Sorting device for silicon wafer sorting machine

Abstract

The invention discloses a sorting device for a silicon wafer sorting machine, and belongs to the technical field of silicon wafer preparation, the sorting device comprises a base, the top of the base is provided with a material conveying mechanism, a blowing cleaning mechanism, an appearance detection mechanism and a resistance detection mechanism, the material conveying mechanism comprises a fixed frame and a movable seat, the movable seat is slidably mounted in the fixed frame, and the fixed frame is provided with a plurality of grooves; the top of the movable seat is connected with a grabbing mechanism, and an adjusting mechanism is arranged on the fixing frame. The adjusting mechanism comprises a transmission gear, a mounting plate and a rack, and the mounting plate is fixedly mounted at the top of the fixing frame. Dust on the surface of a silicon wafer can be detected, blown and cleaned through the blowing and cleaning mechanism and the appearance detection mechanism, the silicon wafer is repeatedly blown and cleaned when it is detected that the dust exceeds the standard, the blowing strength can be gradually improved while the silicon wafer is repeatedly blown and cleaned through the adjusting mechanism, the blowing and dust removing effect is improved, and the service life of the silicon wafer is prolonged. Therefore, the silicon wafer sorting accuracy is ensured.

Description

Technical Field

[0001] The present invention relates to the technical field of silicon wafer preparation, and in particular to a sorting device used in a silicon wafer sorting machine. Background Art

[0002] As an important raw material for solar cells, silicon wafers are widely used in the production of solar cells, circuit boards and other products. In the production process of silicon wafers, silicon wafer sorting machines, as terminal equipment for quality control, detect and sort silicon wafers in terms of size, dirt, cracks, holes, resistivity, etc., to ensure the quality of solar cells, circuit boards and other products made from silicon wafers. The sorting of silicon wafers is mainly divided into appearance inspection and instrument inspection.

[0003] The patent document with publication number CN215278607U discloses a sorting device for a silicon wafer sorter, which belongs to the field of silicon wafer sorting devices. The sorting device for a silicon wafer sorter includes: a conveying mechanism and a sorting mechanism, the conveying mechanism includes a first conveyor, a bracket, an electric push rod and a second conveyor, the bracket is fixed on one side of the conveyor, the sorting machine body is arranged between the first conveyor and the second conveyor, and the rotating rod is rotatably connected to one side of the sorting machine body.

[0004] The sorting device in the above technical solution cannot detect the cleanliness of the silicon wafer surface before sorting, and cannot automatically clean the silicon wafer according to the detection results, thereby affecting the accuracy of sorting; therefore, we propose a sorting device for a silicon wafer sorter to solve this problem. Summary of the invention

[0005] The object of the present invention is to provide a sorting device for a silicon wafer sorting machine to solve the problems raised in the above background technology.

[0006] In order to achieve the above object, the present invention adopts the following technical solutions: A sorting device for a silicon wafer sorter, comprising: a base, a material transport mechanism, an air blowing cleaning mechanism, an appearance detection mechanism and a resistance detection mechanism are arranged on the top of the base, the material transport mechanism comprises: a fixed frame and a movable seat, the movable seat is slidably mounted in the fixed frame, a gripping mechanism is connected to the top of the movable seat, and an adjustment mechanism is arranged on the fixed frame; The adjustment mechanism comprises: a transmission gear, a mounting plate and a rack, wherein the mounting plate is fixedly mounted on the top of the fixing frame, a varistor is fixedly mounted on one side of the mounting plate, a pressure plate is fixedly mounted on the other end of the varistor, a transverse spring is fixedly mounted on the other side of the pressure plate, a connecting plate is fixedly mounted on the other end of the transverse spring, the connecting plate is fixedly mounted on the other end of the rack, the rack is meshed with the bottom of the transmission gear, a rotating shaft is fixedly mounted inside the transmission gear, and a ratchet is fixedly sleeved on the outer side of the rotating shaft; A rotating arm is rotatably mounted in the movable seat; The air blowing cleaning mechanism includes: an air pump and multiple air nozzles, the air outlet of the air pump is connected to a horizontal pipe, the bottom end of the air nozzle is connected to a hose, the bottom end of the hose is connected to the top of the horizontal pipe, and the varistor and the air pump are connected in series in the same circuit.

[0007] Preferably, a guide rod is fixedly installed on one side of the mounting plate, the pressure plate and the connecting plate are both slidably sleeved on the outer side of the guide rod, a touch button is fixedly installed on one side of the pressure plate, the touch button is adapted to the connecting plate, an ear plate and a positioning plate are fixedly installed on the bottom of the fixing frame, the rotating shaft is rotatably installed in the positioning plate, a fixed shaft is fixedly installed on the front side of the ear plate, a claw is rotatably sleeved on the outer side of the fixed shaft, the claw movably abuts against the outer side of the ratchet, a pull rod is hinged on the other side of the claw, a connecting rod is hinged on the other end of the pull rod, a push plate is fixedly installed on the other end of the connecting rod, and the push plate is located on the right side of the moving seat; A fixing frame is fixedly installed at the bottom of the fixing frame, the connecting rod is slidably installed in the fixing frame, a return spring is fixedly installed on the left side of the fixing frame, and the other end of the return spring is fixedly connected to the connecting rod.

[0008] Preferably, a screw is rotatably installed in the fixed frame, the movable seat is threadedly sleeved on the outside of the screw, a driving motor is fixedly installed on one side of the fixed frame, one end of the screw is fixedly installed on the output shaft of the driving motor, a crossbeam is fixedly installed in the fixed frame, the movable seat is slidably sleeved on the outside of the crossbeam, support frames are fixedly installed on both the front and rear sides of the fixed frame, and the support frame is fixedly installed on the top of the base; A plurality of induction plates are fixedly mounted on the top of the fixing frame, and a sensor is fixedly mounted on the front side of the moving seat, and the sensor is adapted to the induction plate.

[0009] Preferably, the grabbing mechanism comprises: a horizontal plate, a lifting plate, a vacuum cylinder and a piston plate, the horizontal plate is fixedly mounted on the bottom of the moving seat, the first electric push rod and a connecting rod are fixedly mounted on both sides of the bottom of the horizontal plate, a rotating motor and two vertical plates are fixedly mounted on the bottom of the lifting plate, the output shaft of the rotating motor is fixedly mounted on the top of the vacuum cylinder, side plates are fixedly mounted on the sides away from each other of the two vertical plates, the side plates are slidably sleeved on the outer sides of the corresponding connecting rods, the output end of the first electric push rod is fixedly connected to the corresponding side plate, the bottom ends of the two connecting rods are fixedly mounted with the same positioning cone, the bottom of the vertical plate is fixedly mounted with an arc frame, the top of the vacuum cylinder is fixedly mounted with an annular guide rail, the arc frame is slidably sleeved on the outer side of the annular guide rail, and the piston plate is slidably mounted in the vacuum cylinder.

[0010] Preferably, a sealing ring is fixedly sleeved on the outer side of the piston plate, the sealing ring abuts against the inner wall of the vacuum cylinder, vertical plates are fixedly installed on both sides of the top of the piston plate, the vertical plates are slidably installed on the top of the vacuum cylinder, an inclined hole is opened on one side of the vertical plate, a cylinder is fixedly installed on the top of the inner side of the vacuum cylinder, a pressure sensor is fixedly installed on the output end of the cylinder, a driving plate is fixedly installed on the other end of the pressure sensor, both ends of the driving plate are integrally formed with inclined rods, and the inclined rods are slidably installed in the corresponding inclined holes; A plurality of vertical rods are fixedly mounted on the top inner wall of the vacuum cylinder, a guide frame is fixedly mounted on the bottom end of the vertical rods, the guide frame is slidably sleeved on the outer side of the driving plate, a plurality of through holes are opened at the bottom of the vacuum cylinder, and a sealing ring is fixedly mounted at the bottom of the vacuum cylinder.

[0011] Preferably, a groove is provided on the top of the movable seat, a round shaft is fixedly installed in the groove, the rotating arm is rotatably sleeved on the outer side of the round shaft, a connecting spring is fixedly connected to the right side of the rotating arm, the other end of the connecting spring is fixedly installed on the side wall of the groove, and the bottom right side of the rotating arm is movably abutted against the bottom inner wall of the groove.

[0012] Preferably, the jet cleaning mechanism further comprises: an annular tube, a mounting frame and a filter box, support plates are fixedly mounted on both sides of the bottom of the mounting frame, the filter box and the air pump are fixedly mounted on one side of one of the support plates, the transverse tube is fixedly mounted in the two support plates, and the bottom of the support plate is fixedly mounted on the top of the base; The air inlet of the air pump is connected with the bottom of the filter box, a conduit is connected between the top of the filter box and the annular tube, a filter frame is movably inserted in the filter box, a plurality of filter holes are provided at the bottom of the filter frame, a plurality of suction nozzles are connected to the top of the annular tube, a plurality of support rods are fixedly installed at the bottom of the annular tube, the support rods are fixedly installed at the top of the base, a mounting shaft is fixedly installed at both the front and rear sides of the air nozzle, the mounting shaft is rotatably installed in the mounting frame, and a round rod is fixedly installed at the front bottom of the air nozzle; A same cross bar is slidably installed in the two support plates, a plurality of connecting frames are fixedly installed at the bottom of the cross bar, the round bar is movably inserted in the corresponding connecting frame, and a vertical bar is fixedly installed at one end of the bottom of the cross bar, a slide is slidably sleeved on the outer side of the vertical bar, a cleaning motor is fixedly installed on the right side of the mounting frame, a turntable is fixedly installed on the output shaft of the cleaning motor, a cylinder is fixedly installed on the front side of the turntable, and the slide is rotatably sleeved on the outer side of the cylinder.

[0013] Preferably, the appearance inspection mechanism comprises: a plurality of industrial cameras, wherein the plurality of industrial cameras are fixedly mounted on the top of the base; The resistance detection mechanism includes: a lifting frame, a mounting seat, a second electric push rod and two detection probes, the mounting seat is fixedly mounted on the top of the base, the second electric push rod is fixedly mounted on the top of the mounting seat, the output end of the second electric push rod is fixedly connected to the lifting frame, an ammeter and a test power supply are fixedly mounted on both sides of the lifting frame, an insulating column is fixedly mounted on the bottom of the detection probe, a supporting plate is fixedly mounted on the bottom end of the insulating column, two supporting plates are fixedly mounted on both sides of the lifting frame, and square plates are fixedly mounted on the inner walls of both sides of the lifting frame, a vertical pole is fixedly mounted on the top of the mounting seat, and the square plate is slidably sleeved on the outer side of the vertical pole.

[0014] Preferably, a controller and a raw material table are provided on the top of the base, and a baffle is rotatably connected to one side of the filter box, and the baffle is movably abutted against one side of the filter frame.

[0015] The beneficial effects of the present invention are: 1. Stack the silicon wafers to be sorted on the raw material table, drive the lead screw to rotate through the driving motor, and the lead screw drives the grabbing mechanism to move horizontally through the threaded cooperation of the moving seat, so that it is located directly above the silicon wafer, start the first electric push rod to drive the side plate, the vertical plate and the vacuum cylinder to move downward, so that the sealing ring contacts the silicon wafer, start the cylinder to drive the driving plate and the inclined rod to move right, and the inclined rod drives the square plate and the piston plate to move upward through the cooperation with the corresponding inclined hole, so that the space below the piston plate forms a negative pressure to achieve the adsorption of the silicon wafer, then start the first electric push rod to drive the vacuum cylinder to move upward, so as to grab the silicon wafer upward, and when the silicon wafer contacts the inner wall of the positioning cone, the positioning cone can center the silicon wafer, so that the silicon wafer coincides with the center of the positioning cone and the vacuum cylinder, then start the driving motor to drive the moving seat to move horizontally, so as to achieve horizontal transportation of the silicon wafer; 2. When the silicon wafer moves to the top of the air blowing cleaning mechanism, the sensor contacts the corresponding induction plate to realize the in-position detection, and then starts the air pump and the cleaning motor. The air pump draws air from the annular tube and the filter box, and introduces it into the horizontal tube, and then introduces it into the air nozzle through multiple hoses to spray it out, so as to achieve the blowing of dust at the bottom of the silicon wafer. At the same time, negative pressure is formed at the suction nozzle at the top of the annular tube, so as to extract the dust blown out, and filter and collect the dust through the filter box, and start the rotary motor to drive the vacuum cylinder and the silicon wafer to rotate, so as to achieve the blowing and cleaning work at different positions of the silicon wafer, so as to achieve the effect of cleaning the silicon wafer; 3. Start the drive motor to transport the silicon wafer to the top of the appearance inspection mechanism, obtain the image information of the silicon wafer surface through multiple industrial cameras, and drive the silicon wafer to rotate through the rotating motor to obtain the information of the silicon wafer at different angles. First, judge the dust situation on the silicon wafer surface through comparison. When too much dust is detected, control the drive motor to rotate in the opposite direction to transport the silicon wafer to the top of the purge cleaning mechanism for re-cleaning. When less dust is detected, detect the hidden cracks and holes on the silicon wafer surface to judge the qualified appearance of the silicon wafer. 4. Start the drive motor to transport the silicon wafer to the top of the resistance detection mechanism, start the second electric push rod to drive the lifting frame to move upward, so that the two detection probes are in contact with the bottom sides of the silicon wafer, and then energize the test power supply to make the current pass through. The ammeter, silicon wafer and two detection probes form a loop, and the current value is obtained through the ammeter, so that the resistance value of the silicon wafer can be calculated. Then, the silicon wafer is driven to rotate by the rotating motor to realize the resistance detection of different angles of the silicon wafer, and multiple groups of resistance values ​​are compared to determine whether the silicon wafer is qualified. Through the cooperation of the drive motor and the grabbing mechanism, the silicon wafer is transported to different positions according to the qualified situation to realize automatic sorting; 5. When the appearance inspection mechanism determines that there is too much dust on the surface of the silicon wafer and controls the moving seat to move to the left through the controller, the rotating arm in the moving seat can drive the ratchet to rotate clockwise through the contact with the ratchet, and the ratchet drives the transmission gear to rotate clockwise through the rotating shaft. The transmission gear drives the connecting plate to move to the left through the engagement with the rack, thereby squeezing the transverse spring and increasing the squeezing force of the pressure plate on the varistor, and the resistance value of the varistor is reduced. Since the varistor is connected in series with the air pump, the power of the air pump is increased, thereby increasing the wind force ejected from the air nozzle, improving the blowing cleaning effect, and when the moving seat moves to the right When the rotating arm contacts the ratchet, the ratchet cannot rotate counterclockwise due to the limitation of the claw. At this time, the ratchet pushes the rotating arm to rotate counterclockwise and stretches the connecting spring. However, after the dust is blown again, if the industrial camera still detects that there is too much dust on the silicon wafer, the moving seat is controlled to move to the left again for re-blowing and cleaning. During this process, the ratchet rotates clockwise intermittently, causing the rack to gradually move to the left, and the pressure on the varistor increases step by step, so that the power of the air pump increases step by step, thereby gradually improving the blowing effect on the silicon wafer, until the dust on the surface of the silicon wafer meets the demand after blowing and cleaning; 6. When the connecting plate contacts the touch button, it means that the dust on the surface of the silicon wafer cannot be cleaned by blowing alone. At this time, the control button controls the driving motor to stop running through the controller, so that the staff can handle the silicon wafer separately. When the moving seat moves to the right and contacts the push plate, the push plate is pushed to the right, and the claw is driven to rotate counterclockwise through the connecting rod and the pull rod to release the fixation of the ratchet, so that the connecting plate is reset under the elastic force of the transverse spring, so that the extrusion force of the varistor is restored to the initial state; 7. The dust on the surface of the silicon wafer can be detected and purged through the purging and cleaning mechanism and the appearance inspection mechanism. When the dust exceeds the standard, the silicon wafer will be repeatedly purged and cleaned. The adjustment mechanism can gradually increase the purging force while repeatedly purging the silicon wafer to improve the purging and dust removal effect, thereby ensuring the accuracy of silicon wafer sorting. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 A schematic diagram of the three-dimensional structure of a sorting device for a silicon wafer sorting machine proposed by the present invention; Figure 2 A schematic cross-sectional view of a sorting device for a silicon wafer sorting machine proposed by the present invention; Figure 3 for Figure 2 A partial enlarged view of the Figure 4 for Figure 3 A partial enlarged view of part A; Figure 5 It is a cross-sectional structural schematic diagram of the resistance detection mechanism proposed by the present invention; Figure 6 for Figure 2 Another partial enlarged view in; Figure 7 A schematic diagram of a partial three-dimensional structure of a sorting device for a silicon wafer sorting machine proposed by the present invention; Figure 8 for Figure 7 A partial enlarged view of the Fig. 9 A schematic diagram of the three-dimensional structure of the adjustment mechanism proposed by the present invention; Fig.10 This is a schematic diagram of the three-dimensional structure of the purge and cleaning mechanism proposed by the present invention; Fig.11 for Fig.10 A partial enlarged view of part B; Fig.12 A schematic diagram of the three-dimensional structure of the adjustment mechanism proposed by the present invention from another viewing angle; Fig.13 The present invention is a partial cross-sectional structural schematic diagram of a sorting device for a silicon wafer sorting machine.

[0017] In the figure: 1. grabbing mechanism; 101. vacuum cylinder; 102. piston plate; 103. through hole; 104. sealing ring; 105. vertical plate; 106. inclined rod; 107. pressure sensor; 108. cylinder; 109. guide frame; 110. annular guide rail; 111. sealing ring; 2. air blowing cleaning mechanism; 201. support plate; 202. mounting frame; 203. air nozzle; 204. hose; 205. horizontal pipe; 206. air pump; 207. filter box; 208. annular pipe; 209, nozzle; 210, mounting shaft; 211, filter frame; 212, baffle; 213, crossbar; 214, vertical bar; 215, cylinder; 216, turntable; 217, cleaning motor; 218, slide plate; 219, connecting frame; 220, round bar; 3, industrial camera; 4, resistance detection mechanism; 401, mounting seat; 402, vertical bar; 403, second electric push rod; 404, square plate; 405, support plate; 406, insulating column; 407, detection probe; 408, measuring Test power supply; 409, lifting frame; 410, ammeter; 5, fixed frame; 501, support frame; 502, induction plate; 503, crossbeam; 6, moving seat; 601, sensor; 602, lead screw; 603, drive motor; 604, rotating arm; 605, connecting spring; 7, cross plate; 701, first electric push rod; 702, connecting rod; 703, side plate; 704, lifting plate; 705, vertical plate; 706, rotating motor; 707, positioning cone; 708, arc frame ; 8. Transmission gear; 801. Rotating shaft; 802. Ratchet; 803. Fixed shaft; 804. Claw; 805. Pull rod; 806. Connecting rod; 807. Fixed frame; 808. Return spring; 809. Push plate; 810. Positioning plate; 9. Rack; 901. Connecting plate; 902. Transverse spring; 903. Guide rod; 904. Touch button; 905. Mounting plate; 906. Varistor; 907. Press plate; 10. Base; 11. Controller; 12. Raw material table. DETAILED DESCRIPTION

[0018] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0019] Reference Figure 1-Figure 13 A sorting device for a silicon wafer sorting machine comprises: a base 10, a material transport mechanism, an air blowing cleaning mechanism 2, an appearance detection mechanism and a resistance detection mechanism 4 are arranged on the top of the base 10, the material transport mechanism comprises: a fixed frame 5 and a movable seat 6, the movable seat 6 is slidably installed in the fixed frame 5, a gripping mechanism 1 is connected to the top of the movable seat 6, and an adjustment mechanism is arranged on the fixed frame 5; The adjustment mechanism includes: a transmission gear 8, a mounting plate 905 and a rack 9, wherein the mounting plate 905 is fixedly mounted on the top of the fixing frame 5, a varistor 906 is fixedly mounted on one side of the mounting plate 905, a pressure plate 907 is fixedly mounted on the other end of the varistor 906, a transverse spring 902 is fixedly mounted on the other side of the pressure plate 907, a connecting plate 901 is fixedly mounted on the other end of the transverse spring 902, the connecting plate 901 is fixedly mounted on the other end of the rack 9, the rack 9 is meshed with the bottom of the transmission gear 8, a rotating shaft 801 is fixedly mounted inside the transmission gear 8, and a ratchet 802 is fixedly sleeved on the outer side of the rotating shaft 801; A rotating arm 604 is rotatably mounted in the movable seat 6; The air blowing cleaning mechanism 2 includes: an air pump 206 and multiple air nozzles 203. The air outlet of the air pump 206 is connected to a horizontal pipe 205. The bottom end of the air nozzle 203 is connected to a hose 204. The bottom end of the hose 204 is connected to the top of the horizontal pipe 205. The varistor 906 and the air pump 206 are connected in series in the same circuit.

[0020] In this embodiment, a guide rod 903 is fixedly installed on one side of the mounting plate 905, and a pressure plate 907 and a connecting plate 901 are both slidably sleeved on the outer side of the guide rod 903. A touch button 904 is fixedly installed on one side of the pressure plate 907, and the touch button 904 is adapted to the connecting plate 901. An ear plate and a positioning plate 810 are fixedly installed on the bottom of the fixing frame 5, and a rotating shaft 801 is rotatably installed in the positioning plate 810. A fixed shaft 803 is fixedly installed on the front side of the ear plate, and a claw 804 is rotatably sleeved on the outer side of the fixed shaft 803. The claw 804 movably abuts against the outer side of the ratchet 802. A pull rod 805 is hinged on the other side of the claw 804, and a connecting rod 806 is hinged on the other end of the pull rod 805. A push plate 809 is fixedly installed on the other end of the connecting rod 806, and the push plate 809 is located on the right side of the moving seat 6. A fixing frame 807 is fixedly installed at the bottom of the fixing frame 5, and the connecting rod 806 is slidably installed in the fixing frame 807. A return spring 808 is fixedly installed on the left side of the fixing frame 807, and the other end of the return spring 808 is fixedly connected to the connecting rod 806.

[0021] In this embodiment, a screw rod 602 is rotatably installed in the fixed frame 5, and the movable seat 6 is threadedly sleeved on the outer side of the screw rod 602. A driving motor 603 is fixedly installed on one side of the fixed frame 5, and one end of the screw rod 602 is fixedly installed on the output shaft of the driving motor 603. A crossbeam 503 is fixedly installed in the fixed frame 5, and the movable seat 6 is slidably sleeved on the outer side of the crossbeam 503. Support frames 501 are fixedly installed on both the front and rear sides of the fixed frame 5, and the support frame 501 is fixedly installed on the top of the base 10; A plurality of sensing plates 502 are fixedly mounted on the top of the fixing frame 5 , and a sensor 601 is fixedly mounted on the front side of the moving seat 6 , and the sensor 601 is adapted to the sensing plate 502 .

[0022] In this embodiment, the grasping mechanism 1 includes: a horizontal plate 7, a lifting plate 704, a vacuum cylinder 101 and a piston plate 102, the horizontal plate 7 is fixedly installed at the bottom of the moving seat 6, the first electric push rod 701 and the connecting rod 702 are fixedly installed on both sides of the bottom of the horizontal plate 7, the bottom of the lifting plate 704 is fixedly installed with a rotating motor 706 and two vertical plates 705, the output shaft of the rotating motor 706 is fixedly installed on the top of the vacuum cylinder 101, and the two vertical plates 705 are fixedly installed with side plates on the sides away from each other. 703, the side plate 703 is slidably sleeved on the outer side of the corresponding connecting rod 702, the output end of the first electric push rod 701 is fixedly connected to the corresponding side plate 703, the bottom ends of the two connecting rods 702 are fixedly installed with the same positioning cone 707, the bottom of the vertical plate 705 is fixedly installed with an arc frame 708, the top of the vacuum cylinder 101 is fixedly installed with an annular guide rail 110, the arc frame 708 is slidably sleeved on the outer side of the annular guide rail 110, and the piston plate 102 is slidably installed in the vacuum cylinder 101.

[0023] In this embodiment, a sealing ring 104 is fixedly sleeved on the outer side of the piston plate 102, and the sealing ring 104 abuts against the inner wall of the vacuum cylinder 101. Vertical plates 105 are fixedly installed on both sides of the top of the piston plate 102. The vertical plates 105 are slidably installed on the top of the vacuum cylinder 101. An inclined hole is opened on one side of the vertical plate 105. A cylinder 108 is fixedly installed on the top of the inner side of the vacuum cylinder 101. A pressure sensor 107 is fixedly installed on the output end of the cylinder 108. A driving plate is fixedly installed on the other end of the pressure sensor 107. Both ends of the driving plate are integrally formed with inclined rods 106, and the inclined rods 106 are slidably installed in the corresponding inclined holes. A plurality of vertical rods 214 are fixedly mounted on the top inner wall of the vacuum cylinder 101, a guide frame 109 is fixedly mounted on the bottom end of the vertical rods 214, the guide frame 109 is slidably sleeved on the outer side of the driving plate, a plurality of through holes 103 are opened at the bottom of the vacuum cylinder 101, and a sealing ring 111 is fixedly mounted at the bottom of the vacuum cylinder 101.

[0024] In this embodiment, a groove is provided on the top of the movable seat 6, a round shaft is fixedly installed in the groove, a rotating arm 604 is rotatably sleeved on the outer side of the round shaft, a connecting spring 605 is fixedly connected to the right side of the rotating arm 604, and the other end of the connecting spring 605 is fixedly installed on the side wall of the groove, and the bottom right side of the rotating arm 604 is movably abutted against the bottom inner wall of the groove.

[0025] In this embodiment, the jet cleaning mechanism further includes: an annular tube 208, a mounting frame 202 and a filter box 207, support plates 201 are fixedly mounted on both sides of the bottom of the mounting frame 202, the filter box 207 and the air pump 206 are fixedly mounted on one side of one of the support plates 201, the transverse tube 205 is fixedly mounted in the two support plates 201, and the bottom of the support plate 201 is fixedly mounted on the top of the base 10; The air inlet of the air pump 206 is connected to the bottom of the filter box 207, and a conduit is connected between the top of the filter box 207 and the annular tube 208. A filter frame 211 is movably inserted in the filter box 207, and a plurality of filter holes are provided at the bottom of the filter frame 211. The top of the annular tube 208 is connected to a plurality of suction nozzles 209, and a plurality of support rods are fixedly installed at the bottom of the annular tube 208, and the support rods are fixedly installed at the top of the base 10. The front and rear sides of the air nozzle 203 are fixedly installed with mounting shafts 210, and the mounting shafts 210 are rotatably installed in the mounting frame 202, and a round rod 220 is fixedly installed at the front bottom of the air nozzle 203; A same cross bar 213 is slidably installed in the two support plates 201, and a plurality of connecting frames 219 are fixedly installed at the bottom of the cross bar 213. The round rod 220 is movably inserted in the corresponding connecting frame 219, and a vertical rod 214 is fixedly installed at one end of the bottom of the cross bar 213. A slide plate 218 is slidably sleeved on the outer side of the vertical rod 214. A cleaning motor 217 is fixedly installed on the right side of the mounting frame 202, and a turntable 216 is fixedly installed on the output shaft of the cleaning motor 217. A cylinder 215 is fixedly installed on the front side of the turntable 216, and the slide plate 218 is rotatably sleeved on the outer side of the cylinder 215.

[0026] In this embodiment, the appearance inspection mechanism includes: a plurality of industrial cameras 3, the plurality of industrial cameras 3 are fixedly mounted on the top of the base 10, and multi-point information is acquired through the plurality of industrial cameras 3; The resistance detection mechanism 4 includes: a lifting frame 409, a mounting seat 401, a second electric push rod 403 and two detection probes 407. The mounting seat 401 is fixedly mounted on the top of the base 10, the second electric push rod 403 is fixedly mounted on the top of the mounting seat 401, and the output end of the second electric push rod 403 is fixedly connected to the lifting frame 409. An ammeter 410 and a test power supply 408 are fixedly mounted on both sides of the lifting frame 409, respectively. An insulating column 406 is fixedly mounted on the bottom of the detection probe 407, and a support plate 405 is fixedly mounted on the bottom end of the insulating column 406. The two support plates 405 are fixedly mounted on both sides of the lifting frame 409, respectively, and square plates 404 are fixedly mounted on the inner walls of both sides of the lifting frame 409. A vertical pole 402 is fixedly mounted on the top of the mounting seat 401, and the square plate 404 is slidably sleeved on the outer side of the vertical pole 402, so that the lifting frame 409 is guided for lifting and moving.

[0027] In this embodiment, a controller 11 and a raw material table 12 are disposed on the top of the base 10 , and a baffle 212 is rotatably connected to one side of the filter box 207 , and the baffle 212 is movably abutted against one side of the filter frame 211 .

[0028] When the present invention is in use, the silicon wafers to be sorted are stacked on the raw material table 12, and the screw rod 602 is driven to rotate by the driving motor 603. The screw rod 602 drives the grasping mechanism 1 to move horizontally through the threaded cooperation of the moving seat 6, so that it is located directly above the silicon wafers. The first electric push rod 701 is started to drive the side plate 703, the vertical plate 705 and the vacuum cylinder 101 to move downward, so that the sealing ring 111 contacts the silicon wafers. The cylinder 108 is started to drive the driving plate and the inclined rod 106 to move rightward. The inclined rod 106 drives the corresponding inclined hole to cooperate with the side plate 703, the vertical plate 705 and the vacuum cylinder 101 to move downward. The square plate 404 and the piston plate 102 move upward, so that negative pressure is formed in the space below the piston plate 102, so as to achieve the adsorption of the silicon wafer. Then, the first electric push rod 701 is started to drive the vacuum cylinder 101 to move upward, so as to grab the silicon wafer upward. When the silicon wafer contacts the inner wall of the positioning cone cylinder 707, the positioning cone cylinder 707 can center the silicon wafer so that the silicon wafer coincides with the center of the positioning cone cylinder 707 and the vacuum cylinder 101. Then, the driving motor 603 is started to drive the moving seat 6 to move horizontally, so as to achieve the horizontal transportation of the silicon wafer. When the silicon wafer moves to the top of the air blowing cleaning mechanism 2, the sensor 601 contacts the corresponding sensor plate 502 to realize the in-position detection, and then the air pump 206 and the cleaning motor 217 are started. The air pump 206 draws air from the annular tube 208 and the filter box 207, and introduces it into the horizontal tube 205, and then introduces it into the air nozzle 203 through multiple hoses 204 to spray out, so as to realize the purging of dust at the bottom of the silicon wafer. At the same time, negative pressure is formed at the suction nozzle 209 at the top of the annular tube 208, so as to extract the purged dust, and filter and collect the dust through the filter box 207, and start the rotary motor 706 to drive the vacuum cylinder 101 and the silicon wafer to rotate, so as to realize the purging and cleaning work at different positions of the silicon wafer, thereby achieving the effect of cleaning the silicon wafer; The drive motor 603 is started to transport the silicon wafer to the top of the appearance inspection mechanism, and the image information of the silicon wafer surface is obtained by multiple industrial cameras 3. The silicon wafer is driven to rotate by the rotary motor 706, so as to obtain information of the silicon wafer at different angles. The dust condition on the silicon wafer surface is first determined by comparison. When too much dust is detected, the drive motor 603 is controlled to rotate in the reverse direction to transport the silicon wafer to the top of the purge cleaning mechanism for re-cleaning. When less dust is detected, the hidden cracks and holes on the silicon wafer surface are detected to determine the qualified appearance of the silicon wafer. The silicon wafer is transported to the top of the resistance detection mechanism 4 by starting the driving motor 603, and the lifting frame 409 is driven to move upward by starting the second electric push rod 403, so that the two detection probes 407 are in contact with the bottom sides of the silicon wafer, and then the test power supply 408 is energized to pass the current, and the ammeter 410, the silicon wafer and the two detection probes 407 form a loop, and the current value is obtained through the ammeter 410, so that the resistance value of the silicon wafer can be calculated, and then the silicon wafer is driven to rotate by the rotating motor 706 to realize the resistance detection of different angles of the silicon wafer, and compare multiple groups of resistance values ​​to determine whether the silicon wafer is qualified, and the cooperation between the driving motor 603 and the grasping mechanism 1, the silicon wafer is transported to different positions according to the qualified situation, so as to realize automatic sorting; When the appearance detection mechanism determines that there is too much dust on the surface of the silicon wafer and controls the movable seat 6 to move to the left through the controller 11, the rotating arm 604 in the movable seat 6 can drive the ratchet 802 to rotate clockwise by abutting against the ratchet 802, and the ratchet 802 drives the transmission gear 8 to rotate clockwise through the rotating shaft 801, and the transmission gear 8 drives the connecting plate 901 to move to the left by meshing with the rack 9, thereby squeezing the transverse spring 902, and increasing the squeezing force of the pressure plate 907 on the varistor 906, and reducing the resistance value of the varistor 906. Since the varistor 906 is connected in series with the air pump 206, the power of the air pump 206 is increased, thereby increasing the wind force ejected from the air nozzle 203, and improving the air blowing cleaning effect, and When the movable seat 6 moves to the right so that the rotating arm 604 contacts the ratchet 802, the ratchet 802 cannot rotate counterclockwise due to the restriction of the claw 804. At this time, the ratchet 802 pushes the rotating arm 604 to rotate counterclockwise and stretches the connecting spring 605. However, after the dust is blown again, when the industrial camera 3 still detects that there is too much dust on the silicon wafer, the movable seat 6 is controlled to move to the left again for re-blowing and cleaning. During this process, the ratchet 802 rotates clockwise intermittently, so that the rack 9 gradually moves to the left, and the pressure on the varistor 906 increases step by step, so that the power of the air pump 206 increases step by step, thereby gradually improving the blowing effect on the silicon wafer, until the dust on the surface of the silicon wafer meets the demand after blowing and cleaning; When the connecting plate 901 contacts the touch button 904, it means that the dust on the surface of the silicon wafer cannot be cleaned by blowing alone. At this time, the control button controls the drive motor 603 to stop running through the controller 11, so as to facilitate the staff to handle the silicon wafer separately. When the moving seat 6 moves to the right and contacts the push plate 809, it pushes the push plate 809 to move to the right, and drives the claw 804 to rotate counterclockwise through the connecting rod 806 and the pull rod 805 to release the fixation of the ratchet 802, so that the connecting plate 901 is reset under the elastic force of the transverse spring 902, so that the squeezing force of the varistor 906 is restored to the initial state.

[0029] The above is a detailed introduction to a sorting device for a silicon wafer sorting machine provided by the present invention. Specific embodiments are used in this article to explain the principles and implementation methods of the present invention. The description of the above embodiments is only used to help understand the method of the present invention and its core idea. It should be pointed out that for ordinary technicians in this technical field, without departing from the principle of the present invention, several improvements and modifications can be made to the present invention, and these improvements and modifications also fall within the scope of protection of the claims of the present invention.

Claims

1. A sorting device for a silicon wafer sorting machine, characterized in that: include: A base (10), wherein a material transport mechanism, an air blowing cleaning mechanism (2), an appearance detection mechanism and a resistance detection mechanism (4) are arranged on the top of the base (10), wherein the material transport mechanism comprises: a fixed frame (5) and a movable seat (6), wherein the movable seat (6) is slidably mounted in the fixed frame (5), a gripping mechanism (1) is connected to the top of the movable seat (6), and an adjustment mechanism is arranged on the fixed frame (5); The adjustment mechanism comprises: a transmission gear (8), a mounting plate (905) and a rack (9); the mounting plate (905) is fixedly mounted on the top of the fixing frame (5); a varistor (906) is fixedly mounted on one side of the mounting plate (905); a pressure plate (907) is fixedly mounted on the other end of the varistor (906); a transverse spring (902) is fixedly mounted on the other side of the pressure plate (907); a connecting plate (901) is fixedly mounted on the other end of the transverse spring (902); the connecting plate (901) is fixedly mounted on the other end of the rack (9); the rack (9) is meshed with the bottom of the transmission gear (8); a rotating shaft (801) is fixedly mounted inside the transmission gear (8); and a ratchet (802) is fixedly sleeved on the outside of the rotating shaft (801); A rotating arm (604) is rotatably mounted in the movable seat (6); The air blowing cleaning mechanism (2) comprises: an air pump (206) and a plurality of air nozzles (203); the air outlet of the air pump (206) is connected to a transverse tube (205); the bottom end of the air nozzle (203) is connected to a hose (204); the bottom end of the hose (204) is connected to the top of the transverse tube (205); the varistor (906) and the air pump (206) are connected in series in the same circuit; The gripping mechanism (1) comprises: a transverse plate (7), a lifting plate (704), a vacuum cylinder (101) and a piston plate (102); the transverse plate (7) is fixedly mounted on the bottom of the movable seat (6); a first electric push rod (701) and a connecting rod (702) are fixedly mounted on both sides of the bottom of the transverse plate (7); a rotating motor (706) and two vertical plates (705) are fixedly mounted on the bottom of the lifting plate (704); an output shaft of the rotating motor (706) is fixedly mounted on the top of the vacuum cylinder (101); and side plates (706) are fixedly mounted on the sides of the two vertical plates (705) that are away from each other. 03), the side plate (703) is slidably sleeved on the outer side of the corresponding connecting rod (702), the output end of the first electric push rod (701) is fixedly connected to the corresponding side plate (703), the bottom ends of the two connecting rods (702) are fixedly installed with the same positioning cone (707), the bottom of the vertical plate (705) is fixedly installed with an arc frame (708), the top of the vacuum cylinder (101) is fixedly installed with an annular guide rail (110), the arc frame (708) is slidably sleeved on the outer side of the annular guide rail (110), and the piston plate (102) is slidably installed in the vacuum cylinder (101).

2. A sorting device for a silicon wafer sorting machine according to claim 1, characterized in that: A guide rod (903) is fixedly mounted on one side of the mounting plate (905); the pressure plate (907) and the connecting plate (901) are both slidably sleeved on the outside of the guide rod (903); a touch button (904) is fixedly mounted on one side of the pressure plate (907); the touch button (904) is matched with the connecting plate (901); an ear plate and a positioning plate (810) are fixedly mounted on the bottom of the fixing frame (5); the rotating shaft (801) is rotatably mounted in the positioning plate (810); A fixed shaft (803) is fixedly installed on the front side of the ear plate, a claw (804) is rotatably sleeved on the outer side of the fixed shaft (803), the claw (804) is movably abutted against the outer side of the ratchet (802), a pull rod (805) is hinged on the other side of the claw (804), a connecting rod (806) is hinged on the other end of the pull rod (805), a push plate (809) is fixedly installed on the other end of the connecting rod (806), and the push plate (809) is located on the right side of the movable seat (6); A fixing frame (807) is fixedly mounted on the bottom of the fixing frame (5), the connecting rod (806) is slidably mounted in the fixing frame (807), a return spring (808) is fixedly mounted on the left side of the fixing frame (807), and the other end of the return spring (808) is fixedly connected to the connecting rod (806).

3. The sorting device for a silicon wafer sorting machine according to claim 1, characterized in that: A screw rod (602) is rotatably mounted in the fixed frame (5), the movable seat (6) is threadedly sleeved on the outside of the screw rod (602), a driving motor (603) is fixedly mounted on one side of the fixed frame (5), one end of the screw rod (602) is fixedly mounted on the output shaft of the driving motor (603), a cross beam (503) is fixedly mounted in the fixed frame (5), the movable seat (6) is slidably sleeved on the outside of the cross beam (503), and support frames (501) are fixedly mounted on both the front and rear sides of the fixed frame (5), and the support frame (501) is fixedly mounted on the top of the base (10); A plurality of sensing plates (502) are fixedly mounted on the top of the fixed frame (5), and a sensor (601) is fixedly mounted on the front side of the movable seat (6), wherein the sensor (601) is compatible with the sensing plate (502).

4. The sorting device for a silicon wafer sorting machine according to claim 1, characterized in that: A sealing ring (104) is fixedly sleeved on the outer side of the piston plate (102), the sealing ring (104) abuts against the inner wall of the vacuum cylinder (101), vertical plates (105) are fixedly mounted on both sides of the top of the piston plate (102), the vertical plates (105) are slidably mounted on the top of the vacuum cylinder (101), an inclined hole is provided on one side of the vertical plate (105), a cylinder (108) is fixedly mounted on the top of the inner side of the vacuum cylinder (101), a pressure sensor (107) is fixedly mounted on the output end of the cylinder (108), a driving plate is fixedly mounted on the other end of the pressure sensor (107), both ends of the driving plate are integrally formed with inclined rods (106), the inclined rods (106) are slidably mounted in the corresponding inclined holes; A plurality of vertical rods (214) are fixedly mounted on the inner wall of the top of the vacuum cylinder (101); a guide frame (109) is fixedly mounted on the bottom end of the vertical rod (214); the guide frame (109) is slidably sleeved on the outside of the driving plate; a plurality of through holes (103) are formed at the bottom of the vacuum cylinder (101); and a sealing ring (111) is fixedly mounted on the bottom of the vacuum cylinder (101).

5. The sorting device for a silicon wafer sorting machine according to claim 1, characterized in that: The top of the movable seat (6) is provided with a groove, a round shaft is fixedly installed in the groove, the rotating arm (604) is rotatably sleeved on the outer side of the round shaft, the right side of the rotating arm (604) is fixedly connected to a connecting spring (605), the other end of the connecting spring (605) is fixedly installed on the side wall of the groove, and the right side of the bottom of the rotating arm (604) is movably abutted against the bottom inner wall of the groove.

6. The sorting device for a silicon wafer sorting machine according to claim 1, characterized in that: The jet cleaning mechanism further comprises: an annular tube (208), a mounting frame (202) and a filter box (207); support plates (201) are fixedly mounted on both sides of the bottom of the mounting frame (202); the filter box (207) and the air pump (206) are fixedly mounted on one side of one of the support plates (201); the transverse tube (205) is fixedly mounted inside the two support plates (201); and the bottom of the support plate (201) is fixedly mounted on the top of the base (10); The air inlet of the air pump (206) is connected to the bottom of the filter box (207), a conduit is connected between the top of the filter box (207) and the annular tube (208), a filter frame (211) is movably inserted in the filter box (207), a plurality of filter holes are provided at the bottom of the filter frame (211), a plurality of suction nozzles (209) are connected to the top of the annular tube (208), a plurality of support rods are fixedly installed at the bottom of the annular tube (208), the support rods are fixedly installed at the top of the base (10), a mounting shaft (210) is fixedly installed at both the front and rear sides of the air nozzle (203), the mounting shaft (210) is rotatably installed in the mounting frame (202), and a round rod (220) is fixedly installed at the front bottom of the air nozzle (203); The same cross bar (213) is slidably mounted in the two support plates (201), a plurality of connection frames (219) are fixedly mounted at the bottom of the cross bar (213), the round bar (220) is movably inserted in the corresponding connection frame (219), a vertical bar (214) is fixedly mounted at one end of the bottom of the cross bar (213), a slide plate (218) is slidably sleeved on the outer side of the vertical bar (214), a cleaning motor (217) is fixedly mounted on the right side of the mounting frame (202), a rotating disk (216) is fixedly mounted on the output shaft of the cleaning motor (217), a cylinder (215) is fixedly mounted on the front side of the rotating disk (216), and the slide plate (218) is rotatably sleeved on the outer side of the cylinder (215).

7. The sorting device for a silicon wafer sorting machine according to claim 1, characterized in that: The appearance detection mechanism comprises: a plurality of industrial cameras (3), wherein the plurality of industrial cameras (3) are all fixedly mounted on the top of a base (10); The resistance detection mechanism (4) comprises: a lifting frame (409), a mounting seat (401), a second electric push rod (403) and two detection probes (407); the mounting seat (401) is fixedly mounted on the top of the base (10); the second electric push rod (403) is fixedly mounted on the top of the mounting seat (401); the output end of the second electric push rod (403) is fixedly connected to the lifting frame (409); and an ammeter (410) and an ammeter (411) are fixedly mounted on both sides of the lifting frame (409). A test power supply (408), an insulating column (406) is fixedly installed at the bottom of the detection probe (407), a support plate (405) is fixedly installed at the bottom end of the insulating column (406), the two support plates (405) are respectively fixedly installed on both sides of the lifting frame (409), and square plates (404) are fixedly installed on the inner walls of both sides of the lifting frame (409), a vertical pole (402) is fixedly installed on the top of the mounting seat (401), and the square plate (404) is slidably sleeved on the outer side of the vertical pole (402).

8. The sorting device for a silicon wafer sorting machine according to claim 6, characterized in that: A controller (11) and a raw material table (12) are arranged on the top of the base (10); a baffle (212) is rotatably connected to one side of the filter box (207); the baffle (212) movably abuts against one side of the filter frame (211).

Images