Multi-pattern soft mold and manufacturing method thereof

Abstract

The present invention relates to a multi-pattern soft mold. The substrate has a first pattern formed thereon such that a parallel groove having a side wall perpendicular to the substrate surface is repeatedly arranged, and has a second pattern formed thereon such that a parallel groove having an inclined side wall is repeatedly arranged. The first pattern and the second pattern may be transferred from different master molds and implemented on a single substrate. Accordingly, patterns having different structures can be implemented in one soft mold.

Description

Multi-pattern soft mold and method of manufacturing the same

[0001] The present invention relates to a nanoimprint process, and more specifically, to a multi-pattern soft mold for implementing patterns of different shapes on a single substrate and a method for manufacturing the same.

[0002] Nanoimprint lithography (NIL) is a technology that transfers nano or micro-level patterns onto a substrate like a stamp using fine precision molds, and it is attracting attention as a next-generation patterning technology capable of replacing conventional photolithography or electron beam lithography.

[0003] The nanoimprint process does not require complex exposure optical systems and offers the advantages of a simple process configuration and low processing costs. Due to these characteristics, it is a technology capable of forming nano-patterned structures of various sizes and functionalities at a low cost, and is being actively researched in fields such as displays, optical devices, semiconductors, and biochips.

[0004] Nanoimprint lithography is a method of forming a pattern of a desired shape on a substrate by applying a curable resin that reacts to ultraviolet (UV) light or heat onto a substrate, pressing a mold with a predetermined pattern onto the substrate to deform and cure the resin, and then removing the mold.

[0005] In this case, the mold has a shape opposite to the pattern to be formed, and since high resolution is possible, it is possible to secure superior resolution compared to conventional photolithography methods that are limited to long-wavelength light sources.

[0006] In particular, for optical devices such as waveguide-based displays or HUDs (Head-Up Displays), it is necessary to control the incidence, diffusion, and emission of light by forming nano-patterns inside the waveguide, and nanoimprint technology is being applied to form these nano-structures.

[0007] For example, when different shaped patterns need to be formed in multiple regions performing different optical functions, such as in-couplers, expanders, and out-couplers, a mold structure suitable for each must be used.

[0008] However, conventional nanoimprint lithography technology faces technical difficulties in precisely and simultaneously realizing nanopatterns of different shapes within a master mold. Since the processes for realizing each pattern differ in application conditions and resolution characteristics, it is difficult to realize a combination of them on a single master.

[0009] Furthermore, manufacturing large-area displays requires implementing uniform nano-patterns on substrates of several hundred millimeters or more; however, conventional master molds could not cover the entire area in a single process due to size limitations.

[0010] To solve this, a method of connecting multiple masters in parallel or transferring them sequentially has been proposed, but this process results in optical non-uniformity due to alignment errors and shim lines, which causes device performance degradation or defects after pattern transfer.

[0011] In particular, light leakage, reflection loss, and phase distortion in the seam line area act as problems and can degrade the quality of high-resolution displays.

[0012] As such, there is an increasing need for new imprint-based manufacturing technologies that can integrate nano-patterns with different functions onto a single master or precisely join multiple identical patterns to form large-area structures while suppressing defects such as seam lines.

[0013] To solve the aforementioned problems, the present invention aims to provide a manufacturing technology capable of precisely implementing patterns of different shapes, particularly right-angle patterns and inclined patterns, on a single soft mold.

[0014] In addition, the purpose is to provide a method and apparatus for manufacturing a soft mold that can reduce alignment errors between multiple patterns and stably form a desired arrangement by accurately aligning the position of each pattern using an alignment jig, guideline, alignment marker, or interlocking process.

[0015] The problems to be solved by the present invention are not limited to the technical problems mentioned above, and other technical problems not mentioned will be clearly understood by those skilled in the art to which the present invention belongs from the description below.

[0016] The present invention prepares a first master mold having an inverse pattern of a first pattern formed thereon and a second master mold having an inverse pattern of a second pattern formed thereon, and forms a first pattern on a soft mold by imprinting the first master mold, and then determines a position on the soft mold to imprint the second pattern, and forms a second pattern by imprinting the second master mold according to the determined position. The imprint position of the second master mold can be determined by arranging an alignment jig on the soft mold and loading the second master mold according to the arranged alignment jig, and the alignment jig can determine the position of the second master mold by recognizing an alignment marker formed on the soft mold or the second master mold. Additionally, a guide line indicating a first pattern area and a second pattern area can be formed on the soft mold, and the first master mold and the second master mold can be aligned and imprinted based on this guide line.

[0017] In another embodiment, a first region containing a first inverse pattern in a first master mold and a second region containing a second pattern in a second master mold can be cut out respectively, and then the two regions can be joined together. At this time, each region is cut into a shape corresponding to each other and processed so as to be mutually joined, and through this joining, the placement position of each pattern can be attached according to a predetermined alignment standard. The first pattern can be formed such that the sidewalls are substantially perpendicular to the substrate surface as a pattern in which parallel grooves are repeated, and the second pattern can be formed such that the sidewalls are formed at an angle inclined to the substrate surface as a pattern in which parallel grooves are repeated. Additionally, the grooves of the first pattern or the second pattern can be formed in a shape in which the depth gradually increases along the direction in which the grooves are arranged.

[0018] The soft mold of the present invention may include a first pattern in which parallel grooves with sidewalls substantially perpendicular to each other are repeatedly arranged on a substrate, and a second pattern in which parallel grooves with sidewalls forming inclined angles are repeatedly arranged, and an alignment marker for pattern position alignment may be provided in the substrate or the formation area of ​​each pattern. The first pattern and the second pattern may be transferred from different master molds and formed on a single substrate, and the grooves of the first pattern or the second pattern may be formed in a shape in which the depth gradually increases along the direction in which the grooves are arranged.

[0019] In addition, the manufacturing apparatus of the present invention may include a first transfer unit that imprints a first master mold to form a first pattern on a soft mold, a second transfer unit that imprints a second master mold to form a second pattern on a soft mold, and a positioning unit that determines the imprint position of the second master mold. The positioning unit may include an alignment jig arranged on the soft mold and a fixing spacer coupled to the alignment jig, and may also include a sensor that detects an alignment marker formed on the soft mold or the master mold.

[0020] According to one embodiment of the present invention, a first pattern and a second pattern of different shapes can be implemented on a single soft mold.

[0021] In addition, errors between patterns can be minimized by applying interlocking processing after cutting or by using alignment jigs, guide lines, and alignment markers to precisely align the positions of each pattern.

[0022] In addition, by combining patterns transferred from different master molds, patterns with various shapes and structures can be produced in a single soft mold.

[0023] Further scopes of the applicability of the present invention will become apparent from the following detailed description. However, since various changes and modifications within the spirit and scope of the present invention are clearly understood by those skilled in the art, specific embodiments, such as the detailed description and preferred embodiments of the present invention, should be understood as being given merely as examples.

[0024] FIG. 1 is a flowchart of a method for manufacturing a soft mold of multiple patterns according to one embodiment of the present invention.

[0025] Figure 2 is a schematic diagram for explaining the flowchart of Figure 1.

[0026] FIG. 3 is a flowchart of a method for manufacturing a soft mold of multiple patterns according to another embodiment of the present invention.

[0027] Figure 4 is a schematic diagram to explain the flowchart of Figure 3.

[0028] FIG. 5 is a flowchart of a method for manufacturing a soft mold of multiple patterns according to another embodiment of the present invention.

[0029] Figure 6 is a schematic diagram to explain the flowchart of Figure 5.

[0030] FIG. 7 is a side view of a soft mold with multiple patterns according to one embodiment of the present invention.

[0031] FIG. 8 is a side view of a soft mold with multiple patterns according to another embodiment of the present invention.

[0032] Hereinafter, embodiments disclosed in this specification will be described in detail with reference to the attached drawings. Identical or similar components regardless of drawing symbols are given the same reference number, and redundant descriptions thereof will be omitted.

[0033] The suffixes "module" and "part" for components used in the following description are assigned or used interchangeably solely for the sake of ease of drafting the specification, and do not inherently possess distinct meanings or roles. Furthermore, in describing the embodiments disclosed in this specification, detailed descriptions of related prior art are omitted if it is determined that such detailed descriptions could obscure the essence of the embodiments disclosed in this specification.

[0034] In addition, the attached drawings are intended only to facilitate understanding of the embodiments disclosed in this specification, and the technical concept disclosed in this specification is not limited by the attached drawings; it should be understood that all modifications, equivalents, and substitutions included within the concept and technical scope of the present invention are included.

[0035] Terms including ordinal numbers, such as first, second, etc., may be used to describe various components, but said components are not limited by said terms. These terms are used solely for the purpose of distinguishing one component from another.

[0036] When it is stated that one component is "connected" or "connected" to another component, it should be understood that while it may be directly connected or connected to that other component, there may also be other components in between. On the other hand, when it is stated that one component is "directly connected" or "directly connected" to another component, it should be understood that there are no other components in between.

[0037] A singular expression includes a plural expression unless the context clearly indicates otherwise.

[0038] In this application, terms such as “comprising” or “having” are intended to specify the existence of the features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, and should be understood as not precluding the existence or addition of one or more other features, numbers, steps, actions, components, parts, or combinations thereof.

[0039] A method for manufacturing a soft mold with multiple patterns according to an embodiment of the present invention will be described below with reference to FIGS. 1 and 2.

[0040] FIG. 1 illustrates a flowchart of a manufacturing method according to one embodiment of the present invention for implementing nano patterns of different shapes in a plurality of regions in a single soft mold (200).

[0041] In optical devices such as waveguide-based displays or HUDs (Head-Up Displays), nano-patterns of different shapes are implemented in a single soft mold. Regions performing different optical functions, such as in-couplers, expanders, and out-couplers, are positioned at specific locations within the waveguide, and nano-patterns optimized for each function must be formed in each region.

[0042] However, conventional nanoimprint lithography technology has limitations in precisely mixing and implementing nano-patterns of different shapes within a single master mold.

[0043] Accordingly, in the present invention, multiple patterns are implemented on a single soft mold by sequentially imprinting individually produced master molds (210, 220).

[0044] First, an original mold A with a first pattern formed thereon and an original mold B with a second pattern formed thereon are prepared (S1001, S1002). Next, a master mold A (first master mold, 210) with an inverse pattern of the first pattern formed thereon is produced by replicating from original mold A (S1003), and a master mold B (second master mold, 220) with an inverse pattern of the second pattern formed thereon is produced by replicating from original mold B (S1004).

[0045] The reason for manufacturing a master mold by first producing an original mold and then transferring it is that implementing the desired pattern on the original mold with high precision minimizes shape errors that may occur during the replication process, and enables the stable production of multiple master molds by repeatedly utilizing the same original mold.

[0046] However, if necessary, the process of manufacturing the original mold first may be omitted, and a master mold having the inverse patterns of the first and second patterns formed therein may be prepared directly. For convenience in the following description, the first master mold and the second master mold refer to Master Mold A, having the inverse pattern of the first pattern formed therein, and Master Mold B, having the inverse pattern of the second pattern formed therein, respectively.

[0047] Referring to FIG. 2, a first master mold (210) having a first inverse pattern (110') which is the inverse pattern of a first pattern formed thereon, and a second master mold (220) having a second inverse pattern (120') which is the inverse pattern of a second pattern formed thereon can be prepared (S1003, S1004).

[0048] The preparation process of such a master mold can be performed using a manufacturing device comprising a first transfer unit and a second transfer unit equipped with master mold fixing and pattern transfer functions. The manufacturing device may be equipped with a clamping structure for stable fixing of the master mold, a driving unit for controlling pressure and temperature during pattern transfer, an alignment optical system for increasing transfer precision, and a separation mechanism for facilitating the detachment of the mold after transfer.

[0049] Next, the pattern transfer positions of the first master mold (210) and the second master mold (220) are determined (S1005, S1006). Positions can be set so that each pattern can be placed at a predetermined position and reflected in an alignment jig. At this time, an alignment standard can be set using a reference mark or an optical sensor so that the pattern can be accurately placed on the soft mold (300).

[0050] Additionally, each mold may include an alignment marker. The alignment marker serves as a reference point during the pattern transfer process and can be utilized as a reference point for position recognition using an optical sensor or a vision system. The alignment jig can determine the position of the second master mold by recognizing the alignment marker formed on the soft mold or the second master mold; thereby, the relative position between the master mold and the soft mold can be precisely corrected, and the same alignment accuracy can be maintained even in repetitive processes.

[0051] The steps S1001 to S1006 described above do not necessarily need to be performed in order, and it is sufficient for the first master mold and the second master mold to be prepared simultaneously or separately, regardless of order.

[0052] Next, referring to FIG. 2, the first master mold (210) can be fixed to the first alignment jig (410) (S1007). That is, the first master mold can be loaded onto the first alignment jig in alignment with the alignment guide of the first alignment jig. The first alignment jig (410) may have a structure that supports the first master mold (210) and can adjust the relative position with respect to the soft mold (300).

[0053] Next, the first inverse pattern (110') of the first master mold (210) is transferred to the soft mold (300) to produce a soft mold (300') on which the first pattern (110) is formed (S1008). This process is performed in the first transfer section of the manufacturing device, and, as in a general nanoimprint process, the transfer pressure and temperature are controlled while the master mold is in close contact with the soft mold, and if necessary, the pattern shape can be cured through ultraviolet (UV) curing.

[0054] In addition, the manufacturing device can uniformly control the pressure distribution to stably maintain the fine shape of the pattern during the transfer process, and adjust the temperature rise and UV irradiation time to ensure that the shape of the original pattern is accurately reproduced.

[0055] Next, the second master mold (220) is fixed to the second alignment jig (420) and aligned with a set area on the soft mold (300') on which the first pattern (110) is formed (S1009). At this time, the second alignment jig (420) may have a structure that supports the second master mold (220) and allows for precise positioning using a positioning pin, alignment guide, optical sensor, etc.

[0056] Next, the spacers can be aligned (S1010). The spacers (430) can be used to accurately align the position of the second master mold (220), which is fixed to the second alignment jig (420), to a set position on the soft mold (300').

[0057] The second reverse pattern (120') of the second master mold (220) is transferred to the soft mold (300') to form the second pattern (120), and the final combined soft mold (300'') in which both the first pattern (110) and the second pattern (120) are implemented is produced (S1011).

[0058] Finally, the surface pattern of the completed soft mold (300'') can be inspected to check whether the first pattern and the second pattern are formed according to the designed position and shape (S1012).

[0059] Hereinafter, a method for manufacturing a soft mold of multiple patterns according to another embodiment of the present invention will be described with reference to FIGS. 3 and 4.

[0060] FIG. 3 is a flowchart of a method for manufacturing a soft mold of multiple patterns according to another embodiment of the present invention. Steps S3001 to S3006, which are steps of manufacturing each mold and determining its position, are identical to steps S1001 to S1006 described in FIG. 1, so they are omitted from this description.

[0061] First, referring to FIG. 4, a film guide (310) can be placed on a soft mold (300) (S3007). The film guide can serve to guide the position of the pattern in a subsequent imprint step.

[0062] The film guide can be printed or attached to the surface of a soft mold and can be marked to enable position identification, regardless of its shape or method. Preferably, a sensor or optical device capable of automatically recognizing it is provided so that alignment and positioning can be determined in a subsequent process.

[0063] Next, the first master mold (210) is loaded and fixed at the first pattern forming position of the soft mold (300) (S3008). At this time, the position of the first master mold can be determined and loaded by aligning it with a pre-formed film guide or by automatically recognizing an alignment marker formed on the soft mold (300) or the first master mold (210).

[0064] Afterwards, the first reverse pattern of the first master mold (210) is transferred to the soft mold (300) to produce a soft mold (300') having the first pattern formed thereon (S3009). The transfer operation is carried out using an imprint device, and conditions such as transfer pressure, heating temperature, UV irradiation intensity, and time can be controlled.

[0065] In the next step, the second master mold (220) is loaded and fixed onto the second alignment jig, and then aligned with a pre-set area on the soft mold (300') on which the first pattern has already been formed (S3010). At this time, alignment can also be performed based on a pre-formed film guide.

[0066] Finally, the second reverse pattern of the second master mold (220) is transferred to the soft mold (300') to form the second pattern, and the final combined soft mold (300'') in which both the first pattern and the second pattern are implemented is completed (S3011).

[0067] The surface pattern of the completed soft mold (300'') can be checked to see if it matches the design drawing and if it is abnormal (S3012).

[0068] Hereinafter, a method for manufacturing a soft mold of multiple patterns according to another embodiment of the present invention will be described with reference to FIGS. 5 and 6.

[0069] FIG. 5 is a flowchart illustrating the process of manufacturing a final master mold according to an embodiment of the present invention in detail step by step. First, an original mold A (201) (S5001) with a first pattern (110) formed thereon and an original mold B (202) (S5002) with a second pattern (120) formed thereon are prepared, respectively. The original molds are manufactured to implement the target pattern with high precision and serve as a standard for repeatedly manufacturing master molds of the same shape through a replication process thereafter.

[0070] Next, Master Mold A (S5003) is produced using Original Mold A, and Master Mold B (S5004) is produced using Original Mold B. At this time, the Master Mold is a copy obtained by transferring the surface shape of the Original Mold, and is produced using a material that is easy to process instead of directly processing the Original Mold. During the production process, pressure, temperature, curing time, etc., are controlled using an imprint device to ensure that no loss or distortion of the Original Pattern occurs.

[0071] Referring to FIG. 6, the manufactured master mold A and master mold B each determine their positions based on the area required for pattern transfer, and selectively cut or process only the parts that require processing (S5005, S5006). In this process, positioning aids such as an optical sensor that recognizes alignment markers, a vision system, or a film guide may be used, thereby ensuring that each pattern piece is placed in its originally designed position when combined, even after cutting.

[0072] In the next step, the necessary parts of the processed master mold A (210') and master mold B (220') are combined to form a final master mold (S5007). During the combination process, an alignment jig may be used to ensure that the boundaries of each piece are accurately interlocked, or tape, positioning pins, and clamping devices may be utilized. Through this combination, each pattern is implemented as a single structure on a single mold, and errors can be minimized in the subsequent transfer process.

[0073] The final master mold, upon completion of the combination, is mounted on a fixture to be securely fixed (S5008), and an imprint is performed on the soft mold using this (S5009). During this process, both the first pattern and the second pattern are transferred to produce a soft mold in which the final combined pattern is realized. The completed soft mold is inspected for pattern shape, dimensions, and alignment using a high-magnification microscope or surface shape measuring equipment, and can proceed to the next manufacturing step only if it matches the design specifications.

[0074] FIG. 7 illustrates a side schematic diagram of a soft mold with multiple patterns according to one embodiment of the present invention.

[0075] A soft mold of multiple patterns according to one embodiment of the present invention includes a structure in which patterns of different structures are arranged on a single substrate. Specifically, a first pattern and a second pattern are formed on the substrate, and the first pattern (110) has a structure in which parallel grooves are repeatedly arranged such that the sidewalls are substantially perpendicular to the substrate surface. Such a vertical sidewall structure can realize the corner shape of the pattern and is suitable for applications requiring a vertical wall shape, such as optical elements and microchannels.

[0076] Meanwhile, a second pattern (120) is formed in another area of ​​the same substrate, and the second pattern has a structure in which parallel grooves are repeatedly arranged with the sidewalls forming an inclined angle with respect to the substrate surface. This inclined sidewall structure can be applied to optical components that control light diffraction or refraction, or microfluidic devices that induce the flow of a specific fluid. The arrangement direction, groove spacing, depth, etc. of the first pattern and the second pattern can be selected according to the application and design specifications.

[0077] Additionally, alignment markers may be provided on the substrate and in the formation area of ​​each pattern. These alignment markers are used as reference points in subsequent transfer processes or pattern joining processes to ensure that patterns transferred from different master molds are positioned on a single substrate. The alignment markers may be designed to be recognizable by optical sensors or vision systems and may be used in conjunction with film guides as needed.

[0078] In this embodiment, the first pattern and the second pattern are each transferred from separate master molds and implemented on a single substrate. To this end, only the necessary areas from each master mold are selectively processed and cut, and then aligned to designated positions on the substrate using an alignment jig and spacers. By doing so, patterns of different structures can be precisely implemented on a single soft mold.

[0079] Referring together with FIG. 8, additionally, the grooves of the first or second pattern may be formed with a shape in which the depth gradually increases along the direction in which the grooves are arranged. This depth change structure may impart a change in optical properties.

[0080] As described above, when the depth of the groove changes gradually, the path of incident light undergoing multiple reflections or refractions within the pattern changes. Consequently, even light of the same wavelength has different optical paths at the beginning and end of the groove, which can consequently impart changes to the transmission angle or diffraction pattern. This structure can be applied to selectively control specific wavelengths or as a filter element based on wavelength separation. Furthermore, when applied to fluid devices, the fluid velocity is gradually controlled according to the change in groove depth, thereby enabling gradual pressure changes or mixing characteristics.

[0081] It is obvious to those skilled in the art that the present invention may be embodied in other specific forms without departing from the spirit and essential features of the invention.

[0082] The foregoing detailed description should not be interpreted restrictively in all respects and should be considered exemplary. The scope of the invention shall be determined by a reasonable interpretation of the appended claims, and all modifications within the equivalent scope of the invention are included within the scope of the invention.

Claims

1. A method for manufacturing a soft mold of multiple patterns having different first and second patterns formed therein, A step of preparing a first master mold having a first inverse pattern formed thereon, which is the inverse pattern of the first pattern above; A step of preparing a second master mold having a second inverse pattern formed thereon, which is the inverse pattern of the second pattern above; A step of forming the first pattern on the soft mold by imprinting the first master mold; A step of determining a location to imprint the second pattern on the soft mold; and A step of forming the second pattern on the soft mold by imprinting the second master mold according to the determined position above; A method for manufacturing a soft mold with multiple patterns including 2. In Paragraph 1, The step of determining the location to imprint is, Step of placing an alignment jig; and A step of loading the second master mold according to the alignment jig arranged above; A method for manufacturing a soft mold of multiple patterns, characterized by including 3. In Paragraph 2, A method for manufacturing a soft mold with multiple patterns, characterized in that the above alignment jig recognizes an alignment marker formed on the soft mold or the second master mold to determine the position of the second master mold.

4. In Paragraph 1, A step of forming a guideline on the soft mold in which the area of ​​the first pattern and the area of ​​the second pattern are marked; A step of aligning and imprinting the first master mold in the area of ​​the first pattern based on the above guideline; and A step of aligning and imprinting the second master mold in the area of ​​the second pattern based on the above guideline; A method for manufacturing a soft mold of multiple patterns, characterized by further including 5. In Paragraph 1, A step of cutting out a first region including the first inverse pattern from the first master mold; A step of cutting out a second region including the second pattern from the second master mold; and A step of joining the above-described first region and the above-described second region; A method for manufacturing a soft mold of multiple patterns, characterized by further including 6. In Paragraph 5, The first region and the second region are cut into corresponding shapes and processed to be mutually joinable, and A method for manufacturing a soft mold of multiple patterns, characterized in that the placement position of each pattern is attached according to a predetermined alignment standard by the above combination.

7. In Paragraph 1, The first pattern above is a pattern in which parallel grooves are repeated, and the sidewalls of the grooves are etched so as to be substantially perpendicular to the substrate surface, and A method for manufacturing a soft mold with multiple patterns, wherein the second pattern is a pattern in which parallel grooves are repeated, and the sidewalls of the grooves are etched at an angle inclined with respect to the substrate surface.

8. In Paragraph 7, A method for manufacturing a soft mold of multiple patterns, characterized in that the grooves of the first pattern or the second pattern are formed in a shape in which the depth gradually increases along the direction in which the grooves are arranged.

9. Entry; A first pattern formed on the above-mentioned substrate, wherein parallel grooves are repeatedly arranged such that the sidewalls are substantially perpendicular to the surface of the substrate; and A second pattern formed on the above-mentioned substrate, wherein parallel grooves are repeatedly arranged such that the sidewalls form an inclined angle with respect to the surface of the substrate; A multi-pattern soft mold characterized by including 10. In Paragraph 9, A soft mold of multiple patterns, characterized in that an alignment marker for positional alignment of the pattern is formed in the formation area of ​​the above-described first pattern or the above-described second pattern, respectively.

11. In Paragraph 9, A soft mold of multiple patterns characterized in that the first pattern and the second pattern are transferred from different master molds and formed on a single substrate.

12. In Paragraph 9, A multi-pattern soft mold characterized in that the grooves of the first pattern or the second pattern are formed in a shape in which the depth gradually increases along the direction in which the grooves are arranged.

13. In a manufacturing apparatus for a soft mold having different first and second patterns formed therein, A first transfer unit that imprints a first master mold to form the first pattern on the soft mold; A positioning unit for determining the position to imprint a second master mold on the soft mold; and A second transfer unit that forms a second pattern on the soft mold by imprinting the second master mold according to the determination of the positioning unit; A manufacturing apparatus for a multi-pattern soft mold characterized by including 14. In Paragraph 13, A manufacturing apparatus for a multi-pattern soft mold, characterized in that the positioning unit comprises an alignment jig arranged on the soft mold and a fixing spacer coupled to the alignment jig.

15. In Paragraph 13, A manufacturing apparatus for a multi-pattern soft mold, characterized in that the positioning unit includes a sensor that detects an alignment marker formed on the soft mold or master mold.

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