Pogo block and probe card comprising same

Abstract

A pogo block and a probe card comprising same are provided. The pogo block according to one aspect of the present invention comprises: a top plate having first holes passing through one and the other surfaces thereof; a bottom plate having second holes passing through one and the other surfaces thereof; a middle plate disposed between the top and bottom plates; top contactors inserted in the first holes; bottom contactors inserted in the second holes; and conductors disposed between the top and bottom plates, and each having one end electrically connected to a top contactor and the other end electrically connected to a bottom contactor.

Description

Pogo block and probe card including the same

[0001] The present invention relates to a pogo block and a probe card including the same, and more specifically, to a pogo block that is adjustable in length in the vertical direction and corresponds to each pad of a probe card, and a probe card including the same.

[0002] Generally, a wafer prober, a type of semiconductor inspection equipment, is a device that checks for defects by inspecting the electrical characteristics of semiconductor devices manufactured on a wafer immediately before it enters the back-end process, after the entire front-end process has been completed.

[0003] In a semiconductor wafer on which a plurality of semiconductor devices are formed, a probe is used as a wafer inspection device to inspect the electrical characteristics of each semiconductor device. The probe is equipped with a probe card having a probe provided on one side facing the wafer.

[0004] The probe card is equipped with a plurality of probes, which are contact terminals, on one surface facing each electrode pad or each solder bump of the semiconductor device on the wafer.

[0005] A plurality of probes provided on the probe card come into contact with the electrode pads or solder bumps of the semiconductor device, and by allowing each probe to flow a test signal to the electrical circuit of the semiconductor device connected to each electrode pad or each solder bump, the conduction status of the electrical circuit is tested.

[0006] The probe card is equipped with a pogo block on the opposite side of the probe that transmits a test signal to the test head side.

[0007] Conventionally, the pogo block is formed in a shape corresponding to the pads of the card constituting the probe card; in this case, the pads are composed of multiple parts and have various shapes or arrangements depending on the type of wafer or prober to be inspected.

[0008] The pogo block is equipped with an interposer containing a large number of pogo pins, and a single pogo block is connected to all the pads constituting the probe card.

[0009] Consequently, even if only some of the numerous interposers in the pogo block that come into contact with the probe card pads were damaged, replacing or repairing that part was very difficult because the pogo block is manufactured as a single unit.

[0010] In addition, as the size of the probe card increased, a problem occurred where bending occurred due to the load of the pogo block itself.

[0011] In addition, there was a problem where the entire pogo block had to be remanufactured or reprocessed if a small error occurred in a part of the manufacturing process due to the pogo block itself.

[0012] In addition, there were cases where the shape or arrangement of probe card pads was required differently depending on the situation; however, since the Pogo Block was manufactured as a single unit, there was a problem where the Pogo Block had to be remanufactured whenever the pad arrangement or shape of the probe card was modified.

[0013] The present invention is intended to solve the above-mentioned problems, and the objective of the present invention is to provide a pogo block corresponding to each pad and a probe card including the same.

[0014] Another objective of the present invention is to provide a pogo block with adjustable length in the vertical direction and a probe card including the same.

[0015] The problems of the present invention are not limited to those mentioned above, and other unmentioned problems will be clearly understood by a person skilled in the art to which the present invention pertains from the description below.

[0016] According to one aspect of the present invention, a pogo block is provided comprising: a top plate having a plurality of first holes formed penetrating one side and the other side; a bottom plate having a plurality of second holes formed penetrating one side and the other side; a middle plate disposed between the top plate and the bottom plate; a plurality of top contactors inserted into the first holes; a plurality of bottom contactors inserted into the second holes; and a conductor disposed between the top plate and the bottom plate, wherein one end is electrically connected to the top contactors and the other end is electrically connected to the bottom contactors.

[0017] At this time, the middle plate includes a plurality of third holes penetrating one side and the other side of the middle plate, and the conductor can penetrate the third holes.

[0018] At this time, it may further include a spacer disposed at one or more of the positions between the middle plate and the top plate or between the middle plate and the bottom plate.

[0019] At this time, the spacers are provided in multiple numbers, and are formed such that the sum of the thicknesses of the middle plate and the multiple spacers corresponds to a predetermined first distance, and a portion of the top contactor and the other end of the bottom contactor are inserted into the spacers, and the first distance may correspond to the sum of the distance between the one end of the conductor and the other end of the conductor and the depth to which the top contactor and the bottom contactor are inserted into the spacers.

[0020] At this time, the spacers are provided in multiple numbers, and the total thickness of the middle plate and the multiple spacers is formed to correspond to a predetermined first distance, and the first distance may correspond to the distance between one end of the conductor and the other end of the conductor.

[0021] At this time, the thickness of the middle plate is formed to correspond to a predetermined first distance, and a portion of the top contactor's end and the bottom contactor's other end are inserted into the middle plate, and the first distance may correspond to the sum of the distance between the conductor's end and the conductor's other end and the depth to which the top contactor and the bottom contactor are inserted into the middle plate.

[0022] At this time, the spacer includes a plurality of fourth holes penetrating one side and the other side of the spacer, and the conductor can be inserted into the fourth holes.

[0023] At this time, a plurality of fifth holes are formed penetrating one side and the other side, and a top holder disposed on the other side of the top plate is further included, and the top contactor can penetrate the first hole and the fifth hole simultaneously.

[0024] At this time, a plurality of sixth holes are formed penetrating one side and the other side, and a bottom holder disposed on one side of the bottom plate is further included, and the bottom contactor can penetrate the second hole and the sixth hole simultaneously.

[0025] At this time, at least one of the top contactor and the bottom contactor may be formed as a pogo pin.

[0026] At this time, the conductor may be formed in the shape of a bar extending in one direction.

[0027] At this time, the conductor includes the one end and the other end and a connecting part connecting the one end and the other end, wherein the one end and the other end may be formed in a shape that can be bent from the connecting part so as to be oriented in the same direction.

[0028] At this time, the conductor is formed as a flexible circuit board, and the portion in contact with the top contactor and the bottom contactor may be formed of an electrically conductive material.

[0029] At this time, the top plate, the bottom plate, and the middle plate may have a cross-sectional shape formed by cutting a plane parallel to one side of the top plate in the form of a two-dimensional closed curved surface or a closed plane.

[0030] At this time, at least one of the top plate or the bottom plate may further include a first refrigerant flow path through which refrigerant can flow.

[0031] At this time, one or more of the spacer or the middle plate may further include a first refrigerant flow path through which refrigerant can flow.

[0032] According to another aspect of the present invention, a probe card is provided comprising: a plurality of pogo blocks; and a card comprising a plurality of pads on one surface to which a plurality of pogo blocks are fastened.

[0033] At this time, the plurality of pads are formed in two or more different shapes, and the plurality of pogo blocks may be formed in two or more different shapes such that the shape of the cross-section perpendicular to the length direction of the pogo block corresponds to the pads.

[0034] At this time, the pogo block may be detachable from the pad.

[0035] At this time, a second refrigerant path passing through a plurality of the above-mentioned pogo blocks or the above-mentioned cards may be further included.

[0036] At this time, a heating channel passing through the surface of the card may be further included.

[0037] According to the above configuration, the pogo block and the probe card including the same according to one aspect of the present invention are advantageous for corresponding to the pad arrangement state or pad shape of the probe card by using a pogo block that corresponds one-to-one to the pad of the probe card.

[0038] According to another aspect of the present invention, a pogo block and a probe card including the same make it easy to use by replacing only the relevant part when a problem occurs with a specific pogo block.

[0039] A pogo block and a probe card including the same according to another aspect of the present invention can adjust the height of the probe card according to the situation by adjusting the length of the pogo block.

[0040] The effects of the present invention are not limited to the effects described above, and should be understood to include all effects that can be inferred from the configuration of the invention described in the detailed description or claims of the present invention.

[0041] FIG. 1 is a perspective view illustrating a pogo block according to one embodiment of the present invention.

[0042] FIG. 2 is a front view illustrating a pogo block according to one embodiment of the present invention.

[0043] FIG. 3 is a top view illustrating a pogo block according to one embodiment of the present invention.

[0044] FIG. 4 is a bottom view illustrating a pogo block according to one embodiment of the present invention.

[0045] Figure 5 is a cross-sectional view illustrating the AA' section of Figure 4.

[0046] FIG. 6 is a diagram showing a disassembled view of a pogo block according to one embodiment of the present invention.

[0047] FIG. 7 is a drawing illustrating a partial configuration including a top plate of a pogo block according to one embodiment of the present invention.

[0048] FIG. 8 is a drawing illustrating a partial configuration including a middle plate of a pogo block according to one embodiment of the present invention.

[0049] FIG. 9 is a drawing illustrating a partial configuration including a bottom plate of a pogo block according to one embodiment of the present invention.

[0050] FIG. 10 is a drawing illustrating a pogo block according to another embodiment of the present invention.

[0051] FIG. 11 is a diagram showing a disassembled view of a pogo block according to another embodiment of the present invention illustrated in FIG. 10.

[0052] FIG. 12 is a top view illustrating a flexible circuit board of a pogo block according to another embodiment of the present invention.

[0053] FIG. 13 is a top view illustrating a probe card according to one embodiment of the present invention.

[0054] FIG. 14 is a top view illustrating a modified pad arrangement of a probe card according to one embodiment of the present invention.

[0055] Figure 15 is a diagram illustrating the use of a conventional probe card.

[0056] FIG. 16 is a drawing illustrating the use of a probe card according to one embodiment of the present invention.

[0057] FIG. 17 is a drawing showing a refrigerant flow path applied to the top plate of a pogo block according to one embodiment of the present invention.

[0058] FIG. 18 is a drawing showing a cross-sectional view of a top plate of a pogo block according to one embodiment of the present invention with a refrigerant flow path applied thereto.

[0059] FIG. 19 is a drawing illustrating a plurality of refrigerant flow paths applied to a pogo block according to one embodiment of the present invention.

[0060] FIG. 20 is a drawing illustrating the application of a refrigerant flow path and a heat generation flow path to a probe card according to one embodiment of the present invention.

[0061] Hereinafter, embodiments of the present invention are described in detail with reference to the attached drawings so that those skilled in the art can easily implement the present invention. The present invention may be embodied in various different forms and is not limited to the embodiments described herein. In the drawings, parts unrelated to the explanation have been omitted to clearly explain the present invention, and the same reference numerals have been used for identical or similar components throughout the specification.

[0062] The words and terms used in this specification and claims are not limited to their ordinary or dictionary meanings, but should be interpreted in a meaning and concept consistent with the technical spirit of the invention in accordance with the principles by which the inventor defines terms and concepts to best describe his invention.

[0063] In this specification, terms such as “comprising” or “having” are intended to describe the existence of the features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, and should not be understood as precluding the existence or addition of one or more other features, numbers, steps, actions, components, parts, or combinations thereof.

[0064] The statement that a component is "in front," "rear," "upper," or "lower" of another component includes, unless there are special circumstances, not only being positioned "in front," "rear," "upper," or "lower" in direct contact with the other component, but also cases where another component is positioned in between. Furthermore, the statement that a component is "connected" to another component includes, unless there are special circumstances, not only being directly connected to each other, but also being indirectly connected to each other.

[0065] Thickness or size has been exaggerated in the drawings to clearly express the characteristics of the configuration, and the thickness or size of the configuration shown in the drawings is not necessarily the same as the actual value.

[0066] In describing the drawings below, each direction is defined and described based on the coordinate axes shown in FIG. 1. More specifically, the positive direction of the x-axis is defined as forward, and the negative direction of the x-axis is defined as backward. The positive direction of the y-axis is defined as right, and the negative direction of the y-axis is defined as left. The positive direction of the z-axis is defined as upward, and the negative direction of the z-axis is defined as downward.

[0067] In the following description, descriptions of some components may be omitted to clarify the features of the present invention.

[0068] A pogo block and a probe card including the same according to one embodiment of the present invention are pogo blocks and probe cards including the same that are adjustable in length in the vertical direction and correspond to each pad of the probe card.

[0069] FIG. 1 is a perspective view illustrating a pogo block according to an embodiment of the present invention. FIG. 2 is a front view illustrating a pogo block according to an embodiment of the present invention. FIG. 3 is a top view illustrating a pogo block according to an embodiment of the present invention. FIG. 4 is a bottom view illustrating a pogo block according to an embodiment of the present invention. FIG. 5 is a cross-sectional view illustrating the AA' section of FIG. 4. FIG. 6 is a diagram illustrating a disassembled view of a pogo block according to an embodiment of the present invention. FIG. 7 is a diagram illustrating a partial configuration including a top plate of a pogo block according to an embodiment of the present invention. FIG. 8 is a diagram illustrating a partial configuration including a middle plate of a pogo block according to an embodiment of the present invention. FIG. 9 is a diagram illustrating a partial configuration including a bottom plate of a pogo block according to an embodiment of the present invention.

[0070] A pogo block (10) according to one embodiment of the present invention includes an interposer (200) that transmits an electrical signal and a housing (100) into which the interposer (200) is inserted.

[0071] At this time, the housing (100) may include a top plate (110) located on the upper side, a bottom plate (120) located on the lower side, and a middle plate (130) located between the top plate (110) and the bottom plate (120).

[0072] The interposer (200) may include a top contactor (210) penetrating the top plate (110), a bottom contactor (220) penetrating the bottom plate (120), and a conductor (230) electrically connecting the top contactor (210) and the bottom contactor (220).

[0073] At this time, the top contactor (210), the bottom contactor (220), and the conductor (230) may be formed of an electrically conductive material. For example, the top contactor (210), the bottom contactor (220), and the conductor (230) may be formed of metal.

[0074] At this time, the top contactor (210) and the bottom contactor (220) may be Pogo Pins.

[0075] A top plate (110) may have a first hole (111) formed through the upper surface (112) and the lower surface, and a top contactor (210) may be inserted into the first hole (111).

[0076] At this time, referring to FIGS. 1 and 2 and FIGS. 5 to 7, the top contactor (210) is inserted into the first hole (111) such that a portion of it penetrates the first hole (111), and a portion of it may protrude from the upper surface (112) of the top plate (110).

[0077] Meanwhile, a top holder (150) that penetrates together with the top plate (110) by a top contactor (210) may be disposed on the lower side of the top plate (110).

[0078] A top holder (150) may have a fifth hole (151) formed through the upper and lower surfaces, and a top contactor (210) protruding downward from the top plate (110) through the first hole (111) may be inserted into the fifth hole (151).

[0079] To this end, the fifth hole (151) can be formed at a position that overlaps with the first hole (111) when viewed from the vertical direction.

[0080] Referring to FIG. 6, when the top contactor (210) is inserted into the first hole (111) and the fifth hole (151), the top contactor (210) may have its upper end protruding from the upper surface (112) of the top plate (110) and its lower end protruding from the lower surface of the top holder (150).

[0081] Meanwhile, the bottom plate (120) may have a second hole (121) formed through the upper surface and the lower surface (124), and a bottom contactor (220) may be inserted into the second hole (121).

[0082] At this time, referring to FIGS. 5, 6 and 9, the bottom contactor (220) is inserted into the second hole (121) such that a portion of it penetrates the second hole (121), and a portion of it may protrude from the lower surface (122) of the bottom plate (120).

[0083] Meanwhile, a bottom holder (160) that penetrates together with the bottom plate (120) by means of a bottom contactor (220) may be disposed on the upper side of the bottom plate (120).

[0084] A bottom holder (160) may have a sixth hole (161) formed through the upper and lower surfaces, and a bottom contactor (220) protruding upward from the bottom plate (120) through the second hole (121) may be inserted into the sixth hole (161).

[0085] To this end, the sixth hole (161) can be formed at a position that overlaps with the second hole (121) when viewed from the vertical direction.

[0086] Referring to FIG. 6, when the bottom contactor (220) is inserted into the second hole (121) and the sixth hole (161), the bottom contactor (220) may have its lower end protruding from the lower surface (124) of the bottom plate (120) and its upper end protruding from the upper surface of the bottom holder (160).

[0087] Meanwhile, the middle plate (130) may have a third hole (131) formed through the upper and lower surfaces, and a conductor (230) may be inserted into the third hole (131).

[0088] Accordingly, the conductor (230) can be connected to the top contactor (210) and the bottom contactor (220) while inserted into the third hole (131).

[0089] At this time, the conductor (230) can be formed in the shape of a bar extending in the vertical direction.

[0090] However, the shape of the conductor (230) is not necessarily limited to a bar shape, and is not limited as long as it is a shape that can electrically connect the top contactor (210) and the bottom contactor (220). An embodiment in which the conductor (230) is modified into a different shape will be described later.

[0091] The conductor (230) can be formed in various shapes, but depending on the shape of the conductor (230), the distance between the top contactor (210) and the bottom contactor (220) that the conductor (230) can electrically connect may vary.

[0092] Accordingly, the pogo block (10) and the probe card (1) including the same according to one embodiment of the present invention can vary the distance between the top contactor (210) and the bottom contactor (220) by changing the shape of the conductor (230).

[0093] Accordingly, the pogo block (10) and the probe card (1) including the same according to one embodiment of the present invention can change the overall vertical length of the pogo block (10) and the probe card (1) including the same by varying the distance between the top contactor (210) and the bottom contactor (220).

[0094] Referring to FIGS. 1 and 2, FIGS. 5 and 6, and FIGS. 8, spacers (140) may be disposed on the upper and lower surfaces of the middle plate (130), respectively.

[0095] As illustrated, if the distance between the top contactor (210) and the bottom contactor (220) is greater than the vertical thickness of the middle plate (130), one or more spacers (140) may be placed on the upper or lower surface of the middle plate (130) to fill the distance between the top contactor (210) and the bottom contactor (220).

[0096] At this time, the end portion of the top contactor (210) protruding on the lower surface of the top plate (110) or the lower surface of the top holder (150) can be inserted into the spacer (140) to a depth equal to the length protruding downward.

[0097] Accordingly, the end portion of the top contactor (210) can be inserted into the spacer (140) by a predetermined insertion depth (d1).

[0098] Meanwhile, the end portion of the bottom contactor (220) protruding on the upper surface of the bottom plate (120) or the upper surface of the bottom holder (160) can be inserted into the spacer (140) to a depth equal to the length protruding upward.

[0099] Accordingly, the end portion of the bottom contactor (220) can be inserted into the spacer (140) by a predetermined insertion depth (d2).

[0100] Accordingly, a gap of a predetermined second distance (L2) can be formed between the end portion of the top contactor (210) and the end portion of the bottom contactor (220).

[0101] In the case where the conductor (230) according to one embodiment of the present invention is formed of a bar-shaped conductive material, the length of the conductor (230) may correspond to a second distance (L2).

[0102] Accordingly, the upper end of the conductor (230) is in contact with the top contactor (210), and the lower end of the conductor (230) is in contact with the bottom contactor (220), so that the conductor (230) can electrically connect the top contactor (210) and the bottom contactor (220).

[0103] At this time, a fourth hole (141) penetrating the upper and lower surfaces of the spacer (140) may be formed in the spacer (140) according to one embodiment of the present invention. When the conductor (230) is formed of a bar-shaped conductive material, the conductor (230) may be inserted into the fourth hole (141).

[0104] More specifically, the spacer (140) may be positioned on the upper and lower sides of the middle plate (130). At this time, a conductor (230) inserted into the third hole (131) of the middle plate (130) may have a portion protruding toward the upper or lower side of the middle plate (130). The portion of the conductor (230) protruding toward the upper or lower side of the middle plate (130) may be inserted into the fourth hole (141) of the spacer (140) positioned on the upper and lower sides of the middle plate (130), respectively.

[0105] At this time, the first distance (L1), which is the total distance obtained by adding the total thickness (w1) of the spacer (140) placed on the upper side of the middle plate (130), the total thickness (w2) of the spacer (140) placed on the lower side of the middle plate (130), and the thickness (w3) of the middle plate (130), may be the same as the distance between the end portion of the top contactor (210) and the end portion of the bottom contactor (220), the insertion depth (d1) in which the top contactor (210) is inserted into the spacer (140), and the insertion depth (d2) in which the bottom contactor (220) is inserted into the spacer (140).

[0106] This may also be the distance between the end portion and the other portion of the conductor (230), plus the insertion depth (d1) of the top contactor (210) and the insertion depth (d2) of the bottom contactor (220).

[0107] As in the illustrated embodiment, when the conductor (230) is formed in a bar shape and one end and the other end of the conductor (230) are in contact with the bottom of the top contactor (210) and the top of the bottom contactor (220), respectively, the first distance (L1) may be the length of the conductor (230) plus the insertion depth (d1) of the top contactor (210) and the insertion depth (d2) of the bottom contactor (220).

[0108] At this time, the total thickness (w1) of the spacer (140) positioned on the upper side of the middle plate (130) may be the sum of the thicknesses of the multiple spacers (140) positioned on the upper side of the middle plate (130) when multiple spacers (140) are positioned on the upper side of the middle plate (130).

[0109] At this time, a plurality of spacers (140) having different thicknesses may be arranged on the upper side of the middle plate (130), and it is not limited to a plurality of spacers (140) having a constant thickness being arranged or a single spacer (140) being arranged.

[0110] Likewise, the total thickness (w2) of the spacer (140) positioned on the lower side of the middle plate (130) may be the sum of the thicknesses of the multiple spacers (140) positioned on the lower side of the middle plate (130) when multiple spacers (140) are positioned on the lower side of the middle plate (130).

[0111] At this time, a plurality of spacers (140) having different thicknesses may be arranged on the lower side of the middle plate (130), and it is not limited to arranging a plurality of spacers (140) having a constant thickness or arranging a single spacer (140).

[0112] However, since the present invention is not limited to cases where at least one spacer (140) is disposed on the upper or lower side of the middle plate (130), if a spacer (140) is not disposed on the upper or lower side of the middle plate (130), the total thickness (w1) of the spacer (140) disposed on the upper side of the middle plate (130) or the total thickness (w2) of the spacer (140) disposed on the lower side of the middle plate (130) can be calculated as 0.

[0113] For example, if spacers (140) are not placed on both the upper and lower sides of the middle plate (130), the total thickness (w1) of the spacers (140) placed on the upper side and the total thickness (w2) of the spacers (140) placed on the lower side of the middle plate (130) can be calculated as 0.

[0114] At this time, the first distance (L1) may correspond to the sum of the distance (L2) between one end of the conductor (230) and the other end of the conductor (230), and the depth to which the top contactor (210) and the bottom contactor (220) are inserted into the middle plate (130). In this case, the thickness (w3) of the middle plate (130) may be formed to have the same value as the first distance (L1).

[0115] Accordingly, the pogo block (10) and the probe card (1) including the same according to one embodiment of the present invention can adjust the vertical length of the pogo block (10) and the probe card (1) including the same by adjusting the length or shape of the conductor (230).

[0116] Meanwhile, referring to FIGS. 3 and 4, a pogo block (10) according to one embodiment of the present invention may include a plurality of top contactors (210) and a plurality of bottom contactors (220).

[0117] At this time, the top contactor (210) and the bottom contactor (220) can be arranged in a predetermined shape on the top plate (110) and the bottom plate (120), respectively.

[0118] For example, the top contactor (210) and the bottom contactor (220) may be arranged to have an octagonal shape when viewed from the top and bottom directions, as shown in FIGS. 3 and 4.

[0119] At this time, the pogo block (10) according to one embodiment of the present invention may be formed into a square shape when a cross-section perpendicular to the vertical direction is cut as shown in the illustration, but is not necessarily limited thereto and may be formed into various shapes depending on the pad shape of the probe card (1).

[0120] For example, the pogo block (10) can be formed into a circular or elliptical shape when a cross-section perpendicular to the vertical direction is cut, and it can also be formed into a polygonal shape including a triangle or a hexagon.

[0121] In addition, the pogo block (10) according to one embodiment of the present invention is not limited to the shape described above, and may be formed in the shape of a two-dimensional closed curved surface or a closed plane when a cross-section perpendicular to the vertical direction is cut.

[0122] Accordingly, the top plate (110), bottom plate (120), and middle plate (130) constituting the pogo block (10) may have a cross-sectional shape formed as a two-dimensional closed curved surface or a closed plane when a cross-section perpendicular to the vertical direction is cut.

[0123] Additionally, accordingly, the top contactor (210) and the bottom contactor (220) can be arranged to have various patterns when viewed from the vertical direction, as shown in FIGS. 3 and 4.

[0124] Meanwhile, referring to FIGS. 3 to 9, a predetermined coupling member (310) and a fixing member (320) may be used to maintain the shape of the pogo block (10) according to one embodiment of the present invention.

[0125] The connecting member (310) can connect the top plate (110), top holder (150), spacer (140), and middle plate (130) in the vertical direction from the upper side of the pogo block (10). At the same time, the fixing member (320) can fix the top plate (110), top holder (150), and spacer (140) so that they do not shake in the left and right directions.

[0126] Likewise, the connecting member (310) can connect the bottom plate (120), bottom holder (160), spacer (140), and middle plate (130) in the vertical direction from the lower side of the pogo block (10). In addition, the fixing member (320) can fix the bottom plate (120), bottom holder (160), and spacer (140) so that they do not shake in the left and right directions.

[0127] To this end, with reference to FIG. 3, the top plate (110) may be provided with a first coupling hole (113) into which a coupling member (310) can be coupled, and a first fixing hole (115) into which a fixing member (320) can be inserted.

[0128] Additionally, the bottom plate (120) may be provided with a second coupling hole (123) into which a coupling member (310) can be coupled, and a second fixing hole (125) into which a fixing member (320) can be inserted.

[0129] Additionally, the middle plate (130) may be provided with a third coupling hole (133) into which a coupling member (310) can be coupled, and a third fixing hole (135) into which a fixing member (320) can be inserted.

[0130] Additionally, the spacer (140) may be provided with a fourth coupling hole (143) into which a coupling member (310) can be coupled, and a fourth fixing hole (145) into which a fixing member (320) can be inserted.

[0131] Additionally, the top holder (150) may be provided with a fifth coupling hole (153) into which a coupling member (310) can be coupled, and a fifth fixing hole (155) into which a fixing member (320) can be inserted.

[0132] Additionally, the bottom holder (160) may be provided with a sixth coupling hole (163) into which a coupling member (310) can be coupled, and a sixth fixing hole (165) into which a fixing member (320) can be inserted.

[0133] At this time, in order to combine the top plate (110), top holder (150), spacer (140), and middle plate (130) in the vertical direction, one connecting member (310) can simultaneously penetrate the first connecting hole (113), the fifth connecting hole (153), the fourth connecting hole (143), and the third connecting hole (133).

[0134] To this end, the first coupling hole (113), the fifth coupling hole (153), the fourth coupling hole (143), and the third coupling hole (133) can be positioned at the same location when viewed from the vertical direction.

[0135] In addition, the first coupling hole (113), the fifth coupling hole (153), the fourth coupling hole (143), and the third coupling hole (133) may be located in each directional corner portion of the pogo block (10) as shown in FIG. 3 in order to form a balanced structure of the pogo block (10).

[0136] Likewise, in order to combine the bottom plate (120), bottom holder (160), spacer (140), and middle plate (130) in the vertical direction, one connecting member (310) can simultaneously penetrate the second connecting hole (123), the sixth connecting hole (163), the fourth connecting hole (143), and the third connecting hole (133).

[0137] To this end, the second coupling hole (123), the sixth coupling hole (163), the fourth coupling hole (143), and the third coupling hole (133) can be positioned at the same location when viewed from the vertical direction.

[0138] In addition, the second coupling hole (163), the sixth coupling hole (163), the fourth coupling hole (143), and the third coupling hole (133) may be located in each directional corner portion of the pogo block (10) as shown in FIG. 4 in order to form a balanced structure of the pogo block (10).

[0139] A fixing member (320) is inserted vertically into the top plate (110), top holder (150), and spacer (140) to fix it so that it does not shake in the left and right directions, and one fixing member (320) can simultaneously penetrate the first fixing hole (115), the fifth fixing hole (155), and the fourth fixing hole (145).

[0140] To this end, the first fixing hole (115), the fifth fixing hole (155), and the fourth fixing hole (145) can be positioned at the same location when viewed from the vertical direction.

[0141] In addition, the first fixing hole (115), the fifth fixing hole (155), and the fourth fixing hole (145) may be located in each direction corner portion of the pogo block (10) as shown in FIG. 3 in order to form a balanced structure of the pogo block (10).

[0142] Likewise, the fixing member (320) is inserted vertically into the bottom plate (120), bottom holder (160), and spacer (140) to fix it so as not to shake in the left-right direction, and one fixing member (320) can simultaneously penetrate the second fixing hole (125), the sixth fixing hole (165), and the fourth fixing hole (145).

[0143] To this end, the second fixing hole (125), the sixth fixing hole (165), and the fourth fixing hole (145) can be positioned at the same location when viewed from the vertical direction.

[0144] In addition, the second fixing hole (125), the sixth fixing hole (165), and the fourth fixing hole (145) may be located in each direction corner portion of the pogo block (10) as shown in FIG. 3 in order to form a balanced structure of the pogo block (10).

[0145] However, the configuration and location of the connecting member (310), the fixing member (320), and the hole into which the connecting member (310) and the fixing member (320) are inserted are not necessarily limited to this.

[0146] The configuration and position of the connecting member (310), the fixing member (320), and the hole into which the connecting member (310) and the fixing member (320) are inserted are not limited as long as the pogo block (10) and the probe card (1) including it according to one embodiment of the present invention can be adjusted in length in the vertical direction and the pogo block (10) can be detachably coupled to each pad of the probe card (1).

[0147] FIG. 10 is a drawing illustrating a pogo block according to another embodiment of the present invention. FIG. 11 is a drawing illustrating a disassembled view of the pogo block according to another embodiment of the present invention illustrated in FIG. 10. FIG. 12 is a top view illustrating a flexible circuit board of a pogo block according to another embodiment of the present invention.

[0148] As described above, the shape of the conductor (230) of the present invention is not necessarily limited to a bar shape, and is not limited as long as it is a shape that can electrically connect the top contactor (210) and the bottom contactor (220).

[0149] For example, as illustrated in FIGS. 10 to 12, a conductor (230) according to another embodiment of the present invention may be formed as a flexible circuit board (240) that can be bent.

[0150] More specifically, a conductor (230) according to another embodiment of the present invention includes a first end (242), a second end (244), and a connecting part (246) connecting the first end (242) and the second end (244), and the first end (242) and the second end (244) may be formed in a shape that can be bent from the connecting part (246) so as to be oriented in the same direction.

[0151] At this time, the conductor (230) according to another embodiment of the present invention is formed as a flexible circuit board (240), and the portion in contact with the top contactor (210) and the bottom contactor (220) can be formed of an electrically conductive material.

[0152] In this case, the flexible circuit board (240) does not penetrate the spacer (140) and the middle plate (130), and one end (242) may be positioned between the spacer (140) and the top holder (150), and the other end (244) may be positioned between the spacer (140) and the bottom holder (160). Additionally, a connecting part (246) may be positioned on the outer surface of the spacer (140) and the middle plate (130) to connect the one end (242) and the other end (244).

[0153] At this time, the lower end of the top contactor (210) protruding downward from the top holder (150) may come into contact with the contact portion (241) formed on one end (242) of the flexible circuit board (240). Additionally, the upper end of the bottom contactor (220) protruding upward from the bottom holder (160) may come into contact with the contact portion (not shown) formed on the other end (244) of the flexible circuit board (240).

[0154] In this case, the first distance (L1), which is the total distance obtained by adding the total thickness (w1) of the spacer (140) placed on the upper side of the middle plate (130), the total thickness (w2) of the spacer (140) placed on the lower side of the middle plate (130), and the thickness (w3) of the middle plate (130), may be the same distance as the distance between one end (242) and the other end (244) of the flexible circuit board (240) shown in FIGS. 10 to 11.

[0155] FIG. 13 is a top view illustrating a probe card according to an embodiment of the present invention. FIG. 14 is a top view illustrating a state in which the pad arrangement of a probe card according to an embodiment of the present invention has been changed.

[0156] Referring to FIG. 13, a pad (520) to which a pogo block (10) is coupled may be disposed on the upper surface (510) of the card (20) constituting the probe card (1).

[0157] At this time, as illustrated, the pad (520) may be composed of a plurality of pads (521, 522, 523, 524) having different sizes and shapes.

[0158] At this time, the probe card (1) according to one embodiment of the present invention may have a plurality of pogo blocks (10) having a shape corresponding to each pad (521, 522, 523, 524).

[0159] For example, if a total of 140 pads (520) are provided on the card (20) of the probe card (1), 140 pogo blocks (10) corresponding to the shape of each pad (520) may be provided.

[0160] At this time, if the card (20) of the probe card (1) is equipped with four types of pads (521, 522, 523, 524), four types of pogo blocks (10) corresponding to the shapes of the four types of pads (521, 522, 523, 524) may be provided.

[0161] In addition, as shown in FIGS. 13 and 14, if the number or arrangement of pads (520) placed on the card (20) of the probe card (1) changes, it is possible to change the pogo block (10) corresponding to the part where the pads (520) have changed.

[0162] For example, as shown in FIG. 14, if a pad (520) is not placed in the place where a pad (520) was previously placed and an empty pattern (525) is formed, the pogo block (10) that was coupled to the pad (520) placed in the place where the empty pattern (525) is located can be removed to correspond to the pattern of the changed pad (520).

[0163] In addition, not limited to this, even when the positions of the previously arranged pads of different shapes (521, 522, 523, 524) are changed to different positions or swapped with each other, the pogo block (10) at the corresponding position can be replaced to accommodate various patterns formed according to the arrangement of the pads (520).

[0164] In addition, if a problem occurs, such as damage or failure of some of the pogo blocks (10) that were coupled to the pad (520) of the probe card (1) according to one embodiment of the present invention, it is possible to replace only the pogo block (10) at the corresponding location.

[0165] In addition, if a problem occurs, such as some of the pogo blocks (10) being damaged or malfunctioning, the pogo blocks (10) can be inspected in a simple manner by removing only the problematic pogo blocks (10).

[0166] In addition, if a defect occurs in a part of the manufacturing process of the pogo block (10), it is possible to manufacture only the corresponding pogo block (10) and combine it with the pad (520) instead of manufacturing the entire pogo block (10) again.

[0167] In addition, it is also possible to combine a single pogo block (10) with probe cards (1) of different sizes.

[0168] For example, a pogo block (10) that was used to inspect a DRAM wafer with a relatively large number of pads (520) can be removed from the probe card (1) and used to inspect a NAND wafer with a relatively small number of pads (520).

[0169] In addition, to avoid vertical length constraints that may occur when replacing the pogo block (10) and using it in various environments, the vertical length of the probe card (1) can be adjusted by adjusting the length of the interposer (200) and spacer (140) applied to the pogo block (10).

[0170] At this time, the top contactor (210) and bottom contactor (220) of the interposer (200) of the pogo block (10) can be maintained as they are, and only the conductor (230) connecting the top contactor (210) and bottom contactor (220) can be replaced to adjust the vertical length of the pogo block (10).

[0171] In addition, the vertical length of the pogo block (10) can be adjusted by changing the type or number of spacers (140) while maintaining the top plate (110), bottom plate (120), top holder (150), and bottom holder (160) to which the top contactor (210) and bottom contactor (220) are respectively connected.

[0172] Figure 15 is a diagram illustrating the use of a conventional probe card.

[0173] Referring to FIG. 15, the conventional probe card (1') includes a conventional card (20') with a probe (30) mounted on the lower side, a conventional interposer (10') mounted on the upper side of the conventional card (20'), a printed circuit board (40') and a reinforcing plate (50') connected to the upper side of the interposer (10'), and a conventional pogo block (10'') disposed within the reinforcing plate (50'), coupled to the printed circuit board (40') on one side and coupled to the test head (2) on the other side.

[0174] In a conventional probe card (1'), a plurality of interposers (10') were connected to a printed circuit board (40') placed at the bottom of a conventional pogo block (10''), but as the number of interposers (10') increased, there was a problem in that the printed circuit board (40') supporting the weight of the interposers (10') would bend.

[0175] Accordingly, a reinforcing plate (50') is provided to prevent bending of the printed circuit board (40'), thereby reinforcing the rigidity of the printed circuit board (40').

[0176] As the area of ​​the interposer (10') connected to the printed circuit board (40') increases, the bending load applied to the printed circuit board (40') increases, and in response, the thickness of the reinforcing plate (50') and the printed circuit board (40') increases.

[0177] As a result, the conventional probe card (1') had a problem of becoming unnecessarily thick in the vertical direction as the thickness of the reinforcing plate (50'), the thickness of the printed circuit board (40'), the length of the interposer (20'), and the thickness of the card (20') were added together.

[0178] In addition, to cope with bending loads, the reinforcing plate (50') is formed with an area smaller than the area of ​​the test head (2), and the printed circuit board (40') is formed with an area smaller than the area of ​​the reinforcing plate (50'). Accordingly, the bonding area of ​​the interposer (10') bonded on the printed circuit board (40') is also formed to be smaller than the area of ​​the printed circuit board (40').

[0179] Accordingly, the card (20') of the conventional probe card (1') is formed with a narrow area to account for bending load.

[0180] As the conventional probe card (1') is formed with a narrow area, the size of the wafer (3') inspected by the conventional probe card (1') is also limited.

[0181] FIG. 16 is a drawing illustrating the use of a probe card according to one embodiment of the present invention.

[0182] A probe card (1) having a pogo block (10) according to one embodiment of the present invention may include a card (20), a plurality of probes (30) provided on the lower surface of the card (20), and a pogo block (10) individually coupled to a pad (520) provided on the upper surface of the card (20).

[0183] At this time, according to one embodiment of the present invention, each pogo block (10) may have one end connected to a test head (2) and the other end connected to a pad (520).

[0184] Accordingly, as shown in FIG. 16, by connecting a test head (2) and a card (20) with a plurality of pogo blocks (10) separated from each other, the bending load problem that occurs when combined with a printed circuit board (40') with weak bending rigidity can be resolved.

[0185] Additionally, the top of each pogo block (10) is connected to the test head (2), and as all pogo blocks (10) support the card (20) together, the card (20) can be firmly supported.

[0186] Along with this, as the bending load problem is resolved, the pogo block (10) can be connected to the lower part of the test head (2) with a wide connection area, and accordingly, the card (20) connected to the pogo block (10) can also be formed with a wider area than the conventional card (20').

[0187] In addition, as the area of ​​the card (20) increases, the bending load caused by the weight of the card (20) and the probe (30) is supported by multiple pogo blocks (10), so the bending problem of the probe card (1) can be prevented.

[0188] At this time, the card (20) according to one embodiment of the present invention may have an internal circuit formed such that a pad (520) is positioned at a location corresponding to the arrangement of the pogo block (10).

[0189] Conversely, a pogo block (10) according to one embodiment of the present invention may be formed with a shape corresponding to the shape of each pad (520) of a card (20) with a larger surface area than conventional ones, and may be placed at the location of each pad (520).

[0190] In addition, as the pogo block (10) is directly connected to the test head (2), the probe card (1) can be formed without the reinforcing plate (50') and printed circuit board (40') that were provided in the conventional probe card (1'), making it possible to form a thin thickness in the vertical direction.

[0191] In addition, according to one embodiment of the present invention, if the shape or pattern of the pad (520) formed on the card (20) of the probe card (1) is changed as described above, the probe card (1) can be configured to respond by replacing the pogo block (10) coupled to the part where the pad (520) is changed.

[0192] In addition, in the case of a conventional probe card (1'), since numerous interposers (10') are coupled at positions corresponding to the pads (520), it was very difficult to replace or repair the corresponding interposer (10') among the numerous interposers (10') if a problem occurred with a specific interposer (10'). As mentioned above, the conventional pogo block was manufactured as an integrated pogo block coupled to all pads (520) at once, so there was a problem that if a problem occurred with a specific interposer (10'), the entire part had to be remanufactured.

[0193] In the case of a probe card (1) according to one embodiment of the present invention, for each pad (520), each pogo block (10) corresponding to the shape of the pad (520) can be separated and combined with each other. Accordingly, in the probe card (1) according to one embodiment of the present invention, it is easy to replace or repair only the pogo block (10) where a problem has occurred.

[0194] In addition, since the probe card (1) according to one embodiment of the present invention enables inspection of a larger area relative to the test head (2) compared to the conventional probe card (1'), the probe card (1) according to one embodiment of the present invention enables inspection of a wafer (3) with an even larger area compared to the conventional probe card (1').

[0195] FIG. 17 is a drawing showing a refrigerant flow path applied to the top plate of a pogo block according to an embodiment of the present invention. FIG. 18 is a drawing showing a refrigerant flow path applied to the top plate of a pogo block according to an embodiment of the present invention, along with a cross-section. FIG. 19 is a drawing showing a plurality of refrigerant flow paths applied to a pogo block according to an embodiment of the present invention. FIG. 20 is a drawing showing a refrigerant flow path and a heat generation flow path applied to a probe card according to an embodiment of the present invention.

[0196] In one embodiment of the present invention, a pogo block (10) and a probe card (1) including the same may have a refrigerant path (410, 420) and a heat generation path (430) applied.

[0197] At this time, the refrigerant path (410, 420) can be applied to both the pogo block (10) and the card (20).

[0198] For example, referring to FIGS. 17 to 19, in a pogo block (10) according to one embodiment of the present invention, a first refrigerant flow path (410) may be embedded in a predetermined component such as a top plate (110) or a bottom plate (120), or a first refrigerant flow path (410) may be embedded across several components of the pogo block (10).

[0199] Accordingly, as shown in FIGS. 17 and 18, the inlet (411) and outlet (413) of the first refrigerant flow path (410) may be formed in a certain component such as a top plate (110) or a bottom plate (120), and as shown in FIGS. 19, the inlet and outlet of the first refrigerant flow path (410) may be formed across multiple components.

[0200] Additionally, as shown in FIG. 20, a probe card (1) combined with a pogo block (10) and a card (20) may also be provided with a second refrigerant path (420) passing through a plurality of pogo blocks (10) or cards (20).

[0201] At this time, the second refrigerant path (420) may be formed to have one inlet (421) and one outlet (423) for each predetermined number of pogo blocks (10).

[0202] In addition, a probe card (1) according to one embodiment of the present invention may have a heating channel (430) passing through the upper or lower surface of the probe card (1).

[0203] Accordingly, the probe card (1) according to one embodiment of the present invention can cool the internal heat using the refrigerant flow path (410, 420) and smoothly discharge the heat using the heat generation flow path (430).

[0204] Although embodiments of the present invention have been described above, the spirit of the present invention is not limited to the embodiments presented in this specification. Those skilled in the art who understand the spirit of the present invention may easily propose other embodiments within the scope of the same spirit by adding, changing, deleting, or adding components, and such embodiments shall also be considered to fall within the scope of the spirit of the present invention.

Claims

1. A top plate having a plurality of first holes formed that penetrate one side and the other side; A bottom plate having a plurality of second holes formed that penetrate one side and the other side; A middle plate positioned between the top plate and the bottom plate; A plurality of top contactors inserted into the first hole above; A plurality of bottom contactors inserted into the second hole; and A pogo block comprising: a conductor disposed between the top plate and the bottom plate, wherein one end is electrically connected to the top contactor and the other end is electrically connected to the bottom contactor.

2. In Paragraph 1, The above middle plate includes a plurality of third holes penetrating one side and the other side of the above middle plate, and The above conductor is a pogo block penetrating the third hole.

3. In Paragraph 1, A pogo block further comprising a spacer disposed at one or more of the positions between the middle plate and the top plate or between the middle plate and the bottom plate.

4. In Paragraph 3, The above spacers are provided in a plurality, and are formed such that the sum of the thicknesses of the middle plate and the plurality of spacers corresponds to a predetermined first distance. One end of the top contactor and the other end of the bottom contactor are partially inserted into the spacer, and The above first distance is, A pogo block corresponding to the sum of the distance between one end of the conductor and the other end of the conductor, and the depth to which the top contactor and the bottom contactor are inserted into the spacer.

5. In Paragraph 3, The above spacers are provided in a plurality, and are formed such that the sum of the thicknesses of the middle plate and the plurality of spacers corresponds to a predetermined first distance. The above first distance is, A pogo block corresponding to the distance between one end of the conductor and the other end of the conductor.

6. In Paragraph 2, The thickness of the above middle plate is formed to correspond to a predetermined first distance, and One end of the top contactor and the other end of the bottom contactor are partially inserted into the middle plate, and The above first distance is, A pogo block corresponding to the sum of the distance between one end of the conductor and the other end of the conductor, and the depth to which the top contactor and the bottom contactor are inserted into the middle plate.

7. In Paragraph 3, The above spacer includes a plurality of fourth holes penetrating one side and the other side of the spacer, and The above conductor is a pogo block inserted into the above fourth hole.

8. In Paragraph 1, A plurality of fifth holes are formed penetrating one side and the other side, and further include a top holder disposed on the other side of the top plate, The above top contactor is a pogo block that simultaneously penetrates the first hole and the fifth hole.

9. In Paragraph 1, A plurality of sixth holes are formed penetrating one side and the other side, and further include a bottom holder disposed on one side of the bottom plate. The above bottom contactor is a pogo block that simultaneously penetrates the above second hole and the above sixth hole.

10. In Paragraph 1, A pogo block in which at least one of the top contactor and the bottom contactor is formed as a pogo pin.

11. In Paragraph 1, The above conductor is a pogo block formed in a bar shape extending in one direction.

12. In Paragraph 1, The above conductor includes the one end and the other end and a connecting portion connecting the one end and the other end, wherein A pogo block formed in a shape that can be bent from the connecting portion so that the above-mentioned first end and the above-mentioned second end are oriented in the same direction.

13. In Paragraph 12, The above conductor is formed as a flexible circuit board, and A pogo block in which the portion in contact with the top contactor and the bottom contactor is formed of an electrically conductive material.

14. In Paragraph 1, A pogo block in which at least one of the top plate or the bottom plate further comprises a first refrigerant flow path through which refrigerant can flow.

15. In Paragraph 3, A pogo block in which at least one of the above spacers or the above middle plates further comprises a first refrigerant flow path through which refrigerant can flow.

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