Nanosecond-level high-voltage steep pulse generator

Abstract

The invention discloses a nanosecond high-voltage steep pulse generator, which relates to the technical field of high-voltage pulses and comprises a microcontroller, a Marx circuit, a trigger control module, an isolation high-voltage driving module, a safety module and a power management module, the microcontroller comprises a main chip, and parameters of the output end of the Marx circuit are collected in real time through the microcontroller. The trigger control module generates a nanosecond synchronous trigger signal; the isolation high-voltage driving module converts a low-voltage signal of the microcontroller into a high-voltage driving signal; the safety module is used for monitoring the state of the system, immediately cutting off a trigger signal when a fault occurs, and protecting the Marx circuit and the microcontroller; according to the invention, the microcontroller is used for generating synchronous trigger pulses and accurately triggering charging and discharging of the capacitor of the Marx circuit, and the high-speed ADC arranged inside can accurately control and detect voltage balance, trigger signals and fault protection.

Description

Technical Field

[0001] The present invention relates to the technical field of high-voltage pulse technology, and particularly to a nanosecond-level high-voltage steep pulse generator. Background Art

[0002] Due to differences in resistor or capacitor parameters in the Marx circuit, the voltage of a certain stage of capacitor may be too low, and it cannot be superimposed on the total output during discharge. The embedded core controller and the high-voltage circuit need to be strictly electrically isolated (such as optocouplers, isolation drivers), otherwise there will be breakdown or safety hazards. The discharge of the high-voltage switch will generate strong electromagnetic interference, which may affect the signal integrity of the main chip.

[0003] A Chinese patent discloses a MARX high-voltage pulse power supply based on DSP control (Publication No.: CN118117911A). Through the DSP signal generation circuit, the drive amplification circuit, the multi-stage Marx circuit and the auxiliary power supply, the adjustable pulse signal passes through the drive amplification circuit and then the multi-stage Marx circuit generates high-voltage pulses. However, it lacks a protection circuit and cannot effectively protect the circuit safety. Summary of the Invention

[0004] To solve the above technical problems, the present invention provides a nanosecond-level high-voltage steep pulse generator, which includes a microcontroller, a Marx circuit, a trigger control module, an isolated high-voltage drive module, a safety module and a power management module; the microcontroller includes a main chip for generating a trigger signal and real-time collecting the parameters at the output end of the Marx circuit through the microcontroller; the trigger control module generates a nanosecond-level synchronous trigger signal to control the discharge timing of all switching devices in the Marx circuit; the isolated high-voltage drive module converts the low-voltage signal of the microcontroller into a high-voltage drive signal; The safety module is used to monitor the system status and immediately cut off the trigger signal in case of a fault to protect the Marx circuit and the microcontroller; the power management module supplies power to each module of the system.

[0005] Preferably: The safety module includes an overvoltage protection circuit, an overcurrent protection circuit and a temperature protection circuit, and the system status is monitored in real time through a comparator, a Hall sensor and a temperature sensor, and the trigger signal is cut off in case of a fault; The overvoltage protection circuit includes a high-voltage voltage divider, an isolation amplifier and a comparator, and the high-voltage voltage divider, the isolation amplifier and the comparator are all electrically connected to the main chip; The overcurrent protection circuit includes a Hall sensor and a relay, and the Hall sensor and the relay are all electrically connected to the main chip; The temperature protection circuit includes a temperature sensor, an ADC and a heat dissipation module, and the temperature sensor, the ADC and the heat dissipation module are electrically connected to the main chip.

[0006] Preferably, it further includes a monitoring module that monitors the parameters at the output end of the Marx circuit in real time and feeds them back to the microcontroller.

[0007] Preferably, the microcontroller is built-in with a high-speed ADC module; The high-speed ADC is used to collect the voltage and current data output by the Marx circuit in real time, and dynamically adjust the trigger signal parameters through the PID algorithm.

[0008] Preferably, the high-speed ADC is connected to a high-voltage divider, and the collected voltage signal is converted into a low-voltage signal by the isolation module and then input into the microcontroller, and the noise is eliminated through the FIR filter.

[0009] Preferably, the trigger control module controls the conduction timing of all switching devices in the Marx circuit through the global clock; The timing resolution of the synchronous trigger signal is less than 1 ns, and an independent trigger signal is generated through the parallel logic module of the microcontroller, so that the multi-stage capacitor units discharge synchronously.

[0010] Preferably, the isolated high-voltage drive module includes a high-voltage drive module and an isolation module; the isolation module realizes electrical isolation between high-voltage and low-voltage signals through optocoupler, magnetic isolation or capacitive isolation; the high-voltage drive module converts the low-voltage trigger signal of the microcontroller into a high-voltage signal for driving the switching devices of the Marx circuit.

[0011] Preferably, it further includes a communication module for providing a communication interface for the microcontroller.

[0012] Preferably, the power management module is a high-voltage power supply for managing the Marx circuit, and the Marx circuit includes multi-stage capacitor units, and the multi-stage capacitor units are connected in series; Each stage of capacitor unit includes a capacitor, a switching device and a resistor, and voltage superposition is realized through the series discharge of the multi-stage capacitor units.

[0013] Preferably, the microcontroller dynamically adjusts the trigger signal parameters through the interface, and uploads the monitoring data or receives remote control instructions; the microcontroller is selected from DSP, FPGA or STM32.

[0014] The technical effects and advantages of the present invention: 1. In the present invention, the safety module monitors the voltage and current in real time through multiple sensors and comparators, and is controlled by the main chip to ensure that the overvoltage, overcurrent and temperature are all within the safe range, and once the range is exceeded, the protection measures are triggered.

[0015] 2. In the present invention, voltage superposition is realized through the series discharge of multi-stage capacitors, which has the functions of fast reaction rate and low loss, and can achieve nanosecond-level trigger synchronization.

[0016] 3. In the present invention, the isolation module is used for electrical isolation. The isolation module blocks direct current or low-frequency current through physical barriers (such as light, magnetism, capacitance), allows signal or energy transmission, can significantly improve the reliability and safety of the system, and prevent high voltage from damaging the microcontroller.

[0017] 4. In the present invention, the microcontroller is used to generate synchronous trigger pulses to accurately trigger the capacitor charging and discharging of the Marx circuit. The high-speed ADC set inside can accurately control and detect voltage balance, trigger signals, and fault protection. Description of the Drawings

[0018] Figure 1 is the system architecture of the nanosecond-level high-voltage steep pulse generator provided by the embodiment of the present application; Figure 2 is the structural schematic diagram of the Marx multi-stage series circuit in the nanosecond-level high-voltage steep pulse generator provided by the embodiment of the present application; Figure 3 is the structural schematic diagram of the PID algorithm in the nanosecond-level high-voltage steep pulse generator provided by the embodiment of the present application; Figure 4 is the logic diagram of the PID algorithm in the nanosecond-level high-voltage steep pulse generator provided by the embodiment of the present application; Figure 5 is the structural schematic diagram of the isolation drive circuit in the nanosecond-level high-voltage steep pulse generator provided by the embodiment of the present application; Figure 6 is the structural schematic diagram of the protection circuit in the nanosecond-level high-voltage steep pulse generator provided by the embodiment of the present application; Figure 7 is the output waveform diagram of the Marx circuit in the nanosecond-level high-voltage steep pulse generator provided by the embodiment of the present application; Figure 8 is the output waveform after being processed by the PID algorithm and suppressing overshoot in the nanosecond-level high-voltage steep pulse generator provided by the embodiment of the present application; Figure 9 is the bidirectional 7000V 200ns waveform in the nanosecond-level high-voltage steep pulse generator provided by the embodiment of the present application; Figure 10 is the unidirectional 11000V 100ns waveform in the nanosecond-level high-voltage steep pulse generator provided by the embodiment of the present application. Detailed Embodiments

[0019] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. The embodiments of the present invention are given for purposes of illustration and description, and are not exhaustive or limit the present invention to the disclosed form. Many modifications and variations are obvious to those of ordinary skill in the art. The embodiments are selected and described to better illustrate the principles and practical applications of the present invention, and enable those of ordinary skill in the art to understand the present invention and design various embodiments with various modifications suitable for specific purposes.

[0020] Please refer to Figure 1 As shown, in this embodiment, a nanosecond-level high-voltage steep pulse generator is provided, which includes a microcontroller, a Marx circuit (Marx circuit), a trigger control module, a monitoring module, an isolated high-voltage drive module, and a power management module.

[0021] In this application, the microcontroller includes a main chip for generating a trigger signal. The generated trigger signal is changed from a low voltage to a high voltage through a high-voltage drive circuit. The high voltage drives the capacitors in each stage of the Marx circuit to charge and discharge synchronously. A high-voltage pulse is output from the output end of the Marx circuit. The built-in ADC (analog-to-digital converter) module of the microcontroller is used to collect the output voltage and output current data. After the collection is completed, it is fed back into the microcontroller through the isolated high-voltage drive module, and then PID (proportional-integral-derivative) algorithm processing is performed to extract the over-peak value for judging whether the monitored output signal meets the requirements.

[0022] Specifically, multiple ADCs are provided inside the microcontroller. Preferably, the ADC can be a high-speed ADC with high frequency and fast response speed. The high-speed ADC can accurately control and detect voltage balance, trigger signals, and fault protection.

[0023] Specifically, the Marx circuit includes multiple capacitor units. Each capacitor unit includes a capacitor, a switching device, and a resistor. Voltage superposition is achieved through series discharge of multiple-stage capacitors. Preferably, the switching device can be a SiC MOSFET (silicon carbide metal-oxide-semiconductor field effect transistor), a GaN MOSFET (gallium nitride metal-oxide semiconductor field effect transistor), or an IGBT (insulated gate bipolar transistor), which has the functions of fast reaction rate and low loss, and can achieve nanosecond-level trigger synchronization.

[0024] Specifically, the trigger control module is used to generate a high-precision synchronous trigger signal to control the discharge timing of all switching devices in the Marx circuit, so that all capacitors discharge synchronously within nanosecond-level accuracy.

[0025] Specifically, the monitoring module is used to monitor the parameters of the Marx circuit in real time, and feedback the monitored parameters to the microcontroller for analysis, and dynamically adjust the trigger timing or charging time to optimize the pulse quality.

[0026] Preferably, the output parameters include, but are not limited to, parameters such as output voltage, output current, and temperature.

[0027] Specifically, the isolated high-voltage drive module includes a high-voltage drive module and an isolation module. The high-voltage drive module is used to convert the low-voltage control signal of the main chip into a signal for driving a high-voltage switch. The isolation module is used for electrical isolation. The isolation module blocks direct current or low-frequency current through a physical barrier (such as light, magnetism, capacitance), allows signal or energy transmission, can significantly improve the reliability and safety of the system, and prevents high voltage from damaging the microcontroller.

[0028] Specifically, the power management module is a high-voltage power supply, which is used to manage the Marx circuit, such as the start-stop control of the charging power supply, and also provides a stable power supply for the main chip, Marx circuit, trigger control module, monitoring module, and isolated high-voltage drive module.

[0029] Furthermore, a safety module is also included. The safety module is used to monitor the system status, prevent faults such as overvoltage, overcurrent, or short circuit, and immediately cut off the trigger signal when a fault occurs to protect the Marx circuit and the microcontroller.

[0030] A communication module is also included, which is used to provide a communication interface for the microcontroller, receive configuration parameters or upload monitoring data, and can also support remote control, such as trigger mode switching or pulse parameter adjustment.

[0031] The microcontroller can generate precise trigger signals through programming, enabling the capacitors at all levels to discharge synchronously to achieve the best discharge effect. It dynamically adjusts the trigger timing through the feedback algorithm PID to suppress pulse overshoot, and realizes real-time monitoring by collecting data through a high-speed ADC. It also has the function of protecting the circuit, such as overvoltage protection, overcurrent protection, and temperature protection, effectively ensuring the safety of the main circuit.

[0032] In a specific embodiment, the microcontroller can be selected from a microcontroller DSP (Digital Signal Processor), FPGA (Field Programmable Gate Array), STM32 (32-bit microcontroller), etc. All of them can generate precise trigger signals, enabling the capacitors at all levels on the Marx circuit to complete charge and discharge in a very short time to form a high-voltage source, achieving a nanosecond-level timing resolution of the trigger signal. The microcontroller can achieve multi-channel synchronization to generate trigger signals separately for each unit in the Marx circuit, and ensure that the synchronization error is less than 1 ns through the global clock of the microcontroller. It completes parameter configuration and real-time data transmission through embedded, and updates trigger parameters such as delay time or pulse width in real time through the AXI bus or dedicated register interface of the microcontroller.

[0033] Among them, the AXI bus interface has characteristics such as high performance, high bandwidth utilization, and low latency.

[0034] Furthermore, the microcontroller can dynamically adjust parameters such as trigger frequency, pulse width, and delay through the UART (Universal Asynchronous Receiver-Transmitter) or SPI external interface (Serial Peripheral Interface). The high-speed ADC is connected to the sensor, and the microcontroller directly reads the output voltage of the high-voltage divider collected by the high-speed ADC through the GPIO interface (General-Purpose Input / Output port). Among them, the output voltage needs to be isolated and converted into a low-voltage signal acceptable to the microcontroller. The parameters of the ADC register are configured in the software, including the sampling rate and resolution. A comparator or a dedicated chip (Hall current sensor) is used to monitor abnormal signals, and the sliding window peak detection algorithm is triggered to calculate the rise time. The pulse width and the rising edge slope of the trigger signal are adjusted through PID control to ensure that the rise time < 1 ns. The pulse rise passes through the parallel logic module of the microcontroller to generate independent trigger signals for each stage switch of the Marx circuit, and the pipelining design is used to ensure that the generation and transmission delay of the trigger signals are consistent. The microcontroller can generate trapezoidal or exponential waveform trigger signals by controlling the DAC (Digital-to-Analog Converter) to optimize the steepness of the pulse rising edge.

[0035] Refer to Figure 2 As shown, the Marx circuit is composed of multiple NPN transistors connected in series, with the collector and emitter connected together. The collector of each NPN transistor is connected to the emitter of the next transistor through a diode, forming a series connection. From left to right, the collector of the first NPN transistor is connected to the positive pole of the DC power supply (DC+), and the emitter of the last NPN transistor is grounded (GND1). Capacitors are connected between each NPN transistor and connected to the load at the end of the Marx circuit. The entire Marx circuit is grounded through GND1. The Marx circuit is used to provide a high-voltage source for the load, and the capacitors in the Marx circuit are used for charging and discharging.

[0036] Refer to Figure 3 As shown, the monitoring module uses the PID algorithm to feedback the monitored parameters to the microcontroller for analysis. The PID algorithm is applied to the closed-loop control system and can dynamically adjust the system output through real-time feedback signals to achieve the purpose of stable control. In the high-voltage pulse source system, the PID algorithm can be used to stabilize parameters such as output voltage, pulse width, or trigger timing.

[0037] The PID algorithm comprehensively controls the error of the system through three core parts (proportional, integral, and derivative). The formula is as follows: Among them, e(t) = reference value - actual value, where the reference value is the set value input by the user in the system; the actual value is the value collected by the ADC module from the system. The error signal e(t) represents the deviation between the value input by the user and the value collected by the ADC at time t. The controller continuously adjusts the output to make the error as small as possible; Kp (proportional coefficient): amplifies the current error and provides a fast response; Ki (integral coefficient): accumulates historical errors and eliminates steady-state errors; Kd (differential coefficient): predicts the error trend, suppresses overshoot and oscillation. In digital systems such as microcontrollers, the PID algorithm needs to be discretized, and the formula is as follows:

[0038] In this embodiment, the output voltage at the Marx output end is collected in real time by a high-speed ADC. Preferably, the high-speed ADC uses a GHz-level ADC. The collected digital signal is passed through the FIR filter (finite impulse response filter) built into the microcontroller to eliminate noise and extract the overshoot peak value. The dynamic PID overshoot suppression algorithm uses the overshoot peak value as the feedback signal, calculates the adjustment amount of the trigger signal through the PID controller, including but not limited to delay or pulse width, dynamically adjusts the PID parameters based on the change of the load impedance, uses the Marx circuit model to estimate the overshoot trend, adjusts the trigger timing in advance, suppresses the overshoot amplitude ≤ 5%, and identifies the characteristic frequency of the overshoot waveform through fast Fourier transform (FFT) or wavelet analysis to distinguish noise interference and real overshoot events.

[0039] Furthermore, the change of the load impedance is fed back through a current sensor.

[0040] Furthermore, the PID parameters include but are not limited to the proportional coefficient (kp), integral (ki), and differential (kd).

[0041] Specifically, the high-voltage pulse signal generated at the Marx output end enters the next step of processing; The ADC is used to collect data, which is the output voltage from the Marx output end, collects and converts the voltage signal in real time, and provides data for subsequent digital signal processing; The collected voltage data is passed through the digital signal processing module for filtering and peak detection to extract useful signal features; According to the extracted overshoot characteristics, the parameter update module will make corresponding adjustments to update the system parameters; The parameters output by the parameter update module are used to trigger the system and control the trigger conditions of the signal; ‌The PID controller performs closed-loop control on the system by dynamically adjusting the proportional coefficient (kp), integral (ki), and derivative (kd) parameters to optimize performance; ‌The Marx circuit switch controls the conduction timing of each switch in the Marx circuit according to the trigger signal to ensure that the circuit works as expected; The trigger signal generation module generates a trigger signal according to the system requirements and the adjustment of the PID controller to control the switch of the Marx circuit.

[0042] The entire process is a closed-loop control system. By collecting data in real time, signal processing, parameter adjustment, and feedback control, it ensures that the Marx circuit works efficiently and stably.

[0043] Refer to Figure 4 As shown, the PID algorithm logic has the following specific steps: The microcontroller generates a synchronous trigger signal; The trigger signal is transmitted to the Marx circuit to generate an output pulse; The ADC collects real-time data; Judge whether the collected data is normal. If not, the process ends; if so, proceed to the next step; The microcontroller eliminates noise through the FIR filter and extracts the overshoot value; Judge whether there is an overshoot phenomenon in the processed data. If not, return to the step where the microcontroller generates a synchronous trigger signal and loop; if so, proceed to the next step; Perform PID dynamic adjustment; Update and store parameter data; Judge whether to continue the process. If not, the process ends; if so, return to the step where the microcontroller generates a synchronous trigger signal and loop.

[0044] Specifically, the main chip generates a synchronous trigger signal and sends it to the Marx circuit. The capacitors at all levels in the Marx circuit that receive this signal discharge synchronously, outputting a high-voltage pulse. The high-speed ADC collects real-time data. If the voltage data is not within the set parameter fluctuation range, the main chip ends the discharge process; when the collected voltage data meets the parameter range, the main chip eliminates noise through the FIR filter and then extracts the peak value of the pulse. If the overshoot is normal, the data is stored. If there is a large difference between the overshoot and the preset overshoot value, it will be fed back to the main chip of the microcontroller, and the main chip adjusts the parameters of the synchronous trigger signal, including pulse width and delay, etc., so that the signal generated by the Marx circuit next time belongs to the normal required signal.

[0045] Refer to Figure 5 As shown, the isolated high-voltage drive module includes a high-voltage drive module and an isolation module. Preferably, the isolation module uses optocoupler isolation. Preferably, the high-voltage drive module uses an IC for high-voltage drive.

[0046] The microcontroller generates a low-voltage signal, which is converted into a high-voltage signal through a high-voltage drive module. The high-voltage signal causes the Marx circuit to discharge. The isolation module uses a low-voltage power supply LDO (low-dropout linear regulator) or a DC-DC converter (DC-DC converter) to power the main chip and logic circuit of the microcontroller. It can also prevent the high-voltage power supply from impacting the main chip of the microcontroller and avoid burning the main chip.

[0047] See also Figure 6 As shown, the safety module includes an overvoltage protection circuit, an overcurrent protection circuit and a temperature protection circuit. Through multiple sensors and comparators, the voltage and current are monitored in real time, and controlled through the main chip to ensure that the overvoltage, overcurrent and temperature are within the safe range. Once they are out of range, the protection measures are triggered.

[0048] Specifically, the overvoltage protection circuit includes a high-voltage voltage divider, an isolation amplifier and a comparator. The high-voltage voltage divider, the isolation amplifier and the comparator are all electrically connected to the main chip. When the output high voltage passes through the high-voltage voltage divider, the comparator compares the output voltage with the set threshold voltage. When the high-voltage output exceeds the threshold, the spark gap or gas discharge tube is triggered to discharge energy, and the triggering is stopped through the main chip interrupt signal.

[0049] The overcurrent protection circuit includes a Hall sensor and a relay, which are electrically connected to the main chip. When the Hall sensor detects the loop current, the comparator compares the current detected by the Hall sensor with the set threshold current. When the loop current exceeds the set threshold, the main chip turns off the relay through GPIO and cuts off the main loop.

[0050] The temperature protection circuit includes a temperature sensor, an ADC and a heat dissipation module. The temperature sensor, ADC and the heat dissipation module are electrically connected to the main chip. The temperature sensor is used to detect key components, including but not limited to energy storage capacitors and thyristors. The ADC converts the analog signal into an electrical signal, which is fed back to the main chip. When the temperature is too high, the main chip actively cuts off the power supply.

[0051] See also Figure 7 As shown, the entire graph is displayed within a time range of 100 ns. The Marx circuit outputs a waveform. The horizontal axis of the graph represents time (in ns, nanoseconds), and the vertical axis represents voltage (in kV, kilovolts). It can be seen that the voltage changes with time in a periodic square wave form. The voltage changes back and forth between approximately 3.5 kV and 0 V, and each cycle lasts approximately 20 ns.

[0052] See also Figure 8As shown, the entire graph is displayed within a time range of 100 ns. It is the output waveform after being processed by the PID algorithm and suppressing overshoot. The horizontal axis of the graph represents time (in nanoseconds, ns), and the vertical axis represents voltage (in kiloelectron volts, kV). The line in the graph shows a square wave signal with the voltage varying between 0 and 3.0 kV. The period of the square wave is approximately 20 ns. Within each period, the voltage rapidly rises from 0 kV to 3.0 kV and then rapidly drops back to 0 kV, showing obvious overshoot. However, during the rising and falling processes of this signal, the PID algorithm is used to comprehensively control the system error to reduce overshoot.

[0053] Refer to Figure 9 As shown, the Marx circuit generates high-voltage pulses. After being processed by the PID algorithm, the two-way 7000 V 200 ns waveform displayed on the oscilloscope has the following specific information: The voltage range of CH1 (channel 1) is set to 2000 V, and the voltage of CH2 (channel 2) is not set; The time base is set to 1.00 microseconds per division (1.00 μs / div), the sampling rate (number of samples collected per second) is 1.00 GS / s (1000 MHz), the display time is 200 milliseconds, the frequency range is less than 10 Hz, and the signal has obvious spikes and dips at multiple time points.

[0054] Refer to Figure 10 As shown, the Marx circuit generates high-voltage pulses. After being processed by the PID algorithm, the one-way 11000 V 100 ns waveform displayed on the oscilloscope has the following specific information: The voltage range of CH1 (channel 1) is set to 2000 V, and the voltage of CH2 (channel 2) is not set; The time base is set to 500 nanoseconds per division (500 ns / div), the sampling rate is 1.00 GS / s (1000 MHz), which means sampling one billion times per second, that is, the time interval between each point is 1 nanosecond. The waveform diagram shows a signal pulse with rapid rise and fall. Each pulse has a narrow width, and the waveform has obvious spikes at specific moments and then quickly drops back.

[0055] Obviously, the described embodiments are only a part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art and related fields without creative efforts shall fall within the protection scope of the present invention. The structures, devices, and operation methods not specifically described and explained in the present invention, unless otherwise specified and limited, are implemented according to the conventional means in the art.

Claims

1. A nanosecond high-voltage steep pulse generator, characterized in that, It includes a microcontroller, a Marx circuit, a trigger control module, an isolated high-voltage drive module, a safety module, and a power management module; The microcontroller includes a main chip, which is used to generate a trigger signal and collect the parameters at the output end of the Marx circuit in real time through the microcontroller; the trigger control module generates a nanosecond-level synchronous trigger signal to control the discharge timing of all switching devices in the Marx circuit; the isolated high-voltage drive module converts the low-voltage signal of the microcontroller into a high-voltage drive signal; The safety module is used to monitor the system state and immediately cut off the trigger signal in case of a fault to protect the Marx circuit and the microcontroller; the power management module supplies power to each module of the system.

2. The nanosecond high-voltage steep pulse generator according to claim 1, wherein The safety module includes an overvoltage protection circuit, an overcurrent protection circuit, and a temperature protection circuit, which monitors the system state in real time through a comparator, a Hall sensor, and a temperature sensor, and cuts off the trigger signal in case of a fault; The overvoltage protection circuit includes a high-voltage divider, an isolation amplifier, and a comparator, and the high-voltage divider, the isolation amplifier, and the comparator are all electrically connected to the main chip; The overcurrent protection circuit includes a Hall sensor and a relay, and the Hall sensor and the relay are all electrically connected to the main chip; The temperature protection circuit includes a temperature sensor, an ADC, and a heat dissipation module, and the temperature sensor, the ADC, and the heat dissipation module are electrically connected to the main chip.

3. The nanosecond high-voltage steep pulse generator according to claim 2, characterized in that, It also includes a monitoring module that monitors the parameters at the output end of the Marx circuit in real time and feeds them back to the microcontroller.

4. A nanosecond high-voltage steep pulse generator according to claim 1, characterized in that, The microcontroller is built with a high-speed ADC module; The high-speed ADC is used to collect the voltage and current data output by the Marx circuit in real time and dynamically adjust the trigger signal parameters through the PID algorithm.

5. A nanosecond high-voltage steep pulse generator according to claim 4, characterized in that, The high-speed ADC is connected to the high-voltage divider, and the collected voltage signal is converted into a low-voltage signal through an isolation module and then input into the microcontroller, and the noise is eliminated through a FIR filter.

6. The nanosecond high-voltage steep pulse generator according to claim 1, characterized in that, The trigger control module controls the conduction timing of all switching devices in the Marx circuit through a global clock; The timing resolution of the synchronous trigger signal is less than 1 ns, and an independent trigger signal is generated through the parallel logic module of the microcontroller, so that the multi-stage capacitor units discharge synchronously.

7. A nanosecond high-voltage steep pulse generator according to claim 1, characterized in that, The isolated high-voltage drive module includes a high-voltage drive module and an isolation module; the isolation module realizes electrical isolation between high-voltage and low-voltage signals through opto-isolation, magnetic isolation, or capacitive isolation; the high-voltage drive module converts the low-voltage trigger signal of the microcontroller into a high-voltage signal for driving the switching devices of the Marx circuit.

8. A nanosecond high-voltage steep pulse generator according to claim 1, characterized in that, It also includes a communication module, which is used to provide a communication interface for the microcontroller.

9. A nanosecond high-voltage steep pulse generator according to claim 1, characterized in that, The power management module is a high-voltage power supply, which is used to manage the Marx circuit. Preferably, the Marx circuit includes multi-stage capacitor units, and multiple said capacitor units are connected in series; Each stage of the capacitor unit includes a capacitor, a switching device, and a resistor, and voltage superposition is realized through the series discharge of multiple said capacitor units.

10. A nanosecond high-voltage steep pulse generator according to claim 1, characterized in that, The microcontroller dynamically adjusts the trigger signal parameters through the interface, and uploads the monitoring data or receives remote control instructions; The microcontroller is selected from DSP, FPGA, or STM32.

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