The application discloses an
intelligent control device and method for self-checking and early warning of a mechanical arm
vacuum state, and belongs to the technical field of
semiconductor manufacturing equipment. The device comprises: a carrying mechanism, a vacuum adsorption circuit integrated on the mechanical arm of the carrying mechanism, the vacuum adsorption circuit comprising a vacuum adsorption end, a vacuum generator and a
vacuum pressure sensor; a vacuum self-checking unit platform, the platform being used for positioning and placing a standard
wafer and providing a constant physical
reference surface for the vacuum adsorption end when the mechanical arm moves to the platform to perform an adsorption action; and a controller, which is in communication connection with a motor
servo driver, the vacuum generator and the
vacuum pressure sensor, and is configured to dynamically update a vacuum alarm threshold value in a normal production process based on a load vacuum self-checking value acquired at the self-checking platform, and to give an early warning when a real-time value does not reach the threshold value. The device excludes the interference of external production variables, solves the
false alarm problem caused by a fixed threshold value by dynamically updating the threshold value, and realizes accurate and adaptive preventive diagnosis of the real sealing state of the vacuum circuit.