Liquid guided laser processing device and method based on double-beam phase adjustment

Abstract

The invention discloses a liquid guide laser processing device and method based on double-beam phase adjustment, belongs to the technical field of laser processing, and aims to reduce the width of a laser beam. The device comprises a laser light source, a first polarization state modulator, a beam splitter, a spatial light modulator, a second polarization state modulator, a polarization beam combiner and a coupler. A laser light source emits linearly polarized light, the linearly polarized light is converted into circularly polarized light through a first polarization state modulator, then the circularly polarized light is separated into first linearly polarized light and second linearly polarized light through a light beam separator, and on a second linearly polarized light transmission light path, a spatial light modulator adjusts the marginal region phase of the circularly polarized light to enable the marginal region phase to differ from the marginal region phase of the first linearly polarized light by a half cycle. And the second polarization state modulator adjusts the polarization direction to be the same as that of the first linearly polarized light, the polarization beam combiner combines the two beams of light, the coupler couples the combined laser beams to the liquid jet flow, and the liquid jet flow acts on the workpiece to be machined, so that optimization of the diameter of the laser beams is achieved.

Description

Technical Field

[0001] This application belongs to the technical field of laser processing, and particularly relates to a liquid-guided laser processing device and method based on dual-beam phase adjustment. Background Art

[0002] Laser processing, with its significant advantages such as high precision, non-contact, and small heat-affected zone, is widely used in modern manufacturing. From the fine micro-processing of electronic devices to the complex forming of aerospace components, laser processing technology continuously promotes the development of manufacturing towards high precision and high efficiency. However, with the continuous increase in the requirements for processing precision and quality in various industries, traditional laser processing technology exposes many limitations when dealing with the processing of materials with high hardness, high brittleness, and complex shapes.

[0003] During the traditional laser processing process, due to the highly concentrated laser energy, it is easy to generate too high a temperature gradient in the processing area, resulting in problems such as thermal stress damage, micro-cracks, and increased surface roughness of the material. Especially for some materials that are sensitive to heat, such as optical crystals, semiconductor materials, etc., these thermal damage defects seriously affect the product performance and service life.

[0004] To overcome the above problems, the liquid-guided laser processing technology has emerged. This technology couples the laser beam into the liquid jet, and uses the conduction and diffusion of the laser energy by the liquid to effectively reduce the temperature peak in the processing area and reduce thermal stress damage. At the same time, the liquid jet can wash away the debris generated during the processing, improving the processing surface quality. However, the existing liquid-guided laser processing devices have deficiencies in beam width regulation, and the emitted laser beam width is relatively large, unable to meet user requirements. Summary of the Invention

[0005] In view of this, this application provides a liquid-guided laser processing device and method based on dual-beam phase adjustment, and the main purpose is to reduce the laser beam width.

[0006] To achieve the above object, this application mainly provides the following technical solutions:

[0007] On the one hand, this application provides a liquid-guided laser processing device based on dual-beam phase adjustment, including:

[0008] A laser light source, a first polarization state modulator, a beam splitter, a second polarization state modulator, a spatial light modulator, a polarization beam combiner, and a coupler;

[0009] The first polarization state modulator is located on the outgoing light path of the laser light source and is used to convert the linearly polarized light emitted by the laser light source into circularly polarized light; the beam splitter is arranged on the downstream side of the first polarization state modulator along the propagation direction of the circularly polarized light and is used to split the circularly polarized light into a first linearly polarized light and a second linearly polarized light; the second polarization state modulator and the spatial light modulator are located on the transmission light path of the second linearly polarized light and between the beam splitter and the polarization beam combiner. The second polarization state modulator is used to adjust the polarization direction of the second linearly polarized light to be the same as that of the first linearly polarized light, and the spatial light modulator is used to adjust the phase of the edge region of the second linearly polarized light to be half a cycle different from the phase of the edge region of the first linearly polarized light; the polarization beam combiner is used to receive and combine the first linearly polarized light output by the beam splitter and the second linearly polarized light modulated by the second polarization state modulator and the spatial light modulator; the coupler is located on the outgoing light path of the polarization beam combiner, and the coupler is used to couple the laser beam combined by the polarization beam combiner into the liquid jet, and the liquid jet acts on the workpiece to be processed.

[0010] Optionally, the liquid-guided laser processing device based on dual-beam phase adjustment further includes:

[0011] A beam pointing adjustment mirror group;

[0012] The beam pointing adjustment mirror group at least includes a first mirror, a second mirror, a third mirror and a fourth mirror;

[0013] The first mirror and the second mirror are located between the first polarization state modulator and the beam splitter;

[0014] The third mirror is located on the transmission light path of the first linearly polarized light and between the beam splitter and the polarization beam combiner;

[0015] The fourth mirror is located on the transmission light path of the second linearly polarized light and between the spatial light modulator and the polarization beam combiner.

[0016] Optionally, the liquid-guided laser processing device based on dual-beam phase adjustment further includes:

[0017] A condenser lens group;

[0018] The condenser lens group at least includes a first condenser lens;

[0019] The first condenser lens is located between the polarization beam combiner and the coupler.

[0020] Optionally, the liquid-guided laser processing device based on dual-beam phase adjustment further includes:

[0021] Liquid supply system;

[0022] A jet hole is formed at the bottom of the coupler, and a coupling cavity is provided in the coupler. The coupling cavity is respectively communicated with the jet hole and the liquid supply system. The liquid supply system is used to transport a high-pressure liquid medium into the coupling cavity, and the high-pressure liquid medium is configured to form the liquid jet through the jet hole.

[0023] Optionally, the liquid-guided laser processing device based on dual-beam phase adjustment further includes:

[0024] Heat sink;

[0025] The polarization beam combiner has a main output surface and a side output surface. The main output surface faces the coupler, and the side output surface faces the heat sink.

[0026] Optionally, the liquid-guided laser processing device based on dual-beam phase adjustment further includes:

[0027] Image acquisition device;

[0028] The image acquisition device is located on the side of the coupler away from the workpiece to be processed, and the detection end of the image acquisition module faces the coupler.

[0029] Optionally, the liquid-guided laser processing device based on dual-beam phase adjustment further includes:

[0030] Coupling adjustment mechanism;

[0031] The coupling adjustment mechanism at least includes a first motion component, a second motion component and a third motion component;

[0032] The first motion component is connected to the spatial light modulator; the second motion component is connected to the fourth reflector; the third motion component is connected to the coupler.

[0033] On the other hand, the present application provides a liquid-guided laser processing method based on dual-beam phase adjustment for the liquid-guided laser processing device described in any one of the above. The method includes:

[0034] Detect the spot center position of the first linearly polarized light at the bottom of the coupler;

[0035] Detect the spot center position of the second linearly polarized light at the bottom of the coupler;

[0036] Adjust the optical path to make the spot center of the first linearly polarized light at the bottom of the coupler coincide with the spot center of the second linearly polarized light;

[0037] Adjust the position of the coupler so that the center of the jet hole at the bottom of the coupler, the center of the spot of the first linearly polarized light, and the center of the spot of the second linearly polarized light coincide.

[0038] Optionally, before detecting the position of the center of the spot of the first linearly polarized light at the bottom of the coupler, the method includes:

[0039] Replace the first polarization state modulator with a third polarization state modulator;

[0040] Adjust the third polarization state modulator so that the third polarization state modulator can convert the linearly polarized light emitted by the laser light source into the first linearly polarized light;

[0041] Wherein, the beam splitter can reflect the first linearly polarized light.

[0042] Optionally, before detecting the position of the center of the spot of the second linearly polarized light at the bottom of the coupler, the method includes:

[0043] Adjust the third polarization state modulator so that the third polarization state modulator can convert the linearly polarized light emitted by the laser light source into the second linearly polarized light;

[0044] Wherein, the second linearly polarized light can pass through the beam splitter.

[0045] By means of the above technical solutions, the present application has at least the following beneficial effects:

[0046] In the embodiments of the present application, the liquid-guided laser processing device and method based on dual-beam phase adjustment, by setting components such as a first polarization state modulator, a beam splitter, a second polarization state modulator, a spatial light modulator, and a polarization beam combiner, first convert linearly polarized light into circularly polarized light, then separate the circularly polarized light into the first linearly polarized light and the second linearly polarized light, and then adjust the polarization direction of the second linearly polarized light through the second polarization state modulator, and adjust the phase of the edge region of the second linearly polarized light to be half a cycle different from the phase of the edge region of the first linearly polarized light through the spatial light modulator. Finally, the first linearly polarized light and the second linearly polarized light are combined through the polarization beam combiner, realizing the regulation of the laser beam width. Specifically, when the first linearly polarized light and the second linearly polarized light are combined in the polarization beam combiner, since the phase of the edge region of the first linearly polarized light is half a cycle different from the phase of the edge region of the second linearly polarized light, an interference phenomenon will occur when the first linearly polarized light and the second linearly polarized light meet. During the interference process, the wave peaks and wave valleys of the edge regions of the first linearly polarized light and the second linearly polarized light are superimposed and cancelled each other, forming a narrower laser beam. Description of the Drawings

[0047] Figure 1Schematic diagram of a liquid-guided laser processing device based on dual-beam phase adjustment according to an alternative embodiment of the present application;

[0048] Figure 2 Spot energy distribution diagram without phase regulation;

[0049] Figure 3 For application Figure 1 Spot energy distribution diagram formed after phase regulation using the device shown;

[0050] Figure 4 For forming Figure 3 Schematic diagram of the principle for the spot energy distribution diagram shown;

[0051] Figure 5 For application Figure 1 Another spot energy distribution diagram formed after phase regulation using the device shown;

[0052] Figure 6 Flowchart of a liquid-guided laser processing method based on dual-beam phase adjustment according to an alternative embodiment of the present application.

[0053] Reference numerals are represented as:

[0054] 1. Laser light source; 2. First polarization state modulator; 3. Beam splitter; 31. First linearly polarized light; 32. Second linearly polarized light; 4. Second polarization state modulator; 5. Spatial light modulator; 6. Polarization beam combiner; 7. Coupler; 8. Liquid jet; 9. Workpiece to be processed; 10. First reflector; 11. Second reflector; 12. Third reflector; 13. Fourth reflector; 14. First condenser lens; 15. Liquid supply system; 16. Heat sink block; 17. Image acquisition device. Detailed implementation manners

[0055] In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present application.

[0056] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of this application, "a plurality of" means two or more unless otherwise specifically defined.

[0057] In this application, unless otherwise clearly defined and limited, terms such as "installed", "connected", "coupled", "fixed", etc. shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0058] The preferred embodiments of this application will be described below with reference to the accompanying drawings. It should be understood that the preferred embodiments described herein are only for the purpose of illustrating and explaining this application and are not used to limit this application.

[0059] Referring to Figures 1 to 5 As shown, according to an embodiment of this application, a liquid-guided laser processing device based on dual-beam phase adjustment is provided, including: a laser light source 1, a first polarization state modulator 2, a beam splitter 3, a second polarization state modulator 4, a spatial light modulator 5, a polarization beam combiner 6, and a coupler 7; the first polarization state modulator 2 is located on the outgoing light path of the laser light source 1 and is used to convert the linearly polarized light emitted by the laser light source 1 into circularly polarized light; the beam splitter 3 is arranged downstream of the first polarization state modulator 2 along the propagation direction of the circularly polarized light and is used to separate the circularly polarized light into a first linearly polarized light 31 and a second linearly polarized light 32; the second polarization state modulator 4 and the spatial light modulator 5 are located on the transmission light path of the second linearly polarized light 32 and between the beam splitter 3 and the polarization beam combiner 6. The second polarization state modulator 4 is used to adjust the polarization direction of the second linearly polarized light 32 to be the same as that of the first linearly polarized light 31, and the spatial light modulator 5 is used to adjust the phase of the edge region of the second linearly polarized light 32 to be half a cycle different from the phase of the edge region of the first linearly polarized light 31; the polarization beam combiner 6 is used to receive and combine the first linearly polarized light 31 output by the beam splitter 3 and the second linearly polarized light 32 modulated by the second polarization state modulator 4 and the spatial light modulator 5; the coupler 7 is located on the outgoing light path of the polarization beam combiner 6, and the coupler 7 is used to couple the laser beam combined by the polarization beam combiner 6 into the liquid jet 8, and the liquid jet 8 acts on the workpiece 9 to be processed.

[0060] In this embodiment, by arranging components such as a first polarization state modulator 2, a beam splitter 3, a second polarization state modulator 4, a spatial light modulator 5, and a polarization beam combiner 6, the linearly polarized light is first converted into circularly polarized light, and then the circularly polarized light is separated into a first linearly polarized light 31 and a second linearly polarized light 32. After that, the polarization direction of the second linearly polarized light 32 is adjusted by the second polarization state modulator 4, and the phase of the edge region of the second linearly polarized light 32 is adjusted by the spatial light modulator 5 to be half a cycle different from the phase of the edge region of the first linearly polarized light 31. Finally, the first linearly polarized light 31 and the second linearly polarized light 32 are combined by the polarization beam combiner 6, realizing the regulation of the laser beam width. Specifically, when the first linearly polarized light 31 and the second linearly polarized light 32 are combined in the polarization beam combiner 6, since the phase of the edge region of the first linearly polarized light 31 is half a cycle different from the phase of the edge region of the second linearly polarized light 32, an interference phenomenon occurs when the first linearly polarized light 31 and the second linearly polarized light 32 meet. During the interference process, the peaks and valleys of the edge regions of the first linearly polarized light 31 and the second linearly polarized light 32 are superimposed and cancelled each other, forming a narrower laser beam.

[0061] Among them, the laser light source 1 can be a laser, and the laser can emit horizontally polarized light or vertically polarized light with a wavelength in the range of 400 nm to 1200 nm, providing the initial laser energy for the entire processing device.

[0062] Among them, the first polarization state modulator 2 can be a quarter-wave plate, and the quarter-wave plate can modulate the electric field vector of the linearly polarized light (such as horizontally polarized light or vertically polarized light) emitted by the laser light source 1, causing the linearly polarized light to rotate in a plane perpendicular to the propagation direction to form circularly polarized light.

[0063] Specifically, in an actual application scenario, the fast axis direction of the quarter-wave plate can be adjusted to be 45° with respect to the polarization direction of the horizontally polarized light or vertically polarized light emitted by the laser, so as to convert the horizontally polarized light or vertically polarized light emitted by the laser into circularly polarized light. After that, the formed circularly polarized light will reach the beam splitter 3. The beam splitter 3 can separate the circularly polarized light into two different polarized lights, namely the first linearly polarized light 31 and the second linearly polarized light 32. In this way, the purpose of dual-beam output is successfully achieved, providing a basis for further adjusting the polarization direction and phase of these two beams of light to realize the regulation of the laser beam width.

[0064] Among them, the beam splitter 3 can be a polarization beam splitter, and the polarization beam splitter can utilize its selective action on light with different polarization states to separate the circularly polarized light into the first linearly polarized light 31 and the second linearly polarized light 32 with different polarization directions, which is equivalent to splitting a beam of light into two beams of light with specific polarization characteristics.

[0065] Specifically, the polarization directions of the first linearly polarized light 31 and the second linearly polarized light 32 are perpendicular to each other, and the propagation directions of the first linearly polarized light 31 and the second linearly polarized light 32 are also perpendicular to each other. Thus, the polarization directions and phases of the first linearly polarized light 31 and the second linearly polarized light 32 can be adjusted separately subsequently, so that the combined first linearly polarized light 31 and second linearly polarized light 32 achieve a laser beam that meets the user's requirements. In this embodiment, the first linearly polarized light 31 can directly enter the polarization beam combiner 6, and only the polarization direction and phase of the second linearly polarized light 32 are adjusted on the propagation path before the second linearly polarized light 32 enters the polarization beam combiner 6.

[0066] Among them, a second polarization state modulator 4 and a spatial light modulator 5 are provided on the propagation path before the second linearly polarized light 32 enters the polarization beam combiner 6. The second polarization state modulator 4 is used to adjust the polarization direction of the second linearly polarized light 32 so that the polarization direction of the second linearly polarized light 32 is the same as that of the first linearly polarized light 31, and the spatial light modulator 5 is used to adjust the phase of the edge region of the second linearly polarized light 32 so that the phase of the edge region of the second linearly polarized light 32 is half a cycle different from the phase of the edge region of the first linearly polarized light 31.

[0067] Specifically, the second polarization state modulator 4 can be a half-wave plate. When the second linearly polarized light 32 is incident on the half-wave plate, due to the optical path delay effect of the half-wave plate on light with different polarization directions, the polarization direction of the light will be rotated. According to the polarization theory of light, the half-wave plate will rotate the polarization direction of the linearly polarized light passing through it by an angle twice that of the angle between its fast axis and the polarization direction of the incident light. That is to say, in this embodiment, by adjusting the direction of the fast axis of the half-wave plate, the polarization direction of the second linearly polarized light 32 can be accurately adjusted to be the same as the polarization direction of the first linearly polarized light 31, providing a necessary condition for the effective combination of the first linearly polarized light 31 and the second linearly polarized light 32 in the polarization beam combiner 6. The spatial light modulator 5 can be a liquid crystal reflective spatial light modulator 5. The liquid crystal reflective spatial light modulator 5 can be used for laser beams with wavelengths in the range of 400 nm to 1100 nm. Its liquid crystal pixel pitch is less than 20 μm, the liquid crystal area size is greater than 10 mm × 10 mm, and the adjustable phase range is 0 to 2π. When the second linearly polarized light 32 is incident on the liquid crystal reflective spatial light modulator 5, by applying different voltages to the pixel electrodes of the liquid crystal reflective spatial light modulator 5, the orientation of the liquid crystal molecules at each pixel position can be controlled, thereby independently adjusting the phase of the second linearly polarized light 32 passing through this position. For the edge region of the second linearly polarized light 32, a preset voltage distribution pattern can be set so that the phase of this part of the light is half a cycle different from the phase of the edge region of the first linearly polarized light 31. It should be noted that in actual application scenarios, different workpieces to be processed 9 and processing technologies have specific requirements for the shape of the laser beam. For example, for some workpieces that need to process round holes or circular end grooves, the laser beam may need to be adjusted to a circular shape with a small spot size; while for some workpieces that need to process square holes or square end grooves, the beam may need to be adjusted to a rectangular shape or the like. In addition, in addition to controlling the spot shape, the energy distribution of the spot can be adjusted by adjusting the phase delay of each pixel of the spatial light modulator 5, thereby achieving a higher energy density of the liquid jet 8. In this embodiment, the liquid crystal reflective spatial light modulator 5 has the ability to flexibly adjust the shape of the laser beam. Its principle is based on the independent phase control of each liquid crystal pixel. Since the liquid crystal pixel pitch is less than 20 μm and the liquid crystal area size is greater than 10 mm × 10 mm, users can achieve high-density phase modulation in a relatively large area. By applying a voltage distribution pattern that meets the user's needs to the pixel electrodes, the phase of the second linearly polarized light 32 can be accurately controlled at different positions, thereby changing the wavefront shape of the beam. For example, when the user hopes to adjust the laser beam to a circular shape, a specific phase distribution can be set at the corresponding position of the liquid crystal reflective spatial light modulator 5 according to the geometric characteristics of the circle. For pixels at different radii from the center of the circle, the voltage is adjusted to change the orientation of the liquid crystal molecules, thereby causing different phase delays for the light passing through these positions.The light forms a distribution similar to a circular wavefront during propagation. Finally, after passing through the polarization beam combiner 6 and the coupler 7, the laser beam acting on the workpiece 9 to be processed presents a circular shape.

[0068] Among them, on the transmission optical path of the second linearly polarized light 32, a polarization beam combiner 6 is provided on the downstream side of the second polarization state modulator 4 and the spatial light modulator 5. At the same time, the polarization beam combiner 6 is also on the transmission optical path of the first linearly polarized light 31, so that the polarization beam combiner 6 can receive and combine the first linearly polarized light 31 output by the beam splitter 3 and the second linearly polarized light 32 modulated by the second polarization state modulator 4 and the spatial light modulator 5, thereby combining the first linearly polarized light 31 and the second linearly polarized light 32 with the same polarization direction into a single beam of light in space, realizing the superposition and redistribution of light energy.

[0069] Specifically, the polarization beam combiner 6 can be a beam combiner mirror. See Figure 4 As shown, when the first linearly polarized light 31 and the second linearly polarized light 32 are incident on the beam combiner mirror, since the polarization directions of the first linearly polarized light 31 and the second linearly polarized light 32 are the same, they will coincide in space under the action of the beam combiner mirror and propagate in the same direction. At the same time, since the phase of the edge region of the first linearly polarized light 31 differs from the phase of the edge region of the second linearly polarized light 32 by half a cycle, according to the principle of light interference, the two beams of light are superimposed in the meeting region. At the meeting point of the wave crest and the wave trough, the amplitudes of the light cancel each other out, resulting in a decrease in light intensity; while at the meeting point of the wave crest and the wave crest, and the wave trough and the wave trough, the light intensity increases. From the distribution of the first linearly polarized light 31 and the second linearly polarized light 32, the energy of the combined laser beam in this region decreases due to interference cancellation in the edge region, which is equivalent to a narrowing of the width of the laser beam. In the central region, there is no phase difference or the phase difference does not remain at half a cycle between the first linearly polarized light 31 and the second linearly polarized light 32, resulting in an increase in light intensity due to superposition. Here, when the spatial light modulator 5 presets a circular phase distribution pattern for the second linearly polarized light 32, see Figure 3 As shown, the combined laser beam is circular. At this time, in the liquid crystal region of the spatial light modulator 5, according to the geometric characteristics of the circle, for pixels at different radii from the center of the circle, by applying different voltages to the pixel electrodes, the orientation of the liquid crystal molecules is changed, and then different phase delays are generated for the second linearly polarized light 32 passing through these positions. In this way, the wavefront of the second linearly polarized light 32 is adjusted to a circular distribution. After being combined with the first linearly polarized light 31, the overall laser beam presents a circular shape. This circular beam acts on the workpiece 9 to be processed under the guidance of the liquid jet 8, which is suitable for processing parts with circular contour requirements such as circular holes and circular grooves. When the liquid crystal reflective spatial light modulator 5 presets a square phase distribution pattern for the second linearly polarized light 32, see Figure 5As shown, the combined laser beam is square. In this case, the spatial light modulator 5 divides the liquid crystal region into different regions according to the positions of the four sides and four corners of the square for phase regulation. For different pixel positions inside and outside the square edge, by accurately applying voltage, a specific phase change is generated for the second linearly polarized light 32 passing through these positions, so that after it is combined with the first linearly polarized light 31, the wavefront of the beam forms a square distribution, and finally a square laser beam is presented. The square laser beam can be used for cutting the square contour of the workpiece, processing the square area on the surface, etc., and can accurately meet the processing requirements of specific shapes in processing scenarios such as surface treatment. It should be noted that Figure 2 is the spot energy distribution diagram when no phase regulation is performed. In this diagram, the spot energy shows a relatively broad and relatively uniform distribution state. Its beam width is relatively wide, the energy is distributed in a large spatial range, and there is no obvious change in the energy of the edge region due to interference. In contrast, Figure 3 shows the spot energy distribution of the circular laser beam obtained after phase regulation is achieved by this device. From Figure 3 , it can be clearly observed that the energy of the edge region of the circular beam is significantly reduced due to interference, and the energy originally distributed in a relatively wide region converges to the central region, making the beam width significantly narrower. Compared with Figure 2 , Figure 3 , the energy-concentrated region in is more compact, indicating that under the action of phase regulation, a narrower circular laser beam is successfully achieved, effectively improving the energy concentration. This has great advantages for scenarios that require high-precision and small-spot processing, can more accurately control the processing area, and realize the processing of smaller-sized structures. Looking at Figure 5 again, it presents the spot energy distribution of the square laser beam after phase regulation. Compared with Figure 2 , Figure 5 , there is an obvious cancellation effect on the energy of the edge region of the square beam in due to interference. The energy no longer distributes widely as in Figure 3 , but is concentrated inside the square contour, making the beam width in both the horizontal and vertical directions significantly narrower. This narrowed square beam can more efficiently utilize laser energy in applications such as accurately meeting the processing requirements of specific shapes, improving the processing efficiency while ensuring the processing accuracy, greatly expanding the applicability of laser processing in scenarios with different shape requirements, and reflecting the significant advantage of this device in realizing laser beam width regulation based on dual-beam phase adjustment.

[0070] Among them, the laser beam combined by the polarization beam combiner 6 reaches the coupler 7 located on the outgoing optical path of the polarization beam combiner 6 along the propagation direction. The coupler 7 can couple the laser beam combined by the polarization beam combiner 6 into the liquid jet 8, and utilize the characteristics of the liquid jet 8 to transmit the laser beam to the workpiece 9 to be processed, realizing the processing of the workpiece 9 to be processed. The liquid jet 8 plays a role in guiding and transmitting the laser beam here, and may also have auxiliary functions such as cooling and chip removal.

[0071] Specifically, the coupler 7 can be a liquid-core fiber coupler 7. There is a liquid channel inside the liquid-core fiber coupler 7, and this channel is surrounded by an optical material used to guide the laser beam. The laser beam combined by the polarization beam combiner 6 is incident on the input end of the liquid-core fiber coupler 7. The liquid-core fiber coupler 7 can ensure the efficient coupling of the laser beam in the liquid channel, enable the laser beam to maintain good transmission characteristics in the liquid environment, reduce energy loss and laser beam divergence, and stably transmit the laser energy to the surface of the workpiece 9 to be processed.

[0072] In some possible implementation embodiments disclosed in the present application, as shown in Figure 1 the liquid-guided laser processing device based on dual-beam phase adjustment further includes: a beam pointing adjustment mirror group; the beam pointing adjustment mirror group at least includes a first mirror 10, a second mirror 11, a third mirror 12, and a fourth mirror 13; the first mirror 10 and the second mirror 11 are located between the first polarization state modulator 2 and the beam splitter 3; the third mirror 12 is located on the transmission optical path of the first linearly polarized light 31 and is between the beam splitter 3 and the polarization beam combiner 6; the fourth mirror 13 is located on the transmission optical path of the second linearly polarized light 32 and is between the spatial light modulator 5 and the polarization beam combiner 6.

[0073] In this embodiment, by setting the beam pointing adjustment mirror group, the transmission direction of the laser beam can be flexibly changed, enabling the laser beam to be transmitted along a predetermined route, and ensuring the compactness and rationality of the entire processing device.

[0074] Among them, the first mirror 10 and the second mirror 11 are used to adjust the propagation direction of the circularly polarized light to be perpendicular to the incident surface of the beam splitter 3.

[0075] Specifically, the first mirror 10 and the second mirror 11 are arranged parallel to each other, and both are kept parallel to the reflection surface of the beam splitter 3.

[0076] Among them, the third mirror 12 is used to reflect the first linearly polarized light 31 to the polarization beam combiner 6.

[0077] Specifically, the third mirror 12 is also kept parallel to the reflection surface of the beam splitter 3, and the third mirror 12 is also parallel to the reflection surface of the polarization beam combiner 6.

[0078] Among them, the fourth reflector 13 is used to reflect the second linearly polarized light 32 modulated by the second polarization state modulator 4 and the spatial light modulator 5 to the polarization beam combiner 6.

[0079] Specifically, the fourth reflector 13 is located above the polarization beam combiner 6, and the propagation directions of the first linearly polarized light 31 and the second linearly polarized light 32 are perpendicular to each other before entering the polarization beam combiner 6.

[0080] In some possible embodiments disclosed in the present application, as shown in Figure 1 the liquid-guided laser processing device based on dual-beam phase adjustment further includes: a condenser lens group; the condenser lens group includes at least a first condenser lens 14; the first condenser lens 14 is located between the polarization beam combiner 6 and the coupler 7.

[0081] In this embodiment, by providing the first condenser lens 14, the laser beam synthesized by the polarization beam combiner 6 can be focused to improve the energy density of the laser beam.

[0082] Among them, the first condenser lens 14 can be a spherical or aspherical lens made of a transparent material such as optical glass, and can use the principle of light refraction to converge the laser beam synthesized by the polarization beam combiner 6 to improve the energy density of the laser beam.

[0083] Specifically, the laser beam emitted from the polarization beam combiner 6 is incident on the first condenser lens 14, and after being refracted by the first condenser lens 14, the laser beam converges towards the central axis direction and then is transmitted to the coupler 7.

[0084] In some possible embodiments disclosed in the present application, as shown in Figure 1 the liquid-guided laser processing device based on dual-beam phase adjustment further includes: a liquid supply system 15; a jet hole is provided at the bottom of the coupler 7, and a coupling cavity is provided in the coupler 7. The coupling cavity is respectively connected to the jet hole and the liquid supply system 15. The liquid supply system 15 is used to transport a high-pressure liquid medium into the coupling cavity, and the high-pressure liquid medium is configured to form a liquid jet 8 by exiting through the jet hole.

[0085] In this embodiment, by providing the liquid supply system 15, the high-pressure liquid medium can be stably transported into the coupling cavity and then form a liquid jet 8 by exiting through the jet hole, ensuring the stability and accuracy of processing.

[0086] Among them, the coupling cavity is used to accommodate the high-pressure liquid medium from the liquid supply system 15 and provide a stable environment for the coupling of the laser beam and the high-pressure liquid medium.

[0087] Among them, the high-pressure liquid medium delivered by the liquid supply system 15 to the coupling cavity can be one or a mixture of pure water, inorganic salt solution, mineral oil, kerosene, glycerol, propylene glycol, polyvinyl alcohol, etc. The flow rate of the high-pressure liquid medium can be 0.05 L / H to 50 L / H, and the pressure of the high-pressure liquid medium can be 2 MPa to 100 MPa.

[0088] Specifically, in this embodiment, the high-pressure liquid medium delivered by the liquid supply system 15 to the coupling cavity is mineral oil. The interface between the liquid jet 8 formed by the mineral oil and the space can totally reflect the laser beam, thereby forming an extremely high instantaneous laser power density and effectively removing the material on the workpiece 9 to be processed.

[0089] Among them, the jet hole communicating with the coupling cavity at the bottom of the coupling cavity is the channel for the high-pressure liquid medium to flow out of the coupler 7, so that the high-pressure liquid medium is ejected through the jet hole. The jet hole can be circular, rectangular, rounded rectangular, etc. When the jet hole is circular, the diameter of the jet hole is 5 μm to 150 μm; when the jet hole is rectangular or rounded rectangular, the width of the jet hole is 5 μm to 150 μm, and the aspect ratio of the length to the width of the jet hole is 1 to 50.

[0090] Specifically, in this embodiment, the jet hole is circular and the diameter of the jet hole is 15 μm. The material at the jet hole at the bottom of the coupling cavity is stainless steel, copper, diamond, sapphire, ruby or non-metallic material, which is used to ensure the stability and uniformity of the liquid jet 8, maintain the consistency of the coupling between the laser beam and the liquid jet 8, and thus ensure the stability of the processing process and the reliability of the processing quality.

[0091] In some possible embodiments disclosed in this application, see Figure 1 As shown, the liquid-guided laser processing device based on double-beam phase adjustment further includes: a heat sink 16; the polarization beam combiner 6 has a main output surface and a side output surface. The main output surface is arranged facing the coupler 7, and the side output surface is arranged facing the heat sink 16.

[0092] In this embodiment, by setting the heat sink 16, the heat dissipated from the side output surface of the polarization beam combiner 6 can be absorbed, playing a role in heat dissipation, protecting the polarization beam combiner 6 and other surrounding optical elements, enabling them to work in a stable temperature environment, and ensuring the optical performance of the entire device.

[0093] Among them, in the actual application scenario, after the first linearly polarized light 31 enters the polarization beam combiner 6, a part of the first linearly polarized light 31 is combined with the second linearly polarized light 32 under the action of the polarization beam combiner 6, and another part of the first linearly polarized light 31 enters the heat sink 16 under the action of the polarization beam combiner 6; similarly, after the second linearly polarized light 32 enters the polarization beam combiner 6, a part of the second linearly polarized light 32 is combined with the first linearly polarized light 31 under the action of the polarization beam combiner 6, and another part of the second linearly polarized light 32 enters the heat sink 16 under the action of the polarization beam combiner 6.

[0094] Specifically, in this embodiment, after the first linearly polarized light 31 and the second linearly polarized light 32 enter the polarization beam combiner 6, 50% of the first linearly polarized light 31 and 50% of the second linearly polarized light 32 enter the heat sink 16 under the action of the polarization beam combiner 6.

[0095] In some possible implementation embodiments disclosed in the present application, as shown in Figure 1 the liquid-guided laser processing device based on dual-beam phase adjustment further includes: an image acquisition device 17; the image acquisition device 17 is located on the side of the coupler 7 away from the workpiece 9 to be processed, and the detection end of the image acquisition module is arranged facing the coupler 7.

[0096] In this embodiment, by setting the image acquisition device 17, it is possible to detect the position information of the spot formed by the laser beam at the bottom of the coupler 7 and the position information of the jet hole at the bottom of the coupler 7, which helps to determine whether the laser beam accurately enters the liquid jet 8 region, provides guidance for the user to adjust the transmission optical path of the laser beam or the position of the coupler 7, and ensures the precise coupling of the laser beam and the jet nozzle.

[0097] Among them, the image acquisition device 17 can be a surveillance camera (CCD), etc.

[0098] Specifically, when there is a deviation (not coincident or not fully coincident) between the spot formed by the laser beam at the bottom of the coupler 7 and the jet hole at the bottom of the coupler 7, the user can finely adjust the transmission optical path of the laser beam or the position of the coupler 7 according to the image fed back by the image acquisition device 17, so that the laser beam can be coupled into the liquid jet 8 at the best angle and position, minimizing the energy loss of the laser beam during the coupling process and ensuring the efficient transmission of laser energy to the workpiece 9 to be processed.

[0099] In some possible implementation embodiments disclosed in the present application, the liquid-guided laser processing device based on dual-beam phase adjustment further includes: a coupling adjustment mechanism (not shown in the figure); the coupling adjustment mechanism at least includes a first motion component, a second motion component, and a third motion component; the first motion component is connected to the spatial light modulator 5; the second motion component is connected to the fourth mirror 13; the third motion component is connected to the coupler 7.

[0100] In this embodiment, by providing a coupling adjustment mechanism, the transmission optical path of the laser beam and the position of the coupler 7 can be adjusted, enabling the laser beam to be coupled into the liquid jet 8 at the optimal angle and position, minimizing the energy loss of the laser beam during the coupling process, and ensuring efficient transmission of the laser energy to the workpiece 9 to be processed.

[0101] Among them, the first motion component, the second motion component, and the third motion component all have at least two degrees of freedom. The at least two degrees of freedom include a translational degree of freedom and a rotational degree of freedom. The translational degree of freedom enables the motion component to perform a linear displacement in a planar or spatial direction, changing the position of the component connected thereto, and the rotational degree of freedom allows the motion component to rotate around a specific axis, thereby adjusting the angle and posture of the connected component.

[0102] Specifically, the first motion component is connected to the spatial light modulator 5. Its translational degree of freedom can move the spatial light modulator 5 in the horizontal or vertical direction to accurately calibrate the incident position of the laser beam; the rotational degree of freedom can enable the spatial light modulator 5 to rotate around an axis, flexibly changing the modulation angle of the laser beam to meet different processing requirements. Similarly, the second motion component is connected to the fourth mirror 13. By relying on the translational and rotational degrees of freedom, the position and angle of the fourth mirror 13 can be accurately controlled to ensure that the laser beam propagates along a predetermined path; the third motion component is connected to the coupler 7. Through translational and rotational operations, the spatial position and posture of the coupler 7 can be adjusted in all directions to achieve the optimal coupling effect between the laser beam and the liquid jet 8.

[0103] Further, to fully illustrate the specific implementation process of this embodiment, a liquid-guided laser processing method based on dual-beam phase adjustment is provided. Refer to Figure 6 As shown, this method includes:

[0104] Step S101: Detect the spot center position of the first linearly polarized light 31 at the bottom of the coupler 7.

[0105] Here, determining the center position of the spot formed by the first linearly polarized light 31 at the bottom of the coupler 7 can provide a basis for subsequent adjustment of the propagation optical path of the second linearly polarized light 32. Specifically, an image acquisition device 17 (such as a surveillance camera CCD) can be used to detect the spot center position of the first linearly polarized light 31 at the bottom of the coupler 7. The image acquisition device 17 is located on the side of the coupler 7 away from the workpiece 9 to be processed, and its detection end is oriented towards the coupler 7, capable of capturing an image of the bottom of the coupler 7, and identifying the center position of the spot of the first linearly polarized light 31 from the image through image processing techniques.

[0106] Step S201: Detect the spot center position of the second linearly polarized light 32 at the bottom of the coupler 7.

[0107] Here, the central position of the light spot formed by the second linearly polarized light 32 at the bottom of the coupler 7 is determined to facilitate subsequent coincidence adjustment with the central position of the light spot of the first linearly polarized light 31. Specifically, the image acquisition device 17 can also be used to detect the central position of the light spot of the second linearly polarized light 32 at the bottom of the coupler 7. By capturing an image of the bottom of the coupler 7, the central position information of the light spot of the second linearly polarized light 32 is extracted from the image using an image processing algorithm.

[0108] Step S301: Adjust the optical path so that the central position of the light spot of the first linearly polarized light 31 coincides with the central position of the light spot of the second linearly polarized light 32 at the bottom of the coupler 7.

[0109] Here, ensuring that the central positions of the light spots of the first linearly polarized light 31 and the second linearly polarized light 32 coincide at the bottom of the coupler 7 enables the first linearly polarized light 31 and the second linearly polarized light 32 to be accurately superimposed in space, laying a foundation for the effective combination of the first linearly polarized light 31 and the second linearly polarized light 32 in the polarization beam combiner 6 and for achieving laser beam width control and interference effects. Specifically, the propagation optical path of the first linearly polarized light 31 can be kept unchanged, and only the first motion component and the second motion component in the coupling adjustment mechanism are used to adjust the propagation optical path of the second linearly polarized light 32. Among them, the first motion component is connected to the spatial light modulator 5. With its translational degree of freedom, it can move the spatial light modulator 5 horizontally or vertically to accurately calibrate the incident position of the second linearly polarized light 32; with its rotational degree of freedom, it can rotate the spatial light modulator 5 around an axis to flexibly change the modulation angle of the second linearly polarized light 32. The second motion component is connected to the fourth mirror 13. Relying on its translational and rotational degrees of freedom, it can accurately control the position and angle of the fourth mirror 13 to ensure that the second linearly polarized light 32 propagates along a predetermined path, ultimately achieving the coincidence of the central positions of the light spots of the first linearly polarized light 31 and the second linearly polarized light 32 at the bottom of the coupler 7.

[0110] Step S401: Adjust the position of the coupler 7 so that the center of the jet hole, the central position of the light spot of the first linearly polarized light 31, and the central position of the light spot of the second linearly polarized light 32 coincide at the bottom of the coupler 7.

[0111] Here, the coincidence of the center of the jet hole at the bottom of the coupler 7, the center of the spot of the first linearly polarized light 31, and the center of the spot of the second linearly polarized light 32 can ensure that the laser beam is accurately coupled into the liquid jet 8, minimizing the energy loss of the laser beam during the coupling process and ensuring the efficient transmission of laser energy to the workpiece 9 to be processed. Specifically, the position of the coupler 7 can be adjusted by using the third motion component connected to the coupler 7 in the coupling adjustment mechanism, so as to achieve the purpose of adjusting the position of the jet hole. Among them, the third motion component has translational and rotational degrees of freedom. Through translational operation, the coupler 7 can perform linear displacement in the plane or spatial direction to change its position; rotational operation can make the coupler 7 rotate around a specific axis to adjust its angle and posture. By these operations, the spatial position and posture of the coupler 7 are adjusted in all directions, so that the center of the jet hole at the bottom of the coupler 7, the center of the spot of the first linearly polarized light 31, and the center of the spot of the second linearly polarized light 32 coincide, achieving the optimal coupling effect between the laser beam and the liquid jet 8.

[0112] Further, before step S101, the liquid-guided laser processing method based on dual-beam phase adjustment includes:

[0113] Step S100: Replace the first polarization state modulator 2 with a third polarization state modulator; adjust the third polarization state modulator so that the third polarization state modulator can convert the linearly polarized light emitted by the laser light source 1 into the first linearly polarized light 31, and the first linearly polarized light 31 is suitable for being totally reflected by the beam splitter 3.

[0114] It should be noted that in the normal processing flow, the function of the first polarization state modulator 2 (such as a quarter-wave plate) is to convert the linearly polarized light emitted by the laser light source 1 into circularly polarized light to achieve the separation and modulation of the subsequent dual beams. When detecting the center position of the spot of the first linearly polarized light 31 at the bottom of the coupler 7, in order to avoid the interference of the second linearly polarized light 32, it is necessary to directly generate the first linearly polarized light 31. Therefore, the first polarization state modulator 2 is replaced with a third polarization state modulator to directly obtain the required first linearly polarized light 31, simplifying the detection process and improving the detection accuracy.

[0115] Here, the third polarization state modulator can be a half-wave plate, which rotates the polarization direction of the transmitted linearly polarized light by an angle twice the angle between its fast axis and the polarization direction of the incident light by adjusting the fast axis direction of the half-wave plate. That is to say, by adjusting the fast axis direction of the half-wave plate, precise control of the polarization direction of the linearly polarized light emitted by the laser light source 1 can be achieved. The beam splitter 3 (such as a polarization beam splitter) has a selective effect on light with different polarization directions, and only light with a specific polarization direction can be totally reflected by it. Therefore, in step S100, the half-wave plate is adjusted so that after the linearly polarized light emitted by the laser light source 1 passes through the half-wave plate, its polarization direction exactly meets the condition of being totally reflected by the beam splitter 3, thus obtaining the required first linearly polarized light 31.

[0116] Further, before step S201, the liquid-guided laser processing method based on dual-beam phase adjustment includes:

[0117] Step S200: Adjust the third polarization state modulator so that the third polarization state modulator can convert the linearly polarized light emitted by the laser light source 1 into a second linearly polarized light 32, and the second linearly polarized light 32 is suitable for completely passing through the beam splitter 3.

[0118] Here, the purpose of step S200 is to directly generate the second linearly polarized light 32 that meets the requirements when detecting the spot center position of the second linearly polarized light 32 at the bottom of the coupler 7, avoiding the interference caused by complex operations such as dual-beam separation in the normal processing flow, thereby simplifying the detection process and improving the detection accuracy. Specifically, after step S101 is completed, the fast axis direction of the third polarization state modulator (such as a half-wave plate) can be adjusted again to convert the linearly polarized light emitted by the laser light source 1 into a second linearly polarized light 32 that can completely pass through the beam splitter 3 (such as a polarization beam splitter), providing an accurate and pure detection object for the subsequent step S201 (detecting the spot center position of the second linearly polarized light 32 at the bottom of the coupler 7) and ensuring the smooth progress of the spot center position detection link in the entire liquid-guided laser processing method.

[0119] Those skilled in the art can easily understand that, on the premise of no conflict, the above advantageous ways can be freely combined and superimposed.

[0120] The above are only the preferred embodiments of the present application, and are not intended to limit the present application. Any modifications, equivalent replacements, and improvements made within the spirit and principle of the present application shall be included in the protection scope of the present application. The above is only the preferred implementation manner of the present application. It should be noted that for those of ordinary skill in the art in this technical field, several improvements and variations can be made without departing from the technical principle of the present application, and these improvements and variations should also be regarded as the protection scope of the present application.

Claims

1. A liquid-guided laser processing device based on dual-beam phase adjustment, characterized in that: include: A laser light source (1), a first polarization state modulator (2), a beam splitter (3), a second polarization state modulator (4), a spatial light modulator (5), a polarization beam combiner (6) and a coupler (7); The first polarization state modulator (2) is located on the outgoing light path of the laser light source (1) and is used to convert the linear polarized light emitted by the laser light source (1) into circular polarized light; the beam splitter (3) is arranged on the downstream side of the first polarization state modulator (2) along the propagation direction of the circular polarized light and is used to separate the circular polarized light into a first linear polarized light (31) and a second linear polarized light (32); the second polarization state modulator (4) and the spatial light modulator (5) are located on the transmission light path of the second linear polarized light (32) and between the beam splitter (3) and the polarization combiner (6); the second polarization state modulator (4) is used to adjust the polarization direction of the second linear polarized light (32) to be consistent with the polarization direction of the first linear polarized light The polarization directions of the second linear polarized light (31) are the same, and the spatial light modulator (5) is used to adjust the edge region phase of the second linear polarized light (32) to be half a period different from the edge region phase of the first linear polarized light (31); the polarization beam combiner (6) is used to receive and combine the first linear polarized light (31) output by the beam splitter (3) and the second linear polarized light (32) modulated by the second polarization state modulator (4) and the spatial light modulator (5); the coupler (7) is located on the output light path of the polarization beam combiner (6), and the coupler (7) is used to couple the laser beam combined by the polarization beam combiner (6) into the liquid jet (8), and the liquid jet (8) acts on the workpiece (9) to be processed.

2. The liquid-guided laser processing device based on dual-beam phase adjustment according to claim 1 is characterized in that: Also includes: The beam is pointed to the adjustment mirror group; The light beam pointing adjustment mirror group comprises at least a first reflecting mirror (10), a second reflecting mirror (11), a third reflecting mirror (12) and a fourth reflecting mirror (13); The first reflector (10) and the second reflector (11) are located between the first polarization state modulator (2) and the beam splitter (3); The third reflector (12) is located on the transmission optical path of the first linearly polarized light (31) and between the beam splitter (3) and the polarization beam combiner (6); The fourth reflector (13) is located on the transmission light path of the second linearly polarized light (32) and between the spatial light modulator (5) and the polarization beam combiner (6).

3. The liquid-guided laser processing device based on dual-beam phase adjustment according to claim 1, characterized in that: Also includes: Condenser lens set; The condenser lens group comprises at least a first condenser lens (14); The first condenser (14) is located between the polarization beam combiner (6) and the coupler (7).

4. The liquid-guided laser processing device based on dual-beam phase adjustment according to claim 1, characterized in that: Also includes: Liquid supply system (15); The coupler (7) has a jet hole at its bottom, and a coupling cavity is provided inside the coupler (7), the coupling cavity is respectively connected to the jet hole and the liquid supply system (15), the liquid supply system (15) is used to transport a high-pressure liquid medium into the coupling cavity, and the high-pressure liquid medium is configured to be ejected through the jet hole to form the liquid jet (8).

5. The liquid-guided laser processing device based on dual-beam phase adjustment according to claim 1, characterized in that: Also includes: Heat sink block (16); The polarization beam combiner (6) has a main emission surface and a side emission surface, the main emission surface is arranged toward the coupler (7), and the side emission surface is arranged toward the heat sink block (16).

6. The liquid-guided laser processing device based on dual-beam phase adjustment according to claim 1, characterized in that: Also includes: Image acquisition device (17); The image acquisition device (17) is located on a side of the coupler (7) away from the workpiece (9) to be processed, and the detection end of the image acquisition module is arranged toward the coupler (7).

7. The liquid-guided laser processing device based on dual-beam phase adjustment according to claim 2, characterized in that: Also includes: Coupling adjustment mechanism; The coupling adjustment mechanism at least includes a first motion component, a second motion component and a third motion component; The first moving component is connected to the spatial light modulator (5); the second moving component is connected to the fourth reflector (13); and the third moving component is connected to the coupler (7).

8. A liquid-guided laser processing method based on dual-beam phase adjustment, characterized in that: For a liquid-guided laser processing device based on dual-beam phase adjustment as described in any one of claims 1 to 7, the method comprises: Detecting the center position of the light spot of the first linearly polarized light (31) at the bottom of the coupler (7); Detecting the center position of the light spot of the second linearly polarized light (32) at the bottom of the coupler (7); Adjusting the optical path so that the center of the light spot of the first linear polarized light (31) and the center of the light spot of the second linear polarized light (32) at the bottom of the coupler (7) coincide with each other; The position of the coupler (7) is adjusted so that the center of the jet hole at the bottom of the coupler (7), the center of the light spot of the first linear polarized light (31), and the center of the light spot of the second linear polarized light (32) coincide with each other.

9. The liquid-guided laser processing method based on dual-beam phase adjustment according to claim 8, characterized in that: Before detecting the center position of the light spot of the first linearly polarized light (31) at the bottom of the coupler (7), the method comprises: Replacing the first polarization state modulator (2) with a third polarization state modulator; Adjusting the third polarization state modulator so that the third polarization state modulator can convert the linearly polarized light emitted by the laser light source (1) into the first linearly polarized light (31); Wherein, the beam splitter (3) is capable of reflecting the first linearly polarized light (31).

10. The liquid-guided laser processing method based on dual-beam phase adjustment according to claim 9, characterized in that: Before detecting the center position of the light spot of the second linearly polarized light (32) at the bottom of the coupler (7), the method comprises: Adjusting the third polarization state modulator so that the third polarization state modulator can convert the linearly polarized light emitted by the laser light source (1) into the second linearly polarized light (32); The second linearly polarized light (32) is capable of transmitting through the beam splitter (3).

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