A plasma irradiation sample stage in a vacuum environment

Abstract

This invention discloses a plasma irradiation sample stage in a vacuum environment, belonging to the field of fusion reactor material irradiation and testing. It includes a sample holder, a rotating mechanism, a sample clamping device mounted on the sample holder, and a rotating mechanism that drives the sample holder to rotate, thereby changing the attitude of the sample mounted thereon. The sample holder has a water box with a notched partition inside. Two thermocouples are mounted on both sides of the water box. The thermocouples and the sample are in contact through an insulating plate and graphite paper placed between them, achieving insulated clamping of the sample without affecting the cooling of the sample by the water box. The clamping device faces the plasma, is at the same potential as the sample, and is insulated from the sample holder. It is also larger than the sample holder and is fixed to the water box by molybdenum screws and silicon carbide insulating rings. Simultaneously, a bias voltage is applied to the sample through a plasma baffle via a bias column. This invention can simultaneously achieve the functions required for material samples during plasma irradiation, including sample insulation, cooling, temperature measurement, bias voltage application, and attitude adjustment.

Description

Technical Field

[0001] This invention relates to the field of irradiation and testing of fusion reactor materials, and particularly to a plasma irradiation sample stage in a vacuum environment. Background Technology

[0002] The interaction between plasma and materials is a crucial topic in fusion research. To investigate the mechanism of this interaction, scientists have conducted extensive materials research and testing in the laboratory, carrying out numerous plasma irradiation effect experiments on the first wall materials directly facing the plasma, with the aim of developing materials that can withstand the plasma environment.

[0003] In the study of plasma-material interaction in fusion reactors, a large amount of heat is directly applied to the material sample when the plasma irradiates it. When the plasma hits the sample, charged particles accumulate charge on the sample surface and form a potential suspension. After accumulating charge on the sample surface, the charge will be released periodically. The release of charge mainly affects the plasma distribution near the sheath and causes plasma flickering instability. It is necessary to remove these accumulated charges to avoid affecting the interaction between the plasma and the material sample. This requires the material sample to be fully cooled and insulated from the clamping and fixing structure, and to be equipped with a separate negative bias voltage application device.

[0004] Meanwhile, after irradiation, the material sample needs to be inspected on its surface. Traditional laboratory designs typically default to offline inspection, meaning the sample is removed and inspected immediately after irradiation, significantly reducing experimental efficiency. Furthermore, the inspection path of sample inspection equipment, such as X-ray diffractometers or infrared cameras, must differ from the plasma irradiation path, requiring adjustments to the sample's orientation to accommodate the equipment's requirements. Currently, no inspection equipment meets these requirements. Summary of the Invention

[0005] To overcome the shortcomings of existing technologies, this invention provides a plasma irradiation sample stage in a vacuum environment, which can simultaneously perform functions such as sample insulation, cooling, temperature measurement, bias voltage application, and attitude adjustment required for material samples during plasma irradiation, thereby solving the problems mentioned in the background art.

[0006] The technical solution of the present invention is: a plasma irradiation sample stage in a vacuum environment, comprising a motor, a bias system, a vacuum flange, a rotating mechanism, inlet and outlet water pipes, a temperature measuring system, a clamping device, and a sample holder;

[0007] The sample holder is mounted and fixed to the rotating mechanism. The motor transmits motion to the sample holder through the rotating mechanism, causing the sample holder to swing left and right. The clamping device is fixed to the sample holder. The sample holder has a water box with inlet and outlet water pipes. The clamping device is fixed to the screw mounting post inside the water box with screws. An insulating plate is provided between the sample and the sample holder. The clamping device achieves insulating clamping and fixing of the sample. A temperature measuring system is set inside the sample holder to monitor the sample temperature in real time. A biasing system applies voltage to the sample through a biasing post set on the clamping device. A vacuum flange is installed on the vacuum chamber for vacuum sealing and fixing of the rotating mechanism.

[0008] Compared with the prior art, the present invention has the following technical advantages:

[0009] By adopting the above technical solution, the needs of online sample detection can be met by directly changing the sample posture in the vacuum chamber, which greatly improves efficiency. At the same time, the design of this sample stage meets the functions required for material samples during plasma irradiation, such as sample insulation, cooling, temperature measurement, bias voltage application, and posture adjustment. Attached Figure Description

[0010] The specific embodiments of the present invention will now be described in detail with reference to the accompanying drawings:

[0011] Figure 1 This is a schematic diagram of a plasma irradiation sample stage structure in a vacuum environment according to an embodiment of this application.

[0012] Figure 2 This is an exploded view showing the plasma end of a plasma irradiation sample stage in a vacuum environment, according to an embodiment of this application.

[0013] Figure 3 This is a water box diagram of a plasma irradiation sample stage in a vacuum environment, according to an embodiment of this application.

[0014] Figure 4 This is a top view of a plasma irradiation sample stage in a vacuum environment, according to an embodiment of this application.

[0015] Figure 5 for Figure 4 AA section view;

[0016] Figure 6 for Figure 5 Detailed image of Part B.

[0017] In the diagram: 1. Motor; 2. Bias system; 21. Electrode flange; 22. Pressurization cable; 23. Bias column; 3. Vacuum flange; 4. Rotating mechanism; 41. Vacuum bearing; 42. Rotating shaft; 43. Bearing housing; 44. Gear pair; 45. Surface bearing; 46. Support rod; 47. Drive shaft; 5. Inlet / outlet water pipes; 51. Straight pipe; 52. Corrugated pipe; 53. Elbow; 6. Temperature measuring system; 61. Thermocouple flange; 62. Thermocouple 63. Wire; 7. Thermocouple; 8. Clamping device; 9. Plasma baffle; 10. Insulating ring; 11. Molybdenum screw; 12. Insulating plate; 13. Graphite paper; 14. Sample holder; 15. Water box cover; 16. Water box; 17. Thermocouple mounting hole; 18. Notch; 19. Partition; 10. Inlet / outlet water hole; 10. Stud hole; 11. Space 1; 12. Space 2; 13. Thermocouple mounting notch; 14. Screw mounting post. Detailed Implementation

[0018] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention. Furthermore, the technical features involved in the various embodiments of this invention described below can be combined with each other as long as they do not conflict with each other. To achieve the above objectives, this invention adopts the following technical solution.

[0019] Please refer to Figure 1 In this embodiment of the invention, a plasma irradiation sample stage in a vacuum environment includes a motor 1, a bias system 2, a vacuum flange 3, a rotating mechanism 4, an inlet and outlet water pipe 5, a temperature measuring system 6, a clamping device 7, and a sample holder 8.

[0020] In this embodiment, the motor 1 rotates and transmits the motion to the sample holder 8 through the rotating mechanism 4, causing the sample holder 8 to swing left and right. The clamping device 7 fixed to the sample holder 8 and the sample swing together, realizing the left and right swing of the sample. At the same time, the temperature measuring system 6 set inside the sample holder 8 monitors the sample temperature in real time.

[0021] In this embodiment, as Figure 2 As shown, the inlet and outlet water pipes 5 consist of a straight pipe 51, a corrugated pipe 52, and an elbow 53. All of these components are made of stainless steel. When the motor 1 rotates and drives the sample holder 8 to swing, the corrugated pipe 52 absorbs the displacement change of the water pipe during the swing.

[0022] In this embodiment, as Figure 2 and Figure 3 As shown, the sample holder 8 is formed by sealing and welding together a water box cover 81, a water box 82 and screw mounting posts 83. The screw mounting posts 83 are evenly distributed inside the water box 82, pass through the screw holes 825 and are immersed in the water box 82.

[0023] In this embodiment, as Figure 2 As shown, the clamping device 7 consists of a plasma baffle 71, an insulating ring 72, a molybdenum screw 73, and an insulating plate 74. The insulating ring 72 is located in the stepped hole of the plasma baffle 71. The molybdenum screw 73 passes through the insulating ring 72 and is installed on the screw mounting post 83 inside the water box 82 through the stepped hole on the plasma baffle 71 and the evenly distributed through holes on the insulating plate 74. During operation, the sample is clamped and fixed to the insulating plate 74 on the water box 82 by the molybdenum screw 73. The insulating plate 74 is made of silicon carbide or sapphire with high thermal conductivity. At the same time, a layer of soft graphite paper 75 is laid between the water box 82 and the insulating plate 74 to improve the contact between the circular cross-section thermocouple 63 and the graphite paper 75, thereby more accurately measuring the temperature of the sample. The height of the molybdenum screw 73 is the same as that of the plasma baffle 71, and it is not allowed to be higher or lower than the plasma baffle 71. The molybdenum screw 73 is insulated from the plasma baffle 71 by the insulating ring 72.

[0024] Vacuum flange 3 is installed on the vacuum chamber for vacuum sealing and fixing of rotating mechanism 4.

[0025] In this embodiment, as Figure 3 As shown, the water box 82 has a hollow structure, and a partition 823 inside the hollow structure divides the water box 82 into two spaces: space one 826 and space two 827. The side of the water box 82 has inlet and outlet holes 824. The elbow 53 is installed and sealed with the water box 82 through the inlet and outlet holes 824 to form a whole. Cooling water flows into space one 826 from the inlet and outlet holes 824, and then flows through the notch 822. There are three notches 822 on the partition 823 here, which makes the water in the water box 82 form a vortex, which fully cools the water box 82, thereby fully cooling the sample that is in contact with the water box 82.

[0026] In this embodiment, as Figure 3 As shown, the thermocouple mounting hole 821 is located on the back of the partition plate 823. A portion of the thermocouple installed in the thermocouple mounting hole 821 is exposed from the thermocouple mounting notch 828, allowing the thermocouple to directly contact the soft graphite paper 75, thus increasing the heat conduction area.

[0027] In this embodiment, as Figure 4 As shown, the bias column 23 is mounted on the plasma baffle 71 and is at the same potential as the plasma baffle 71. The bias column 23 is connected to the electrode on the electrode flange 21 located outside the vacuum chamber via a pressurization cable 22. The pressurization cable 22 has an insulating layer on its outer surface to insulate it from surrounding components. During operation, the power supply is connected to the electrode on the electrode flange 21 to directly apply bias voltage to the plasma baffle 71 and the sample.

[0028] In this embodiment, as Figure 5As shown, Figure 5 for Figure 4 In the AA cross-sectional view, thermocouple 63 is mounted on water box 82. Two thermocouples are symmetrically mounted and connected to thermocouple flange 61 located outside the vacuum chamber via thermocouple wire 62. The thermocouple wire 62 has an insulating layer on its outer surface to insulate it from surrounding components. During operation, thermocouple 63 conducts heat to the sample through graphite paper 75 and insulating plate 74, thereby measuring the temperature of the sample.

[0029] In this embodiment, as Figure 5 and Figure 6 As shown, Figure 6 for Figure 5 The detailed diagram of Part B shows that the output end of motor 1 is connected to drive shaft 47. Two bevel gears of gear pair 44 are respectively installed on drive shaft 47 and rotating shaft 42. Two vacuum bearing shafts 41 are installed at both ends of rotating shaft 42. There are two screw holes in the middle of rotating shaft 42 for fixed connection with sample holder 8. The outer ring of vacuum bearing 41 is installed on bearing housing 43, and bearing housing 43 and support rod 46 are fixedly connected to form a whole. Two sets of flat bearings 45 are respectively provided at both ends of drive shaft 47. During operation, motor 1 transmits motion to the vacuum chamber through drive shaft 47, and drives rotating shaft 42 to rotate back and forth through gear pair 44, thereby driving sample holder 8, which is fixedly connected to rotating shaft 42, to rotate back and forth, so as to change the posture of the sample installed on sample holder 8, and meet the requirement of online sample posture change during experiment.

[0030] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention. The scope of the invention is defined by the appended claims and their equivalents, all of which should be included within the scope of protection of the invention.

Claims

1. A plasma irradiation sample stage in a vacuum environment, characterized in that, Includes a motor, bias system, vacuum flange, rotating mechanism, inlet and outlet water pipes, temperature measuring system, clamping device, and sample holder; The sample holder is mounted and fixed to the rotating mechanism. The motor transmits motion to the sample holder through the rotating mechanism, causing the sample holder to swing left and right. The clamping device is fixed to the sample holder. The sample holder has a water box with inlet and outlet water pipes. The clamping device is fixed to the screw mounting post inside the water box with screws. An insulating plate is provided between the sample and the sample holder. The clamping device achieves insulating clamping and fixing of the sample. A temperature measuring system is set inside the sample holder to monitor the sample temperature in real time. A biasing system applies voltage to the sample through a biasing post set on the clamping device. A vacuum flange is installed on the vacuum chamber for vacuum sealing and fixing of the rotating mechanism. The sample holder is sealed and welded together by a water box cover, a water box and screw mounting posts. The screw mounting posts are evenly distributed inside the water box, pass through the screw holes and are immersed in the water box. The clamping device consists of a plasma baffle, an insulating ring, a molybdenum screw, and an insulating plate. The sample is clamped and fixed to the screw mounting post inside the water box by the molybdenum screw and the insulating ring through the stepped holes on the plasma baffle and through the uniformly distributed through holes on the insulating plate. A layer of graphite paper is laid between the water box and the insulating plate. The water box has a hollow structure, and the hollow structure is equipped with a partition to divide the water box into two spaces. The side of the water box has water inlet and outlet holes. The elbow is installed with the water box through the water inlet and outlet holes and is sealed and welded to form a whole. Cooling water flows into space one from the water inlet and outlet holes, and then flows through the notch into space two to cool the water box and the sample that is in contact with the water box.

2. The plasma irradiation sample stage in a vacuum environment according to claim 1, characterized in that, The inlet and outlet water pipes consist of straight pipes, corrugated pipes, and elbows, all of which are made of stainless steel.

3. The plasma irradiation sample stage in a vacuum environment according to claim 1, characterized in that, The thermocouple is installed on the water box. The thermocouple mounting hole is located on the back of the partition and has a small notch so that the thermocouple can directly contact the graphite paper.

4. The plasma irradiation sample stage in a vacuum environment according to claim 1, characterized in that, The bias system includes bias columns, which are mounted on the plasma baffle and are at the same potential as the plasma baffle. The bias columns are connected to electrodes on the electrode flange via pressurization cables.

5. The plasma irradiation sample stage in a vacuum environment according to claim 3, characterized in that, Two thermocouples are installed symmetrically and connected by thermocouple wires and thermocouple flanges. The thermocouples conduct heat to the sample through graphite paper and an insulating plate, thereby measuring the temperature on the sample.

6. The plasma irradiation sample stage in a vacuum environment according to claim 1, characterized in that, The partition has three notches.

7. The plasma irradiation sample stage in a vacuum environment according to claim 1, characterized in that, The height of the molybdenum screw is the same as that of the plasma baffle.

8. The plasma irradiation sample stage in a vacuum environment according to claim 1, characterized in that, The insulating ring is made of silicon carbide.

9. The plasma irradiation sample stage in a vacuum environment according to claim 1, characterized in that, The insulating board is made of silicon carbide or sapphire material.

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