Compensation device and system of LCoS chip

Abstract

The invention provides a compensation device and system of an LCoS chip, and relates to the technical field of display. The device comprises a wavefront measuring module, a processing module and a micro-control module, the wavefront measurement module is used for measuring an interference pattern generated by the LCoS chip to be measured and measuring interference fringes generated when the LCoS chip loads different test gray-scale graphs; the processing module is used for processing the interference pattern to obtain initial surface type data of the LCoS chip, and processing the interference fringes to generate a gray scale-phase response curve of the LCoS chip; and the micro-control module is used for obtaining a voltage-phase compensation curve of the LCoS chip according to the initial surface type data and the gray scale-phase response curve, so that the phase of each pixel point on the LCoS chip in the compensated LCoS device is compensated based on the voltage-phase compensation curve, the accuracy of a compensation result is ensured, and the phase modulation uniformity of the LCoS chip is improved.

Description

Technical Field

[0001] The present invention relates to the field of display technology, and in particular to a compensation device and system for an LCoS chip. Background Art

[0002] Liquid Crystal on Silicon (LCoS) microdisplay chip is an optical device based on reflective liquid crystal display technology, which is widely used in projection display, spatial light modulator (SLM) and optical communication. Among them, LCoS microdisplay chip controls the direction of liquid crystal molecules by applying voltage on pixel electrodes, thereby changing the phase or polarization state of incident light.

[0003] However, in practical applications, due to the influence of material properties, manufacturing process and environmental factors, the surface of the LCoS chip is not flat or has a certain warpage, which affects its performance. Therefore, it is urgent to propose a surface measurement and compensation device for the LCoS chip. Summary of the invention

[0004] The purpose of the present invention is to provide a compensation device and system for an LCoS chip in view of the above-mentioned deficiencies in the prior art, so as to solve the technical problems existing in the prior art.

[0005] To achieve the above purpose, the technical solution adopted in the embodiment of the present application is as follows: In a first aspect, an embodiment of the present application provides a compensation and correction device for an LCoS chip, comprising: a wavefront measurement module, a processing module and a microcontroller module; the output end of the wavefront measurement module is connected to the input end of the processing module, and the output end of the processing module is connected to the input end of the microcontroller module; The wavefront measurement module is used to reflect the input light source array according to a preset reflection light path, measure the interference pattern generated by the LCoS chip to be tested, and measure the interference fringes generated when the LCoS chip is loaded with different test grayscale images, and transmit the interference pattern and the interference fringes corresponding to each test grayscale image to the processing module; The processing module is used to process the interference pattern to obtain the initial surface data of the LCoS chip, process the interference fringes to generate the grayscale-phase response curve of the LCoS chip, and transmit the initial surface data and the grayscale-phase response curve to the microcontroller module; The microcontroller module is used to obtain a voltage-phase compensation curve of the LCoS chip according to the initial surface data and the grayscale-phase response curve, so as to compensate the phase of each pixel on the LCoS chip in the compensated LCoS device based on the voltage-phase compensation curve of the LCoS chip.

[0006] Optionally, the wavefront measurement module includes: a polarization conversion unit, a first double telecentric lens unit, a non-polarizing beam splitter prism, a reflector, a second double telecentric lens unit, a detection unit and a mounting base; The mounting base is used to fix and mount the LCoS chip to be tested; The polarization conversion unit is used to convert the input light source array into P light, and reflect the P light to the first double telecentric lens unit; The first double telecentric lens unit is used to collimate and expand the P light so that the reflected light after expansion completely covers the display area of ​​the LCoS chip; The polarization beam splitter is used to split the reflected light after beam expansion into a first beam P light and a second beam P light, wherein the first beam P light is reflected to the reflector to form reference light, and the second beam P light is reflected to the LCoS chip to form reflected light; The second double telecentric lens unit is used to reduce the reference light and the reflected light so that all the reduced interference light spots enter the detection unit; The detection unit is used to collect the interference pattern formed by the reference light and the reflected light, and transmit the interference pattern to the processing module.

[0007] Optionally, the detection unit is further used for: The interference fringes formed by the reference light and the reflected light when the LCoS chip displays the first test grayscale image are collected, and the interference fringes corresponding to the first test grayscale image are transmitted to the processing module.

[0008] Optionally, the first double telecentric lens unit includes: a first lens and a second lens, and the focal length of the first lens is smaller than the focal length of the second lens.

[0009] Optionally, the second double telecentric lens unit includes: a third lens and a fourth lens, and the focal length of the third lens is greater than the focal length of the fourth lens.

[0010] Optionally, the processing the interference pattern to obtain initial surface data of the LCoS chip includes: Transforming the interference pattern to obtain phase information of the LCoS chip; Phase information of the LCoS chip is phase unwrapped to obtain initial surface data of the LCoS chip.

[0011] Optionally, the processing the interference fringes to generate a grayscale-phase response curve of the LCoS chip includes: Determining the phase value corresponding to each of the test grayscale images according to the interference fringes corresponding to each of the test grayscale images; Fitting processing is performed on each of the test grayscale images and the phase value corresponding to each of the test grayscale images to obtain a grayscale-phase response curve of the LCoS chip.

[0012] Optionally, the test grayscale image loaded by the LCoS chip includes: an upper half area and a lower half area, the grayscale value of the upper half area is any grayscale between 0 and 255, and the grayscale value of the lower half area is 0; Determining the phase value corresponding to each test grayscale image according to the interference fringes corresponding to each test grayscale image includes: Obtaining first interference fringes in an upper half area and second interference fringes in a lower half area of ​​the interference fringes corresponding to the test grayscale image; Determining an offset of the interference fringes according to the first interference fringes and the second interference fringes; The period of the interference fringes is obtained, and the phase value corresponding to the test grayscale image is determined according to the period of the interference fringes and the offset of the interference fringes.

[0013] Optionally, obtaining a voltage-phase compensation curve of the LCoS chip according to the initial surface shape data and the grayscale-phase response curve includes: Obtaining a pre-constructed grayscale-voltage relationship of the LCoS chip; Determining a voltage-phase response curve of the LCoS chip according to a relationship between the grayscale and voltage of the LCoS chip and a grayscale-phase response curve of the LCoS chip; A voltage-phase compensation curve of the LCoS chip is determined according to the initial surface shape data and the voltage-phase response curve.

[0014] In a second aspect, an embodiment of the present application further provides a compensation system for an LCoS chip, the system comprising: the compensation device provided in the first aspect and a compensated LCoS device; wherein the compensated LCoS device comprises: a driving module and an LCoS chip module; The first input end of the driving module is connected to the output end of the microcontroller module in the compensation device of the LCoS chip, the second input end of the driving module is used to obtain the video source data to be displayed, and the output end of the driving module is connected to the input end of the LCoS chip module; The driving module is used to parse and process the acquired video source data to obtain the voltage signal of each pixel on each frame of the image to be displayed, and to obtain the voltage-phase compensation curve of the LCoS chip module output by the microcontroller module, and to obtain the phase compensation amount of each pixel according to the voltage signal of each pixel and the voltage-phase compensation curve, and to send the phase compensation amount of each pixel to the LCoS chip module; The LCoS chip module performs compensation according to the phase compensation amount of each pixel to obtain the compensated phase of each pixel, and performs display based on the compensated phase of each pixel.

[0015] The beneficial effects of this application are: The present application provides a compensation device and system for an LCoS chip, including: a wavefront measurement module, a processing module and a microcontroller module; the output end of the wavefront measurement module is connected to the input end of the processing module, and the output end of the processing module is connected to the input end of the microcontroller module; the wavefront measurement module is used to reflect the input light source array according to a preset reflection light path, measure the interference pattern generated by the LCoS chip to be tested, and measure the interference fringes generated when the LCoS chip is loaded with different test grayscale images, and transmit the interference pattern and the interference fringes corresponding to each test grayscale image to the processing module. a processing module, which is used to process the interference pattern to obtain the initial surface data of the LCoS chip, and to process the interference fringes to generate the grayscale-phase response curve of the LCoS chip, and transmit the initial surface data and the grayscale-phase response curve to the microcontroller module; and a microcontroller module, which is used to obtain the voltage-phase compensation curve of the LCoS chip according to the initial surface data and the grayscale-phase response curve, so that the phase of each pixel point on the LCoS chip in the compensated LCoS device is compensated based on the voltage-phase compensation curve of the LCoS chip. In this scheme, in order to improve the measurement accuracy of the wavefront reflection result of the LCoS chip during the measurement phase, it is proposed that the wavefront measurement module can measure the interference fringes when the LCoS chip displays each test grayscale image and the interference pattern when the grayscale image is not displayed (LCoS is not powered on); then, the processing module processes the interference fringes and interference pattern when each test grayscale image is respectively processed to obtain the initial surface data and grayscale-phase response curve of the LCoS chip; finally, the microcontroller module calculates the voltage-phase compensation curve of the LCoS chip according to the initial surface data and grayscale-phase response curve of the LCoS chip, so that the phase of each pixel on the LCoS chip in the compensated LCoS device can be compensated based on the voltage-phase compensation curve of the LCoS chip, that is, the phase information of each pixel in the LCoS chip can be measured and compensated, and the accuracy of the compensation result can be ensured, thereby improving the display effect of the LCoS chip. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0017] Figure 1 A schematic diagram of the structure of a compensation device for an LCoS chip provided in an embodiment of the present application; Figure 2 A schematic diagram of the initial surface data of the LCoS chip to be tested provided in an embodiment of the present application; Figure 3 A schematic diagram of the structure of a wavefront measurement module in a compensation device for an LCoS chip provided in an embodiment of the present application; Figure 4 A schematic diagram of a processing flow of a processing module in a compensation device for an LCoS chip provided in an embodiment of the present application; Figure 5 A schematic diagram of a processing flow of a processing module in another compensation device for an LCoS chip provided in an embodiment of the present application; FIG6 (a) is a test grayscale image provided in an embodiment of the present application; FIG6( b ) is a schematic diagram of interference fringes provided in an embodiment of the present application; Figure 7 A schematic diagram of a processing flow of a processing module in a compensation device for an LCoS chip provided in another embodiment of the present application; Figure 8 A schematic diagram of a processing flow of a microcontroller module in a compensation device for an LCoS chip provided in an embodiment of the present application; Fig. 9 A schematic diagram of the structure of a compensation system for an LCoS chip provided in an embodiment of the present application.

[0018] Icons: 100-compensation device; 1-wavefront measurement module; 2-processing module; 3-microcontroller module; 11-polarization conversion unit; 12-first double telecentric lens unit; 13-polarization beam splitter prism, 14-reflector; 15-second double telecentric lens unit; 16-detection unit; 17-mounting base; 200-compensated LCoS device; 201-driving module; 202-LCoS chip module. DETAILED DESCRIPTION

[0019] To make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. It should be understood that the drawings in the present application only serve the purpose of explanation and description and are not used to limit the scope of protection of the present application. In addition, it should be understood that the schematic drawings are not drawn in real proportion. The flowchart used in this application shows the operations implemented according to some embodiments of the present application. It should be understood that the operations of the flowchart can be implemented out of sequence, and the steps without logical context can be reversed in order or implemented simultaneously. In addition, those skilled in the art can add one or more other operations to the flowchart under the guidance of the content of the present application, or remove one or more operations from the flowchart.

[0020] In addition, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various configurations. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the application claimed for protection, but merely represents the selected embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without making creative work belong to the scope of protection of the present application.

[0021] It should be noted that the term "comprising" will be used in the embodiments of the present application to indicate the existence of the features declared thereafter, but does not exclude the addition of other features.

[0022] The structure of the compensation device of the LCoS chip of the present application is described in detail below through multiple embodiments.

[0023] Figure 1 A schematic diagram of the structure of a compensation device for an LCoS chip provided in an embodiment of the present application; Figure 1 As shown, the compensation device 100 of the LCoS chip includes: a wavefront measurement module 1, a processing module 2 and a microcontroller module 3. The output end of the wavefront measurement module 1 is connected to the input end of the processing module 2, and the output end of the processing module 2 is connected to the input end of the microcontroller module 3.

[0024] Exemplarily, both the processing module 2 and the micro-control module 3 may be terminal devices having data processing functions.

[0025] The wavefront measurement module 1 is used to reflect the input light source array according to the preset reflection light path, measure the interference pattern generated by the LCoS chip to be tested, and measure the interference fringes generated when the LCoS chip displays different test grayscale images, and transmit the interference pattern and the interference fringes corresponding to each test grayscale image to the processing module 2. Exemplarily, the light source array can be a visible light band or an infrared band, etc.

[0026] Optionally, the wavefront measurement module 1 is composed of multiple optical elements. The light source array is input into the wavefront measurement module 1, and the wavefront measurement module 1 measures the reflected wavefront information when the LCoS chip displays each grayscale image. For example, the wavefront information may include: modulation efficiency, phase consistency, etc.

[0027] In this embodiment, the wavefront measurement module 1 mainly measures the interference pattern when the LCoS chip has not yet displayed the grayscale image (LCoS is not powered on), and the interference fringes generated when different test grayscale images are displayed on the LCoS chip, and sends the interference pattern and the interference fringes corresponding to each test grayscale image to the processing module, which processes the interference pattern and the interference fringes corresponding to each test grayscale image.

[0028] Continue to refer Figure 1 As shown, the processing module 2 is used to process the interference pattern to obtain the initial surface data of the LCoS chip, and to process the interference fringes to generate the grayscale-phase response curve of the LCoS chip, and transmit the initial surface data and the grayscale-phase response curve to the microcontroller module 3.

[0029] In this embodiment, since the interference pattern is generated when the LCoS chip does not display any grayscale image, the initial surface data of the LCoS chip can be obtained from the interference pattern of the LCoS chip. The initial surface data includes: the height value of each position point on the surface of the LCoS chip, the difference between the highest point and the lowest point, and the mean square error of the surface data, the unit is one measurement wavelength.

[0030] For example, reference Figure 2 As shown, the initial surface shape data of the LCoS chip to be tested is obtained. The flatness and roughness of the surface of the LCoS chip can also be determined from the initial surface shape data.

[0031] At the same time, since each interference fringe is generated when the LCoS chip displays different test grayscale images, and the change of the interference fringe is related to the phase information of the LCoS chip, the grayscale-phase response curve of the LCoS chip can be calculated from the interference fringes corresponding to each test grayscale image.

[0032] The microcontroller module 3 is used to obtain a voltage-phase compensation curve of the LCoS chip according to the initial surface data and the grayscale-phase response curve, so as to compensate the phase of each pixel on the LCoS chip in the compensated LCoS device based on the voltage-phase compensation curve of the LCoS chip.

[0033] By way of example, the compensated LCoS device may be a projection display device, a spatial light modulator, etc. manufactured based on an LCoS device.

[0034] Specifically, the microcontroller module 3 can determine the phase information of all pixels on the surface of the LCoS chip according to the initial surface data of the LCoS chip; then, according to the phase information of all pixels on the surface of the LCoS chip and the grayscale-phase response curve, the voltage-phase compensation curve of the LCoS chip is obtained, so that the phase of each pixel on the LCoS chip in the compensated LCoS device can be compensated based on the voltage-phase compensation curve of the LCoS chip, thereby ensuring the accuracy of the displayed result.

[0035] Therefore, when the reflected wavefront information of the LCoS chip is measured by the wavefront measurement module, the phase information of each pixel in the LCoS chip is directly measured, so that the accuracy of the compensation result can be ensured.

[0036] In summary, the present application provides a compensation device for an LCoS chip, comprising: a wavefront measurement module, a processing module and a microcontroller module; the output end of the wavefront measurement module is connected to the input end of the processing module, and the output end of the processing module is connected to the input end of the microcontroller module; the wavefront measurement module is used to reflect the input light source array according to a preset reflection light path, measure the interference pattern generated by the LCoS chip to be tested, and measure the interference fringes generated when the LCoS chip is loaded with different test grayscale images, and transmit the interference pattern and the interference fringes corresponding to each test grayscale image to A processing module; the processing module is used to process the interference pattern to obtain the initial surface data of the LCoS chip, and to process the interference fringes to generate the grayscale-phase response curve of the LCoS chip, and transmit the initial surface data and the grayscale-phase response curve to the microcontroller module; the microcontroller module is used to obtain the voltage-phase compensation curve of the LCoS chip according to the initial surface data and the grayscale-phase response curve, so that the phase of each pixel point on the LCoS chip in the compensated LCoS device is compensated based on the voltage-phase compensation curve of the LCoS chip. In this scheme, in order to improve the measurement accuracy of the wavefront reflection result of the LCoS chip during the measurement phase, it is proposed that the wavefront measurement module can measure the interference fringes when the LCoS chip displays each test grayscale image and the interference pattern when the grayscale image is not displayed (LCoS is not powered on); then, the processing module processes the interference fringes and interference pattern when each test grayscale image is respectively processed to obtain the initial surface data and grayscale-phase response curve of the LCoS chip; finally, the microcontroller module calculates the voltage-phase compensation curve of the LCoS chip according to the initial surface data and grayscale-phase response curve of the LCoS chip, so that the phase of each pixel on the LCoS chip in the compensated LCoS device can be compensated based on the voltage-phase compensation curve of the LCoS chip, that is, the phase information of each pixel in the LCoS chip can be measured and compensated, and the accuracy of the compensation result can be ensured, thereby improving the display effect of the LCoS chip.

[0037] The structure of the wavefront measurement module will be specifically introduced through the following embodiments.

[0038] Optionally, refer to Figure 3 As shown, it is a schematic diagram of the structure of the wavefront measurement module.

[0039] The wavefront measurement module 1 includes: a polarization conversion unit 11 , a first double telecentric lens unit 12 , a polarization beam splitter prism 13 , a reflector 14 , a second double telecentric lens unit 15 , a detection unit 16 and a mounting base 17 .

[0040] The mounting base 17 is used to fix the LCoS chip to be tested. Before starting the measurement, the LCoS chip is first mounted on the mounting base 17, and it is ensured that the incident light can completely cover the entire display area of ​​the LCoS chip. Then, the angle of the mounting base 17 is manually adjusted so that the detection unit 16 can detect the interference pattern formed by the reference light and the reflected light of the LCoS chip.

[0041] The polarization conversion unit 11 is used to convert the input light source array into P light and reflect the P light to the first double telecentric lens unit 12 .

[0042] In this embodiment, the polarization conversion unit 11 can convert all incident light into P light. Figure 3 As shown in the figure, the polarization conversion unit is composed of a quarter wave plate, a polarizing beam splitter (PBS), and a reflector (MIRRO). The optical axis of the quarter wave plate is 45 degrees to the orientation direction of the liquid crystal. Because the incident light is non-polarized light, the amplitude and phase do not change after passing through the quarter wave plate.

[0043] Polarization beam splitter (PBS) is an optical element that splits incident light into two beams with mutually perpendicular polarization directions, namely P light (parallel to the paper surface) and S light (perpendicular to the paper surface). In this scheme, P light can directly pass through the polarization beam splitter prism, and S light is reflected by the mirror surface of the polarization beam splitter prism, and then reflected by the reflector without changing the polarization direction. It is then reflected by the polarization beam splitter prism through the 1 / 4 wave plate, and is reflected by the light source array and passes through the 1 / 4 wave plate again. The two times of passing through the 1 / 4 wave plate cause the polarization direction to rotate 90°, and the S light is converted into P light, and finally all passes through the polarization beam splitter prism. At this point, the purpose of converting all incident light into P light is achieved.

[0044] Continue to refer Figure 3 As shown, the first double telecentric lens unit 12 is used to collimate and expand the P light so that the reflected light after expansion can completely cover the display area of ​​the LCoS chip. Exemplarily, the first double telecentric lens unit 12 can be a collimating beam expander.

[0045] The non-polarizing beam splitter 13 (NPBS) is used to split the reflected light after beam expansion into a first beam P light and a second beam P light. The first beam P light is reflected to the reflector 14 to form a reference light, and the second beam P light is reflected to the LCoS chip to form a reflected light.

[0046] Among them, the splitting ratio of the non-polarization beam splitter prism 13 is independent of the polarization state of the incident light, and the incident light of any polarization state can be converted into two beams of light output close to 1:1, and the polarization state of the output light is approximately the same as the incident light. Therefore, the reflected light (i.e., the incident P light) after beam expansion can be divided into two beams of P light by the non-polarization beam splitter prism 13. Among them, one beam of P light is reflected to the reflector 14 to form a reference light, and the other beam of P light is reflected by the LCoS chip to form a reflected light, and an interference pattern is formed between the reference light and the reflected light after being reflected by the LCoS chip at the detection unit 16, which is also called a wrapped phase diagram.

[0047] The second double telecentric lens unit 15 is used to reduce the reference light and the reflected light so that the reduced interference light spot can all enter the detection unit 16. Optionally, in order to enable the detection unit 16 to measure the completed interference light spot, the second double telecentric lens unit 15 can reduce the size of the interference light spot formed by the reference light and the reflected light so that it can completely enter the detection area of ​​the detection unit 16 and then be completely collected.

[0048] The detection unit 16 is used to collect the interference pattern formed by the reference light and the reflected light, and transmit the interference pattern to the processing module.

[0049] Exemplarily, the detection unit 16 is a high-resolution CCD industrial camera, which is used to collect the interference pattern formed by the reference light and the reflected light.

[0050] Among them, the LCoS chip is fixedly mounted on the mounting base 17, and the mounting base 17 has a certain rotation space. The mounting base 17 can be rotated to ensure that the reflected light of the LCoS chip and the reference light from the reflector can form an interference pattern, and the interference pattern is formed by the detection unit 16.

[0051] Optionally, the detection unit 16 is further configured to: The interference fringes formed by the reference light and the reflected light after being reflected when the first test grayscale image is displayed on the LCoS chip are collected, and the interference fringes corresponding to the first test grayscale image are transmitted to the processing module.

[0052] It should be noted that in order to obtain the grayscale-phase response curve of the LCoS chip, different test grayscale images can be loaded on the LCoS chip, and the detection unit 16 respectively collects the interference fringes formed by the reference light and the reflected light when different test grayscale images are displayed on the LCoS chip, and then the interference fringes corresponding to each test grayscale image are transmitted to the processing module.

[0053] Optionally, continue to refer to Figure 3 As shown, the first double telecentric lens unit includes: a first lens len1 and a second lens len2, and the focal length f1 of the first lens len1 is smaller than the focal length f2 of the second lens len2, that is, f3>f4. Therefore, the first lens len1 and the second lens len2 can form a collimating beam expansion system, and the spot size after beam expansion can at least fully cover the display area of ​​the LCoS chip.

[0054] Optionally, continue to refer to Figure 3 As shown, the second double telecentric lens unit includes: a third lens len3 and a fourth lens len4, and the focal length f3 of the third lens len3 is greater than the focal length f4 of the fourth lens len4, that is, f3>f4. Therefore, the size of the interference spot can be reduced by the third lens len3 and the fourth lens len4, so that it can completely enter the field of view of the detection unit 16 and then be completely collected.

[0055] The following examples will explain in detail how to obtain the initial surface data and grayscale-phase response curve of the LCoS chip.

[0056] Optionally, refer to Figure 4 As shown, the interference pattern is processed to obtain the initial surface data of the LCoS chip, including: S401, transform the interference pattern to obtain phase information of the LCoS chip.

[0057] In one feasible method, Fourier Transform Profilometry (FTP) or Phase Measuring Profilometry (PMP) can be used to obtain the phase information of the LCoS chip from the interference pattern. Specifically, the interference pattern can be Fourier transformed, and the baseband component can be obtained from the Fourier transformed result. Then, the baseband component can be inversely Fourier transformed to obtain the phase information of the LCoS chip.

[0058] S402: performing phase unwrapping on the phase information of the LCoS chip to obtain initial surface data of the LCoS chip.

[0059] Optionally, after obtaining the phase information of the LCoS chip, since the phase is calculated by inverse tangent (atan2), it will be truncated between [-π,π] or [0,2π]. Therefore, the phase information of the LCoS chip can be phase unwrapped to obtain the initial surface data of the LCoS chip. Among them, the unwrapping algorithm usually includes: path tracking method, minimum norm method and deep learning-based method.

[0060] Optionally, refer to Figure 5 As shown, the interference fringes are processed to generate the grayscale-phase response curve of the LCoS chip, including: S501 , determining the phase value corresponding to each test grayscale image according to the interference fringes corresponding to each test grayscale image.

[0061] S502 , performing fitting processing on each test grayscale image and the phase value corresponding to each test grayscale image to obtain a grayscale-phase response curve of the LCoS chip.

[0062] In this embodiment, the interference fringes corresponding to each test grayscale image can be processed to obtain the phase value corresponding to each test grayscale image, and the grayscale value represented by each test grayscale image and the phase value corresponding to each test grayscale image can be fitted to generate the grayscale-phase response curve of the LCoS chip.

[0063] Optionally, referring to FIG6 (a), the test grayscale image loaded by the LCoS chip includes: an upper half area and a lower half area, the grayscale value of the upper half area is any grayscale between 0 and 255, and the grayscale value of the lower half area is 0. Therefore, the number of grayscale images displayed in the upper half area is 256, and the number of grayscale images displayed in the lower half area is 1. That is, during the entire measurement process, the interference fringes in the upper half area change with the change of the grayscale value of the test grayscale image, while the interference fringes in the lower half area remain unchanged.

[0064] refer to Figure 7 As shown, the above step S501 includes: S701 , obtaining first interference fringes in an upper half area and second interference fringes in a lower half area of ​​interference fringes corresponding to a test grayscale image.

[0065] S702: Determine an offset of the interference fringes according to the first interference fringes and the second interference fringes.

[0066] S703: Obtain the period of the interference fringes, and determine the phase value corresponding to the test grayscale image according to the period of the interference fringes and the offset of the interference fringes.

[0067] It should be noted that, referring to FIG6( b ), when the LCoS chip displays different test grayscale images in sequence, the upper half of the interference fringe will move relative to the lower half. When the movement reaches one interference fringe period, a phase modulation of 2π is generated.

[0068] Therefore, in this embodiment, the relative movement amount of the interference fringes can be calculated based on the first interference fringes in the upper half area and the second interference fringes in the lower half area. Then, obtain the period T of the interference fringes (the average value of the distance between two adjacent bright fringes or dark fringes) and determine the movement of the interference fringes. The ratio of the period T is , and calculate the product of the ratio and 2π, that is , and use the product result as the phase value corresponding to the test grayscale image.

[0069] Optionally, refer to Figure 8 As shown, according to the initial surface data and the grayscale-phase response curve, the voltage-phase compensation curve of the LCoS chip is obtained, including: S801, obtaining a pre-constructed relationship between the gray scale and voltage of the LCoS chip.

[0070] S802: Determine a voltage-phase response curve of the LCoS chip according to a relationship between the grayscale and voltage of the LCoS chip and a grayscale-phase response curve of the LCoS chip.

[0071] S803: Determine a voltage-phase compensation curve on the LCoS chip according to the initial surface data and the voltage-phase response curve.

[0072] In this embodiment, considering that there is a certain proportional relationship (generally a linear relationship) between the grayscale and voltage of the LCoS chip, the grayscale-voltage relationship can be substituted into the grayscale-phase response curve to obtain the voltage-phase response curve of the LCoS chip; then, the initial surface data of the LCoS chip can be used as the phase surface data, so the voltage-phase compensation curve on the LCoS chip can be obtained according to the phase surface data and the voltage-phase response curve of the LCoS chip. Finally, in the phase compensation stage, after the driving module obtains the voltage signal of each pixel on the LCoS chip, the phase of each pixel can be compensated based on the voltage signal of each pixel on the LCoS chip and the voltage-phase compensation response curve.

[0073] Optionally, refer to Fig. 9As shown, the present application also provides a structural schematic diagram of a compensation system for an LCoS chip, the system comprising: the compensation device 100 provided in the above embodiment and a compensated LCoS device 200; the compensated LCoS device 200 comprises: a driving module 201 and an LCoS chip module 202; The driving module 201 is used to parse and process the acquired video source data, obtain the voltage signal of each pixel on each frame of the image to be displayed, and obtain the voltage-phase compensation curve of the LCoS chip module output by the microcontroller module, and obtain the phase compensation amount of each pixel according to the voltage signal of each pixel and the voltage-phase compensation curve, and send the phase compensation amount of each pixel to the LCoS chip module.

[0074] The LCoS chip module 202 performs compensation according to the phase compensation amount of each pixel to obtain a compensated phase of each pixel, and displays based on the compensated phase of each pixel.

[0075] In this embodiment, the driving module 201 parses and processes the video source data input by the user, obtains the voltage signal of each pixel on each frame of the video source data, and calculates the phase compensation amount of each pixel based on the voltage signal of each pixel and the voltage-phase compensation curve, and sends the phase compensation amount of each pixel to the LCoS chip module 202; then, the LCoS chip module 202 performs phase compensation according to the phase compensation amount of each pixel, obtains the compensated phase of each pixel, and displays based on the compensated phase of each pixel. Therefore, the compensation system of the LCoS chip provided by the present application can compensate the phase of each pixel, improve the display effect of the LCoS chip module, and avoid display errors.

[0076] In the several embodiments provided by the present invention, it should be understood that the disclosed devices and methods can be implemented in other ways. For example, the device embodiments described above are only schematic. For example, the division of the units is only a logical function division. There may be other division methods in actual implementation, such as multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some interfaces, indirect coupling or communication connection of devices or units, which can be electrical, mechanical or other forms.

[0077] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0078] In addition, each functional unit in each embodiment of the present invention may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit. The above-mentioned integrated unit may be implemented in the form of hardware or in the form of hardware plus software functional units.

[0079] The above-mentioned integrated unit implemented in the form of a software functional unit can be stored in a computer-readable storage medium. The above-mentioned software functional unit is stored in a storage medium, including a number of instructions for a computer device (which can be a personal computer, a server, or a network device, etc.) or a processor (English: processor) to perform some steps of the method described in each embodiment of the present invention. The aforementioned storage medium includes: U disk, mobile hard disk, read-only memory (English: Read-Only Memory, referred to as: ROM), random access memory (English: Random Access Memory, referred to as: RAM), disk or optical disk and other media that can store program codes.

Claims

1. A compensation device for an LCoS chip, characterized in that: include: Wavefront measurement module, processing module and micro-control module; The output end of the wavefront measurement module is connected to the input end of the processing module, and the output end of the processing module is connected to the input end of the microcontroller module; The wavefront measurement module is used to reflect the input light source array according to a preset reflection light path, measure the interference pattern generated by the LCoS chip to be tested, and measure the interference fringes generated when the LCoS chip is loaded with different test grayscale images, and transmit the interference pattern and the interference fringes corresponding to each test grayscale image to the processing module; The processing module is used to process the interference pattern to obtain the initial surface data of the LCoS chip, process the interference fringes to generate the grayscale-phase response curve of the LCoS chip, and transmit the initial surface data and the grayscale-phase response curve to the microcontroller module; The microcontroller module is used to obtain a voltage-phase compensation curve of the LCoS chip according to the initial surface data and the grayscale-phase response curve, so as to compensate the phase of each pixel on the LCoS chip in the compensated LCoS device based on the voltage-phase compensation curve of the LCoS chip.

2. The device according to claim 1, characterized in that The wavefront measurement module comprises: a polarization conversion unit, a first double telecentric lens unit, a non-polarization beam splitter prism, a reflector, a second double telecentric lens unit, a detection unit and a mounting base; The mounting base is used to fix and mount the LCoS chip to be tested; The polarization conversion unit is used to convert the input light source array into P light, and reflect the P light to the first double telecentric lens unit; The first double telecentric lens unit is used to collimate and expand the P light so that the reflected light after expansion completely covers the display area of ​​the LCoS chip; The polarization beam splitter is used to split the reflected light after beam expansion into a first beam P light and a second beam P light, wherein the first beam P light is reflected to the reflector to form reference light, and the second beam P light is reflected to the LCoS chip to form reflected light; The second double telecentric lens unit is used to reduce the reference light and the reflected light so that all the reduced interference light spots enter the detection unit; The detection unit is used to collect the interference pattern formed by the reference light and the reflected light, and transmit the interference pattern to the processing module.

3. The device according to claim 2, characterized in that The detection unit is further used for: The interference fringes formed by the reference light and the reflected light when the LCoS chip displays the first test grayscale image are collected, and the interference fringes corresponding to the first test grayscale image are transmitted to the processing module.

4. The device according to claim 2, characterized in that The first double telecentric lens unit includes: a first lens and a second lens, and the focal length of the first lens is smaller than the focal length of the second lens.

5. The device according to claim 2, characterized in that The second double telecentric lens unit includes: a third lens and a fourth lens, and the focal length of the third lens is greater than the focal length of the fourth lens.

6. The device according to claim 1, characterized in that The step of processing the interference pattern to obtain initial surface data of the LCoS chip includes: Transforming the interference pattern to obtain phase information of the LCoS chip; Phase information of the LCoS chip is phase unwrapped to obtain initial surface data of the LCoS chip.

7. The device according to claim 1, characterized in that The processing of the interference fringes to generate a grayscale-phase response curve of the LCoS chip includes: Determining the phase value corresponding to each of the test grayscale images according to the interference fringes corresponding to each of the test grayscale images; Fitting processing is performed on each of the test grayscale images and the phase value corresponding to each of the test grayscale images to obtain a grayscale-phase response curve of the LCoS chip.

8. The device according to claim 7, characterized in that The test grayscale image loaded by the LCoS chip includes: an upper half area and a lower half area, the grayscale value of the upper half area is any grayscale between 0-255, and the grayscale value of the lower half area is 0; Determining the phase value corresponding to each of the test grayscale images according to the interference fringes corresponding to each of the test grayscale images includes: Obtaining first interference fringes in an upper half area and second interference fringes in a lower half area of ​​the interference fringes corresponding to the test grayscale image; Determining an offset of the interference fringes according to the first interference fringes and the second interference fringes; The period of the interference fringes is obtained, and the phase value corresponding to the test grayscale image is determined according to the period of the interference fringes and the offset of the interference fringes.

9. The device according to claim 1, characterized in that The step of obtaining a voltage-phase compensation curve of the LCoS chip according to the initial surface data and the grayscale-phase response curve comprises: Obtaining a pre-constructed grayscale-voltage relationship of the LCoS chip; Determining a voltage-phase response curve of the LCoS chip according to a relationship between the grayscale and voltage of the LCoS chip and a grayscale-phase response curve of the LCoS chip; A voltage-phase compensation curve of the LCoS chip is determined according to the initial surface shape data and the voltage-phase response curve.

10. A compensation system for an LCoS chip, characterized in that: The system comprises: the compensation device according to any one of claims 1 to 9 and a compensated LCoS device; wherein the compensated LCoS device comprises: a driving module and an LCoS chip module; The first input end of the driving module is connected to the output end of the microcontroller module in the compensation device of the LCoS chip, the second input end of the driving module is used to obtain the video source data to be displayed, and the output end of the driving module is connected to the input end of the LCoS chip module; The driving module is used to parse and process the acquired video source data to obtain the voltage signal of each pixel on each frame of the image to be displayed, and to obtain the voltage-phase compensation curve of the LCoS chip module output by the microcontroller module, and to obtain the phase compensation amount of each pixel according to the voltage signal of each pixel and the voltage-phase compensation curve, and to send the phase compensation amount of each pixel to the LCoS chip module; The LCoS chip module performs compensation according to the phase compensation amount of each pixel to obtain the compensated phase of each pixel, and performs display based on the compensated phase of each pixel.

Images