The invention discloses a differential capacitive MEMS (Micro-Electro-
Mechanical System)
microphone. The differential capacitive
MEMS microphone comprises a circuit board, a first MEMS
chip and a second MEMS
chip, wherein the first MEMS
chip comprises a first substrate arranged on the circuit board, and a first
capacitor which is arranged on the first substrate and comprises a first back polar plate positioned above, a first vibration film positioned below and a first
isolation layer arranged between the first back polar plate and the first vibration film; the second MEMS chip comprises a second substrate arranged on the circuit board, and a second
capacitor which is arranged on the second substrate and comprises a second back polar plate positioned below, a second vibration film positioned above and a second
isolation layer arranged between the second back polar plate and the second vibration film; and the first
capacitor and the second capacitor construct a pair of differential capacitors. Through adoption of the differential capacitive
MEMS microphone disclosed by the invention,
external noise signals can be filtered; the
signal-to-
noise ratio is increased; and the performance of a
microphone product is enhanced.