High-precision auxiliary alignment device and alignment method for photoelectric autocollimation equipment

Abstract

The application provides a high-precision auxiliary alignment device and an alignment method for an optoelectronic autocollimator, and aims at solving the problem of low aiming accuracy in the existing laser coarse aiming auxiliary alignment method. The auxiliary alignment device comprises a rhombic prism, a corner cube mirror, a laser, a first light splitting prism and a second light splitting prism. The auxiliary alignment method is as follows: the translational position alignment of the optoelectronic autocollimator to be aligned to the aiming target is realized; the collimated light is divided into first reflected light and first transmitted light; the first reflected light is reflected by the corner cube mirror and then returns to the rhombic prism to form a reference image point; the first transmitted light is transmitted by the first light splitting prism to the surface of the aiming target, is reflected by the surface of the aiming target, and then is reflected by the second light splitting prism, and finally is reflected by the rhombic prism to form a measurement image point. The azimuth angle of the optoelectronic autocollimator to be aligned is adjusted until the measurement image point coincides with the reference image point, and the alignment is completed.

Description

TECHNICAL FIELD

[0001] The present application relates to photoelectric autocollimation equipment, and in particular to a high-precision auxiliary alignment device and method for photoelectric autocollimation equipment. BACKGROUND

[0002] High-precision angle measurement technology is widely used in high-end manufacturing, aerospace, precision assembly and other fields. Its measurement methods mainly include interference measurement method, circular grating measurement method and optical autocollimation measurement method. The interference measurement method has poor anti-interference ability and its measurement accuracy is difficult to guarantee. The circular grating measurement method has high measurement accuracy, but the measurement system cost is high. The optical autocollimation measurement method has high measurement accuracy, simple system and small equipment size, and can be flexibly arranged, so it is widely used in high-precision angle measurement engineering examples.

[0003] At present, the alignment of photoelectric autocollimation equipment and the target to be aimed in the optical autocollimation measurement method relies on the method of operator's naked eye observation and laser rough aiming assistance. However, the operator's naked eye observation is limited by the operator's experience, the alignment deviation of the translation position of the target to be aimed is large, and in the case of limited space at the optical outlet end of the photoelectric autocollimation equipment, naked eye observation cannot be directly performed. The auxiliary alignment device of the autocollimator in Chinese patent CN10393589A uses the auxiliary method of laser rough aiming. Although the auxiliary method has high indication accuracy for the translation position of the target to be aimed, the aiming accuracy is low because the auxiliary method uses the mechanical surface of the objective lens outlet to roughly guide the optical axis of the autocollimator, and the azimuth misalignment angle of the target to be aimed is usually more than 3 angular minutes. SUMMARY

[0004] The present application aims to solve the technical problem of low aiming accuracy in the existing laser rough aiming assistance alignment method, and provides a high-precision auxiliary alignment device and method for photoelectric autocollimation equipment.

[0005] In order to achieve the above-mentioned application purpose, the technical solution provided by the present application is as follows:

[0006] A high-precision auxiliary alignment device for photoelectric autocollimation equipment, characterized in that it comprises an inclined square prism, a corner cube mirror, a laser, a first light splitting prism and a second light splitting prism.

[0007] The second light splitting prism is located on the outgoing light path of the photoelectric autocollimation equipment to be aligned, and divides the outgoing light into first reflected light and first transmitted light.

[0008] The corner cube mirror is located on the light path of the first reflected light. The first reflected light is reflected by 180° after being folded by the corner cube mirror, and then transmitted through the second light splitting prism to form second transmitted light.

[0009] The first light splitting prism, the target to be aimed and the first transmitted light are sequentially located on the light path of the first transmitted light, the first transmitted light is transmitted through the first light splitting prism, reflected by the target to be aimed, returned to the second light splitting prism, and then reflected by the second light splitting prism to form the second reflected light;

[0010] The rhomboid prism is located on the light paths of the second transmitted light and the second reflected light;

[0011] The first light splitting prism is located on the light path of the laser emitted by the laser.

[0012] The emitted laser of the laser is reflected by the first light splitting prism to form a laser spot on the surface of the target to be aimed, which is used for the alignment of the target to be aimed in the translational position.

[0013] The second transmitted light forms a reference image point after 0° folding and translation by the rhomboid prism, and the second reflected light forms a measurement image point after 0° folding and translation by the rhomboid prism.

[0014] Further, the first light splitting prism and the second light splitting prism are both made of two identical right-angle prisms which are glued together, and the bevels of the right-angle prisms are coated with light splitting films.

[0015] Further, the light splitting film is a light splitting film which transmits 50% of the incident light energy and reflects 50% of the incident light energy.

[0016] Further, the apparatus further comprises a first light shield and a second light shield.

[0017] The first light shield is arranged outside the light path between the second light splitting prism and the rhomboid prism.

[0018] The second light shield is arranged outside the light path of the rhomboid prism, and the arrangement of the first light shield and the second light shield can prevent the introduction of stray light from interfering with the observation of the image points and improve the alignment accuracy.

[0019] Further, the apparatus further comprises a light splitting prism seat, a mounting seat and a non-removal screw.

[0020] The second light splitting prism, the first light splitting prism, the corner cube mirror, the laser and the first light shield are all arranged on the light splitting prism seat.

[0021] The light splitting prism seat and the first light shield are both arranged on the mounting seat.

[0022] The mounting seat is connected to the photoelectric autocollimator device to be aligned by the non-removal screw.

[0023] Further, the apparatus further comprises a battery box.

[0024] The battery box is arranged on the mounting seat and is used for supplying power to the laser.

[0025] Based on the high-precision auxiliary alignment device for the photoelectric autocollimator, the application further provides a high-precision auxiliary alignment method for the photoelectric autocollimator, which is characterized in that the method comprises the following steps:

[0026] 1】installing the auxiliary alignment device

[0027] The auxiliary alignment device is installed on the optical outlet end of the photoelectric autocollimator to be aligned.

[0028] 2】alignment of the translational position of the photoelectric autocollimator to be aligned to the target to be aimed at

[0029] The collimated light of the photoelectric autocollimator to be aligned is turned off, and the laser is turned on, so that the light beam emitted by the laser forms a laser spot on the surface of the target to be aimed at; the photoelectric autocollimator to be aligned, on which the auxiliary alignment device is installed, is translated so that the laser spot is located at the center of the reflection area of the surface of the target to be aimed at, and the translational position alignment of the photoelectric autocollimator to be aligned to the target to be aimed at is completed.

[0030] 3】alignment of the azimuth misalignment angle of the photoelectric autocollimator to be aligned

[0031] The laser is turned off, and the collimated light of the photoelectric autocollimator to be aligned is turned on, so that the collimated light emitted forms a measurement image point and a reference image point through the auxiliary alignment device; the azimuth angle of the photoelectric autocollimator to be aligned is adjusted so that the measurement image point and the reference image point coincide, and the azimuth misalignment angle alignment of the photoelectric autocollimator to be aligned is completed.

[0032] Further, in step 2】, the translation of the photoelectric autocollimator to be aligned, on which the auxiliary alignment device is installed, is specifically as follows:

[0033] The photoelectric autocollimator to be aligned, on which the auxiliary alignment device is installed, is translated horizontally left and right and vertically up and down relative to the target to be aimed at.

[0034] The application has the following beneficial effects:

[0035] 1. The high-precision auxiliary alignment method for the photoelectric autocollimator combines the laser position indication and the imaging alignment principle, and completes the translational position alignment and the azimuth misalignment angle alignment of the photoelectric autocollimator to the target to be aimed at, so that the alignment precision is high, and the operation is simple and convenient.

[0036] 2. The high-precision auxiliary alignment device for the photoelectric autocollimator is compact in structure, and can guide the imaging observation point to an external spacious space through the rhombic prism, and is particularly suitable for the high-precision alignment of the photoelectric autocollimator to the target to be aimed at when the optical outlet end space is limited.

[0037] 3, The high-precision auxiliary alignment device for photoelectric autocollimation equipment provided by the application can prevent the introduction of stray light from interfering with the observation of the image point and improve the alignment accuracy.

[0038] 4, The high-precision auxiliary alignment device for photoelectric autocollimation equipment provided by the application can be adapted to most photoelectric autocollimation equipment by modifying the structure of the mounting seat and the non-backout screw position, and has strong engineering application. BRIEF DESCRIPTION OF DRAWINGS

[0039] Figure 1 It is a sectional view of the high-precision auxiliary alignment device for photoelectric autocollimation equipment.

[0040] Figure 2 It is a structural schematic view of the high-precision auxiliary alignment device for photoelectric autocollimation equipment.

[0041] Figure 3 It is a three-dimensional structural schematic view of the high-precision auxiliary alignment device for photoelectric autocollimation equipment.

[0042] Figure 4 It is an application schematic view of the high-precision auxiliary alignment device for photoelectric autocollimation equipment.

[0043] Markings in the drawings:

[0044] 1-45° prism; 2-non-backout screw; 3-mounting seat; 4-splitting prism seat; 5-battery box; 6-cornered mirror; 7-laser; 8-first splitting prism; 9-second splitting prism; 10-first light shield; 11-second light shield; 12-photoelectric autocollimation equipment to be aligned. DETAILED DESCRIPTION

[0045] In order to make the advantages and characteristics of the application clearer, the application will be further described in detail below in combination with the drawings and specific embodiments.

[0046] A high-precision auxiliary alignment device for photoelectric autocollimation equipment, as shown in Figures 1-3 The high-precision auxiliary alignment device for photoelectric autocollimation equipment, as shown in

[0047] The first light splitting prism 8 and the second light splitting prism 9 are both made of two right-angle prisms with the same structure and size, and the inclined surfaces of the right-angle prisms are coated with light splitting films; in the embodiment, the light splitting films coated on the inclined surfaces of the right-angle prisms are the light splitting films that can make 50% of the incident light to be transmitted and 50% of the incident light to be reflected by 90°. The second light splitting prism 9 is located on the light path of the outgoing light of the photoelectric autocollimator 12 to be aligned, and is used to split the outgoing collimated light into the first reflected light and the first transmitted light; the corner cube mirror 6 is located on the light path of the first reflected light, and is used to make the incident light to be folded by 180° without shifting the light, i.e. to make the light to return along the original path; the returned light is transmitted by the second light splitting prism 9 to form the second transmitted light. The first light splitting prism 8 and the target to be aimed are located on the light path of the first transmitted light in turn, the first transmitted light is transmitted by the first light splitting prism 8, reflected by the target to be aimed, returned to the first light splitting prism 8, transmitted by the first light splitting prism 8, reflected by the second light splitting prism 9, and then forms the second reflected light. The two reflecting inclined surfaces of the rhombic prism 1 are coated with total reflection films to make the light to be folded by 0° and shifted; the rhombic prism 1 is located on the light paths of the second transmitted light and the second reflected light, and is used to make the light to be folded by 0° and shifted, and to lead the image point out to the external spacious space for observation. The battery box 5 is used to supply power to the laser 7; in the embodiment, the laser 7 is a semiconductor laser with a wavelength of 650 nm, an external shape of Φ5mm×10mm, and a power of 5MW, and the light spot size at 1m is Φ2mm-Φ3mm. The first light splitting prism 8 is located on the outgoing light path of the laser 7, and is used to make the laser beam emitted by the laser 7 to be folded by 90° to form a laser spot on the surface of the target to be aimed; in the embodiment, the first light splitting prism 8 makes 50% of the energy of the laser 7 to be folded, which is convenient for the photoelectric autocollimator to be aligned to align the shifted position of the target to be aimed. The first light shield 10 is arranged outside the light path between the second light splitting prism 9 and the rhombic prism 1, and the second light shield 11 is arranged outside the outgoing light path of the rhombic prism 1, which can prevent the introduction of stray light from interfering with the observation of the image point and improving the alignment accuracy.

[0048] As shown in Figure 4 The second light splitting prism 9, the first light splitting prism 8, the corner cube mirror 6 and the laser 7 are all arranged on the light splitting prism seat 4 to be fixed and supported by the light splitting prism seat 4. The light splitting prism seat 4, the first light shield 10 and the battery box 5 are all arranged on the mounting seat 3 to connect the auxiliary alignment device of the application with the optical outgoing port of the photoelectric autocollimator 12 to be assisted, and to be fixed by the non-removal screw 2. Among them, the external shape of the mounting seat 3 can be designed according to different photoelectric autocollimators 12 to be aligned; the number and position of the non-removal screws 2 can also be designed according to different photoelectric autocollimators 12 to be aligned, so as to reliably connect the auxiliary alignment device with the photoelectric autocollimator 12 to be aligned.

[0049] Specifically, as shown in Figure 1As shown, the laser beam of the laser 7 is reflected by the first beam splitter prism 8 to form a laser spot on the surface of the target to be aimed, for the alignment of the translational position of the target to be aimed; the collimated light emitted by the photoelectric autocollimator 12 to be aligned is split by the second beam splitter prism 9 into first reflected light and first transmitted light; the first reflected light returns to the original path after being reflected by the corner cube 6, and forms second transmitted light after being transmitted by the second beam splitter prism 9; the second transmitted light is incident to the rhombic prism 1, and an image point formed near the second light shield 11 after the 0° folding translation of the rhombic prism 1 is recorded as a reference image point; the first transmitted light is transmitted to the surface of the target to be aimed through the first beam splitter prism 8, and after being reflected by the surface of the target to be aimed, the second reflected light is formed after being transmitted by the first beam splitter prism 8 and being reflected by the 90° folding reflection of the second beam splitter prism 9; the second reflected light is incident to the rhombic prism 1, and an image point formed near the second light shield 11 after the 0° folding translation of the rhombic prism 1 is recorded as a measurement image point.

[0050] Based on the above-mentioned high-precision auxiliary alignment device for a photoelectric autocollimator, the application further provides a high-precision auxiliary alignment method for a photoelectric autocollimator, and the specific steps are as follows:

[0051] 1】Installation of the auxiliary alignment device

[0052] The auxiliary alignment device is installed on the optical outlet end of the photoelectric autocollimator 12 to be aligned through the mounting seat 3, and the position of the auxiliary alignment device is adjusted, and the auxiliary alignment device is reliably connected with the photoelectric autocollimator 12 to be aligned by using the non-removable screw 2.

[0053] 2】Alignment of the translational position of the target to be aimed by the photoelectric autocollimator 12 to be aligned

[0054] The collimated light of the photoelectric autocollimator 12 to be aligned is turned off, the battery box 5 switch is turned on to supply power to the laser 7, and 50% of the energy of the laser beam emitted by the laser 7 is reflected by the first beam splitter prism 8 at 90° to form a laser spot on the surface of the target to be aimed; the photoelectric autocollimator 12 to be aligned with the auxiliary alignment device installed thereon is translated left and right along the horizontal direction relative to the target to be aimed, and is translated up and down along the vertical direction, and the position of the laser spot in the reflection area on the surface of the target to be aimed is observed at the same time, until the laser spot is located at the center of the reflection area on the surface of the target to be aimed, that is, the alignment of the translational position of the target to be aimed by the photoelectric autocollimator 12 to be aligned is completed. When the space of the optical outlet end of the photoelectric autocollimator 12 to be aligned is narrow and cannot be directly observed by the naked eye, an industrial endoscope can be used to observe the position of the laser spot.

[0055] 3】Alignment of the azimuth misalignment angle of the photoelectric autocollimator 12 to be aligned

[0056] The laser 7 is turned off, and the collimated light of the photoelectric autocollimator 12 to be aligned is turned on. The collimated light emitted by the photoelectric autocollimator 12 is split by the second light-splitting prism 9 into first reflected light and first transmitted light. The first reflected light is reflected by the corner cube 6 and returns to the second light-splitting prism 9, and then the second light-splitting prism 9 transmits the first reflected light to form second transmitted light. The second transmitted light is incident on the rhombic prism 1, and then the rhombic prism 1 performs 0° folding translation to form a reference image point near the second light shield 11. The first transmitted light is transmitted by the first light-splitting prism 8 to the surface of the target to be aimed, and then the first transmitted light is reflected by the surface of the target to be aimed. The reflected light is transmitted by the first light-splitting prism 8 and then folded and reflected by the second light-splitting prism 9 to form second reflected light. The second reflected light is incident on the rhombic prism 1, and then the rhombic prism 1 performs 0° folding translation to form a measurement image point near the second light shield 11.

[0057] The azimuth angle of the photoelectric autocollimator 12 to be aligned is adjusted until the measurement image point and the reference image point are observed to coincide at the second light shield 11, and the azimuth misalignment angle alignment of the photoelectric autocollimator 12 to be aligned is completed.

[0058] After alignment, the auxiliary alignment device of the present application is removed, the photoelectric autocollimator 12 to be aligned is collimated at the center position of the reflection area of the target to be aimed, and the azimuth misalignment angle is within 1 angular minute.

[0059] The above description is only used to illustrate the technical solutions of the present application, and is not intended to limit the same. For ordinary skilled persons in the art, the specific technical solutions described in the above embodiments can be modified, or some technical features can be replaced by equivalent features, and these modifications or replacements do not change the essence of the corresponding technical solutions from the scope of the technical solutions protected by the present application.

Claims

1. A high-precision auxiliary alignment device for photoelectric autocollimator, characterized in that: it comprises a rhombic prism (1), a corner cube mirror (6), a laser (7), a first light splitting prism (8) and a second light splitting prism (9); the second light splitting prism (9) is located on the outgoing light path of the photoelectric autocollimator (12) to be aligned, and divides the outgoing light into first reflected light and first transmitted light; the corner cube mirror (6) is located on the light path of the first reflected light, and the first reflected light is reflected by 180° after passing through the corner cube mirror (6) and then transmitted through the second light splitting prism (9) to form second transmitted light; the first light splitting prism (8), the target to be aimed, are sequentially located on the light path of the first transmitted light, and the first transmitted light is transmitted through the first light splitting prism (8) and then reflected by the target to be aimed to return to the second light splitting prism (9) and then reflected by the second light splitting prism (9) to form second reflected light; the rhombic prism (1) is located on the light paths of the second transmitted light and the second reflected light; the first light splitting prism (8) is located on the light path of the outgoing laser light of the laser (7); the outgoing laser light of the laser (7) is reflected by the first light splitting prism (8) to form a laser spot on the surface of the target to be aimed, which is used for the alignment of the translational position of the target to be aimed; the second transmitted light is translated by 0° after passing through the rhombic prism (1) to form a reference image point; and the second reflected light is translated by 0° after passing through the rhombic prism (1) to form a measurement image point.

2. The high-precision auxiliary alignment device for photoelectric autocollimator according to claim 1, characterized in that: the first light splitting prism (8) and the second light splitting prism (9) are both made of two identical right-angle prisms which are glued together; and a light splitting film is coated on the inclined surface of the right-angle prism.

3. The high-precision auxiliary alignment device for photoelectric autocollimator according to claim 2, characterized in that: the light splitting film is a light splitting film which transmits 50% of the incident light energy and reflects 50% of the incident light energy.

4. The high-precision auxiliary alignment device for photoelectric autocollimator according to any one of claims 1-3, characterized in that: it further comprises a first light shield (10) and a second light shield (11); the first light shield (10) is arranged outside the light path between the second light splitting prism (9) and the rhombic prism (1); and the second light shield (11) is arranged outside the outgoing light path of the rhombic prism (1).

5. The high-precision auxiliary alignment device for photoelectric autocollimator according to claim 4, characterized in that: it further comprises a light splitting prism seat (4), a mounting seat (3) and a non-removal screw (2); the second light splitting prism (9), the first light splitting prism (8), the corner cube mirror (6), the laser (7) and the first light shield (10) are all arranged on the light splitting prism seat (4); the light splitting prism seat (4) and the first light shield (10) are both arranged on the mounting seat (3); and the mounting seat (3) is connected with the photoelectric autocollimator (12) to be aligned by the non-removal screw (2).

6. The high-precision auxiliary alignment device for photoelectric autocollimator according to claim 5, characterized in that: ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ Also include a battery box (5); The battery box (5) is arranged on the mounting seat (3), for supplying power to the laser (7).

7. A high-precision auxiliary alignment method for photoelectric autocollimator, based on the high-precision auxiliary alignment device for photoelectric autocollimator according to any one of claims 1-6, characterized in that, Including the following steps: 1】Install auxiliary alignment device Install the auxiliary alignment device on the optical outlet end of the photoelectric autocollimator to be aligned (12); 2】Translational position alignment of the photoelectric autocollimator to be aligned (12) to the target to be aimed Turn off the collimated light of the assisted photoelectric autocollimator (12), turn on the laser (7), and make the light beam emitted by the laser (7) form a laser spot on the surface of the target to be aimed; translate the photoelectric autocollimator to be aligned (12) installed with the auxiliary alignment device, so that the laser spot is located at the center of the reflection area of the target to be aimed, and complete the translational position alignment of the photoelectric autocollimator to be aligned (12) to the target to be aimed; 3】Azimuth misalignment angle alignment of the photoelectric autocollimator to be aligned (12) Turn off the laser (7) and turn on the collimated light of the photoelectric autocollimator to be aligned (12), and the emitted collimated light forms a measurement image point and a reference image point through the auxiliary alignment device; Adjust the azimuth angle of the photoelectric autocollimator to be aligned (12) so that the measurement image point coincides with the reference image point, and complete the azimuth misalignment angle alignment of the photoelectric autocollimator to be aligned (12).

8. The high-precision auxiliary alignment method for photoelectric autocollimator according to claim 7, characterized in that: In step 2】, the translation of the photoelectric autocollimator to be aligned (12) installed with the auxiliary alignment device is specifically: Translate the photoelectric autocollimator to be aligned (12) installed with the auxiliary alignment device horizontally left and right and vertically up and down relative to the target to be aimed.

Images