Superconducting magnet coil bearing framework

Abstract

The invention discloses a superconducting magnet coil bearing framework which comprises a supporting framework used for providing supporting force for a magnet coil in the axial direction of the magnet coil and limiting axial displacement of the magnet coil in the axial direction of the magnet coil; and the magnet coil mounting barrel is fixed on the supporting framework and is used for mounting the magnet coil, providing a supporting force along the radial direction of the magnet coil for the magnet coil and limiting the radial displacement of the magnet coil along the radial direction of the magnet coil. The magnet coil is arranged on the magnet coil mounting barrel, the magnet coil mounting barrel can counteract radial force generated by interaction of the magnet coil, the magnet coil can be prevented from moving in the axial direction of the magnet coil due to the arrangement of the supporting framework, the supporting framework is matched with the magnet coil mounting barrel, and vibration and braking acceleration can be counteracted in the transportation process; swing resonance of the magnet coil is avoided, so that the influence on the magnet coil is reduced, and the stability of the MCZ process is ensured.

Description

Technical Field

[0001] The invention relates to the technical field of superconducting single crystal furnace magnets, and in particular to a superconducting magnet coil bearing frame. Background Art

[0002] The Magnetic Applied Czochralski Method (MCZ for short) is currently the main method for producing large-size semiconductor-grade single crystal silicon over 300 mm. Figure 8 The figure shows a schematic diagram of the arrangement of the horizontal magnetic field and the magnet coil in the MCZ process, where the arrow indicates the direction of the magnetic field. The position, strength and direction of the magnetic field are the most important technical parameters in the MCZ process. At present, the overall rigidity of the magnet skeleton structure is relatively poor, and the magnet coils are mostly installed in a suspended manner. The suspension structure cannot provide stable support. After the coil is energized, a very large magnetic force will be generated, causing the skeleton structure to have a large deformation displacement, thereby affecting the intensity of the magnetic field and the direction of the magnetic lines of force. The vibration during transportation and the swing resonance of the magnet coil caused by the braking acceleration will also have an adverse effect. And the very large magnetic force, if the support force of the magnet coil is insufficient, the electromagnetic force will in turn affect the position of the magnet coil, thereby affecting the magnetic field, thereby reducing the stability of the MCZ process. Summary of the invention

[0003] In view of the shortcomings of the prior art, the present invention designs a superconducting magnet coil bearing frame, including: a supporting frame, used to provide a supporting force to the magnet coil along the axial direction of the magnet coil, and limit the axial displacement of the magnet coil along the magnet coil; a magnet coil mounting barrel, fixed on the supporting frame, used to install the magnet coil and provide a supporting force to the magnet coil along the radial direction of the magnet coil, and limit the radial displacement of the magnet coil along the magnet coil.

[0004] Preferably, the height of the support frame is smaller than the outer diameter of the magnet coil.

[0005] Preferably, the supporting frame is an annular box-type structure.

[0006] Preferably, the magnet coil mounting barrel penetrates the supporting frame and extends to the outside of the supporting frame.

[0007] Preferably, the supporting skeleton comprises: a skeleton inner plate; two skeleton cover plates, respectively installed at the bottom and top of the skeleton inner plate; a skeleton outer plate, whose bottom and top are respectively fixedly connected to the two skeleton cover plates, and cooperate with the skeleton inner plate to install the magnet coil mounting barrel.

[0008] Preferably, the inner plate of the framework is a circular ring structure, and the outer plate of the framework is a prismatic structure.

[0009] Preferably, a shock absorbing member is provided on the outer plate surface of the skeleton outer plate for mounting the magnet coil mounting barrel.

[0010] Preferably, an adjustment member is provided between the outer plate surface of the skeleton outer plate for mounting the magnet coil mounting barrel and the inner plate of the skeleton, and the adjustment member is used to adjust the angle of the outer plate surface.

[0011] Preferably, the angle between two adjacent mounting surfaces on the skeleton outer plate for mounting the magnet coil mounting barrel is 70° or 110°; a plurality of skeleton reinforcement ribs are arranged between the skeleton inner plate and the skeleton outer plate, and the plurality of skeleton reinforcement ribs are evenly arranged between the two skeleton cover plates.

[0012] Preferably, the magnet coil mounting barrel penetrates the supporting frame and extends to the inner side of the supporting frame.

[0013] Compared with the closest prior art, the beneficial effects of the present invention are: 1. The present invention sets the magnet coil on the magnet coil mounting barrel, which can offset the radial force generated by the interaction of the magnet coils. The setting of the support frame can avoid the axial displacement of the magnet coil along the magnet coil. The support frame cooperates with the magnet coil mounting barrel to offset vibration and braking acceleration during transportation and avoid the swing resonance of the magnet coil, thereby reducing the impact on the magnet coil and ensuring the stability of the MCZ process.

[0014] 2. The outer plate of the skeleton of the present invention can be set into different structures according to the situation. An adjusting piece can be set between the outer plate surface of the skeleton outer plate for installing the magnet coil installation barrel and the inner plate of the skeleton to adjust the angle of the outer plate surface. In this way, the upper limit of the magnetic field can be increased without changing the magnet structure, so as to meet the needs of different field strengths and increase the application scope of the device. A plurality of skeleton reinforcement ribs can also be set between the inner plate and the outer plate of the skeleton to fix the angle of the magnet coil after it is installed on the superconducting magnet coil bearing skeleton. This method can provide a more stable supporting force, and the stable structure can ensure a stable coil position under electromagnetic force, thereby ensuring a stable magnetic field and further ensuring the stability of the MCZ process. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic structural diagram of the superconducting magnet coil supporting frame of the present invention.

[0016] Figure 2 It is a schematic structural diagram of the magnet coil installation barrel of the present invention.

[0017] Figure 3 It is a schematic diagram of the structure of the inner plate of the skeleton of the present invention.

[0018] Figure 4 It is a structural schematic diagram of the skeleton cover plate of the present invention.

[0019] Figure 5 It is a schematic diagram of the structure of the skeleton outer plate of the present invention.

[0020] Figure 6 It is a schematic structural diagram of the adjusting member of the present invention.

[0021] Figure 7 It is a schematic diagram of the structure of the skeleton reinforcement rib of the present invention.

[0022] Figure 8 Schematic diagram of the arrangement of the horizontal magnetic field and magnet coils in the MCZ process.

[0023] Reference numerals: 1-magnet coil mounting barrel, 2-skeleton inner plate, 3-skeleton cover plate, 4-skeleton outer plate, 5-shock absorber, 6-adjustment member, 61-mounting block, 62-first adjustment rod, 63-second adjustment rod, 64-sliding rod, 65-connecting rod, 66-first adjustment handle, 67-third adjustment rod, 68-second adjustment handle, 7-skeleton reinforcement rib, 8-magnet coil. DETAILED DESCRIPTION

[0024] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the accompanying drawings in the embodiments of the present invention.

[0025] like Figure 1-Figure 7 As shown, the present invention provides a superconducting magnet coil bearing frame, including: a support frame, used to provide a support force to the magnet coil 8 along the axial direction of the magnet coil 8, and limit the axial displacement of the magnet coil 8 along the magnet coil 8; a magnet coil mounting barrel 1, fixed on the support frame, used to install the magnet coil 8, and provide a support force to the magnet coil 8 along the radial direction of the magnet coil 8, and limit the radial displacement of the magnet coil 8 along the magnet coil 8. The magnet coil 8 is set on the magnet coil mounting barrel 1, and the magnet coil mounting barrel 1 can offset the radial force generated by the interaction of the magnet coil 8, and the setting of the support frame can avoid the axial displacement of the magnet coil 8 along the magnet coil 8. The support frame cooperates with the magnet coil mounting barrel 1 to offset vibration and braking acceleration during transportation, avoid the swing resonance of the magnet coil 8, thereby reducing the impact on the magnet coil 8 and ensuring the stability of the MCZ process.

[0026] Preferably, the height of the support frame is smaller than the outer diameter of the magnetic coil 8. This can reduce weight while the structural strength meets the use requirements, and can also prevent the support frame from blocking too much and causing more impact on the magnetic coil 8.

[0027] Preferably, the supporting frame is an annular box-type structure.

[0028] Preferably, the magnet coil mounting barrel 1 penetrates the supporting frame and extends to the outside of the supporting frame.

[0029] Preferably, the supporting skeleton includes: a skeleton inner plate 2; two skeleton cover plates 3, which are respectively installed at the bottom and top of the skeleton inner plate 2; a skeleton outer plate 4, whose bottom and top are respectively fixedly connected to the two skeleton cover plates 3, and cooperate with the skeleton inner plate 2 to install the magnet coil mounting barrel 1.

[0030] Preferably, the inner frame plate 2 is a circular ring structure, and the outer frame plate 4 is a prismatic structure.

[0031] Preferably, a shock absorbing member 5 is provided on the outer plate surface of the skeleton outer plate 4 for mounting the magnet coil mounting barrel 1 .

[0032] Preferably, an adjustment member 6 is provided between the outer plate surface of the skeleton outer plate 4 for mounting the magnet coil mounting barrel 1 and the skeleton inner plate 2, and the adjustment member 6 is used to adjust the angle of the outer plate surface. An adjustment member is provided between the outer plate surface of the skeleton outer plate 4 for mounting the magnet coil mounting barrel and the skeleton inner plate 2 to adjust the angle of the outer plate surface, so that the upper limit of the magnetic field can be increased without changing the magnet structure, so as to meet the requirements of different field strengths and increase the scope of application of the device.

[0033] Preferably, the adjusting member 6 comprises: a first adjusting component mounted on the inner plate 2 of the skeleton; a second adjusting component mounted on the outer plate surface of the outer plate 4 of the skeleton for mounting the magnet coil mounting barrel 1 and adjustably connected to the first adjusting component.

[0034] Preferably, the first adjustment assembly includes: a mounting block 61 mounted on the frame inner plate 2; a first adjustment rod 62 mounted on the mounting block 61 and adjustably connected to the second adjustment assembly.

[0035] Preferably, the second adjustment component itself is a length-adjustable structure.

[0036] Preferably, the second adjustment component includes: a second adjustment rod 63, which is adjustably connected to the first adjustment rod 62; a plurality of sliding rods 64, which are evenly arranged along the edge of the other end of the second adjustment rod 63; a connecting rod 65, which is installed on the outer plate surface of the skeleton outer plate 4 for installing the magnet coil mounting barrel 1, and is slidably connected to the sliding rod 64, and a first adjustment handle 66 is arranged at the end of the connecting rod 65; a third adjustment rod 67, which is rotatably installed in the connecting rod 65, and one end is adjustably connected to the second adjustment rod 63, and the other end is provided with a second adjustment handle 68.

[0037] As an alternative embodiment, the angle of the magnet coil 8 after being installed on the superconducting magnet coil supporting frame can be fixed, that is, the angle of two adjacent mounting surfaces on the skeleton outer plate 4 for mounting the magnet coil mounting barrel 1 is 70° or 110°, which is the most commonly used angle. Preferably, a plurality of skeleton reinforcement ribs 7 are arranged between the skeleton inner plate 2 and the skeleton outer plate 4, and the plurality of skeleton reinforcement ribs 7 are evenly arranged between the two skeleton cover plates 3. A plurality of skeleton reinforcement ribs 7 are arranged between the skeleton inner plate 2 and the skeleton outer plate 4, and the angle of the magnet coil 8 after being installed on the superconducting magnet coil supporting frame is fixed. This method can provide a more stable supporting force, and the stable structure can ensure a stable coil position in the electromagnetic force, thereby ensuring a stable magnetic field, and further ensuring the stability of the MCZ process.

[0038] As an alternative embodiment, the magnet coil mounting barrel 1 penetrates the supporting frame and extends to the inner side of the supporting frame.

[0039] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0040] In addition, the terms "above" and "below" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "above" and "below" may explicitly or implicitly include at least one of the features. In the description of this application, the meaning of "multiple" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0041] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or communication with each other; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0042] In the present application, the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. mean that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0043] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent substitution, improvement, etc. made within the spirit and principle of the present invention are included in the scope of the claims of the present invention to be approved.

Claims

1. A superconducting magnet coil support frame, characterized in that: include: A support frame, used to provide the magnetic coil (8) with a supporting force in the axial direction of the magnetic coil (8), thereby limiting the axial displacement of the magnetic coil (8) in the axial direction of the magnetic coil (8); The magnetic coil mounting barrel (1) is fixed on the support frame and is used to mount the magnetic coil (8) and provide the magnetic coil (8) with a supporting force in the radial direction of the magnetic coil (8), thereby limiting the radial displacement of the magnetic coil (8) in the radial direction of the magnetic coil (8).

2. The superconducting magnet coil support frame according to claim 1, characterized in that: The height of the support frame is smaller than the outer diameter of the magnetic coil (8).

3. The superconducting magnet coil support frame according to claim 1, characterized in that: The supporting frame is an annular box-type structure.

4. The superconducting magnet coil support frame according to claim 3, characterized in that: The magnet coil mounting barrel (1) penetrates the support frame and extends to the outside of the support frame.

5. The superconducting magnet coil support frame according to claim 4, characterized in that: The support frame comprises: Frame inner plate (2); Two frame cover plates (3) are installed on the bottom and top of the frame inner plate (2) respectively; The bottom and top of the skeleton outer plate (4) are respectively fixedly connected to the two skeleton cover plates (3) and cooperate with the skeleton inner plate (2) to install the magnet coil installation barrel (1).

6. The superconducting magnet coil support frame according to claim 5, characterized in that: The frame inner plate (2) is a circular ring structure, and the frame outer plate (4) is a prism structure.

7. The superconducting magnet coil support frame according to claim 6, characterized in that: The skeleton outer plate (4) is used to mount the magnet coil mounting barrel (1) and a shock absorbing component (5) is arranged on its outer plate surface.

8. The superconducting magnet coil support frame according to claim 6, characterized in that: An adjustment member (6) is provided between the outer plate surface of the framework outer plate (4) for mounting the magnet coil mounting barrel (1) and the framework inner plate (2), and the adjustment member (6) is used to adjust the angle of the outer plate surface.

9. The superconducting magnet coil support frame according to claim 6, characterized in that: The angle between two adjacent mounting surfaces on the skeleton outer plate (4) for mounting the magnet coil mounting barrel (1) is 70° or 110°; A plurality of frame reinforcement ribs (7) are arranged between the frame inner plate (2) and the frame outer plate (4), and the plurality of frame reinforcement ribs (7) are evenly arranged between the two frame cover plates (3).

10. The superconducting magnet coil support frame according to claim 3, characterized in that: The magnet coil mounting barrel (1) penetrates the support frame and extends to the inner side of the support frame.

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