Battery processing device

WO2026174642A1PCT designated stage Publication Date: 2026-08-27CONTEMPORARY AMPEREX TECHNOLOGY CO LTD
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Patent Information

Application Number
PCT/CN2025/086775
Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-02-19
Filing Date
2025-04-02
Publication Date
2026-08-27

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    Figure CN2025086775_27082026_PF_FP_ABST
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Abstract

Provided in the present application is a battery processing device. The battery processing device comprises a box, an inspection component and a processor, wherein the box has an accommodating cavity, which is configured to accommodate a film to be processed; the inspection component is connected to the box and comprises a light source and a receiving member, the light source being used for emitting light to a first surface of said film, so as to excite said film to generate fluorescence, an emergent light path of the light source being substantially perpendicular to the first surface, and the receiving member being used for receiving the fluorescence and configured to receive the fluorescence emitted substantially perpendicular to the first surface; and the processor is connected to the receiving member and is used for generating processing information on the basis of the fluorescence received by the receiving member.
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Description

Battery processing equipment

[0001] Cross-reference to related applications

[0002] This application claims priority to Chinese Patent Application No. 202520268765.7, filed on February 19, 2025, entitled “Battery Processing Apparatus”, the entire contents of which are incorporated herein by reference. Technical Field

[0003] This application relates to the field of battery technology, and in particular to a battery processing apparatus. Background Technology

[0004] With the development of new energy technologies, batteries are being used more and more widely, for example in mobile phones, laptops, electric vehicles, electric cars, electric airplanes, electric ships, electric toy cars, electric toy ships, electric toy airplanes, and power tools.

[0005] During battery manufacturing, inspections are often required to confirm whether the entire process meets requirements. Furthermore, inspection data can be used to adjust various process parameters, helping to optimize processing quality. Therefore, effectively improving the inspection results during battery manufacturing is a continuously evolving technical challenge in battery technology. Summary of the Invention

[0006] In view of the above problems, this application provides a battery processing apparatus that can effectively improve the detection effect during the battery processing.

[0007] This application provides a battery processing apparatus, including a housing, a detection component, and a processor. The housing has a receiving cavity for accommodating a film to be processed. The detection component is connected to the housing and includes a light source and a receiver. The light source emits light onto a first surface of the film to excite fluorescence, and the outgoing light path of the light source is substantially perpendicular to the first surface. The receiver is configured to receive fluorescence emitted substantially perpendicular to the first surface. The processor is connected to the receiver and is used to process fluorescence generation information received by the receiver.

[0008] In the aforementioned technical solution, the light source's output path is approximately perpendicular to the first surface, resulting in more concentrated light energy, more uniform penetration depth and absorption process. This uniform and deeper excitation helps form a larger and more stable excitation volume within the film to be processed, thus increasing the duration of the fluorescence peak. Consequently, the receiver can obtain stable and reliable fluorescence for a longer period, more accurately reflecting the relevant state data of the film during processing, thereby effectively improving the detection performance during battery processing.

[0009] In some embodiments, the detection component further includes a base connected to the housing, and the light source and receiver are both connected to the base.

[0010] The above technical solution, by introducing a base to connect and fix the light source and receiver, not only improves the stability of the light source and receiver, but also integrates the light source and receiver into one unit. The light source and receiver can be quickly installed or replaced through the connection points on the base, thereby reducing assembly time and maintenance costs.

[0011] In some embodiments, the light source and the receiver are disposed on the same side of the diaphragm to be processed.

[0012] By placing the light source and receiver on the same side, the light propagation path is shortened and signal loss is reduced, thereby improving the detection sensitivity and accuracy of the signal. Furthermore, placing the light source and receiver on the same side simplifies assembly and alignment, reducing the complexity of adjusting optical elements in different directions.

[0013] In some embodiments, the number of detection components is multiple, and the light sources of the multiple detection components are configured to emit light of different wavelengths.

[0014] The above technical solution introduces multiple detection components, each of which emits light of different wavelengths, thereby enabling the detection of relevant state data at different depths of the film to be processed. This effectively improves the accuracy and scope of detection during battery processing.

[0015] In some embodiments, the detection component is configured to be movable relative to the housing.

[0016] The aforementioned technical solution, through the movable configuration of the detection component, can cover the entire detection area of ​​the membrane to be processed, improving the comprehensiveness of the detection. Furthermore, for membranes of different specifications, the detection component can be adjusted in position to adapt, without the need for reinstallation or replacement of new detection components, thereby improving the versatility and adaptability of the battery processing device. In addition, because the detection component can be flexibly adjusted in position and angle, the illumination area of ​​the light source and the fluorescence acquisition range of the receiver can be more precisely controlled, helping to reduce errors and improve detection accuracy.

[0017] In some embodiments, the battery processing apparatus further includes a driving component connected to the detection component and used to drive the detection component to move.

[0018] The above technical solution, by introducing a driving component, can reduce manual intervention in adjusting the position of the testing equipment and improve the automation level of the battery processing device.

[0019] In some embodiments, the housing includes a first wall with a first channel extending through it along its thickness. A detection component is disposed outside the housing and configured to be positioned opposite the first channel along its thickness. The battery processing apparatus also includes a light-transmitting component, which is sealed to the first wall and covers the first channel.

[0020] The above technical solution, by placing the detection components outside the enclosure, not only reduces the impact of the detection components on the internal processing environment but also facilitates the installation and maintenance of the detection components. Furthermore, this design makes the detection components relatively independent of the enclosure structure, enabling modular design and improving the equipment's compatibility and scalability.

[0021] In some embodiments, the number of first channels is multiple, and the multiple first channels are spaced apart along a direction perpendicular to the thickness direction.

[0022] The above technical solution achieves multi-point detection by opening multiple first channels at different positions in the enclosure, thereby obtaining more comprehensive detection data and improving the stability and accuracy of the detection.

[0023] In some embodiments, there are multiple light-transmitting components, and each of the multiple light-transmitting components corresponds one-to-one with a multiple first channel. This can improve the material utilization rate of the light-transmitting components, reduce the volume of a single light-transmitting component, facilitate installation and removal, and help reduce costs.

[0024] In some embodiments, the light-transmitting component is detachably connected to the first wall. This allows maintenance personnel to easily remove and replace the light-transmitting component, improving the ease of use of the battery processing apparatus.

[0025] In some embodiments, the battery processing apparatus further includes a first heating element for heating a film to be processed. The first heating element is disposed within a receiving cavity and located between a first wall and the film to be processed. A second channel is formed on the first heating element, extending through the first heating element along its thickness direction, and the second channel at least partially overlaps the first channel along its thickness direction.

[0026] The above technical solution, by introducing a first heating element, helps to improve the processing quality of the film to be processed. Furthermore, by opening a second channel on the first heating element and aligning it with the first channel, the optical path can pass smoothly through the heating element, reducing the impact of the heating element on detection and improving the accuracy of the detection data.

[0027] In some embodiments, the battery processing apparatus further includes a second heating element disposed on the side of the film to be processed facing away from the first heating element, and the second heating element is used to support and heat the film to be processed.

[0028] The above technical solution introduces a second heating component to achieve double-sided heating, allowing the film to be processed to be heated more evenly, thereby improving processing quality and production efficiency. In addition, the second heating component can also simultaneously support the film to be processed, helping to reduce the overall structural complexity of the battery processing device.

[0029] In some embodiments, the battery processing apparatus further includes a moving mechanism disposed on the side of the first wall facing away from the receiving cavity. The moving mechanism includes a connector and a first moving member. The connector is fixed to the first wall, and the first moving member is movably connected to the connector and configured to move relative to the connector along a first direction. A detection member is movably connected to the first moving member and configured to move relative to the first moving member along a second direction, wherein the first direction, the second direction, and the thickness direction are perpendicular to each other.

[0030] The above technical solution introduces a moving mechanism to achieve the moving setting of the detection component, which has a simple structure, is easy to maintain, and helps to reduce costs.

[0031] In some embodiments, the moving mechanism further includes a second moving member movably connected to the first moving member and configured to move relative to the first moving member in a second direction. A detection member is movably connected to the second moving member and configured to move relative to the second moving member in a thickness direction.

[0032] The above technical solution, by further introducing a second moving component, can easily realize the movement and setting of the detection component in three-dimensional space. At the same time, without changing the detection component, the size of the light spot emitted by the light source onto the first surface can be adjusted by moving the detection component along the thickness direction, thereby changing the light intensity per unit area to reduce the risk of damaging the film to be processed due to excessive light intensity.

[0033] In some embodiments, the moving mechanism further includes a first locking member connected between the connecting member and the first moving member, the first locking member being used to lock or unlock the first moving member; and / or, the moving mechanism further includes a second locking member connected between the first moving member and the second moving member, the second locking member being used to lock or unlock the second moving member; and / or, the moving mechanism further includes a third locking member connected between the second moving member and the detection component, the third locking member being used to lock or unlock the detection component.

[0034] The above technical solution can reduce the risk of vibration or shaking of the detection components during the detection process, thereby improving the detection stability.

[0035] In some embodiments, the battery processing apparatus further includes a vacuum pump connected to the receiving cavity and used to evacuate the receiving cavity to improve processing quality.

[0036] The above description is only an overview of the technical solution of this application. In order to better understand the technical means of this application and to implement it in accordance with the contents of the specification, and to make the above and other objects, features and advantages of this application more obvious and understandable, the following are specific embodiments of this application. Attached Figure Description

[0037] Various other advantages and benefits will become apparent to those skilled in the art upon reading the following detailed description of preferred embodiments. The accompanying drawings are for illustrative purposes only and are not intended to limit the scope of this application. Furthermore, the same reference numerals denote the same parts throughout the drawings. In the drawings:

[0038] Figure 1 is a three-dimensional structural schematic diagram of a battery processing apparatus provided in some embodiments of this application;

[0039] Figure 2 is a cross-sectional structural schematic diagram of a battery processing apparatus provided in some embodiments of this application.

[0040] The reference numerals in the detailed embodiments are as follows: 100, film to be processed; 110, first surface; 10, housing; 11, receiving cavity; 12, first wall; 121, first channel; 20, detection component; 21, light source; 22, receiver; 23, base; 30, processor; 40, light-transmitting component; 50, first heating component; 51, second channel; 60, second heating component; 70, moving mechanism; 71, connector; 72, first moving component; 73, second moving component; 80, vacuum pump; X, first direction; Y, second direction; Z, thickness direction. Detailed Implementation

[0041] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0042] Unless otherwise defined, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains; the terminology used in the specification of this application is for the purpose of describing particular embodiments only and is not intended to limit the application; the terms "comprising" and "having," and any variations thereof, in the specification, claims, and foregoing drawings of this application are intended to cover non-exclusive inclusion. The terms "first," "second," etc., in the specification, claims, or foregoing drawings of this application are used to distinguish different objects, rather than to describe a specific order or hierarchy.

[0043] In this application, the reference to "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment that is mutually exclusive with other embodiments.

[0044] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "attachment" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal communication between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0045] In this application, the term "and / or" is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, or B existing alone. Additionally, in this application, the character " / " generally indicates that the preceding and following related objects have an "or" relationship.

[0046] In the embodiments of this application, the same reference numerals denote the same components, and for the sake of brevity, detailed descriptions of the same components are omitted in different embodiments. It should be understood that the thickness, length, width, and other dimensions of various components in the embodiments of this application shown in the accompanying drawings, as well as the overall thickness, length, width, and other dimensions of the integrated device, are merely illustrative and should not constitute any limitation on this application.

[0047] In this application, "multiple" means two or more (including two).

[0048] In this application, the term "parallel" includes not only the case of absolute parallelism, but also the case of approximate parallelism as commonly understood in engineering; similarly, "perpendicular" includes not only the case of absolute perpendicularity, but also the case of approximate perpendicularity as commonly understood in engineering.

[0049] With the development of new energy technologies, batteries are being used more and more widely, for example in mobile phones, laptops, electric vehicles, electric cars, electric airplanes, electric ships, electric toy cars, electric toy ships, electric toy airplanes, and power tools.

[0050] For example, solar cells, represented by perovskite and organic thin-film batteries, have made disruptive progress. These solar cells, due to their high efficiency and low cost, have been widely used in aerospace, industry, commerce, agriculture, and communications. Perovskite solar cells, in particular, utilize the photoelectric conversion mechanism of perovskite crystalline materials to convert solar energy into electrical energy. They are currently the third generation of solar cells, possessing advantages such as high photoelectric conversion efficiency, simple manufacturing process, and low production cost, and have been extensively studied in recent years.

[0051] During battery manufacturing, inspections are often required to confirm whether the entire process meets requirements. Furthermore, inspection data can be used to adjust various process parameters, helping to optimize processing quality. Therefore, effectively improving the inspection results during battery manufacturing is a continuously evolving technical challenge in battery technology.

[0052] For example, in the production of perovskite solar cells, after the substrate undergoes a coating process, a wet perovskite film is formed on the substrate surface. The substrate is then sent to a crystallization apparatus to promote rapid crystallization and drying of the perovskite. If there is a lack of effective monitoring methods for the perovskite crystallization process, it is difficult to discover useful information contained within the crystallization process, making it impossible to conduct research on the crystallization mechanism and improve the crystallization process.

[0053] Related technologies use in-situ fluorescence techniques to detect perovskite thin films, but these often suffer from poor detection results due to short fluorescence peak duration. The above statements are for background information related to this application only and do not necessarily constitute prior art.

[0054] In view of this, embodiments of this application provide a battery processing apparatus, which includes a housing, a detection component, and a processor. The housing has a receiving cavity for accommodating a film to be processed. The detection component is connected to the housing and includes a light source and a receiver. The light source emits light onto a first surface of the film to excite fluorescence in the film, and the outgoing light path of the light source is substantially perpendicular to the first surface. The receiver receives the fluorescence. The processor is connected to the receiver and is used to process fluorescence generation information received by the receiver.

[0055] The light source's output path is approximately perpendicular to the first surface, resulting in concentrated light energy, more uniform penetration depth, and a more uniform absorption process. This uniform and deeper excitation helps form a larger and more stable excitation volume within the film to be processed, thus increasing the duration of the fluorescence peak. Consequently, the receiver can obtain stable and reliable fluorescence for a longer period, more accurately reflecting the relevant state data of the film during processing, thereby effectively improving the detection performance during battery manufacturing.

[0056] Figure 1 is a three-dimensional structural schematic diagram of a battery processing apparatus provided in some embodiments of this application, and Figure 2 is a cross-sectional structural schematic diagram of a battery processing apparatus provided in some embodiments of this application.

[0057] Referring again to Figures 1 and 2, this embodiment of the application provides a battery processing apparatus, which includes a housing 10, a detection component 20, and a processor 30. The housing 10 has a receiving cavity 11 for accommodating a film 100 to be processed. The detection component 20 is connected to the housing 10 and includes a light source 21 and a receiver 22. The light source 21 emits light onto a first surface 110 of the film 100 to excite fluorescence in the film 100, and the outgoing light path of the light source 21 is substantially perpendicular to the first surface 110. The receiver 22 receives the fluorescence. The processor 30 is connected to the receiver 22 and is used to process the fluorescence generation information received by the receiver 22.

[0058] This application provides a battery processing apparatus that can be used to process relevant components in a battery.

[0059] As an example, this battery processing apparatus can be used to crystallize perovskite films in perovskite solar cells. Specifically, in the production process of the perovskite film, a substrate is first provided, then a coating is applied to the surface of the substrate to form a wet perovskite film. The substrate is then sent to the battery processing apparatus to promote rapid crystallization and drying of the perovskite. The detection component 20 and processor 30 can detect the crystallization process of the perovskite to explore useful information contained in the crystallization process, facilitating research on the crystallization mechanism and improvement of the crystallization process.

[0060] As another example, the battery processing apparatus can also be used to crystallize organic thin-film sheets in organic thin-film solar cells, wherein the organic thin film can be, but is not limited to, direct bandgap semiconductor materials such as cadmium telluride or copper indium gallium selenide.

[0061] It is understood that, for the sake of brevity, this application only uses the example of crystallizing a perovskite film in a perovskite solar cell using a battery processing device for illustration. However, it should be understood that this application is not limited to this and can also be applied to other situations where the relevant state data of the film 100 to be processed can be detected during the processing by photoluminescence technology, and to provide protection for it.

[0062] The housing 10 is used to provide a processing environment for the diaphragm 100 to be processed. As an example, the housing 10 has a sealed receiving cavity 11, which can be adjusted to form a specific processing environment.

[0063] Optionally, the enclosure 10 may be, but is not limited to, made of stainless steel.

[0064] In some examples, the battery processing apparatus also includes a carrier disposed within the receiving cavity 11 and connected to the housing 10, the carrier being used to carry the diaphragm 100 to be processed.

[0065] The detection component 20 can be detachably connected to the housing 10, or it can be integrally mounted on the housing 10. The detection component 20 can be directly connected to the housing 10, or it can be constrained to the housing 10 by other components.

[0066] The detection component 20 can be fixedly connected to the housing 10 or movably connected to the housing 10.

[0067] The detection component 20 can be located inside the receiving cavity 11 or outside the housing 10.

[0068] The light source 21 and the receiver 22 can be separate or integrated. For example, separate light source 21 and receiver 22 means that they are two independent components that are not connected to each other; integrated light source 21 and receiver 22 means that they are directly or indirectly connected.

[0069] Optionally, the light source 21 can be a light-emitting diode, a laser generator, or a xenon lamp, etc.

[0070] As an example, a light-emitting diode (LED) is used as the light source 21. LEDs have the characteristics of high efficiency, long life and low heat release.

[0071] The receiver 22 is responsible for receiving the fluorescence generated by the film 100 to be processed and converting it into an electrical signal for transmission to the processor 30. Optionally, the receiver 22 may be, but is not limited to, a photodiode, a photomultiplier tube, a fiber optic probe combined with a photodetector, etc., which can quickly respond to the fluorescence generated on the film 100 to be processed and accurately transmit it to the processor 30.

[0072] For example, the angle between the outgoing light path of the light source 21 and the first surface 110 affects the duration of the fluorescence peak generated by the excitation of the film 100 to be processed. When the outgoing light path of the light source 21 is approximately perpendicular to the first surface 110, the light energy is more concentrated, and the penetration depth and absorption process are more uniform. Uniform and deeper excitation helps to form a larger and more stable excitation volume inside the film 100 to be processed, which can improve the duration of the fluorescence peak. However, when the outgoing light path of the light source 21 is tilted into the film 100 to be processed, the path of the beam propagation inside the film 100 becomes longer, which can easily make the excited fluorescence region non-uniform. Some of the fluorescence energy may be weakened due to reflection, scattering, or interface loss, resulting in a smaller or unstable excitation volume, thereby shortening the duration of the fluorescence peak.

[0073] In addition, when the outgoing light path of the light source 21 is approximately perpendicular to the first surface 110, the excited fluorescence region is more uniform, and the competition among non-radiative channels is relatively weak, resulting in a relatively long duration of the fluorescence peak. However, when the outgoing light path of the light source 21 is tilted and enters the film 100 to be processed, the unevenness of the excited fluorescence region will enhance non-radiative recombination, thus accelerating the fluorescence decay.

[0074] It should be noted that the fact that the light path of the light source 21 is approximately perpendicular to the first surface 110 means that the angle between the light path of the light source 21 and the first surface 110 is not limited to a strict 90° relationship. The angle between the light path of the light source 21 and the first surface 110 is within the range of 80°-100° and is within the approximately perpendicular range defined in this application.

[0075] The processor 30 is responsible for converting the fluorescence received by the receiver 22 into processing information that can be used for analysis. The processor 30 may include a high-speed computing module and a data processing module, which generate state data about the film 100 to be processed, i.e., the aforementioned processing information, by analyzing information such as fluorescence intensity and spectrum.

[0076] As an example, in the case of a battery processing device used to crystallize perovskite films in perovskite solar cells, perovskite materials exhibit specific fluorescence characteristics during the crystallization process. Immature or low-crystallinity perovskite films typically emit weak fluorescence signals, and their emission wavelength and intensity are unstable. However, as the crystallization process proceeds, with the growth of the crystal and the refinement of its structure, the fluorescence characteristics of the material change significantly: the fluorescence intensity usually increases, and this may be accompanied by changes in the fluorescence peak position. This is because during the crystallization process, the crystal structure gradually forms, lattice defects decrease, leading to changes in the recombination pathway of the photoexcited state, thereby affecting the fluorescence emission characteristics.

[0077] During the crystallization process of perovskite films, the crystallinity of the material increases, the grains gradually grow, the internal defects of the crystal decrease, the opportunity for electron recombination increases, and more electrons and holes can effectively combine and emit fluorescence, thereby enhancing the fluorescence intensity. With the increase of crystallinity, the band structure of the crystal may change, thus altering the peak wavelength of the fluorescence.

[0078] The crystallization process is monitored in real time by detecting the fluorescence signal emitted by the perovskite film using the detection component 20. This provides dynamic information about the crystallization process, including crystal growth rate, crystal quality, and uniformity—the aforementioned processing information. By monitoring changes in the fluorescence signal during crystallization, the crystallinity, grain size, and uniformity of the perovskite film can be analyzed in real time. Parameters such as the duration, intensity, and peak wavelength of the fluorescence signal reflect the crystallization state of the perovskite film. Furthermore, by understanding the relationship with process parameters (such as temperature and solvent evaporation rate), the preparation process of the perovskite film can be further optimized, improving the crystallization quality.

[0079] Alternatively, the processor 30 may be a spectrometer.

[0080] In the above-described technical solution, the light source 21's output light path is approximately perpendicular to the first surface 110, resulting in more concentrated light energy, more uniform penetration depth and absorption process. This uniform and deeper excitation helps form a larger and more stable excitation volume within the film 100 to be processed, thereby increasing the duration of the fluorescence peak. Consequently, the receiver 22 can obtain stable and reliable fluorescence for a longer period, more accurately reflecting the relevant state data of the film 100 during processing, thus effectively improving the detection effect during battery processing.

[0081] In some embodiments, receiver 22 is configured to receive emitted fluorescence that is substantially perpendicular to the first surface 110.

[0082] For example, under normal circumstances, the fluorescence characteristics of materials such as perovskites during the crystallization process conform to the Lambert distribution, that is, the radiation intensity of fluorescence within a unit solid angle is proportional to the cosine value of the emission angle. Therefore, the emitted light intensity in the direction perpendicular to the first surface 110 will also be relatively large.

[0083] Therefore, the receiver 22 is configured to receive emitted fluorescence approximately perpendicular to the first surface 110, resulting in more concentrated and stable fluorescence with slower attenuation. However, if the receiving angle of the receiver 22 deviates from the direction perpendicular to the first surface 110, the fluorescence may be dispersed due to factors such as light scattering, refraction, or reflection, leading to a shorter duration and reduced intensity of the received signal.

[0084] The position and angle of the receiver 22 can be pre-designed and adjusted to enable the receiver 22 to receive emitted fluorescence that is approximately perpendicular to the first surface 110.

[0085] As an example, the receiver 22 can be mounted on an adjustable bracket or support structure, so that the position and angle of the receiver 22 can be adjusted according to the size and shape of the diaphragm 100 to be processed and the configuration of the light source 21, so that the receiver 22 can adapt to different types of diaphragms 100 to be processed and different light source 21 conditions, thereby further improving the detection accuracy.

[0086] The above technical solution can further improve the intensity and reliability of fluorescence received by the receiver 22, thereby further improving the detection effect in the battery processing process.

[0087] In some embodiments, the detection component 20 further includes a base 23, which is connected to the housing 10, and the light source 21 and the receiver 22 are both connected to the base 23.

[0088] The light source 21 can be detachably connected to the base 23, or it can be integrally mounted on the base 23. The light source 21 can be directly connected to the base 23, or it can be constrained to the base 23 by other components.

[0089] The receiver 22 can be detachably connected to the base 23 or integrally mounted on the base 23. The receiver 22 can be directly connected to the base 23 or constrained to the base 23 by other components.

[0090] The above technical solution, by introducing a base 23 to connect and fix the light source 21 and the receiver 22, not only improves the stability of the light source 21 and the receiver 22, but also integrates the light source 21 and the receiver 22 into one unit. The light source 21 and the receiver 22 can be quickly installed or replaced through the connection points on the base 23, thereby reducing assembly time and maintenance costs.

[0091] In some embodiments, the light source 21 and the receiver 22 are disposed on the same side of the diaphragm 100 to be processed.

[0092] For example, the light source 21 and the receiver 22 are both located on one side of the first surface 110 of the film to be processed 100. The light source 21 emits light toward the first surface 110 of the film to be processed to excite fluorescence to be generated on the first surface 110 side of the film to be processed 100, and the receiver 22 receives the fluorescence emitted from the first surface 110 side.

[0093] In some examples, the battery processing apparatus also includes a carrier disposed within the receiving cavity 11 and connected to the housing 10. The carrier is used to carry the diaphragm 100 to be processed, and the light source 21 and the receiver 22 are disposed on the same side of the carrier.

[0094] By placing the light source 21 and the receiver 22 on the same side, the light propagation path is shortened and signal loss is reduced, thereby improving the detection sensitivity and accuracy of the signal. In addition, placing the light source 21 and the receiver 22 on the same side makes assembly and alignment operations simpler and reduces the complexity of adjusting optical elements in different directions.

[0095] In some embodiments, the number of detection components 20 is multiple, and the light source 21 of the multiple detection components 20 is configured to emit light of different wavelengths.

[0096] In this embodiment, each detection component 20 includes a light source 21 and a receiver 22. Each detection component 20 emits light of a specific wavelength through its own light source 21 to excite the film 100 to be processed to produce different fluorescence.

[0097] In this application, "multiple" refers to two or more, such as two, three, four, five, etc.

[0098] Understandably, light of different wavelengths penetrates the film 100 to be processed to different depths. For example, short wavelengths (e.g., 320 nm and 380 nm) of light are absorbed by the material more quickly, resulting in a relatively shallow penetration depth; while long wavelengths (e.g., 500 nm and 600 nm) of light interact more weakly with the material, resulting in a relatively greater penetration depth.

[0099] The above technical solution introduces multiple detection components 20, and the light source 21 of each detection component 20 can emit light of different wavelengths, thereby enabling the detection of relevant state data at different depths of the film 100 to be processed, thereby effectively improving the detection accuracy and scope in the battery processing process.

[0100] In some embodiments, the detection component 20 is configured to be movable relative to the housing 10.

[0101] For example, the detection component 20 can be mounted on an adjustable guide rail, sliding mechanism or robotic arm, thereby enabling the detection component 20 to move relative to the housing 10.

[0102] The movable configuration of the detection component 20 allows it to flexibly adjust its detection range during processing. For example, when processing a larger diaphragm 100, the detection component 20 can move along the first surface 110 of the diaphragm 100 to achieve full detection; while for a small diaphragm 100, the detection component 20 can be fixed at a specific position for local high-precision detection.

[0103] As an example, the detection component 20 can move linearly along a fixed track or guide rail.

[0104] As an example, the detection component 20 can also rotate or oscillate around a fixed axis to change the detection angle or adapt to membranes of different shapes. For instance, the detection component 20 can be mounted on a rotating arm, enabling it to perform detection around a specific area of ​​the membrane.

[0105] As an example, a multi-degree-of-freedom robotic arm can also be used, enabling the detection component 20 to move flexibly in multiple directions to adapt to different detection needs.

[0106] As an example, the operator manually drives the detection component 20 to move.

[0107] As an example, the detection unit can also be driven by a stepper motor or a servo motor.

[0108] As an example, the detection component 20 can also be moved using a pneumatic or hydraulic cylinder.

[0109] The above-described technical solution, through the movable configuration of the detection component 20, can cover the entire detection area of ​​the membrane 100 to be processed, improving the comprehensiveness of the detection. Furthermore, for membranes of different specifications, the detection component 20 can be adjusted in position to adapt, without the need for reinstallation or replacement of a new detection component 20, thereby improving the versatility and adaptability of the battery processing device. In addition, since the detection component 20 can be flexibly adjusted in position and angle, the illumination area of ​​the light source 21 and the fluorescence collection range of the receiver 22 can be more precisely controlled, helping to reduce errors and improve detection accuracy.

[0110] In some embodiments, the number of detection components 20 is multiple, and each of the multiple detection components 20 is configured to be movable relative to the housing 10.

[0111] For example, multiple detection components 20 can move independently of each other or move synchronously in conjunction.

[0112] In some embodiments, the battery processing apparatus further includes a driving component connected to the detection component 20 and used to drive the detection component 20 to move.

[0113] For example, the driving component may be, but is not limited to, a stepper motor, a servo motor, a cylinder, a hydraulic cylinder, or a robotic arm.

[0114] The detection component 20 can be detachably connected to the drive component, or it can be integrally mounted on the drive component. The receiver 22 can be directly connected to the drive component, or it can be constrained to the drive component by other components.

[0115] The above technical solution, by introducing a driving component, can reduce manual intervention in adjusting the position of the testing equipment and improve the automation level of the battery processing device.

[0116] In some embodiments, the battery processing apparatus further includes a control component connected to the drive component, the control component being used to control the drive component to start and stop.

[0117] For example, the control component may include, but is not limited to, a programmable logic controller, an embedded controller, a computer control system, or a wireless control module.

[0118] Operators can input operating commands through the control components to control the position adjustment of the detection component 20, which helps to further improve the ease of use of the battery processing device.

[0119] In some embodiments, the housing 10 includes a first wall 12, on which a first channel 121 is formed, the first channel 121 penetrating the first wall 12 along the thickness direction Z. A detection component 20 is disposed outside the housing 10 and configured to be disposed opposite to the first channel 121 along the thickness direction Z. The battery processing apparatus also includes a light-transmitting component 40, which is sealed to the first wall 12 and covers the first channel 121.

[0120] The detection component 20 is configured to be positioned relative to the first channel 121 along the thickness direction Z. As an example, the detection component 20 may be fixedly mounted on the housing 10 and positioned relative to the first channel 121 along the thickness direction Z. As another example, the detection component 20 may be movable, and the detection component 20 may move to a position relative to the first channel 121 along the thickness direction Z.

[0121] For example, the light emitted by the light source 21 passes through the light-transmitting component 40 and the first channel 121 and irradiates the first surface 110 of the film to be processed 100. The fluorescence generated by the film to be processed 100 passes through the first channel 121 and the light-transmitting component 40 and is received by the receiver 22.

[0122] The light-transmitting component 40 is sealed to the first wall 12, which reduces external interference to the internal environment of the enclosure 10, such as dust, humidity, or airflow. This allows the light-transmitting component 40 to maintain smooth transmission of light signals while keeping the enclosure 10 airtight.

[0123] As an example, the light-transmitting component 40 can be made of a material with high light transmittance, such as quartz glass, sapphire glass, polycarbonate, etc., to maximize the transmission of light signals while reducing light scattering and reflection losses.

[0124] As an example, the connection between the light-transmitting component 40 and the first wall 12 can be achieved by threaded fixing, adhesive sealing, or O-ring sealing.

[0125] Optionally, the projection shape of the first channel 121 along the thickness direction Z can be, but is not limited to, a circle, a rectangle, a triangle, or an ellipse.

[0126] The above technical solution, by placing the detection component 20 outside the housing 10, not only reduces the impact of the detection component 20 on the internal processing environment of the housing 10, but also facilitates the installation and maintenance of the detection component 20. Furthermore, this design makes the detection component 20 structurally relatively independent from the housing 10, facilitating modular design and improving the compatibility and scalability of the equipment.

[0127] In some embodiments, the number of first channels 121 is multiple, and the multiple first channels 121 are spaced apart along a direction perpendicular to the thickness direction Z.

[0128] For example, the plurality of first channels 121 may be spaced apart along a first direction X; or spaced apart along a second direction Y; or they may be distributed in an array, with some spaced apart along the first direction X and others spaced apart along the second direction Y. The first direction X, the second direction Y, and the thickness direction Z are all perpendicular to each other.

[0129] The above technical solution achieves multi-point detection by opening multiple first channels 121 at different positions in the housing 10, thereby obtaining more comprehensive detection data and improving the stability and accuracy of detection.

[0130] In some embodiments, the number of detection components 20 is multiple, and the number of detection components 20 may be the same as or different from the number of first channels 121.

[0131] As an example, there are two detection components 20 and nine first channels 121.

[0132] In some embodiments, the number of light-transmitting components 40 can be one, and one light-transmitting component 40 as a whole covers multiple first channels 121 in the thickness direction Z.

[0133] In some embodiments, there are multiple light-transmitting components 40, and each of the multiple light-transmitting components 40 is arranged in a one-to-one correspondence with a multiple first channels 121. This can improve the material utilization rate of the light-transmitting components 40, reduce the volume of a single light-transmitting component 40, facilitate installation and disassembly, and help reduce costs.

[0134] In some embodiments, the light-transmitting component 40 is detachably connected to the first wall 12. For example, it can be installed using a snap-on or screw-in type, allowing maintenance personnel to easily remove and replace the light-transmitting component 40, thereby improving the ease of use of the battery processing apparatus.

[0135] In some embodiments, the battery processing apparatus further includes a first heating element 50, which is used to heat the film 100 to be processed. The first heating element 50 is disposed in the receiving cavity 11 and located between the first wall 12 and the film 100 to be processed. A second channel 51 is formed on the first heating element 50, which penetrates the first heating element 50 along the thickness direction Z. The second channel 51 and the first channel 121 overlap at least partially along the thickness direction Z.

[0136] The primary function of the first heating element 50 is to provide controlled heating to the film 100 to meet specific processing requirements. For example, during the crystallization process of a perovskite film, appropriate heating can accelerate crystal formation.

[0137] As an example, the first heating element 50 is connected to the housing 10. The first heating element 50 can be detachably connected to the housing 10, or it can be integrally mounted on the housing 10. The first heating element 50 can be directly connected to the housing 10, or it can be constrained to the housing 10 by other components.

[0138] Optionally, the first heating element 50 may employ resistance heating, infrared heating, hot air circulation, or other heating methods.

[0139] It can be that the second channel 51 and the first channel 121 partially overlap along the thickness direction Z, or the second channel 51 and the first channel 121 overlap along the thickness direction Z.

[0140] For example, the light emitted from the light source 21 passes through the light-transmitting component 40, the first channel 121 and the second channel 51 and irradiates the first surface 110 of the film to be processed 100. The fluorescence generated by the film to be processed 100 passes through the second channel 51, the first channel 121 and the light-transmitting component 40 and is received by the receiver 22.

[0141] Optionally, the projection shape of the second channel 51 along the thickness direction Z can be, but is not limited to, a circle, a rectangle, a triangle, or an ellipse.

[0142] As an example, the projection shape of the second channel 51 along the thickness direction Z is the same as the projection shape of the first channel 121 along the thickness direction Z.

[0143] The above technical solution, by introducing the first heating element 50, helps to improve the processing quality of the film 100 to be processed. Furthermore, by opening a second channel 51 on the first heating element 50 and aligning it with the first channel 121, the optical path can pass smoothly through the heating element, reducing the impact of the heating element on detection and improving the accuracy of the detection data.

[0144] In some embodiments, the battery processing apparatus further includes a second heating element 60, which is disposed on the side of the film 100 to be processed facing away from the first heating element 50. The second heating element is used to support and heat the film 100 to be processed.

[0145] The main function of the second heating element 60 is to work together with the first heating element 50 to perform controlled heating on the diaphragm 100 to improve the uniformity of heating.

[0146] As an example, the second heating element 60 is connected to the housing 10. The second heating element 60 can be detachably connected to the housing 10, or it can be integrally mounted on the housing 10. The second heating element 60 can be directly connected to the housing 10, or it can be constrained to the housing 10 by other components.

[0147] Optionally, the second heating element 60 may employ resistance heating, infrared heating, hot air circulation, or other heating methods.

[0148] The second heating element 60 can carry the diaphragm 100 to be processed. In other words, the second heating element 60 can be used as a carrier to carry the diaphragm 100 to be processed while heating the diaphragm 100.

[0149] The above technical solution further introduces a second heating component 60 to achieve double-sided heating, enabling the film 100 to be processed to be heated more evenly, thereby helping to improve processing quality and production efficiency. In addition, the second heating component 60 can also simultaneously support the film 100 to be processed, helping to reduce the overall structural complexity of the battery processing device.

[0150] In some embodiments, the battery processing apparatus further includes a moving mechanism 70 disposed on the side of the first wall 12 facing away from the receiving cavity 11. The moving mechanism 70 includes a connector 71 and a first moving member 72. The connector 71 is fixed to the first wall 12, and the first moving member 72 is movably connected to the connector 71 and configured to move relative to the connector 71 along a first direction X. A detection member 20 is movably connected to the first moving member 72 and configured to move relative to the first moving member 72 along a second direction Y, wherein the first direction X, the second direction Y, and the thickness direction Z are perpendicular to each other.

[0151] The connector 71 is fixedly installed on the first wall 12, serving as a support structure for the entire moving mechanism 70. The connector 71 can be made of high-strength metal materials (such as aluminum alloy or stainless steel) or high-rigidity engineering plastics to improve the overall reliability of the kicking mechanism.

[0152] The first movable member 72 is movably connected to the connecting member 71 and can move along the first direction X to adjust the position of the detection member 20. The movement of the first movable member 72 may be, but is not limited to, using a slide rail, guide rail, or ball screw.

[0153] The detection component 20 is movably connected to the connector 71 and can move along the second direction Y to adjust its position. The movement of the detection component 20 can be, but is not limited to, using a slide rail, guide rail, or ball screw.

[0154] The connector 71 can be detachably connected to the first wall 12, or it can be integrally formed on the first wall 12. The connector 71 can be directly connected to the first wall 12, or it can be constrained to the first wall 12 by other components.

[0155] The first movable member 72 can be detachably connected to the connector 71, or it can be integrally mounted on the connector 71. The first movable member 72 can be directly connected to the connector 71, or it can be constrained to the connector 71 by other components.

[0156] The detection component 20 can be detachably connected to the first movable component 72, or it can be integrally mounted on the first movable component 72. The detection component 20 can be directly connected to the first movable component 72, or it can be constrained to the first movable component 72 by other components.

[0157] The above technical solution introduces a moving mechanism 70 to realize the moving setting of the detection component 20. The structure is simple, easy to maintain, and helps to reduce costs.

[0158] In some embodiments, the moving mechanism 70 further includes a second moving member 73, which is movably connected to the first moving member 72 and configured to move relative to the first moving member 72 in a second direction Y. The detection member 20 is movably connected to the second moving member 73 and configured to move relative to the second moving member 73 in a thickness direction Z.

[0159] The second movable member 73 is movably connected to the first movable member 72 and can move along the second direction Y to adjust the position of the detection member 20. The movement of the second movable member 73 can be, but is not limited to, using a slide rail, guide rail, or ball screw.

[0160] The second movable member 73 can be detachably connected to the first movable member 72, or it can be integrally disposed on the first movable member 72. The second movable member 73 can be directly connected to the first movable member 72, or it can be constrained to the first movable member 72 by other components.

[0161] The above technical solution, by further introducing a second moving part 73, can conveniently realize the movement and setting of the detection part 20 in three-dimensional space. At the same time, without changing the detection part 20, the size of the light spot emitted by the light source 21 onto the first surface 110 can be adjusted by moving the detection part 20 along the thickness direction Z, thereby changing the light intensity per unit area to reduce the risk of damaging the film 100 to be processed due to excessive light intensity.

[0162] In some embodiments, the moving mechanism 70 further includes a first locking member connected between the connecting member 71 and the first moving member 72, the first locking member being used to lock or unlock the first moving member 72.

[0163] For example, after the position of the detection component 20 is adjusted, the first moving component 72 is first locked using the first locking member to fix the detection component 20, thereby maintaining the stability and reliability of the subsequent detection process. After the detection is completed, the first moving component 72 is then unlocked to allow the detection component 20 to be moved.

[0164] As an example, the first locking element can be mechanically locked, such as by using bolts, clips, or pawls, to lock the first moving element 72 by tightening or engaging it at a fixed point. This method is simple in structure and low in cost.

[0165] As an example, the first locking element can also be electromagnetically locked, for example, releasing the lock when energized and locking the first moving element 72 when de-energized, which helps to improve operating efficiency.

[0166] The above technical solution, by introducing a first locking member, fixes the detection component 20 after its position is adjusted, thereby reducing the risk of vibration or shaking of the detection component 20 during the detection process and improving detection stability.

[0167] In some embodiments, the moving mechanism 70 further includes a second locking member connected between the first moving member 72 and the second moving member 73, and the second locking member is used to lock or unlock the second moving member 73.

[0168] In some embodiments, the moving mechanism 70 further includes a third locking member connected between the second moving member 73 and the detection member 20, the third locking member being used to lock or unlock the detection member 20.

[0169] It should be noted that the second and third locking components may have the same structure as the first locking component. For specific structural details of the second and third locking components, please refer to the relevant content of the first locking component mentioned above, which will not be repeated here.

[0170] In some embodiments, the battery processing apparatus further includes a vacuum pump 80, which is connected to the receiving cavity 11 and is used to evacuate the receiving cavity 11.

[0171] For example, in battery manufacturing, certain processes (such as drying, coating, film deposition, or gas replacement) need to be performed in a low-pressure environment to reduce the influence of impurities in the air and improve processing quality. For instance, during the crystallization of perovskite films, a vacuum environment can accelerate solvent evaporation and improve crystallization efficiency.

[0172] As an example, the vacuum pump 80 can be connected to the containment cavity 11 via a pipe or vacuum interface, enabling it to quickly establish a low-pressure environment.

[0173] Optionally, a vacuum valve may be provided between the vacuum pump 80 and the receiving cavity 11 to control the pumping speed and pressure level.

[0174] Optionally, the vacuum pump 80 may be, but is not limited to, a rotary vane vacuum pump 80, a dry screw vacuum pump 80, a scroll vacuum pump 80, a Roots vacuum pump 80, a molecular pump, or an ion pump, etc.

[0175] Unless otherwise specified, all embodiments and optional embodiments of this application can be combined to form new technical solutions. All technical features and optional technical features of this application can be combined to form new technical solutions.

[0176] To better understand the battery processing apparatus provided in the embodiments of this application, based on the same inventive concept, embodiments of the above-described battery processing apparatus in practical applications are described herein.

[0177] This application provides a battery processing apparatus, which includes a housing 10, a detection component 20, a processor 30, a light-transmitting component 40, a first heating component 50, and a second heating component 60. The housing 10 has a receiving cavity 11 for accommodating a perovskite film. The housing 10 includes a first wall 12, on which a first channel 121 is formed, penetrating the first wall 12 along its thickness direction Z. The detection component 20 is disposed outside the housing 10 and configured to be positioned opposite to the first channel 121 along the thickness direction Z. The battery processing apparatus also includes a light-transmitting component 40, which is sealed to the first wall 12 and covers the first channel 121. There are multiple first channels 121, which are spaced apart along a direction perpendicular to the thickness direction Z. There are also multiple light-transmitting components 40, which are arranged one-to-one with the multiple first channels 121.

[0178] A detection component 20 is connected to the housing 10 and is configured to be movable relative to the housing 10. The detection component 20 includes a light source 21 and a receiver 22, which are disposed on the same side of the perovskite film. The light source 21 emits light onto the first surface 110 of the perovskite film to excite fluorescence in the perovskite film, and the outgoing light path of the light source 21 is substantially perpendicular to the first surface 110. The receiver 22 receives the fluorescence and is configured to receive emitted fluorescence substantially perpendicular to the first surface 110. A processor 30 is connected to the receiver 22 and is used to process fluorescence generation information received by the receiver 22.

[0179] There are multiple detection components 20, and the light sources 21 of the multiple detection components 20 are configured to emit light of different wavelengths.

[0180] A first heating element 50 is used to heat the perovskite film. The first heating element 50 is disposed within the receiving cavity 11 and located between the first wall 12 and the perovskite film. A second channel 51 is formed on the first heating element 50, and the second channel 51 penetrates the first heating element 50 along the thickness direction Z. The second channel 51 and the first channel 121 overlap at least partially along the thickness direction Z. A second heating element 60 is disposed on the side of the perovskite film facing away from the first heating element, and the second heating element is used to support and heat the perovskite film.

[0181] In the aforementioned technical solution, the emitted light path of the light source 21 is approximately perpendicular to the first surface 110, resulting in more concentrated light energy, more uniform penetration depth and absorption process. This uniform and deeper excitation helps form a larger and more stable excitation volume within the perovskite film, thereby increasing the duration of the fluorescence peak. Consequently, the receiver 22 can obtain stable and reliable fluorescence for a longer period, more accurately reflecting the relevant state data of the perovskite film during processing, thus effectively improving the detection effect during battery processing.

[0182] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other.

[0183] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and not to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. These modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application, and they should all be covered within the scope of the claims and specification of this application. In particular, as long as there is no structural conflict, the various technical features mentioned in the embodiments can be combined in any way. This application is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. A battery processing apparatus, comprising: The housing has a receiving cavity for accommodating the diaphragm to be processed; A detection component is connected to the housing. The detection component includes a light source and a receiver. The light source is used to emit light onto the first surface of the film to be processed to excite the film to produce fluorescence. The light path emitted by the light source is substantially perpendicular to the first surface. The receiver is used to receive the fluorescence and is configured to receive the fluorescence emitted substantially perpendicular to the first surface. A processor, connected to the receiver, is used to process the fluorescence generation processing information received by the receiver.

2. The battery processing apparatus according to claim 1, wherein, The detection component also includes a base connected to the housing, and the light source and the receiver are both connected to the base.

3. The battery processing apparatus according to claim 1 or 2, wherein, The light source and the receiver are located on the same side of the diaphragm to be processed.

4. The battery processing apparatus according to any one of claims 1-3, wherein, The number of detection components is multiple, and the light sources of the multiple detection components are configured to emit light of different wavelengths.

5. The battery processing apparatus according to any one of claims 1-4, wherein, The detection component is configured to be movable relative to the housing.

6. The battery processing apparatus according to claim 5, wherein, The battery processing apparatus further includes a driving component connected to the detection component and used to drive the detection component to move.

7. The battery processing apparatus according to any one of claims 1-6, wherein, The box includes a first wall, on which a first channel is formed, and the first channel penetrates the first wall along the thickness direction of the first wall; The detection component is disposed outside the housing and configured to be positioned opposite to the first channel along the thickness direction; The battery processing apparatus further includes a light-transmitting component, which is sealed to the first wall and covers the first channel.

8. The battery processing apparatus according to claim 7, wherein, The number of the first channels is multiple, and the multiple first channels are spaced apart along a direction perpendicular to the thickness direction.

9. The battery processing apparatus according to claim 8, wherein, The number of light-transmitting components is multiple, and each of the multiple light-transmitting components is configured in a one-to-one correspondence with a multiple of the first channels.

10. The battery processing apparatus according to any one of claims 7-9, wherein, The light-transmitting component is detachably connected to the first wall.

11. The battery processing apparatus according to any one of claims 7-9, wherein, The battery processing apparatus further includes a first heating component, which is used to heat the film to be processed. The first heating component is disposed in the receiving cavity and located between the first wall and the film to be processed. The first heating element has a second channel, which penetrates the first heating element along the thickness direction, and the second channel and the first channel overlap at least partially along the thickness direction.

12. The battery processing apparatus according to claim 11, wherein, The battery processing apparatus further includes a second heating component, which is disposed on the side of the film to be processed facing away from the first heating component. The second heating component is used to support and heat the film to be processed.

13. The battery processing apparatus according to any one of claims 7-12, wherein, The battery processing apparatus further includes a moving mechanism, which is disposed on the side of the first wall facing away from the receiving cavity; The moving mechanism includes a connector and a first moving member. The connector is fixed to the first wall, and the first moving member is movably connected to the connector and configured to move relative to the connector in a first direction. The detection component is movably connected to the first movable member and is configured to move relative to the first movable member along a second direction, wherein the first direction, the second direction, and the thickness direction are perpendicular to each other.

14. The battery processing apparatus according to claim 13, wherein, The moving mechanism further includes a second moving member, which is movably connected to the first moving member and configured to move relative to the first moving member along the second direction; The detection component is movably connected to the second movable member and is configured to move relative to the second movable member along the thickness direction.

15. The battery processing apparatus according to claim 14, wherein, The moving mechanism further includes a first locking member connected between the connecting member and the first moving member, the first locking member being used to lock or unlock the first moving member; and / or The moving mechanism further includes a second locking member, which is connected between the first moving member and the second moving member, and is used to lock or unlock the second moving member; and / or, The moving mechanism further includes a third locking member, which is connected between the second moving member and the detection component, and is used to lock or unlock the detection component.

16. The battery processing apparatus according to any one of claims 1-15, wherein, The battery processing apparatus further includes a vacuum pump connected to the receiving cavity and used to evacuate the receiving cavity.