Surface treatment method of flexible substrate

Abstract

The surface treatment method of the flexible substrate comprises the following steps: cleaning the flexible substrate; forming a diamond-like carbon layer on the flexible substrate through ion beam deposition; plasma fluorination treatment is carried out on the diamond-like carbon layer; and testing the diamond-like carbon layer. According to the method, the flexible substrate and the diamond-like carbon layer can be combined together, the diamond-like carbon layer has good mechanical and chemical performance, the structure has high flexibility and ductility after the flexible substrate and the diamond-like carbon layer are combined, and the method can be used in the fields of flexible electronic products, medical equipment and the like.

Description

Technical Field

[0001] The present invention relates to the technical field of flexible material processing, and particularly to a surface treatment method for a flexible substrate. Background Art

[0002] With the increasing development of materials science, it is usually necessary to coat and process diamond-like carbon films on flexible materials. The flexible materials are usually plastics, rubbers, etc., with relatively soft textures, thus limiting the scope of use of flexible materials to a certain extent. The diamond-like carbon film is an amorphous carbide film prepared by using materials similar to silicon carbide or tungsten carbide, etc., with high hardness and being brittle.

[0003] Therefore, how to combine the diamond-like carbon layer and the flexible material to obtain improved performance and expand the scope of use of the flexible material is a difficult problem in this field. Summary of the Invention

[0004] The purpose of the present invention is to provide a surface treatment method for a flexible substrate. This method can combine the flexible substrate and the diamond-like carbon layer. The diamond-like carbon layer has good mechanical and chemical properties. After the two are combined, the structure has high flexibility and ductility, and can be used in fields such as flexible electronic products and medical devices.

[0005] To achieve the above purpose, the surface treatment method for the flexible substrate of the present invention includes the following steps:

[0006] Clean the flexible substrate;

[0007] Form a diamond-like carbon layer on the flexible substrate by ion beam deposition;

[0008] Perform plasma fluorination treatment on the diamond-like carbon layer; and

[0009] Test the diamond-like carbon layer.

[0010] Compared with the prior art, in the method of the present invention, first, the flexible substrate is cleaned to remove surface impurities and contaminants. Then, a diamond-like carbon layer is formed on the flexible substrate by ion beam deposition, so that the obtained diamond-like carbon layer has excellent mechanical and chemical properties. Then, plasma fluorination treatment is performed on the diamond-like carbon layer to perform surface fluorination modification on the diamond-like carbon layer. On the one hand, there is the action of fluorine-containing groups, and on the other hand, there is an etching effect. At the same time, carbon-carbon double bonds are opened to form a cross-linked structure, forming a composite thin layer. Finally, the tested layer has high flexibility and ductility, making the application scope of the flexible substrate wider, such as being applicable to fields such as flexible electronic products and medical devices.

[0011] As an example, the ion beam deposition includes: using methane gas as the working gas, controlling the ion beam energy to be 200 eV to 300 eV, and the injection amount of the methane gas being 0.5 - 1.0 sccm.

[0012] Preferably, the time of the ion beam deposition is 30 - 50 minutes.

[0013] Preferably, the ion beam deposition is carried out at room temperature.

[0014] As an example, the plasma fluorination treatment includes: using carbon tetrafluoride as the working gas to perform surface fluorination treatment on the diamond-like carbon layer.

[0015] Preferably, the tests include thickness measurement, friction coefficient test, soft hardness test, and oxidation resistance test.

[0016] Preferably, the flexible substrate is plastic or rubber. Detailed implementation manners

[0017] To make the above objects, features, and advantages of the present application more obvious and understandable, the following describes the detailed implementation manners of the present application in conjunction with some examples. Many specific details are set forth in the following description to fully understand the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the connotation of the present application. Therefore, the present application is not limited by the specific examples disclosed below.

[0018] In the description of the present application, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of such features. In the description of the present application, "a plurality of" means at least two, such as two, three, etc., unless otherwise specifically defined.

[0019] In the present application, unless otherwise clearly specified and limited, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over", and "on top of" the second feature may be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "below", and "beneath" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0020] It should be noted that when an element is referred to as "fixed to" or "disposed on" another element, it can be directly on the other element or there may also be an intermediate element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intermediate element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and do not represent the only implementation.

[0021] The surface treatment method of the flexible substrate of the present invention will be further described below in conjunction with embodiments, but the present invention is not limited thereby. The method of the present invention aims to provide a surface treatment method for a flexible substrate, which can combine the flexible substrate and a diamond-like carbon layer. The diamond-like carbon layer has good mechanical and chemical properties, and the combination of the two makes the structure highly flexible and ductile, and can be used in fields such as flexible electronic products and medical devices.

[0022] In an embodiment of the surface treatment method of the flexible substrate of the present invention, the following steps are included:

[0023] Clean the flexible substrate;

[0024] Form a diamond-like carbon layer on the flexible substrate by ion beam deposition;

[0025] Perform plasma fluorination treatment on the diamond-like carbon layer; and

[0026] Test the diamond-like carbon layer.

[0027] In the method of the present invention, first, the flexible substrate is cleaned to remove surface impurities and contaminants, and then a diamond-like carbon layer is formed on the flexible substrate by ion beam deposition, so that the obtained diamond-like carbon layer has excellent mechanical and chemical properties. Then, plasma fluorination treatment is performed on the diamond-like carbon layer to perform surface fluorination modification on the diamond-like carbon layer. On the one hand, there is the action of fluorine-containing groups, and on the other hand, there is an etching effect. At the same time, carbon-carbon double bonds are opened to form a cross-linked structure to form a composite thin layer. Finally, the tested layer has high flexibility and ductility, making the application range of the flexible substrate wider, such as being applicable to fields such as flexible electronic products and medical devices.

[0028] Specifically, first, the flexible substrate is cleaned. Optionally, the flexible substrate is plastic or rubber. For example, polyimide is used as the flexible substrate, and it is placed in a vacuum chamber for exposure cleaning to remove surface impurities and contaminants.

[0029] Next, a diamond-like carbon layer is prepared on the flexible substrate by using the ion beam deposition technique. Among them, the ion beam deposition technique adopts the method of injecting working gas, and the following conditions can be selected for the preparation of the diamond-like carbon layer. Specifically, methane (CH 4) gas is used as the working gas, the ion beam energy is controlled to be 200 eV to 300 eV, the injection amount of methane gas is 0.5 - 1.0 sccm, and ion beam deposition is carried out at room temperature. Preferably, the ion beam deposition time is 30 - 50 minutes. Thus, the thickness of the prepared diamond-like carbon layer is 5 - 10 nm.

[0030] Subsequently, post-treatment is carried out on the surface of the diamond-like carbon layer, and its surface is subjected to plasma fluorination treatment to enhance the surface adhesion and biocompatibility of the diamond-like carbon layer. Specifically, carbon tetrafluoride (CF4) is used as the working gas to perform surface fluorination treatment on the diamond-like carbon layer. Plasma fluorination treatment can perform surface fluorination modification on the diamond-like carbon layer. On the one hand, there is the action of fluorine-containing groups, and on the other hand, there is an etching effect. At the same time, carbon-carbon double bonds are opened to form a cross-linked structure, forming a composite thin layer. Thus, the obtained layer surface has improved flexibility, ductility and stability.

[0031] Finally, the obtained diamond-like carbon layer is tested and analyzed, including morphology observation, thickness measurement, friction coefficient test, soft hardness test, antioxidant test, etc., to ensure that the layer on the flexible substrate passes the performance test for use.

[0032] In summary, the method of the present invention first cleans the flexible substrate to remove surface impurities and pollutants, and then forms a diamond-like carbon layer on the flexible substrate by ion beam deposition, so that the obtained diamond-like carbon layer has excellent mechanical and chemical properties. Subsequently, plasma fluorination treatment is carried out on the diamond-like carbon layer, thereby performing surface fluorination modification on the diamond-like carbon layer. On the one hand, there is the action of fluorine-containing groups, and on the other hand, there is an etching effect. At the same time, carbon-carbon double bonds are opened to form a cross-linked structure, forming a composite thin layer. Finally, the tested layer has high flexibility and ductility. After the flexible substrate and the diamond-like carbon layer are combined, the application range of the flexible substrate is wider, such as it can be used in the fields of flexible electronic products and medical devices, etc.

[0033] The above-disclosed are only the preferred embodiments of the present invention. Of course, the scope of the rights of the present invention cannot be limited by this. Therefore, equivalent changes made according to the scope of the patent application of the present invention still fall within the scope covered by the present invention.

Claims

1. A surface treatment method for a flexible substrate, characterized in that, It includes the following steps: Clean the flexible substrate; Form a diamond-like carbon layer on the flexible substrate by ion beam deposition; Perform plasma fluorination treatment on the diamond-like carbon layer; And Test the diamond-like carbon layer.

2. The surface treatment method of the flexible substrate according to claim 1, wherein, The ion beam deposition includes: using methane gas as the working gas, controlling the ion beam energy to be 200 eV to 300 eV, and the injection amount of the methane gas to be 0.5 - 1.0 sccm.

3. The surface treatment method of the flexible substrate according to claim 2, characterized in that The time of the ion beam deposition is 30 - 50 minutes.

4. The surface treatment method of the flexible substrate according to claim 1, wherein, The ion beam deposition is carried out at room temperature.

5. The surface treatment method of the flexible substrate according to claim 1, characterized in that The plasma fluorination treatment includes: using carbon tetrafluoride as the working gas to perform surface fluorination on the diamond-like carbon layer.

6. The surface treatment method of the flexible substrate according to claim 1, characterized in that The time of the plasma fluorination treatment is 15 - 30 minutes.

7. The surface treatment method of the flexible substrate according to claim 1, wherein The test includes thickness measurement, friction coefficient test, soft hardness test, and antioxidant property test.

8. The surface treatment method of the flexible substrate according to claim 1, characterized in that The flexible substrate is plastic or rubber.