Optical alignment apparatus and optical alignment method

Abstract

An optical alignment apparatus and an optical alignment method, used for aligning a first optical axis of a first optical element (01) with a second optical axis of a second optical element (02). The optical alignment apparatus comprises: a first six-axis displacement stage (11), the first six-axis displacement stage (11) being used for carrying the first optical element (01); a light emitting and receiving mechanism (12), the light emitting and receiving mechanism (12) being disposed above the first six-axis displacement stage (11); and a support frame (13), the support frame (13) being used for carrying the second optical element (02), the second optical element (02) being arranged opposite to the first optical element (01), and the second optical element (02) being located between the light emitting and receiving mechanism (12) and the first optical element (01).

Description

An optical alignment device and optical alignment method Technical Field

[0001] This application relates to the field of optical inspection technology, and more specifically, to an optical alignment device and an optical alignment method. Background Technology

[0002] Active alignment (AA) of the optical module is a crucial step in lens module assembly, and its quality directly impacts the system's image quality. Current active alignment methods primarily achieve this by using multi-field scanning to find the optimal imaging plane. This process requires calibration and measurement of multiple fields of view, as well as monitoring of these fields. Because the detection results for different fields of view vary, this method places extremely high demands on calibration across these fields and is quite complex to operate.

[0003] In view of this, a new technical solution is needed to solve the above-mentioned technical problems. Summary of the Invention

[0004] One objective of this application is to provide a new technical solution for an optical alignment device and an optical alignment method.

[0005] According to a first aspect of this application, an optical alignment device is provided for aligning a first optical axis of a first optical element and a second optical axis of a second optical element;

[0006] The optical alignment device includes:

[0007] A first six-axis displacement stage is used to support the first optical element;

[0008] A light emitting and receiving mechanism is disposed above the first six-axis displacement stage;

[0009] A support frame is provided to support the second optical element, which is disposed opposite to the first optical element and is located between the light emitting and receiving mechanism and the first optical element.

[0010] Optionally, the optical alignment device further includes a rotary table, on which the first six-axis displacement stage and the support frame are both mounted, and the rotary table is capable of rotating about a first direction.

[0011] Optionally, the optical alignment device further includes a second six-axis displacement stage, which is mounted on the support frame, and the second optical element is disposed on the second six-axis displacement stage.

[0012] Optionally, the optical alignment device further includes a first switching mechanism, which is connected to the light emitting and receiving mechanism;

[0013] The first switching mechanism is provided with a first light-transmitting hole and at least one lens. The first light-transmitting hole and any of the lenses can move in the first switching mechanism to switch the positions of the first light-transmitting hole and the lens, so that the first light-transmitting hole or any of the lenses corresponds to the light emitting and receiving mechanism.

[0014] Optionally, the optical alignment device further includes a motion axis, the light emitting and receiving mechanism is mounted on the motion axis, and the motion axis can drive the light emitting and receiving mechanism to translate along a first direction.

[0015] Optionally, the light emitting and receiving mechanism is an autocollimator.

[0016] According to a second aspect of this application, an optical alignment method is provided, employing the optical alignment apparatus as described in the first aspect, the optical alignment method comprising:

[0017] The light emitting and receiving mechanism is controlled to emit outgoing light;

[0018] The emitted light is reflected by the first optical element and received by the light emitting and receiving mechanism. The first optical axis or the direction of the first optical axis of the first optical element is obtained based on the reflected light of the first optical element.

[0019] The emitted light is reflected by the second optical element and received by the light emitting and receiving mechanism. The second optical axis or the direction of the second optical axis is obtained based on the reflected light of the second optical element.

[0020] Align the first optical axis and the second optical axis according to the first optical axis or the direction of the first optical axis, and the second optical axis or the direction of the second optical axis.

[0021] Optionally, the first optical element is a display screen or an image sensor, and the first optical element includes a first reflective surface;

[0022] The step of obtaining the first optical axis or the direction of the first optical axis of the first optical element based on the reflected light from the first optical element specifically includes:

[0023] Obtain the reflected light from the first reflective surface, and obtain the eccentricity of the first reflective surface based on the reflected light; obtain the first optical axis direction of the first optical element based on the eccentricity of the first reflective surface.

[0024] Optionally, the second optical element is a lens group, and the second optical element includes at least two second reflective surfaces;

[0025] The step of obtaining the second optical axis or the direction of the second optical axis based on the reflected light from the second optical element specifically includes:

[0026] The reflected light rays from each of the second reflecting surfaces are obtained, and the eccentricity of the second reflecting surface corresponding to the reflected light rays is obtained based on the reflected light rays.

[0027] The second optical axis of the second optical element is obtained based on the eccentricity of each of the second reflective surfaces.

[0028] Optionally, when the first optical element is a display screen, aligning the first optical axis and the second optical axis according to the first optical axis direction and the second optical axis specifically includes:

[0029] The orientation of the display screen is adjusted by the first six-axis displacement stage, and the direction of the first optical axis is adjusted to be parallel to the second optical axis.

[0030] Adjust the light emitting and receiving mechanism to align with the ideal image plane or object plane of the second optical element;

[0031] The display screen is controlled to project a target image, and the orientation of the display screen is adjusted by the first six-axis displacement stage so that the target image is clearly imaged at the center of the light emitting and receiving mechanism.

[0032] Optionally, when the first optical element is an image sensor, aligning the first and second optical axes according to the first optical axis direction and the second optical axis specifically includes:

[0033] The orientation of the image sensor is adjusted by the first six-axis displacement stage, and the direction of the first optical axis is adjusted to be parallel to the second optical axis.

[0034] Adjust the light emitting and receiving mechanism to align with the ideal image plane or object plane of the second optical element;

[0035] The image sensor is controlled to acquire the target image projected by the light emitting and receiving mechanism in real time. The orientation of the image sensor is adjusted by the first six-axis displacement stage so that the target image is clearly imaged at the center of the image sensor.

[0036] The optical alignment device provided in this application embodiment can perform eccentricity measurement on the first optical element and the second optical element, and further guide the first optical axis of the first optical element and the second optical axis of the second optical element to perform active alignment based on the eccentricity measurement result; it does not require detection of multiple fields of view, the operation process is relatively simple, and it can achieve high-precision active optical alignment.

[0037] Other features and advantages of this application will become clear from the following detailed description of exemplary embodiments with reference to the accompanying drawings. Attached Figure Description

[0038] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments of the present application and, together with their description, serve to explain the principles of the present application.

[0039] Figure 1 shows a schematic diagram of an optical alignment device according to this application.

[0040] Explanation of reference numerals in the attached figures:

[0041] 11. First six-axis displacement stage; 12. Light emitting and receiving mechanism; 13. Support frame; 14. Rotary stage; 15. Second six-axis displacement stage; 16. First switching mechanism; 160. First light transmission hole; 161. Lens; 17. Motion axis;

[0042] 01. First optical element; 02. Second optical element. Detailed Implementation

[0043] Various exemplary embodiments of the present application will now be described in detail with reference to the accompanying drawings. It should be noted that, unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps set forth in these embodiments do not limit the scope of the present application.

[0044] The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the scope of this application and its application or use.

[0045] Techniques, methods, and equipment known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and equipment should be considered part of the specification.

[0046] In all the examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values.

[0047] It should be noted that similar labels and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be discussed further in subsequent figures.

[0048] Referring to FIG1, according to an embodiment of the present application, an optical alignment device is provided, which is used to align the first optical axis of a first optical element 01 and the second optical axis of a second optical element 02;

[0049] The optical alignment device includes a first six-axis displacement stage 11, a light emitting and receiving mechanism 12, and a support frame 13. The first six-axis displacement stage 11 is used to support the first optical element 01. The light emitting and receiving mechanism 12 is disposed above the first six-axis displacement stage 11.

[0050] The support frame 13 is used to carry the second optical element 02, which is disposed opposite to the first optical element 01, and the second optical element 02 is located between the light emitting and receiving mechanism 12 and the first optical element 01.

[0051] The optical alignment device provided in this application embodiment can achieve precise alignment of the first optical axis of the first optical element 01 and the second optical axis of the second optical element 02.

[0052] In the optical alignment device provided in this application embodiment, the first six-axis displacement stage 11 is used to support the first optical element 01. Through precise adjustment of the six axes (i.e., three translation axes and three rotation axes), omnidirectional control and adjustment of the attitude of the first optical element 01 can be achieved. The light emitting and receiving mechanism 12 is disposed above the first six-axis displacement stage 11 and is used to emit outgoing light and receive light reflected back from the first optical element 01 and / or the second optical element 02. In this embodiment, the light emitting and receiving mechanism 12 is preferably an autocollimator, which has the characteristics of high precision and high sensitivity, and is very suitable for optical alignment. The support frame 13 is used to support the second optical element 02, so that the second optical element 02 is arranged opposite to the first optical element 01 and is located between the light emitting and receiving mechanism 12 and the first optical element 01.

[0053] The optical alignment device provided in this application embodiment can perform eccentricity measurement on the first optical element 01 and the second optical element 02, and further guide the first optical axis of the first optical element 01 and the second optical axis of the second optical element 02 to perform active alignment based on the eccentricity measurement result; it does not require detection of multiple fields of view, the operation process is relatively simple, and it can achieve high-precision active optical alignment.

[0054] The specific types of the first optical element 01 and the second optical element 02 can be selected according to the actual application; for example, they can be a display screen, an image sensor, a lens, or a lens module. Furthermore, the optical element that needs to be adjusted in attitude is carried on the first six-axis displacement stage 11 as the first optical element 01, and the other optical element is carried on the support frame 13 as the second optical element 02.

[0055] Referring to FIG1, in one embodiment, the optical alignment device further includes a rotary table 14, on which the first six-axis displacement stage 11 and the support frame 13 are both mounted, and the rotary table 14 is capable of rotating about a first direction.

[0056] In this specific example, the rotation of the rotary table 14 allows the first optical element 01 to be measured while rotating, thus more accurately measuring the eccentricity of the first reflecting surface; and the rotation of the rotary table 14 also allows the second optical element 02 to be measured while rotating, thus more accurately measuring the eccentricity of the second reflecting surface. Optionally, the rotary table 14 is an air-bearing rotary table.

[0057] Referring to FIG1, in one embodiment, the optical alignment device further includes a second six-axis displacement stage 15, which is mounted on the support frame 13, and the second optical element 02 is disposed on the second six-axis displacement stage 15.

[0058] In this specific example, by setting the second six-axis displacement stage 15, the posture of the second optical element 02 can be adjusted, making the alignment process of the first optical axis of the first optical element 01 and the second optical axis of the second optical element 02 more flexible and easier to control.

[0059] Referring to FIG1, in one embodiment, the optical alignment device further includes a first switching mechanism 16, which is connected to the light emitting and receiving mechanism 12;

[0060] The first switching mechanism 16 is provided with a first light-transmitting hole 160 and at least one lens 161. The first light-transmitting hole 160 and any of the lenses 161 can move in the first switching mechanism 16 to switch the positions of the first light-transmitting hole 160 and the lens 161 so that the first light-transmitting hole 160 or any of the lenses 161 corresponds to the light emitting and receiving mechanism 12.

[0061] In this specific example, the positions of the first light-transmitting aperture 160 and the lens 161 can be switched by the first switching mechanism 16, so that the first light-transmitting aperture 160 or any lens 161 is located in the optical path system to accommodate the first optical element 01 and the second optical element 02 of different types or parameters.

[0062] Referring to FIG1, in one embodiment, the optical alignment device further includes a motion axis 17, the light emitting and receiving mechanism 12 is mounted on the motion axis 17, and the motion axis 17 can drive the light emitting and receiving mechanism 12 to translate along a first direction.

[0063] In this specific example, the light emitting and receiving mechanism 12 can be translated along the first direction via the motion axis 17 as needed for measurement; for example, when measuring the eccentricity of the first reflecting surface of the first optical element 01, the light emitting and receiving mechanism 12 is located at one position on the motion axis 17; when measuring the eccentricity of the second reflecting surface of the second optical element 02, the light emitting and receiving mechanism 12 is located at another position on the motion axis 17.

[0064] According to another embodiment of this application, an optical alignment method is provided, which employs the optical alignment device described above, the optical alignment method comprising:

[0065] S101. Control the light emitting and receiving mechanism 12 to emit outgoing light;

[0066] S102, the emitted light is reflected by the first optical element 01 and received by the light emitting and receiving mechanism 12, and the first optical axis or the direction of the first optical axis of the first optical element 01 is obtained according to the reflected light of the first optical element 01.

[0067] S103, the emitted light is reflected by the second optical element 02 and received by the light emitting and receiving mechanism 12, and the second optical axis or the direction of the second optical element 02 is obtained according to the reflected light of the second optical element 02;

[0068] S104. Align the first optical axis and the second optical axis according to the first optical axis or the direction of the first optical axis, and the second optical axis or the direction of the second optical axis.

[0069] In the optical alignment method provided in this application embodiment, in step S101, the light emitting and receiving mechanism 12 is turned on to emit outgoing light.

[0070] In step S102, the position of the light emitting and receiving mechanism 12 is adjusted so that the reflected light generated by the first optical element 01 is clearly imaged; for example, the light emitting and receiving mechanism 12 is adjusted to the first position via the motion axis 17; if the first switching mechanism 16 is included and the lens 161 is moved into the optical path system, the lens 161 can also be adjusted to make the reflected light generated by the first optical element 01 clearly imaged; then the first optical axis or the first optical axis direction of the first optical element 01 is obtained according to the reflected light of the first optical element 01.

[0071] In step S103, the position of the light emitting and receiving mechanism 12 is adjusted so that the reflected light generated by the second optical element 02 is clearly imaged; for example, the light emitting and receiving mechanism 12 is adjusted to the second position via the motion axis 17; if the first switching mechanism 16 is included and the lens 161 is moved into the optical path system, the lens 161 can also be adjusted so that the reflected light generated by the second optical element 02 is clearly imaged; then the second optical axis or the direction of the second optical axis of the second optical element 02 is obtained based on the reflected light of the second optical element 02.

[0072] In step S104, the first optical axis and the second optical axis are aligned according to the obtained first optical axis or first optical axis direction and second optical axis or second optical axis direction. For example, the attitude of the first optical element 01 is adjusted by the first six-axis displacement stage 11 to align the first optical axis and the second optical axis.

[0073] The optical alignment method provided in this application embodiment can perform eccentricity measurement on the first optical element 01 and the second optical element 02, and further guide the first optical axis of the first optical element 01 and the second optical axis of the second optical element 02 to perform active alignment based on the eccentricity measurement result; it does not require detection of multiple fields of view, the operation process is relatively simple, and it can achieve high-precision active optical alignment.

[0074] Referring to FIG1, in one embodiment, the first optical element 01 is a display screen or an image sensor, and the first optical element 01 includes a first reflective surface;

[0075] The step of obtaining the first optical axis or the direction of the first optical axis of the first optical element 01 based on the reflected light from the first optical element 01 specifically includes:

[0076] Obtain the reflected light from the first reflective surface, and obtain the eccentricity of the first reflective surface based on the reflected light; obtain the first optical axis direction of the first optical element 01 based on the eccentricity of the first reflective surface.

[0077] In this specific example, the first optical element 01 is a display screen or an image sensor. The display screen or image sensor usually has only one reflective surface, which is referred to as the first reflective surface. The position of the light emitting and receiving mechanism 12 is adjusted so that the reflected light from the first reflective surface forms a clear image. In order to measure the eccentricity of the first reflective surface more accurately, the first optical element 01 can be measured while rotating by the rotation of the rotary table 14. Then, the first optical axis direction of the first optical element 01 is calculated by the eccentricity of the first reflective surface.

[0078] Referring to FIG1, in one embodiment, the second optical element 02 is a lens group, and the second optical element 02 includes at least two second reflective surfaces;

[0079] The step of obtaining the second optical axis or the direction of the second optical axis of the second optical element 02 based on the reflected light from the second optical element 02 specifically includes:

[0080] The reflected light rays from each of the second reflecting surfaces are obtained, and the eccentricity of the second reflecting surface corresponding to the reflected light rays is obtained based on the reflected light rays.

[0081] The second optical axis of the second optical element 02 is obtained based on the eccentricity of each of the second reflective surfaces.

[0082] In this specific example, the second optical element 02 is a lens group, which can be a lens module containing multiple lenses or a single lens. The lens group typically has at least two reflective surfaces, and any reflective surface of the lens group is referred to as the second reflective surface. First, the position of the light emitting and receiving mechanism 12 is adjusted until the reflected light from one of the second reflective surfaces is clearly imaged, so as to measure the eccentricity of that second reflective surface. Then, the eccentricity of the remaining second reflective surfaces is measured sequentially in the same way. To measure the eccentricity of the second reflective surfaces more accurately, the second optical element 02 can be measured while rotating by the rotation of the rotary table 14. Then, the second optical axis of the second optical element 02 is calculated from the eccentricity of all the second reflective surfaces.

[0083] Referring to FIG1, in one embodiment, when the first optical element 01 is a display screen, aligning the first optical axis and the second optical axis according to the first optical axis direction and the second optical axis specifically includes:

[0084] The orientation of the display screen is adjusted by the first six-axis displacement stage 11, and the direction of the first optical axis is adjusted to be parallel to the second optical axis.

[0085] Adjust the light emitting and receiving mechanism 12 to align it with the ideal image plane or object plane of the second optical element 02;

[0086] The display screen is controlled to project a target image, and the orientation of the display screen is adjusted by the first six-axis displacement stage 11 so that the target image is clearly imaged at the center of the light emitting and receiving mechanism 12.

[0087] In this specific example, the first optical element 01 is a display screen. First, the orientation of the display screen is adjusted by the first six-axis displacement stage 11 so that the direction of the first optical axis is parallel to the second optical axis, at which point the first optical axis and the second optical axis are not yet aligned. Then, the light emitting and receiving mechanism 12 is adjusted so that the light converges on the ideal image plane or object plane of the second optical element 02, thereby making the first optical element 01 clearly imaged in the light emitting and receiving mechanism 12 through the second optical element 02. After that, the light source of the light emitting and receiving mechanism 12 is turned off and the camera of the light emitting and receiving mechanism 12 is kept on. The display screen is turned on to display the target image, such as a cross-shaped target image, which is used to represent the center of the display screen. Then, the position of the target image is obtained by the camera of the light emitting and receiving mechanism 12. The display screen is adjusted by the first six-axis displacement stage 11 until the target image is clearly imaged at the center of the camera of the light emitting and receiving mechanism 12, thus completing the active alignment of the first optical axis and the second optical axis.

[0088] Referring to FIG1, in one embodiment, when the first optical element 01 is an image sensor, aligning the first optical axis and the second optical axis according to the first optical axis direction and the second optical axis specifically includes:

[0089] The orientation of the image sensor is adjusted by the first six-axis displacement stage 11, and the direction of the first optical axis is adjusted to be parallel to the second optical axis.

[0090] Adjust the light emitting and receiving mechanism 12 to align it with the ideal image plane or object plane of the second optical element 02;

[0091] The image sensor is controlled to acquire the target image projected by the light emitting and receiving mechanism 12 in real time. The orientation of the image sensor is adjusted by the first six-axis displacement stage 11 so that the target image is clearly imaged at the center of the image sensor.

[0092] In this specific example, the first optical element 01 is an image sensor. First, the orientation of the image sensor is adjusted by the first six-axis displacement stage 11 so that the direction of the first optical axis is parallel to the second optical axis, at which point the first optical axis and the second optical axis are not yet coincident. Then, the light emitting and receiving mechanism 12 is adjusted so that the light converges on the ideal image plane or object plane of the second optical element 02, thereby making the first optical element 01 clearly imaged in the light emitting and receiving mechanism 12 through the second optical element 02. After that, the camera of the light emitting and receiving mechanism 12 is turned off and the light source of the light emitting and receiving mechanism 12 is kept on, and the real-time sampling function of the image sensor is turned on. The deviation of the center of the image sensor is calculated by the position of the target image projected by the light emitting and receiving mechanism 12 on the image sensor, and the orientation of the image sensor is adjusted by the first six-axis displacement stage 11. When the target image is clearly located in the center of the image sensor, the active alignment of the first optical axis and the second optical axis is completed.

[0093] When adjusting the attitude of the first optical element 01 using the first six-axis displacement stage 11, the adjustment includes adjustments along the first direction, the second direction, and the third direction; as shown in FIG1, the first direction is direction a in FIG1, the second direction is direction b in FIG1, and the third direction is direction c in FIG1.

[0094] In addition, a reference axis can be selected, for example, the rotation center axis of the rotary stage 14 can be used as the reference axis, and then the posture of the second optical element 02 can be adjusted by the second six-axis displacement stage 15 to make the second optical axis coincide with the reference axis; then the posture of the first optical element 01 can be adjusted by the first six-axis displacement stage 11 to make the direction of the first optical axis parallel to the reference axis.

[0095] While specific embodiments of this application have been described in detail by way of examples, those skilled in the art should understand that the above examples are for illustrative purposes only and are not intended to limit the scope of this application. Those skilled in the art should understand that modifications can be made to the above embodiments without departing from the scope and spirit of this application. The scope of this application is defined by the appended claims.

Claims

1. An optical alignment device, characterized in that, The optical alignment device is used to align the first optical axis of the first optical element (01) and the second optical axis of the second optical element (02); The optical alignment device includes: The first six-axis displacement stage (11) is used to support the first optical element (01); A light emitting and receiving mechanism (12) is disposed above the first six-axis displacement stage (11); A support frame (13) is used to support the second optical element (02), which is disposed opposite to the first optical element (01) and is located between the light emitting and receiving mechanism (12) and the first optical element (01).

2. The optical alignment device according to claim 1, characterized in that, The optical alignment device further includes a rotary table (14), on which the first six-axis displacement stage (11) and the support frame (13) are both mounted. The rotary table (14) is capable of rotating around a first direction.

3. The optical alignment device according to claim 2, characterized in that, The optical alignment device further includes a second six-axis displacement stage (15), which is mounted on the support frame (13), and the second optical element (02) is disposed on the second six-axis displacement stage (15).

4. The optical alignment device according to claim 1, characterized in that, The optical alignment device further includes a first switching mechanism (16), which is connected to the light emitting and receiving mechanism (12); The first switching mechanism (16) is provided with a first light-transmitting hole (160) and at least one lens (161). The first light-transmitting hole (160) and any of the lenses (161) can move in the first switching mechanism (16) to switch the positions of the first light-transmitting hole (160) and the lens (161) so that the first light-transmitting hole (160) or any of the lenses (161) corresponds to the light emitting and receiving mechanism (12).

5. The optical alignment device according to claim 1 or 4, characterized in that, The optical alignment device also includes a motion axis (17), and the light emitting and receiving mechanism (12) is mounted on the motion axis (17). The motion axis (17) can drive the light emitting and receiving mechanism (12) to translate along a first direction.

6. The optical alignment device according to claim 1, characterized in that, The light emitting and receiving mechanism (12) is an autocollimator.

7. An optical alignment method, characterized in that, The optical alignment method, employing the optical alignment apparatus as described in any one of claims 1-6, comprises: Control the light emitting and receiving mechanism (12) to emit outgoing light; The emitted light is reflected by the first optical element (01) and received by the light emitting and receiving mechanism (12). The first optical axis or the direction of the first optical axis of the first optical element (01) is obtained based on the reflected light of the first optical element (01). The emitted light is reflected by the second optical element (02) and received by the light emitting and receiving mechanism (12). The second optical axis or the direction of the second optical element (02) is obtained based on the reflected light of the second optical element (02). Align the first optical axis and the second optical axis according to the first optical axis or the direction of the first optical axis, and the second optical axis or the direction of the second optical axis.

8. The optical alignment method according to claim 7, characterized in that, The first optical element (01) is a display screen or an image sensor, and the first optical element (01) includes a first reflective surface; The step of obtaining the first optical axis or the direction of the first optical axis of the first optical element (01) based on the reflected light from the first optical element (01) specifically includes: Obtain the reflected light from the first reflective surface, and obtain the eccentricity of the first reflective surface based on the reflected light; obtain the first optical axis direction of the first optical element (01) based on the eccentricity of the first reflective surface.

9. The optical alignment method according to claim 8, characterized in that, The second optical element (02) is a lens group, and the second optical element (02) includes at least two second reflective surfaces; The step of obtaining the second optical axis or the direction of the second optical axis of the second optical element (02) based on the reflected light from the second optical element (02) specifically includes: The reflected light rays from each of the second reflecting surfaces are obtained, and the eccentricity of the second reflecting surface corresponding to the reflected light rays is obtained based on the reflected light rays. The second optical axis of the second optical element (02) is obtained based on the eccentricity of each of the second reflective surfaces.

10. The optical alignment method according to claim 9, characterized in that, When the first optical element (01) is a display screen, aligning the first optical axis and the second optical axis according to the first optical axis direction and the second optical axis specifically includes: The orientation of the display screen is adjusted by the first six-axis displacement stage (11) to make the first optical axis direction parallel to the second optical axis; Adjust the light emitting and receiving mechanism (12) to align with the ideal image plane or object plane of the second optical element (02); The display screen is controlled to project a target image, and the orientation of the display screen is adjusted by the first six-axis displacement stage (11) so that the target image is clearly imaged at the center of the light emitting and receiving mechanism (12).

11. The optical alignment method according to claim 9, characterized in that, When the first optical element (01) is an image sensor, the alignment of the first optical axis and the second optical axis according to the first optical axis direction and the second optical axis specifically includes: The orientation of the image sensor is adjusted by the first six-axis displacement stage (11) to make the first optical axis direction parallel to the second optical axis; Adjust the light emitting and receiving mechanism (12) to align with the ideal image plane or object plane of the second optical element (02); The image sensor is controlled to acquire the target image projected by the light emitting and receiving mechanism (12) in real time, and the orientation of the image sensor is adjusted by the first six-axis displacement stage (11) so that the target image is clearly imaged at the center of the image sensor.

Images