support members are arranged, the support members extend in the left-right direction, and two adjacent carrying units in the left-right direction are connected by the support members.

[0025] Another technical solution adopted by the present application is:

[0026] A PVD vacuum coating equipment for photovoltaic cells includes:

[0027] A vacuum chamber includes a plurality of chambers, the plurality of chambers are spaced apart by a reinforcing plate arranged in the vacuum chamber, the plurality of chambers are distributed in the front-rear direction, the reinforcing plate is provided with a through hole, and the through hole is used for passing the carrier; an upper side of the vacuum chamber is provided with a support plate, the support plate is provided with a through hole corresponding to the chamber, and the support plate is connected to the reinforcing plate; an upper surface of the support plate is provided with a plurality of bosses, the bosses are located between two adjacent through holes, and a molecular pump placement area and a cathode placement area are formed on the front and rear sides of the bosses on the support plate respectively.

[0028] A conveying mechanism is arranged to drive the carrier to move along the front-rear direction of the vacuum chamber, and the conveying mechanism comprises one or more first driving assemblies and one or more second driving assemblies, the first driving assemblies and the second driving assemblies are arranged on the left and right sides of the vacuum chamber respectively, the first driving assemblies and the second driving assemblies correspond to each other, and each of the first driving assemblies and the second driving assemblies comprises a driving member, a plurality of transmission shafts and a plurality of transmission units, one end of each transmission shaft is matched with the carrier in the vacuum chamber, the other ends of two adjacent transmission shafts on the same side of the vacuum chamber are connected through a transmission unit, the driving member is connected with one transmission shaft, and the transmission unit and the driving member are located outside the vacuum chamber.

[0029] The transmission unit comprises a transmission gear and a transmission belt, one transmission gear is arranged on the transmission shaft at the front end or the rear end of the left side of the vacuum chamber, the transmission shaft is connected with one driving member, two transmission gears are arranged on the other transmission shafts, and the transmission belts are wound around the transmission gears on the two adjacent transmission shafts; one transmission gear is arranged on the transmission shaft at the front end or the rear end of the right side of the vacuum chamber, the transmission shaft is connected with another driving member, two transmission gears are arranged on the other transmission shafts, and the transmission belts are wound around the transmission gears on the two adjacent transmission shafts.

[0030] One roller is arranged at the end of the transmission shaft away from the transmission gear, the roller is located in the vacuum chamber, and the roller is matched with the carrier.

[0031] A tensioning assembly is arranged outside the vacuum chamber, the tensioning assembly is used for tensioning the transmission belts, and the tensioning assembly comprises a fixed table, a sliding block, a tensioning roller, a screw rod and a nut. The fixed table is arranged on the left side or the right side of the vacuum chamber, a sliding groove is formed in the fixed table, the sliding block is movably arranged in the sliding groove, and the roller shaft of the tensioning roller is connected with the sliding block. The screw rod extends in the vertical direction, the screw rod penetrates through the fixed table and is connected with the sliding block, the nut is arranged on the screw rod and located outside the fixed table, and the nut abuts against the outer side of the fixed table.

[0032] A molecular pump assembly comprises a molecular pump and a molecular pump mounting portion, the molecular pump assembly is arranged in the molecular pump placement area, the molecular pump mounting portion is connected with the support plate, and a first sealing ring is arranged on the side of the molecular pump mounting portion facing the support plate.

[0033] A cathode assembly is arranged in the cathode placement area, and the cathode assembly comprises a cathode target and a cathode target mounting portion connected with the support plate, and the cathode target mounting portion is provided with a second sealing ring towards the side of the support plate.

[0034] According to some embodiments of the present application, the upper end of the screw rod is connected with the sliding block through the fixed table, and the lower end of the screw rod extends downward away from the fixed table.

[0035] Compared with the prior art, the present application has the following advantages due to the above technical solutions:

[0036] The photovoltaic cell PVD vacuum coating equipment provided by the present application can form multiple cavities through the setting of reinforcing plates; the upper surface of the support plate is provided with multiple bosses protruding from the upper surface, and the support plate is formed with a molecular pump placement area and a cathode placement area on the front and rear sides of the bosses, so that multiple molecular pump placement areas and cathode placement areas can be set; the upper surfaces of the support plates in the molecular pump placement areas and the cathode placement areas are horizontal surfaces with high flatness, so as to ensure the air tightness of the entire vacuum cavity after the molecular pump and the cathode are placed, facilitate processing, and save costs; the air tightness is better; large batches of silicon wafers can be processed, and the production efficiency is high; the transmission unit and the driving member are located outside the vacuum cavity, so as to prevent damage to them during coating, prolong the service life of the conveying mechanism, and facilitate replacement of the conveying mechanism. BRIEF DESCRIPTION OF DRAWINGS

[0037] Figure 1 is a structural diagram of the photovoltaic cell PVD vacuum coating equipment provided by the present application;

[0038] Figure 2 is a top view of the photovoltaic cell PVD vacuum coating equipment provided by the present application;

[0039] Figure 3 is a structural diagram of the vacuum cavity of the photovoltaic cell PVD vacuum coating equipment provided by the present application from a first perspective;

[0040] Figure 4 is a front view of the vacuum cavity of the photovoltaic cell PVD vacuum coating equipment provided by the present application;

[0041] Figure 5 is a structural diagram of the vacuum cavity of the photovoltaic cell PVD vacuum coating equipment provided by the present application from a second perspective;

[0042] Figure 6 is an enlarged view of the boss in Figure 5;

[0043] Figure 7 is an enlarged view of the transmission unit and the transmission shaft in Figure 5;

[0044] Fig. 8 is an enlarged view of the tensioning assembly in Fig. 4;

[0045] Fig. 9 is a structural view of a cathode assembly of a photovoltaic cell PVD vacuum coating equipment provided by the present application;

[0046] Fig. 10 is a bottom view of the cathode assembly of the photovoltaic cell PVD vacuum coating equipment provided by the present application;

[0047] Fig. 11 is a structural view of a molecular pump assembly of the photovoltaic cell PVD vacuum coating equipment provided by the present application from a first perspective;

[0048] Fig. 12 is a structural view of the molecular pump assembly of the photovoltaic cell PVD vacuum coating equipment provided by the present application from a second perspective;

[0049] Fig. 13 is a structural view of a first sealing ring of the photovoltaic cell PVD vacuum coating equipment provided by the present application;

[0050] Fig. 14 is a structural view of a carrier of the photovoltaic cell PVD vacuum coating equipment provided by the present application;

[0051] Fig. 15 is an enlarged view of a subunit in Fig. 14.

[0052] In the above drawings:

[0053] 1 - vacuum cavity; 2 - reinforcing plate; 3 - support plate; 4 - driving member;

[0054] 5 - conveying mechanism, 51 - transmission shaft, 52 - transmission gear, 53 - transmission belt, 54 - roller, 55 - shaft seal;

[0055] 6 - tensioning assembly, 61 - fixing table, 62 - sliding block, 63 - tensioning wheel, 64 - screw rod, 65 - nut;

[0056] 7 - molecular pump; 8 - molecular pump mounting portion, 81 - groove; 9 - cathode target material; 10 - cathode target material mounting portion; 11 - first sealing ring; 12 - second sealing ring; 13 - support plate; 14 - support column; 15 - boss; 16 - support leg;

[0057] 17 - carrier, 171 - frame, 172 - sealing plate, 173 - support member, 174 - upper surface of body portion, 175 - upper surface of convex portion, 176 - vertical surface of convex portion, 177 - connecting rod. DETAILED DESCRIPTION

[0058] The technical solutions of the present application will be described clearly and completely in connection with the drawings. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0059] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", "third" are only for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0060] Referring to the photovoltaic cell PVD vacuum coating equipment of FIGS. 1-15, the equipment includes a vacuum chamber 1 and a conveying mechanism 5, wherein:

[0061] The vacuum chamber 1 has oppositely arranged upper and lower sides, oppositely arranged front and rear sides, and oppositely arranged left and right sides. The vacuum chamber 1 includes a plurality of chambers formed by arranging reinforcing plates 2 in the vacuum chamber 1, and the plurality of chambers are distributed along the front-rear direction. The reinforcing plates 2 are distributed along the front-rear direction, and the reinforcing plates 2 are provided with perforations to allow the plurality of chambers to be through, and the perforations are used for the carrier 17 to pass through. The front end and the rear end of the vacuum chamber 1 are provided with openings, and the carrier 17 (the carrier is used to carry the silicon wafer) passes through the opening at the front end of the vacuum chamber 1, the inside of the vacuum chamber 1, and the opening at the rear end of the vacuum chamber 1 in sequence.

[0062] The upper side of the vacuum cavity 1 is provided with a support plate 3, the support plate 3 is provided with a through hole corresponding to each chamber part, that is, one through hole corresponds to one chamber, the through hole is communicated with the corresponding chamber, and the support plate 3 is connected with the plurality of reinforcing plates 2; the upper surface of the support plate 3 is provided with a plurality of bosses 15 protruding from the upper surface thereof, the bosses 15 are located between adjacent two through holes, the upper surface of the boss 15 is higher than the upper surface of the support plate 3, and the support plate 3 is formed with a molecular pump placing area and a cathode placing area on the front and back sides of the boss 15 respectively, that is, the molecular pump placing area and the cathode placing area are arranged adjacent to each other, for example, the molecular pump 7, the rotating cathode target material, the molecular pump 7, the rotating cathode target material and the like are placed in sequence near the front end of the vacuum cavity 1, and are placed in sequence; the molecular pump placing area and the cathode placing area correspond to one chamber respectively. The plurality of reinforcing plates 2 are arranged, which is beneficial to forming the plurality of molecular pump placing areas and the plurality of cathode placing areas, can realize mass processing of silicon wafers, and increase production capacity. The boss 15 is arranged, so that the molecular pump placing area and the cathode placing area are separated, which is beneficial to positioning and identification, and facilitates placing the molecular pump placing area and the cathode assembly in the molecular pump placing area and the cathode placing area respectively.

[0063] In the example, the upper surfaces of the support plates 3 in the molecular pump placing areas and the cathode placing areas are horizontal planes, and have high flatness, so as to ensure the air tightness of the whole vacuum cavity 1 after the molecular pump 7 and the cathode are placed, and facilitate processing, only the upper surfaces of the support plates 3 in the molecular pump placing areas and the cathode placing areas are processed, the whole support plate 3 does not need to be processed, cost is saved, and air tightness is better.

[0064] In the example, the device further includes a molecular pump assembly and a cathode assembly, the molecular pump assembly includes the molecular pump 7 and a molecular pump mounting portion 8, the molecular pump assembly is arranged in the molecular pump placing area, the molecular pump mounting portion 8 is connected with the support plate 3, the molecular pump mounting portion 8 is provided with a groove 81 on the side facing the support plate 3, and the first sealing ring 11 is arranged in the groove 81, so as to improve the air tightness between the molecular pump mounting portion 8 and the chamber and reduce the air leakage rate.

[0065] The first sealing ring is provided with a plurality of first sealing rings 11, the plurality of first sealing rings 11 are located on the same plane, and the plurality of first sealing rings 11 are distributed outward in sequence with the center of the molecular pump mounting portion 8 as the center. In some embodiments, the first sealing ring 11 can be provided with two first sealing rings 11, the two first sealing rings 11 are located on the same plane, the circumference of one of the first sealing rings 11 is greater than that of the other first sealing ring 11, the one first sealing ring 11 is arranged around the outer periphery of the other first sealing ring 11, and a gap is maintained between the two first sealing rings 11.

[0066] The cathode assembly is arranged in the cathode placement area, and the cathode assembly comprises a cathode target material 9 and a cathode target material mounting portion 10 connected with the support plate 3. The cathode target material mounting portion 10 is provided with a groove on the side facing the support plate 3, and a second sealing ring 12 is arranged in the groove to improve the air tightness between the cathode target material mounting portion 10 and the chamber and reduce the air leakage rate.

[0067] The second sealing ring 12 is provided in multiple numbers, and the multiple second sealing rings 12 are located on the same plane and are sequentially distributed outward from the center of the cathode target material mounting portion 10. In some embodiments, the second sealing ring 12 can be provided in two numbers, and the two second sealing rings 12 are located on the same plane. The circumferential length of one of the second sealing rings 12 is greater than that of the other second sealing ring 12, and the one second sealing ring 12 is arranged around the outer periphery of the other second sealing ring 12. A gap is maintained between the two second sealing rings 12.

[0068] In some embodiments, the first sealing ring 11 and the second sealing ring 12 are square-shaped. The four corners of the first sealing ring 11 are arc-shaped, and the four corners of the second sealing ring 12 are arc-shaped.

[0069] The conveying mechanism 5 is used to drive the carrier to move in the front-rear direction of the vacuum chamber 1 (to be conveyed from the front end to the rear end inside the vacuum chamber 1). The conveying mechanism 5 comprises one or more first driving assemblies and one or more second driving assemblies. The first driving assemblies and the second driving assemblies are arranged on the left and right sides of the vacuum chamber 1, respectively (if the first driving assemblies are arranged on the left side of the vacuum chamber 1, the second driving assemblies are arranged on the right side of the vacuum chamber 1; if the first driving assemblies are arranged on the right side of the vacuum chamber 1, the second driving assemblies are arranged on the left side of the vacuum chamber 1). When multiple first driving assemblies and multiple second driving assemblies are arranged, the first driving assemblies correspond to the second driving assemblies one by one.

[0070] The first driving assemblies and the second driving assemblies each comprise a driving member 4, multiple transmission shafts 51, and multiple transmission units. One end of the transmission shaft 51 is matched with the carrier 17 located inside the vacuum chamber 1, and the other end of the transmission shaft 51 can extend outside the vacuum chamber 1. The other ends of adjacent two transmission shafts 51 located on the same side of the vacuum chamber 1 are connected through the transmission unit. The driving member 4 is connected with one transmission shaft 51, and the transmission unit and the driving member 4 are located outside the vacuum chamber 1. The transmission unit comprises a transmission gear 52 and a transmission belt 53. One transmission gear 52 is arranged on the outermost transmission shaft 51, and two transmission gears 52 are arranged on the other transmission shafts 51. The transmission belts 53 are wound around the transmission gears 52 on the adjacent two transmission shafts 51. The end of the transmission shaft 51 provided with the transmission gear 52 is located outside the vacuum chamber 1 (both the transmission gear 52 and the transmission belt 53 are located outside the vacuum chamber 1), so as to prevent the driving member 4, the transmission gear 52, and the transmission belt 53 from being damaged during coating, prolong the service life of the conveying mechanism 5, and facilitate replacement of the conveying mechanism 5, which is convenient and fast.

[0071] In the example, the transmission units of the first driving assembly and the second driving assembly each include a driving member 4, a transmission gear 52, and a transmission belt 53. The two driving members 4 are respectively located at the left and right sides of the vacuum cavity 1. The transmission shafts 51 extend in the left-right direction. The transmission shaft 51 of the first driving assembly and the transmission shaft 51 of the second driving assembly are arranged in parallel and correspond to each other. The transmission shaft 51 of the first driving assembly and the corresponding transmission shaft 51 of the second driving assembly are located on the same straight line, wherein:

[0072] The transmission shaft 51 at the front end or the rear end of the left side of the vacuum cavity 1 is provided with a transmission gear 52. The transmission shaft 51 is connected with a driving member 4. If the transmission shaft 51 at the front end of the left side of the vacuum cavity 1 is provided with a transmission gear 52, the transmission shaft 51 is connected with a driving member 4. The other transmission shafts 51 are provided with two transmission gears 52. The transmission belts 53 are wound around the transmission gears 52 on the adjacent two transmission shafts 51, that is, the transmission gear 52 on the transmission shaft 51 at the front end of the left side of the vacuum cavity 1 and the transmission gear 52 on the adjacent transmission shaft 51 are wound with the transmission belt 53. The other transmission gear 52 on the transmission shaft 51 and the transmission gear 52 on the adjacent transmission shaft 51 are wound with the transmission belt 53.

[0073] The transmission shaft 51 at the front end or the rear end of the right side of the vacuum cavity 1 is provided with a transmission gear 52. The transmission shaft 51 is connected with another driving member 4. If the transmission shaft 51 at the front end of the right side of the vacuum cavity 1 is provided with a transmission gear 52, the transmission shaft 51 is connected with another driving member 4. The other transmission shafts 51 are provided with two transmission gears 52. The transmission belts 53 are wound around the transmission gears 52 on the adjacent two transmission shafts 51, that is, the transmission gear 52 on the transmission shaft 51 at the front end of the right side of the vacuum cavity 1 and the transmission gear 52 on the adjacent transmission shaft 51 are wound with the transmission belt 53. The other transmission gear 52 on the transmission shaft 51 and the transmission gear 52 on the adjacent transmission shaft 51 are wound with the transmission belt 53.

[0074] The end of the transmission shaft 51 away from the transmission gear 52 is provided with a roller 54. The end of the transmission shaft 51 provided with the roller 54 is located in the vacuum cavity 1. The roller 54 is located in the vacuum cavity 1. The roller 54 cooperates with the carrier 17.

[0075] The device further comprises a carrier 17, as shown in FIGS. 14-15, which is structured as follows: the carrier 17 comprises two side frames 171 arranged opposite to each other in the front-rear direction, two support members 173 arranged opposite to each other in the left-right direction, and a carrying unit, the two support members 173 being located between the two side frames 171 and maintaining a gap therebetween, and the support members 173 being detachably connected with the side frames 171. The opposite sides of the carrying unit are detachably connected with the two side frames 171, respectively, and the other opposite sides of the carrying unit are detachably connected with the two support members 173, respectively, so as to facilitate installation and disassembly, transportation and storage, occupy less space, and have higher versatility.

[0076] The carrying unit comprises a plurality of sub-units, which are surrounded by the four peripheries and pass through in the up-down direction. Each sub-unit comprises a carrying body and an annular protruding portion arranged on the inner circumferal surface of the carrying body. The annular protruding portion comprises a body portion and a protruding portion arranged on the body portion. The body portion has an upper surface 174, an inner circumferal surface, and a lower surface, and the inner circumferal surface of the body portion connects the upper surface and the lower surface. The protruding portion has an upper surface 175 and a vertical surface 176 connected with each other. The vertical surface 176 of the protruding portion maintains a spacing with the inner circumferal surface of the body portion, and the spacing is located at the end portion of the silicon wafer. A gap is maintained between two adjacent sub-units in the front-rear direction, and the two adjacent sub-units in the front-rear direction are connected by a connecting rod 177, and the opposite ends of the connecting rod 177 are connected with the support members 173. The annular protruding portion is arranged to facilitate the fixation and positioning of the silicon wafer, and the silicon wafer will not be displaced when the carrier is driven, thereby preventing the silicon wafer from falling while satisfying the back film coating.

[0077] In an embodiment, the side frame 171 and one side of the carrying unit are provided with an enclosing plate 172, and the side of the side frame 171 away from the enclosing plate 172 is provided with an open groove recessed toward the enclosing plate 172, and the roller 54 is located in the open groove. The enclosing plate 172 is connected with the connecting rod 177. The enclosing plate 172 is arranged to prevent the conveying mechanism from touching the carrying unit, thereby better protecting the silicon wafer. When the protruding portion is upward, the upper surface of the protruding portion extends upwardly and obliquely away from the vertical surface from the bottom end to the upper end thereof, i.e., a chamfer is formed. The silicon wafer is placed on the upper surface 174 of the body portion, and the end portion of the silicon wafer will not touch the upper surface 175 of the protruding portion. The chamfer design can effectively prevent the edge effect of double-sided film coating and solve the color difference problem caused by the edge effect.

[0078] In an embodiment, the support member 173 is provided in a plurality, and the plurality of support members 173 extend in the left-right direction. Two adjacent sub-units in the left-right direction are connected by the support member 173, and more sub-units can be installed to carry more silicon wafers.

[0079] In a preferred embodiment, the transmission shaft 51 is externally provided with a shaft seal 55, and the shaft seal 55 is located outside the vacuum cavity 1, thereby improving the overall sealing performance of the vacuum cavity 1.

[0080] In this example, the device further comprises a tensioning assembly 6, which is used to tension the transmission belt 53, facilitate adjustment of the transmission belt 53, and facilitate stability of the transmission carrier 17.

[0081] Referring to FIG. 8, the tensioning assembly 6 is arranged outside the vacuum chamber 1, and comprises a fixed table 61, a sliding block 62, and a tensioning wheel 63. The fixed table 61 is arranged on the left side or the right side of the vacuum chamber 1, and a sliding groove is formed in the fixed table 61. The sliding block 62 is movably arranged in the sliding groove and moves in the up-down direction in the sliding groove. The roller shaft of the tensioning wheel 63 is connected with the sliding block 62, and the sliding block 62 can drive the tensioning wheel 63 to move.

[0082] In this example, the tensioning assembly 6 further comprises a screw rod 64 and a nut 65. The screw rod 64 extends in the vertical direction, and the upper end of the screw rod 64 is connected with the sliding block 62 through the fixed table 61. A threaded hole is formed in the bottom of the fixed table 61 and is threadedly connected with the screw rod 64. The lower end of the screw rod 64 extends downward away from the fixed table 61. The nut 65 is arranged at the lower end of the screw rod 64 and is located outside the fixed table 61. The nut 65 can abut against the outer side of the fixed table 61. When the position of the tensioning wheel 63 in the vertical direction needs to be adjusted, the nut 65 is loosened to be separated from the outer side of the fixed table 61. The screw rod 64 is adjusted to move until the tensioning wheel 63 is located at a proper position, and then the nut 65 is tightened to abut against the outer side of the fixed table 61, so as to limit the movement of the screw rod 64. The position of the tensioning wheel 63 is adjusted by the screw rod 64 and the nut 65, which is convenient to operate and stable in locking.

[0083] In a preferred arrangement, a plurality of tensioning assemblies are arranged. A plurality of tensioning assemblies are arranged on the left side and / or the right side of the vacuum chamber 1. The plurality of tensioning assemblies arranged on the left side of the vacuum chamber 1 are distributed in the front-rear direction. The plurality of tensioning assemblies arranged on the right side of the vacuum chamber 1 are distributed in the front-rear direction.

[0084] In this example, the device further comprises a support, which is arranged outside the vacuum chamber 1 and is connected with the outer side wall of the vacuum chamber 1. The support is used to mount the driving member 4. Referring to FIG. 5, the support comprises a support plate 13 and a plurality of support columns 14. One end of each support column 14 is connected with the outer side wall of the vacuum chamber 1, and the other end of each support column 14 is connected with the support plate 13. The support plate 13 is connected with the driving member 4. The support columns 14 are perpendicular to the outer side wall of the vacuum chamber 1 and the support plate 13. The plurality of support columns 14 are arranged in parallel.

[0085] In some embodiments, the device further comprises a plurality of support legs 16, which are arranged at the bottom of the vacuum chamber 1 and are used to support the vacuum chamber 1, so as to improve the stability of the overall structure.

[0086] In some embodiments, the boss 15 is in the shape of a cuboid, which is convenient to process. The reinforcing plate 2 is in the shape of a cuboid, and the through holes in the reinforcing plate 2 are square. The driving member 4 can be an electric motor.

[0087] The photovoltaic cell PVD vacuum coating equipment of the example is suitable for coating process of perovskite, BC battery and other photovoltaic cells. According to the needs of customers, the cathode target material can rotate copper, aluminum, titanium tungsten, silver, gold and other target materials, and is convenient to replace.

[0088] The above examples are only for illustrating the technical concept and characteristics of the present application, and the purpose is to enable those skilled in the art to understand the content of the present application and to implement it, and cannot limit the protection scope of the present application. Any equivalent changes or modifications made in accordance with the spirit and essence of the present application shall be covered within the protection scope of the present application.

Claims

1. A photovoltaic cell PVD vacuum coating device, characterized in that, The device comprises a vacuum chamber, a plurality of chambers in the vacuum chamber are separated by reinforcing plates, the reinforcing plates are provided with through holes for carriers to pass through, the upper side of the vacuum chamber is provided with a support plate, the support plate is provided with through holes corresponding to the chambers, the support plate is connected with the reinforcing plates, the upper surface of the support plate is provided with a plurality of bosses between adjacent through holes, and the support plate is provided with a molecular pump placement area and a cathode placement area on the front and back sides of the bosses. The device further comprises a molecular pump assembly and a cathode assembly, the molecular pump assembly comprises a molecular pump and a molecular pump mounting portion, the molecular pump assembly is arranged in the molecular pump placement area, the molecular pump mounting portion is connected with the support plate, and the molecular pump mounting portion is provided with a first sealing ring on the side facing the support plate; the cathode assembly is arranged in the cathode placement area, the cathode assembly comprises a cathode target material and a cathode target material mounting portion, the cathode target material mounting portion is connected with the support plate, and the cathode target material mounting portion is provided with a second sealing ring on the side facing the support plate. The first sealing ring and the second sealing ring are both square.

2. The photovoltaic cell PVD vacuum coating apparatus according to claim 1, wherein, The first sealing ring is provided with a plurality of first sealing rings, the first sealing rings are located on the same plane, and the first sealing rings are sequentially distributed outward with the center of the molecular pump mounting portion as the center; the second sealing ring is provided with a plurality of second sealing rings, the second sealing rings are located on the same plane, and the second sealing rings are sequentially distributed outward with the center of the cathode target material mounting portion as the center.

3. The photovoltaic cell PVD vacuum coating apparatus according to claim 2, wherein, ​ 4. The photovoltaic cell PVD vacuum coating apparatus according to claim 2, wherein, ​ 5. The photovoltaic cell PVD vacuum coating apparatus according to claim 3, wherein, Two first sealing rings are arranged, and the two first sealing rings are located on the same plane; the circumference of one of the first sealing rings is larger than that of the other first sealing ring; the one first sealing ring is arranged around the other first sealing ring; and a gap is maintained between the two first sealing rings.

6. The photovoltaic cell PVD vacuum coating apparatus according to claim 1, wherein, The transmission unit comprises transmission gears and a transmission belt; one of the transmission gears is arranged on the transmission shaft of the front end or the rear end of the left side of the vacuum cavity and connected with one driving member; two transmission gears are arranged on the transmission shafts of the other driving members; and the transmission belt is arranged around the transmission gears on the adjacent two transmission shafts. The second driving assembly is arranged on the transmission shaft of the front end or the rear end of the right side of the vacuum cavity and connected with another driving member; two transmission gears are arranged on the transmission shafts of the other driving members; and the transmission belt is arranged around the transmission gears on the adjacent two transmission shafts. The end of the transmission shaft away from the transmission gear is provided with a roller, which is located in the vacuum cavity and matched with the carrier.

7. The photovoltaic cell PVD vacuum coating apparatus according to claim 6, characterized in that, The transmission shaft is provided with a shaft seal outside the vacuum cavity.

8. The photovoltaic cell PVD vacuum coating apparatus according to claim 1, wherein, The device further comprises a tensioning assembly arranged outside the vacuum cavity, which is used for tensioning the transmission belt; the tensioning assembly comprises a fixed table, a sliding block and a tensioning wheel; the fixed table is arranged on the left side or the right side of the vacuum cavity; the sliding block is movably arranged in the sliding groove of the fixed table; and the roller shaft of the tensioning wheel is connected with the sliding block.

9. The photovoltaic cell PVD vacuum coating apparatus according to claim 8, characterized in that, The tensioning assembly further comprises a screw rod and a nut; the bottom of the fixed table is provided with a threaded hole in screw connection with the screw rod; the screw rod extends in the vertical direction; the screw rod passes through the fixed table and is connected with the sliding block; the nut is arranged on the screw rod and located outside the fixed table; and the nut is in abutment with the outer side of the fixed table.

10. The photovoltaic cell PVD vacuum coating apparatus according to claim 9, wherein, The upper end of the screw rod passes through the fixed table and is connected with the sliding block; and the lower end of the screw rod extends downward away from the fixed table.

11. The photovoltaic cell PVD vacuum coating apparatus according to claim 8, wherein, A plurality of the tensioning assemblies are arranged on the left side and / or the right side of the vacuum cavity; the tensioning assemblies arranged on the left side of the vacuum cavity are distributed in the front-rear direction; and the tensioning assemblies arranged on the right side of the vacuum cavity are distributed in the front-rear direction.

12. The photovoltaic cell PVD vacuum coating apparatus according to claim 1, wherein, The boss is in the shape of a cuboid; the reinforcing plate is in the shape of a cuboid; and the perforations on the reinforcing plate are in the shape of a square.

13. The photovoltaic cell PVD vacuum coating apparatus according to claim 1, wherein, The device further comprises a support, which is located outside the vacuum cavity, is connected with the outer sidewall of the vacuum cavity, and is used for mounting the driving member.

14. The photovoltaic cell PVD vacuum coating apparatus according to claim 13, wherein, The support comprises a support plate and a plurality of support columns, one end of each of the support columns is connected with the outer sidewall of the vacuum cavity, the other end of each of the support columns is connected with the support plate, the support plate is connected with the driving member, and the support columns are perpendicular to the outer sidewall of the vacuum cavity and the support plate; and the plurality of support columns are arranged in parallel.

15. The photovoltaic cell PVD vacuum coating apparatus according to claim 1, wherein, The device further comprises a carrier, which comprises two side frames arranged opposite to each other in the front-rear direction, two support members arranged opposite to each other in the left-right direction, and a carrying unit, the two support members are located between the two side frames, the opposite two sides of the carrying unit are detachably connected with the two side frames respectively, the other opposite two sides of the carrying unit are detachably connected with the two support members respectively, the carrying unit comprises a plurality of sub-units, the four peripheries of the sub-units are surrounded, and the sub-units are penetrated in the up-down direction, the sub-unit comprises a carrying main body and an annular protruding part arranged on the inner circumferal surface of the carrying main body, the annular protruding part comprises a body part and a protruding part arranged on the body part, the body part has an upper surface, an inner circumferal surface and a lower surface, the inner circumferal surface of the body part is connected with the upper surface and the lower surface, the protruding part has an upper surface and a vertical surface connected with each other, and a spacing is kept between the vertical surface of the protruding part and the inner circumferal surface of the body part, and the end part of the silicon wafer is located at the spacing; a gap is kept between two adjacent carrying units in the front-rear direction, and the two adjacent carrying units in the front-rear direction are connected through a connecting rod, and the connecting rod is connected with the support member.

16. The photovoltaic cell PVD vacuum coating apparatus according to claim 15, wherein, The support member is provided in plurality, and the plurality of support members extend along the left-right direction, and two adjacent carrying units in the left-right direction are connected through the support members.

17. A photovoltaic cell PVD vacuum coating apparatus, characterized by, The device comprises: The vacuum cavity comprises a plurality of chambers, the plurality of chambers are formed by arranging a reinforcing plate in the vacuum cavity, the plurality of chambers are distributed along the front-rear direction, the reinforcing plate is provided with a through hole, and the through hole is used for passing the carrier; the upper side of the vacuum cavity is provided with a support plate, the support plate is provided with a through hole corresponding to the chamber, and the support plate is connected with the reinforcing plate; the upper surface of the support plate is provided with a plurality of bosses, the bosses are located between two adjacent through holes, and the support plate is provided with a molecular pump placement area and a cathode placement area on the front and rear sides of the bosses respectively. The conveying mechanism is used to drive the carrier to move in the front-rear direction of the vacuum cavity, and comprises one or more first driving assemblies and one or more second driving assemblies, the first driving assemblies and the second driving assemblies are respectively arranged on the left and right sides of the vacuum cavity, the first driving assemblies correspond to the second driving assemblies one by one, and the first driving assemblies and the second driving assemblies each comprise a driving piece, a plurality of transmission shafts and a plurality of transmission units, one end of the transmission shaft is matched with the carrier in the vacuum cavity, the other end of adjacent two transmission shafts on the same side of the vacuum cavity is connected through a transmission unit, the driving piece is connected with a transmission shaft, and the transmission unit and the driving piece are located outside the vacuum cavity. The transmission unit comprises a transmission gear and a transmission belt, the first driving assembly is provided with one transmission gear on the transmission shaft at the front end or the rear end of the left side of the vacuum cavity, the transmission shaft is connected with one driving piece, the other transmission shafts are provided with two transmission gears, and the transmission gears on adjacent two transmission shafts are wound with the transmission belt; the second driving assembly is provided with one transmission gear on the transmission shaft at the front end or the rear end of the right side of the vacuum cavity, the transmission shaft is connected with another driving piece, the other transmission shafts are provided with two transmission gears, and the transmission gears on adjacent two transmission shafts are wound with the transmission belt. The transmission shaft is provided with a roller at the end away from the transmission gear, the roller is located in the vacuum cavity, and the roller is matched with the carrier. The tensioning assembly is arranged outside the vacuum cavity, the tensioning assembly is used for tensioning the transmission belt, and the tensioning assembly comprises a fixed table, a sliding block, a tensioning wheel, a screw rod and a nut. The fixed table is arranged on the left side or the right side of the vacuum cavity, a sliding groove is formed in the fixed table, the sliding block is movably arranged in the sliding groove, and the roller shaft of the tensioning wheel is connected with the sliding block. The screw rod extends in the vertical direction, the screw rod penetrates through the fixed table and is connected with the sliding block, the nut is arranged on the screw rod and located outside the fixed table, and the nut abuts against the outer side of the fixed table. The molecular pump assembly comprises a molecular pump and a molecular pump mounting portion, the molecular pump assembly is arranged in the molecular pump placing area, the molecular pump mounting portion is connected with the support plate, and the molecular pump mounting portion is provided with a first sealing ring on the side facing the support plate. The cathode assembly is arranged in the cathode placing area, the cathode assembly comprises a cathode target material and a cathode target material mounting portion, the cathode target material mounting portion is connected with the support plate, and the cathode target material mounting portion is provided with a second sealing ring on the side facing the support plate.

18. The photovoltaic cell PVD vacuum coating apparatus according to claim 17, wherein, The upper end of the screw rod penetrates through the fixed table and is connected with the sliding block, and the lower end of the screw rod extends downward away from the fixed table.

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