Product processing method and system, computer equipment and storage medium
By obtaining batch information of the products to be processed and determining their pollution types, the pollution control problem caused by different cleanliness requirements between different working steps has been solved in the semiconductor manufacturing industry, and a method of effectively avoiding cross-contamination and ensuring the yield of finished products is achieved.
Patent Information
- Application Number
- CN202411545577.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-31
- Publication Date
- 2025-03-18
AI Technical Summary
In the semiconductor manufacturing industry, during the production line flow process of product batches, the cleanliness requirements for processing equipment and vehicles at different working steps are different, resulting in the pollution types being less likely to be effectively controlled, increasing the risk of cross-contamination.
By obtaining batch information of the products to be processed, determining the first type of pollution, and when the second type of pollution in the current step does not cover the first type of pollution, a cut-off instruction is generated to prevent the products to be processed in the current step, thereby avoiding cross-contamination.
It effectively avoids cross-contamination between the second pollutant type and the first pollutant type, ensures the yield of the finished product, and reduces the complexity and cost of pollution control.
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Figure CN119644928A_ABST
Abstract
Description
Technical Field
[0001] The present disclosure belongs to the technical field of data processing and semiconductor manufacturing, and specifically relates to a product processing method, system, computer equipment and storage medium. Background Art
[0002] In the semiconductor manufacturing industry, during the flow of product batches on the production line, the cleanliness requirements of processing equipment and carriers in different steps are different. After the product to be processed is processed in a certain step, it carries the type of pollution of that step, such as the residue of chemical reactants in the process, mechanical wear of the process chamber, chemical reaction on the surface of the process chamber, etc. After the product to be processed is contaminated by the previous step, whether the type of pollution it carries can continue to meet the processing requirements of the next step is more of a human judgment. Summary of the invention
[0003] The present disclosure aims to solve at least one of the technical problems existing in the prior art and provides a product processing method, system, computer device and storage medium.
[0004] In the first aspect, the technical solution adopted to solve the technical problem of the present disclosure is a product processing method, comprising:
[0005] Get the products to be processed in the current process step;
[0006] Determining a first contamination type of the product to be processed according to the batch information of the product to be processed;
[0007] When the second pollution type of the current process step does not cover the first pollution type, a cutoff instruction is generated to control the product to be processed from entering the current process step for processing; the second pollution type includes the equipment pollution type corresponding to the target equipment; the target equipment is the processing equipment used to process the product to be processed in the current process step.
[0008] In some embodiments, the batch information includes a batch contamination type, and the batch contamination type is a contamination type of the product to be processed in a previous process step;
[0009] Determining the first pollution type according to the batch information of the product to be processed includes:
[0010] When the batch pollution type is not empty, the batch pollution type is used as the first pollution type.
[0011] In some embodiments, the step of determining the type of contamination in the batch includes:
[0012] Determine whether the product to be processed has a first product contamination type; the first product contamination type refers to a specific contamination type configured by a user for the product to be processed in the previous step;
[0013] In the case where the product to be processed has the first product contamination type, taking the first product contamination type as the batch contamination type;
[0014] In the case that the product to be processed does not have the product contamination type, the step contamination type pre-configured in the previous step is used as the batch contamination type.
[0015] In some embodiments, each process step has a unique corresponding process step pollution type.
[0016] In some embodiments, the batch information also includes carrier information;
[0017] Determining the first pollution type according to the batch information of the product to be processed includes:
[0018] When the batch pollution type is empty, determining the vehicle pollution type according to the vehicle information;
[0019] The vehicle pollution type is taken as the first pollution type.
[0020] In some embodiments, the batch information includes the batch contamination type and carrier information, and the batch contamination type is the contamination type of the product to be processed in the previous process step;
[0021] Determining the first pollution type according to the batch information of the product to be processed includes:
[0022] Determining the type of vehicle pollution according to the vehicle information;
[0023] The batch pollution type and the carrier pollution type are regarded as the first pollution type.
[0024] In some embodiments, the step of determining the second pollution type includes:
[0025] Acquire a target device for processing the product to be processed in the current process step;
[0026] In the case that the target device has a pre-configured device pollution type, the device pollution type of the target device is used as the second pollution type.
[0027] In some embodiments, the product processing method further comprises:
[0028] In the case that the target device does not have a pre-configured device pollution type, obtaining a device group to which the target device belongs, and determining a device group pollution type corresponding to the device group;
[0029] The pollution type of the equipment group is used as the second pollution type.
[0030] In some embodiments, the target device includes a plurality of sub-devices;
[0031] The step of setting the device pollution type of the target device as the second pollution type includes:
[0032] In the case where the sub-device has a pre-configured sub-device pollution type, taking the sub-device pollution type as the second pollution type;
[0033] In the case that the sub-device does not have a pre-configured sub-device pollution type, the device pollution type of the target device is used as the second pollution type.
[0034] In some embodiments, the equipment group pollution type corresponding to the equipment group is reused as the equipment pollution type of the processing equipment in the equipment group that is not configured with the equipment pollution type; the processing equipment includes multiple sub-equipment, and the equipment pollution type corresponding to the processing equipment is reused as the sub-equipment pollution type of the sub-equipment in the processing equipment that is not configured with the sub-equipment pollution type.
[0035] In some embodiments, after generating the pass instruction, the method further includes:
[0036] When it is detected that the product to be processed is completed in the current process step and leaves the station, the process step contamination type pre-configured for the current process step is used as the batch contamination type for the next process step.
[0037] In some embodiments, after generating the pass instruction, the method further includes:
[0038] Determine whether the product to be processed has a second product contamination type; the second product contamination type refers to a specific contamination type configured by a user for the product to be processed in the current process step;
[0039] In the case where the product to be processed has the second product contamination type, taking the second product contamination type as the batch contamination type of the next process step;
[0040] In a case where the product to be processed does not have the second product contamination type, the process step contamination type pre-configured for the current process step is used as the batch contamination type for the next process step.
[0041] In some embodiments, the product processing method further comprises:
[0042] In the case where the second pollution type of the current process step includes the first pollution type, generating a first passing instruction to control the product to be processed to enter the current process step for processing;
[0043] When the second pollution type of the current process step does not cover the first pollution type, in response to an adjustment operation for the second pollution type, the second pollution type is adjusted to cover the range of the first pollution type, and a second pass instruction is generated to control the product to be processed to enter the current process step for processing.
[0044] In a second aspect, the present disclosure also provides a product processing system, which includes:
[0045] An information receiving module is configured to obtain a product to be processed in a current process step;
[0046] A first contamination determination module is configured to determine a first contamination type of the product to be processed according to the batch information of the product to be processed;
[0047] The instruction generation module is configured to generate a pass instruction to control the product to be processed to enter the current step when the second pollution type of the current step covers the first pollution type; the second pollution type includes the equipment pollution type corresponding to the target equipment used to process the product to be processed in the current step.
[0048] In a third aspect, an embodiment of the present disclosure further provides a computer device, comprising: a processor, a memory and a bus, wherein the memory stores machine-readable instructions executable by the processor, and when the computer device is running, the processor communicates with the memory via the bus, and when the machine-readable instructions are executed by the processor, the steps of the product processing method described in any one of the first aspects are performed.
[0049] In a fourth aspect, an embodiment of the present disclosure further provides a computer non-volatile readable storage medium, wherein a computer program is stored on the computer non-volatile readable storage medium, and when the computer program is executed by a processor, the steps of the product processing method described in any one of the first aspects are executed. BRIEF DESCRIPTION OF THE DRAWINGS
[0050] Figure 1 A schematic diagram of a product processing method provided by an embodiment of the present disclosure;
[0051] Figure 2 A specific flow chart for determining a first pollution type provided by an embodiment of the present disclosure;
[0052] Figure 3A flow chart for determining the type of batch contamination provided by an embodiment of the present disclosure;
[0053] Figure 4 A hierarchical relationship diagram of product pollution types provided by an embodiment of the present disclosure;
[0054] Figure 5 Another specific flow chart for determining the first pollution type provided by the embodiment of the present disclosure;
[0055] Figure 6 A specific flow chart for determining the second pollution type provided in an embodiment of the present disclosure;
[0056] Figure 7 A hierarchical relationship diagram of equipment pollution types provided by an embodiment of the present disclosure;
[0057] Figure 8 A schematic diagram of the correspondence between the working steps and the types of pollution in the working steps provided in the embodiment of the present disclosure;
[0058] Fig. 9 A schematic diagram of a specific process of a product processing method provided by an embodiment of the present disclosure;
[0059] Fig.10 A schematic diagram of an interface for defining equipment pollution types provided in an embodiment of the present disclosure;
[0060] Fig.11 A schematic diagram of an interface for defining pollution types of a work step provided in an embodiment of the present disclosure;
[0061] Fig.12 A schematic diagram of an interface for defining product pollution types provided in an embodiment of the present disclosure;
[0062] Fig.13 A schematic diagram of a product processing system provided by an embodiment of the present disclosure;
[0063] Fig.14 A schematic diagram of a product processing system provided by an embodiment of the present disclosure;
[0064] Fig.15 A schematic diagram of the structure of a computer device provided in an embodiment of the present disclosure. DETAILED DESCRIPTION
[0065] In order to make the purpose, technical scheme and advantages of the embodiments of the present disclosure clearer, the technical scheme in the embodiments of the present disclosure will be clearly and completely described below in conjunction with the drawings in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, rather than all of the embodiments. The components of the embodiments of the present disclosure generally described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present disclosure provided in the drawings is not intended to limit the scope of the present disclosure for protection, but merely represents the selected embodiments of the present disclosure. Based on the embodiments of the present disclosure, all other embodiments obtained by those skilled in the art without making creative work belong to the scope of protection of the present disclosure.
[0066] Unless otherwise defined, the technical terms or scientific terms used in the present disclosure should be understood by people with ordinary skills in the field to which the present disclosure belongs. The "first", "second" and similar words used in the present disclosure do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, similar words such as "one", "one" or "the" do not indicate quantity restrictions, but indicate that there is at least one. Similar words such as "include" or "comprise" mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects. Similar words such as "connect" or "connected" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.
[0067] The "multiple or several" mentioned in this disclosure refers to two or more. "And / or" describes the association relationship of the associated objects, indicating that three relationships may exist. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. The character " / " generally indicates that the associated objects before and after are in an "or" relationship.
[0068] In the related art, in the semiconductor manufacturing industry, during the flow of product batches on the production line, the cleanliness requirements required for processing equipment, carriers, etc. in different steps are different. After the product to be processed is processed in a certain step, it carries the type of pollution of the step, such as the residue of chemical reactants in the process, mechanical wear of the process chamber, chemical reaction on the surface of the process chamber, etc. After the product to be processed is contaminated by the previous step, whether the type of pollution it carries can continue to meet the processing requirements of the next step is more of a human judgment, which leads to the following three problems: First, the pollution rules are not well defined. In the existing semiconductor manufacturing system, there is no so-called pollution rule, and it is impossible to distinguish the types of pollution in different production areas, steps, processing equipment, and carriers of product batches. Secondly, the pollution objects are not universal. In the existing semiconductor manufacturing system, there are many processing equipment of the same type used for different products to be processed. Based on the products to be processed and the processing equipment, the workload of defining pollution maintenance is large. Finally, the types of pollution are not effectively controlled. When a batch of products is circulating on the production line, the production line operator usually uses past experience to judge whether cross contamination will occur and whether the carrier needs to be replaced before entering the corresponding machine. This means that whenever a batch of products has different cleanliness requirements when circulating on the production line, the existing semiconductor manufacturing system cannot limit it and only relies on the subjective judgment of the production line operator's experience, which undoubtedly increases the risk of cross contamination.
[0069] In view of this, an embodiment of the present disclosure provides a product processing method, which determines the type of pollution of the product to be processed before entering the current process step, that is, the first pollution type, through the batch information of the product to be processed. However, in the case that the second pollution type of the current process step does not cover the first pollution type, the product to be processed is not allowed to enter the current process step for processing, which can avoid cross-contamination between pollutants of the second pollution type and pollutants of the first pollution type, thereby ensuring the yield of the finished product. Conversely, in the case that the second pollution type of the current process step does not cover the first pollution type, if the current process step processes the product to be processed, the first pollution type will be added on the basis of the second pollution type, which is prone to cross-contamination, affecting the processing quality of the product to be processed, and then affecting the yield of the finished product.
[0070] The product processing method provided in the embodiment of the present disclosure is executed by a computer device with certain capabilities, such as a terminal or a server. The product processing method provided in the embodiment of the present disclosure is mainly used in semiconductor manufacturing scenarios. In the manufacturing process of the product to be processed (such as a semiconductor product), a production line often includes multiple steps, such as step 1, step 2 and step 3. Each step is performed sequentially on the production line, and finally the processed product is output. Each step has independent processing equipment, which may be one or more. The user pre-configures a unique corresponding step pollution type for each step.
[0071] Figure 1 A schematic diagram of a product processing method provided by an embodiment of the present disclosure, such as Figure 1 As shown, it includes S11 to S13.
[0072] S11. Obtain the product to be processed in the current process step.
[0073] In this step, the current process step may be the first process step on the production line or an intermediate process step.
[0074] Exemplarily, the product to be processed is a semiconductor product, such as a middle section product of a display panel.
[0075] S12. Determine a first pollution type of the product to be processed according to batch information of the product to be processed.
[0076] The first pollution type refers to the pollution type carried by the product to be processed before entering the current process step, such as the pollution type corresponding to other equipment. The other equipment may be processing equipment and / or transportation equipment (such as a carrier) in the previous process step.
[0077] In this step, the batch information includes the basic information of the products to be processed on the entire production line, such as the batch number, the number of products to be processed, the batch status, the product name of the products to be processed, the production line name, and the priority; the carrier information of the products to be processed, such as the carrier number; the batch contamination type of the products to be processed; and the name of the previous step. Among them, the basic information remains unchanged; the carrier information of the products to be processed, the batch contamination type and the name of the previous step are updated as the steps flow. When the current step is the first step of the production line, the batch contamination type is empty, and the name of the previous step is also empty. When the current step is an intermediate step, the batch contamination type refers to the batch contamination type of the previous step.
[0078] Specifically, the batch pollution type is extracted from the batch information, and when the batch pollution type is not empty, the batch pollution type is used as the first pollution type.
[0079] S13. When the second pollution type of the current process step does not cover the first pollution type, a cutoff instruction is generated to prevent the product to be processed from entering the current process step for processing.
[0080] The second pollution type includes the equipment pollution type corresponding to the target equipment; the target equipment is a processing equipment used to process the product to be processed in the current process step, which may include one or more. In the case where the target equipment includes multiple processing equipment, the second pollution type includes the equipment pollution types of all processing equipment.
[0081] It should be noted that the second pollution type of the current step is the pollution type that will inevitably be carried during the processing of the current step, and it is unavoidable. Once the product to be processed enters the current step for processing, the second pollution type will inevitably be introduced to the product to be processed. On the basis that the product to be processed already has the first pollution type, in order to avoid cross-contamination with pollutants of the first pollution type, this step adds a judgment mechanism to determine whether the second pollution type of the current step covers the first pollution type. Here, the premise for judging whether the second pollution type covers the first pollution type is that the first pollution type is not empty. If the first pollution type is empty, it means that the product to be processed does not carry pollution and can directly enter subsequent processing. Under normal circumstances, the first pollution type is not empty.
[0082] Taking the current process step as an etching process step, the target equipment is an etcher, and the equipment pollution types corresponding to the etcher include titanium (Ti) pollution and titanium tungsten (TiWu) pollution. The first pollution type is any one of titanium (Ti) pollution and titanium tungsten (TiWu) pollution, which satisfies the situation that the second pollution type covers the first pollution type; conversely, the first pollution type does not belong to any one of titanium (Ti) pollution and titanium tungsten (TiWu) pollution, which means that the second pollution type does not cover the first pollution type.
[0083] The so-called "cross contamination" means that the second type of pollution in the current process step does not cover the first type of pollution. The chemical reaction between pollutant A of the first type of pollution and pollutant B of the second type of pollution generates pollutant C=A+B, thereby damaging the product to be processed and affecting the yield of the finished product.
[0084] It should be noted that since the second pollution type is a pollution type under one process step (current process step), even if the second pollution type includes multiple types, the pollutants corresponding to the multiple different pollution types will not undergo chemical reactions. Only pollutants newly introduced from the outside may undergo chemical reactions. Therefore, the second pollution type of the current process step does not cover the first pollution type, which means that once the product to be processed enters the current process step for processing, the first pollution type different from the second pollution type will be introduced to the product to be processed, and the pollutants of the first pollution type may react chemically with the pollutants of the second pollution type, resulting in cross contamination. Therefore, in the embodiment of the present disclosure, when the second pollution type of the current process step does not cover the first pollution type, a cutoff instruction is generated to control the product to be processed from entering the current process step for processing, thereby avoiding cross contamination and ensuring the yield of the finished product.
[0085] In some embodiments, continuing as Figure 1 As shown, when the second pollution type of the current step covers the first pollution type, a pass instruction is generated to control the product to be processed to enter the current step for processing.
[0086] In some embodiments, the batch information includes the batch contamination type, where the batch contamination type is the contamination type of the product to be processed in the previous step.
[0087] It should be noted that, from the batch information listed in S12 above, it can be seen that when the product to be processed is not processed for the first time, the batch contamination type and the name of the previous process step are not empty.
[0088] Figure 2 A specific flow chart for determining the first pollution type provided by the embodiment of the present disclosure is as follows: Figure 2 As shown, the first pollution type is determined for S12, which specifically includes S12-1-1 to S12-1-2.
[0089] S12-1-1. Determine whether the batch contamination type is empty.
[0090] S12-1-2. When the batch pollution type is not empty, the batch pollution type is used as the first pollution type.
[0091] Specifically, the batch pollution type is extracted from the batch information, and when the batch pollution type is not empty, the batch pollution type is used as the first pollution type. When the batch pollution type is empty, refer to S12-1-3; or, when the batch pollution type is empty, determine that the first pollution type is empty, that is, no pollution.
[0092] Here, the batch information is the content updated after the previous step processing is completed.
[0093] In some embodiments, Figure 3 A flow chart for determining the type of batch contamination provided by an embodiment of the present disclosure, such as Figure 3 As shown, it includes S21 to S23.
[0094] S21. Determine whether the product to be processed has the first product pollution type; if so, execute S22; if not, execute S23.
[0095] The first product pollution type refers to a specific pollution type configured by the user for the product to be processed in the previous process step. The specific pollution type is related to the previous process step, but is different from the process step pollution type of the previous process step.
[0096] It should be noted that the product pollution type is a pollution type defined according to the processing technology of the product and the processing properties of a single specific process step, which is different from the process pollution type of the specific process step. Not every product will be pre-configured with a product pollution type. Only specific products will have a product pollution type configured based on a specific process step.
[0097] S22. When the product to be processed has a first product contamination type, the first product contamination type is used as the batch contamination type.
[0098] The system pre-manages the product contamination types of the products to be processed at each process step. It should be noted that there may be some process steps where the user has not configured a specific contamination type for the products to be processed, and there is no product contamination type.
[0099] S23. When the product to be processed does not have a product contamination type, the process step contamination type pre-configured in the previous process step is used as the batch contamination type.
[0100] Each process step has a unique corresponding process step pollution type. For example, the exposure process step has the pollution type of photoresist (PR glue). For another example, the metal sputtering process step, if it is gold (Au) sputtering, has the pollution type of gold (Au); if it is titanium copper (TiCu) sputtering, has the pollution type of titanium copper (TiCu).
[0101] Figure 4 A hierarchical relationship diagram of product pollution types provided by the embodiment of the present disclosure, such as Figure 4 As shown, considering the actual production process, the same processing step such as step A1, due to different product attributes, the pollution types brought by the step are also different, so a product pollution type different from the step pollution type is set. Product A corresponds to step A1, and the product pollution type is configured as B1. The step pollution type pre-configured for step A1 is B2. When product A has a product pollution type, the product pollution type B1 covers the step pollution type B2 as a higher priority pollution type, and then as a batch pollution type. Exemplarily, if the previous step is step A1 and the product to be processed is product A, it is determined that the product to be processed has the first product pollution type, that is, B1. If the previous step is step A1 and the product to be processed is product B (not product A), it is determined that the product to be processed has the first product pollution type, that is, B2.
[0102] In some embodiments, the process step contamination type pre-configured in the previous process step can be directly used as the batch contamination type.
[0103] In some embodiments, the batch information also includes carrier information. Figure 2 As shown, determining the first pollution type with respect to S12 specifically also includes S12-1-3 to S12-1-4.
[0104] S12-1-3. When the batch contamination type is empty, determine the carrier contamination type based on the carrier information.
[0105] In this step, the carrier information may be part of the batch information, such as the carrier number. Each carrier is pre-configured with a unique corresponding carrier contamination type. The corresponding carrier contamination type can be queried according to the carrier number.
[0106] S12-1-4. Use the vehicle pollution type as the first pollution type
[0107] The carrier is used to transfer between work steps and to carry and transport the products to be processed. The products to be processed may also introduce carrier pollution types during transportation. In order to avoid cross-contamination between the pollutants of the carrier pollution type and the pollutants of the second pollution type, if the batch pollution type is empty, you can select the carrier pollution type as the first pollution type.
[0108] In some embodiments, the batch information includes batch contamination type and carrier information, and the batch contamination type is the contamination type of the product to be processed in the previous step.
[0109] Figure 5 Another specific flow chart for determining the first pollution type provided by the embodiment of the present disclosure is as follows: Figure 5 As shown, S12 specifically includes S12-2-1 to S12-2-2.
[0110] S12-2-1. Determine the type of vehicle pollution based on the vehicle information.
[0111] The processing process in this step refers to the implementation of S12-1-3, and the repeated parts will not be repeated.
[0112] S12-2-2. The batch pollution type and the carrier pollution type are regarded as the first pollution type.
[0113] The carrier is a tool used to transfer between work steps and to carry and transport the products to be processed. The products to be processed may also introduce carrier pollution types during transportation. In order to avoid cross-contamination between pollutants of the carrier pollution type and pollutants of the second pollution type, the batch pollution type and the carrier pollution type are collectively regarded as the first pollution type.
[0114] In some embodiments, Figure 6 A specific flow chart for determining the second pollution type provided by the embodiment of the present disclosure is as follows: Figure 6 As shown, a method for determining the second pollution type includes S31-S32.
[0115] S31, obtaining the target equipment for processing the product to be processed in the current process step.
[0116] S32: When the target device has a pre-configured device pollution type, use the device pollution type of the target device as a second pollution type.
[0117] Figure 7 A hierarchical relationship diagram of equipment pollution types provided by the embodiment of the present disclosure, such as Figure 7 As shown, the equipment pollution type is a pollution type defined according to the processing attributes of the processing equipment. For example, if the processing attribute is wet etching, the equipment pollution type is the type of etching solution in the etching step. The embodiment of the present disclosure pre-configures the equipment pollution type for the processing equipment. Considering that there are a large number of equipment of the same type in the actual generation process, such as processing equipment A0, processing equipment A1, and processing equipment A2, which are all the same type of etchers, if the equipment pollution types are all consistent, the maintenance cost of the equipment pollution type of a single system maintenance processing equipment is high. The present disclosure sets a hierarchical relationship of equipment pollution. For any group of equipment group A, the equipment pollution type can be pre-configured for a single or multiple processing equipment therein, such as pre-configuring the equipment pollution type for processing equipment A0 as titanium tungsten (TiWu); when the processing equipment includes multiple sub-equipment, such as multiple processing chambers in an etcher, the sub-equipment pollution type can be pre-configured for a single or multiple processing equipment therein, such as setting the sub-equipment pollution type of A01 to titanium (Ti).
[0118] For the remaining equipment, the next level reuses the pollution type of the previous level, that is, the covering principle, to reduce maintenance workload and save maintenance costs. Specifically, the equipment group pollution type corresponding to the equipment group is reused as the equipment pollution type of the processing equipment in the equipment group that is not configured with equipment pollution type; the processing equipment includes multiple sub-equipment, and the equipment pollution type corresponding to the processing equipment is reused as the sub-equipment pollution type of the sub-equipment in the processing equipment that is not configured with sub-equipment pollution type. Figure 7 As shown, processing equipment A1 and processing equipment A2, since they are not configured with equipment pollution types, use the equipment group pollution type of equipment group A; sub-equipment A02, since it is not configured with sub-equipment pollution types, uses the equipment pollution type of processing equipment A0. Here, the pollution of the same type of equipment (equipment group) only needs to maintain the corresponding equipment group. If there is a single special processing equipment under the equipment group, the equipment pollution type of the equipment is maintained separately, which saves maintenance costs, such as saving storage resources, saving user configuration process, and improving maintenance efficiency.
[0119] Further, continue as Figure 6 As shown, another way to determine the second pollution type includes S33-S34.
[0120] S33: When the target device does not have a pre-configured device pollution type, obtain the device group to which the target device belongs, and determine the device group pollution type corresponding to the device group.
[0121] S34. Set the pollution type of the equipment group as the second pollution type.
[0122] Of course, the user can also configure the equipment pollution type for each processing equipment in advance. On this basis, the target equipment used for processing the product to be processed in the current step is obtained; and the equipment pollution type of the target equipment is determined as the second pollution type.
[0123] In some embodiments, the target device includes multiple sub-devices, including S321 and S322.
[0124] S321. In the case where the sub-device has a pre-configured sub-device pollution type, the sub-device pollution type is used as a second pollution type.
[0125] like Figure 7 As shown, taking the target device as processing device A0 as an example, it includes sub-device A01 and sub-device A02. Among them, processing device A0 is pre-configured with the device pollution type titanium tungsten (TiWu), sub-device A01 is pre-configured with the sub-device pollution type titanium (Ti), and sub-device A02 is not configured with the sub-device pollution type. Therefore, sub-device A02 can reuse the device pollution type titanium tungsten (TiWu) of processing device A0.
[0126] For this step, sub-device A01 is pre-configured with the sub-device contamination species titanium (Ti), and thus the sub-device contamination species titanium (Ti) may be used as the second contamination species.
[0127] S322: When the sub-device does not have a pre-configured sub-device pollution type, use the device pollution type of the target device as the second pollution type.
[0128] For this step, the sub-equipment A02 is not configured with a sub-equipment pollution type, and the equipment pollution type titanium tungsten (TiWu) of the processing equipment A0 can be used as the second pollution type.
[0129] In some embodiments, after the pass instruction is generated, it also includes: when it is detected that the product to be processed is completed in the current process step and leaves the station, the process step contamination type pre-configured in the current process step is used as the batch contamination type of the next process step.
[0130] Figure 8 A schematic diagram of the correspondence between the process steps and the types of pollution in the process steps provided in the embodiment of the present disclosure, such as Figure 8As shown, the work step is pre-configured with a unique work step pollution type corresponding to it, see the solid arrow. For example, work step A corresponds to work step pollution type 1; work step B corresponds to work step pollution type 2; work step C corresponds to work step pollution type 3. The work step pollution type is specifically a work step pollution attribute defined according to the processing attributes of the current work step. Among them, the dotted arrow indicates that the corresponding work step may also be adjusted. For example, if the current work step is work step A, then when it is detected that the product to be processed is completed and exits the station in the current work step, the work step pollution type 1 is used as the batch pollution type of the next work step.
[0131] In some embodiments, after the pass instruction is generated, steps S31 to S33 are further included.
[0132] S31. Determine whether the product to be processed has the second product pollution type; if so, execute S32; if not, execute S33.
[0133] The second product pollution type refers to a specific pollution type configured by the user for the product to be processed in the current process step. The specific pollution type is related to the current process step, but is different from the process step pollution type of the current process step.
[0134] For example, Figure 4 As shown, if the current step is step A1 and the product to be processed is product A, it is determined that the product to be processed has the second product contamination type B1. If the current step is step A1 and the product to be processed is product B (not product A), it is determined that the product to be processed has the second product contamination type B2.
[0135] S32. When the product to be processed has a second product contamination type, the second product contamination type is used as the batch contamination type of the next process step.
[0136] Continuing with the above example, the second product contamination type B1 is used as the batch contamination type for the next process step.
[0137] S33. When the product to be processed does not have the second product contamination type, the pre-configured process step contamination type of the current process step is used as the batch contamination type of the next process step.
[0138] Continuing with the above example, the second product contamination type B2 is used as the batch contamination type for the next process step.
[0139] In some embodiments, when the stop instruction is generated in S13, a prompt message is generated to prompt the user to stop the operation of the product to be processed at the current step, so as to facilitate the user to perform subsequent processing. In actual operation engineering, if the carrier and product batch are misoperated, such as the incorrect position of the carrier, being too close to the pollution source and causing pollution, the pollution type of the carrier and product batch can be further adjusted.
[0140] Specifically, in response to the adjustment operation for the second pollution type, the second pollution type can be adjusted to cover the range of the first pollution type, and a second passing instruction can be generated to control the product to be processed to enter the current step for processing.
[0141] In the actual operation process, some pollution sources have no effect on subsequent processing, so the user can initiate an adjustment operation to change the coverage of the second pollution type. In response to the adjustment operation, the system adjusts the second pollution type to cover the scope of the first pollution type, verifies whether the adjusted second pollution type covers the first pollution type, and generates a second pass instruction to control the product to be processed to enter the current step for processing.
[0142] Fig. 9 A specific flow chart of the product processing method provided by the embodiment of the present disclosure, such as Fig. 9 As shown, S41, obtain the batch information of the product to be processed and determine the first pollution type; S42, obtain the second pollution type of the current step; S43, determine whether the second pollution type covers the first pollution type, if so, execute S44, if not, execute S47; S44, enter the current step processing; S45, processing is completed; S46, exit the station and prepare to enter the next step. S47, determine whether the requirements for continued operation are met; if in response to the adjustment operation for the second pollution type, the second pollution type is adjusted to cover the range of the first pollution type, which means that the requirements for continued operation are met; S48, generate a second pass instruction, and return to execute S43.
[0143] In some embodiments, the product processing method provided by the embodiments of the present disclosure further includes controlling the types of equipment pollution. Specifically, the types of equipment pollution are predefined. Fig.10 A schematic diagram of an interface for defining equipment pollution types provided in an embodiment of the present disclosure, such as Fig.10 As shown, the operation interface of equipment pollution includes equipment group column 101, processing equipment column 102, sub-equipment column 103, pollution binding area 104 and pollution unbinding area 105. Equipment group column 101 includes information of equipment group; processing equipment column 102 includes information of processing equipment bound under equipment group; sub-equipment column 103 includes information of sub-equipment under selected processing equipment. If the equipment group is selected, pollution binding area 104 includes pollution types of equipment group bound to the equipment group. Equipment group pollution types can be added from pollution unbinding area 105 by moving the "<" button to the left; equipment group pollution types can be removed from pollution binding area 104 by moving the ">" button to the right. Similarly, if processing equipment is selected, pollution binding area 104 includes pollution types of equipment group bound to the processing equipment; if sub-equipment is selected, pollution binding area 104 includes pollution types of sub-equipment bound to the sub-equipment.
[0144] In some embodiments, the product processing method provided by the embodiments of the present disclosure further includes controlling the types of pollution in the process steps. Specifically, the types of pollution in the process steps are predefined. Fig.11 A schematic diagram of an interface for defining the pollution types of a process step provided in an embodiment of the present disclosure, such as Fig.11 As shown, the operation interface of the work step pollution includes a work step bar 111, a pollution binding area 112 and a pollution unbinding area 113. The work step bar 111 includes information about each work step on the production line. Select one of the work steps, and you can add the work step pollution type from the pollution unbinding area 113 to the pollution binding area 112 by moving the "<" button to the left, or you can remove the work step pollution type from the pollution binding area 112 to the pollution unbinding area 113 by moving the ">" button to the right. A work step is only allowed to be bound to one work step pollution type. If there are two work step pollution types in the pollution binding area 112, binding is not allowed.
[0145] In some embodiments, the product processing method provided by the embodiments of the present disclosure further includes controlling the types of pollution in the process steps. Specifically, the types of pollution in the process steps are predefined. Fig.12 A schematic diagram of an interface for defining product pollution types provided in an embodiment of the present disclosure, such as Fig.12 As shown, the operation interface of product contamination includes a process bar 121, a work step bar 122, a contamination binding area 123 and a contamination unbinding area 124. The process bar 121 is the name of the current preparation process of the product to be processed, such as etching. The work step bar 122 includes various work steps involved in the current preparation process. For special work steps in the current preparation process, you can add product contamination types from the contamination unbinding area 124 to the contamination binding area 123 by moving the "<" button to the left, or you can remove product contamination types from the contamination binding area 123 to the contamination unbinding area 124 by moving the ">" button to the right. The pollution types of other non-special work steps still reuse the work step pollution types.
[0146] In some embodiments, the product processing method provided by the embodiments of the present disclosure further includes querying batch information in the system operation interface. The specific batch information and batch operation history can be displayed by scanning the batch number on the process card, or manually entering the batch number, or scanning the barcode on the carrier, or entering the carrier number, and clicking the query button.
[0147] Those skilled in the art will appreciate that, in the above method of specific implementation, the order in which the steps are written does not imply a strict execution order and does not constitute any limitation on the implementation process. The specific execution order of the steps should be determined by their functions and possible internal logic.
[0148] In addition, a product processing system corresponding to the product processing method is also provided in the embodiment of the present disclosure. Since the principle of solving the problem by the system in the embodiment of the present disclosure is similar to the above-mentioned method in the embodiment of the present disclosure, the implementation of the system can refer to the implementation of the method, and the repeated parts will not be repeated.
[0149] Fig.13 A schematic diagram of a product processing system provided by an embodiment of the present disclosure, such as Fig.13 As shown, the product processing system includes an information receiving module 131 , a first pollution determination module 132 and an instruction generation module 133 .
[0150] The information receiving module 131 is configured to obtain the product to be processed in the current process step.
[0151] It should be noted that the information receiving module 131 in the embodiment of the present disclosure is configured to execute step S11 in the above-mentioned product processing method, and the repeated parts will not be repeated.
[0152] The first contamination determination module 132 is configured to determine a first contamination type of the product to be processed according to the batch information of the product to be processed.
[0153] It should be noted that the first contamination determination module 132 in the embodiment of the present disclosure is configured to execute step S12 in the above-mentioned product processing method, and the repeated parts will not be repeated.
[0154] The instruction generation module 133 is configured to generate a pass instruction to control the product to be processed to enter the current step when the second pollution type of the current step covers the first pollution type; the second pollution type includes the equipment pollution type corresponding to the target equipment used to process the product to be processed in the current step.
[0155] It should be noted that the instruction generation module 133 in the embodiment of the present disclosure is configured to execute step S13 in the above-mentioned product processing method, and the repeated parts will not be repeated.
[0156] In some embodiments, the batch information includes the batch contamination type, which is the contamination type of the product to be processed in the previous step; the first contamination determination module 132 is specifically configured to use the batch contamination type as the first contamination type when the batch contamination type is not empty.
[0157] In some embodiments, the product processing system further includes a first batch contamination determination module 134. The first batch contamination determination module 134 is configured to determine whether the product to be processed has a first product contamination type; the first product contamination type refers to a specific contamination type configured by the user for the product to be processed in the previous step; if the product to be processed has the first product contamination type, the first product contamination type is used as the batch contamination type; if the product to be processed does not have a product contamination type, the step contamination type pre-configured in the previous step is used as the batch contamination type.
[0158] In some embodiments, each process step has a unique corresponding process step pollution type.
[0159] In some embodiments, the batch information also includes vehicle information; the first pollution determination module 132 is specifically configured to determine the vehicle pollution type according to the vehicle information when the batch pollution type is empty; and use the vehicle pollution type as the first pollution type.
[0160] In some embodiments, the batch information includes batch contamination type and carrier information, and the batch contamination type is the contamination type of the product to be processed in the previous process step; the first contamination determination module 132 is specifically configured to determine the carrier contamination type based on the carrier information; and the batch contamination type and the carrier contamination type are used as the first contamination type.
[0161] In some embodiments, the product processing system further includes a second pollution determination module 135. The second pollution determination module 135 is configured to obtain a target device used to process the product to be processed in the current process step; if the target device has a pre-configured device pollution type, the device pollution type of the target device is used as the second pollution type.
[0162] In some embodiments, the second pollution determination module 135 is further configured to obtain the device group to which the target device belongs and determine the device group pollution type corresponding to the device group when the target device does not have a pre-configured device pollution type; and use the device group pollution type as the second pollution type.
[0163] In some embodiments, the target device includes multiple sub-devices; the second pollution determination module 135 is specifically configured to, when the sub-device has a pre-configured sub-device pollution type, use the sub-device pollution type as the second pollution type; when the sub-device does not have a pre-configured sub-device pollution type, use the device pollution type of the target device as the second pollution type.
[0164] In some embodiments, the equipment group pollution type corresponding to the equipment group is reused as the equipment pollution type of the processing equipment in the equipment group that is not configured with the equipment pollution type; the processing equipment includes multiple sub-equipment, and the equipment pollution type corresponding to the processing equipment is reused as the sub-equipment pollution type of the sub-equipment in the processing equipment that is not configured with the sub-equipment pollution type.
[0165] In some embodiments, the product processing system further includes a second batch contamination determination module 136. The second batch contamination determination module 136 is configured to, when it is detected that the product to be processed is completed and exits the station at the current process step, use the process step contamination type pre-configured in the current process step as the batch contamination type of the next process step.
[0166] In some embodiments, the second batch contamination determination module 136 is configured to determine whether the product to be processed has a second product contamination type; the second product contamination type refers to a specific contamination type configured by the user for the product to be processed in the current process step; if the product to be processed has the second product contamination type, the second product contamination type is used as the batch contamination type for the next process step; if the product to be processed does not have the second product contamination type, the process step contamination type pre-configured in the current process step is used as the batch contamination type for the next process step.
[0167] In some embodiments, the instruction generation module 133 is further configured to generate a first pass instruction to control the product to be processed to enter the current step for processing when the second pollution type of the current step covers the first pollution type.
[0168] In some embodiments, the instruction generation module 133 is also configured to, when the second pollution type of the current process step does not cover the first pollution type, adjust the second pollution type to cover the range of the first pollution type in response to an adjustment operation on the second pollution type, and generate a second pass instruction to control the product to be processed to enter the current process step for processing.
[0169] In some embodiments, in the product processing system provided by the embodiments of the present disclosure, except for the basic data of the equipment group, processing equipment, and sub-equipment maintained in the modeling tool, the rest of the pollution control is implemented on the user operation platform, such as the definition of equipment pollution, the definition of process pollution, the definition of product pollution, and inbound and outbound pollution control, etc.; Fig.14 A schematic diagram of a product processing system provided by an embodiment of the present disclosure, such as Fig.14 As shown, the user enters and queries information on the front-end application layer 141 (eg, Winform client), which is then sent to the back-end service layer 142 via RabbitMQ. After processing, it is persistently stored in the underlying storage layer 143 (Oracle database).
[0170] Fig.15 The following is a schematic diagram of the structure of a computer device provided in an embodiment of the present disclosure. Fig.15 As shown, the embodiment of the present disclosure provides a computer device including: one or more processors 1501, a memory 1502, and one or more I / O interfaces 1503. The memory 1502 stores one or more programs, and when the one or more programs are executed by the one or more processors, the one or more processors implement any product processing method in the above embodiments; the one or more I / O interfaces 1503 are connected between the processor and the memory, and are configured to implement information interaction between the processor and the memory.
[0171] Among them, the processor 1501 is a device with data processing capabilities, including but not limited to a central processing unit (CPU); the memory 1502 is a device with data storage capabilities, including but not limited to random access memory (RAM, more specifically SDRAM, DDR, etc.), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), flash memory (FLASH); the I / O interface (read-write interface) 1503 is connected between the processor 1501 and the memory 1502, and can realize information interaction between the processor 1501 and the memory 1502, including but not limited to a data bus (Bus), etc.
[0172] In some embodiments, the processor 1501 , the memory 1502 , and the I / O interface 1503 are connected to each other via a bus 1504 , and further connected to other components of the computing device.
[0173] According to an embodiment of the present disclosure, a non-transitory computer readable storage medium is further provided. The non-transitory computer readable storage medium stores a computer program, wherein when the program is executed by a processor, the steps in any product processing method in the above embodiments are implemented.
[0174] In particular, according to an embodiment of the present disclosure, the process described above with reference to the flowchart can be implemented as a computer software program. For example, an embodiment of the present disclosure includes a computer program product, which includes a computer program carried on a machine-readable medium, and the computer program contains a program code for executing the method shown in the flowchart. In such an embodiment, the computer program can be downloaded and installed from a network through a communication part, and / or installed from a removable medium. When the computer program is executed by a central processing unit (CPU), the above-mentioned functions defined in the system of the present disclosure are executed.
[0175] It should be noted that the computer non-transient readable medium shown in the present disclosure may be a computer readable signal medium or a computer readable storage medium or any combination of the above two. The computer readable storage medium may be, for example, but not limited to, an electrical, magnetic, optical, electromagnetic, infrared, or semiconductor system, device or device, or any combination of the above. More specific examples of computer readable storage media may include, but are not limited to: an electrical connection with one or more wires, a portable computer disk, a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber, a portable compact disk read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the above. In the present disclosure, a computer readable storage medium may be any tangible medium containing or storing a program, which may be used by or in combination with an instruction execution system, device or device. In the present disclosure, a computer readable signal medium may include a data signal propagated in a baseband or as part of a carrier wave, which carries a computer readable program code. Such propagated data signals may take a variety of forms, including but not limited to electromagnetic signals, optical signals, or any suitable combination of the above. Computer-readable signal media may also be any computer-readable non-transient storage medium other than a computer-readable storage medium, which may send, propagate, or transmit a program for use by or in conjunction with an instruction execution system, apparatus, or device. The program code contained on the computer-readable non-transient storage medium may be transmitted using any suitable medium, including but not limited to: wireless, wire, optical cable, RF, etc., or any suitable combination of the above.
[0176] The flow charts and block diagrams in the accompanying drawings illustrate the possible architecture, functions and operations of the devices, methods and computer program products according to various embodiments of the present disclosure. In this regard, each box in the flow chart or block diagram can represent a module, a program segment, or a part of a code, and the aforementioned module, program segment, or a part of a code contains one or more executable instructions for realizing the specified logical function. It should also be noted that in some alternative implementations, the functions marked in the box can also occur in a different order from the order marked in the accompanying drawings. For example, two connected boxes can actually represent that they are executed in parallel, and they can sometimes be executed in the opposite order, depending on the functions involved. It should also be noted that each box in the block diagram and / or flow chart, and the combination of the boxes in the block diagram and / or flow chart can be implemented with a dedicated hardware-based system that performs a specified function or operation, or can be implemented with a combination of dedicated hardware and computer instructions.
[0177] It is to be understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present disclosure, but the present disclosure is not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and substance of the present disclosure, and these modifications and improvements are also considered to be within the scope of protection of the present disclosure.
Claims
1. A product processing method, wherein: include: Get the products to be processed in the current process step; Determining a first contamination type of the product to be processed according to the batch information of the product to be processed; In the case where the second pollution type of the current process step does not cover the first pollution type, a cut-off instruction is generated to control the product to be processed from entering the current process step for processing; the second pollution type includes the equipment pollution type corresponding to the target equipment; The target equipment is a processing equipment used for processing the product to be processed in the current process step.
2. The product processing method according to claim 1, wherein: The batch information includes the batch contamination type, and the batch contamination type is the contamination type of the product to be processed in the previous process step; Determining the first pollution type according to the batch information of the product to be processed includes: When the batch pollution type is not empty, the batch pollution type is used as the first pollution type.
3. The product processing method according to claim 2, wherein: The step of determining the type of contamination of the batch comprises: Determine whether the product to be processed has a first product contamination type; the first product contamination type refers to a specific contamination type configured by a user for the product to be processed in the previous step; In the case where the product to be processed has the first product contamination type, taking the first product contamination type as the batch contamination type; In the case that the product to be processed does not have the product contamination type, the step contamination type pre-configured in the previous step is used as the batch contamination type.
4. The product processing method according to claim 3, wherein: Each process step has a unique corresponding process step pollution type.
5. The product processing method according to claim 2, wherein: The batch information also includes carrier information; Determining the first pollution type according to the batch information of the product to be processed includes: When the batch pollution type is empty, determining the vehicle pollution type according to the vehicle information; The vehicle pollution type is taken as the first pollution type.
6. The product processing method according to claim 1, wherein: The batch information includes the batch contamination type and carrier information, and the batch contamination type is the contamination type of the product to be processed in the previous process step; Determining the first pollution type according to the batch information of the product to be processed includes: Determining the type of vehicle pollution according to the vehicle information; The batch pollution type and the carrier pollution type are regarded as the first pollution type.
7. The product processing method according to claim 1, wherein: The step of determining the second pollution type comprises: Acquire a target device for processing the product to be processed in the current process step; In the case that the target device has a pre-configured device pollution type, the device pollution type of the target device is used as the second pollution type.
8. The product processing method according to claim 7, wherein: Also includes: In the case that the target device does not have a pre-configured device pollution type, obtaining a device group to which the target device belongs, and determining a device group pollution type corresponding to the device group; The pollution type of the equipment group is used as the second pollution type.
9. The product processing method according to claim 7, wherein: The target device includes a plurality of sub-devices; The step of setting the device pollution type of the target device as the second pollution type includes: In the case where the sub-device has a pre-configured sub-device pollution type, taking the sub-device pollution type as the second pollution type; In the case that the sub-device does not have a pre-configured sub-device pollution type, the device pollution type of the target device is used as the second pollution type.
10. The product processing method according to claim 9, wherein: The equipment group pollution type corresponding to the equipment group is reused as the equipment pollution type of the processing equipment in the equipment group that is not configured with the equipment pollution type; the processing equipment includes multiple sub-equipment, and the equipment pollution type corresponding to the processing equipment is reused as the sub-equipment pollution type of the sub-equipment in the processing equipment that is not configured with the sub-equipment pollution type.
11. The product processing method according to claim 1, wherein: After generating the pass directive, also include: When it is detected that the product to be processed is completed in the current process step and leaves the station, the process step contamination type pre-configured for the current process step is used as the batch contamination type for the next process step.
12. The product processing method according to claim 1, wherein: After generating the pass directive, also include: Determine whether the product to be processed has a second product contamination type; the second product contamination type refers to a specific contamination type configured by a user for the product to be processed in the current process step; In the case where the product to be processed has the second product contamination type, taking the second product contamination type as the batch contamination type of the next process step; In a case where the product to be processed does not have the second product contamination type, the process step contamination type pre-configured for the current process step is used as the batch contamination type for the next process step.
13. The product processing method according to claim 1, wherein: Also includes: In the case where the second pollution type of the current process step includes the first pollution type, generating a first passing instruction to control the product to be processed to enter the current process step for processing; When the second pollution type of the current process step does not cover the first pollution type, in response to an adjustment operation for the second pollution type, the second pollution type is adjusted to cover the range of the first pollution type, and a second pass instruction is generated to control the product to be processed to enter the current process step for processing.
14. A product processing system, wherein: include: An information receiving module is configured to obtain a product to be processed in a current process step; A first contamination determination module is configured to determine a first contamination type of the product to be processed according to the batch information of the product to be processed; The instruction generation module is configured to generate a pass instruction to control the product to be processed to enter the current step when the second pollution type of the current step covers the first pollution type; the second pollution type includes the equipment pollution type corresponding to the target equipment used to process the product to be processed in the current step.
15. A computer device, wherein: include: A processor, a memory and a bus, wherein the memory stores machine-readable instructions executable by the processor, and when the computer device is running, the processor and the memory communicate via the bus, and when the machine-readable instructions are executed by the processor, the steps of the product processing method as described in any one of claims 1 to 13 are performed.
16. A computer non-transitory readable storage medium, wherein: The computer non-transitory readable storage medium stores a computer program, and when the computer program is executed by a processor, the steps of the product processing method as claimed in any one of claims 1 to 13 are executed.