Multilayer ceramic wafer for inductor and inductor using same

Abstract

The present invention provides a multilayer ceramic dielectric for an inductor and an inductor using same, the dielectric having a heterogeneous composite filler comprising a high-k dielectric material and a high-permeability material to increase the permittivity of the upper and lower surfaces and the permeability of the inner region between the upper and lower surfaces.

Description

Multilayer ceramic wafer for inductors and inductor using the same

[0001] The present invention relates to a multilayer ceramic dielectric for an inductor and an inductor using the same.

[0002] An inductor is a passive component that utilizes the electromagnetic action generated by passing current through a wire wound around a core. Various types of inductors are being developed for high-frequency circuits, general circuits, decoupling circuits, and power circuits. While there are variable inductors with varying inductance, most are fixed inductors. In terms of shape, they are available in lead and surface-mount types, and structurally, they are classified into wire-wound, laminated, and thin-film types.

[0003] Inductors can be combined with capacitors to form resonant circuits, or used in filter circuits to filter specific signals or for impedance matching. Recently, alongside the advancement of electronic and communication devices, issues such as environmental and communication interference have emerged. Consequently, technology is advancing in terms of functional complexity, high integration, and high efficiency.

[0004] Accordingly, an inductor with a body composed of an anodic oxide film has been proposed to meet the market's requirements for miniaturization and low resistance.

[0005] In the structure of such an inductor, a structure is disclosed in which a magnetic material is filled into a pore, which is a hole formed in the anodic oxide film. Accordingly, the inductance can be increased. The magnetic material filled into the pore increases the inductance.

[0006] However, while such a structure can increase permeability by filling the interior of the pores with a single magnetic material, it has the disadvantage of not being able to efficiently operate the current path on the surface of the body located near the coil.

[0007] Therefore, it is necessary to improve the structure of inductors using existing anodic oxide films.

[0008] [Prior Art Literature]

[0009] [Patent Literature]

[0010] (Patent Document 1) Korean Published Patent No. 10-2022-0091265

[0011] The present invention aims to provide a multilayer ceramic dielectric for an inductor that efficiently operates the current path and improves inductance by having a composite filler composed of heterogeneous composite materials, and an inductor using the same.

[0012] A multilayer ceramic dielectric for an inductor according to one feature of the present invention comprises: a body portion composed of an anodic oxide film; and a composite filler provided in the body portion; wherein the composite filler has a material having a high dielectric constant on its surface portion and a material having a high permeability in its middle portion.

[0013] Additionally, the surface portion comprises an upper surface portion located on the upper surface side of the body portion; and a lower surface portion located on the lower surface side of the body portion.

[0014] In addition, the body portion includes a porous layer in which pores are formed, and the composite filler is provided inside the pores.

[0015] In addition, the body part includes a through hole that penetrates the body part from top to bottom, and the composite filler is provided inside the through hole.

[0016] In addition, the body portion is provided by stacking a plurality of anodic oxide films including a porous layer having pores formed therein, and among the plurality of anodic oxide films, a material having a high dielectric constant is provided inside the pores of the anodic oxide film located in the upper and lower surface layers of the body portion, and a material having a high permeability is provided inside the pores of the anodic oxide film located in the inner layer between the upper and lower surface layers among the plurality of anodic oxide films to form the composite filler.

[0017] In addition, the body portion is provided by stacking a plurality of anodic oxide films including through holes, and among the plurality of anodic oxide films, a material having a high dielectric constant is provided inside the through hole of the anodic oxide film located in the upper and lower surface layers of the body portion, and a material having a high permeability is provided inside the through hole of the anodic oxide film located in the inner layer between the upper and lower surface layers among the plurality of anodic oxide films to form the composite filler.

[0018] According to another feature of the present invention, an inductor using a multilayer ceramic dielectric for an inductor comprises a coil portion and an inductor using a multilayer ceramic dielectric for an inductor, wherein the coil portion comprises a plurality of vertical connection portions penetrating the multilayer ceramic dielectric for an inductor; an upper connection portion connecting the vertical connection portions at the upper portion of the multilayer ceramic dielectric for an inductor; and a lower connection portion connecting the vertical connection portions at the lower portion of the multilayer ceramic dielectric for an inductor, wherein the multilayer ceramic dielectric for an inductor comprises a body portion composed of an anodic oxide film; and a composite filler provided in the body portion; wherein the composite filler comprises a material having a high dielectric constant on the surface portion and a material having a high permeability in the middle portion.

[0019] The above surface portion includes an upper surface portion located on the upper surface side of the body portion; and a lower surface portion located on the lower surface side of the body portion.

[0020] The present invention provides a multilayer ceramic dielectric for an inductor and an inductor using the same, wherein the inductor is capable of improving inductance by forming a composite filler composed of a heterogeneous composite material having a high dielectric constant and a material having a high permeability, thereby forming a high dielectric constant on the upper and lower surfaces to efficiently operate the current path on the surface, and forming a high permeability in the internal region between the upper and lower surfaces to increase the efficiency of magnetic field passage.

[0021] FIG. 1 is a plan view of an inductor using a multilayer ceramic dielectric for an inductor according to a preferred first embodiment of the present invention.

[0022] FIG. 2 is a cross-sectional view taken along A-A' of FIG. 1.

[0023] FIG. 3 is a schematic diagram showing a multilayer ceramic dielectric for an inductor according to a preferred second embodiment of the present invention, viewed from the direction of cutting along A-A' of FIG. 1.

[0024] FIG. 4 is a schematic diagram showing a multilayer ceramic dielectric for an inductor according to a preferred third embodiment of the present invention, viewed from the direction of cutting along A-A' of FIG. 1.

[0025] The following merely exemplifies the principles of the invention. Therefore, those skilled in the art may invent various devices that embody the principles of the invention and fall within the concept and scope of the invention, even if they are not explicitly described or illustrated in this specification. Furthermore, all conditional terms and embodiments listed in this specification are, in principle, explicitly intended only for the purpose of enabling an understanding of the concept of the invention and should be understood as not being limited to the embodiments and conditions specifically listed as such.

[0026] The aforementioned objectives, features, and advantages will become clearer through the following detailed description in conjunction with the attached drawings, and accordingly, a person skilled in the art to which the invention pertains will be able to easily implement the technical concept of the invention.

[0027] The embodiments described herein will be explained with reference to cross-sectional and / or perspective views, which are exemplary illustrations of the present invention. The thicknesses, etc., of films and regions depicted in these drawings are exaggerated for the effective explanation of the technical content. The shapes of the exemplary drawings may be modified by manufacturing techniques and / or tolerances, etc. Accordingly, the embodiments of the present invention are not limited to the specific shapes depicted but include variations in shape produced according to the manufacturing process. Technical terms used herein are used merely to describe specific embodiments and are not intended to limit the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this specification, terms such as "comprising" or "comprising" are intended to indicate the presence of the features, numbers, steps, actions, components, parts, or combinations thereof described herein, and should be understood as not precluding the existence or addition of one or more other features, numbers, steps, actions, components, parts, or combinations thereof.

[0028] Preferred embodiments of the present invention will be described in detail below with reference to the attached drawings. In describing various embodiments below, for convenience, the same name and reference number will be assigned to components performing the same function, even if the embodiments differ. Additionally, configurations and operations already described in other embodiments will be omitted for convenience.

[0029] FIG. 1 is a plan view of an inductor (100) using a multilayer ceramic dielectric (41) for an inductor according to a preferred first embodiment of the present invention, and FIG. 2 is a cross-sectional view taken along A-A' of FIG. 1.

[0030] Referring to FIGS. 1 and 2, an inductor (100) having a multilayer ceramic dielectric (41) for an inductor according to the first embodiment is configured to include a coil portion (10) and a multilayer ceramic dielectric (41) for an inductor according to the first embodiment.

[0031] The coil portion (10) is composed of an electrically conductive material and, preferably, can be formed by including a metal with high electrical conductivity. For example, the material constituting the coil portion (10) includes silver (Ag), palladium (Pd), aluminum (Al), nickel (Ni), titanium (Ti), gold (Au), copper (Cu), platinum (Pt), or an alloy thereof.

[0032] The coil portion (10) includes a winding portion (20) and a pad portion (30). The pad portion (30) includes a first pad portion (31) connected to one end of the winding portion (20) and a second pad portion (32) connected to the other end of the winding portion (20). The winding portion (20) is formed between the first and second pad portions (31, 32). The first pad portion (31) is connected to a first external electrode (not shown), and the second pad portion (32) is connected to a second external electrode (not shown). The first and second external electrodes are formed from copper (Cu), nickel (Ni), tin (Sn), or an alloy thereof. The first and second pad portions (31, 32) may both be provided on the same surface, for example, the upper surface, of the multilayer ceramic dielectric (41) for the inductor of the first embodiment. However, they are not limited thereto.

[0033] The winding section (20) includes a plurality of vertical connecting sections (21) that penetrate the multilayer ceramic dielectric (41) for the inductor of the first embodiment and a horizontal connecting section (25) that connects the vertical connecting sections (21). The winding section (20) is formed such that the horizontal connecting section (25) is provided on the outside of the multilayer ceramic dielectric (41) for the inductor of the first embodiment, and the vertical connecting section (21) is provided on the inside of the multilayer ceramic dielectric (41) for the inductor of the first embodiment, and is wound to wrap around a portion of the multilayer ceramic dielectric (41) for the inductor of the first embodiment.

[0034] The vertical connection portion (21) is formed by filling an electrically conductive material into a vertical penetration portion (24) that penetrates the multilayer ceramic dielectric (41) for the inductor of the first embodiment from top to bottom. The vertical connection portion (21) includes a first row of vertical connection portions (22) located on one side of the multilayer ceramic dielectric (41) for the inductor of the first embodiment and a first row of vertical connection portions (23) located on the other side of the multilayer ceramic dielectric (41) for the inductor of the first embodiment. The vertical connection portions (21) arranged in a row direction are spaced apart from each other by a certain distance.

[0035] The horizontal connection portion (25) is provided on the surface side of the multilayer ceramic dielectric (41) for the inductor of the first embodiment and is composed of an electrically conductive material. The horizontal connection portion (25) may be the same material as the vertical connection portion (21). The horizontal connection portion (25) includes an upper connection portion (26) that connects the vertical connection portions (21) at the upper end of the multilayer ceramic dielectric (41) for the inductor of the first embodiment, and a lower connection portion (27) that connects the vertical connection portions (21) at the lower end of the multilayer ceramic dielectric (41) for the inductor of the first embodiment.

[0036] The upper connecting part (26) is configured to connect the vertical connecting part (21) of any one of the vertical connecting parts (22) of the first row and the vertical connecting part (21) of the first row that is at the shortest distance from the vertical connecting part (23) of the first row. The upper connecting part (26) may be provided as a diagonal line having an upward inclination to the right based on the drawing of FIG. 1. The vertical connecting parts (21) arranged in the row direction are spaced apart from each other by a certain distance. Accordingly, the upper connecting parts (26) have an inclination of the same angle.

[0037] The lower connecting part (27) is configured to connect the vertical connecting part (21) that is at the shortest distance among any one of the vertical connecting parts (23) of the first row and the vertical connecting part (21) of the first row (22). The lower connecting part (27) may be provided as a diagonal line having an upward-left slope based on the drawing of FIG. 1. The vertical connecting parts (21) arranged in the row direction are spaced apart from each other by a certain distance. Accordingly, the lower connecting parts (27) have the same angle of inclination.

[0038] The upper connecting part (26) and the lower connecting part (27) are connected through the vertical connecting part (21), and the coil is wound in a shape that penetrates the multilayer ceramic dielectric (41) for the inductor of the first embodiment through the vertical connecting part (21). The internal region of the coil part (10) formed by the first and second rows of vertical connecting parts (21) and the upper and lower connecting parts (27) has a square cross-sectional shape.

[0039] When the first column of vertical connecting parts (22) is projected toward the first column of vertical connecting parts (23), the first column of vertical connecting parts (22) is located at a distance between the first column of vertical connecting parts (23). If a virtual line is drawn connecting the two adjacent vertical connecting parts (22) in the first column of vertical connecting parts (22) and the vertical connecting part (23) located between them when projected onto the first column of vertical connecting parts (23), the virtual line becomes the hypotenuse of an isosceles triangle. In other words, if a virtual line is drawn connecting the center point of each of the two adjacent vertical connecting parts (22) in the first column of vertical connecting parts (22) and the center point of the vertical connecting part (23) located between them when projected onto the first column of vertical connecting parts (23), the virtual line becomes the hypotenuse of an isosceles triangle. Through this, the difference between the direction of the magnetic flux generated by the lower connection part (27) and the direction of the magnetic flux generated by the upper connection part (26) is minimized, thereby enabling a more stable inductance. Additionally, by making the lengths of the upper connection part (26) and the lower connection part (27) equal, the time the current flows through the upper connection part (26) and the time it flows through the lower connection part (27) are equal, thereby enabling a stable inductance.

[0040] The multilayer ceramic dielectric (41) for an inductor of the first embodiment comprises a body portion (500) composed of an anodic oxide film (80) and a composite filler (90) provided in the body portion (500).

[0041] The body part (500) is composed of an anodic oxide film (80).

[0042] The anodic oxide film (80) refers to a film formed by anodic oxidation of a base metal. The pores (201) refer to holes formed during the process of anodic oxidation of the base metal to form the anodic oxide film. For example, if the base metal is aluminum (Al) or an aluminum alloy, anodic oxidation of the base metal results in the formation of an anodic oxide film (80) made of aluminum oxide (Al2O3) on the surface of the base metal. The anodic oxide film (80) formed as described above is vertically divided into a barrier layer in which no pores (201) are formed inside and a porous layer (200) in which pores (201) are formed inside. When the base metal having the anodic oxide film (80) having the barrier layer and the porous layer (200) is removed, only the anodic oxide film (80) made of aluminum oxide (Al2O3) remains.

[0043] The anodic oxide film (80) can be formed in a structure in which the barrier layer formed during anodic oxidation is removed so that only the pores (201) penetrate upward and downward, or the barrier layer formed during anodic oxidation remains intact and seals one end of the upper and lower portions of the pores (201).

[0044] The anodic oxide film (80) has a coefficient of thermal expansion of 2 to 3 ppm / ℃. As a result, when exposed to a high-temperature environment, there is less thermal deformation due to temperature. The inductor (100) using the multilayer ceramic dielectric (41) for the inductor of the first embodiment includes a coil portion (10). The inductor (100) using the multilayer ceramic dielectric (41) for the inductor of the first embodiment must not deform by reacting sensitively to the temperature of the surrounding environment.

[0045] The inductor (100) using the multilayer ceramic dielectric (41) for the inductor of the first embodiment can minimize its own thermal deformation by configuring the multilayer ceramic dielectric (41) for the inductor of the first embodiment with an anodic oxide film material. As a result, it is possible to prevent the coil of the coil portion (10) from breaking or the inductance from changing.

[0046] In the method for manufacturing an inductor (100) using a multilayer ceramic dielectric (41) for an inductor according to the first embodiment, a vertical penetration portion (24) is provided in the multilayer ceramic dielectric (41) for an inductor according to the first embodiment through a process of wet etching the anodic oxide film (80) using a patterned photoresist. Accordingly, the vertical penetration portion (24) has an inner wall with a vertical shape. In other words, it is possible to have the same cross-sectional area of ​​the inner wall of the vertical penetration portion (24) from the bottom to the top of the vertical penetration portion (24). Accordingly, the inductor (100) using the multilayer ceramic dielectric (41) for an inductor according to the first embodiment can stably form the current flow of the coil portion (10).

[0047] The composite filler (90) is provided in the body portion (500). The composite filler (90) is preferably provided with a length equal to the vertical length of the body portion (500).

[0048] The body portion (500) is composed of only a porous layer (200) in which pores (201) are formed. The composite filler (90) of the multilayer ceramic dielectric (41) for an inductor of the first embodiment can be provided by filling a heterogeneous composite material inside the pores (201).

[0049] Specifically, a material with a high dielectric constant is filled into the upper surface section located on the upper surface side of the body part (500) and the lower surface section located on the lower surface side of the body part (500) within the pore (201). A material with high permeability is filled into the intermediate section formed between the upper and lower surface sections within the pore (201). The multilayer ceramic dielectric (41) for an inductor of the first embodiment is provided with a composite filler (90) by dividing the interior of the pore (201) into sections and filling each section with a material of different properties. Accordingly, the composite filler (90) of the multilayer ceramic dielectric (41) for an inductor of the first embodiment is formed by filling a heterogeneous composite material into the interior of a single pore (201).

[0050] The composite filler (90) includes a surface portion (91) and an intermediate portion (92).

[0051] The surface portion (91) is a portion located on the surface side of the body portion (500). The surface portion (91) includes an upper surface portion (91a) located on the upper surface side of the body portion (500) and a lower surface portion (91b) located on the lower surface side of the body portion (500).

[0052] The upper surface portion (91a) is an area extending from the upper surface of the composite filler (90) to a predetermined depth (d1) inwardly, having an intermediate portion (92). The lower surface portion (91b) is an area extending from the lower surface of the composite filler (90) to a predetermined depth (d2) inwardly, having an intermediate portion (92).

[0053] A material (93) with a high dielectric constant is provided on the surface portion (91). Specifically, a material (93) with a high dielectric constant is provided on the upper surface portion (91a) and the lower surface portion (91b). The upper surface portion (91a) corresponds to the upper surface section within the interior of the pore (201), and the lower surface portion (91b) corresponds to the lower surface section within the interior of the pore (201). Accordingly, the upper surface portion (91a) is formed by filling the upper surface section within the interior of the pore (201) with a material (93) with a high dielectric constant, and the lower surface portion (91b) is formed by filling the lower surface section within the interior of the pore (201) with a material (93) with a high dielectric constant.

[0054] The inductor (100) using the multilayer ceramic dielectric (41) for the inductor of the first embodiment can be composed of a material (93) having a high dielectric constant, which is one of the materials described below, depending on the frequency band to be used, the manufacturing process, and the performance.

[0055] A material (93) with a high dielectric constant can be composed of, for example, any one of a ceramic-based material, a polymer-based dielectric, and an oxide-based material.

[0056] Specifically, ceramic-based materials include BaTiO3 (barium titanate), SrTiO3 (strontium titanate), and Pb(Zr,Ti)O3 (PZT, lead zirconate titanate).

[0057] Polymer-based dielectrics include PVDF (Polyvinylidene fluoride) and CPE (Chlorinated Polyethylene).

[0058] Oxide-based materials include Al2O3 (alumina), TiO2 (titanium dioxide), and ZrO2 (zirconia).

[0059] In addition, a special material with a high dielectric constant (93) may be provided. The special material is La2O3 (lanthanum oxide). , It may include HfO2 (hafnium oxide) and Ta2O5 (tantalum oxide).

[0060] The middle section (92) is located between the upper and lower surface sections (91a, 91b) and is a region (d3) formed between the lower boundary of the upper surface section (91a) and the upper boundary of the lower surface section (91b).

[0061] A material with high permeability (94) is provided in the middle section (92). The middle section (92) corresponds to the middle section within the pore (201). Accordingly, the middle section (92) is formed by filling the middle section within the pore (201) with a material with high permeability (94).

[0062] The inductor (100) using the multilayer ceramic dielectric (41) for the inductor of the first embodiment can be composed of a material (94) with high permeability using any of the materials described below, depending on frequency characteristics, manufacturing process, thermal stability and mechanical requirements.

[0063] A material with high permeability (94) can be composed of any one of metal and alloy-based materials, oxide-based materials, nanoparticle-based materials and composite materials, as an example.

[0064] Metal and alloy-based materials include Fe (iron), Ni (nickel), Co (cobalt), Fe-Si (iron silicon), Fe-Ni alloy (Permalloy), and Fe-Co alloy.

[0065] Oxide-based materials include Fe3O4 (magnetite), MnZn ferrite, and NiZn ferrite.

[0066] Nanoparticle-based materials include Fe2O3 nanoparticles, CoFe2O4 (cobalt ferrite), and Fe3O4 nanoparticles.

[0067] Composite materials include metal nanoparticle-polymer composites and ferrite-polymer composites.

[0068] In addition, special alloys may be provided with materials (93) having a high dielectric constant. Special alloys include metal glass and aluminum-silicon-iron alloys.

[0069] The multilayer ceramic dielectric (41) for an inductor of the first embodiment is provided with a composite filler (90) composed of heterogeneous composite materials, having a material (93) with a high dielectric constant on the upper and lower surface portions (91a, 91b) and a material (94) with a high permeability on the middle portion (92), in the body portion (500).

[0070] Accordingly, when the multilayer ceramic dielectric (41) for the inductor of the first embodiment is viewed from above or below, a pattern is formed in which a material (93) with a high dielectric constant, respectively provided on the upper and lower surface portions (91a, 91b) of the composite filler (90), is regularly arranged.

[0071] Accordingly, in the inductor (100) using the multilayer ceramic dielectric (41) for the inductor of the first embodiment, a pattern is formed in which a material (93) with a high dielectric constant is regularly arranged by the upper surface portion (91a) and lower surface portion (91b) of a plurality of composite fillers (90) near the coil portion (10). As a result, the inductor (100) using the multilayer ceramic dielectric (41) for the inductor of the first embodiment can form a high dielectric constant on the upper and lower surfaces.

[0072] More specifically, the multilayer ceramic dielectric (41) for the inductor of the first embodiment has a pattern formed on its upper surface in which a material (93) with a high dielectric constant, provided on the upper surface portion (91a) of the composite filler (90), is regularly arranged. Through this, a strong electric field can be formed by creating a high dielectric constant near the upper connection portion (26).

[0073] In addition, the multilayer ceramic dielectric (41) for the inductor of the first embodiment has a pattern formed on its lower surface in which a material (93) with a high dielectric constant, provided on the lower surface portion (91b) of the composite filler (90), is regularly arranged. Through this, a strong electric field can be formed by creating a high dielectric constant near the lower connection portion (27).

[0074] As a result, the inductor (100) using the multilayer ceramic dielectric (41) for the inductor of the first embodiment can efficiently operate the current path of the horizontal connection part (25).

[0075] Meanwhile, when the multilayer ceramic dielectric (41) for the inductor of the first embodiment is cut along A-A' of FIG. 1 and viewed from the front or from the back, a pattern is formed in which a material (94) with high permeability provided in the middle part (92) of the composite filler (90) is regularly arranged.

[0076] The interior between the upper and lower surfaces of the multilayer ceramic dielectric (41) for an inductor in the first embodiment is a region through which a magnetic field passes. Therefore, it is a region where high permeability must be formed. In the multilayer ceramic dielectric (41) for an inductor in the first embodiment, a pattern in which a high-permeability material (94) is regularly arranged is formed inside by a high-permeability material (94) provided in the middle part (92) of the composite filler (90). Through this, the multilayer ceramic dielectric (41) for an inductor in the first embodiment increases the efficiency of magnetic field passage and increases the inductance of the interior region.

[0077] As such, the multilayer ceramic dielectric (41) for an inductor of the first embodiment has a composite structure in which the upper and lower surfaces and the internal region between them are composed of materials having different properties through a composite filler (90) composed of different composite materials.

[0078] The composite filler (90) is provided with a material (93) having a high dielectric constant of the upper and lower surface portions (91a, 91b) and a material (94) having a high permeability of the middle portion (92) spatially separated within it. This can be achieved by performing a curing process, for example, during the process of forming the composite filler (90). Specifically, it can be implemented by providing a material (93) having a high dielectric constant of the lower surface portion (91b) and curing it through a curing process, then providing a material (94) having a high permeability of the middle portion (92) and curing it through a curing process, and then providing a material (93) having a high dielectric constant of the upper surface portion (91a).

[0079] Alternatively, it may be possible by performing a sequential plating process. This can be achieved through a process of forming a lower surface (91b) by plating a material (93) with a high dielectric constant, then forming an intermediate part (92) by plating a material (94) with a high permeability, and then forming an upper surface (91a) by plating a material (93) with a high dielectric constant.

[0080] Accordingly, different types of composite materials are not mixed with each other, and the dielectric constant can be increased on the upper and lower surfaces of the multilayer ceramic dielectric (41) for the inductor, and the efficiency of magnetic field passage can be improved in the internal region.

[0081] The multilayer ceramic dielectric (41) for an inductor of the first embodiment can improve inductance through a composite structure of a high dielectric material (93), which is a material with a high dielectric constant provided on the upper and lower surfaces, and a high permeability material (94), which is a material with a high permeability provided in the internal region.

[0082] FIG. 3 is a schematic diagram showing a multilayer ceramic dielectric (42) for an inductor according to a second embodiment of the present invention, viewed from the direction of cutting along A-A' of FIG. 1.

[0083] The second embodiment described below will be explained focusing on characteristic components compared to the first embodiment, and components identical or similar to those of the first embodiment are utilized in the composition of the second embodiment, with descriptions thereof omitted as much as possible.

[0084] The multilayer ceramic dielectric (42) for an inductor of the second embodiment can function as a body on which a coil portion (10) is wound, as an example, by being applied to an inductor. The inductor to which the multilayer ceramic dielectric (42) for an inductor of the second embodiment is applied can have the same structure as the inductor (100) using the multilayer ceramic dielectric (42) for an inductor of the first embodiment.

[0085] The multilayer ceramic dielectric (42) for an inductor of the second embodiment can form a vertical penetration portion (24) when applied to an inductor and can provide a vertical connection portion (21).

[0086] The multilayer ceramic dielectric (42) for an inductor of the second embodiment includes a through hole (300) that penetrates the body portion (500) vertically upward and downward. The through hole (300) is a hole formed with a width greater than the width of the pore (201) separately from the pore (201) of the porous layer (200) of the anodic oxide film (80) constituting the body portion (500). The through hole (300) is formed by a process of etching the anodic oxide film (80) in the vertical direction using an etching solution, as an example.

[0087] The multilayer ceramic dielectric (42) for an inductor of the second embodiment is provided with a composite filler (90) composed of heterogeneous composite materials inside the through hole (300) by filling each of the upper and lower surface sections inside the through hole (300) with a material (93) having a high dielectric constant and filling the intermediate section between the upper and lower surface sections with a material (94) having a high permeability.

[0088] More specifically, a composite filler (90) composed of upper and lower surface portions (91a, 91b) equipped with a material (93) having a high dielectric constant and an intermediate portion (92) equipped with a material (94) having a high permeability is provided in the through hole (300).

[0089] The multilayer ceramic dielectric (42) for an inductor of the second embodiment can form a high dielectric constant on the upper and lower surfaces and a high permeability in the internal region between them by providing a composite filler (90) inside a through hole (300) formed with a width greater than that of the pore (201) of the anodic oxide film (80).

[0090] As a result, the multilayer ceramic dielectric (42) for the inductor of the second embodiment can efficiently operate the current path on the upper and lower surfaces and improve the inductance.

[0091] FIG. 4 is a schematic diagram showing a multilayer ceramic dielectric (43) for an inductor according to a preferred third embodiment of the present invention, viewed from the direction of cutting along A-A' of FIG. 1.

[0092] The third embodiment described below will focus on characteristic components compared to the first embodiment, and components identical or similar to those of the first embodiment will be utilized in the composition of the third embodiment, with descriptions thereof omitted as much as possible.

[0093] The multilayer ceramic dielectric (43) for an inductor of the third embodiment can function as a body on which a coil portion (10) is wound, as an example, by being applied to an inductor. The inductor to which the multilayer ceramic dielectric (43) for an inductor of the third embodiment is applied can have the same structure as the inductor (100) using the multilayer ceramic dielectric (41) for an inductor of the first embodiment.

[0094] The multilayer ceramic dielectric (43) for an inductor of the third embodiment can form a vertical penetration portion (24) when applied to an inductor and can provide a vertical connection portion (21).

[0095] The multilayer ceramic dielectric (43) for an inductor of the third embodiment comprises a body portion (500') having a structure in which a plurality of anodic oxide films (80) including a porous layer (200) having pores (201) formed therein are stacked, and a composite filler (90) provided in the body portion (500').

[0096] The body portion (500') is configured to include an upper surface layer (501) constituting the upper surface of the multilayer ceramic dielectric (43) for the inductor of the third embodiment, a lower surface layer (502) constituting the upper surface of the multilayer ceramic dielectric (43) for the inductor of the third embodiment, and an inner layer (503) provided between the upper and lower surface layers (501, 502).

[0097] An anodic oxide film (80) comprising a porous layer (200) having pores (201) formed therein is provided in each of the upper and lower surface layers (501, 502) and the inner layer (503) of the body part (500').

[0098] The vertical length of the anodic oxide film (80) provided on the upper and lower surface layers (501, 502) may be smaller than the vertical length of the anodic oxide film (80) provided on the inner layer (503).

[0099] The anodic oxide film (80) of each layer (501, 502, 503) is bonded through the bonding layer (400).

[0100] The bonding layer (400) can be provided by a photoresist process. The bonding layer (400) can be composed of a photosensitive material having photosensitive properties. As an example, the bonding layer (400) may be a Dry Film Photoresist (DFR). Additionally, since the bonding layer (400) performs the function of bonding the surface layer (including the upper and lower surface layers (61, 62)) and the inner layer (70), it can be configured to have bonding properties. Therefore, the bonding layer (400) can be provided to have a configuration that simultaneously possesses photosensitive properties and bonding properties. When using a bonding layer (400) of such a material, in addition to the bonding function, it can also perform a mask function that can be used to form a vertical penetration (24) in the anodic oxide film material by utilizing the opening area of ​​the bonding layer (400).

[0101] Meanwhile, the bonding layer (400) may be a thermosetting resin. As a thermosetting resin material, it may be a polyimide resin, a polyquinoline resin, a polyamideimide resin, an epoxy resin, a polyphenylene ether resin, and a fluoropolymer resin.

[0102] Additionally, the bonding layer (400) may be provided as a ceramic bonding layer. The ceramic bonding layer has the advantage of allowing the inductor to be used even in a high-temperature environment.

[0103] Additionally, the bonding layer (400) may be provided with solder.

[0104] The bonding layer (400) performs the function of bonding the anodic oxide film (80) of each layer (501, 502, 503) and the function of bonding the upper and lower surface portions (91) and the middle portion (92) of the composite filler (90). As a result, in a structure in which a plurality of anodic oxide films (80) are stacked, the upper and lower surface portions (91a, 91b) composed of a material (93) with a high dielectric constant and the middle portion (92) composed of a material (94) with a high permeability are vertically arranged and integrally bonded to form a composite filler (90).

[0105] A through hole (300) separate from the pore (201) can be formed in the anodic oxide film (80).

[0106] In the third embodiment, the multilayer ceramic dielectric (43) for an inductor fills the through holes (300) of the anodic oxide film (80) provided in the upper and lower surface layers (501, 502) with a material (93) having a high dielectric constant. The material (93) having a high dielectric constant filled in the through holes (300) of the upper surface layer (501) forms the upper surface portion (91a) of the composite filler (90). The material (93) having a high dielectric constant filled in the through holes (300) of the lower surface layer (502) forms the lower surface portion (91b) of the composite filler (90).

[0107] The multilayer ceramic dielectric (43) for an inductor of the third embodiment may have a porosity of an anodic oxide film (80) provided on the upper and lower surface layers (501, 502) smaller than the porosity of an anodic oxide film (80) provided on the inner layer (503). Porosity refers to the volume occupied by the pores (201) per unit volume. The anodic oxide film (80) provided on the upper and lower surface layers (501, 502) may be provided to have a small porosity by forming the diameter of the pores (201) small or by forming the density of the pores (201) (number of pores (201) per unit volume) low.

[0108] Accordingly, an anodic oxide film (80) with low porosity exists around the material (93) with high dielectric constant filled in the through holes (300) of the upper and lower surface layers (501, 502).

[0109] An anodic oxide film (80) with low porosity can form a high dielectric constant on the upper and lower surfaces of a multilayer ceramic dielectric (43) for an inductor together with a material (93) having a high dielectric constant on the upper and lower surfaces (91a, 91b) of a composite filler (90). Accordingly, the multilayer ceramic dielectric (43) for an inductor of the third embodiment can operate the current path on the upper and lower surfaces more efficiently.

[0110] Meanwhile, in the structure of the multilayer ceramic dielectric (43) for an inductor of the third embodiment having a through hole (300) separate from the pore (201), the anodic oxide film (80) provided on the upper and lower surface layers (501, 502) may be composed only of the porous layer (200), or may be composed including the porous layer (200) and a barrier layer.

[0111] When the anodic oxide film (80) includes a porous layer (200) and a barrier layer, the anodic oxide film (80) of the upper surface layer (501) is provided with a structure in which the barrier layer is located above the porous layer (200). As a result, the barrier layer is located on the upper surface side of the body part (500'). The anodic oxide film (80) of the lower surface layer (502) is provided with a structure in which the barrier layer is located below the porous layer (200). As a result, the barrier layer is located on the lower surface side of the body part (500').

[0112] Accordingly, in a structure having a composite filler (90) inside a through hole (300) of a body part (500'), a barrier layer may exist around the upper surface part (91a) and the lower surface part (91b) of the composite filler (90). The barrier layer can function to form a high dielectric constant on the surface of the body part (500') by not forming pores (201).

[0113] A material with high permeability (94) is filled into the through hole (300) of the anodic oxide film (80) of the inner layer (503). The material with high permeability (94) filled into the through hole (300) of the inner layer (503) constitutes the middle portion (92) of the composite filler (90).

[0114] Accordingly, the multilayer ceramic dielectric (43) for an inductor of the third embodiment is sequentially stacked in the vertical direction from the top, with a material (93) having a high dielectric constant filled in the through hole (300) of the upper surface layer (501), a material (94) having a high permeability filled in the through hole (300) of the inner layer (503), and a material (93) having a high dielectric constant filled in the through hole (300) of the lower surface layer (502).

[0115] The multilayer ceramic dielectric (43) for an inductor of the third embodiment is provided with a composite filler (90) having a structure in which a material with a high dielectric constant (93), a material with a high permeability (94), and a material with a high dielectric constant (93) are stacked in a vertical direction through a through hole (300) of the anodic oxide film (80) of each layer (501, 502, 503).

[0116] The anodic oxide film (80) provided in the inner layer (503) may have a greater porosity than the anodic oxide film (80) provided in the upper and lower surface layers (501, 502). The anodic oxide film (80) may have a greater porosity by forming a larger diameter of the pores (201) or by forming a larger density of the pores (201).

[0117] Accordingly, an anodic oxide film (80) with a large porosity is formed around the high permeability material (94) filled in the through hole (300) of the inner layer (503).

[0118] The anodic oxide film (80) of the inner layer (503) has a high porosity and is provided with a material (94) with high permeability in a through hole (300) separate from the pore (201). Accordingly, the path of the magnetic field in the inner layer (503) is efficiently improved, so that the inductance can be increased.

[0119] The multilayer ceramic dielectric (43) for an inductor of the third embodiment can form a high dielectric constant on the upper and lower surfaces of the body part (500') through a material (93) with a high dielectric constant of the composite filler (90) provided in the upper and lower surface layers (501, 502), and can increase the efficiency of passing a magnetic field in the inner region of the body part (500') through a material (94) with a high permeability of the composite filler (90) provided in the inner layer (503). As a result, the multilayer ceramic dielectric (43) for an inductor of the third embodiment can improve inductance while efficiently operating the current path on the upper and lower surfaces.

[0120] As described above, although the present invention has been explained with reference to preferred embodiments, a person skilled in the art may implement the present invention with various modifications or variations without departing from the spirit and scope of the invention as described in the following claims.

[0121] [Explanation of the symbol]

[0122] Main symbols of the drawing

[0123] 100: Inductor using multilayer ceramic dielectric for inductors

[0124] 10: Coil part

[0125] 20: Gwonseonbu

[0126] 30: Pad section

[0127] 41, 42, 43: Multilayer ceramic dielectric for inductors

[0128] 80: Anodic oxide film

[0129] 90: Composite filler

[0130] 91: Surface

[0131] 92: Middle section

[0132] 93: Materials with high dielectric constant

[0133] 94: High permeability material

[0134] 200: Porous layer

[0135] 201: Qi Gong

[0136] 300: Through hole

Claims

1. A body portion composed of an anodic oxide film; and Composite filler provided in the above body portion; including, The above composite filler is, A material with a high dielectric constant is provided on the surface, A multilayer ceramic dielectric for an inductor having a high permeability material in the middle section.

2. In Paragraph 1, The above surface portion is, An upper surface portion located on the upper surface side of the body portion; and A multilayer ceramic dielectric for an inductor comprising: a lower surface portion located on the lower surface side of the body portion.

3. In Paragraph 1, The above body part includes a porous layer in which pores are formed, and The above composite filler is a multilayer ceramic dielectric for an inductor, provided inside the above pore.

4. In Paragraph 1, The above body part includes a through hole that penetrates the above body part from top to bottom, and The above composite filler is a multilayer ceramic dielectric for an inductor, provided inside the through hole.

5. In Paragraph 1, The above body portion is provided by stacking a plurality of anodic oxide films including a porous layer having pores formed therein, and Among the plurality of anodic oxide films, the pores of the anodic oxide film located on the upper and lower surface layers of the body part are provided with a material having a high dielectric constant, A multilayer ceramic dielectric for an inductor, wherein the pores of the anodic oxide film located in the inner layer between the upper and lower surface layers among the plurality of anodic oxide films are provided with a material having high permeability to form the composite filler.

6. In Paragraph 1, The above body portion is provided by stacking a plurality of the anodic oxide films including through holes, and Among the plurality of anodic oxide films, the through-hole of the anodic oxide film located on the upper and lower surface layers of the body part is provided with a material having a high dielectric constant, A multilayer ceramic dielectric for an inductor, wherein a material with high permeability is provided inside a through hole of the anodic oxide film located in an inner layer between the upper and lower surface layers among the plurality of anodic oxide films to form the composite filler.

7. In an inductor using a coil portion and a multilayer ceramic dielectric for the inductor, The above coil part is, A plurality of vertical connection portions penetrating the multilayer ceramic dielectric for the inductor; An upper connecting portion connecting the vertical connecting portions at the top of the multilayer ceramic dielectric for the inductor; and It includes a lower connection portion connecting the vertical connection portions at the bottom of the multilayer ceramic dielectric for the inductor, and The above-mentioned multilayer ceramic dielectric for the inductor is, A body portion composed of an anodic oxide film; and Composite filler provided in the above body portion; including, The above composite filler is, A material with a high dielectric constant is provided on the surface, An inductor using a multilayer ceramic dielectric for inductors having a material with high permeability in the middle section.

8. In Paragraph 7, The above surface portion is, An upper surface portion located on the upper surface side of the body portion; and An inductor using a multilayer ceramic dielectric for an inductor, comprising: a lower surface portion located on the lower surface side of the body portion.

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