Plasma power control device for independent control of high frequency amplitude and plasma generation facility including same

Abstract

A plasma power control device enabling independent control of high frequency pulse amplitude, and a plasma generation facility including same are provided, the plasma power control device providing high frequency. The power control device comprises: an AC / DC converter electrically connected to a power source; a DC / DC converter electrically connected to an output of the AC / DC converter; a DC / AC converter electrically connected to an output of the DC / DC converter; and a controller for controlling at least one of switches of the DC / DC converter on the basis of an output of the DC / AC converter.

Description

Plasma power control device for independent control of high-frequency amplitude and plasma generation facility including the same

[0001] The present invention relates to a plasma power control device and a plasma generation facility including the same. More specifically, the invention relates to a plasma power control device that enables independent control of the high-frequency pulse amplitude in a plasma power control device that provides a high frequency, and a plasma generation facility including the same.

[0002] Plasma refers to a non-neutral substance in a high-energy state that has a sufficiently high density of electric charge. When an electrical stimulus or microwaves are applied to a neutral gas, ionized gas molecules and free electrons can be generated. Then, under conditions such as an electric field, electrons and ions can be continuously collided to reach a plasma state or maintain the electrical properties of the plasma.

[0003] Plasma is widely utilized in various industrial fields, including processes such as etching, deposition, washing, and ashing, such as semiconductor manufacturing. Recently, there has been a demand for plasma generation equipment that offers high control over plasma ion energy and demonstrates higher process performance.

[0004] The problem that the present invention aims to solve is to provide a power control device capable of performing frequency control or amplitude control independently by controlling the mutual influence between frequency control and amplitude control of the power control device.

[0005] Another problem that the present invention aims to solve is to provide a method for controlling the above-mentioned power control device.

[0006] Another problem that the present invention aims to solve is to provide a plasma generation facility including the above-mentioned power control device.

[0007] Another problem that the present invention aims to solve is to provide a process method using the above-mentioned plasma generation facility.

[0008] The problems of the present invention are not limited to the technical problems mentioned above, and other unmentioned technical problems will be clearly understood by those skilled in the art from the description below.

[0009] A power control device according to one embodiment of the present invention for solving the above problem includes an AC / DC converter electrically connected to a power source, a DC / DC converter electrically connected to the output of the AC / DC converter, a DC / AC converter electrically connected to the output of the DC / DC converter, and a controller that controls at least one of the switches of the DC / DC converter based on the output of the DC / AC converter.

[0010] The output of the above DC / AC converter may include current and voltage.

[0011] The above controller may further control at least one of the switches of the DC / AC converter based on the output of the DC / AC converter, wherein the switches of the DC / AC converter are primarily controlled based on the output current of the DC / AC converter, and the switches of the DC / DC converter are secondarily controlled based on the output voltage of the DC / AC converter.

[0012] Controlling the switch of the above DC / DC converter may include controlling the switch so that the output value of the above DC / AC converter reaches a target value.

[0013] The output voltage of the DC / DC converter is variable according to the switch control of the DC / DC converter, but the output voltage of the DC / DC converter may be independent of the switch control of the DC / AC converter.

[0014] The above power supply is a three-phase power supply that provides output to the first to third phase lines, and the AC / DC converter includes a first inductor and a first capacitor connected in parallel in the first phase line, a second inductor and a second capacitor connected in parallel in the second phase line, a third inductor and a third capacitor connected in parallel in the third phase line, a first switch and a second switch connected in series with each other, a third switch and a fourth switch connected in series with each other, a fifth switch and a sixth switch connected in series with each other, and a fourth capacitor connected in parallel to the output terminal of the AC / DC converter, wherein the first inductor is connected to the connection point of the first switch and the second switch, the second inductor is connected to the connection point of the third switch and the fourth switch, and the third inductor can be connected to the connection point of the fifth switch and the sixth switch.

[0015] The above DC / DC converter may include the switch connected to the input terminal of the DC / DC converter, the inductor connected to the switch, the diode connected to the junction point of the switch and the inductor, and the capacitor connected in parallel to the output terminal of the DC / DC converter.

[0016] The above DC / AC converter includes a first switch and a second switch connected in series with each other, and a third switch and a fourth switch connected in series with each other, and the connection point of the first switch and the second switch and the connection point of the third switch and the fourth switch may be an output unit of the DC / AC converter.

[0017] The device further includes a resonant network electrically connected to the output of the DC / AC converter, wherein the resonant network may include a first inductor, a second inductor connected in series with the first inductor, and a capacitor connected in parallel with the second inductor.

[0018] The above resonant network may further include a third inductor connected in series with the capacitor.

[0019] The above resonant network further includes a third inductor connected in parallel with the first inductor, wherein the input and output of the capacitor may be connected to the first inductor and the third inductor, respectively.

[0020] The above resonant network may further include a third inductor connected in series with the capacitor.

[0021] A plasma generation facility according to one embodiment of the present invention for solving any other problem described above comprises an AC / DC converter electrically connected to a power source, a DC / DC converter electrically connected to the output of the AC / DC converter, a DC / AC converter electrically connected to the output of the DC / DC converter, a plasma reactor electrically connected to the output of the DC / AC converter, and a controller that controls at least one of the switches of the DC / DC converter based on the output of the DC / AC converter.

[0022] The above controller can further control at least one of the switches of the DC / AC converter based on the sensing value of the reactor.

[0023] Controlling the switch of the above DC / DC converter may include controlling the switch so that the sensing value of the reactor reaches a target value.

[0024] A power control method according to an embodiment of the present invention for solving any other problem described above comprises setting an operation goal of a DC / AC converter, performing one or more of PWM or PFM control of a DC / AC converter switch according to the operation goal of the DC / AC converter, and if the measured value of the output of the DC / AC converter does not meet the operation goal condition, setting an operation goal of a DC / DC converter, and performing one or more of PWM or PFM control of a DC / DC converter switch according to the operation goal of the DC / DC converter.

[0025] The above power control method may further include measuring the output of the DC / AC converter after the switch control of the DC / DC converter, and if the measured value of the DC / AC converter output does not meet the operation target condition, performing the switch control of the DC / DC converter again.

[0026] A process method according to one embodiment of the present invention for solving any other problem above is a process control method of a process system including a reactor receiving a high-frequency power supply, comprising determining the process state of the reactor, performing switch control of a DC / AC converter of the high-frequency power supply based on the process state, and performing switch control of a DC / DC converter of the high-frequency power supply based on the output value of the DC / AC converter.

[0027] Specific details of other embodiments are included in the detailed description.

[0028] According to embodiments of the present invention, frequency control and amplitude control of a power control device can be performed independently, allowing for the selective utilization of fixed and variable control factors, such as controlling only the amplitude while keeping the frequency fixed. This improves the precision control capability of the plasma of a plasma generator and enables the performance of a more uniform and improved plasma-based process.

[0029] The effects according to the embodiments of the present invention are not limited to those exemplified above, and a wider variety of effects are included in this specification.

[0030] FIG. 1 is a schematic diagram of the configuration of a plasma generation facility according to one embodiment of the present invention.

[0031] Figure 2 is an exemplary circuit schematic of Figure 1.

[0032] Figure 3 is an exemplary circuit schematic of the AC / DC converter of Figure 1.

[0033] Figure 4 is an exemplary circuit schematic of the DC / DC converter of Figure 1.

[0034] Figure 5 is an exemplary circuit schematic of the DC / AC converter of Figure 1.

[0035] Figure 6 is an exemplary circuit schematic of the resonant network of Figure 1.

[0036] Figure 7 is another exemplary circuit schematic of the resonant network of Figure 1.

[0037] Figure 8 is another exemplary circuit schematic of the resonant network of Figure 1.

[0038] Figure 9 is another exemplary circuit schematic of the resonant network of Figure 1.

[0039] FIGS. 10 to 12 are flowcharts illustrating a control method of a power control device according to an embodiment of the present invention.

[0040] The advantages and features of the present invention and the methods for achieving them will become clear by referring to the embodiments described below in detail together with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below but can be implemented in various different forms. The embodiments are provided merely to ensure that the disclosure of the present invention is complete and to fully inform those skilled in the art of the scope of the invention, and the present invention is defined only by the scope of the claims.

[0041] Furthermore, the scope of patent claims is not a matter describing the technical content that constitutes the substance of the invention, but rather a matter indicating what scope is claimed as a right based on the technical configuration disclosed in the detailed description of the invention. Therefore, it is somewhat inevitable that the scope of patent claims is composed of abstract higher-level concepts that include the technology disclosed in the detailed description of the invention, and if a person skilled in the art can understand the technical configuration, combination, and functional effects belonging to the scope of patent claims through the entire specification, then the scope of patent claims should be considered to be supported by the detailed description of the invention.

[0042] That is, various modifications may be made to the embodiments presented in the present invention. The embodiments described below are not intended to limit the forms of practice and should be understood to include all modifications, equivalents, and substitutions thereof.

[0043] If any term described in this specification is to be used with a specific meaning, such meaning may be defined and used, and it should be interpreted accordingly. Unless otherwise defined, all terms used in this specification (including technical and scientific terms) may be used in a meaning that is commonly understood by those skilled in the art to which the present invention pertains. Furthermore, terms defined in commonly used dictionaries are not to be interpreted ideally or excessively unless explicitly and specifically defined otherwise.

[0044] In this specification, "and / or" includes each of the mentioned items and all combinations of one or more. Also, the singular form includes the plural form unless specifically stated otherwise in the text. As used in this specification, "comprises" and / or "comprising" do not exclude the presence or addition of one or more other components in addition to the mentioned components. A numerical range indicated by "to" indicates a numerical range that includes the values ​​listed before and after it as a lower and upper limit, respectively. "Approximately" or "about" means a value or numerical range within 20% of the value or numerical range listed after it.

[0045] In this specification, ordinal modifiers such as 'first component,' 'second component,' and 'first-1 component' are used merely to distinguish one component from another when referring to components. Accordingly, the first component referred to below may be referred to as the second component within the scope of the technical concept of the present invention. For example, what is referred to as the first component in one embodiment may be referred to as the second component in another embodiment. Furthermore, it goes without saying that what is referred to as the first component in the description of the invention may be referred to as the second component in the claims.

[0046] In this specification, the terms 'converter' or 'converter' include not only converting alternating current to direct current (rectifier, AC-DC converter), but also inverters that convert direct current to alternating current (inverter, DC-AC converter) and converting direct current to direct current of a different voltage magnitude (DC-DC converting).

[0047] In this specification, "electrically connected" means not only cases where any two electrical components are directly connected, but also cases where they are connected through other electrical components, such as circuits, modules, units, passive components, etc. The circuit diagram does not exclude the presence or addition of one or more other components in addition to the electrical components depicted.

[0048] The present invention will be described in detail below with reference to the attached drawings.

[0049] FIG. 1 is a schematic diagram of the configuration of a plasma generation facility according to an embodiment of the present invention. FIG. 2 is a schematic diagram of an exemplary circuit of FIG. 1. FIG. 3 is a schematic diagram of an exemplary circuit of an AC / DC converter of FIG. 1. FIG. 4 is a schematic diagram of an exemplary circuit of a DC / DC converter of FIG. 1. FIG. 5 is a schematic diagram of an exemplary circuit of a DC / AC converter of FIG. 1. FIG. 6 is a schematic diagram of an exemplary circuit of a resonant network of FIG. 1. FIG. 7 is another schematic diagram of an exemplary circuit of a resonant network of FIG. 1. FIG. 8 is yet another schematic diagram of an exemplary circuit of a resonant network of FIG. 1. FIG. 9 is yet another schematic diagram of an exemplary circuit of a resonant network of FIG. 1.

[0050] Referring to FIGS. 1 to 9, the plasma generation facility (10) (or plasma generation system) according to the present embodiment may include a power control device (100) (or power supply device, or pulse generator), a power source (200), and a reactor (300) (or load). The power control device (100) may be referred to as a power control device in that it modulates the power source (200) at least partially, but it may also be referred to as a power supply device in that it supplies power to the reactor (300).

[0051] The power source (200) may be a three-phase AC power source. Alternatively, unlike what is depicted in the drawing, the power source may be a single-phase AC power source. The applied voltage of the power source (200) may be configured to be variable. That is, under the control of the user, the power source (200) may provide AC power having various amplitudes or frequencies. The power source (200) may be electrically connected to the power control device (100).

[0052] The power control device (100) includes an AC / DC converter (110) (or AC-DC converter, or AC / DC module), a DC / DC converter (120) (or DC-DC converter, or DC / DC module), and a DC / AC converter (130) (or inverter, or DC-AC converter, or DC / AC module), and may further include a resonant network (140) (or resonant tank, or resonant module) and a controller (150) (or control unit).

[0053] The AC / DC converter (110) can convert alternating current power provided by the power source (200) into direct current. That is, the AC / DC converter (110) can function as a rectifier. Although not shown in the drawing, a noise filter (not shown) is further connected between the power source (200) and the AC / DC converter (110), that is, at the input terminal of the AC / DC converter (110), and the noise filter can remove or shield electromagnetic noise from the power source (200). The noise filter may be an EMI noise filter, etc.

[0054] The AC / DC converter (110) may be configured to have a power factor correction function. Additionally, the AC / DC converter (110) may be configured to improve Total Harmonic Distortion (THD). As a non-limiting example, as illustrated in FIG. 3, the AC / DC converter (110) may include a first-1 switch (Q11), a first-2 switch (Q12), a first-3 switch (Q13), a first-4 switch (Q14), a first-5 switch (Q15), and a first-6 switch (Q16). The first-1 switches (Q11) through the first-6 switches (Q16) may each be implemented as an IGBT, a MOSFET, etc. The controller (150) can provide a control signal (CS1) for pulse width modulation (PWM) and / or pulse frequency modulation (PFM) control of at least some of the first-1 switches (Q11) to first-6 switches (Q16) by means of a predetermined sensing value and algorithm. FIG. 3 illustrates a case where the AC / DC converter (110) includes four capacitors (C11, C12, C13, C14) and three inductors (L11, L12, L13) in addition to the first-1 switches (Q11) to first-6 switches (Q16), but the AC / DC converter (110) of the present invention may include additional passive components or at least some components may be omitted.

[0055] As a non-limiting example, the AC / DC converter (110) may include a first inductor (L11) (or first-1 inductor) and a first capacitor (C11) (or first-1 capacitor) connected in parallel on a first phase line (e.g., L1 phase line, or R phase line), a second inductor (L12) (or first-2 inductor) and a second capacitor (C12) (or first-2 capacitor) connected in parallel on a second phase line (e.g., L2 phase line, or S phase line), and a third inductor (L13) (or first-3 inductor) and a third capacitor (C13) (or first-3 capacitor) connected in parallel on a third phase line (e.g., L3 phase line, or T phase line). One node of the first capacitor (C11) to the third capacitor (C13) may be connected to one another.

[0056] Additionally, the first-1 switch (Q11) and the first-2 switch (Q12) are connected in series with each other, and their connection point can be connected to the output of the first inductor (L11). The first-3 switch (Q13) and the first-4 switch (Q14) are connected in series with each other, and their connection point can be connected to the output of the second inductor (L12). Also, the first-5 switch (Q15) and the first-6 switch (Q16) are connected in series with each other, and their connection point can be connected to the output of the third inductor (L13).

[0057] One side of the first-1 switch (Q11), the first-3 switch (Q13), and the first-5 switch (Q15) is connected to one another, and one side of the first-2 switch (Q12), the first-4 switch (Q14), and the first-6 switch (Q16) is connected to one another to form the output terminal (110b) of the AC / DC converter (110). Some of the first-1 switches (Q11) to the first-6 switches (Q16) may form a bridge circuit. For example, at some point, the first-1 switches (Q11) to the first-4 switches (Q14) may all be turned on and function as a bridge for the first phase line and the second phase line. As another example, at some point, the first-3 switches (Q13) to the first-6 switches (Q16) may all be turned on and function as a bridge for the second phase line and the third phase line. Additionally, the fourth capacitor (C14) (or the first-fourth capacitor) may be connected in parallel to the output terminal (110b) of the AC / DC converter (110). For example, the positive side of the fourth capacitor (C14) may be connected to the first-1 switch (Q11), etc., and the negative side may be connected to the first-2 switch (Q12), etc.

[0058] The output terminal (110b) (or node) of the AC / DC converter (110) may be electrically connected to the input terminal (120a) of the DC / DC converter (120). The DC / DC converter (120) may be a voltage drop type converter that converts an input DC voltage to a lower DC voltage. That is, the voltage at the input terminal (120a) of the DC / DC converter (120) may be greater than the voltage at the output terminal (120b) of the DC / DC converter (120). For example, theoretically, the voltage at the output terminal (120b) relative to the voltage at the input terminal (120a) of the DC / DC converter (120) may be proportional to the duty ratio (or duty cycle) of the second switch (Q2) (or DC / DC converter switch). The second switch (Q2) may be implemented as a MOSFET, an IGBT, etc. The controller (150) can provide a control signal (CS2) for PWM control of the second switch (Q2) by a predetermined sensing value and algorithm. FIG. 4 illustrates a case where the DC / DC converter (120) further includes one diode (D2), one capacitor (C2), and one inductor (L2) in addition to the second switch (Q2), but the DC / DC converter (120) of the present invention may further include additional passive components, or at least some components may be omitted.

[0059] As a non-limiting example, the DC / DC converter (120) may include a second switch (Q2) connected to an input terminal (120a), a second inductor (L2) connected in series to the second switch (Q2), and a second diode (D2) connected to the junction point of the second switch (Q2) and the second inductor (L2). The anode of the second diode (D2) may be grounded and the cathode may be connected to the junction point. And a second capacitor (C2) may be connected in parallel to the output terminal (120b) of the DC / DC converter (120). For example, the positive side of the second capacitor (C2) may be connected to the second inductor (L2), and the negative side may be grounded.

[0060] As described below, the power control device (100) and the control method according to the present embodiment control the output, such as the magnitude of the voltage, at the output terminal (120b) of the DC / DC converter (120) using a controller (150), and adjust the magnitude of the signal input to the input terminal (140b) of the reactor (300) independently of the control of other modules and the resulting frequency and / or pulse width. For example, in contrast to the present invention, a method of controlling the frequency, pulse width, voltage amplitude, etc. in combination while fixing the voltage at the input terminal (130a) of the DC / AC converter (130) described below, such as the inverter (i.e., implementing the DC / DC converter as a regulator) may be considered; however, according to the present invention, the magnitude of the voltage provided to the input terminal (130a) of the inverter can be variably adjusted regardless of the frequency and pulse width, and the control capability for the plasma generator can be improved.

[0061] The output terminal (120b) of the DC / DC converter (120) may be electrically connected to the input terminal (130a) of the DC / AC converter (130). The DC / AC converter (130) may convert the output of the DC / DC converter (120), i.e., direct current, into alternating current or pulse form. In this specification, the DC / AC converter (130) is a general term for a module that converts direct current provided to the input terminal into alternating current or pulse form, and for example, the DC / AC converter (130) may include an inverter.

[0062] At this time, the output of the DC / AC converter (130) may be a square wave (i.e., a square wave) or a sinusoidal wave modulated based on a square wave. As a non-limiting example, as illustrated in FIG. 5, the DC / AC converter (130) may include a third-1 switch (Q31), a third-2 switch (Q32), a third-3 switch (Q33), and a third-4 switch (Q34). The third-1 switch (Q31) and the third-2 switch (Q32) may form a single pole, and the third-3 switch (Q33) and the third-4 switch (Q34) may form a single pole. Two switches belonging to a single pole may be configured not to be turned on simultaneously. For example, at one moment the 3-1 switch (Q31) and the 3-4 switch (Q34) may be turned on simultaneously, and at another moment the 3-2 switch (Q32) and the 3-3 switch (Q33) may be turned on simultaneously.

[0063] The third-1 switch (Q31) to the third-4 switch (Q34) can each be implemented as a MOSFET, IGBT, etc. The controller (150) can provide a control signal (CS3) for PWM and / or PFM control of at least some of the third-1 switch (Q31) to the third-4 switch (Q34) during the on-time according to a predetermined sensing value and algorithm. FIG. 5 illustrates a case where the DC / AC converter (130) includes only the third-1 switch (Q31) to the third-4 switch (Q34), but the DC / AC converter (130) of the present invention may include additional passive components.

[0064] As a non-limiting example, the third-1 switch (Q31) and the third-2 switch (Q32) of the DC / AC converter (130) may be connected in series, and the third-3 switch (Q33) and the third-4 switch (Q34) may be connected in series. The connection point between the third-1 switch (Q31) and the third-2 switch (Q32), and the connection point between the third-3 switch (Q33) and the third-4 switch (Q34) may form the output terminal (130b) of the DC / AC converter (130). Additionally, one side of the third-1 switch (Q31) and the third-3 switch (Q33) may be connected to each other, and one side of the third-2 switch (Q32) and the third-4 switch (Q34) may be connected to each other to form the input terminal (130a).

[0065] The output terminal (130b) of the DC / AC converter (130) may be electrically connected to the input terminal (140a) of the resonant network (140). The output of the resonant network (140) may be in the form of alternating current or pulses. The resonant network (140) may be configured to function as a low-pass filter (LPF). Additionally, the resonant network (140) may provide gain for voltage and / or current. As a non-limiting example, as illustrated in FIG. 6, the resonant network (140) may include two inductors (L41, L42) and one capacitor (C4). For example, the resonant network (140) may include a first inductor (L41) (or 4-1 inductor) connected to the input terminal (140a), a second inductor (L42) (or 4-2 inductor) connected in series with the first inductor (L41), and may further include a fourth capacitor (C4) connected in parallel with the second inductor (L42). That is, one side of the fourth capacitor (C4) may be connected to the junction point of the first inductor (L41) and the second inductor (L42), and the other side may be grounded.

[0066] As another example, as illustrated in FIG. 7, the resonant network (141) may include three inductors (L41, L42, L43) and one capacitor (C4), i.e., a third inductor (L43) (or a fourth-third inductor). The third inductor (L43) may be connected in series with the fourth capacitor (C4) so ​​that the output side can be grounded.

[0067] As another example, as illustrated in FIG. 8, the resonant network (142) may have a first inductor (L41) and a third inductor (L43) connected in parallel with respect to the input terminal (140a). The input side of the third inductor (L43) may be connected to the input terminal (140a). At this time, one side and the other side of the fourth capacitor (C4) may be connected to the output side of the first inductor (L41) and the output side of the third inductor (L43), respectively.

[0068] As another example, as shown in FIG. 9, the resonant network (143) may have a capacitor (C4) and a third inductor (L43) connected in series, with the input side of the third inductor (L43) connected to the fourth capacitor (C4) and the output side of the third inductor (L43) forming an output terminal (140b).

[0069] The output of the resonant network (140, 141) may be in the form of a sinusoidal wave. The output terminal (140b) of the resonant network (140) may be electrically connected to the reactor (300), i.e., the load. For example, the output terminal (140b) of the resonant network (140) may be electrically connected to the winding of the reactor (300). In an exemplary embodiment, the reactor (300) may include a reaction body having a reaction space in the shape of a toroidal (or loop), a magnet block arranged to surround the reaction space, and a winding wound around the magnet block. A high-frequency current flowing through the winding induces an electromotive force in the reaction space, and the plasma may be excited or maintained in a plasma state.

[0070] Hereinafter, a control method of a power control device (100) will be described with further reference to FIGS. 10 to 12. FIGS. 10 to 12 are flowcharts illustrating a control method of a power control device according to an embodiment of the present invention.

[0071] The controller (150) receives the voltage (S) of the reactor (300) from the sensor of the reactor (300). V ) and / or current(S I ) values ​​can be detected (S110). The voltage and / or current measured here may be values ​​associated with the process state using the reactor (300) and capable of estimating the process state. For example, in the case of a reaction body having a toroidal shape including two branch sections branched from a gas inlet and a gas outlet section where the two branch sections are joined to discharge gas, the voltage and / or current on the surface of the reaction body of the two branch sections can be sensed.

[0072] In addition, related parameters can be further derived using the measured voltage and current. For example, the related parameters may be power consumption, impedance, etc. As another example, voltage deviations of the two branch sections may be derived using the measured voltages at the two branch sections.

[0073] In some embodiments, the controller (150) receives the voltage (S) of the output terminal (140b) of the resonant network (140) from the sensor. 4V ), current(S 4I ) and / or frequency value (S 4F It can detect ).

[0074] And the controller (150) measures the voltage (S V ) and current (S I), and based on the associated parameters derived therefrom, the reaction state can be determined (S130). In determining the reaction state (S130), the measured value at the output terminal (140b) of the resonance network (140) may also be used. For example, the state of the gas in the reaction space, the amount of gas, etc. can be determined.

[0075] If the reactor state is normal, that is, if there is no need to change the power state provided to the input terminal (140b) of the reactor (300) using the power control device (100), the detection of voltage and current can be continued. On the other hand, if the reactor state is abnormal, that is, if a change in the power state provided to the input terminal (140b) of the reactor (300) is required, the operation target of the inverter, i.e., the DC / AC converter (130), can be set first (S200). Here, the operation target of the DC / AC converter (130) may be one or more of the voltage value, current value, and frequency value at the output terminal (130b) of the DC / AC converter (130). For example, if the process gas inside the reactor (300) is determined to be in an abnormal state of too much, the operation target of the voltage value and / or current value at the DC / AC converter output terminal (130b) can be increased. Conversely, if the process gas in the reactor (300) is determined to be in an abnormal state with too little, the operating target of the voltage and / or current value at the DC / AC converter output terminal (130b) may be lowered. At this time, setting the operating target of the DC / AC converter (130) (S200) can be understood as being performed based on the detection result (S110) of the reactor (300).

[0076] That is, if an abnormal state of the reactor (300) is detected, normalization can be attempted primarily using the control signal (CS3) of the DC / AC converter (130). For example, the voltage (S) currently measured in the reactor (300) V ), current(S IIf you want to increase the output voltage, current, etc. of the DC / AC converter (130), you can generate a control signal (CS3) to increase the output voltage, current, etc.

[0077] Specifically, the controller (150) receives the voltage (S) of the output terminal (130b) of the DC / AC converter (130) from the sensor. 3V ), current(S 3I ) and / or frequency(S 3F ) value, at least current value (S 3I ) can be detected (S220). Also, if necessary, associated parameters can be further derived using the measured voltage, current and / or frequency.

[0078] And the controller (150) measures the current value (S 3I ) can be compared with the operation target value of the previously acquired and set DC / AC converter (130) (S230). If the current value (S 3I If there is a difference from the target value of operation, the controller (150) can generate and provide a control signal (CS3) for the DC / AC converter (130) (S250). Here, the control signal (CS3) for the DC / AC converter (130) may include at least one of the third-1 switch (Q31) to the third-4 switch (Q34), or a plurality of on / off signals.

[0079] More specifically, the control signal (CS3) for the DC / AC converter (130) may be a signal for one or more of PWM control and PFM control. For example, through PWM control, the duty cycle of one or more of the switches (Q31, Q32, Q33, Q34) of the DC / AC converter (130) may be increased (or decreased) to attempt to increase (or decrease) the current, etc. at the output terminal (130b) of the DC / AC converter (130). As another example, through PFM control, the on / off cycle of the switches (Q31, Q32, Q33, Q34) of the DC / AC converter (130) may be increased (or decreased) to attempt to increase (or decrease) the current, etc. at the output terminal (130b) of the DC / AC converter (130). At this time, the control step (S250) of the DC / AC converter (130) and the setting of the operation goal (S300) of the DC / DC converter (120) described later can be understood as being performed based on the detection result (S220) at the output terminal (130b) of the DC / AC converter (130). Furthermore, since the operation goal of the DC / AC converter (130) is performed based on the detection result (S110) of the reactor (300), the control step (S250) of the DC / AC converter (130) and the setting of the operation goal (S300) of the DC / DC converter (120) described later can also be understood as being based on the detection result (S110) of the reactor (300).

[0080] At this time, the control signal (CS3) generated by the controller (150) can be set power controlled. That is, the PWM control value and / or PFM control value of the switch controlled according to the operation goal can be specified in advance.

[0081] Current detection value (S 3I If ) matches the target current value or is within a predetermined standard, then the controller (150) next checks the measured voltage value (S 3V) can be compared with the operation target value of the previously acquired and set DC / AC converter (130) (S270). Output value (S) of the DC / AC converter (130) 3V , S 3I ) Among them, the load (300), that is, the current (S) that has a relatively large effect on the plasma 3I First, correct ), and then the voltage (S 3V By tuning ), you can reach the desired process state more quickly.

[0082] If the voltage value (S 3V If ) matches the operation target value or is within a predetermined standard, the above operation can be repeated and continued. That is, the current power state can be monitored until the operation target of the new DC / AC converter (130) is set. On the other hand, the voltage value (S) of the DC / AC converter (130) that is acquired and set 3V If there is a difference from the target value of operation, the target of operation of the DC / DC converter (120) can be set secondarily (S300). Here, the target of operation of the DC / DC converter (120) may be one or more of the voltage and current at the output terminal (120b) of the DC / DC converter (120).

[0083] That is, if the current value has been achieved to the operating target through switch control of the DC / AC converter (130) but the voltage is in the error range, more precise plasma control can be performed and normalization can be achieved by secondarily using the control signal (CS2) of the DC / DC converter (120). For example, the voltage (S) measured at the output terminal (130b) of the current DC / AC converter (130) 3V If you want to increase the output voltage of the DC / DC converter (120), you can generate a control signal (CS2) to increase the output voltage of the DC / DC converter (120). At this time, the control signal (CS2) generated by the controller (150) can be set power controlled.

[0084] Specifically, the controller (150) obtains the voltage (S) at the output terminal (120b) of the DC / DC converter (120) from the sensor. 2V ) and / or current(S 2I ) value, at least voltage value (S 2V ) can be detected (S320). Also, if necessary, associated parameters can be further derived using the measured voltage and / or current.

[0085] And the controller (150) measures the voltage value (S 2V ) can be compared with the operation target value of the previously acquired and set DC / DC converter (120) (S330). If the voltage value (S 2V If ) matches the operation target value or is within a predetermined standard, the above operation can be repeated and continued. That is, the current power state can be monitored until the operation target of the new DC / DC converter (120) is set. On the other hand, the voltage value (S) of the DC / DC converter (120) that is acquired and set 2V If there is a difference from the target value of operation, a control signal (CS2) for the DC / DC converter (120) can be generated and provided (S350). Here, the control signal (CS2) for the DC / DC converter (120) may include an on / off signal of the second switch (Q2).

[0086] More specifically, the control signal (CS2) for the DC / DC converter (120) may be a signal for PWM control. For example, through PWM control, the duty cycle of the second switch (Q2) of the DC / DC converter (120) may be increased (or decreased) to attempt to increase (or decrease) the voltage, etc. at the output terminal (120b) of the DC / DC converter (120). And the increase (or decrease) in the voltage, etc. at the output terminal (120b) of the DC / DC converter (120) may lead to an increase (or decrease) in the voltage, etc. at the output terminal (130b) of the DC / AC converter (130). At this time, the control step (S350) of the DC / DC converter (120) is based not only on the detection result (S320) at the output terminal (120b) of the DC / DC converter (120), but also, since the operation goal of the DC / DC converter (120) is performed by the detection result (S220) of the DC / AC converter (130), the control step (S350) of the DC / DC converter (120) can be understood as being based on the detection result (S220) of the DC / AC converter (130). Furthermore, the control step (S350) of the DC / DC converter (120) may also be understood as being performed based on the detection result (S110) of the reactor.

[0087] After changing the voltage at the output terminal (120b) of the DC / DC converter (120) using the control signal (CS2) of the DC / DC converter (120), the controller (150) changes the voltage (S) at the output terminal (130b) of the DC / AC converter (130). 3V ) and / or current(S 3I ) can be verified by comparing it with the operating target value of the previously acquired and set DC / AC converter (130) (S390). and / or furthermore, the voltage (S of the reactor (300) V ) and / or current(S IThe process state can be re-determined using ). If the result of the determination is that the state is normal, the above operation can be repeated and the current power state can be monitored until an abnormal state of the process is detected. On the other hand, if the result of the determination is that the state is still abnormal, the output terminal (120b) voltage of the DC / DC converter (120) that was changed according to the switch control step (S350) of the DC / DC converter (120) above can be detected again, and the above process can be repeated to attempt to normalize the state of the reactor (300).

[0088] According to the above-described process, the power control device (100) according to the present embodiment can control the output at the output terminal (120b) of the DC / DC converter (120), such as the voltage magnitude (amplitude), independently of other factors, such as the output frequency, pulse width, etc., and thereby attempt to modulate the output at the output terminal (130b) of the DC / AC converter (130), such as the amplitude, frequency, pulse width (or period).

[0089] Furthermore, in supplying power to the load (300) in a desired state, the output voltage (S) of the DC / DC converter (120) 2V ) primarily controls the output of the DC / AC converter (130) that is closer to the load (300) in the electrical connection path while in a fixed state, and if more precise control is required, the DC / AC converter (130) no longer changes the control state (i.e., while maintaining the operation of the switches (Q31, Q32, Q33, Q34) of the DC / AC converter (130), and the voltage (S) at the output terminal (120b) of the DC / DC converter (120) that is further from the load (300) in the electrical connection path. 2V By controlling only ) independently, more precise control is possible and process performance using the reactor (300) can be improved.

[0090] Although the present invention has been described above with reference to embodiments, this is merely illustrative and does not limit the invention. Those skilled in the art will understand that various modifications and applications not exemplified above are possible within the scope of the essential characteristics of the embodiments of the invention.

[0091] Accordingly, the scope of the present invention should be understood to include modifications, equivalents, or substitutions of the technical concept exemplified above. For example, each component specifically shown in the embodiments of the present invention may be implemented with modifications. Furthermore, differences related to such modifications and applications should be interpreted as being included within the scope of the present invention as defined in the appended claims.

[0092] National R&D project that supported this invention

[0093] Project ID: 2410003946

[0094] Assignment No.: 20026366

[0095] Ministry Name: Ministry of Trade, Industry and Energy

[0096] Project Management (Specialized) Agency Name: Korea Institute of Industrial Technology Planning and Evaluation

[0097] Research Project Name: Development of Materials and Components Technology

[0098] Research Project Title: Development of Plasma Source Module Technology for Plasma Pretreatment Systems for Gate Oxide Nitridation Processes

[0099] Contribution rate: 1 / 1

[0100] Project Executing Organization Name: New Power Plasma Co., Ltd.

[0101] Research Period: July 1, 2023 – December 31, 2026

Claims

1. AC / DC converter electrically connected to the power source; A DC / DC converter electrically connected to the output of the above AC / DC converter; A DC / AC converter electrically connected to the output of the above DC / DC converter; and A power control device comprising a controller that controls at least one of the switches of the DC / DC converter based on the output of the DC / AC converter.

2. In Paragraph 1, A power control device in which the output of the above DC / AC converter includes current and voltage.

3. In Paragraph 1, The above controller further controls at least one of the switches of the DC / AC converter based on the output of the DC / AC converter, Based on the output current of the above DC / AC converter, the switch of the DC / AC converter is primarily controlled, and A power control device that secondarily controls the switch of a DC / DC converter based on the output voltage of the above DC / AC converter.

4. In Paragraph 1, A power control device that controls the switch of the above DC / DC converter, including controlling the switch so that the output value of the above DC / AC converter reaches a target value.

5. In Paragraph 1, The output voltage of the DC / DC converter is varied according to the switch control of the DC / DC converter, but, The output voltage of the above DC / DC converter is, A power control device independent of the switch control of the above DC / AC converter.

6. In Paragraph 1, The above power supply is a three-phase power supply that provides output to the first to third phase lines, and the above AC / DC converter is, A first inductor and a first capacitor connected in parallel in the above first phase line, A second inductor and a second capacitor connected in parallel in the above second phase line, A third inductor and a third capacitor connected in parallel in the above third phase line, A first switch and a second switch connected in series with each other, A third switch and a fourth switch connected in series with each other, A fifth switch and a sixth switch connected in series with each other, and It includes a fourth capacitor connected in parallel to the output terminal of the above AC / DC converter, and The first inductor is connected to the connection point of the first switch and the second switch, and The second inductor is connected to the connection point of the third switch and the fourth switch, and A power control device in which the third inductor is connected to the connection point of the fifth switch and the sixth switch.

7. In Paragraph 1, The above DC / DC converter is, The switch connected to the input terminal of the above DC / DC converter, Inductor connected to the above switch, A diode connected to the junction point of the above switch and inductor, and A power control device comprising a capacitor connected in parallel to the output terminal of the above DC / DC converter.

8. In Paragraph 1, The above DC / AC converter is, A first switch and a second switch connected in series with each other, and It includes a third switch and a fourth switch connected in series with each other, A power control device in which the connection point of the first switch and the second switch, and the connection point of the third switch and the fourth switch are the output terminals of the DC / AC converter.

9. In Paragraph 1, It further includes a resonant network electrically connected to the output of the above DC / AC converter, wherein the resonant network is, First inductor, A second inductor connected in series with the first inductor, and A power control device comprising a capacitor connected in parallel with the second inductor.

10. In Paragraph 9, The above resonant network is, A power control device further comprising a third inductor connected in series with the above capacitor.

11. In Paragraph 9, The above resonant network is, It further includes a third inductor connected in parallel with the first inductor, A power control device in which the input and output of the above capacitor are respectively connected to the first inductor and the third inductor.

12. In Paragraph 9, The above resonant network is, A power control device further comprising a third inductor connected in series with the above capacitor.

13. AC / DC converter electrically connected to the power source; A DC / DC converter electrically connected to the output of the above AC / DC converter; A DC / AC converter electrically connected to the output of the above DC / DC converter; A plasma reactor electrically connected to the output of the above DC / AC converter; and A plasma generation facility comprising a controller that controls at least one of the switches of the DC / DC converter based on the output of the DC / AC converter.

14. In Paragraph 13, A plasma generation facility in which the above controller further controls at least one of the switches of the DC / AC converter based on the sensing value of the above reactor.

15. In Paragraph 14, A plasma generation facility, wherein controlling the switch of the above DC / DC converter includes controlling the switch so that the sensing value of the reactor reaches a target value.

16. Set the operation goal of the DC / AC converter; Depending on the operation objective of the above DC / AC converter, control of one or more of the PWM or PFM of the DC / AC converter switch is performed; If the measured value of the output of the above DC / AC converter does not meet the operation target conditions, set the operation target of the DC / DC converter; and A power control method comprising performing one or more of PWM or PFM control of a DC / DC converter switch according to the operation objective of the above DC / DC converter.

17. In Paragraph 16, After switching the DC / DC converter, measure the output of the DC / AC converter; and A power control method further comprising re-performing switch control of the DC / DC converter if the measured value of the output of the above DC / AC converter does not meet the operation target condition.

18. A process control method for a process system including a reactor receiving a high-frequency power supply, wherein Determining the process state of the above reactor; Based on the above process state, switch control of the DC / AC converter of the high-frequency power supply is performed; and A process method comprising performing switch control of a DC / DC converter of a high-frequency power source based on the output value of the above DC / AC converter.

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