Auxiliary power supply circuit, radio frequency power supply, circuit operation method, and storage medium

Abstract

Disclosed in the present application are an auxiliary power supply circuit, a radio frequency power supply, a circuit operation method, and a storage medium. The auxiliary power supply circuit comprises: a voltage bus interface, an energy storage module interface, a first power switch, a second power switch, a first drive component, and a second drive component; the first power switch is configured to be turned on when the voltage of the voltage bus is greater than the voltage of the energy storage module, such that the voltage bus charges the energy storage module; and the second power switch is configured to be turned on when the voltage of the energy storage module is greater than the voltage of the voltage bus, such that the energy storage module charges the voltage bus.

Description

Auxiliary power supply circuit, radio frequency power supply, circuit operation method and storage medium

[0001] This application claims priority to Chinese patent application No. 202411430706.1, filed on October 14, 2024, the entire contents of which are incorporated herein by reference.

[0002] Technical Field

[0003] This application relates to the field of radio frequency power supply technology, and in particular to an auxiliary power supply circuit, a radio frequency power supply, a circuit operation method, and a storage medium. Background Technology

[0004] The radio frequency power supply rectifies and filters the AC power before outputting it to other components, including the inverter, via VBUS.

[0005] Due to the presence of inductance within the machine, a sudden power outage of VBUS will affect the normal operation of the power supply and may even impact the power grid, damaging the machine. Summary of the Invention

[0006] The main purpose of this application is to provide an auxiliary power supply circuit, which aims to provide a solution for stabilizing the voltage potential when the voltage bus loses power.

[0007] To achieve the above objectives, this application proposes an auxiliary power supply circuit, which is applied to an radio frequency (RF) power supply. The RF power supply includes a voltage bus and an energy storage module. The auxiliary power supply circuit includes:

[0008] Voltage bus interface, energy storage module interface, first power switch, second power switch, first drive component, and second drive component;

[0009] The voltage bus interface is connected to the voltage bus;

[0010] The energy storage module interface is connected to the energy storage module;

[0011] The first terminal of the first power switch is connected to the energy storage module interface and the first terminal of the first drive component, the second terminal is connected to the voltage bus interface, and the control terminal is connected to the second terminal of the first drive component and the first terminal of the second drive component.

[0012] The second terminal of the second power switch is connected to the energy storage module interface and the first terminal of the first power switch, the first terminal is connected to the second terminal of the first power switch, the voltage bus interface and the second terminal of the second drive component, and the control terminal is connected to the second terminal of the first drive component and the first terminal of the second drive component.

[0013] The first power switch is used to turn on when the voltage bus voltage is greater than the energy storage module voltage, so that the voltage bus can provide power to the energy storage module;

[0014] The second power switch is used to turn on when the voltage of the energy storage module is greater than the voltage bus voltage, so that the energy storage module can provide power to the voltage bus.

[0015] In one embodiment, the first power switch and the second power switch are packaged to form a bidirectional switch with two gates;

[0016] The first end of the first power switch and the second end of the second power switch are connected to form the first pole of the bidirectional switch; the second end of the first power switch and the first end of the second power switch are connected to form the first pole of the bidirectional switch.

[0017] The control terminal of the first power switch is the first gate of the bidirectional switch, and the control terminal of the second power switch is the second gate of the bidirectional switch.

[0018] In one embodiment, the first power switch is a first thyristor; the second power switch is a second thyristor;

[0019] The cathode of the first thyristor is connected to the energy storage module interface and the first end of the first drive component, the anode is connected to the voltage bus interface, and the gate is connected to the second end of the first drive component.

[0020] The cathode of the second thyristor is connected to the anode of the first thyristor, the voltage bus interface, and the second end of the second drive component, and the gate is connected to the first end of the second drive component.

[0021] In one embodiment, the first driving component includes a first resistor and a first Zener diode configured in parallel;

[0022] The cathode of the first Zener diode is connected to the gate of the first thyristor, and the anode is connected to the cathode of the first thyristor.

[0023] The second driving component includes a second resistor and a second Zener diode configured in parallel;

[0024] The cathode of the second Zener diode is connected to the gate of the second thyristor, and the anode is connected to the cathode of the second thyristor.

[0025] In one embodiment, the auxiliary power supply circuit further includes:

[0026] A switching assembly; the first end of the switching assembly is connected to the gate of the first thyristor, and the second end is connected to the gate of the second thyristor;

[0027] The switching assembly is used to connect the path between the first thyristor gate and the second thyristor gate when a control signal is received at the control terminal of the switching assembly.

[0028] In one embodiment, the switching assembly includes a first switching transistor and a second switching transistor;

[0029] The first end of the first switching transistor is connected to the gate of the first thyristor, and the second end is connected to the first end of the second switching transistor; the second end of the second switching transistor is connected to the gate of the second thyristor; the control terminal of the first switching transistor is connected to the control terminal of the second switching transistor to form the control terminal of the switching assembly.

[0030] In one embodiment, the auxiliary power supply circuit further includes:

[0031] Control circuit; the control module is connected to the voltage bus and the energy storage module respectively;

[0032] The output terminal of the control circuit is connected to the control terminal of the switching assembly. The control module is used to detect the voltage of the voltage bus and the voltage of the energy storage module, and outputs a control signal to the switching assembly when the difference between the voltage of the voltage bus and the voltage of the energy storage module is less than a predetermined value.

[0033] In one embodiment, the control circuit includes a DC signal output component, the output terminal of which is connected to the control terminal of the switching component;

[0034] When the difference between the voltage on the voltage bus and the voltage of the energy storage module is less than a predetermined value, the DC signal output component outputs a DC control signal to the control terminal of the switching component.

[0035] In one embodiment, the control circuit includes an AC signal output component and a rectifier module;

[0036] The input terminal of the rectifier module is connected to the output terminal of the AC signal output component, and the output terminal is connected to the control terminal of the switch component.

[0037] When the difference between the voltage on the voltage bus and the voltage of the energy storage module is less than a predetermined value, the AC signal output component outputs an AC signal, and the rectifier module rectifies the AC signal into a DC control signal and outputs it to the switching component.

[0038] In one embodiment, the rectifier module includes:

[0039] Transformer, first diode, and second diode;

[0040] The primary coil of the transformer is connected to the output terminal of the AC signal output component; the first terminal of the primary coil of the transformer is connected to the anode of the first diode, the second terminal of the primary coil is connected to the first terminal of the secondary coil, and the second terminal of the secondary coil is connected to the anode of the second diode; wherein, the first terminal of the secondary coil, the first terminal of the primary coil, and the first terminal of the secondary coil are terminals of the same name;

[0041] The cathodes of the first diode and the second diode are connected to the control terminal of the switching assembly.

[0042] In one embodiment, the auxiliary power supply circuit further includes: a shutdown module;

[0043] The shutdown module is disposed between the control circuit and the switching assembly; the shutdown module is used to remove the operating power of the switching assembly when the control circuit stops outputting.

[0044] In one embodiment, the switching assembly includes a switching transistor disposed in the path between the gates of a first thyristor and a second thyristor, the switching transistor being an NMOS transistor; the shutdown module includes a PMOS transistor.

[0045] The source of the PMOS transistor is connected to the control terminal of the switching assembly, the gate is connected to the control circuit, and the drain is connected to the source of the NMOS transistor.

[0046] A third diode is connected between the gate and source of the PMOS transistor; when the control circuit stops outputting, the PMOS transistor forms a path through the freewheeling current of the third diode, thereby removing the operating power between the control terminal of the switching component and the source of the NMOS transistor to turn off the switching component.

[0047] In one embodiment, the shutdown component further includes:

[0048] The third and fourth resistors;

[0049] The anode of the third diode is connected to the gate of the PMOS transistor, and the cathode is connected to the drain of the PMOS transistor, the first end of the fourth resistor, and the control terminal of the switching assembly.

[0050] The source of the PMOS transistor is connected to the first terminal of the third resistor; the second terminal of the third resistor is connected to the second terminal of the fourth resistor and the source of the NMOS transistor.

[0051] This application also proposes a radio frequency power supply, the radio frequency power supply comprising:

[0052] Voltage bus, energy storage module, and the aforementioned auxiliary power supply circuit.

[0053] In one embodiment, the radio frequency power supply further includes:

[0054] Protection circuit; the protection circuit is disposed between the voltage bus and the energy storage module, and the protection circuit is used to limit the charging current to avoid overcurrent damage to the energy storage module when the voltage bus charges the energy storage module.

[0055] This application also proposes a circuit operation method, the circuit operation method comprising:

[0056] Detect the voltage of the voltage bus and the voltage of the energy storage module;

[0057] If the difference between the voltage bus voltage and the energy storage module voltage is less than a predetermined value, the current direction for powering the voltage bus and the energy storage module is determined based on the comparison relationship between the voltage bus voltage and the energy storage module voltage.

[0058] In one embodiment, the step of determining the current direction for power supply between the voltage bus and the energy storage module based on the comparison between the voltage bus voltage and the energy storage module voltage includes:

[0059] If the voltage of the voltage bus is greater than the voltage of the energy storage module, the path between the voltage bus and the energy storage module is opened so that the voltage bus output current can power the energy storage module.

[0060] If the voltage of the voltage bus is less than the voltage of the energy storage module, the path between the energy storage module and the voltage bus is opened so that the output current of the energy storage module powers the voltage bus.

[0061] This application also proposes a storage medium storing a circuit operation program, which, when executed by a processor, implements the steps of the circuit operation method.

[0062] This application discloses an auxiliary power supply circuit, wherein the auxiliary power supply circuit is applied to an radio frequency (RF) power supply, the RF power supply including a voltage bus and an energy storage module; the auxiliary power supply circuit includes a voltage bus interface, an energy storage module interface, a first power switch, a second power switch, a first driving component, and a second driving component; the voltage bus interface is connected to the voltage bus; the energy storage module interface is connected to the energy storage module; a first terminal of the first power switch is connected to the energy storage module interface and a first terminal of the first driving component, a second terminal is connected to the voltage bus interface, and a control terminal is connected to the second terminal of the first driving component and the first terminal of the second driving component; the second power switch... The second terminal is connected to the energy storage module interface and the first terminal of the first power switch. The first terminal is connected to the second terminal of the first power switch, the voltage bus interface, and the second terminal of the second drive component. The control terminal is connected to the second terminal of the first drive component and the first terminal of the second drive component. The first power switch is used to turn on when the voltage bus voltage is greater than the energy storage module voltage, so that the voltage bus can power the energy storage module. The second power switch is used to turn on when the voltage of the energy storage module is greater than the voltage bus voltage, so that the energy storage module can power the voltage bus, reducing the voltage bus voltage drop rate and thus preventing the power supply from being damaged by the voltage bus due to excessively rapid power loss. This application generates different on / off states by using the first and second power switches for different voltage bus voltage and energy storage module voltage relationships, so that the energy storage module can turn on when the voltage of the energy storage module is greater than the voltage bus voltage, so that the energy storage module can power the voltage bus, reducing the voltage bus voltage drop rate and thus preventing the power supply from being damaged by the grid impact caused by the voltage bus being damaged too quickly. Attached Figure Description

[0063] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0064] Figure 1 is a schematic diagram of a first embodiment of the auxiliary power supply circuit of this application;

[0065] Figure 2 is another structural schematic diagram of the auxiliary power supply circuit of the first embodiment of this application;

[0066] Figure 3 is another structural schematic diagram of the first embodiment of the auxiliary power supply circuit of this application;

[0067] Figure 4 is another structural schematic diagram of the first embodiment of the auxiliary power supply circuit of this application;

[0068] Figure 5 is a schematic diagram of another structure of the first embodiment of the auxiliary power supply circuit of this application;

[0069] Figure 6 is a structural schematic diagram of a second embodiment of the auxiliary power supply circuit of this application;

[0070] Figure 7 is a structural schematic diagram of a second embodiment of the auxiliary power supply circuit of this application;

[0071] Figure 8 is another structural schematic diagram of the auxiliary power supply circuit of the present application in a second embodiment;

[0072] Figure 9 is a structural schematic diagram of a third embodiment of the auxiliary power supply circuit of this application;

[0073] Figure 10 is a schematic diagram of another structure of the auxiliary power supply circuit of the third embodiment of this application;

[0074] Figure 11 is another structural schematic diagram of the third embodiment of the auxiliary power supply circuit of this application;

[0075] Figure 12 is another structural schematic diagram of the third embodiment of the auxiliary power supply circuit of this application.

[0076] Explanation of icon numbers:

[0077]

[0078] The realization of the purpose, functional features and advantages of this application will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Embodiments of the present invention

[0079] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0080] It should be noted that all directional indicators (such as up, down, left, right, front, back, etc.) in the embodiments of this application are only used to explain the relative positional relationship and movement of each component in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicator will also change accordingly.

[0081] In this application, unless otherwise expressly specified and limited, the terms "connection," "fixed," etc., should be interpreted broadly. For example, "fixed" can mean a fixed connection, a detachable connection, or an integral part; it can mean a mechanical connection or an electrical connection; it can mean a direct connection or an indirect connection through an intermediate medium; it can mean the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0082] Furthermore, the use of terms such as "first" and "second" in this application is for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the technical solutions of the various embodiments can be combined with each other, but only on the basis of being achievable by those skilled in the art. If the combination of technical solutions is contradictory or impossible to implement, such a combination of technical solutions should be considered non-existent and not within the scope of protection claimed in this application.

[0083] This application proposes an auxiliary power supply circuit, which is applied to an RF power supply and aims to solve the problem that a sudden power failure of the voltage bus can easily cause grid surges and damage to the machine.

[0084] In the first embodiment of this application, the radio frequency power supply includes: a voltage bus and an energy storage module; the auxiliary power supply circuit includes:

[0085] Voltage bus interface 60, energy storage module interface 10, first power switch 30, second power switch 40, first drive component 20 and second drive component 50;

[0086] The voltage bus interface 60 is connected to the voltage bus;

[0087] The energy storage module interface 10 is connected to the energy storage module;

[0088] The first end of the first power switch 30 is connected to the energy storage module interface 10 and the first end of the first drive component 20, the second end is connected to the voltage bus interface 60, and the control end is connected to the second end of the first drive component 20 and the first end of the second drive component 50.

[0089] The second end of the second power switch 40 is connected to the energy storage module interface 10 and the first end of the first power switch 30, the first end is connected to the second end of the first power switch 30, the voltage bus interface 60 and the second end of the second drive component 50, and the control end is connected to the second end of the first drive component 20 and the first end of the second drive component 50.

[0090] The first power switch 30 is used to turn on when the voltage bus voltage is greater than the energy storage module voltage, so that the voltage bus can provide power to the energy storage module;

[0091] The second power switch 40 is turned on when the voltage of the energy storage module is greater than the voltage bus voltage, so that the energy storage module can continue to power the voltage bus, reduce the voltage bus voltage drop rate, and thus prevent the voltage bus from losing power.

[0092] It should be noted that RF power supplies contain inductors. If the voltage bus suddenly loses power, it will affect the normal operation of the power supply and may even impact the power grid, damaging the equipment. The solution proposed in this application slows down the rate of voltage bus voltage drop, allowing the bus voltage to decrease gradually. This avoids excessively rapid voltage bus power loss, which could lead to a large voltage difference between the voltage bus and the energy storage module, causing a power grid impact and damaging the power supply.

[0093] Referring to Figure 1, the auxiliary power supply circuit connects the voltage bus and the energy storage module via the voltage bus interface 60 and the energy storage module interface 10, respectively. The RF power supply rectifies and filters the AC power before supplying power to other components via the voltage bus. The energy storage module charges and stores energy when the voltage bus voltage is normal, and replenishes energy to the voltage bus via the auxiliary power supply circuit when the voltage bus experiences an abnormal power outage, thus slowing down the rate of voltage loss. In this design, the auxiliary power supply circuit includes a first power switch 30 and a second power switch 40 between the voltage bus and the energy storage module. The connection or disconnection of the voltage bus and the energy storage module is achieved by turning the first power switch 30 or the second power switch 40 on or off.

[0094] The control terminal of the first power switch 30 is connected to the voltage bus via the second drive component 50, and the first drive component 20 is provided between the first terminal and the control terminal. The control terminal of the second power switch 40 is connected to the energy storage module via the first drive component 20, and the second drive component 50 is provided between the first terminal and the control terminal. It should be noted that in this scheme, based on the comparison relationship between the voltage bus and the voltage in the energy storage module, there are three scenarios, specifically:

[0095] (1) The voltage of the voltage bus is greater than the voltage of the energy storage module. The voltage of the voltage bus is applied to the control terminal of the first power switch 30 through the second drive component 50; due to the presence of the first drive component 20, the voltage value at the control terminal of the first power switch 30 is greater than the voltage value at its first terminal. Also, due to the presence of the second drive component 50, the voltage value at the second terminal of the first power switch 30 is greater than the voltage value at its control terminal. That is, in the line of voltage bus interface 60 - second drive component 50 - first drive component 20 - energy storage module interface 10, the second drive component 50 and the first drive component 20 form a voltage divider circuit so that the voltage relationship between the three terminals of the first power switch 30 is as follows: voltage value at the second terminal > voltage value at the control terminal > voltage value at the first terminal. Based on the above voltage relationship, the first power switch 30 can be turned on when the voltage value at its second terminal is greater than the voltage value at the control terminal. After the first power switch 30 is turned on, since the voltage at its second terminal is higher than the voltage at its first terminal, the voltage bus charges the energy storage module. That is, the first power switch 30 is turned on when the voltage bus voltage is greater than the energy storage module voltage, so that the voltage bus can provide power to the energy storage module.

[0096] A second drive assembly 50 exists between the control terminal and the first terminal of the second power switch 40, and the second terminal is connected to the energy storage module interface 10. Since the voltage bus voltage is greater than the energy storage module voltage, the voltage relationship between the three terminals of the second power switch 40 is as follows: voltage at the first terminal > voltage at the control terminal > voltage at the second terminal. The second power switch 40 is turned off under this voltage relationship.

[0097] It should be noted that in this case, the turn-on voltage of the first power switch 30 is much smaller than the voltage difference between the voltage bus voltage and the energy storage module.

[0098] (2) The energy storage module charges and stores energy until the difference between the voltage of the voltage bus and the voltage of the energy storage module is less than a preset difference. At this time, the voltage value of the voltage bus is still greater than the voltage value of the energy storage module; however, due to the existence of the voltage divider circuit mentioned above, the voltage value at the control terminal of the first power switch 30 may be equal to or less than the voltage value at its first terminal; the voltage difference between the control terminal and the first terminal of the first power switch 30 is insufficient to overcome its conduction voltage, and the first power switch 30 is turned off.

[0099] The voltage relationship between the three terminals of the second power switch 40 remains as follows: voltage at the first terminal > voltage at the control terminal > voltage at the second terminal. The second power switch 40 is turned off under this voltage relationship.

[0100] In this scenario, both the first power switch 30 and the second power switch 40 are turned off, disconnecting the voltage bus from the energy storage module.

[0101] It should be noted that the preset difference is determined by the R&D personnel based on the specific parameters of the power switch, the first drive component 20, and the second drive component 50.

[0102] (3) The voltage bus suddenly loses power, and the voltage of the energy storage module is greater than the voltage of the voltage bus. Due to the existence of the voltage divider circuit, the voltage relationship between the three terminals of the second power switch 40 is as follows: voltage at the second terminal > voltage at the control terminal > voltage at the first terminal. Based on this voltage relationship, the second power switch 40 can be turned on when the voltage at its control terminal is greater than the voltage at its first terminal. After the first power switch 30 is turned on, since the voltage at its second terminal is higher than the voltage at its first terminal, the energy storage module continues to power the voltage bus. That is, the second power switch 40 is used to turn on when the voltage of the energy storage module is greater than the voltage of the voltage bus, so that the energy storage module continues to power the voltage bus, reduces the voltage drop rate of the voltage bus, and thus avoids the voltage bus losing power too quickly and damaging the power supply.

[0103] The voltage relationship between the three terminals of the first power switch 30 is as follows: voltage at the first terminal > voltage at the control terminal > voltage at the second terminal. The first power switch 30 is turned off under this voltage relationship.

[0104] It is readily apparent that after the RF power supply is turned on, the above three scenarios occur sequentially in time.

[0105] Referring to Figure 2, in one specific embodiment, the first power switch 30 and the second power switch 40 are respectively a first thyristor TH1 and a second thyristor HT2. The cathode of the first thyristor TH1 is connected to the energy storage module interface 10 and the first end of the first drive assembly 20, the anode is connected to the voltage bus interface 60, and the gate is connected to the second end of the first drive assembly 20.

[0106] The cathode of the second thyristor HT2 is connected to the anode of the first thyristor TH1, the voltage bus interface 60, and the second end of the second drive assembly 50, and the gate is connected to the first end of the second drive assembly 50.

[0107] In this embodiment, when the voltage bus voltage is higher than the energy storage module voltage, the first thyristor TH1 is turned on and the second thyristor HT2 is turned off. When the voltage bus suddenly loses power and the voltage bus voltage is lower than the energy storage module voltage, the first thyristor TH1 is turned off and the second thyristor HT2 is turned on. When the difference between the voltage bus voltage and the energy storage module voltage is less than a preset difference, both the first thyristor TH1 and the second thyristor HT2 are turned off. When the voltage bus suddenly loses power and the voltage of the energy storage module is greater than the voltage bus voltage, the first thyristor TH1 is turned off and the second thyristor HT2 is turned on.

[0108] In another specific implementation, one of the first power switch 30 and the second power switch 40 is a thyristor and the other is a MOSFET. If the first power switch 30 is a thyristor and the second power switch 40 is a MOSFET, the cathode of the thyristor is connected to the energy storage module interface 10 and the first terminal of the first drive component 20, the anode is connected to the voltage bus interface 60, and the gate is connected to the second terminal of the first drive component 20. The gate of the MOSFET is connected to the first terminal of the second drive component 50, the drain is connected to the voltage bus interface 60, and the source is connected to the anode of the thyristor. When the voltage bus suddenly loses power and the voltage of the energy storage module is greater than the voltage of the voltage bus, the first thyristor TH1 is turned off, and the second thyristor HT2 is turned on.

[0109] Referring to Figure 3, if the first power switch 30 is a MOSFET and the second power switch 40 is a thyristor; the gate of the MOSFET is connected to the second terminal of the first driving component 20, the drain is connected to the voltage bus interface 60, and the source is connected to the energy storage module interface 10 and the first terminal of the first driving component 20. The cathode of the thyristor is connected to the voltage bus interface 60, the anode is connected to the energy storage module interface 10 and the first terminal of the first driving component 20, and the gate is connected to the first terminal of the second driving component 50.

[0110] In another embodiment, referring to FIG4, the first power switch 30 and the second power switch 40 are respectively a first MOSFET and a second MOSFET. The gate of the first MOSFET is connected to the second terminal of the first driving component 20, the drain is connected to the voltage bus interface 60, and the source is connected to the energy storage module interface 10 and the first terminal of the first driving component 20; the gate of the second MOSFET is connected to the first terminal of the second driving component 50, the drain is connected to the voltage bus interface 60, and the source is connected to the anode of the thyristor.

[0111] In the above scheme, two independent power switches are used to control the on / off state of the path between the energy storage module and the voltage bus. To facilitate use and reduce the area occupied on the PCB board, the first power switch 30 and the second power switch 40 can be packaged together, or a bidirectional switch with two gates can be used directly.

[0112] In one embodiment, the first power switch 30 and the second power switch 40 are packaged to form a bidirectional switch with two gates;

[0113] The first end of the first power switch 30 and the second end of the second power switch 40 are connected to form the first pole of the bidirectional switch; the second end of the first power switch 30 and the first end of the second power switch 40 are connected to form the first pole of the bidirectional switch.

[0114] The control terminal of the first power switch 30 is the first gate of the bidirectional switch, and the control terminal of the second power switch 40 is the second gate of the bidirectional switch.

[0115] It should be noted that the voltage divider circuit formed by the first drive component 20 and the second drive component 50 has a certain influence on the power switch to turn on and off according to the higher voltage in the voltage bus and the energy storage module.

[0116] Referring to Figure 5, the first driving component 20 includes a first resistor R1 and a first Zener diode ZD1 configured in parallel;

[0117] The cathode of the first Zener diode ZD1 is connected to the gate of the first thyristor TH1, and the anode is connected to the cathode of the first thyristor TH1.

[0118] The second drive component 50 includes a second resistor R2 and a second Zener diode ZD2 configured in parallel;

[0119] The cathode of the second Zener diode ZD2 is connected to the gate of the second thyristor HT2, and the anode is connected to the cathode of the second thyristor HT2.

[0120] The first resistor R1 and the second resistor R2 are used to construct a resistor voltage divider circuit. When the voltage of the voltage bus is higher than the voltage of the energy storage module, the first Zener diode ZD1 is used to ensure that there is a potential difference between the control terminal and the first terminal of the first power switch 30, that is, there is a potential difference between the gate and the source of the first MOSFET, ensuring that the first MOSFET is turned on; or, there is a forward voltage between the gate and the cathode of the first thyristor TH1, ensuring that the first thyristor TH1 is turned on. Similarly, the second Zener diode ZD2 is used to ensure that there is a potential difference between the control terminal and the first terminal of the second power switch 40.

[0121] The above solutions all utilize the first power switch 30 and the second power switch 40 to generate different on / off states depending on the relationship between the voltage bus voltage and the energy storage module voltage. This enables the energy storage module to conduct when its voltage is greater than the voltage bus voltage, thus allowing the energy storage module to power the voltage bus, reducing the rate of voltage bus voltage drop, and preventing power failure of the voltage bus from affecting the power supply operation.

[0122] Referring to Figure 7, in the second embodiment of this application, the auxiliary power supply circuit further includes:

[0123] Switching assembly 70; the first end of the switching assembly 70 is connected to the gate of the first thyristor TH1, and the second end is connected to the gate of the second thyristor HT2;

[0124] The switching assembly 70 is used to connect the path between the gate of the first thyristor TH1 and the gate of the second thyristor HT2 when a control signal is received at the control terminal of the switching assembly 70.

[0125] It should be noted that the energy storage module includes a capacitor. If the initial state is that the amount of electricity stored in the capacitor is zero, the voltage of the capacitor is zero. When the radio frequency power supply is started, the voltage bus is powered on (equivalent to a step signal). If the voltage value of the voltage bus is greater than the voltage value of the energy storage module, the first power switch 30 is turned on, and the voltage bus charges the capacitor in the energy storage module. There is a possibility that the capacitor may be broken down due to the large difference between the voltage of the voltage bus and the voltage of the energy storage module, thus damaging the energy storage module.

[0126] Therefore, a switch assembly 70 can be provided between the first drive assembly 20 and the second drive assembly 50; the switch assembly 70 is used to connect the path between the first drive assembly 20 and the second drive assembly 50 according to a control signal. The control signal can be output to the control terminal of the switch assembly 70 when the difference between the voltage of the voltage bus and the voltage of the energy storage module is less than a predetermined value.

[0127] In one embodiment, as shown in FIG8, the switching assembly 70 includes a first switching transistor Q1 and a second switching transistor Q2;

[0128] The first end of the first switch Q1 is connected to the gate of the first thyristor TH1, and the second end is connected to the first end of the second switch Q2; the second end of the second switch Q2 is connected to the gate of the second thyristor HT2; the control terminal of the first switch Q1 is connected to the control terminal of the second switch Q2 to form the control terminal of the switch assembly 70.

[0129] Considering the high voltage value on the voltage bus, two switching transistor protection circuits are set up to ensure safety, achieve stable control, and prevent single switching transistor failure or breakdown from affecting the circuit's conduction and shutdown.

[0130] The first switch Q1 and the second switch Q2 can be MOSFETs, IGBTs, or thyristors, etc.

[0131] To precisely control the switching assembly 70 on and off, the auxiliary power supply circuit further includes:

[0132] Control circuit 80; the control module is connected to the voltage bus and the energy storage module respectively;

[0133] The output terminal of the control circuit 80 is connected to the control terminal of the switching assembly 70. The control module is used to detect the voltage of the voltage bus and the voltage of the energy storage module, and outputs a control signal to the switching assembly 70 when the difference between the voltage of the voltage bus and the voltage of the energy storage module is less than a predetermined value.

[0134] It should be noted that, to avoid grid surges caused by excessive differences between the voltage bus voltage and the energy storage module voltage, which could damage related components, the switch assembly 70 needs to be turned off. Conversely, if the difference between the voltage bus voltage and the energy storage module voltage is less than a predetermined value, a control signal can be output to the switch assembly 70 to avoid grid surges. The predetermined value is determined by the R&D personnel, and it should be noted that the predetermined value can be set based on at least one of the following criteria: whether it will cause grid surges or damage to related components.

[0135] The control circuit 80 may include a controller such as an MCU, FPGA, or SOC.

[0136] It should be noted that the switching transistor in the switching assembly 70 requires a DC voltage as a control signal to stably turn off or turn on the path between the first driving assembly 20 and the second driving assembly 50.

[0137] In one embodiment, the control circuit 80 includes a DC signal output component, the output terminal of which is connected to the control terminal of the switching component 70;

[0138] When the difference between the voltage of the voltage bus and the voltage of the energy storage module is less than a predetermined value, the DC signal output component outputs a DC control signal to the control terminal of the switching component 70.

[0139] In another specific embodiment, the control circuit 80 includes an AC signal output component 810 and a rectifier module 820;

[0140] The input terminal of the rectifier module 820 is connected to the output terminal of the AC signal output component 810, and the output terminal is connected to the control terminal of the switch component 70.

[0141] When the difference between the voltage of the voltage bus and the voltage of the energy storage module is less than a predetermined value, the AC signal output component 810 outputs an AC signal, and the rectifier module 820 rectifies the AC signal into a DC control signal and outputs it to the switch component 70.

[0142] In the third embodiment of this application, as shown in FIG9, the rectifier module 820 includes:

[0143] Transformer, first diode D1, and second diode D2;

[0144] The primary coil of the transformer is connected to the output terminal of the AC signal output component 810; the first terminal of the primary coil of the transformer is connected to the anode of the first diode D1, the second terminal of the primary coil is connected to the first terminal of the secondary coil, and the second terminal of the secondary coil is connected to the anode of the second diode D2; wherein the first terminal of the secondary coil, the first terminal of the primary coil, and the first terminal of the secondary coil are terminals of the same name.

[0145] The cathodes of the first diode D1 and the second diode D2 are connected to the control terminal of the switching assembly 70.

[0146] The AC signal output component 810 is connected to the primary coil of the transformer; as shown in Figure 9, the first end of the secondary coil, the first end of the first primary coil, and the first end of the second secondary coil are the same name ends; regardless of the phase change of the AC signal output by the AC signal output component 810, the signal output by the secondary coil of the transformer is stably output as a rectified signal after half-wave rectification by the first diode D1 or the second diode D2, and then sent to the switching component 70 as a control signal.

[0147] Referring to Figures 10 and 11, the auxiliary power supply circuit further includes: a shutdown module 90;

[0148] The shutdown module 90 is disposed between the control circuit 80 and the switch assembly 70; the shutdown module 90 is used to remove the operating power of the switch assembly 70 when the control circuit 80 stops outputting.

[0149] The switching assembly 70 includes a switching transistor disposed in the path between the gate of the first thyristor TH1 and the gate of the second thyristor HT2, wherein the switching transistor is an NMOS transistor; the shutdown module 90 includes a PMOS transistor.

[0150] The source of the PMOS transistor is connected to the control terminal of the switching assembly 70, the gate is connected to the control circuit 80, and the drain is connected to the source of the NMOS transistor.

[0151] A third diode D3 is connected between the gate and source of the PMOS transistor. When the control circuit 80 stops outputting, the PMOS transistor forms a path through the freewheeling current of the third diode D3, which accelerates the removal of the working power between the control terminal of the switching component 70 and the source of the NMOS transistor to turn off the switching component 70.

[0152] It should be noted that the switching assembly 70 may include one, two, or more switching transistors, which are disposed in the path between the gate of the first thyristor TH1 and the gate of the second thyristor HT2. This embodiment does not limit the number of switching transistors. The switching transistor is an NMOS transistor, and the shutdown module 90 includes a third switching transistor Q3, which is a PMOS transistor. As shown in Figure 11, the PMOS transistor is disposed between the gate and source of the NMOS transistor; when the control circuit 80 stops outputting a high-level control signal, the PMOS transistor is turned on, removing the operating power between the control terminal of the switching assembly 70 and the source of the NMOS transistor to turn off the switching assembly 70. It should be noted that the source of the switching assembly 70 is formed by interconnecting the sources of multiple switching transistors within the switching assembly 70.

[0153] Referring to Figure 12, the shutdown component further includes:

[0154] The third resistor R3 and the fourth resistor R4;

[0155] The anode of the third diode D3 is connected to the gate of the PMOS transistor, and the cathode is connected to the drain of the PMOS transistor, the first end of the fourth resistor R4, and the control terminal of the switching assembly 70.

[0156] The source of the PMOS transistor is connected to the first terminal of the third resistor R3; the second terminal of the third resistor R3 is connected to the second terminal of the fourth resistor R4 and the source of the NMOS transistor.

[0157] The third resistor R3 is used for current limiting to prevent damage to the PMOS transistor from excessive current when it is turned on. The fourth resistor R4 is located between the gate and source of the NMOS transistor and can be used to provide bias voltage, provide electrostatic discharge protection, and prevent charge accumulation.

[0158] This application also proposes a radio frequency power supply, the radio frequency power supply comprising:

[0159] Voltage bus, energy storage module, and the aforementioned auxiliary power supply circuit.

[0160] The specific structure of the auxiliary power supply circuit is as described in the above embodiments. Since this RF power supply adopts all the technical solutions of all the above embodiments, it has at least all the beneficial effects brought about by the technical solutions of the above embodiments, which will not be described in detail here.

[0161] The radio frequency power supply also includes:

[0162] Protection circuit; the protection circuit is disposed between the voltage bus and the energy storage module, and the protection circuit is used to limit the charging current to avoid overcurrent damage to the energy storage module when the voltage bus charges the energy storage module.

[0163] It should be noted that the protection circuit is located independently of the auxiliary power supply circuit between the voltage bus and the energy storage module. After the RF power is turned on, the voltage bus charges the energy storage module through the protection circuit. Due to the large voltage difference between the voltage bus and the energy storage module, a large current will be generated to charge the energy storage module, which may cause overcurrent damage to the energy storage module. The protection circuit is used to limit the charging current of the capacitor to avoid overcurrent damage to the energy storage module.

[0164] It should be noted that in the auxiliary power supply circuit, when the difference between the voltage bus voltage and the energy storage module voltage is greater than or equal to a predetermined value, the path between the voltage bus interface 60 and the energy storage module interface 10 is shut off. During this period, the voltage bus interface 60 charges the energy storage module through a protection circuit to increase the energy storage module voltage.

[0165] The protection circuit may include a resistor current-limiting circuit, a diode current-limiting circuit, a Zener diode current-limiting circuit, or a transistor current-limiting circuit, etc. Furthermore, the protection circuit can also use a soft-start method to control the voltage bus voltage to charge the energy storage module.

[0166] This application also proposes a circuit operation method, the circuit operation method comprising:

[0167] Detect the voltage of the voltage bus and the voltage of the energy storage module;

[0168] If the difference between the voltage bus voltage and the energy storage module voltage is less than a predetermined value, the current direction for powering the voltage bus and the energy storage module is determined based on the comparison relationship between the voltage bus voltage and the energy storage module voltage.

[0169] It should be noted that, in order to achieve the goal of the voltage bus powering the energy storage module when the voltage of the voltage bus is greater than the voltage of the energy storage module, and the energy storage module powering the voltage bus when the voltage of the energy storage module is greater than the voltage bus voltage, it is necessary to detect the voltage of the voltage bus and the voltage of the energy storage module and compare the two. If the difference between the voltage bus voltage and the energy storage module voltage is less than a predetermined value, it means that the energy storage module will not be damaged when charging using the voltage bus voltage; the two can mutually power each other. It is easy to understand that the difference can be negative, that is, the voltage bus voltage is less than the voltage of the energy storage module.

[0170] If the voltage of the voltage bus is greater than the voltage of the energy storage module, the voltage bus powers the energy storage module; current flows from the voltage bus to the energy storage module. If the voltage of the voltage bus is less than the voltage of the energy storage module, the energy storage module powers the voltage bus; current flows from the energy storage module to the voltage bus.

[0171] Specifically, the step of determining the current direction for power supply between the voltage bus and the energy storage module based on the comparison between the voltage bus voltage and the energy storage module voltage includes:

[0172] If the voltage of the voltage bus is greater than the voltage of the energy storage module, the path between the voltage bus and the energy storage module is opened so that the voltage bus output current can power the energy storage module.

[0173] If the voltage of the voltage bus is less than the voltage of the energy storage module, the path between the energy storage module and the voltage bus is opened so that the output current of the energy storage module powers the voltage bus.

[0174] This application also proposes a storage medium storing a circuit operation program, which, when executed by a processor, implements the steps of the circuit operation method.

[0175] The above description is merely an embodiment of this application and does not limit the patent scope of this application. Any equivalent structural transformations made based on the content of this application's specification and drawings under the application concept of this application, or direct / indirect applications in other related technical fields, are included within the patent protection scope of this application.

Claims

1. An auxiliary power supply circuit, wherein, The auxiliary power supply circuit is applied to the radio frequency (RF) power supply, which includes a voltage bus and an energy storage module; the auxiliary power supply circuit includes: Voltage bus interface, energy storage module interface, first power switch, second power switch, first drive component, and second drive component; The voltage bus interface is connected to the voltage bus; The energy storage module interface is connected to the energy storage module; The first terminal of the first power switch is connected to the energy storage module interface and the first terminal of the first drive component, the second terminal is connected to the voltage bus interface, and the control terminal is connected to the second terminal of the first drive component and the first terminal of the second drive component. The second terminal of the second power switch is connected to the energy storage module interface and the first terminal of the first power switch, the first terminal is connected to the second terminal of the first power switch, the voltage bus interface and the second terminal of the second drive component, and the control terminal is connected to the second terminal of the first drive component and the first terminal of the second drive component. The first power switch is used to turn on when the voltage bus voltage is greater than the energy storage module voltage, so that the voltage bus can provide power to the energy storage module; The second power switch is used to turn on when the voltage of the energy storage module is greater than the voltage bus voltage, so that the energy storage module can provide power to the voltage bus.

2. The auxiliary power supply circuit of claim 1, wherein, The first power switch and the second power switch are packaged together to form a bidirectional switch with two gates; The first end of the first power switch and the second end of the second power switch are connected to form the first pole of the bidirectional switch; the second end of the first power switch and the first end of the second power switch are connected to form the first pole of the bidirectional switch. The control terminal of the first power switch is the first gate of the bidirectional switch, and the control terminal of the second power switch is the second gate of the bidirectional switch.

3. The auxiliary power supply circuit of claim 1 or claim 2, wherein, The first power switch is a first thyristor; the second power switch is a second thyristor; The cathode of the first thyristor is connected to the energy storage module interface and the first end of the first drive component, the anode is connected to the voltage bus interface, and the gate is connected to the second end of the first drive component. The cathode of the second thyristor is connected to the anode of the first thyristor, the voltage bus interface, and the second end of the second drive component, and the gate is connected to the first end of the second drive component.

4. The auxiliary power supply circuit of claim 3, wherein, The first driving component includes a first resistor and a first Zener diode configured in parallel; The cathode of the first Zener diode is connected to the gate of the first thyristor, and the anode is connected to the cathode of the first thyristor. The second driving component includes a second resistor and a second Zener diode configured in parallel; The cathode of the second Zener diode is connected to the gate of the second thyristor, and the anode is connected to the cathode of the second thyristor.

5. The auxiliary power supply circuit of claim 4, wherein, The auxiliary power supply circuit also includes: A switching assembly; the first end of the switching assembly is connected to the gate of the first thyristor, and the second end is connected to the gate of the second thyristor; The switching assembly is used to connect the path between the first thyristor gate and the second thyristor gate when a control signal is received at the control terminal of the switching assembly.

6. The auxiliary power supply circuit of claim 5, wherein, The switching assembly includes a first switching transistor and a second switching transistor; The first end of the first switching transistor is connected to the gate of the first thyristor, and the second end is connected to the first end of the second switching transistor; the second end of the second switching transistor is connected to the gate of the second thyristor; the control terminal of the first switching transistor is connected to the control terminal of the second switching transistor to form the control terminal of the switching assembly.

7. The auxiliary power supply circuit of claim 5 or 6, wherein, The auxiliary power supply circuit also includes: Control circuit; the control module is connected to the voltage bus and the energy storage module respectively; The output terminal of the control circuit is connected to the control terminal of the switching assembly. The control module is used to detect the voltage of the voltage bus and the voltage of the energy storage module, and outputs a control signal to the switching assembly when the difference between the voltage of the voltage bus and the voltage of the energy storage module is less than a predetermined value.

8. The auxiliary power supply circuit of claim 7, wherein, The control circuit includes a DC signal output component, the output terminal of which is connected to the control terminal of the switch component; When the difference between the voltage on the voltage bus and the voltage of the energy storage module is less than a predetermined value, the DC signal output component outputs a DC control signal to the control terminal of the switching component.

9. The auxiliary power supply circuit of claim 7, wherein, The control circuit includes an AC signal output component and a rectifier module; The input terminal of the rectifier module is connected to the output terminal of the AC signal output component, and the output terminal is connected to the control terminal of the switch component. When the difference between the voltage on the voltage bus and the voltage of the energy storage module is less than a predetermined value, the AC signal output component outputs an AC signal, and the rectifier module rectifies the AC signal into a DC control signal and outputs it to the switching component.

10. The auxiliary power supply circuit of claim 9, wherein, The rectifier module includes: Transformer, first diode, and second diode; The primary coil of the transformer is connected to the output terminal of the AC signal output component; the first terminal of the primary coil of the transformer is connected to the anode of the first diode, the second terminal of the primary coil is connected to the first terminal of the secondary coil, and the second terminal of the secondary coil is connected to the anode of the second diode; wherein, the first terminal of the secondary coil, the first terminal of the primary coil, and the first terminal of the secondary coil are terminals of the same name; The cathodes of the first diode and the second diode are connected to the control terminal of the switching assembly.

11. The auxiliary power supply circuit of any one of claims 8 to 10, wherein, The auxiliary power supply circuit also includes: a shutdown module; The shutdown module is disposed between the control circuit and the switching assembly; the shutdown module is used to remove the operating power of the switching assembly when the control circuit stops outputting.

12. The auxiliary power supply circuit of claim 11, wherein, The switching assembly includes a switching transistor disposed in the path between the gate of the first thyristor and the gate of the second thyristor, wherein the switching transistor is an NMOS transistor; the shutdown module includes a PMOS transistor. The source of the PMOS transistor is connected to the control terminal of the switching assembly, the gate is connected to the control circuit, and the drain is connected to the source of the NMOS transistor. A third diode is connected between the gate and source of the PMOS transistor; when the control circuit stops outputting, the PMOS transistor forms a path through the freewheeling current of the third diode, thereby removing the operating power between the control terminal of the switching component and the source of the NMOS transistor to turn off the switching component.

13. The auxiliary power supply circuit of claim 12, wherein, The shutdown component also includes: The third and fourth resistors; The anode of the third diode is connected to the gate of the PMOS transistor, and the cathode is connected to the drain of the PMOS transistor, the first end of the fourth resistor, and the control terminal of the switching assembly. The source of the PMOS transistor is connected to the first terminal of the third resistor; the second terminal of the third resistor is connected to the second terminal of the fourth resistor and the source of the NMOS transistor.

14. A radio frequency power supply wherein, The radio frequency power supply includes: Voltage bus, energy storage module, and auxiliary power supply circuit as described in any one of claims 1 to 13.

15. The radio frequency power supply of claim 14, wherein, The radio frequency power supply also includes: Protection circuit; the protection circuit is disposed between the voltage bus and the energy storage module, and the protection circuit is used to limit the charging current to avoid overcurrent damage to the energy storage module when the voltage bus charges the energy storage module.

16. A method of operating a circuit wherein, The circuit operation method includes: Detect the voltage of the voltage bus and the voltage of the energy storage module; If the difference between the voltage bus voltage and the energy storage module voltage is less than a predetermined value, the current direction for powering the voltage bus and the energy storage module is determined based on the comparison relationship between the voltage bus voltage and the energy storage module voltage.

17. The method of operating a circuit of claim 16, wherein, The step of determining the current direction for power supply between the voltage bus and the energy storage module based on the comparison relationship between the voltage bus voltage and the energy storage module voltage includes: If the voltage of the voltage bus is greater than the voltage of the energy storage module, the path between the voltage bus and the energy storage module is opened so that the voltage bus output current can power the energy storage module. If the voltage of the voltage bus is less than the voltage of the energy storage module, the path between the energy storage module and the voltage bus is opened so that the output current of the energy storage module powers the voltage bus.

18. A storage medium, wherein, The storage medium stores a circuit operation program, which, when executed by a processor, implements the steps of the circuit operation method as described in any one of claims 16 to 17.

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