Fixing device and semiconductor equipment

Abstract

The invention relates to the technical field of semiconductor equipment, and discloses a fixing device and semiconductor equipment. The fixing device provided by the embodiment of the invention comprises a clamping assembly, and the clamping assembly is used for clamping a mask plate or a wafer; the supporting assembly is used for supporting the mask plate or the wafer in the first direction and adjusting the included angle between the mask plate or the wafer and a first plane, and the first plane is perpendicular to the first direction; the rotating adjusting mechanism comprises a driving assembly, the driving assembly is used for driving the mask plate or the wafer to rotate, and the rotating shaft of the mask plate or the wafer is parallel to the first direction. According to the fixing device, the Rx angle and the Ry angle of the mask plate or the wafer can be adjusted through the supporting assembly, the Rz angle of the mask plate or the wafer can be adjusted through the rotation adjusting mechanism, and therefore multi-angle adjustment of the space attitude of the mask plate or the wafer can be achieved, and the fixing angle of the mask plate can be accurately controlled.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor equipment, and in particular to a fixing device and semiconductor equipment. Background Art

[0002] With the rapid advancement of semiconductor equipment technology, the requirements for mask and wafer processing precision and safety are constantly increasing. For example, in a photolithography machine, the reticle fixture is a critical device for manipulating the reticle during the photolithography process. This device clamps and secures the reticle for subsequent photolithography steps. The reticle fixture's accuracy (e.g., the angle at which it is held) can impact the performance and quality of the final product. Therefore, there is an urgent need for a fixture that can improve reticle securing accuracy. Summary of the Invention

[0003] The embodiments of the present application provide a fixing device and a semiconductor device to achieve precise fixing of a mask or a wafer.

[0004] In a first aspect, an embodiment of the present application provides a fixing device, comprising: a clamping assembly, the clamping assembly is used to clamp a mask or a wafer; the clamping assembly includes flexible contacts, the flexible contacts are used to abut against the edge of the mask or the wafer; a supporting assembly, the supporting assembly is used to support the mask or the wafer along a first direction, and to adjust the angle between the mask or the wafer and a first plane, wherein the first plane is perpendicular to the first direction; a rotation adjustment mechanism, the rotation adjustment mechanism includes a driving assembly, wherein the driving assembly is used to drive the mask or the wafer to rotate, and the rotation axis of the mask or the wafer is parallel to the first direction.

[0005] It can be understood that the present application can adjust the Rx angle and Ry angle of the mask or wafer through the above-mentioned fixing device through the supporting component, and adjust the Rz angle of the mask or wafer through the rotating adjustment mechanism, thereby realizing multi-angle adjustment of the spatial posture of the mask or wafer and accurately controlling the fixed angle of the mask.

[0006] In some possible implementations, the clamping assembly includes a first clamping base, and a first motor, a swing arm and an elastic member arranged on the first clamping base; wherein: the swing arm includes a first arm extending along the second direction and a second arm extending along the third direction, one end of the first arm along the second direction is connected to one end of the second arm along the third direction, the other end of the first arm along the second direction is connected to one end of the elastic member along its elastic direction, and the other end of the elastic member along its elastic direction is fixedly connected to the first clamping base; the flexible contact is arranged at the other end of the second arm along the third direction; the second direction intersects with the third direction and is both perpendicular to the first direction; a rotating bearing is provided at the connection between the first arm and the second arm, and the rotating bearing is connected to the first clamping base; the elastic member and the second arm are respectively arranged on opposite sides of the first motor along the fourth direction, and the first motor is used to push the first arm along the fifth direction, and the first direction, the fourth direction and the fifth direction are perpendicular to each other.

[0007] In some possible implementations, the third direction forms an acute angle with the fifth direction, and one end of the second arm connected to the first arm along the third direction is closer to the first motor than the other end of the second arm along the third direction.

[0008] In some possible implementations, the clamping assembly further includes a photoelectric sensor disposed on the first clamping base, and the photoelectric sensor is used to detect the driving state of the first motor; wherein, corresponding to a situation where the clamping assembly releases the mask or wafer, the photoelectric sensor detects that the first motor is in a first driving state; corresponding to a situation where the clamping assembly clamps the mask or wafer, the photoelectric sensor detects that the first motor is in a second driving state.

[0009] In some possible implementations, the clamping assembly includes a second clamping base, and a second motor and a force sensor arranged on the second clamping base; wherein: the flexible contact is connected to the output end of the second motor, and the second motor is used to drive the flexible contact to abut the edge of the mask or wafer along a fourth direction; the fourth direction is perpendicular to the first direction; the force sensor is used to detect the thrust of the flexible contact on the mask or wafer to control the driving force output by the second motor.

[0010] In some possible implementations, a limiting assembly is further included; the limiting assembly is at least partially spaced apart from the clamping assembly along a fourth direction, and the mask or wafer is placed between the clamping assembly and the limiting assembly; wherein the clamping assembly is used to abut against the edge of the mask or wafer to confine the mask or wafer between the clamping assembly and the limiting assembly.

[0011] In some possible implementations, the limiting assembly includes at least two limiting columns, and the at least two limiting columns include a first limiting column and a second limiting column; the flexible contact is located on a perpendicular bisector connecting the first limiting column and the second limiting column.

[0012] In some possible implementations, the first support plate and the second support plate are further included, the second support plate and the first support plate are spaced apart along the first direction, the rotation adjustment mechanism is arranged on the first support plate, and the support assembly and the clamping assembly are arranged on the second support plate; and: the driving assembly is connected to the second support plate, and is used to drive the second support plate to rotate around the first axis, and the first axis is parallel to the first direction; a guide mechanism is provided between the first support plate and the second support plate, and the guide mechanism is used to guide the rotation of the second support plate.

[0013] In some possible implementations, the support assembly includes at least two piezoelectric screws, which are arranged at intervals on the second support plate, wherein: one end of each piezoelectric screw along the first direction is connected to the second support plate, and the other end is used to support the mask or wafer, and the piezoelectric screws are in point contact with the mask or wafer.

[0014] In some possible implementations, the support assembly includes at least two support blocks, and the at least two support blocks are arranged at intervals on the second support plate, wherein: one end of each support block along the first direction is connected to the second support plate, and the other end is used to support the mask or wafer, and there is point contact between the support block and the mask or wafer; a gasket is provided between at least one of the at least two support blocks and the second support plate, and the number and / or thickness of the gaskets are adjustable so that the angle between the mask or wafer and the first plane is adjustable.

[0015] In some possible implementations, the guide mechanism includes a first guide portion and a second guide portion, wherein the first guide portion is arranged on the side of the first support plate facing the second support plate, and the second guide portion is arranged on the side of the second support plate facing the first support plate, and the first guide portion and the second guide portion are nested and cooperated with each other; one of the first guide portion and the second guide portion includes at least two arc-shaped protrusions distributed along its circumference, and the other guide portion includes at least two arc-shaped grooves distributed along its circumference, and the first axis passes through the geometric center of a figure obtained by connecting the positions of at least two arc-shaped protrusions in sequence, and / or passes through the geometric center of a figure obtained by connecting the positions of at least two arc-shaped grooves in sequence.

[0016] In some possible implementations, the guide mechanism includes a circular shaft ring including an inner ring and an outer ring nested with each other, the outer ring is connected to the first support plate, and the inner ring is connected to the second support plate, wherein the inner ring can rotate relative to the outer ring around the first axis.

[0017] In some possible implementations, the drive assembly includes a third motor, the rotation adjustment mechanism also includes a transmission assembly, the transmission assembly includes a first transmission part and a second transmission part, the third motor is connected to the first transmission part, and is used to drive the first transmission part to rotate to drive the second transmission part to move; the second transmission part is connected to the second support plate, and is used to drive the second support plate to rotate.

[0018] In some possible implementations, the first transmission part includes a first coupling, a screw, a screw fixing seat and a screw support seat, the first coupling is used to connect the third motor and the screw, the screw extends along the fourth direction, and the two ends of the screw along the fourth direction are respectively rotatably connected to the screw fixing seat and the screw support seat; the second transmission part includes a slider, a first guide rail, a second guide rail and a connecting member, the slider is passed through the screw and can move on the screw along the fourth direction; the first guide rail and the second guide rail are respectively arranged on the opposite sides of the slider along the first direction, and the first guide rail guides the slider in the fourth direction; one end of the connecting member is connected to the second guide rail, and the other end is connected to the second support plate, and the second guide rail guides the connecting member in the fifth direction, and the fourth direction, the fifth direction and the first direction are perpendicular to each other.

[0019] In some possible implementations, the first transmission part includes a second coupling, a worm, a worm fixing seat and a worm support seat, the second coupling is used to connect the third motor and the worm, the worm extends along the second direction, and the two ends of the worm along the second direction are respectively rotatably connected to the worm fixing seat and the worm support seat, and the second direction is perpendicular to the first direction; the second transmission part includes a worm wheel, the worm wheel and the worm are engaged with each other, and the worm wheel is fixedly connected to the second support plate.

[0020] In some possible implementations, the drive assembly includes a reducer, the rotation adjustment mechanism also includes a transmission assembly, the transmission assembly includes a first gear and a second gear, wherein the size of the first gear is smaller than the size of the second gear, the first gear and the second gear are engaged with each other, and the second gear is connected to the second support plate; the reducer is used to transmit the driving force it receives to the first gear, so that the first gear rotates to drive the second gear and the second support plate to rotate.

[0021] In some possible implementations, the driving assembly includes a reducer, the rotation adjustment mechanism also includes a transmission assembly, the transmission assembly includes a first gear and a second gear, wherein the size of the first gear is smaller than the size of the second gear, and the first gear and the second gear are engaged with each other; and: the supporting assembly and the clamping assembly are both arranged on the end face of the second gear, the reducer is used to transmit the driving force it receives to the first gear, so that the first gear rotates to drive the second gear to rotate; the fixing device also includes at least one gear limiting assembly, at least one gear limiting assembly is arranged on the first support plate at intervals along the edge of the second gear, for limiting the position of the second gear in the first direction.

[0022] In some possible implementations, the material of the flexible contact includes at least one of polyetheretherketone and polytetrafluoroethylene; and / or the material of the elastic part includes stainless steel or titanium alloy; and / or the material of the limiting column in the limiting assembly includes at least one of titanium alloy, aluminum alloy, stainless steel, zirconium oxide, and aluminum oxide.

[0023] In some possible implementations, the material of the first support plate and / or the second support plate includes at least one of titanium alloy, aluminum alloy, stainless steel, zirconium oxide, and aluminum oxide.

[0024] In a second aspect, an embodiment of the present application provides a semiconductor device comprising the fixing device of the first aspect described above. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 According to some embodiments of the present application, a schematic structural diagram of a first fixing device 1 is shown; Figure 2 According to some embodiments of the present application, a partial structural schematic diagram of a first fixing device 1 is shown; Figure 3A According to some embodiments of the present application, a schematic structural diagram of a clamping assembly 10 is shown; Figure 3B According to some embodiments of the present application, a schematic structural diagram of the clamping assembly 10 from another perspective is shown; Figure 4 According to some embodiments of the present application, a partial structural schematic diagram of a second fixing device 1 is shown; Figure 5 According to some embodiments of the present application, a partial structural schematic diagram of a third fixing device 1 is shown; Figure 6 According to some embodiments of the present application, a structural schematic diagram of a guide mechanism is shown; Figure 7 According to some embodiments of the present application, a structural schematic diagram of a second fixing device 1 is shown; Figure 8 According to some embodiments of the present application, a schematic structural diagram of a third fixing device 1 is shown; Figure 9 According to some embodiments of the present application, a split schematic diagram of a partial structure of a fixing device 1 is shown; Figure 10 According to some embodiments of the present application, a structural schematic diagram of a fourth fixing device 1 is shown; Figure 11 According to some embodiments of the present application, a structural schematic diagram of a fifth fixing device 1 is shown.

[0026] Description of reference numerals: 01-mask; 1-fixture; 011-left side of mask; 012-bottom side of mask; 10-Clamping assembly; 101a-First clamping base; 1011-Bottom wall; 1012-Side wall; 102-First motor; 1021-Second extension; 103-Swing arm; 1031-First arm; 10311-First extension; 1032-Second arm; 104-Elastic member; 105-Bearing cover plate; 106-Fixer; 107-Flexible contact; 108-Fixer; 1081-Waist-shaped through hole; 1091-First photoelectric switch; 1092-Second photoelectric switch; 101b-Second clamping base; 110-Second motor; 111-Force sensor; 20-support assembly; 201-piezoelectric screw; 202-hemispherical ejector pin; 203-support block; 2031-support portion; 203a-convex surface; 30 - Rotation adjustment mechanism; 311 - Third motor; 312 - Motor support seat; 313 - Reducer; 320 - First transmission unit; 321a - First coupling; 322 - Lead screw; 323 - Lead screw fixing seat; 324 - Lead screw support seat; 330 - Second transmission unit; 331 - Slider; 332 - First guide rail; 333 - Second guide rail; 334 - Connector; 321b - Second coupling; 325 - Worm; 326 - Worm fixing seat; 327 - Worm support seat; 328 - First gear; 329 - Second gear; 40-first support plate; 50-second support plate; 60-limiting assembly; 601-first limiting column; 602-second limiting column; 603-third limiting column; 604-fourth limiting column; 70-reticle detector; 80-first guide portion; 801-first arc-shaped protrusion; 802-second arc-shaped protrusion; 803-third arc-shaped protrusion; 90-circular shaft ring; 901-inner ring; 902-outer ring; 100-arc grating mechanism; 1001-arc ruler tape holder; 1002-arc grating; 1003-grating reader; 200-gear limit assembly; 210-limit bearing; 220-cantilever; 230-ball screw. DETAILED DESCRIPTION

[0027] The following specific embodiments illustrate the implementation of the present application. Those skilled in the art can easily understand other advantages and effects of the present application from the contents disclosed in this specification. Although the description of the present application will be introduced in conjunction with some embodiments, this does not mean that the features of this application are limited to the implementation. On the contrary, the purpose of introducing the application in conjunction with the implementation is to cover other options or modifications that may be extended based on the claims of the present application. In order to provide an in-depth understanding of the present application, the following description will contain many exemplary details. The present application can also be implemented without using these details. In addition, in order to avoid confusion or blurring the focus of the present application, some specific details will be omitted in the description. It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other unless there is a conflict.

[0028] It should be noted that in this specification, similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.

[0029] The following explains the terms that may appear in the embodiments of the present application.

[0030] In the description of the embodiments of this application, "and / or" is simply a description of the association relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent three situations: A exists alone, A and B exist simultaneously, and B exists alone. In addition, the character " / " in this document generally indicates that the related objects are in an "or" relationship. When there are multiple related objects, it can represent the selection of one, two, or all of them.

[0031] In the description of the embodiments of the present application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," "outer," and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings. These terms are intended only to facilitate the description of the embodiments of the present application and to simplify the description. They do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore should not be construed as limiting the embodiments of the present application. In addition, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0032] In the description of the embodiments of the present application, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in the embodiments of the present application based on the specific circumstances.

[0033] Definitions such as parallel, perpendicular, and identical (e.g., same length, same width, etc.) mentioned in the embodiments of this application are based on current state-of-the-art technology and are not strictly mathematical definitions. Two parallel or perpendicular components may have a deviation within a predetermined angular range. In one embodiment, the predetermined angle is 10°, and the deviation may be within a range of ±5°, for example.

[0034] In order to make the objectives, technical solutions and advantages of the embodiments of the present application clearer, the implementation methods of the present application will be further described in detail below with reference to the accompanying drawings.

[0035] It should be noted that embodiments of the present application provide a fixing device and a semiconductor device incorporating the fixing device. For example, the fixing device of embodiments of the present application can be used in a photolithography machine to secure a mask. It can also be used in other semiconductor devices, such as wafer processing equipment, to secure wafers.

[0036] See also Figure 1 , Figure 1 It is a structural diagram of a fixing device 1 provided in an embodiment of the present application. It should be noted that, for the sake of convenience, the fixing device 1 is used as an example of a mask fixing device in each embodiment and the accompanying drawings of the present application. For example, the fixing device 1 is used to fix the mask 01. In other embodiments, the fixing device can also be used to fix the wafer. In addition, the x-axis direction (an example of the fifth direction in each embodiment of the present application), the y-axis direction (an example of the fourth direction in each embodiment of the present application) and the z-axis direction (an example of the first direction in the present application) in each illustration of the present application are perpendicular to each other, wherein the z-axis direction can be the gravity direction of the fixing device 1, and the x-axis direction can be the feed / discharge direction of the mask 01, for example Figure 1 In the figure, the negative direction of the x-axis can be the feeding direction of the mask 01. The Rx, Ry and Rz directions represent the rotation directions around the x-axis, y-axis and z-axis respectively.

[0037] like Figure 1As shown, the fixture 1 includes a clamping assembly 10, a support assembly 20, and a rotation adjustment mechanism 30. The clamping assembly 10 is used to clamp the mask 01. The support assembly 20 is used to support the mask 01 along the z-axis, allowing the mask 01 to be placed horizontally. In this case, the mask 01 is parallel to the xy plane (an example of the first plane in this application). The support assembly 20 can also be used to adjust the angle between the mask 01 and the xy plane, changing the angle of the mask 01 in the Rx and Ry directions, hereinafter referred to as the Rx angle and the Ry angle. The rotation adjustment mechanism 30 includes a drive assembly, which is used to drive the mask 01 to rotate about the z-axis. In other words, the rotation axis of the mask 01 is parallel to the z-axis, so that the drive assembly can be used to change the angle of the mask 01 in the Rz direction, hereinafter referred to as the Rz angle.

[0038] It can be understood that the fixing device 1 provided in the embodiment of the present application can adjust the Rx angle and Ry angle of the mask 01 through the support component 20, and adjust the Rz angle of the mask 01 through the rotation adjustment mechanism 30, thereby realizing multi-angle adjustment of the spatial posture of the mask 01 and accurately controlling the fixing angle of the mask 01.

[0039] In some embodiments, such as Figure 1 As shown, the fixture 1 further includes a first support plate 40 and a second support plate 50, which are spaced apart along the z-axis. The rotation adjustment mechanism 30 is disposed on the first support plate 40, and the support assembly 20 and the clamping assembly 10 are disposed on the second support plate 50. Furthermore, the drive assembly of the rotation adjustment mechanism 30 is connected to the second support plate 50 and is configured to drive the second support plate 50 to rotate about a first axis parallel to the z-axis. This can drive the rotation of the mask 01 supported by the support assembly 20 on the second support plate 50.

[0040] In some embodiments, a guide mechanism is provided between the first support plate 40 and the second support plate 50 ( Figure 1 (Not shown) The guide mechanism is used to provide a rotation center (e.g., the structural center of the guide mechanism) and to provide rotational guidance for the second support plate 50, allowing the second support plate 50 to rotate the reticle 01 about the structural center of the guide mechanism. In other words, the rotation axis of the reticle 01 passes through the structural center of the guide mechanism. It will be appreciated that the guide mechanism allows the second support plate 50 to rotate stably, preventing the rotation center of the reticle 01 from shifting, thereby ensuring the accuracy of the Rz angle adjustment mechanism 30 for adjusting the reticle 01. The specific structure of the guide mechanism will be described in detail below and is not detailed here.

[0041] Figure 2 Schematic diagrams of some structures of the fixing device 1 in some embodiments are shown.

[0042] like Figure 2 As shown, in some embodiments, the fixing device 1 further includes a limiting assembly 60, and the limiting assembly 60 includes at least two limiting columns. Figure 2 In the example, the limiting assembly 60 includes a first limiting post 601, a second limiting post 602, a third limiting post 603, and a fourth limiting post 604. In other embodiments, the limiting assembly 60 may include a greater or fewer limiting posts. For example, the limiting assembly 60 may include only the first limiting post 601 and the second limiting post 602. It will be understood that the reticle 01 is positioned between the limiting assembly 60 and the clamping assembly 10, and the position of the reticle 01 is restricted by the clamping assembly 10 and the limiting assembly 60. Thus, the first limiting post 601, the second limiting post 602, the third limiting post 603, and the fourth limiting post 604 are positioned around the reticle 01.

[0043] Continue reading Figure 2 In some embodiments, the limiting posts are arranged on the second support plate 50. For example, the second support plate 50 is provided with a number of limiting post fixing grooves corresponding to the number of the limiting posts, that is, the number of limiting post fixing grooves can be more than or equal to the number of limiting posts. In this way, the position of the limiting posts can be adjusted according to the actual size or shape of the mask 01 to achieve the limiting effect on the mask 01 of different sizes or shapes.

[0044] It should be noted that this application does not limit the specific structure or shape of the limiting post and the limiting post fixing groove. For example, the limiting post and the limiting post fixing groove may be cylindrical, conical, or square. The limiting post may also be designed with threads to allow the limiting post to be height-adjustable in the z-axis direction.

[0045] Continue reading Figure 2 In some embodiments, taking a square reticle 01 as an example, first limiting posts 601 and second limiting posts 602 are spaced apart on the second support plate 50 along the x-axis (the direction along which the edge of the reticle 01 extends), and the clamping assembly 10 and the first limiting posts 601 / second limiting posts 602 are respectively disposed at two opposing edge portions of the second support plate 50 along the y-axis. Thus, the reticle 01 can be placed between the clamping assembly 10 and the first limiting posts 601 / second limiting posts 602. The clamping assembly 10 abuts against the edge of the reticle 01, holding the reticle 01 in the positive y-axis direction. The first limiting posts 601 and second limiting posts 602 abut against the edge of the reticle 01, holding the reticle 01 in the negative y-axis direction, thereby achieving clamping of the reticle 01.

[0046] Continue reading Figure 2In some embodiments, the third limiting posts 603 and the fourth limiting posts 604 are spaced apart on the second support plate 50 along the y-axis direction (the direction in which the other edge of the mask 01 extends), and the third limiting posts 603 and the fourth limiting posts 604 are arranged on the left side (negative direction of the x-axis) of the second support plate 50. In this way, when the mask 01 is fed from the right side (positive direction of the x-axis) of the second support plate 50, the third limiting posts 603 and the fourth limiting posts 604 can limit the movement of the mask 01 in the negative direction of the x-axis, which can assist in stopping the feeding.

[0047] Alternatively, in other embodiments, the fixing device 1 does not need to be provided with a limiting component 60, and the mask 01 is clamped by the clamping component 10. For example, the clamping component 10 may be provided with an adsorption component, and the mask 01 is clamped by directly adsorbing the adsorption component.

[0048] The specific structure of the clamping assembly 10 according to the embodiment of the present application is introduced below. Figure 3A Schematic diagrams of the structure of the clamping assembly 10 in some embodiments are shown.

[0049] like Figure 3A As shown, in some embodiments, the clamping assembly 10 includes a first clamping base 101a, which includes a bottom wall 1011 and side walls 1012. The bottom wall 1011 extends along the x-axis and the y-axis, and the side walls 1012 extend along the z-axis and the y-axis. The first clamping base 101a is generally L-shaped.

[0050] The clamping assembly 10 further includes a first motor 102, a swing arm 103, and an elastic member 104, disposed on a first clamping base 101a. The first motor 102 is disposed near the side wall 1012 and is connected to the bottom wall 1011 or the side wall 1012 via a fixing member. A propulsion structure is provided on the side of the first motor 102 facing the negative x-axis direction to provide propulsion force in the negative x-axis direction.

[0051] The swing arm 103 includes a first arm 1031 and a second arm 1032, wherein the first arm 1031 extends along the y1 direction (an example of the second direction of the present application), and the second arm 1032 extends along the x1 direction (an example of the third direction of the present application), and one end of the first arm 1031 along the y1 direction is connected to one end of the second arm 1032 along the x1 direction. In other words, the swing arm 103 has an L-shaped structure. The y1 direction intersects with the x1 direction; the y1 direction can be parallel to the y-axis direction, or it can also intersect with the y-axis direction; the x1 direction can be parallel to the x-axis direction, or it can also intersect with the x-axis direction. A rotary bearing is provided at the connection between the first arm 1031 and the second arm 1032 ( Figure 3AThe swing arm 103 includes a first arm 1031 and a second arm 1032 (not shown) and a bearing cover plate 105. The rotary bearing is connected to the first clamping base 101a via a fixing member 106. Thus, the swing arm 103 can rotate around the fixing member 106 under the action of the rotary bearing, with the connection between the first arm 1031 and the second arm 1032 as the fulcrum, that is, rotate clockwise or counterclockwise around the z-axis.

[0052] The elastic member 104 and the second arm 1032 are respectively arranged on opposite sides of the first motor 102 along the y-axis direction. The other end of the first arm 1031 along the y1 direction is connected to one end of the elastic member 104 along its elastic direction, and the other end of the elastic member 104 along its elastic direction is fixedly connected to the first clamping base 101a. The other end of the second arm 1032 along the x1 direction is provided with a flexible contact 107, which is connected to the first clamping base 101a. Figure 2 As shown, the flexible contact 107 is used to abut against the edge of the mask 01 .

[0053] It can be understood that the first motor 102 can push the first arm 1031 along the x-axis. Under the driving force of the first motor 102, the first arm 1031 rotates clockwise about the z-axis with the connection between the first arm 1031 and the second arm 1032 as the fulcrum. At the same time, the second arm 1032 is driven to rotate clockwise about the z-axis with the connection between the first arm 1031 and the second arm 1032 as the fulcrum. At this time, the flexible contact 107 at one end of the second arm 1032 moves away from the reticle 01, releasing the reticle 01. Because the first arm 1031 is pushed in the negative direction of the x-axis by the first motor 102, the elastic member 104 at one end of the first arm 1031 is stretched to a stretched state. When the first motor 102 withdraws the pushing force on the first arm 1031 in the second driving state, the elastic member 104 will recover from the stretched state to the retracted state. At this time, the first arm 1031 rotates counterclockwise around the z-axis with the connection between the first arm 1031 and the second arm 1032 as the fulcrum under the action of the retraction force of the elastic member 104, and at the same time drives the second arm 1032 to rotate counterclockwise around the z-axis with the connection between the first arm 1031 and the second arm 1032 as the fulcrum. At this time, the flexible contact 107 at one end of the second arm 1032 moves toward the mask 01 and abuts against the edge of the mask 01, thereby clamping the mask 01.

[0054] In some embodiments, the driving structure of the first motor 102 can be extended and retracted along the x-axis to drive the first arm 1031 . The first motor 102 does not need to be provided with a guide rail, which can simplify the structure of the clamping assembly 10 .

[0055] In some embodiments, such as Figure 3AAs shown, the elastic member 104 is connected to the side wall 1012 of the first clamping base 101a through the fixing seat 108. The fixing seat 108 is provided with a waist-shaped through hole 1081, and one end of the elastic member 104 is connected to the side wall 1012 through the waist-shaped through hole 1081 provided by the fixing member. The length direction of the waist-shaped through hole 1081 is substantially the same as the elastic direction of the elastic member 104. In this way, the tension of the elastic member 104 can be adjusted by adjusting the fixed position of one end of the elastic member 104, thereby adjusting the clamping force of the mask 01. It should be noted that the embodiment of the present application does not limit the number of waist-shaped through holes 1081. For example, the fixing seat 108 may be provided with two or more waist-shaped through holes 1081, and the two or more waist-shaped through holes are arranged at intervals along the z-axis direction.

[0056] In some embodiments, the elastic member 104 is replaceable. By replacing the elastic member 104 with a different structure, length, or type, the rigidity of the elastic member 104 can be adjusted, thereby adjusting the tension of the elastic member 104 and thus adjusting the clamping force of the mask 01. For example, the elastic member 104 can include a spring or a rubber rope.

[0057] Based on the above embodiment, the mask 01 can be clamped through the coordinated action of the first motor 102, the swing arm 103 and the elastic member 104, and the clamping force of the mask 01 can be adjusted by changing the fixed position of the elastic member 104 or the rigidity of the elastic member 104, which helps to improve the clamping accuracy of the fixing device 1 on the mask 01.

[0058] In some embodiments, such as Figure 3A As shown, the angle between the x1 direction and the y1 direction is in the range of 95 degrees to 100 degrees. It can be understood that within the aforementioned angle range, the first motor 102 can drive the swing arm 103 with a smaller stroke.

[0059] In some embodiments, such as Figure 3A As shown, the x1 direction forms an acute angle with the x-axis direction, and the end of the second arm 1032 connected to the first arm 1031 along the x1 direction is closer to the first motor 102 than the other end of the second arm 1032 along the x1 direction. This allows the flexible contact 107 at the other end of the second arm 1032 along the x1 direction to be closer to the reticle 01. The second arm 1032 only needs to rotate a smaller angle to clamp the reticle 01. Accordingly, the first motor 102 has a smaller stroke to push the first arm 1031, which helps improve the overall clamping efficiency of the clamping assembly 10 for the reticle 01.

[0060] In some embodiments, such as Figure 3AAs shown, the y1 direction forms an acute angle with the y-axis direction, and the end of the first arm 1031 connected to the second arm 1032 along the y1 direction is farther away from the first motor 102 than the other end of the first arm 1031 along the y1 direction. This allows the first arm 1031 to be closer to the first motor 102, reducing the travel of the first motor 102 in pushing the first arm 1031, thereby improving the overall clamping efficiency of the clamping assembly 10 for the reticle 01.

[0061] In some embodiments, the flexible contact 107 is located on the perpendicular bisector of the line connecting the first limiting post 601 and the second limiting post 602. This allows the pressure applied by the flexible contact 107 on one side of the reticle 01 and the pressure applied by the first limiting post 601 and the second limiting post 602 on the other side of the reticle 01 to converge toward the center line, thereby preventing the reticle 01 from shifting due to uneven clamping force on both sides.

[0062] In some embodiments, the clamping assembly 10 further includes a photosensor disposed on the first clamping base 101a. The photosensor is configured to detect the drive state of the first motor 102. For example, when the clamping assembly 10 releases the reticle 01, the photosensor detects that the first motor 102 is in the first drive state; when the clamping assembly 10 clamps the reticle 01, the photosensor detects that the first motor is in the second drive state. In this manner, whether the clamping assembly 10 is clamping the reticle 01 can be determined based on the different drive states of the first motor 102 detected by the photosensor, facilitating quick understanding of the operating status.

[0063] For example, the photoelectric sensor may be a photoelectric switch. Figure 3A As shown, the clamping assembly 10 includes a first photoelectric switch 1091, which is connected to the bottom wall 1011 via a fixing member. When the first motor 102 is in the first driving state (corresponding to the extended position of the first motor 102), the first photoelectric switch 1091 can be triggered to respond. Specifically, the first arm 1031 can be provided with a first extension 10311. When the first motor 102 is in the first driving state, the first arm 1031 is pushed to the extreme position, so that the first extension 10311 is detected by the first photoelectric switch 1091, triggering the first photoelectric switch 1091 to respond.

[0064] The clamping assembly 10 further includes a second photoelectric switch 1092, which is connected to the side wall 1012 via a fixing member. The first motor 102 is in the second driving state (corresponding to the return to zero position of the first motor 102), which can trigger a response from the second photoelectric switch 1092. Specifically, Figure 3B As shown, Figure 3BSchematic diagram of the clamping assembly 10 from another perspective. The first motor 102 is provided with a second extension portion 1021, so that when the first motor 102 is in the second driving state, the second extension portion 1021 can be detected by the second photoelectric switch 1092, triggering a response from the second photoelectric switch 1092.

[0065] It should be noted that the embodiments of the present application do not limit the number, structure, or placement of the photoelectric switches. For example, in other examples, the clamping assembly 10 may include only the first photoelectric switch 1091. When the first photoelectric switch 1091 is triggered, the clamping assembly 10 releases the reticle 01; when the first photoelectric switch 1091 is not triggered, the clamping assembly 10 clamps the reticle 01.

[0066] The following combination Figure 4 The structures of the clamping assembly 10 in other embodiments are introduced. Figure 4 Partial structural schematic diagrams of the fixing device 1 in other embodiments are shown.

[0067] like Figure 4 As shown, in some embodiments, the clamping assembly 10 includes a second clamping base 101b, a second motor 110, a force sensor 111, and a flexible contact (not shown) disposed on the second clamping base 101b. The force sensor 111 and the flexible contact are both disposed at the output end of the second motor 110. The second motor 110 is used to drive the flexible contact along the y-axis to abut the edge of the reticle 01. The force sensor 111 is used to detect the thrust of the flexible contact on the reticle 01 to control the driving force of the second motor 110.

[0068] I understand. Figure 4 The clamping assembly 10 of the illustrated embodiment utilizes the second motor 110 to directly push the mask 01 to achieve clamping of the mask 01 , and has a simple structure and low cost; moreover, the force sensor 111 can detect the thrust of the second motor 110 , thereby being able to accurately control the clamping force on the mask 01 .

[0069] Figure 4 The middle limiting assembly 60 can refer to the description of the above embodiment and will not be repeated here.

[0070] In some embodiments, such as Figure 2 or Figure 4 As shown, the fixing device 1 may further include a mask detector 70 , which is disposed on the second support plate 50 and is used to detect whether the mask 01 is placed.

[0071] The specific structure of the guide mechanism in the embodiment of the present application is introduced below.

[0072] In some embodiments, the guide mechanism includes a first guide portion and a second guide portion, Figure 1 As shown, the first guide portion is arranged on the side of the first support plate 40 facing the second support plate 50, and the second guide portion is arranged on the side of the second support plate 50 facing the first support plate 40. The first guide portion 80 and the second guide portion are nested and cooperated with each other to guide the rotation of the mask 01.

[0073] The following combination Figure 5 An embodiment of a guide mechanism is introduced. Figure 5 Schematic diagrams of some structures of the fixing device 1 in some embodiments are shown.

[0074] like Figure 5 As shown, in some embodiments, the first guide portion 80 includes at least two arc-shaped protrusions. Figure 5 In the example, the first guide portion 80 includes a first curved protrusion 801, a second curved protrusion 802, and a third curved protrusion 803. In other embodiments, the first guide portion 80 may include a greater or fewer number of curved protrusions. The first curved protrusion 801, the second curved protrusion 802, and the third curved protrusion 803 have identical structures and share a center of symmetry (point P). Thus, the first curved protrusion 801, the second curved protrusion 802, and the third curved protrusion 803 are circumferentially distributed on the first support plate 40 at 120° angles relative to each other. In other words, point P is the geometric center of the pattern formed by sequentially connecting the first curved protrusion 801, the second curved protrusion 802, and the third curved protrusion 803. It will be understood that the rotation axis (first axis) of the second support plate 50 passes through point P. That is, the first guide portion 80 is used to form the rotation axis of the second support plate 50, thereby guiding the rotation of the second support plate 50.

[0075] It can be understood that the size of the arc-shaped protrusion along its circumferential direction (for example, N direction) can be used to limit the rotation angle of the second support plate 50. The present application does not limit the size of the arc-shaped protrusion along its circumferential direction.

[0076] Accordingly, in some embodiments, the second guide portion includes at least two arcuate grooves matching the number of the first guide portion 80. For example, the second guide portion includes three arcuate grooves, each having the same structure and a center of symmetry, and distributed 120° circumferentially on the second support plate 50. It will be understood that the geometric center of the pattern formed by sequentially connecting the three arcuate grooves is located in the same z-axis direction as point P.

[0077] It should be noted that, in other embodiments, the second guide portion may adopt the structure of the first guide portion 80 in the above embodiment, and the first guide portion may adopt the structure of the second guide portion in the above embodiment.

[0078] Figure 6 Schematic diagrams of the structures of the guide mechanisms in other embodiments are shown.

[0079] like Figure 6 As shown, in some embodiments, the guide mechanism includes a circular shaft ring 90, which includes an inner ring 901 and an outer ring 902 that are nested with each other, wherein the outer ring 902 is fixedly connected to the first support plate 40, and the inner ring 901 is connected to the second support plate 50, and the inner ring 901 can rotate around a first axis relative to the outer ring 902, wherein the first axis passes through the center point Q of the circular shaft ring.

[0080] Based on the specific structure of the guide mechanism provided in the above two embodiments, under the drive of the rotation adjustment mechanism 30, the second support plate 50 can rotate stably, so that the rotation center of the mask 01 is not easily offset, and the adjustment accuracy of the Rz angle of the mask 01 by the rotation adjustment mechanism 30 can be ensured.

[0081] Continue reading Figure 5 , combined with Figure 5 An embodiment of the rotation adjustment mechanism 30 of the present application is introduced.

[0082] like Figure 5 As shown, in some embodiments, the rotation adjustment mechanism 30 includes a drive assembly and a transmission assembly, which are connected to each other. The drive assembly includes a third motor 311 and a motor support base 312. The third motor 311 is fixed to the motor support base 312 via a fixing member. The motor support base 312 is fixed to the first support plate 40 via a fixing member to support the third motor 311.

[0083] The transmission assembly includes a first transmission unit 320, which includes a first coupling 321a, a lead screw 322, a lead screw holder 323, and a lead screw support 324. The lead screw holder 323 and the lead screw support 324 are each secured to the first support plate 40 via a fixing member. The lead screw 322 extends along the y-axis, and its ends along the y-axis are rotationally connected to the lead screw holder 323 and the lead screw support 324, respectively. The first coupling 321a is used to connect the third motor 311 and the lead screw 322, thereby transmitting the torque of the third motor 311 to the lead screw 322.

[0084] The transmission assembly also includes a second transmission unit 330, which includes a slider 331, a first guide rail 332, a second guide rail 333, and a connector 334. The slider 331 is inserted through the lead screw 322 and is capable of moving along the y-axis. The first guide rail 332 and the second guide rail 333 are respectively provided on opposite sides of the slider 331 along the z-axis. The first guide rail 332 guides the slider 331 along the y-axis. Exemplarily, the first guide rail 332 includes two sets of cross roller guides, which are fixed to the first support plate 40 via fixing members and connected to the slider 331, guiding the movement of the slider 331.

[0085] One end of the connecting member 334 is slidably connected to the second guide rail 333, and the other end is connected to the second support plate 50. The second guide rail 333 guides the connecting member 334 in the x-axis direction. Exemplarily, the second guide rail 333 includes a set of cross roller guides connected to the slider 331 through a fixing member.

[0086] It can be understood that the third motor 311 is connected to the first transmission part 320, and is used to drive the first transmission part 320 to rotate so as to drive the second transmission part 330 to move. The second transmission part 330 is connected to the second support plate 50, and is used to drive the second support plate 50 to rotate. In this embodiment, the third motor 311 drives the lead screw 322 to rotate, thereby driving the slider 331 to move along the y-axis direction. At the same time, the second guide rail 333 pulls the second support plate 50 along the direction defined by the guide mechanism (for example, Figure 5 The linear motion is converted into rotational motion through the transmission component, thereby realizing the Rz angle adjustment of the mask 01.

[0087] In some embodiments, such as Figure 5 or Figure 6 As shown, the fixing device 1 further includes an arc grating mechanism 100, which is arranged on the first support plate 40. For example, Figure 5 As shown, the arc-shaped grating mechanism 100 can be positioned between two arc-shaped protrusions (e.g., the second arc-shaped protrusion 802 and the third arc-shaped protrusion 803). The arc-shaped grating mechanism 100 includes an arc-shaped tape holder 1001, an arc-shaped grating 1002, and a grating reader 1003. The grating reader 1003 is fixed to the side of the second support plate 50 facing the first support plate 40. It rotates with the second support plate 50 and measures the rotation angle of the second support plate 50 and the reticle 01.

[0088] The following combination Figure 7 Another embodiment of the rotation adjustment mechanism 30 of the present application is introduced.

[0089] Figure 7 The rotation adjustment mechanism 30 is shown with Figure 5 The difference of the rotation adjustment mechanism 30 shown is the difference in the transmission assembly. The driving assembly and the clamping assembly 10 can refer to the description of the above embodiment and will not be repeated here.

[0090] like Figure 7As shown, in some embodiments, the first transmission portion 320 includes a second coupling 321b, a worm 325, a worm fixing seat 326, and a worm support seat 327. The worm fixing seat 326 and the worm support seat 327 are each fixed to the first support plate 40 via a fixing member to support the worm 325. The worm 325 extends along the y-axis, and its ends along the y-axis are rotationally connected to the worm fixing seat 326 and the worm support seat 327, respectively. The second coupling 321b is used to connect the third motor 311 and the worm 325 to transmit the torque of the third motor 311 to the worm 325.

[0091] The second transmission portion includes a worm gear 335 . The worm gear 335 and the worm 325 are meshed with each other, and the worm gear 335 is fixedly connected to the second support plate 50 .

[0092] It can be understood that in this embodiment, the third motor 311 drives the worm 325 to rotate, and the rotation of the worm 325 drives the worm wheel 335 to rotate and then pulls the second support plate 50 to rotate along the Rz direction, thereby achieving Rz angle adjustment of the mask 01.

[0093] The following combination Figure 8 Another embodiment of the rotation adjustment mechanism 30 of the present application is introduced.

[0094] like Figure 8 As shown, in some embodiments, the driving assembly of the rotation adjustment mechanism 30 includes a reducer 313, which is disposed on the first support plate 40 via a fixing member. Exemplarily, the reducer 313 includes an upper shaft and a lower shaft, wherein the lower shaft has an adjustment hole, through which the lower shaft of the reducer 313 can be manually rotated, thereby driving the upper shaft of the reducer 313 to rotate.

[0095] The transmission assembly of the rotation adjustment mechanism 30 includes a first gear 328 and a second gear 329, wherein the first gear 328 is smaller than the second gear 329. The first gear 328 and the second gear 329 are meshed with each other, and the first gear 328 is connected to the upper shaft of the reducer 313, and the second gear 329 is connected to the second support plate 50. In the embodiment of the present application, the size of the gears may refer to the addendum diameter.

[0096] It can be understood that the reducer 313 is used to transmit the driving force it receives to the first gear 328. For example, the lower shaft of the reducer 313 is adjusted manually so that the lower shaft drives the upper shaft of the reducer 313 to rotate, thereby driving the first gear 328 to rotate. The first gear 328 pulls the second gear 329 to rotate so that the second support plate 50 and the mask 01 on the second support plate 50 rotate along the Rz direction, thereby realizing the Rz angle adjustment of the mask 01.

[0097] I understand. Figure 8 The illustrated rotation adjustment mechanism 30 has a simple structure and low cost. Furthermore, because the upper and lower shafts of the reducer 313 are relatively small, driving the larger second gear 329 from the lower shaft of the reducer 313 is more labor-efficient. Furthermore, the second gear 329 cannot reversely drive the reducer 313, thus providing a self-locking effect and preventing the reticle 01 from rotating in the Rz direction.

[0098] It should be noted that Figure 8 The middle clamping assembly 10 can refer to the description of the above related embodiments and will not be repeated here.

[0099] The specific structure of the support assembly 20 of the embodiment of the present application is introduced below. Figure 9 Schematic diagrams of the split structure of some parts of the fixing device 1 in some embodiments are shown.

[0100] like Figure 9 As shown, in some embodiments, the support assembly 20 includes at least two piezoelectric screws 201 , and the at least two piezoelectric screws 201 are spaced apart and arranged on the second support plate 50 . Figure 9 Taking the four piezoelectric screws 201 as an example, the four piezoelectric screws 201 are evenly distributed corresponding to the four corners of the mask 01. Among them, one end of each piezoelectric screw 201 along the z-axis direction is connected to the second support plate 50, and the other end is used to support the mask 01, and there is point contact between the piezoelectric screw 201 and the mask 01. Exemplarily, one end of each piezoelectric screw 201 along the z-axis direction is provided with a hemispherical ejector pin 202, and point contact can be achieved by supporting the mask 01 through the spherical surface of the hemispherical ejector pin 202. In this way, by concentrating the supporting force in a small area through point contact, the deformation of the mask 01 surface can be significantly reduced, the flatness of the mask 01 can be ensured, and warping or micro-strain caused by surface contact can be avoided.

[0101] It can be understood that the four piezoelectric screws 201 are arranged in pairs and can cooperate with each other to adjust the Rx and Ry angles of the mask 01. For example, by Figure 9 The piezoelectric screws 201 at the upper left and lower left corners can raise or lower the left side 011 of the mask 01 along the z-axis direction to adjust the Ry angle of the mask 01. Figure 9 The piezoelectric screws 201 at the lower left and lower right corners can raise or lower the bottom edge 012 of the mask 01 along the z-axis direction to adjust the Rx angle of the mask 01 .

[0102] The following combination Figure 10 Another embodiment of the support assembly 20 is introduced. Figure 10 Schematic diagrams of the structures of the fixing devices 1 in other embodiments are shown.

[0103] like Figure 10As shown, in some embodiments, the support assembly 20 includes at least two support blocks 203 , and the at least two support blocks 203 are spaced apart and arranged on the second support plate 50 . Figure 10 Taking the four support blocks 203 as an example, the four support blocks 203 are evenly distributed corresponding to the four corners of the mask 01. Each support block 203 is connected to the second support plate 50 at one end along the z-axis, and the other end is used to support the mask 01, and there is point contact between the support block 203 and the mask 01. For example, each support block 203 has a raised surface 203a at one end along the z-axis, and the support block 203 supports the mask 01 through the raised surface 203a to achieve point contact. In this way, by concentrating the supporting force in a small area through point contact, the deformation of the mask 01 surface can be significantly reduced, the flatness of the mask 01 can be ensured, and warping or micro-strain caused by surface contact can be avoided.

[0104] It should be noted that the present application does not limit the shape of the convex surface 203a, which may be a hemispherical surface, an arc-shaped surface, etc.

[0105] Continue reading Figure 10 In some embodiments, a spacer (not shown) is provided between at least one support block 203 and the second support plate 50. The number and / or thickness of the spacer is adjustable, so that the angle between the mask 01 and the xy plane is adjustable. By adjusting the number and / or thickness of the spacer, the Rx and Ry angles of the mask 01 can be adjusted. For example, Figure 10 Spacers are added between the support blocks 203 at the upper left corner and the lower left corner and the second support plate 50, so that the left side 011 of the mask 01 can be raised or lowered along the z-axis direction to adjust the Ry angle of the mask 01. Figure 10 Spacers are added between the support blocks 203 at the lower left and lower right corners and the second support plate 50 to raise or lower the bottom edge 012 of the mask 01 along the z-axis to adjust the Rx angle of the mask 01 .

[0106] In some embodiments, part of the support block 203 (eg Figure 10 The support blocks 203 at the upper left and lower left corners of the center support mask 01 have abutment portions 2031 at their ends. These abutment portions 2031 extend in the positive z-axis direction relative to the raised surface 203a. It is understood that this portion of the support blocks 203 is used to abut the mask 01 in the positive x-axis direction, thus assisting in stopping the feed when the mask 01 moves in the negative x-axis direction. Thus, Figure 10 The supporting assembly 20 of the illustrated embodiment can both support the mask 01 and limit the position of the mask 01 , and has a simple structure and low cost.

[0107] Reference Figure 2 The embodiment shown adopts Figure 10In the case of the support assembly 20 shown, Figure 2 The illustrated limiting assembly 60 may not include the third limiting post 603 and the fourth limiting post 604 . Figure 10 The middle clamping assembly 10 and the rotation adjustment mechanism 30 can refer to the description of the above related embodiments and will not be repeated here.

[0108] The following combination Figure 11 The specific structure of the fixing device 1 in other embodiments of the present application is introduced.

[0109] Figure 11 The fixing device 1 of the embodiment shown is Figure 8 The fixing device 1 of the embodiment shown is different mainly in that: Figure 11 The fixing device 1 of the illustrated embodiment eliminates the second support plate 50 , and the clamping assembly 10 and the support assembly 20 are directly disposed on the second gear 329 and rotate along with the second gear 329 . Figure 11 The middle clamping assembly 10 and the rotation adjustment mechanism 30 can refer to the description of the relevant embodiments above, and will not be repeated here.

[0110] It can be understood that in this embodiment, the support assembly 20 and the clamping assembly 10 are both arranged on the end face of the second gear 329, and the reducer 313 is used to transmit the driving force it receives to the first gear 328, so that the first gear 328 rotates and drives the second gear 329 and the mask 01 on the second gear 329 to rotate along the Rz direction, thereby realizing the Rz angle adjustment of the mask 01.

[0111] like Figure 11 As shown, in this embodiment, the fixing device 1 also includes at least one gear limiting assembly 200, and at least one gear limiting assembly 200 is arranged on the first support plate 40 along the edge of the second gear 329 to limit the position of the second gear 329 in the z-axis direction. Figure 11 In the figure, four gear limiting assemblies 200 are taken as an example. The four gear limiting assemblies are distributed on the first support plate 40 at 90 degrees to each other.

[0112] Exemplarily, the gear limit assembly 200 includes a limit bearing 210, a cantilever 220, and a ball screw 230. The limit bearing 210 is disposed at the end of the cantilever 220 extending in the z-axis direction and is connected to the first support plate 40. The limit bearing guides the second gear 329 and is used to limit the position of the second gear 329 in the xy plane. The other end of the cantilever 220 extending in the z-axis direction has an extension arm that extends in the xy plane. The ball screw 230 is disposed on the side of the extension arm facing the first support plate 40. The ball screw 230's spherical structure is used to vertically (z-axis direction) compress the mask 01 to limit the displacement of the second gear 329 in the z-axis direction.

[0113] I understand. Figure 11 The illustrated fixture 1 does not require a second support plate 50; the clamping assembly 10 and the support assembly 20 are directly mounted on the rotation adjustment mechanism 30. Furthermore, the rotation adjustment mechanism 30 can directly drive the reticle 01 to rotate along the Rz direction, eliminating the need for a guide mechanism or an arc-shaped grating mechanism. This reduces the number of components stacked in the z-axis direction and the height of the device, resulting in a smaller overall footprint, a simpler structure, and lower costs for the fixture 1.

[0114] In addition, the fixing device 1 provided in the above embodiments of the present application can be used in a vacuum environment or a magnetically sensitive environment. In some embodiments, each mechanism component in the fixing device 1 is made of a material suitable for a vacuum environment or a non-magnetic material.

[0115] For example, to accommodate vacuum environments, the materials of the first support plate 40 and the second support plate 50 in the above embodiments include, but are not limited to, at least one of titanium alloy, aluminum alloy, stainless steel, zirconium oxide, and aluminum oxide. To accommodate magnetically sensitive environments, the first support plate 40 and the second support plate 50 may be made of materials other than stainless steel.

[0116] For example, to adapt to vacuum environments, the material of each limiting post in the limiting assembly 60 in the above embodiment includes, but is not limited to, at least one of titanium alloy, aluminum alloy, stainless steel, zirconium oxide, and aluminum oxide. To adapt to magnetically sensitive environments, the limiting post can be made of other materials besides stainless steel.

[0117] For example, the material of the flexible contact in the above embodiment may be polyetheretherketone (PEEK) or polytetrafluoroethylene.

[0118] For example, the material of the elastic member 104 in the above embodiment may be stainless steel or titanium alloy.

[0119] For example, the material of the circular collar 90 / the first guide rail 332 / the second guide rail 333 in the above embodiment may be stainless steel.

[0120] For example, the material of the piezoelectric screw 201 in the above embodiment may be beryllium copper.

[0121] For example, the material of the hemispherical ejector pin 202 in the above embodiment may be zirconium oxide or aluminum oxide.

[0122] For example, the material of the limiting bearing 210 in the above embodiment may be zirconia or stainless steel.

[0123] For example, the material of the spherical mechanism of the ball screw 230 in the above embodiment may be zirconia, and the material of the spring for pushing the spherical mechanism in the ball screw 230 may be stainless steel or titanium alloy.

[0124] In addition, it should be noted that the fixing parts mentioned in the embodiments of the present application may include but are not limited to any one of bolts, nuts, pins, and rivets.

[0125] Although the present application has been shown and described with reference to certain preferred embodiments thereof, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the application.

Claims

1. A fixing device, characterized in that: include: A clamping assembly (10), the clamping assembly (10) being used to clamp a mask or a wafer; the clamping assembly (10) comprising a flexible contact, the flexible contact being used to abut against an edge of the mask or the wafer; A support assembly (20), the support assembly (20) being used to support the mask or wafer along a first direction, and to adjust an angle between the mask or wafer and a first plane, wherein the first plane is perpendicular to the first direction; A rotation adjustment mechanism (30), the rotation adjustment mechanism (30) comprising a drive assembly, wherein the drive assembly is used to drive the mask or wafer to rotate, and the rotation axis of the mask or wafer is parallel to the first direction.

2. The fixing device according to claim 1, characterized in that The clamping assembly (10) comprises a first clamping base (101a), and a first motor (102), a swing arm (103), and an elastic member (104) arranged on the first clamping base (101a); wherein: The swing arm (103) comprises a first arm (1031) extending along a second direction and a second arm (1032) extending along a third direction, one end of the first arm (1031) along the second direction is connected to one end of the second arm (1032) along the third direction, the other end of the first arm (1031) along the second direction is connected to one end of the elastic member along its elastic direction, and the other end of the elastic member (104) along its elastic direction is fixedly connected to the first clamping base (101a); the flexible contact is provided at the other end of the second arm (1032) along the third direction; the second direction intersects with the third direction and is perpendicular to the first direction; A rotary bearing is provided at the connection between the first arm (1031) and the second arm (1032), and the rotary bearing is connected to the first clamping base (101a); The elastic member (104) and the second arm (1032) are respectively arranged on opposite sides of the first motor (102) along the fourth direction. The first motor (102) is used to push the first arm (1031) along the fifth direction. The first direction, the fourth direction and the fifth direction are perpendicular to each other.

3. The fixing device according to claim 2, characterized in that The third direction forms an acute angle with the fifth direction, and one end of the second arm (1032) connected to the first arm (1031) along the third direction is closer to the first motor (102) than the other end of the second arm (1032) along the third direction.

4. The fixing device according to claim 2, characterized in that The clamping assembly (10) further comprises a photoelectric sensor arranged on the first clamping base (101a), the photoelectric sensor being used to detect the driving state of the first motor (102); Wherein, corresponding to the situation where the clamping assembly (10) releases the mask or wafer, the photoelectric sensor detects that the first motor (102) is in the first driving state; corresponding to the situation where the clamping assembly (10) clamps the mask or wafer, the photoelectric sensor detects that the first motor (102) is in the second driving state.

5. The fixing device according to claim 1, characterized in that: The clamping assembly (10) comprises a second clamping base (101b), and a second motor (110) and a force sensor (111) arranged on the second clamping base (101b); wherein: The flexible contact is connected to the output end of the second motor (110), and the second motor (110) is used to drive the flexible contact to abut against the edge of the mask or wafer along a fourth direction; the fourth direction is perpendicular to the first direction; The force sensor (111) is used to detect the thrust of the flexible contact on the mask or wafer, so as to control the driving force output by the second motor (110).

6. The fixing device according to any one of claims 2 to 5, characterized in that: Also included is a limit assembly (60); The limiting assembly (60) is at least partially spaced apart from the clamping assembly (10) along the fourth direction, and the mask or wafer is placed between the clamping assembly (10) and the limiting assembly (60); wherein the clamping assembly (10) is used to abut against the edge of the mask or wafer to limit the mask or wafer between the clamping assembly (10) and the limiting assembly (60).

7. The fixing device according to claim 6, characterized in that The limiting assembly (60) comprises at least two limiting columns, and the at least two limiting columns comprise a first limiting column (601) and a second limiting column (602); The flexible contact is located on a perpendicular bisector connecting the first limiting column (601) and the second limiting column (602).

8. The fixing device according to claim 1, characterized in that The device further comprises a first support plate (40) and a second support plate (50), wherein the second support plate (50) and the first support plate (40) are spaced apart along the first direction, the rotation adjustment mechanism (30) is arranged on the first support plate (40), and the support assembly (20) and the clamping assembly (10) are arranged on the second support plate (50); and: The driving assembly is connected to the second support plate (50) and is used to drive the second support plate (50) to rotate around a first axis, wherein the first axis is parallel to the first direction; A guide mechanism is provided between the first support plate (40) and the second support plate (50), and the guide mechanism is used to guide the rotation of the second support plate (50).

9. The fixing device according to claim 8, characterized in that The support assembly (20) comprises at least two piezoelectric screws (201), and the at least two piezoelectric screws (201) are arranged at intervals on the second support plate (50), wherein: One end of each piezoelectric screw (201) along the first direction is connected to the second support plate (50), and the other end is used to support the mask or wafer, and each piezoelectric screw (201) is in point contact with the mask or wafer.

10. The fixing device according to claim 8, characterized in that The support assembly (20) comprises at least two support blocks (203), and the at least two support blocks (203) are arranged at intervals on the second support plate (50), wherein: One end of each support block (203) along the first direction is connected to the second support plate (50), and the other end is used to support the mask or wafer, and there is point contact between the support block (203) and the mask or wafer; A gasket is provided between at least one of the at least two support blocks (203) and the second support plate (50), and the number and / or thickness of the gasket is adjustable, so that the angle between the mask or wafer and the first plane is adjustable.

11. The fixing device according to claim 8, characterized in that The guide mechanism comprises a first guide portion (80) and a second guide portion, wherein the first guide portion (80) is arranged on a side of the first support plate (40) facing the second support plate (50), and the second guide portion is arranged on a side of the second support plate (50) facing the first support plate (40), and the first guide portion (80) and the second guide portion are nested and matched with each other; One of the first guide portion (80) and the second guide portion includes at least two arc-shaped protrusions distributed along its circumference, and the other guide portion includes at least two arc-shaped grooves distributed along its circumference, and the first axis passes through the geometric center of a figure obtained by sequentially connecting the positions of the at least two arc-shaped protrusions, and / or passes through the geometric center of a figure obtained by sequentially connecting the positions of the at least two arc-shaped grooves.

12. The fixing device according to claim 8, characterized in that The guide mechanism comprises a circular shaft ring (90), the circular shaft ring (90) comprising an inner ring (901) and an outer ring (902) nested with each other, the outer ring (902) being connected to the first support plate (40), and the inner ring (901) being connected to the second support plate (50); Wherein, the inner ring (901) is capable of rotating around the first axis relative to the outer ring (902).

13. The fixing device according to claim 8, characterized in that The driving assembly includes a third motor (311), and the rotation adjustment mechanism (30) also includes a transmission assembly, wherein the transmission assembly includes a first transmission part (320) and a second transmission part (330); The third motor (311) is connected to the first transmission part (320) and is used to drive the first transmission part (320) to rotate so as to drive the second transmission part (330) to move; The second transmission part (330) is connected to the second support plate (50) and is used to drive the second support plate (50) to rotate.

14. The fixing device according to claim 13, characterized in that The first transmission part (320) comprises a first coupling (321a), a screw (322), a screw fixing seat (323) and a screw support seat (324); the first coupling (321a) is used to connect the third motor (311) and the screw (322); the screw (322) extends along a fourth direction, and the two ends of the screw (322) along the fourth direction are rotatably connected to the screw fixing seat (323) and the screw support seat (324); The second transmission part (330) comprises a slider (331), a first guide rail (332), a second guide rail (333) and a connecting member (334); the slider (331) is provided through the lead screw (322) and is capable of moving along the fourth direction on the lead screw (322); The first guide rail (332) and the second guide rail (333) are respectively arranged on opposite sides of the slider (331) along the first direction, and the first guide rail (332) guides the slider (331) in the fourth direction; one end of the connecting member (334) is connected to the second guide rail (333), and the other end is connected to the second support plate (50), and the second guide rail (333) guides the connecting member (334) in the fifth direction, and the fourth direction, the fifth direction and the first direction are perpendicular to each other.

15. The fixing device according to claim 13, characterized in that The first transmission part (320) includes a second coupling (321b), a worm (325), a worm fixing seat (326), and a worm support seat (327); the second coupling (321b) is used to connect the third motor (311) and the worm (325); the worm (325) extends along a second direction, and the two ends of the worm (325) along the second direction are respectively rotatably connected to the worm fixing seat (326) and the worm support seat (327); the second direction is perpendicular to the first direction; The second transmission part (330) includes a worm wheel (335), the worm wheel (335) and the worm (325) are meshed with each other, and the worm wheel (335) is fixedly connected to the second support plate (50).

16. The fixing device according to claim 8, characterized in that The driving assembly includes a speed reducer (313), and the rotation adjustment mechanism (30) also includes a transmission assembly, wherein the transmission assembly includes a first gear (328) and a second gear (329), wherein the size of the first gear (328) is smaller than the size of the second gear (329), the first gear (328) and the second gear (329) are meshed with each other, and the second gear (329) is connected to the second support plate (50); The reducer (313) is used to transmit the driving force received by it to the first gear (328), so that the first gear (328) rotates to drive the second gear (329) and the second support plate (50) to rotate.

17. The fixing device according to claim 8, characterized in that The driving assembly includes a speed reducer (313), and the rotation adjustment mechanism (30) also includes a transmission assembly, wherein the transmission assembly includes a first gear (328) and a second gear (329), wherein the size of the first gear (328) is smaller than the size of the second gear, and the first gear (328) and the second gear (329) are meshed with each other; and: The support assembly (20) and the clamping assembly (10) are both arranged on the end surface of the second gear (329), and the reducer (313) is used to transmit the driving force received by it to the first gear (328), so that the first gear (328) rotates to drive the second gear (329) to rotate; The fixing device further comprises at least one gear limiting assembly, which is arranged on the first support plate (40) at intervals along the edge of the second gear (329) and is used to limit the position of the second gear (329) in the first direction.

18. The fixing device according to claim 7, characterized in that The material of the flexible contact includes at least one of polyetheretherketone and polytetrafluoroethylene; And / or, the material of the limiting column in the limiting assembly (60) includes at least one of titanium alloy, aluminum alloy, stainless steel, zirconium oxide, and aluminum oxide.

19. The fixing device according to claim 8, characterized in that The material of the first support plate (40) and / or the second support plate (50) includes at least one of titanium alloy, aluminum alloy, stainless steel, zirconium oxide, and aluminum oxide.

20. A semiconductor device, characterized in that: The fixing device comprises the fixing device according to any one of claims 1 to 19.

Images