Optical detection system and optical detection method

Abstract

The present invention provides an optical detection system and an optical detection method, comprising: an illumination component, configured to emit a detection light beam to an object to be detected, the detection light beam is scattered and reflected by the surface of the object to be detected to form a signal light; a detection component is used to collect the signal light and form a first signal light and a second signal light, the propagation direction of the signal light forming the first signal light and the propagation direction of the signal light forming the second signal light are symmetrical about the incident plane of the detection light beam; or, the detection component also includes a spectroscopic component, which divides the signal light into a first signal light and a second signal light; the detection component includes a first detection device and a second detection device; the first signal light and the second signal light are received respectively, and first detection information is obtained according to the first signal light, and second detection information is obtained according to the second signal light; a processing system obtains the size of a target to be detected on the surface of the object to be detected according to the first detection information and the second detection information; through the above settings, the detection range is expanded.

Description

Technical Field

[0001] The present invention relates to the technical field of surface defect detection, and more specifically, to an optical detection system and an optical detection method. Background Art

[0002] As the substrate of the chip, if there are defects in the wafer, the chip will fail, which will in turn reduce the chip yield and increase the manufacturing cost. The commonly used method is to perform wafer surface defect detection before or during chip preparation.

[0003] Among them, wafer surface defect detection refers to detecting whether there are defects such as grooves, particles, scratches, etc. on the wafer surface, and determining the location of the defects. Due to the advantages of fast detection speed and no pollution, optical detection has become the most commonly used method for wafer surface defect detection. However, the existing optical detection equipment has a small detection range for defect size, and has shortcomings such as low detection efficiency and low detection accuracy. Summary of the invention

[0004] In view of this, the present invention provides an optical detection system and an optical detection method to expand the detection range of the detection equipment.

[0005] To achieve the above object, the present invention provides the following technical solutions:

[0006] An optical detection system, comprising:

[0007] An illumination component, wherein the illumination component is configured to emit a detection light beam to the object to be detected, wherein the detection light beam is scattered and / or reflected by a surface of the object to be detected to form a signal light;

[0008] A detection component, used for collecting the signal light and forming a first signal light and a second signal light; the detection component includes a plurality of detection devices, and the plurality of detection devices include a first detection device and a second detection device;

[0009] The first detection device is used to receive the first signal light and obtain first detection information according to the first signal light;

[0010] The second detection device is used to receive the second signal light and obtain second detection information according to the second signal light;

[0011] A processing system, used for obtaining the size of the target to be detected on the surface of the object to be detected according to the first detection information and the second detection information;

[0012] wherein a propagation direction of the signal light forming the first signal light and a propagation direction of the signal light forming the second signal light are symmetrical with respect to the incident plane of the detection light beam; or,

[0013] The detection component further includes a light splitting component, which splits the signal light into the first signal light and the second signal light.

[0014] Optionally, the first detection device has a light intensity range of a first range, the first range is the light intensity range of the signal light collected by the detection component, the second detection device has a light intensity range of a second range, the second range is the light intensity range of the signal light collected by the detection component, and the union of the first range and the second range is greater than the first range and greater than the second range.

[0015] Optionally, the first detection device includes a first detector, and the first detector is used to detect the first signal light;

[0016] The second detection device includes a second detector, and the second detector is used to detect the second signal light;

[0017] The first detector has a light intensity range of a first detection range, which is a light intensity range of a first signal light reaching the first detector for detection; the second detector has a light intensity range of a second detection range, which is a light intensity range of a second signal light reaching the second detector for detection.

[0018] Optionally, the propagation direction of the signal light forming the first signal light and the propagation direction of the signal light forming the second signal light are symmetrical about the incident plane of the detection light beam; or, the detection component further includes a spectroscopic component, and the spectroscopic component makes the first signal light and the second signal light have the same light intensity;

[0019] The union of the first detection range and the second detection range is larger than the first detection range, and the union of the first detection range and the second detection range is larger than the second detection range.

[0020] Optionally, the union of the first detection range and the second detection range is equal to the first detection range, or the union of the first detection range and the second detection range is equal to the second detection range;

[0021] The first signal light reaching the first detector and the second signal light reaching the second detector have different light intensities.

[0022] Optionally, at least one of the first detection device and the second detection device further includes a filter component, and the detector receives the light beam passing through the filter component.

[0023] Optionally, the filter component is arranged between the signal light collecting component and the detector;

[0024] Alternatively, the filter component is arranged between the light splitting component and the detector.

[0025] Optionally, the optical filter assembly includes a plurality of light-transmitting areas, and different light-transmitting areas have different light transmittances, so that by moving different light-transmitting areas to the optical path, the signal light has different light intensities after passing through the optical filter assembly.

[0026] Optionally, the light-transmitting area includes a first light-transmitting area and / or a second light-transmitting area and / or a third light-transmitting area;

[0027] The first light-transmitting area has an attenuation sheet, and different attenuation sheets in the first light-transmitting area have different light transmittances;

[0028] The second light-transmitting area is a hollow area, or a transparent sheet is provided in the second light-transmitting area;

[0029] The third light-transmitting area has a first polarizer.

[0030] Optionally, the transmittance of the attenuation sheet is 0.1% to 0.5%.

[0031] Optionally, the light splitting component comprises a semi-transparent and semi-reflective mirror, and the transmittance and reflectance of the semi-transparent and semi-reflective mirror are different.

[0032] Optionally, the first detection information includes the intensity of the first signal light or the image of the object to be detected; the second detection information includes the intensity of the second signal light or the image of the object to be detected.

[0033] An optical detection method, applied to the optical detection system as described in any one of the above items, the detection method comprising:

[0034] The lighting assembly emits a detection light beam toward the object to be measured, and the detection light beam is scattered and / or reflected by the surface of the object to be measured to form a signal light;

[0035] Enable the detection component to collect the signal light and form a first signal light and a second signal light;

[0036] Receiving a first signal light emitted from the surface of the object to be detected by a first detection device, and acquiring first detection information according to the first signal light;

[0037] Receiving a second signal light emitted from the surface of the object to be detected by a second detection device, and obtaining second detection information according to the second signal light;

[0038] enabling a processing system to obtain a size of a target to be detected on the surface of the object to be detected according to the first detection information and the second detection information;

[0039] Wherein, the propagation direction of the signal light forming the first signal light and the propagation direction of the signal light forming the second signal light are symmetrical with respect to the incident plane of the detection light beam; or, the detection component also includes a spectroscopic component, which splits the signal light into the first signal light and the second signal light.

[0040] Optionally, the first detection device has a first range of light intensity measurement, the first range is the light intensity range of the signal light collected by the detection component, the second detection device has a second range of light intensity measurement, the second range is the light intensity range of the signal light collected by the detection component, and the method further includes:

[0041] The union of the first range and the second range is made larger than the second range and larger than the second range.

[0042] Optionally, obtaining the size of the target to be detected on the surface of the object to be detected according to the first detection information and the second detection information includes:

[0043] When one of the first detection information and the second detection information includes the detection information of the object to be detected, acquiring the size of the object to be detected according to the detection information of the object to be detected;

[0044] When both the first detection information and the second detection information include the detection information of the to-be-detected object, the size of the to-be-detected object is acquired according to one or a combination of the first detection information and the second detection information.

[0045] Optionally, obtaining the size of the target to be detected according to one or a combination of the first detection information and the second detection information includes:

[0046] Acquire a first size of the target to be detected according to the first detection information;

[0047] Acquire a second size of the object to be detected according to the second detection information;

[0048] When the first size is within a first preset range, acquiring the first size as the size of the object to be detected;

[0049] When the second size is within a second preset range, the first size is acquired as the size of the object to be detected.

[0050] Compared with the prior art, the technical solution provided by the present invention has the following advantages:

[0051] In a first aspect, the optical detection system and optical detection method provided by the present invention expand the range of the detection device to detect the size of the target to be detected on the surface of the object to be detected by setting a first detection device and a second detection device to receive the first signal light and the second signal light respectively.

[0052] In the second aspect, the optical detection system and optical detection method provided by the present invention, the first detection device has a light intensity range of a first range, the first range is the light intensity range of the signal light collected by the detection component, the second detection device has a light intensity range of a second range, the second range is the light intensity range of the signal light collected by the detection component, and the union of the first range and the second range is greater than the first range and greater than the second range. When the size of the target to be detected on the surface of the object to be detected is large, the intensity of the signal light generated is large; when the size of the target to be detected on the surface of the object to be detected is small, the intensity of the signal light generated is small. If a single-range detection device is used, the target to be detected may be missed or overexposed, reducing the detection accuracy. Therefore, through the above settings, targets of different sizes can be detected simultaneously, expanding the detection range, and improving the detection accuracy and efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0053] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0054] Figure 1 A schematic diagram of the side structure of an optical detection system provided by one embodiment of the present invention;

[0055] Figure 2 A schematic diagram of the three-dimensional structure of an optical detection system provided by another embodiment of the present invention;

[0056] Figure 3 A schematic diagram of the side structure of an optical detection system provided by another embodiment of the present invention;

[0057] Figure 4 A schematic diagram of the structure of a detection device provided by one embodiment of the present invention;

[0058] Figure 5 A schematic diagram of a top view of a filter assembly provided by an embodiment of the present invention;

[0059] Figure 6 A schematic structural diagram of a detection device provided in another embodiment of the present invention;

[0060] Figure 7A flow chart of an optical detection method provided by one embodiment of the present invention. DETAILED DESCRIPTION

[0061] As described in the background technology, optical detection is currently the most commonly used method for detecting wafer surface defects. Existing optical detection equipment generally includes a detection light source and a detection device, wherein the detection light source emits a detection beam to the wafer to be tested, and the detection beam is scattered by the defects on the surface of the object to be tested to form a signal light, and the detection device is used to detect the signal light and obtain the defect information of the surface of the wafer to be tested based on the signal light.

[0062] However, since the defect sizes on the surface of the wafer to be tested are different, there are both large and small defects, and the signal light intensity generated by the scattering of the detection light beam by large defects is stronger, and the signal light intensity generated by the scattering of small defects is weaker, therefore, if the optical detection equipment only uses a single-range detection channel, it can only clearly image the signal light of a single intensity, and cannot clearly image the signal light of different intensities, that is, it cannot clearly image defects of different sizes.

[0063] Based on this, the present invention provides an optical detection system and an optical detection method to overcome the above problems existing in the prior art, wherein the optical detection system comprises:

[0064] An illumination component, the illumination component is configured to emit a detection light beam to the object to be detected, and the detection light beam is scattered by the surface of the object to be detected to form a signal light;

[0065] A detection component, used for collecting signal light and forming a first signal light and a second signal light, wherein the detection component comprises a plurality of detection devices, and the plurality of detection devices comprises a first detection device and a second detection device;

[0066] The first detection device is used to receive the first signal light and obtain first detection information according to the first signal light;

[0067] The second detection device is used to receive the second signal light and obtain second detection information according to the second signal light;

[0068] A processing system, configured to obtain the size of a target to be detected on the surface of the object to be detected according to the first detection information and the second detection information;

[0069] Wherein, the propagation direction of the signal light forming the first signal light and the propagation direction of the signal light forming the second signal light are symmetrical with respect to the incident plane of the detection light beam; or, the detection component also includes a spectroscopic component, which splits the signal light into the first signal light and the second signal light.

[0070] Through the above arrangement, by using a plurality of detection devices to detect the object to be detected, the range of the size of the target to be detected on the surface of the object to be detected by the detection device is expanded.

[0071] It should be noted that the detection light beam is irradiated on the surface of the object to be tested, and is scattered and reflected by the surface of the object to be tested to form a signal light; the detection component collects and detects the signal light generated by the surface to be tested, and forms a first signal light and a second signal light. In this embodiment, the first detection device is used to collect, form and detect the first signal light, and the second detection device is used to collect, form and detect the second signal light. The signal light emitted from the surface of the object to be tested can be collected entirely by the detection component, or partially by the detection component to form the first signal light and the second signal light.

[0072] In this embodiment, the first detection device has a light intensity range of the first range, and the first range is the light intensity range of the signal light collected by the detection component; the second detection device has a light intensity range of the second range, and the second range is the light intensity range of the signal light collected by the detection component; and the union of the first range and the second range is greater than the first range and greater than the second range; by making the union of the first range and the second range greater than the first range and greater than the second range, the range of the signal light intensity detected by the optical detection system is further expanded, that is, the range of the size of the target to be detected on the surface of the object to be detected by the detection device is expanded. Since the signal light intensity generated when the size of the target to be detected on the surface of the object to be detected is larger; and the signal light intensity generated when the size of the target to be detected on the surface of the object to be detected is smaller, if a single range detection device is used, the target to be detected will be missed or overexposed, reducing the detection accuracy. Therefore, the present invention can detect targets of different sizes to be detected at the same time by setting the first detection device and the second detection device, expanding the detection range of the detection device, and at the same time, the detection accuracy and detection efficiency are both high.

[0073] An embodiment of the present invention provides an optical inspection system for detecting surface inspection information of an object to be inspected, wherein the object to be inspected may be a wafer or a glass substrate, etc., and the inspection information may be defect information or structural information, etc.

[0074] like Figure 1 As shown, the optical detection system includes an illumination component and a detection component.

[0075] The lighting assembly is configured to emit a detection beam to the object to be measured 2. Specifically, the detection beam includes a normal incident detection beam and / or an oblique incident detection beam. The detection beam is scattered and / or reflected by the surface of the object to be measured 2 to form a signal light.

[0076] The detection component is used to collect the signal light and form the first signal light and the second signal light.

[0077] The detection assembly includes a plurality of detection devices 1, and the plurality of detection devices 1 include a first detection device A1 and a second detection device B1. The first detection device A1 is used to receive or collect signal light from the surface of the object to be detected 2 and form a first signal light; the second detection device B1 is used to receive or collect signal light from the surface of the object to be detected 2 and form a second signal light, so that the signal light from the surface of the object to be detected 2 forms the first signal light and the second signal light, wherein the propagation direction of the signal light forming the first signal light and the propagation direction of the signal light forming the second signal light are symmetrical with respect to the incident plane of the detection light beam.

[0078] Alternatively, the detection component further includes a spectroscopic component, which separates the signal light formed by surface scattering and / or reflection of the object to be detected 2 into a first signal light and a second signal light. Optionally, the spectroscopic component includes a half-reflecting half-mirror, the transmittance and reflectance of the half-reflecting half-mirror are the same, or the transmittance and reflectance of the half-reflecting half-mirror are different.

[0079] In the embodiment of the present invention, the first detection device A1 is used to receive the first signal light and obtain first detection information of the surface of the object 2 according to the first signal light. The second detection device B1 is used to receive the second signal light and obtain second detection information of the surface of the object 2 according to the second signal light.

[0080] In this embodiment, the first detection information includes the intensity of the first signal light or the image of the object to be detected; the second detection information includes the intensity of the second signal light or the image of the object to be detected.

[0081] In this embodiment, the first detection device has a light intensity range of a first range, and the first range is the light intensity range of the signal light collected by the detection component. The second detection device has a light intensity range of a second range, and the second range is the light intensity range of the signal light collected by the detection component. The union of the first range and the second range is greater than the first range and greater than the second range, that is, the first range is not equal to the second range, or the first range is not included in the second range, or the second range is not included in the first range. Based on this, the first detection device A1 and the second detection device B1 are configured to respond to different ranges of signal light collected by the detection component, thereby expanding the range of signal light detected by the detection system.

[0082] In addition, the first signal light and the second signal light in the embodiment of the present invention are signal lights emitted from the same detection area of ​​the object to be measured 2, and the detection information on the surface of the object to be measured 2 obtained by the first detection device A1 and the detection information on the surface of the object to be measured 2 obtained by the second detection device B1 are detection information of the same detection area, that is, the multiple detection devices 1 in the embodiment of the present invention all obtain detection information of the same detection area of ​​the object to be measured 2.

[0083] Furthermore, since the light intensities of the signal lights generated by the targets to be detected of different sizes on the surface of the object to be detected 2 are different, the signal lights generated by the targets to be detected of smaller sizes are weaker, and the signal lights generated by the targets to be detected of larger sizes are stronger, if a detection device with a single range is used, missed detection or overexposure may occur, thereby reducing the detection accuracy. Therefore, in the embodiment of the present invention, by setting a first detection device A1 and a second detection device B1 with different ranges of signal lights received by the response detection component, targets to be detected of different sizes can be detected simultaneously, and at least one detection device can accurately detect the targets to be detected, that is, accurate detection information can be obtained for the targets to be detected of different sizes on the surface of the object to be detected 2, and the detection accuracy and efficiency are high.

[0084] It should be noted that, in this embodiment, the first range is the intensity of the signal light collected by the detection component when the sensitivity of the first detection device to the first signal light is greater than a predetermined value and the sensitivity of the first detection device to the first signal light is less than a saturation value. That is, the first range is the intensity range of the signal light when the first detection device can identify defects and is not saturated.

[0085] The second range is the intensity of the signal light collected by the detection component when the sensitivity of the second detection device to the second signal light is greater than a predetermined value and the sensitivity of the second detection device to the second signal light is less than a saturation value. That is, the second range is the intensity range of the signal light when the second detection device can identify defects and is not saturated.

[0086] It should be noted that, in the embodiment of the present invention, the optical detection system includes two detection devices 1, which is not limited to this example. Figure 2 and Figure 3 As shown, the optical detection system may further include five detection devices 1. In addition, in the embodiment of the present invention, only the object to be detected 2 is a wafer as an example for description.

[0087] In the embodiment of the present invention, the detection light beam can be incident at different angles, such as the detection light includes oblique incident light and vertical incident light, wherein the plane where the oblique incident light and the vertical incident light are located is the incident plane of the detection light. Optionally, in the embodiment of the present invention, the detection light beam emitted by the lighting component is a laser, and the optical power range of the laser is 2W to 3W.

[0088] In the embodiment of the present invention, Figure 4 As shown, each detection device 1 includes a light collecting component 10 and a detector 11, wherein the light collecting component 10 is used to collect signal light emitted from the surface of the object to be detected 2. The detector 11 is used to detect the signal light collected by the signal light collecting component 10. Optionally, the light collecting component 10 includes a lens group, which is composed of a plurality of lenses.

[0089] The first detection device A1 includes a first signal light collecting component and a first detector; the first signal light collecting component is used to collect the signal light emitted by the object to be measured and form a first signal light; the first detector has a light intensity range of a first detection range, which is used to detect the first signal light, and the first detection range is the light intensity range of the first signal light that reaches the first detector for detection; the second detection device A2 includes a second signal light collecting component and a second detector; the second signal light collecting component is used to collect the signal light emitted by the object to be measured and form a second signal light; the second detector has a light intensity range of a second detection range, which is used to detect the second signal light, and the second detection range is the light intensity range of the second signal light that reaches the second detector for detection.

[0090] In this embodiment, the first signal light reaching the first detector and the second signal light reaching the second detector have different intensities, and the union of the first detection range of the first detector and the second detection range of the second detector is equal to the first detection range, or the union of the first detection range and the second detection range is equal to the second detection range.

[0091] Specifically, in this embodiment, at least one of the first detection device and the second detection device further includes a filter component 12 to form a first signal light or a second signal light through the filter component 12 , and the detector receives and detects the light beam of the filter component 12 .

[0092] Optionally, the filter component 12 is disposed between the light collecting component 10 and the detector 11. Of course, the present invention is not limited thereto. In other embodiments, the filter component 12 may also be disposed at other positions, such as Figure 6 As shown, in another embodiment, the filter component 12 can also be arranged between the spectroscopic component 13 and the detector 11.

[0093] like Figure 4 As shown, the filter component 12 is disposed between the light collecting component 10 and the detector 11, and, as shown in FIG. Figure 5 As shown, the filter component 12 includes multiple light-transmitting areas 120, and different light-transmitting areas 120 have different light transmittances. By moving different light-transmitting areas 120 to the optical path between the light collecting component 10 and the detector 11, the signal light has different light intensities after passing through the filter component 12.

[0094] In this embodiment, the detector 11 is used to detect the signal light transmitted by the light-transmitting area 120 or the signal light collected by the light collecting component 10, and obtain the detection information of the surface of the object to be detected according to the signal light. Optionally, the detector 11 is a linear array detector.

[0095] In an embodiment of the present invention, when the optical detection system detects targets to be detected of different sizes, the corresponding light-transmitting area 120 on the filter component 12 can be moved to the optical path between the light collecting component 10 and the detector 11, so that the signal light has corresponding characteristics after passing through the filter component 12, so that the signal light with the corresponding characteristics can be detected by the detector 11, and detection information of the surface of the object to be detected 2 can be obtained based on the signal light, and then the object to be detected 2 can be detected by different detection devices, thereby realizing the detection of targets to be detected of different sizes, which not only improves the size range of the optical detection system to detect the target to be detected, that is, the detection range, but also improves the detection accuracy of the optical detection system.

[0096] For example, when detecting a large-sized target to be detected, since the signal light generated by the large-sized target to be detected has a strong light intensity, the light-transmitting area 120 with relatively small light transmittance is moved to the optical path between the light collecting component 10 and the detector 11, so that the signal light has a smaller light intensity after passing through the light-transmitting area 120, thereby preventing the detector 11 from being saturated due to the excessive light intensity of the signal light, resulting in image distortion, that is, a clear image can be obtained through the detector 11; when detecting a small-sized target to be detected, since the signal light generated by the small-sized feature has a weak light intensity, a detector group without a filtering device is used for detection to obtain accurate detection information.

[0097] In the embodiment of the present invention, Figure 4 As shown, the filter assembly 12 is a circular assembly, which rotates around the center of the circle to move different light transmission areas 120 to the optical path between the light collection assembly 10 and the detector 11. Of course, the present invention is not limited thereto, and in other embodiments, the filter assembly 12 may also be a square assembly, which moves in a direction perpendicular to the optical path between the light collection assembly 10 and the detector 11 to move different light transmission areas 120 to the optical path between the light collection assembly 10 and the detector 11.

[0098] In the embodiment of the present invention, the filter assembly 12 can be moved manually or automatically by a controller. Optionally, in one embodiment of the present invention, a controller is further included, which is used to control the corresponding light-transmitting area 120 to move to the light path between the light collecting assembly 10 and the detector 11 according to the signal light detected by the detector 11.

[0099] That is to say, when performing detection, first move any light-transmitting area 120 of the filter component 12 to the optical path between the light collecting component 10 and the detector 11, or, do not first move the filter component 12 to the optical path between the light collecting component 10 and the detector 11, detect the signal light through the detector 11, obtain an image, and send the image information to the controller, the controller determines whether the intensity of the signal light is too strong based on the image information, and if so, selects a suitable light-transmitting area 120 based on the light intensity, and then the controller rotates the filter component 12 through a robotic arm or a motor, so that the selected light-transmitting area 120 moves to the optical path between the light collecting component 10 and the detector 11 to obtain a clear image.

[0100] Optionally, the light-transmitting area 120 in the embodiment of the present invention includes a first light-transmitting area and / or a second light-transmitting area and / or a third light-transmitting area. The first light-transmitting area has an attenuation plate, and the light transmittance of the attenuation plates in different first light-transmitting areas is different. The second light-transmitting area is a hollow area, or the second light-transmitting area has a transparent plate such as a transparent glass plate. The third light-transmitting area has a first polarizer.

[0101] Optionally, in the embodiment of the present invention, the light transmittance of the attenuation sheet ranges from 0.1% to 0.5%. For example, when the signal light intensity is too strong, the first light-transmitting area with relatively large light transmittance can be selected, and when the signal light intensity is not too strong, the first light-transmitting area with relatively small light transmittance can be selected.

[0102] In addition, when the size of the target to be detected is small and the intensity of the signal light is weak, it is more conducive to clear imaging without light attenuation, that is, without passing through the attenuation plate. At this time, the second light-transmitting area can be moved to the optical path between the light collecting component 10 and the detector 11. When the size of the target to be detected is large and the intensity of the signal light is strong, not performing light attenuation will lead to image saturation distortion. At this time, the first light-transmitting area can be moved to the optical path between the light collecting component 10 and the detector 11. When the background stray light of the signal light is strong, in order to suppress the background stray light and improve the signal-to-noise ratio of feature detection, the third light-transmitting area can be moved to the optical path between the light collecting component 10 and the detector 11. Of course, the present invention is not limited to this. In other embodiments, the light-transmitting area 120 may also include other light-transmitting areas with other optical films, which will not be described one by one here.

[0103] Optionally, when both the first detection device and the second detection device include a filter assembly, and the light transmittances of the light-transmitting areas 120 on the filter assemblies in the first detection device and the second detection device are different, the first detection device and the second detection device may be two detection devices 1 with symmetrical optical paths, such as Figure 3 The detection device 1 with the optical path L2 is the first detection device, and the detection device 1 with the optical path L4 is the second detection device.

[0104] For example, the light transmittance range of the light-transmitting area 120 of the filter component of the first detection device is (R1, R2), and the light intensity range of the transmitted signal light is (I1, I2). The detector 11 of the first detection device can clearly image the signal light with a light intensity range of (I1, I2). The light transmittance range of the light-transmitting area 120 of the filter component of the second detection device is (R2, R3), and the light intensity range of the transmitted signal light is (I2, I3). The detector 11 of the second detection device can clearly image the signal light with a light intensity range of (I2, I3). Then, the imaging range of the entire optical detection system is (I1, I3). Therefore, the optical detection system provided in the embodiment of the present invention has a large dynamic detection range, can simultaneously detect features of different sizes on the surface of the object 2 to be detected, and has high accuracy.

[0105] In another embodiment of the present invention, the optical path of the first detection device and the optical path of the second detection device are symmetrically arranged along the incident plane of the detection light, such as Figure 3 As shown, the detection device 1 with an optical path of L2 is the first detection device, and the detection device 1 with an optical path of L4 is the second detection device, or the detection device 1 with an optical path of L1 is the first detection device, and the detection device 1 with an optical path of L5 is the second detection device.

[0106] By arranging the first detection device and the second detection device to have detection channels with different detection ranges, the detection dynamic range of the optical detection system can be improved.

[0107] Wherein, both the first detection device and the second detection device include a filter component 12, and the filter component 1212 of at least one of the first detection device and the second detection device has a second light-transmitting area. Alternatively, only one of the first detection device and the second detection device includes a filter component 12, and the filter component 12 does not have a second light-transmitting area; wherein the second light-transmitting area is a hollow area, or a transparent sheet is provided in the second light-transmitting area.

[0108] Since the optical path of the first detection device and the optical path of the second detection device are symmetrically arranged along the incident plane of the detection light, the intensity of the signal light on the optical path of the first detection device is similar to or the same as the intensity of the signal light on the optical path of the second detection device. Based on this, the dynamic detection range of the optical detection system can be improved by setting a second light-transmitting area on the filter component 12 of at least one detection device, or by setting a filter component 12 without a second light-transmitting area in one of the detection devices and not setting a filter component in the other detection device.

[0109] In another embodiment of the present invention, Figure 6As shown, at least one of the first detection device and the second detection device includes a filter component, such as the first detection device includes a filter component and / or the second detection device includes a filter component, and the light collecting component 10 in the first detection device and the light collecting component 10 in the second detection device are the same light collecting component, and the optical detection system also includes an optical spectrometer 13, wherein the detector 11 in the first detection device includes a first detector 110, and the detector 11 in the second detection device includes a second detector 111.

[0110] Among them, the optical splitter component 13 is arranged on the output light path of the light collecting component 10, and is used to split the signal light emitted by the light collecting component 10 into a first signal light and a second signal light with different light paths. In this embodiment, the optical splitter component 13 includes a semi-transparent and semi-reflective mirror, and the transmittance and reflectance of the semi-transparent and semi-reflective mirror are the same; the filter component 12 is arranged between the splitter component 13 and the detector 11, such as the filter component 12 and the first detector 110 are arranged in sequence on the light path of the first signal light, the first detector 110 is used to detect the first signal light transmitted by any light-transmitting area on the filter component 12, and obtain detection information of the surface of the object to be measured based on the first signal light; the second detector 111 is arranged on the light path of the second signal light, and is used to detect the second signal light, and obtain detection information of the surface of the object to be measured based on the second signal light, or the filter component and the second detector are arranged in sequence on the light path of the second signal light, and the second detector is used to detect the first signal light transmitted by any light-transmitting area on the filter component, that is, the first signal light reaching the first detector and the second signal light reaching the second detector have different light intensities.

[0111] It should be noted that the first signal light can be a signal light emitted in a direction perpendicular to the surface of the object to be measured, or a signal light emitted in a direction at a certain angle to the surface of the object to be measured. In other words, the filter component 12 can be set in the optical path of the first signal light, or in the optical path of the second signal light, and the present invention is not limited to this.

[0112] In addition, in the embodiment of the present invention, only one optical beam splitter element 13 may be provided, or a plurality of optical beam splitters 13 may be provided to split the signal light into more beams, thereby further improving the dynamic detection range of the detection device 1 .

[0113] In another embodiment, the optical splitting component includes a semi-transparent and semi-reflective mirror, and the transmittance and reflectivity of the semi-transparent and semi-reflective mirror are different. The light intensity of the first signal light formed after the signal light is split by the semi-transparent and semi-reflective mirror is different from the light intensity of the second signal light. The first detector is used to detect the first signal light, and the second detector is used to detect the second signal light, that is, the first signal light reaching the first detector and the second signal light reaching the second detector have different light intensities.

[0114] In another embodiment of the present invention, the detection component collects signal light on the surface of the object to be measured, and the signal light propagation direction forming the first signal light and the signal light propagation direction forming the second signal light are symmetrical about the incident plane of the detection light beam, or the detection component includes a spectroscopic component, and the spectroscopic component makes the light intensity of the first signal light the same as the light intensity of the second signal light. At this time, the light intensity of the first signal light received by the first detector is the same as or similar to the light intensity of the second signal light received by the second detector, and the union of the first detection range of the first detector and the second detection range of the second detector is greater than the first detection range, and the union of the first detection range and the second detection range is greater than the second detection range, that is, the first detection range of the first detector is different from the second detection range of the detector of the second detection device, that is, the sensitivities of the first detector and the second detector are different, and at least one detector can form accurate detection information of the target to be detected on the surface of the object to be measured, thereby expanding the detection range of the detection system.

[0115] The embodiment of the present invention further provides an optical detection method, which is applied to the optical detection system provided in any of the above embodiments. Figure 7 As shown, the optical detection method includes:

[0116] S101: enabling the lighting assembly to emit a detection light beam to the object to be measured, and the detection light beam is scattered by the surface of the object to be measured to form a signal light;

[0117] S102: enabling the detection component to collect the signal light and form a first signal light and a second signal light;

[0118] S103: receiving a first signal light emitted from the surface of the object to be detected by a first detection device, and obtaining first detection information according to the first signal light;

[0119] S104: receiving a second signal light emitted from the surface of the object to be detected by a second detection device, and obtaining second detection information according to the second signal light;

[0120] S105: enabling the processing system to obtain the size of the target to be detected on the surface of the object to be detected according to the first detection information and the second detection information.

[0121] The propagation direction of the signal light forming the first signal light is symmetrical with the propagation direction of the signal light forming the first signal light about the incident plane of the detection light beam; or the detection component further includes a beam splitting component, which splits the signal light into the first signal light and the second signal light;

[0122] In addition, the first detection device has a light intensity range of a first range, the first range is the light intensity range of the signal light collected by the detection component, the second detection device has a light intensity range of a second range, the second range is the light intensity range of the signal light collected by the detection component, and the method also includes: making the union of the first range and the second range greater than the second range and greater than the second range.

[0123] That is to say, in the embodiment of the present invention, after the detection light beam is emitted to the object to be measured by the lighting component, the detection light beam is scattered and reflected by the surface of the object to be measured to form a signal light, and the signal light is collected by the detection component to form a first signal light and a second signal light. The first signal light emitted from the surface of the object to be measured is received by the first detection device, and the detection information of the surface of the object to be measured is obtained according to the first signal light. The second signal light emitted from the surface of the object to be measured is received by the second detection device, and the detection information of the surface of the object to be measured is obtained according to the second signal light. It has the following beneficial effects:

[0124] In a first aspect, by arranging the first detection device and the second detection device to receive the first signal light and the second signal light respectively, the range of the detection device to detect the size of the target to be detected on the surface of the object to be detected is expanded.

[0125] On the second aspect, since the first detection device has a light intensity range of the first range, the second detection device has a light intensity range of the second range, and the union of the first range and the second range is greater than the first range and greater than the second range, the range of the signal light intensity detected by the optical detection system is expanded. When the size of the target to be detected on the surface of the object to be detected is large, the signal light intensity generated is large; when the size of the target to be detected on the surface of the object to be detected is small, the signal light intensity generated is small. If a single-range detection device is used, the target to be detected may be missed or overexposed, reducing the detection accuracy. Therefore, the present invention can detect targets of different sizes at the same time by setting the first detection device and the second detection device, and the detection accuracy and detection efficiency are both high.

[0126] Optionally, when the detection device includes a filter component, it also includes: adjusting the intensity range of the signal light received by the detection device through the filter component.

[0127] In an embodiment of the present invention, the filter assembly includes multiple light-transmitting areas, and different light-transmitting areas have different light transmittances. By moving different light-transmitting areas to the optical path between the light collecting assembly and the detector, the signal light has different light intensities after passing through the filter assembly.

[0128] In an embodiment of the present invention, when the optical detection system detects targets to be detected of different sizes, the corresponding light-transmitting area on the filter component can be moved to the optical path between the light collecting component and the detector, so that the signal light has a corresponding light intensity after passing through the filter component, so that the signal light with the corresponding light intensity can be detected by the detector, and a clear image with detection information of the surface of the object to be detected can be obtained based on the signal light, and then the object to be detected can be detected by different detection devices, so as to achieve clear imaging of targets to be detected of different sizes, which not only improves the size range of the optical detection system for detecting the target to be detected, that is, the detection range, but also improves the detection accuracy of the optical detection system.

[0129] For example, when detecting large-sized defects, since the intensity of the signal light generated by the large-sized defects is relatively strong, the light-transmitting area with relatively small light transmittance is moved to the optical path between the light collecting component and the detector, so that the signal light has a smaller light intensity after passing through the light-transmitting area, thereby preventing the detector from being saturated due to the excessive intensity of the signal light, resulting in image distortion, that is, a clear image can be obtained through the detector; in addition, the signal light can be detected by a detection device with lower sensitivity, that is, a larger range of signal light intensity detection, to obtain a clear image; when detecting small-sized defects, since the intensity of the signal light generated by small-sized defects is relatively weak, a detector group without a filtering device is used for detection, so that a clear image can be obtained; in addition, the signal light can be detected by a detection device with higher sensitivity, to obtain a clear image.

[0130] Optionally, the optical detection method in the embodiment of the present invention obtains the size of the target to be detected on the surface of the object to be detected according to the first detection information and the second detection information, including:

[0131] When one of the first detection information and the second detection information includes the detection information of the object to be detected, acquiring the size of the object to be detected according to the detection information of the object to be detected;

[0132] When both the first detection information and the second detection information include the detection information of the to-be-detected object, the size of the to-be-detected object is acquired according to one or a combination of the first detection information and the second detection information.

[0133] That is to say, when the size of the target to be detected is large, the signal light generated by the target to be detected only forms detection information in the detection device with a large response range, and the size of the target to be detected is obtained based on the detection information; and when the size of the target to be detected is small, the signal light generated by the target to be detected only forms detection information in the detection device with a small response range, and the size of the detected target is obtained based on the detection information.

[0134] Since the first detection device and the second detection device have different intensity ranges of signal light in response to the detection component, the first detection device and the second detection device have different detection results for the target to be detected of the same size on the surface of the object to be detected. At this time, it is necessary to determine which detection device's detected size is selected as the size of the target to be detected according to the size of the target to be detected; in this embodiment, when the first size obtained by the first detection information is within the first preset range, the first size is obtained as the size of the target to be detected; when the second size obtained by the first detection information is within the second preset range, the second size is obtained as the size of the target to be detected.

[0135] When the signal light generated by the target to be detected can simultaneously form detection information in the detection device with a large response range and a small impact range, the size of the target to be detected is obtained according to one of the two detection information or a combination of the two.

[0136] Specifically, obtaining the size of the target to be detected according to one or a combination of the first detection information and the second detection information includes:

[0137] Acquire a first size of the target to be detected according to the first detection information;

[0138] Acquire a second size of the object to be detected according to the second detection information;

[0139] When the first size is within a first preset range, the first size is obtained as the size of the object to be detected; when the second size is within a second preset range, the first size is obtained as the size of the object to be detected.

[0140] Since the first detection device and the second detection device correspond to different ranges of signal light intensities collected by the detection components, when the first detection device and the second detection device simultaneously detect targets to be detected of the same size on the surface of the object to be detected, the first size and the second size of the detected target obtained in the first detection information and the second detection information are different; when the first size is within the first preset range, the first size is obtained as the size of the target to be detected, and when the second size is within the second preset range, the second size is obtained as the size of the target to be detected.

[0141] In this embodiment, the first detection information includes the intensity of the first signal light; the second detection information includes the intensity of the second signal light. Acquiring the first size of the target to be detected according to the first detection information includes: acquiring the intensity of the first signal light according to the first detection information; acquiring the first size d1 of the target to be detected according to the intensity I1 of the first signal light;

[0142]

[0143] Acquiring a second size of the target to be detected according to the second detection information includes: acquiring the intensity of the second signal light according to the second detection information; and acquiring a second size d2 of the target to be detected according to the intensity I1 of the second signal light.

[0144] In other embodiments, the first detection information includes a first image of the object to be detected; when the number of image pixels of the object to be detected in the first image is less than a first threshold, obtaining the first size of the target to be detected according to the first detection information includes: obtaining the light intensity of the first light beam according to the image grayscale value of the target to be detected in the first image; obtaining the first size according to the light intensity of the first light beam; when the image pixels of the object to be detected in the first image are greater than a first threshold, obtaining the first size of the target to be detected according to the first detection information includes: obtaining the first size according to the number of image pixels of the target to be detected in the first image; the first threshold is 1 to 5, for example 1.

[0145] The second detection information includes a second image of the object to be detected; when the number of image pixels of the object to be detected in the second image is less than a second threshold, obtaining the second size of the object to be detected according to the second detection information includes: obtaining the light intensity of the second light beam according to the image grayscale value of the object to be detected in the second image; obtaining the second size according to the light intensity of the second light beam; when the image pixels of the object to be detected in the second image are greater than the second threshold, obtaining the second size of the object to be detected according to the second detection information includes: obtaining the second size according to the number of image pixels of the object to be detected in the first image; the second threshold is 1 to 5, for example 1.

[0146] In this specification, each embodiment is described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the embodiments can be referred to each other. For the device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant parts can be referred to the method part.

[0147] The above description of the disclosed embodiments enables one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An optical detection system, characterized in that: include: An illumination component, wherein the illumination component is configured to emit a detection light beam to the object to be detected, wherein the detection light beam is scattered and / or reflected by a surface of the object to be detected to form a signal light; A detection component, used to collect the signal light and form a first signal light and a second signal light; the detection component includes a plurality of detection devices, each of which includes a light collecting component and a detector, the light collecting component is used to collect the signal light emitted from the surface of the object to be measured, and the detector is used to detect the signal light collected by the light collecting component; the plurality of detection devices include a first detection device and a second detection device; At least one of the first detection device and the second detection device further comprises a filter assembly, and the detector receives a light beam passing through the filter assembly; the filter assembly comprises a plurality of light-transmitting areas, and different light-transmitting areas have different light transmittances, so that by moving different light-transmitting areas to an optical path, the signal light has different light intensities after passing through the filter assembly, so as to form a first signal light or a second signal light through the filter assembly; The first detection device is used to receive the first signal light and obtain first detection information according to the first signal light; The second detection device is used to receive the second signal light and obtain second detection information according to the second signal light; A processing system, used for obtaining the size of the target to be detected on the surface of the object to be detected according to the first detection information and the second detection information; wherein a propagation direction of the signal light forming the first signal light and a propagation direction of the signal light forming the second signal light are symmetrical with respect to the incident plane of the detection light beam; The first detection device has a light intensity range of a first range, which is the light intensity range of the signal light collected by the detection component. The second detection device has a light intensity range of a second range, which is the light intensity range of the signal light collected by the detection component. The union of the first range and the second range is greater than the first range and greater than the second range.

2. The optical detection system according to claim 1, characterized in that: The first detection device includes a first detector, and the first detector is used to detect the first signal light; The second detection device includes a second detector, and the second detector is used to detect the second signal light; The first detector has a light intensity range of a first detection range, which is a light intensity range of a first signal light reaching the first detector for detection; the second detector has a light intensity range of a second detection range, which is a light intensity range of a second signal light reaching the second detector for detection.

3. The optical detection system according to claim 2, characterized in that: The propagation direction of the signal light forming the first signal light and the propagation direction of the signal light forming the second signal light are symmetrical with respect to the incident plane of the detection light beam; The union of the first detection range and the second detection range is larger than the first detection range, and the union of the first detection range and the second detection range is larger than the second detection range.

4. The optical detection system according to claim 2, characterized in that: The union of the first detection range and the second detection range is equal to the first detection range, or the union of the first detection range and the second detection range is equal to the second detection range; The first signal light reaching the first detector and the second signal light reaching the second detector have different light intensities.

5. The optical detection system according to claim 1, characterized in that: The filter component is arranged between the signal light collecting component and the detector.

6. The optical detection system according to claim 1, characterized in that: The light-transmitting area includes a first light-transmitting area and / or a second light-transmitting area and / or a third light-transmitting area; The first light-transmitting area has an attenuation sheet, and different attenuation sheets in the first light-transmitting area have different light transmittances; The second light-transmitting area is a hollow area, or a transparent sheet is provided in the second light-transmitting area; The third light-transmitting area has a first polarizer.

7. The optical detection system according to claim 6, characterized in that: The transmittance of the attenuation sheet is 0.1% to 0.5%.

8. The optical detection system according to claim 1, characterized in that: The first detection information includes the intensity of the first signal light or the image of the object to be detected; the second detection information includes the intensity of the second signal light or the image of the object to be detected.

9. An optical detection method, characterized in that: Applicable to the optical detection system according to any one of claims 1 to 7, the detection method comprising: The lighting assembly emits a detection light beam to the object to be measured, and the detection light beam is scattered and / or reflected by the surface of the object to be measured to form a signal light; Enable the detection component to collect the signal light and form a first signal light and a second signal light; Receiving a first signal light emitted from the surface of the object to be detected by a first detection device, and acquiring first detection information according to the first signal light; Receiving a second signal light emitted from the surface of the object to be detected by a second detection device, and obtaining second detection information according to the second signal light; enabling a processing system to obtain a size of a target to be detected on the surface of the object to be detected according to the first detection information and the second detection information; wherein a propagation direction of the signal light forming the first signal light and a propagation direction of the signal light forming the second signal light are symmetrical with respect to the incident plane of the detection light beam; The optical detection system includes: a detection device, which is used to collect the signal light and form a first signal light and a second signal light; the detection component includes a plurality of detection devices, each of which includes a light collecting component and a detector, the light collecting component is used to collect the signal light emitted from the surface of the object to be detected, and the detector is used to detect the signal light collected by the light collecting component; the plurality of detection devices include a first detection device and a second detection device; at least one of the first detection device and the second detection device also includes a filter component, and the detector receives a light beam passing through the filter component; the filter component includes a plurality of light-transmitting areas, and different light-transmitting areas have different light transmittances, so that by moving different light-transmitting areas to the optical path, the signal light has different light intensities after passing through the filter component, so as to form the first signal light or the second signal light through the filter component; The first detection device has a light intensity range of a first range, the first range is the light intensity range of the signal light collected by the detection component, the second detection device has a light intensity range of a second range, the second range is the light intensity range of the signal light collected by the detection component, and the method also includes: making the union of the first range and the second range greater than the second range and greater than the second range.

10. The method according to claim 9, characterized in that Acquiring the size of the target to be detected on the surface of the object to be detected according to the first detection information and the second detection information, including: When one of the first detection information and the second detection information includes the detection information of the object to be detected, acquiring the size of the object to be detected according to the detection information of the object to be detected; When both the first detection information and the second detection information include the detection information of the to-be-detected object, the size of the to-be-detected object is acquired according to one or a combination of the first detection information and the second detection information.

11. The method according to claim 10, characterized in that Acquiring the size of the target to be detected according to one or a combination of the first detection information and the second detection information, including: Acquire a first size of the target to be detected according to the first detection information; Acquire a second size of the object to be detected according to the second detection information; When the first size is within a first preset range, acquiring the first size as the size of the object to be detected; When the second size is within a second preset range, the first size is acquired as the size of the object to be detected.

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