High-temperature superconducting pinning suspension active and passive hybrid vibration isolation system and method

Abstract

The invention provides a high-temperature superconducting pinning suspension active and passive hybrid vibration isolation system and method, and relates to the technical field of vibration isolation, the vibration isolation system comprises a measurement and control system and a suspension system, and the vibration isolation method comprises the steps that a floater of the suspension system is stabilized at a balance position relative to a stator through suspension pretreatment; during external excitation, vibration data generated by a floater connected with a vibration isolated body relative to a stator is collected and processed, a controller processes the vibration data through an internally preset PID control algorithm and outputs a control signal, and a coil on the floater receives and outputs the control signal and executes the control signal to achieve a preset state. Self-stabilization suspension of the system can be achieved without external energy input, meanwhile, the solenoid coil is wound on the outer side of the permanent magnet, real-time active control over suspension force is achieved by adjusting transmission current of the coil, and therefore the problems that the vibration isolation frequency band of a passive vibration isolation system depends on the inherent frequency, and rigidity and damping cannot be adjusted are solved.

Description

Technical Field

[0001] The present application relates to the field of vibration isolation technology, and in particular to a high-temperature superconducting pinning suspension active-passive hybrid vibration isolation system and method. Background Art

[0002] During the operation of spacecraft in orbit, they will be affected by external interference (such as solar pressure, alternating hot and cold, atmospheric resistance, etc.) and the movement of internal personnel and equipment (such as the operation of control moment gyroscopes and the operation of cryogenic refrigerators), which will cause micro-vibration. Micro-vibration will have an adverse effect on the accuracy, communication quality, stability, etc. of precision detection equipment on spacecraft. In addition, the normal operation of precision manufacturing and measurement equipment such as lithography machines also places extremely high demands on the vibration environment around them. Therefore, the suppression and isolation of micro-vibration has become a key issue that must be solved in the development of technologies such as high-resolution space detection and precision instruments.

[0003] The vibration isolation methods in the prior art are mainly divided into passive vibration isolation and active vibration isolation. The passive vibration isolation structure is simple, but it cannot produce a good suppression effect on micro-vibrations in the low-frequency band. The active vibration isolation system can be divided into contact type and non-contact active vibration isolation system according to whether there is mechanical contact. The contact type active vibration isolation system (such as the vibration isolator based on the Steward platform) has high stability, high motion accuracy, and strong bearing capacity, but the actual test results show that its effect on low-frequency micro-vibration isolation below 50Hz is poor. Non-contact active vibration isolation system (such as magnetic suspension vibration isolator) can effectively isolate micro-vibrations of 1Hz-100 Hz, but according to the Enshaw theorem, the conventional magnetic suspension system itself cannot achieve stable suspension, and a complex control system is required to achieve stable suspension by adjusting the electromagnetic force in real time, which greatly increases the difficulty of active control of the vibration isolation system and reduces the reliability of the system. In addition, the conventional non-contact vibration isolation system (such as the magnetic suspension vibration isolator control system) is complex, has high input power, high energy consumption, large volume, and difficult engineering implementation, and is difficult to apply to the vibration isolation field of aerospace precision detection instruments and equipment.

[0004] In addition, the general magnetic suspension system is composed of permanent magnets and electromagnets. When this system is not disturbed by the outside world, it needs to continuously input energy to maintain the stable suspension of the system itself. When disturbed by the outside world, any frequency band of external interference requires complex control algorithms to achieve active vibration control. Therefore, the conventional magnetic suspension vibration isolation system control system is complex, has poor stability, high energy consumption, and is difficult to implement. Summary of the invention

[0005] In order to solve at least one technical defect of the above technical problems, the present application provides a high-temperature superconducting pinning suspension active-passive hybrid vibration isolation system and method.

[0006] The high-temperature superconducting pinning suspension active-passive hybrid vibration isolation system includes: a measurement and control system and a suspension system. The suspension system includes a stator and a float, the stator is used to be installed on a base, the float is used to be connected to the vibration-isolated body, the stator includes a high-temperature superconductor, the float includes a permanent magnet and a coil, and the coil is wound and arranged on the permanent magnet; the measurement and control system includes a detection device, a controller and a voltage output module that are electrically connected in sequence, the input end of the controller is electrically connected to the detection device, the voltage output module is electrically connected to the coil, the detection device is arranged on the permanent magnet to collect real-time movement data of the vibration-isolated body, the controller generates a corresponding voltage control signal using a PID control algorithm according to the real-time movement data, the voltage output module generates a corresponding control voltage according to the voltage control signal, and the coil generates a corresponding electromagnetic field under the control of the control voltage, and the electromagnetic field generated by the coil interacts with the electromagnetic field generated by the high-temperature superconductor to gradually make the vibration-isolated body still.

[0007] As a further improvement of the above technical solution: the stator also includes a low-temperature dewar arranged on the base, and the high-temperature superconductor is arranged in the low-temperature dewar; when the base is externally excited, the low-temperature dewar and the high-temperature superconductor fixed on the base move, and the float vibrates under the action of the magnetic field between the permanent magnet and the high-temperature superconductor, and the detection device measures the real-time movement data of the vibration of the float and inputs it into the controller.

[0008] In an embodiment of the present application, the controller runs a real-time data processing system, including: measuring real-time data, data monitoring, writing and reading global variables, gain scheduling tables and output control parameters; the measurement and control system also includes a host system, the host system includes a host computer, the host computer is connected to the real-time data processing system via a network communication method, reads the global variables, stores data and displays real-time data.

[0009] In an embodiment of the present application, the detection device is an acceleration sensor or a displacement sensor, which is used to monitor the real-time movement data of the float as a control variable of the measurement and control system; the real-time movement data includes: acceleration or displacement.

[0010] In an embodiment of the present application, the measurement and control system also includes a vibration input module and a power regulation module; the vibration input module is electrically connected to the detection device and the controller, and the vibration input module inputs the real-time movement data of the float into the controller; the power regulation module can be a power amplifier, which amplifies the control voltage output by the voltage output module and outputs it to the coil.

[0011] In an embodiment of the present application, the cooling method of the high-temperature superconductor includes: liquid nitrogen cooling or refrigerator cooling; the array composed of the high-temperature superconductors and the array composed of the permanent magnets are both in several groups.

[0012] The present application also provides a high-temperature superconducting pinned suspension active-passive hybrid vibration isolation method, which is applied to the high-temperature superconducting pinned suspension active-passive hybrid vibration isolation system described above. The high-temperature superconducting pinned suspension active-passive hybrid vibration isolation method comprises the following steps:

[0013] The float of the suspension system is stabilized in a balanced position relative to the stator through suspension pretreatment;

[0014] When externally excited, collecting and processing vibration data generated by the float connected to the vibration isolation body relative to the stator;

[0015] The controller processes the vibration data through an internally preset PID control algorithm and outputs a control signal;

[0016] The coil on the float receives the output control signal and executes to achieve a preset state;

[0017] Wherein, the preset state includes: the acceleration of the float is 0;

[0018] The suspension pretreatment comprises:

[0019] fixing the float at a desired height;

[0020] Liquid nitrogen is added to the cryogenic Dewar to cool the high-temperature superconductor to a superconducting state;

[0021] An electromagnetic force is generated between the permanent magnet and the high temperature superconductor to release the float;

[0022] The float oscillates under the action of gravity and electromagnetic force and eventually stabilizes at a balanced position.

[0023] As a further improvement of the above technical solution: the acquisition process includes:

[0024] When the base is externally excited, the low-temperature Dewar and the high-temperature superconductor fixed on the base generate relative motion, the permanent magnet and the high-temperature superconductor vibrate relative to each other due to electromagnetic force, and the float generates acceleration vibration data;

[0025] The acceleration sensor measures the acceleration vibration data of the float and inputs the data to the controller through the vibration input module.

[0026] In an embodiment of the present application, the controller outputs a voltage signal through the PID control algorithm according to the input signal of the vibration input module;

[0027] The output value of the voltage signal is output to a power regulation module, such as a power amplifier, through a voltage output module.

[0028] In an embodiment of the present application, the execution includes:

[0029] The power regulation module, such as a power amplifier, outputs current to the coil according to the received voltage signal;

[0030] The current on the coil causes the permanent magnet and the high temperature superconductor to generate electromagnetic force;

[0031] The electromagnetic force counteracts the inertial force of the float caused by external interference, so that the float reaches a preset state, that is, the acceleration of the float is 0 at this time.

[0032] Beneficial effects of this application:

[0033] 1. In order to realize a micro-vibration isolation and control system with advantages such as wide vibration isolation frequency band, obvious vibration suppression effect, low energy loss, simple control system, and real-time response, a new method and technology is provided for the isolation and suppression of micro-vibrations of sensitive loads on spacecraft and precision instruments such as lithography machines. Under the condition of no external energy input, self-stable suspension and effective isolation and suppression of medium and high frequency micro-vibrations can be realized; when active control is added, the isolation and suppression effect of low frequency micro-vibrations can be further improved. This application uses a high-temperature superconducting magnetic suspension active and passive hybrid vibration isolation system and method, and uses the magnetic flux pinning effect of high-temperature superconductors to realize self-stable suspension and passive isolation of medium and high frequency micro-vibrations, and actively applies a small current to the electromagnetic coil to realize the isolation and control of medium and low frequency micro-vibrations; the control system is stably suspended at the equilibrium height through the initial field cooling process, and then the coil is energized and the designed PID measurement and control system adjusts the current size and direction in the coil in real time, so as to realize low-power active and passive hybrid vibration isolation.

[0034] 2. This application utilizes the unique flux pinning effect of high-temperature superconductors to achieve self-stabilizing suspension of the system without external energy input. At the same time, it proposes to wind a solenoid coil around the outside of the permanent magnet and adjust the transmission current of the coil to achieve real-time active control of the suspension force, thereby overcoming the problems of the passive vibration isolation system's vibration isolation frequency band relying on the natural frequency, and the inability to adjust stiffness and damping.

[0035] 3. The present application can realize functions such as contactless self-stabilizing suspension, isolation and control of wide-band micro-vibration, and suspension height regulation, and has the advantages of simple control program, easy implementation, low energy consumption, and real-time response; it not only has vibration isolation function, but also can realize the control of the height and posture of the suspended body by adjusting the current in the electromagnetic coil; the system avoids friction and contact while also having the advantages of low energy loss, wide vibration isolation frequency band, and high vibration isolation rate. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:

[0037] Figure 1 A schematic diagram of the architecture of a high-temperature superconducting pinned suspension active-passive hybrid vibration isolation system provided in an embodiment of the present application;

[0038] Figure 2 A schematic diagram of the measurement and control process of the high-temperature superconducting pinning suspension active-passive hybrid vibration isolation system provided in an embodiment of the present application;

[0039] Figure 3 A schematic diagram of the self-stabilizing suspension process of the high-temperature superconducting pinning suspension active-passive hybrid vibration isolation system provided in an embodiment of the present application;

[0040] Figure 4 A schematic diagram of a high-temperature superconducting pinned suspension active-passive hybrid vibration isolation method provided in an embodiment of the present application;

[0041] Figure 5a This is a diagram showing the effect of a vibration isolation standing frequency experiment of a superconducting magnetic suspension vibration isolation system under normal gravity conditions provided in an embodiment of the present application;

[0042] Figure 5b This is a diagram showing the effect of a vibration isolation sweep frequency experiment of a superconducting magnetic suspension vibration isolation system under normal gravity conditions provided in an embodiment of the present application;

[0043] Figure 6a This is a diagram showing the effect of a vibration isolation standing frequency experiment of a superconducting magnetic suspension vibration isolation system under microgravity conditions provided in an embodiment of the present application;

[0044] Figure 6b This is a diagram showing the effect of a vibration isolation and frequency sweeping experiment of a superconducting magnetic suspension vibration isolation system under microgravity conditions provided in an embodiment of the present application;

[0045] Figure numerals: 100, measurement and control system; 200, suspension system; 201, stator; 202, float; 1, detection device; 2, permanent magnet; 3, coil; 4, high-temperature superconductor; 5, low-temperature dewar; 6, vibration input module; 7, controller; 8, voltage output module; 9, power regulation module; 10, host computer; 12, host system. DETAILED DESCRIPTION

[0046] In order to make the technical solutions and advantages in the embodiments of the present application more clearly understood, the exemplary embodiments of the present application are further described in detail below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present application, rather than an exhaustive list of all the embodiments. It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict.

[0047] In the process of implementing this application, the applicant discovered that the conventional magnetic levitation system in the prior art cannot achieve stable suspension by itself, and requires a complex control system to achieve stable suspension by adjusting the electromagnetic force in real time, which greatly increases the difficulty of active control of the vibration isolation system and reduces the reliability of the system. In addition, the conventional non-contact vibration isolation system (such as magnetic levitation isolator control system) is complex, has high input power, high energy consumption, large size, and difficult engineering implementation, making it difficult to apply to the vibration isolation field of aerospace precision detection instruments and equipment.

[0048] In addition, the general magnetic suspension system is composed of permanent magnets and electromagnets. When this system is not disturbed by the outside world, it needs to continuously input energy to maintain the stable suspension of the system itself. When disturbed by the outside world, any frequency band of external interference requires complex control algorithms to achieve active vibration control. Therefore, the conventional magnetic suspension vibration isolation system control system is complex, has poor stability, high energy consumption, and is difficult to implement.

[0049] Example 1

[0050] In order to solve the above problems, a high-temperature superconducting pinning suspension active-passive hybrid vibration isolation system is provided in an embodiment of the present application.

[0051] like Figure 1-Figure 3 As shown, the high-temperature superconducting pinning suspension active-passive hybrid vibration isolation system of this embodiment includes a measurement and control system 100 and a suspension system 200. The suspension system 200 includes a stator 201 and a float 202, the stator 201 is used to be installed on a base, the float 202 is used to connect with the vibration-isolated body, the stator 201 includes a high-temperature superconductor 4, the float 202 includes a permanent magnet 2 and a coil 3, and the coil 3 is wound and arranged on the permanent magnet 2; the measurement and control system 100 includes a detection device 1, a controller 7 and a voltage output module 8 which are electrically connected in sequence, the input end of the controller 7 is electrically connected to the detection device 1, the voltage output module 8 is electrically connected to the coil 3, the detection device 1 is arranged on the permanent magnet 2 for collecting real-time movement data of the vibration-isolated body, the controller 7 generates a corresponding voltage control signal using a PID control algorithm according to the real-time movement data, the voltage output module 8 generates a corresponding control voltage according to the voltage control signal, and the coil 3 generates a corresponding electromagnetic field under the control of the control voltage, and the electromagnetic field generated by the coil 3 interacts with the electromagnetic field generated by the high-temperature superconductor 4, so that the vibration-isolated body gradually stops.

[0052] In this embodiment, the stator 201 also includes a low-temperature dewar 5 arranged on the base, and the high-temperature superconductor 4 is arranged in the low-temperature dewar 5; when the base is externally excited, the low-temperature dewar 5 and the high-temperature superconductor 4 fixed on the base produce relative movement, and the permanent magnet 2 causes the float 202 to vibrate due to the electromagnetic force between it and the high-temperature superconductor 4. The detection device 1 measures the acceleration of the vibration of the float 202 and inputs it into the controller 7.

[0053] Furthermore, the controller 7 runs a real-time data processing system, including: measuring real-time data, data monitoring, writing and reading global variables, gain scheduling tables and output control parameters; the measurement and control system 100 also includes a host system 12, and the host system 12 includes a host computer 10 ， The host computer 10 is connected to the real-time data processing system via a network communication mode, reads the global variables, stores data and displays real-time data.

[0054] Furthermore, the detection device 1 includes an acceleration sensor or a displacement sensor for monitoring the displacement of the float 202 as a control variable of the measurement and control system 100 .

[0055] Furthermore, the measurement and control system 100 also includes a vibration input module 6 and a power regulation module 9, and the power regulation module 9 can be a power amplifier; the vibration input module 6 is electrically connected to the acceleration sensor and the controller 7, and is used to filter the acceleration signal of the vibration of the float 202 and input it to the controller 7; the power regulation module 9 includes a power amplifier or a power supply module, which is used to receive the voltage signal of the voltage output module 8 and output current to the coil 3.

[0056] Furthermore, the cooling methods of the high-temperature superconductor 4 include: liquid nitrogen cooling or refrigerator cooling; the number of high-temperature superconductors 4 and permanent magnets 2 is several groups, and the array is arranged accordingly; the materials of the float 202 and the stator 201 can be interchanged, and the positions can also be interchanged.

[0057] Specifically, it can also be briefly stated as follows: the active and passive hybrid vibration isolation system of this example mainly includes two parts: a suspension system 200: composed of a permanent magnet 2, a coil 3, a high-temperature superconductor 4, and a low-temperature dewar 5; a measurement and control system 100: composed of an acceleration sensor, a signal acquisition module or a vibration input module 6, a controller 7, a voltage output module 8, a power amplifier, and a host computer 10; the low-temperature dewar 5 is fixed on a base, and the high-temperature superconductor 4 is placed in the low-temperature dewar 5, and the two together form a stator 201 of the suspension system 200; the coil 3 is wound around the outside of the permanent magnet 2, and the two together form a float 202 of the suspension system 200; the acceleration sensor is fixed on the float 202, the acceleration sensor is connected to the vibration input module 6, the vibration input module 6 is connected to the controller 7, the controller 7 is connected to the host computer 10 and the voltage output module 8, the voltage output module 8 is connected to the power amplifier, and the power amplifier is connected to the coil 3.

[0058] The working steps of this system are: fix the float 202 at the required height, add liquid nitrogen to the low-temperature dewar 5, cool the high-temperature superconductor 4 to the superconducting state, generate electromagnetic force between the permanent magnet 2 and the high-temperature superconductor 4, and release the float 202. Figure 3 As shown, in the case of gravity (mg) and electromagnetic force (F lev ) and finally stabilizes at a balanced position. When the base is disturbed, the low-temperature Dewar 5 and the high-temperature superconductor 4 fixed to the base move. Due to the electromagnetic force between the permanent magnet 2 and the high-temperature superconductor 4, the float 202 begins to vibrate. At this time, the state of the float 202 deviates from the expected state (acceleration is 0). The sensor 1 measures the acceleration of the float 202 and inputs it to the controller 7 through the vibration input module 6. The measurement and control program has been deployed inside the controller 7; Figure 2 As shown, according to the input signal of the vibration input module 6, the controller 7 outputs a control signal; the control signal selected in this embodiment is a voltage, and a PID control algorithm is adopted. The target value of the acceleration of the suspension is set to 0, and the control voltage is:

[0059]

[0060] where e (t) =0-a (t) =-a (t) .

[0061] In the above formula: K p , K i , K d They are proportional gain, integral gain and differential gain of PID controller respectively; e (t) is the error between the target value and the actual value of the controlled quantity; a (t)is the real-time acceleration of the float. The output value of the controller is calculated by the above formula. In the present superconducting magnetic levitation hybrid vibration isolation device, the physical meaning of the controller output value is voltage. The output value of the controller 7 is output to the power amplifier by the voltage output module 8. The power amplifier outputs current to the coil 3 according to the received voltage. Electromagnetic force is generated between the coil 3 and the high-temperature superconductor 4 to offset the inertial force of the float generated by external interference, thereby realizing a closed-loop control and finally making the float reach the expected motion state.

[0062] This scheme is proposed in order to realize a micro-vibration isolation and control system with the advantages of wide isolation frequency band, obvious vibration suppression effect, low energy loss, simple control system, and real-time response. It provides new methods and technologies for the isolation and suppression of micro-vibrations of sensitive payloads on spacecraft and precision instruments such as lithography machines. In the absence of external energy input, it can achieve self-stabilizing suspension and effective isolation and suppression of medium and high frequency micro-vibrations; when active control is added, the isolation and suppression effect of low-frequency micro-vibrations can be further improved.

[0063] The high-temperature superconducting magnetic suspension active and passive hybrid vibration isolation system of this embodiment uses the magnetic flux pinning effect of high-temperature superconductors to achieve self-stable suspension and passive isolation of medium and high frequency micro-vibrations, and actively applies a small current to the electromagnetic coil to achieve isolation and control of medium and low frequency micro-vibrations; the control system is stably suspended at the equilibrium height through the initial field cooling process, and then the coil is energized and the designed PID measurement and control system adjusts the current size and direction in the coil in real time to achieve low-power active and passive hybrid vibration isolation. This solution uses the unique magnetic flux pinning effect of high-temperature superconductors to achieve self-stable suspension of the system without external energy input. At the same time, it is proposed to wind a solenoid coil on the outside of the permanent magnet and realize real-time active control of the suspension force by adjusting the transmission current of the coil, thereby overcoming the problems of the passive vibration isolation system's isolation frequency band relying on the natural frequency, stiffness and damping being unable to be adjusted.

[0064] The scheme proposed in this embodiment can realize the functions of contactless self-stabilizing suspension, isolation and control of wide-band micro-vibration, and suspension height regulation, and has the advantages of simple control program, easy implementation, low energy consumption, and real-time response; it not only has vibration isolation function, but also can realize the control of the height and posture of the suspended body by adjusting the current in the electromagnetic coil; the system avoids friction and contact while also having the advantages of low energy loss, wide vibration isolation frequency band, and high vibration isolation rate.

[0065] Example 2

[0066] like Figure 4 - As shown in FIG6 , in order to better solve the above-mentioned technical problems, this embodiment provides a high-temperature superconducting pinned suspension active-passive hybrid vibration isolation method, comprising the following steps:

[0067] S101: stabilizing the float 202 of the suspension system 200 relative to the stator 201 at a balanced position through suspension pretreatment;

[0068] S102: when externally excited, collecting and processing vibration data generated by the float 202 connected to the vibration isolation body relative to the stator 201;

[0069] S103: the controller 7 processes the vibration data through an internally preset PID control algorithm and outputs a control signal;

[0070] S104: The coil 3 on the float 202 receives the output control signal and executes to achieve a preset state.

[0071] The preset state includes: the acceleration of the float 202 is 0;

[0072] Suspension pretreatment includes:

[0073] Fix the float 202 at a desired height;

[0074] Adding liquid nitrogen into the low-temperature Dewar 5 to cool the high-temperature superconductor 4 to a superconducting state;

[0075] An electromagnetic force is generated between the permanent magnet 2 and the high temperature superconductor 4 to release the float 202;

[0076] Under the action of gravity and electromagnetic force, the float 202 oscillates and eventually stabilizes at a balanced position.

[0077] Collection processing includes:

[0078] When the base is externally excited or disturbed, the low-temperature Dewar 5 and the high-temperature superconductor 4 fixed on the base move relative to each other;

[0079] The float 202 vibrates due to the electromagnetic force between the permanent magnet 2 and the high-temperature superconductor 4, and the state of the float 202 deviates from the preset state, generating acceleration;

[0080] The detection device 1 measures the acceleration of the vibration of the float 202 and inputs it to the controller 7 through the vibration input module 6 .

[0081] In this embodiment, the controller 7 has a preset measurement and control program; the processing and output of vibration data includes:

[0082] The controller 7 outputs a control signal through a PID control algorithm according to the input signal of the vibration input module 6;

[0083] The output value of the control signal is output by the voltage output module 8 to a power regulation module such as a power amplifier.

[0084] In this embodiment, the control signal is a voltage signal; the output feedback execution includes:

[0085] The power amplifier 9 outputs current to the coil 3 according to the received voltage signal;

[0086] The current on the coil 3 causes the permanent magnet 2 and the high temperature superconductor 4 to generate electromagnetic force;

[0087] The electromagnetic force counteracts the inertial force of the float 202 caused by external interference, so that the float 202 reaches a preset state. Specifically, the high-temperature superconducting pinning suspension active-passive hybrid vibration isolation method proposed in this embodiment is: according to the system modules or components mentioned in the above embodiments, the float is fixed at the required height, liquid nitrogen is added to the low-temperature dewar 5, and the high-temperature superconductor 4 is cooled to a superconducting state, and an electromagnetic force is generated between the permanent magnet 2 and the high-temperature superconductor 4, and the float is released at this time. Under the action of gravity and electromagnetic force, the float oscillates and finally stabilizes at a balanced position. When the base is disturbed, the low-temperature Dewar 5 and the high-temperature superconductor 4 fixed to the base move. Due to the electromagnetic force between the permanent magnet 2 and the high-temperature superconductor 4, the float begins to vibrate. At this time, the state of the float deviates from the expected state (acceleration is 0). The sensor 1 measures the acceleration of the float and inputs it to the controller 7 through the vibration input module 6. The measurement and control program has been deployed in the controller 7. According to the input signal of the vibration input module 6, the controller 7 outputs a control signal. The control signal selected here is voltage. The PID control algorithm is used to set the target value of the acceleration of the suspension to 0, then the control voltage:

[0088]

[0089] where e (t) =0-a (t) =-a (t) .

[0090] In the above formula: K p , K i , K d They are proportional gain, integral gain and differential gain of PID controller respectively; e (t) is the error between the target value and the actual value of the controlled quantity; a (t) is the real-time acceleration of the float. The output value of the controller is calculated by the above formula. In the present superconducting magnetic levitation hybrid vibration isolation device, the physical meaning of the controller output value is voltage. The controller output value is output by the voltage output module 8 to the power amplifier. The power amplifier outputs current to the coil 3 according to the received voltage. Electromagnetic force is generated between the coil 3 and the high-temperature superconductor 4 to offset the inertial force of the float generated by external interference, thereby realizing a closed-loop control and finally making the float reach the expected motion state.

[0091] In order to further verify the reliability of the solutions of the aforementioned embodiment 1 and this embodiment, the experimental environment conditions are divided into normal gravity conditions and microgravity conditions according to whether the influence of gravity is considered, and the superconducting magnetic levitation active vibration isolation system of this application is used to carry out vibration isolation experiments under two gravity conditions, and the experimental results are shown in Figures 5 and 6. Among them, "excitation" is the acceleration of the interference imposed by the vibration table; "hybrid vibration isolation system" is the acceleration of the float after being disturbed when active control is applied, that is, the float acceleration of the superconducting magnetic levitation hybrid vibration isolation system; "passive vibration isolation system" is the acceleration of the float after being disturbed without active control, that is, the float acceleration of the superconducting magnetic levitation passive vibration isolation system.

[0092] Figure 5 shows the results of a vibration isolation experiment using the superconducting magnetic levitation vibration isolation system of the present application under normal gravity conditions. (a) The figure shows the vibration isolation effect of the superconducting magnetic levitation hybrid vibration isolation system and the passive vibration isolation system when a sinusoidal excitation with an amplitude of 0.5 mm and a frequency of 20 Hz is applied. Among them, the vibration isolation rate of the superconducting magnetic levitation passive vibration isolation system is 84.5%, and the vibration isolation rate of the superconducting magnetic levitation hybrid vibration isolation system is 91.25%. (b) The figure shows the vibration isolation effect of the superconducting magnetic levitation hybrid vibration isolation system and the passive vibration isolation system when a sinusoidal sweep excitation with an amplitude of 0.5 mm and a frequency linearly increased from 5 Hz to 50 Hz at a rate of 4.5 Hz / min is applied.

[0093] Figure 6 shows the results of a vibration isolation experiment using the superconducting magnetic levitation vibration isolation system of the present application under normal gravity conditions. (a) The figure shows the vibration isolation effect of the superconducting magnetic levitation hybrid vibration isolation system and the passive vibration isolation system when a sinusoidal excitation with an acceleration of 0.4 and a frequency of 5 Hz is applied. Among them, the superconducting magnetic levitation passive vibration isolation system amplifies the excitation amplitude by 1.401 times, and the vibration isolation rate of the superconducting magnetic levitation hybrid vibration isolation system is 60%. (b) The figure shows the vibration isolation effect of the superconducting magnetic levitation hybrid vibration isolation system and the passive vibration isolation system when a sinusoidal sweep excitation with an acceleration amplitude of 0.1 linearly increased to 3 and a frequency linearly increased from 2 Hz to 30 Hz at a rate of 0.1 Hz / s is applied.

[0094] The high-temperature superconducting magnetic levitation active and passive hybrid vibration isolation method proposed in this embodiment utilizes the magnetic flux pinning effect of the high-temperature superconductor to achieve self-stabilizing suspension and passive isolation of medium and high frequency micro-vibrations, and actively applies a small current to the electromagnetic coil to achieve isolation and control of medium and low frequency micro-vibrations; the control system is stably suspended at the equilibrium height through the initial field cooling process, and then the coil is energized and the designed PID measurement and control system adjusts the current size and direction in the coil in real time, thereby achieving low-power active and passive hybrid vibration isolation.

[0095] The technical solution of this embodiment can realize the functions of contactless self-stabilizing suspension, isolation and control of wide-band micro-vibration, and suspension height regulation, and has the advantages of simple control program, easy implementation, low energy consumption, and real-time response; it not only has vibration isolation function, but also can realize the control of the height and posture of the suspended body by adjusting the current in the electromagnetic coil; the system avoids friction and contact while also having the advantages of low energy loss, wide vibration isolation frequency band, and high vibration isolation rate.

[0096] In this application, unless otherwise clearly specified and limited, the terms "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or can communicate with each other; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0097] Although the preferred embodiments of the present application have been described, those skilled in the art may make other changes and modifications to these embodiments once they have learned the basic creative concept. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications falling within the scope of the present application.

[0098] Obviously, those skilled in the art can make various changes and modifications to the present application without departing from the spirit and scope of the present application. Thus, if these modifications and variations of the present application fall within the scope of the claims of the present application and their equivalents, the present application is also intended to include these modifications and variations.

Claims

1. A high-temperature superconducting pinning suspension active-passive hybrid vibration isolation system, comprising a measurement and control system (100) and a suspension system (200), characterized in that: The suspension system (200) comprises a stator (201) and a float (202), wherein the stator (201) is used to be installed on a base, and the float (202) is used to be connected to a vibration-isolated body, the stator (201) comprises a high-temperature superconductor (4), and the float (202) comprises a permanent magnet (2) and a coil (3), and the coil (3) is wound around the permanent magnet (2); The measurement and control system (100) comprises a detection device (1), a controller (7) and a voltage output module (8) which are electrically connected in sequence, the input end of the controller (7) being electrically connected to the detection device (1), the voltage output module (8) being electrically connected to the coil (3), the detection device (1) being arranged on the permanent magnet (2) for collecting real-time movement data of the vibration-isolated body, the controller (7) generating a corresponding voltage control signal using a PID control algorithm according to the real-time movement data, the voltage output module (8) generating a corresponding control voltage according to the voltage control signal, the coil (3) generating a corresponding electromagnetic field under the control of the control voltage, the electromagnetic field generated by the coil (3) interacting with the electromagnetic field generated by the high-temperature superconductor (4) so ​​that the vibration-isolated body gradually becomes stationary.

2. The high temperature superconducting pinning suspension active-passive hybrid vibration isolation system according to claim 1, characterized in that: The stator (201) further comprises a low-temperature Dewar (5) arranged on a base, and the high-temperature superconductor (4) is arranged in the low-temperature Dewar (5); When the base is externally excited, the low-temperature Dewar (5) and the high-temperature superconductor (4) fixed on the base move, and the float (202) vibrates under the action of the magnetic field between the permanent magnet (2) and the high-temperature superconductor (4). The detection device (1) measures the real-time movement data of the vibration of the float (202) and inputs it into the controller (7).

3. The high temperature superconducting pinning suspension active-passive hybrid vibration isolation system according to claim 1, characterized in that: The controller (7) operates a real-time data processing system, including: measuring real-time data, data monitoring, writing and reading global variables, gain scheduling tables and outputting control parameters; The measurement and control system (100) further includes a host system (12), wherein the host system (12) includes a host computer (10) ， The host computer (10) is connected to the real-time data processing system via a network communication method, reads the global variables, stores data and displays real-time data.

4. The high temperature superconducting pinning suspension active-passive hybrid vibration isolation system according to claim 1, characterized in that: The detection device (1) is an acceleration sensor or a displacement sensor, which is used to monitor the real-time movement data of the float (202) as the control variable of the measurement and control system (100); The real-time movement data includes: acceleration or displacement.

5. The high temperature superconducting pinning suspension active-passive hybrid vibration isolation system according to claim 1, characterized in that: The measurement and control system (100) further comprises a vibration input module (6) and a power adjustment module (9); The vibration input module (6) is electrically connected to the detection device (1) and the controller (7), and the vibration input module (6) inputs the real-time movement data of the float (202) into the controller (7); The power regulating module (9) amplifies the power of the control voltage output by the voltage output module (8) and outputs the amplified power to the coil (3).

6. The high temperature superconducting pinning suspension active-passive hybrid vibration isolation system according to claim 1, characterized in that: The cooling method of the high temperature superconductor (4) includes: liquid nitrogen cooling or refrigerator cooling; The array composed of the high-temperature superconductors (4) and the array composed of the permanent magnets (2) are both in groups.

7. A high-temperature superconducting pinning suspension active-passive hybrid vibration isolation method, characterized in that: The high-temperature superconducting pinning suspension active-passive hybrid vibration isolation method is applied to the high-temperature superconducting pinning suspension active-passive hybrid vibration isolation system according to any one of claims 1 to 6, and the high-temperature superconducting pinning suspension active-passive hybrid vibration isolation method comprises the following steps: By means of suspension pretreatment, a float (202) of a suspension system (200) is stabilized at a balanced position relative to a stator (201); When externally excited, collecting and processing vibration data generated by the float (202) connected to the vibration-isolating body relative to the stator (201); The controller (7) processes the vibration data through an internally preset PID control algorithm and outputs a control signal; The coil (3) on the float (202) receives the output control signal and executes it to achieve a preset state; Wherein, the preset state includes: the acceleration of the float (202) is 0; The suspension pretreatment comprises: Fixing the float (202) at a desired height; Adding liquid nitrogen into a low-temperature dewar (5) to cool the high-temperature superconductor (4) to a superconducting state; An electromagnetic force is generated between the permanent magnet (2) and the high temperature superconductor (4) to release the float (202); Under the action of gravity and electromagnetic force, the float (202) oscillates and eventually stabilizes at a balanced position.

8. The high temperature superconducting pinning suspension active-passive hybrid vibration isolation method according to claim 7, characterized in that: The collection process includes: When the base is externally excited, the low-temperature dewar (5) and the high-temperature superconductor (4) fixed on the base generate relative motion, the permanent magnet (2) and the high-temperature superconductor (4) vibrate relative to each other due to electromagnetic force, and the float (202) generates acceleration vibration data; The acceleration sensor measures the acceleration vibration data of the float (202) and inputs the data to the controller (7) through the vibration input module (6).

9. The high temperature superconducting pinning suspension active-passive hybrid vibration isolation method according to claim 8, characterized in that: The controller (7) outputs a voltage signal through the PID control algorithm according to the input signal of the vibration input module (6); The output value of the voltage signal is output to the power regulation module (9) through the voltage output module (8).

10. The high temperature superconducting pinning suspension active-passive hybrid vibration isolation method according to claim 9, characterized in that: The execution includes: The power regulating module (9) outputs current to the coil (3) according to the received voltage signal; The current in the coil (3) causes the permanent magnet (2) and the high-temperature superconductor (4) to generate electromagnetic force; The electromagnetic force offsets the inertial force of the float (202) generated by external interference, so that the float (202) reaches a preset state.

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