Aligner

Abstract

An aligner (5) comprises: a spindle (51) that rotates a supported substrate (9); a housing (52) that has a flat shape of which the height in the vertical direction is shorter than the length in the horizontal direction; and a lifter (6) that lifts the substrate directly or indirectly supported by the spindle, and supports the substrate.

Description

Aligner

[0001] The technology disclosed herein relates to an aligner.

[0002] Patent Document 1 describes a conventional semiconductor manufacturing apparatus. The conventional semiconductor manufacturing apparatus includes a housing and a transfer robot installed in the housing. A clean downflow is generated in the housing. The transfer robot transfers a substrate taken out from a cassette to a processing apparatus. The semiconductor manufacturing apparatus also includes an aligner device for aligning the substrate. In the conventional semiconductor apparatus, the aligner device is arranged at a height outside the range of the height of the substrate accommodated in the lowermost stage of the cassette and the height of the substrate accommodated in the uppermost stage.

[0003] Japanese Patent No. 5229415

[0004] In the above-described semiconductor manufacturing apparatus, the aligner device is installed at a relatively high position. The hand of the robot has to be raised to a height corresponding to the height of the aligner device. To realize the conventional semiconductor manufacturing apparatus, a special robot that can raise the position of the hand is required.

[0005] The technology disclosed herein relates to an aligner. The aligner includes: a spindle that rotates a supported substrate; a housing that rotatably holds the spindle and has a flat shape in which the height in the vertical direction is shorter than the length in the horizontal direction; and a lifter that lifts the substrate directly or indirectly supported by the spindle and supports the substrate.

[0006] Since the above aligner has a flat shape, even if it is installed at a relatively high position, the robot can transfer the substrate to the aligner.

[0007] Figure 1 shows the external appearance of the substrate transport device. Figure 2 is a side view of the inside of the substrate transport device. Figure 3 is a top view of the inside of the substrate transport device. Figure 4 is a front view of the inside of the substrate transport device. Figure 5 is a perspective view of the aligner device. Figure 6 is a plan view of the aligner device. Figure 7 is a cross-sectional view taken along line VII-VII of Figure 6. Figure 8 shows the support of the aligner device by a bracket. Figure 9 shows another example of the arrangement of the aligner device in the substrate transport device. Figure 10 shows a modified substrate transport device.

[0008] The following describes an embodiment of the substrate transport device with reference to the drawings. The substrate transport device described here is illustrative.

[0009] (Overall structure of the substrate transport device) Figure 1 shows the external view of the substrate transport device 1. Figure 2 is a side view of the inside of the substrate transport device 1. Figure 3 is a top view of the inside of the substrate transport device 1. Figure 4 is a front view of the inside of the substrate transport device 1.

[0010] The substrate transport device 1 transports the substrate 9. The substrate 9 is a semiconductor wafer or a glass substrate. Specifically, the substrate transport device 1 is, for example, a sorter. The substrate transport device 1 is, for example, an EFEM (Equipment Front End Module). The substrate transport device 1 is, for example, a stocker.

[0011] If the substrate transport device 1 is an EFEM, the substrate transport device 1 is incorporated into the substrate processing equipment 4, as virtually shown in Figure 3. The substrate processing equipment 4 is not an essential element of the substrate transport device 1. The substrate processing equipment 4 performs processes on the substrate 9, such as heat treatment, impurity introduction treatment, thin film formation treatment, lithography treatment, cleaning treatment, and planarization treatment. Alternatively, the substrate processing equipment 4 inspects the appearance or dimensions of the substrate 9. If the substrate transport device 1 is a stocker, the substrate processing equipment 4 provides temporary storage for the transfer of the substrate 9. Here, the storage of the substrate 9 by the substrate processing equipment 4 is also considered part of the processing of the substrate 9. The third vertical wall 13 of the substrate transport device 1, described later, separates the transport space 15 from the substrate processing equipment 4. The robot 2, described later, transports the substrate 9 to or from the substrate processing equipment 4 through the opening in the third vertical wall 13.

[0012] The substrate transport device 1 comprises a housing 10. The housing 10 has a first vertical wall 11, a second vertical wall 12, a third vertical wall 13, and a fourth vertical wall 14. The first vertical wall 11, the second vertical wall 12, the third vertical wall 13, and the fourth vertical wall 14 are each walls perpendicular to the floor. The first vertical wall 11 and the third vertical wall 13 face each other in a first direction. The second vertical wall 12 and the fourth vertical wall 14 face each other in a second direction. Both the first and second directions are horizontal, and the second direction is perpendicular to the first direction. Hereinafter, the first direction will be referred to as the X direction, and the second direction as the Y direction. The vertical direction perpendicular to the X and Y directions will be referred to as the Z direction. Note that the X, Y, and Z directions are used for the purpose of describing the substrate transport device 1 and are not used to limit the structure of the substrate transport device 1.

[0013] The first vertical wall 11 and the second vertical wall 12, and the first vertical wall 11 and the fourth vertical wall 14 are connected to each other, and the third vertical wall 13 and the second vertical wall 12, and the third vertical wall 13 and the fourth vertical wall 14 are connected to each other. The first vertical wall 11, the second vertical wall 12, the third vertical wall 13, and the fourth vertical wall 14 form a closed transport space 15. The substrate 9 is transported within the transport space 15.

[0014] The substrate transport device 1 is equipped with an FFU (Fan Filter Unit) 16. Note that the FFU 16 is not an essential component of the substrate transport device 1. The FFU 16 is installed on the ceiling of the housing 10. The FFU 16 generates a clean downflow from top to bottom within the transport space 15 (see the white arrow in Figure 2 or Figure 4).

[0015] A load port is installed adjacent to the first vertical wall 11 of the housing 10. Note that the load port is not an essential element of the substrate transport device 1. In the illustrated example of the substrate transport device 1, three load ports, a first load port 41, a second load port 42, and a third load port 43, are installed side by side in the Y direction. The tables of each load port 41, 42, and 43 support a hoop (FOUP: Front Opening Unified Pod) 44, as virtually shown in Figure 2. The hoop 45 accommodates multiple substrates 9 arranged in the Z direction.

[0016] The first vertical wall 11 has a communication opening. The communication opening communicates with the hoop 45. The first vertical wall 11 has a first communication opening 171, a second communication opening 172, and a third communication opening 173. The first communication opening 171, the second communication opening 172, and the third communication opening 173 are aligned in the Y direction. The first communication opening 171, the second communication opening 172, and the third communication opening 173 are each opened and closed individually.

[0017] Furthermore, the second vertical wall 12 and the fourth vertical wall 14 each have doors 181 and 182. Doors 181 and 182 are maintenance doors. Doors 181 and 182 connect the inside and outside of the transport space 15. Note that the direction in which doors 181 and 182 open and close is not limited to the direction shown in the illustration. Door 181 or 182 may open and close in the opposite direction to that shown in the illustration.

[0018] The number of load ports installed in the substrate transport device 1 is not limited to three. Also, one of the load ports, the first load port 41, the second load port 42, and the third load port 43, may be omitted.

[0019] The substrate transport device 1 includes an aligner 5. The aligner 5 is located within the transport space 15. The aligner 5 performs alignment of the substrate 9. Details regarding the structure and installation of the aligner 5 will be described later.

[0020] The substrate transport device 1 includes a robot 2. The robot 2 transports the substrate 9 at least between the hoop 45 and the aligner 5. The robot 2 is located in the transport space 15. The robot 2 is a horizontal articulated robot.

[0021] Robot 2 has a base 21. The base 21 is installed in the transport space 15. More specifically, the base 21 is installed in the transport space 15 at a position close to the third vertical wall 13 and at the center in the Y direction. The base 21 is fixed within the transport space 15. The base 21 does not move.

[0022] Robot 2 has a manipulator 22. The base 21 supports the manipulator 22. As shown by the dashed arrow in Figure 2 or Figure 4, the manipulator 22 is vertically movable in the Z direction relative to the base 21.

[0023] The manipulator 22 of the robot 2 in the illustration has two links, a first and a second. The ends of the two links are rotatable around an axis extending in the Z direction. Note that the number of links forming the manipulator 22 is not limited to two. The manipulator 22 may have three links.

[0024] The end of the first link of the manipulator 22 is supported by the base 21. This end is rotatable about an axis extending in the Z direction relative to the base 21.

[0025] The manipulator 22 includes a hand 3. The hand 3 is rotatable about an axis extending in the Z direction relative to the second link of the manipulator 22. The hand 3 is an end effector that holds the substrate 9. The hand 3 is roughly Y-shaped in plan view. The hand 3 generally holds the substrate 9 in various ways, such as gripping, suction, placement, or fitting. In the illustrated example, the hand 3 is a passive hand. The passive hand holds the substrate 9 by placing the substrate 9 on the hand 3. As shown in an enlarged view in Figure 6, the hand 3 touches the outer edge of the substrate 9. The hand 3 does not touch the center of the substrate 9.

[0026] Robot 2 may have two or more hands. Robot 2 may have two or more manipulators. Also, one manipulator may include two or more hands.

[0027] The robot controller controls robot 2. The robot controller may also control aligner 5. Alternatively, a controller other than the robot controller may control aligner 5.

[0028] (Arrangement of the aligner) The aligner 5 is located at the top of the transport space 15. The aligner 5 is located above the specific region 193. The specific region 193 is the region formed by the trajectory of the third communication opening 173 of the first vertical wall 11 projected in the X direction to the third vertical wall 13, as shown by the dashed line in Figures 2, 3, or 4. As virtually shown in Figure 2, the manipulator 22 and hand 3 of the robot 2 are located within the specific region 193 when they take out the substrate 9 from the hoop 45 of the third load port 43 or put the substrate 9 into the hoop 45 of the third load port 43. The specific region 193 may also be defined as the region within the transport space 15 where the transport of the substrate 9 through the third communication opening 173 takes place. The aligner 5 is located above the specific region 193, but more specifically, the housing 52 of the aligner 5, which will be described later, is located above the specific region 193. A portion of the connecting portion 524, which is an ancillary piece of the aligner 5 and will be described later, may be located within the specific region 193. Furthermore, the aligner 5, including the connecting portion 524, may be located above the specific region 193.

[0029] The third communication opening 173 is the communication opening closest to the second vertical wall 12 among the three communication openings arranged in the X direction in the housing 10 of the substrate transport device 1. The aligner 5 is located adjacent to the second vertical wall 12. In other words, the aligner 5 is located on the opposite side in the Y direction from the fourth vertical wall 14 which has the door 182.

[0030] As shown in Figure 3, when viewed in the vertical direction, a portion of the aligner 5 overlaps with a specific region 193. More specifically, the aligner 5 is inclined horizontally with respect to the second vertical wall 12, which extends along the X direction. A gap 151 is formed between the aligner 5 and the second vertical wall 12, as shaded in Figure 3. When viewed from above, the gap 151 has a roughly triangular shape.

[0031] Bracket 8 supports the aligner 5. Bracket 8 is positioned to straddle the first vertical wall 11 and the third vertical wall 13, and is fixed to each of the first vertical wall 11 and the third vertical wall 13. Details of the shape of bracket 8 will be described later.

[0032] (Structure of the aligner) Figure 5 shows the entire aligner 5. Figure 6 is a top view of the aligner 5. Figure 7 is a cross-sectional view taken from VII-VII in Figure 6. Hereafter, the direction connecting the front left and back right of the page in Figure 5 will be called the width direction, the direction connecting the front right and back left of the page will be called the depth direction, and the vertical direction of the page will be called the height direction. Note that the width direction, depth direction, and height direction are used to describe the aligner 5 and are not used to limit the structure of the aligner 5.

[0033] The aligner 5 has a spindle 51. The spindle 51 holds the substrate 9 and rotates the held substrate 9. The spindle 51 is rotatably held in the housing 52. The spindle 51 protrudes upward from the housing 52. The spindle 51 is cylindrical with a first rotation axis Z1 extending in the height direction as its axis of rotation.

[0034] The aligner 5 has an arm 53. Note that the arm 53 is not an essential element of the aligner 5. The arm 53 extends radially outward from the spindle 51. As shown in Figure 6, the arm 53 supports the substrate 9 with its outer edge positioned radially inward from the pin 531 at the tip of the arm 53. The spindle 51 indirectly supports the substrate 9 via the arm 53. Like the hand 3, the arm 53 does not touch the central part of the substrate 9. The substrate 9, transported by the robot 2, is placed on the arm 53. The arm 53 includes a first arm 53, a second arm 53, and a third arm 53. The first arm 53, the second arm 53, and the third arm 53 are positioned at equal angular intervals in the circumferential direction. The first arm 53, the second arm 53, and the third arm 53 can stably support the substrate 9. Note that the first arm 53, the second arm 53, and the third arm 53 are not limited to being arranged at equal angular intervals. As the spindle 51 rotates around the first rotation axis Z1, the substrate 9 held by the arm 53 rotates around the first rotation axis Z1. Note that there may be four arms 53. Also, the arms 53 may be omitted. Furthermore, the pins 531 at the tips of the arms 53 may be pins that contact the outer peripheral edge of the lower surface of the substrate 9 to support it.

[0035] The aligner 5 has an electric motor 54 that rotates a spindle 51. The electric motor 54 is a servo motor or a stepping motor. The second rotation axis Z2 of the electric motor 54 is offset in the width and depth directions relative to the first rotation axis Z1 of the spindle 51. The spindle 51 and the electric motor 54 are connected via a belt 55. More specifically, a first pulley 56 is attached to the lower end of the spindle 51. The first pulley 56 is housed in a housing 52. The shaft of the electric motor 54 is connected to a second pulley 58 via a reduction gear set 57. The second pulley 58 is also housed in a housing 52. The belt 55 is wrapped around the first pulley 56 and the second pulley 58 within the housing 52. The belt 55 extends in the width direction. The belt 55 transmits the rotational force of the electric motor 54 to the spindle 51.

[0036] The height of the electric motor 54 is relatively high. The height of the electric motor 54 is higher than the height of the housing 52. As shown in Figure 7, the electric motor 54 is located above the housing 52. The electric motor 54 is housed in a casing 59. The casing 59 is located laterally in the width direction relative to the spindle 51 on the upper surface of the housing 52.

[0037] The aligner 5 has a sensor 510. The sensor 510 is used to check the eccentricity of the substrate 9, read the ID of the substrate 9, and detect and align notches or orientation flats of the substrate 9. The sensor 510 is located on the side of the casing 59. The sensor 510 is C-shaped (or inverted C-shaped) in side view. The outer edge of the substrate 9 held by the arm 53 passes between the sensors 510.

[0038] The aligner 5 has a lifter 6. The lifter 6 can lift the substrate 9 supported by the spindle 51 and arm 53. The lifter 6 supports the substrate 9 in place of the spindle 51 and arm 53.

[0039] The lifter 6 has a plurality of lift pieces 61, 62, and 63. The lift pieces 61, 62, and 63 protrude upward from the upper surface of the housing 52. As shown in Figure 6 or 7, the lift pieces 61, 62, and 63 strike the outer peripheral edge of the lower surface of the substrate 9 from below, lifting the substrate 9. Lift piece 61 is located on the opposite side of the casing 59, with the spindle 51 in between. Lift pieces 62 and 63 are located on the opposite side of the spindle 51 from lift piece 61. As shown in Figure 6, with respect to the hand 3 that transfers the substrate 9 between the hand 3 and the aligner 5, lift piece 61 is located on the first side in the width direction of the hand 3, and lift pieces 62 and 63 are located on the second side in the width direction of the hand 3. Note that the arrangement of lift pieces 61, 62, and 63 shown in Figure 6 is merely an example, and the number of lift pieces located on the first side and the number of lift pieces located on the second side can be set as appropriate.

[0040] The lift pieces 61 and 62, 63 are positioned spaced apart from each other in the width direction. Lift pieces 62 and 63 are also positioned spaced apart from each other in the depth direction. As shown in Figure 6, lift pieces 62 and 63 are located on opposite sides in the depth direction, flanking the sensor 510. Lift pieces 62 and 63 are integrated via a connecting plate 66.

[0041] The lifter 6 has a lifting drive unit 64. The lifting drive unit 64 includes an air cylinder. The air cylinder extends and retracts vertically in response to the supply and discharge of air. The lifting drive unit 64 is relatively tall in the height direction. The height of the lifting drive unit 64 is greater than the height of the housing 52. The lifting drive unit 64 is housed in a casing 59. A link 65 is interposed between the lift pieces 61, 62, 63 and the lifting drive unit 64. The link 65 is housed in the housing 52. The link 65 extends straight in the width direction from the lifting drive unit 64 to the lift piece 61. The lift pieces 61, 62, 63 are connected to the link 65 directly or indirectly. As the air cylinder extends and retracts, the link 65 is displaced in the height direction. As the link 65 is displaced, the lift pieces 61, 62, 63 are displaced in the height direction. The lift pieces 61, 62, and 63 are displaced between a standby position and a support position. The standby position is below the tip of the arm 53, as shown by the solid line in Figure 7. The support position is above the tip of the arm 53, as shown by the dashed line in Figure 7. When the arm 53 supports the substrate 9 and the lift pieces 61, 62, and 63 rise from the standby position to the support position, the substrate 9 is transferred from the arm 53 to the lift pieces 61, 62, and 63.

[0042] Robot 2 takes the circuit board 9, which has been aligned by the aligner 5. Robot 2's hand 3, in principle, takes the circuit board 9 from the arm 53 that is mounted on the arm 53. Robot 2 inserts hand 3 under the circuit board 9, which is supported by the arm 53, and supports the circuit board 9.

[0043] As a result of the alignment of the substrate 9, when the robot 2 picks up the substrate 9 and the hand 3 and the arm 53 interfere with each other, it is necessary to change the relative orientation between the substrate 9 and the hand 3. When changing the relative orientation, the lift pieces 61, 62, and 63 of the lifter 6 are displaced to the support positions, and the lift pieces 61, 62, and 63 support the substrate 9 instead of the arm 53. The hand 3 can pick up the substrate 9 from the lift pieces 61, 62, and 63 without interfering with the arm 53. More specifically, as the lift pieces 61, 62, and 63 that support the substrate 9 descend, the substrate 9 is transferred from the lift pieces 61, 62, and 63 to the hand 3.

[0044] The housing 52 has a flat shape with a vertical height shorter than the horizontal length. The housing 52 has a main body 521 and a top plate 522. The main body 521 has a length in the width direction longer than the depth direction. The main body 521 has an elongated rectangular shape in the horizontal direction. The main body 521 also has a height shorter than the lengths in the width direction and the depth direction.

[0045] The top plate 522 is a flat plate that closes the upper opening of the main body 521. The length of the top plate 522 in the width direction is substantially the same as the length of the main body 521 in the width direction. The length of the top plate in the depth direction is longer than the length of the main body 521 in the depth direction. The top plate 522 expands more horizontally than the main body 521. As shown in FIG. 5 or FIG. 8, the housing 52 has steps 523 on both sides in the depth direction.

[0046] Here, the installation structure of the aligner 5 in the conveyance space 15 will be described. FIG. 8 shows the aligner 5 and a bracket 8 that supports the aligner 5. The bracket 8 is plate-shaped and has a support hole 81 at the central portion. The support hole 81 is rectangular when viewed from above, and its size corresponds to the size of the main body 521 of the housing 52 of the aligner 5. As shown by the white arrow in FIG. 8, the aligner 5 is attached to the bracket 8 from above. The main body 521 is inserted into the support hole 81 of the bracket 8. The top plate 522 of the housing 52 expands more horizontally than the main body 521 as described above. The step 523 between the main body 521 and the top plate 522 engages with the edge 82 of the support hole 81, and the aligner 5 is supported by the bracket 8.

[0047] The aligner 5 having the lifter 6 may spray the dust in the housing 52 upward in the housing 52 as the link 65 is displaced vertically therein. The aligner 5 has an exhaust fan 511. The exhaust fan 511 forcibly discharges the dust in the housing 52 to the outside of the housing 52 (see the dashed arrow in FIG. 7). The exhaust fan 511 is attached to the inner bottom surface of the housing 52. The bottom wall of the housing 52 has an exhaust port 525. The exhaust port 525 communicates the inside and outside of the housing 52.

[0048] A connection part 524 is attached to the lower surface outside the housing 52. The connection part 524 covers the exhaust port 525. An exhaust duct 152 is connected to the connection part 524. As shown in FIG. 2 or FIG. 4, the exhaust duct 152 extends vertically and is disposed near the corner of the second vertical wall 12 and the third vertical wall 13 of the housing 10. The exhaust duct 152 guides the dust discharged from the housing 52 to the lower part of the transfer space 15 by the exhaust fan 511.

[0049] (Function and Effect) The aligner 5 has a flat shape. Even when the flat-shaped aligner 5 is installed above in the transfer space 15, the mounting height H1 of the substrate 9 on the aligner 5 is relatively low (see FIG. 2). The mounting height H1 of the substrate 9 is the position where the robot 2 that conveys the substrate 9 delivers the substrate 9 to the aligner 5.

[0050] The aligner 5 includes a lifter 6. The lifter 6 enables the hand 3 of the robot 2 to change the holding of the substrate 9. The aligner 5 has an arm 53 that supports the outer peripheral edge of the substrate 9. On the other hand, the hand 3 of the robot 2 is also a passive hand that supports the outer peripheral edge of the substrate 9. When the hand 3 receives the aligned substrate 9 from the aligner 5, the hand 3 and the arm 53 may interfere with each other. By the lifter 6 supporting the substrate 9 instead of the arm 53, the hand 3 can receive the substrate 9 from the lifter 6 while avoiding interference with the arm 53.

[0051] Furthermore, since the first arm 53, the second arm 53, and the third arm 53 are positioned at equal angular intervals in the circumferential direction, the substrate 9 can be stably supported.

[0052] On the other hand, the lifter 6 also has lift pieces 61, 62, and 63 located on the first and second sides of the spindle 51, respectively, so that it can stably lift the substrate 9.

[0053] Since the electric motor 54 of the aligner 5 is not housed in the housing 52, the housing 52 can be made into a flat shape. Furthermore, since the casing 59 is horizontally offset from the spindle 51 and arm 53, the height of the casing 59 does not adversely affect the mounting height H1 of the substrate 9 in the aligner 5.

[0054] Furthermore, the bracket 8 of the aligner 5 has a support hole 81 into which the main body 521 is inserted, and the step 523 of the aligner 5 engages with the edge 82 of the bracket 8, thereby holding the aligner 5 in place. The aligner 5 sinks into the bracket 8. The height H2 from the top surface of the bracket 8 to the mounting position of the substrate 9 in the aligner 5 is also set as low as possible (see Figure 8). The structure of the bracket 8 further lowers the mounting height H1 of the substrate 9 in the aligner 5. As shown in Figure 2, the mounting height H1 is not significantly different from the height of the substrate 9 at the highest position in the hoop 45.

[0055] Furthermore, because the mounting height H1 of the substrate 9 in the aligner 5 is low, the maximum reach of the manipulator 22 of the robot 2 can be set to a relatively low position. The substrate transport device 1 has the advantage of not requiring a robot 2 with a special structure that has a high maximum reach.

[0056] The lifting drive unit 64 of the lifter 6 is housed in the casing 59 and not in the housing 52. The housing 52 can be made into a flat shape.

[0057] The exhaust fan 511 discharges dust from inside the housing 52 to the outside of the housing 52 through an exhaust port 525 formed in the bottom wall of the housing 52. The housing 52 can maintain its flat shape even if the diameter of the exhaust fan 511 and the exhaust port 525 is large. Making the exhaust fan 511 and the exhaust port 525 large in diameter is advantageous for the efficient discharge of dust from the housing 52.

[0058] (Modified Version) Figure 9 shows a modified version of the arrangement of the aligner 5 in the substrate transport device 1. The aligner 5 is not limited to being installed above a specific area 193 near the second vertical wall 12. The aligner 5 may also be installed above a specific area 191 near the fourth vertical wall 14, as shown by the solid line in Figure 9. The specific area 191 is an area formed by the trajectory of the first communication opening 171 projected in the X direction. The first communication opening 171 is the communication opening closest to the fourth vertical wall 14 among the three communication openings arranged in the X direction in the housing 10 of the substrate transport device 1. The aligner 5 is located on the opposite side in the Y direction from the second vertical wall 12 which has the door 181. When viewed in the vertical direction, a part of the aligner 5 overlaps with the specific area 191.

[0059] Furthermore, as shown by the dashed line in Figure 9, the aligner 5 may be installed above the specific region 192. The specific region 192 is the region formed by the trajectory of the second communication opening 172 projected in the X direction. The second communication opening 172 is the central communication opening of the three communication openings arranged in the X direction in the housing 10 of the substrate transport device 1. When viewed in the vertical direction, a portion of the aligner 5 overlaps the specific region 192.

[0060] Figure 10 shows a modified substrate transport device. The modified substrate transport device 1000 has four load ports, a first load port 41, a second load port 42, a third load port 43, and a fourth load port 44, which are arranged in the Y direction. The first vertical wall 11 has a first communication opening 171, a second communication opening 172, a third communication opening 173, and a fourth communication opening 174.

[0061] The aligner 5 may be installed above a specific area 194 near the second vertical wall 12, as shown by the solid line in Figure 10. The specific area 194 is the area formed by the trajectory of the fourth communication opening 174 projected in the X direction to the third vertical wall 13.

[0062] The aligner 5 may also be installed above a specific region 191 near the fourth vertical wall 14, as shown by the dashed line in Figure 10. The specific region 191 is the region formed by the trajectory of the first communication opening 171 projected in the X direction.

[0063] Furthermore, the aligner 5 may be installed in a specific area corresponding to the second communication opening 172 or above a specific area corresponding to the second communication opening 172.

[0064] The base 21 of the robot 2 is fixed in place within the transport space 15 without moving. The manipulator 22 of the robot 2 has two links, a first and a second. The length of one link is even longer. As before, since the aligner 5 is tilted horizontally with respect to the second vertical wall 12, the robot 2 can easily access the aligner 5 with the hand 3. The manipulator 22 may have three or more links.

[0065] (Embodiment) The embodiments described above are specific examples of the following embodiments.

[0066] (Aspect 1) An aligner (5) comprising: a spindle (51) for rotating a supported substrate (9); a housing (52) for rotatably holding the spindle (51), the housing (52) having a flattened shape in which the height in the vertical direction is shorter than the length in the horizontal direction; and a lifter (6) for lifting the substrate (9) which is directly or indirectly supported by the spindle (51) and supporting the substrate (9).

[0067] Since the lifter (6) supports the circuit board (9), the robot's (2) hand (3) can receive the circuit board (9) from the lifter (6).

[0068] (Aspect 2) The aligner (5) according to aspect 1, further comprising an arm (53) extending radially outward from the spindle (51) and supporting the substrate (9).

[0069] The arm (53) enables stable support of the substrate (9).

[0070] (Aspect 3) The aligner (5) according to aspect 2, wherein the arm (53) has a pin (531) located at the tip of the arm (53).

[0071] An arm (53) having a pin (531) at its tip supports the outer edge of the substrate (9). If the robot's (2) hand (3) is a passive hand that supports the outer edge of the substrate (9), the hand (3) and the arm (53) may interfere with each other when the hand (3) receives the aligned substrate (9) from the aligner (5). By having the lifter (6) support the substrate (9) instead of the arm (53), the hand (3) can receive the substrate (9) from the lifter (6) while avoiding interference with the arm (53).

[0072] (Aspect 4) The aligner (5) according to aspect 2 or 3, wherein the arm (53) includes a first arm (53), a second arm (53), and a third arm (53).

[0073] The three arms (53) can stably support the circuit board (9).

[0074] (Aspect 5) The aligner (5) according to aspect 4, wherein the first arm, the second arm, and the third arm are positioned at equal angular intervals in the circumferential direction.

[0075] The three arms (53) positioned at equal angular intervals can support the substrate (9) even more stably.

[0076] (Aspect 6) The aligner (5) according to any one of aspects 1 to 5, wherein the lifter (6) supports the outer peripheral edge of the substrate (9) and has two or more lift pieces (61, 62, 63) that move up and down in the vertical direction.

[0077] The lifter (6) can stably lift the substrate (9) using two or more lift pieces (61, 62, 63).

[0078] (Aspect 7) The aligner (5) according to aspect 6, wherein the first lift piece (61) is located on the first side of the spindle (51), and the second lift pieces (62, 63) are located on the second side of the spindle (51).

[0079] Since the first lift piece (61) and the second lift pieces (62, 63) are located on the first and second sides of the spindle (51), respectively, the lifter (6) can stably lift the substrate (9). In addition, interference between the first lift piece (61) and the second lift pieces (62, 63) and the robot's (2) hand (3) is suppressed.

[0080] (Aspect 8) The aligner (5) according to any one of aspects 1 to 7, wherein the lifter (6) lifts the substrate (9) after the alignment of the substrate (9) is completed, and the robot (2) that transports the substrate (9) takes the substrate (9) from the lifter (6).

[0081] Even if interference between the robot's (2) hand (3) and the spindle (51) prevents the robot (2) from taking up the substrate (9) which is directly or indirectly supported by the spindle (51), the lifter (6) supports the substrate (9), allowing the robot (2) to take up the substrate (9) from the lifter (6).

[0082] (Aspect 9) The aligner (5) according to aspect 8, wherein the substrate (9) is handed over from the lifter (6) to the robot (2) as the lifter (6) performs a downward movement.

[0083] The transfer of the circuit board (9) from the lifter (6) to the robot (2) is performed reliably.

[0084] (Aspect 10) An aligner (5) according to any one of aspects 1 to 9, further comprising: an electric motor (54) for rotating the spindle (51) having a second rotation axis (Z2) positioned horizontally with respect to a first rotation axis (Z1) of the spindle (51); and a belt (55) connecting the shaft of the electric motor (54) to the spindle (51).

[0085] The position of the second rotation axis (Z2) of the electric motor (54) is horizontally offset from the first rotation axis (Z1) of the spindle (51). Because the spindle (51) and the electric motor (54) are not aligned in the direction in which their rotation axes extend, the aligner (5) can achieve a flattened shape.

[0086] (Aspect 11) The aligner (5) according to aspect 10, wherein the belt (55) is housed in the housing (52), and the electric motor (54) is housed in a casing (59) fixed on top of the housing (52).

[0087] Since the electric motor (54) is not housed in the housing (52), the aligner (5) can be made flat. Because the casing (59) is horizontally offset from the spindle (51), the height of the casing (59) does not adversely affect the mounting height (H1) of the substrate (9) in the aligner (5).

[0088] (Aspect 12) The aligner (5) according to any one of aspects 1 to 11, further comprising an exhaust fan (511) for discharging dust from inside the housing (52) to the outside of the housing (52).

[0089] The lifter (6) of the aligner (5) may cause dust generated inside the housing (52) to be blown upwards from the aligner (5). The exhaust fan (511) forcibly discharges the dust inside the housing (52) to the outside of the housing (52), thus suppressing the upward blowing of dust from the aligner (5).

[0090] (Aspect 13) The aligner (5) according to aspect 12, wherein the exhaust fan (511) discharges dust inside the housing (52) to the outside of the housing (52) through an exhaust port (525) formed in the bottom wall of the housing (52).

[0091] Since the exhaust port (525) is formed in the bottom wall of the housing (52), the housing (52) can maintain a flat shape even if the diameters of the exhaust fan (511) and the exhaust port (525) are large. Making the exhaust fan (511) larger in diameter is advantageous for the efficient discharge of dust from the housing (52).

[0092] (Aspect 14) The aligner (5) according to aspect 12 or 13, wherein the exhaust fan (511) is connected to an exhaust duct (152) that guides the dust to the lower part of the transport space (15).

[0093] The exhaust duct (152) can guide the dust discharged by the exhaust fan (511) downwards into the transport space (15). In specific areas (191, 192, 193, 194), the adhesion of dust to the substrate 9 is suppressed.

[0094] (Aspect 15) The aligner (5) according to any one of aspects 1 to 14, wherein the housing (52) comprises a main body (521) and a top plate (522) that closes the upper opening of the main body (521) and is wider horizontally than the main body (521), and the bracket (8) that supports the aligner (5) has a support hole (81) into which the main body (521) of the housing (52) is inserted, and the step (523) between the main body (521) and the top plate (522) engages with the edge (82) of the support hole (81).

[0095] The step (523) of the aligner (5) engages with the edge (82) of the bracket (8), thereby allowing the bracket (8) to hold the aligner (5). The aligner (5) sinks into the bracket (8). The height (H2) from the top surface of the bracket (8) to the mounting position of the substrate (9) on the aligner (5) is also set as low as possible. The structure of the bracket (8) further lowers the mounting height (H1) of the substrate (9) on the aligner (5).

[0096] 1. PCB transport device 15. Transport space 152. Exhaust duct 2. Robot 5. Aligner 51. Spindle 52. Housing 53. Arm 54. Electric motor 55. Belt 59. Casing 511. Exhaust fan 521. Main body 522. Top plate 523. Step 525. Exhaust port 531. Pin 6. Lifter 61. Lift piece 62. Lift piece 63. Lift piece 8. Bracket 81. Support hole 82. Edge 9. PCB Z1. First rotation axis Z2. Second rotation axis

Claims

1. An aligner comprising: a spindle for rotating a supported substrate; a housing for rotatably holding the spindle, the housing having a flattened shape in which the height in the vertical direction is shorter than the length in the horizontal direction; and a lifter for lifting the substrate, which is directly or indirectly supported by the spindle, to support the substrate.

2. An aligner according to claim 1, further comprising an arm extending radially outward from the spindle and supporting the substrate.

3. An aligner according to claim 2, wherein the arm has a pin located at the tip of the arm.

4. An aligner according to claim 2 or 3, wherein the arms include a first arm, a second arm, and a third arm.

5. An aligner according to claim 4, wherein the first arm, the second arm, and the third arm are positioned at equal angular intervals in the circumferential direction.

6. An aligner according to any one of claims 1 to 5, wherein the lifter supports the outer peripheral edge of the substrate and has two or more lift pieces that move up and down in the vertical direction.

7. An aligner according to claim 6, wherein the first lift piece is located on the first side of the spindle, and the second lift piece is located on the second side of the spindle.

8. An aligner according to any one of claims 1 to 7, wherein the lifter lifts the substrate after the alignment of the substrate is completed, and the robot that transports the substrate takes the substrate from the lifter.

9. The aligner according to claim 8, wherein the substrate is handed over from the lifter to the robot as the lifter performs a downward movement.

10. An aligner according to any one of claims 1 to 9, further comprising: an electric motor for rotating the spindle having a second rotation axis positioned horizontally with respect to a first rotation axis of the spindle; and a belt connecting the shaft of the electric motor and the spindle.

11. An aligner according to claim 10, wherein the belt is housed in the housing, and the electric motor is housed in a casing fixed on top of the housing.

12. An aligner according to any one of claims 1 to 11, further comprising an exhaust fan for discharging dust from the housing to the outside of the housing.

13. An aligner according to claim 12, wherein the exhaust fan discharges dust from inside the housing to the outside of the housing through an exhaust port formed in the bottom wall of the housing.

14. An aligner according to claim 12 or 13, wherein the aligner is installed in the transport space of a substrate transport device that transports the substrate, and the exhaust fan is connected to an exhaust duct that guides the dust to the lower part of the transport space.

15. An aligner according to any one of claims 1 to 14, wherein the housing comprises a main body and a top plate that closes the upper opening of the main body and is horizontally enlarged than the main body, and the bracket supporting the aligner has a support hole into which the main body of the housing is inserted, and the step between the main body and the top plate engages with the edge of the support hole.

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