Force-torque sensor, robot finger, robot hand, and robot

Abstract

A first embodiment of the present invention relates to a robot finger comprising: a case having a fingertip shape; and a force-torque sensor which is arranged in the case and senses external force applied to the case, wherein the force-torque sensor comprises a first force-torque sensor in which a lead to which the external force is applied faces a first direction, and a second force-torque sensor in which a lead to which the external force is applied faces a second direction that is different from the first direction.

Description

Force-torque sensor, robot finger, robot hand and robot

[0001] The present embodiment relates to a force-torque sensor, a robot finger, a robot hand, and a robot.

[0002] Robots are used in industry, healthcare, services, and various other fields, and their scope of application is steadily expanding. To improve the performance of robot systems and ensure safety, robot movements must be accurately monitored and controlled. In particular, the forces and torques generated when a robot interacts with the environment or handles objects are critical information.

[0003] Conventional robot sensor technology has primarily focused on detecting motion states such as position, velocity, and acceleration. However, force and torque play a crucial role in providing information about robot interactions and the working environment. Force-torque sensors are essential for robots to safely grasp or manipulate objects and respond to their surroundings. Furthermore, utilizing these sensors can improve robot operational efficiency and prevent malfunctions.

[0004] Meanwhile, conventionally, there is a problem in that it is difficult to measure the external force applied to the end of the robot finger.

[0005] Furthermore, conventional force-torque sensors cannot separate the applied external force into forces for each axis; since they receive inputs simultaneously and decompose the forces, there is a problem in that noise caused by cross-torque is mixed into the detected values ​​for each axis. In particular, there is a problem where noise increases when the force in the z-axis direction and the torque force are mixed.

[0006] (Patent Document 1) KR 10-2023-0123723 A

[0007] The first embodiment of the present invention aims to provide a robot finger that detects external forces applied not only to the bottom portion of the finger but also to the end portion.

[0008] The second and third embodiments of the present invention aim to provide a force-torque sensor capable of measuring z-axis force and torque force separately.

[0009] Furthermore, the second embodiment of the present invention aims to provide a force-torque sensor with a simplified structure through a ball plunger.

[0010] Furthermore, the third embodiment of the present invention aims to provide a force-torque sensor that includes a structure preventing the inner carrier from being crushed by a ball that guides the tilt of the inner carrier.

[0011] A robot finger according to a first embodiment of the present invention comprises a case having the shape of a fingertip joint; and a force-torque sensor disposed within the case and detecting an external force applied to the case, wherein the force-torque sensor may include a first force-torque sensor in which a lead to which an external force is applied faces a first direction, and a second force-torque sensor in which a lead to which an external force is applied faces a second direction different from the first direction.

[0012] The lead of the first force-torque sensor may face the bottom portion of the fingertip joint shape, and the lead of the second force-torque sensor may face the end portion of the fingertip joint shape.

[0013] The first direction is the z-axis direction of the first force-torque sensor, and when an external force is applied to the lead of the first force-torque sensor, the lead of the first force-torque sensor may be tilted in the yaw, pitch, and roll directions of the first force-torque sensor or may move in the z-axis direction of the first force-torque sensor.

[0014] The second direction is the z-axis direction of the second force-torque sensor, and when an external force is applied to the lead of the second force-torque sensor, the lead of the second force-torque sensor may be tilted in the yaw, pitch, and roll directions of the second force-torque sensor or may move in the z-axis direction of the second force-torque sensor.

[0015] The first direction above may be perpendicular to the second direction above.

[0016] Each of the lead of the first force-torque sensor and the lead of the second force-torque sensor may include a disc shape.

[0017] The outer surface of the circular shape of the disc-shaped lead of the first force-torque sensor may face the first direction, and the outer surface of the circular shape of the disc-shaped lead of the second force-torque sensor may face the second direction.

[0018] The first force-torque sensor and the second force-torque sensor are electrically separated and can detect external forces individually.

[0019] The first force-torque sensor can be spaced apart from the second force-torque sensor.

[0020] The first force-torque sensor comprises a fixed part, a first moving part movably disposed within the fixed part and including the lead, and a ball plunger including a ball and an elastic member that presses the ball, and the ball plunger can guide the first moving part to tilt relative to the fixed part.

[0021] The first force-torque sensor includes a second moving part disposed between the fixed part and the first moving part, and when the first moving part moves in the z-axis direction of the first force-torque sensor, the first moving part can move together with the second moving part.

[0022] A robot finger according to the first modified example includes a case shaped like a fingertip joint; and a force-torque sensor disposed within the case and detecting an external force applied to the case, wherein the force-torque sensor includes a fixed part fixed to the case and a moving part disposed movably within the fixed part, wherein the moving part includes a lead to which an external force is applied, and the lead has a shape corresponding to the shape of the bottom part of the fingertip joint shape, and when an external force is applied to the lead, the moving part may be tilted in the yaw direction, pitch direction, and roll direction or move in the z-axis direction.

[0023] A robot finger according to a second modified example includes a case shaped like a fingertip joint; and a force-torque sensor disposed within the case and detecting an external force applied to the case, wherein the force-torque sensor includes a fixed part fixed to the case and a moving part movably disposed within the fixed part, wherein the moving part includes a lead to which an external force is applied, wherein the lead includes a first plate part facing the bottom portion of the fingertip joint shape and a second plate part bent and extended from the first plate part and facing the end portion of the fingertip joint shape, and when an external force is applied to the lead, the moving part may be tilted in the yaw direction, pitch direction, and roll direction or move in the z-axis direction.

[0024] A robot hand according to the first embodiment of the present invention includes the robot finger, and the robot finger may include a plurality of robot fingers.

[0025] A robot according to the first embodiment of the present invention may include the robot hand.

[0026] A force-torque sensor according to a second embodiment of the present invention comprises a fixed part; a first moving part movably disposed within the fixed part; and a ball plunger comprising a ball and an elastic member that presses the ball, wherein the ball plunger can guide the first moving part to tilt relative to the fixed part.

[0027] The ball plunger comprises a cylindrical housing, and the ball comprises a first ball disposed at one end of the housing and a second ball disposed at the other end of the housing, and the elastic member may comprise a coil spring disposed between the first ball and the second ball.

[0028] The ball plunger may include a first ball plunger arranged in a first axis direction and a second ball plunger arranged in a second axis direction perpendicular to the first axis.

[0029] In the direction of a third axis perpendicular to both the first axis and the second axis, the second ball plunger may be positioned higher than the first ball plunger.

[0030] The first ball plunger can be spaced apart from the second ball plunger.

[0031] The ball plunger comprises a first ball plunger and a second ball plunger positioned opposite each other with respect to the central axis of the first moving part, and a third ball plunger and a fourth ball plunger positioned opposite each other, and the first to fourth ball plungers may be positioned at the same height.

[0032] Each of the first to fourth ball plungers may include a housing, a ball disposed at an open end of the housing, and an elastic member that supports the ball against the housing.

[0033] The first axis and the second axis are arranged perpendicularly to each other, and the third axis is arranged perpendicularly to both the first axis and the second axis, and the first moving part can be tilted in a first direction which is a rotational direction centered on the first axis, a second direction which is a rotational direction centered on the second axis, and a third direction which is a rotational direction centered on the third axis.

[0034] The force-torque sensor includes a second moving part disposed between the fixed part and the first moving part, and when the first moving part moves in the direction of the third axis, the first moving part can move together with the second moving part.

[0035] The first moving part includes a lead, at least a portion of which protrudes to the outside of the fixed part, and an inner carrier coupled to the lead and disposed within the fixed part, and the ball plunger may be disposed to penetrate the inner carrier.

[0036] The force-torque sensor may include a first elastic member coupled to the fixed part and the first moving part.

[0037] The force-torque sensor may include a second elastic member that is coupled to the fixed part and supports the second moving part.

[0038] The force-torque sensor may include a first magnet disposed in either the fixed part or the inner carrier; and a first sensor disposed in the other of the fixed part or the inner carrier and detecting the first magnet.

[0039] The force-torque sensor may include a second magnet disposed in either the fixed part or the second moving part; and a second sensor disposed in the other of the fixed part or the second moving part and detecting the second magnet.

[0040] A robot according to the second embodiment of the present invention may include the force-torque sensor.

[0041] A force-torque sensor according to a third embodiment of the present invention comprises a fixed part; a first moving part movably disposed within the fixed part; and a first ball that guides the first moving part to tilt relative to the fixed part, wherein the first ball includes a first-1 ball and a first-2 ball disposed opposite each other with respect to the first moving part, and the first-1 ball may be disposed higher than the first-2 ball.

[0042] The upper surface of the first moving part is open to the outside of the fixed part, and the shortest distance between the upper surface of the first moving part and the first-1 ball may be shorter than the shortest distance between the upper surface of the first moving part and the first-2 ball.

[0043] The first moving part includes a lead in which at least a portion protrudes to the outside of the fixed part, and an inner carrier coupled to the lead and disposed within the fixed part, and the shortest distance between a virtual plane including the lower surface of the inner carrier and the first-1 ball may be greater than the shortest distance between the virtual plane and the first-2 ball.

[0044] The first ball includes a first-3 ball and a first-4 ball positioned on opposite sides of the first moving part, and the first-3 ball and the first-4 ball are positioned at the same height, the first-1 ball is positioned higher than the first-3 ball, and the first-2 ball can be positioned lower than the first-3 ball.

[0045] The height difference between the center of the first-1 ball and the center of the second-1 ball may be 50% to 150% of the diameter of the first ball.

[0046] The force-torque sensor includes a second moving part disposed between the fixed part and the first moving part, and the first ball may be disposed between the first moving part and the second moving part.

[0047] The force-torque sensor may include a second ball disposed between the fixed part and the second moving part.

[0048] The second ball includes a second-1 ball and a second-2 ball positioned on opposite sides of the second moving part, and the second-1 ball may be positioned higher than the second-2 ball.

[0049] The above 2-1 ball may overlap with the above 2-1 ball and the above 2-2 ball in the direction in which the above 2-1 ball faces the above 2-2 ball.

[0050] The above 2-1 ball may overlap with the above 2-1 ball and the above 2-2 ball in the direction toward the above 2-2 ball.

[0051] The above 2-1 ball may not overlap with the above 1-2 ball in the direction in which the above 2-1 ball faces the above 2-2 ball.

[0052] The first moving part is in direct contact with the first ball, and at least a portion of the first moving part is formed of metal, and the rigidity of the first ball may be greater than the rigidity of the metal.

[0053] The force-torque sensor may include a first magnet disposed on either the fixed part or the lower surface of the inner carrier; and a first sensor disposed on the other of the fixed part or the lower surface of the inner carrier and detecting the first magnet.

[0054] The force-torque sensor may include a second magnet disposed in either the fixed part or the second moving part; and a second sensor disposed in the other of the fixed part or the second moving part and detecting the second magnet.

[0055] A robot according to the third embodiment of the present invention may include the force-torque sensor.

[0056] Through the robot finger of the first embodiment of the present invention, external forces applied to the fingertips as well as the fingertips can be detected.

[0057] Through this, the workability of the robot hand can be improved in tasks requiring precise object grasping, for example, in gripping fragile objects without breaking.

[0058] Through the force-torque sensor according to the second and third embodiments of the present invention, the z-axis force and torque force can be measured separately. This minimizes the influence of noise caused by cross-torque on the detected values ​​for each axis. In other words, the measurement accuracy of the force-torque sensor can be improved.

[0059] Furthermore, the structure of the force-torque sensor according to the second embodiment of the present invention can be simplified through the ball plunger. Accordingly, the manufacturing cost of the force-torque sensor can be reduced.

[0060] Furthermore, through the third embodiment of the present invention, the phenomenon of the inner carrier being pressed by a ball that guides the tilt of the inner carrier can be prevented.

[0061] FIG. 1 is a perspective view illustrating a part of a robot hand according to a first embodiment of the present invention.

[0062] FIG. 2 is a perspective view showing a robot finger according to a first embodiment of the present invention through a case.

[0063] Figure 3 (a) is a perspective view of the lead, and (b) is a bottom perspective view of the robot finger.

[0064] FIG. 4 is a side view of a robot finger according to the first embodiment of the present invention with part of the case removed.

[0065] FIG. 5 is a cross-sectional perspective view of a robot finger according to the first embodiment of the present invention, cut so that the bottom portion of the finger is divided into two.

[0066] FIG. 6 is a cross-sectional perspective view taken from above, in which a robot finger according to the first embodiment of the present invention is cut perpendicular to the cutting direction in FIG. 5.

[0067] FIG. 7 is a partial perspective view of a force-torque sensor according to a first embodiment of the present invention.

[0068] Figure 8 is a cross-sectional view taken from AA in Figure 7.

[0069] Figure 9 is a cross-sectional view taken from BB of Figure 7.

[0070] FIG. 10 is an exploded perspective view of a force-torque sensor according to a first embodiment of the present invention.

[0071] Fig. 11 is an exploded perspective view seen from a different direction than Fig. 10.

[0072] FIG. 12 is a perspective view of FIG. 7 with the lead, upper cover, and related components omitted.

[0073] FIG. 13 is a perspective view of FIG. 12 with the upper elastic member omitted.

[0074] FIG. 14 is a perspective view of FIG. 13 with the internal carrier and related configuration omitted.

[0075] FIG. 15 is a perspective view of FIG. 14 with the external carrier, base, and related configurations omitted.

[0076] FIG. 16 is a bottom perspective view of the force-torque sensor in the state of FIG. 7, viewed from a different direction.

[0077] FIG. 17 is a bottom perspective view in which the lower cover, substrate, lower elastic member, and related configurations from FIG. 16 are omitted.

[0078] FIG. 18 is a bottom perspective view with the base omitted from FIG. 17.

[0079] FIG. 19 is a bottom perspective view with the external carrier and related configurations omitted from FIG. 18.

[0080] FIG. 20 is a perspective view illustrating the combined state of the inner carrier and the ball plunger of a force-torque sensor according to the first embodiment of the present invention.

[0081] FIG. 21 is a diagram illustrating the case where an external force having a yaw or pitch direction component is applied to a force-torque sensor according to the first embodiment of the present invention.

[0082] FIG. 22 is a diagram illustrating the change when an external force having a roll direction component is applied to a force-torque sensor according to the first embodiment of the present invention.

[0083] FIG. 23 is a diagram illustrating the case where an external force having a component in the z-axis direction is applied to a force-torque sensor according to the first embodiment of the present invention.

[0084] FIG. 24 is a perspective view of a force-torque sensor according to a first modified example.

[0085] FIG. 25 is a side view of a force-torque sensor according to the first modification example with part of the case removed.

[0086] Figure 26 (a) is a perspective view of the lead of the first modified example, and (b) is a bottom perspective view of the robot finger of the first modified example.

[0087] FIG. 27 is a perspective view of a force-torque sensor according to a second modified example.

[0088] FIG. 28 is a side view of a force-torque sensor according to a second variation with part of the case removed.

[0089] Figure 29 (a) is a perspective view of the lead of the second modified example, and (b) is a bottom perspective view of the robot finger of the second modified example.

[0090] FIG. 30 is a perspective view of a force-torque sensor according to a second embodiment of the present invention.

[0091] FIG. 31 is a partial perspective view with part of the substrate omitted from FIG. 30.

[0092] Fig. 32 is a cross-sectional view taken from AA in Fig. 31.

[0093] Figure 33 is a cross-sectional view taken from BB of Figure 31.

[0094] FIG. 34 is an exploded perspective view of a force-torque sensor according to a second embodiment of the present invention.

[0095] Fig. 35 is an exploded perspective view seen from a different direction than Fig. 34.

[0096] FIG. 36 is a perspective view of FIG. 31 with the lead, upper cover, and related components omitted.

[0097] FIG. 37 is a perspective view of FIG. 36 with the upper elastic member omitted.

[0098] FIG. 38 is a perspective view of FIG. 37 with the internal carrier and related configuration omitted.

[0099] FIG. 39 is a perspective view of FIG. 38 with the external carrier, base, and related configurations omitted.

[0100] FIG. 40 is a bottom perspective view of the force-torque sensor in the state of FIG. 31, viewed from a different direction.

[0101] FIG. 41 is a bottom perspective view in which the lower cover, substrate, lower elastic member, and related configurations from FIG. 40 are omitted.

[0102] FIG. 42 is a bottom perspective view with the base omitted from FIG. 41.

[0103] FIG. 43 is a bottom perspective view with the external carrier and related configuration omitted from FIG. 42.

[0104] FIG. 44 is a perspective view illustrating the combined state of the inner carrier and the ball plunger of a force-torque sensor according to a second embodiment of the present invention.

[0105] FIG. 45 is a partial perspective view of a force-torque sensor according to a modified example.

[0106] FIG. 46 is a cross-sectional view taken from above of a force-torque sensor according to a modified example, cut perpendicular to the z-axis.

[0107] FIG. 47 is a perspective view of a ball plunger of a force-torque sensor according to a modified example.

[0108] FIG. 48 is a diagram illustrating the case where an external force having a yaw or pitch direction component is applied to a force-torque sensor according to a second embodiment of the present invention.

[0109] FIG. 49 is a diagram illustrating the change when an external force having a roll direction component is applied to a force-torque sensor according to a second embodiment of the present invention.

[0110] FIG. 50 is a diagram illustrating the case where an external force having a component in the z-axis direction is applied to a force-torque sensor according to a second embodiment of the present invention.

[0111] FIG. 51 is a perspective view of a force-torque sensor according to a third embodiment of the present invention.

[0112] FIG. 52 is a perspective view of FIG. 51 with part of the substrate omitted.

[0113] Fig. 53 is a cross-sectional view taken from AA in Fig. 52.

[0114] Fig. 54 is a partial enlarged view of Fig. 53.

[0115] Fig. 55 is a cross-sectional view taken from BB of Fig. 52.

[0116] FIG. 56 is a cross-sectional view taken from above of a force-torque sensor according to a third embodiment of the present invention, cut perpendicular to the z-axis.

[0117] FIG. 57 is an exploded perspective view of a force-torque sensor according to a third embodiment of the present invention.

[0118] FIG. 58 is an exploded perspective view seen from a different direction than FIG. 57.

[0119] FIG. 59 is a perspective view of FIG. 52 with the lead and related configuration omitted.

[0120] FIG. 60 is a perspective view of FIG. 59 with the upper cover, upper elastic member, and related components omitted.

[0121] FIG. 61 is a perspective view of FIG. 60 with the internal carrier and related configuration omitted.

[0122] FIG. 62 is a perspective view of FIG. 61 with the external carrier and related configuration omitted.

[0123] FIG. 63 is a perspective view of FIG. 62 with the base and lower elastic member omitted.

[0124] FIG. 64 is a bottom perspective view of the force-torque sensor in the state of FIG. 52, viewed from a different direction.

[0125] FIG. 65 is a bottom perspective view in which the lower cover, substrate, lower elastic member, and related configurations from FIG. 64 are omitted.

[0126] FIG. 66 is a bottom perspective view with the base omitted from FIG. 65.

[0127] FIG. 67 is a bottom perspective view with the external carrier and related configurations omitted from FIG. 66.

[0128] FIG. 68 is a diagram illustrating the case where an external force having a yaw or pitch direction component is applied to a force-torque sensor according to the third embodiment of the present invention.

[0129] FIG. 69 is a diagram illustrating the change when an external force having a roll direction component is applied to a force-torque sensor according to the third embodiment of the present invention.

[0130] FIG. 70 is a diagram illustrating the case where an external force having a component in the z-axis direction is applied to a force-torque sensor according to the third embodiment of the present invention.

[0131] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the attached drawings.

[0132] However, the technical concept of the present invention is not limited to some of the described embodiments but can be implemented in various different forms, and within the scope of the technical concept of the present invention, one or more of the components among the embodiments may be selectively combined or substituted.

[0133] In addition, terms used in the embodiments of the present invention (including technical and scientific terms) may be interpreted in a sense that is generally understood by those skilled in the art to which the present invention belongs, unless explicitly and specifically defined otherwise. Terms that are commonly used, such as terms defined in advance, may be interpreted in consideration of their meaning in the context of the relevant technology.

[0134] Furthermore, the terms used in the embodiments of the present invention are for the purpose of describing the embodiments and are not intended to limit the present invention.

[0135] In this specification, the singular form may include the plural form unless specifically stated otherwise in the text, and when described as "at least one of A and B and C (or more than one)," it may include one or more of all combinations that can be formed from A, B, and C.

[0136] In addition, terms such as first, second, A, B, (a), (b), etc., may be used when describing the components of the embodiments of the present invention. These terms are used merely to distinguish the components from other components and are not intended to limit the essence, order, or sequence of the components.

[0137] And, where it is stated that a component is 'connected', 'combined', or 'connected' to another component, this may include not only cases where the component is directly 'connected', 'combined', or 'connected' to the other component, but also cases where it is 'connected', 'combined', or 'connected' due to another component located between the component and the other component.

[0138] Furthermore, when described as being formed or placed "above" or "below" each component, "above" or "below" includes not only cases where two components are in direct contact with each other, but also cases where one or more other components are formed or placed between the two components. Additionally, when expressed as "above" or "below," it may include the meaning of a downward direction as well as an upward direction relative to a single component.

[0139] In the following, one of the "upper cover (120)" and the "lower cover (130)" may be referred to as the "first cover" and the other as the "second cover".

[0140] In the following, one of the “inner carrier (210)” and the “outer carrier (220)” may be referred to as the “first carrier” and the other as the “second carrier”.

[0141] In the following, one of the "internal magnet (311)" and the "external magnet (312)" may be referred to as the "first magnet" and the other as the "second magnet".

[0142] In the following, one of the "internal sensor (321)" and the "external sensor (322)" may be referred to as the "first sensor" and the other as the "second sensor".

[0143] In the following, one of the "lower elastic member (510)" and the "upper elastic member (520)" may be referred to as the "first elastic member" and the other as the "second elastic member".

[0144] In the following, one of the "upper cover (1120)" and the "lower cover (1130)" may be referred to as the "first cover" and the other as the "second cover".

[0145] In the following, one of the “inner carrier (1210)” and the “outer carrier (1220)” may be referred to as the “first carrier” and the other as the “second carrier”.

[0146] In the following, one of the "internal magnet (1311)" and the "external magnet (1312)" may be referred to as the "first magnet" and the other as the "second magnet".

[0147] In the following, one of the "internal sensor (1321)" and the "external sensor (1322)" may be referred to as the "first sensor" and the other as the "second sensor".

[0148] In the following, one of the "lower elastic member (1510)" and the "upper elastic member (1520)" may be referred to as the "first elastic member" and the other as the "second elastic member".

[0149] In the following, one of the "upper cover (2120)" and the "lower cover (2130)" may be referred to as the "first cover" and the other as the "second cover".

[0150] In the following, one of the “inner carrier (2210)” and the “outer carrier (2220)” may be referred to as the “first carrier” and the other as the “second carrier”.

[0151] In the following, one of the "internal magnet (2311)" and the "external magnet (2312)" may be referred to as the "first magnet" and the other as the "second magnet".

[0152] In the following, one of the "internal sensor (2321)" and the "external sensor (2322)" may be referred to as the "first sensor" and the other as the "second sensor".

[0153] In the following, one of the “inner ball (2410)” and the “outer ball (2420)” may be referred to as the “first ball” and the other as the “second ball”.

[0154] In the following, one of the “1st to 4th inner balls (2411, 412, 413, 414)” and the “1st to 4th outer balls (2511, 512, 513, 514)” may be referred to as “1-1 ball”, another as “1-2 ball”, another as “1-3 ball”, another as “1-4 ball”, another as “2-1 ball”, another as “2-2 ball”, another as “2-3 ball”, and another as “2-4 ball”.

[0155] In the following, one of the "upper elastic member (2510)" and the "lower elastic member (2520)" may be referred to as the "first elastic member" and the other as the "second elastic member".

[0156] In the following, one of the "internal coupling member (2610)" and the "external coupling member (2620)" may be referred to as the "first coupling member" and the other as the "second coupling member".

[0157] In the following, one of the z-axis, x-axis, and y-axis may be referred to as the "first axis," another as the "second axis," and the other as the "third axis."

[0158] In the following description, one of the roll direction, yaw direction, and pitch direction may be referred to as the "first circumferential direction," another as the "second circumferential direction," and the other as the "third circumferential direction." Alternatively, the roll direction, yaw direction, and pitch direction may be referred to as the "first to third directions."

[0159]

[0160] The configuration of a robot according to the first embodiment of the present invention will be described below.

[0161] The robot may include a body. The robot may include an arm member connected to the body. The arm member of the robot may include a gripping portion. The gripping portion may include, for example, a finger shape. The force-torque sensor of the first embodiment of the present invention may be disposed in the gripping portion of the arm member. The arm member of the robot may include a joint. The force-torque sensor of the first embodiment of the present invention may be disposed in the joint of the arm member.

[0162] The configuration of the robot hand is explained below with reference to the drawings.

[0163] FIG. 1 is a perspective view illustrating a part of a robot hand according to a first embodiment of the present invention.

[0164] The robot hand (1) may include robot fingers. The robot hand (1) may include a plurality of robot fingers. The robot hand (1) may include five robot fingers. The robot hand (1) may include first to fifth robot fingers. The robot hand (1) may include five robot fingers having a shape corresponding to a human finger.

[0165]

[0166] Hereinafter, the configuration of a robot finger according to the first embodiment of the present invention will be described with reference to the drawings.

[0167] FIG. 2 is a perspective view of a robot finger according to a first embodiment of the present invention, with the case viewed through it. FIG. 3 (a) is a perspective view of the lead, and (b) is a bottom perspective view of the robot finger. FIG. 4 is a side view of the robot finger according to a first embodiment of the present invention with part of the case removed. FIG. 5 is a cross-sectional perspective view of the robot finger according to a first embodiment of the present invention, cut so that the bottom part of the finger is divided in two. FIG. 6 is a cross-sectional perspective view of the robot finger according to a first embodiment of the present invention, cut perpendicular to the cutting direction in FIG. 5 and viewed from above.

[0168] The robot finger may include a robot fingertip (see A in FIG. 1). The robot finger may include a robot fingertip shaped like a fingertip joint.

[0169] The robot finger may include a case (10). The case (10) may have the shape of a fingertip joint. The case (10) may include the shape of a fingertip joint. The case (10) may have the shape of a robot fingertip. The case (10) may have elasticity similar to human skin. Accordingly, pressure or external force applied to the case (10) may be transmitted to a force-torque sensor (20, 30) placed within the case (10).

[0170] The robot finger may include force-torque sensors (20, 30). The force-torque sensors (20, 30) may be placed within the case (10). The force-torque sensors (20, 30) may detect external force or pressure applied to the case (10). The force-torque sensors (20, 30) may include a plurality of force-torque sensors. The force-torque sensors (20, 30) may include two force-torque sensors.

[0171] The force-torque sensor (20, 30) may include a first force-torque sensor (20). The lead (230) to which an external force is applied to the first force-torque sensor (20) may face a first direction (see A in FIG. 2 and FIG. 4). The lead (230) of the first force-torque sensor (20) may face a bottom portion (11) shaped like a fingertip joint. The first direction may be the z-axis direction of the first force-torque sensor (20). At this time, when an external force is applied to the lead (230) of the first force-torque sensor (20), the lead (230) of the first force-torque sensor (20) may be tilted in the yaw, pitch, and roll directions of the first force-torque sensor (20) or moved in the z-axis direction of the first force-torque sensor (20). That is, the lead (230) in the first force-torque sensor (20) can move in a rotational direction centered on the x-axis (yaw), a rotational direction centered on the y-axis (pitch), a rotational direction centered on the z-axis (roll), and a z-axis direction.

[0172] The lead (230) of the first force-torque sensor (20) may include a disc shape. In this case, the direction in which the lead (230) of the first force-torque sensor (20) faces may be the direction in which the outer surface of the disc shape of the lead (230) faces. That is, the outer surface of the disc shape of the lead (230) of the first force-torque sensor (20) may face the first direction.

[0173] The force-torque sensor (20, 30) may include a second force-torque sensor (30). The lead (230) to which an external force is applied to the second force-torque sensor (30) may face a second direction (see B in FIG. 2 and FIG. 4). The second direction may be different from the first direction. The first direction may be perpendicular to the second direction. The lead (230) of the second force-torque sensor (30) may face the end portion (12) shaped like a fingertip joint. The second direction may be the z-axis direction of the second force-torque sensor (30). When an external force is applied to the lead (230) of the second force-torque sensor (30), the lead (230) of the second force-torque sensor (30) may be tilted in the yaw, pitch, and roll directions of the second force-torque sensor (30) or moved in the z-axis direction of the second force-torque sensor (30). That is, the lead (230) of the second force-torque sensor (30) may move in the rotational direction centered on the x-axis (yaw), the rotational direction centered on the y-axis (pitch), the rotational direction centered on the z-axis (roll), and the z-axis direction.

[0174] The lead (230) of the second force-torque sensor (30) may include a disc shape. In this case, the direction in which the lead (230) of the second force-torque sensor (30) faces may be the direction in which the outer surface of the disc shape of the lead (230) faces. That is, the outer surface of the disc shape of the lead (230) of the second force-torque sensor (30) may face the second direction.

[0175] In the first embodiment of the present invention, the z-axis of the first force-torque sensor (20) and the z-axis of the second force-torque sensor (30) may be arranged in different directions. For example, the z-axis of the first force-torque sensor (20) and the z-axis of the second force-torque sensor (30) may be orthogonal. Accordingly, the yaw direction of the first force-torque sensor (20) and the yaw direction of the second force-torque sensor (30) may be different, the pitch direction of the first force-torque sensor (20) and the pitch direction of the second force-torque sensor (30) may be different, and the roll direction of the first force-torque sensor (20) and the roll direction of the second force-torque sensor (30) may be different.

[0176] The first force-torque sensor (20) and the second force-torque sensor (30) may be the same product. The first force-torque sensor (20) and the second force-torque sensor (30) may have the same shape. The first force-torque sensor (20) and the second force-torque sensor (30) may have the same size. The first force-torque sensor (20) and the second force-torque sensor (30) may be formed separately. The first force-torque sensor (20) and the second force-torque sensor (30) may be electrically separated to detect external forces individually. The first force-torque sensor (20) may be spaced apart from the second force-torque sensor (30).

[0177] The first force-torque sensor (20) can detect an external force applied to the bottom portion (11) of the fingertip joint shape. The second force-torque sensor (30) can detect an external force applied to the end portion (12) of the fingertip joint shape. Accordingly, according to the first embodiment of the present invention, not only the external force applied to the bottom portion (11) of the finger of the robot finger but also the external force applied to the fingertip portion (12) can be detected.

[0178]

[0179] Hereinafter, the configuration of a force-torque sensor according to the first embodiment of the present invention will be described with reference to the drawings. The force-torque sensor described below may be a first force-torque sensor (20). The force-torque sensor described below may be a second force-torque sensor (30). The configurations of the first force-torque sensor (20) and the second force-torque sensor (30) may be the same.

[0180] FIG. 7 is a partial perspective view of a force-torque sensor according to a first embodiment of the present invention. FIG. 8 is a cross-sectional view taken from AA in FIG. 7. FIG. 9 is a cross-sectional view taken from BB in FIG. 7. FIG. 10 is an exploded perspective view of a force-torque sensor according to a first embodiment of the present invention. FIG. 11 is an exploded perspective view taken from a different direction than FIG. 10. FIG. 12 is a perspective view of FIG. 7 with the lead, upper cover, and related components omitted. FIG. 13 is a perspective view of FIG. 12 with the upper elastic member omitted. FIG. 14 is a perspective view of FIG. 13 with the inner carrier and related components omitted. FIG. 15 is a perspective view of FIG. 14 with the outer carrier, base, and related components omitted. FIG. 16 is a bottom perspective view of the force-torque sensor in the state of FIG. 7 taken from a different direction. FIG. 17 is a bottom perspective view in which the lower cover, substrate, lower elastic member, and related components in FIG. 16 are omitted. FIG. 18 is a bottom perspective view in which the base in FIG. 17 is omitted. FIG. 19 is a bottom perspective view in which the external carrier and related components in FIG. 18 are omitted. FIG. 20 is a perspective view illustrating the combined state of the internal carrier and ball plunger of a force-torque sensor according to the first embodiment of the present invention.

[0181] Force-torque sensors can be used to detect and measure forces and torques applied to a robot in real time. Force-torque sensors can detect forces applied to the force-torque sensor. Force-torque sensors can measure forces applied to the force-torque sensor. Force-torque sensors can detect torque applied to the force-torque sensor. Force-torque sensors can measure torque applied to the force-torque sensor. The force-torque sensor can be a 6-axis force-torque sensor. The force-torque sensor can detect and measure forces in 6 axes, namely the x-axis, y-axis, z-axis, yaw, pitch, and roll directions. The force-torque sensor can be a finger sensor of the robot.

[0182] The force-torque sensor may include a fixed part (100). The fixed part (100) is a concept distinct from the moving part (200) and may be a part that is relatively fixed when the moving part (200) moves.

[0183] The force-torque sensor may include a base (110). The fixed part (100) may include a base (110). The base (110) may be placed on a lower cover (130). The base (110) may be placed on the lower cover (130). The base (110) may be placed on an upper cover (120). The base (110) may be placed below the upper cover (120). The base (110) may be placed between the lower cover (130) and the upper cover (120). The base (110) may accommodate an external carrier (220) inside. The base (110) may accommodate an internal carrier (210) inside. The base (110) may be placed on the outside of the external carrier (220). The base (110) may be placed on the outside of the internal carrier (210).

[0184] The base (110) may include a protrusion (111). The protrusion (111) may protrude from the inner surface of the base (110). The protrusion (111) may protrude from the inner surface of the side wall of the base (110). A ball (410, 420) of a ball plunger (400) may be disposed in the protrusion (111).

[0185] The force-torque sensor may include an upper cover (120). The fixed part (100) may include an upper cover (120). The upper cover (120) may be placed on the base (110). The upper cover (120) may be placed on the base (110). The upper cover (120) may be coupled to the base (110). The upper cover (120) may be coupled to the upper surface of the base (110). The upper cover (120) may be fixed to the base (110). The upper cover (120) may be placed between the base (110) and the lead (230).

[0186] The force-torque sensor may include a lower cover (130). The fixed part (100) may include the lower cover (130). The lower cover (130) may form the bottom portion of the force-torque sensor. The lower cover (130) may be positioned on the opposite side of the lead (230). The lower cover (130) may be positioned below the base (110). The lower cover (130) may be coupled to the lower surface of the base (110). The lower cover (130) may be coupled to the base (110). The lower cover (130) may include a hole or groove through which the substrate (700) passes. The lower cover (130) may be positioned on the opposite side of the upper cover (120).

[0187] The force-torque sensor may include a moving part (200). The moving part (200) may be disposed within the fixed part (100). The moving part (200) may be disposed on the fixed part (100). The moving part (200) may move relative to the fixed part (100). When an external force is applied, the moving part (200) may move relative to the fixed part (100). At least a portion of the moving part (200) may be disposed within the fixed part (100). A portion of the moving part (200) may be exposed outside the fixed part (100). The moving part (200) may be disposed on the lower cover (130).

[0188] The force-torque sensor may include a first moving part (201). The first moving part (201) may be a part that moves when a force having x-axis, y-axis, yaw, pitch, and roll components is applied to the force-torque sensor. The first moving part (201) may include a lead (230) and an inner carrier (210). The first moving part (201) may be movably disposed within a fixed part (100). The first moving part (201) may be tilted in the yaw, pitch, and roll directions. The first moving part (201) may be rotated in the yaw, pitch, and roll directions. The first moving part (201) may be moved in the yaw, pitch, and roll directions.

[0189] The force-torque sensor may include a second moving part (202). The second moving part (202) may move when a force having a z-axis component is applied. The second moving part (202) may move together with the first moving part (201) when a force having a z-axis component is applied. When the first moving part (201) moves in the z-axis direction, the first moving part (201) may move together with the second moving part (202). The second moving part (202) may include an external carrier (220). The second moving part (202) may be positioned between the fixed part (100) and the first moving part (201).

[0190] The force-torque sensor may include an inner carrier (210). The moving part (200) may include an inner carrier (210). The inner carrier (210) may be disposed within the fixed part (100). The inner carrier (210) may be disposed within the outer carrier (220). The inner carrier (210) may be disposed on the fixed part (100). The inner carrier (210) may be disposed within the base (110). The inner carrier (210) may be formed in a cylindrical or cylindrical shape in at least a portion.

[0191] The inner carrier (210) can move in the yaw direction, which is a rotational direction centered on the x-axis, the pitch direction, which is a rotational direction centered on the y-axis, and the roll direction, which is a rotational direction centered on the z-axis, with respect to the outer carrier (220). The x-axis, y-axis, and z-axis can be orthogonal to each other. The inner carrier (210) and the outer carrier (220) can move integrally in the z-axis direction with respect to the fixed part (100).

[0192] The inner carrier (210) may include a projection (211). The projection (211) may be formed protruding from the outer surface of the inner carrier (210). The projection (211) may overlap with the balls (410, 420) of the lower ball plunger (401) in the z-axis direction. The projection (211) may be positioned above the balls (410, 420) of the lower ball plunger (401). The projection (211) may be positioned at the same height as the upper ball plunger (402).

[0193] The inner carrier (210) may include a groove (212). The groove (212) may be formed on the lower surface and the outer surface of the inner carrier (210). An inner projection (222) of the outer carrier (220) may be disposed in the groove (212). The groove (212) may come into contact with the inner projection (222) of the outer carrier (220). When the inner carrier (210) moves downward, the bottom surface of the groove (212) of the inner carrier (210) presses against the upper surface of the inner projection (222) of the outer carrier (220), so that the inner carrier (210) and the outer carrier (220) can move as a single unit.

[0194] The force-torque sensor may include an external carrier (220). The moving part (200) may include an external carrier (220). The external carrier (220) may be positioned between the internal carrier (210) and the fixed part (100). The external carrier (220) may be positioned on the outside of the internal carrier (210). The external carrier (220) may be positioned within the fixed part (100). The external carrier (220) may be positioned on the fixed part (100). The external carrier (220) may be positioned within the base (110). The external carrier (220) may move in the z-axis direction relative to the fixed part (100). The external carrier (220) may move together with the internal carrier (210) when the internal carrier (210) moves in the z-axis direction.

[0195] The outer carrier (220) may include an outer projection (221). The outer projection (221) may be a rotation-preventing projection. The outer projection (221) may protrude outward from the outer carrier (220). The outer projection (221) may be formed on the outer surface of the outer carrier (220). The outer projection (221) may be inserted into a groove of the base (110). The outer projection (221) may be positioned in the groove of the base (110) to prevent rotation around the z-axis. The groove of the base (110) may be formed by two projections.

[0196] The outer carrier (220) may include an inner projection (222). The inner projection (222) may protrude inward from the outer carrier (220). The inner projection (222) may be formed on the inner circumference of the outer carrier (220). The inner projection (222) may be placed in the groove (212) of the inner carrier (210). In order to prevent interference between the inner projection (222) of the outer carrier (220) and the inner carrier (210) even when the inner carrier (210) rotates around the z-axis, a space may be formed in the roll direction between the inner projection (222) of the outer carrier (220) and the groove (212) of the inner carrier (210).

[0197] The force-torque sensor may include a lead (230). The moving part (200) may include a lead (230). The lead (230) may be connected to an internal carrier (210). At least a portion of the lead (230) may be placed on the base (110). At least a portion of the lead (230) may be placed on the upper cover (120). At least a portion of the lead (230) may be placed on the fixed part (100). At least a portion of the lead (230) may protrude beyond the fixed part (100). At least a portion of the lead (230) may protrude outside the fixed part (100). An external force may be applied to at least a portion of the lead (230) that protrudes beyond the fixed part (100). An external force may be applied to the lead (230). The lead (230) may be moved by the external force. The lead (230) may be coupled to the internal carrier (210). The lead (230) may be placed on the inner carrier (210). The lead (230) may be placed on the inner carrier (210). The lead (230) may move integrally with the inner carrier (210). The lead (230) may be fixed to the inner carrier (210). At least a portion of the lead (230) may be exposed outside the fixed portion (100). The lead (230) may be exposed to the outside and move by an external force. The lead (230) may be formed in a circular shape when viewed from above.

[0198] When a force is applied to the lead (230) in the direction of the first axis, the direction of the second axis, the direction of rotation around the first axis, the direction of rotation around the second axis, and the direction of rotation around the third axis, the inner carrier (210) can move relative to the outer carrier (220). When a force is applied to the lead (230) in the direction of the third axis, the inner carrier (210) and the outer carrier (220) can move together relative to the fixed part (100). At this time, the first axis may be the x-axis, the second axis may be the y-axis, and the third axis may be the z-axis.

[0199] The lead (230) may include a plate portion (231). The plate portion (231) may be a part that receives external force. The plate portion (231) may have a plate shape. The plate portion (231) may be formed in a plate shape. The plate portion (231) may be formed in a disc shape.

[0200] The lead (230) may include a protrusion (232). The protrusion (232) may be formed protruding from one surface of the plate portion (231). The protrusion (232) may be formed protruding from the center of one surface of the plate portion (231).

[0201] The lead (230) may include a projection (233). The projection (233) may be formed protruding from the protrusion (232). The projection (233) may be coupled to the inner carrier (210). The projection (233) may be coupled to the upper elastic member (520). The projection (233) may include a plurality of projections. The projection (233) may include two projections.

[0202] The lead (230) may include a hole (234). The hole (234) may be formed at the center of the plate portion (231). A coupling member (610) may be coupled to the hole (234).

[0203] The force-torque sensor may include a sensing unit. The sensing unit can detect movement of the moving unit (200) relative to the fixed unit (100). The sensing unit can detect movement of the moving unit (200) relative to the fixed unit (100) in the x-axis direction. The sensing unit can detect movement of the moving unit (200) relative to the fixed unit (100) in the y-axis direction. The sensing unit can detect movement of the moving unit (200) relative to the fixed unit (100) in the yaw direction. The sensing unit can detect movement of the moving unit (200) relative to the fixed unit (100) in the pitch direction. The sensing unit can detect movement of the moving unit (200) relative to the fixed unit (100) in the roll direction. The sensing unit can detect movement of the moving unit (200) relative to the fixed unit (100) in the z-axis direction.

[0204] The force-torque sensor may include a magnet (310). The magnet (310) may be placed in the moving part (200). The magnet (310) may be a 4-pole magnet. The magnet (310) may include two S poles and two N poles. As a variation, the magnet (310) may be a 2-pole magnet.

[0205] The magnet (310) may include an internal magnet (311). The internal magnet (311) may be placed in the internal carrier (210). The internal magnet (311) may be placed on the lower surface of the internal carrier (210). The internal magnet (311) may be placed in the first moving part (201).

[0206] The internal magnet (311) may include a plurality of magnets. The internal magnet (311) may include four magnets. The internal magnet (311) may include first to fourth magnets. The first magnet may be positioned on the central axis of the internal carrier (210). The second magnet and the third magnet may be positioned on opposite sides of the first magnet. The fourth magnet may be positioned so as to be spaced apart from the second magnet and the third magnet by the same distance.

[0207] The magnet (310) may include an external magnet (312). The external magnet (312) may be placed on the external carrier (220). The external magnet (312) may be placed on the lower surface of the external carrier (220). The external magnet (312) may be placed on the second moving part (202). The external magnet (312) may be placed on the opposite side of the fourth magnet with respect to the first magnet.

[0208] The force-torque sensor may include a sensor (320). The sensor (320) may detect a magnet (310). The sensor (320) may detect the magnetic force of the magnet (310). The sensor (320) may include a Hall element. The sensor (320) may be a Hall sensor. The sensor (320) may be placed on a substrate (700). The sensor (320) may be placed on a mounting portion (710) of the substrate (700).

[0209] The sensor (320) may include an internal sensor (321). The internal sensor (321) may detect an internal magnet (311). The internal sensor (321) may include a plurality of sensors. The internal sensor (321) may include four sensors. The internal sensor (321) may include first to fourth sensors corresponding to first to fourth magnets of the internal magnet (311).

[0210] The sensor (320) may include an external sensor (322). The external sensor (322) may detect an external magnet (312). The external sensor (322) may be positioned on the opposite side of the fourth sensor relative to the first sensor.

[0211] As a variation, the sensor (320) may be placed in the moving part (200) and the magnet (310) may be placed in the fixed part (100).

[0212] The internal magnet (311) may be placed on either the lower surface of the fixed part (100) or the internal carrier (210). At this time, the internal sensor (321) may be placed on the other lower surface of the fixed part (100) or the internal carrier (210) and may detect the internal magnet (311).

[0213] The external magnet (312) may be placed in either the fixed part (100) or the second moving part (202). At this time, the external sensor (322) may be placed in the other of the fixed part (100) and the second moving part (202) and may detect the external magnet (312).

[0214] The force-torque sensor may include a guide member. The guide member may guide the movement of the moving part (200). The guide member may guide the movement of the moving part (200) relative to the fixed part (100). The guide member may guide the movement of the inner carrier (210) relative to the outer carrier (220).

[0215] The force-torque sensor may include a ball plunger (400). The ball plunger (400) may guide the first moving part (201) to tilt relative to the fixed part (100). The ball plunger (400) may guide the first moving part (201) to move relative to the fixed part (100). The ball plunger (400) may guide the first moving part (201) to rotate relative to the fixed part (100). The ball plunger (400) may guide the inner carrier (210) to tilt relative to the base (110). The ball plunger (400) may be placed in the inner carrier (210). The ball plunger (400) may be placed to penetrate the inner carrier (210). The ball plunger (400) may be coupled with the inner carrier (210). The ball plunger (400) can be fixed to the inner carrier (210). The ball plunger (400) can be formed as a separate member from the inner carrier (210). The ball plunger (400) can be inserted into a hole in the inner carrier (210).

[0216] The ball plunger (400) can guide the yaw direction movement of the inner carrier (210). The ball plunger (400) can guide the pitch direction movement of the inner carrier (210). The ball plunger (400) can guide the roll direction movement of the inner carrier (210).

[0217] The ball plunger (400) may include a plurality of ball plungers. The ball plunger (400) may include two ball plungers. The ball plunger (400) may include a lower ball plunger (401). The ball plunger (400) may include an upper ball plunger (402). The lower ball plunger (401) may be positioned in the x-axis direction. The upper ball plunger (402) may be positioned in the y-axis direction. In the z-axis direction, the upper ball plunger (402) may be positioned higher than the lower ball plunger (401). The upper ball plunger (402) may be spaced apart from the lower ball plunger (401). The upper ball plunger (402) and the lower ball plunger (401) may have the same shape and the same size.

[0218] The lower ball plunger (401) can guide the pitch direction movement of the inner carrier (210). The lower ball plunger (401) can provide a pivot center for the pitch direction movement of the inner carrier (210). The upper ball plunger (402) can guide the yaw direction movement of the inner carrier (210). The upper ball plunger (402) can provide a pivot center for the yaw direction movement of the inner carrier (210).

[0219] The ball plunger (400) may include balls (410, 420). The ball plunger (400) may include a plurality of balls. The ball plunger (400) may include two balls. The ball plunger (400) may include a first ball (410) and a second ball (420). The first ball (410) may be placed at one end of the housing (440). The second ball (420) may be placed at the other end of the housing (440). The balls (410, 420) may be formed in a spherical shape.

[0220] The ball plunger (400) may include an elastic member (430). The elastic member (430) may press the balls (410, 420). The elastic member (430) may be positioned between the first ball (410) and the second ball (420). The elastic member (430) may include a coil spring. One end of the coil spring may be in contact with the first ball (410), and the other end of the coil spring may be in contact with the second ball (420).

[0221] The ball plunger (400) may include a housing (440). The housing (440) may be cylindrical or columnar. The housing (440) may be cylindrical with both sides open.

[0222] The force-torque sensor may include an elastic member. The elastic member may provide a restoring force to the moving part (200). The elastic member may have elasticity. The elastic member may be formed of metal.

[0223] The force-torque sensor may include a lower elastic member (510). The lower elastic member (510) may be coupled to the lower cover (130). The lower elastic member (510) may be coupled to the base (110). The lower elastic member (510) may be coupled to the external carrier (220). The lower elastic member (510) may connect the lower cover (130) and the external carrier (220). The lower elastic member (510) may connect the base (110) and the external carrier (220). The lower elastic member (510) may be coupled to the fixed part (100). The lower elastic member (510) may support the second moving part (202). Through this, when the external force is removed, the lower elastic member (510) may provide a restoring force to the second moving part (202).

[0224] The lower elastic member (510) may include an outer portion (511). The outer portion (511) may be coupled to the lower cover (130). The outer portion (511) may be placed on the lower cover (130). The outer portion (511) may be fixed to the lower cover (130). The outer portion (511) may be coupled to the base (110). The outer portion (511) may be placed on the base (110). The outer portion (511) may be fixed to the base (110). The outer portion (511) may be placed between the lower cover (130) and the base (110).

[0225] The lower elastic member (510) may include an inner portion (512). The inner portion (512) may be coupled to the outer carrier (220). The inner portion (512) may be positioned on the outer carrier (220). The inner portion (512) may be fixed to the outer carrier (220). The inner portion (512) may support the outer carrier (220). The inner portion (512) may support the outer carrier (220) from below.

[0226] The lower elastic member (510) may include a connecting portion (513). The connecting portion (513) may connect the outer portion (511) and the inner portion (512). The connecting portion (513) may elastically connect the outer portion (511) and the inner portion (512). The connecting portion (513) may include a bent shape. The connecting portion (513) may include a shape that is bent multiple times. The connecting portion (513) may include a bent portion. The connecting portion (513) may have elasticity. The connecting portion (513) may be formed of metal.

[0227] The force-torque sensor may include an upper elastic member (520). The upper elastic member (520) may be coupled to the upper cover (120). The upper elastic member (520) may be coupled to the base (110). The upper elastic member (520) may be coupled to the inner carrier (210). The upper elastic member (520) may be coupled to the lid (230). The upper elastic member (520) may connect the upper cover (120) and the inner carrier (210). The upper elastic member (520) may connect the base (110) and the inner carrier (210). The upper elastic member (520) may be coupled to the fixed part (100) and the first moving part (201). Through this, when an external force is removed, the upper elastic member (520) may provide a restoring force to the first moving part (201).

[0228] The upper elastic member (520) may include an outer portion (521). The outer portion (521) may be coupled to the upper cover (120). The outer portion (521) may be placed on the upper cover (120). The outer portion (521) may be fixed to the upper cover (120). The outer portion (521) may be coupled to the base (110). The outer portion (521) may be placed on the base (110). The outer portion (521) may be fixed to the base (110). The outer portion (521) may be placed between the upper cover (120) and the base (110).

[0229] The upper elastic member (520) may include an inner portion (522). The inner portion (522) may be coupled to the inner carrier (210). The inner portion (522) may be placed on the inner carrier (210). The inner portion (522) may be fixed to the inner carrier (210). The inner portion (522) may be coupled to the lid (230). The inner portion (522) may be placed on the lid (230). The inner portion (522) may be fixed to the lid (230). The inner portion (522) may be placed between the inner carrier (210) and the lid (230).

[0230] The upper elastic member (520) may include a connecting portion (523). The connecting portion (523) may connect the outer portion (521) and the inner portion (522). The connecting portion (523) may elastically connect the outer portion (521) and the inner portion (522). The connecting portion (523) may include a bent shape. The connecting portion (523) may include a shape that is bent multiple times. The connecting portion (523) may include a bent portion. The connecting portion (523) may have elasticity. The connecting portion (523) may be formed of metal.

[0231] The force-torque sensor may include a coupling member (610). The coupling member (610) may combine two or more different members. For example, the coupling member (610) may be a screw. The coupling member (610) may be a bolt. The internal coupling member (610) may be coupled to the lead (230) and the internal carrier (210). The internal coupling member (610) may secure the lead (230) to the internal carrier (210).

[0232] The force-torque sensor may include a substrate (700). The sensing part may include a substrate (700). The substrate (700) may be placed on a fixed part (100). The substrate (700) may be placed on a lower cover (130). The substrate (700) may be placed on a base (110).

[0233] The substrate (700) may include a mounting portion (710). A sensor (320) may be placed in the mounting portion (710). The mounting portion (710) may be an RPCB. The substrate (700) may include a terminal portion (720). The terminal portion (720) may include a plurality of terminals. The terminal portion (720) may be placed outside the lower cover (130). The plurality of terminals of the terminal portion (720) may be connected to external terminals such as a robot. The substrate (700) may include a connection portion (730). The connection portion (730) may connect the mounting portion (710) and the terminal portion (720). The terminal portion (720) and the connection portion (730) may be FPCBs.

[0234]

[0235] The operation of a force-torque sensor according to the first embodiment of the present invention will be described below with reference to the drawings.

[0236] FIG. 21 is a diagram illustrating the case where an external force having a yaw or pitch direction component is applied to a force-torque sensor according to the first embodiment of the present invention.

[0237] When an external force having a component in at least one of the y-axis direction and the yaw direction is applied to the lead (230) of the force-torque sensor according to the first embodiment of the present invention, the lead (230) may rotate or tilt around the x-axis (see yaw in FIG. 21). At this time, the internal carrier (210) may move integrally with the lead (230). Meanwhile, since the fixed part (100) is maintained in a fixed state, the distance between the internal sensor (321) of the substrate (700) placed on the fixed part (100) and the internal magnet (311) placed on the internal carrier (210) may change. At this time, since the four internal magnets (311) move at different distances relative to the four internal sensors (321), the force of the y-axis direction component and the force of the yaw direction component of the external force applied to the lead (230) can be measured.

[0238] When an external force having a component in at least one of the x-axis direction and the pitch direction is applied to the lead (230) of the force-torque sensor according to the first embodiment of the present invention, the lead (230) may rotate or tilt around the y-axis (see pitch in FIG. 21). At this time, the internal carrier (210) may move integrally with the lead (230). Meanwhile, since the fixed part (100) is maintained in a fixed state, the distance between the internal sensor (321) of the substrate (700) placed on the fixed part (100) and the internal magnet (311) placed on the internal carrier (210) may change. At this time, since the four internal magnets (311) move at different distances relative to the four internal sensors (321), the force of the x-axis direction component and the force of the pitch direction component of the external force applied to the lead (230) can be measured.

[0239] FIG. 22 is a diagram illustrating the change when an external force having a roll direction component is applied to a force-torque sensor according to the first embodiment of the present invention.

[0240] When an external force having a roll direction component is applied to the lead (230) of the force-torque sensor according to the first embodiment of the present invention, the lead (230) may rotate or tilt around the z-axis (see roll in FIG. 22). The lead (230) may rotate at a predetermined angle in the roll direction (see a in FIG. 22). At this time, the internal carrier (210) may move integrally with the lead (230). Meanwhile, since the fixed part (100) is maintained in a fixed state, the distance between the internal sensor (321) of the substrate (700) placed on the fixed part (100) and the internal magnet (311) placed on the internal carrier (210) may change. At this time, since the four internal magnets (311) move at different distances relative to the four internal sensors (321), the force of the roll direction component of the external force applied to the lead (230) can be measured. For example, three of the four internal magnets (311) move the same distance and one internal magnet with the center positioned does not move, so the force of the roll direction component of the external force applied to the lead (230) can be measured.

[0241] FIG. 23 is a diagram illustrating the case where an external force having a component in the z-axis direction is applied to a force-torque sensor according to the first embodiment of the present invention.

[0242] When an external force having a z-axis component is applied to the lead (230) of the force-torque sensor according to the first embodiment of the present invention, the lead (230) can move along the z-axis (see B in FIG. 23). At this time, the external carrier (220) and the internal carrier (210) can move integrally with the lead (230) (see A and B in FIG. 23). Meanwhile, the distance between the external sensor (322) of the substrate (700) and the external magnet (312) placed on the external carrier (220) can be changed. Through this, the force of the z-axis component of the external force applied to the lead (230) can be measured. However, at this time, the distance between the internal magnet (311) and the internal sensor (321) is also changed, and through this, the force of the z-axis component of the external force applied to the lead (230) can also be measured.

[0243]

[0244] Hereinafter, the configuration of a robot finger according to the first modified example is described with reference to the drawings. Hereinafter, the configuration of the robot finger according to the first modified example is described focusing on the differences from the first embodiment of the present invention. Accordingly, the description of the first embodiment of the present invention may be applied by analogy to the configuration of the first modified example that is not described below.

[0245] FIG. 24 is a perspective view of a force-torque sensor according to a first modification. FIG. 25 is a side view of the force-torque sensor according to the first modification with part of the case removed. FIG. 26 (a) is a perspective view of the lead of the first modification, and (b) is a bottom perspective view of the robot finger of the first modification.

[0246] A robot finger according to the first variant may include a force-torque sensor (20). The force-torque sensor (20) may include a lead (230a). The lead (230a) may have a shape corresponding to the shape of the bottom part (11) of the fingertip joint. Through such a structure, both the external force applied to the bottom part (11) of the finger (see A in FIG. 25) and the external force applied to the fingertip part (12) (see B in FIG. 25) can be detected by the force-torque sensor (20). Meanwhile, when an external force is applied to the lead (230a), the moving part (200) may be tilted in the yaw direction, pitch direction, and roll direction, or moved in the z-axis direction.

[0247] The lead (230a) may include a plate portion (231a). The plate portion (231a) may be a part that receives external force. The plate portion (231a) may have a plate shape. The plate portion (231a) may be formed in a plate shape. The plate portion (231a) may be formed in a plate shape having curvature. The plate portion (231a) may have a curvature corresponding to the curvature of the finger bottom portion (11). The plate portion (231a) may be placed on the finger bottom portion (11).

[0248] The lead (230a) may include a protrusion (232a). The protrusion (232a) may be formed protruding from one surface of the plate portion (231a). The protrusion (232a) may be formed protruding from the center of one surface of the plate portion (231a).

[0249] The lead (230a) may include a projection (233a). The projection (233a) may be formed protruding from the protrusion (232a). The projection (233a) may be coupled to the inner carrier (210). The projection (233a) may be coupled to the upper elastic member (520). The projection (233a) may include a plurality of projections. The projection (233a) may include two projections.

[0250]

[0251] Hereinafter, the configuration of a robot finger according to a second modified example is described with reference to the drawings. Hereinafter, the configuration of a robot finger according to a second modified example is described focusing on the differences from the first embodiment of the present invention. Accordingly, the description of the first embodiment of the present invention may be applied by analogy to the configuration of the second modified example that is not described below.

[0252] FIG. 27 is a perspective view of a force-torque sensor according to a second modification. FIG. 28 is a side view of the force-torque sensor according to the second modification with part of the case removed. FIG. 29 (a) is a perspective view of the lead of the second modification, and (b) is a bottom perspective view of the robot finger of the second modification.

[0253] A robot finger according to the second variant may include a force-torque sensor (20). The force-torque sensor (20) may include a lead (230b). The lead (230b) may include a first plate portion (231b) facing the bottom portion (11) of the fingertip joint shape. The lead (230b) may include a second plate portion (232b) that is bent and extended from the first plate portion (231b) and faces the end portion (12) of the fingertip joint shape. Through such a structure, both the external force applied to the bottom portion (11) of the finger and the external force applied to the fingertip portion (12) can be detected by the force-torque sensor (20). Meanwhile, when an external force is applied to the lead (230), the moving portion (200) may be tilted in the yaw direction, pitch direction, and roll direction, or moved in the z-axis direction.

[0254] The lead (230b) may include a first plate portion (231b). The first plate portion (231b) may be a portion that receives external force. The first plate portion (231b) may have a plate shape. The first plate portion (231b) may be formed in a plate shape. The first plate portion (231b) may be formed in a disc shape. The first plate portion (231b) may face the bottom portion (11) of the fingertip joint.

[0255] The lead (230b) may include a second plate portion (232b). The second plate portion (232b) may be a portion that receives external force. The second plate portion (232b) may have a plate shape. The second plate portion (232b) may be formed in a plate shape. The second plate portion (232b) may be bent from the first plate portion (231b). The second plate portion (232b) may be bent and extended from the first plate portion (231b). The second plate portion (232b) may be extended from the first plate portion (231b). The second plate portion (232b) may be bent from the first plate portion (231b). The second plate portion (232b) may be directed toward the end portion (12) of the fingertip joint.

[0256] The lead (230b) may include a protrusion (233b). The protrusion (233b) may be formed protruding from one surface of the first plate portion (231b). The protrusion (233b) may be formed protruding from the center of one surface of the first plate portion (231b).

[0257] The lead (230b) may include a projection (234b). The projection (234b) may be formed protruding from the protrusion (233b). The projection (234b) may be coupled to the inner carrier (210). The projection (234b) may be coupled to the upper elastic member (520). The projection (234b) may include a plurality of projections. The projection (234b) may include two projections.

[0258] The lead (230b) may include a hole (235b). The hole (235b) may be formed at the center of the first plate portion (231b). A coupling member (610) may be coupled to the hole (235b).

[0259]

[0260] Hereinafter, the configuration of a force-torque sensor according to the second embodiment of the present invention will be described with reference to the drawings.

[0261] FIG. 30 is a perspective view of a force-torque sensor according to a second embodiment of the present invention. FIG. 31 is a partial perspective view in which a part of the substrate in FIG. 30 is omitted. FIG. 32 is a cross-sectional view taken from AA in FIG. 31. FIG. 33 is a cross-sectional view taken from BB in FIG. 31. FIG. 34 is an exploded perspective view of a force-torque sensor according to a second embodiment of the present invention. FIG. 35 is an exploded perspective view taken from a different direction than FIG. 34. FIG. 36 is a perspective view in which the lead, upper cover, and related components in FIG. 31 are omitted. FIG. 37 is a perspective view in which the upper elastic member in FIG. 36 is omitted. FIG. 38 is a perspective view in which the internal carrier and related components in FIG. 37 are omitted. FIG. 39 is a perspective view in which the external carrier, base, and related components in FIG. 38 are omitted. FIG. 40 is a bottom perspective view of the force-torque sensor in the state of FIG. 31 viewed from a different direction. FIG. 41 is a bottom perspective view in which the lower cover, substrate, lower elastic member, and related components are omitted from FIG. 40. FIG. 42 is a bottom perspective view in which the base is omitted from FIG. 41. FIG. 43 is a bottom perspective view in which the external carrier and related components are omitted from FIG. 42. FIG. 44 is a perspective view illustrating the combined state of the internal carrier and ball plunger of the force-torque sensor according to the second embodiment of the present invention.

[0262] Force-torque sensors can be used to detect and measure forces and torques applied to a robot in real time. Force-torque sensors can detect forces applied to the force-torque sensor. Force-torque sensors can measure forces applied to the force-torque sensor. Force-torque sensors can detect torque applied to the force-torque sensor. Force-torque sensors can measure torque applied to the force-torque sensor. The force-torque sensor can be a 6-axis force-torque sensor. The force-torque sensor can detect and measure forces in 6 axes, namely the x-axis, y-axis, z-axis, yaw, pitch, and roll directions. The force-torque sensor can be a finger sensor of the robot.

[0263] The force-torque sensor may include a fixed part (1100). The fixed part (1100) is a concept distinct from the moving part (1200) and may be a part that is relatively fixed when the moving part (1200) moves.

[0264] The force-torque sensor may include a base (1110). The fixed part (1100) may include a base (1110). The base (1110) may be placed on a lower cover (1130). The base (1110) may be placed on the lower cover (1130). The base (1110) may be placed on an upper cover (1120). The base (1110) may be placed below the upper cover (1120). The base (1110) may be placed between the lower cover (1130) and the upper cover (1120). The base (1110) may accommodate an external carrier (1220) inside. The base (1110) may accommodate an internal carrier (1210) inside. The base (1110) may be placed on the outside of the external carrier (1220). The base (1110) can be placed on the outside of the inner carrier (1210).

[0265] The base (1110) may include a protrusion (1111). The protrusion (1111) may protrude from the inner surface of the base (1110). The protrusion (1111) may protrude from the inner surface of the side wall of the base (1110). A ball (1410, 420) of a ball plunger (1400) may be disposed on the protrusion (1111).

[0266] The force-torque sensor may include an upper cover (1120). The fixed part (1100) may include an upper cover (1120). The upper cover (1120) may be placed on the base (1110). The upper cover (1120) may be placed on the base (1110). The upper cover (1120) may be coupled to the base (1110). The upper cover (1120) may be coupled to the upper surface of the base (1110). The upper cover (1120) may be fixed to the base (1110). The upper cover (1120) may be placed between the base (1110) and the lead (1230).

[0267] The force-torque sensor may include a lower cover (1130). The fixed part (1100) may include the lower cover (1130). The lower cover (1130) may form the bottom portion of the force-torque sensor. The lower cover (1130) may be positioned on the opposite side of the lead (1230). The lower cover (1130) may be positioned below the base (1110). The lower cover (1130) may be coupled to the lower surface of the base (1110). The lower cover (1130) may be coupled to the base (1110). The lower cover (1130) may include a hole or groove through which the substrate (1700) passes. The lower cover (1130) may be positioned on the opposite side of the upper cover (1120).

[0268] The force-torque sensor may include a moving part (1200). The moving part (1200) may be disposed within the fixed part (1100). The moving part (1200) may be disposed on the fixed part (1100). The moving part (1200) may move relative to the fixed part (1100). When an external force is applied, the moving part (1200) may move relative to the fixed part (1100). At least a portion of the moving part (1200) may be disposed within the fixed part (1100). A portion of the moving part (1200) may be exposed outside the fixed part (1100). The moving part (1200) may be disposed on the lower cover (1130).

[0269] The force-torque sensor may include a first moving part (1201). The first moving part (1201) may be a part that moves when a force having x-axis, y-axis, yaw, pitch, and roll components is applied to the force-torque sensor. The first moving part (1201) may include a lead (1230) and an inner carrier (1210). The first moving part (1201) may be movably disposed within a fixed part (1100). The first moving part (1201) may be tilted in the yaw, pitch, and roll directions. The first moving part (1201) may be rotated in the yaw, pitch, and roll directions. The first moving part (1201) may be moved in the yaw, pitch, and roll directions.

[0270] The force-torque sensor may include a second moving part (1202). The second moving part (1202) may move when a force having a z-axis component is applied. The second moving part (1202) may move together with the first moving part (1201) when a force having a z-axis component is applied. When the first moving part (1201) moves in the z-axis direction, the first moving part (1201) may move together with the second moving part (1202). The second moving part (1202) may include an external carrier (1220). The second moving part (1202) may be positioned between the fixed part (1100) and the first moving part (1201).

[0271] The force-torque sensor may include an inner carrier (1210). The moving part (1200) may include an inner carrier (1210). The inner carrier (1210) may be disposed within the fixed part (1100). The inner carrier (1210) may be disposed within the outer carrier (1220). The inner carrier (1210) may be disposed on the fixed part (1100). The inner carrier (1210) may be disposed within the base (1110). The inner carrier (1210) may be formed in a cylindrical or cylindrical shape in at least a portion.

[0272] The inner carrier (1210) can move in the yaw direction, which is a rotational direction centered on the x-axis, the pitch direction, which is a rotational direction centered on the y-axis, and the roll direction, which is a rotational direction centered on the z-axis, relative to the outer carrier (1220). The x-axis, y-axis, and z-axis can be orthogonal to each other. The inner carrier (1210) and the outer carrier (1220) can move integrally in the z-axis direction relative to the fixed part (1100).

[0273] The inner carrier (1210) may include a projection (1211). The projection (1211) may be formed protruding from the outer surface of the inner carrier (1210). The projection (1211) may overlap with the ball (1410, 420) of the lower ball plunger (1401) in the z-axis direction. The projection (1211) may be positioned above the ball (1410, 420) of the lower ball plunger (1401). The projection (1211) may be positioned at the same height as the upper ball plunger (1402).

[0274] The inner carrier (1210) may include a groove (1212). The groove (1212) may be formed on the lower surface and the outer surface of the inner carrier (1210). An inner projection (1222) of the outer carrier (1220) may be disposed in the groove (1212). The groove (1212) may come into contact with the inner projection (1222) of the outer carrier (1220). When the inner carrier (1210) moves downward, the bottom surface of the groove (1212) of the inner carrier (1210) presses against the upper surface of the inner projection (1222) of the outer carrier (1220), so that the inner carrier (1210) and the outer carrier (1220) can move as a single unit.

[0275] The force-torque sensor may include an external carrier (1220). The moving part (1200) may include an external carrier (1220). The external carrier (1220) may be positioned between the internal carrier (1210) and the fixed part (1100). The external carrier (1220) may be positioned on the outside of the internal carrier (1210). The external carrier (1220) may be positioned within the fixed part (1100). The external carrier (1220) may be positioned on the fixed part (1100). The external carrier (1220) may be positioned within the base (1110). The external carrier (1220) may move in the z-axis direction relative to the fixed part (1100). The external carrier (1220) may move together with the internal carrier (1210) when the internal carrier (1210) moves in the z-axis direction.

[0276] The outer carrier (1220) may include an outer projection (1221). The outer projection (1221) may be a rotation-preventing projection. The outer projection (1221) may protrude outward from the outer carrier (1220). The outer projection (1221) may be formed on the outer surface of the outer carrier (1220). The outer projection (1221) may be inserted into a groove of the base (1110). The outer projection (1221) may be placed in the groove of the base (1110) to prevent rotation around the z-axis. The groove of the base (1110) may be formed by two projections.

[0277] The outer carrier (1220) may include an inner projection (1222). The inner projection (1222) may protrude inward from the outer carrier (1220). The inner projection (1222) may be formed on the inner circumference of the outer carrier (1220). The inner projection (1222) may be placed in the groove (1212) of the inner carrier (1210). In order to prevent interference between the inner projection (1222) of the outer carrier (1220) and the inner carrier (1210) even when the inner carrier (1210) rotates around the z-axis, a space may be formed in the roll direction between the inner projection (1222) of the outer carrier (1220) and the groove (1212) of the inner carrier (1210).

[0278] The force-torque sensor may include a lead (1230). The moving part (1200) may include a lead (1230). The lead (1230) may be connected to an internal carrier (1210). At least a portion of the lead (1230) may be placed on a base (1110). At least a portion of the lead (1230) may be placed on an upper cover (1120). At least a portion of the lead (1230) may be placed on a fixed part (1100). At least a portion of the lead (1230) may protrude beyond the fixed part (1100). At least a portion of the lead (1230) may protrude outside the fixed part (1100). An external force may be applied to at least a portion of the lead (1230) that protrudes beyond the fixed part (1100). An external force may be applied to the lead (1230). The lead (1230) may move due to the external force. The lead (1230) can be combined with the inner carrier (1210). The lead (1230) can be placed on the inner carrier (1210). The lead (1230) can be placed on the inner carrier (1210). The lead (1230) can move integrally with the inner carrier (1210). The lead (1230) can be fixed to the inner carrier (1210). At least a portion of the lead (1230) can be exposed outside the fixed portion (1100). The lead (1230) is exposed to the outside and can move by an external force. The lead (1230) can be formed in a circular shape when viewed from above.

[0279] When a force is applied to the lead (1230) in the direction of the first axis, the direction of the second axis, the direction of rotation around the first axis, the direction of rotation around the second axis, and the direction of rotation around the third axis, the inner carrier (1210) can move relative to the outer carrier (1220). When a force is applied to the lead (1230) in the direction of the third axis, the inner carrier (1210) and the outer carrier (1220) can move together relative to the fixed part (1100). At this time, the first axis may be the x-axis, the second axis may be the y-axis, and the third axis may be the z-axis.

[0280] The force-torque sensor may include a sensing unit. The sensing unit can detect movement of the moving unit (1200) relative to the fixed unit (1100). The sensing unit can detect movement of the moving unit (1200) relative to the fixed unit (1100) in the x-axis direction. The sensing unit can detect movement of the moving unit (1200) relative to the fixed unit (1100) in the y-axis direction. The sensing unit can detect movement of the moving unit (1200) relative to the fixed unit (1100) in the yaw direction. The sensing unit can detect movement of the moving unit (1200) relative to the fixed unit (1100) in the pitch direction. The sensing unit can detect movement of the moving unit (1200) relative to the fixed unit (1100) in the roll direction. The sensing unit can detect movement of the moving unit (1200) relative to the fixed unit (1100) in the z-axis direction.

[0281] The force-torque sensor may include a magnet (1310). The magnet (1310) may be placed in the moving part (1200). The magnet (1310) may be a 4-pole magnet. The magnet (1310) may include two S poles and two N poles. As a variation, the magnet (1310) may be a 2-pole magnet.

[0282] The magnet (1310) may include an internal magnet (1311). The internal magnet (1311) may be placed in the internal carrier (1210). The internal magnet (1311) may be placed on the lower surface of the internal carrier (1210). The internal magnet (1311) may be placed in the first moving part (1201).

[0283] The internal magnet (1311) may include a plurality of magnets. The internal magnet (1311) may include four magnets. The internal magnet (1311) may include first to fourth magnets. The first magnet may be positioned on the central axis of the internal carrier (1210). The second magnet and the third magnet may be positioned on opposite sides of the first magnet. The fourth magnet may be positioned so as to be spaced apart from the second magnet and the third magnet by the same distance.

[0284] The magnet (1310) may include an external magnet (1312). The external magnet (1312) may be placed on an external carrier (1220). The external magnet (1312) may be placed on the lower surface of the external carrier (1220). The external magnet (1312) may be placed on the second moving part (1202). The external magnet (1312) may be placed on the opposite side of the fourth magnet with respect to the first magnet.

[0285] The force-torque sensor may include a sensor (1320). The sensor (1320) may detect a magnet (1310). The sensor (1320) may detect the magnetic force of the magnet (1310). The sensor (1320) may include a Hall element. The sensor (1320) may be a Hall sensor. The sensor (1320) may be placed on a substrate (1700). The sensor (1320) may be placed on a mounting portion (1710) of the substrate (1700).

[0286] The sensor (1320) may include an internal sensor (1321). The internal sensor (1321) may detect an internal magnet (1311). The internal sensor (1321) may include a plurality of sensors. The internal sensor (1321) may include four sensors. The internal sensor (1321) may include first to fourth sensors corresponding to first to fourth magnets of the internal magnet (1311).

[0287] The sensor (1320) may include an external sensor (1322). The external sensor (1322) may detect an external magnet (1312). The external sensor (1322) may be positioned on the opposite side of the fourth sensor relative to the first sensor.

[0288] As a variation, the sensor (1320) may be placed in the moving part (1200) and the magnet (1310) may be placed in the fixed part (1100).

[0289] The internal magnet (1311) may be placed on either the lower surface of the fixed part (1100) or the internal carrier (1210). At this time, the internal sensor (1321) may be placed on the other lower surface of the fixed part (1100) or the internal carrier (1210) and may detect the internal magnet (1311).

[0290] The external magnet (1312) may be placed in either the fixed part (1100) or the second moving part (1202). At this time, the external sensor (1322) may be placed in the other of the fixed part (1100) and the second moving part (1202) and may detect the external magnet (1312).

[0291] The force-torque sensor may include a guide member. The guide member may guide the movement of the moving part (1200). The guide member may guide the movement of the moving part (1200) relative to the fixed part (1100). The guide member may guide the movement of the inner carrier (1210) relative to the outer carrier (1220).

[0292] The force-torque sensor may include a ball plunger (1400). The ball plunger (1400) may guide the first moving part (1201) to tilt relative to the fixed part (1100). The ball plunger (1400) may guide the first moving part (1201) to move relative to the fixed part (1100). The ball plunger (1400) may guide the first moving part (1201) to rotate relative to the fixed part (1100). The ball plunger (1400) may guide the inner carrier (1210) to tilt relative to the base (1110). The ball plunger (1400) may be positioned in the inner carrier (1210). The ball plunger (1400) may be positioned to penetrate the inner carrier (1210). The ball plunger (1400) can be combined with the inner carrier (1210). The ball plunger (1400) can be fixed to the inner carrier (1210). The ball plunger (1400) can be formed as a separate member from the inner carrier (1210). The ball plunger (1400) can be inserted into a hole in the inner carrier (1210).

[0293] The ball plunger (1400) can guide the yaw direction movement of the inner carrier (1210). The ball plunger (1400) can guide the pitch direction movement of the inner carrier (1210). The ball plunger (1400) can guide the roll direction movement of the inner carrier (1210).

[0294] The ball plunger (1400) may include a plurality of ball plungers. The ball plunger (1400) may include two ball plungers. The ball plunger (1400) may include a lower ball plunger (1401). The ball plunger (1400) may include an upper ball plunger (1402). The lower ball plunger (1401) may be positioned in the x-axis direction. The upper ball plunger (1402) may be positioned in the y-axis direction. In the z-axis direction, the upper ball plunger (1402) may be positioned higher than the lower ball plunger (1401). The upper ball plunger (1402) may be spaced apart from the lower ball plunger (1401). The upper ball plunger (1402) and the lower ball plunger (1401) may have the same shape and the same size.

[0295] The lower ball plunger (1401) can guide the pitch direction movement of the inner carrier (1210). The lower ball plunger (1401) can provide a pivot center for the pitch direction movement of the inner carrier (1210). The upper ball plunger (1402) can guide the yaw direction movement of the inner carrier (1210). The upper ball plunger (1402) can provide a pivot center for the yaw direction movement of the inner carrier (1210).

[0296] The ball plunger (1400) may include balls (1410, 420). The ball plunger (1400) may include a plurality of balls. The ball plunger (1400) may include two balls. The ball plunger (1400) may include a first ball (1410) and a second ball (1420). The first ball (1410) may be placed at one end of the housing (1440). The second ball (1420) may be placed at the other end of the housing (1440). The balls (1410, 420) may be formed in a spherical shape.

[0297] The ball plunger (1400) may include an elastic member (1430). The elastic member (1430) may press the balls (1410, 420). The elastic member (1430) may be positioned between the first ball (1410) and the second ball (1420). The elastic member (1430) may include a coil spring. One end of the coil spring may be in contact with the first ball (1410), and the other end of the coil spring may be in contact with the second ball (1420).

[0298] The ball plunger (1400) may include a housing (1440). The housing (1440) may be cylindrical or columnar. The housing (1440) may be cylindrical with both ends open.

[0299] The force-torque sensor may include an elastic member. The elastic member may provide a restoring force to the moving part (1200). The elastic member may have elasticity. The elastic member may be formed of metal.

[0300] The force-torque sensor may include a lower elastic member (1510). The lower elastic member (1510) may be coupled to a lower cover (1130). The lower elastic member (1510) may be coupled to a base (1110). The lower elastic member (1510) may be coupled to an external carrier (1220). The lower elastic member (1510) may connect the lower cover (1130) and the external carrier (1220). The lower elastic member (1510) may connect the base (1110) and the external carrier (1220). The lower elastic member (1510) may be coupled to a fixed part (1100). The lower elastic member (1510) may support a second moving part (1202). Through this, when the external force is removed, the lower elastic member (1510) can provide a restoring force to the second moving part (1202).

[0301] The lower elastic member (1510) may include an outer portion (1511). The outer portion (1511) may be coupled to the lower cover (1130). The outer portion (1511) may be placed on the lower cover (1130). The outer portion (1511) may be fixed to the lower cover (1130). The outer portion (1511) may be coupled to the base (1110). The outer portion (1511) may be placed on the base (1110). The outer portion (1511) may be fixed to the base (1110). The outer portion (1511) may be placed between the lower cover (1130) and the base (1110).

[0302] The lower elastic member (1510) may include an inner portion (1512). The inner portion (1512) may be coupled to an outer carrier (1220). The inner portion (1512) may be positioned on the outer carrier (1220). The inner portion (1512) may be fixed to the outer carrier (1220). The inner portion (1512) may support the outer carrier (1220). The inner portion (1512) may support the outer carrier (1220) from below.

[0303] The lower elastic member (1510) may include a connecting portion (1513). The connecting portion (1513) may connect the outer portion (1511) and the inner portion (1512). The connecting portion (1513) may elastically connect the outer portion (1511) and the inner portion (1512). The connecting portion (1513) may include a bent shape. The connecting portion (1513) may include a shape that is bent multiple times. The connecting portion (1513) may include a bent portion. The connecting portion (1513) may have elasticity. The connecting portion (1513) may be formed of metal.

[0304] The force-torque sensor may include an upper elastic member (1520). The upper elastic member (1520) may be coupled to an upper cover (1120). The upper elastic member (1520) may be coupled to a base (1110). The upper elastic member (1520) may be coupled to an inner carrier (1210). The upper elastic member (1520) may be coupled to a lid (1230). The upper elastic member (1520) may connect the upper cover (1120) and the inner carrier (1210). The upper elastic member (1520) may connect the base (1110) and the inner carrier (1210). The upper elastic member (1520) may be coupled to a fixed part (1100) and a first moving part (1201). Through this, when the external force is removed, the upper elastic member (1520) can provide a restoring force to the first moving part (1201).

[0305] The upper elastic member (1520) may include an outer portion (1521). The outer portion (1521) may be coupled to the upper cover (1120). The outer portion (1521) may be placed on the upper cover (1120). The outer portion (1521) may be fixed to the upper cover (1120). The outer portion (1521) may be coupled to the base (1110). The outer portion (1521) may be placed on the base (1110). The outer portion (1521) may be fixed to the base (1110). The outer portion (1521) may be placed between the upper cover (1120) and the base (1110).

[0306] The upper elastic member (1520) may include an inner portion (1522). The inner portion (1522) may be coupled to the inner carrier (1210). The inner portion (1522) may be placed on the inner carrier (1210). The inner portion (1522) may be fixed to the inner carrier (1210). The inner portion (1522) may be coupled to the lead (1230). The inner portion (1522) may be placed on the lead (1230). The inner portion (1522) may be fixed to the lead (1230). The inner portion (1522) may be placed between the inner carrier (1210) and the lead (1230).

[0307] The upper elastic member (1520) may include a connecting portion (1523). The connecting portion (1523) may connect the outer portion (1521) and the inner portion (1522). The connecting portion (1523) may elastically connect the outer portion (1521) and the inner portion (1522). The connecting portion (1523) may include a bent shape. The connecting portion (1523) may include a shape that is bent multiple times. The connecting portion (1523) may include a bent portion. The connecting portion (1523) may have elasticity. The connecting portion (1523) may be formed of metal.

[0308] The force-torque sensor may include a coupling member (1610). The coupling member (1610) may combine two or more different members. For example, the coupling member (1610) may be a screw. The coupling member (1610) may be a bolt. The internal coupling member (1610) may be coupled to the lead (1230) and the internal carrier (1210). The internal coupling member (1610) may secure the lead (1230) to the internal carrier (1210).

[0309] The force-torque sensor may include a substrate (1700). The sensing portion may include a substrate (1700). The substrate (1700) may be placed on a fixed portion (1100). The substrate (1700) may be placed on a lower cover (1130). The substrate (1700) may be placed on a base (1110).

[0310] The substrate (1700) may include a mounting portion (1710). A sensor (1320) may be placed in the mounting portion (1710). The mounting portion (1710) may be an RPCB. The substrate (1700) may include a terminal portion (1720). The terminal portion (1720) may include a plurality of terminals. The terminal portion (1720) may be placed outside the lower cover (1130). The plurality of terminals of the terminal portion (1720) may be connected to external terminals such as a robot. The substrate (1700) may include a connection portion (1730). The connection portion (1730) may connect the mounting portion (1710) and the terminal portion (1720). The terminal portion (1720) and the connection portion (1730) may be FPCBs.

[0311]

[0312] The configuration of a force-torque sensor according to a modified example is described below with reference to the drawings. The configuration of the force-torque sensor according to a modified example is described below focusing on the differences from the second embodiment of the present invention. Therefore, the description in the second embodiment of the present invention may be applied by analogy to the configuration of the force-torque sensor according to a modified example not described below.

[0313] FIG. 45 is a partial perspective view of a force-torque sensor according to a modified example. FIG. 46 is a cross-sectional view of a force-torque sensor according to a modified example, cut perpendicular to the z-axis and viewed from above. FIG. 47 is a perspective view of a ball plunger of a force-torque sensor according to a modified example.

[0314] A force-torque sensor according to a modified example may include a ball plunger (1400a). The ball plunger (1400a) may include a first ball plunger (1401a) and a second ball plunger (1402a) positioned opposite each other with respect to the central axis of the first moving part (1201), and a third ball plunger (1403a) and a fourth ball plunger (1404a) positioned opposite each other. In this case, the first to fourth ball plungers (1401a, 402a, 403a, 404a) may be positioned at the same height.

[0315] Each of the first to fourth ball plungers (1401a, 402a, 403a, 404a) may include a housing (1440a), a ball (1410a) disposed at an open end of the housing (1440a), and an elastic member (1430a) supporting the ball (1410a) against the housing (1440a). One end of the housing (1440a) may be open and the other end of the housing (1440a) may be closed. The ball (1410a) may be disposed at the open end of the housing (1440a), and the elastic member (1430a) may be supported at the closed other end of the housing (1440a). The elastic member (1430a) may be a coil spring. The elastic member (1430a) can apply pressure to the other end of the housing (1440a) in a direction that pushes out the ball (1410a). The first to fourth ball plungers (1401a, 402a, 403a, 404a) can be arranged in all directions. When viewed from above, the first ball plunger (1401a) can be positioned at 9 o'clock with respect to the central axis of the inner carrier (1210), the second ball plunger (1402a) at 3 o'clock, the third ball plunger (1403a) at 12 o'clock, and the fourth ball plunger (1404a) at 6 o'clock.

[0316]

[0317] Hereinafter, the operation of a force-torque sensor according to a second embodiment of the present invention will be described with reference to the drawings.

[0318] FIG. 48 is a diagram illustrating the case where an external force having a yaw or pitch direction component is applied to a force-torque sensor according to a second embodiment of the present invention.

[0319] When an external force having a component in at least one of the y-axis direction and the yaw direction is applied to the lead (1230) of the force-torque sensor according to the second embodiment of the present invention, the lead (1230) may rotate or tilt around the x-axis (see yaw in FIG. 48). At this time, the internal carrier (1210) may move integrally with the lead (1230). Meanwhile, since the fixed part (1100) is maintained in a fixed state, the distance between the internal sensor (1321) of the substrate (1700) placed on the fixed part (1100) and the internal magnet (1311) placed on the internal carrier (1210) may change. At this time, since the four internal magnets (1311) move at different distances relative to the four internal sensors (1321), the force of the y-axis direction component and the force of the yaw direction component of the external force applied to the lead (1230) can be measured.

[0320] When an external force having a component in at least one of the x-axis direction and the pitch direction is applied to the lead (1230) of the force-torque sensor according to the second embodiment of the present invention, the lead (1230) may rotate or tilt around the y-axis (see pitch in FIG. 48). At this time, the internal carrier (1210) may move integrally with the lead (1230). Meanwhile, since the fixed part (1100) is maintained in a fixed state, the distance between the internal sensor (1321) of the substrate (1700) placed on the fixed part (1100) and the internal magnet (1311) placed on the internal carrier (1210) may change. At this time, since the four internal magnets (1311) move at different distances relative to the four internal sensors (1321), the force of the x-axis direction component and the force of the pitch direction component of the external force applied to the lead (1230) can be measured.

[0321] FIG. 49 is a diagram illustrating the change when an external force having a roll direction component is applied to a force-torque sensor according to a second embodiment of the present invention.

[0322] When an external force having a roll direction component is applied to the lead (1230) of the force-torque sensor according to the second embodiment of the present invention, the lead (1230) may rotate or tilt around the z-axis (see roll in FIG. 49). The lead (1230) may rotate at a predetermined angle in the roll direction (see a in FIG. 49). At this time, the internal carrier (1210) may move integrally with the lead (1230). Meanwhile, since the fixed part (1100) is maintained in a fixed state, the distance between the internal sensor (1321) of the substrate (1700) placed on the fixed part (1100) and the internal magnet (1311) placed on the internal carrier (1210) may change. At this time, since the four internal magnets (1311) move at different distances relative to the four internal sensors (1321), the force of the roll direction component of the external force applied to the lead (1230) can be measured. For example, three of the four internal magnets (1311) move the same distance and one internal magnet with the center positioned does not move, so the force of the roll direction component of the external force applied to the lead (1230) can be measured.

[0323] FIG. 50 is a diagram illustrating the case where an external force having a component in the z-axis direction is applied to a force-torque sensor according to a second embodiment of the present invention.

[0324] When an external force having a z-axis component is applied to the lead (1230) of the force-torque sensor according to the second embodiment of the present invention, the lead (1230) can move along the z-axis (see B of FIG. 50). At this time, the external carrier (1220) and the internal carrier (1210) can move integrally with the lead (1230) (see A and B of FIG. 50). Meanwhile, the distance between the external sensor (1322) of the substrate (1700) and the external magnet (1312) placed on the external carrier (1220) can be changed. Through this, the force of the z-axis component of the external force applied to the lead (1230) can be measured. However, at this time, the distance between the internal magnet (1311) and the internal sensor (1321) is also changed, and through this, the force of the z-axis component of the external force applied to the lead (1230) can also be measured.

[0325]

[0326] The configuration of a robot according to the second embodiment of the present invention will be described below.

[0327] The robot may include a body. The robot may include an arm member connected to the body. The arm member of the robot may include a gripping portion. The gripping portion may include, for example, a finger shape. The force-torque sensor of the second embodiment of the present invention may be disposed in the gripping portion of the arm member. The arm member of the robot may include a joint. The force-torque sensor of the second embodiment of the present invention may be disposed in the joint of the arm member.

[0328]

[0329] Hereinafter, the configuration of a force-torque sensor according to the third embodiment of the present invention will be described with reference to the drawings.

[0330] FIG. 51 is a perspective view of a force-torque sensor according to a third embodiment of the present invention. FIG. 52 is a perspective view of FIG. 51 with a portion of the substrate omitted. FIG. 53 is a cross-sectional view taken from AA in FIG. 52. FIG. 54 is a partial enlarged view of FIG. 53. FIG. 55 is a cross-sectional view taken from BB in FIG. 52. FIG. 56 is a cross-sectional view taken from above, cut perpendicular to the z-axis, of a force-torque sensor according to a third embodiment of the present invention. FIG. 57 is an exploded perspective view of a force-torque sensor according to a third embodiment of the present invention. FIG. 58 is an exploded perspective view taken from a different direction than FIG. 57. FIG. 59 is a perspective view of FIG. 52 with the lead and related components omitted. FIG. 60 is a perspective view of FIG. 59 with the upper cover, upper elastic member, and related components omitted. FIG. 61 is a perspective view of FIG. 60 with the internal carrier and related components omitted. FIG. 62 is a perspective view of FIG. 61 with the external carrier and related components omitted. FIG. 63 is a perspective view of FIG. 62 with the base and lower elastic member omitted. FIG. 64 is a bottom perspective view of the force-torque sensor in FIG. 52 viewed from a different direction. FIG. 65 is a bottom perspective view of FIG. 64 with the lower cover, substrate, lower elastic member, and related components omitted. FIG. 66 is a bottom perspective view of FIG. 65 with the base omitted. FIG. 67 is a bottom perspective view of FIG. 66 with the external carrier and related components omitted.

[0331] Force-torque sensors can be used to detect and measure forces and torques applied to a robot in real time. Force-torque sensors can detect forces applied to the force-torque sensor. Force-torque sensors can measure forces applied to the force-torque sensor. Force-torque sensors can detect torque applied to the force-torque sensor. Force-torque sensors can measure torque applied to the force-torque sensor. The force-torque sensor can be a 6-axis force-torque sensor. The force-torque sensor can detect and measure forces in 6 axes, namely the x-axis, y-axis, z-axis, yaw, pitch, and roll directions. The force-torque sensor can be a finger sensor of the robot.

[0332] The force-torque sensor may include a fixed part (2100). The fixed part (2100) is a concept distinct from the moving part (2200) and may be a part that is relatively fixed when the moving part (2200) moves.

[0333] The force-torque sensor may include a base (2110). The fixed part (2100) may include a base (2110). The base (2110) may be placed on a lower cover (2130). The base (2110) may be placed on the lower cover (2130). The base (2110) may be placed on an upper cover (2120). The base (2110) may be placed below the upper cover (2120). The base (2110) may be placed between the lower cover (2130) and the upper cover (2120). The base (2110) may accommodate an external carrier (2220) inside. The base (2110) may accommodate an internal carrier (2210) inside. The base (2110) may be placed on the outside of the external carrier (2220). The base (2110) can be placed on the outside of the inner carrier (2210).

[0334] The base (2110) may include a groove. The groove may be a ball rail. An outer ball (2420) may be placed in the groove. The groove may extend in the z-axis direction. The outer ball (2420) may move along the groove of the base (2110). The outer ball (2420) may roll along the groove of the base (2110).

[0335] The force-torque sensor may include an upper cover (2120). The fixed part (2100) may include the upper cover (2120). The upper cover (2120) may be placed on the base (2110). The upper cover (2120) may be placed on the base (2110). The upper cover (2120) may be coupled to the base (2110). The upper cover (2120) may be coupled to the upper surface of the base (2110). The upper cover (2120) may be fixed to the base (2110). The upper cover (2120) may be placed between the base (2110) and the lead (2230).

[0336] The force-torque sensor may include a lower cover (2130). The fixed part (2100) may include the lower cover (2130). The lower cover (2130) may form the bottom portion of the force-torque sensor. The lower cover (2130) may be positioned on the opposite side of the lead (2230). The lower cover (2130) may be positioned below the base (2110). The lower cover (2130) may be coupled to the lower surface of the base (2110). The lower cover (2130) may be coupled to the base (2110). The lower cover (2130) may include a hole or groove through which the substrate (2700) passes. The lower cover (2130) may be positioned on the opposite side of the upper cover (2120).

[0337] The force-torque sensor may include a moving part (2200). The moving part (2200) may be disposed within the fixed part (2100). The moving part (2200) may be disposed on the fixed part (2100). The moving part (2200) may move relative to the fixed part (2100). When an external force is applied, the moving part (2200) may move relative to the fixed part (2100). At least a portion of the moving part (2200) may be disposed within the fixed part (2100). A portion of the moving part (2200) may be exposed outside the fixed part (2100). The moving part (2200) may be disposed on the lower cover (2130).

[0338] The force-torque sensor may include a first moving part (2201). The first moving part (2201) may be a part that moves when a force having x-axis, y-axis, yaw, pitch, and roll components is applied to the force-torque sensor. The first moving part (2201) may include a lead (2230) and an internal carrier (2210). The first moving part (2201) may be movably disposed within a fixed part (2100).

[0339] The force-torque sensor may include a second moving part (2202). The second moving part (2202) may move when a force having a z-axis component is applied. The second moving part (2202) may move together with the first moving part (2201) when a force having a z-axis component is applied. The second moving part (2202) may include an external carrier (2220). The second moving part (2202) may be positioned between the fixed part (2100) and the first moving part (2201).

[0340] The force-torque sensor may include an inner carrier (2210). The moving part (2200) may include an inner carrier (2210). The inner carrier (2210) may be disposed within the fixed part (2100). The inner carrier (2210) may be disposed within the outer carrier (2220). The inner carrier (2210) may be disposed on the fixed part (2100). The inner carrier (2210) may be disposed within the base (2110). The inner carrier (2210) may include a curved surface. An inner ball (2410) may be disposed on the curved surface of the inner carrier (2210). The inner carrier (2210) may be formed in a spherical shape in at least a portion. The inner carrier (2210) may be formed in a spherical shape in at least a portion so that the center of rotation remains constant without changing. Through this, the internal carrier (2210) moves as intended by the designer, so the occurrence of cross talk can be minimized.

[0341] The inner carrier (2210) can move in the yaw direction, which is a rotational direction centered on the x-axis, the pitch direction, which is a rotational direction centered on the y-axis, and the roll direction, which is a rotational direction centered on the z-axis, relative to the outer carrier (2220). The x-axis, y-axis, and z-axis can be orthogonal to each other. The inner carrier (2210) and the outer carrier (2220) can move integrally in the z-axis direction relative to the fixed part (2100).

[0342] The inner carrier (2210) may include a protrusion. The protrusion may be a stopper. The protrusion may be formed on the outer surface of the inner carrier (2210). The protrusion may protrude outward from the inner carrier (2210). The protrusion may be placed in a groove of the outer carrier (2220).

[0343] The force-torque sensor may include an external carrier (2220). The moving part (2200) may include an external carrier (2220). The external carrier (2220) may be positioned between the internal carrier (2210) and the fixed part (2100). The external carrier (2220) may be positioned on the outside of the internal carrier (2210). The external carrier (2220) may be positioned within the fixed part (2100). The external carrier (2220) may be positioned on the fixed part (2100). The external carrier (2220) may be positioned within the base (2110). The external carrier (2220) may move in the z-axis direction relative to the fixed part (2100). The external carrier (2220) may move together with the internal carrier (2210) when the internal carrier (2210) moves in the z-axis direction.

[0344] The outer carrier (2220) may include a first groove. The first groove may be an inner ball rail. An inner ball (2410) may be placed in the first groove. The inner ball (2410) may move along the first groove. Alternatively, the inner ball (2410) may rotate while at least a portion is received in the first groove.

[0345] The outer carrier (2220) may include a second groove. The second groove may be an outer ball rail. An outer ball (2420) may be placed in the second groove. The outer ball (2420) may move along the second groove. The second groove may extend in the z-axis direction.

[0346] The outer carrier (2220) may include a groove. The groove may be formed on the inner surface of the outer carrier (2220). The groove may be formed concavely on the inner surface of the outer carrier (2220). A projection of the inner carrier (2210) may be disposed in the groove of the outer carrier (2220).

[0347] The groove can limit the movement of the inner carrier (2210) to within a preset range. When the inner carrier (2210) rotates about the z-axis by more than a preset angle relative to the outer carrier (2220), the projection of the inner carrier (2210) may come into contact with the groove of the outer carrier (2220).

[0348] The force-torque sensor may include a lead (2230). The moving part (2200) may include a lead (2230). The lead (2230) may be connected to an internal carrier (2210). At least a portion of the lead (2230) may be placed on a base (2110). At least a portion of the lead (2230) may be placed on an upper cover (2120). At least a portion of the lead (2230) may be placed on a fixed part (2100). At least a portion of the lead (2230) may protrude beyond the fixed part (2100). At least a portion of the lead (2230) may protrude outside the fixed part (2100). An external force may be applied to at least a portion of the lead (2230) that protrudes beyond the fixed part (2100). An external force may be applied to the lead (2230). The lead (2230) may move due to the external force. The lead (2230) can be combined with the inner carrier (2210). The lead (2230) can be placed on the inner carrier (2210). The lead (2230) can be placed on the inner carrier (2210). The lead (2230) can move integrally with the inner carrier (2210). The lead (2230) can be fixed to the inner carrier (2210). At least a portion of the lead (2230) can be exposed outside the fixed portion (2100). The lead (2230) is exposed to the outside and can move by an external force. The lead (2230) can be formed in a circular shape when viewed from above.

[0349] When a force is applied to the lead (2230) in the direction of the first axis, the direction of the second axis, the direction of rotation around the first axis, the direction of rotation around the second axis, and the direction of rotation around the third axis, the inner carrier (2210) can move relative to the outer carrier (2220). When a force is applied to the lead (2230) in the direction of the third axis, the inner carrier (2210) and the outer carrier (2220) can move together relative to the fixed part (2100). At this time, the first axis may be the x-axis, the second axis may be the y-axis, and the third axis may be the z-axis.

[0350] The force-torque sensor may include a sensing unit. The sensing unit can detect movement of the moving unit (2200) relative to the fixed unit (2100). The sensing unit can detect movement of the moving unit (2200) relative to the fixed unit (2100) in the x-axis direction. The sensing unit can detect movement of the moving unit (2200) relative to the fixed unit (2100) in the y-axis direction. The sensing unit can detect movement of the moving unit (2200) relative to the fixed unit (2100) in the yaw direction. The sensing unit can detect movement of the moving unit (2200) relative to the fixed unit (2100) in the pitch direction. The sensing unit can detect movement of the moving unit (2200) relative to the fixed unit (2100) in the roll direction. The sensing unit can detect movement of the moving unit (2200) relative to the fixed unit (2100) in the z-axis direction.

[0351] The force-torque sensor may include a magnet (2310). The magnet (2310) may be placed in the moving part (2200). The magnet (2310) may be a 4-pole magnet. The magnet (2310) may include two S poles and two N poles. As a variation, the magnet (2310) may be a 2-pole magnet.

[0352] The magnet (2310) may include an internal magnet (2311). The internal magnet (2311) may be placed in the internal carrier (2210). The internal magnet (2311) may be placed on the lower surface of the internal carrier (2210). The internal magnet (2311) may be placed in the first moving part (2201).

[0353] The internal magnet (2311) may include a plurality of magnets. The internal magnet (2311) may include four magnets. The internal magnet (2311) may include first to fourth magnets. The first magnet may be positioned on the central axis of the internal carrier (2210). The second magnet and the third magnet may be positioned on opposite sides of the first magnet. The fourth magnet may be positioned so as to be spaced apart from the second magnet and the third magnet by the same distance.

[0354] The magnet (2310) may include an external magnet (2312). The external magnet (2312) may be placed on an external carrier (2220). The external magnet (2312) may be placed on the lower surface of the external carrier (2220). The external magnet (2312) may be placed on a second moving part (2202). The external magnet (2312) may be placed on the opposite side of the fourth magnet with respect to the first magnet.

[0355] The force-torque sensor may include a sensor (2320). The sensor (2320) may detect a magnet (2310). The sensor (2320) may detect the magnetic force of the magnet (2310). The sensor (2320) may include a Hall element. The sensor (2320) may be a Hall sensor. The sensor (2320) may be placed on a substrate (2700). The sensor (2320) may be placed on a mounting portion (2710) of the substrate (2700).

[0356] The sensor (2320) may include an internal sensor (2321). The internal sensor (2321) may detect an internal magnet (2311). The internal sensor (2321) may include a plurality of sensors. The internal sensor (2321) may include four sensors. The internal sensor (2321) may include first to fourth sensors corresponding to first to fourth magnets of the internal magnet (2311).

[0357] The sensor (2320) may include an external sensor (2322). The external sensor (2322) may detect an external magnet (2312). The external sensor (2322) may be positioned on the opposite side of the fourth sensor relative to the first sensor.

[0358] As a variation, the sensor (2320) may be placed in the moving part (2200) and the magnet (2310) may be placed in the fixed part (2100).

[0359] The internal magnet (2311) may be placed on either the lower surface of the fixed part (2100) or the internal carrier (2210). At this time, the internal sensor (2321) may be placed on the other lower surface of the fixed part (2100) and the internal carrier (2210) and may detect the internal magnet (2311).

[0360] The external magnet (2312) may be placed in either the fixed part (2100) or the second moving part (2202). At this time, the external sensor (2322) may be placed in the other of the fixed part (2100) and the second moving part (2202) and may detect the external magnet (2312).

[0361] The force-torque sensor may include a guide member. The guide member may guide the movement of the moving part (2200). The guide member may guide the movement of the moving part (2200) relative to the fixed part (2100). The guide member may guide the movement of the inner carrier (2210) relative to the outer carrier (2220).

[0362] The force-torque sensor may include an inner ball (2410). The guide member may include an inner ball (2410). The inner ball (2410) may be formed of ceramic. The inner ball (2410) may be placed in an inner carrier (2210). The inner ball (2410) may be in direct contact with the inner carrier (2210). The inner ball (2410) may be placed in an outer carrier (2220). The inner ball (2410) may be in direct contact with the outer carrier (2220). The inner ball (2410) may be placed between the inner carrier (2210) and the outer carrier (2220). The inner ball (2410) may be placed between the first moving part (2201) and the second moving part (2202). The inner ball (2410) can guide the movement of the inner carrier (2210) relative to the outer carrier (2220). The inner carrier (2210) can move in the yaw, pitch, and roll directions relative to the outer carrier (2220) by means of the inner ball (2410). However, if the inner carrier (2210) wishes to move in the z-axis direction, the inner ball (2410) and the outer carrier (2220) can move together with the inner carrier (2210).

[0363] The inner ball (2410) can guide the first moving part (2201) to tilt relative to the fixed part (2100). The inner ball (2410) can guide the inner carrier (2210) to tilt relative to the outer carrier (2220) or the base (2110).

[0364] The inner ball (2410) may include a plurality of balls. The inner ball (2410) may include a first inner ball (2411) and a second inner ball (2412). The first inner ball (2411) and the second inner ball (2412) may be positioned on opposite sides of each other with respect to the first moving part (2201). The first inner ball (2411) and the second inner ball (2412) may be positioned on opposite sides of each other with respect to the inner carrier (2210).

[0365] The first inner ball (2411) may be positioned higher than the second inner ball (2412). The first inner ball (2411) may be positioned higher in the z-axis direction than the second inner ball (2412). The first inner ball (2411) and the second inner ball (2412) may be positioned at different heights. As a variation, the second inner ball (2412) may be positioned higher than the first inner ball (2411).

[0366] The upper surface of the first moving part (2201) may be open outside the fixed part (2100). At this time, the upper surface of the first moving part (2201) may be the upper surface of the lead (2230). The shortest distance between the upper surface of the first moving part (2201) and the first inner ball (2411) (see D1 in FIG. 53) may be shorter than the shortest distance between the upper surface of the first moving part (2201) and the second inner ball (2412) (see D2 in FIG. 53).

[0367] The shortest distance between the imaginary plane including the lower surface of the inner carrier (2210) and the first inner ball (2411) (see D3 in FIG. 53) may be greater than the shortest distance between the imaginary plane and the second inner ball (2412) (see D4 in FIG. 53).

[0368] The inner ball (2410) may include a third inner ball (2413) and a fourth inner ball (2414). The third inner ball (2413) and the fourth inner ball (2414) may be positioned on opposite sides of each other with respect to the first moving part (2201). The third inner ball (2413) and the fourth inner ball (2414) may be positioned on opposite sides of each other with respect to the inner carrier (2210).

[0369] The third inner ball (2413) and the fourth inner ball (2414) can be positioned at the same height. The first inner ball (2411) can be positioned higher than the third inner ball (2413). The first inner ball (2411) can be positioned higher than the fourth inner ball (2414). The second inner ball (2412) can be positioned lower than the third inner ball (2413). The second inner ball (2412) can be positioned lower than the fourth inner ball (2414).

[0370] When viewed from above, with respect to the center of the inner carrier (2210), the first inner ball (2411) may be positioned at the 9 o'clock direction, the second inner ball (2412) at the 3 o'clock direction, the third inner ball (2413) at the 12 o'clock direction, and the fourth inner ball (2414) at the 6 o'clock direction.

[0371] The height difference between the center of the first inner ball (2411) and the center of the second inner ball (2412) may be 50% to 150% of the diameter of the inner ball (2410). Alternatively, the height difference between the center of the first inner ball (2411) and the center of the second inner ball (2412) may be 30% to 130% of the diameter of the inner ball (2410).

[0372] The first moving part (2201) may come into direct contact with the inner ball (2410). At least a portion of the first moving part (2201) may be formed of metal. The rigidity of the inner ball (2410) may be greater than the rigidity of the metal of the first moving part (2201). The inner carrier (2210) may be formed of aluminum. The inner ball (2410) may be formed of ceramic, which has greater rigidity than aluminum. The outer ball (2420) may also be formed of the same material as the inner ball (2410).

[0373] Referring to FIG. 54, in the third embodiment of the present invention, when a downward force is applied to the inner carrier (2210) along the z-axis, a first force (see A in FIG. 54) may act between the inner carrier (2210) and the first inner ball (2411). At this time, the first force (see A in FIG. 54) may be broken down into a first-1 force (see A1 in FIG. 54) and a first-2 force (see A2 in FIG. 54). Meanwhile, when a downward force is applied to the inner carrier (2210) along the z-axis, a second force (see B in FIG. 54) may act between the inner carrier (2210) and the second inner ball (2412). At this time, the second force (see B in FIG. 54) may be broken down into a second-1 force (see B1 in FIG. 54) and a second-2 force (see B2 in FIG. 54). Accordingly, a tilt (see R in FIG. 54) can be induced between the inner carrier (2210) and the first inner ball (2411), and between the inner carrier (2210) and the second inner ball (2412). Through this, the phenomenon of the first inner ball (2411) and the second inner ball (2412) striking the inner carrier (2210), that is, the phenomenon of the inner ball (2410) damaging the inner carrier (2210), can be prevented. Therefore, in the third embodiment of the present invention, even when a strong external force such as a drop impact occurs, the phenomenon of the inner ball (2410) damaging the inner carrier (2210) can be prevented.

[0374] The third embodiment of the present invention may include a structure in which the inner ball (2410) is arranged asymmetrically. Through this, the phenomenon of indentation occurring on the inner carrier (2210) due to external impact can be prevented. When dropped, instantaneous impact does not occur, and the impact is dispersed, inducing rotation (see R in FIG. 54) so ​​that a 5 to 15% twist may occur. Therefore, indentation does not occur, and reliability of use can be improved. Therefore, the phenomenon of jamming during operation can be improved. The diameter of the inner ball (2410) may be 0.5 mm to 0.6 mm. Alternatively, the diameter of the inner ball (2410) may be 0.5 mm to 0.7 mm. The height difference between the center of the first inner ball (2411) and the center of the second inner ball (2412) may be 0.5 mm to 0.6 mm. Alternatively, the height difference between the center of the first inner ball (2411) and the center of the second inner ball (2412) may be 0.5 mm to 0.7 mm.

[0375] The force-torque sensor may include an outer ball (2420). The guide member may include an outer ball (2420). The outer ball (2420) may be formed of ceramic. The outer ball (2420) may be placed on an outer carrier (2220). The outer ball (2420) may be in direct contact with the outer carrier (2220). The outer ball (2420) may be placed on a base (2110). The outer ball (2420) may be in direct contact with the base (2110). The outer ball (2420) may be placed between the outer carrier (2220) and the fixed part (2100). The outer ball (2420) may be placed between the outer carrier (2220) and the base (2110). The outer ball (2420) may be placed between the fixed part (2100) and the second moving part (2202). The outer ball (2420) can guide the movement of the outer carrier (2220) relative to the base (2110). The outer carrier (2220) can move in the z-axis direction relative to the base (2110) by means of the outer ball (2420). At this time, the outer carrier (2220) can move together with the inner carrier (2210) and the lead (2230).

[0376] The outer ball (2420) may include a plurality of balls. The outer ball (2420) may include at least two balls that overlap in the z-axis direction. Even when the outer carrier (2220) moves by the at least two balls that overlap in the z-axis direction, tilt can be prevented.

[0377] The outer ball (2420) may include a first outer ball (2421) and a second outer ball (2422). The first outer ball (2421) and the second outer ball (2422) may be positioned on opposite sides of the second moving part (2202). The first outer ball (2421) may be positioned higher than the second outer ball (2422). As a variation, the first outer ball (2421) may be positioned at the same height as the second outer ball (2422).

[0378] The outer ball (2420) may include a third outer ball (2423) and a fourth outer ball (2424). The third outer ball (2423) and the fourth outer ball (2424) may be positioned on opposite sides of the second moving part (2202). The first outer ball (2421) may be positioned higher than the third outer ball (2423). The first outer ball (2421) may be positioned higher than the fourth outer ball (2424). The second outer ball (2422) may be positioned lower than the third outer ball (2423). The second outer ball (2422) may be positioned lower than the fourth outer ball (2424). Through this structure, the phenomenon of the outer carrier (2220) being pressed by the second outer ball (2422) can be prevented.

[0379] In the direction in which the first outer ball (2421) faces the second outer ball (2422), the first inner ball (2411) may overlap with the first outer ball (2421) and the second outer ball (2422). In the direction in which the first outer ball (2421) faces the second outer ball (2422), the second inner ball (2412) may overlap with the first outer ball (2421) and the second outer ball (2422). In the direction in which the first outer ball (2421) faces the second outer ball (2422), the first inner ball (2411) may not overlap with the second inner ball (2412). As a variation, the first inner ball (2411) may partially overlap with the second inner ball (2412) in the direction in which the first outer ball (2421) faces the second outer ball (2422).

[0380] The force-torque sensor may include an elastic member. The elastic member may provide a restoring force to the moving part (2200). The elastic member may have elasticity. The elastic member may be formed of metal.

[0381] The force-torque sensor may include an upper elastic member (2510). The upper elastic member (2510) may be coupled to an external carrier (2220). The upper elastic member (2510) may be coupled to an internal carrier (2210). The upper elastic member (2510) may be coupled to a lead (2230). The upper elastic member (2510) may connect the external carrier (2220) and the internal carrier (2210).

[0382] The upper elastic member (2510) may include an outer portion. The outer portion may be coupled to an external carrier (2220). The outer portion may be positioned on the external carrier (2220). The outer portion may be fixed to the external carrier (2220).

[0383] The upper elastic member (2510) may include an inner portion. The inner portion may be coupled to an inner carrier (2210). The inner portion may be placed on the inner carrier (2210). The inner portion may be fixed to the inner carrier (2210). The inner portion may be coupled to a lead (2230). The inner portion may be placed on the lead (2230). The inner portion may be fixed to the lead (2230). The inner portion may be placed between the inner carrier (2210) and the lead (2230).

[0384] The upper elastic member (2510) may include a connecting portion. The connecting portion may connect the outer portion and the inner portion. The connecting portion may elastically connect the outer portion and the inner portion. The connecting portion may include a bent shape. The connecting portion may include a shape that is bent multiple times. The connecting portion may include a bent portion. The connecting portion may have elasticity. The connecting portion may be formed of metal.

[0385] The force-torque sensor may include a lower elastic member (2520). The lower elastic member (2520) may be coupled to a lower cover (2130). The lower elastic member (2520) may be coupled to a base (2110). The lower elastic member (2520) may be coupled to an external carrier (2220). The lower elastic member (2520) may connect the lower cover (2130) and the external carrier (2220). The lower elastic member (2520) may connect the base (2110) and the external carrier (2220).

[0386] The lower elastic member (2520) may include an outer portion. The outer portion may be coupled to the lower cover (2130). The outer portion may be placed on the lower cover (2130). The outer portion may be fixed to the lower cover (2130). The outer portion may be coupled to the base (2110). The outer portion may be placed on the base (2110). The outer portion may be fixed to the base (2110). The outer portion may be placed between the lower cover (2130) and the base (2110).

[0387] The lower elastic member (2520) may include an inner portion. The inner portion may be coupled to the outer carrier (2220). The inner portion may be positioned on the outer carrier (2220). The inner portion may be fixed to the outer carrier (2220). The inner portion may support the outer carrier (2220). The inner portion may support the outer carrier (2220) from below.

[0388] The lower elastic member (2520) may include a connecting portion. The connecting portion may connect the outer portion and the inner portion. The connecting portion may elastically connect the outer portion and the inner portion. The connecting portion may include a bent shape. The connecting portion may include a shape that is bent multiple times. The connecting portion may include a bent portion. The connecting portion may have elasticity. The connecting portion may be formed of metal.

[0389] The force-torque sensor may include a coupling member. The coupling member may connect two or more different members together. For example, the coupling member may be a screw. The coupling member may be a bolt.

[0390] The force-torque sensor may include an internal coupling member (2610). The internal coupling member (2610) may be coupled to the lead (2230) and the internal carrier (2210). The internal coupling member (2610) may secure the lead (2230) to the internal carrier (2210).

[0391] The force-torque sensor may include an external coupling member (2620). The external coupling member (2620) may be coupled to an upper elastic member (2510) and an external carrier (2220). The external coupling member (2620) may secure the upper elastic member (2510) to the external carrier (2220).

[0392] The force-torque sensor may include a substrate (2700). The sensing portion may include a substrate (2700). The substrate (2700) may be placed on a fixed portion (2100). The substrate (2700) may be placed on a lower cover (2130). The substrate (2700) may be placed on a base (2110).

[0393] The substrate (2700) may include a mounting portion (2710). A sensor (2320) may be placed in the mounting portion (2710). The mounting portion (2710) may be an RPCB. The substrate (2700) may include a terminal portion (2720). The terminal portion (2720) may include a plurality of terminals. The terminal portion (2720) may be placed outside the lower cover (2130). The plurality of terminals of the terminal portion (2720) may be connected to external terminals such as a robot. The substrate (2700) may include a connection portion (2730). The connection portion (2730) may connect the mounting portion (2710) and the terminal portion (2720). The terminal portion (2720) and the connection portion (2730) may be FPCBs.

[0394]

[0395] Hereinafter, the operation of a force-torque sensor according to the third embodiment of the present invention will be explained with reference to the drawings.

[0396] FIG. 68 is a diagram illustrating the case where an external force having a yaw or pitch direction component is applied to a force-torque sensor according to the third embodiment of the present invention.

[0397] When an external force having a component in at least one of the y-axis direction and the yaw direction is applied to the lead (2230) of the force-torque sensor according to the third embodiment of the present invention, the lead (2230) may rotate or tilt around the x-axis. At this time, the internal carrier (2210) may move integrally with the lead (2230) (see A and B of FIG. 68). Meanwhile, since the fixed part (2100) is maintained in a fixed state, the distance between the internal sensor (2321) of the substrate (2700) placed on the fixed part (2100) and the internal magnet (2311) placed on the internal carrier (2210) may change. At this time, since the four internal magnets (2311) move at different distances relative to the four internal sensors (2321), the force of the y-axis direction component and the force of the yaw direction component of the external force applied to the lead (2230) can be measured.

[0398] When an external force having a component in at least one of the x-axis direction and the pitch direction is applied to the lead (2230) of the force-torque sensor according to the third embodiment of the present invention, the lead (2230) may rotate or tilt around the y-axis (see Pitch in FIG. 68). At this time, the internal carrier (2210) may move integrally with the lead (2230) (see A and B in FIG. 68). Meanwhile, since the fixed part (2100) is maintained in a fixed state, the distance between the internal sensor (2321) of the substrate (2700) placed on the fixed part (2100) and the internal magnet (2311) placed on the internal carrier (2210) may change. At this time, since the four internal magnets (2311) move at different distances relative to the four internal sensors (2321), the force of the x-axis direction component and the force of the pitch direction component of the external force applied to the lead (2230) can be measured.

[0399] FIG. 69 is a diagram illustrating the change when an external force having a roll direction component is applied to a force-torque sensor according to the third embodiment of the present invention.

[0400] When an external force having a roll direction component is applied to the lead (2230) of the force-torque sensor according to the third embodiment of the present invention, the lead (2230) may rotate or tilt around the z-axis (see Roll in FIG. 69). At this time, the internal carrier (2210) may move integrally with the lead (2230) (see FIG. 69 a and b). Meanwhile, since the fixed part (2100) is maintained in a fixed state, the distance between the internal sensor (2321) of the substrate (2700) placed on the fixed part (2100) and the internal magnet (2311) placed on the internal carrier (2210) may change. At this time, since the four internal magnets (2311) move at different distances relative to the four internal sensors (2321), the force of the roll direction component of the external force applied to the lead (2230) can be measured. For example, three of the four internal magnets (2311) move the same distance and one internal magnet with the center positioned does not move, so the force of the roll direction component of the external force applied to the lead (2230) can be measured.

[0401] FIG. 70 is a diagram illustrating the case where an external force having a component in the z-axis direction is applied to a force-torque sensor according to the third embodiment of the present invention.

[0402] When an external force having a z-axis component is applied to the lead (2230) of the force-torque sensor according to the third embodiment of the present invention, the lead (2230) can move along the z-axis (see B in FIG. 70). At this time, the external carrier (2220) and the internal carrier (2210) can move integrally with the lead (2230) (see A and B in FIG. 70). Meanwhile, the distance between the external sensor (2322) of the substrate (2700) and the external magnet (2312) placed on the external carrier (2220) can be changed. Through this, the force of the z-axis component of the external force applied to the lead (2230) can be measured. However, at this time, the distance between the internal magnet (2311) and the internal sensor (2321) is also changed, and through this, the force of the z-axis component of the external force applied to the lead (2230) can also be measured.

[0403]

[0404] The configuration of a robot according to the third embodiment of the present invention will be described below.

[0405] The robot may include a body. The robot may include an arm member connected to the body. The arm member of the robot may include a gripping portion. The gripping portion may include, for example, a finger shape. The force-torque sensor of the third embodiment of the present invention may be disposed in the gripping portion of the arm member. The arm member of the robot may include a joint. The force-torque sensor of the third embodiment of the present invention may be disposed in the joint of the arm member.

[0406]

[0407] Although embodiments of the present invention have been described above with reference to the attached drawings, those skilled in the art will understand that the present invention may be implemented in other specific forms without changing its technical concept or essential features. Therefore, the embodiments described above should be understood as illustrative in all respects and not restrictive.

Claims

1. A case shaped like the tip of a finger; and It includes a force-torque sensor disposed within the above case and detecting an external force applied to the above case, and The force-torque sensor described above is a robot finger comprising a first force-torque sensor in which a lead to which an external force is applied faces a first direction, and a second force-torque sensor in which a lead to which an external force is applied faces a second direction different from the first direction.

2. In Paragraph 1, The lead of the first force-torque sensor is directed toward the bottom portion of the fingertip joint shape, and The lead of the second force-torque sensor is a robot finger facing the end portion of the fingertip joint shape.

3. In Paragraph 1, The first direction is the z-axis direction of the first force-torque sensor, and A robot finger that, when an external force is applied to the lead of the first force-torque sensor, tilts the lead of the first force-torque sensor in the yaw, pitch, and roll directions of the first force-torque sensor or moves in the z-axis direction of the first force-torque sensor.

4. In Paragraph 3, The above second direction is the z-axis direction of the above second force-torque sensor, and A robot finger that, when an external force is applied to the lead of the second force-torque sensor, tilts the lead of the second force-torque sensor in the yaw, pitch, and roll directions of the second force-torque sensor or moves in the z-axis direction of the second force-torque sensor.

5. In Paragraph 4, The first direction above is a robot finger perpendicular to the second direction above.

6. In Paragraph 1, Each of the lead of the first force-torque sensor and the lead of the second force-torque sensor is a robot finger having a disc shape.

7. In Paragraph 6, The outer surface of the disc-shaped circle of the lead of the first force-torque sensor faces the first direction, and A robot finger in which the outer surface of the disc-shaped circle of the lead of the second force-torque sensor faces the second direction.

8. In Paragraph 1, A robot finger in which the first force-torque sensor and the second force-torque sensor are electrically separated to individually detect external forces.

9. In Paragraph 1, The first force-torque sensor is a robot finger spaced apart from the second force-torque sensor.

10. In Paragraph 1, The first force-torque sensor comprises a fixed part, a first moving part movably disposed within the fixed part and including the lead, and a ball plunger comprising a ball and an elastic member that presses the ball, wherein the ball plunger is a robot finger that guides the first moving part to tilt relative to the fixed part.

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