A hot wire array device having a hot wire compensation structure and methods of using the same

Abstract

This invention discloses a hot wire array device with a hot wire compensation structure and its usage method. The hot wire array device with the hot wire compensation structure includes a base, an electrode assembly, a hot wire assembly, a support device, a horizontal tension compensation assembly, and a longitudinal tension compensation assembly. The hot wire assembly includes several parallel hot wires. The horizontal tension component passes through a heat insulation assembly, and its two ends are connected to the support device and a power compensation component, respectively. The power compensation component does not include an elastic component. The longitudinal tension compensation assembly includes several hot wire support strips, several tantalum cables, and several tantalum cable fixing components. The hot wire support strips are provided with several support grooves. The hot wires contact the support grooves of the hot wire support strips, and the hot wires are perpendicular to the hot wire support strips. This ensures that the tension and length of each segment of the hot wire are the same when fixed, and that no sagging occurs during heating.

Description

Technical Field

[0001] This invention relates to the field of hot wire array devices, and more specifically to the field of hot wire array devices with hot wire compensation structures and methods of using them. Background Technology

[0002] In fields such as diamond film preparation, there is a common problem of fixing thin or long components in high-temperature environments, and it is necessary to prevent the components from deforming during long-term fixing. However, thin or long components are prone to softening or expansion in high-temperature environments. When it is necessary to keep the working part of thin or long components unchanged, elastic devices are generally used for fixing. However, when using elastic devices for fixing, the working life of the elastic devices is relatively short due to the high-temperature environment.

[0003] In the preparation of diamond films, the hot-wire method is mainly used. The hot-wire method has a simple equipment structure and is suitable for large-area diamond film growth, making it a commonly used method. However, in the hot-wire method, the heating wires used for heating are thin and long, leading to problems such as uneven lengths and varying tensions among the different sections of the wire during installation, causing the wire to sag during heating. The traditional solution is to use springs to fix the hot wire on both sides to automatically adjust the length of the wire tensioning device and solve the problem of the wire lengthening during heating. However, the presence of springs causes different tensions in each section of the wire before heating, resulting in different lengths for each section. When the wire lengthens due to heating, the axial spring tension cannot completely achieve horizontal alignment, and the elasticity of the springs decreases due to heat radiation, which is detrimental to achieving horizontal alignment and significantly reduces the lifespan of the springs due to heat radiation.

[0004] Therefore, how to ensure that the tension and length of each section of the hot wire are the same when it is fixed, and that there is no sagging during the heating process; and how to ensure that the distance between adjacent hot wires is the same, so as to avoid the problem of the hot wires burning out when they are close together or the heat being uneven in different parts of the heating process. Summary of the Invention

[0005] The purpose of this invention is to achieve, through a hot wire array device with a hot wire compensation structure and its usage method, the same tension and length of each segment of the hot wire when fixed, and to prevent sagging during heating; and to achieve the same distance between adjacent hot wires, thereby avoiding the problems of burnout at close-to-close parts of adjacent hot wires or uneven heating at different parts.

[0006] To achieve the above objectives, the technical solution of the present invention is as follows:

[0007] According to one aspect of the present invention, a hot wire array device with a hot wire compensation structure is provided, including a base, an electrode assembly, a hot wire assembly, a support device, a horizontal tension compensation assembly, and a longitudinal tension compensation assembly;

[0008] The electrode assembly includes a positive electrode assembly and a negative electrode assembly;

[0009] The hot wire assembly includes a plurality of hot wires arranged in parallel.

[0010] The support device includes a first support device and a second support device arranged opposite to each other;

[0011] The two ends of the hot wire are respectively connected to the first support device and the second support device;

[0012] The horizontal tension compensation assembly includes a horizontal tension component, a dynamic compensation component, and a heat insulation component; the horizontal tension component includes a second metal tie rod.

[0013] The horizontal tension member penetrates the heat insulation assembly, and its two ends are respectively connected to the support device and the dynamic compensation member; the dynamic compensation member does not include an elastic component.

[0014] The longitudinal tension compensation component includes several hot wire support bars, several tantalum cables, and several tantalum cable fasteners. The hot wire support bars are provided with several support grooves.

[0015] The hot wire contacts the support groove of the hot wire support strip, and the hot wire and the hot wire support strip are arranged perpendicularly.

[0016] The hot wire support bar is connected to a tantalum cable fixing device via a plurality of tantalum cables; the end of the tantalum cable connected to each hot wire support bar away from the hot wire support bar is connected to the tantalum cable fixing member.

[0017] The preferred power compensation assembly includes a rotating shaft, a cable, a driving gear, and a driven gear meshing with the driving gear; the rotating shaft is connected to the driving gear in a transmission manner; one end of the cable is connected to a second pull rod, and the other end is fixedly connected to the rotating shaft;

[0018] Alternatively, the power compensation component may include a spring and a cable, with one end of the cable connected to the second pull rod and the other end connected to the spring.

[0019] Alternatively, the power compensation component may include a thermal expansion component and a pull wire. The pull wire is wound around the surface of the expansion component, and one end of the pull wire is connected to the second pull rod, while the other end is connected to a fixing part on the surface of the expansion component. The expansion component is equipped with a heating device inside. As the temperature of the heating component increases, the diameter of the collision component surface increases.

[0020] The advantages of this invention over the prior art are that it provides electrical energy to the hot wire through the electrode assembly; and by arranging the hot wire assemblies in parallel, it achieves uniform heat distribution to adjacent hot wires and avoids the burning out of adjacent parts of the hot wires during use.

[0021] The hot wire is stretched and fixed in the horizontal direction by means of the first support device and the second support device that are set up opposite to each other;

[0022] The horizontal tension compensation component, including a horizontal tensioning component and a power compensation component, enables manual or automatic adjustment to tighten the hot wire when it becomes loose during use; the heat insulation component prevents excessive heat loss and avoids heat radiation to the power compensation component.

[0023] By excluding elastic components, the power compensation component ensures that the length and tension of the hot wire are the same before and after installation.

[0024] The hot wire contacts the support groove of the hot wire support strip, and the hot wire and the hot wire support strip are set vertically to achieve uniform support for the hot wire. Even if the hot wire becomes longer due to heat, the support of the hot wire support strip prevents the hot wire from sagging.

[0025] The hot wire support strip is fixed by connecting several tantalum cables to a tantalum cable fixing device.

[0026] Furthermore, the first support device includes a first support plate, a first sliding electrode module, and a first metal pull rod;

[0027] The first support plate is connected to the first sliding electrode module, one end of the first metal rod is connected to the first sliding electrode module, and the other end of the first metal rod is connected to the hot wire;

[0028] The positive electrode assembly is electrically connected to the first sliding electrode module via a first support plate.

[0029] Furthermore, the first sliding electrode module includes a first upper sliding electrode module and a first lower sliding electrode module;

[0030] The first upper sliding electrode module is provided with a conductive guide rail groove;

[0031] The first upper sliding electrode module is fixedly connected to the first lower sliding electrode module;

[0032] The first upper sliding electrode module has several upper fixing grooves on the side away from the guide rail groove.

[0033] The advantage of adopting the above technical solution is that the hot wire is connected to the first sliding electrode module through the first metal rod, thereby enabling the hot wire to slide horizontally with the first sliding electrode module and connect to the electrode at any position.

[0034] Furthermore, the first lower sliding electrode module is provided with a plurality of first lower fixing grooves that match the upper fixing grooves; the upper fixing grooves and the first lower fixing grooves are arranged opposite to each other to form a receiving cavity; the end of the first metal pull rod away from the hot wire is located in the receiving cavity or the first metal pull rod passes through the receiving cavity;

[0035] The first lower fixing groove is connected to the first fixing member.

[0036] The beneficial effect of adopting the previous technical solution is that the first fixing member is connected to the first lower fixing groove, thereby fixing the end of the first metal pull rod away from the hot wire, and enabling the first metal pull rod to slide with the first lower sliding electrode module.

[0037] Furthermore, the first lower sliding electrode module is also provided with a second lower fixing groove, and the second lower fixing groove is connected to a second fixing member; the second lower fixing groove is connected to a second metal pull rod through the second fixing member, and the end of the second metal pull rod away from the second lower fixing groove is connected to the power compensation component.

[0038] The beneficial effect of adopting the previous technical solution is that the power compensation component provides power to the first sliding electrode module, thereby enabling the hot wire to be tightened when it becomes longer during the heating process.

[0039] Furthermore, the guide rail groove is a T-shaped groove, and the T-shaped groove is provided with a plurality of pulleys or balls; and / or

[0040] The first support plate is provided with a conductive guide rail that matches the guide rail groove, and the conductive guide rail is electrically connected to the electrode assembly.

[0041] The beneficial effect of adopting the above technical solution is that it enables the first sliding electrode module to slide and connect with the first support plate, and the first sliding electrode module to be electrically connected with the first support plate during the sliding process.

[0042] Furthermore, the tantalum cable fixing device also includes a pulley;

[0043] The end of the tantalum cable connected to each hot wire support bar away from the hot wire support bar is wound around a pulley and then fixed to the tantalum cable fastener.

[0044] The advantage of adopting the previous technical solution is that it enables the fixing of the hot wire support strip.

[0045] Furthermore, the longitudinal tension compensation component includes n hot wire support strips;

[0046] l / (aEQ / ρmg) 1 / 2 +1≤n≤7, where a is a constant;

[0047] E is the elastic modulus of the hot wire, Q is the cross-sectional area of ​​the hot wire, m is the mass of the hot wire, ρ is the density of the hot wire, and l is the length of the hot wire.

[0048] Preferably, E = 0.35-0.45 GPa, Q = 0.03-0.13 mm. 2 m = 0.144 - 1.105 g, ρ is the density of the hot filament (16-17 g / cm³). 3 l represents the length of the hot wire, 300-500 mm; a = 2.1 × 10 8 (g·GPa -1 ·S -2 ·mm -2 ).

[0049] The beneficial effect of adopting the above technical solution is that, through the aforementioned l / (aEQ / ρmg) 1 / 2 +1≤n≤7 allows for the determination of the corresponding value of n under different parameters of the heating wire and the operating temperature; this number of heating wire support bars supports the heating wire while the drooping distance of the heating wire during use is negligible; at the same time, it avoids the impact on the heating effect caused by too many heating wire support bars and avoids the problem of uneven temperature at the heating point.

[0050] Furthermore, the second support device includes a second support plate, a second sliding electrode module, and a third metal pull rod;

[0051] The second support plate is connected to the second sliding electrode module, and one end of the third metal rod is connected to the second sliding electrode module. The other end of the third metal rod is connected to the hot wire.

[0052] The negative electrode assembly is electrically connected to the second sliding electrode module via a second support plate.

[0053] According to another aspect of the present invention, a method of using a filament array device having a filament compensation structure is provided, comprising the following steps:

[0054] One end of the entire hot wire is connected and fixed to the connection end of the first metal pull rod and the hot wire;

[0055] Then, the other end of the hot wire passes through the connection end between the third metal rod and the hot wire, the connection end between the third metal rod and the hot wire, the connection end between the first metal rod and the hot wire, and the connection end between the first metal rod and the hot wire in sequence, forming a loop. This loop is repeated to achieve a parallel Z-shaped distribution of the hot wire.

[0056] Then fix the hot wire at the contact point between the hot wire and the connection point between the first metal rod and the hot wire, and the connection point between the third metal rod and the hot wire; after fixing, cut the hot wire ends between the connection points between two adjacent first metal rods and the hot wire; cut the hot wire ends between the connection points between two adjacent third metal rods and the hot wire.

[0057] Then, connect one end of several tantalum cables to the hot wire support strip, place the hot wire support strip below the hot wire, connect the other end of several tantalum cables to the tantalum cable fixing device, so that the hot wire support strip is set horizontally, and adjust the height of the hot wire support strip to place the hot wire in the groove of the hot wire support strip.

[0058] The advantages of this invention over the prior art are as follows: First, the hot wire is continuously arranged between the first and third metal rods, and the entire hot wire is tensioned. The hot wires are arranged parallel to each segment of the first and third metal rods. Then, the hot wires are fixed at the contact points with the first and third metal rods, and excess hot wire is removed. This ensures that the tension and length of each segment of the hot wire are the same during fixing, and that the distance between adjacent hot wires is the same. Finally, the hot wire assemblies are arranged in parallel, ensuring uniform heat distribution from adjacent hot wires and preventing burnout of adjacent sections during use. This also achieves horizontal tension and fixation of the hot wires.

[0059] The hot wire is made to contact the support groove of the hot wire support strip. The hot wire and the hot wire support strip are arranged perpendicularly to achieve uniform support for the hot wire. Even if the hot wire becomes longer due to heat, the support of the hot wire support strip will prevent the hot wire from sagging.

[0060] The hot wire support strip is fixed by connecting it to several tantalum cables and a tantalum cable fixing device. Attached Figure Description

[0061] Figure 1 A schematic diagram of the heating filament array device of the present invention;

[0062] Figure 2 The diagram shows the hot wire support strip, tantalum cable fixing device, and hot wire of the present invention.

[0063] Figure 3 This is a left view of the first upper sliding electrode module of the present invention;

[0064] Figure 4 This is a top view of the first sliding electrode module of the present invention.

[0065] The markings shown in the attached diagram are: 1. Base; 2. Second metal pull rod; 3. Heat insulation component; 4. Positive electrode component; 5. First support plate; 6. First sliding electrode module; 7. Hot wire; 8. Longitudinal tension compensation component; 9. Hot wire support bar; 10. Tantalum cable; 11. Guide rail groove; 12. Pulley; 13. Upper fixing groove; 14. Connecting hole; 15. Second lower fixing groove; 16. First lower fixing groove. Detailed Implementation

[0066] To better understand the technical solution of the present invention, the present invention will be further described below in conjunction with specific embodiments and accompanying drawings.

[0067] Example 1:

[0068] This embodiment provides a hot wire array device with a hot wire compensation structure, including a base 1, an electrode assembly, a hot wire assembly, a support device, a horizontal tension compensation assembly, and a longitudinal tension compensation assembly 8;

[0069] The electrode assembly includes a positive electrode assembly 4 and a negative electrode assembly; the hot wire assembly includes a plurality of parallel hot wires 7.

[0070] The support device includes a first support device and a second support device arranged opposite to each other; the two ends of the hot wire 7 are respectively connected to the first support device and the second support device;

[0071] The horizontal tension compensation assembly includes a horizontal tension component, a dynamic compensation component, and a heat insulation component 3; the horizontal tension component includes a second metal tie rod 2; the horizontal tension component passes through the heat insulation component 3, and both ends of the horizontal tension component are respectively connected to a support device and a dynamic compensation component; the dynamic compensation component does not include an elastic component;

[0072] The power compensation component includes a rotating shaft, a pull cable, a driving gear, and a driven gear meshing with the driving gear; the rotating shaft is connected to the driving gear in a transmission manner; one end of the pull cable is connected to the second pull rod, and the other end is fixedly connected to the rotating shaft;

[0073] The first support device includes a first support plate 5, a first sliding electrode module 6, and a first metal rod; the first support plate 5 is connected to the first sliding electrode module 6, one end of the first metal rod is connected to the first sliding electrode module 6, and the other end of the first metal rod is connected to the hot wire 7; the positive electrode assembly 4 is electrically connected to the first sliding electrode module 6 through the first support plate 5.

[0074] The second support device includes a second support plate, a second sliding electrode module, and a third metal rod; the second support plate is connected to the second sliding electrode module, one end of the third metal rod is connected to the second sliding electrode module, and the other end of the third metal rod is connected to the hot wire 7; the negative electrode assembly is electrically connected to the second sliding electrode module through the second support plate. The first sliding electrode module 6 includes a first upper sliding electrode module and a first lower sliding electrode module; the first upper sliding electrode module is provided with a conductive guide rail groove 11;

[0075] The first upper sliding electrode module is fixedly connected to the first lower sliding electrode module; the first upper sliding electrode module is provided with a connection hole 14, and the first lower sliding electrode module is connected to the connection hole 14 through a fixed connector.

[0076] The first upper sliding electrode module has several upper fixing grooves 13 on the side away from the guide rail groove 11. The first lower sliding electrode module has several first lower fixing grooves 16 that match the upper fixing grooves 13; the upper fixing grooves 13 and the first lower fixing grooves 16 are arranged opposite each other to form a receiving cavity; the end of the first metal pull rod away from the hot wire 7 is located in the receiving cavity or the first metal pull rod passes through the receiving cavity; the first lower fixing groove 16 is connected to a first fixing member. The first lower sliding electrode module also has a second lower fixing groove 15, the second lower fixing groove 15 is connected to a second fixing member; the second lower fixing groove 15 is connected to a second metal pull rod 2 through the second fixing member, and the end of the second metal pull rod 2 away from the second lower fixing groove 15 is connected to a power compensation component.

[0077] The guide rail groove 11 is a T-shaped groove, and a number of balls are provided in the T-shaped groove;

[0078] The first support plate 5 is provided with a conductive guide rail that matches the guide rail groove 11, and the conductive guide rail is electrically connected to the electrode assembly.

[0079] The longitudinal tension compensation component 8 includes several hot wire support bars 9, several tantalum cables 10, and several tantalum cable fasteners. The hot wire support bars 9 are provided with several support grooves.

[0080] The hot wire 7 contacts the support groove of the hot wire support strip 9, and the hot wire 7 and the hot wire support strip 9 are arranged perpendicularly.

[0081] The hot wire support bar 9 is connected to a tantalum cable fixing device via a plurality of tantalum cables 10; the end of the tantalum cable 10 connected to each hot wire support bar 9 away from the hot wire support bar 9 is connected to the tantalum cable fixing member.

[0082] The tantalum cable fixing device also includes a pulley 12; the end of the tantalum cable 10 connected to each hot wire support bar 9, away from the hot wire support bar 9, is wound around the pulley 12 and then fixed to the tantalum cable fixing member. The longitudinal tension compensation assembly 8 includes n hot wire support bars 9; l / (aEQ / ρmg)1 / 2+1≤n≤7, a=2.1×10 8 (g·GPa -1 ·S -2 ·mm -2 );

[0083] E is the elastic modulus of the hot wire, Q is the cross-sectional area of ​​the hot wire, m is the mass of the hot wire, and l is the length of the hot wire; specifically, n = 5; the hot wire support bar 9 is connected to the tantalum cable fixing device through 5 tantalum cables 10.

[0084] According to another aspect of this embodiment, a method of using a hot wire array device with a hot wire compensation structure is provided, comprising the following steps:

[0085] One end of the entire hot wire 7 is connected and fixed to the connection end of the first metal pull rod and the hot wire 7;

[0086] Then, the other end of the hot wire 7 passes through the connection end between the third metal rod and the hot wire 7, the connection end between the third metal rod and the hot wire 7, the connection end between the first metal rod and the hot wire 7, and the connection end between the first metal rod and the hot wire 7 in sequence as a loop, and repeats this loop to achieve the hot wire 7 being distributed in several parallel Z-shaped patterns;

[0087] Then fix the hot wire 7 at the connection end of the first metal rod and the hot wire 7, and at the contact end of the third metal rod and the hot wire 7; after fixing, cut the end of the hot wire 7 between the connection ends of two adjacent first metal rods and the hot wire 7; cut the end of the hot wire 7 between the connection ends of two adjacent third metal rods and the hot wire 7.

[0088] Then, connect one end of each of the five tantalum cables 10 to the hot wire support strip 9, place the hot wire support strip 9 below the hot wire 7, and connect the other end of each of the five tantalum cables 10 to the tantalum cable fixing device to achieve a horizontal setting of the hot wire support strip 9. Adjust the height of the hot wire support strip 9 to place the hot wire 7 in the groove of the hot wire support strip 9. Set the five hot wire support strips 9 in the above manner.

[0089] Example 2:

[0090] The contents that are the same as in Example 1 will not be repeated here; the different aspects of this embodiment compared to Example 1 are as follows:

[0091] One aspect of this embodiment provides a hot wire array device with a hot wire compensation structure, specifically n=6; the hot wire support bar 9 is connected to a tantalum cable fixing device via four tantalum cables 10. The power compensation component includes a spring and a pull wire, one end of which is connected to a second pull rod, and the other end is connected to the spring. Another aspect of this embodiment provides a method of using the hot wire array device with a hot wire compensation structure, comprising the following steps: connecting one end of the four tantalum cables 10 to the hot wire support bar 9, placing the hot wire support bar 9 below the hot wire 7, connecting the other end of the four tantalum cables 10 to the tantalum cable fixing device to achieve a horizontal setting of the hot wire support bar 9, and adjusting the height of the hot wire support bar 9 to place the hot wire 7 within the groove of the hot wire support bar 9; six hot wire support bars 9 are arranged in the above manner.

[0092] Example 3:

[0093] The contents that are the same as in Example 1 will not be repeated here; the different aspects of this embodiment compared to Example 1 are as follows:

[0094] One aspect of this embodiment provides a hot wire array device with a hot wire compensation structure, specifically n=4; the hot wire support bar 9 is connected to a tantalum cable fixing device via 7 tantalum cables 10.

[0095] The dynamic compensation component includes a thermal expansion component and a pull wire. The pull wire is wound around the surface of the expansion component, and one end of the pull wire is connected to the second pull rod, while the other end is connected to a fixing part on the surface of the expansion component. The expansion component is equipped with a heating device inside. As the temperature of the heating component increases, the diameter of the collision component surface increases.

[0096] According to another aspect of this embodiment, a method of using a hot wire array device with a hot wire compensation structure is provided, comprising the following steps:

[0097] After connecting one end of the 7 tantalum cables 10 to the hot wire support strip 9, place the hot wire support strip 9 below the hot wire 7, connect the other end of the 7 tantalum cables 10 to the tantalum cable fixing device to achieve a horizontal setting of the hot wire support strip 9, and adjust the height of the hot wire support strip 9 to place the hot wire 7 in the groove of the hot wire support strip 9; set 4 hot wire support strips 9 in the above manner.

[0098] The above description is merely a preferred embodiment of this application and an explanation of the technical principles employed. Those skilled in the art should understand that the scope of the invention involved in this application is not limited to the technical solutions formed by specific combinations of the above-described technical features, but should also cover other technical solutions formed by arbitrary combinations of the above-described technical features or their equivalents without departing from the inventive concept. For example, the above-described features have similar functions to (but are not limited to) those disclosed in this application.

Claims

1. A hot wire array device having a hot wire compensation structure, characterized by, The base, the electrode assembly, the hot wire assembly, the support device, the horizontal tension compensation assembly, and the longitudinal tension compensation assembly; The electrode assembly comprises a positive electrode assembly and a negative electrode assembly; The hot wire assembly comprises a plurality of parallel hot wires; The support device comprises a first support device and a second support device; The two ends of the hot wire are connected with the first support device and the second support device respectively; The horizontal tension compensation assembly comprises a horizontal stretching component, a power compensation component, and a heat insulation assembly; the horizontal stretching component comprises a second metal pull rod; The horizontal stretching component penetrates through the heat insulation assembly, and the two ends of the horizontal stretching component are connected with the support device and the power compensation component respectively; the power compensation component does not comprise an elastic component; The longitudinal tension compensation assembly comprises a plurality of hot wire support strips, a plurality of tantalum cables, and a plurality of tantalum cable fixing members; the hot wire support strip is provided with a plurality of support grooves; The hot wire is in contact with the support grooves of the hot wire support strip, and the hot wire is perpendicular to the hot wire support strip; The hot wire support strip is connected with the tantalum cable fixing device through the plurality of tantalum cables; the end of the tantalum cable connected with each hot wire support strip, which is away from the hot wire support strip, is connected with the tantalum cable fixing member.

2. The hot wire array device with hot wire compensation structure of claim 1, wherein, The first support device comprises a first support plate, a first sliding electrode module, and a first metal pull rod; The first support plate is connected with the first sliding electrode module, one end of the first metal pull rod is connected with the first sliding electrode module, and the other end of the first metal pull rod is connected with the hot wire; The positive electrode assembly is electrically connected with the first sliding electrode module through the first support plate.

3. The hot wire array device with hot wire compensation structure of claim 2, wherein, The first sliding electrode module comprises a first upper sliding electrode module and a first lower sliding electrode module; The first upper sliding electrode module is provided with a conductive guide rail sliding groove; The first upper sliding electrode module is fixedly connected with the first lower sliding electrode module; The side of the first upper sliding electrode module, which is away from the side provided with the guide rail sliding groove, is provided with a plurality of upper fixed grooves.

4. The hot wire array device with hot wire compensation structure of claim 3, wherein, The first lower sliding electrode module is provided with a plurality of first lower fixed grooves matched with the upper fixed grooves; the upper fixed grooves and the first lower fixed grooves are oppositely arranged to form a containing cavity; one end of the first metal pull rod, which is away from the hot wire, is located in the containing cavity, or the first metal pull rod penetrates through the containing cavity; The first lower fixed groove is connected with a first fixing member.

5. The hot wire array device with hot wire compensation structure of claim 4, wherein, The first lower sliding electrode module is further provided with a second lower fixed groove; the second lower fixed groove is connected with a second fixing member; the second lower fixed groove is connected with a second metal pull rod through the second fixing member; one end of the second metal pull rod, which is away from the second lower fixed groove, is connected with the power compensation component.

6. The hot wire array device with hot wire compensation structure of claim 3, wherein, The guide rail sliding groove is a T-shaped groove; a plurality of pulleys or balls are arranged in the T-shaped groove; And / or The first support plate is provided with a conductive guide rail matched with the guide rail sliding groove; the conductive guide rail is electrically connected with the electrode assembly.

7. The hot wire array device with hot wire compensation structure of claim 1, wherein, The tantalum cable fixing device further comprises a pulley; The end of the tantalum cable connected with each hot wire support strip, which is away from the hot wire support strip, is connected with the tantalum cable fixing member after winding around the pulley.

8. The hot wire array device with a hot wire compensation structure according to claim 3, wherein The second support device comprises a second support plate, a second sliding electrode module, and a third metal pull rod; The second support plate is connected with the second sliding electrode module, one end of the third metal pull rod is connected with the second sliding electrode module, and the other end of the third metal pull rod is connected with the hot wire. The negative electrode assembly is electrically connected with the second sliding electrode module through the second support plate.

9. A method of using a hot wire array device having a hot wire compensation structure, the method comprising: The hot wire array device with the hot wire compensation structure of claim 8 is used; The method comprises the following steps: One end of the whole hot wire is connected and fixed with the first metal pull rod and the hot wire connection end. Then the other end of the hot wire is sequentially threaded through the third metal pull rod and the hot wire connection end, the third metal pull rod and the hot wire connection end, the first metal pull rod and the hot wire connection end, and the first metal pull rod and the hot wire connection end as a cycle, and the threading is repeated according to the cycle; the hot wire is distributed in several parallel inverted U shapes; Then the hot wire is fixed at the contact positions of the first metal pull rod and the hot wire connection end and the third metal pull rod and the hot wire connection end; after the fixing, the hot wire between the adjacent two first metal pull rods and the hot wire connection ends is cut off; the hot wire between the adjacent two third metal pull rods and the hot wire connection ends is cut off; Then one end of each tantalum cable is connected with the hot wire support strip, the hot wire support strip is placed below the hot wire, the other end of each tantalum cable is connected with the tantalum cable fixing device, the hot wire support strip is horizontally arranged, and the height of the hot wire support strip is adjusted to place the hot wire in the groove of the hot wire support strip.

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