Experimental device for controlling structured turning tool to machine roller surface nanostructure through normal force

Abstract

The invention discloses an experimental device for controlling a structured turning tool to machine a roller surface nano-structure through normal force, and belongs to the field of nano-structure machining. The turntable mechanism is arranged on the base, and a portal frame is arranged at the upper end of the base; the portal frame is fixedly connected with a cutting mechanism; the cutting mechanism comprises a z-direction stepping motor guide rail fixedly connected to the portal frame. The piezoelectric displacement table is fixedly connected with a force sensor clamp; one end of the force sensor clamp is fixedly connected with a force sensor; the lower end of the force sensor is fixedly connected with the cutter; and the rotary table mechanism is fixedly connected with the metal roller. And the guide rail of the z-direction stepping motor drives the cutter to approach the surface of the metal roller. According to the device, a plurality of nano structures can be machined through one-time feeding, and the machining efficiency is improved. And the normal force in the cutting process is sensed in real time through the force sensor, the piezoelectric displacement table drives the tool to do nanoscale micro-motion, precise displacement compensation is conducted on movement such as axial jump in the machining process, and millN-level control over the cutting normal force is achieved.

Description

Technical Field

[0001] The invention relates to an experimental device for machining roller surface nanostructures by using a structured turning tool controlled by normal force, and belongs to the field of nanostructure machining. Background Art

[0002] Roll-to-Roll (R2R) processing technology is a high-productivity, low-cost, continuous micro-nanofabrication method suitable for processing thin films with functional structures across multiple scales. This technology uses a roller with a micro-nanostructured surface as a mold to rapidly transfer the micro-nanostructure to a soft material surface through printing or embossing. Because the manufacturing process eliminates the need for a vacuum, dust-free environment, complex etching processes, and extensive wastewater treatment, it reduces production costs and is widely used in the manufacturing of thin-film solar cells, semiconductor lighting, and radio frequency identification tags.

[0003] Metal rollers offer advantages such as high modulus and high wear resistance, significantly improving transfer accuracy and service life, making them a key option for the large-scale industrialization of R2R technology. However, the primary limitation in transferring cross-scale nanostructures lies in producing the required nanostructures on the roller mold surface. Currently, the predominant machining method used is micro-turning using ultra-precision machine tools, which only achieves micron-scale processing. However, conventional nanofabrication methods are difficult to fabricate nanostructures on the curved surfaces of metal rollers, and their processing efficiency is unacceptable. Machining three-dimensional nanostructures on metal roller surfaces is a research hotspot and a difficult problem. Summary of the Invention

[0004] The purpose of the present invention is to solve the above-mentioned problems existing in the background technology and to provide an experimental device for machining nanostructures on the surface of a roller using a structured turning tool controlled by normal force.

[0005] The present invention achieves the above-mentioned purpose by adopting the following technical solutions:

[0006] An experimental setup for machining roller surface nanostructures using a normal force-controlled structured turning tool comprises a turntable mechanism and a cutting mechanism. The turntable mechanism is mounted on a base, with a gantry mounted on its upper end. The cutting mechanism is fixedly connected to the gantry. The cutting mechanism includes a z-stepper motor guide rail fixedly connected to the gantry. A manual rotary table is fixedly connected to the side of the z-stepper motor guide rail facing away from the gantry. A piezoelectric displacement stage is fixedly connected to the manual rotary table. A force sensor fixture is fixedly connected to the piezoelectric displacement stage. A force sensor fixture is fixedly connected to one end of the force sensor fixture. The lower end of the force sensor is fixedly connected to the cutting tool. A CCD camera is also fixedly connected to the upper end of the base. The turntable mechanism is fixedly connected to the metal roller. The z-stepper motor guide rail drives the cutting tool to approach the surface of the metal roller.

[0007] Furthermore, the turntable mechanism includes an xy linear motor guide; the xy linear motor guide is fixedly installed on the base, and the upper end of the xy linear motor guide is fixedly connected to a turntable clamp; the side of the turntable clamp is fixedly connected to a high-precision electric turntable; the high-precision electric turntable is fixedly connected to the manual translation stage clamp; the manual translation stage clamp is fixedly connected to the xy manual translation stage; the side of the xy manual translation stage is fixedly connected to a roller clamp for fixing a metal roller.

[0008] Furthermore, a probe fixture is fixedly connected to the gantry via another z-direction stepper motor guide rail; and the probe fixture is fixedly connected to the AFM probe.

[0009] Furthermore, the two Z-direction stepper motor guide rails are arranged along the radial direction of the metal roller.

[0010] Furthermore, the tip of the tool has multiple rows of nanostructures and is made of diamond.

[0011] Furthermore, the rake angle of the tool is 0°.

[0012] Furthermore, the nanostructure period of the tool tip is T, the amplitude is A, and T and A are less than 1 μm.

[0013] Furthermore, the total width of the multiple rows of nanostructures at the tip of the tool is D, D=n T, where n is the number of tip nanostructures.

[0014] Furthermore, the tip of the tool has a sinusoidal structure. Compared with the prior art, the present invention has the following advantages: 1. The device uses a diamond-structured tool with a nanoarray structure at the tip as a turning tool, enabling the cutting of nanostructure arrays. Multiple nanostructures can be processed in a single pass, improving processing efficiency.

[0015] 2. This device uses a force sensor to sense the normal force during the cutting process in real time. Using a piezoelectric displacement stage, it drives the tool to perform nanometer-level micro-movements, precisely compensating for motion such as shaft runout during machining. This achieves millinewton-level control of the normal force. This method eliminates the need for pre-finishing and centering the roller, greatly simplifying the machining process. Furthermore, it allows for precise control of machining depth by controlling the normal cutting force. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a diagram showing the structure of an experimental device for machining nanostructures on a roller surface using a structured turning tool controlled by normal force according to the present invention;

[0017] Figure 2 This is a schematic diagram of the control principle of the experimental device for machining nanostructures on the surface of a roller using a structured turning tool controlled by normal force according to the present invention;

[0018] Figure 3 This is a cutting principle diagram of an experimental device for machining roller surface nanostructures using a structured turning tool controlled by normal force according to the present invention;

[0019] Figure 4 Schematic diagram of the tool structure of the experimental device for machining roller surface nanostructures using a structured turning tool controlled by normal force according to the present invention;

[0020] Figure 5 Schematic diagram of the processing process of the experimental device for machining roller surface nanostructures using a structured turning tool controlled by normal force according to the present invention;

[0021] Figure 6 This is a schematic diagram of the normal force closed loop principle of the experimental device for machining roller surface nanostructures using a structured turning tool controlled by normal force according to the present invention;

[0022] Figure 7 Schematic diagram of tool tilting and leveling of the experimental device for machining roller surface nanostructures using a structured turning tool controlled by normal force according to the present invention;

[0023] Figure 8 Schematic diagram of the machining and splicing of the experimental device for machining nanostructures on the surface of a roller using a structured turning tool controlled by normal force according to the present invention;

[0024] Figure 9 This is a processing flow chart of the experimental device for machining roller surface nanostructures using a normal force-controlled structured turning tool according to the present invention. DETAILED DESCRIPTION

[0025] The technical solutions of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0026] Specific implementation method 1: Figure 1-9As shown, this embodiment records an experimental device for processing nanostructures on the surface of a roller using a normal force-controlled structured turning tool, including a turntable mechanism and a cutting mechanism; the turntable mechanism is arranged on a base, and a gantry is also provided at the upper end of the base; the cutting mechanism is fixedly connected to the gantry; the cutting mechanism includes a z-axis stepper motor guide 8 fixedly connected to the gantry; the z-axis stepper motor guide 8 is fixedly connected to a manual rotary table 9 on the side away from the gantry; the manual rotary table 9 is fixedly connected to a piezoelectric displacement table 10; a force sensor fixture 11 is fixedly connected to the piezoelectric displacement table 10; one end of the force sensor fixture 11 is fixedly connected to a force sensor 12; the lower end of the force sensor 12 is fixedly connected to a tool 13; a CCD camera 16 is also fixedly connected to the upper end of the base; the turntable mechanism is fixedly connected to the metal roller 7. A z-axis stepper motor guide 8 drives a tool 13 toward the surface of the metal roller 7. A CCD camera 16 measures the distance between the tool 13 and the surface of the metal roller 7. A manual rotary table 9 eliminates the left-right yaw angle of the tool 13. The tool 13 is fixed to the lower end of a force sensor 12. The force sensor 12 senses the normal force applied by the tool 13 during the cutting process. The piezoelectric stage 10 drives the tool 13 and the force sensor 12 to slightly move in the z-axis, maintaining a constant normal force during the cutting process.

[0027] The turntable mechanism includes an xy linear motor guide 1, which is fixedly mounted on a base. A turntable fixture 2 is fixedly connected to the upper end of the xy linear motor guide 1. A high-precision electric turntable 3 is fixedly connected to the side of the turntable fixture 2. The high-precision electric turntable 3 is fixedly connected to a manual translation stage fixture 4. The manual translation stage fixture 4 is fixedly connected to an xy manual translation stage 5. A roller fixture 6 for securing a metal roller 7 is fixedly connected to the side of the xy manual translation stage 5. The center position of the metal roller 7 is adjusted using the xy manual translation stage 5.

[0028] A probe fixture 14 is fixedly connected to the gantry via another z-stepper motor guide rail 8. This probe fixture 14 is fixedly connected to an AFM probe 15. The AFM probe 15 is used as a testing tool, fixed to the z-stepper motor guide rail 8 and positioned close to the sample surface for topographic scanning. The AFM probe functions are implemented using specialized commercial AFM software, such as Nanosurf Nanite B.

[0029] The two Z-direction stepper motor guide rails 8 are arranged along the radial direction of the metal roller 7 .

[0030] The tip of the tool 13 has multiple rows of nanostructures and is made of diamond.

[0031] The rake angle of the tool 13 is 0°.

[0032] The period of the nanostructure at the tip of the tool 13 is T, and the amplitude is A. Both T and A are less than 1 μm.

[0033] The total width of the multi-row nanostructures at the tip of the tool 13 is D, and D = n T, where n is the number of nanostructures at the tip.

[0034] The tip structure of the tool 13 can be of any shape, such as rectangular, triangular, or other complex structures.

[0035] The tip of the tool 13 has a sine structure. H is the cutting depth. When H < A, each tip cuts independently, forming an independent array of nano-grooves. When H > A, the entire tip structure enters the workpiece surface, and the tool 13 substrate also participates in cutting. At this time, the machined structure can replicate the entire tip structure morphology of the tool 13 and part of the tool 13 substrate morphology.

[0036] As Figure 2 shown, the host computer software communicates with the UMAC industrial motion controller through the Pcommserver component, sends control commands to it, and receives the information returned by the UMAC industrial motion controller to achieve the control and status monitoring of the motion of each axis by the host computer software. The host computer software also communicates with the PID controller through the serial port to control the PID to perform open-loop and closed-loop actions. During force servo machining, the normal force during the turning process of the tool 13 is measured by the force sensor 12. The host computer software sends an instruction to make the PID controller in the closed-loop state. The PID controller receives the force signal collected by the force sensor, performs PID operation to obtain the PZT control signal, which is amplified by the PZT driver to drive the piezoelectric displacement stage 10, driving the tool 13 to move slightly to ensure that the force signal is equal to the set value, thereby achieving the control of the normal force between the tool 13 and the metal roller 7. During the machining process, the force signal (collected by the force sensor) and the PZT signal (monitoring signal output by the PZT driver) are collected by the A / D axis card of the UMAC industrial motion controller, and the data is transmitted to the host computer software to achieve the monitoring of the force servo machining state. Thereby achieving the control of the normal force between the tool 13 and the metal roller 7.

[0037] The principle of the force control turning method is as <00​​​​​A process for machining nanostructures on a roller surface using a structured turning tool controlled by normal force, the method comprising the following steps:

[0039] Step 1: Secure the metal roller 7 to the roller fixture 6. When using this device, first secure the metal roller 7 to the roller fixture 6 and move it below the AFM probe 15. The z-axis stepper motor guide rail 8 connected to the AFM probe 15 is moved downward. The relative position of the metal roller 7 and the AFM probe 15 is observed by the CCD camera 16. When the AFM probe 15 approaches the surface of the metal roller 7, it begins operating. The probe on the AFM probe 15 contacts the sample, opening a z-axis closed loop but not scanning. This drives the high-precision electric turntable 3 to rotate, while simultaneously recording the piezoelectric ceramic signal from the AFM probe 15 and plotting the runout trajectory of the metal roller 7.

[0040] Step 2: Align the metal roller 7 so that the center of the metal roller 7 coincides with the center of the high-precision electric turntable 3. Before processing, the metal roller 7 needs to be aligned. The center of the metal roller 7 is aligned with the center of the high-precision electric turntable 3 by adjusting the xy manual translation stage 5. Place the x-direction translation stage on the xy manual translation stage 5 in the vertical direction, and slowly move the z-direction stepper motor guide 8 downward so that the tool 13 lightly contacts the surface of the metal roller 7. When the force sensor 12 shows a change of 0.3mN, it is considered that the tool 13 is in contact with the surface of the metal roller 7. Record the z-direction position at this time as z1. Lift the z-direction stepper motor guide 8, rotate the metal roller 7 180°, and again record the z-direction position z2 when the tool 13 contacts the surface of the metal roller 7. Adjust the distance of the xy manual translation stage 5 to (z1-z2) / 2 (with direction) to eliminate the eccentricity in this direction. The y-axis translation stage of the xy manual translation stage 5 is then positioned vertically and the above process is repeated to eliminate the y-axis eccentricity error. This alignment process can reduce the eccentricity error between the metal roller 7 and the high-precision electric rotary table 3 to within 1 μm, meeting the normal force control processing requirements.

[0041] Step 3: Adjust the manual rotary table 9 to eliminate the tilt angle of the tool 13; when the amplitude to period ratio A / T of the tool 13 is less than 0.2 or when the number of tip structures n is large, the tilt of the tool 13 will have a significant impact on the processing effect. Move the tool 13 to the structure-free area of ​​the metal roller 7 for trial processing, and then move it to the AFM probe 15 for morphology scanning. If the tool 13 is tilted, a height difference h will be generated on both sides of the processed morphology, such as Figure 7 As shown, by calculating the ratio of the height difference h to the lateral distance d, the inclination angle of the tool 13 can be obtained. The inclination angle of the tool 13 can be eliminated by adjusting the manual rotating table 9.

[0042] Step 4: After centering, move the metal roller 7 below the cutter 7. Observe the relative position of the cutter 13 and the metal roller 7 along the roller's axial direction using the CCD camera 16. Move the xy linear motor guide 1 so that the cutter 13 is directly above the roller 7. Move the z stepper motor guide 8 connected to the cutter 13 downward so that the cutter 13 approaches the roller's surface. Observe the relative position of the cutter 13 and the roller's surface using the CCD camera 16. When the cutter 13 is 0.5 mm from the roller's surface, the nanomachining process begins.

[0043] Step 5: First, the piezoelectric stage 10 is set to 0 μm, and the z-stepper motor guide rail 8 moves downward. When the force sensor 12 signal reaches 0.2 times the set value (the set turning normal force), the tool 13 is considered to have contacted the surface of the metal roller 7. At this point, the z-stepper motor guide rail 8 moves upward 30 μm, and the macro-feed is completed. At this point, the high-precision electric rotary table 3 moves at 60° / s, and the piezoelectric stage 10 begins to drive the tool 13 downward for micro-feed.

[0044] After the macro-motion feed is completed, the tool 13 is always driven to move by the piezoelectric displacement stage 10 .

[0045] Step six: During the micro-feeding process, the metal roller 7 is always in a rotating state, so that the tool 13 and the surface of the metal roller 7 are always in a cutting state rather than an imprinting state, thereby ensuring the structural quality of the feed and lift positions. When the force signal reaches 0.9 times the set value, the PID control mode is turned on and the normal force control cutting stage is entered. At this moment, when the metal roller 7 rotates one circle, the PID closed loop is closed, and the displacement of the piezoelectric displacement stage 10 becomes 0um, which drives the tool 13 to lift and complete the tool retraction procedure. When the surface of the metal roller 7 is processed, the force sensor 12 detects the normal force between the tool 13 and the metal roller 7. At the same time, the force signal is input into the PID module and compared with the set value to perform PID operation. The operation output is amplified by the power amplifier to control the movement of the piezoelectric displacement stage 10. The piezoelectric displacement stage 10 drives the tool 13 to micro-move up and down to ensure the normal force during the processing. The closed-loop control principle diagram is as follows Figure 6 shown.

[0046] Step 7: The z-axis stepper motor guide rail 8 is lifted, and the xy-axis linear motor guide rail 1 moves the metal roller 7 to the next position for further processing. Repeat steps 4 to 6 to process a large-scale nanostructure array on the surface of the metal roller 7. The processing flow chart is as follows Figure 9 shown.

[0047] The xy linear motor guide 1 drives the metal roller 7 to move to the next position. The feed rate is usually the width D of the tool tip 13 or (n-1). T, and then restart the micro-feed process to perform splicing. The splicing process is as follows Figure 8 As shown. In order to ensure the quality of processing and splicing, the cutting depth H is controlled to be greater than the tool tip structure amplitude A through normal force control. If H is too small, the tool morphology cannot be reproduced. If H is too large, the tool force will increase and the tool wear will be accelerated. At the same time, when the cutting depth is large, the splicing process is easy to destroy the structure of the previous processing. Therefore, the cutting depth is usually 1.5 times the structure amplitude, that is, H=1.5 A.

[0048] In order to prevent the embossing glue from overflowing during the transfer process, a non-structured area of ​​5% of the length of the metal roller 7 is left on both sides of the metal roller 7. Figure 5 shown.

[0049] The piezoelectric translation stage has a travel range of 80 μm.

[0050] During in-situ testing, move the z-stepper motor guide 8 upward to raise the tool 13. Record the current position of the xy-linear motor guide 1. Move the metal roller 7 under the AFM probe 15. Move the z-stepper motor guide 8 downward to bring the AFM probe 15 close to the area to be inspected (observe this process via the CCD camera 16). The AFM probe 15 begins operating, scanning the surface of the metal roller 7 to obtain microscopic topography information of the nanostructure on the surface of the metal roller 7. After testing, move the AFM probe 15 upward to a safe position, and the xy-linear motor guide 1 to the previously recorded position, allowing processing to continue.

[0051] When a certain distance is processed, the processed nanostructure can be detected in situ. First, record the current position, lift the tool 13, and move the metal roller 7 to the bottom of the AFM probe 15. The area to be detected is placed directly below the AFM probe 15 through the CCD camera 16. After the AFM probe 15 approaches the sample surface, it starts to scan the structural morphology. Compare the current structural morphology with the initial processing morphology. If the deviation exceeds 20%, it can be regarded as a failure of the tool 13 due to wear. At this time, the tool 13 needs to be replaced. After the new tool 13 is installed on the force sensor 12, a certain distance is processed in the unstructured area, and the current position X1 is recorded. Then move the metal roller 7 to the AFM probe 15 to find the trial processing position X1 and the initial position X2 processed before the tool change, and calculate the difference to obtain the position during the trial cutting after the tool 13 is replaced and the distance between the initial processing position. Compensating it can make the zero position of the tool 13 consistent before and after the replacement, which is convenient for the subsequent splicing process.

[0052] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other configurations without departing from the spirit or essential characteristics of the invention. Therefore, the embodiments should be considered in all respects as illustrative and non-restrictive, and the scope of the invention is defined by the appended claims, not the foregoing description, and all variations coming within the meaning and range of equivalents of the claims are intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim to which it relates.

[0053] In addition, it should be understood that although this specification is described in terms of implementation methods, not every implementation method contains only one independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment can also be appropriately combined to form other implementation methods that can be understood by those skilled in the art.

Claims

1. Experimental device for machining roller surface nanostructures using a normal force-controlled structured turning tool, characterized by: The invention comprises a turntable mechanism and a cutting mechanism; the turntable mechanism is arranged on a base, and a gantry is further provided at the upper end of the base; the cutting mechanism is fixedly connected to the gantry; the cutting mechanism comprises a z-direction stepper motor guide rail (8) fixedly connected to the gantry; a manual rotating platform (9) is fixedly connected to the side of the z-direction stepper motor guide rail (8) away from the gantry; a piezoelectric displacement platform (10) is fixedly connected to the manual rotating platform (9); a force sensor fixture (11) is fixedly connected to the piezoelectric displacement platform (10); one end of the force sensor fixture (11) is fixedly connected to a force sensor (12); the lower end of the force sensor (12) is fixedly connected to a tool (13); a CCD camera (16) is further fixedly connected to the upper end of the base; the turntable mechanism is fixedly connected to a metal roller (7); the tool (13) is driven by the z-direction stepper motor guide rail (8) to approach the surface of the metal roller (7).

2. The experimental device for machining roller surface nanostructures using a normal force-controlled structured turning tool according to claim 1, characterized in that: The turntable mechanism comprises an xy linear motor guide rail (1); the xy linear motor guide rail (1) is fixedly mounted on a base, and the upper end of the xy linear motor guide rail (1) is fixedly connected to a turntable fixture (2); the side of the turntable fixture (2) is fixedly connected to a high-precision electric turntable (3); the high-precision electric turntable (3) is fixedly connected to a manual displacement stage fixture (4); the manual displacement stage fixture (4) is fixedly connected to an xy manual displacement stage (5); and the side of the xy manual displacement stage (5) is fixedly connected to a roller fixture (6) for fixing a metal roller (7).

3. The experimental device for machining roller surface nanostructures using a normal force-controlled structured turning tool according to claim 1, characterized in that: A probe fixture (14) is fixedly connected to the gantry via another z-direction stepper motor guide rail (8); the probe fixture (14) is fixedly connected to the AFM probe (15).

4. The experimental device for machining roller surface nanostructures using a normal force-controlled structured turning tool according to claim 1, characterized in that: The two Z-direction stepper motor guide rails (8) are arranged along the radial direction of the metal roller (7).

5. The experimental device for machining roller surface nanostructures using a normal force-controlled structured turning tool according to claim 1, characterized in that: The tip of the tool (13) has multiple rows of nanostructures and is made of diamond.

6. The experimental device for machining roller surface nanostructures using a normal force-controlled structured turning tool according to claim 5, characterized in that: The front angle of the tool (13) is 0°.

7. The experimental device for machining roller surface nanostructures using a normal force-controlled structured turning tool according to claim 6, characterized in that: The nanostructure period of the tip of the tool (13) is T, the amplitude is A, and T and A are less than 1 μm.

8. The experimental device for machining roller surface nanostructures using a normal force-controlled structured turning tool according to claim 7, characterized in that: The total width of the multiple rows of nanostructures at the tip of the tool (13) is D, D=n T, where n is the number of tip nanostructures.

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