Light sensing assembly differential spectral responsivity test system and method

Abstract

The application provides a kind of optical sensing component differential spectral responsivity test system, belongs to the technical field of spectral responsivity test, comprising: modulation light source, for emitting modulation light;Bias light source, for emitting bias light, bias light and modulation light form superimposed light;Standard optical sensing module, obtains the standard value of superimposed light intensity;Measured optical sensing module, obtains the measured value of superimposed light intensity;Signal and control unit calculates the differential spectral responsivity of measured optical sensing module under superimposed light.The application also provides a kind of optical sensing component differential spectral responsivity test method, solves the problem that the test method under darkroom condition in prior art is difficult to test and calibrate the spectral responsivity of optical sensing component under actual application scene condition, realizes the spectral responsivity of measured optical sensing module in the case of background light, and evaluates the anti-interference ability of measured optical sensing module.

Description

Technical Field

[0001] This invention relates to the field of optical sensing component testing technology, and in particular to a system and method for testing the spectral responsivity of optical sensing components. Background Technology

[0002] Optical sensors, such as photodiodes (including single-point and linear array types), CCD image sensors, CMOS image sensors, and thermal image sensors, typically exhibit spectral selectivity in their responsivity to optical radiation signals. For this type of optical sensor, its spectral responsivity usually needs to be measured and calibrated before use. The formula for calculating spectral responsivity is S = R / E, where S is the spectral responsivity, E is the intensity value of the target light source in a specific wavelength band, and R is the measured value of the optical sensor. E and R are generally expressed using physical quantities and units from fields such as radiometry and photometry, such as radiant power (Φ). e (unit: J / s) Radiance (E) e Unit W / m 2 ), luminous flux (Φ v (unit: lm), illuminance (E) v (unit: lx), temperature (unit: ℃, K), etc.

[0003] Since ambient light, stray light, and other ambient light often interact with the target, in applications such as machine vision and security monitoring, this may cause changes in image characteristics such as target color, contrast, and saturation. This can lead to problems such as decreased target recognition rate or recognition errors in this type of optical sensor, and may also cause changes in the response characteristics of the optical sensor.

[0004] However, existing methods for testing the spectral responsivity of optical sensors and components are typically performed in darkroom conditions. This is because darkroom conditions eliminate the influence of ambient light sources, allowing testing of the optical sensors using only a stable light source in a specific wavelength range. Currently, no effective method exists for testing and calibrating the spectral responsivity of such sensors and components under ambient light conditions. Summary of the Invention

[0005] This invention provides a differential spectral responsivity testing system and method for optical sensing components. It solves the problem that existing testing methods under darkroom conditions are difficult to test and calibrate the spectral responsivity of optical sensors under actual application scenarios. It enables the calibration of the spectral responsivity of the optical sensing module under test and the evaluation of the anti-interference ability of the optical sensing module under test in the presence of background light. It helps to provide guidance for the production, manufacturing and use of various optical sensing components such as cameras and spectrometers.

[0006] This invention provides a differential spectral responsivity testing system for an optical sensing component, comprising: a modulation light source for generating modulated light of variable intensity; a bias light source for generating background light of stable intensity, wherein the background light and the modulation light are superimposed by an optical path superimposed unit to form superimposed light; an optical sensing component including a standard optical sensing module and a measured optical sensing module, wherein the standard optical sensing module is calibrated or traced to obtain a standard value of the superimposed light intensity, and the measured optical sensing module is used to obtain a measured value of the superimposed light intensity; and a signal and control unit connected to the modulation light source, the bias light source, the standard optical sensing module, and the measured optical sensing module.

[0007] Under the condition of superimposed light, the signal and control unit obtains the difference between the standard light intensity values ​​of the superimposed light in the high and low states through the standard light sensing module, and obtains the difference between the measured light intensity values ​​of the superimposed light in the high and low states through the light sensing module under test, and calculates the differential spectral responsivity of the light sensing module under test.

[0008] According to the present invention, a differential spectral responsivity testing system for an optical sensing component is provided, wherein the optical sensing component includes a spectroscopic optical sensing component and a non-spectroscopic optical sensing component.

[0009] According to the present invention, a differential spectral responsivity testing system for optical sensing components is provided. The spectroscopic optical sensing component includes an array spectrometer, a hyperspectral camera, and a multispectral camera, while the non-spectral optical sensing component includes a photodetector, a monochrome camera, and an infrared camera.

[0010] According to the present invention, a differential spectral responsivity testing system for an optical sensing component is provided, wherein the modulation light source includes a wide-spectrum modulation light source and a narrow-spectrum modulation light source, and the bias light source includes a wide-spectrum bias light source and a narrow-spectrum bias light source.

[0011] According to the present invention, a differential spectral responsivity testing system for an optical sensing component is provided. The standard optical sensing module includes a standard light receiver and a standard light sensor display, and the optical sensing module under test includes a light receiver and a light sensor display. The standard light receiver and the light receiver under test are used to filter and receive the superimposed light in a specified spatial region and wavelength band, exclude the superimposed light in other spatial regions and wavelength bands, and stray light. The standard light sensor display and the light sensor display under test are used to receive the superimposed light in the specified spatial region and wavelength band and convert it into the display value of the testing system.

[0012] This invention also provides a method for testing the differential spectral responsivity of an optical sensing component, using the aforementioned optical sensing component differential spectral responsivity testing system, comprising:

[0013] The standard optical sensing module acquires the standard value of the superimposed light intensity;

[0014] The measured light sensing module acquires the measured value of the superimposed light intensity;

[0015] The background light and the modulated light are superimposed to form the superimposed light;

[0016] Under the condition of superimposed light, the signal and control unit obtains the difference between the standard light intensity values ​​of the superimposed light in the high and low states through the standard light sensing module, and obtains the difference between the measured light intensity values ​​of the superimposed light in the high and low states through the light sensing module under test, and calculates the differential spectral responsivity of the light sensing module under test.

[0017] According to the present invention, a method for testing the differential spectral responsivity of an optical sensing component, wherein the background light and the modulation light are superimposed to form the superimposed light, specifically includes: setting the intensity of the bias light generated by the bias light source, setting the intensity of the modulation light generated by the modulation light source and its parameters changing with time, and setting the spatial distribution state of the bias light and the modulation light.

[0018] According to the present invention, a method for testing the differential spectral responsivity of an optical sensing component is provided, wherein the signal and control unit controls the standard optical sensing module and the optical sensing module under test to maintain synchronization with the modulation light source and the bias light source in terms of measurement timing, so as to achieve automated measurement.

[0019] According to the present invention, a method for testing the differential spectral responsivity of an optical sensing component is provided, wherein the signal and control unit controls the standard optical sensing module and the optical sensing module under test to maintain synchronization of the measurement timing with the modulation light source and the bias light source, including adjusting the trigger parameters, sampling start time and exposure time of the standard optical sensing module and the optical sensing module under test.

[0020] According to the present invention, a method for testing the differential spectral responsivity of an optical sensing component is provided, wherein the mathematical expression for the differential spectral responsivity of the optical sensing module under test is:

[0021]

[0022] ΔR=R(E b+m,high )-R(E b+m,low );

[0023] ΔE=E b+m,high -E b+m,low ;

[0024] in, R is the differential spectral responsivity of the measured optical sensing module, Δ is the difference in the physical quantity, and R is the measured value of the superimposed light intensity by the measured optical sensing module. b+m,high R(E) is the measured intensity of the superimposed light in a high-intensity state. b+m,low E is the measured intensity of the superimposed light in a low-intensity state; E is the standard value of the superimposed light intensity for the measured light sensing module. b+m,high E is the standard value of the intensity of the superimposed light in a high-intensity state. b+m,low This is the standard value of the intensity of the superimposed light in a low light intensity state.

[0025] This invention provides a differential spectral responsivity testing system and method for optical sensing components. By superimposing background light and modulation light to form superimposed light, the standard and tested optical sensing modules acquire standard and measured values ​​of the superimposed light intensity, respectively. The signal and control unit obtains the standard and measured values ​​of the corresponding high and low state differences of the superimposed light and calculates the differential spectral responsivity. The differential spectral responsivity is analyzed and compared with the spectral responsivity under traditional darkroom conditions to determine whether there is nonlinear distortion and whether the response of the tested optical sensing module to the modulation light is interfered with or affected by the presence of bias light. This solves the problem in existing technologies where testing methods under darkroom conditions are difficult to use for testing and calibrating the spectral responsivity of optical sensors under actual application scenarios. It enables the calibration of the spectral responsivity of the tested optical sensing module and the evaluation of its anti-interference capability under background light conditions, providing guidance for the production, manufacturing, and use of various optical sensing components such as cameras and spectrometers. Attached Figure Description

[0026] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0027] Figure 1 This is an overall schematic diagram of the differential spectral responsivity testing system for optical sensing components provided in an embodiment of the present invention;

[0028] Figure 2 This is a schematic diagram of an optical path superimposed device according to a certain embodiment of the present invention (arrows in the figure represent light rays);

[0029] Figure 3 This is a schematic diagram of an optical path superimposed device according to a certain embodiment of the present invention (arrows in the figure represent light rays);

[0030] Figure 4This is a flowchart of the steps of the differential spectral responsivity test method for optical sensing components provided in the embodiments of the present invention.

[0031] Figure label:

[0032] 10. Modulated light source; 20. Bias light source; 310. Standard light sensor module; 311. Standard light receiver; 312. Standard light sensor display; 320. Light sensor module under test; 321. Light receiver under test; 322. Light sensor display; 40. Signal and control unit; 50. Mounting and adjustment base; 60. Optical path superimposition device. Detailed Implementation

[0033] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.

[0034] In the description of the embodiments of the present invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of the present invention based on the specific circumstances.

[0035] In the description of this invention, it should be understood that the terms "left," "right," "front," "rear," "up," "down," "positive," "negative," "clockwise," and "counterclockwise," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0036] The following is combined Figures 1 to 4 This invention describes a differential spectral responsivity testing system for optical sensing components. This system is applicable to optical sensors and components such as photodiodes, CCD image sensors, CMOS image sensors, and infrared thermal radiation image sensors.

[0037] See Figure 1The present invention provides a differential spectral responsivity testing system for optical sensing components, including a modulation light source 10, a bias light source 20, an optical sensing component 30, a signal and control unit 40, a mounting and adjustment base 50, and an optical path superimposition unit 60.

[0038] Specifically, the modulation light source 10 emits modulated light of variable intensity, and the bias light source 20 emits background light of stable intensity. The background light and the modulated light are superimposed by the optical path superimposed unit 60, meaning they are spatially superimposed. The optical sensing component 30 includes a standard optical sensing module 310 and a measured optical sensing module 320. The standard optical sensing module 310 obtains the standard value of the superimposed light through metrological verification or calibration, and the measured optical sensing module 320 obtains the measured value of the superimposed light intensity. Specifically, the standard optical sensing module 310 and the measured optical sensing module 320 convert the optical signal into a display value of the test system after photoelectric conversion and analog-to-digital conversion. The display value of the standard optical sensor module 310 can be expressed using physical quantities and units in fields such as radiometry or photometry, while the display value of the measured optical sensing module 320 is expressed using its original signal value before responsivity measurement and calibration.

[0039] See Figure 1 The signal and control unit 40 is connected to the modulation light source 10, the bias light source 20, the standard light sensing module 310, and the light sensing module under test 320. The signal and control unit 40 calculates the difference between the standard values ​​of the superimposed light obtained by the standard light sensing module 310 in the high and low states, and the difference between the measured values ​​of the superimposed light obtained by the light sensing module under test 320 in the high and low states, and calculates the differential spectral responsivity of the light sensing module under test 320.

[0040] In some specific embodiments, the signal and control unit 40 can be used to synchronize the timing of the changes between the standard optical sensing module 310 and the optical sensing module under test with the modulation light source 10 in the two states of high and low, and simultaneously acquire the standard value and the measured value of the superimposed light; such a setting is conducive to the automation of the measurement process and to ensuring the simultaneity between signal output and reception.

[0041] In some other embodiments, manual operation can also be performed when stability and accuracy are sufficient: the output intensity of the bias light source 20 is set to a constant value, and the modulation light source 10 is adjusted to output at both high and low intensities, respectively, controlling the standard light sensing module 310 and the measured light sensing module 320 to acquire the standard value and measured value of the superimposed light, respectively. For manual operation, the potential impact of factors such as changes in light intensity and changes in the geometric position of the device during the measurement process on the measurement and calibration results should be fully anticipated in advance, and the relevant influence should be reduced to improve the accuracy, reliability, and reproducibility of the measurement and calibration process.

[0042] In summary, in practical applications, the standard optical sensing module 310 and the optical sensing module under test 320 are mounted on the mounting adjustment base 50. The modulation amplitude (the light intensity difference corresponding to the high and low states), modulation frequency, spectral passband width, and passband center wavelength of the modulation light source 10 are adjusted. The intensity and spectral distribution of the bias light source 20 are also adjusted. The optical path superimposed unit 60 is adjusted to adjust the propagation path of the superimposed light formed by the modulation light source 10 and the bias light source 20. The signal and control unit 40 is connected to the modulation light source 10, the bias light source 20, the standard optical sensing module 310, and the optical sensing module under test 320, thereby forming a differential spectral responsivity testing system for the optical sensing module under test 320.

[0043] The differential spectral responsivity testing system for optical sensing components in this invention can not only measure the spectral responsivity of the optical sensing module 320 under dark room conditions (i.e., no bias light, representing no ambient light influence) with only the modulated light source 10, but also measure the differential spectral responsivity of the optical sensing module 320 under conditions with bias light. By analyzing the differential spectral responsivity relative to the spectral responsivity under dark room conditions and whether there is nonlinear distortion, it determines whether the bias light interferes with or affects the differential spectral responsivity. This allows for the measurement and calibration of the spectral responsivity of the optical sensing module 320 and the evaluation of its anti-interference capability. This system solves the problem in existing technologies where testing methods under dark room conditions are difficult to use for testing and calibrating the spectral responsivity of optical sensors under actual application scenarios, and provides guidance for the production, manufacturing, and use of various optical sensing components such as cameras and spectrometers.

[0044] See Figure 1 In some specific embodiments, the optical sensing component 30 includes a spectroscopic optical sensing component and a non-spectral optical sensing component. The spectroscopic optical sensing component includes an array spectrometer, a hyperspectral camera, a multispectral camera, etc., while the non-spectral optical sensor includes a photodetector, a monochrome camera, an infrared camera, etc.

[0045] In practical applications, either spectrophotometric or non-spectrophotometric optical sensing components can be selected for measurement and calibration according to specific needs. For example, the standard optical sensing module 310 can be a photodetector, spectrometer, spectral or multi-channel radiance meter, etc., calibrated by a metrology institution, while the optical sensing module 320 being measured can be a multispectral camera, hyperspectral camera, surveillance camera, image sensor, infrared camera, etc.

[0046] See Figure 1The standard optical sensing module 310 includes a standard optical receiver 311 and a standard optical sensor display 312, while the optical sensor module under test 320 includes a light receiver under test 321 and a light sensor display 322. Specifically, the standard optical receiver 311 and the light receiver under test 321 are used to filter and receive superimposed light in a specified spatial region and wavelength band, exclude superimposed light in other spatial regions and wavelength bands, and stray light. The standard optical sensor display 312 and the light sensor display 322 are used to receive superimposed light in a specified spatial region and wavelength band and convert it into the display value of the test system.

[0047] In some embodiments, the modulation light source 10 includes a broadband modulation light source and a narrow-spectrum modulation light source, and the bias light source 20 includes a broadband bias light source and a narrow-spectrum bias light source, to meet the measurement and calibration requirements of the standard optical sensing module 310 and the optical sensing module under test 320 in both imaging and non-imaging modes. Specifically, the bias light source 20 can be a broadband light source or a narrow-spectrum light source, such as an LED, halogen lamp, or xenon lamp; the modulation light source 10 generally uses a narrow-spectrum light source, such as an LED or laser, to achieve spectral resolution, or it can be a combination of a narrow-spectrum filter and a broadband light source, with the narrow-spectrum filter filtering out light of a specific wavelength band from the broadband light source.

[0048] In some specific embodiments, the intensity of both the modulation light source 10 and the bias light source 20 can be continuously adjusted or adjusted in stages; the spectral range of both the modulation light source 10 and the bias light source 20 can be ultraviolet, visible, or infrared bands; both the modulation light source 10 and the bias light source 20 can form a superimposed light field that covers all or part of the effective photosensitive area of ​​the photosensitive component 30.

[0049] See Figures 1 to 3 In some specific embodiments, the optical path superimposed unit 60 can adopt the following structure to form superimposed light:

[0050] 1. The modulated light and the bias light reach a certain plane through free space to form superimposed light. This plane can be a wall, a receiving screen, the receiving surface of the light receiving path of the light sensing component 30, etc.

[0051] 2. The modulated light and the bias light are introduced into the integrating sphere and mixed to form superimposed light on a plane at a certain distance from the outlet of the integrating sphere;

[0052] 3. After passing through the optical fiber and the beam shaping optical path, the modulated light and the bias light form superimposed light on a plane at a certain distance from the exit of the beam shaping optical path.

[0053] See Figure 4 The embodiments of the present invention also provide a method for testing the spectral responsivity of an optical sensing component, employing the aforementioned differential spectral responsivity testing system for optical sensing components, including:

[0054] S100. Under the control of the signal and control unit 40, the state parameters of the modulation light source 10 and the bias light source 20 are adjusted, and the background light and the modulation light are superimposed light through the optical path superimposed unit 60.

[0055] S200. Under the condition of superimposed light, the standard light sensing module 310 obtains the standard value of the superimposed light intensity, and the light sensing module under test 320 obtains the measured value of the superimposed light intensity.

[0056] S300 and signal and control unit 40 obtain the difference between the standard values ​​of light intensity of superimposed light in high and low states through standard light sensing module 310, and signal and control unit 40 obtain the difference between the measured values ​​of light intensity of superimposed light in high and low states through measured light sensing module 320.

[0057] S400 and the signal and control unit 40 calculate the differential spectral responsivity of the optical sensing module 320 under test;

[0058] S500, repeat S100 to S400 to obtain the differential spectral responsivity of the optical sensing module 320 under different modulated light spectral distributions, until the differential spectral responsivity of all the bands to be investigated is covered.

[0059] In step S100, the bias light source 20 and the modulation light source 10 are superimposed to form superimposed light, which includes setting the intensity of the bias light generated by the bias light source 20, setting the intensity of the modulation light generated by the modulation light source 10 and its parameters changing with time, and setting the spatial distribution state of the bias light and the modulation light.

[0060] In some specific embodiments, the bias light 20 can be a light source that simulates indoor or outdoor lighting, such as a fluorescent lamp, an incandescent lamp, or simulated sunlight, and the modulated light source 10 can be monochromatic light with different bandwidths but the same center wavelength.

[0061] In step S200, the standard value and the measured value of the superimposed light intensity under the same state are acquired multiple times, which helps to improve the accuracy of the measurement results.

[0062] Furthermore, in steps S100 and S200, the signal and control unit 40 further includes controlling the standard optical sensing module 310 and the optical sensing module under test 320 to maintain the synchronization of the measurement timing with the modulation light source 10 and the bias light source 20, so as to realize automated measurement.

[0063] In some specific embodiments, the method of controlling timing synchronization includes adjusting the trigger parameters, sampling start time, and integration time of the standard optical sensing module 310 and the optical sensing module under test 320, so as to keep the signal consistent with the standard value and the measured value calculated by the control unit 40, which helps to improve the accuracy of the differential spectral responsivity measurement results.

[0064] On the other hand, in step S400, the mathematical expression for the differential spectral responsivity of the measured photosensitive module 320 is:

[0065]

[0066] ΔR=R(E b+m,high )-R(E b+m,low );

[0067] ΔE=E b+m,high -E b+m,low ;

[0068] in, R is the differential spectral responsivity of the measured optical sensing module 320, where Δ is the difference in physical quantities, R is the measured value of the superimposed light intensity by the measured optical sensing module 320, and R(E) is the differential spectral responsivity of the measured optical sensing module 320. b+m,high R(E) represents the measured intensity of the superimposed light in a high-intensity state. b+m,low E represents the measured intensity of the superimposed light under low light intensity conditions; E is the standard value of the superimposed light intensity for the measured light sensor module 320. b+m,high E is the standard value of the intensity of superimposed light in a high-intensity state. b+m,low This is the standard value of the intensity of superimposed light in a low light intensity state.

[0069] In summary, by adopting the above technical solution, background light and modulated light are superimposed to form superimposed light with specific spectral and spatial distributions. The standard light sensing module 310 and the light sensing module under test 320 respectively acquire the standard value and the measured value of the superimposed light intensity. The signal and control unit 40 obtains the difference between the standard value of the superimposed light intensity in the high and low states and the difference between the measured value of the superimposed light intensity in the high and low states, and calculates the differential spectral responsivity of the light sensing module under test 320.

[0070] Ideally, the differential spectral responsivity of the light sensor module 320 under test is consistent with that under traditional darkroom conditions; however, the presence of bias light may cause a difference between the two. By analyzing the difference between the differential spectral responsivity and the spectral responsivity under darkroom conditions, and whether there is nonlinear distortion, it is determined whether the bias light interferes with and affects the spectral responsivity of the light sensor module 320 under test. This allows for the measurement and calibration of the spectral responsivity of the light sensor display terminal 320 under test, and the evaluation of the interference immunity of the light sensor module 320 under test.

[0071] In addition, the relationship between the differential spectral responsivity of the measured optical sensing module 320 and the bias light intensity and modulation light intensity can be obtained.

[0072] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A differential spectral responsivity testing system for an optical sensing component, characterized in that, include: The modulated light source (10) produces modulated light with variable intensity; A biased light source (20) generates a background light with stable intensity, and the background light and the modulated light are combined into superimposed light through an optical path superimposed unit (60); The optical sensing component (30) includes a standard optical sensing module (310) and a measured optical sensing module (320). The standard optical sensing module (310) is used to obtain the standard value of the superimposed light intensity after metrological verification or calibration traceability. The measured optical sensing module (320) is used to obtain the measured value of the superimposed light intensity. The signal and control unit (40) is signal connected to the modulation light source (10), the bias light source (20), the standard light sensing module (310), and the light sensing module under test (320); Under the condition of superimposed light, the signal and control unit (40) obtains the difference between the standard values ​​of light intensity of the superimposed light in the high and low states through the standard light sensing module (310), and the signal and control unit (40) obtains the difference between the measured values ​​of light intensity of the superimposed light in the high and low states through the light sensing module under test (320). The differential spectral responsivity of the light sensing module under test (320) is calculated using the above two differences. The optical sensing component (30) includes a beam splitting optical sensing component and a non-beam splitting optical sensing component; The intensity of the modulation light source (10) and the bias light source (20) is continuously adjustable or adjusted in stages; the spectral range of the modulation light source (10) and the bias light source (20) is ultraviolet, visible and infrared bands; the modulation light source (10) and the bias light source (20) can both form a superimposed light field that covers all or part of the effective photosensitive area of ​​the light sensing component (30).

2. The differential spectral responsivity testing system for optical sensing components according to claim 1, characterized in that, The spectroscopic optical sensing component includes an array spectrometer, a hyperspectral camera, and a multispectral camera, while the non-spectral optical sensing component includes a photodetector, a monochrome camera, and an infrared camera.

3. The differential spectral responsivity testing system for optical sensing components according to claim 1, characterized in that, The modulation light source (10) includes a wide-spectrum modulation light source and a narrow-spectrum modulation light source, and the bias light source (20) includes a wide-spectrum bias light source and a narrow-spectrum bias light source.

4. The differential spectral responsivity testing system for optical sensing components according to claim 1, characterized in that, The standard optical sensing module (310) includes a standard optical receiver (311) and a standard optical sensing display (312), and the optical sensing module under test (320) includes a light receiver under test (321) and a light sensing display (322). The standard light receiver (311) and the light receiver under test (321) are used to filter and receive the superimposed light in a specified spatial region and band, exclude the superimposed light in other spatial regions and bands, and stray light. The standard light sensor display (312) and the light sensor display (322) are used to receive the superimposed light in a specified spatial region and band and convert it into the display value of the test system.

5. A method for testing the spectral responsivity of an optical sensing component, characterized in that, The differential spectral responsivity testing system for optical sensing components as described in any one of claims 1-4 includes: The standard optical sensing module (310) acquires the standard value of the superimposed light intensity; The measured light sensing module (320) acquires the measured value of the superimposed light intensity; The background light and the modulated light are superimposed to form the superimposed light; Under the condition of superimposed light, the signal and control unit (40) obtains the difference between the standard values ​​of light intensity of the superimposed light under two light intensity states through the standard light sensing module (310), and the signal and control unit (40) obtains the difference between the measured values ​​of light intensity of the superimposed light under two light intensity states through the light sensing module under test (320). The differential spectral responsivity of the light sensing module under test (320) is calculated using the above two differences.

6. The method for testing the spectral responsivity of an optical sensing component according to claim 5, characterized in that, The superimposed light formed by the superimposed background light and the modulated light specifically includes: setting the intensity of the background light generated by the bias light source (20), setting the intensity of the modulated light generated by the modulated light source (10) and its parameters changing with time, and setting the spatial distribution state of the background light and the modulated light.

7. The method for testing the spectral responsivity of a photosensitive component according to claim 5, characterized in that, The signal and control unit (40) controls the standard optical sensing module (310) and the optical sensing module under test (320) to maintain the synchronization of the measurement timing with the modulation light source (10) and the bias light source (20) to achieve automated measurement.

8. The method for testing the spectral responsivity of a photosensitive component according to claim 7, characterized in that, The signal and control unit (40) controls the standard light sensing module (310) and the light sensing module under test (320) to maintain the synchronization of the measurement timing with the modulation light source (10) and the bias light source (20), including adjusting the trigger parameters, sampling start time and exposure time of the standard light sensing module (310) and the light sensing module under test (320).

9. The method for testing the spectral responsivity of a photosensitive component according to any one of claims 5-8, characterized in that, The mathematical expression for the differential spectral responsivity of the measured photosensitive module (320) is: ； ； ； in, The differential spectral responsivity of the measured optical sensing module (320) is... For the difference of physical quantities, R The measured value of the superimposed light intensity by the measured optical sensing module (320) is... The measured value of the intensity of the superimposed light in the high light intensity state. This refers to the measured intensity of the superimposed light in a low-intensity state. The standard value of the superimposed light intensity is given by the standard optical sensing module (310). This is the standard value of the intensity of the superimposed light in a high-intensity state. This is the standard value of the intensity of the superimposed light in a low light intensity state.

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