Quartz sandwich panel manufacturing method and processing equipment thereof

Abstract

The invention provides a manufacturing method and processing equipment for a quartz sandwich panel, and the manufacturing method for the quartz sandwich panel comprises the following steps: putting a quartz plate, namely putting the quartz plate from one side, far away from a second row gun, of a first row gun; the conveying device is used for conveying quartz plates to the first row of guns and the second row of guns; the quartz plate is preheated by the first row gun; the quartz plate is heated and softened by the second row gun; the extrusion shaft is used for pressing the quartz plate; and completing the production of the quartz sandwich panel. The problems of low quality and low production efficiency of the quartz plate for the semiconductor in the prior art are solved.

Description

Technical Field

[0001] The present invention relates to the technical field of manufacturing quartz components for semiconductors. Specifically, it relates to a manufacturing method for a quartz sandwich panel and its processing equipment. Background Art

[0002] In various methods of fabricating silicon wafers into chips, quartz thermal insulation materials are required. The thermal insulation materials have evolved from initially using transparent quartz materials that are sandblasted to become opaque, to later using opaque materials produced by special methods. However, with the development of the manufacturing process, although these materials can meet the production conditions in terms of thermal insulation, they generate particles, resulting in a decrease in the yield of silicon wafers. Moreover, for sandblasted or opaque materials produced by special methods, the surface is more easily etched during hydrofluoric acid cleaning, leading to a shorter lifespan of quartz products. Generally, the production of sandwich panels adopts a manual operation method of melting while evacuating, which not only has poor flatness and low bonding strength but also low production efficiency, resulting in too high a cost for sandwich panels. Summary of the Invention

[0003] The problem solved by the present invention is the low quality and low production efficiency of quartz plates for semiconductors in the prior art.

[0004] To solve the above problems, the present invention provides a manufacturing method for a quartz sandwich panel, which is applied to a processing equipment. The processing equipment includes a first row of guns, a second row of guns, an extrusion shaft, and a conveying device. The second row of guns is arranged between the first row of guns and the extrusion shaft. The first row of guns is used to preheat the quartz plate, the second row of guns is used to soften the quartz plate, and the extrusion shaft is arranged on both sides of the quartz plate and is used to press the quartz plate into a quartz sandwich panel. The quartz plate includes two transparent quartz plates and an opaque quartz plate, and the transparent quartz plates are attached to both sides of the opaque quartz plate. The manufacturing method for the quartz sandwich panel includes the following steps: Place the quartz plate, place the quartz plate from the side of the first row of guns away from the second row of guns; The conveying device transports the quartz plate towards the first row of guns and the second row of guns; The first row of guns preheats the quartz plate; The second row of guns heats and softens the quartz plate; The extrusion shaft presses the quartz plate; The production of the quartz sandwich panel is completed.

[0005] Compared with the prior art, the technical effects achieved by this technical solution are as follows: Two transparent quartz plates are bonded to an opaque quartz plate to form a quartz plate material, and then the quartz plate material is placed into the processing equipment from the side of the first row of guns away from the second row of guns. The conveying device is used to convey the quartz plate material to the first row of guns and the second row of guns. When processing the quartz plate material, the quartz plate material first passes through the first row of guns, and the first row of guns pre-heats the quartz plate material, enabling the quartz plate material to more easily reach the melting point before pressing. When the quartz plate material passes through the second row of guns, it is heated to the melting point by the second row of guns. At this time, the quartz plate material softens, facilitating the pressing shaft to press it. Compared with the single-layer opaque quartz plate formed by sandblasting a transparent quartz plate and then processing it as a heat-insulating material in the prior art, the method for manufacturing a quartz sandwich panel provided by the present invention presses the quartz plate material with transparent quartz plates bonded to both sides of the opaque quartz plate, bonding transparent quartz plates on both sides of the opaque quartz plate, effectively preventing the spraying particles from falling off the opaque quartz plate during use while ensuring the heat-insulating effect of the quartz plate, reducing the etching loss of the quartz plate during hydrofluoric acid cleaning, and extending the service life of the quartz plate. At the same time, this processing method for the quartz sandwich panel is realized by a processing equipment capable of automatically transporting, melting, and pressing, realizing the automated production of the quartz sandwich panel and improving the production efficiency of the quartz sandwich panel.

[0006] Further, the processing equipment further includes guide wheels. The guide wheels are provided on the side of the first row of guns away from the second row of guns, and / or on the side of the pressing shaft away from the second row of guns; guide grooves for guiding the movement direction of the quartz plate material are provided on the guide wheels; Putting the quartz plate material into the equipment further includes: The quartz plate material is placed into the processing equipment parallel to the axis of the first row of guns, and the edge of the quartz plate material is fitted with the guide groove.

[0007] Compared with the prior art, the technical effects achieved by this technical solution are as follows: The guide wheels are rotatable, and the quartz plate material is fitted with the guide grooves on the guide wheels. When the conveying device conveys the quartz plate material, the guide wheels are driven by the quartz plate material to rotate along the conveying direction of the quartz plate material. The guide wheels and the quartz plate material are in rolling contact, reducing the wear of the guide wheels on the quartz plate material, and at the same time using the guide grooves to keep the quartz plate material moving horizontally towards the first row of guns and the second row of guns.

[0008] Further, the first row of guns pre-heating the quartz plate material includes: The first row of guns moves along the axis of the first row of guns, and the moving speed ranges from 600 millimeters per minute to 1000 millimeters per minute.

[0009] Compared with the prior art, the technical effects achieved by this technical solution are as follows: The first row of guns moves along the axis of the first row of guns, enabling the quartz plate material to be heated evenly, and at the same time controlling the moving speed to achieve an effective pre-heating effect, preventing the quartz plate material from being under-preheated due to the too-fast moving speed of the first row of guns or being over-heated and affecting the flatness during pressing due to the too-slow moving speed.

[0010] Furthermore, preheating the quartz plate by the first row of guns also includes: the preheating temperature range of the first row of guns is 800 degrees Celsius to 1200 degrees Celsius.

[0011] Compared with the existing technology, the technical effect achieved by this technical solution is: the first row of guns preheats the quartz plate, so that the quartz plate can be more easily heated to the melting point when passing through the second row of guns.

[0012] Furthermore, the second row of guns heats and softens the quartz plate, including: the second row of guns moves along the axial direction of the second row of guns, and the moving speed ranges from 600 mm / min to 1000 mm / min.

[0013] Compared with the existing technology, the technical effect achieved by this technical solution is: the second row of guns moves along the axis of the second row of guns, and the moving speed is controlled to achieve an effective heating effect, ensuring that the quartz plate can reach the melting point, and can make the quartz plate heated evenly, preventing the local temperature of the quartz plate from being too high and over-softening, resulting in poor flatness after pressing.

[0014] Furthermore, the second row of guns heats and softens the quartz plate, including: the second row of guns heats the quartz plate to a temperature between 1900 degrees Celsius and 2000 degrees Celsius.

[0015] Compared with the existing technology, the technical effect achieved by this technical solution is: the quartz plate reaches the melting point, which can make the transparent quartz plate and the opaque quartz plate more bonded, making it easier for the subsequent extrusion shaft to press the quartz plate.

[0016] Furthermore, the conveying device is a transmission shaft, which is arranged on a side of the first row of guns away from the second row of guns, and the transmission shaft is arranged on both sides of the quartz plate; The processing equipment transports the quartz plate including: the transmission shaft moves to transport the quartz plate, the transport direction is perpendicular to the axis of the first row of guns and points to the second row of guns, and the transport direction is parallel to the quartz plate.

[0017] Compared with the existing technology, the technical effect achieved by this technical solution is: the transmission shaft is arranged on the side of the first row of guns away from the second row of guns, which will not affect the subsequent heating of the quartz plate while transporting the quartz plate. The transmission shaft is arranged on both sides of the quartz plate, so that the quartz plate is evenly stressed, ensuring that the transparent quartz plate and the opaque quartz plate will not be misplaced due to differences in transportation speed during transportation.

[0018] Furthermore, the transmission shaft transports the quartz plate including: the transmission shaft transports the quartz plate at a speed ranging from 15 mm / min to 45 mm / min.

[0019] Compared with the prior art, the technical effects achieved by this technical solution are as follows: prevent the transportation speed from being too fast or too slow. If the transportation speed is too fast, the quartz plate will be pressed before it is heated to the required temperature, which is likely to result in poor pressing effect, poor adhesion between the opaque quartz plate and the transparent quartz plate. If the transportation speed is too slow, the quartz plate will be overheated and prone to deformation during pressing, resulting in poor flatness or unqualified quality of the produced quartz sandwich panel.

[0020] Furthermore, the present invention also provides a processing device for implementing the quartz sandwich panel manufacturing method provided by the present invention. The processing device includes a first row of guns, an extrusion shaft, a second row of guns, and a conveying device. The first row of guns is used to preheat the quartz plate; the extrusion shaft is used to press the quartz plate into a quartz sandwich panel; the second row of guns is arranged between the first row of guns and the extrusion shaft, and the second row of guns is used to soften the quartz plate; the conveying device is arranged on the side of the first row of guns away from the second row of guns, and the conveying device is used to transport the quartz plate.

[0021] Compared with the prior art, the technical effects achieved by this technical solution are as follows: realize the automated production of quartz sandwich panels. Use the first row of guns for preheating and the second row of guns for melting. Compared with manual heating, the heating is more uniform. Set the extrusion shaft to realize automated pressing using external force. Compared with manual vacuum pressing, the pressing effect can be enhanced, and the finished product quality of the quartz sandwich panel can be improved.

[0022] Furthermore, the processing device further includes: guide wheels. The guide wheels are arranged on the side of the conveying device away from the first row of guns, and / or, arranged on the side of the extrusion shaft away from the second row of guns; The guide wheels are provided with guide grooves for guiding the movement direction of the quartz plate, and the guide grooves cooperate with the edges of the quartz plate.

[0023] Compared with the prior art, the technical effects achieved by this technical solution are as follows: the guide wheels are in rolling contact with the quartz plate, and the guide grooves ensure that the quartz plate remains horizontal during transportation, preventing the quartz plate from being distorted and resulting in deformation of the finished product of the quartz sandwich panel, which affects the finished product rate. Description of the Drawings

[0024] Figure 1 is a flowchart of a quartz sandwich panel manufacturing method provided by the present invention; Figure 2 is a perspective view of the processing device; Figure 3 is a front view of the processing device; Figure 4 is a front view of the guide wheel; Figure 5 is a side view of the guide wheel; Figure 6 is a structural diagram of the first row of guns.

[0025] Description of the Reference Numerals: 100 - First row of guns; 101 - Second row of guns; 102 - Extrusion shaft; 103 - Transmission shaft; 104 - Guide wheel; 105 - Guide groove; 106 - Quartz plate; 107 - Hydrogen pipe; 108 - Oxygen pipe; 109 - Mixing pipe; 110 - Flame jet pipe. Detailed implementation manner

[0026] The purpose of the present invention is to provide a manufacturing method for a quartz sandwich panel and its processing equipment, so as to achieve the effect of improving the quality and production efficiency of quartz plates for semiconductors.

[0027] To make the above objects, features and advantages of the present invention more obvious and understandable, the following detailed description of the specific embodiments of the present invention is given with reference to the accompanying drawings.

[0028] See Figures 1 to 6 , the present invention provides a manufacturing method for a quartz sandwich panel, which is applied to a processing equipment. The processing equipment includes a first row of guns 100, a second row of guns 101, an extrusion shaft 102 and a conveying device. The second row of guns 101 is arranged between the first row of guns 100 and the extrusion shaft 102. The first row of guns 100 is used to preheat the quartz plate 106, the second row of guns 101 is used to soften the quartz plate 106, and the extrusion shaft 102 is arranged on both sides of the quartz plate 106. The extrusion shaft 102 is used to press the quartz plate 106 into a quartz sandwich panel; the quartz plate 106 includes two transparent quartz plates and an opaque quartz plate, and the transparent quartz plates are attached to both sides of the opaque quartz plate; the manufacturing method of the quartz sandwich panel includes the following steps: Put the quartz plate 106, and put the quartz plate 106 from the side of the first row of guns 100 far away from the second row of guns 101; The conveying device transports the quartz plate 106 to the first row of guns 100 and the second row of guns 101; The first row of guns 100 preheats the quartz plate 106; The second row of guns 101 heats and softens the quartz plate 106; The extrusion shaft 102 presses the quartz plate 106; The production of the quartz sandwich panel is completed.

[0029] Specifically, when putting the quartz plate 106, the quartz plate 106 should be parallel to the axes of the first row of guns 100 and the second row of guns 101. The conveying direction of the conveying device is perpendicular to the axis of the first row of guns 100 and points to the second row of guns 101, and the conveying direction is parallel to the quartz plate 106.

[0030] Refer to Figure 3 , the first row of guns 100 is arranged on both sides of the quartz plate 106, and the second row of guns 101 is arranged on both sides of the quartz plate 106, so as to avoid temperature difference on both sides of the quartz plate 106 and affect the pressing effect.

[0031] The main shaft of the extrusion shaft 102 is made of stainless steel, and the shaft body is wrapped with a shaft body made of high-purity graphite. The shaft body of the extrusion shaft 102 contacts the quartz plate 106. The extrusion shaft 102 rotates around the main shaft, and the extrusion shaft 102 and the quartz plate 106 are in rolling contact, realizing effective rolling of the quartz plate 106 without damaging the surface of the quartz plate 106. The rolling method applies pressure evenly, which is beneficial to improving the quality of the finished quartz sandwich panel.

[0032] The method for manufacturing a quartz sandwich panel provided by the present invention makes two transparent quartz plates adhere to an opaque quartz plate to form the quartz plate 106, and then the quartz plate 106 is placed into the processing equipment from the side of the first row of guns 100 away from the second row of guns 101. The conveying device is used to convey the quartz plate 106 to the first row of guns 100 and the second row of guns 101. When processing the quartz plate 106, the quartz plate 106 first passes through the first row of guns 100, and the first row of guns 100 preheats the quartz plate 106, so that the quartz plate 106 can more easily reach the melting point before pressing. When the quartz plate 106 passes through the second row of guns 101, it is heated to the melting point by the second row of guns 101. At this time, the quartz plate 106 softens, facilitating the extrusion shaft 102 to press it. Compared with the prior art in which a single-board opaque quartz plate formed by sandblasting a transparent quartz plate and then processing is used as a thermal insulation material, the method for manufacturing a quartz sandwich panel provided by the present invention presses the quartz plate 106 with transparent quartz plates adhered to both sides of the opaque quartz plate, adheres transparent quartz plates to both sides of the opaque quartz plate, effectively preventing the sprayed particles from falling off the opaque quartz plate during use while ensuring the thermal insulation effect of the quartz plate, reducing the etching loss of the quartz plate during hydrofluoric acid cleaning, and prolonging the service life of the quartz plate. At the same time, this processing method of the quartz sandwich panel is realized by a processing device capable of automatic transportation, melting, and pressing, realizing the automated production of the quartz sandwich panel and improving the production efficiency of the quartz sandwich panel.

[0033] Refer to Figure 3 、 Figure 4 and Figure 5 As shown in The placement of the quartz plate 106 further includes: the quartz plate 106 is placed into the processing equipment parallel to the axis of the first row of guns 100, and the edge of the quartz plate 106 cooperates with the guide groove 105.

[0034] Specifically, in this embodiment, guide wheels 104 are provided on the side of the first row of guns 100 away from the second row of guns 101 and on the side of the extrusion shaft 102 away from the second row of guns 101. Two guide wheels 104 opposite to each other for the quartz plates 106 form a group. One group of guide wheels 104 is provided on the side of the first row of guns 100 away from the second row of guns 101, and two groups of guide wheels 104 are provided on the side of the extrusion shaft 102 away from the second row of guns 101.

[0035] Two groups of guide wheels 104 are provided on the side of the extrusion shaft 102 away from the second row of guns 101, realizing multi-point support for the quartz plates 106, which can further optimize the guiding effect of the guide wheels 104 on the quartz plates 106 and prevent the quartz plates 106 from bending and deforming during processing.

[0036] The guide wheels 104 are made of high-purity graphite.

[0037] Refer to Figure 4 and Figure 5 , the guide wheels 104 are rotatable. The quartz plates 106 cooperate with the guide grooves 105 on the guide wheels 104. When the conveying device conveys the quartz plates 106, the guide wheels 104 are driven by the quartz plates 106 to rotate along the conveying direction of the quartz plates 106. The guide wheels 104 and the quartz plates 106 are in rolling contact, reducing the wear of the guide wheels 104 on the quartz plates 106. At the same time, the guide grooves 105 are used to keep the quartz plates 106 moving horizontally towards the first row of guns 100 and the second row of guns 101.

[0038] Specifically, the guide grooves 105 are arranged along the circumferential direction of the guide wheels 104, and the guide grooves 105 have an annular groove structure.

[0039] The first row of guns 100 preheats the quartz plates 106 as follows: the first row of guns 100 moves along the axis of the first row of guns 100, and the moving speed ranges from 600 millimeters per minute to 1000 millimeters per minute.

[0040] Refer to Figure 3 and Figure 6 , specifically, the first row of guns 100 is provided with a hydrogen gas pipe 107 and an oxygen gas pipe 108. The hydrogen gas pipe 107 and the oxygen gas pipe 108 are arranged adjacent to each other. A flame spraying pipe 110 is provided on the oxygen gas pipe 108, and a mixing pipe 109 is provided on the hydrogen gas pipe 107. The mixing pipe 109 is communicated with the flame spraying pipe 110. When the first row of guns 100 preheats the quartz plates 106, the flame sprays out from the flame spraying pipe 110. The flame spraying pipe 110 of the first row of guns 100 is perpendicular to the quartz plates 106. The first row of guns 100 uses a hydrogen-oxygen flame to preheat the quartz plates 106.

[0041] The first row of guns 100 moves along its own axis, which can make the quartz plate 106 heated evenly. At the same time, the moving speed is controlled to achieve the effect of effective preheating, preventing the quartz plate 106 from being insufficiently preheated due to the too fast moving speed of the first row of guns 100 or the quartz plate 106 from being overheated and affecting the flatness during pressing due to the too slow moving speed.

[0042] The preheating of the quartz plate 106 by the first row of guns 100 further includes: the preheating temperature range of the first row of guns 100 is 800 degrees Celsius to 1200 degrees Celsius.

[0043] The first row of guns 100 preheats the quartz plate 106, enabling the quartz plate 106 to be more easily heated to the melting point when passing through the second row of guns 101.

[0044] The heating and softening of the quartz plate 106 by the second row of guns 101 includes: the second row of guns 101 moves along the axis of the second row of guns 101, and the moving speed range is 600 millimeters per minute to 1000 millimeters per minute.

[0045] Refer to again Figure 3 and Figure 6 , specifically, in this embodiment, the second row of guns 101 and the first row of guns 100 have the same structure. The second row of guns 101 is provided with a hydrogen gas pipe 107 and an oxygen gas pipe 108. The hydrogen gas pipe 107 and the oxygen gas pipe 108 are arranged adjacent to each other. A flame spraying pipe 110 is provided on the oxygen gas pipe 108, and a mixing pipe 109 is provided on the hydrogen gas pipe 107. The mixing pipe 109 is communicated with the flame spraying pipe 110. When the second row of guns 101 melts and heats the quartz plate 106, the flame sprays out from the flame spraying pipe 110. The second row of guns 101 uses a hydrogen-oxygen flame to melt and heat the quartz plate 106. The flame spraying pipe 110 of the second row of guns 101 faces the extrusion shaft 102, which can make the melting and heating area as close as possible to the extrusion shaft 102, optimizing the pressing effect.

[0046] Both the first row of guns 100 and the second row of guns 101 use hydrogen-oxygen flames to heat the quartz plate 106. The hydrogen-oxygen flame has low cost, fine, concentrated and stable flame, and can effectively heat the quartz plate 106.

[0047] The second row of guns 101 reciprocates along its own axis, controlling the moving speed to achieve the effect of effective heating, ensuring that the quartz plate 106 can reach the melting point, and enabling the quartz plate 106 to be heated evenly, preventing the local temperature of the quartz plate 106 from being too high and over-softened, resulting in poor flatness after pressing.

[0048] The heating and softening of the quartz plate 106 by the second row of guns 101 includes: the second row of guns 101 heats the quartz plate 106 to between 1900 degrees Celsius and 2000 degrees Celsius.

[0049] When the quartz plate 106 reaches the melting point, the transparent quartz plate and the opaque quartz plate can be better bonded together, making it easier for the subsequent extrusion shaft 102 to press the quartz plate 106 .

[0050] The conveying device is a transmission shaft 103, which is arranged on the side of the first row of guns 100 away from the second row of guns 101, and the transmission shaft 103 is arranged on both sides of the quartz plate 106; The processing equipment transports the quartz plate 106 , including: the transmission shaft 103 moves to transport the quartz plate 106 , the transport direction is perpendicular to the axis of the first row of guns 100 and points to the second row of guns 101 , and the transport direction is parallel to the quartz plate 106 .

[0051] The main shaft of the transmission shaft 103 is made of stainless steel, and the outer periphery of the main shaft is wrapped with a shaft body made of high-purity graphite. The shaft body of the transmission shaft 103 is in contact with the quartz plate 106, and the transmission shaft 103 rotates around the main shaft. The transmission shaft 103 and the quartz plate 106 are in rolling contact, which enables the transportation of the quartz plate 106 without damaging the surface of the quartz plate 106.

[0052] The shafts of both the drive shaft 103 and the extrusion shaft 102 are made of high-purity graphite. Graphite has excellent thermal conductivity and high-temperature resistance, effectively reducing the internal stress caused by rapid cooling and heating, thereby extending the service life of the drive shaft 103 and the extrusion shaft 102. High-purity graphite is a high-grade refractory material that can withstand the high temperatures experienced during the pressing process of the quartz plate 106.

[0053] The transmission shaft 103 is arranged on the side of the first row of guns 100 away from the second row of guns 101, and will not affect the subsequent heating of the quartz plate 106 while transporting the quartz plate 106. The transmission shaft 103 is arranged on both sides of the quartz plate 106, so that the quartz plate 106 is evenly stressed, ensuring that the transparent quartz plate and the opaque quartz plate will not be misplaced due to differences in transportation speed during transportation.

[0054] The transmission shaft 103 transports the quartz plate 106 , including: the transmission shaft 103 transports the quartz plate 106 at a speed ranging from 15 mm / min to 45 mm / min.

[0055] Prevent the transportation speed from being too fast or too slow. If the transportation speed is too fast, the quartz plate 106 will be pressed before it is heated enough, which may lead to poor pressing effect and poor adhesion between the opaque quartz plate and the transparent quartz plate. If the transportation speed is too slow, the quartz plate 106 will be overheated and easily deformed during pressing, resulting in poor flatness or substandard quality of the produced quartz sandwich panel.

[0056] Reference Figure 2 and Figure 3, the present invention also provides a processing device for implementing the quartz sandwich panel manufacturing method provided by the present invention. The processing device includes a first row of guns 100, an extrusion shaft 102, a second row of guns 101, and a conveying device. The first row of guns 100 is used to preheat the quartz plate 106; the extrusion shaft 102 is used to press the quartz plate 106 into a quartz sandwich panel; the second row of guns 101 is arranged between the first row of guns 100 and the extrusion shaft 102, and the second row of guns 101 is used to soften the quartz plate 106; the conveying device is arranged on the side of the first row of guns 100 away from the second row of guns 101, and the conveying device is used to transport the quartz plate 106.

[0057] Specifically, the conveying device is a rotatable transmission shaft 103.

[0058] To achieve the automated production of quartz sandwich panels, the first row of guns 100 is used for preheating and the second row of guns 101 is used for melting. Compared with manual heating, the heating is more uniform. The extrusion shaft 102 is provided to achieve automated pressing using an external force. Compared with manual vacuum pressing, the pressing effect can be enhanced, and the finished product quality of the quartz sandwich panel can be improved.

[0059] The processing device further includes: a guide wheel 104. The guide wheel 104 is arranged on the side of the conveying device away from the first row of guns 100, and / or, on the side of the extrusion shaft 102 away from the second row of guns 101; The guide wheel 104 is provided with a guide groove 105 for guiding the movement direction of the quartz plate 106, and the guide groove 105 cooperates with the edge of the quartz plate 106.

[0060] The guide wheel 104 is in rolling contact with the quartz plate 106, and the guide groove 105 ensures that the quartz plate 106 remains horizontal during transportation, preventing the quartz plate 106 from being distorted and causing deformation of the finished quartz sandwich panel, which affects the yield.

[0061] Although the present invention is disclosed as above, the present invention is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention should be subject to the scope defined by the claims.

Claims

1. A manufacturing method of a quartz sandwich panel, characterized in that, Applied to a processing device, the processing device includes a first row of guns, a second row of guns, an extrusion shaft and a conveying device. The second row of guns is arranged between the first row of guns and the extrusion shaft. The first row of guns is used to preheat the quartz plate. The second row of guns is used to soften the quartz plate. The extrusion shaft is arranged on both sides of the quartz plate and is used to press the quartz plate into a quartz sandwich panel. The quartz plate includes two transparent quartz plates and an opaque quartz plate, and the transparent quartz plates are attached to both sides of the opaque quartz plate. The manufacturing method of the quartz sandwich panel includes the following steps: Put in the quartz plate, and put the quartz plate in from the side of the first row of guns away from the second row of guns; The conveying device transports the quartz plate to the first row of guns and the second row of guns; The first row of guns preheats the quartz plate; The second row of guns heats and softens the quartz plate; The extrusion shaft presses the quartz plate; The production of the quartz sandwich panel is completed.

2. The manufacturing method of the quartz sandwich panel according to claim 1, characterized in that The processing device further includes guide wheels, and the guide wheels are arranged on the side of the first row of guns away from the second row of guns, and / or on the side of the extrusion shaft away from the second row of guns. The guide wheels are provided with guide grooves for guiding the movement direction of the quartz plate; The step of putting in the quartz plate further includes: putting the quartz plate into the processing device parallel to the axis of the first row of guns, and the edge of the quartz plate is matched with the guide groove.

3. The manufacturing method of the quartz sandwich panel according to claim 1, characterized in that, The first row of guns preheating the quartz plate includes: the first row of guns moves along the axis of the first row of guns, and the moving speed range is from 600 millimeters per minute to 1000 millimeters per minute.

4. The manufacturing method of the quartz sandwich panel according to claim 1, characterized in that, The first row of guns preheating the quartz plate further includes: the preheating temperature range of the first row of guns is from 800 degrees Celsius to 1200 degrees Celsius.

5. The method for manufacturing a quartz sandwich panel according to claim 1, characterized in that, The second row of guns heating and softening the quartz plate includes: the second row of guns moves along the axis of the second row of guns, and the moving speed range is from 600 millimeters per minute to 1000 millimeters per minute.

6. The manufacturing method of the quartz sandwich panel according to claim 1, characterized in that, The second row of guns heating and softening the quartz plate includes: the second row of guns heats the quartz plate to between 1900 degrees Celsius and 2000 degrees Celsius.

7. The method for manufacturing a quartz sandwich panel according to any one of claims 1 to 6, characterized in that The conveying device is a transmission shaft, and the transmission shaft is arranged on the side of the first row of guns away from the second row of guns, and the transmission shaft is arranged on both sides of the quartz plate; The processing device transporting the quartz plate includes: the transmission shaft moves to transport the quartz plate, and the transport direction is perpendicular to the axis of the first row of guns and points to the second row of guns, and the transport direction is parallel to the quartz plate.

8. The manufacturing method of the quartz sandwich panel according to claim 7, characterized in that, The transmission shaft transporting the quartz plate includes: the speed range of the transmission shaft transporting the quartz plate is from 15 millimeters per minute to 45 millimeters per minute.

9. A processing device for performing the method for manufacturing a quartz sandwich panel according to any one of claims 1 to 8, characterized in that, The processing device includes: A first row of guns, which is used to preheat the quartz plate; An extrusion shaft, which is used to press the quartz plate into a quartz sandwich panel; A second row of guns, which is arranged between the first row of guns and the extrusion shaft, and the second row of guns is used to soften the quartz plate; A conveying device, which is arranged on the side of the first row of guns away from the second row of guns, and the conveying device is used to transport the quartz plate.

10. The processing equipment according to claim 9, characterized in that, The processing equipment further includes: a guide wheel, which is arranged on a side of the conveying device away from the first row of guns, and / or on a side of the extrusion shaft away from the second row of guns; The guide wheel is provided with a guide groove for guiding the movement direction of the quartz plate, and the guide groove cooperates with the edge of the quartz plate.

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