Positioning disc mechanism and die bonding equipment

Abstract

The invention is suitable for the technical field of semiconductor equipment, and provides a positioning disc mechanism and die bonding equipment, and the positioning disc mechanism comprises a positioning disc group, a sliding block and a driving unit. The die bonding equipment comprises any one of the positioning disc mechanisms. The multiple swing arm mechanisms are slidably connected to the first mounting face of the positioning disc set through the sliding blocks, so that the multiple swing arm assemblies can rotate around the first axis along with the positioning disc set, and meanwhile the corresponding sliding blocks can be driven by the multiple driving units to move in the direction of the first axis. Installation of the multiple swing arm mechanisms can be achieved through the positioning disc set, so that the connecting structure between the multiple swing arm mechanisms and the driving end of the rotary driving mechanism is simpler, and the integration degree is higher. Meanwhile, installation errors caused by the fact that the multiple swing arm assemblies are installed on different parts can be avoided, the relative positions of the multiple swing arm mechanisms are more accurate, and therefore the die bonding precision and efficiency are improved.

Description

Technical Field

[0001] The invention belongs to the technical field of semiconductor equipment, and in particular relates to a positioning plate mechanism and a crystal bonding device. Background Art

[0002] A die bonder is one of the devices used in the manufacture of semiconductor devices, and its function is to connect semiconductor wafers with other components. In the operation of a die bonder, the die ring is usually supported by a die supply platform, and then the chip on the die ring is separated from the blue film by a pin device, and finally the nozzle structure is driven by a swing arm structure to move and absorb the chip on the die ring, and then the chip is transported and firmly connected to the solder joints between the packaging substrate to achieve die bonding. In order to improve the efficiency of die bonding, most of the existing die bonders currently use a method of driving multiple swing arm structures to move simultaneously through a rotary drive mechanism to perform the fixing work. Since multiple swing arm structures need to be connected to the driving end of the rotary drive mechanism, the die bonder has a complex connection structure between the swing arm structure and the rotary drive mechanism when in use, which seriously affects the accuracy and efficiency of die bonding. Summary of the invention

[0003] The object of the present invention is to provide a positioning plate mechanism and a crystal bonding device, aiming to solve the technical problem of the complex connection structure between the swing arm structure and the rotary drive mechanism of the crystal bonding machine in the prior art.

[0004] The present invention is implemented in this way. In a first aspect, a positioning plate mechanism is provided, comprising:

[0005] A positioning plate assembly, used to be connected to the driving end of the rotary drive mechanism, and the positioning plate assembly has a degree of freedom to rotate around a first axis, the first axis is the axis of the positioning plate assembly, and the positioning plate assembly has a plurality of first mounting surfaces, and the plurality of first mounting surfaces are evenly distributed around the first axis;

[0006] A plurality of sliding blocks, used for installing the swing arm mechanism, wherein the sliding blocks are arranged in one-to-one correspondence with the first mounting surface, and the sliding blocks are respectively slidably arranged on the first mounting surface; and

[0007] There are multiple driving units, which correspond to the sliding blocks one by one and are evenly arranged on the positioning plate group around the first axis to drive the sliding block to move along the first axis.

[0008] In an optional embodiment, the interior of the positioning plate group is a hollow structure, the plurality of driving units are located inside the positioning plate group, and at least part of the sliding block extends into the interior of the positioning plate group and is connected to the driving end of the driving unit.

[0009] In an optional embodiment, a mounting opening is further provided at the side of the positioning disk group away from the driving end of the rotary drive mechanism, the mounting opening is used to connect the internal space of the positioning disk group with the outside, and a sealing chassis is also provided at the mounting opening for removing the cover.

[0010] In an optional embodiment, a slide rail unit is arranged between the sliding block and the first mounting surface, and a plurality of oil groove structures are arranged on the side of the sealing chassis facing the positioning plate group, and the oil groove structures are used to accommodate foreign objects dropped from the slide rail unit, and the plurality of oil groove structures are respectively located in the lower area of ​​the slide rail unit along the direction of the first axis.

[0011] In an optional embodiment, the positioning plate mechanism further includes a controller, which is used to control the working state of the electrical components on the positioning plate group. The controller is fixed inside the positioning plate group, and the center of gravity of the controller is located on the first axis.

[0012] In an optional embodiment, the outer circumference of the positioning plate group has a second mounting surface, the second mounting surface is located between two of the first mounting surfaces, there are multiple second mounting surfaces, and the multiple second mounting surfaces are also evenly distributed around the first axis.

[0013] In an optional embodiment, an air circuit control group is arranged on the second mounting surface, and the air circuit control group is used to control the connection and disconnection of the air circuit at the suction nozzle structure.

[0014] In an optional embodiment, the positioning disk assembly includes a main disk body and a main cylinder body portion, the main disk body cover is arranged at the end of the main cylinder body portion, and the first mounting surface is located at the outer periphery of the main cylinder body portion and is evenly distributed around the axis of the main cylinder body portion.

[0015] In an optional embodiment, the cross-section of the main cylinder portion is a regular polygon, and the shape of the main disk body matches the cross-sectional shape of the main cylinder portion.

[0016] In a second aspect, a die bonding device is provided, comprising the positioning plate mechanism described in any one of the above items.

[0017] The technical effect of the first aspect of the present invention is: by arranging a positioning plate group between the driving end of the rotary drive mechanism and the swing arm mechanism, the positioning plate group can rotate around the first axis under the action of the rotary drive mechanism. At the same time, the positioning plate group has multiple first mounting surfaces, and the multiple first mounting surfaces are evenly distributed around the first axis. Multiple sliding blocks can be arranged one-to-one with the first mounting surfaces, and the sliding blocks are slidably arranged on the first mounting surfaces, and the swing arm mechanism is installed and connected to the sliding blocks. In addition, multiple driving units evenly arranged around the first axis are also arranged on the positioning plate group, and the driving units are arranged one-to-one with the sliding blocks. By slidingly connecting multiple swing arm mechanisms to the first mounting surface on the positioning plate group through sliding blocks, multiple swing arm assemblies can rotate around the first axis together with the positioning plate group, and at the same time, the corresponding sliding blocks can be driven to move along the first axis direction respectively through multiple driving units, so that the swing arm mechanism can rotate around the first axis and slide along the first axis at the same time. Compared with the prior art, the installation of multiple swing arm mechanisms can be realized through the positioning plate group, so that the connection structure between multiple swing arm mechanisms and the driving end of the rotary drive mechanism is simpler and more integrated. By installing multiple swing arm mechanisms on the same component positioning plate group at the same time, installation errors caused by installing multiple swing arm assemblies on different components can be avoided, making the relative positions between the multiple swing arm mechanisms more accurate, thereby also improving the accuracy of crystal bonding.

[0018] It can be understood that the beneficial effects of the second aspect mentioned above can be found in the relevant description of the first aspect mentioned above, and will not be repeated here. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments of the present invention or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0020] Figure 1 is a structural schematic diagram of a positioning plate mechanism provided by an embodiment of the present invention;

[0021] Figure 2 is a schematic diagram of an exploded structure of a positioning plate mechanism provided in an embodiment of the present invention;

[0022] Figure 3 is a schematic diagram of the positioning plate mechanism provided by an embodiment of the present invention after removing the sealing bottom plate;

[0023] Figure 4 It is a schematic structural diagram of the positioning plate assembly used in the embodiment of the present invention.

[0024] Description of reference numerals:

[0025] 1. Positioning plate assembly; 11. Main plate body; 12. Main cylinder body; 13. Mounting opening; 14. First mounting surface; 15. Second mounting surface; 16. Mounting groove; 17. Heat dissipation hole; 2. Sliding block; 21. Main body; 22. Connecting part; 3. Driving unit; 4. Controller; 5. Air circuit control group; 6. Connecting handle; 7. Sealed chassis; 71. Oil tank structure; 8. Slide rail unit; 9. First axis. DETAILED DESCRIPTION

[0026] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.

[0027] In the description of the present invention, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0028] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0029] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0030] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments.

[0031] Please refer to Figures 1 to 4As shown, in an embodiment of the present invention, in the first aspect, a positioning plate mechanism is provided, and the positioning plate mechanism includes a positioning plate group 1, a sliding block 2 and a driving unit 3. The positioning plate group 1 is used to be connected to the driving end of the rotary driving mechanism, and the positioning plate group 1 has the freedom to rotate around a first axis, and the first axis is the axis of the positioning plate group 1. The outer periphery of the positioning plate group 1 has a plurality of first mounting surfaces 14, and the plurality of first mounting surfaces 14 are evenly distributed around the first axis. There are a plurality of sliding blocks 2, and the sliding blocks 2 are arranged one-to-one with the first mounting surfaces 14, and the sliding blocks 2 are respectively slidably arranged on the first mounting surfaces 14, and the sliding blocks 2 are used to install the swing arm mechanism. There are a plurality of driving units 3, and the driving units 3 are arranged one-to-one with the sliding blocks 2, and the plurality of driving units 3 are evenly arranged on the positioning plate group 1 around the first axis, and the driving units 3 are used to respectively drive different sliding blocks 2 to move along the first axis direction.

[0032] Specifically, the positioning disk group 1 refers to a component or assembly with a certain volume, and the positioning disk group 1 can be a block, a column or a combination of multiple shapes. The first mounting surface 14 refers to a surface structure arranged on the outer periphery of the positioning disk group 1, and the first mounting surface 14 can be a plane structure or a curved surface structure. The sliding block 2 refers to a component with a certain volume, and the sliding block 2 can be a block, a plate or a combination of multiple shapes. The sliding block 2 can be slidably connected to the first mounting surface 14 through a slide rail slideway structure, a slide rail roller structure or a slide rail slider structure. The swing arm mechanism can be connected to the side of the sliding block 2 away from the positioning disk group 1 by means of snap connection, fastener connection or plug-in. The driving unit 3 refers to a component or assembly that can drive an object to move in a straight line, and the driving unit 3 can be a cylinder, a hydraulic cylinder or a voice coil motor. The rotation drive mechanism refers to a component that can output torque and drive an object or assembly to rotate, and the rotation drive mechanism can be a motor or a hydraulic motor, and a heat dissipation part can also be provided on the outside of the rotation drive mechanism.

[0033] The positioning plate mechanism provided by the embodiment of the present invention is provided with a positioning plate group 1 between the driving end of the rotary drive mechanism and the swing arm mechanism, so that the positioning plate group 1 can rotate around the first axis under the action of the rotary drive mechanism. At the same time, the positioning plate group 1 has multiple first mounting surfaces 14, and the multiple first mounting surfaces 14 are evenly distributed around the first axis. Multiple sliding blocks 2 can be arranged one-to-one with the first mounting surfaces 14, and the sliding blocks 2 can be slidably arranged on the first mounting surfaces 14, and the swing arm mechanism can be installed and connected to the sliding blocks 2. The multiple swing arm mechanisms are all slidably connected to the first mounting surface 14 on the positioning plate group 1 through the sliding blocks 2, so that the multiple swing arm assemblies can rotate around the first axis together with the positioning plate group 1. At the same time, the positioning plate group 1 is also provided with multiple driving units 3 evenly arranged around the first axis, and the driving units 3 are arranged one-to-one with the sliding blocks 2. At this time, the corresponding sliding blocks 2 can also be driven to move along the first axis direction by the multiple driving units 3, so that the swing arm mechanism can slide along the first axis while rotating around the first axis. Compared with the prior art, multiple swing arm mechanisms can be installed through the positioning plate group 1, making the connection structure between the multiple swing arm mechanisms and the driving end of the rotary drive mechanism simpler, and making the positioning plate mechanism more integrated. At the same time, multiple swing arm mechanisms are installed on the same component positioning plate group 1, which can avoid the installation error caused by installing multiple swing arm assemblies on different components, making the relative positions between the multiple swing arm mechanisms more accurate, thereby also improving the accuracy of the solid crystal.

[0034] In addition, the multiple first mounting surfaces 14 on the positioning plate group 1 are evenly distributed around the first axis, and the multiple sliding blocks 2 are also slidably set on the corresponding first mounting surfaces 14, so that the multiple sliding blocks 2 are also evenly distributed around the first axis, and the swing arm mechanisms are respectively installed on the sliding blocks 2, so that the multiple swing arm mechanisms are also evenly distributed around the first axis. At the same time, the multiple driving units 3 are also evenly set on the positioning plate group 1 around the first axis, so that the overall center of gravity of the positioning plate mechanism and the swing arm mechanism can be located at the first axis, avoiding the problem of shaking when the positioning plate group 1 rotates around the first axis, and making the rotation of the swing arm mechanism more stable.

[0035] In one embodiment, see Figure 2 and Figure 3, the interior of the positioning disk group 1 is a hollow structure, multiple drive units 3 are all located inside the positioning disk group 1, and at least a portion of the sliding block 2 extends into the interior of the positioning disk group 1 and is connected to the drive end of the drive unit 3. Specifically, the interior of the positioning disk group 1 is a hollow structure, which means that a holding space is also provided inside the positioning disk group 1, so that the interior of the positioning disk group 1 can hold objects. The drive unit 3 can be connected to the inner wall of the positioning disk group 1 by means of snap connection or fastener connection. In this embodiment, by setting the interior of the positioning disk group 1 as a hollow structure, and at the same time, multiple drive units 3 are all located inside the positioning disk group 1, and at least a portion of the sliding block 2 extends into the interior of the positioning disk group 1 and is connected to the drive end of the drive unit 3, the drive unit 3 can be as close to the first axis as possible during installation, so that the overall weight of the positioning disk group 1 and the drive unit 3 can be concentrated in the direction close to the first axis, reducing the rotational inertia of the positioning disk group 1, and then making the stop position of the swing arm mechanism more accurate, thereby improving the accuracy of the crystal bonding equipment during crystal bonding.

[0036] In an alternative embodiment, see Figure 3 The sliding block 2 includes a main body 21 and a connecting portion 22. The main body 21 is slidably connected to the first mounting surface 14, and the connecting portion 22 is connected between the main body 21 and the driving end of the driving unit 3. Specifically, the main body 21 and the connecting portion 22 both refer to components with a certain volume. The main body 21 and the connecting portion 22 can be block-shaped, plate-shaped, or a combination of multiple shapes. The main body 21 and the connecting portion 22 can be an integral structure, for example, made by machining or casting. The main body 21 and the connecting portion 22 can also be a split structure, for example, the main body 21 and the connecting portion 22 can be connected by plugging, welding, or fastener connection. In this embodiment, an avoidance opening for avoiding the connecting portion 22 can be provided on the positioning plate assembly 1. When the main body 21 needs to be connected to the driving end of the driving unit 3, it can be connected to the driving structure through the connecting portion 22 through the avoidance opening.

[0037] In one embodiment, see Figure 2 and Figure 3, the side of the positioning disc group 1 away from the driving end of the rotary drive mechanism is also provided with an installation opening 13, the installation opening 13 is used to connect the internal space of the positioning disc group 1 with the outside, and the installation opening 13 is also provided with a sealing chassis 7 for disassembly. Specifically, the installation opening 13 refers to an opening structure with a certain area, and the shape of the opening structure can be circular, regular polygonal or other shapes. The sealing chassis 7 refers to a plate-like component with a certain area, and the shape of the sealing chassis 7 can match the shape of the installation opening 13. The sealing chassis 7 can be detachably connected with the positioning disc group 1 by means of snap-on, plug-in or fastener connection. In this embodiment, by providing the installation opening 13 on the positioning disc group 1, it is more convenient to install the drive unit 3 inside the positioning disc group 1, and at the same time, the installation opening 13 is also provided with a sealing chassis 7 for disassembly. After the components inside the positioning disc group 1 are installed, the installation opening 13 can be sealed by the sealing chassis 7 to prevent other components from entering the interior of the positioning disc group 1 through the installation opening 13, making the use of the positioning disc group 1 safer.

[0038] In an alternative embodiment, see Figure 2 A support connection block is provided between the sealing chassis 7 and the positioning disc group 1. Specifically, the support connection block refers to a component with a certain volume, and the support connection block can be a block-shaped, column-shaped or plate-shaped structure. By providing the support connection block between the sealing chassis 7 and the positioning disc group 1, a clearance gap can be formed between the sealing chassis 7 and the positioning disc group 1 after installation, so that at least part of the sliding block 2 can extend through the clearance gap into the positioning disc group 1 and be connected to the driving end of the driving unit 3, thereby avoiding the damage to the strength of the positioning disc group 1 itself caused by the avoidance structure provided on the positioning disc group 1. On the premise of ensuring that the sliding block 2 is more conveniently connected to the driving unit 3, the strength of the positioning disc group 1 is guaranteed, and the installation of the swing arm structure can be more stable and reliable.

[0039] In one embodiment, see Figure 1 and Figure 2, a slide rail unit 8 is arranged between the sliding block 2 and the first mounting surface 14, and a plurality of oil groove structures 71 are arranged on the side of the sealing chassis 7 facing the positioning plate group 1. The oil groove structure 71 is used to accommodate foreign objects dropped from the slide rail unit 8, and the plurality of oil groove structures 71 are respectively located in the lower area of ​​the slide rail unit 8 along the first axis direction. Specifically, the slide rail unit 8 refers to a component or assembly used to connect two components and enable the two components to slide relative to each other. For example, the slide rail unit 8 can adopt a cross guide rail, which is a high-precision linear motion guide device composed of two guide rails with V-shaped raceways, roller cages, cylindrical rollers, etc. The oil groove structure 71 refers to a accommodating structure with a certain space, wherein the oil groove structure 71 can be a groove structure, a guide groove, etc. In this embodiment, by arranging the cross guide rail between the sliding block 2 and the first mounting surface 14, the sliding of the sliding block 2 can be made more convenient, and the sliding of the sliding block 2 can also be made more stable and precise. At the same time, a plurality of oil groove structures 71 for accommodating foreign objects dropped from the slide rail unit 8, such as lubricating oil dropped from the slide rail unit 8, are arranged on the side of the sealing chassis 7 facing the positioning plate group 1. The plurality of oil groove structures 71 are all located in the lower area of ​​the slide rail unit 8 along the first axis direction, that is, directly below the slide rail unit 8. This can prevent oil stains or foreign objects from falling onto the chip during operation, making the die bonding of the die bonding machine safer and more reliable.

[0040] In an alternative embodiment, see Figure 4 , a plurality of mounting grooves 16 are arranged on the outer periphery of the positioning plate group 1, the plurality of mounting grooves 16 are evenly distributed around the first axis, and the depth directions of the plurality of mounting grooves 16 are arranged in a direction perpendicular to the first axis, and the first mounting surface 14 is located on the bottom surface of the mounting groove 16. Specifically, the mounting groove 16 refers to a groove structure with a certain depth. By arranging a plurality of mounting grooves 16 on the outer periphery of the positioning plate group 1, and the first mounting surface 14 is located on the bottom surface of the mounting groove 16, the position where the sliding block 2 and the slide rail unit 8 are installed after being installed can be as close to the first axis as possible, so that the overall weight of the entire positioning plate mechanism can be concentrated in the direction close to the first axis, so that the inertia of the positioning plate group 1 during rotation can be reduced, and then the swing arm mechanism can stop at a more accurate position after moving into position, thereby improving the accuracy of the solid crystal.

[0041] In one embodiment, see Figure 3The positioning disk mechanism also includes a controller 4, which is used to control the working state of the electrical components on the positioning disk group 1. The controller 4 is fixed to the inner wall of the positioning disk group 1, and the center of gravity of the controller 4 is located on the first axis. Specifically, the controller 4 refers to a device for controlling the operation of other devices or electrical components, wherein in this embodiment, it refers to the controller 4 in a physical sense, and the controller 4 itself has a certain volume and weight. The controller 4 can be a PLC (Programmable Logic Controller), an MCU (Micro-Controller Unit) or a DCS (Distributed Control System). The controller 4 can be fixed inside the positioning disk group 1 by means of snap-on, bonding or fastener connection. By locating the center of gravity of the controller 4 on the first axis, the overall weight of the positioning disk group 1 and the controller 4 can be close to the first axis after the controller 4 is installed, so that the rotation of the positioning disk group 1 can be more stable, and the rotational inertia of the positioning disk group 1 can also be reduced, thereby improving the accuracy of the solid crystal.

[0042] In one embodiment, see Figure 1 and Figure 4 , the outer circumference of the positioning plate group 1 is provided with a second mounting surface 15, the second mounting surface 15 is located between the two first mounting surfaces 14, the number of the second mounting surfaces 15 is multiple, and the multiple second mounting surfaces 15 are also evenly distributed around the first axis. Specifically, the second mounting surface 15 refers to a surface structure with a certain area, and the second mounting surface 15 can be a plane structure, or a curved surface structure. In this embodiment, by providing multiple second mounting surfaces 15 on the outer circumference of the positioning plate group 1, other components, such as the air path control group 5, can be installed on the second mounting surface 15 while the swing arm mechanism is installed on the first mounting surface 14, so that the integration of the entire positioning plate mechanism is higher. And the multiple second mounting surfaces 15 are also evenly distributed around the first axis, and the second mounting surface 15 is located between the two first mounting surfaces 14, and the two are arranged alternately in sequence. The components installed on the second mounting surface 15 can also be evenly distributed around the first axis, thereby improving the stability of the positioning plate group 1 when rotating.

[0043] In an alternative embodiment, see Figure 4, heat dissipation holes 17 for airflow can also be provided on the second mounting surface 15, and heat dissipation holes 17 for airflow can be provided on the sealing chassis 7. The heat dissipation holes 17 refer to a through-hole structure provided through an object, and the number of heat dissipation holes 17 is usually multiple, and the multiple heat dissipation holes 17 are evenly distributed in a designated area. By providing heat dissipation holes 17 on the second mounting surface 15 and the sealing chassis 7, the interior of the positioning plate group 1 can exchange airflow with the outside, avoiding overheating of the components installed inside the positioning plate group 1 due to heat accumulation, making the components located inside the positioning plate group 1 safer to use, and thus making the use of the entire positioning plate mechanism safer and more reliable.

[0044] In one embodiment, see Figure 1 and Figure 2 , an air circuit control group 5 is arranged on the second mounting surface 15, and the air circuit control group 5 is used to control the connection and disconnection of the air circuit at the suction nozzle structure. Specifically, the air circuit control group 5 refers to a component or assembly used to control the connection and disconnection of the air circuit, and the air circuit control group 5 may include components such as a solenoid valve. In this embodiment, by arranging the air circuit control group 5 on the second mounting surface 15, and connecting the control end of the air circuit control group 5 to the controller 4, the suction nozzle structure on each swing arm mechanism can be controlled more conveniently, and the weight distribution of the positioning plate group 1 in the direction around the first axis after the air circuit control group 5 is installed can be kept balanced, so that the rotation of the positioning plate group 1 is more stable.

[0045] In one embodiment, see Figure 4 The positioning disk assembly 1 includes a main disk body 11 and a main cylinder body portion 12. The main disk body 11 is covered at the end of the main cylinder body portion. The first mounting surface 14 is located at the outer periphery of the main cylinder body portion 12 and is evenly distributed around the axis of the main cylinder body portion 12. Specifically, the main disk body 11 refers to a plate-like structure with a certain area. One side of the main disk body 11 is used to connect with the driving end of the rotary drive mechanism, and the other side of the main disk body 11 abuts against an opening of the main cylinder body portion 12. The main cylinder body portion 12 refers to a cylindrical component with a certain height, which is formed by surrounding the plate-like component. The main disk body 11 and the main cylinder body portion 12 can be integrally formed, for example, they can be made by die casting, machining or casting, so that the overall strength of the positioning disk assembly 1 is better. The main disk body 11 and the main cylinder body portion 12 can also be a split structure. The main disk body 11 and the main cylinder body portion 12 can be connected to each other by welding, fastener connection or clamping, which can reduce the manufacturing cost. In this embodiment, the main disk body 11 is covered on the end of the main cylinder body to form a positioning disk assembly 1, and the first mounting surface 14 is located on the outer periphery of the main cylinder body 12 and evenly distributed around the axis of the main cylinder body 12, so that the structure of the entire positioning disk assembly 1 can be simpler.

[0046] In an alternative embodiment, see Figure 1 and Figure 2 A connecting handle 6 is also provided on the side of the main disk body 11 away from the main cylinder body 12. The first end of the connecting handle 6 is used to connect to the driving end of the rotation drive mechanism, and the second end of the connecting handle 6 is connected to the side of the main disk body 11. The second end of the connecting handle 6 can be connected to the main disk body 11 by means of snap-on, plug-in or fasteners. Specifically, the connecting handle 6 refers to a component with a certain length, and the connecting handle 6 can be columnar or block-shaped. By providing the connecting handle 6 on the side of the main disk body 11 away from the main cylinder body 12, the connection between the positioning disk group 1 and the rotation drive mechanism can be more convenient and more secure.

[0047] In one embodiment, see Figure 4 , the cross section of the main cylinder body 12 is a regular polygon, and the shape of the main disk body 11 matches the cross section of the main cylinder body 12. Specifically, the regular polygon can be a hexagon. By making the cross section of the main cylinder body 12 a regular polygon and matching the shape of the main disk body 11 with the cross section of the main cylinder body 12, the first mounting surface 14 and the second mounting surface 15 can be both arranged outside the main cylinder body 12, so that the first mounting surface 14 and the second mounting surface 15 can both be planar structures, thereby making the installation of the swing arm structure or other components more convenient. The cross section of the main cylinder body 12 is a regular polygon, which also makes the overall strength of the main cylinder body 12 better.

[0048] In a second aspect, a die bonding device is provided, comprising any one of the positioning plate mechanisms described above. It is understood that the beneficial effects of the second aspect can be found in the relevant description of the first aspect.

[0049] The above are only preferred embodiments of the present invention, and only specifically describe the technical principles of the present invention. These descriptions are only for explaining the principles of the present invention and cannot be interpreted as limiting the scope of protection of the present invention in any way. Based on the explanations here, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention, and other specific implementations of the present invention that can be associated with by technicians in this field without creative labor, should be included in the scope of protection of the present invention.

Claims

1. A positioning plate mechanism, characterized in that: include: A positioning plate assembly, used to be connected to the driving end of the rotary drive mechanism, and the positioning plate assembly has a degree of freedom to rotate around a first axis, the first axis is the axis of the positioning plate assembly, and the positioning plate assembly has a plurality of first mounting surfaces, and the plurality of first mounting surfaces are evenly distributed around the first axis; A plurality of sliding blocks, used for installing the swing arm mechanism, wherein the sliding blocks are arranged in a one-to-one correspondence with the first mounting surface, and the plurality of sliding blocks are respectively slidably arranged on the first mounting surface; as well as There are multiple driving units, which correspond to the sliding blocks one by one and are evenly arranged on the positioning plate group around the first axis to drive the sliding block to move along the first axis.

2. The positioning plate mechanism according to claim 1, characterized in that: The interior of the positioning plate group is a hollow structure, the plurality of driving units are all located inside the positioning plate group, and at least a portion of the sliding block extends into the interior of the positioning plate group and is connected to the driving end of the driving unit.

3. The positioning plate mechanism according to claim 2, characterized in that: A mounting opening is also provided on the side of the positioning disc assembly away from the driving end of the rotary drive mechanism. The mounting opening is used to connect the internal space of the positioning disc assembly with the outside, and a sealing bottom plate is also provided at the mounting opening for disassembly of the cover.

4. The positioning plate mechanism according to claim 3, characterized in that: A slide rail unit is arranged between the sliding block and the first mounting surface. A plurality of oil groove structures are arranged on the side of the sealing chassis facing the positioning plate group. The oil groove structures are used to accommodate foreign objects dropped from the slide rail unit. The plurality of oil groove structures are respectively located in the lower area of ​​the slide rail unit along the direction of the first axis.

5. The positioning plate mechanism according to claim 2, characterized in that: The positioning plate mechanism further comprises a controller, which is used to control the working state of the electrical components on the positioning plate group. The controller is fixed inside the positioning plate group, and the center of gravity of the controller is located on the first axis.

6. The positioning plate mechanism according to claim 2, characterized in that: The outer circumference of the positioning plate group is provided with a second mounting surface, the second mounting surface is located between the two first mounting surfaces, there are multiple second mounting surfaces, and the multiple second mounting surfaces are also evenly distributed around the first axis.

7. The positioning plate mechanism according to claim 6, characterized in that: An air path control group is arranged on the second mounting surface, and the air path control group is used to control the connection and disconnection of the air path at the suction nozzle structure.

8. The positioning plate mechanism according to any one of claims 2 to 7, characterized in that: The positioning plate assembly includes a main plate body and a main cylinder body portion, the main plate body cover is arranged at the end of the main cylinder body portion, the first mounting surface is located at the outer periphery of the main cylinder body portion and is evenly distributed around the axis of the main cylinder body portion.

9. The positioning plate mechanism according to claim 8, characterized in that: The cross section of the main cylinder portion is a regular polygon, and the shape of the main disk body matches the cross section shape of the main cylinder portion.

10. A die bonding device, characterized in that: It comprises a positioning plate mechanism as claimed in any one of claims 1 to 9.

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