A method for correcting and maintaining the temperature of a discharge lamp

Abstract

The present invention discloses a method for correcting and maintaining the temperature of a discharge lamp, belonging to the technical field of discharge lamp temperature correction, and comprising the following steps: measuring multiple sets of vertically measured temperature values ​​and tilted measured temperature values ​​of the discharge lamp under a tilt angle of ; fitting the multiple sets of measured vertically measured temperature values ​​and tilted measured temperature values ​​to obtain a relationship; measuring the actual tilted measured temperature and calculating the actual temperature value through the relationship; and adjusting a cooling component based on the difference between the actual temperature value and the target temperature value so that the temperature of the discharge lamp is maintained at the target temperature value. The method for correcting and maintaining the temperature of a discharge lamp proposed by the present invention can effectively monitor and correct the temperature of the discharge lamp in real time, and dynamically adjust the cooling intensity of the cooling component through an adjustment component based on the difference between the actual temperature value and the target temperature value. The method is convenient and easy to implement.

Description

Technical Field

[0001] The present invention relates to the field of discharge lamp temperature correction, and in particular to a method for correcting and maintaining the temperature of a discharge lamp. Background Art

[0002] A laser-driven gas discharge lamp (LDL) utilizes lasers to maintain the glow of a gas plasma. Typically, it utilizes a dedicated lamp housing system. The laser beam, after being diverged, strikes a reflector bowl, where it is reflected and focused at the center of the lamp, ionizing the gas within the lamp to form a plasma that emits light. This plasma continuously emits light across a continuous spectrum, causing the lamp to heat up. If this temperature exceeds the tolerance limit of the lamp housing, it can rupture. Therefore, the lamp temperature must be monitored in real time and cooled to maintain it near the target temperature.

[0003] Usually, the temperature of the discharge lamp measured vertically is the true temperature. However, when the discharge lamp is actually working, the laser is reflected from above into the reflective bowl, and vertical measurement will affect the normal operation of the discharge lamp. Therefore, an infrared temperature sensor is placed on the upper edge of the reflective bowl for inclined measurement. However, there is a certain error between the temperature obtained by inclined measurement and the true temperature, which needs to be corrected. Summary of the Invention

[0004] The present invention aims to provide a method for correcting and maintaining the temperature of a discharge lamp, so as to adjust the actual temperature value of the discharge lamp to be near a target temperature value.

[0005] To achieve the above object, the technical solution of the present invention is: S1, at an inclination angle of In the case of multiple vertical measurement temperature values ​​of the discharge lamp, and tilt measurement temperature values ; S2, the measured multiple sets of vertical temperature values and tilt measurement temperature values Perform fitting and obtain the fitting formula ; S3, measured actual tilt measurement temperature , the actual temperature value is calculated by the fitting formula ; S4, according to the actual temperature value and target temperature value The difference between the two values ​​adjusts the cooling of the discharge lamp to keep the temperature of the discharge lamp at the target temperature. ; S5, when the actual temperature value and target temperature value When the difference is greater than 0, repeat S3-S4.

[0006] In a preferred embodiment of the present invention, in S1, the discharge lamp is arranged in a vertical direction, the first sensor is perpendicular to the discharge lamp, and the vertical measurement temperature value is measured. ; The second sensor is tilted at an angle Set above the first sensor, measure the tilt measurement temperature value .

[0007] In a preferred embodiment of the present invention, the first sensor and the second sensor are infrared temperature sensors with a detection wavelength of 8-14 μm.

[0008] In a preferred embodiment of the present invention, in S3, the discharge lamp is installed in a reflective bowl, the first sensor is removed, and the second sensor is tilted at an angle Set at the upper edge of the reflective bowl to measure the actual tilt measurement temperature value .

[0009] In a preferred embodiment of the present invention, in S4, a cooling assembly is installed on the discharge lamp, and the cooling assembly is connected to an adjustment assembly, and the cooling capacity of the cooling assembly is adjusted by controlling the adjustment assembly.

[0010] In a preferred embodiment of the present invention, in S4, the cooling assembly is an air cooling device installed at the anode end of the discharge lamp, and the air cooling device supplies cooling gas to the cooling assembly.

[0011] In a preferred embodiment of the present invention, the cooling gas is compressed air or nitrogen, and the supply pressure is ≥0.8 MPa.

[0012] The method for correcting and maintaining the temperature of a discharge lamp proposed in the present invention can effectively monitor and correct the temperature of the discharge lamp in real time, and dynamically adjust the cooling intensity of the cooling component through the adjustment component according to the difference between the actual temperature value and the target temperature value. The method is convenient and easy to implement.

[0013] In order to make the above features and advantages of the present invention more clearly understood, embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 Schematic diagram of the structure of an optical device embodiment of the present invention.

[0015] Figure 2 Schematic diagram of temperature detection of the present invention.

[0016] Figure 3 Flow chart of temperature correction and maintenance of the present invention.

[0017] Figure 4This is a diagram showing the relationship between the tilted temperature value and the vertical temperature value when the tilt angle is 55°.

[0018] Figure 5 This is a graph showing the relationship between the tilted temperature value and the vertical temperature value when the tilt angle is 75°.

[0019] Figure 6 It is a line graph of the temperature correction coefficient at different tilt angles.

[0020] 1-optical device; 11-lamp house system; 111-optical path component; 112-reflector bowl; 12-discharge lamp; 13-cooling component; 14-adjustment component; 2-temperature sensor; 21-first sensor; 22-second sensor; -Vertical measurement of temperature; - Tilt measurement temperature value; - tilt angle; - Real-time tilt measurement of temperature values; -actual temperature value; -Target temperature value.

[0021] In the drawings, like reference numerals refer to the same drawing elements. DETAILED DESCRIPTION

[0022] To make the purpose and technical solutions of the embodiments of the present invention more clear, the technical solutions of the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the described embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0023] In the present invention, for the sake of clarity, the following explanation is made: the observer faces the Figure 1 For observation, the upper end of the discharge lamp is the "anode end" and the lower end is the "cathode end". For the convenience of explanation, the up and down, left and right directions in the manual correspond to the observer facing the adjacent Figure 1 The above description is only for the purpose of clearly describing the present invention, and does not indicate or imply that the structures or components referred to must have a specific orientation or be constructed in a specific orientation, and therefore should not be understood as limiting the present invention.

[0024] like Figure 1As shown, the optical device 1 includes a lamp house system 11, a discharge lamp 12, a cooling assembly 13, and an adjustment assembly 14. The discharge lamp 12 is vertically mounted in the lamp house system 11. The cooling assembly 13 is mounted on the discharge lamp 12 and is used to cool the discharge lamp 12. The adjustment assembly 14 is located outside the lamp house system 11 and is connected to the cooling assembly 13 to control the cooling capacity of the cooling assembly 13. The lamp house system 11 emits a laser beam, which is reflected and focused, causing the discharge lamp 12 to emit light. The light emitted by the discharge lamp 12 is then reflected and output.

[0025] Specifically, the upper end of the discharge lamp 12 is the anode end, and the lower end is the cathode end.

[0026] In this embodiment, the cooling component 13 is installed at the anode end of the gas discharge lamp 12 to cool the anode of the discharge lamp 13. The cooling component 13 can be an air-cooling device, such as a cold air nozzle, for delivering cooling gas to the discharge lamp 12. The cooling gas is compressed air or nitrogen, and the supply pressure is ≥0.8 MPa. Correspondingly, the regulating component 14 is used to regulate the pressure of the cooling gas output by the cooling component 13, and can be a pressure regulating valve connected to the cooling component 13 through a pipeline. In other embodiments, the cooling component 13 can also be other devices that can be used to cool the discharge lamp 12, and is not limited to the air-cooling device described in this embodiment. The installation position is not limited to the anode end of the discharge lamp 12. The corresponding regulating component 14 can be a matching device that can adjust the cooling capacity.

[0027] The lamp house system 11 includes an optical path component 111 and a reflector 112. The optical path component 111 is located above the reflector 112. Laser light is reflected and focused by the optical path component 111 and the reflector 112, causing the discharge lamp 12 to emit light. The discharge lamp 12 is vertically mounted in the reflector 112.

[0028] The target temperature value is set according to the performance of the discharge lamp 12 , the temperature of the discharge lamp 12 is at the target temperature value There is no danger of rupture when the temperature sensor 2 is near the discharge lamp 12. When measuring the temperature of the discharge lamp 12, an infrared temperature sensor is selected, preferably a monochromatic sensor. Monochromatic sensors have the advantages of being inexpensive, small in size, and easy to integrate. The detection wavelength of the infrared temperature sensor 2 is preferably 8-14 μm. The measurement band is far away from the laser wavelength and the wavelength of the light emitted by the discharge lamp 12, which can effectively reduce the interference of ambient light signals on the measurement.

[0029] like Figure 2As shown, the temperature sensor 2 includes a first sensor 21 and a second sensor 22. The first sensor 21 is perpendicular to the length direction of the discharge lamp 12 and measures the temperature of the discharge lamp 12 vertically. The vertical measurement temperature value is set to , vertical measurement temperature value The second sensor 22 is set at the upper edge of the reflective bowl 112, and the discharge lamp 12 is tilted at a certain angle for measurement. The temperature value obtained by the tilt measurement at the measuring angle is set to be the tilt angle of the infrared temperature sensor 2. , assuming the tilt measurement temperature value is .

[0030] When the discharge lamp 12 is working, the first sensor 21 will be blocked by the reflective bowl 112. If it is set in the reflective bowl 112, it will affect the light path in the reflective bowl 112, so the real temperature cannot be measured directly, and the temperature value is measured at an angle. Vertically measured temperature value There is a certain error, so it is necessary to measure the temperature value based on the actual tilt Correction to get the actual temperature value and the actual temperature value obtained after correction Adjust the cooling capacity of the cooling component 13 to keep the temperature of the discharge lamp 12 at the target temperature value nearby.

[0031] Please combine Figure 2 and Figure 3 A method for correcting and maintaining the temperature of a discharge lamp comprises the following steps:

[0032] S1. The discharge lamp 12 is arranged in a vertical direction, and the first sensor 21 is perpendicular to the discharge lamp 12, that is, the first sensor 21 is arranged horizontally to measure the vertical temperature value. , set the tilt angle to , the second sensor 22 is tilted at an angle Set above the first sensor 21, used to measure the tilt measurement temperature value , use a hot air gun to heat the discharge lamp 12 to change the temperature, and measure multiple sets of vertical temperature values and tilt measurement temperature values data.

[0033] S2. Obtain multiple sets of vertically measured temperature values and tilt measurement temperature values Perform fitting and obtain the fitting formula Formula (1). In formula (1), is the correction factor, is a constant.

[0034] S3, remove the first sensor 21, install the discharge lamp 12 in the reflective bowl 112 to work normally, and the second sensor 22 is tilted at an angle Set at the upper edge of the reflective bowl 112, measure the actual tilt measurement temperature value , the actual tilt measured temperature value Substitute into the above formula (1), , calculate the actual temperature value .

[0035] S4, according to the actual temperature value and target temperature value The adjustment component 14 adjusts the cooling capacity of the cooling component 13 so that the temperature of the discharge lamp 12 is maintained at the target temperature value. nearby.

[0036] S5, when the actual temperature value and target temperature value When the difference is greater than 0, the cycle S3-S4 is repeated to keep the temperature of the discharge lamp 12 at the target temperature during operation. nearby.

[0037] In S1, the location of the first sensor 21 is not suitable when the discharge lamp 12 is operating normally. Therefore, in order to obtain equation (1), a heat gun is used to change the temperature of the discharge lamp 12 under abnormal operating conditions. When the discharge lamp 12 is operating normally, that is, when the discharge lamp 12 is installed in the reflector 112 in S3, the first sensor 21 will be blocked by the reflector 112, so the first sensor 21 is removed.

[0038] In S4, a PID algorithm or other empirical methods may be used to control the regulating component 14. The cooling capacity of the cooling component 13 may be the cooling air flow rate, cooling air temperature, etc., depending on the selected device.

[0039] Please combine Figure 4 、 Figure 5 and Figure 6 , in actual detection operation, the tilt angle Commonly used values ​​are 55° and 75°, such as Figure 4 As shown, Figure 4 When the tilt angle , tilt measurement temperature value and vertical temperature measurement The relationship diagram of ,constant .like Figure 5 As shown, Figure 5 When the tilt angle , tilt measurement temperature value and vertical temperature measurement The relationship diagram of ,constant .like Figure 6 As shown, Figure 6 is the tilt angle Temperature correction coefficient at different angles The line chart from Figure 6 It can be seen that when the tilt angle hour, Tilt angle hour, , when the tilt angle When the temperature correction factor is further increased Continue to grow.

[0040] The present invention proposes a method for correcting and maintaining the temperature of a discharge lamp, which can effectively monitor and correct the temperature of the discharge lamp in real time, and dynamically adjust the cooling capacity of the cooling component by adjusting the component according to the difference between the actual temperature value and the target temperature value. The method is convenient and easy to implement.

[0041] Although the present invention has been disclosed above with reference to the embodiments, they are not intended to limit the present invention. Anyone with ordinary skill in the art may make slight changes and modifications without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention shall be determined by the scope of the appended patent applications.

Claims

1. A method for correcting and maintaining the temperature of a discharge lamp, characterized in that: The following steps are involved: S1. Place the discharge lamp in a vertical direction, with the first sensor perpendicular to the discharge lamp and the second sensor at an inclined angle. Setting; heating the discharge lamp to change the temperature, at an inclination angle of In the case of multiple vertical measurement temperature values ​​of the discharge lamp, and tilt measurement temperature values ; S2. Measure multiple groups of vertical temperature values and tilt measurement temperature values Perform fitting and obtain the fitting formula ; S3, remove the first sensor, install the discharge lamp in the reflective bowl to work normally, and measure the actual tilt temperature value with the second sensor. , the actual temperature value is calculated by the fitting formula ; S4, according to the actual temperature value and target temperature value The difference between the two values ​​adjusts the cooling of the discharge lamp to keep the temperature of the discharge lamp at the target temperature. ; S5, when the actual temperature value and target temperature value When the difference is greater than 0, repeat S3-S4.

2. A method for correcting and maintaining the temperature of a discharge lamp as claimed in claim 1, characterized in that: In the step S1, the first sensor measures a vertical temperature value The second sensor is tilted at an angle Set above the first sensor, measure the tilt measurement temperature value .

3. A method for correcting and maintaining the temperature of a discharge lamp as claimed in claim 2, characterized in that: The first sensor and the second sensor are infrared temperature sensors with a detection wavelength of 8-14 μm.

4. A method for correcting and maintaining the temperature of a discharge lamp as claimed in claim 2, characterized in that: In S3, the discharge lamp is installed in the reflective bowl, the first sensor is removed, and the second sensor is tilted at an angle Set at the upper edge of the reflective bowl to measure the actual tilt measurement temperature value .

5. A method for correcting and maintaining the temperature of a discharge lamp as claimed in claim 1, characterized in that: In S4, a cooling assembly is installed on the discharge lamp, and the cooling assembly is connected to an adjusting assembly. The cooling capacity of the cooling assembly is adjusted by controlling the adjusting assembly.

6. A method for correcting and maintaining the temperature of a discharge lamp as claimed in claim 5, characterized in that: In S4, the cooling assembly is an air cooling device installed at the anode end of the discharge lamp, and the air cooling device supplies cooling gas to the cooling assembly.

7. A method for correcting and maintaining the temperature of a discharge lamp as claimed in claim 6, characterized in that: The cooling gas is compressed air or nitrogen, and the supply pressure is ≥0.8MPa.

Images