Communication control method and related apparatus

Abstract

Embodiments of the present application provide a communication control method and a related apparatus. The communication control method comprises: by means of a controller of a pulse power supply, monitoring a noise signal sensed by a target pin of an analog-to-digital converter and interrupt information of a control module; obtaining noise information on the basis of the detected noise signal, and obtaining a noise level on the basis of the noise information and the interrupt information; and finally configuring a communication parameter of the control module on the basis of the noise level. The present application achieves the objective of configuring corresponding communication parameters under different noise levels, enabling the control module to communicate with other hardware modules on the basis of different communication parameters under different noise levels. The present application achieves adaptive adjustment of the communication parameter according to the noise level, which helps ensure normal communication between a communication module and other hardware modules in different noise environments, reduces the probability of an anomalous working state of the pulse power supply due to a communication anomaly in a strong noise environment, thereby improving the anti-noise level of the pulse power supply.

Description

A communication control method and related apparatus Technical Field

[0001] This application relates to the field of semiconductor technology, specifically to pulse power supply technology in the field of semiconductor technology, and more specifically to a communication control method and related apparatus. Background Technology

[0002] Pulsed power supply (PPS) can provide short, high-energy current or voltage pulses and is widely used in semiconductor, medical, scientific research and other fields. Taking the semiconductor field as an example, pulsed power supply is widely used in semiconductor process equipment such as plasma cleaning equipment, pulsed laser deposition (PLD) equipment and atomic layer etching (ALE) equipment.

[0003] In some cases, especially for fast pulse power supplies with operating frequencies above 5MHz, the pulse power supply may need to operate in areas with high electromagnetic interference (EMI) noise, which places high demands on the noise immunity level of the pulse power supply. Summary of the Invention

[0004] This application provides a communication control method and related apparatus to improve the noise immunity of pulse power supplies.

[0005] To achieve the above technical objectives, the embodiments of this application provide the following technical solutions:

[0006] One embodiment of this application provides a communication control method applied to a controller of a pulse power supply, wherein the pulse power supply further includes a pulse generator, and the controller includes a control module and an analog-to-digital converter. The communication control method includes:

[0007] Acquire the noise signal sensed by the target pin of the analog-to-digital converter, and obtain noise information based on the noise signal. The noise information includes noise amplitude information and / or frequency information of the noise spectrum.

[0008] Obtain the interrupt information of the control module, the interrupt information including the triggering information of the target interrupt triggered by noise in the control module, the triggering information including the number of times it is triggered and / or the triggering frequency;

[0009] Based on the noise information and the interruption information, the noise level is obtained;

[0010] Based on the noise level, the communication parameters of the control module are configured, including at least one of the following: IO speed, baud rate, oversampling point, number of retransmissions, and timeout time.

[0011] In some embodiments, the target pin includes a first pin and a second pin, both of which are suspended pins of the analog-to-digital converter. The first pin is close to the noise generation location, and the second pin is far from the noise generation location.

[0012] The step of acquiring the noise signal sensed by the target pin of the analog-to-digital converter and obtaining noise information based on the noise signal includes:

[0013] Acquire a first noise signal sensed by the first pin of the analog-to-digital converter, and obtain first noise information based on the first noise signal;

[0014] The second noise signal sensed by the second pin of the analog-to-digital converter is acquired, and the second noise information is obtained based on the second noise signal.

[0015] In some embodiments, the first pin corresponds to the near-interference source coefficient, and the second pin corresponds to the far-field radiation coefficient;

[0016] The process of obtaining the noise level based on the noise information and the interruption information includes:

[0017] The noise level is calculated based on the target information, the weights corresponding to the information included in the target information, the near interference source coefficient, and the far radiation coefficient; the target information includes the first noise information, the second noise information, and the interruption information.

[0018] In some embodiments, calculating the noise level based on target information, the weights corresponding to the information included in the target information, the near-interference source coefficient, and the far-field radiation coefficient includes:

[0019] The noise level is calculated by substituting the target information, the weights of the information included in the target information, the near-interference source coefficient, and the far-field radiation coefficient into a preset algorithm model.

[0020] In some embodiments, the preset algorithm model is a first objective formula; the first objective formula includes:

[0021] NOISE_LV(n)=CNT×Ki+(NV_MAX1×K1+DV_MAX1×K2)×e K5 +(NV_MAX2×K3+DV_MAX2×K4)×e K6Wherein, NOISE_LV(n) represents the noise level of the current period, e represents the natural constant, CNT represents the interruption information, Ki represents the weight corresponding to the interruption information, NV_MAX1 represents the noise amplitude information in the first noise information, DV_MAX1 represents the frequency information of the noise spectrum in the first noise information, NV_MAX2 represents the noise amplitude information in the second noise information, DV_MAX2 represents the frequency information of the noise spectrum in the second noise information, K1, K2, K3 and K4 are the weights corresponding to NV_MAX1, DV_MAX1, NV_MAX2 and DV_MAX2 respectively, K5 represents the near-interference source coefficient, and K6 represents the far-field radiation coefficient.

[0022] In some embodiments, the first pin corresponds to the near-interference source coefficient, and the second pin corresponds to the far-field radiation coefficient;

[0023] The process of obtaining the noise level based on the noise information and the interruption information includes:

[0024] The historical noise level, the weight corresponding to the historical noise level, the target information, the weights corresponding to the information included in the target information, the near interference source coefficient, and the far radiation coefficient are substituted into the feedback control algorithm model to calculate the noise level; the historical noise level includes the noise level of the previous cycle and the noise level of the cycle before that.

[0025] In some embodiments, the feedback control algorithm model is a second objective formula; the second objective formula includes: NOISE_LV(n)=CNT×Ki+(NV_MAX1×K1+DV_MAX1×K2)×e K5 +(NV_MAX2×K3+DV_MAX2×K4)×e K6 +K10×NOISE_LV(n-1)+K11×(NOISE_LV(n-1)-NOISE_LV(n-2));

[0026] Wherein, NOISE_LV(n) represents the noise level of the current period, e represents the natural constant, CNT represents the interruption information, Ki represents the weight corresponding to the interruption information, NV_MAX1 represents the noise amplitude information in the first noise information, DV_MAX1 represents the frequency information of the noise spectrum in the first noise information, NV_MAX2 represents the noise amplitude information in the second noise information, DV_MAX2 represents the frequency information of the noise spectrum in the second noise information, K1, K2, K3 and K4 are the weights corresponding to NV_MAX1, DV_MAX1, NV_MAX2 and DV_MAX2 respectively; NOISE_LV(n-1) represents the noise level of the previous period, NOISE_LV(n-2) represents the noise level of the period before that, K10 and K11 are the weights corresponding to NOISE_LV(n-1) and NOISE_LV(n-2) respectively, K5 represents the near-interference source coefficient, and K6 represents the far-field radiation coefficient.

[0027] In some embodiments, the IO speed, baud rate, oversampling point, retransmission count, and timeout time each correspond to configuration values ​​that match the level.

[0028] The configuration of the communication parameters of the control module based on the noise level includes:

[0029] Based on the noise level and the number of levels corresponding to the configuration values ​​of each of the communication parameters, the noise level is normalized and rounded to obtain the normalized level corresponding to each of the communication parameters.

[0030] Based on the normalization level corresponding to each of the communication parameters, the configuration value corresponding to each of the communication parameters and the normalization level is determined.

[0031] In some embodiments, the target interrupt includes at least one of a noise flag interrupt, an overflow flag interrupt, and a frame error interrupt.

[0032] Secondly, one embodiment of this application provides a pulse power supply, comprising: a controller and a pulse generator; wherein the controller includes a control module and an analog-to-digital converter;

[0033] The control module is configured to: acquire a noise signal sensed by the target pin of the analog-to-digital converter, and obtain noise information based on the noise signal, wherein the noise information includes noise amplitude information and / or frequency information of the noise spectrum;

[0034] Obtain the interrupt information of the control module, the interrupt information including the triggering information of the target interrupt triggered by noise in the control module, the triggering information including the number of times it is triggered and / or the triggering frequency;

[0035] Based on the noise information and the interruption information, the noise level is obtained;

[0036] Based on the noise level, the communication parameters of the control module are configured, and the communication parameters include at least one of: IO speed, baud rate, oversampling point, retransmission count, and timeout time.

[0037] Control commands are sent to the pulse generator based on the configured communication parameters;

[0038] The pulse generator is configured to generate a pulse waveform in response to the control command.

[0039] Thirdly, one embodiment of this application also provides a semiconductor process apparatus, including: a process chamber and a pulse power supply as described in any of the above.

[0040] Fourthly, one embodiment of this application also provides a computing device, including a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor executes the computer program to implement the communication control method described above.

[0041] Fifthly, one embodiment of this application also provides a computer-readable storage medium storing a computer program that, when executed by a processor, implements the communication control method described above.

[0042] Sixthly, embodiments of this application also provide a computer program product or a computer program, the computer program product including a computer program stored in a computer-readable storage medium; the processor of the computer device reads the computer program from the computer-readable storage medium, and the processor executes the computer program to implement the steps of the above-described communication control method.

[0043] As can be seen from the above technical solution, the communication control method provided in this application monitors the noise signal sensed by the target pin of the analog-to-digital converter and the interrupt information of the control module through the controller of the pulse power supply. It obtains noise information based on the monitored noise signal, and obtains the noise level based on the noise information and the interrupt information. Finally, it configures the communication parameters of the control module based on the noise level. This achieves the purpose of configuring corresponding communication parameters under different noise levels, enabling the control module to communicate with other hardware modules based on different communication parameters under different noise levels. It realizes the adaptive adjustment of communication parameters with noise level, which is beneficial to ensure normal communication between the communication module and other hardware modules in different noise environments. It reduces the probability of abnormal operation of the pulse power supply due to communication abnormalities in strong noise environments, thereby improving the noise immunity level of the pulse power supply.

[0044] Furthermore, noise information and interruption information assess the intensity of noise from different perspectives. The noise level obtained based on noise information and interruption information can more accurately reflect the noise level, which is conducive to achieving accurate assessment of the noise level. Attached Figure Description

[0045] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this application. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0046] Figure 1 is a flowchart illustrating a communication control method according to one embodiment of this application;

[0047] Figure 2 is a flowchart illustrating another communication control method provided in one embodiment of this application;

[0048] Figure 3 is a schematic diagram of the structure of a control module provided in one embodiment of this application;

[0049] Figure 4 is a schematic diagram of a pulse power supply provided in one embodiment of this application;

[0050] Figure 5 is a schematic diagram of the structure of a computing device provided in one embodiment of this application. Detailed Implementation

[0051] Unless otherwise defined, the technical or scientific terms used in the embodiments of this application shall have the ordinary meaning understood by one of ordinary skill in the art to which this application pertains. The terms "first," "second," and similar terms used in the embodiments of this application do not indicate any order, quantity, or importance, but are merely used to avoid confusion of the constituent elements.

[0052] Unless the context otherwise requires, throughout this specification, "a plurality of" means "at least two," and "including" is interpreted as open-ended or encompassing, that is, "including, but not limited to." In the description of this specification, terms such as "one embodiment," "some embodiments," "exemplary embodiment," "example," "specific example," or "some examples" are intended to indicate that a particular feature, structure, material, or characteristic associated with that embodiment or example is included in at least one embodiment or example of this application. The illustrative representations of the above terms do not necessarily refer to the same embodiment or example.

[0053] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0054] Overview

[0055] The inventors discovered that, taking semiconductor process equipment as an example, the waveform output by a pulse power supply can be a pulse with an adjustable duty cycle. The rise and fall times of this pulse can be less than 5ns. In this case, the harmonic frequencies generated during the operation of the pulse power supply can reach 100MHz to 200MHz or even higher. At high frequencies, the inductive reactance of the parasitic inductance of the circuit increases linearly. The impedance difference between different frequencies causes inconsistent voltage attenuation at each harmonic frequency, resulting in waveform distortion after being fed into the process chamber. This makes the pulse output by the pulse power supply unable to meet process requirements. In addition, when the pulse power supply is placed outside the process chamber, the coaxial lines become parallel, causing common-mode noise crosstalk and introducing noise outside the process chamber. Therefore, the pulse power supply needs to be placed in the process chamber in close proximity to the electrostatic chuck (ESC) to avoid the above problems. However, since the area where the ESC is located is a high EMI noise area, and the noise level may change with the process, this places high demands on the noise immunity performance of the pulse power supply.

[0056] To address this issue, the inventors discovered that, in addition to improving the noise immunity of the pulse power supply through hardware means, they could also monitor the noise level of the environment in which the pulse power supply is located and adaptively adjust the communication parameters of the control module in the pulse power supply's controller. This allows the control module to communicate with other hardware modules based on different communication parameters under different noise levels, which helps ensure normal communication between the communication module and other hardware modules in different noise environments. This reduces the probability of abnormal operation of the pulse power supply due to communication anomalies in strong noise environments, thereby improving the noise immunity of the pulse power supply.

[0057] To accurately assess the noise level of the environment in which the pulse power supply operates, the noise signal sensed by the target pin of the analog-to-digital converter inside the pulse power supply can be acquired. Based on this noise signal, noise information, including noise amplitude and / or frequency information of the noise spectrum, can be obtained. This noise information is based on the directly sensed noise signal, and the noise level is reflected through the relevant information of the noise signal itself. Furthermore, to ensure normal operation and / or communication, the control module can be configured with corresponding interrupts. When the control module's operation and / or communication are abnormal, the corresponding interrupt can be triggered by the control module's interrupt service routine. Interrupt handlers (such as Routine, ISR) respond to interrupts and perform corresponding fault handling or restart operations to ensure the normal operation of the control module. Among these interrupts, some are noise-related. In this embodiment, interrupts triggered by noise are called target interrupts. By detecting interrupt information including the triggering information of target interrupts, interrupt information related to noise level can be captured from the existing interrupt mechanism of the control module. Thus, the noise level can be obtained by combining noise information that has been evaluated from different perspectives and interrupt information. In this way, the noise level can more accurately reflect the noise level and is conducive to the accurate assessment of the noise level.

[0058] Based on the above concept, the present application provides a communication control method. The communication control method provided by the present application will be described exemplarily below with reference to the accompanying drawings.

[0059] Exemplary methods

[0060] Some embodiments of this application exemplarily illustrate the communication control method. The pulse power supply further includes a pulse generator, and the controller includes a control module and an analog-to-digital converter, as shown in FIG1. ​​The communication control method includes:

[0061] S101: Acquire the noise signal sensed by the target pin of the analog-to-digital converter, and obtain noise information based on the noise signal. The noise information includes noise amplitude information and / or frequency information of the noise spectrum.

[0062] S102: Obtain interrupt information from the control module. The interrupt information includes the triggering information of the target interrupt triggered by noise in the control module. The triggering information includes the number of times it is triggered and / or the triggering frequency.

[0063] S103: Obtain the noise level based on noise information and interruption information;

[0064] S104: Configure the communication parameters of the control module based on the noise level. The communication parameters include at least one of the following: IO speed, baud rate, oversampling points, number of retransmissions, and timeout.

[0065] It is understood that in the various embodiments of this application, the sequence number of each process does not imply the order of execution. The execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of this application. For example, in Figure 1 and the foregoing description, S101 and S102 are not used to limit the order of execution between the two steps. In some embodiments, S101 and S102 can be executed sequentially according to their sequence numbers, or simultaneously, or S102 can be executed first and then S101. This application does not limit this, and it depends on the actual situation.

[0066] In this application, noise refers to noise as defined in the field of communication technology, such as any unwanted, random physical phenomenon or electrical effect that interferes with signal transmission. Noise is a non-signal source of useless energy that can be superimposed on a useful signal, reducing signal quality and thus affecting the quality and reliability of communication.

[0067] During operation, the target pin of the analog-to-digital converter (ADC) in the pulse power supply can sense noise. The ADC samples the noise and, through its analog-to-digital conversion function, obtains a noise signal containing noise information. This noise signal can be a digital signal, allowing the controller's control module to process it and obtain noise information. Within this noise information, the noise amplitude can be obtained by sampling the peak value or average peak value of a segment of the noise signal. This amplitude information can be used to characterize the noise's voltage. The noise frequency can be obtained by sampling the rising or falling edge frequencies of the noise signal. The target pin can refer to a pin in the ADC not designed to transmit the pulse power supply's operating signals. To better sense noise, the target pin can include a suspended (unconnected or floating) pin in the ADC. A suspended pin is equivalent to an uncontrolled input, easily affected by external electromagnetic interference, electrostatic discharge, or coupling effects from nearby signal lines. Therefore, sensing noise through a suspended pin allows for a more accurate perception of the noise level, and the noise information obtained from this signal can more accurately characterize the true noise level.

[0068] It should be noted that these suspended pins are not assigned specific functions during normal controller operation, representing underutilized existing hardware resources. This application leverages this characteristic of existing hardware: because suspended pins are essentially uncontrolled inputs with uncertain electrical states, they are highly susceptible to external electromagnetic interference, electrostatic discharge, or coupling effects from nearby signal lines. Based on this finding, by redefining them as noise sensing pins, a more accurate noise level can be sensed efficiently and at low cost without adding any additional dedicated hardware sensors.

[0069] In order to comprehensively detect noise at different locations, in one embodiment of this application, the target pin includes a first pin and a second pin. Both the first pin and the second pin are suspended pins of the analog-to-digital converter. The first pin is close to the noise location and the second pin is far away from the noise location.

[0070] Acquire the noise signal sensed by the target pin of the analog-to-digital converter, and obtain noise information based on the noise signal, including:

[0071] Acquire a first noise signal sensed by the first pin of the analog-to-digital converter, and obtain first noise information based on the first noise signal;

[0072] The second noise signal sensed by the second pin of the analog-to-digital converter is acquired, and the second noise information is obtained based on the second noise signal.

[0073] Due to the differences in the physical locations of different pins in the control module, some pins are relatively close to the noise generation location, while others are relatively far away. To comprehensively assess the noise level at different locations, in this embodiment, first noise information and second noise information are obtained based on the first noise signal sensed by the first pin and the second noise signal sensed by the second pin, respectively. Thus, when assessing the noise level, the noise level can be evaluated based on the interrupt information and the noise information including the first and second noise information. The noise level obtained in this way comprehensively considers the noise level at different locations of the control module, so that the obtained noise level can accurately characterize the true noise level of the area where the control module is located. The noise generation location may include the location of the switching nodes, power devices, etc. in the pulse power supply. In other words, it is the location of the noise source generated by the high-frequency switching action of the switching nodes and the large current change of the power devices in the pulse power supply. The power devices may be power transistors (such as MOSFETs, IGBTs, etc.). In some embodiments, the noise generation location can be obtained by instrument measurement or theoretical calculation. This application does not limit this and depends on the actual situation.

[0074] In some implementations, the first pin corresponds to the near-interference source coefficient, and the second pin corresponds to the far-field radiation coefficient;

[0075] Based on noise information and interruption information, the noise levels are obtained as follows:

[0076] The noise level is calculated based on the target information, the weights of the information included in the target information, the near interference source coefficient, and the far radiation coefficient; the target information includes the first noise information, the second noise information, and the interruption information.

[0077] In this embodiment, by assigning corresponding weight coefficients (near-interference source coefficient and far-field radiation coefficient) to the first pin and the second pin, and assigning corresponding weights to the target information, the different contributions of the first noise information, the second noise information, and the interruption information to the noise level assessment are considered during the noise level calculation process, which is beneficial to obtaining a noise level that accurately represents the noise level.

[0078] In some embodiments, the noise level is calculated based on target information, the weights corresponding to the information included in the target information, the near-interference source coefficient, and the far-field radiation coefficient, including:

[0079] The noise level is calculated by substituting the target information, the weights of the information included in the target information, the near-interference source coefficient, and the far-field radiation coefficient into the preset algorithm model.

[0080] For example, the preset algorithm model can be a first objective formula; the first objective formula includes:

[0081] NOISE_LV(n)=CNT×Ki+(NV_MAX1×K1+DV_MAX1×K2)×e K5 +(NV_MAX2×K3+DV_MAX2×K4)×e K6 ;

[0082] Where NOISE_LV(n) represents the noise level of the current period, e represents the natural constant, CNT represents the interruption information, Ki represents the weight corresponding to the interruption information, NV_MAX1 represents the noise amplitude information in the first noise information, DV_MAX1 represents the frequency information of the noise spectrum in the first noise information, NV_MAX2 represents the noise amplitude information in the second noise information, DV_MAX2 represents the frequency information of the noise spectrum in the second noise information, K1, K2, K3 and K4 are the weights corresponding to NV_MAX1, DV_MAX1, NV_MAX2 and DV_MAX2 respectively, K5 represents the near interference source coefficient, and K6 represents the far radiation coefficient.

[0083] This embodiment provides a feasible method for calculating noise levels. In this embodiment, not only are corresponding weights assigned to the first and second noise information respectively, thus considering the importance of noise information induced at near and far noise sources, but the weighted sum of the first noise information and its corresponding weights is further considered based on the near-interference source coefficient corresponding to the first pin. Similarly, the weighted sum of the second noise information and its corresponding weights is further considered based on the far-field radiation coefficient corresponding to the second pin. This approach facilitates a comprehensive consideration of the different impacts of noise information induced at near and far noise sources on the noise level, leading to more accurate noise levels.

[0084] It should be noted that in this embodiment, the preset calculation model is the first target formula, but this is not limiting. In some other embodiments, those skilled in the art can also use other mathematical models or lookup table methods to achieve the purpose of comprehensive weighted calculation based on interruption information, noise information, their respective weights, and near / far field coefficients. This application does not limit this. In order to avoid overshooting of noise level during the control process, in some other embodiments, historical noise level and the weight corresponding to historical noise level are introduced in the noise level evaluation process to introduce a feedback mechanism in the noise level calculation process to avoid overshooting of noise level. Specifically, the first pin corresponds to the near interference source coefficient, and the second pin corresponds to the far-field radiation coefficient.

[0085] Based on noise information and interruption information, the noise levels are obtained as follows:

[0086] The noise level is calculated by substituting the historical noise level, the weight corresponding to the historical noise level, the target information, the weights corresponding to the information included in the target information, the near interference source coefficient, and the far radiation coefficient into the feedback control algorithm model; the historical noise level includes the noise level of the previous cycle and the noise level of the cycle before that.

[0087] For example, the feedback control algorithm model is a second objective formula; the second objective formula includes:

[0088] NOISE_LV(n)=CNT×Ki+(NV_MAX1×K1+DV_MAX1×K2)×e K5 +(NV_MAX2×K3+DV_MAX2×K4)×e K6 +K10×NOISE_LV(n-1)+K11×(NOISE_LV(n-1)-NOISE_LV(n-2));

[0089] Wherein, NOISE_LV(n) represents the noise level of the current period, e represents the natural constant, CNT represents the interruption information, Ki represents the weight corresponding to the interruption information, NV_MAX1 represents the noise amplitude information in the first noise information, DV_MAX1 represents the frequency information of the noise spectrum in the first noise information, NV_MAX2 represents the noise amplitude information in the second noise information, DV_MAX2 represents the frequency information of the noise spectrum in the second noise information, K1, K2, K3 and K4 are the weights corresponding to NV_MAX1, DV_MAX1, NV_MAX2 and DV_MAX2 respectively; NOISE_LV(n-1) represents the noise level of the previous period, NOISE_LV(n-2) represents the noise level of the period before that, K10 and K11 are the weights corresponding to NOISE_LV(n-1) and NOISE_LV(n-2) respectively, K5 represents the near interference source coefficient, and K6 represents the far radiation coefficient.

[0090] In this embodiment, in addition to assigning corresponding weights to the first noise information and the second noise information respectively to consider the importance of noise information sensed at near and far noise occurrence locations, the first noise information and its corresponding weighted summation result are further considered based on the near interference source coefficient corresponding to the first pin, and the second noise information and its corresponding weighted summation result are further considered based on the far radiation coefficient corresponding to the second pin. Furthermore, historical noise levels and their corresponding weights are introduced. In this way, a feedback mechanism is introduced into the noise level calculation process to avoid overshooting of the noise level.

[0091] It should be noted that in this embodiment, the feedback control algorithm model is the second objective formula, but this is not limiting. In some other embodiments of this application, other forms of feedback control algorithms can also be used, such as proportional-integral-derivative (PID) control algorithms, fuzzy control algorithms, or predictive control algorithms based on historical noise data, as long as they introduce historical periodic noise levels as feedback terms to calculate the current noise level, they all fall within the scope of protection of this application.

[0092] In this embodiment, the noise level can be assessed at predetermined intervals, which can be referred to as the length of a cycle.

[0093] In some implementations, target interrupts include noise flag interrupts, overflow flag interrupts, and frame error flag interrupts. Noise flag interrupts indicate that signal noise is detected during data reception. During communication, noise can be caused by electromagnetic interference, poor signal quality, or crosstalk between adjacent signal lines. When the control module detects noise, it sets a noise flag. If noise interrupts are enabled, the control module generates an interrupt, allowing the software to check the noise flag and take appropriate error handling measures. Overflow flag interrupts are typically associated with the receive buffer. When the receive buffer is full and new data is still arriving, the receiver cannot store new data bytes, resulting in an overflow error. Frame error interrupts indicate that a structural error has been found in the received data frame. During communication, data is typically transmitted in a frame format with start bits, data bits, parity bits (optional), and stop bits. All three types of interrupts can be penalized due to noise, and these interrupts can reflect information such as the amplitude, average value, and spectrum of the noise.

[0094] When the target interrupt includes noise flag interrupt, overflow flag interrupt, and frame error interrupt, the second target formula can be adaptively adjusted to: NOISE_LV(n)=NS_CNT×K7+OV_CNT×K8+ERR_CNT×K9+(NV_MAX1×K1+DV_MAX1×K2)×e K5 +(NV_MAX2×K3+DV_MAX2×K4)×e K6+K10×NOISE_LV(n-1)+K11×(NOISE_LV(n-1)-NOISE_LV(n-2)); where NS_CNT, OV_CNT and ERR_CNT represent the number of times noise flag interrupt, overflow flag interrupt and frame error interrupt are triggered, respectively; K7, K8 and K9 represent the weights corresponding to noise flag interrupt, overflow flag interrupt and frame error interrupt, respectively.

[0095] In some embodiments, a method for configuring communication parameters is provided, specifically, the IO speed, baud rate, oversampling point, number of retransmissions, and timeout time each correspond to configuration values ​​that match the level;

[0096] Based on the noise level, the communication parameters of the control module are configured as follows:

[0097] Based on the noise level and the number of levels corresponding to the configuration values ​​of each communication parameter, the noise level is normalized and rounded to obtain the normalized level corresponding to each communication parameter.

[0098] Based on the normalization level corresponding to each communication parameter, the configuration value corresponding to each normalization level is determined. IO (Input / Output) speed can affect the slope of the signal's rising and falling edges. In some implementations, the configuration value of IO speed is negatively correlated with the normalization level or noise level; that is, the higher the normalization level or noise level, the lower the configuration value of IO speed.

[0099] Baud rate can affect the number of signal changes transmitted per second. In some implementations, the baud rate configuration is negatively correlated with the normalization level or noise level; that is, the higher the normalization level or noise level, the lower the baud rate configuration.

[0100] Oversampling points refer to sample points acquired within one symbol period, which can be used to determine the logic state of a signal. In some implementations, the configuration value of oversampling points is positively correlated with the normalization level or noise level; that is, the higher the normalization level or noise level, the higher the configuration value of the oversampling points.

[0101] The retransmission count can refer to the maximum number of times the control module retransmits the same data packet when the data packet is lost or corrupted. In some implementations, the configured value of the retransmission count is positively correlated with the normalization level or noise level; that is, the higher the normalization level or noise level, the higher the configured value of the retransmission count.

[0102] Timeout refers to the maximum time the control module waits for the receiver to return a data packet reception message after sending a data packet. After the timeout period, the control module can perform operations such as retransmitting the data packet. In some implementations, the configured value of the timeout period is positively correlated with the normalization level or noise level; that is, the higher the normalization level or noise level, the higher the configured value of the timeout period.

[0103] Different configuration values ​​for these communication parameters can affect the communication module's sensitivity to noise. By configuring these communication parameter values, the communication reliability of the module can be ensured under different noise levels. For example, when the noise level is high, normal communication of the module can be ensured by reducing I / O speed and lowering the baud rate.

[0104] Each communication parameter can be pre-configured with different levels of values, as shown in Table 1 below:

[0105] Table 1. Correspondence between the configuration values ​​of communication parameters at different levels

[0106] Table 1 shows the correspondence between each communication parameter and its configuration values ​​at different noise levels. After calculating the noise level, to facilitate obtaining the corresponding configuration values ​​for each communication parameter at the appropriate noise level, the noise level can be normalized for different communication parameters. In other words, the calculated noise level is normalized to a predetermined range for each communication parameter and then rounded to obtain the normalized level for each parameter. Subsequently, based on this normalized level, the specific configuration value for each communication parameter can be determined by referring to Table 1.

[0107] For example, the I / O speed configuration has four levels. When configuring the I / O speed, the calculated noise level can be normalized to a range of 1 to 4, and the normalized noise level can be rounded down. Assuming the calculated noise level, after normalization and rounding, is 3, the I / O speed can be configured to 10MHz. In this implementation, the normalization level is positively correlated with the noise level; that is, the higher the normalization level, the higher the noise level. Configuring a lower I / O speed can ensure normal communication between the control module and other hardware.

[0108] Similarly, for baud rate, its configuration value is divided into five levels. When configuring the baud rate value, the calculated noise level range can be normalized to 1 to 5, and the normalized noise level can be rounded. Assuming that the normalized noise level obtained after normalization and rounding is 5, the baud rate can be configured to 9 kbit / s to ensure normal communication of the control module under high noise levels.

[0109] In one specific embodiment of this application, a feasible execution process of a communication control method is provided, as shown in Figure 2. The process includes:

[0110] When the pulse power supply starts or noise monitoring begins, the noise monitoring process of the control module initializes and begins acquiring noise signals sensed by the target pins (e.g., IO1 and IO2) of the analog-to-digital converter. Initialization settings may include default maximum IO speed configuration, default maximum baud rate configuration, default maximum number of sampling points, default maximum number of retransmissions, default maximum timeout, and initial noise judgment maximum (NOSIE_LV_MAX) and minimum (NOSIE_LV_MIN) values. In this embodiment, the object of noise monitoring can be an idle analog-to-digital converter (i.e., an idle ADC, an analog-to-digital converter that is not currently processing working data) in the controller, thus avoiding any impact on the normal operation of the controller during noise monitoring.

[0111] In some implementations, when acquiring the first noise signal and the second noise signal sensed by the first pin (IO1) and the second pin (IO2) of the idle ADC, respectively, the maximum sampling rate (e.g., 12 bits) can be used. During the sampling process, noise amplitude information is obtained based on the peak value (maximum value) of the noise signal, and frequency information of the noise spectrum is obtained based on the rising / falling edge detection (maximum difference value) of the noise signal. Corresponding weights (proportional coefficients) K1 to K4 are assigned to the noise amplitude information (NV_MAX1, NV_MAX2) and the frequency information of the noise spectrum (DV_MAX1, DV_MAX2) included in the first noise signal and the second noise signal, respectively. Corresponding weights (near-interference source coefficient K5 and far-field radiation coefficient K6) are also assigned to the first pin and the second pin.

[0112] In addition to acquiring the noise signal and noise information sensed by the target pin of the analog-to-digital converter, the interrupt information of the control module can also be statistically analyzed. This interrupt information includes noise flag interrupt, overflow flag interrupt, and frame error interrupt, each corresponding to a weight (proportional coefficient) K7 to K9. These interrupt information reflect the noise amplitude, average value, and spectrum, respectively.

[0113] After obtaining the interruption and noise information, based on the second objective formula: NOISE_LV(n)=NS_CNT×K7+OV_CNT×K8+ERR_CNT×K9+(NV_MAX1×K1+DV_MAX1×K2)×e K5 +(NV_MAX2×K3+DV_MAX2×K4)×e K6The noise level is calculated by adding K10×NOISE_LV(n-1) and K11×(NOISE_LV(n-1)-NOISE_LV(n-2)).

[0114] After normalizing and rounding the noise level, the normalized level NOISE_LV_0 corresponding to each communication parameter is obtained. After obtaining the normalized level, a heartbeat data interrupt triggered by a timer every 100ms can be used to trigger the step of determining the configuration value corresponding to each communication parameter based on the normalized level. The execution of this step can be referred to a similar correspondence as shown in Table 1, and will not be elaborated here.

[0115] In order to improve the concurrency of each step during the execution of the entire method, the noise monitoring process can perform the relevant logic of acquiring the noise signal sensed by the target pin of the analog-to-digital converter and obtaining the noise information based on the noise signal; the data process can respond to the heartbeat data interruption and perform the relevant logic of communication parameter configuration; and the functional process can perform other functional logic in the communication control method (such as interrupt information acquisition logic). In this way, the execution of different steps of the communication control method by the three processes is conducive to improving the concurrency of the method and improving the execution efficiency of the method.

[0116] Referring to Figure 3, which shows a hardware schematic of the control module in one embodiment, the control module can be implemented using an STM32G474VET6 microcontroller. The functions of each pin of the microcontroller can be found in relevant technical documents or product documentation. Figure 3 shows the signals transmitted or the hardware connections of some pins. VCC represents a voltage signal, USER-LED and LED1-4 represent different indicator lights, UARTi_RX represents the i-th (i=2, 3, 4, 5) UART (Universal Asynchronous Receiver / Transmitter) receive signal, UARTi_TX represents the i-th UART output signal, OSC represents the oscillator signal, NRST represents the reset signal, SUBPULSE_SYNC represents the pulse synchronization signal, SWCLK represents the clock signal for the debug / programming interface, SWDIO represents the bidirectional data transmission signal, SPI1_SCK represents the clock signal for the SPI communication interface, and SPI1_MISO represents the clock signal for the SPI (Serial Peripheral) interface. In the serial peripheral interface (SPI) communication protocol, the data signal sent from the slave device to the master device is represented by SPI1_MOSI, which represents the data signal sent from the master device to the slave device. SGND represents grounding, CHj-CHN1 / 2 represents the j-th (j=1, 3, 5, 7) channel signal that sends control commands to the pulse generator, and N=A, B, C, D.

[0117] In some implementations, after obtaining the noise information, the noise information can be downrated (e.g., downrated by 20%) to filter out high-frequency noise in the noise information.

[0118] Exemplary device

[0119] In one exemplary embodiment of this application, a communication control device is also provided, applied to a controller of a pulse power supply. The pulse power supply further includes a pulse generator, and the controller includes a control module and an analog-to-digital converter. The communication control device includes:

[0120] The noise acquisition module is used to acquire the noise signal sensed by the target pin of the analog-to-digital converter, and obtain noise information based on the noise signal. The noise information includes noise amplitude information and / or frequency information of the noise spectrum.

[0121] The interrupt acquisition module is used to acquire interrupt information from the control module. The interrupt information includes the triggering information of the target interrupt triggered by noise in the control module, and the triggering information includes the number of times it is triggered and / or the triggering frequency.

[0122] The noise level determination module is used to determine the noise level based on noise information and interruption information;

[0123] The parameter configuration module is used to configure the communication parameters of the control module based on the noise level. The communication parameters include at least one of the following: IO speed, baud rate, oversampling point, number of retransmissions, and timeout.

[0124] Specific limitations regarding the communication control device can be found in the limitations regarding the communication control method above, and will not be repeated here. Each module in the aforementioned communication control device can be implemented entirely or partially through software, hardware, or a combination thereof. These modules can be embedded in hardware or independently of the processor in the computer device, or stored in software in the memory of the computer device, so that the processor can call and execute the operations corresponding to each module.

[0125] Accordingly, this application also provides a pulse power supply, as shown in FIG4, including: a controller and a pulse generator; wherein, the controller includes a control module and an analog-to-digital converter;

[0126] The control module is configured to: acquire the noise signal sensed by the target pin of the analog-to-digital converter, and obtain noise information based on the noise signal, the noise information including noise amplitude information and / or frequency information of the noise spectrum;

[0127] Obtain interrupt information from the control module. The interrupt information includes the triggering information of the target interrupt triggered by noise in the control module. The triggering information includes the number of times it is triggered and / or the triggering frequency.

[0128] The noise level is obtained based on noise and interruption information;

[0129] Based on the noise level, configure the communication parameters of the control module. The communication parameters include at least one of the following: IO speed, baud rate, oversampling points, retransmission count, and timeout.

[0130] Control commands are sent to the pulse generator based on the configured communication parameters;

[0131] The pulse generator is configured to generate pulse waveforms in response to control commands.

[0132] The control module can be hardware such as a processor, microcontroller, or programmable logic controller. This control module can be configured to execute the communication control method described in any of the above embodiments. In addition to the control module and analog-to-digital converter, the controller may also include hardware such as a DMA (Direct Memory Access) controller, GPIO ports 1-3, a GPIO clock generator, and a timer. This application does not limit the specific components; the choice depends on the actual situation.

[0133] In some embodiments, the pulse generator is also configured in an automatic communication parameter mode, in which the communication parameters of the pulse generator follow the changes in the communication parameters of the control module.

[0134] In one exemplary embodiment of this application, a semiconductor process apparatus is also provided, including a process chamber and a pulse power supply as described in any of the above embodiments.

[0135] Exemplary computing device

[0136] Another embodiment of this application also proposes a computing device, as shown in FIG5, which includes a memory and a processor. The memory stores a computer program, and the processor executes the steps of the communication control method according to various embodiments of this application as described in the above embodiments.

[0137] The internal structure of the computing device is shown in Figure 5. The computing device includes a processor, memory, network interface, and input devices connected via a system bus. The processor provides computing and control capabilities. The memory includes a non-volatile storage medium and internal memory. The non-volatile storage medium stores the operating system and computer programs. The internal memory provides an environment for the operation of the operating system and computer programs stored in the non-volatile storage medium. The network interface is used for communication with external terminals via a network connection. When the computer program is executed by the processor, it follows the steps of the communication control method according to various embodiments of this application described in the above embodiments.

[0138] The processor may include the main processor, as well as baseband chips, modems, etc.

[0139] The memory stores a program that executes the technical solution of this invention, and may also store an operating system and other critical business functions. Specifically, the program may include program code, which includes computer operation instructions. More specifically, the memory may include read-only memory (ROM), other types of static storage devices capable of storing static information and instructions, random access memory (RAM), other types of dynamic storage devices capable of storing information and instructions, disk storage, flash memory, etc.

[0140] The processor can be a general-purpose processor, such as a general-purpose central processing unit (CPU), a microprocessor, etc., or an application-specific integrated circuit (ASIC), or one or more integrated circuits used to control the execution of the program of the present invention. It can also be a digital signal processor (DSP), an application-specific integrated circuit (ASIC), an off-the-shelf programmable gate array (FPGA), or other programmable logic devices, discrete gate or transistor logic devices, or discrete hardware components.

[0141] Input devices may include devices that receive data and information input by the user, such as keyboards, mice, cameras, scanners, light pens, voice input devices, touch screens, pedometers, or gravity sensors.

[0142] Output devices may include devices that allow information to be output to the user, such as displays, printers, speakers, etc.

[0143] The communication interface may include any transceiver-like device for communicating with other devices or communication networks, such as Ethernet, Radio Access Network (RAN), Wireless Local Area Network (WLAN), etc.

[0144] The processor executes programs stored in memory and calls other devices, which can be used to implement various steps of any of the communication control methods provided in the above embodiments of this application.

[0145] The computing device may also include a display component and a voice component. The display component may be a liquid crystal display screen or an e-ink display screen. The input device of the computing device may be a touch layer covering the display component, or a button, trackball or touchpad set on the casing of the computing device, or an external keyboard, touchpad or mouse, etc.

[0146] Those skilled in the art will understand that the structure shown in Figure 5 is merely a block diagram of a portion of the structure related to the present application and does not constitute a limitation on the computing device to which the present application is applied. The specific computing device may include more or fewer components than shown in the figure, or combine certain components, or have different component arrangements.

[0147] Exemplary computer program products and storage media

[0148] In addition to the methods and devices described above, the communication control method provided in the embodiments of this application can also be a computer program product, which includes computer program instructions. When the computer program instructions are run by a processor, they cause the processor to perform the steps in the communication control method according to various embodiments of this application as described in the "Exemplary Methods" section above.

[0149] Computer program products can be written in any combination of one or more programming languages ​​to perform the operations of the embodiments of this application. The programming languages ​​include object-oriented programming languages ​​such as Java and C++, as well as conventional procedural programming languages ​​such as C or similar languages. The program code can be executed entirely on the user's computing device, partially on the user's computing device, as a standalone software package, partially on the user's computing device and partially on a remote computing device, or entirely on a remote computing device or server.

[0150] Furthermore, embodiments of this application also provide a computer-readable storage medium having a computer program stored thereon, the computer program being executed by a processor of the steps in the communication control methods according to various embodiments of this application as described in the "Exemplary Methods" section above.

[0151] Those skilled in the art will understand that all or part of the processes in the methods of the above embodiments can be implemented by a computer program instructing related hardware. This computer program can be stored in a non-volatile computer-readable storage medium. When executed, the computer program can include the processes of the embodiments of the above methods. Any references to memory, storage, databases, or other media used in the embodiments provided in this application can include non-volatile and / or volatile memory. Non-volatile memory can include read-only memory (ROM), programmable ROM (PROM), electrically programmable ROM (EPROM), electrically erasable programmable ROM (EEPROM), or flash memory. Volatile memory can include random access memory (RAM) or external cache memory. By way of illustration and not limitation, RAM is available in various forms, such as static RAM (SRAM), dynamic RAM (DRAM), synchronous DRAM (SDRAM), dual data rate SDRAM (DDRSDRAM), enhanced SDRAM (ESDRAM), synchronous link DRAM (SLDRAM), RAMbus direct RAM (RDRAM), direct memory bus dynamic RAM (DRDRAM), and RAMbus dynamic RAM (RDRAM), etc.

[0152] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this application.

[0153] The above embodiments merely illustrate several implementation methods of this application, and their descriptions are relatively specific and detailed. However, they should not be construed as limiting the scope of the solutions provided in the embodiments of this application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A communication control method, characterized in that, A controller for a pulse power supply, the pulse power supply further including a pulse generator, the controller including a control module and an analog-to-digital converter, the communication control method including: Obtain the noise signal sensed by the target pin of the analog-to-digital converter, and obtain noise information based on the noise signal; Obtain the interrupt information of the control module, the interrupt information including the triggering information of the target interrupt triggered by noise in the control module, the triggering information including the number of times it is triggered and / or the triggering frequency; Based on the noise information and the interruption information, the noise level is obtained; Based on the noise level, the communication parameters of the control module are configured, including at least one of the following: IO speed, baud rate, oversampling point, number of retransmissions, and timeout time.

2. The communication control method according to claim 1, characterized in that, The target pin includes a first pin and a second pin, both of which are suspended pins of the analog-to-digital converter. The first pin is close to the noise generation location, and the second pin is far away from the noise generation location. The step of acquiring the noise signal sensed by the target pin of the analog-to-digital converter and obtaining noise information based on the noise signal includes: Acquire a first noise signal sensed by the first pin of the analog-to-digital converter, and obtain first noise information based on the first noise signal; The second noise signal sensed by the second pin of the analog-to-digital converter is acquired, and the second noise information is obtained based on the second noise signal.

3. The communication control method according to claim 2, characterized in that, The first pin corresponds to the near-interference source coefficient, and the second pin corresponds to the far-field radiation coefficient; The process of obtaining the noise level based on the noise information and the interruption information includes: The noise level is calculated based on the target information, the weights corresponding to the information included in the target information, the near-interference source coefficient, and the far-field radiation coefficient; The target information includes the first noise information, the second noise information, and the interruption information.

4. The communication control method according to claim 3, characterized in that, The noise level is calculated based on the target information, the weights corresponding to the information included in the target information, the near-interference source coefficient, and the far-field radiation coefficient, including: The noise level is calculated by substituting the target information, the weights corresponding to the information included in the target information, the near-interference source coefficient, and the far-field radiation coefficient into the first target formula; the first target formula includes: NOISE_LV(n)=CNT×Ki+(NV_MAX1×K1+DV_MAX1×K2)×e K5 +(NV_MAX2×K3+DV_MAX2×K4)×e K6 Wherein, NOISE_LV(n) represents the noise level of the current period, e represents the natural constant, CNT represents the interruption information, Ki represents the weight corresponding to the interruption information, NV_MAX1 represents the noise amplitude information in the first noise information, DV_MAX1 represents the frequency information of the noise spectrum in the first noise information, NV_MAX2 represents the noise amplitude information in the second noise information, DV_MAX2 represents the frequency information of the noise spectrum in the second noise information, K1, K2, K3 and K4 are the weights corresponding to NV_MAX1, DV_MAX1, NV_MAX2 and DV_MAX2 respectively, K5 represents the near-interference source coefficient, and K6 represents the far-field radiation coefficient.

5. The communication control method according to claim 2, characterized in that, The first pin corresponds to the near-interference source coefficient, and the second pin corresponds to the far-field radiation coefficient; The process of obtaining the noise level based on the noise information and the interruption information includes: The noise level is calculated by substituting the historical noise level, the weight corresponding to the historical noise level, the target information, the weight corresponding to each of the information included in the target information, the near-interference source coefficient, and the far-field radiation coefficient into the second target formula; the historical noise level includes the noise level of the previous cycle and the noise level of the cycle before that; the target information includes the first noise information, the second noise information, and the interruption information; the second target formula includes: NOISE_LV(n)=CNT×Ki+(NV_MAX1×K1+DV_MAX1×K2)×e K5 +(NV_MAX2×K3+DV_MAX2×K4)×e K6 +K10×NOISE_LV(n-1)+K11×(NOISE_LV(n-1)-NOISE_LV(n-2)); Wherein, NOISE_LV(n) represents the noise level of the current period, e represents the natural constant, CNT represents the interruption information, Ki represents the weight corresponding to the interruption information, NV_MAX1 represents the noise amplitude information in the first noise information, DV_MAX1 represents the frequency information of the noise spectrum in the first noise information, NV_MAX2 represents the noise amplitude information in the second noise information, DV_MAX2 represents the frequency information of the noise spectrum in the second noise information, K1, K2, K3 and K4 are the weights corresponding to NV_MAX1, DV_MAX1, NV_MAX2 and DV_MAX2 respectively; NOISE_LV(n-1) represents the noise level of the previous period, NOISE_LV(n-2) represents the noise level of the period before that, K10 and K11 are the weights corresponding to NOISE_LV(n-1) and NOISE_LV(n-2) respectively, K5 represents the near-interference source coefficient, and K6 represents the far-field radiation coefficient.

6. The communication control method according to any one of claims 1 to 5, characterized in that, The IO speed, baud rate, oversampling points, retransmission count, and timeout time each correspond to configuration values ​​that match the level. The configuration of the communication parameters of the control module based on the noise level includes: Based on the noise level and the number of levels corresponding to the configuration values ​​of each of the communication parameters, the noise level is normalized and rounded to obtain the normalized level corresponding to each of the communication parameters. Based on the normalization level corresponding to each of the communication parameters, the configuration value corresponding to each of the communication parameters and the normalization level is determined.

7. The communication control method according to any one of claims 1 to 5, characterized in that, The target interrupt includes at least one of noise flag interrupt, overflow flag interrupt, and frame error interrupt.

8. A pulse power supply, characterized in that, include: A controller and a pulse generator; wherein the controller includes a control module and an analog-to-digital converter; The control module is configured to: acquire a noise signal sensed by the target pin of the analog-to-digital converter, and obtain noise information based on the noise signal, wherein the noise information includes noise amplitude information and / or frequency information of the noise spectrum; Obtain the interrupt information of the control module, the interrupt information including the triggering information of the target interrupt triggered by noise in the control module, the triggering information including the number of times it is triggered and / or the triggering frequency; Based on the noise information and the interruption information, the noise level is obtained; Based on the noise level, the communication parameters of the control module are configured, and the communication parameters include at least one of: IO speed, baud rate, oversampling point, retransmission count, and timeout time. Control commands are sent to the pulse generator based on the configured communication parameters; The pulse generator is configured to generate a pulse waveform in response to the control command.

9. A semiconductor process apparatus, characterized in that, include: The process chamber and the pulse power supply as described in claim 8.

10. A computing device, characterized in that, It includes a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor executes the computer program to implement the communication control method according to any one of claims 1 to 7.

11. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores a computer program, which, when executed by a processor, implements the communication control method according to any one of claims 1 to 7.

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