Cleaning apparatus for substrate carrier jigs

Abstract

The present invention relates to a substrate carrying jig cleaning device in which a plurality of upper and lower clamps each provided with a clamping magnet on the upper and lower clamps for clamping and holding a circuit board at the edge portion of the circuit board are improved in structure so that the substrate carrying jig can be easily cleaned for reuse after the clamping and holding operation is completed, the clamping portion on which a medicine or the like is formed with unevenness or the clamping portion on which a residue such as a substrate chip or the like can be left can be easily opened, and a fluid such as water or gas can be sprayed to the opened clamping portion side and foreign matter or the medicine left on the clamping portion side can be easily removed by vacuum suction, thereby achieving the cleaning purpose.

Description

TECHNICAL FIELD

[0001] The present invention relates to a substrate carrying jig cleaning device The present invention relates to a substrate carrying jig cleaning device

[0002] The present invention relates to a substrate carrying jig cleaning device BACKGROUND

[0003] Generally, a printed circuit board (PCB) is the most basic component used in electronic communication devices and the like, and has been developed in the direction of multi-layering, fine patterning, miniaturization and packaging, as electronic products have tended to be smaller, thinner, higher density, and packaged, and personal portable in recent years.

[0004] Therefore, in order to improve the fine patterning ability, reliability and design density of the printed circuit board, there has been a tendency to change the raw material and even to adopt a composite structure in the layer configuration of the circuit, and components have also changed from a dual in-line package (DIP) type to a surface mount technology (SMT) type, thereby improving the mounting density.

[0005] In addition, the printed circuit board (hereinafter referred to as a substrate) includes a circuit pattern for electrically connecting a plurality of electronic components to each other, and also includes bumps electrically connected to the circuit pattern. Among them, the electronic components are electrically connected to the bumps and mounted on the printed circuit board, thereby electrically connecting the electronic components to each other.

[0006] In recent years, along with the development of the semiconductor and display device industries and an increase in consumer demand for products to become more lightweight and compact, there is an urgent need to develop a technology for thinning a display panel (Panel) manufactured in a form of glass bonding. Specifically, an etching technology for patterning a fine pattern on a substrate has received considerable attention.

[0007] In a substrate processing process, a substrate carrying jig for transferring a substrate in a state of clamping the substrate in processes such as a wet pretreatment, etching, developing, peeling, and water washing is required to be used.

[0008] As an existing prior art related to a substrate carrying jig, as disclosed in Korean Registered Patent Gazette No. 10-1038572 "Substrate drug processing system equipped with vacuum substrate jig" (Registration Date: 2011.05.26), as a drug processing system for thinning or forming a pattern on a substrate by supplying an etching solution to the substrate using an etching solution supply module, it includes a vacuum substrate jig body formed in a shape corresponding to a substrate, a plurality of vacuum holes connected to a substrate adsorption vacuum line by being formed on the vacuum substrate jig body, and a sealing portion that seals a substrate surface attached to the vacuum substrate jig surface.

[0009] As described above, in the case of using vacuum pressure, since a vacuum flow path and a vacuum hose need to be installed on the substrate, a problem that the structure of the substrate becomes complicated can occur, and since a separate vacuum device for forming vacuum pressure needs to be additionally installed, a problem that manufacturing costs significantly increase and the printed circuit board is damaged due to the vacuum pressure can also occur.

[0010] As another existing prior art related to a substrate carrying jig, as disclosed in Korean Published Patent Gazette No. 10-2022-150488 "Jig device for substrate gripping of substrate processing apparatus" (Publication Date: 2022.11.11), it is for individually gripping a substrate in a substrate processing apparatus that continuously moves and processes the substrate in a state of being vertically upright, and includes a jig frame consisting of an upper bar, a lower bar, a left side bar, and a right side bar in a rectangular shape, upper and lower clamps having a plurality of each installed along the extension direction of the upper and lower bars for gripping the upper and lower ends of the substrate, and a side end gripping mechanism installed at one or more of the left and right side bars for gripping the side end of the substrate.

[0011] As described above, since the upper and lower clamps and the side gripping mechanism clamp the edge of the substrate in the form of a clamp by means of elastic force, the etching solution will accumulate at the edge of the substrate clamped by the upper and lower clamps and the side gripping mechanism, resulting in a decrease in the thickness flatness of the etched substrate and a decrease in the etching effect.

[0012] Furthermore, if the gripping part of the existing clamping part for clamping and holding the substrate has unevenness, after the substrate is treated with medicine, the gripping part with unevenness may have medicine residue or substrate debris attached, which will make it difficult to reuse the jig.

[0013] Prior technology documents

[0014] Patent documents

[0015] (Patent Document 1) Korean Patent Registration No. 10-1038572, “Substrate Drug Processing System Equipped with Vacuum Substrate Fixture” (Registration Date: 2011.05.26)

[0016] (Patent Document 2) Korean Patent Publication No. 10-2022-150488, “Jig Apparatus for Grabbing Substrate in Substrate Processing Equipment” (Publication Date: 2022.11.11) Summary of the Invention

[0017] The present invention aims to solve the numerous problems mentioned above, and its purpose is to provide a substrate carrier fixture with an improved structure that allows for easy cleaning of the substrate carrier fixture after clamping and gripping operations, after the substrate carrier fixture, which is equipped with multiple upper and lower clamps with magnets respectively arranged on the upper and lower clamps for clamping and gripping the edge of the circuit board, can be used again. Furthermore, it allows for easy opening of the clamping parts to clean the clamping parts with chemicals formed on the uneven clamping parts or the clamping parts that may have residues such as substrate debris. In addition, it allows for the spraying of a fluid such as gas onto the opened clamping parts and the easy removal of foreign matter or chemicals remaining on the clamping parts by means of vacuum suction, thereby achieving the cleaning purpose.

[0018] Another object of the present invention is to provide a substrate carrier cleaning apparatus that improves the structure by delaying and waiting during the process of resetting the substrate carrier fixture to its original position after completing the drug treatment operation on the substrate, so as to link the clamping and mounting process of the substrate on the substrate carrier fixture with the sequential resetting action of the substrate carrier fixture.

[0019] To achieve the objectives described above, the present invention is characterized by comprising: a reset conveyor belt for resetting a substrate carrying fixture equipped with a plurality of upper and lower clamps that clamp and grip the edge portion of a substrate by means of first, second, third, and fourth clamping frames respectively disposed on the clamping frame to a substrate clamping position; a limiting component disposed on the lower side of the reset conveyor belt for stopping the substrate carrying fixture being transferred by the reset conveyor belt; an opening component disposed on the upper side of the substrate carrying fixture in a liftable manner for causing the upper clamps to rotate and thereby opening the upper and lower clamps during a descent action; a cleaning component for spraying gas onto one side of the upper and lower clamps for cleaning, and further using a brush to scrub the surfaces of the upper and lower clamps; and a collection component for collecting and discharging foreign matter removed from the upper and lower clamps to the outside.

[0020] The open component includes: a lifting actuator. Fixed to the connecting frame; and a lifting component, which performs up and down lifting actions by means of the lifting actuator, and is configured in such a way as to correspond to a plurality of upper and lower clamps respectively disposed on one side and the other side of the clamping frame of the third and fourth frames, and the upper and lower clamps are opened by pressing the end of the upper clamp downward during the lowering action.

[0021] The limiting component includes left and right limiting parts, which are respectively arranged at intervals on the underside of the transfer roller of the reset conveyor belt, and stop the substrate carrying fixture by contacting the left and right side frames of the substrate carrying fixture during rotation.

[0022] The cleaning assembly includes: a cleaning block disposed on the upper side of the transfer roller of the reset conveyor belt, which can reciprocate toward the upper and lower clamps of the substrate support fixture by means of a transfer cylinder, and has a plurality of vacuum suction ports formed in a manner communicating with the outside; a vacuum pressure supply line connected to the cleaning block for supplying vacuum suction force to the interior of the cleaning block; and a brush disposed on the cleaning block, which contacts the cleaning block during its reciprocating movement and brushes the surfaces of the upper and lower clamps.

[0023] The cleaning component has a cleaning block in the form of a cylindrical block. Vacuum suction ports are formed at positions corresponding to the upper clamp that rotates upwards via the open component and the lower clamp that is fixed to the lower side. The brush is positioned close to the vacuum suction port of the cleaning component.

[0024] The collection assembly includes a collection plate disposed on the lower side of the cleaner block for collecting water sprayed onto one side of the upper and lower clamps and discharging it to the outside.

[0025] This invention allows for efficient and continuous substrate clamping operations during the process of resetting the substrate clamping fixture to its original position (the clamping position side) after completing the drug treatment process, by using a limiting component that is linked to the substrate clamping process. This delays and allows for waiting during the resetting of the substrate clamping fixture, thereby minimizing operation time. Furthermore, it allows for easy removal of foreign matter remaining on the upper and lower clamping sides of the substrate clamping fixture using a dry cleaning component or a combination of dry and wet cleaning components, thereby improving the cleaning efficiency of the substrate clamping fixture.

[0026] Furthermore, the present invention can easily open the upper clamp by means of the lifting component of the opening assembly that performs the up and down lifting action, thereby separating it from the lower clamp, and by making the brush contact the opened upper and lower clamp sides and brushing, the substrate debris or liquid remaining in the upper and lower clamps can be easily removed by means of physical contact.

[0027] Furthermore, the present invention can select a dry cleaning method or a dry / wet cleaning method cleaning component according to the environment of the place of use and the cleaning efficiency, thereby improving the cleaning efficiency of the substrate support fixture. Attached Figure Description

[0028] Figure 1 This is a perspective view illustrating the substrate support fixture according to the present invention.

[0029] Figure 2 This is a perspective view illustrating the substrate carrier fixture cleaning apparatus of the present invention.

[0030] Figure 3 From another perspective Figure 2 The diagram shows a perspective view of the substrate carrier fixture cleaning device.

[0031] Figure 4 This is a perspective view that provides a schematic illustration of the composition of the cleaner block and the cleaner assembly of the present invention.

[0032] Figure 5 as well as Figure 6 This is an action state diagram that provides a summary illustration of the state of the open component of the present invention before and after its operation.

[0033] Figure 7 This is a schematic diagram illustrating the state in which the cleaner block moves close to the upper and lower clamps that are open by means of the open component of the present invention.

[0034] Figure 8 as well as Figure 9 This is a usage state diagram illustrating the state of the limiting component before and after operation of the present invention.

[0035] Explanation of reference numerals in the attached figures

[0036] 40: Reset the conveyor belt

[0037] 42: Rotation axis

[0038] 42a: Rotary roller

[0039] 45: Transfer roller

[0040] 50: (Printed Circuit Board) Substrate

[0041] 60: Fixed frame

[0042] 70: Supporting Frame

[0043] 80: Connection Frame

[0044] 100: Substrate carrying fixture

[0045] 110: Clamping Frame

[0046] 111, 112, 113, 114: First, Second, Third, and Fourth Frameworks

[0047] 120: Upper clamp

[0048] 121, 131: Clamping magnets

[0049] 122: Extension

[0050] 130: Lower clamp

[0051] 140: Hinge pin

[0052] 210, 220: Left and right side limiting components

[0053] 250: Rotary cylinder

[0054] 300: Open Components

[0055] 310: Lifting actuator

[0056] 320: Lifting component

[0057] 405: Cleaner Block

[0058] 410: Vacuum pressure supply line

[0059] 420: Vacuum suction port

[0060] 430: Brush

[0061] 440: Water supply pipeline

[0062] 445: Water nozzle

[0063] 450: Gas supply pipeline

[0064] 455: Gas nozzle

[0065] 500: Transfer cylinder

[0066] 600: Collection Plate Detailed Implementation

[0067] In describing this invention, detailed descriptions of relevant prior art or structures will be omitted if it is determined that such detailed descriptions may obscure the essence of the invention. Furthermore, the terminology used thereafter is defined in consideration of its function in this invention and may change according to user intent or convention. Therefore, it should be defined based on the overall content of this specification. Additionally, when a constituent element is described as "comprising," unless otherwise expressly stated to the contrary, it does not mean that other constituent elements are excluded, but rather that other constituent elements may be included.

[0068] See Figures 1 to 9 According to the present invention, a substrate carrier fixture includes: a reset conveyor belt 40 for resetting the substrate carrier fixture 100, which is equipped with upper and lower clamps 120 and 130 that are in contact with it for clamping and gripping the substrate, to the substrate clamping position, i.e., the left-side direction; a limiting component disposed on the lower side of the reset conveyor belt 40 for stopping the substrate carrier fixture 100 being transferred by the reset conveyor belt 40; and an opening component 300 disposed on the substrate in a liftable manner. The upper side of the support fixture 100 is used to rotate the upper clamp 120 during the descent action, thereby opening the upper and lower clamps 120 and 130; the cleaning assembly is used to spray gas onto one side of the upper and lower clamps 120 and 130 for cleaning, and then use a brush 430 to scrub the surface of the upper and lower clamps 120 and 130; and the collection assembly is used to collect foreign objects removed from the upper and lower clamps 120 and 130 and discharge them to the outside.

[0069] See Figure 1 as well as Figure 2 The substrate support fixture 100 is equipped with a clamping frame 110 in the form of a rectangular frame composed of first, second, third, and fourth frames 111, 112, 113, and 1114. The substrate can be moved from left to right while the edge of the substrate is clamped by multiple upper and lower clamps 120 and 130 arranged on the substrate support fixture 100.

[0070] The upper clamp 120 is coupled in such a way that it can rotate from the lower frame 130 with the hinge shaft 140 as the center, and is configured such that clamping magnets 121 and 131 are built into it respectively, so that the upper clamp 120 can be reset by means of the attraction of clamping magnets 121 and 131.

[0071] The unspecified symbol "122" refers to the extension 122 that extends from the end of the upper clamp 120 and comes into contact with the lifting member 320 when the lifting member 320 of the opening assembly is lowered.

[0072] At this time, the substrate 50 is subjected to drug processing while its edge portion is clamped and held by the substrate support fixture 100, and the substrate 50, having completed the drug processing, will separate from the substrate support fixture 100.

[0073] After the substrate-carrying fixture 100, which is separated from the substrate, moves to the substrate clamping position (left side) where the clamping action on the substrate is re-performed, it will be moved by means of the reset conveyor belt 40 after moving upward or downward.

[0074] The reset conveyor belt 40, as shown Figure 2 As shown, a structure is adopted in which multiple transfer rollers 45 are spaced apart from each other and rotated in conjunction with a rotating shaft 42 equipped with multiple rotating rollers 42a.

[0075] A fixed frame 60 is disposed on the upper middle side of the reset conveyor belt 40, and a connecting frame 80 is provided that is respectively connected to one end and the other end of the fixed frame 60 and can be fixed by the lifting actuator 310.

[0076] The open component 300, such as Figure 2 , Figure 5 as well as Figure 6 As shown, it includes: a lifting actuator 310 fixed to the connecting frame 80; and a lifting component 320 that performs up and down lifting actions by means of the lifting actuator 310, and is configured to correspond to a plurality of upper and lower clamps 120 and 130 respectively disposed on one side and the other side of the clamping frame 110. When performing the lowering action, the upper and lower clamps 120 and 130 are opened by pressing the end of the upper clamp 120 downward.

[0077] The limiting components include left and right limiting parts 210 and 220, which are respectively arranged on the lower side of the transfer roller 45 of the reset conveyor belt 40 on the left and right sides in a spaced-apart manner. The substrate carrier fixture 100 is stopped by contacting the left and right side frames of the substrate carrier fixture 100 during rotation.

[0078] The left and right limiting components 210 and 220 are as follows: Figure 8 As shown, it is normally positioned under the reset conveyor belt 40. When the substrate carrier fixture 100 reaches a predetermined position, the control unit, after receiving arrival information from the detection sensor (not shown) about the substrate carrier fixture 100, loads a control signal, as... Figure 9 As shown, by rotating its end towards the upper side of the transfer roller 45 via the rotary cylinder 250, the substrate carrier fixture 100 interferes with the rotating end, thereby restricting the movement of the substrate carrier fixture 100 and stopping it.

[0079] The left and right limiting components 210 and 220 rotate by means of a pneumatic cylinder, i.e., a rotary cylinder 250, and stop the movement of the substrate support fixture 100 by contacting the left and right edges of the substrate support fixture 100.

[0080] Therefore, the left and right limiting components 210 and 220 can delay and wait the reset movement of the substrate carrier fixture 100, so that the substrate carrier fixture 100 can be sequentially transferred during the process of clamping and gripping the substrate on one side of the substrate carrier fixture 100, thereby minimizing the operation delay process and enabling continuous operation effectively.

[0081] The cleaning component is as follows Figure 2 , Figure 3 , Figure 4 as well as Figure 7 As shown, it includes: a cleaner block 405, disposed on the upper side of the transfer roller 45 of the reset conveyor belt 40 and spaced apart on one side and the other side, which can be moved back and forth to the upper and lower clamps 120 and 130 of the substrate support fixture 100 by means of the transfer cylinder 500, and has a plurality of vacuum suction ports 420 in a manner communicating with the outside; a vacuum pressure supply line 410, connected to the cleaner block 405, for supplying vacuum suction force to the interior of the cleaner block 405; and a brush 430, disposed on the cleaner block 405, which contacts the cleaner block 405 when it moves back and forth and brushes the surfaces of the upper and lower clamps 120 and 130.

[0082] The vacuum inlet 420 can provide vacuum pressure to the inside of the cleaner block 405 through the vacuum pressure supply pipeline 410, so that the foreign matter remaining in the upper and lower clamps 120 and 130 can be sucked into the inside of the cleaner block 405 during the cleaning process by the cleaning assembly.

[0083] The cleaning component's cleaning block 405 is formed in the shape of a cylindrical block and is configured to move forward and backward toward the upper and lower clamps 120 and 130 located on one side and the other side by means of a transfer cylinder 500 that causes the brush 430 to contact or be separated from the upper and lower clamps 120 and 130.

[0084] Furthermore, the cleaning block 405 has vacuum suction ports 420 at positions corresponding to the upper clamp 120 that rotates upward by means of the opening component 300 and the lower clamp 130 that is fixed to the lower side, and a brush 430 is arranged at a position close to the vacuum suction port 420 of the cleaning component.

[0085] Specifically, the brush 430, as Figure 4 as well as Figure 7 As shown, the vacuum inlet 420 is formed on the surface of the cleaner block 405 and around the vacuum inlet 420.

[0086] The cleaner block 405 has a structure in which a brush 430 and a vacuum inlet 420 are formed on the outer surface corresponding to the angle of the upper clamp 120 which rotates by means of the open component 300, and the brush 430 and the vacuum inlet 420 are formed at a position close to the surface of the lower clamp 130.

[0087] Furthermore, although the cleaning assembly can employ a dry method to vacuum-suction and remove foreign matter such as substrate debris or liquid adhering to the surfaces of the upper and lower clamps 120 and 130 by vacuum suction and brushing as described above, it can also remove foreign matter adhering to the surfaces of the upper and lower clamps 120 and 130 by a wet method using water and gas jets as described below.

[0088] The wet cleaning component, such as Figure 2 , Figure 3 as well as Figure 4 As shown, it includes: a water supply line 440, which supplies water by connecting to the cleaner block 405; a water nozzle 445, which is disposed on the cleaner block 405 and is used to spray the water supplied by the water supply line 440 onto one side of the upper and lower clamps 120 and 130; a gas supply line 450, which is connected to the cleaner block 405 and is used to supply gas to one side of the cleaner block 405; and a gas nozzle 455, which is disposed on the cleaner block 405 and is used to spray the gas supplied by the gas supply line 450 onto one side of the upper and lower clamps 120 and 130.

[0089] Considering the movement of the cleaner block 405 in one side and the other side, the water supply line 440 and the gas supply line 450 are respectively formed using flexible material hoses.

[0090] The water nozzle 445 is attached to the cleaner block 405 and connected to the end of the water supply line 440.

[0091] The gas nozzle 455 is attached to the cleaner block 405 and connected to the end of the gas supply line 450.

[0092] That is, the wet cleaning assembly sprays water supplied through the water supply pipe 440 onto one side of the upper and lower clamps 120 and 130 through the water nozzle 445 equipped on the cleaner block 405, and sprays gas supplied through the gas supply pipe 450 onto one side of the upper and lower clamps 120 and 130 through the gas nozzle 455, thereby easily removing foreign objects attached to one side of the upper and lower clamps 120 and 130.

[0093] When the wet cleaning assembly described above is used in parallel with the dry cleaning assembly described above, the efficiency of removing foreign matter from the upper and lower clamps 120 and 130 can be further improved.

[0094] The collection assembly includes a collection plate 600, which is disposed on the lower side of the cleaner block 405 for collecting water sprayed onto one side of the upper and lower clamps 120 and 130 and discharging it to the outside.

[0095] The collection plate 600 is a rectangular box with an opening at the top. It serves to collect foreign objects attached to the surfaces of the upper and lower clamps 120 and 130 onto the lower collection plate 600, while simultaneously collecting water sprayed from the wet cleaning assembly and collecting foreign objects separated by the scrubbing operation.

[0096] As described above, in the present invention, during the process of moving from left to right while the substrate 50 is clamped and held by the upper and lower clamps 120 and 130 provided on the substrate support fixture 100, the liquid medicine comes into contact with one side of the substrate 50 and the drug treatment operation is performed on the substrate, the substrate 50 is separated from the substrate support fixture 100, and then the substrate support fixture 100 separated from the substrate 50 is moved to the upper or lower side and then reset to the left side by the reset conveyor belt 40.

[0097] During the reset movement of the substrate support fixture 100 by means of the reset conveyor belt 40, when the substrate support fixture 100 reaches the lower side of the fixing frame 60 disposed in the middle of the reset conveyor belt 40, as Figure 9As shown, the movement of the substrate support fixture 100 is stopped by means of the left and right limiting members 210 and 220 of the limiting assembly.

[0098] At this time, when the left limiting member 210 detects the position of the substrate support fixture 100 by the detection sensor, it outputs a control signal from the control unit (not shown) to the rotary cylinder 250 that drives the left limiting member 210 to rotate, thereby causing it to rotate. In turn, it restricts the leftward movement of the substrate support fixture 100 by contacting the left edge of the substrate support fixture 100.

[0099] The control unit (not shown) outputs control signals to control the actions of the limit assembly and the cleaning assembly respectively.

[0100] Furthermore, the right-side limiting component 220 rotates by means of a rotary cylinder 250 whose operation is controlled by the control unit, and during the rotation, it restricts the right-side movement of the substrate support fixture 100 by contacting the right-side edge portion of the substrate support fixture 100.

[0101] The upper and lower clamps 120 and 130 are as follows: Figure 5 as well as Figure 6 As shown, in order to minimize the contact area between the opposing parts and the substrate and to improve the gripping force of the substrate, a concave-convex structure with protrusions 135 is formed on the lower clamp 130. During the clamping and gripping of the substrate and the treatment of the liquid as described above, there may be a problem that substrate debris or liquid may accumulate in the protrusions 13. Therefore, during the waiting process of the substrate carrying fixture 100 moving through the reset conveyor belt 40, a process of cleaning the upper and lower clamps 120 and 130 of the substrate carrying fixture 100 using the opening component 300 and the cleaning component is performed.

[0102] The open component 300, such as Figure 6 As shown, the lifting component 320 is driven to descend by a lifting actuator 310, which is fixed to the connecting frame 80 arranged at intervals on one side and the other side and whose operation is controlled by a control unit. The lower end of the lifting component 320 presses down in the direction onto the end (extension 122) of the upper clamp 120 located on the third and fourth frames 113 and 114 on one side and the other side of the clamping frame 110, thereby causing the upper clamp 120 to rotate about the hinge axis 140 and unfold from the lower clamp 130.

[0103] The cleaning assembly can employ both a dry method using vacuum pressure and brush 430, and a wet method using both water and gas jets.

[0104] First, when the dry cleaning assembly is rotated by the upper clamp 120, it unfolds to an inclined angle. Then, by using the drive brush 430 to contact or separate the transfer cylinder 500 on one side of the upper and lower clamps 120 and 130, the cleaning blocks 405, which are spaced apart on one side and the other side, move to the upper and lower clamps 120 and 130 respectively.

[0105] At this time, the brush 430 equipped on the cleaning block 405, as Figure 4 as well as Figure 7 As shown, the cleaner block 405 contacts the surfaces of the upper and lower clamps 120 and 130 respectively, and performs a brushing operation to clean foreign objects attached to the surfaces of the upper and lower clamps 120 and 130 when the cleaner block 405 moves back and forth by means of the transfer cylinder 500.

[0106] With the help of the brushing operation, foreign objects attached to the surfaces of the upper and lower clamps 120 and 130 will flow into the interior of the cleaner block 405 through the vacuum suction port 420 formed in the cleaner block 405 under the action of the vacuum pressure generated inside the cleaner block 405.

[0107] As described above, foreign objects separated from the upper and lower clamps 120 and 130 by means of the brush 430 will be sucked into the cleaner block 405 and then discharged to the outside, or fall downward and be collected on one side of the collection plate 600.

[0108] Furthermore, the wet cleaning assembly can be used in parallel with the wet cleaning assembly described above, such as... Figure 4 As shown, water supplied through the water supply pipe 440 connected to the cleaner block 405 is sprayed onto the upper and lower clamps 120 and 130 respectively through the water nozzle 445, and gas supplied through the gas supply pipe 450 is sprayed onto the upper and lower clamps 120 and 130 that have been sprayed with water through the gas nozzle 455, thereby removing water and foreign objects.

[0109] At this time, the water supply pipe 440 and the gas supply pipe 450 are connected to the cleaner block 405, thereby being linked with the movement of the cleaner block 405 in one side and the other side.

[0110] The wet cleaning assembly can easily remove foreign matter remaining on the surfaces of the upper and lower clamps 120 and 130 by spraying water onto the upper clamp 120 and lower clamp 130, which are open by means of the open assembly 300. Moreover, the water on the upper and lower clamps 120 and 130 can be easily removed by means of the gas pressure ejected from the gas nozzle 455.

[0111] The collection plate 600 of the collection assembly functions to collect the water sprayed from the water nozzle 445 and the foreign objects removed from the upper and lower clamps 120 and 130 and discharge them to the outside.

[0112] After the cleaning operation of the substrate support fixture 100 of the cleaning assembly as described above is completed, in order to separate the cleaning block 405, which is close to the upper and lower clamps 120 and 130, from the side of the upper and lower clamps 120 and 130, it is reset to its original position by the transfer cylinder 500.

[0113] Next, the control unit will output a control signal to control the limiting components, thereby rotating the ends of the left and right limiting components 210 and 220 to the lower side of the transfer roller 45, and using the transfer roller 45 of the reset conveyor belt 40 to move the substrate carrying fixture 100 to the upper or lower side.

[0114] Next, the substrate carrier fixture 100 will move to the upper or lower side of the position where the substrate 50 is clamped by the substrate carrier fixture 100, i.e., the clamping position (left side position), by means of the reset conveyor belt 40, and then perform a lifting and lowering action to reset to the position where the substrate can be clamped, i.e., the original position.

[0115] The cleaning apparatus for the substrate carrier fixture 100 described above can be used in substrate processing processes such as wet pretreatment, etching, development, stripping, and washing.

[0116] Therefore, in order to reuse the clamps of the substrate support fixture 100 after completing the drug treatment process of the substrate 50, the present invention can delay and wait the reset of the substrate support fixture 100 by using a limiting component in conjunction with the clamping process of the substrate, thereby efficiently and continuously performing the substrate clamping operation and minimizing the operation delay. In addition, foreign matter remaining on the upper and lower clamps 120 and 130 of the substrate support fixture 100 can be easily removed by using a dry cleaning component or a cleaning component that combines dry and wet methods, thereby improving the cleaning efficiency of the substrate support fixture 100.

[0117] Furthermore, the present invention can easily open the upper clamp 120 configured in the third and fourth frames 113 and 114 by using the lifting component 320 of the opening component 300 that performs the up and down lifting action, thereby separating it from the lower clamp 130. By making the brush 430 contact with the opened upper and lower clamp sides 120 and 130 and brushing, the substrate debris or liquid remaining in the upper and lower clamps 120 and 130 can be easily removed by means of physical contact.

[0118] Furthermore, the present invention can select a dry cleaning method or a dry / wet cleaning method cleaning component according to the environment of the place of use and the cleaning efficiency, thereby improving the cleaning efficiency of the substrate support fixture 100.

[0119] As described above, specific embodiments have been illustrated in the detailed description of the present invention; however, various modifications can be made without departing from the scope of the invention. Therefore, the scope of the invention is not limited to the embodiments described above, but should be defined within the scope of the claims described below and their equivalents.

[0120] That is, the present invention described above is not limited to the specific preferred embodiments described above. Those skilled in the art to which this invention pertains can make various modifications without departing from the spirit of the invention as claimed in the claims, and the modifications described above are included within the scope of the claims.

Claims

1. A cleaning apparatus for a substrate support fixture, characterized in that, include: The reset conveyor belt (40) is used to reset the substrate carrying fixture (100) equipped with multiple upper and lower clamps (120, 130) that clamp and grip the edge portion of the substrate (50) by means of the first, second, third, and fourth frames (111, 112, 113, 114) respectively configured to clamp the clamping frame (110) to the substrate clamping position. A limiting component is configured on the underside of the reset conveyor belt (40) to stop the substrate carrier fixture (100) being transferred via the reset conveyor belt (40); An opening component (300) is configured to be raised and lowered on the upper side of the substrate support fixture (100) for rotating the upper clamp (120) during a lowering action, thereby opening the upper and lower clamps (120, 130). The cleaning assembly is used to spray gas onto one side of the upper and lower clamps (120, 130) for cleaning, and then use a brush (430) to scrub the surface of the upper and lower clamps (120, 130); as well as, A collection component is used to collect and discharge foreign objects removed from the upper and lower clamps (120, 130) to the outside. The cleaning assembly includes: The cleaner block (405) is positioned on the upper side of the transfer roller (45) of the reset conveyor belt (40) and can be moved back and forth to the upper and lower clamps (120, 130) of the substrate support fixture (100) by means of the transfer cylinder (500), and has a plurality of vacuum suction ports (420) in a manner that communicates with the outside. A vacuum pressure supply line (410) is connected to the cleaner block (405) for supplying vacuum suction force to the interior of the cleaner block (405); and, A brush (430) is disposed on the cleaner block (405) and comes into contact with the upper and lower clamps (120, 130) when the cleaner block (405) moves back and forth, and brushes the surfaces of the upper and lower clamps (120, 130).

2. The cleaning apparatus for a substrate support fixture according to claim 1, characterized in that, The open component (300) includes: The lifting actuator (310) is fixed to the connecting frame (80); and, The lifting component (320) performs up and down lifting actions by means of the lifting actuator (310) and is configured to correspond to the multiple upper and lower clamps (120, 130) respectively located on the third and fourth frames (113, 114) of the clamping frame (110). When performing the lowering action, the upper and lower clamps (120, 130) are opened by pressing the end of the upper clamp (120) downward.

3. The cleaning apparatus for a substrate support fixture according to claim 1, characterized in that, The limiting component includes: Left and right limit components (210, 220) are respectively arranged on the underside of the transfer roller (45) of the reset conveyor belt (40) in a spaced-apart manner, and stop the substrate carrier fixture (100) by contacting the left and right side frames of the substrate carrier fixture (100) during rotation.

4. The cleaning apparatus for a substrate support fixture according to claim 1, characterized in that, The cleaning assembly includes: A water supply line (440) supplies water by connecting to the cleaner block (405); A water nozzle (445) is provided on the cleaner block (405) and is used to spray water supplied through the water supply line (440) onto one side of the upper and lower clamps (120, 130); A gas supply line (450) is connected to the cleaner block (405) and used to supply gas to one side of the cleaner block (405); and, A gas nozzle (455) is provided on the cleaner block (405) and is used to spray gas supplied through the gas supply line (450) onto one side of the upper and lower clamps (120, 130).

5. The cleaning apparatus for a substrate support fixture according to claim 1, characterized in that, The cleaning unit's cleaning block (405) is formed in the form of a cylindrical block, and vacuum suction ports (420) are formed at positions corresponding to the upper clamp (120) that rotates upward by means of the open component (300) and the lower clamp (130) that is fixed to the lower side. The brush (430) is positioned close to the vacuum inlet (420) of the cleaning assembly.

6. The cleaning apparatus for a substrate support fixture according to claim 4, characterized in that, The collection component includes: A collection plate (600) is disposed on the underside of the cleaner block (405) for collecting water sprayed onto one side of the upper and lower clamps (120, 130) and discharging it to the outside.

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