Actuator and actuator device

Abstract

An actuator 1 comprises a three-dimensional mobile element 10, a fixed element 11 that surrounds the mobile element 10, at least three coils 12 that are wound around the mobile element 10 so as not to be parallel, at least three permanent magnets 13 that are installed at an inner wall surface of the fixed element 11 such that each is opposite a corresponding coil 12, and a support component 14 that supports the mobile element 10 on the fixed element 11 such that the mobile element 10 can vibrate inside the fixed element 11. Magnetic interactions occur between magnetic fields produced by current flowing through the coils 12 and magnetic fields produced by the permanent magnets 13 opposite the coils 12.

Description

Actuator and Actuator Device Cross-reference to Related Applications

[0001] This application is based on Japanese Patent Application No. 2024-230571 filed on December 26, 2024, Japanese Patent Application No. 2025-120242 filed on July 17, 2025, and Japanese Patent Application No. 2025-120243 filed on July 17, 2025, and claims the benefit of their priorities. All the contents of those patent applications are incorporated herein by reference.

[0002] This disclosure relates to an actuator and an actuator device.

[0003] A technology called haptics, which creates a sense of force that can be perceived by the skin and muscles by applying vibrations, forces, movements, etc. to the user, has been attracting attention. Haptics is expected to be applied in various fields such as improving the sense of presence and immersion in VR and the metaverse entertainment, assisting in operation and driving in construction machinery and mobility, sports equipment capable of guiding movement, and assisting in telemedicine.

[0004] As one of the driving means for realizing haptics, a three-degree-of-freedom vibration actuator has been proposed (for example, Non-Patent Document 1).

[0005] “Development of Compact 3-Degree-of-Freedom Oscillatory Actuator” Akira Heya, Ryosuke Nakamura and Katsuhiro Hirata, Journal of Robotics and Mechatronics Vol.35 No.5, 2023https: / / doi.org / 10.20965 / jrm.2023.p1312

[0006] The actuator described in Non-Patent Document 1 has a structure with six coils. As a result, while three-degree-of-freedom driving can be realized using a single motor, there are problems such as a large number of parts and a small thrust density.

[0007] This disclosure is made in view of these circumstances and aims to provide a three-degree-of-freedom vibration actuator with a high thrust density.

[0008] To solve the above problems, an actuator in one aspect of the present disclosure comprises a three-dimensional movable element, a stator surrounding the movable element, at least three non-parallel coils wound around the movable element, at least three permanent magnets attached to the inner wall surface of the stator, each facing each of the corresponding coils, and a support component that supports the movable element on the stator so that the movable element can vibrate inside the stator. A magnetic interaction occurs between the magnetic field generated by the current flowing through the coils and the magnetic field generated by the permanent magnets facing the coils.

[0009] Another aspect of the present disclosure is an actuator device. This device comprises an actuator having a three-dimensional movable element, a stator surrounding the movable element, at least three non-parallel coils wound around the movable element, at least three permanent magnets mounted on the inner wall surface of the stator, each facing each of the corresponding coils, and a support component that supports the movable element on the stator so that the movable element can vibrate inside the stator; a power supply for supplying current to the coils; and a control device for controlling the power supply to control the current. A magnetic interaction occurs between the magnetic field generated by the current flowing through the coils and the magnetic field generated by the permanent magnets facing the coils.

[0010] Another embodiment of the present disclosure of an actuator comprises a three-dimensional movable element, a stator surrounding the movable element, permanent magnets attached to the movable element, coils attached to the inner wall surface of the stator, each facing a corresponding permanent magnet, and support components that support the movable element on the stator so that the movable element vibrates inside the stator without contacting the stator. A magnetic interaction occurs between the magnetic field generated by the current flowing through the coils and the magnetic field generated by the permanent magnets facing the coils. The support components are attached to the movable element outside each coil and to the stator outside each permanent magnet.

[0011] Another embodiment of the present invention provides an actuator comprising: a three-dimensional movable element; a stator surrounding the movable element; permanent magnets attached to the movable element; coils attached to the inner wall surface of the stator, each facing a corresponding permanent magnet; and support components that support the movable element on the stator so that the movable element can vibrate inside the stator without contacting the stator; a power supply for supplying current to the coils; and a control device for controlling the power supply to control the current. A magnetic interaction occurs between the magnetic field generated by the current flowing through the coils and the magnetic field generated by the permanent magnets facing the coils. The support components are attached to the movable element outside each coil and to the stator outside each permanent magnet.

[0012] According to this disclosure, a three-degree-of-freedom vibration actuator with high thrust density can be provided.

[0013] This is a schematic diagram of an actuator according to the first embodiment. This is a schematic diagram of an actuator according to the first embodiment. This is a schematic diagram of a movable element. This is a schematic diagram of a movable element. This is a schematic diagram of a movable element according to a modified example. This is a schematic diagram of a movable element according to a modified example. This is a schematic diagram of a stator and a support component fixing jig. This is a schematic diagram of the created actuator. This is a schematic diagram of the created movable element. This is a schematic diagram of the created stator. This is a diagram illustrating the operating principle of an actuator according to an embodiment. This is a diagram illustrating the operating principle of an actuator according to an embodiment. This is a schematic diagram of an actuator device according to a second embodiment. This is a diagram showing the performance of an embodiment and a comparative example. This is a schematic diagram of an actuator according to a modified example of the first embodiment. This is a schematic diagram of an actuator according to a modified example of the first embodiment. This is a schematic diagram of a movable element. This is a schematic diagram of a stator. This is a view of a stator with a permanent magnet attached from the positive z-axis direction. This is a view of a stator of an actuator according to another modified example of the first embodiment from the positive z-axis direction. This is a schematic diagram of an actuator according to yet another modified example of the first embodiment. This is a schematic diagram of a stator. This is a schematic diagram of a movable element. This is a schematic diagram of an actuator according to a further modification. This is a cross-sectional view of the actuator in Figure 24. This is a schematic diagram of an actuator according to a further modification. This is a cross-sectional view of the actuator in Figure 26. This is a schematic diagram of an actuator according to the first embodiment. This is a schematic diagram of the stator. This is a schematic diagram of the stator. This is a schematic diagram of the movable element. This is a diagram illustrating the operating principle of the actuator according to the embodiment. This is a diagram illustrating the operating principle of the actuator according to the embodiment. This is a schematic diagram of an actuator according to a modification. This is a schematic diagram of the stator according to a modification. This is a schematic diagram of the movable element according to a modification. This is a schematic diagram of an actuator according to another modification. This is a schematic diagram of the stator according to another modification. This is a schematic diagram of the movable element according to another modification. This is a schematic diagram of an actuator according to a further modification. This is a schematic diagram of the stator according to a further modification. This is a schematic diagram of the movable element according to a further modification. This is a schematic diagram of an actuator according to a further modification. This is a cross-sectional view of the actuator in Figure 44. This is a schematic diagram of an actuator according to a further modification.Figure 46 is a cross-sectional view of the actuator. It is a schematic diagram of the actuator device according to the second embodiment.

[0014] [First Embodiment] An actuator according to the first embodiment of the present disclosure will be described using Figures 1 to 9. Figures 1 and 2 are schematic diagrams of the actuator 1 according to the first embodiment. Figure 1 is a diagram in which the stator 11 is made transparent so that the internal structure can be seen. Figure 2 is an external view in which the stator 11 is not made transparent. In order to clarify the three-dimensional direction, the x axis, y axis and z axis are set as shown in the figure (the same applies hereinafter). The actuator 1 comprises a movable element 10, a stator 11, a coil 12, a permanent magnet 13, a support component 14, and a support component fixing jig 15.

[0015] Figures 3 and 4 are schematic diagrams of the movable element 10. Figure 3 shows the movable element 10 without the coil wound around it, and Figure 4 shows the movable element 10 with the coil 12 wound around it.

[0016] As shown in Figure 3, the movable element 10 has a three-dimensional shape. In the example in Figure 3, the movable element 10 has a shape based on a cube. Specifically, the movable element 10 has a structure in which a groove 10G for winding a coil, a recess 10R for holding the support part 14, a projection 10P for providing the recess 10R, etc., is provided on a cubic member. In this specification, a cube with grooves, recesses, projections, etc., as needed is called a "cubic shape". Similarly, any three-dimensional object with grooves, recesses, projections, etc., is called a "three-dimensional shape". The movable element 10 is not limited to a cubic shape, but may be any three-dimensional shape including any hexahedron shape such as a rectangular prism or parallelepiped, any polyhedron shape other than a hexahedron, a cylindrical shape, a spheroid shape, a sphere shape, etc.

[0017] The movable element 10 may be made of any suitable material having a predetermined strength and moldability, such as metal, polymer, or ceramics.

[0018] As shown in Figure 4, three coils, namely the first coil 12x, the second coil 12y, and the third coil 12z (hereinafter referred to as "coil 12" unless otherwise specified), are wound around the movable element 10. The first coil 12x is wound around the movable element 10 around the x-axis, the second coil 12y is wound around the movable element 10 around the y-axis, and the third coil 12z is wound around the movable element 10 around the z-axis. As shown in Figure 3, grooves for winding each coil are carved into the movable element 10, with steps between them. These steps allow the first coil 12x, the second coil 12y, and the third coil 12z to be wound around the movable element 10 without touching each other.

[0019] The coil 12 may be a coil commonly used in motors, and may be a conductive wire such as copper or aluminum.

[0020] In the example shown in Figure 4, the first coil 12x, the second coil 12y, and the third coil 12z are wound around the movable element 10 so as to be perpendicular to each other. By winding the coils perpendicularly in this way, the actuator 1 operates stably and efficiently. However, the first coil 12x, the second coil 12y, and the third coil 12z do not necessarily have to be perpendicular to each other; they do not need to be parallel to each other. In other words, the winding method of the first coil 12x, the second coil 12y, and the third coil 12z can be any as long as the magnetic fields generated by the currents flowing through each coil are not parallel to each other.

[0021] In the example shown in Figure 4, the first coil 12x, the second coil 12y, and the third coil 12z are wound around the movable element 10 so as to pass over the centers of each face of the cube. By winding the coils in this way so as to pass over the centers of each face of the cube, the actuator 1 operates stably and efficiently. However, the first coil 12x, the second coil 12y, and the third coil 12z do not need to be parallel to each other and do not necessarily need to pass over the centers of each face of the cube. As mentioned above, the winding method of the first coil 12x, the second coil 12y, and the third coil 12z can be any as long as the magnetic fields generated by the currents flowing through each coil are not parallel to each other.

[0022] In the example shown in Figure 4, there were three coils 12. However, this is not limited to three; there may be four or more coils. In other words, as long as there are at least three coils, the three-degree-of-freedom drive intended by this disclosure can be achieved.

[0023] In the example shown in Figure 3, outward-facing projections 10P are provided on each side of the movable element 10 parallel to the z-axis. A total of 16 recesses 10R are provided on these projections 10P for holding the support components 14, which will be described later. These projections 10P are provided to hold a sufficient number of support components while keeping the movable element 10 as compact as possible. However, these projections 10P are not necessarily required. For example, the movable element 10 may not have projections 10P, but instead have 24 recesses 10R, four on each side.

[0024] In the embodiments shown in Figures 1 to 4, the support component fixing jig 15 is attached to the stator 11. However, the invention is not limited to this, and the support component fixing jig may be attached to the movable element and integrated with an elastic body. For example, one end of the support component fixing jig, which is formed as a rigid rod, may be attached to the movable element, and the other end may be integrated with an elastic body such as resin, rubber, or silicone gel and elastically supported by the stator.

[0025] Figures 5 and 6 are schematic diagrams of a movable element 100 as a modified example of the movable element 10 shown in Figures 3 and 4, respectively. Figure 5 shows the movable element 100 without a coil wound around it, and Figure 6 shows the movable element 100 with a coil 120 wound around it.

[0026] Similar to Figure 3, the movable element 100 has a three-dimensional shape. In the example of Figure 5, the movable element 100 has a cubic shape. Specifically, the movable element 100 has a structure in which a groove 100G for winding a coil, a recess 100R for holding the support component 14, and a machined edge 100P for providing the recess 100R, etc. That is, the movable element 100 has a machined edge 100P instead of the projection 10P of the movable element 10. The other components of the movable element 100 are the same as those of the movable element 10.

[0027] As shown in Figure 6, three coils, namely the first coil 120x, the second coil 120y, and the third coil 120z (hereinafter referred to as "coil 120" unless otherwise specified), are wound around the movable element 100. The first coil 120x is wound around the movable element 100 around the x-axis, the second coil 120y is wound around the movable element 100 around the y-axis, and the third coil 120z is wound around the movable element 100 around the z-axis. As shown in Figure 5, grooves for winding each coil are carved into the movable element 100, with steps between them. These steps allow the first coil 120x, the second coil 120y, and the third coil 120z to be wound around the movable element 100 without contacting each other.

[0028] Figure 7 is a schematic diagram of the stator 11 and the support component fixing jig 15. The stator 11 surrounds the movable element 10. In other words, the stator 11 holds the movable element 10 inside.

[0029] In the example shown in Figure 7, the stator 11 comprises two upper and lower plates 11a and four side plates 11b. The two upper and lower plates 11a are octagons of the same shape and size. The four side plates 11b are rectangles of the same shape and size. The side plates 11b are connected to the four non-adjacent sides of the upper and lower plates 11a.

[0030] The stator 11 may be made of any suitable material having predetermined strength and moldability, such as metal, polymer, or ceramics.

[0031] Permanent magnets 13a are attached to the inner wall surfaces of the upper and lower plates 11a of the stator 11. Permanent magnets 13b are attached to the inner wall surface of the side plate 11b of the stator 11. Hereafter, unless otherwise specified, permanent magnets 13a and 13b will be referred to as "permanent magnet 13". In other words, permanent magnets 13 are attached to the inner wall surface of the stator 11.

[0032] In the example shown in Figure 7, opposing permanent magnets within the stator 11 are mounted so that their like magnetic poles face each other. Specifically, permanent magnets 13a are mounted on the upper and lower plates 11a so that their north poles face each other, and similarly, permanent magnets 13b are mounted on the opposing side plates 11b so that their north poles face each other.

[0033] The permanent magnet 13 may be any suitable permanent magnet, such as ferrite, neodymium, or samarium-cobalt.

[0034] Each of the permanent magnets 13 faces each of the corresponding coils 12. A magnetic interaction occurs between the magnetic field generated by the current flowing through the coils 12 and the magnetic field generated by the permanent magnets 13 facing the coils 12. This interaction generates an attractive or repulsive force between the two magnetic fields, and consequently between the movable element 10 and the stator 11. The generation of this force will be explained in detail later.

[0035] In the example shown in Figure 7, permanent magnets 13 are attached to both opposing inner wall surfaces of the stator 11. In other words, the permanent magnets 13 form a pair of permanent magnets 13 facing the coil 12 from both sides. However, this is not the only option; permanent magnets 13 may be attached to only one of the opposing inner wall surfaces of the stator 11.

[0036] The shape of the stator 11 shown in Figure 7 is merely an example and is not limited to it. In other words, the stator 11 can have any suitable shape depending on the application and purpose, as long as it has permanent magnets 13 attached to its inner wall surface and can surround and house the movable element 10.

[0037] The support components 14 support the movable element 10 on the stator 11 so that the movable element 10 can vibrate inside the stator 11. In the examples in Figures 1 and 2, the support components 14 consist of 16 metal coil springs. Four of these are attached to the upper and lower plates 11a, and four are attached to the lower upper and lower plates 11a to support the movable element 10 vertically. In addition, two of the 16 support components 14 are attached to four support component fixing jigs 15, respectively, to support the movable element 10 horizontally.

[0038] The number of support components 14 and the positions where the support components 14 are attached are not limited to those described above. In other words, as long as the movable element 10 can be supported by the stator 11 so that the movable element 10 can vibrate inside the stator 11, the number of support components 14 and the positions where the support components 14 are attached can be any suitable configuration.

[0039] The support component 14 is not limited to metal, but may be made of non-metallic material. Furthermore, the support component 14 is not limited to a coil spring, but may be any suitable spring such as a disc spring or leaf spring. In addition, the support component 14 may be any suitable spring device, such as an elastic material like rubber or silicone gel, an air spring or a fluid spring, as long as it can support the movable element 10 on the stator 11 so that the movable element 10 can vibrate inside the stator 11.

[0040] In the illustrated example, the support component 14 is attached to the movable element 10 on the outside of each coil 12 and to the stator 11 on the outside of each permanent magnet 13. By attaching the support component 14 in this manner, the surface area of ​​the permanent magnet 13 can be increased, thereby increasing the thrust density of the actuator. However, the design is not limited to this, and the support component 14 may also be attached to the movable element 10 on the inside of the coil 12, for example, by passing it through the multiple wires that make up the coil 12. Alternatively, the support component 14 may be attached to the stator 11 on the inside of the permanent magnet 13, for example, by passing it through a hole drilled in the permanent magnet 13.

[0041] As described above, by passing an electric current through the coil 12, an attractive or repulsive force is generated between the movable element 10 and the stator 11. At this time, by supporting the movable element 10 on the stator 11 using the support component 14 so that the movable element 10 can vibrate inside the stator 11, the movable element 10 vibrates inside the stator 11. As a result, the actuator 1 can drive three-degree-of-freedom vibration motion.

[0042] The support component fixing jig 15 positions and fixes the support component 14. As shown in FIG. 7, a recess 15R for holding the support component 14 is provided on the inner wall surface of the support component fixing jig 15. Further, the support component fixing jig 15 is provided with a hole 15H for passing a conducting wire connected to the coil 12.

[0043] The support component fixing jig 15 may be made of any suitable material having a predetermined strength and formability, such as metal, polymer, ceramics, etc.

[0044] The shape of the support component fixing jig 15, the position and number of the recesses 15R, the presence or absence of the holes 15H, etc. are not limited to those shown, and may be any suitable ones. Further, in the examples shown in FIGS. 1 to 9, the stator 11 and the support component fixing jig 15 are constituted by separate components. However, this is not limiting, and the stator 11 and the support component fixing jig 15 may be integrated.

[0045] FIG. 8 is a schematic diagram of the actual actuator 1 created by the inventors. The mover 10 of this actuator 1 is a square shape with a side length of 14 mm and a mass of 20 g. The stator 11 is a square shape with a side length of 20 mm and a mass of 18 g. In FIG. 8, a conducting wire is shown for passing an electric current through the coil 12.

[0046] FIG. 9 is a schematic diagram of the actual mover 10 created by the inventors. FIG. 9(A) shows the state where a coil is wound around the mover 10, and FIG. 9(B) shows the state where no coil is wound around the mover 10.

[0047] FIG. 10 is a schematic diagram of the actual stator 11 created by the inventors. FIG. 10(A) is the external appearance of the entire stator 11, FIG. 10(B) is a view of the upper and lower plates 11a from the inner wall surface side, and FIG. 10(C) is a view of the side plates 11b from the inner wall surface side. In FIGS. 10(B) and FIG. 10(C), the permanent magnets 13a and 13b attached to the inner wall surface are shown, respectively.

[0048] Next, the operating principle of the actuator according to this embodiment will be described using FIGS. 11 and 12.

[0049] Figure 11 shows a configuration in which a permanent magnet (with the south pole on the left and the north pole on the right) and a coil are positioned opposite each other via a spring. In this configuration, a magnetic interaction occurs between the magnetic field generated by the current flowing through the coil and the magnetic field generated by the permanent magnet. The permanent magnet corresponds to the stator 11 of the actuator 1, the coil corresponds to the movable element 10 of the actuator 1, and the spring corresponds to the support component 14 of the actuator 1. When a current is passed through the coil in the direction shown in the figure, a magnetic field is generated at the center of the coil, moving from left to right. This corresponds to the placement of a permanent magnet (with the south pole on the left and the north pole on the right) at the center of the coil. As a result, an attractive force is generated between the magnetic field generated by the permanent magnet and the magnetic field generated by the current flowing through the coil. Consequently, the coil is attracted to the permanent magnet and moves from right to left.

[0050] By controlling the current flowing through the coil, it is possible to generate and control any lateral motion, including vibration, in the coil.

[0051] Figure 12(A) is a perspective view of the actuator 1 according to this embodiment. Figure 12(B) is a cross-sectional view of the actuator 1 in the x-y plane, viewed from the positive z-axis direction. Figure 12(C) is a cross-sectional view of the actuator 1 in the z-x plane, viewed from the negative y-axis direction. In Figure 12(B), when a current in the direction shown is passed through the coil around the x-axis, the movable element is attracted to the right permanent magnet and moves from left to right (in the positive x-axis direction) according to the principle described in Figure 11. In Figure 12(C), when a current in the direction shown is passed through the coil around the z-axis, the movable element is attracted to the upper permanent magnet and moves from bottom to top (in the positive z-axis direction) according to the principle described in Figure 11. In this way, by controlling the current flowing through each of the three coils, it is possible to generate and control any three-degree-of-freedom motion, including vibration, in the movable element.

[0052] Next, the usage scenarios of the actuator 1 of this embodiment will be described. The user uses the actuator 1 by pinching, gripping, or holding the stator 11 of the actuator 1 with both hands. By appropriately controlling the current flowing through each coil 12 of the actuator 1, the movable element 10 can be vibrated in three degrees of freedom, and this vibration can be controlled. This vibration is transmitted to the user via the stator 11. As a result, the user perceives the sensation of being pulled or pushed in various directions (up, down, left, and right) by the actuator 1.

[0053] As described above, this embodiment provides a compact, three-degree-of-freedom vibration actuator with high thrust density.

[0054] [Second Embodiment] Figure 13 is a schematic diagram of an actuator device 2 according to a second embodiment of the present disclosure. This device comprises an actuator 1 according to the first embodiment, a power supply 20 for supplying current to the coil of the actuator 1, and a control device 30 for controlling the power supply 20 in order to control the current flowing through the coil.

[0055] The power supply 20 provides power to supply current to the coil of the actuator 1. The movable element 10 of the actuator 1 vibrates in a predetermined direction due to the magnetic field generated by the current supplied from the power supply 20. The power supply 20 may be any suitable power supply, such as an AC power supply, a DC power supply, a stabilized power supply, a battery, or a generator.

[0056] The control device 30 controls the power supply 20 to control the current flowing through the coil of the actuator 1. The current control may be any control, including the supply and cessation of current, and the control of the magnitude, direction, frequency, phase, waveform, or duration of the current. The control of the power supply 20 by the control device 30 may be performed manually by the user or other operator, or automatically by AI or a program.

[0057] According to this embodiment, a compact, three-degree-of-freedom vibration actuator with high thrust density that can operate independently can be provided as a system.

[0058] [Performance Verification] The present inventors conducted performance verification to confirm the effects of this disclosure. The verification was performed using three-dimensional finite element analysis under actual machine conditions. For the actuator of the embodiment (shown in Figure 8) and the actuator described in Non-Patent Literature 1 as a comparative example, the thrust constant, maximum thrust per unit volume, and maximum thrust per unit mass were calculated. The results are shown in Figure 14.

[0059] As shown in Figure 14, the actuator of the embodiment exhibits superior performance in terms of thrust constant, maximum thrust per unit volume, and maximum thrust per unit mass. This is thought to be due to the ability to increase the size of the magnet, which is effective in generating thrust.

[0060] [Modification 1] Figures 15 and 16 are schematic diagrams of an actuator 1' according to a modification of the first embodiment. The actuator 1' comprises a movable element 10', a stator 11', a coil 12', a permanent magnet 13', and a support component 14'. In Figure 15, the stator 11' is made transparent so that the internal structure can be seen. Figure 16 is an external view in which the stator 11' is not transparent.

[0061] Actuator 1' is similar to actuator 1 shown in Figures 1 and 2. However, actuator 1' and actuator 1 differ in the arrangement of the support components and the way the movable element is supported by the support components. Also, the permanent magnet 13 of actuator 1 is square, while the permanent magnet 13' of actuator 1' is circular.

[0062] Figure 17 is a schematic diagram of the movable element 10'. The movable element 10' has a cubic shape. Unlike the movable element 10 in Figure 4, the movable element 10' does not have a projection 10P. Instead, each vertex of the movable element 10' is provided with a recess 10R' parallel to the x, y, and z axes, respectively. These recesses 10R' are for receiving the support components 14'. Since the movable element 10' has eight vertices, the movable element 10' has a total of 24 recesses 56'. As shown in Figure 15, there is a one-to-one correspondence between the recesses 10R' and the support components 14'. Therefore, there are also a total of 24 support components 14'.

[0063] Figure 18 is a schematic diagram of the stator 11'. The stator 11' is cubic in shape, similar to the stator 11 in Figure 7. However, unlike the stator 11, the stator 11' does not have a support component fixing jig (although the edges parallel to the z-axis are cut off to facilitate access to the interior). This is because, as will be described later, the way in which the movable element 10' is supported by the support component 14' of the actuator 1' is different from that of the actuator 1.

[0064] As shown in Figure 15, the movable element 10' is supported by support components 14' at each vertex of the stator 11' and the movable element 10' so that it can vibrate inside the stator 11' without contacting the stator 11'. Specifically, three support components 14' are placed at each vertex. Each support component 14' at each vertex connects the surface of the stator 11' to the opposing surface of the movable element 10' parallel to the x, y, and z axes.

[0065] Actuator 1' also produces the same effect as actuator 1.

[0066] Figure 19 shows the stator 11' to which the permanent magnet 53' is attached, viewed from the positive z-axis direction. Because the permanent magnet 53' is circular, space is secured for the support component 14' to pass through. However, the permanent magnet of the actuator is not limited to a circular shape.

[0067] [Modification 2] Figure 20 is a view of the stator 11' of actuator 1'' according to another modification of the first embodiment, as seen from the positive z-axis direction. A permanent magnet 13'' is attached to the stator 11''. The permanent magnet 13'' has a shape in which each vertex of a square is cut off. In other words, the outer edge of the permanent magnet 13'' is provided with a notch for passing a support component 14'' through. The other configurations and operations of actuator 1'' are common to those of actuator 1''.

[0068] The permanent magnet 13'' of actuator 1'' can have a larger volume than the permanent magnet 153'' of actuator 1''. Therefore, according to this modification, a three-degree-of-freedom vibration actuator with an even greater thrust density can be provided.

[0069] [Modification 3] Figure 21 is a schematic diagram of an actuator 1''' according to yet another modification of the first embodiment. The actuator 1''' comprises a stator 11''', a movable element 10''', a coil 12''', a permanent magnet 13''', and a support component 14'''. Similar to Figures 1 and 13, in Figure 21 the stator 11''' is made transparent so that the internal structure can be seen.

[0070] Figure 22 is a schematic diagram of the stator 11''.

[0071] Figure 23 is a schematic diagram of the movable element 10''.

[0072] Unlike actuator 1 in Figure 1, actuator 1''' has a cylindrical stator 11'''. Consequently, the permanent magnet 13''' on the side is formed in a curved shape to surround the movable element 10'''.

[0073] As shown in Figure 21, the support components 14''' are provided in a total of 16 locations: four on the top and bottom surfaces, and four on the upper and lower sections of the sides. As a result, the movable element 10''' is supported by the stator 11''' in both the horizontal and vertical directions by the support components 14'''.

[0074] Actuator 1'' achieves the same effects as the aforementioned actuator 1, actuator 1', and actuator 1'', and also has the advantage of being more compact due to its cylindrical shape.

[0075] Figure 24 is a schematic diagram of an actuator 1'''' according to yet another modification of the first embodiment. The actuator 1'''' comprises a stator 11'''', a movable element 10'''', a coil 12'''', a permanent magnet 13'''', and a support component 14''''. Similar to Figures 1, 13, and 21, the stator 11'''' is made transparent in Figure 24 so that its internal structure can be seen.

[0076] Figure 25 is a cross-sectional view taken along line A-A of actuator 1'''' in Figure 24.

[0077] In the embodiments shown in Figures 1 to 4, the support component 14 was a metal coil spring. In contrast, the support component 14'''' is made of an elastic material such as resin, rubber, or silicone gel. In this case as well, the same effect as that of the support component 14 can be obtained.

[0078] These variations allow for even greater flexibility in composition.

[0079] Figure 26 is a schematic diagram of an actuator 1''''' according to yet another modification of the first embodiment. The actuator 1''''' comprises a stator 11''''', a movable element 10''''', a coil 12''''', a permanent magnet 13''''', and a support component 14'''''. Similar to Figures 1, 13, 21, and 24, the stator 11''''' is made transparent in Figure 26 so that its internal structure can be seen.

[0080] Figure 27 is a cross-sectional view of actuator 1'''' in Figure 26, taken along line B-B.

[0081] Actuator 1'''''', like the actuator 1'''' shown in Figures 21-23, has a cylindrical stator 11'''''' and a cylindrical movable element 10''''''. Accordingly, the coil 12'''''' and permanent magnet 13'''''' on the side are formed in a curved shape to surround the movable element 10''''''. Furthermore, similar to the actuator 1'''''' shown in Figures 24 and 25, the support component 14'''''' is made of an elastic material such as resin, rubber, or silicone gel. In this case as well, the same effect as the support component 14'''' of actuator 1'''' is obtained.

[0082] These variations allow for even greater flexibility in composition.

[0083] [Third Embodiment] An actuator according to the third embodiment of the present disclosure will be described with reference to Figures 28 to 31.

[0084] Figure 28 is a schematic diagram of the actuator 5 according to the third embodiment. To clarify the three-dimensional direction, the x, y, and z axes are set as shown in the figure (the same applies hereafter). The actuator 5 comprises a stator 51, a movable element 50, a coil 52, a permanent magnet 53, a support component 54, and a support component fixing jig 55. In Figure 28, the stator 51 is made transparent so that the internal structure can be seen.

[0085] Figures 29 and 23 are schematic diagrams of the stator 51. Figure 29 shows the stator 51 with the support component fixing jig 55 attached. Figure 30 shows the stator 51 without the support component fixing jig 55 attached. In Figure 30, the coil 52 can be seen attached to the inner wall surface of the stator 51 where the support component fixing jig 55 should be attached.

[0086] As shown in Figures 29 and 23, the stator 51 has a three-dimensional shape. In the example in Figures 29 and 3, the stator 51 has a cube-based shape. Specifically, the stator 51 has a structure in which each vertex of the cube and the edges parallel to the z-axis are cut off. In addition, holes such as screw holes and recesses are made in the faces of the movable element 50 perpendicular to the z-axis. In this specification, a cube that is partially cut off, has holes, grooves, recesses, protrusions, etc., as needed, is called a "cubic shape". Similarly, any three-dimensional object that is partially cut off, has holes, grooves, recesses, protrusions, etc., is called a "three-dimensional shape". The stator 51 is not limited to a cubic shape, but may be any three-dimensional shape including any hexahedral shape such as a rectangular prism or parallelepiped, any polyhedral shape other than a hexahedron, a cylindrical shape, a spheroidal shape, a spherical shape, etc.

[0087] The stator 51 may be made of any suitable material having predetermined strength and moldability, such as metal, polymer, or ceramics.

[0088] As shown in Figures 28 and 23, coils 52 are attached to each inner wall surface of the stator 51. In this example, the stator 51 is a cube with six faces, so there are six coils 52. Each coil 52 faces each of the corresponding permanent magnets 53. The permanent magnets 53 will be described in detail later. The coils 52 have an annular shape.

[0089] The current flowing through coil 52 is a circular current that flows along the circumference of the ring. This circular current generates a linear magnetic field concentrated at the center of the circle. As shown in Figure 28, by attaching coil 52 to each inner wall surface of the stator 51, three linear magnetic fields parallel to the x, y, and z axes can be generated inside the stator 51.

[0090] The coil 52 may be a coil commonly used in motors, and may be made of copper or aluminum, for example. Furthermore, the shape of the coil 52 is not limited to a ring, but can be any suitable shape as long as it can generate a linear magnetic field.

[0091] In the examples in Figures 28 and 23, there are six coils 52. However, this number is not limited to six; it can be any number of seven or more. In other words, as long as there are at least six coils, the three-degree-of-freedom drive intended by this disclosure can be achieved.

[0092] In the examples shown in Figures 28-30, each side of the stator 51 parallel to the z-axis is cut off, and a support component fixing jig 55 is attached to this cut-off portion.

[0093] Figure 31 is a schematic diagram of the movable element 50. The stator 51 surrounds the movable element 50. In other words, the stator 51 holds the movable element 50 inside.

[0094] The movable element 50 has a cubic shape. Specifically, the movable element 50 has a structure in which each vertex of the cube is cut off.

[0095] Each vertex of the movable element 50 is cut off, and recesses are provided in the resulting portions 56 for attaching support components 54. Hereinafter, these cut-off portions will also be referred to as support component mounting portions 56 or recesses 56.

[0096] The movable element 50 may be made of any suitable material having a predetermined strength and moldability, such as metal, polymer, or ceramics.

[0097] Permanent magnets 53 are attached to each face of the movable element 50. In this example, the stator 51 is a cube with six faces, so there are six permanent magnets 53. Each permanent magnet 53 faces each of the corresponding coils 52.

[0098] In the example shown in Figure 31, the permanent magnet is formed in a circular shape in relation to the support component mounting portion 56. However, the shape of the permanent magnet 53 is not limited to this, and can be any suitable shape as long as it can face each of the corresponding coils 52.

[0099] In the example shown in Figure 31, the permanent magnets 53 mounted on the surfaces perpendicular to the z-axis (i.e., the top and bottom surfaces) have their north poles facing outwards and their south poles facing inwards. On the other hand, the permanent magnets 53 mounted on the surfaces parallel to the z-axis (i.e., the side surfaces) have their south poles facing outwards and their north poles facing inwards. In other words, opposing permanent magnets 53 are mounted so that their like magnetic poles face each other. Specifically, permanent magnets 13 are mounted on the top and bottom surfaces so that their south poles face each other. Permanent magnets 13 are mounted on the side surfaces so that their north poles face each other. Thus, the permanent magnets 53 can be arranged in any orientation as long as their like magnetic poles face each other on opposing surfaces.

[0100] Each of the permanent magnets 53 faces each of the corresponding coils 52. A magnetic interaction occurs between the magnetic field generated by the current flowing through the coils 52 and the magnetic field generated by the permanent magnets 13 facing the coils 12. This interaction generates an attractive or repulsive force between the two magnetic fields, and consequently between the stator 51 and the movable element 50. The generation of this force will be explained in detail later.

[0101] The permanent magnet 13 may be any suitable permanent magnet, such as ferrite, neodymium, or samarium-cobalt.

[0102] The support component 54 supports the movable element 50 on the stator 51 so that the movable element 50 can vibrate inside the stator 51 without contacting the stator 51. In the examples shown in Figures 28-31, the support component 54 consists of eight metal coil springs. One end of the support component 54 (the side facing the stator 51) is fitted into a recess in the support component fixing jig 55. The other end of the support component 54 (the side facing the movable element 50) is fitted into a recess in the movable element 50. This secures the support component 54 to the stator 51 and the movable element 50 without it coming loose from them. As a result, the movable element 50 is supported on the stator 51 so that it can vibrate inside the stator 51 without contacting the stator 51.

[0103] The number of support components 54 and the positions where the support components 54 are attached are not limited to those described above. In other words, as long as the movable element 50 can be supported by the stator 51 so that the movable element 50 can vibrate inside the stator 51, the number of support components 54 and the positions where the support components 54 are attached can be any suitable configuration.

[0104] The support component 54 is not limited to metal, but may be non-metallic. Furthermore, the support component 54 is not limited to a coil spring, but may be any suitable spring such as a disc spring or leaf spring. In addition, the support component 54 may be any suitable spring device, such as an elastic material like rubber or silicone gel, an air spring or a fluid spring, as long as it can support the movable element 50 on the stator 51 so that the movable element 50 can vibrate inside the stator 51.

[0105] The support component fixing jig 55 positions and fixes the support component 54. As described above, the inner wall surface of the support component fixing jig 55 is provided with a recess for holding the support component 54.

[0106] The shape, position and number of recesses of the support component fixing jig 55 are not limited to those shown in the figures, and may be any suitable configuration. Furthermore, in the examples shown in Figures 28 to 31, the stator 51 and the support component fixing jig 55 are made of separate parts. However, the stator 51 and the support component fixing jig 55 may be an integrated unit.

[0107] The support component fixing jig 55 may be made of any suitable material having predetermined strength and moldability, such as metal, polymer, or ceramics.

[0108] In the embodiments shown in Figures 28 to 31, the support component fixing jig 55 is attached to the stator 51. However, the invention is not limited to this, and the support component fixing jig may be attached to the movable element and integrated with an elastic body. For example, one end of the support component fixing jig, which is formed as a rigid rod, may be attached to the movable element, and the other end may be integrated with an elastic body such as resin, rubber, or silicone gel and elastically supported by the stator.

[0109] Next, the operating principle of the actuator according to this embodiment will be explained using Figures 32 to 34.

[0110] Figure 32 shows a configuration in which a permanent magnet (with the south pole on the left and the north pole on the right) and a coil are positioned opposite each other via a spring. In this configuration, a magnetic interaction occurs between the magnetic field generated by the current flowing through the coil and the magnetic field generated by the permanent magnet. The permanent magnet corresponds to the stator 51 of the actuator 5, the coil corresponds to the movable part 50 of the actuator 5, and the spring corresponds to the support part 54 of the actuator 5. When a current is passed through the coil in the direction shown in the figure, a magnetic field is generated at the center of the coil, moving from left to right. This corresponds to the placement of a permanent magnet (with the south pole on the left and the north pole on the right) at the center of the coil. As a result, an attractive force is generated between the magnetic field generated by the permanent magnet and the magnetic field generated by the current flowing through the coil. Consequently, the coil is attracted to the permanent magnet and moves from right to left.

[0111] In this case, by controlling the current flowing through the coil, it is possible to generate and control any lateral motion, including vibration, in the coil.

[0112] Figure 33 is a cross-sectional view of the actuator 5 in the x-y plane, viewed from the positive z-axis direction. Figure 34 is a cross-sectional view of the actuator 5 in the z-x plane, viewed from the negative y-axis direction. In Figure 33, when a current in the direction shown is passed through the coil 52 around the x-axis, the movable element 50 is attracted to the right permanent magnet 53 and moves from left to right (in the positive x-axis direction) according to the principle described in Figure 32. In Figure 34, when a current in the direction shown is passed through the coil 52 around the z-axis, the movable element 50 is attracted to the upper permanent magnet 53 and moves from bottom to top (in the positive z-axis direction) according to the principle described in Figure 32. In this way, by controlling the current flowing through each of the three coils, it is possible to generate and control any three-degree-of-freedom motion, including vibration, in the movable element.

[0113] In this way, by passing an electric current through the coil 52, an attractive or repulsive force is generated between the movable element 50 and the stator 51. At this time, by supporting the movable element 50 on the stator 51 using the support component 54 so that the movable element 50 can vibrate inside the stator 51, the movable element 50 vibrates inside the stator 51. As a result, the actuator 5 can drive three-degree-of-freedom vibration motion.

[0114] The support components 54 are attached to the movable element 50 on the outside of each coil 52 and to the stator 51 on the outside of each permanent magnet 53. Therefore, there is no need to drill holes in the permanent magnet 53 for the support components 54 to pass through. This allows for a larger volume of the permanent magnet 53. As a result, a three-degree-of-freedom vibration actuator with a larger thrust density can be realized compared to, for example, the technology described in Non-Patent Document 1. Although a hole is drilled in the center of the coil 52 as shown in the figure, this is for passing an iron core through the center of the annular coil 52 and is not necessarily required. Alternatively, it may be smaller than the hole for the support component 54 to pass through. Therefore, the technology of this disclosure contributes not only to a larger volume of the permanent magnet 53 but also to a larger volume of the coil 52.

[0115] Next, the usage scenarios of the actuator 5 in this embodiment will be described. The user uses the actuator 5 by pinching, gripping, or holding the stator 51 of the actuator 5 with their fingers. By appropriately controlling the current flowing through each coil 52 of the actuator 5, the movable element 50 can be vibrated in three degrees of freedom, and this vibration can be controlled. This vibration is transmitted to the user via the stator 51. As a result, the user perceives the sensation of being pulled or pushed in various directions (up, down, left, and right) by the actuator 5.

[0116] As described above, this embodiment provides a three-degree-of-freedom vibration actuator with a high thrust density.

[0117] Figure 35 is a schematic diagram of an actuator 5' according to a modified example of the third embodiment. The actuator 5' comprises a stator 51', a movable element 50', a coil 52', a permanent magnet 53', and a support component 54'. Similar to Figure 28, in Figure 35 the stator 51' is made transparent so that the internal structure can be seen.

[0118] Figure 36 is a schematic diagram of the stator 51'. The stator 51' is cubic in shape, similar to the stator 51 in Figure 29. However, unlike the stator 51, the vertices of the stator 51' are not cut off (although the edges parallel to the z-axis are cut off to facilitate access to the interior). This is because, as will be described later, the way in which the movable element 50' is supported by the support component 54' of the actuator 5' is different from that of the actuator 5.

[0119] Figure 37 is a schematic diagram of the movable element 50'. The movable element 50' has a cubic shape. Unlike the movable element 50 in Figure 31, the movable element 50' does not have its vertices cut off. Instead, each vertex of the movable element 50' is provided with a recess 56' parallel to the x, y, and z axes, respectively. This recess 56' is for receiving the support component 54'. Since the movable element 50' has eight vertices, the movable element 50' has a total of 24 recesses 56'. As also shown in Figure 35, there is a one-to-one correspondence between the recesses 56' and the support component 54'. Therefore, there are also a total of 24 support components 54'.

[0120] As shown in Figure 37, the movable element 50' is supported by support components 54' at each vertex of the stator 51' and the movable element 50' so that it can vibrate inside the stator 51' without contacting the stator 51'. Specifically, three support components 54' are placed at each vertex. Each support component 54' at each vertex connects the surface of the stator 51' to the opposing surface of the movable element 50' parallel to the x, y, and z axes.

[0121] Actuator 5' also produces the same effect as actuator 5.

[0122] Figure 38 is a schematic diagram of an actuator 5'' according to another modification of the third embodiment. The actuator 5'' comprises a stator 51'', a movable element 50'', a coil 52'', a permanent magnet 53'', and a support component 54''. Similar to Figures 28 and 35, in Figure 38 the stator 51'' is made transparent so that the internal structure can be seen.

[0123] Figure 39 is a schematic diagram of the stator 51''.

[0124] Figure 40 is a schematic diagram of the movable element 50''.

[0125] As shown in Figures 38-39, actuator 5'' is very similar to actuator 5'. However, while the permanent magnet 53' of actuator 5' is circular, the permanent magnet 53'' of actuator 5'' is a square with each vertex cut off. In other words, the outer edge of the permanent magnet 53'' has a notch for passing the support component 54'' through. The other configurations and operations of actuator 5'' are the same as those of actuator 5'.

[0126] The permanent magnet 53'' of actuator 5'' can have a larger volume than the permanent magnet 53'' of actuator 5'. Therefore, according to this modification, a three-degree-of-freedom vibration actuator with an even greater thrust density can be provided.

[0127] Figure 41 is a schematic diagram of an actuator 5''' according to yet another modification of the third embodiment. The actuator 5''' comprises a stator 51''', a movable element 50''', a coil 52''', a permanent magnet 53''', and a support component 54'''. Similar to Figures 28, 35, and 38, the stator 51''' is made transparent in Figure 41 so that its internal structure can be seen.

[0128] Figure 42 is a schematic diagram of the stator 51''.

[0129] Figure 43 is a schematic diagram of the movable element 50''.

[0130] Unlike the actuator 5 in Figure 28, actuator 5''' has a cylindrical stator 51''' and a cylindrical movable element 50'''. Accordingly, the coil 52''' and permanent magnet 53''' on the side are formed in a curved shape to surround the movable element 50'''.

[0131] As shown in Figure 43, four support component mounting portions 56'' are provided on the upper and lower surfaces of the movable element 50''''.

[0132] Actuator 5'''' also provides the same effects as the aforementioned actuators 5, 5', and 5'', but its cylindrical shape offers the advantage of being more compact.

[0133] Figure 44 is a schematic diagram of an actuator 5'''' according to yet another modification of the third embodiment. The actuator 5'''' comprises a stator 51'''', a movable element 50'''', a coil 52'''', a permanent magnet 53'''', and a support component 54''''. Similar to Figures 28, 35, and 38, the stator 51'''' is made transparent in Figure 44 so that its internal structure can be seen.

[0134] Figure 45 is a cross-sectional view of the actuator 5'''' in Figure 44, taken along line A-A.

[0135] In the embodiments shown in Figures 28-31, the support component 54 was a metal coil spring. In contrast, the support component 54'''' is made of an elastic material such as resin, rubber, or silicone gel. In this case as well, the same effect as the support component 54 can be obtained.

[0136] These variations allow for even greater flexibility in composition.

[0137] Figure 46 is a schematic diagram of an actuator 5''''' according to yet another modification of the third embodiment. The actuator 5''''' comprises a stator 51'''''', a movable element 50'''''', a coil 52'''''', a permanent magnet 53'''''', and a support component 54''''''. Similar to Figures 28, 35, 38, and 44, the stator 51'''''' is made transparent in Figure 46 so that its internal structure can be seen.

[0138] Figure 47 is a cross-sectional view of actuator 5'''' in Figure 46, taken along line B-B.

[0139] Actuator 5'''''', like the actuator 5'''' shown in Figures 41-43, has a cylindrical stator 51'''''' and a cylindrical movable element 50''''''. Accordingly, the coil 52'''''' and permanent magnet 53'''''' on the side are formed in a curved shape to surround the movable element 50''''''. Furthermore, similar to the actuator 5'''''' shown in Figures 44 and 18, the support component 54'''''' is made of an elastic material such as resin, rubber, or silicone gel. In this case as well, the same effect as the support component 54'''' of actuator 5'''' is obtained.

[0140] These variations allow for even greater flexibility in composition.

[0141] [Fourth Embodiment] Figure 48 is a schematic diagram of an actuator device 6 according to the fourth embodiment of the present disclosure. This device comprises an actuator 5 according to the third embodiment, a power supply 20 for supplying current to the coil of the actuator 5, and a control device 30 for controlling the power supply 20 in order to control the current flowing through the coil.

[0142] The power supply 20 provides power to supply current to the coil 52 of the actuator 5. The movable element 50 of the actuator 5 vibrates in a predetermined direction due to the magnetic field generated by the current supplied from the power supply 20. The power supply 20 may be any suitable power supply, such as an AC power supply, a DC power supply, a stabilized power supply, a battery, or a generator.

[0143] The control device 30 controls the power supply 20 to control the current flowing through the coil of the actuator 5. The current control may be any control, including the supply and cessation of current, and the control of the magnitude, direction, frequency, phase, waveform, or duration of the current. The control of the power supply 20 by the control device 30 may be performed manually by the user or other operator, or automatically by AI or a program.

[0144] According to this embodiment, a system can be provided of a three-degree-of-freedom vibration actuator with high thrust density that can operate independently.

[0145] [Aspects of the Disclosure] The following describes various aspects of the Disclosure. An actuator in one aspect of the Disclosure comprises a three-dimensional movable element, a stator surrounding the movable element, at least three non-parallel coils wound around the movable element, at least three permanent magnets mounted on the inner wall surface of the stator, each facing a corresponding coil, and a support component that supports the movable element on the stator so that the movable element can vibrate inside the stator. A magnetic interaction occurs between the magnetic field generated by the current flowing through the coils and the magnetic field generated by the permanent magnets facing the coils.

[0146] This embodiment provides a compact, three-degree-of-freedom vibration actuator with high thrust density.

[0147] In one embodiment, the support components are attached to the movable element outside each coil and to the stator outside each permanent magnet.

[0148] According to this embodiment, the surface area of ​​the permanent magnet can be increased, thereby increasing the thrust density of the actuator.

[0149] In one embodiment, the support component is a spring.

[0150] According to this embodiment, the movable element can be supported by the stator so that it can vibrate stably and accurately.

[0151] In one embodiment, the permanent magnets constitute a pair of permanent magnets facing the coil from both sides.

[0152] According to this embodiment, the movable element can be driven efficiently.

[0153] In one embodiment, the movable element is hexahedral in shape.

[0154] According to this embodiment, the movable element can be driven compactly and with high precision.

[0155] In one embodiment, the hexahedral movable element is cubic in shape.

[0156] According to this embodiment, the movable element can be driven in a more compact and precise manner.

[0157] In one embodiment, the coil is wrapped around the movable element so as to pass over the center of each face of the cube.

[0158] According to this embodiment, the actuator can be operated stably and efficiently.

[0159] Another aspect of the present disclosure of an actuator device comprises an actuator having a three-dimensional movable element, a stator surrounding the movable element, at least three non-parallel coils wound around the movable element, at least three permanent magnets mounted on the inner wall surface of the stator, each facing each of the corresponding coils, and a support component that supports the movable element on the stator so that the movable element can vibrate inside the stator; a power supply for supplying current to the coils; and a control device for controlling the power supply to control the current. A magnetic interaction occurs between the magnetic field generated by the current flowing through the coils and the magnetic field generated by the permanent magnets facing the coils.

[0160] According to this embodiment, a compact, three-degree-of-freedom vibration actuator with high thrust density can be provided as a system that can operate independently.

[0161] In one embodiment, the support component connects the vertices of the stator to the opposing vertices of the movable part.

[0162] According to this embodiment, the design of the support component can be realized.

[0163] In one embodiment, the support component connects the surface of the stator to the opposing surface of the movable part.

[0164] According to this embodiment, the degree of freedom in the configuration of the support components can be increased.

[0165] In one embodiment, the outer edge of the permanent magnet is provided with a notch for passing a support component through.

[0166] According to this embodiment, the volume of the permanent magnet can be made even larger.

[0167] In one embodiment, the movable element is cylindrical.

[0168] This embodiment allows for increased flexibility in the overall configuration of the actuator and makes the entire device more compact.

[0169] An actuator in one aspect of the present disclosure comprises a three-dimensional movable element, a stator surrounding the movable element, permanent magnets attached to the movable element, coils attached to the inner wall surface of the stator, each facing a corresponding permanent magnet, and support components that support the movable element on the stator so that the movable element vibrates inside the stator without contacting the stator. A magnetic interaction occurs between the magnetic field generated by the current flowing through the coils and the magnetic field generated by the permanent magnets facing the coils. The support components are attached to the movable element outside each coil and to the stator outside each permanent magnet.

[0170] According to this embodiment, a three-degree-of-freedom vibration actuator with a high thrust density can be provided.

[0171] In one embodiment, the support component is a spring.

[0172] According to this embodiment, the movable element can be supported by the stator so that it can vibrate stably and accurately.

[0173] In one embodiment, the movable element is hexahedral in shape.

[0174] According to this embodiment, the movable element can be driven compactly and with high precision.

[0175] In one embodiment, the hexahedral movable element is cubic in shape.

[0176] According to this embodiment, the movable element can be driven in a more compact and precise manner.

[0177] In one embodiment, the support component connects the vertices of the stator to the opposing vertices of the movable.

[0178] According to this embodiment, the design of the support component can be realized.

[0179] In one embodiment, the support component connects the surface of the stator to the opposing surface of the movable part.

[0180] According to this embodiment, the degree of freedom in the configuration of the support components can be increased.

[0181] In one embodiment, the outer edge of the permanent magnet is provided with a notch for passing a support component through.

[0182] According to this embodiment, the volume of the permanent magnet can be made even larger.

[0183] In one embodiment, the movable element is cylindrical.

[0184] This embodiment allows for increased flexibility in the overall configuration of the actuator and makes the entire device more compact.

[0185] Another embodiment of the present disclosure of an actuator device comprises an actuator comprising a three-dimensional movable element, a stator surrounding the movable element, permanent magnets attached to the movable element, coils attached to the inner wall surface of the stator, each facing a corresponding permanent magnet, and support components that support the movable element on the stator so that the movable element can vibrate inside the stator without contacting the stator; a power supply for supplying current to the coils; and a control device for controlling the power supply to control the current. A magnetic interaction occurs between the magnetic field generated by the current flowing through the coils and the magnetic field generated by the permanent magnets facing the coils. The support components are attached to the movable element outside each coil and to the stator outside each permanent magnet.

[0186] According to this embodiment, a three-degree-of-freedom vibration actuator with a high thrust density can be provided as a system.

[0187] The present disclosure has been described above based on embodiments. These embodiments are illustrative, and it will be understood by those skilled in the art that various modifications are possible in combinations of their components and processing processes, and that such modifications are also within the scope of the present disclosure.

[0188] The technological concept of this disclosure can first be used for force feedback aimed at improving the sense of presence and immersion in entertainment such as VR and the metaverse. In addition, the technological concept of this disclosure can be applied to a variety of other uses and purposes, such as training for operating construction machinery, shoes to assist visually impaired people walking, guiding spectators at event venues, teaching techniques and skills in sports and manual labor, and assisting in remote surgery in medical settings. Alternatively, the technological concept of this disclosure can be applied to various industrial and consumer equipment, for example, as actuators for precise positioning or as vibration devices.

[0189] 1, 1', 1'', 1'''... Actuator, 2... Actuator device, 5, 5', 5'', 5''', 5'''', 5''''''... Actuator, 6... Actuator device, 10, 10', 10'', 10'''... Stator, 10G... Groove, 10P... Projection, 10R, 10R'... Recess, 11, 11, 11'', 11'''... Movable part, 11a... Upper and lower plates, 11b... Side plates, 12, 12', 12'', 12'''... Coil, 12x, 12x', 12x'''... First coil, 12y, 12y', 12y'''... Second coil, 12z, 12z', 12z'''... Third coil 13, 13a, 13b, 13', 13'', 13'''...Permanent magnets, 14, 14', 14'', 14'''...Support parts, 15...Support part fixing jig, 15H...Hole, 15R...Recess, 20...Power supply, 30...Control device, 50, 50', 50'', 50''', 50'''', 50'''''...Moveable parts, 51, 51', 51'', 51''', 51'''', 51'''''...Stator, 52, 52', 52'', 52'''', 52'''', 52'''''...Coils, 53, 53', 53'', 53'''', 53'''', 53'''''...Permanent magnets, 54, 54', 54'', 54'''', 54'''', 54''''''...Support parts, 55...Support part fixing jig, 56, 56', 56'', 56''''...Support part mounting parts, 100...Stator, 100G...Groove, 100P...Side, 100R...Recess, 120...Coil, 120x...First coil, 120y...Second coil, 120z...Third coil.

Claims

1. An actuator comprising: a three-dimensional movable element; a stator surrounding the movable element; at least three non-parallel coils wound around the movable element; at least three permanent magnets attached to the inner wall surface of the stator, each facing a corresponding coil; and a support component that supports the movable element on the stator so that the movable element can vibrate inside the stator, wherein a magnetic interaction occurs between the magnetic field generated by the current flowing through the coils and the magnetic field generated by the permanent magnets facing the coils.

2. The actuator according to claim 1, characterized in that the support component is attached to the movable element outside each coil and to the stator outside each permanent magnet.

3. The actuator according to claim 1 or 2, characterized in that the support component is a spring.

4. The actuator according to claim 1 or 2, characterized in that the permanent magnets constitute a pair of permanent magnets facing the coil from both sides.

5. The actuator according to claim 1 or 2, characterized in that the movable element has a hexahedral shape.

6. The actuator according to claim 5, characterized in that the movable element is cubic in shape.

7. The actuator according to claim 6, characterized in that the coil is wound around the movable element so as to pass over the center of each face of the cube.

8. An actuator comprising: a three-dimensional movable element; a stator surrounding the movable element; at least three non-parallel coils wound around the movable element; at least three permanent magnets attached to the inner wall surface of the stator, each facing a corresponding coil; and a support component that supports the movable element on the stator so that the movable element can vibrate inside the stator; a power supply for supplying current to the coils; and a control device for controlling the power supply to control the current, wherein a magnetic interaction occurs between the magnetic field generated by the current flowing through the coils and the magnetic field generated by the permanent magnets facing the coils.

9. The actuator according to claim 3, characterized in that the support component connects the vertex of the stator and the opposing vertex of the movable element.

10. The actuator according to claim 3, characterized in that the support component connects the surface of the stator and the opposing surface of the movable element.

11. The actuator according to claim 9, characterized in that the outer edge of the permanent magnet is provided with a notch for passing the support component through.

12. The actuator according to claim 3, characterized in that the movable element is cylindrical.

13. An actuator comprising: a three-dimensional movable element; a stator surrounding the movable element; permanent magnets attached to the movable element; coils attached to the inner wall surface of the stator, each facing a corresponding permanent magnet; and support components that support the movable element on the stator so that the movable element can vibrate inside the stator without contacting the stator, wherein a magnetic interaction occurs between the magnetic field generated by the current flowing through the coils and the magnetic field generated by the permanent magnets facing the coils, and the support components are attached to the movable element outside each coil and to the stator outside each permanent magnet.

14. The actuator according to claim 13, characterized in that the support component is a spring.

15. The actuator according to claim 13, characterized in that the movable element has a hexahedral shape.

16. The actuator according to claim 15, characterized in that the movable element is cubic in shape.

17. The actuator according to claim 15, characterized in that the support component connects the vertex of the stator and the opposing vertex of the movable element.

18. The actuator according to claim 15, characterized in that the support component connects the surface of the stator and the opposing surface of the movable element.

19. The actuator according to claim 18, characterized in that the outer edge of the permanent magnet is provided with a notch for passing the support component through.

20. The actuator according to claim 13, characterized in that the movable element is cylindrical.

21. An actuator comprising: a three-dimensional movable element; a stator surrounding the movable element; permanent magnets attached to the movable element; coils attached to the inner wall surface of the stator, each facing a corresponding permanent magnet; and support components that support the movable element on the stator so that the movable element can vibrate inside the stator without contacting the stator; a power supply for supplying current to the coils; and a control device for controlling the power supply to control the current, wherein a magnetic interaction occurs between the magnetic field generated by the current flowing through the coils and the magnetic field generated by the permanent magnets facing the coils, and the support components are attached to the movable element outside each coil and to the stator outside each permanent magnet.

Images