Ultra-precision laser cutting, grinding and polishing integrated machining method and system for AI silicon carbide lens

Abstract

The invention relates to the technical field of optical lens machining, in particular to an ultra-precision laser cutting, grinding and polishing integrated machining method and system for an AI silicon carbide lens. The machining system comprises a laser cutting machine, a cutting table is arranged on the laser cutting machine, and a grinding machine box is arranged on one side of the laser cutting machine; a polishing machine box is arranged on one side of the polishing machine box, supporting plates are fixedly installed between the cutting table and the polishing machine box and between the polishing machine box and the polishing machine box, multi-degree-of-freedom mechanical arms are arranged on the supporting plates, and vacuum suction cups are arranged at the free ends of the multi-degree-of-freedom mechanical arms; jacking dust collection assemblies are arranged in the grinding machine box and the polishing machine box correspondingly, supporting frames are fixedly installed on the top faces of the grinding machine box and the polishing machine box, a left driving motor and a right driving motor which are mutually symmetrical are fixedly installed on a top plate body of each supporting frame, and grinding wheels are detachably installed at the tail ends of output shafts of the driving motors. Integrated machining operation can be achieved, and the machining efficiency can be improved.

Description

Technical Field

[0001] The present invention relates to the technical field of optical lens processing, and in particular to an ultra-precision laser cutting, grinding and polishing integrated processing method and system for AI silicon carbide lenses. Background Art

[0002] AI-oriented silicon carbide lenses refer to optical lenses made of silicon carbide, which are specially designed and manufactured for artificial intelligence-related application scenarios. Silicon carbide has high hardness, high wear resistance, high thermal conductivity and excellent optical properties. At the same time, this type of lens, with its own advantages, meets the high requirements of optical imaging, sensing, display and other functions in the AI field, and is therefore widely used in AI-related equipment. When performing processing operations on AI-oriented silicon carbide lenses, such as cutting, corresponding processing equipment is usually required.

[0003] Patent application number CN105081561B discloses a focusing lens structure, a laser cutting head, and laser cutting equipment therefor. The focusing lens structure comprises a main housing, a lens barrel disposed within the housing, and a receiving space within the lens barrel; a ring-shaped retaining ring disposed within the receiving space within the lens barrel; a focusing lens embedded within the retaining ring; and a flood seal disposed over the focusing lens to secure it within the retaining ring. This invention facilitates the replacement of the focusing lens in a laser cutting head.

[0004] Patent application number CN118513947B discloses a lens grinding device, belonging to the technical field of lens processing equipment. This invention utilizes a trajectory-following mechanism to align the edge grinding die, while a front edge grinding mechanism follows the inner lens to be ground within a clamping mechanism. This allows the edged lens to more closely conform to the shape of the edge grinding die. The edge grinding mechanism can synchronously follow the surface curvature of the edge grinding die during movement, facilitating the lens to fully match the edge grinding die angle after edge grinding. This allows inexperienced personnel to quickly master the lens grinding and assembly process, improving eyeglass assembly efficiency. Furthermore, the device can adapt to different processing shapes by prefabricating an edge grinding die that matches the shape of the frame, reducing processing difficulty. Fine-tuning the relative distance from the edge grinding die allows for adaptation to frames of varying thicknesses. The flange can be used to grind grooves on the edge of the lens, allowing for simultaneous grinding of assembly grooves during edge grinding of the lens's circumference, accommodating the interlocking assembly of thinner frames and lenses, and facilitating the installation of the lens into the inner wall of the frame after edge grinding.

[0005] Although the above technical solutions have corresponding advantages, most of the current processing operations for AI silicon carbide lenses are carried out in a distributed manner. For example, traditional silicon carbide lens processing methods usually adopt step-by-step processing, that is, cutting, grinding and polishing are carried out separately. The separate processing method will make the processing process cumbersome, and manual or mechanical transfer steps need to be added in the middle. The transfer step will delay time, and the manual transfer process may be interfered by external factors and cause damage to the cut silicon carbide lenses, further leading to low processing efficiency and high production costs, affecting processing efficiency. In view of this, we propose an ultra-precision laser cutting, grinding and polishing integrated processing method and system for AI silicon carbide lenses. Summary of the Invention

[0006] The purpose of the present invention is to provide an integrated ultra-precision laser cutting, grinding and polishing processing method and system for AI silicon carbide lenses to solve the defects mentioned in the above background technology.

[0007] To achieve the above objectives, one of the objectives of the present invention is to provide an integrated ultra-precision laser cutting, grinding and polishing processing method for AI silicon carbide lenses, comprising the following steps: 1. Laser cutting stage S1. Place the silicon carbide lens raw material on the cutting table and use the laser cutting machine to accurately cut it into the appropriate size; 2. The First Transshipment Stage S2. Use a vacuum suction cup to fix the cut silicon carbide lens, and use the movement of the multi-freedom robot arm to transfer the silicon carbide lens to the mesh plate on the grinding chassis; 3. Polishing stage S3, start the second cylinder to drive the clamping plate to clamp and fix the silicon carbide lens placed on the mesh plate; S4, starting the first cylinder to drive the clamped silicon carbide lens to move upward until it rests under the grinding wheel; S5, starting the driving motor to drive the grinding wheel to rotate and perform the grinding operation; S6. Start the dust suction fan to suck the dust generated during the grinding process into the upper cylinder to complete the dust collection; 4. Second Transshipment Stage S7, using the multi-freedom robot arm between the grinding chassis and the polishing chassis to transfer the polished silicon carbide lens in the grinding chassis to the mesh plate on one side of the polishing chassis; 5. Polishing stage S8, restarting the corresponding second cylinder, first cylinder and driving motor to perform polishing operation.

[0008] A second object of the present invention is to provide an ultra-precision laser cutting, grinding and polishing integrated processing system for AI silicon carbide lenses, which is used to implement the above-mentioned ultra-precision laser cutting, grinding and polishing integrated processing method for AI silicon carbide lenses. The processing system includes a laser cutting machine for accurately laser cutting silicon carbide lens raw materials, the laser cutting machine is provided with a cutting table, a grinding machine box for grinding operations is provided on one side of the laser cutting machine, and a polishing machine box for polishing operations is provided on one side of the grinding machine box. Support plates are fixedly installed between the cutting table and the grinding machine box, and between the grinding machine box and the polishing machine box. A multi-freedom robot arm for transporting the silicon carbide lens is provided on the support plate, and a vacuum suction cup for vacuum adsorption of the silicon carbide lens is provided on the free end of the multi-freedom robot arm; The grinding machine case and the polishing machine case are both provided with a lifting dust suction assembly for placing the silicon carbide lens and driving the silicon carbide lens to rise. A support frame is fixedly installed on the top surface of the grinding machine case and the polishing machine case. Two symmetrical drive motors are fixedly installed on the top plate of the support frame. A grinding wheel is detachably installed at the end of the output shaft of the drive motor.

[0009] As a preferred embodiment of the present invention, the grinding wheel above the grinding machine box is a coarse grinding wheel, and the grinding wheel above the polishing machine box is a fine polishing wheel; This setting enables initial rough grinding and subsequent fine polishing operations.

[0010] As a preferred embodiment of the present invention, the grinding machine case and the polishing machine case are both provided with an exposure chamber whose front side is connected to the outside world, and the side walls of the exposure chamber are provided with heat dissipation holes, and the front side surfaces of the grinding machine case and the polishing machine case are both hinged with an inspection door; This setting can utilize the heat dissipation holes for heat dissipation, and the inspection door is easy to open for maintenance operations.

[0011] As a preferred embodiment of the present invention, a suction plate is fixedly mounted on the free end of the multi-freedom robotic arm, a vacuum pump is fixedly mounted on the upper surface of the suction plate, a suction pipe is fixedly mounted on the suction end of the vacuum pump, the end of the suction pipe passes through the suction plate from top to bottom, the vacuum suction cup is located below the adsorption plate and is threadedly connected to the suction pipe; This setup can use vacuum suction cups to adsorb and fix silicon carbide lenses, and then cooperate with a multi-freedom robotic arm to perform transfer operations.

[0012] As a preferred embodiment of the present invention, a fixed disk is fixedly mounted on the end of the output shaft of the driving motor, and the grinding wheel is detachably mounted on the bottom surface of the fixed disk; This setting facilitates the loading and unloading of the grinding wheel.

[0013] As a preferred embodiment of the present invention, two mutually symmetrical U-shaped frames are fixedly installed on the bottom surface of the top plate of the support frame, and a bearing seat is fixedly installed on the bottom plate of the U-shaped frame. The output shaft of the drive motor passes through the bearing seat and is rotatably connected to the bearing seat. The above arrangement can make the output shaft of the drive motor more stable during rotation.

[0014] As a preferred embodiment of the present invention, the lifting dust collection assembly includes two first cylinders on the left and right that are symmetrical to each other and fixedly mounted on the bottom wall of the exposure chamber, and a dust collection pipe that is horizontally fixedly mounted on the side wall of the exposure chamber. The ends of the telescopic shafts of the two first cylinders pass through the top plate of the exposure chamber and are installed with side plates. A mesh plate is fixedly mounted between the two side plates, and the mesh plate is a mesh plate structure. This arrangement can utilize the first cylinder to drive the mesh plate and the silicon carbide lens placed on the mesh plate to perform a lifting operation.

[0015] As a preferred embodiment of the present invention, a bolt plate is fixedly mounted on the end of the telescopic shaft of the first cylinder, the side plate is detachably mounted on the top surface of the bolt plate, a second cylinder is fixedly mounted on the top surface of the side plate, a rectangular plate is fixedly mounted on the end of the telescopic shaft of the second cylinder, a clamping plate is fixedly mounted on the side surface of the rectangular plate, and the clamping plate is used to clamp the silicon carbide lens on the mesh plate; This setting can utilize the second cylinder to drive the clamping plate to clamp the silicon carbide lens, ensuring stability during the polishing process.

[0016] As a preferred embodiment of the present invention, a dust suction hood is fixedly installed at the bottom of the mesh plate, which passes through the top plate of the exposure chamber and is slidably connected between the top plate of the exposure chamber; a vertical tube is fixedly installed at the bottom end of the dust suction hood; a piston is detachably installed on the bottom end tube body of the vertical tube; a dust suction fan is fixedly installed on the inner wall of the dust suction tube; the dust suction tube is connected to the outside world; a vertical cylinder is fixedly installed at the air inlet end of the dust suction tube; a vertical sleeve is fixedly installed at the top of the vertical cylinder; the piston is located in the vertical sleeve and is slidably connected between the vertical sleeve; the An inner sealing ring is fixedly mounted on the inner wall of the vertical cylinder, a threaded cover is threadedly connected to the bottom cylinder body of the vertical cylinder, a mesh cylinder is fixedly mounted on the inner wall of the threaded cover, an upper cylinder is fixedly mounted on the top of the mesh cylinder, the mesh cylinder and the upper cylinder are plugged into and matched with the vertical cylinder, the upper cylinder rests on the bottom surface of the inner sealing ring, an inner ring is fixedly mounted on the inner wall of the upper cylinder, a limiting ring is detachably mounted on the upper surface of the inner ring, a filter is fixedly mounted on the inner annular side surface of the limiting ring, the filter is located above the dust suction pipe, and the dust suction pipe is located on one side of the mesh cylinder; This setting enables vacuuming operation.

[0017] Compared with the prior art, the present invention has the following beneficial effects: 1. The present invention integrates the laser cutting, grinding and polishing processes, uses a multi-freedom robotic arm and a vacuum suction cup to realize lens transfer, and uses the coordination of structures such as a lifting dust collection component, a drive motor and a grinding wheel to achieve continuous automated processing of lenses from cutting to polishing, thereby reducing tedious processing steps.

[0018] 2. The second cylinder provided in the present invention can drive the clamping plate to perform a clamping operation, making the lens more stable during the polishing process.

[0019] 3. The present invention realizes the effective collection of dust generated during the processing and improves the processing environment by setting dust collection components such as dust collection fans, dust collection pipes, and filters; at the same time, the setting of structures such as heat dissipation holes and inspection doors is conducive to equipment heat dissipation and inspection and maintenance, extends the service life of the equipment, reduces production costs, and improves overall processing efficiency and production benefits. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 Schematic diagram of the structure of the multi-freedom robotic arm of the present invention; Figure 3 It is a partial structural schematic diagram of the present invention; Figure 4 This is one of the exploded structural diagrams of the jacking dust collection assembly of the present invention; Figure 5 This is the second schematic diagram of the explosion structure of the jacking dust collection assembly of the present invention; Figure 6 is a cross-sectional view of the vertical cylinder of the present invention; Figure 7 This is a partial structural diagram of the lifting dust collection assembly of the present invention; The meaning of each number in the figure is: 1. Laser cutting machine; 10. Cutting table; 11. Grinding chassis; 12. Polishing chassis; 13. Exposure chamber; 131. Inspection door; 14. Heat dissipation vents; 15. Support plate; 16. Support frame; 2. Multi-freedom robotic arm; 20. Adsorption plate; 21. Vacuum pump; 22. Suction tube; 23. Vacuum suction cup; 3. Drive motor; 30. Fixed plate; 31. U-shaped frame; 32. Bearing seat; 33. Grinding wheel; 4. Lifting dust collection assembly; 40. First cylinder; 401. Bolt plate; 41. Mesh plate; 411. Side plate; 42. Second cylinder; 421. Rectangular plate; 43. Clamping plate; 44. Dust hood; 45. Vertical pipe; 451. Piston; 46. Vertical cylinder; 461. Inner sealing ring; 462. Vertical sleeve; 47. Dust collection pipe; 471. Dust collection fan; 48. Threaded cover; 481. Mesh cylinder; 482. Upper cylinder; 483. Inner ring; 49. Filter; 491. Limiting ring. DETAILED DESCRIPTION

[0021] The following will provide a clear and complete description of the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0022] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0023] See also Figure 1-Figure 7 The present invention provides a technical solution: an integrated ultra-precision laser cutting, grinding and polishing processing method for AI silicon carbide lenses, comprising the following steps: 1. Laser cutting stage S1. Place the silicon carbide lens raw material on the cutting table 10 and use the laser cutting machine 1 to accurately cut it into appropriate sizes; 2. The First Transshipment Stage S2. Start the multi-freedom robot arm 2 to move the vacuum suction cup 23 to fit the cut silicon carbide lens. Then start the vacuum pump 21 to firmly absorb and fix the silicon carbide lens. Then, use the movement of the multi-freedom robot arm 2 to transfer the silicon carbide lens to the mesh plate 41 on the polishing machine box 11. After the transfer is completed, the multi-freedom robot arm 2 returns to its original position. 3. Polishing stage S3, start the second cylinder 42 to drive the clamping plate 43 to clamp and fix the silicon carbide lens placed on the mesh plate 41; S4, start the first cylinder 40 to drive the clamped silicon carbide lens to move upward until it rests against the lower surface of the grinding wheel 33; S5, starting the driving motor 3 to drive the grinding wheel 33 to rotate and perform the grinding operation; S6. Start the dust suction fan 471 to suck the dust generated during the grinding process through the dust suction hood 44 and the vertical pipe 45 under the action of the dust suction fan 471 and filter and collect it through the filter 49; 4. Second Transshipment Stage S7, using the multi-freedom robot arm 2 and the vacuum chuck 23 between the grinding chassis 11 and the polishing chassis 12 to transfer the polished silicon carbide lens in the grinding chassis 11 to the mesh plate 41 on one side of the polishing chassis 12. After the transfer is completed, the multi-freedom robot arm 2 is also reset; 5. Polishing stage S8. Restart the corresponding second cylinder 42 for clamping, start the first cylinder 40 and the drive motor 3 to perform the polishing operation, and continue to use the dust suction fan 471 to perform the dust suction operation during the polishing process.

[0024] In addition, if Figure 1-Figure 7 As shown, this embodiment also provides an ultra-precision laser cutting, grinding and polishing integrated processing system for AI silicon carbide lenses, which is used to realize the above-mentioned ultra-precision laser cutting, grinding and polishing integrated processing method for AI silicon carbide lenses. The processing system includes a laser cutting machine 1 for accurately laser cutting silicon carbide lens raw materials. A cutting table 10 is provided on the laser cutting machine 1. A grinding machine box 11 for grinding operations is provided on one side of the laser cutting machine 1. A polishing machine box 12 for polishing operations is provided on one side of the grinding machine box 11. Support plates 15 are fixedly installed between the cutting table 10 and the grinding machine box 11, and between the grinding machine box 11 and the polishing machine box 12. A multi-freedom robot arm 2 for transporting the silicon carbide lens is provided on the support plate 15. The free end of the multi-freedom robot arm 2 is provided with a vacuum suction cup 23 for vacuum adsorption of the silicon carbide lens, so that the silicon carbide lens raw materials can flow in an orderly manner between various devices, realizing an integrated processing flow from cutting to grinding and polishing, and greatly improving processing accuracy and efficiency.

[0025] In this embodiment, the grinding machine case 11 and the polishing machine case 12 are both provided with a lifting dust collection assembly 4 for placing the silicon carbide lens and driving the silicon carbide lens to rise. A support frame 16 is fixedly installed on the top surface of the grinding machine case 11 and the polishing machine case 12, and two mutually symmetrical drive motors 3 are fixedly installed on the top plate of the support frame 16. A grinding wheel 33 is detachably installed at the end of the output shaft of the drive motor 3. The grinding wheel 33 above the grinding machine case 11 is a coarse grinding wheel, and the grinding wheel 33 above the polishing machine case 12 is a fine polishing wheel, so that the silicon carbide lens can undergo preliminary rough grinding and subsequent fine polishing in sequence during the processing process, realizing ultra-precision processing operations, ensuring that the surface quality of the lens reaches high standards, and meeting the strict requirements of AI silicon carbide lenses for optical performance.

[0026] like Figure 1 As shown, the grinding machine case 11 and the polishing machine case 12 are both provided with an exposed chamber 13 whose front side is connected to the outside world, and the side wall of the exposed chamber 13 is provided with a heat dissipation hole 14. The front side surfaces of the grinding machine case 11 and the polishing machine case 12 are both hinged with an inspection door 131, so that the grinding machine case 11 and the polishing machine case 12 can dissipate heat in time during operation and maintain a stable internal working environment. At the same time, it is convenient for the staff to open the inspection door 131 to inspect and maintain the equipment, thereby ensuring the long-term stable operation of the equipment.

[0027] like Figure 1 and Figure 2 As shown, the free end of the multi-freedom robot arm 2 is fixedly installed with an adsorption plate 20, and a vacuum pump 21 is fixedly installed on the upper surface of the adsorption plate 20. The suction end of the vacuum pump 21 is fixedly installed with a suction pipe 22, and the end of the suction pipe 22 passes through the adsorption plate 20 from top to bottom. The vacuum suction cup 23 is located below the adsorption plate 20 and is threadedly connected to the suction pipe 22, so that the multi-freedom robot arm 2 can use the vacuum adsorption principle to firmly adsorb and fix the silicon carbide lens, and flexibly transport it between different processing equipment. The transportation process is stable and reliable, avoiding damage to the lens during transportation.

[0028] like Figure 3 As shown, a fixed disk 30 is fixedly installed at the end of the output shaft of the driving motor 3, and the grinding wheel 33 is detachably mounted on the bottom surface of the fixed disk 30, so that the grinding wheel 33 can be easily loaded and unloaded. When the grinding wheel 33 is worn or needs to be replaced with a different specification, the staff can quickly complete the replacement, thereby improving the equipment maintenance efficiency and ensuring the continuous progress of the processing work.

[0029] Specifically, two symmetrical U-shaped frames 31 are fixedly installed on the bottom surface of the top plate of the support frame 16, and a bearing seat 32 is fixedly installed on the bottom plate of the U-shaped frame 31. The output shaft of the drive motor 3 passes through the bearing seat 32 and is rotatably connected to the bearing seat 32. By setting the U-shaped frame 31 and the bearing seat 32 at the bottom of the support frame 16, the output shaft of the drive motor 3 is firmly supported during the rotation process, reducing the shaking and vibration during rotation, ensuring the smooth operation of the grinding wheel 33, and thus improving the processing quality of lens grinding and polishing.

[0030] Furthermore, the lifting and dust collection assembly 4 includes two left and right first cylinders 40 that are symmetrical to each other and fixedly mounted on the bottom wall of the exposure chamber 13, and a dust collection pipe 47 that is horizontally fixedly mounted on the side wall of the exposure chamber 13. The ends of the telescopic shafts of the two first cylinders 40 pass through the top plate of the exposure chamber 13 and are installed with side panels 411. A mesh plate 41 is fixedly installed between the two side panels 411. The mesh plate 41 is a mesh plate structure, which is used for the normal dust collection operation of the subsequent dust collection fan 471, so that the silicon carbide lens placed on the mesh plate 41 can be accurately lifted through the telescopic movement of the first cylinder 40, and the lens can be accurately delivered to the grinding or polishing position, providing a stable foundation for subsequent processing.

[0031] In addition, a bolt plate 401 is fixedly installed at the end of the telescopic shaft of the first cylinder 40, and the side plate 411 is detachably installed on the top surface of the bolt plate 401 by a plurality of fastening bolts, which is convenient for loading and unloading operations; a second cylinder 42 is fixedly installed on the top surface of the side plate 411, and a rectangular plate 421 is fixedly installed at the end of the telescopic shaft of the second cylinder 42, and a clamping plate 43 is fixedly installed on the side of the rectangular plate 421. The clamping plate 43 is used to clamp the silicon carbide lens on the mesh plate 41, so that the silicon carbide lens on the mesh plate 41 can be firmly clamped and fixed during processing, effectively preventing the lens from being displaced or shaking during the grinding process, thereby ensuring grinding accuracy and processing safety.

[0032] It is worth noting that a dust hood 44 is fixedly installed at the bottom of the mesh plate 41, which passes through the top plate of the exposure chamber 13 and is slidably connected to the top plate of the exposure chamber 13, so that the mesh plate 41 can move up and down normally; a vertical tube 45 is fixedly installed at the bottom end of the dust hood 44, and a piston 451 is detachably installed on the bottom end tube body of the vertical tube 45 through a plurality of fastening screws, and a dust suction fan 471 is fixedly installed on the inner wall of the dust suction tube 47, and the dust suction tube 47 is connected to the outside world. The dust suction fan 471 is used to generate suction to realize the dust suction operation; a vertical cylinder 46 is fixedly installed at the air inlet end of the dust suction tube 47, and a vertical sleeve 462 is fixedly installed at the top of the vertical cylinder 46, and the piston 451 is located in the vertical sleeve 462 and is slidably connected between the vertical sleeve 462, so that it will not block the normal up and down movement of the mesh plate 41.

[0033] It is worth noting that an inner sealing ring 461 is fixedly installed on the inner wall of the vertical cylinder 46, a threaded cover 48 is threadedly connected to the bottom cylinder of the vertical cylinder 46, a mesh cylinder 481 is fixedly installed on the inner wall of the threaded cover 48, and an upper cylinder 482 is fixedly installed on the top of the mesh cylinder 481. The mesh cylinder 481 and the upper cylinder 482 are plugged into the vertical cylinder 46, and the upper cylinder 482 rests on the bottom surface of the inner sealing ring 461 to ensure sealing; an inner ring 483 is fixedly installed on the inner wall of the upper cylinder 482, and a limit ring 483 is detachably installed on the upper surface of the inner ring 91. A filter 49 is fixedly installed on the inner annular side of the limit ring 491. The filter 49 is located above the dust suction pipe 47. The dust suction pipe 47 is located on one side of the mesh tube 481. The filter 49 blocks dust while ensuring normal discharge of air. The dust suction pipe 47 is used to perform dust suction operations at the mesh tube 481, so that the dust generated during the grinding and polishing process can be sucked into the dust hood 44 and the vertical pipe 45 under the action of the dust suction fan 471 and filtered and collected through the filter 49, effectively purifying the processing environment and reducing the harm of dust to equipment and operators.

[0034] Finally, it should be noted that the multi-freedom robotic arm 2, drive motor 3, vacuum pump 21, first cylinder 40, second cylinder 42, dust suction fan 471 and corresponding control system and external power supply involved in the present invention are all universal standard parts or parts known to technical personnel in this field. Their structures and principles are known to technical personnel in this field through technical manuals or through conventional experimental methods. In the idle space of this device, all the above-mentioned electrical components, which refer to power elements, electrical components and adapted controllers and power supplies, are connected through wires. The specific connection means should refer to the working principle of the present invention. The electrical connection between each electrical component is completed in a sequential working order, and the detailed connection means are all well-known technologies in this field.

[0035] The above shows and describes the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are merely preferred examples of the present invention and are not intended to limit the present invention. Various changes and improvements may be made to the present invention without departing from the spirit and scope of the present invention. Such changes and improvements fall within the scope of the present invention. The scope of protection claimed in the present invention is defined by the appended claims and their equivalents.

Claims

1. An integrated ultra-precision laser cutting, grinding and polishing processing method for AI silicon carbide lenses, characterized in that: The following steps are involved:

1. Laser cutting stage S1. Place the silicon carbide lens raw material on a cutting table (10) and use a laser cutting machine (1) to accurately cut it into appropriate sizes; 2. The First Transshipment Stage S2, using a vacuum suction cup (23) to absorb and fix the cut silicon carbide lens, and using the movement of the multi-freedom robot arm (2) to transfer the silicon carbide lens to the mesh plate (41) on the grinding machine box (11); 3. Polishing stage S3, starting the second cylinder (42) to drive the clamping plate (43) to clamp and fix the silicon carbide lens placed on the mesh plate (41); S4, starting the first cylinder (40) to drive the clamped and fixed silicon carbide lens to move upward until it rests under the grinding wheel (33); S5, starting the driving motor (3) to drive the grinding wheel (33) to rotate and perform the grinding operation; S6, starting the dust suction fan (471) to suck the dust generated during the grinding process into the upper cylinder (482) to complete the dust collection; 4. Second Transshipment Stage S7, using the multi-freedom robot arm (2) between the grinding chassis (11) and the polishing chassis (12) to transfer the polished silicon carbide lens in the grinding chassis (11) to the mesh plate (41) on one side of the polishing chassis (12); 5. Polishing stage S8. Restart the corresponding second cylinder (42), first cylinder (40) and drive motor (3) to perform polishing operation.

2. An ultra-precision laser cutting, grinding, and polishing integrated processing system for AI silicon carbide lenses, used to implement the ultra-precision laser cutting, grinding, and polishing integrated processing method for AI silicon carbide lenses as described in claim 1, characterized in that: The processing system comprises a laser cutting machine (1) for performing precise laser cutting of silicon carbide lens raw materials, wherein the laser cutting machine (1) is provided with a cutting table (10), a grinding machine box (11) for grinding operations is provided on one side of the laser cutting machine (1), and a polishing machine box (12) for polishing operations is provided on one side of the polishing machine box (11), a support plate (15) is fixedly installed between the cutting table (10) and the grinding machine box (11), and between the grinding machine box (11) and the polishing machine box (12), a multi-freedom robot arm (2) for transporting the silicon carbide lens is provided on the support plate (15), and a vacuum suction cup (23) for vacuum adsorbing the silicon carbide lens is provided at the free end of the multi-freedom robot arm (2); The grinding machine box (11) and the polishing machine box (12) are both provided with a lifting dust collection assembly (4) for placing a silicon carbide lens and driving the silicon carbide lens to rise. A support frame (16) is fixedly installed on the top surface of the grinding machine box (11) and the polishing machine box (12). Two mutually symmetrical drive motors (3) are fixedly installed on the top plate of the support frame (16). A grinding wheel (33) is detachably installed at the end of the output shaft of the drive motor (3).

3. The ultra-precision laser cutting, grinding and polishing integrated processing system for AI silicon carbide lenses according to claim 2, characterized in that: The grinding wheel (33) above the grinding machine box (11) is a coarse grinding wheel, and the grinding wheel (33) above the polishing machine box (12) is a fine polishing wheel.

4. The ultra-precision laser cutting, grinding and polishing integrated processing system for AI silicon carbide lenses according to claim 2, characterized in that: The grinding machine box (11) and the polishing machine box (12) are both provided with an exposed chamber (13) whose front side is connected to the outside world, and a heat dissipation hole (14) is provided on the side wall of the exposed chamber (13). The grinding machine box (11) and the polishing machine box (12) are both provided with an inspection door (131) hinged on the front side surface.

5. The ultra-precision laser cutting, grinding and polishing integrated processing system for AI silicon carbide lenses according to claim 2, characterized in that: The free end of the multi-freedom robot arm (2) is fixedly mounted with an adsorption plate (20), the upper surface of the adsorption plate (20) is fixedly mounted with a vacuum pump (21), the suction end of the vacuum pump (21) is fixedly mounted with a suction pipe (22), the end of the suction pipe (22) passes through the adsorption plate (20) from top to bottom, and the vacuum suction cup (23) is located below the adsorption plate (20) and is threadedly connected to the suction pipe (22).

6. The ultra-precision laser cutting, grinding and polishing integrated processing system for AI silicon carbide lenses according to claim 2, characterized in that: A fixed disk (30) is fixedly mounted on the end of the output shaft of the drive motor (3), and the grinding wheel (33) is detachably mounted on the bottom surface of the fixed disk (30).

7. The ultra-precision laser cutting, grinding and polishing integrated processing system for AI silicon carbide lenses according to claim 6, characterized in that: Two mutually symmetrical U-shaped frames (31) are fixedly mounted on the bottom surface of the top plate of the support frame (16), a bearing seat (32) is fixedly mounted on the bottom plate of the U-shaped frame (31), and the output shaft of the drive motor (3) passes through the bearing seat (32) and is rotatably connected to the bearing seat (32).

8. The ultra-precision laser cutting, grinding and polishing integrated processing system for AI silicon carbide lenses according to claim 4, characterized in that: The lifting dust collection assembly (4) comprises two first cylinders (40) on the left and right sides that are symmetrical with each other and fixedly mounted on the bottom wall of the exposure chamber (13) and a dust collection pipe (47) fixedly mounted horizontally on the side wall of the exposure chamber (13). The ends of the telescopic shafts of the two first cylinders (40) pass through the top plate of the exposure chamber (13) and are installed with side plates (411). A mesh plate (41) is fixedly mounted between the two side plates (411). The mesh plate (41) is a mesh plate structure.

9. The ultra-precision laser cutting, grinding and polishing integrated processing system for AI silicon carbide lenses according to claim 8, characterized in that: A bolt plate (401) is fixedly mounted on the end of the telescopic shaft of the first cylinder (40), the side plate (411) is detachably mounted on the top surface of the bolt plate (401), a second cylinder (42) is fixedly mounted on the top surface of the side plate (411), a rectangular plate (421) is fixedly mounted on the end of the telescopic shaft of the second cylinder (42), a clamping plate (43) is fixedly mounted on the side surface of the rectangular plate (421), and the clamping plate (43) is used to clamp the silicon carbide lens on the mesh plate (41).

10. The ultra-precision laser cutting, grinding and polishing integrated processing system for AI silicon carbide lenses according to claim 9, characterized in that: A dust cover (44) is fixedly installed at the bottom of the mesh plate (41) and passes through the top plate of the exposure chamber (13) and is slidably connected to the top plate of the exposure chamber (13). A vertical tube (45) is fixedly installed at the bottom end of the dust cover (44). A piston (451) is detachably installed on the bottom end of the vertical tube (45). A dust suction fan (471) is fixedly installed on the inner wall of the dust suction pipe (47). The dust suction pipe (47) is connected to the outside. A vertical cylinder (46) is fixedly installed at the air inlet end of the dust suction pipe (47). A vertical sleeve (462) arranged in a vertical shape is fixedly installed at the top end of the vertical cylinder (46). The piston (451) is located in the vertical sleeve (462) and is slidably connected to the vertical sleeve (462). An inner seal is fixedly installed on the inner wall of the vertical cylinder (46). A sealing ring (461) is provided, and a threaded cover (48) is threadedly connected to the bottom cylinder of the vertical cylinder (46). A mesh cylinder (481) is fixedly installed on the inner wall of the threaded cover (48). An upper cylinder (482) is fixedly installed on the top of the mesh cylinder (481). The mesh cylinder (481) and the upper cylinder (482) are plugged into and matched with the vertical cylinder (46). The upper cylinder (482) abuts against the bottom surface of the inner sealing ring (461). An inner ring (483) is fixedly installed on the inner wall of the upper cylinder (482). A limiting ring (491) is detachably installed on the upper surface of the inner ring (483). A filter (49) is fixedly installed on the inner annular side surface of the limiting ring (491). The filter (49) is located above the dust suction pipe (47). The dust suction pipe (47) is located on one side of the mesh cylinder (481).

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