Apparatus for recovering unreacted NAF generated during PF3 manufacturing process

The apparatus addresses the challenge of recovering unreacted NaF in PF3 manufacturing by utilizing a multi-unit process to separate and purify NaF, achieving high purity and yield, thus optimizing the PF3 production process and reducing costs.

WO2026135388A1 Publication Date: 2026-06-25POHANG IRON & STEEL CO LTD +1
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Patent Information

Application Number
PCT/KR2025/022442
Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-12-20
Filing Date
2025-12-22
Publication Date
2026-06-25

AI Technical Summary

Technical Problem

Current methods for manufacturing phosphorus trifluoride (PF3) face challenges in achieving high purity and large-scale synthesis due to the difficulty in recovering and regenerating unreacted sodium fluoride (NaF), leading to increased production costs and inefficient processes.

Method used

An apparatus is developed to recover unreacted NaF by including a PF3 manufacturing unit, a NaF separation unit, and a NaF recovery unit, which involves heating, filtering, and drying processes to separate and purify NaF, along with a byproduct recovery unit to condense and store byproducts like PCl3 and AN.

Benefits of technology

The apparatus efficiently recovers NaF with a high recovery rate of 97% purity and 96% yield, enhancing the efficiency and reducing the costs of the PF3 manufacturing process.

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Abstract

Disclosed is an apparatus for recovering unreacted NAF generated during a PF3 manufacturing process. The apparatus for recovering unreacted NAF generated during a PF3 manufacturing process, according to an embodiment, may comprise: a PF3 production unit that produces PF3 by reacting a substance containing P with NaF; an NaF separation unit that separates residual NaF, remaining after the production of PF3, into insoluble NaF and mixed gas; and an NaF recovery unit that recovers NaF by filtering and then drying the insoluble NaF.
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