Ultrapure water recycling and circulating system based on ion adsorption structure

Abstract

The invention relates to the technical field of wastewater processing, and discloses an ultrapure water recycling and circulating system based on an ion adsorption structure, the ultrapure water recycling and circulating system comprises a placing part, the placing part comprises a tank body, and the bottom of the tank body is fixedly connected with a support frame; the stirring part comprises a connecting shaft, and the outer end of the connecting shaft is rotationally connected with the interior of the tank body. The ultrapure water recycling and circulating system based on the ion adsorption structure can effectively solve the problems that in the prior art, pure water obtained after semiconductor part cleaning treatment contains a large number of positive ions and needs to be adsorbed through colloid in an adsorption tank, a colloid medium makes contact with the polluted pure water depending on natural flowing of fluid, and the pollution is caused. The problems that in the prior art, the phenomena of different local concentrations are generated in the tank body, the colloid particles cannot be uniformly distributed in the adsorption tank, the adsorption process is not uniform, part of colloid particles cannot be effectively adsorbed, the overall adsorption efficiency is low, the treatment effect is reduced, and the subsequent wastewater recycling is influenced are solved.

Description

Technical Field

[0001] The invention relates to the technical field of wastewater processing, and in particular to an ultrapure water recycling system based on an ion adsorption structure. Background Art

[0002] Colloid adsorption tank is a commonly used equipment for processing materials containing colloid particles in the fields of chemical, environmental protection, medicine, etc. It adsorbs the colloid particles through adsorbents to achieve the separation of colloid and liquid. It is widely used in wastewater treatment, dye recovery, food processing and other industries.

[0003] In the prior art, pure water after cleaning of semiconductor parts contains a large amount of cations, which need to be adsorbed by colloids in the adsorption tank. The colloidal medium relies on the natural flow of the fluid to contact the contaminated pure water, which will produce different local concentrations in the tank. It cannot be evenly distributed in the adsorption tank, the adsorption process is uneven, and some colloidal particles cannot be effectively adsorbed. The overall adsorption efficiency is low, which reduces the treatment effect and affects the subsequent wastewater recycling. Summary of the invention

[0004] Technical issues solved

[0005] In view of the above-mentioned shortcomings of the prior art, the present invention provides an ultrapure water reuse circulation system based on an ion adsorption structure, which can effectively solve the problem that the pure water after the cleaning of semiconductor parts in the prior art contains a large amount of cations, which needs to be adsorbed by the colloid in the adsorption tank. The colloidal medium relies on the natural flow of the fluid to contact the contaminated pure water, which will produce different local concentrations in the tank body and cannot be evenly distributed in the adsorption tank. The adsorption process is uneven, some colloidal particles cannot be effectively adsorbed, and the overall adsorption efficiency is low, which reduces the treatment effect and affects the subsequent wastewater recycling.

[0006] To achieve the above objectives, the present invention is implemented through the following technical solutions:

[0007] The present invention provides an ultrapure water recycling system based on an ion adsorption structure, comprising:

[0008] A placement portion, the placement portion comprising a tank body, the bottom of the tank body being fixedly connected to a support frame;

[0009] A stirring part, wherein the stirring part comprises a connecting shaft, the outer end of the connecting shaft is rotatably connected to the inside of the tank body, an arc plate is fixedly connected to the circumferential outer surface of the connecting shaft, the arc plates are provided in two groups and are distributed in a circumferential array with the connecting shaft as the center, each group of the arc plates is provided with a plurality of arc plates, an arc plate close to the outer end of the tank body adopts a curved surface design, and the arc plate is fitted with the inner wall end of the tank body, a slideway is provided between the connecting shaft and the arc plate, and one end of the slideway passes through the connecting shaft and extends to the outside;

[0010] The slideway is internally slidably connected with a partition mechanism that can be used to separate the interior of the tank body, and the connecting shaft is provided with a driving member through a cavity opened inside the connecting shaft, and the cavity is connected with the interior of the slideway.

[0011] Furthermore, the top of the tank body is fixedly connected with a feed pipe, the bottom of the tank body is fixedly connected with a connecting pipe, and the other end of the connecting pipe is fixedly connected with an RO membrane tank.

[0012] Furthermore, the partition mechanism includes a sliding plate, which is slidably connected to the arc plate via a clamping strip fixed on its outer surface, the outer surface of the sliding plate is provided with a tooth groove, and the end of the arc plate away from the connecting shaft is provided with an elastic member that fits with the circumferential inner wall of the tank body.

[0013] Furthermore, the driving member includes a driving seat, the output end of the driving seat is connected to a gear through a synchronous belt transmission, the top of the gear is fixedly connected to a rotating shaft, the top of the rotating shaft extends into the cavity, and the outer surface of the rotating shaft is fixedly connected to a gear ring meshing with the tooth groove.

[0014] Furthermore, the elastic member comprises a connecting block, the inner surface of the connecting block slides in contact with the outer surface of the arc plate, and a corrosion-resistant spring connected to the outer side of the arc plate is arranged on one side of the connecting block close to the connecting shaft.

[0015] Furthermore, a side of the connection block away from the corrosion-resistant spring adopts an arc surface design, and a side of the connection block away from the corrosion-resistant spring is fixedly connected with a corrosion-resistant rubber that fits tightly with the inner wall of the tank body.

[0016] Furthermore, a sealing plate that fits the outer surface of the connecting shaft is fixedly connected to the side of the sliding plate away from the connecting block.

[0017] Furthermore, the bottom of the tank body is fixedly connected to a backwash water inlet pipe, and the top of the tank body is fixedly connected to a backwash water outlet pipe.

[0018] Compared with the prior art, the technical solution provided by the present invention has the following beneficial effects:

[0019] The present invention is provided with a sliding plate and an arc plate. During the stage of adsorbing waste liquid, the sliding plate is in an expanded state inside the arc plate. The sliding plate and the arc plate are driven to rotate inside the tank body by a rotating shaft, so that the waste water is more evenly distributed inside the tank body, avoiding the problem of excessively high or low local concentration. When the stirring part inside the tank body adsorbs cations in the waste water, the sliding plate is in an expanded state compared with the arc plate. Each group of sliding plates and the arc plate are staggered, and the sliding plates and the arc plates are arranged in a C-shaped pattern. When the rotating shaft drives the whole to rotate, the two groups of C-shaped arc plates and the sliding plates cause the liquid to form multiple convection cycles in the tank body. The sliding plate can cause the liquid to flow in a clockwise direction inside the tank body, while the arc plate can cause the liquid to flow in a counterclockwise direction inside the tank body. These two flows in different directions are intertwined, and the liquid can be fully mixed. This convection circulation can ensure that cations and exhaust gases are evenly distributed in the solution. The curved plates and sliding plates can cover a wider area, and the liquid at the edges and corners of the tank can be effectively stirred to prevent the formation of "dead zones" of liquid flow in these areas. In these dead zones, cationic colloids may not be able to fully contact with the adsorption medium due to lack of flow, affecting the adsorption effect. The stirring part can push the liquid from the central area to the edge, and then bring it back from the edge to the center, so that the liquid in the entire adsorption tank can participate in the stirring process, ensuring the uniformity of the cationic colloid in the solution. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention, and for ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0021] Figure 1 It is a schematic diagram of the three-dimensional structure of an embodiment of the present invention;

[0022] Figure 2 This is a schematic diagram of the structure of the tank body, the support frame and the feed pipe according to an embodiment of the present invention;

[0023] Figure 3 It is a schematic diagram of the cross-sectional structure of a tank body according to an embodiment of the present invention;

[0024] Figure 4 This is a schematic structural diagram of a connecting shaft, a sliding plate and an arc-shaped plate according to an embodiment of the present invention;

[0025] Figure 5 It is a schematic diagram of the structure of a driving member according to an embodiment of the present invention;

[0026] Figure 6 Another angled cross-sectional view of the tank body according to an embodiment of the present invention;

[0027] Figure 7 This is a separation diagram of the separation mechanism, the connecting shaft and the arc plate of an embodiment of the present invention;

[0028] Figure 8 This is a schematic structural diagram of an elastic member and an arc-shaped plate according to an embodiment of the present invention;

[0029] Fig. 9 For the embodiment of the present invention Figure 8 A schematic diagram of the structure with a partial enlargement at the center;

[0030] Fig.10 This is a schematic structural diagram of a connecting shaft, an arc plate and a sliding plate according to an embodiment of the present invention;

[0031] Fig.11 It is a cross-sectional view of the connecting shaft and the rotating shaft according to an embodiment of the present invention.

[0032] The numbers in the figure represent respectively: 1. placement part; 11. tank body; 111. feed pipe; 112. connecting pipe; 12. support frame; 13. RO membrane tank; 2. stirring part; 21. connecting shaft; 22. arc plate; 221. slideway; 23. partition mechanism; 231. sliding plate; 2311. tooth groove; 232. driving part; 2321. driving seat; 2322. synchronous belt; 2323. gear; 2324. rotating shaft; 2325. gear ring; 233. sealing plate; 24. elastic part; 241. connecting block; 242. corrosion-resistant spring. DETAILED DESCRIPTION

[0033] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0034] The present invention will be further described below in conjunction with the embodiments.

[0035] Example:

[0036] See also Figure 1-Figure 11 The present invention provides a technical solution: an ultrapure water recycling system based on an ion adsorption structure, comprising:

[0037] The placement part 1 includes a tank body 11, and a support frame 12 is fixedly connected to the bottom of the tank body 11;

[0038] The stirring part 2 includes a connecting shaft 21, the outer end of the connecting shaft 21 is rotatably connected to the inside of the tank body 11, and an arc plate 22 is fixedly connected to the circumferential outer surface of the connecting shaft 21. The arc plates 22 are provided in two groups and are distributed in a circumferential array with the connecting shaft 21 as the center. Each group of arc plates 22 is provided with a plurality of arc plates. The arc plates 22 near the top and bottom of the inner wall of the tank body 11 are designed with a curved surface. The arc plates 22 fit the top and bottom of the inner wall of the tank body 11, and a sealing strip is provided in the curved surface of the arc plate 22. A slideway 221 is provided between the connecting shaft 21 and the arc plate 22, and one end of the slideway 221 passes through the connecting shaft 21 and extends to the outside.

[0039] The slideway 221 is internally slidably connected with a partition mechanism 23 for separating the interior of the tank body 11 . The connecting shaft 21 is provided with a driving member 232 through a cavity opened therein, and the cavity is connected with the interior of the slideway 221 .

[0040] The top of the tank body 11 is fixedly connected with a feed pipe 111 , the bottom of the tank body 11 is fixedly connected with a connecting pipe 112 , and the other end of the connecting pipe 112 is fixedly connected with an RO membrane tank 13 .

[0041] The partition mechanism 23 includes a sliding plate 231, so the sliding plate 231 is slidably connected with the arc plate 22 through a clamping strip fixed on its outer surface, and a tooth groove 2311 is provided on the outer surface of the sliding plate 231. An elastic member 24 that fits with the circumferential inner wall of the tank body 11 is provided at one end of the arc plate 22 away from the connecting shaft 21. In the initial state, the sliding plate 231 is separated from the arc plate 22 and is in an unfolded state, and the outer end of the sliding plate 231 is restricted in the limiter inside the connecting shaft 21, and the sliding plate 231 and the arc plate 22 are arranged in a C shape.

[0042] The driving member 232 includes a driving seat 2321, the output end of the driving seat 2321 is connected to a gear 2323 through a synchronous belt 2322, the top of the gear 2323 is fixedly connected to a rotating shaft 2324, the top of the rotating shaft 2324 extends into the cavity, and the outer surface of the rotating shaft 2324 is fixedly connected to a gear ring 2325 meshing with the tooth groove 2311.

[0043] The elastic member 24 includes a connecting block 241 , the inner surface of the connecting block 241 is slidably fitted with the outer surface of the arc plate 22 , and a corrosion-resistant spring 242 connected to the outer side of the arc plate 22 is provided on one side of the connecting block 241 close to the connecting shaft 21 .

[0044] The side of the connecting block 241 away from the corrosion-resistant spring 242 adopts an arc surface design, and the side of the connecting block 241 away from the corrosion-resistant spring 242 is fixedly connected with corrosion-resistant rubber that fits tightly to the inner wall of the tank body 11, which can better seal the two chambers during the colloid desorption process.

[0045] A sealing plate 233 that fits the outer surface of the connecting shaft 21 is fixedly connected to one side of the sliding plate 231 away from the connecting block 241 .

[0046] The bottom of the tank body 11 is fixedly connected with a backwash water inlet pipe, and the top of the tank body 11 is fixedly connected with a backwash water outlet pipe.

[0047] The process of the colloid inside the tank 11 adsorbing the wastewater:

[0048] In practical applications, it is necessary to process the pure water in the external overflow tank after the semiconductor parts are post-processed. The water contains a large amount of impurities and cations. In order to protect the environment and reduce resource waste, the waste water needs to be recycled. The overflow tank is used to initially remove most of the impurity particles, and at the end of the overflow tank, the water to be treated enters the tank body 11 from the feed pipe 111 in the placement part 1.

[0049] When the tank body 11 is running, the driving seat 2321 in the driving member 232 is started, and its output end drives the gear 2323 to rotate through the synchronous belt 2322. A rotating shaft 2324 is fixedly connected above the gear 2323. The rotating shaft 2324 starts to rotate slowly under the influence of the rotating shaft 2324. A plurality of groups of gear rings 2325 are sleeved on the circumferential outer surface of the rotating shaft 2324. Each group of gear rings 2325 corresponds to two sliding plates 231. The height of the gear rings 2325 is the same as that of the sliding plate 231, and the gear rings 2325 are always in meshing state with the tooth grooves 2311 opened on the outer surface of the sliding plate 231.

[0050] During normal operation, the sealing plate 233 at the outer end of the sliding plate 231 does not fit the outer surface of the connecting shaft 21, and the sliding plate 231 as a whole is located away from the inside of the arc plate 22 in the slideway 221, and the sealing plate 233 at the outer end of the sliding plate 231 is close to the inner wall of the tank body 11, wherein a limiting member is provided inside the connecting shaft 21 to limit the outer end of the sliding plate 231 away from the sealing plate 233, so as to ensure that the sliding plate 231 will not accidentally fall off the connecting shaft 21 in the unfolded state. When the colloid inside the tank body 11 normally adsorbs wastewater, the corrosion-resistant spring 242 is in a contracted state, wherein the inner wall of the connecting block 241 is slidably connected to the smooth side of the sliding plate 231 through a sealing member.

[0051] At this time, the wastewater containing a large amount of cations enters the tank 11 from the feed pipe 111 through an external pump. The tank 11 is filled with colloidal adsorption media. These media usually have a large specific surface area and abundant active sites. The cations in the wastewater are adsorbed on the surface of these media by electrostatic attraction or chemical bonding. When these adsorption media are used, their surfaces carry negative charges, which can attract cationic colloids, and the porous structure of the colloids also provides a large amount of space for the adsorption of cations.

[0052] The rotating shaft 2324 drives the sliding plate 231 to move. Since the sliding plate 231 is limited by the stopper inside the connecting shaft 21, it is already at the edge of the connecting shaft 21. At this time, the rotating shaft 2324 and the connecting shaft 21 form a whole. When the rotating shaft 2324 continues to rotate, the connecting shaft 21 sleeved on its outer surface rotates synchronously with it inside the tank body 11. During the rotation process, the cationic colloid is distributed more evenly in the solution in the adsorption tank body 11, thereby improving the adsorption efficiency.

[0053] The sliding plate 231 in the stirring part 2 is in an unfolded state, and two groups of sliding plates 231 and arc plates 22 are provided, and both groups are distributed in a circular array with the connecting shaft 21 as the center, and the sliding plates 231 and the arc plates 22 are staggered, and one group of sliding plates 231 and one group of arc plates 22 are arranged in a C-shaped pattern. When the rotating shaft 2324 drives the whole to rotate, the two groups of C-shaped arc plates 22 and the sliding plate 231 can produce more complex fluid movement in the tank body 11, which can form multiple convection cycles of the liquid in the tank body 11. The sliding plate 231 can make the liquid flow in a clockwise direction inside the tank body 11, and the arc plate 22 can make the liquid flow in a counterclockwise direction inside the tank body 11. The two flows in different directions are intertwined, so that the liquid can be fully mixed. This convection cycle can ensure that the cationic colloid is evenly distributed in the solution, avoiding the situation where the local concentration is too high or too low, thereby improving the adsorption efficiency.

[0054] The process of RO membrane filtration of ultrapure water after the cations are removed:

[0055] After the solution has been treated by colloid adsorption inside the tank body 11, when the concentration of cationic colloids therein is reduced to meet the discharge standards or production requirements, it will be discharged from the tank body 11 through the connecting pipe 112 at the bottom and enter the RO membrane tank 13 in the next process. In the discharging process, the flow rate also needs to be controlled by the valve body to ensure that the solution can flow out smoothly and will not carry out the adsorption medium due to excessive flow rate. The wastewater solution from which the cations have been removed enters the RO membrane tank 13 under the action of high pressure, and the RO membrane begins to play a filtering role. The RO membrane is a semi-permeable membrane that only allows water molecules to pass through. Based on the principle of reverse osmosis, that is, when the pressure on one side of the wastewater is higher than the osmotic pressure on the other side of the RO membrane, water molecules will pass through the RO membrane from one side of the wastewater and diffuse to the other side. After being filtered by the RO membrane, the water that passes through the RO membrane is collected and can be put into the top of the overflow tank again to achieve the recycling of ultrapure water and continue to post-process semiconductor parts.

[0056] The process of desorbing the colloid inside the tank 11:

[0057] As the colloid adsorbs a large number of ions in ultrapure water, the colloid will gradually become saturated. When the adsorption medium reaches saturation, the adsorption medium can be regenerated by chemical methods to restore its adsorption capacity. For ion exchange resin adsorption media, when it adsorbs a large number of cations in ultrapure water, it can be rinsed with acid or alkaline solution to desorb the cationic colloid adsorbed on the resin, thereby restoring the adsorption capacity of the resin.

[0058] The colloid inside the tank body 11 is intermittently desorbed to ensure its good adsorption capacity. During this process, the drive seat 2321 needs to be stopped and then rotated in the opposite direction, and the gear 2323 and the rotating shaft 2324 are driven to rotate in the opposite direction through the synchronous belt 2322. During rotation, the tooth ring 2325 fixedly connected to the outer surface of the rotating shaft 2324 also rotates synchronously, and drives the sliding plate 231 to move in the slideway 221 by the tooth groove 2311 meshing with it. The tooth ring 2325 meshes with the tooth grooves 2311 on both sides inside the cavity at the same time, and can make the sliding plates 231 on both sides move towards or away from each other at the same time. At this time, the sliding plate 231 moves between the two adjacent arc plates 22 under the path restriction of the slideway 221 through the upper and lower card strips, and the sealing plate 233 gradually moves away from the inner wall of the tank body 11 and moves toward the side of the connecting shaft 21.

[0059] The outer end of the sliding plate 231 away from the sealing plate 233 approaches the elastic member 24. When the outer end of the sliding plate 231 fits with the inner wall of the connecting block 241, the rotating shaft 2324 continues to rotate, squeezing the sliding plate 231 away from the connecting shaft 21. In this process, the outer end of the sliding plate 231 drives the connecting block 241 to slide toward the inner wall of the tank body 11, and the corrosion-resistant spring 242 between the connecting block 241 and the arc plate 22 is elastically deformed by the tensile force until the corrosion-resistant rubber on the outer surface of the connecting block 241 fits tightly with the inner wall of the tank body 11, and the connecting block 241 and the smooth surface of the sliding plate 231 are slidably sealed. At this time, the side of the sealing plate 233 close to the sliding plate 231 fits tightly with the slideway 221 on the outer surface of the connecting shaft 21, and the driving seat 2321 stops running and maintains this state. The sliding plates 231 on both sides perform the same action, dividing the inside of the tank body 11 into two chambers.

[0060] The backwash inlet pipe and the backwash outlet pipe are arranged on the same axis to ensure that the internal colloid is on the same side during desorption. The feed pipe 111 and the connecting pipe 112 are arranged around the tank body 11. The bottom of the tank body 11 is fixedly connected with a backwash inlet pipe. At this time, the backwash inlet pipe is connected to one of the chambers. The flushing solution is filled into it through the backwash inlet pipe, and is evenly filled into the tank body 11 from bottom to top, so that the cations adsorbed in the colloid are resolved, thereby restoring the adsorption capacity of the resin. After desorption is completed, it is discharged from the backwash outlet pipe at the top.

[0061] At the same time, one chamber desorbs the colloid inside it, and the feed pipe 111 and the connecting pipe 112 inside the other chamber normally enter and exit the liquid, and the colloid normally adsorbs the contaminated ultrapure water. After the desorption of the colloid on one side is completed, the chamber is filled with clean water to make the liquid levels on both sides relatively balanced, and the drive seat 2321 is started to drive the gear 2323 and the gear ring 2325 to rotate in the direction of rotation of the previous step. Since the sealing plate 233 is tightly attached to the connecting shaft 21, the sliding plate 231 cannot continue to move in this direction. At this time, the sliding plate 231 and the arc plate 22 form a whole again, and rotate 180 degrees in contact with the inner wall of the tank body 11. The chambers on both sides exchange positions. At this time, the chamber on the side that has completed the desorption action continues to adsorb ions on the contaminated ultrapure water, and the chamber on the side that has not completed the desorption action repeats the above steps to desorb the colloid inside it.

[0062] When the colloids in the chambers on both sides have completed desorption, the driving seat 2321 drives the rotating shaft 2324 to rotate again, and the sliding plates 231 on both sides move backwards under the action of the gear ring 2325, and the sealing plate 233 gradually separates from the outer surface of the connecting shaft 21, and the outer end of the sliding plate 231 separates from the outer surface of the connecting block 241. Under the action of the corrosion-resistant spring 242, the connecting block 241 moves toward the side close to the connecting shaft 21 (in the subsequent stirring process, the wear of its outer wall and the inner wall of the tank body 11 is reduced), and the elastic member 24 is in a contracted state. When the outer end of the sliding plate 231 reaches the position of the limiter in the connecting shaft 21, the sliding plate 231 and the arc plate 22 form a whole again, and the arc plate 22, the connecting shaft 21 and the sliding plate 231 rotate synchronously inside the tank body 11. The sliding plate 231 is in an expanded state at this time, and the sliding plate 231 and the arc plate 22 are arranged in a C shape to evenly stir the internal solution.

[0063] In summary, the stirring section 2 has the following advantages:

[0064] Advantage 1: The ultrapure water that flows out from the bottom of the overflow tank and completes the post-processing of semiconductor parts can be recycled and reused. Large particles of impurities are removed after precipitation, and a large number of ions in the wastewater solution are adsorbed through the tank body 11. Finally, the RO membrane tank 13 is used for final osmotic filtration. The filtered ultrapure water enters the upstream of the overflow tank again, and the semiconductor parts can continue to be post-processed. By recycling and processing the polluted ultrapure water, the pollution to the environment is reduced, and the recycling of water resources is realized, which is in line with the concept of sustainable development.

[0065] Advantage 2: The colloidal adsorption medium filled inside the tank body 11 has a large specific surface area and abundant active sites, which can effectively adsorb cations in the wastewater and improve the treatment efficiency. The rotating shaft 2324 and the connecting shaft 21 drive the sliding plate 231 and the arc plate 22 to rotate inside the tank body 11, so that the wastewater is more evenly distributed inside the tank body 11, avoiding the problem of excessively high or low local concentrations, and further improving the adsorption efficiency.

[0066] Advantage 3: When the stirring part 2 inside the tank body 11 adsorbs cations in the wastewater, the sliding plate 231 is in an expanded state compared to the arc plate 22, and each group of sliding plates 231 and the arc plate 22 are staggered, and the sliding plates 231 and the arc plates 22 are arranged in a C-shaped pattern. When the rotating shaft 2324 drives the whole to rotate, the two groups of C-shaped arc plates 22 and the sliding plate 231 make the liquid form multiple convection cycles in the tank body 11. The sliding plate 231 can make the liquid flow in a clockwise direction inside the tank body 11, while the arc plate 22 can make the liquid flow in a counterclockwise direction inside the tank body 11. These two flows in different directions are intertwined, and the liquid can be fully mixed. This convection cycle can ensure that the cations and waste gas are evenly distributed in the solution.

[0067] Advantage 4: Since the ultrapure water after post-processing semiconductor parts contains a large amount of metal ions, the adsorption colloid medium in the tank body 11 will gradually become saturated after adsorbing a large amount of cations, and the saturation rate of the colloid medium will become faster, and frequent shutdowns are required to regenerate the colloid inside the tank body 11. The interior of the tank body 11 can be divided into two chambers by the partition mechanism 23, and adsorption and desorption operations can be performed alternately. While one side of the chamber is desorbing, the other side can continue to perform adsorption operations, realizing continuous wastewater treatment, improving production efficiency, and improving the utilization rate and processing capacity of the equipment.

[0068] Advantage 5. When the internal colloid adsorbs ions in the wastewater, the rotating shaft 2324 drives the arc plate 22 and the sliding plate 231 to rotate inside the tank body 11. At this time, the elastic member 24 is in a contracted state, avoiding wear on the inner wall of the tank body 11 during rotation; when the internal colloid is desorbed, the elastic member 24 is squeezed by the sliding plate 231 in a contracted state, and the connecting block 241 is squeezed toward the inner wall of the tank body 11, so that the two separated chambers are in a sealed state, ensuring that one chamber is performing adsorption operation while the other chamber can be desorbed or cleaned.

[0069] Advantage 6. During the adsorption process, the connecting block 241 at the outer end of the arc plate 22 is in a contracted state, and the sealing plate 233 at the outer end of the sliding plate 231 is close to the inner wall of the tank body 11, covering a wider area, and effectively stirring the liquid at the edge and corner of the tank body 11 to prevent the formation of "dead zones" of liquid flow in these areas. In these dead zones, the cationic colloid may not be able to fully contact with the adsorption medium due to lack of flow, affecting the adsorption effect. The stirring part 2 can push the liquid from the central area to the edge, and then bring it back to the center from the edge, so that the liquid in the entire adsorption tank can participate in the stirring process, ensuring the uniformity of the cationic colloid in the solution.

[0070] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements will not cause the essence of the corresponding technical solutions to deviate from the protection scope of the technical solutions of the embodiments of the present invention.

Claims

1. An ultrapure water recycling system based on an ion adsorption structure, characterized in that: include: A placement portion (1), the placement portion (1) comprising a tank body (11), the bottom of the tank body (11) being fixedly connected to a support frame (12); A stirring portion (2), wherein the stirring portion (2) comprises a connecting shaft (21), the outer end of the connecting shaft (21) being rotatably connected to the inside of the tank body (11), the outer circumferential surface of the connecting shaft (21) being fixedly connected to an arc plate (22), the arc plates (22) being provided in two groups and being distributed in an array around the connecting shaft (21), each group of the arc plates (22) being provided with a plurality of arc plates, one arc plate (22) close to the outer end of the tank body (11) being designed with a curved surface, and the arc plate (22) being fitted with the inner wall end of the tank body (11), a slideway (221) being provided between the connecting shaft (21) and the arc plate (22), and one end of the slideway (221) passing through the connecting shaft (21) and extending to the outside; The slideway (221) is slidably connected to a partition mechanism (23) for separating the interior of the tank body (11), and the connecting shaft (21) is provided with a driving member (232) via a cavity opened therein, and the cavity is connected to the interior of the slideway (221).

2. The ultrapure water recycling system based on the ion adsorption structure according to claim 1 is characterized in that: The top of the tank body (11) is fixedly connected to a feed pipe (111), the bottom of the tank body (11) is fixedly connected to a connecting pipe (112), and one end of the connecting pipe (112) away from the tank body (11) is fixedly connected to an RO membrane tank (13).

3. The ultrapure water recycling system based on the ion adsorption structure according to claim 1 is characterized in that: The partition mechanism (23) comprises a sliding plate (231), wherein the sliding plate (231) is slidably connected to the arc-shaped plate (22) via a clamping strip fixed on its outer surface, a tooth groove (2311) is provided on the outer surface of the sliding plate (231), and an elastic member (24) is provided at one end of the arc-shaped plate (22) away from the connecting shaft (21) and fits with the circumferential inner wall of the tank body (11).

4. The ultrapure water recycling system based on the ion adsorption structure according to claim 3 is characterized in that: The driving member (232) comprises a driving seat (2321), the output end of the driving seat (2321) is connected to a gear (2323) via a synchronous belt (2322), the top end of the gear (2323) is fixedly connected to a rotating shaft (2324), the top end of the rotating shaft (2324) extends into the cavity, and the outer surface of the rotating shaft (2324) is fixedly connected to a gear ring (2325) meshing with the tooth groove (2311).

5. The ultrapure water recycling system based on the ion adsorption structure according to claim 3 is characterized in that: The elastic member (24) comprises a connecting block (241), the inner surface of the connecting block (241) is slidably fitted with the outer surface of the arc plate (22), and a corrosion-resistant spring (242) connected to the outer side of the arc plate (22) is provided on one side of the connecting block (241) close to the connecting shaft (21).

6. The ultrapure water recycling system based on the ion adsorption structure according to claim 5 is characterized in that: The side of the connection block (241) away from the corrosion-resistant spring (242) adopts a curved surface design, and the side of the connection block (241) away from the corrosion-resistant spring (242) is fixedly connected with corrosion-resistant rubber that fits tightly with the inner wall of the tank body (11).

7. The ultrapure water recycling system based on the ion adsorption structure according to claim 6 is characterized in that: A sealing plate (233) that fits the outer surface of the connecting shaft (21) is fixedly connected to the side of the sliding plate (231) away from the connecting block (241).

8. The ultrapure water recycling system based on the ion adsorption structure according to claim 3 is characterized in that: The bottom of the tank body (11) is fixedly connected to a backwash water inlet pipe, and the top of the tank body (11) is fixedly connected to a backwash water outlet pipe.

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