Ignition control method and system for radio frequency power supply

Abstract

The invention relates to the technical field of radio frequency power supplies, in particular to a radio frequency power supply ignition control method and system, the method is applied to a radio frequency power supply comprising a power amplifier, and the method comprises the steps that the power amplifier is controlled to output a power signal higher than target power to an input load, so that gas in the input load is subjected to overshoot ignition; determining changes in voltage and current in the input load based on a voltage and current sensor; and after the gas is successfully ignited, the power amplifier is controlled to output a constant power signal within a preset target power range to the input load. The power amplifier is controlled to output the power signal exceeding the target power to the input load, gas overshoot ignition is achieved, and whether gas ignition succeeds or not is judged through voltage and current changes of the input load. Once the ignition succeeds, the power amplifier can be adjusted to output a constant power signal so as to keep the constant power signal within a preset target power range, and therefore the problem that the ignition success rate is low is solved.

Description

[0001] This application is a divisional application of the parent application with application number "CN202410962415.0", application date 2024-07-18, and name "RF power supply ignition control method and system". Technical Field

[0002] The present invention relates to the technical field of radio frequency power supply, and in particular to a radio frequency power supply ignition control method and system. Background Art

[0003] In the prior art, the ignition process of the RF plasma power system usually requires suppression of the power signal to ensure stable operation. This suppression is usually achieved by using a relatively low duty cycle for power control or a balanced power amplifier structure. However, this approach often leads to a low ignition success rate because they may not provide sufficient energy or a stable electric field environment during the ignition process.

[0004] The above contents are only used to assist in understanding the technical solution of the present invention and do not constitute an admission that the above contents are prior art. Summary of the invention

[0005] The main purpose of the present invention is to provide a radio frequency power supply ignition control method and system, aiming to solve the technical problem in the prior art that the ignition of the radio frequency plasma power system usually requires suppression of overcharging of the power signal, usually adopts a relatively low duty cycle for power control or a balanced power amplifier structure for power control, which leads to a low ignition success rate.

[0006] To achieve the above object, the present invention provides a radio frequency power supply ignition control method, which is applied to a radio frequency power supply including a power amplifier, and the method comprises: Controlling the power amplifier to output a power signal higher than the target power to the input load, so as to cause the gas in the input load to overshoot and ignite; After the gas is successfully ignited, controlling the power amplifier to output a constant power signal within a preset target power range to the input load; After controlling the power amplifier to output a power signal higher than the target power to the input load so that the gas in the input load overshoots and ignites, the method further includes: Determine the change of voltage and current in the input load based on the voltage and current sensor; wherein the voltage and current sensor is arranged between the power supply and the matcher, or arranged at a detectable point; the voltage and current sensor is used to monitor the change of voltage and current in the input load; Determining a change trend of input load impedance based on changes in voltage and current in the input load; Whether the gas is ignited successfully is determined based on the change trend of the input load impedance.

[0007] Optionally, there are one or more voltage and current sensors, and changes in voltage and current monitored by the voltage and current sensors located at different monitoring positions correspond to a change trend of the input load impedance.

[0008] Optionally, the controlling the power amplifier to output a power signal higher than the target power to the input load so that the gas in the input load overshoots and ignites before the ignition further includes: Determine the voltage value and the current value of the input load based on the voltage and current sensor; Determining an impedance value of the input load and a variation trend of the impedance value based on a voltage value and a current value in the input load; When the impedance value of the input load is within or tends to be within a preset flameout state resistance range, the step of controlling the power amplifier to output a power signal higher than the target power to the input load is performed.

[0009] Optionally, the controlling the power amplifier to output a power signal higher than the target power to the input load so that the gas in the input load overshoots and ignites before the ignition further includes: Determining whether the power amplifier outputs a power signal to an input load for the first time in this operation; If yes, the step of controlling the power amplifier to output a power signal higher than the target power to the input load is performed.

[0010] Optionally, the duty cycle of the power signal output by the power amplifier is a periodic working mode, and the periodic working mode includes an ignition state, an ignition state, and a gradual ignition state.

[0011] Optionally, controlling the power amplifier to output a power signal higher than a target power to an input load includes: Determining a preset threshold, a preset ratio value, or a preset difference value of a power signal; The power amplifier is controlled to output a power signal higher than a target power to an input load based on a preset threshold, a preset ratio value or a preset difference value of the power signal.

[0012] Optionally, controlling the power amplifier to output a power signal higher than a target power to an input load based on a preset threshold, a preset ratio value or a preset difference value of the power signal includes: Determining a duty cycle of an output signal of the power amplifier; Based on a preset threshold, a preset ratio or a preset difference of the power signal, the power amplifier is controlled to output a power signal higher than a target power to an input load by adjusting the duty cycle of the output signal of the power amplifier.

[0013] Optionally, after controlling the power amplifier to output a power signal higher than the target power to the input load so that the gas in the input load overshoots and ignites, the method further includes: Obtaining the gas overshoot ignition duration in the input load; When the gas overshoot ignition duration is within a preset proportional duration of the positive waveform of the power amplifier output power signal, determining whether the gas is ignited successfully; If the gas is ignited successfully, executing the step of controlling the power amplifier to output a constant power signal within a preset target power range to the input load after the gas is ignited successfully; If the gas ignition fails, the output power of the power amplifier or the preset proportional duration of the positive waveform of the output power signal is increased to make the gas ignited successfully.

[0014] Optionally, after the gas is ignited successfully, after controlling the power amplifier to output a constant power signal within a preset target power range to the input load, the method further includes: During the switching process from the power amplifier outputting a power signal higher than the target power to outputting a constant power signal within a preset target power range to the input load, the control signal of the inverter in the power amplifier is set to zero.

[0015] In addition, to achieve the above-mentioned purpose, the present invention also provides a radio frequency power supply ignition control system, the system comprising: a power amplifier and a main controller; Wherein, the main controller is connected to the power amplifier, and the power amplifier is connected to an input load; The main controller is used to output a first control instruction to the power amplifier; The power amplifier is used to output a power signal higher than the target power to the input load when receiving the first control instruction, so as to cause the gas in the input load to overshoot and ignite; The main controller is further configured to output a second control instruction to the power amplifier after the gas is successfully ignited; The power amplifier is further configured to control the power amplifier to output a power signal within a preset target power range to the input load upon receiving the second control instruction, so that the power signal in the input load is constant; The radio frequency power supply ignition control system further includes: a voltage and current sensor; The voltage and current sensor is connected to the main controller; The voltage and current sensor is used to detect the voltage and current in the input load and output the voltage and current signals to the main controller.

[0016] Optionally, the main controller is used to determine a change trend of the input load impedance based on the voltage and current signals in the input load when receiving the voltage and current signals; The main controller is further used to determine whether the gas is ignited successfully based on the change trend of the input load impedance.

[0017] Optionally, the main controller is used to determine the impedance value of the input load impedance and the change trend of the impedance value based on the voltage and current signals in the input load when receiving the voltage and current signals; The main controller is further configured to output a first control instruction to the power amplifier in the next pulse cycle when the impedance value of the input load impedance in the current pulse cycle is within or tends to be within a preset flameout state resistance range.

[0018] The present invention provides a radio frequency power supply ignition control method, which is applied to a radio frequency power supply including a power amplifier, and the method includes: controlling the power amplifier to output a power signal higher than the target power to the input load, so that the gas in the input load overshoots and ignites; after the gas is successfully ignited, controlling the power amplifier to output a constant power signal within a preset target power range to the input load; after the power amplifier is controlled to output a power signal higher than the target power to the input load, so that the gas in the input load overshoots and ignites, it also includes: determining the changes in voltage and current in the input load based on a voltage and current sensor; wherein the voltage and current sensor is arranged between the power supply and the matcher, or arranged at a detectable point; the voltage and current sensor is used to monitor the changes in voltage and current of the input load; determining the change trend of the input load impedance based on the changes in voltage and current in the input load; and determining whether the gas is successfully ignited based on the change trend of the input load impedance. The present invention realizes gas overshoot ignition by controlling the power amplifier to output a power signal exceeding the target power to the input load, and determines the change trend of the input load impedance through the changes in the voltage and current of the input load, thereby determining whether the gas is successfully ignited. Once the ignition is successful, it will adjust the power amplifier to output a constant power signal to keep it within the preset target power range, thus solving the problem of low ignition success rate. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a flow chart of the first embodiment of the radio frequency power supply ignition control method of the present invention; Figure 2 It is a flow chart of the second embodiment of the RF power supply ignition control method of the present invention; Figure 3 It is a schematic diagram of the radio frequency power supply ignition control system of the present invention.

[0020] The realization of the purpose, functional features and advantages of the present invention will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0021] It should be understood that the specific embodiments described herein are only used to explain the present invention, and are not used to limit the present invention.

[0022] Reference Figure 1 The first embodiment of the RF power supply ignition control method of the present invention provides a RF power supply ignition control method, which is applied to a RF power supply including a power amplifier, and the method includes: S10: Controlling the power amplifier to output a power signal higher than the target power to the chamber load or the input load, so as to cause the gas in the chamber load to overshoot and ignite.

[0023] S20: After the gas is ignited successfully, controlling the power amplifier to output a constant power signal within a preset target power range to the chamber load or the input load.

[0024] It should be noted that the execution subject of this embodiment may be a main controller having the function of controlling the output power of the power amplifier, or other electronic equipment capable of realizing the above functions, and this embodiment does not impose any limitation on this.

[0025] It should be noted that the power amplifier refers to a device for increasing the power of the input signal. In the present embodiment, the power amplifier is used to output a power signal higher than the target power to the chamber load or input load to promote gas overshoot ignition. The chamber load refers to a device in the RF plasma system for containing gas and discharging. The input load refers to the load connected to the output end of the RF power supply in the RF plasma system, including the chamber load, and the device or device between the power amplifier and the chamber load in the RF power supply. The power signal output by the power amplifier is controlled to the chamber load or input load in order to achieve gas overshoot ignition. Gas overshoot ignition refers to stimulating the gas in the chamber load by a high-power signal to achieve the ignition process. The target power refers to the preset power level required during the ignition process. A constant power signal refers to a stable power signal that needs to be maintained within a preset target power range once ignition is successful.

[0026] Specifically, the power amplifier is controlled to output a power signal higher than the target power to the chamber load or the input load to stimulate the gas overshoot ignition. Once the gas ignition is successful, the power amplifier output is adjusted to maintain a constant power signal within a preset target power range, thereby improving the ignition success rate because it can provide sufficient energy during the ignition process while maintaining a stable electric field environment, thereby ensuring the occurrence of gas overshoot ignition.

[0027] The present embodiment provides a method for controlling ignition of an RF power supply, which is applied to an RF power supply including a power amplifier, and the method includes: controlling the power amplifier to output a power signal higher than a target power to a chamber load or an input load, so that the gas in the chamber load overshoots and ignites; after the gas is successfully ignited, controlling the power amplifier to output a constant power signal within a preset target power range to the chamber load or the input load. The present embodiment achieves gas overshoot ignition by controlling the power amplifier to output a power signal exceeding the target power to the chamber load or the input load. Once the ignition is successful, it adjusts the power amplifier to output a constant power signal to keep it within the preset target power range, thereby solving the problem of low ignition success rate.

[0028] Reference Figure 2 , Figure 2 This is a flow chart of the second embodiment of the RF power supply ignition control method of the present invention. Figure 1 The embodiment shown provides a second embodiment of the RF power supply ignition control method of the present invention.

[0029] In a second embodiment, after controlling the power amplifier to output a power signal higher than the target power to the chamber load so as to cause the gas in the chamber load to overshoot and ignite, the method further includes: S01: Determine changes in voltage and current in the chamber load or input load based on a voltage and current sensor; S02: determining a change trend of chamber load impedance or input load impedance based on changes in the voltage and current; S03: Determine whether the gas is ignited successfully based on the change trend of the chamber load impedance or the input load impedance.

[0030] It should be noted that the voltage and current sensors are used to monitor the changes in voltage and current in the chamber load or the whole composed of the matcher and the chamber load. They provide real-time voltage and current data for analysis in subsequent steps. Based on the data provided by the voltage and current sensors, the changes in voltage and current in the chamber load or the whole composed of the matcher and the chamber load are monitored, and these changes reflect the gas discharge during the ignition process. According to the changing trend of the voltage and current in the chamber load or the input load, the impedance change of the chamber load or the input load can be inferred. This is an important basis for judging whether the ignition is successful, because successful ignition will lead to a significant change in impedance. According to the changing trend of the chamber load impedance or the input load impedance, it can be determined whether the gas is successfully ignited. Successful ignition usually leads to a significant change in the chamber load impedance or the input load impedance. It should be understood that the voltage and current sensor can be arranged between the power supply and the matcher, or between the matcher and the chamber load, or at a monitorable point.

[0031] There may be one or more voltage and current sensors, and the changes in voltage and current monitored by the voltage and current sensors located at different monitoring positions correspond to the change trend of the chamber load impedance or the input load impedance.

[0032] Specifically, a voltage and current sensor is used to monitor the voltage and current changes in the chamber load. These changes are analyzed to determine the change trend of the chamber load impedance or the input load impedance. Based on the impedance change trend, it is determined whether the gas is successfully ignited. The effect of these steps is to provide a method for real-time monitoring and judging whether the ignition is successful or not. By analyzing the voltage and current changes in the chamber load or the input load, it is possible to accurately determine whether the gas is successfully ignited, thereby timely adjusting the power output or taking other measures to ensure the smooth progress of the ignition process.

[0033] Furthermore, in one embodiment, before the controlling the power amplifier to output a power signal higher than the target power to the chamber load or the input load so that the gas in the chamber load overshoots and ignites, the process further includes: Determine the voltage value and the current value in the chamber load or the input load based on the voltage and current sensor; Determine the impedance value of the chamber load impedance or the input load impedance and the change trend of the impedance value based on the voltage value and the current value in the chamber load; When the impedance value of the chamber load impedance or the input load impedance is within or tends to be within a preset flameout state resistance range, the step of controlling the power amplifier to output a power signal higher than the target power to the chamber load or the input load is performed.

[0034] It should be noted that the voltage value and current value refer to the real-time voltage and current values ​​in the chamber load or input load. These values ​​are obtained by the voltage and current sensor for analysis in subsequent steps. The impedance value of the chamber load impedance or the input load impedance and the change trend of the impedance value refer to the impedance value of the chamber load or the input load can be calculated according to the voltage value and current value in the chamber load or the input load, and the change trend of the impedance value over time is analyzed. The chamber load impedance refers to the equivalent impedance from the input end of the plasma chamber to the chamber load in the plasma chamber. The input load impedance refers to the equivalent impedance from the RF power source to the load connected to its output end. The chamber load impedance and the input load impedance determine the absorption efficiency of the plasma chamber to the RF power. This helps to determine whether the gas in the chamber load is about to ignite, because there is usually a specific change in the impedance value before ignition. The preset flameout state resistance range refers to a preset impedance value range used to determine whether the ignition operation should be performed. When the impedance value of the chamber load or the input load is within or tends to this range, the system will perform the ignition operation.

[0035] Specifically, a voltage and current sensor is used to monitor the voltage and current values ​​in the chamber load or input load. Based on these values, the impedance value of the chamber load or input load is calculated, and the change trend of the impedance value is analyzed. When the impedance value is in or tends to be within the preset flameout state resistance range, the step of controlling the power amplifier to output a power signal higher than the target power to the chamber load or input load is performed to promote gas ignition. The effect of these steps is to improve the intelligence of the system. By monitoring the voltage and current changes of the chamber load or input load and judging according to the change trend of the impedance value, the system can more accurately determine when to perform the ignition operation, thereby improving the efficiency and success rate of ignition.

[0036] Furthermore, in one embodiment, before the controlling the power amplifier to output a power signal higher than the target power to the chamber load or the input load so that the gas in the chamber load overshoots and ignites, the process further includes: Determining whether the power amplifier outputs a power signal to a chamber load or an input load for the first time in this operation; If yes, the step of controlling the power amplifier to output a power signal higher than the target power to the chamber load or the input load is performed.

[0037] It should be noted that whether the power amplifier outputs a power signal to the chamber load or input load for the first time in this operation refers to determining whether the power amplifier outputs a power signal to the chamber load or input load for the first time in the current operation cycle. The purpose of this step is to ensure that appropriate control steps can be performed each time a new operation cycle starts. Executing the step of controlling the power amplifier to output a power signal higher than the target power to the chamber load or input load refers to executing a control step of adjusting the power signal to a power higher than the target power when it is determined that the power amplifier outputs a power signal to the chamber load or input load for the first time in this operation, so as to ensure that the gas in the chamber load or input load can be ignited smoothly.

[0038] Specifically, at the beginning of each operation cycle, it is detected whether the power amplifier has output a power signal to the chamber load or the input load. If it is the first time to output the power signal, a control step of adjusting the power signal to be higher than the target power is performed. The effect of this step is to ensure that the necessary control can be performed to promote the successful ignition of the gas in the chamber load at the beginning of each new operation cycle. By detecting whether the power amplifier has output a power signal, the system can determine whether it is necessary to adjust the output signal to ensure successful ignition.

[0039] Furthermore, in one embodiment, before the controlling the power amplifier to output a power signal higher than the target power to the chamber load or the input load so that the gas in the chamber load overshoots and ignites, the process further includes: Determining a duty cycle of a power signal output by the power amplifier, and determining whether the duty cycle is lower than a preset ratio of duty cycle; If yes, the step of controlling the power amplifier to output a power signal higher than the target power to the chamber load or the input load is performed.

[0040] It should be noted that different loads have different duty ratios that are easy to ignite. The preset duty ratios are the critical values ​​of the duty ratios for successful ignition of different loads. When the duty ratio is lower than the preset duty ratio, it is an output power signal under a low duty ratio setting. The output power signal under a low duty ratio setting refers to the power signal output by the power amplifier under a low duty ratio setting. A low duty ratio usually indicates a low active time ratio of the signal within a cycle. In this case, the output signal may require special processing to ensure successful ignition. Executing the step of controlling the power amplifier to output a power signal higher than the target power to the chamber load or input load means that when it is determined that the power signal output by the power amplifier is under a low duty ratio setting, a control step of adjusting the power signal to a power higher than the target power is executed to ensure that the gas in the chamber load can be ignited smoothly.

[0041] The duty cycle of the power signal output by the power amplifier is a periodic working mode, and the periodic working mode includes an ignition state, an ignition state, and a gradual ignition state.

[0042] Specifically, the power signal output by the power amplifier is monitored and determined to be at a low duty cycle setting. If it is an output signal at a low duty cycle setting, a control step is performed to adjust the power signal to be higher than the target power. The effect of this step is to perform special processing on the power signal at a low duty cycle setting to ensure that the gas in the chamber load can be ignited smoothly even in this case. By detecting the signal condition and adjusting the output accordingly, the system can improve the success rate and stability of ignition.

[0043] Furthermore, in one embodiment, controlling the power amplifier to output a power signal higher than a target power to a chamber load or an input load includes: Determining a preset threshold, a preset ratio value, or a preset difference value of a power signal; Based on a preset threshold, a preset ratio or a preset difference of the power signal, the power amplifier is controlled to output a power signal higher than a target power to a chamber load or an input load.

[0044] It should be noted that the preset threshold, preset ratio or preset difference refers to a set value used to determine when to adjust the power signal. The preset threshold can be an absolute power value, the preset ratio can be a ratio relative to the target power, and the preset difference is the difference between the target power and the actual output power. These set values ​​are adjusted according to system requirements and performance characteristics to ensure the effectiveness and safety of the ignition operation. Controlling the power amplifier to output a power signal higher than the target power to the chamber load or input load based on the preset threshold, preset ratio or preset difference of the power signal means adjusting the output of the power amplifier to be higher than the target power according to the preset threshold, ratio or difference. This ensures that the chamber load is properly controlled when necessary to promote gas ignition.

[0045] Specifically, a preset threshold, a preset ratio or a preset difference is set according to system requirements and performance characteristics. The power signal is monitored and compared with the preset value. If the power signal exceeds the preset value, the corresponding control strategy is executed to adjust the power amplifier to output a power signal higher than the target power to the chamber load or input load. The effect of this step is to ensure that the ignition operation can be effectively achieved under different working conditions by dynamically adjusting the output power. The preset threshold, ratio or difference provides a flexible control method that enables the system to adapt to different operating conditions and ensure the success and stability of the ignition.

[0046] Further, in this embodiment, the controlling the power amplifier to output a power signal higher than the target power to the chamber load or the input load based on the preset threshold, preset ratio or preset difference of the power signal includes: Determining a duty cycle of an output signal of the power amplifier; Based on a preset threshold, a preset ratio or a preset difference of the power signal, the power amplifier is controlled to output a power signal higher than a target power to a chamber load or an input load by adjusting the duty cycle of the output signal of the power amplifier.

[0047] It should be noted that determining the duty cycle of the output signal of the power amplifier refers to determining the ratio of the active time of the power signal within a cycle to the total cycle time. The determination of the duty cycle is crucial for controlling the energy distribution of the output signal. Controlling the power amplifier to output a power signal higher than the target power to the chamber load or input load by adjusting the duty cycle of the output signal of the power amplifier based on a preset threshold, a preset ratio or a preset difference of the power signal means controlling the output of the power amplifier to be higher than the target power by adjusting the duty cycle of the power signal according to a preset threshold, ratio or difference. This method ensures that the output power can be adjusted when necessary to facilitate the smooth ignition of the gas in the chamber load.

[0048] Specifically, the duty cycle of the power signal is monitored. According to a preset threshold, ratio value or difference value, the duty cycle of the power signal is adjusted. The output of the power amplifier is controlled by adjusting the duty cycle to ensure that the output power is higher than the target power. By dynamically adjusting the duty cycle, the system can flexibly control the output power, thereby ensuring that the ignition operation can be effectively achieved under different operating conditions.

[0049] In addition, in one embodiment, after controlling the power amplifier to output a power signal higher than the target power to the chamber load or the input load so as to cause the gas in the chamber load to overshoot and ignite, the method further includes: Obtaining the gas overshoot ignition duration in the chamber load; When the gas overshoot ignition duration is within a preset proportional duration of the positive waveform of the power amplifier output power signal, determining whether the gas is ignited successfully; If the gas is ignited successfully, then executing the step of controlling the power amplifier to output a constant power signal within a preset target power range to the chamber load or the input load after the gas is ignited successfully; If the gas ignition is unsuccessful, the output power of the power amplifier or the preset proportional duration of the positive waveform of the output power signal is increased to make the gas ignited successfully.

[0050] It should be noted that obtaining the gas overshoot ignition duration in the chamber load refers to measuring the time length required for gas overshoot ignition, which can help determine the ignition effect and subsequent control strategy. When the gas overshoot ignition duration is within the preset proportional duration of the positive waveform of the power amplifier output power signal, determining whether the gas is successfully ignited refers to monitoring whether the gas is successfully ignited within the preset proportional time range, which helps to evaluate the ignition effect and make further adjustments. If the gas is successfully ignited, executing the step of controlling the power amplifier to output a constant power signal within a preset target power range to the chamber load or input load after the gas is successfully ignited means that if the ignition is successful, the power amplifier output is adjusted to a constant power within a preset target power range to maintain the ignition state. If the gas is not successfully ignited, increasing the output power of the power amplifier or the preset proportional duration of the positive waveform of the output power signal so that the gas is successfully ignited means that if the ignition is not successful, increasing the output power of the power amplifier or the duration of the output signal to improve the ignition success rate.

[0051] Specifically, measure the length of time required for the gas overshoot ignition. Monitor the success of the gas ignition and execute the corresponding control strategy based on the result. Adjust the output power or the duration of the output signal as needed to ensure successful gas ignition. The effect of this step is to ensure that the gas can be successfully ignited by dynamically adjusting the output power signal after ignition, thereby improving the stability and performance of the system. This step involves processing the output power signal after the gas overshoot ignition to ensure successful ignition.

[0052] In addition, in one embodiment, since the inverter in the power amplifier mostly adopts an H-bridge inverter circuit, during the pulse switching period, multiple switch tubes of the H-bridge circuit will be fully turned on due to the influence of continuous current, causing circuit damage. Therefore, in order to solve the above problem, after the gas is successfully ignited, after controlling the power amplifier to output a constant power signal within a preset target power range to the chamber load or input load, it also includes: During the switching process from the power amplifier outputting a power signal higher than the target power to outputting a constant power signal within a preset target power range to the chamber load or the input load, the control signal of the inverter in the power amplifier is set to zero.

[0053] It should be noted that by setting the control signal of the inverter to zero during the switching process of the multi-level pulse signal, the full conduction of the H-bridge in the inverter is effectively avoided, which is not easy to cause circuit damage, so that the RF power supply can still operate stably during the pulse switching overshoot, which well solves the problem that the existing RF power supply is prone to circuit damage and poor stability during pulse switching. The switching process of the multi-level pulse signal refers to the switching process from the power amplifier outputting a power signal higher than the target power to outputting a constant power signal within the preset target power range to the chamber load or input load.

[0054] Reference Figure 3 , Figure 3 It is a schematic diagram of the radio frequency power supply ignition control system of the present invention, and the system comprises: a power amplifier 20 and a main controller 10; Wherein, the main controller 10 is connected to the power amplifier 20, and the power amplifier 20 is connected to the chamber load or the input load; The main controller 10 is used to output a first control instruction to the power amplifier 20; The power amplifier 20 is used to output a power signal higher than the target power to the chamber load or the input load when receiving the first control instruction, so as to cause the gas in the chamber load to overshoot and ignite; The main controller 10 is further used to output a second control instruction to the power amplifier 20 after the gas is successfully ignited; The power amplifier 20 is further used to control the power amplifier 20 to output a power signal within a preset target power range to the chamber load or input load when receiving the second control instruction, so that the power signal in the chamber load is constant.

[0055] It should be noted that the main controller 10 is connected to the power amplifier 20 and is responsible for outputting control instructions to the power amplifier 20. Specifically, it first outputs a first control instruction to the power amplifier 20 to start the ignition process, and then after the ignition is successful, it outputs a second control instruction to the power amplifier 20 to control the output power. The power amplifier 20 receives the control instruction from the main controller 10 and outputs a corresponding power signal to the chamber load or input load according to the instruction. When receiving the first control instruction, a power signal higher than the target power is output to ignite; when receiving the second control instruction, the control output keeps the power within the preset target power range to maintain a stable state in the chamber load.

[0056] Specifically, the main controller 10 sends a first control instruction, and the power amplifier 20 generates a high-power signal for ignition according to the instruction. This may involve a series of signal processing and control logic to ensure that the output power signal can effectively ignite. After the ignition is successful, the main controller 10 sends a second control instruction, and the power amplifier 20 adjusts the output according to the instruction to keep it within the preset target power range. This may include adjusting the internal circuit of the power amplifier 20 to ensure the stability and accuracy of the output power.

[0057] The first control instruction refers to an instruction for starting the ignition process, which usually causes the power amplifier 20 to output a power signal higher than the target power to cause the gas in the chamber load to overshoot and ignite. The second control instruction refers to an instruction sent after the gas ignition is successful, and its purpose is to allow the power amplifier 20 to adjust the output to remain within a preset target power range to ensure that the power signal in the chamber load or input load remains constant.

[0058] The present embodiment provides a radio frequency power supply ignition control system, the system comprising: a power amplifier 20 and a main controller 10; wherein the main controller 10 is connected to the power amplifier 20, and the power amplifier 20 is connected to a chamber load or an input load; the main controller 10 is used to output a first control instruction to the power amplifier 20; the power amplifier 20 is used to output a power signal higher than a target power to the chamber load or the input load when receiving the first control instruction, so as to cause the gas in the chamber load to overshoot and ignite; the main controller 10 is also used to output a second control instruction to the power amplifier 20 after the gas ignition is successful; the power amplifier 20 is also used to control the power amplifier 20 to output a power signal within a preset target power range to the chamber load or the input load when receiving the second control instruction, so as to cause the power signal in the chamber load or the input load to be constant. In the present embodiment, the main controller 10 realizes gas overshoot ignition by controlling the power amplifier 20 to output a power signal exceeding the target power to the chamber load or the input load. Once the ignition is successful, the main controller 10 will adjust the power amplifier 20 to output a constant power signal to maintain it within a preset target power range, thereby solving the problem of low ignition success rate.

[0059] Furthermore, in one embodiment, the system further comprises: a voltage and current sensor 30; The voltage and current sensor 30 is connected to the main controller 10; The voltage and current sensor 30 is used to detect the voltage and current in the chamber load or the input load, and output the voltage and current signals to the main controller 10; The main controller 10 is used to determine the change trend of the chamber load impedance or the input load impedance based on the voltage and current signals in the chamber load or the input load when receiving the voltage and current signals; The main controller 10 is further used to determine whether the gas is ignited successfully based on the change trend of the chamber load impedance or the input load impedance.

[0060] It should be noted that the voltage and current sensor 30 is connected to the main controller 10, and is used to monitor the voltage and current in the chamber load or the input load, and transmit these signals to the main controller 10. The main controller 10 receives the voltage and current signals, and uses these signals to determine the impedance change trend of the chamber load or the input load. Based on the impedance change trend, the main controller 10 can determine whether the gas has been successfully ignited.

[0061] Specifically, the voltage and current sensor 30 is responsible for collecting the voltage and current information in the chamber load or input load, and transmitting it to the main controller 10. The main controller 10 can digitize these signals for further analysis. The main controller 10 analyzes the change trend of the impedance in the chamber load or input load through an algorithm or model based on the voltage and current signals. This may involve monitoring and analyzing the impedance change rate. Based on the impedance change trend, the main controller 10 can determine whether the gas has been successfully ignited. This may be achieved by setting a threshold value for impedance change. Once the impedance change exceeds the threshold, it can be determined that the ignition is successful, thereby enhancing the monitoring and control of the ignition process and improving the stability and reliability of the system.

[0062] Furthermore, in one embodiment, the system further comprises: a voltage and current sensor 30; The voltage and current sensor 30 is connected to the main controller 10; The voltage and current sensor 30 is used to detect the voltage and current in the chamber load or the input load, and output the voltage and current signals to the main controller 10; The main controller 10 is used to determine the impedance value of the chamber load impedance or the input load impedance and the change trend of the impedance value based on the voltage and current signals in the chamber load or the input load when receiving the voltage and current signals; The main controller 10 is further configured to output a first control instruction to the power amplifier 20 in the next pulse cycle when the impedance value of the chamber load impedance or the input load impedance in the current pulse cycle is within or tends to be within a preset flameout state resistance range.

[0063] It should be noted that, in this embodiment, the voltage and current sensor 30 is used to detect the voltage and current in the chamber load or input load, and transmit these signals to the main controller 10. Specific sensor technology, such as current transformer or voltage probe, can be used to convert the detected voltage and current signals into electrical signals that can be processed. By real-time monitoring of the voltage and current of the chamber load or input load, the system can accurately perceive the chamber state and provide necessary data support for subsequent control.

[0064] The main controller 10 receives voltage and current signals, and determines the impedance value of the chamber load or input load and its changing trend based on these signals, so that the main controller 10 can understand the system load state in real time, so that when the impedance value of the chamber load impedance or input load impedance in the current pulse cycle is within or tends to the preset flameout state resistance range, the first control instruction is output to the power amplifier 20 in the next pulse cycle. The purpose of this is to ensure that the system can respond immediately according to the actual load conditions, maintain the stability and efficiency of the system, and start the ignition process when necessary to ensure the normal operation of the system. A microcontroller or embedded system can be used to process and analyze the received voltage and current signals with appropriate algorithms or models to determine the impedance value and its changing trend, and generate control instructions, thereby providing intelligent monitoring and control of the chamber load or input load state, and making corresponding adjustments based on real-time data to ensure the stability and reliability of the system.

[0065] It should be noted that, in this article, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or system including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or system. In the absence of further restrictions, an element defined by the sentence "comprises a ..." does not exclude the existence of other identical elements in the process, method, article or system including the element.

[0066] The serial numbers of the above embodiments of the present invention are only for description and do not represent the advantages or disadvantages of the embodiments.

[0067] Through the description of the above implementation methods, those skilled in the art can clearly understand that the above-mentioned embodiment methods can be implemented by means of software plus a necessary general hardware platform, and of course by hardware, but in many cases the former is a better implementation method. Based on such an understanding, the technical solution of the present invention, or the part that contributes to the prior art, can be embodied in the form of a software product, which is stored in a storage medium (such as ROM / RAM, a magnetic disk, or an optical disk), and includes a number of instructions for enabling a terminal device (which can be a mobile phone, a computer, a server, an air conditioner, or a network device, etc.) to execute the methods described in each embodiment of the present invention.

[0068] The above are only optional embodiments of the present invention, and are not intended to limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made using the contents of the present invention specification and drawings, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A radio frequency power supply ignition control method, characterized in that: Applied to a radio frequency power supply including a power amplifier, the method comprises: Controlling the power amplifier to output a power signal higher than a target power to an input load, so as to cause gas in the input load to overshoot and ignite; After the gas is successfully ignited, controlling the power amplifier to output a constant power signal within a preset target power range to the input load; After controlling the power amplifier to output a power signal higher than the target power to the input load so that the gas in the input load overshoots and ignites, the method further includes: Determine the change of voltage and current in the input load based on the voltage and current sensor; wherein the voltage and current sensor is arranged between the power supply and the matcher, or arranged at a detectable point; the voltage and current sensor is used to monitor the change of voltage and current in the input load; Determining a change trend of input load impedance based on changes in voltage and current in the input load; Whether the gas is ignited successfully is determined based on the change trend of the input load impedance.

2. The radio frequency power supply ignition control method according to claim 1, characterized in that: There are one or more voltage and current sensors, and changes in voltage and current monitored by the voltage and current sensors located at different monitoring positions correspond to the change trend of the input load impedance.

3. The radio frequency power supply ignition control method according to claim 1, characterized in that: Before the power amplifier is controlled to output a power signal higher than the target power to the input load so that the gas in the input load overshoots and ignites, the method further includes: Determine the voltage value and the current value of the input load based on the voltage and current sensor; Determining an impedance value of the input load and a variation trend of the impedance value based on a voltage value and a current value in the input load; When the impedance value of the input load is within or tends to be within a preset flameout state resistance range, the step of controlling the power amplifier to output a power signal higher than the target power to the input load is performed.

4. The radio frequency power supply ignition control method according to claim 1, characterized in that: The controlling the power amplifier to output a power signal higher than the target power to the input load so that the gas in the input load overshoots and ignites, further includes: Determining whether the power amplifier outputs a power signal to an input load for the first time in this operation; If yes, the step of controlling the power amplifier to output a power signal higher than the target power to the input load is performed.

5. The radio frequency power supply ignition control method according to claim 1, characterized in that: The controlling the power amplifier to output a power signal higher than the target power to the input load so that the gas in the input load overshoots and ignites, further includes: Determining a duty cycle of a power signal output by the power amplifier, and determining whether the duty cycle is lower than a preset ratio of duty cycle; If yes, the step of controlling the power amplifier to output a power signal higher than the target power to the input load is performed.

6. The radio frequency power supply ignition control method according to claim 5, characterized in that: The duty cycle of the power signal output by the power amplifier is a periodic working mode, and the periodic working mode includes an ignition state, an ignition state, and a gradual ignition state.

7. The radio frequency power supply ignition control method according to claim 1, characterized in that: The controlling the power amplifier to output a power signal higher than a target power to an input load comprises: Determining a preset threshold, a preset ratio value, or a preset difference value of a power signal; The power amplifier is controlled to output a power signal higher than a target power to an input load based on a preset threshold, a preset ratio value or a preset difference value of the power signal.

8. The radio frequency power supply ignition control method according to claim 7, characterized in that: The controlling the power amplifier to output a power signal higher than a target power to an input load based on a preset threshold, a preset ratio value or a preset difference value of the power signal comprises: Determining a duty cycle of an output signal of the power amplifier; Based on a preset threshold, a preset ratio or a preset difference of the power signal, the power amplifier is controlled to output a power signal higher than a target power to an input load by adjusting the duty cycle of the output signal of the power amplifier.

9. The radio frequency power supply ignition control method according to any one of claims 1 to 8, characterized in that: After controlling the power amplifier to output a power signal higher than the target power to the input load so that the gas in the input load overshoots and ignites, the method further includes: Obtaining the gas overshoot ignition duration in the input load; When the gas overshoot ignition duration is within a preset proportional duration of the positive waveform of the power amplifier output power signal, determining whether the gas is ignited successfully; If the gas is ignited successfully, then executing the step of controlling the power amplifier to output a constant power signal within a preset target power range to the input load after the gas is ignited successfully; If the gas ignition is unsuccessful, the output power of the power amplifier or the preset proportional duration of the positive waveform of the output power signal is increased to make the gas ignited successfully.

10. The radio frequency power supply ignition control method according to any one of claims 1 to 8, characterized in that: After the gas is successfully ignited, after controlling the power amplifier to output a constant power signal within a preset target power range to the input load, the method further includes: During the switching process from the power amplifier outputting a power signal higher than the target power to outputting a constant power signal within a preset target power range to the input load, the control signal of the inverter in the power amplifier is set to zero.

11. A radio frequency power supply ignition control system, characterized in that: The system comprises: a power amplifier and a main controller; Wherein, the main controller is connected to the power amplifier, and the power amplifier is connected to an input load; The main controller is used to output a first control instruction to the power amplifier; The power amplifier is used to output a power signal higher than the target power to the input load when receiving the first control instruction, so as to cause the gas in the input load to overshoot and ignite; The main controller is further configured to output a second control instruction to the power amplifier after the gas is successfully ignited; The power amplifier is further configured to control the power amplifier to output a power signal within a preset target power range to the input load upon receiving the second control instruction, so that the power signal in the input load is constant; The radio frequency power supply ignition control system further includes: a voltage and current sensor; The voltage and current sensor is connected to the main controller; The voltage and current sensor is used to detect the voltage and current in the input load, and output the voltage and current signals to the main controller.

12. The radio frequency power supply ignition control system according to claim 11, characterized in that: The main controller is used to determine the change trend of the input load impedance based on the voltage and current signals in the input load when receiving the voltage and current signals; The main controller is further used to determine whether the gas is ignited successfully based on the change trend of the input load impedance.

13. The radio frequency power supply ignition control system according to claim 11, characterized in that: The main controller is used to determine the impedance value of the input load impedance and the change trend of the impedance value based on the voltage and current signals in the input load when receiving the voltage and current signals; The main controller is further configured to output a first control instruction to the power amplifier in the next pulse cycle when the impedance value of the input load impedance in the current pulse cycle is within or tends to be within a preset flameout state resistance range.

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